Multi-pole magnet adjustment system and multi-pole magnet adjustment method

Abstract

To enable an operator to easily and safely perform adjustment work while avoiding collision between a multi-pole magnet and a vacuum duct when adjusting the position of the multi-pole magnet by remote control.SOLUTION: A multi-pole magnet adjustment system 1 includes an X-axis drive motor 15 that moves a multi-pole magnet 2 that controls a charged particle beam B in the X-axis direction perpendicular to the direction of travel of the charged particle beam B, a Y-axis drive motor 14 that moves the multi-pole magnet 2 in the Y-axis direction perpendicular to the direction of travel and the X-axis direction, and a computer 3 that controls the X-axis drive motor 15 and the Y-axis drive motor 14 to display on a screen 50 a schematic image 51 showing the positional relationship between a vacuum duct 5 through which the charged particle beam B passes and the multi-pole magnet 2 surrounding the vacuum duct 5, and moves the position of the multi-pole magnet 2 displayed on the screen 50 in accordance with the movement of the multi-pole magnet 2 driven by the X-axis drive motor 15 and the Y-axis drive motor 14.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] SUMMARY OF THE INVENTION Embodiments of the present invention relate to multi-pole magnet adjustment techniques. [Background technology]

[0002] The beam transport device of a particle beam irradiation system is equipped with multipole magnets, such as quadrupole magnets, to control the charged particle beam. These multipole magnets are installed to surround the outside of the vacuum duct through which the charged particle beam passes. When fixing these multipole magnets, they must be precisely adjusted based on the passage position of the charged particle beam. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-88126 [Patent Document 2] Japanese Utility Model Application Publication No. 1-162700 Summary of the Invention [Problem to be solved by the invention]

[0004] If a multipole magnet collides with a vacuum duct during adjustment, the entire beam transport system is adversely affected, requiring time for subsequent restoration and maintenance. There is also a risk of damage to other equipment. Conventionally, to adjust the position of a multipole magnet, an operator inputs the amount of movement into the multipole magnet's movement motor and visually checks the actual movement of the multipole magnet and the vacuum duct to avoid collisions. Furthermore, when adjustments are performed remotely, the operator must determine the limit of the multipole magnet's movement beforehand and adjust the position of the multipole magnet. In this case, because the multipole magnet is a multipole magnet, it is difficult to grasp the limit and positional relationship for the X and Y axes, making it difficult to avoid collisions between the multipole magnet and the vacuum duct. Therefore, a system is needed that allows operators to easily and safely adjust the position of a multipole magnet while avoiding collisions between the multipole magnet and the vacuum duct.

[0005] An embodiment of the present invention has been made taking these circumstances into consideration, and aims to enable an operator to perform adjustment work easily and safely when adjusting the position of a multi-pole magnet remotely, while avoiding collision between the multi-pole magnet and the vacuum duct. [Means for solving the problem]

[0006] A multipole magnet adjustment system according to an embodiment of the present invention comprises an X-axis drive motor that moves a multipole magnet that controls a charged particle beam in an X-axis direction perpendicular to the direction of travel of the charged particle beam, a Y-axis drive motor that moves the multipole magnet in a Y-axis direction perpendicular to the direction of travel and the X-axis direction, and a computer that controls the X-axis drive motor and the Y-axis drive motor, displays on a screen a schematic image showing the positional relationship between a vacuum duct through which the charged particle beam passes and the multipole magnet surrounding the vacuum duct, and moves the position of the multipole magnet displayed on the screen in accordance with the movement of the multipole magnet driven by the X-axis drive motor and the Y-axis drive motor. [Effects of the Invention]

[0007] According to the embodiment of the present invention, when adjusting the position of a multi-pole magnet by remote operation, an operator can easily and safely perform the adjustment work while avoiding collision between the multi-pole magnet and the vacuum duct. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. [Figure 2] FIG. [Figure 3] FIG. [Figure 4] FIG. [Figure 5] FIG. 1 is a block diagram illustrating a multi-pole magnet adjustment system. [Figure 6] FIG. 10 is a screen diagram showing a display mode of an adjustment computer. [Figure 7] FIG. 10 is an explanatory diagram showing a schematic image of the position of the multi-pole magnet before adjustment. [Figure 8] FIG. 10 is an explanatory diagram showing a schematic image when the position of the multi-pole magnet is being adjusted. [Figure 9] FIG. 10 is an explanatory diagram showing a schematic image when the position of the multi-pole magnet has been adjusted. [Figure 10] FIG. 10 is a side view showing a limit sensor device according to a first modified example. [Figure 11] FIG. 10 is a side view showing a limit sensor device according to a second modified example. [Figure 12] FIG. 11 is a front view showing a light-shielding plate of a third modified example. [Figure 13] FIG. 13 is a front view showing a light-shielding plate of a fourth modified example. [Figure 14] FIG. 13 is a front view showing a light-shielding plate of a fifth modified example. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[0010] 1, reference numeral 1 denotes a multi-pole magnet adjustment system of this embodiment. This multi-pole magnet adjustment system 1 includes a limit detection system. Using this multi-pole magnet adjustment system 1, a multi-pole magnet adjustment method and a limit detection method are implemented.

[0011] The multi-pole magnet adjustment system 1 is used to fine-tune the position of each multi-pole magnet 2 when arranging multiple multi-pole magnets 2 in predetermined locations. A user (operator) of the multi-pole magnet adjustment system 1 can fine-tune the position of the multi-pole magnet 2 by operating the adjustment computer 3. The adjustment computer 3 includes a PLC (Programmable Logic Controller) and its functions.

[0012] The multipole magnet 2 is a device that controls the convergence and divergence of the charged particle beam B. For example, the multipole magnet 2 is used in a beam transport device (not shown) for transporting the charged particle beam B in a particle beam irradiation system (not shown). For example, one vacuum duct 5 is arranged extending linearly from a predetermined beam generator 4. The vacuum duct 5 is a tubular member whose interior is kept in a vacuum state. This vacuum duct 5 is fixed to the floor (not shown).

[0013] 1, 3, 10, and 11, the right side of the paper surface will be described as the front side (forward side) of the multi-pole magnet 2. The illustrations are merely examples, and in particular, for FIGS. 3, 10, and 11, the same operational effect will be achieved whether the right side or the left side of the paper surface is the forward side.

[0014] The charged particle beam B output from the beam generator 4 travels from the rear to the front inside the vacuum duct 5. In addition, if the direction in which the vacuum duct 5 extends and the direction in which the charged particle beam B travels is defined as the Z-axis direction, the vertical direction on the paper surface perpendicular to this direction is defined as the Y-axis direction, and the direction perpendicular to these is defined as the X-axis direction, in the following description.

[0015] As shown in FIG. 1, a beam detector 6 is attached to the front end of the vacuum duct 5. This beam detector 6 is connected to the adjustment computer 3. The beam detector 6 is, for example, a Faraday cup. The beam detector 6 measures the current value of the charged particle beam B. The position of the multipole magnet 2 is fine-tuned so that this current value is maximized. However, the current value of the charged particle beam B does not necessarily become maximum when the center of the multipole magnet 2 is at the center of the vacuum duct 5. This is because the charged particle beam B does not necessarily pass through the center of the vacuum duct 5. Therefore, the user moves the multipole magnet 2 in the X-axis and Y-axis directions to find the position where the current value of the charged particle beam B becomes maximum.

[0016] For example, three multi-pole magnets 2 are arranged in the Z-axis direction along the vacuum duct 5. These multi-pole magnets 2 have the same configuration. Therefore, the adjustment of the position of one specific multi-pole magnet 2 in the X-axis and Y-axis directions will be described. Note that the length (width) of a specific multi-pole magnet 2 in the Z-axis direction may differ from that of other multi-pole magnets 2, but the adjustment of the positions in the X-axis and Y-axis directions is usually the same.

[0017] The multipole magnet 2 is an electromagnet for generating a magnetic field that defines the path of travel of charged particles (ions) in the charged particle beam B traveling inside the vacuum duct 5. Here, the multipole magnet 2 is, for example, a quadrupole magnet having four poles (north and south poles). Note that the multipole magnet 2 may also be other types of electromagnets, such as a dipole magnet, sextupole magnet, or octupole magnet.

[0018] As shown in Figure 2, the multi-pole magnet 2 has an iron core body 7 that is octagonal when viewed from the front. Note that the shape of the iron core body 7 is not necessarily limited to an octagon. For example, the shape of the iron core body 7 may be circular or rectangular when viewed from the front.

[0019] The core body 7 has an opening at its center, with four core protrusions 8 protruding from its inner periphery. A coil 9 is wound around each of the core protrusions 8. The vacuum duct 5 passes through the opening at the center of the core body 7 and extends in the front-to-rear direction (Z-axis direction).

[0020] Furthermore, the iron core protrusion 8 protrudes toward the vacuum duct 5. A predetermined gap is formed between the vacuum duct 5 and the iron core protrusion 8. This gap allows the multi-pole magnet 2 to be moved in the X-axis and Y-axis directions, allowing for fine adjustment of its position. If the multi-pole magnet 2 collides (comes into contact with) the vacuum duct 5 during position adjustment, subsequent restoration and maintenance will require time. For this reason, it is necessary to prevent such collisions. The actual gap is 1 mm or less. The user adjusts the position of the multi-pole magnet 2, for example, in increments of 0.1 mm or 0.2 mm.

[0021] In a side view (FIG. 1), the multi-pole magnet 2 is sandwiched between holding members 10 in the front-to-rear direction (the left-to-right direction on the paper surface of FIG. 1). The holding member 10 is a U-shaped member, and the multi-pole magnet 2 is disposed inside it. The front and rear surfaces of the multi-pole magnet 2 are in contact with the inner surface of the holding member 10, and are firmly fastened by members such as bolts (not shown).

[0022] A fixed base 11 is fixed to the floor (not shown) where the multi-pole magnet 2 is placed. A lifting base 12 for moving (raising and lowering) the multi-pole magnet 2 in the Y-axis direction is fixed to the upper surface of this fixed base 11. This lifting base 12 is equipped with a Y-axis drive motor 14. A housing 12A of the lifting base 12 is fixed to the fixed base 11.

[0023] Furthermore, a lateral movement table 13 for moving the multi-pole magnet 2 in the X-axis direction is provided above the lifting table 12. This lateral movement table 13 is equipped with an X-axis drive motor 15. A holding member 10 is fixed to the upper surface of a housing 13A of the lateral movement table 13. The X-axis drive motor 15 and the Y-axis drive motor 14 are connected to the adjustment computer 3 (FIG. 5) via a motor driver 16 (FIG. 5).

[0024] The vertical arrangement of the fixed base 11, the lifting base 12, and the lateral movement base 13 is not necessarily limited to that in this embodiment. For example, the lateral movement base 13 may be placed on the fixed base 11, and the lifting base 12 may be placed on top of that.

[0025] A Y-axis ball spline 14A connected to a Y-axis drive motor 14 is provided inside the housing 12A of the lifting platform 12. A first wedge block 14B is provided, which moves in the X-axis direction (lateral movement) when the Y-axis ball spline 14A is driven to rotate. The first wedge block 14B is a wedge-shaped member with a sloping upper surface. A second wedge block 14C is provided on the upper surface of the first wedge block 14B. The second wedge block 14C is a wedge-shaped member with a sloping lower surface. When the first wedge block 14B moves laterally, the second wedge block 14C, guided by the upper surface of the first wedge block 14B, moves in the Y-axis direction (vertical movement). The second wedge block 14C is fixed to the lower surface of the housing 13A of the horizontal movement platform 13. The horizontal movement platform 13 moves vertically (up and down) together with the second wedge block 14C.

[0026] The housing 12A of the lifting platform 12 and the housing 13A of the lateral movement platform 13 are not connected and are movable relative to each other. Here, the housing 12A of the lifting platform 12 is an immovable member fixed to the fixed platform 11. The housing 13A of the lateral movement platform 13 is a member that moves up and down by driving the lifting platform 12. In other words, the lifting platform 12 is a platform (device) for raising and lowering the lateral movement platform 13.

[0027] An X-axis drive motor 15 is provided inside housing 13A of lateral movement platform 13. Furthermore, an X-axis ball spline 15A connected to this X-axis drive motor 15 is provided. Also, a bracket 15B is provided which moves in the X-axis direction (lateral movement) as this X-axis ball spline 15A is driven to rotate. Bracket 15B is an L-shaped member, and is fixed to the underside of holding member 10. Holding member 10 moves laterally together with bracket 15B.

[0028] The X-axis drive motor 15 moves the multipole magnet 2 in the X-axis direction, which is perpendicular to the direction of travel of the charged particle beam B and the Y-axis direction. The Y-axis drive motor 14 moves the multipole magnet 2 in the Y-axis direction, which is perpendicular to the direction of travel of the charged particle beam B and the X-axis direction. These are configured as stepping motors, and the rotational positions of the axes are fixed when the power supply is stopped. For example, the X-axis drive motor 15 and the Y-axis drive motor 14 are equipped with permanent magnets, and the rotational positions are fixed by their magnetic force. Therefore, after adjusting the multipole magnet 2, operation of the multipole magnet 2 is started with the X-axis drive motor 15 and the Y-axis drive motor 14 remaining.

[0029] The multi-pole magnet adjustment system 1 includes a limit sensor device 20 for detecting when the multi-pole magnet 2 reaches a limit position when aligning the multi-pole magnet 2 with the vacuum duct 5. In this way, the user (operator) performing the adjustment work can know when the multi-pole magnet 2 being adjusted has reached the limit position, and collision between the multi-pole magnet 2 and the vacuum duct 5 can be avoided. The limit position is a position where there is or may be a collision between the multi-pole magnet 2 and the vacuum duct 5, and is a position that indicates values ​​at which the movement of the multi-pole magnet 2 is limited, such as upper and lower limit values ​​that are limits on movement in the X-axis direction (horizontal movement) or Y-axis direction (vertical movement).

[0030] In the following description, the first member is exemplified as a fixed base 11, and the second member is exemplified as a multi-pole magnet 2. The fixed base 11 is fixed to a floor surface (not shown). The multi-pole magnet 2 moves relative to the floor surface and the fixed base 11. In other words, the first member and the second member are two members that move relatively to each other.

[0031] The limit sensor device 20 includes a first jig 21 fixed to the housing 12A of the lifting platform 12 and a second jig 22 fixed to the holding member 10. The first jig 21 and the second jig 22 are plate members bent into an L-shape when viewed from the front. The first jig 21 is fixed to the housing 12A of the lifting platform 12 by fastening members such as bolts 23. The housing 12A of the lifting platform 12 is fixed to the fixed platform 11. In other words, the first jig 21 is fixed to the fixed platform 11, which serves as a first member, via the housing 12A of the lifting platform 12. The second jig 22 is fixed to the holding member 10 by fastening members such as bolts 24. In other words, the second jig 22 is fixed to the multi-pole magnet 2, which serves as a second member, via the holding member 10.

[0032] Two plate-shaped holding plates 25 (FIG. 3) are fixed to the first jig 21. One plate-shaped light-shielding plate 26 (FIG. 3) serving as a light-shielding member is fixed to the second jig 22. In other words, the light-shielding plate 26 is fixed by the second jig 22 to the multi-pole magnet 2 (second member), which is the other member different from the fixed base 11 (first member), which is one member.

[0033] Although detailed illustration is omitted, the holding plate 25 and the light-shielding plate 26 are each formed into a plate shape with a bent portion. These bent portions are fixed to the first jig 21 and the second jig 22 by fastening members such as screws (not shown). The holes through which these screws are inserted are elongated holes (not shown) extending in the X-axis direction or the Y-axis direction. By arranging the screws at predetermined positions in these elongated holes, the mounting positions of the holding plate 25 and the light-shielding plate 26 in the X-axis direction and the Y-axis direction can be finely adjusted.

[0034] The holes through which the bolts 23, 24 for fixing the first jig 21 and the second jig 22 to the lifting platform 12 and the holding member 10 are inserted may be elongated holes (not shown) extending in the X-axis direction or the Y-axis direction. The bolts 23, 24 may be disposed at predetermined positions in these elongated holes, thereby enabling fine adjustment of the mounting positions of the first jig 21 and the second jig 22 in the X-axis direction and the Y-axis direction. In other words, by enabling fine adjustment of the mounting positions of at least one of the holding plate 25, the light-shielding plate 26, the first jig 21, and the second jig 22, it is possible to finely adjust the relative mounting positions of the holding plate 25 and the light-shielding plate 26. The mounting positions refer to any positions in the X-axis direction and the Y-axis direction.

[0035] As shown in Fig. 3, one light-shielding plate 26 is disposed between two holding plates 25. The holding plates 25 and the light-shielding plates 26 are arranged in the front-to-back direction (Z-axis direction) with a gap between them. The holding plates 25 and the light-shielding plates 26 are disposed so that their front and rear surfaces face each other. In other words, the front and rear surfaces of the holding plates 25 and the light-shielding plate 26 form surfaces that extend in the X-axis and Y-axis directions.

[0036] The limit sensor device 20 is a laser sensor that detects a limit position using a laser L. For example, the limit sensor device 20 includes a light-projecting unit 27 that projects the laser L and a light-receiving unit 28 that receives the laser L. The limit sensor device 20 is a transmission-type laser sensor that is composed of the light-projecting unit 27 and the light-receiving unit 28.

[0037] The light projecting unit 27 is fixed to one of the holding plates 25. The light projecting unit 27 is provided with a light diffusion prevention light projecting amount adjustment block 29 for preventing diffusion of the laser L. A through hole 30 through which the laser L passes is formed in the center of the light projecting amount adjustment block 29. The through hole 30 extends along the traveling direction of the laser L (Z-axis direction) and is a hole that is circular in cross section and defines the diameter of the laser L. The light projecting amount adjustment block 29 may be cylindrical (pipe-shaped).

[0038] Light receiving unit 28 is fixed to the other holding plate 25. That is, light receiving unit 28 is fixed by first jig 21 to fixed base 11 (first member), which is the same member as that to which light projecting unit 27 is fixed.

[0039] Light-shielding plate 26 (light-shielding member) is disposed on the path of laser L between light-projecting unit 27 and light-receiving unit 28. An opening 31 through which laser L passes is formed in the center of light-shielding plate 26. Laser L projected from light-projecting unit 27 passes through opening 31 and reaches light-receiving unit 28. Laser L is projected from light-projecting unit 27 toward light-receiving unit 28 at a preset, fixed, constant light intensity.

[0040] The light-shielding plate 26 also moves in accordance with the movement of the multi-pole magnet 2. Here, when the light-shielding plate 26 moves and the passing position of the laser L moves out of the opening 31, and at least a portion of the laser L is blocked by the light-shielding plate 26, the amount of light received by the light-receiving unit 28 decreases. The adjustment computer 3 acquires this amount of light received and determines that this amount of light received has decreased, thereby detecting that the multi-pole magnet 2 has reached its limit position.

[0041] As shown in FIG. 4, the light-shielding plate 26 has a rectangular shape. The light-shielding plate 26 is cut out so that the shape of the opening 31 corresponds to the central opening of the multi-pole magnet 2. For example, the center of the light-shielding plate 26 has a roughly cross-shaped opening, and four rounded (curved) edges corresponding to the four iron core protrusions 8 (FIG. 2) are formed at the four corners. Each edge has a hyperbolic shape. The laser L spreads in a circular shape centered on the optical axis Q. The diameter of the laser L is set to correspond to the diameter of the vacuum duct 5, and the size of the opening 31 is set according to the diameter of the laser L.

[0042] The diameter of the laser L may be set larger to provide some leeway. For example, the size of the laser L is reduced to match the central opening of the multi-pole magnet 2, and the opening 31 of the light-shielding plate 26 is formed. The diameter of the laser L may be set to be slightly larger than the diameter of the vacuum duct 5 reduced at the same rate as the reduction rate at this time. Also, the ratio of the diameter of the laser L to the opening 31 can be adjusted by adjusting the positional relationship between the holding plate 25 and the light-shielding plate 26, for example, by adjusting the distance between them.

[0043] The range in which the laser beam L does not overlap the edge of the opening 31 of the light-shielding plate 26 is the range in which the multi-pole magnet 2 can move. This range is the range in which the multi-pole magnet 2 will not collide (contact) with the vacuum duct 5. In other words, the opening 31 of the light-shielding plate 26 is formed to have the same shape as the relative movement range of the fixed base 11 (first member) and the multi-pole magnet 2 (second member). The edge of this opening 31 sets the limit position of the movement range of the multi-pole magnet 2. In this way, the shape of the opening 31 defines the movement range of the multi-pole magnet 2. The adjustment computer 3 can detect the limit position based on the shape of the opening 31. Then, when the multi-pole magnet 2 moves, the adjustment computer 3 stops the movement of the multi-pole magnet 2 when the multi-pole magnet 2 reaches the limit position.

[0044] 3, the limit sensor device 20 includes a laser oscillator 32 that emits a laser beam L and a laser detector 33 that detects the laser beam L. The laser oscillator 32 and the laser detector 33 are connected to an adjustment computer 3. To facilitate understanding, the laser oscillator 32 and the laser detector 33 are illustrated as separate devices, but they may also be integrated into a single device.

[0045] The laser oscillator 32 is provided at a predetermined position different from the light-projecting unit 27, and is connected to the light-projecting unit 27 via a light-projecting optical fiber 34. The laser detector 33 is provided at a predetermined position different from the light-receiving unit 28, and is connected to the light-receiving unit 28 via a light-receiving optical fiber 35. The predetermined positions at which the laser oscillator 32 and the laser detector 33 are provided may be anywhere as long as they are away from the fixed base 11 and the multi-pole magnet 2.

[0046] By using the light projecting optical fiber 34 and the light receiving optical fiber 35, the laser oscillator 32 and the laser detector 33 can be provided in positions different from the fixed base 11 (first member) and the multi-pole magnet 2 (second member). This prevents the fixed base 11 and the multi-pole magnet 2 from being affected by the operations of the laser oscillator 32 and the laser detector 33. Furthermore, by using the light projecting optical fiber 34 and the light receiving optical fiber 35, the members that make up the limit sensor device 20 do not interfere with the movement of the multi-pole magnet 2.

[0047] The adjustment computer 3 acquires the amount of laser light L received by the light receiving unit 28. Furthermore, the adjustment computer 3 detects the difference between the amount of light received when the laser L that has passed through the opening 31 of the light-shielding plate 26 hits the light receiving unit 28 and the amount of light received when the laser L that has been at least partially blocked by the light-shielding plate 26 hits the light receiving unit 28. Then, when aligning the multi-pole magnet 2, the adjustment computer 3 uses this difference to detect that the multi-pole magnet 2 has reached a limit position, that is, to detect a relative positional deviation between the fixing base 11 (first member) and the multi-pole magnet 2 (second member).

[0048] The laser L spreads in a circular shape centered on the optical axis Q, and the light intensity weakens as it moves away from the optical axis Q. For example, the light intensity is strongest on the optical axis Q, and the light intensity at the edges of the laser L is weaker than that on the optical axis Q. The adjustment computer 3 may detect the intensity of this light intensity (difference in light intensity) and detect the relative positional deviation between the fixing base 11 (first member) and the multi-polar magnet 2 (second member).

[0049] When the fixed base 11 (first member) and the multi-pole magnet 2 (second member) are misaligned relative to each other, the laser L projected from the light-emitting unit 27 is blocked by the light-shielding plate 26, reducing the amount of light received by the light-receiving unit 28, making it easier to detect the misalignment.

[0050] For example, the amount of received light is measured in advance when laser L is irradiated after passing through opening 31 of light-shielding plate 26. The amount of received light at this time is set as a reference amount of received light that serves as the basis for judgment. A threshold value is set in advance for the amount of received light that is attenuated by a predetermined amount from this reference amount of received light. When multi-pole magnet 2 is moved and the amount of received light reaches this threshold value, it is determined that the positional deviation between fixing base 11 and multi-pole magnet 2 has reached its limit. Furthermore, since the amount of received light also changes depending on the positional relationship between holding plate 25 and light-shielding plate 26, for example, the distance between them, the reference amount of received light is set taking these positional relationships into consideration.

[0051] Furthermore, the adjustment computer 3 obtains the amount of change indicating the magnitude of the width of the positional deviation based on the difference in the amount of received light. In this way, the amount of change indicating the magnitude of the width of the positional deviation, i.e., the amount of movement of the multi-polar magnet 2, can be determined based on the strength of the amount of received light.

[0052] Next, the system configuration of the multi-pole magnet adjustment system 1 will be described with reference to the block diagram shown in Fig. 5. Note that the multi-pole magnet adjustment system 1 may include components other than those shown in Fig. 5, or some of the components shown in Fig. 5 may be omitted.

[0053] The multi-pole magnet adjustment system 1 is configured with an adjustment computer 3 that has hardware resources such as a CPU (Central Processing Unit), GPU (Graphics Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), HDD (Hard Disk Drive), and SSD (Solid State Drive), and the CPU executes various programs to realize software-based information processing using the hardware resources. Furthermore, the multi-pole magnet adjustment method and limit detection method of this embodiment are realized by having the adjustment computer 3 execute the various programs.

[0054] It is not necessary that each component of the multi-pole magnet adjustment system 1 is provided in one computer. For example, one multi-pole magnet adjustment system 1 may be realized by a plurality of computers connected to each other via a network.

[0055] For example, the adjustment computer 3 includes a processing circuit 40, a storage unit 41, a communication unit 42, an input unit 43, an output unit 44, and a device connection unit 45.

[0056] The processing circuit 40 is a circuit including, for example, a CPU, a GPU, or a dedicated or general-purpose processor. This processor realizes various functions by executing various programs stored in a storage unit 41. The processing circuit 40 may also be configured with hardware such as an FPGA (Field Programmable Gate Array) or an ASIC (Application Specific Integrated Circuit). Various functions can also be realized by such hardware. The processing circuit 40 can also realize various functions by combining software processing by a processor and a program with hardware processing.

[0057] The storage unit 41 stores a predetermined program executed by the processing circuit 40. The storage unit 41 also stores various types of information required when performing the multi-pole magnet adjustment method and the limit detection method.

[0058] The communication unit 42 communicates with other computers via a predetermined communication line such as a LAN (Local Area Network) or the Internet.

[0059] Predetermined information is input to the input unit 43 in response to operations by a user of the adjustment computer 3. The input unit 43 includes input devices such as a mouse, keyboard, and touch panel. In other words, predetermined information is input to the adjustment computer 3 in response to operations of these input devices.

[0060] The output unit 44 outputs predetermined information. For example, the output unit 44 is a display. The adjustment computer 3 includes a device for displaying images, such as a display that outputs analysis results. The display may be separate from the computer main body or may be integrated with it. Additionally or alternatively, predetermined information may be displayed on a display provided on another computer connected via a network.

[0061] Although a display is used as an example of a device for displaying images, other modes are also possible. For example, images may be displayed using a touch panel display, a head-mounted display, or a projector.

[0062] The device connection unit 45 is connected to a predetermined external device and transmits and receives information to and from the device. The device connection unit 45 is connected to the beam detector 6, the motor driver 16, the laser oscillator 32, and the laser detector 33.

[0063] The adjustment computer 3 controls the X-axis drive motor 15 and the Y-axis drive motor 14 via a motor driver 16. The motor driver 16 is equipped with a nonvolatile memory. The X-axis drive motor 15 and the Y-axis drive motor 14 are equipped with encoders that detect the drive amounts. The motor driver 16 can obtain and store the drive amounts of the X-axis drive motor 15 and the Y-axis drive motor 14 from the encoders. This drive amount corresponds to the movement amount of the multi-pole magnet 2.

[0064] The adjustment computer 3 sends an instruction signal including the drive amount of the X-axis drive motor 15 and the Y-axis drive motor 14 to the motor driver 16. The motor driver 16 controls the drive of the X-axis drive motor 15 and the Y-axis drive motor 14 based on the instruction signal, and when the drive is completed, it feeds back the actual drive amount to the adjustment computer 3. This allows the adjustment computer 3 to grasp the actual position of the multi-pole magnet 2.

[0065] It should be noted that when the charged particle beam B is being output from the beam generator 4, there is a risk of radiation being generated near the multipole magnet 2. For this reason, the adjustment computer 3 is installed in a room different from the room in which the multipole magnet 2 is placed. A user uses this adjustment computer 3 to remotely fine-tune the position of the multipole magnet 2.

[0066] As shown in Fig. 6, the adjustment computer 3 displays on a screen 50 a schematic image 51 that indicates the positional relationship between the vacuum duct 5 through which the charged particle beam B passes and the multi-pole magnet 2 that surrounds this vacuum duct 5. This schematic image 51 is displayed on the screen 50 of a predetermined display that serves as the output unit 44 (Fig. 5). Then, the adjustment computer 3 moves the position of the multi-pole magnet 2 displayed on the screen 50 in accordance with the movement of the multi-pole magnet 2 driven by the X-axis drive motor 15 and the Y-axis drive motor 14.

[0067] The schematic image 51 displays a circle image 52, a reticle 53 (sight line), a polar image 54, and a center point 55. The circle image 52 is a circular image showing the outer periphery of the vacuum duct 5 (Figure 2). The reticle 53 is an image showing the center of the vacuum duct 5. The polar image 54 is an image of the four corners showing the edges of the four iron core protrusions 8 (Figure 2). Note that the shape of each edge is a hyperbola. The center point 55 is an image showing the center of the four multi-pole magnets 2 (Figure 2). This center point 55 is the origin of the hyperbolic shape of the iron core protrusions 8. Here, the circle image 52 and the reticle 53 are displayed in a fixed manner, but the display positions of the polar image 54 and the center point 55 move in accordance with the movement of the multi-pole magnet 2 (Figures 7 to 9).

[0068] FIG. 7 shows a schematic image 51 of the initial stage before the position of the multi-pole magnet 2 is adjusted. First, when the user (operator) places the vacuum duct 5 and the multi-pole magnet 2, they visually adjust the position so that the center of the vacuum duct 5 is aligned with the center of the multi-pole magnet 2. This operation is performed while the beam generator 4 and the multi-pole magnet 2 are not activated. At this time, the positions of the holding plate 25 and the light-shielding plate 26 are also adjusted, and the optical axis Q of the laser L is aligned with the center of the opening 31 of the light-shielding plate 26. Here, the schematic image 51 displayed on the screen 50 of the adjustment computer 3 is set so that the center of the reticle 53 and the center point 55 of the multi-pole magnet 2 coincide with each other. Using this state as the origin, fine adjustments are made to the position of the multi-pole magnet 2.

[0069] Next, the user activates the beam generator 4 and the multipole magnet 2 to start outputting the charged particle beam B. Then, the user uses the screen 50 of the adjustment computer 3 to remotely fine-tune the position of the multipole magnet 2.

[0070] As shown in FIG. 8, when the multi-pole magnet 2 is moved upward (in the positive direction along the Y-axis), the polar image 54 and center point 55 indicating the position of the multi-pole magnet 2 move upward in the schematic image 51. Furthermore, when the multi-pole magnet 2 is moved downward (in the negative direction along the Y-axis), the polar image 54 and center point 55 indicating the position of the multi-pole magnet 2 move downward in the schematic image 51. Similarly, when the multi-pole magnet 2 is moved rightward (in the positive direction along the X-axis), the polar image 54 and center point 55 indicating the position of the multi-pole magnet 2 move rightward in the schematic image 51. Furthermore, when the multi-pole magnet 2 is moved leftward (in the negative direction along the X-axis), the polar image 54 and center point 55 indicating the position of the multi-pole magnet 2 move leftward in the schematic image 51.

[0071] As shown in Fig. 6, the screen 50 is a so-called graphical user interface (GUI) that allows the user to accept a predetermined selection and input operation using a mouse pointer P. When the user clicks on a predetermined display with the mouse pointer P, a wizard for inputting information (setting values) related to that display is displayed. The user can input any setting value using this wizard.

[0072] On the screen 50, for example, a name 56 that allows identification of the multi-pole magnet 2 that is being adjusted out of three multi-pole magnets 2 is displayed. Also displayed are speed values ​​57 that indicate the drive speeds of the X-axis drive motor 15 and the Y-axis drive motor 14. Also displayed is a magnet switching unit 58 for switching the multi-pole magnet 2 to be adjusted out of the three multi-pole magnets 2. Also displayed is a setting value input unit 59 for inputting setting values ​​for the X-axis drive motor 15 and the Y-axis drive motor 14. The setting value input units 59 display the set position and the current position.

[0073] In addition to these displays, the set value input unit 59 also displays values ​​related to the limit sensor device 20. For example, an "LS" lamp is displayed. When the multi-pole magnet 2 reaches its limit position, the "LS" lamp is lit. This allows the user to understand that the multi-pole magnet 2 has reached its limit position. A "soft limit" lamp is also displayed. This "soft limit" lamp is lit before the "LS" lamp, with a margin of error. For example, the "soft limit" lamp is lit just before (just before) the multi-pole magnet 2 reaches its limit position. This allows the user to manually stop the movement of the multi-pole magnet 2. An "upper limit" and a "lower limit" lamp are also displayed. The "upper limit" lamp is lit when the multi-pole magnet 2 reaches its limit position in the positive direction relative to the origin. The "lower limit" lamp is lit when the multi-pole magnet 2 reaches its limit position in the negative direction relative to the origin.

[0074] The set position displayed on the set value input unit 59 is the set value input by the user (operator). In other words, the set position is the position to which the multi-pole magnet 2 will be moved. And the current position is the current position of the multi-pole magnet 2. The set position and the current position are displayed as numerical values ​​in the X-axis or Y-axis direction based on the origin. In other words, the adjustment computer 3 displays a numerical value indicating the actual position (current position) of the multi-pole magnet 2 together with the schematic image 51 on one screen 50. This makes it easier for the user to intuitively (instantly) grasp the actual position of the multi-pole magnet 2.

[0075] The user can control the X-axis drive motor 15 and the Y-axis drive motor 14 by inputting any setting value into the setting value input unit 59. In other words, the adjustment computer 3 displays the setting values ​​(setting positions) of the drive amounts of the X-axis drive motor 15 and the Y-axis drive motor 14 on one screen 50 together with the schematic image 51. This makes it easier for the user to intuitively (instantly) grasp the movement amount of the multi-pole magnet 2 based on the drive amounts of the X-axis drive motor 15 and the Y-axis drive motor 14.

[0076] There may be cases where the user does not operate by inputting a set value, but instead operates by pressing and holding the JOG and inching buttons to drive the X-axis drive motor 15 and the Y-axis drive motor 14. In this case, the current position based on the operation and operation results is displayed on the screen 50. In this way, the user can easily confirm the amount of movement of the multi-pole magnet 2 and the current position resulting from the movement.

[0077] The screen 50 also displays a main power ON / OFF switch 60 for the X-axis drive motor 15 and the Y-axis drive motor 14. It also displays whether or not there is an abnormality in the motor driver 16. In addition, a function switching input section 61 that allows switching between various functions is also displayed.

[0078] Furthermore, limit information 62 indicating upper and lower limit values ​​that are limit values ​​(limit positions) set by the limit sensor device 20 is displayed on the screen 50. That is, the adjustment computer 3 displays the limit values ​​(limit information 62) that indicate the limit positions of the movement range of the multi-pole magnet 2 together with the schematic image 51 on one screen 50. This makes it easier for the user to intuitively (instantly) grasp the limit values.

[0079] The central opening of the multi-pole magnet 2 (Figure 2) is roughly cross-shaped. Therefore, when the center point 55 of the multi-pole magnet 2 is at the origin in the X-axis direction, the range of movement in the Y-axis direction is large. However, as the center point 55 of the multi-pole magnet 2 moves further away from the origin in the X-axis direction, the range of movement in the Y-axis direction becomes smaller. In other words, the upper and lower limit values ​​in the Y-axis direction are values ​​that change depending on the position in the X-axis direction. Similarly, the upper and lower limit values ​​in the X-axis direction are values ​​that change depending on the position in the Y-axis direction.

[0080] Furthermore, the screen 50 displays a beam current value 63 indicating the current value of the charged particle beam B measured by the beam detector 6. The user fine-tunes the position of the multi-pole magnet 2 by moving it in the X-axis and Y-axis directions so that the beam current value 63 is maximized. In other words, the user searches for the position where the beam current value 63 is maximized. Here, it is necessary to prevent the multi-pole magnet 2 from colliding with the vacuum duct 5. When the multi-pole magnet 2 is about to reach the limit position (limit value), the limit sensor device 20 lights up a warning lamp "LS" and stops the X-axis drive motor 15 and the Y-axis drive motor 14.

[0081] 9 shows a schematic image 51 in a state where adjustment of the position of the multipole magnet 2 is complete. Here, in the schematic image 51, the state where the center of the reticle 53 and the center point 55 of the multipole magnet 2 coincide does not necessarily mean that the beam current value 63 is maximized. For example, as shown in this FIG. 9, in the schematic image 51, the state where the center point 55 of the multipole magnet 2 is deviated from the center of the reticle 53 may mean that the beam current value 63 is maximized.

[0082] Then, when the fine adjustment of the position of the multi-pole magnet 2 is completed, the limit sensor device 20 is removed. Note that the limit sensor device 20 may be left attached without being removed.

[0083] Conventionally, photointerrupter-type limit sensors are limited to detecting the limit positions of the movement range of a member that moves simply linearly, and are unable to detect the limit positions of the movement range of a member that moves in a planar direction (two-dimensional direction). In contrast, the limit sensor device 20 (limit detection system) of this embodiment can set the limit positions of the movement range by using the shape of the opening 31 in the light-shielding plate 26. Therefore, it is possible to detect the limit positions of the movement range of a member that moves in a planar direction (two-dimensional direction).

[0084] Next, Modifications 1 to 5 will be described. In the following Modifications 1 to 5, the same components as those shown in the above-described embodiment are denoted by the same reference numerals, and duplicated explanations will be omitted. The configurations applied in Modifications 1 to 5 may be applied to the above-described embodiment, or Modifications 1 to 5 may be combined as appropriate.

[0085] 10, the limit sensor device 20 of the first modification includes one light-shielding plate 26 as a light-shielding member fixed to a first jig 21, and two holding plates 25 fixed to a second jig 22. Here, the light-shielding plate 26 is fixed to a fixing base 11 (first member), which is one member and is different from the multi-pole magnet 2 (second member), by the first jig 21. An opening 31 through which the laser L passes is formed in the center of the light-shielding plate 26.

[0086] Light-projecting unit 27 is fixed to one of holding plates 25. Light-receiving unit 28 is fixed to the other of holding plates 25. That is, light-receiving unit 28 is fixed by second jig 22 to multi-polar magnet 2 (second member), which is the same member as that to which light-projecting unit 27 is fixed.

[0087] The limit sensor device 20 of this modified example 1 can also achieve the same effects as those of the above-described embodiment.

[0088] As shown in Fig. 11, the limit sensor device 20 of the second modification is a reflective laser sensor that emits and receives a laser beam L in one part. The limit sensor device 20 of the second modification includes a transmitting / receiving unit 70 that both emits and receives the laser beam L. This transmitting / receiving unit 70 is connected to a laser oscillation detector 72 via an optical fiber 71. This laser oscillation detector 72 is a device that both emits and detects the laser beam L. The laser oscillation detector 72 is connected to the adjustment computer 3.

[0089] Two holding plates 25 are fixed to the first jig 21. One light-shielding plate 26 serving as a light-shielding member is fixed to the second jig 22. An opening 31 through which the laser L passes is formed in the center of the light-shielding plate 26.

[0090] The transmitter / receiver 70 is fixed to one of the holding plates 25. A reflector 73 that reflects the laser beam L is fixed to the other holding plate 25. The reflector 73 is a member that reflects the laser beam L, such as a mirror. The reflector 73 is fixed by a first jig 21 to a fixing base 11 (first member), which is the same member to which the transmitter / receiver 70 is fixed. The laser beam L emitted from the transmitter / receiver 70 is reflected by the reflector 73 and received by the transmitter / receiver 70.

[0091] The limit sensor device 20 of this modified example 2 can also achieve the same effects as the above-described embodiment. Moreover, since the transmitter / receiver 70 functions to both emit and receive the laser L, it is easy to install and the number of parts can be reduced, which leads to cost reduction.

[0092] As shown in Fig. 12, the light-shielding member of Modification 3 is composed of two light-shielding plates 26, divided into upper and lower parts. Both light-shielding plates 26 are cut out so that opening 31 at the lower edge of the upper light-shielding plate 26 and opening 31 at the upper edge of the lower light-shielding plate 26 have shapes corresponding to the central opening of the multi-pole magnet 2. Rounded (curved) edges corresponding to the four iron core protrusions 8 (Fig. 2) are formed at the four corners of opening 31.

[0093] The light-shielding member of Modification 3 can also achieve the same effects as those of the above-described embodiment. Furthermore, since the light-shielding plate 26 is divided into two pieces, it is easy for the user to manufacture the shape of each opening 31. Note that the light-shielding member may be a light-shielding plate 26 divided into three or more pieces.

[0094] 13, the light-shielding plate 26 serving as the light-shielding member of Modification 4 is designed for the case where the multi-pole magnet 2 is a sextupole magnet. For example, the central opening 31 of the light-shielding plate 26 has six rounded (curved) edges corresponding to the six iron core protrusions 8 of the sextupole magnet.

[0095] The light-shielding member of this modification 4 can also achieve the same effects as the above-described embodiments. Depending on the type of multi-pole magnet 2, such as a two-pole magnet or an eight-pole magnet (see modification 5 in FIG. 14), the opening 31 of the light-shielding plate 26 may be formed with rounded (curved) edges in a number corresponding to the number of iron core protrusions 8.

[0096] The adjustment computer 3 described above includes a control device, a storage device, an output device, an input device, and a communication interface. Here, the control device includes a highly integrated processor such as a central processing unit (CPU), a graphics processing unit (GPU), a field programmable gate array (FPGA), or a dedicated chip. The storage device includes a read-only memory (ROM), a random access memory (RAM), a hard disk drive (HDD), or a solid-state drive (SSD). The output device includes a display panel, a head-mounted display, a projector, a printer, etc. The input device includes a mouse, a keyboard, a touch panel, etc. This adjustment computer 3 can be realized with a hardware configuration using a normal computer.

[0097] The program executed by the adjustment computer 3 is provided in advance in a ROM or the like. Additionally or alternatively, the program is provided stored in a computer-readable non-transitory storage medium as an installable or executable file. This storage medium includes CD-ROM, CD-R, memory card, DVD, flexible disk (FD), etc.

[0098] The program executed by the adjustment computer 3 may be stored on a computer connected to a network such as the Internet and downloaded via the network. That is, the program may be provided from cloud computing resources. Alternatively, a server on the cloud may execute the program, and only the processing results may be provided via the cloud. The adjustment computer 3 may also be configured by combining separate modules that independently perform the functions of the components and are interconnected via a network or dedicated lines.

[0099] In the above-described embodiment, the multipole magnet 2, the position of which is adjusted by the multipole magnet adjustment system 1, is used in a particle beam irradiation system, but other aspects are also possible. For example, the multipole magnet 2 may be used in a predetermined accelerator.

[0100] In the above-described embodiment, the limit detection system (multi-pole magnet adjustment system 1) detects the limit position of movement when adjusting the position of the multi-pole magnet 2, but other aspects are also possible. For example, the limit detection system may detect the limit position of movement of a specified member or device other than the multi-pole magnet 2. For example, the limit detection system may be applied to machine tools, construction equipment, manufacturing devices, and moving devices.

[0101] In the above-described embodiment, one light-shielding plate 26 is disposed between two holding plates 25, but other embodiments are also possible. For example, two or more light-shielding plates 26 may be disposed between two holding plates 25.

[0102] Although the above-described embodiment illustrates the light-shielding member as a plate-like light-shielding plate 26, other configurations are also possible. For example, the light-shielding member may be in the form of a block with an opening 31 formed in the center, or may be in the form of a cylinder (pipe).

[0103] According to the embodiment described above, a schematic image 51 showing the positional relationship between the vacuum duct 5 through which the charged particle beam B passes and the multipole magnet 2 surrounding the vacuum duct 5 is displayed on the screen 50. This allows the user (operator) to easily and safely perform the adjustment work while avoiding collision between the multipole magnet 2 and the vacuum duct 5 when adjusting the position of the multipole magnet 2 by remote operation.

[0104] In addition, at least one light-blocking member is provided, which is disposed on the path of the laser L between the light-projecting unit 27 and the light-receiving unit 28 and has an opening 31 formed therein through which the laser L passes. This makes it possible to detect misalignment of a component with a simple configuration without adversely affecting the component whose position is to be adjusted.

[0105] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in various other forms, and various omissions, substitutions, modifications, and combinations can be made without departing from the spirit of the invention. These embodiments and modifications thereof are intended to be included within the scope and spirit of the invention, as well as within the scope of the invention described in the claims and their equivalents. [Explanation of symbols]

[0106] 1...Multipole magnet adjustment system, 2...Multipole magnet, 3...Adjustment computer, 4...Beam generator, 5...Vacuum duct, 6...Beam detector, 7...Iron core body, 8...Iron core protrusion, 9...Coil, 10...Holding member, 11...Fixed base, 12...Lifting base, 12A...Housing, 13...Horizontal movement base, 13A...Housing, 14...Y-axis drive motor, 14A...Y-axis ball spline, 14B...First wedge block, 14C...Second wedge block, 15...X-axis drive motor, 15A...X-axis ball spline, 15B...Bracket, 16...Motor driver, 20...Limit sensor device, 21...First jig, 22...Second jig, 23, 24...Bolt, 25...Holding plate, 26...Light shielding plate, 27...Light emitting unit, 28...Light receiving unit, 2 9...light emission intensity adjustment block, 30...passage hole, 31...opening, 32...laser oscillator, 33...laser detector, 34...light emission optical fiber, 35...light receiving optical fiber, 40...processing circuit, 41...memory unit, 42...communication unit, 43...input unit, 44...output unit, 45...device connection unit, 50...screen, 51...schematic image, 52...circular image, 53...reticle, 54...polar image, 55...center point, 56...name, 57...speed value, 58...magnet switching unit, 59...setting value input unit, 60...selection switch, 61...function switching input unit, 62...limitation information, 63...beam current value, 70...transmitting / receiving unit, 71...optical fiber, 72...laser oscillation detector, 73...reflector, B...charged particle beam, L...laser, P...mouse pointer, Q...optical axis.

Claims

1. an X-axis drive motor that moves a multipole magnet that controls the charged particle beam in an X-axis direction perpendicular to the traveling direction of the charged particle beam; a Y-axis drive motor that moves the multi-pole magnet in a Y-axis direction that is perpendicular to the direction of travel and the X-axis direction; a computer that controls the X-axis drive motor and the Y-axis drive motor, displays on a screen a schematic image showing the positional relationship between a vacuum duct through which the charged particle beam passes and the multi-pole magnet surrounding the vacuum duct, and moves the position of the multi-pole magnet displayed on the screen in accordance with the movement of the multi-pole magnet caused by the drive of the X-axis drive motor and the Y-axis drive motor; Equipped with Multi-pole magnet adjustment system.

2. the computer is configured to display a numerical value indicating an actual position of the multi-pole magnet together with the schematic image on one of the screens; The multipole magnet adjustment system of claim 1 .

3. the computer is configured to display, on one of the screens, set values ​​of the drive amounts of the X-axis drive motor and the Y-axis drive motor together with the schematic image; 3. The multi-pole magnet adjustment system according to claim 1 or 2.

4. the computer is configured to display, on one of the screens, limit values ​​indicating limit positions of a movement range of the multi-pole magnet together with the schematic image; 3. The multi-pole magnet adjustment system according to claim 1 or 2.

5. a limit sensor device for detecting when the multi-pole magnet reaches a limit position when aligning the multi-pole magnet with the vacuum duct; 3. The multi-pole magnet adjustment system according to claim 1 or 2.

6. a light projection unit that is fixed to either the multi-pole magnet or a fixing base that fixes the multi-pole magnet and that projects a laser; a light receiving unit that is fixed to the same one of the members to which the light projecting unit is fixed, and that receives the laser; at least one light-blocking member fixed to the other member different from one of the members, disposed on a path of the laser between the light-emitting unit and the light-receiving unit, and having an opening through which the laser passes; Equipped with The computer The amount of light received by the light receiving unit is acquired. detecting a positional deviation between the multi-pole magnet and the fixing base based on a difference between the amount of light received when the laser that has passed through the opening strikes the light receiving unit and the amount of light received when the laser that has been at least partially blocked by the light blocking member strikes the light receiving unit; It is configured as follows:

3. The multi-pole magnet adjustment system according to claim 1 or 2.

7. the computer is configured to obtain a change amount indicating a magnitude of the width of the positional misalignment based on the difference. The multipole magnet adjustment system of claim 6 .

8. a laser oscillator that is provided at a position different from the light projecting unit, that is connected to the light projecting unit via a light projecting optical fiber, and that oscillates the laser; a laser detector that is provided at a position different from the light receiving unit, that is connected to the light receiving unit via a light receiving optical fiber, and that detects the laser; Equipped with The multipole magnet adjustment system of claim 6 .

9. the opening is formed to have the same shape as the relative movement range of the multi-pole magnet and the fixed base, and the edge of the opening defines the limit position of the movement range. The multipole magnet adjustment system of claim 6 .

10. an X-axis drive motor that moves a multipole magnet that controls the charged particle beam in an X-axis direction perpendicular to the traveling direction of the charged particle beam; a Y-axis drive motor that moves the multi-pole magnet in a Y-axis direction that is perpendicular to the direction of travel and the X-axis direction; A computer, This is a method using The computer Controlling the X-axis drive motor and the Y-axis drive motor; displaying on a screen a schematic image showing the positional relationship between a vacuum duct through which the charged particle beam passes and the multi-pole magnet surrounding the vacuum duct; moving the position of the multi-pole magnet being displayed on the screen in accordance with the movement of the multi-pole magnet caused by the driving of the X-axis drive motor and the Y-axis drive motor; Multipolar magnet adjustment method.

Images