Substrate transfer robot and substrate transfer robot control method

Abstract

To provide a substrate transfer robot and a substrate transfer robot control method, capable of precisely adjusting the relative tilt between a substrate and a hand.SOLUTION: A substrate transfer robot 100 comprises: a substrate holding hand 10 for holding a substrate W; a detection section 40 for detecting a detection fixture 200 that simulates the substrate W placed on a substrate placement section 110 and arranged on the substrate holding hand 10; a tilt mechanism 30 for adjusting the inclination of the substrate holding hand 10; and a control section 50 adjusting the relative tilt between the detection fixture 200 and the substrate holding hand 10 by operating the tilt mechanism 30 based on the detection results of the detection fixture 200 obtained by the detection section 40.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present disclosure relates to a substrate transfer robot and a method for controlling the substrate transfer robot. [Background technology]

[0002] Conventionally, substrate transport robots are known. For example, Patent Document 1 describes a robot for transporting substrates. This robot includes a robot hand that holds and transports substrates, a tilt mechanism that adjusts the attitude of the robot hand, and a mapping sensor that detects substrates to obtain the attitude of substrates stored in a substrate storage unit. This robot obtains the attitude of the substrate based on the detection result of the substrate by the mapping sensor, and adjusts the attitude of the robot hand using the tilt mechanism so that it is parallel to the obtained attitude of the substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-43558 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the robot described in Patent Document 1 uses a substrate to detect its posture, which limits the parts that can be detected. In this case, it may be difficult to accurately adjust the relative tilt between the substrate and the hand. Therefore, it is desired to be able to accurately adjust the relative tilt between the substrate and the robot hand.

[0005] This disclosure has been made to solve the above-mentioned problems, and one object of this disclosure is to provide a substrate transport robot and a method for controlling a substrate transport robot that are capable of accurately adjusting the relative tilt between the substrate and the hand. [Means for solving the problem]

[0006] A substrate transport robot according to a first aspect of this disclosure includes a hand that holds a substrate, a detection unit that is disposed on the hand and detects a tilt detection jig that resembles a substrate placed on a substrate placement unit, a tilt adjustment mechanism that directly or indirectly adjusts the tilt of the hand, and a control unit that adjusts the relative tilt between the tilt detection jig and the hand by operating the tilt adjustment mechanism based on the detection result of the tilt detection jig by the detection unit.

[0007] As described above, the substrate transport robot according to a first aspect of this disclosure includes a control unit that adjusts the relative tilt between the tilt detection jig and the hand by operating the tilt adjustment mechanism based on the detection result of the tilt detection jig by the detection unit. Because the tilt detection jig is used to detect tilt, the shape of the substrate does not limit the detectable portion, unlike when a substrate is used to detect tilt. As a result, the relative tilt between the tilt detection jig and the hand can be detected with high accuracy, and the relative tilt between the tilt detection jig and the hand can be adjusted with high accuracy. This allows the relative tilt between the substrate and the hand to be adjusted with high accuracy.

[0008] A control method for a substrate transport robot according to a second aspect of this disclosure is a control method for a substrate transport robot having a hand that holds a substrate, and includes detecting a tilt detection jig that simulates a substrate placed on a substrate placement section, and adjusting the relative tilt between the tilt detection jig and the hand by operating a tilt adjustment mechanism that directly or indirectly adjusts the tilt of the hand based on the detection result of the tilt detection jig.

[0009] A control method for a substrate transport robot according to a second aspect of this disclosure includes adjusting the relative tilt between the tilt detection jig and the hand by operating a tilt adjustment mechanism that directly or indirectly adjusts the tilt of the hand based on the detection result of the tilt detection jig, as described above. Because the tilt detection jig is used to detect tilt, the detectable portion is not limited by the shape of the substrate, unlike when a substrate is used to detect tilt. As a result, the relative tilt between the tilt detection jig and the hand can be detected with high accuracy, and the relative tilt between the tilt detection jig and the hand can be adjusted with high accuracy. This provides a control method for a substrate transport robot that can accurately adjust the relative tilt between the substrate and the hand. [Effects of the Invention]

[0010] According to the present disclosure, the relative tilt between the substrate and the hand can be adjusted with high precision. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a perspective view showing an overall configuration of a substrate transport robot according to an embodiment; [Figure 2] FIG. 1 is a perspective view illustrating a tilt mechanism according to one embodiment. [Figure 3] FIG. 2 is a cross-sectional view of a tilt mechanism according to an embodiment taken along the vertical direction. [Figure 4] FIG. 2 is a perspective view for explaining a detection unit in the substrate holding hand according to the embodiment. [Figure 5] FIG. 2 is a block diagram showing a control configuration of a substrate transport robot according to an embodiment. [Figure 6] 10A and 10B are schematic diagrams for explaining substrate transfer positions in a substrate transfer operation by a substrate transfer robot according to an embodiment. [Figure 7] FIG. 10 is a perspective view illustrating detection of a detection jig by a detection unit according to an embodiment. [Figure 8] FIG. 1 is a perspective view showing a detection jig according to an embodiment. [Figure 9]10A and 10B are schematic diagrams for explaining adjustment of the relative tilt between the detection jig and the substrate holding hand in the roll direction according to one embodiment. [Figure 10] 10A and 10B are schematic diagrams for explaining adjustment of the relative tilt between the detection jig and the substrate holding hand in the pitch direction according to one embodiment. [Figure 11] FIG. 1 is a schematic diagram (1) for explaining teaching of coordinates of a substrate holding hand according to an embodiment. [Figure 12] FIG. 10 is a schematic diagram (2) for explaining teaching of coordinates of a substrate holding hand according to an embodiment. [Figure 13] FIG. 10 is a schematic diagram (3) for explaining the teaching of coordinates of a substrate holding hand according to an embodiment. [Figure 14] FIG. 10 is a perspective view showing a detection jig according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings.

[0013] The configuration of a substrate transfer robot 100 according to one embodiment will be described with reference to Figures 1 to 13. In the following, two directions that are orthogonal to each other in a horizontal plane are referred to as the X direction and the Y direction, respectively. Furthermore, the up-down direction that is orthogonal to the horizontal plane (XY plane) is referred to as the Z direction.

[0014] (Configuration of substrate transport robot) 1, the substrate transfer robot 100 is disposed in a heat treatment apparatus 101. The substrate transfer robot 100 transfers a substrate W between a FOUP 102 and a boat 103 in the heat treatment apparatus 101.

[0015] The FOUP 102 is a substrate storage container on which multiple substrates W are placed and stored. The boat 103 is disposed in the heat treatment apparatus 101, and multiple substrates W are placed thereon. In the heat treatment apparatus 101, heat treatment is performed on the multiple substrates W placed on the boat 103. The boat 103 has columnar holding members 103a that hold the multiple substrates W aligned along the Z direction, which is the vertical direction. Three holding members 103a are disposed on the boat 103 so as to extend along the Z direction. The peripheral portions of the multiple substrates W are held by each of the multiple claws disposed on the holding members 103a, so that the multiple substrates W are aligned along the Z direction in the boat 103 with their main surfaces facing each other. The substrates W are semiconductor wafers having a disk-like shape. The substrates W are formed of, for example, silicon, germanium, or quartz glass.

[0016] The substrate transfer robot 100 includes a substrate holding hand 10, a drive mechanism 20, and a control unit 50. The drive mechanism 20 includes a blade holding unit 21, a horizontal movement mechanism 22, a rotation mechanism 23, an attachment unit 24, and a lifting mechanism 25. In the substrate transfer robot 100 according to this embodiment, a tilt mechanism 30 is disposed in the drive mechanism 20. The substrate holding hand 10 and the tilt mechanism 30 are examples of a hand and a tilt adjustment mechanism, respectively.

[0017] The substrate holding hand 10 has multiple blade members 11 each having a bifurcated shape with a tip that is split into two. The substrate holding hand 10 holds substrates W using the multiple bifurcated blade members 11. In the substrate holding hand 10, the blade members 11 are arranged side by side in the Z direction, which is the vertical direction. The multiple blade members 11 may be, for example, 2, 5, 6, 13, or N, where N is an integer greater than or equal to 2. Each of the multiple blade members 11 holds one substrate W. The substrate holding hand 10 is a passive hand that holds substrates W by placing the substrate W on the upper surface of the bifurcated, plate-like blade member 11 in the Z direction. The substrate holding hand 10 moves by the operation of a drive mechanism 20.

[0018] The blade holding unit 21 is connected to the base ends of the multiple blade members 11, opposite the two split tip ends. The horizontal movement mechanism 22 has a support 22a extending horizontally. The blade holding unit 21 is attached to the support 22a of the horizontal movement mechanism 22 and moves horizontally relative to the support 22a. The horizontal movement mechanism 22 moves the substrate holding hand 10 together with the blade holding unit 21 in the horizontal direction. The horizontal movement mechanism 22 alternates between moving all of the multiple blade members 11 of the substrate holding hand 10 horizontally and moving the lowest one of the multiple blade members 11 in the horizontal direction. The rotation mechanism 23 has a rotation shaft 23a extending in the Z direction. The support 22a is attached to the rotation shaft 23a. The rotation mechanism 23 rotates the substrate holding hand 10 together with the support 22a and the blade holding unit 21 in the Z direction around the rotation shaft 23a. The rotary shaft 23a is rotated by a motor 23b, which will be described later.

[0019] The tilt mechanism 30 indirectly adjusts the tilt of the substrate holding hand 10. The tilt mechanism 30 is disposed between the support 22a and the mounting portion 24. The tilt mechanism 30 tilts the attitude of the substrate holding hand 10 by changing the tilt of the support 22a of the horizontal movement mechanism 22, the blade holding portion 21, and the substrate holding hand 10 relative to the mounting portion 24. That is, the tilt mechanism 30 changes the tilt of the substrate holding hand 10 by changing the tilt of the support 22a and the blade holding portion 21. In addition, a rotation shaft portion 23a is attached to the tilt mechanism 30. The lifting mechanism 25 has a support 25a extending in the Z direction, and the mounting portion 24 is attached to the support 25a. The lifting mechanism 25 moves the mounting portion 24 in the Z direction. That is, the lifting mechanism 25 lifts and lowers the substrate holding hand 10 in the Z direction together with the mounting portion 24, tilt mechanism 30, rotation mechanism 23, horizontal movement mechanism 22 and blade holding portion 21.

[0020] <Tilt mechanism details> As shown in FIG. 2, the tilt mechanism 30 has a plate-shaped lower member 31 arranged below the mounting portion 24 in the Z direction, and an upper member 32 arranged opposite the lower member 31 in the vertical Z direction. The lower member 31 is attached to the mounting portion 24. A support 22a is attached to the upper member 32 via a rotation shaft portion 23a. The support 22a rotates around the rotation shaft portion 23a as its rotation axis. The tilt mechanism 30 also has three spherical plain bearings 33, 34, and 35 arranged between the lower member 31 and the upper member 32 at different positions when viewed from the vertical Z direction.

[0021] The spherical plain bearing 35 is disposed at the tip of an imaginary center line L that extends from the base end to the tip through the center in the X direction, which is the width direction of the tilt mechanism 30. The spherical plain bearings 33 and 34 are each disposed closer to the base end of the substrate transfer robot 100 than the spherical plain bearing 35. Furthermore, the spherical plain bearings 33 and 34 are each disposed so as to be symmetrical with respect to the imaginary center line L as the axis of symmetry when viewed from the Z direction. The spherical plain bearings 33 and 34 are disposed at the same height position, higher than the spherical plain bearing 35.

[0022] 3, spherical plain bearing 35 has inner ring 35a and outer ring 35b. Outer ring 35b of spherical plain bearing 35 is attached to lower member 31 via intermediate member 35c, and inner ring 35a is attached to upper member 32 via bolt 35d. Tilt mechanism 30 has three spherical plain bearings 33, 34, and two height position adjustment mechanisms 36 and 37 arranged corresponding to two of spherical plain bearings 33 and 34, respectively, of spherical plain bearings 35. Note that no height position adjustment mechanism is arranged for spherical plain bearing 35.

[0023] The spherical plain bearing 33 has an inner ring 33a and an outer ring 33b. The inner ring 33a of the spherical plain bearing 33 is attached to the lower member 31 via an intermediate member 33c and a height position adjustment mechanism 36, and the outer ring 33b is attached to the upper member 32. The height position adjustment mechanism 36 has a male thread member 36a and a female thread member 36b. The male thread member 36a is threadedly engaged with the female thread member 36b and is rotated by a motor 36c (described later). The female thread member 36b moves in the Z direction as the male thread member 36a rotates. The female thread member 36b is fitted into an inner hole of the inner ring 33a and attached to the upper member 32 via the spherical plain bearing 33. The height position of the upper member 32 is changed as the female thread member 36b moves in the Z direction.

[0024] The spherical plain bearing 34 has a configuration similar to that of the spherical plain bearing 33. Specifically, the spherical plain bearing 34 has an inner ring 34a and an outer ring 34b. The inner ring 34a of the spherical plain bearing 34 is attached to the lower member 31 via an intermediate member 34c and a height position adjustment mechanism 37, and the outer ring 34b is attached to the upper member 32. The height position adjustment mechanism 37 has a configuration similar to that of the height position adjustment mechanism 36. Specifically, the height position adjustment mechanism 37 has a male screw member 37a and a female screw member 37b. The male screw member 37a is threadedly engaged with the female screw member 37b and is rotated by a motor 37c (described later). The female screw member 37b moves in the Z direction as the male screw member 37a rotates. The female screw member 37b is fitted into an inner hole of the inner ring 34a and attached to the upper member 32 via the spherical plain bearing 34. By moving the female screw member 37b in the Z direction, the height position of the upper member 32 is changed.

[0025] The tilt of upper member 32 relative to lower member 31 is changed by changing the height position of upper member 32 using at least one of height position adjustment mechanisms 36 and 37. Changing the tilt of upper member 32 relative to lower member 31 changes the tilt of support 22a relative to mounting portion 24, thereby tilting the attitude of substrate holding hand 10. Furthermore, when tilting upper member 32 by changing the height position of upper member 32, upper member 32 is tilted while the outer ring of spherical plain bearing 33, 34, or 35 slides on the surface of the inner ring, so upper member 32 can be tilted without being distorted.

[0026] <Configuration of the detection unit and control unit> As shown in FIG. 4, the substrate transfer robot 100 includes a detection unit 40. The detection unit 40 is disposed in the substrate holding hand 10 and is a photoelectric sensor including an irradiation unit 41 that irradiates detection light LT and a light-receiving unit 42 that detects the detection light LT irradiated by the irradiation unit 41. The irradiation unit 41 has a light-emitting element such as a laser diode or an LED (Light-Emitting Diode). The light-receiving unit 42 has a light-receiving element such as a CCD (Charge Coupled Device) image sensor, a CMOS (Complementary Metal Oxide Semiconductor) image sensor, or a photodiode. The irradiation unit 41 and the light-receiving unit 42 of the detection unit 40 are disposed at each of the two forked tip portions of the bifurcated blade member 11 in the substrate holding hand 10. The detection unit 40 is a mapping sensor that detects an object by detecting whether the detection light LT irradiated from one tip portion to the other of the bifurcated blade member 11 in the substrate holding hand 10 is blocked. The detection unit 40 detects the substrate W placed in each of the FOUP 102 and the boat 103 during the substrate W transport operation. In this embodiment, the detection unit 40 detects a detection jig 200 (described later) placed in each of the FOUP 102 and the boat 103. The detection unit 40 is disposed on the lowest blade member 11 of the plurality of blade members 11 arranged in the vertical direction in the substrate holding hand 10. Note that FIG. 4 illustrates only the lowest one of the plurality of blade members 11 in the substrate holding hand 10. The detection unit 40 outputs a detection signal indicating the detection result of whether or not the detection light LT has been blocked to the control unit 50.

[0027] As shown in FIG. 5 , the control unit 50 controls the operation of each unit of the substrate transfer robot 100. Specifically, the control unit 50 controls the horizontal movement mechanism 22, the rotation mechanism 23, the lifting mechanism 25, and the tilt mechanism 30 to control the transfer operation of the substrate transfer robot 100. Specifically, the horizontal movement mechanism 22, the rotation mechanism 23, the lifting mechanism 25, the height position adjustment mechanism 36, and the height position adjustment mechanism 37 are respectively provided with motors 22b, 23b, 25b, 36c, and 37c as drive sources. The control unit 50 controls the motors 22b, 23b, 25b, 36c, and 37c to control the transfer operation of the substrate W by the substrate transfer robot 100. Each of the motors 22b, 23b, 25b, 36c, and 37c is a servo motor. The control unit 50 also acquires a detection signal from the detection unit 40. The control unit 50 may be configured to control each part of the substrate transfer robot 100 as a single integrated controller (such as control of the transfer operation of the substrate transfer robot 100, control of the tilt mechanism 30, and control of the detection unit 40), or may be configured to control each part of the substrate transfer robot 100 as a plurality of separate controllers. When the control unit 50 controls each part of the substrate transfer robot 100 as a plurality of separate controllers, communication may occur between the plurality of controllers.

[0028] The control unit 50 includes a calculation device such as a CPU (Central Processing Unit), memories such as RAM (Random Access Memory) and ROM (Read Only Memory), and a storage device such as a hard disk. The control unit 50 executes control processing using the calculation device based on programs and parameters stored in the storage device. The control unit 50 also includes a main CPU that controls the overall operation of the substrate transport robot 100, and a servo CPU that controls the current supplied to drive sources including motors 22b, 23b, 25b, 36c, and 37c.

[0029] The control unit 50 causes the substrate transfer robot 100 to transfer the substrate W between the FOUP 102 and the boat 103. For example, the control unit 50 causes the substrate transfer robot 100 to transfer the unprocessed substrate W from the FOUP 102 to the boat 103. Alternatively, for example, the control unit 50 causes the substrate transfer robot 100 to transfer the processed substrate W from the boat 103 to the FOUP 102. At this time, as shown in FIG. 6 , the control unit 50 causes the substrate holding hand 10 to enter the substrate placement unit 110, which is the FOUP 102 or the boat 103, and positions it at the substrate transfer position P1 to transfer the substrate W to or receive the substrate W from the substrate placement unit 110. The substrate transfer position P1 is a position where the substrate W is transferred to or received from the substrate placement unit 110, and is located below the substrate W placed on the substrate placement unit 110.

[0030] (Tilt adjustment) Here, in the transport operation of the substrate W, if there is a relative tilt between the substrate W placed on the FOUP 102 or boat 103 and the substrate holding hand 10, the substrate W may not be properly held by the substrate holding hand 10 due to the relative tilt between the substrate W and the substrate holding hand 10. For this reason, it is desirable to adjust the relative tilt between the substrate W and the substrate holding hand 10.

[0031] 7, the control unit 50 causes the detection unit 40 to detect a detection jig 200 that resembles the substrate W placed on the substrate placement unit 110, which is the FOUP 102 or boat 103. Then, based on the detection result of the detection jig 200 by the detection unit 40, the control unit 50 operates the tilt mechanism 30 to adjust the relative tilt between the detection jig 200 and the substrate holding hand 10. This adjusts the relative tilt between the substrate W and the substrate holding hand 10. For example, when the substrate transport robot 100 is installed or during periodic maintenance, the control unit 50 causes the detection unit 40 to detect the detection jig 200, and adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10. The detection jig 200 is an example of a tilt detection jig.

[0032] The control unit 50 causes the detection unit 40 to detect the detection jig 200 placed on the substrate placing unit 110 when the substrate holding hand 10 enters the substrate placing unit 110 and is positioned near the substrate transfer position P1. The state in which the substrate holding hand 10 is positioned near the substrate transfer position P1 refers to, for example, a state in which the substrate holding hand 10 is offset in the vertical direction from the substrate transfer position P1 within a predetermined distance (for example, the radius of the substrate W (e.g., 150 mm)). The control unit 50 also causes the detection unit 40 to detect the detection jig 200 placed on the substrate placing unit 110 after its rotational position around the Z direction, which is the vertical direction, has been adjusted. The detection jig 200 is placed on the substrate placing unit 110 after its rotational position around the Z direction has been adjusted so that the longitudinal direction of a pitch tilt detection target portion 203, which will be described later, is aligned with the A direction, which is the front-to-rear direction of the substrate holding hand 10. The detection jig 200 may include a positioning portion that determines the rotational position of the detection jig 200 around the Z direction. The positioning portion may be an elastic body such as rubber, a protrusion, a notch, or the like. In this case, when placing the detection jig 200 on the substrate placement part 110, the user abuts the positioning portion against the substrate placement part 110 to determine the rotational position of the detection jig 200 around the Z direction. This allows the user to place the detection jig 200 on the substrate placement part 110 with its rotational position around the Z direction adjusted. Furthermore, for example, if an aligner is present, the rotational position of the detection jig 200 around the Z direction may be adjusted using the aligner. In this case, the detection jig 200, whose rotational position around the Z direction has been adjusted using the aligner, is transferred to the substrate placement part 110 by the substrate transfer robot 100. This allows the detection jig 200 to be placed on the substrate placement part 110 with its rotational position around the Z direction adjusted by the substrate transfer robot 100.

[0033] Based on the detection result of the detection jig 200 by the detection unit 40, the control unit 50 adjusts the tilt of the upper member 32 relative to the lower member 31 using the height position adjustment mechanisms 36 and 37, thereby adjusting the relative tilt between the detection jig 200 and the substrate holding hand 10. Furthermore, based on the detection result of the detection jig 200 by the detection unit 40, the control unit 50 adjusts the tilt of the blade holding unit 21 by operating the tilt mechanism 30, thereby adjusting the relative tilt between the detection jig 200 and the substrate holding hand 10. Furthermore, based on the detection result of the detection jig 200 by the detection unit 40, the control unit 50 adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10 in the R direction, which is the roll direction around the A direction, which is the front-to-back direction of the substrate holding hand 10, and in the P direction, which is the pitch direction around the B direction, which is the left-to-right direction of the substrate holding hand 10, by operating the tilt mechanism 30.

[0034] As shown in Figure 8, the detection jig 200 includes a thin plate-like detection jig main body 201 simulating the substrate W, a roll tilt detection part 202, and a pitch tilt detection part 203. The roll tilt detection part 202 is arranged on the detection jig main body 201 to adjust the tilt in the R direction, which is the roll direction of the substrate holding hand 10. The roll tilt detection part 202 is a plate-like member that is flat in the Z direction and has a predetermined thickness in the Z direction. The upper and lower surfaces of the roll tilt detection part 202 are parallel to the placement surface, which is the lower surface of the detection jig main body 201.

[0035] The pitch tilt detection target portion 203 is disposed on the detection jig main body 201 to adjust the tilt of the substrate holding hand 10 in the P direction, which is the pitch direction. The pitch tilt detection target portion 203 has a flat plate shape extending in the B direction and extends in the A direction when its rotational position around the Z direction, which is the vertical direction, is adjusted. The pitch tilt detection target portion 203 is disposed at the center of the detection jig main body 201 in the B direction. The upper surface of the pitch tilt detection target portion 203 is parallel to the placement surface, which is the lower surface of the detection jig main body 201. The pitch tilt detection target portion 203 includes a first plate-shaped portion 203a, a second plate-shaped portion 203b, and a third plate-shaped portion 203c. The first plate-shaped portion 203a, the second plate-shaped portion 203b, and the third plate-shaped portion 203c are disposed in this order from rear to front in the A direction. The roll tilt detection portion 202 is disposed so as to straddle the upper surfaces of the second plate-shaped portion 203b and the third plate-shaped portion 203c. An opening 203d is formed between the second plate-shaped portion 203b and the third plate-shaped portion 203c in the A direction and at a position overlapping with the roll tilt detection portion 202 in the Z direction so as to allow the detection light LT to pass through. A transparent member that allows the detection light LT to pass through may be attached to the opening 203d.

[0036] The detection jig 200 also includes a vertical coordinate teaching detection portion 204 and a front-rear, left-right coordinate teaching detection portion 205 for teaching the coordinates of the substrate holding hand 10, which will be described later. The vertical coordinate teaching detection portion 204 is provided for teaching coordinates in the Z direction, which is the up-down direction of the substrate holding hand 10. The vertical coordinate teaching detection portion 204 is formed at the tip of the detection jig main body 201. The front-rear, left-right coordinate teaching detection portion 205 is arranged on the detection jig main body 201 for teaching coordinates in the A direction, which is the front-rear direction, and the B direction, which is the left-right direction, of the substrate holding hand 10. The front-rear, left-right coordinate teaching detection portion 205 is pin-shaped and extends in the Z direction. The front-rear, left-right coordinate teaching detection portion 205 is arranged in the center of the detection jig main body 201. Note that the details of teaching the coordinates of the substrate holding hand 10 will be described later.

[0037] <Roll direction tilt adjustment> As shown in Figure 9, the control unit 50 adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10 in the roll direction by operating the tilt mechanism 30 based on the detection result of the roll tilt detection portion 202 by the detection unit 40.

[0038] 9(A), first, the control unit 50 causes the detection unit 40 to detect the tip of the detection jig main body 201. Specifically, the control unit 50 causes the detection unit 40 to irradiate the detection light LT while moving the detection unit 40 in the Z direction, which is the vertical direction. At the timing when the detection light LT passes through the height of the tip of the detection jig main body 201, the detection light LT is blocked by the tip of the detection jig main body 201. Therefore, the control unit 50 acquires the height of the tip of the detection jig main body 201 based on the timing when the detection light LT is blocked.

[0039] If the control unit 50 moves the detection unit 40 in the Z direction, which is the vertical direction, while irradiating the detection light LT by the detection unit 40 and fails to detect the tip of the detection jig main body 201, then the control unit 50 moves the detection unit 40 forward in the A direction. Then, at the position where the detection unit 40 has been moved forward in the A direction, the control unit 50 moves the detection unit 40 again in the Z direction, which is the vertical direction, while irradiating the detection light LT by the detection unit 40. These operations are repeated until the tip of the detection jig main body 201 is detected.

[0040] Next, as shown in FIG. 9(B), the control unit 50 causes the detection unit 40 to detect the opening 203d. Specifically, the control unit 50 moves the detection unit 40 to the height of the pitch tilt detection portion 203 based on the height of the tip of the detection jig main body 201. Then, the control unit 50 moves the detection unit 40 forward in direction A while irradiating the detection light LT by the detection unit 40. When the detection light LT passes through the position of the opening 203d, the detection light LT is detected continuously for a certain period of time. Therefore, the control unit 50 identifies the position of the opening 203d based on the timing at which the detection light LT is detected. Since the position of the opening 203d indicates the position of the roll tilt detection portion 202, the position of the roll tilt detection portion 202 is identified by identifying the position of the opening 203d. In this way, the pitch tilt detection portion 203 also functions as an identification unit for identifying the position of the roll tilt detection portion 202.

[0041] 9(C), the control unit 50 causes the detection unit 40 to detect the roll tilt detection portion 202. Specifically, the control unit 50 causes the detection unit 40 to irradiate the detection light LT, while moving the detection unit 40 upward in the Z direction from the position of the opening 203d. At the timing when the detection light LT passes through the height of the roll tilt detection portion 202, the detection light LT is blocked by the roll tilt detection portion 202. Therefore, the control unit 50 obtains the thickness of the roll tilt detection portion 202 in the Z direction based on the timing when the detection light LT is blocked.

[0042] The control unit 50 then repeatedly causes the detection unit 40 to detect the roll tilt detection portion 202 while changing the tilt of the substrate holding hand 10 in the R direction, which is the roll direction, using the tilt mechanism 30. That is, the control unit 50 repeatedly moves the detection unit 40 in the Z direction to acquire the Z direction thickness of the roll tilt detection portion 202 while changing the tilt of the substrate holding hand 10 in the R direction using the tilt mechanism 30. In this way, the control unit 50 adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10 in the R direction so that the thickness of the roll tilt detection portion 202 acquired based on the detection result of the roll tilt detection portion 202 by the detection unit 40 becomes a predetermined thickness.

[0043] When the substrate holding hand 10 is not parallel to the detection jig 200 in the R direction, a thickness greater than a predetermined thickness, which is the original thickness of the roll tilt detection portion 202, is acquired as the thickness of the roll tilt detection portion 202. On the other hand, when the substrate holding hand 10 is parallel to the detection jig 200 in the R direction, a predetermined thickness, which is the original thickness of the roll tilt detection portion 202, is acquired as the thickness of the roll tilt detection portion 202. Therefore, by adjusting the relative tilt between the detection jig 200 and the substrate holding hand 10 in the R direction so that the thickness of the roll tilt detection portion 202 becomes the predetermined thickness, it is possible to make the substrate holding hand 10 and the detection jig 200 parallel to each other in the R direction.

[0044] In detecting the roll tilt detection target portion 202, the control unit 50 may repeatedly cause the detection unit 40 to detect the roll tilt detection target portion 202 while changing the tilt of the substrate holding hand 10 in the R direction to a plurality of predetermined tilt positions using the tilt mechanism 30. Alternatively, the control unit 50 may estimate the relative tilt between the detection jig 200 and the substrate holding hand 10 in the R direction based on the detection result of the roll tilt detection target portion 202 by the detection unit 40, and change the tilt of the substrate holding hand 10 in the R direction using the tilt mechanism 30 based on the estimated relative tilt between the detection jig 200 and the substrate holding hand 10 in the R direction. In other words, the control unit 50 may repeatedly cause the detection unit 40 to detect the roll tilt detection target portion 202 while changing the tilt of the substrate holding hand 10 in the R direction to the estimated tilt position using the tilt mechanism 30.

[0045] Note that, for example, if the control unit 50 cannot determine the position of the detection jig 200 because the coordinates of the substrate holding hand 10 have not been taught, the control unit 50 performs the operations shown in Figures 9(A) and (B) to identify the position of the roll tilt detection portion 202. However, if the control unit 50 can determine the position of the detection jig 200, the control unit 50 may identify the position of the roll tilt detection portion 202 and perform the operation shown in Figure 9(C) without performing the operations shown in Figures 9(A) and (B).

[0046] <Adjusting the pitch direction tilt> As shown in Figure 10, the control unit 50 adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10 in the pitch direction, i.e., direction P, by operating the tilt mechanism 30 based on the detection result of the pitch tilt detection portion 203 by the detection unit 40.

[0047] As shown in Fig. 10(A), first, the control unit 50 causes the detection unit 40 to detect the tip of the detection jig main body 201. This operation is similar to the operation shown in Fig. 9(A), so a detailed description will be omitted. The control unit 50 acquires the height of the tip of the detection jig main body 201, similar to the operation shown in Fig. 9.

[0048] Next, as shown in FIG. 10(B), the control unit 50 causes the detection unit 40 to detect the front and rear ends of the pitch tilt detection target portion 203. The front end of the pitch tilt detection target portion 203 is the front end of the third plate-shaped portion 203c, and the rear end of the pitch tilt detection target portion 203 is the rear end of the first plate-shaped portion 203a. Specifically, the control unit 50 moves the detection unit 40 to the height of the pitch tilt detection target portion 203 based on the height of the tip end of the detection jig main body 201. Then, the control unit 50 moves the detection unit 40 forward in direction A while irradiating the detection light LT from the detection unit 40. When the detection light LT passes the position of the rear end of the pitch tilt detection target portion 203, the detection light LT is blocked by the rear end of the pitch tilt detection target portion 203. Therefore, the control unit 50 identifies the position of the rear end of the pitch tilt detection target portion 203 based on the timing at which the detection light LT is blocked. Furthermore, the detection light LT is detected at the timing when the detection light LT passes through the position of the front end of the pitch tilt detection portion 203. Therefore, the control unit 50 specifies the position of the front end of the pitch tilt detection portion 203 based on the timing when the detection light LT is detected.

[0049] Finally, as shown in FIG. 10(C), the control unit 50 causes the detection unit 40 to detect at least two locations spaced apart from each other in the direction A, which is the front-to-rear direction of the pitch tilt detection target portion 203. Note that FIG. 10(C) illustrates an example in which two locations are detected: one slightly forward of the rear end of the pitch tilt detection target portion 203, and the other slightly rearward of the front end of the pitch tilt detection target portion 203. The control unit 50 identifies at least two detection locations on the pitch tilt detection target portion 203 from the positions of the front and rear ends of the pitch tilt detection target portion 203. The control unit 50 then moves the detection unit 40 downward in the Z direction while irradiating the detection light LT onto the at least two locations on the pitch tilt detection target portion 203. When the detection light LT passes over the top surface of the pitch tilt detection target portion 203, the detection light LT is blocked by the roll tilt detection target portion 202. Therefore, the control unit 50 acquires the heights of at least two points of the pitch tilt detection target portion 203 based on the timing when the detection light LT is blocked.

[0050] The control unit 50 then repeatedly causes the detection unit 40 to detect the pitch tilt detection portion 203 at at least two locations on the pitch tilt detection portion 203 while changing the tilt of the substrate holding hand 10 in the P direction, which is the pitch direction, using the tilt mechanism 30. That is, the control unit 50 repeatedly obtains the heights of at least two locations on the pitch tilt detection portion 203 while changing the tilt of the substrate holding hand 10 in the P direction, which is the pitch direction, using the tilt mechanism 30. As a result, the control unit 50 adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10 in the P direction so that the heights of at least two locations obtained based on the detection results of the pitch tilt detection portion 203 by the detection unit 40 become the same height.

[0051] When the substrate holding hand 10 is not parallel to the detection jig 200 in the P direction, different heights are acquired as the heights of at least two locations on the pitch tilt detection portion 203. On the other hand, when the substrate holding hand 10 is parallel to the detection jig 200 in the P direction, the same height is acquired as the heights of at least two locations on the pitch tilt detection portion 203. Therefore, by adjusting the relative tilt between the detection jig 200 and the substrate holding hand 10 in the P direction so that the heights of at least two locations on the pitch tilt detection portion 203 are the same, it is possible to make the substrate holding hand 10 and the detection jig 200 parallel in the P direction.

[0052] In detecting the pitch tilt detection target portion 203, the control unit 50 may repeatedly cause the detection unit 40 to detect the pitch tilt detection target portion 203 while changing the tilt of the substrate holding hand 10 in the P direction to a plurality of predetermined tilt positions using the tilt mechanism 30. Alternatively, the control unit 50 may estimate the relative tilt between the detection jig 200 and the substrate holding hand 10 in the P direction based on the detection result of the pitch tilt detection target portion 203 by the detection unit 40, and change the tilt of the substrate holding hand 10 in the P direction using the tilt mechanism 30 based on the estimated relative tilt between the detection jig 200 and the substrate holding hand 10 in the P direction. In other words, the control unit 50 may repeatedly cause the detection unit 40 to detect the pitch tilt detection target portion 203 while changing the tilt of the substrate holding hand 10 in the P direction to the estimated tilt position using the tilt mechanism 30.

[0053] Note that, for example, if the control unit 50 cannot determine the position of the detection jig 200 because the coordinates of the substrate holding hand 10 have not been taught, the control unit 50 performs the operations shown in Figures 10(A) and (B) to identify the position of the pitch tilt detection portion 203. However, if the control unit 50 can determine the position of the detection jig 200, the control unit 50 may identify the position of the pitch tilt detection portion 203 and perform the operation shown in Figure 10(C) without performing the operations shown in Figures 10(A) and (B).

[0054] (Instruction of coordinates for substrate holding hand) 11 and 12 , the control unit 50 teaches the coordinates of the substrate holding hand 10 in the substrate mounting unit 110 based on the detection result of the detection jig 200 by the detection unit 40. Specifically, the control unit 50 teaches the coordinates of the substrate holding hand 10 at the substrate transfer position P1 of the substrate mounting unit 110. That is, the control unit 50 teaches the coordinates of the substrate holding hand 10 when picking up and placing the substrate W on the substrate mounting unit 110. Furthermore, after adjusting the relative tilt between the detection jig 200 and the substrate holding hand 10, the control unit 50 causes the detection unit 40 to detect the detection jig 200, and teaches the coordinates of the substrate holding hand 10 in the substrate mounting unit 110. In addition, based on the detection results of the detection jig 200 by the detection unit 40, the control unit 50 instructs the coordinates in the Z direction, which is the up-down direction of the substrate holding hand 10, the coordinates in the A direction, which is the front-to-back direction of the substrate holding hand 10, and the coordinates in the B direction, which is the left-to-right direction of the substrate holding hand 10.

[0055] <Instruction of up and down coordinates> As shown in FIG. 11A, the control unit 50 teaches the coordinates of the substrate holding hand 10 in the Z direction, which is the vertical direction, based on the detection result of the detection unit 40 on the detection target portion 204 for teaching vertical coordinates. Specifically, the control unit 50 causes the detection unit 40 to detect the detection target portion 204 for teaching vertical coordinates. This operation is similar to the operation shown in FIG. 9A. That is, the control unit 50 causes the detection unit 40 to detect the detection target portion 204 for teaching vertical coordinates while moving the detection unit 40 in the Z direction relative to the detection target portion 204 for teaching vertical coordinates. As a result, the control unit 50 obtains the height of the detection target portion 204 for teaching vertical coordinates and teaches the coordinates of the substrate holding hand 10 in the Z direction based on the obtained height of the detection target portion 204 for teaching vertical coordinates. For example, the control unit 50 determines the Z coordinate obtained by adding a predetermined amount to the height of the detection target portion 204 for teaching vertical coordinates as the taught coordinate in the Z direction of the substrate holding hand 10.

[0056] <Teaching coordinates in the forward / backward and left / right directions> As shown in Figures 11(B) and 12, the control unit 50 teaches the coordinates of the substrate holding hand 10 in the front-rear and left-right directions based on the detection results of the detection target part 205 for front-rear and left-right coordinate teaching by the detection unit 40.

[0057] As shown in FIG. 11B, first, the control unit 50 causes the detection unit 40 to detect the detection target portion 205 for teaching front-rear and left-right coordinates. Specifically, the control unit 50 moves the detection unit 40 to the height of the detection target portion 205 for teaching front-rear and left-right coordinates based on the height of the detection target portion 204 for teaching up-down coordinates. Then, the control unit 50 moves the detection unit 40 forward in direction A while irradiating the detection light LT from the detection unit 40. When the detection light LT passes the position of the detection target portion 205 for teaching front-rear and left-right coordinates, the detection light LT is blocked by the detection target portion 205 for teaching front-rear and left-right coordinates. Therefore, the control unit 50 identifies the position of the detection target portion 205 for teaching front-rear and left-right coordinates based on the timing at which the detection light LT is blocked.

[0058] 12(A), the control unit 50 acquires the height of the detection target portion 205 for teaching front-rear and left-right coordinates. Specifically, the control unit 50 causes the detection unit 40 to emit the detection light LT, and moves the detection unit 40 in the Z direction, which is the up-down direction, at the position of the detection target portion 205 for teaching front-rear and left-right coordinates. The detection state of the detection light LT changes when the detection light LT passes through the top surface of the detection target portion 205 for teaching front-rear and left-right coordinates. Therefore, the control unit 50 acquires the height of the detection target portion 205 for teaching front-rear and left-right coordinates based on the timing when the detection state of the detection light LT changes.

[0059] More specifically, in a first state in which the substrate holding hand 10 is positioned parallel to the detection jig 200, the control unit 50 moves the detection unit 40 in the Z direction, which is the vertical direction, relative to the detection target portion 205 for teaching the front-rear, front-rear, left-right coordinates, using the substrate holding hand 10, and causes the detection unit 40 to detect the detection target portion 205 for teaching the front-rear, front-rear, left-right coordinates, thereby obtaining the height of the detection target portion 205 for teaching the front-rear, front-rear, left-right coordinates in the first state.

[0060] Next, as shown in FIG. 12(B), the control unit 50 tilts the substrate holding hand 10 in the R direction, which is the roll direction, using the tilt mechanism 30. Specifically, the control unit 50 tilts the substrate holding hand 10 in the R direction by adjusting the tilt of the upper member 32 relative to the lower member 31 using the height position adjustment mechanisms 36 and 37. Finally, as shown in FIG. 12(C), in the second state in which the substrate holding hand 10 is tilted in the R direction using the tilt mechanism 30, the control unit 50 moves the detection unit 40 along the B direction, which is the left-right direction. Specifically, the control unit 50 moves the detection unit 40 along the B direction, which is the left-right direction, by rotating the detection unit 40 in the rotation direction RO around the Z direction, which is the up-down direction. Then, at each of the positions to which the detection unit 40 is moved, the control unit 50 moves the detection unit 40 in the Z direction, which is the up-down direction, relative to the detection target part 205 for front-rear / left-right coordinate teaching, and causes the detection unit 40 to detect the front-rear / left-right coordinate teaching detection target part 205. As a result, the control unit 50 acquires the coordinates of the detection target part 205 for front-rear, left-right coordinate teaching as coordinates such that the height of the detection target part 205 for front-rear, left-right coordinate teaching in the first state is the same as the height of the detection target part 205 for front-rear, left-right coordinate teaching in the second state. Then, the control unit 50 teaches coordinates in the A direction, which is the front-rear direction, and the B direction, which is the left-right direction, of the substrate holding hand 10 based on the acquired coordinates of the detection target part 205 for front-rear, left-right coordinate teaching. For example, the control unit 50 determines the A direction coordinate obtained by adding a predetermined amount to the A direction coordinate of the detection target part 205 for front-rear, left-right coordinate teaching as the A direction teaching coordinate of the substrate holding hand 10. Furthermore, for example, the control unit 50 determines the B direction coordinate of the detection target part 205 for front-rear, left-right coordinate teaching as the B direction teaching coordinate of the substrate holding hand 10.

[0061] In a first state in which the substrate holding hand 10 is disposed parallel to the detection jig 200, the detection light LT is parallel to the detection jig 200, so a constant height is acquired as the height of the front-rear, left-right coordinate teaching detection portion 205 regardless of the position in direction B of the detection light LT blocked by the front-rear, left-right coordinate teaching detection portion 205. On the other hand, in a second state in which the substrate holding hand 10 is disposed tilted in direction R by the tilt mechanism 30 as shown in Fig. 13, the detection light LT is tilted relative to the detection jig 200, so the acquired height of the front-rear, left-right coordinate teaching detection portion 205 changes depending on the position in direction B of the detection light LT blocked by the front-rear, left-right coordinate teaching detection portion 205. Specifically, when the detection light LT is blocked at the center position CE of the detection light LT, the height of the front-rear, left-right coordinate teaching detection portion 205 is acquired to be the same as the height of the front-rear, left-right coordinate teaching detection portion 205 in the first state. On the other hand, when the detection light LT is blocked at a position other than the central position CE of the detection light LT, a height different from the height of the detection portion 205 for teaching the front, rear, left and right coordinates in the first state is acquired as the height of the detection portion 205 for teaching the front, rear, left and right coordinates.

[0062] The case where the detection light LT is blocked at the center position CE of the detection light LT is the case where the center position of the substrate holding hand 10 in direction B coincides with the position of the detection target part 205 for front-rear, left-right coordinate teaching. Therefore, by acquiring the coordinates of the detection target part 205 for front-rear, left-right coordinate teaching as coordinates such that the height of the detection target part 205 for front-rear, left-right coordinate teaching in the first state is the same as the height of the detection target part 205 for front-rear, left-right coordinate teaching in the second state, it is possible to acquire the coordinates of the detection target part 205 for front-rear, left-right coordinate teaching in a state where the center position of the substrate holding hand 10 coincides with the position of the detection target part 205 for front-rear, left-right coordinate teaching in direction B. In other words, it is possible to acquire accurate coordinates of the detection target part 205 for front-rear, left-right coordinate teaching.

[0063] [Effects of this embodiment] The substrate transport robot 100 includes a control unit 50 that adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10 by operating the tilt mechanism 30 based on the detection result of the detection jig 200 by the detection unit 40. As a result, because the detection jig 200 is used to detect tilt, the detectable portion is not limited by the shape of the substrate W, unlike when the substrate W is used to detect tilt. As a result, the relative tilt between the detection jig 200 and the substrate holding hand 10 can be detected with high accuracy, and the relative tilt between the detection jig 200 and the substrate holding hand 10 can be adjusted with high accuracy. As a result, the relative tilt between the substrate W and the substrate holding hand 10 can be adjusted with high accuracy.

[0064] Furthermore, since the detection jig 200 with high accuracy for detecting tilt is used, it is also possible to accurately detect the relative tilt between the detection jig 200 and the substrate holding hand 10. As a result, the relative tilt between the detection jig 200 and the substrate holding hand 10 can be adjusted with high accuracy, and therefore the relative tilt between the substrate W and the substrate holding hand 10 can be adjusted with high accuracy.

[0065] Furthermore, if the relative tilt between the substrate W and the substrate holding hand 10 is relatively large, the substrate W may not be held properly by the substrate holding hand 10 due to the relative tilt between the substrate W and the substrate holding hand 10, resulting in the generation of particles. In contrast, in this embodiment, the relative tilt between the substrate W and the substrate holding hand 10 can be adjusted with high precision, thereby suppressing the relative tilt between the substrate W and the substrate holding hand 10. As a result, the generation of particles due to the substrate W not being held properly by the substrate holding hand 10 can be suppressed.

[0066] The control unit 50 causes the detection unit 40 to detect the detection jig 200 placed on the substrate placement unit 110 when the substrate holding hand 10 enters the substrate placement unit 110 and is positioned near the substrate transfer position P1. As a result, although the tilt of the substrate holding hand 10 may vary depending on the placement position of the substrate holding hand 10 due to differences in the way the substrate holding hand 10 hangs, by detecting the detection jig 200 when the substrate holding hand 10 is positioned near the substrate transfer position P1, the detection jig 200 can be detected when the tilt of the substrate holding hand 10 is close to the tilt when actually holding a substrate. As a result, the relative tilt between the detection jig 200 and the substrate holding hand 10 can be adjusted with greater precision.

[0067] The control unit 50 detects the detection jig 200 in a state where the rotational position around the up-down direction has been adjusted by the detection unit 40 and the detection jig 200 is placed on the substrate placement unit 110. This allows the detection jig 200 to be properly detected when the rotational position around the up-down direction of the detection jig 200 is in the correct orientation.

[0068] The control unit 50 operates the tilt mechanism 30 based on the detection result of the detection jig 200 by the detection unit 40, thereby adjusting the relative tilt between the detection jig 200 and the substrate holding hand 10 in the roll direction around the front-to-back direction of the substrate holding hand 10 and the pitch direction around the left-to-right direction of the substrate holding hand 10. This makes it possible to accurately adjust the relative tilt between the detection jig 200 and the substrate holding hand 10 in the roll direction and pitch direction.

[0069] The detection jig 200 includes a detection jig main body 201 simulating the substrate W, and a roll tilt detection part 202 disposed on the detection jig main body 201 for adjusting the tilt of the substrate holding hand 10 in the roll direction, and the control part 50 adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10 in the roll direction by operating the tilt mechanism 30 based on the detection result of the roll tilt detection part 202 by the detection part 40. In this way, since the roll tilt detection part 202 is used to detect the tilt in the roll direction, the relative tilt between the detection jig 200 and the substrate holding hand 10 in the roll direction can be detected with high accuracy. As a result, the relative tilt between the detection jig 200 and the substrate holding hand 10 in the roll direction can be adjusted with high accuracy.

[0070] The roll tilt detection portion 202 is plate-shaped and has a predetermined thickness in the vertical direction, and the control portion 50 repeatedly detects the roll tilt detection portion 202 with the detection portion 40 while changing the tilt of the substrate holding hand 10 in the roll direction with the tilt mechanism 30, thereby adjusting the relative tilt between the detection jig 200 and the substrate holding hand 10 in the roll direction so that the thickness of the roll tilt detection portion 202 obtained based on the detection result of the roll tilt detection portion 202 by the detection portion 40 becomes the predetermined thickness. As a result, when the substrate holding hand 10 is parallel to the detection jig 200 in the roll direction, the relative tilt between the detection jig 200 and the substrate holding hand 10 in the roll direction can be easily and accurately adjusted by utilizing the fact that the thickness of the roll tilt detection portion 202 becomes the predetermined thickness.

[0071] The detection jig 200 includes a detection jig main body 201 simulating a substrate, and a pitch tilt detection portion 203 disposed on the detection jig main body 201 for adjusting the tilt of the substrate holding hand 10 in the pitch direction. The control portion 50 adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10 in the pitch direction by operating the tilt mechanism 30 based on the detection result of the pitch tilt detection portion 203 by the detection portion 40. In this way, since the pitch tilt detection portion 203 is used to detect the tilt in the pitch direction, the relative tilt between the detection jig 200 and the substrate holding hand 10 in the pitch direction can be detected with high accuracy. As a result, the relative tilt between the detection jig 200 and the substrate holding hand 10 in the pitch direction can be adjusted with high accuracy.

[0072] The pitch tilt detection portion 203 is plate-shaped and extends in the front-to-rear direction, and the control portion 50 repeatedly detects the pitch tilt detection portion 203 by the detection portion 40 at at least two locations on the pitch tilt detection portion 203 that are spaced apart from each other in the front-to-rear direction while changing the tilt of the substrate holding hand 10 in the pitch direction by the tilt mechanism 30, thereby adjusting the relative tilt between the detection jig 200 and the substrate holding hand 10 in the pitch direction so that the heights of at least two locations obtained based on the detection results of the pitch tilt detection portion 203 by the detection portion 40 become the same. As a result, when the substrate holding hand 10 is parallel to the detection jig 200 in the pitch direction, the relative tilt between the detection jig 200 and the substrate holding hand 10 in the pitch direction can be easily and accurately adjusted by utilizing the fact that the heights of at least two locations on the pitch tilt detection portion 203 that are spaced apart from each other in the front-to-rear direction become the same.

[0073] The detection unit 40 also serves as a detection unit that detects the substrate W. This allows the detection jig 200 to be detected using the detection unit 40 that detects the substrate W, eliminating the need to provide a dedicated detection unit 40. As a result, the configuration of the substrate transport robot 100 can be prevented from becoming complicated.

[0074] The detection unit 40 detects the detection jig 200 by irradiating the detection light LT. This allows the detection unit 40, which has a relatively simple configuration for irradiating the detection light LT, to detect the detection jig 200, thereby preventing the configuration of the substrate transport robot 100 from becoming complicated.

[0075] The substrate holding hand 10 includes a bifurcated blade member 11 whose tip is split into two, and the detection unit 40 includes an irradiation unit 41 that irradiates detection light LT and a light receiving unit 42 that detects the detection light LT irradiated by the irradiation unit 41, and the irradiation unit 41 and the light receiving unit 42 are respectively disposed at each of the two split tip portions of the blade member 11. This makes it possible to easily detect the detection jig 200 using the irradiation unit 41 and the light receiving unit 42 that are respectively disposed at each of the two split tip portions of the blade member 11.

[0076] The tilt mechanism 30 includes a lower member 31, an upper member 32 arranged opposite the lower member 31 in the vertical direction, three spherical plain bearings 33, 34 and 35 arranged between the lower member 31 and the upper member 32 and positioned at different locations when viewed from the vertical direction, and two height position adjustment mechanisms 36 and 37 arranged corresponding to two of the three spherical plain bearings 33, 34 and 35, respectively.The control unit 50 adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10 by adjusting the tilt of the upper member 32 relative to the lower member 31 using the height position adjustment mechanisms 36 and 37 based on the detection results of the detection jig 200 by the detection unit 40. This allows the relative tilt between the detection jig 200 and the substrate holding hand 10 to be adjusted using three spherical plain bearings 33, 34 and 35 and two height position adjustment mechanisms 36 and 37 without distorting the lower member 31 and the upper member 32 relative to each other.

[0077] The substrate holding hand 10 includes a plurality of blade members 11 each for holding a substrate W, and is equipped with a blade holding section 21 to which the plurality of blade members 11 are connected, and the control section 50 adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10 by adjusting the tilt of the blade holding section 21 by operating the tilt mechanism 30 based on the detection result of the detection jig 200 by the detection section 40. In this way, by adjusting the tilt of the blade holding section 21 to which the plurality of blade members 11 are connected using the tilt mechanism 30, the tilt of the plurality of blade members 11 can be adjusted collectively. As a result, the configuration of the substrate transport robot 100 can be made less complex than when the tilt of the plurality of blade members 11 is adjusted separately.

[0078] The control unit 50 adjusts the relative tilt between the detection jig 200 and the substrate holding hand 10 when the detection jig 200 is placed on the substrate placement part 110 arranged in the heat treatment apparatus 101 where the heat treatment is performed on the substrate W. Here, the substrate placement part 110 arranged in the heat treatment apparatus 101 may be deformed by the heat treatment on the substrate W. In this case, a deviation occurs in the tilt between the substrate placed on the substrate placement part 110 and the substrate holding hand 10. Therefore, in a configuration in which the substrate W is placed on the substrate placement part 110 arranged in the heat treatment apparatus 101, it is very effective to be able to accurately adjust the relative tilt between the detection jig 200 and the substrate holding hand 10.

[0079] [Variations] It should be noted that the embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the description of the above embodiments, and further includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0080] For example, in the above embodiment, an example was shown in which the substrate transport robot was disposed in a heat treatment device, but the present disclosure is not limited to this. In the present disclosure, the substrate transport robot may be disposed in a treatment device that performs etching treatment or processing treatment other than heat treatment on a substrate.

[0081] In the above embodiment, the substrate platform is a hoop and a boat, but the present disclosure is not limited to this. In the present disclosure, the substrate platform may be something other than a hoop and a boat.

[0082] In the above embodiment, the substrate transport robot includes a horizontal movement mechanism, a rotation mechanism, and a lifting mechanism as drive mechanisms, but the present disclosure is not limited to this. In the present disclosure, the substrate transport robot may include a robot arm as a drive mechanism. In this case, the robot arm may be a horizontally articulated type or a vertically articulated type.

[0083] In the above embodiment, the detection unit is a mapping sensor, but the present disclosure is not limited to this. In the present disclosure, the detection unit may be a sensor other than a mapping sensor, such as a cargo presence sensor or a camera.

[0084] In the above embodiment, the tilt detection jig is detected by the detector when the substrate holding hand is inserted into the substrate placement unit, but the present disclosure is not limited to this. In the present disclosure, for example, if the detector is a camera, the tilt detection jig may be detected by the detector when the substrate holding hand is not inserted into the substrate placement unit.

[0085] In addition, in the above embodiment, an example has been shown in which the relative tilt between the tilt detection jig and the substrate holding hand in the roll direction and pitch direction of the substrate holding hand is adjusted, but the present disclosure is not limited to this. In the present disclosure, the relative tilt between the tilt detection jig and the substrate holding hand in at least one of the roll direction and pitch direction of the substrate holding hand may be adjusted.

[0086] In addition, in the above embodiment, an example was shown in which the detection unit also serves as a detection unit for detecting the substrate, but the present disclosure is not limited to this. In the present disclosure, the detection unit may be a detection unit dedicated to detecting the detection jig.

[0087] In the above embodiment, an example in which a detector is disposed on one of the blade members is described, but the present disclosure is not limited to this. In the present disclosure, a detector may be disposed on two or more of the blade members. Furthermore, a detector and a tilt adjustment mechanism may be disposed on each of the blade members. In this case, the tilt of each of the blade members can be individually adjusted by each of the tilt adjustment mechanisms based on the detection results of each of the detectors.

[0088] In the above embodiment, an example was shown in which the substrate holding hand included multiple blade members, but the present disclosure is not limited to this. In the present disclosure, the substrate holding hand may include only one blade member.

[0089] In the above embodiment, the tilt mechanism serving as the tilt adjustment mechanism includes three spherical plain bearings and two height position adjustment mechanisms. However, the present disclosure is not limited to this. In the present disclosure, the tilt adjustment mechanism may not include a spherical plain bearing. Furthermore, the tilt adjustment mechanism may not include a height position adjustment mechanism. For example, the tilt adjustment mechanism may adjust the tilt by providing a rotation mechanism.

[0090] In the above embodiment, an example has been described in which the tilt mechanism serving as the tilt adjustment mechanism indirectly adjusts the tilt of the substrate holding hand, but the present disclosure is not limited to this. In the present disclosure, the tilt adjustment mechanism may directly adjust the tilt of the substrate holding hand. That is, the tilt adjustment mechanism may be directly connected to the substrate holding hand.

[0091] In the above embodiment, the detection jig serving as the tilt detection jig includes a detection target portion for teaching vertical coordinates and a detection target portion for teaching front, rear, left, and right. However, the present disclosure is not limited to this. In the present disclosure, the tilt detection jig does not necessarily include a detection target portion for teaching vertical coordinates and a detection target portion for teaching front, rear, left, and right. In the modified example shown in FIG. 14 , the detection jig 300 serving as the tilt detection jig includes a detection jig main body 201, a roll tilt detection target portion 202, and a pitch tilt detection target portion 303. Meanwhile, the detection jig 300 does not include a detection target portion for teaching vertical coordinates and a detection target portion for teaching front, rear, left, and right. The pitch tilt detection target portion 303 includes a first plate-shaped portion 303a and a third plate-shaped portion 203c. The first plate-shaped portion 303a and the third plate-shaped portion 203c are arranged in this order along the A direction. The roll tilt detection portion 202 is disposed so as to straddle the upper surfaces of the first plate-shaped portion 303a and the third plate-shaped portion 203c. An opening 203d is formed between the first plate-shaped portion 303a and the third plate-shaped portion 203c in the A direction and at a position overlapping with the roll tilt detection portion 202 in the Z direction so as to allow the detection light LT to pass through.

[0092] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general-purpose processors, special-purpose processors, integrated circuits, application-specific integrated circuits (ASICs), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. A processor is considered a processing circuit or circuit because it includes transistors and other circuitry. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or processor.

[0093] [Aspect] The above-described embodiment is a specific example of the following aspects.

[0094] (Aspect 1) a hand for holding the substrate; a detection unit that is disposed on the hand and detects a tilt detection jig that imitates the substrate placed on a substrate placement unit; a tilt adjustment mechanism that directly or indirectly adjusts the tilt of the hand; A substrate transport robot comprising: a control unit that adjusts the relative tilt between the tilt detection jig and the hand by operating the tilt adjustment mechanism based on the detection result of the tilt detection jig by the detection unit.

[0095] (Aspect 2) The control unit of the substrate transport robot of aspect 1 causes the detection unit to detect the tilt detection jig placed on the substrate placement section when the hand enters the substrate placement section and is positioned near a substrate transfer position.

[0096] (Aspect 3) 3. The substrate transport robot according to aspect 1 or 2, wherein the control unit causes the detection unit to detect the tilt detection jig in a state where the tilt detection jig is placed on the substrate placement unit after its rotational position around the vertical direction has been adjusted.

[0097] (Aspect 4) A substrate transport robot according to any one of aspects 1 to 3, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand in at least one of a roll direction around the front-to-back direction of the hand and a pitch direction around the left-to-right direction of the hand by operating the tilt adjustment mechanism based on the detection result of the tilt detection jig by the detection unit.

[0098] (Aspect 5) the tilt detection jig includes a tilt detection jig main body simulating the substrate, and a roll tilt detection target portion disposed on the tilt detection jig main body for adjusting the tilt of the hand in the roll direction, A substrate transport robot as described in aspect 4, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand in the roll direction by operating the tilt adjustment mechanism based on the detection result of the roll tilt detection portion by the detection unit.

[0099] (Aspect 6) The roll tilt detection portion is plate-shaped and has a predetermined thickness in the vertical direction, A substrate transport robot as described in aspect 5, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand in the roll direction by repeatedly detecting the roll tilt detection portion with the detection unit while changing the tilt of the hand in the roll direction with the tilt adjustment mechanism, so that the thickness of the roll tilt detection portion obtained based on the detection result of the roll tilt detection portion by the detection unit becomes the predetermined thickness.

[0100] (Aspect 7) the tilt detection jig includes a tilt detection jig main body simulating the board, and a pitch tilt detection target portion disposed on the tilt detection jig main body for adjusting the tilt of the hand in the pitch direction, A substrate transport robot according to any one of aspects 4 to 6, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand in the pitch direction by operating the tilt adjustment mechanism based on the detection result of the pitch tilt detection portion by the detection unit.

[0101] (Aspect 8) the pitch tilt detection portion is plate-shaped and extends in the front-rear direction, A substrate transport robot as described in aspect 7, wherein the control unit repeatedly detects the pitch tilt detection portion by the detection unit at at least two locations on the pitch tilt detection portion spaced apart from each other in the forward / backward direction while changing the tilt of the hand in the pitch direction using the tilt adjustment mechanism, thereby adjusting the relative tilt between the tilt detection jig and the hand in the pitch direction so that the heights of the at least two locations obtained based on the detection results of the pitch tilt detection portion by the detection unit are the same height.

[0102] (Aspect 9) A substrate transport robot according to any one of Aspects 1 to 8, wherein the detection unit also serves as a detection unit for detecting the substrate.

[0103] (Aspect 10) 10. The substrate transport robot according to any one of Aspects 1 to 9, wherein the detection unit detects the tilt detection jig by irradiating it with detection light.

[0104] (Aspect 11) the hand includes a blade member having a bifurcated tip, the detection unit includes an irradiation unit that irradiates the detection light and a light receiving unit that detects the detection light irradiated by the irradiation unit, 11. The substrate transfer robot according to aspect 10, wherein the irradiation unit and the light receiving unit are respectively disposed at the two split tip portions of the blade member.

[0105] (Aspect 12) The tilt adjustment mechanism includes: A lower member; an upper member provided to face the lower member in the vertical direction; Three spherical plain bearings are provided between the lower member and the upper member and are arranged at different positions when viewed from the up-down direction; two height position adjustment mechanisms provided corresponding to two of the three spherical plain bearings, respectively; A substrate transport robot according to any one of aspects 1 to 11, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand by adjusting the tilt of the upper member relative to the lower member using the height position adjustment mechanism based on the detection result of the tilt detection jig by the detection unit.

[0106] (Aspect 13) the hand includes a plurality of blade members each of which holds the substrate; a blade holding portion to which the plurality of blade members are connected, A substrate transport robot according to any one of aspects 1 to 12, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand by operating the tilt adjustment mechanism to adjust the tilt of the blade holding unit based on the detection result of the tilt detection jig by the detection unit.

[0107] (Aspect 14) A substrate transport robot according to any one of aspects 1 to 13, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand when placed on the substrate placement unit arranged in a heat treatment device that performs heat treatment on the substrate.

[0108] (Aspect 15) A method for controlling a substrate transport robot having a hand for holding a substrate, comprising: Detecting a tilt detection jig that imitates the substrate placed on a substrate placement section; and adjusting the relative tilt between the tilt detection jig and the hand by operating a tilt adjustment mechanism that directly or indirectly adjusts the tilt of the hand based on the detection result of the tilt detection jig. [Explanation of symbols]

[0109] 10. Substrate holding hand (hand) 11 Blade member 21 Blade holder 30 Tilt mechanism (tilt adjustment mechanism) 31 Lower part 32 Upper member 33, 34, 35 Spherical plain bearings 36, 37 Height position adjustment mechanism 40 Detector 41 Irradiation unit 42 Light receiving part 50 control section 100 Substrate transport robot 101 Heat treatment equipment 110 Substrate placement section 200, 300 detection jig (tilt detection jig) 201 Detection jig body 202 Roll tilt detection part 203, 303 Pitch tilt detection part LT detection light P1 Board transfer position W substrate

Claims

1. a hand for holding the substrate; a detection unit that is disposed on the hand and detects a tilt detection jig that imitates the substrate placed on a substrate placement unit; a tilt adjustment mechanism that directly or indirectly adjusts the tilt of the hand; A substrate transport robot comprising: a control unit that adjusts the relative tilt between the tilt detection jig and the hand by operating the tilt adjustment mechanism based on the detection result of the tilt detection jig by the detection unit.

2. 2. The substrate transport robot according to claim 1, wherein the control unit causes the detection unit to detect the tilt detection jig placed on the substrate placement section when the hand enters the substrate placement section and is positioned near a substrate transfer position.

3. The substrate transport robot according to claim 1 , wherein the control unit causes the detection unit to detect the tilt detection jig in a state where the tilt detection jig is placed on the substrate placement unit after its rotational position around the vertical direction has been adjusted.

4. 2. The substrate transport robot according to claim 1, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand in at least one of a roll direction about the front-to-rear direction of the hand and a pitch direction about the left-to-right direction of the hand by operating the tilt adjustment mechanism based on the detection result of the tilt detection jig by the detection unit.

5. the tilt detection jig includes a tilt detection jig main body simulating the substrate, and a roll tilt detection target portion disposed on the tilt detection jig main body for adjusting the tilt of the hand in the roll direction, 5. The substrate transport robot of claim 4, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand in the roll direction by operating the tilt adjustment mechanism based on the detection result of the roll tilt detection portion by the detection unit.

6. The roll tilt detection portion is plate-shaped and has a predetermined thickness in the vertical direction, 6. The substrate transport robot of claim 5, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand in the roll direction by repeatedly detecting the roll tilt detection portion with the detection unit while changing the tilt of the hand in the roll direction with the tilt adjustment mechanism, so that the thickness of the roll tilt detection portion obtained based on the detection result of the roll tilt detection portion by the detection unit becomes the predetermined thickness.

7. the tilt detection jig includes a tilt detection jig main body simulating the board, and a pitch tilt detection target portion disposed on the tilt detection jig main body for adjusting the tilt of the hand in the pitch direction, 5. The substrate transport robot according to claim 4, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand in the pitch direction by operating the tilt adjustment mechanism based on the detection result of the pitch tilt detection portion by the detection unit.

8. the pitch tilt detection portion is plate-shaped and extends in the front-rear direction, 8. The substrate transport robot of claim 7, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand in the pitch direction so that the heights of the at least two locations obtained based on the detection results of the pitch tilt detection parts by the detection unit are the same by repeatedly detecting the pitch tilt detection parts by the detection unit at at least two locations of the pitch tilt detection parts that are spaced apart in the front-to-rear direction while changing the tilt of the hand in the pitch direction by the tilt adjustment mechanism.

9. The substrate transport robot according to claim 1 , wherein the detection unit also serves as a detection unit for detecting the substrate.

10. The substrate transport robot according to claim 1 , wherein the detection unit detects the tilt detection jig by irradiating it with detection light.

11. the hand includes a forked blade member having a tip end that is divided into two, the detection unit includes an irradiation unit that irradiates the detection light and a light receiving unit that detects the detection light irradiated by the irradiation unit, The substrate transport robot according to claim 10 , wherein the irradiation unit and the light receiving unit are respectively disposed at the two forked tip portions of the blade member.

12. The tilt adjustment mechanism includes: A lower member; an upper member provided to face the lower member in the vertical direction; Three spherical plain bearings are provided between the lower member and the upper member and are arranged at different positions when viewed from the up-down direction; two height position adjustment mechanisms provided corresponding to two of the three spherical plain bearings, respectively; 2. The substrate transport robot of claim 1, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand by adjusting the tilt of the upper member relative to the lower member using the height position adjustment mechanism based on the detection result of the tilt detection jig by the detection unit.

13. the hand includes a plurality of blade members each of which holds the substrate; a blade holding portion to which the plurality of blade members are connected, 2. The substrate transport robot of claim 1, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand by operating the tilt adjustment mechanism to adjust the tilt of the blade holding unit based on the detection result of the tilt detection jig by the detection unit.

14. 2. The substrate transport robot according to claim 1, wherein the control unit adjusts the relative tilt between the tilt detection jig and the hand when the tilt detection jig is placed on the substrate placement unit arranged in a heat treatment device that performs heat treatment on the substrate.

15. A method for controlling a substrate transport robot having a hand for holding a substrate, comprising: Detecting a tilt detection jig that imitates the substrate placed on a substrate placement section; and adjusting the relative tilt between the tilt detection jig and the hand by operating a tilt adjustment mechanism that directly or indirectly adjusts the tilt of the hand based on the detection result of the tilt detection jig.

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