Tape attaching method and tape attaching device

Abstract

To provide a tape attaching method and a tape attaching device capable of confirming whether or not a tape is appropriately attached to a workpiece.SOLUTION: A tape attaching method is a tape attaching method for attaching a tape to a plate-shaped object, and includes: a tape attaching step 2 of attaching the tape to the plate-shaped object positioned in an opening of an annular frame to form a frame unit in which the annular frame and the plate-shaped object are integrated via the tape; a measuring step 3 of measuring a diameter of the tape attached to the annular frame and the plate-shaped object after performing the tape attaching step 2; and a determination step 4 of determining whether or not an attaching state is good based on the diameter of the tape measured in the measurement step 3.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a tape application method and a tape application device. [Background technology]

[0002] Conventionally, when processing a workpiece such as a semiconductor wafer, tape is applied to either the front or back surface or both surfaces of the workpiece. For example, during backgrinding, tape is applied to the front surface to protect the device, and during dicing, dicing tape is applied to the back surface to facilitate handling of the device after dicing. In addition, expandable tape is applied to workpieces that have a modified layer formed inside them by laser processing, and by expanding the expandable tape, the workpiece is divided into individual devices starting from the modified layer (see Patent Documents 1 and 2). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-191430 [Patent Document 2] Japanese Patent Application Publication No. 2018-006618 Summary of the Invention [Problem to be solved by the invention]

[0004] As described above, tape is applied to the workpiece depending on the type and stage of processing. However, if the tape is not applied with appropriate tension, various problems can occur. For example, if the tension of the dicing tape applied to the backside during dicing is inappropriate, it can cause individual devices to come into contact with each other after dicing. Furthermore, if the tension of the expanding tape applied to a workpiece with a modified layer formed therein is inappropriate, or if the expanding tape is not expanded uniformly during expansion, the force applied to the workpiece will not be uniform, which can result in parts not being divided into chips.

[0005] The present invention has been made in consideration of such problems, and its object is to provide a tape application method and tape application device that can confirm whether the tape has been properly applied to the workpiece. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the tape application method of the present invention is a tape application method for applying tape to a plate-like object, and is characterized by comprising a tape application step of applying tape to a plate-like object positioned in an opening of an annular frame to form a frame unit in which the annular frame and the plate-like object are integrated via the tape, a measurement step of measuring the diameter of the tape applied to the annular frame and the plate-like object after performing the tape application step, and a judgment step of judging whether the application state is good or bad based on the diameter of the tape measured in the measurement step.

[0007] Preferably, the tape application method of the present invention further comprises a pre-measuring step of measuring the diameters of the tape to be applied to the annular frame and the plate-like object before the tape application step is carried out.

[0008] In addition, in the tape application method of the present invention, the judgment step may determine whether the application state is good or bad based on the rate of change between the diameter of the tape measured in the pre-measurement step and the diameter of the tape measured in the measurement step.

[0009] In the tape application method of the present invention, the determining step may determine whether the tape is properly applied based on whether the diameter of the tape measured in the measuring step is within a predetermined range.

[0010] The tape application device of the present invention is a tape application device which peels off a tape from a tape unit in which circular tapes are aligned in the longitudinal direction of a band-shaped sheet, and applies the tape to an annular frame and a plate-like object disposed within an opening of the annular frame, the tape application device comprising: a holding unit including an annular frame holding portion which holds the annular frame and a plate-like object holding portion which holds the plate-like object within the opening of the annular frame; a feed-out unit which feeds out the tape unit; a take-up unit which takes up the sheet from which the tape has been peeled; and a tape application device disposed between the feed-out unit and the take-up unit, The tape unit includes a peel plate that bends the tape unit by contacting it with the sheet, thereby peeling the tape from the sheet; an adhesive roller that presses the tape peeled from the sheet against the annular frame and the plate-like object while adhering it; a moving unit that moves the adhesive roller and the holding unit relative to each other; and a controller that controls each component.The tape unit further includes a measuring unit that measures the diameter of the tape adhered to the annular frame and the plate-like object, and the controller has a judgment section that judges whether the tape is well-adhered based on the diameter of the tape measured by the measurement unit.

[0011] Preferably, the tape application device of the present invention further comprises a pre-measuring unit disposed between the delivery unit and the peel plate for measuring the diameters of the tapes aligned and applied to the strip-shaped sheet.

[0012] In addition, in the tape application device of the present invention, the judgment unit may judge whether the tape is in a good or bad state based on the rate of change between the diameter of the tape measured by the pre-measurement unit and the diameter of the tape measured by the measurement unit.

[0013] In the tape application device of the present invention, the determining section may determine whether the tape is in a good state based on whether the diameter of the tape measured by the measuring unit is within a predetermined range. [Effects of the Invention]

[0014] The present invention can verify whether the tape is properly applied to the workpiece. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a tape applying device for carrying out a tape applying method according to an embodiment. [Figure 2] FIG. 2 is a flowchart showing the flow of the tape adhering method according to the embodiment. [Figure 3] FIG. 3 is a side view showing one state of the pre-measurement step shown in FIG. [Figure 4] FIG. 4 is a side view showing a state after FIG. 3 of the pre-measurement step shown in FIG. [Figure 5] FIG. 5 is a side view showing a state after FIG. 4 of the pre-measurement step shown in FIG. [Figure 6] FIG. 6 is a side view showing one state of the tape applying step shown in FIG. [Figure 7] 7 is a side view showing a state after FIG. 6 in the tape application step shown in FIG. 2. FIG. [Figure 8] FIG. 8 is a side view showing one state of the measurement step shown in FIG. [Figure 9] FIG. 9 is a side view showing a state after FIG. 8 of the measurement step shown in FIG. [Figure 10] FIG. 10 is a side view showing a state after FIG. 9 of the measurement step shown in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0016] Modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by a person skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the configuration can be made within the scope of the gist of the present invention.

[0017] [Embodiment] A method for applying tape 220 and a tape application device 10 according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing an example of the configuration of a tape application device 10 that implements the method for applying tape 220 according to the embodiment. The method for applying tape 220 according to the embodiment is a method for applying tape 220 to a plate-like workpiece (plate-like object 310) and an annular frame 320 to form a frame unit 300, and for checking the state of application of tape 220 to the plate-like object 310 and annular frame 320.

[0018] (Tape Unit 200) The tapes 220 applied to the plate-like object 310 and the annular frame 320 by the tape application device 10 are aligned in a row along the longitudinal direction on one surface 212 of the strip-shaped sheet 210, thereby constituting the tape unit 200. The sheet 210 is a so-called release paper, and the tape 220 can be peeled off by folding back the longitudinal direction to the other surface 214 opposite to the one surface 212 on which the tape 220 is applied.

[0019] The tape 220 is configured to include, for example, a base layer made of a stretchable synthetic resin, and an adhesive layer laminated on the base layer and made of a stretchable and adhesive synthetic resin. The tape 220 is pre-cut into multiple circular shapes, each having an outer diameter larger than the opening 322 (see FIG. 6, etc.) of the annular frame 320 to which the tape 220 is to be attached, and smaller than the outer diameter of the opening 322. The multiple pre-cut circular tapes 220 are attached with their attachment surfaces 222 at equal intervals in the longitudinal direction of the sheet 210.

[0020] The tape unit 200 is mounted on the tape application device 10 in a state in which the sheet 210 to which the tape 220 is adhered is wound into a roll with the surface 212 to which the tape 220 is adhered facing inward. The materials of the sheet 210 and the tape 220 are not particularly limited. In the embodiment, the tape 220 has a matte surface 224 opposite to the adhesion surface 222 adhered to the sheet 210.

[0021] (Frame Unit 300) The tape application device 10 forms a frame unit 300. The frame unit 300 includes a plate-like object 310, an annular frame 320, and the tape 220 peeled off from the sheet 210 of the tape unit 200.

[0022] The plate-like object 310 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, with a substrate made of silicon (Si), sapphire (Al2O3), gallium arsenide (GaAs), silicon carbide (SiC), etc. The wafer has a plurality of planned dividing lines set in a grid pattern and devices formed on a surface 312 of the area defined by the intersecting planned dividing lines.

[0023] The device may be, for example, an integrated circuit such as an IC (Integrated Circuit) or an LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), a MEMS (Micro Electro Mechanical Systems), or a memory (semiconductor memory device). The plate-like object 310 is divided into individual chips along a plurality of planned division lines, and singulated into device chips. The device chip includes a portion of a substrate and a device.

[0024] The annular frame 320 is an annular plate member made of metal or resin and has an opening 322 larger than the outer diameter of the plate-like object 310. With the plate-like object 310 positioned at a predetermined position in the opening 322 of the annular frame 320, the adhesive surface 222 of the tape 220 peeled from the sheet 210 of the tape unit 200 is attached to the upper surfaces of the annular frame 320 and the plate-like object 310 so as to cover the opening 322 of the annular frame 320, thereby fixing the plate-like object 310 to the annular frame 320 and the tape 220. The plate-like object 310 is transported and processed while supported by the annular frame 320 and the tape 220.

[0025] (Tape application device 10) 1, a tape application device 10 of this embodiment includes a base 12 having a rectangular shape in plan view and a longitudinal direction along the X-axis direction, a holding unit 20, a moving unit 30, a feeding unit 40, a winding unit 50, a peel plate 60, an application roller 70, a pre-measurement unit 80, a measurement unit 90, and a controller 100. In the following description, the X-axis direction is one direction in a horizontal plane. The Y-axis direction is a direction perpendicular to the X-axis direction in the horizontal plane. The Z-axis direction is a direction perpendicular to both the X-axis and Y-axis directions.

[0026] The holding unit 20 is a unit that holds the plate-like object 310 and the annular frame 320 on holding surfaces that are parallel to a horizontal plane (XY plane). The holding unit 20 holds the plate-like object 310 within an opening 322 (see FIG. 6, etc.) of the held annular frame 320. The holding unit 20 is formed, for example, in a square shape in a plan view with end faces parallel to the X-axis direction and the Y-axis direction, and is provided so as to be movable in the X-axis direction relative to the base 12 by the moving unit 30. The holding unit 20 includes an annular frame holding portion 22 that holds the annular frame 320, a plate-like object holding portion 24 that holds the plate-like object 310 within the opening 322 of the annular frame 320, and a recess 26 that is circular in a plan view.

[0027] The annular frame holding portion 22 indicates the portion outside the recess 26 in plan view. The annular frame 320 is held on the holding surface on the upper surface of the annular frame holding portion 22 so that the center of the recess 26, which is circular in plan view, is the center of the annular frame 320. The annular frame holding portion 22 has positioning means and suction means on its upper surface for fixing the annular frame 320 in a predetermined position on the holding surface. The positioning means includes, for example, a positioning member such as a movable fixing pin that abuts against the outer edge side of the annular frame 320. The suction means includes, for example, a suction cup that can be attached to the underside of the annular frame 320 placed on the annular frame holding portion 22, and a suction source such as a vacuum generator that is connected to the suction cup.

[0028] The plate-like object holding unit 24 has a circular shape in plan view with a diameter equal to or smaller than that of the recess 26, and is a disk shape that can be accommodated in the recess 26. The plate-like object holding unit 24 includes, for example, an adsorption unit that holds the plate-like object 310 on its upper holding surface, and a frame that supports the adsorption unit. The adsorption unit is disk-shaped and made of porous ceramics or the like, and is connected to a vacuum suction source (not shown) via a suction path (not shown). The plate-like object holding unit 24 is sucked by the vacuum suction source to hold the plate-like object 310 placed on the holding surface of the adsorption unit. In this embodiment, the front surface 312 of the plate-like object 310 is held on the holding surface of the plate-like object holding unit 24, and the back surface 314 is exposed upward.

[0029] The annular frame holding section 22 holds the annular frame 320, and the plate-like object holding section 24 holds the plate-like object 310, so that the plate-like object 310 is positioned at a predetermined position in the opening 322 of the annular frame 320. The height of the upper surface of the holding unit 20 is set so that when the plate-like object 310 is held by the plate-like object holding section 24 and the annular frame 320 is held by the annular frame holding section 22, the upper surface of the annular frame 320 and the upper surface of the plate-like object 310 (in this embodiment, the back surface 314) are at approximately the same height.

[0030] The moving unit 30 is a unit that moves the holding unit 20 and the bonding roller 70 (described later) relative to each other. The moving unit 30 of this embodiment is provided on the base 12 and moves the holding unit 20 in the X-axis direction, which is parallel to the longitudinal direction of the base 12. The moving unit 30 includes, for example, a ball screw 32 that extends in the X-axis direction and is rotatable about its axis, a pair of guide rails 34 that are provided parallel to the ball screw 32 and support the holding unit 20 so that it is movably in the X-axis direction, a pulse motor 36 that rotates the ball screw 32 about its axis, and a nut (not shown) that threads onto the ball screw 32. The nut (not shown) is fixed to the underside of the holding unit 20. When the pulse motor 36 rotates the ball screw 32 about the X-axis, the holding unit 20 is guided by the guide rails 34 and moves in the X-axis direction.

[0031] The feed-out unit 40 is a unit that feeds out the tape unit 200 in order to adhere the tape 220 to the plate-like object 310 and the annular frame 320 held by the holding unit 20. The feed-out unit 40 of this embodiment includes a feed-out roller 42 that is disposed on one end of the base 12 in the longitudinal direction (X-axis direction). The feed-out roller 42 is formed in a cylindrical shape with its axis parallel to the width direction (Y-axis direction) of the base 12, and is rotated about its axis by a motor (not shown). The feed-out roller 42 is inserted inside the core of the tape unit 200 that is wound in a roll, and supports the tape unit 200. The feed-out unit 40 feeds out the sheet 210 and tape 220 of the tape unit 200 toward the peel plate 60 as the feed-out roller 42 rotates about its axis.

[0032] The winding unit 50 is a unit that winds up the sheet 210 after the tape 220 attached to the plate-like object 310 and the annular frame 320 held by the holding unit 20 has been peeled off. The winding unit 50 of this embodiment includes a winding roller 52 that is located below (closer to the base 12) the feed roller 42 of the feed unit 40 on one end of the base 12 in the longitudinal direction (X-axis direction). The winding roller 52 is formed in a cylindrical shape with its axis parallel to the width direction (Y-axis direction) of the base 12, and is rotated about its axis by a motor (not shown). The winding roller 52 winds up the strip-shaped sheet 210 in a roll around its outer circumferential surface. The winding unit 50 of this embodiment winds up the sheet 210 around the winding roller 52 with the other surface 214 of the sheet 210 facing inward. The winding unit 50 rotates the winding roller 52 about its axis, thereby winding up the sheet 210 from which the tape 220 has been peeled by the peel plate 60 into a roll.

[0033] The tape application device 10 also has a tension roller 54 midway between the peel plate 60 and the take-up roller 52. The tension roller 54 comes into contact with one surface 212 of the sheet 210 passing over the peel plate 60, and applies tension from below upward to maintain a constant pulling tension.

[0034] It is preferable that the feed roller 42 and the take-up roller 52 are provided so as to move in the vertical direction (Z-axis direction). This makes it possible to prevent the angle at which the sheet 210 turns around when passing through the peel plate 60, and the feed and take-up positions of the sheet 210 and the tape 220 from changing even if the diameter of the tape unit 200 supported by the feed roller 42 and the diameter of the sheet 210 supported by the take-up roller 52 change.

[0035] The peel plate 60 is a plate that comes into contact with the other surface 214 of the sheet 210 of the tape unit 200 and bends the tape unit 200 to peel the tape 220 from the sheet 210. The peel plate 60 is disposed between the delivery unit 40 and the take-up unit 50 in the longitudinal direction of the tape unit 200. The peel plate 60 is disposed on the center of the base 12 in the longitudinal direction (X-axis direction). The peel plate 60 is a slanted plate that is triangular when viewed from the side (Y-axis direction), and its tip on the opposite side (-X side) from the delivery unit 40 extends in the Y-axis direction by a length equal to or greater than the width (length in the Y-axis direction) of the sheet 210. The peel plate 60 bends the tip of the sheet 210 of the tape unit 200 delivered from the delivery unit 40 and guides it to the take-up unit 50. With the peel plate 60 in contact with the other surface 214 of the sheet 210, the tape unit 200 is sent from the sending unit 40 to the winding unit 50, whereby the folded sheet 210 is peeled off from the tape 220.

[0036] The bonding roller 70 bonds the tape 220, which has been peeled off from the sheet 210 by the peel plate 60, to the annular frame 320 and the plate-like object 310 while pressing the tape 220 against the annular frame 320 and the plate-like object 310. The bonding roller 70 is located above the center of the base 12 in the longitudinal direction (X-axis direction), above the movement path of the holding unit 20, and near the tip of the peel plate 60. The bonding roller 70 is formed in a cylindrical shape with its axis parallel to the width direction (Y-axis direction) of the base 12, and is rotated about its axis by a motor (not shown). The bonding roller 70 may also be provided so as to be able to move up and down in the Z-axis direction by a drive unit (not shown). The bonding roller 70 extends in the Y-axis direction with a length equal to or greater than the width of the sheet 210 (length in the Y-axis direction). The application roller 70 presses the tape 220, from which the sheet 210 has been peeled off by the peel plate 60, from above downward onto the annular frame 320 and plate-like object 310 held by the holding unit 20, and rolls over the tape 220 as the holding unit 20 is moved by the moving unit 30 (see Figure 7).

[0037] The pre-measurement unit 80 is a unit for measuring diameters 226 (see FIG. 5) of the tapes 220 aligned and adhered to the strip-shaped sheet 210. The pre-measurement unit 80 is disposed between the feed unit 40 and the peel plate 60, at the center of the longitudinal direction (X-axis direction) of the base 12. In this embodiment, the pre-measurement unit 80 includes a reflective sensor. The pre-measurement unit 80 includes a light-projecting unit that irradiates light 82 toward the sheet 210 and the tape 220, and a light-receiving unit that receives reflected light 84 reflected from the sheet 210.

[0038] In the embodiment, the tape 220 has a matte surface 224, so that the light 82 irradiated onto the tape 220 is diffused, and the diffused light 86 does not return to the light receiving unit. This makes it possible to detect the presence or absence of the tape 220 based on the difference in the amount of reflected light 84. For example, the diameter 226 of the tape 220 can be calculated based on the number of measurement points from when the pre-measurement unit 80 detects the leading edge of the tape 220 until it detects the trailing edge, the measurement cycle, and the amount of tape unit 200 fed out. Alternatively, the diameter 226 of the tape 220 can be calculated based on the time from when the pre-measurement unit 80 detects the leading edge of the tape 220 until it detects the trailing edge, and the feed speed of the feed unit 40.

[0039] The measurement unit 90 is a unit for measuring the diameter 228 (see FIG. 10 ) of the tape 220 attached to the annular frame 320 and the plate-like object 310. The measurement unit 90 is disposed above the movement path of the holding unit 20, at the center of the base 12 in the longitudinal direction (X-axis direction). In this embodiment, the measurement unit 90 includes a distance sensor. The measurement unit 90 measures the distance in the Z-axis direction to the annular frame 320 and the tape 220, and detects the tape 220 based on changes in that distance. The diameter 228 of the tape 220 can be calculated based on the amount of relative movement between the measurement unit 90 and the holding unit 20 from when the measurement unit 90 detects the leading edge of the tape 220 until when it detects the trailing edge.

[0040] The pre-measurement unit 80 and the measurement unit 90 may be provided to be movable. The pre-measurement unit 80 is not limited to a reflective sensor, but may also be a transmission sensor, a distance sensor, or a camera. The measurement unit 90 is also not limited to a distance sensor, but may also be a transmission sensor, a reflective sensor, or a camera. The pre-measurement unit 80 and the measurement unit 90 may be the same unit. In this case, it is preferable that the measurement unit 90 (pre-measurement unit 80) be configured to be movable so that it can measure both the tape 220 attached to the sheet 210 and the tape 220 after it has been attached to the annular frame 320 and the plate-like object 310.

[0041] The controller 100 controls each of the above-mentioned components of the tape application device 10, causing the tape application device 10 to apply the tape 220 to the plate-like object 310 and the annular frame 320 and check the state of application of the tape 220. The controller 100 is a computer including, for example, an arithmetic processing unit as a calculation means, a storage device as a storage means, and an input / output interface device as a communication means. The arithmetic processing unit includes, for example, a microprocessor such as a CPU (Central Processing Unit). The storage device has memories such as an HDD (Hard Disk Drive), ROM (Read Only Memory), or RAM (Random Access Memory). The arithmetic processing unit performs various calculations based on predetermined programs stored in the storage device. In accordance with the calculation results, the arithmetic processing unit outputs various control signals to each of the above-mentioned components via the input / output interface device, thereby controlling the tape application device 10.

[0042] The controller 100 has a determination unit 102. The determination unit 102 determines whether the tape is adhered properly based on the diameter 228 of the tape 220 measured by the measurement unit 90. The determination unit 102 determines whether the tape is adhered properly based on, for example, the rate of change between the diameter 226 of the tape 220 measured by the pre-measurement unit 80 and the diameter 228 of the tape 220 measured by the measurement unit 90. The determination unit 102 determines whether the tape is adhered properly based on, for example, whether the diameter 228 of the tape 220 measured by the measurement unit 90 falls within a predetermined range.

[0043] The tape application device 10 may further include a notification unit that outputs predetermined notification information. When the determination unit 102 determines that the tape application state is poor, the controller 100 may, for example, cause the notification unit to output notification information for notifying an operator that the tape application state is poor. Furthermore, when the determination unit 102 determines that the tape application state is poor, the controller 100 may, for example, change the conditions of the components of the tape application device 10 so that the tape application state is automatically improved. Condition changes include, for example, the rotation speed of the feeding unit 40 and the winding unit 50, and the movement speed of the moving unit 30.

[0044] (How to apply tape 220) 2 is a flowchart showing the flow of the method for applying the tape 220 according to the embodiment. As shown in FIG. 2, the method for applying the tape 220 according to the embodiment includes a pre-measurement step 1, a tape application step 2, a measurement step 3, and a determination step 4.

[0045] In the method for applying the tape 220, a roll-shaped tape unit 200 is previously attached to the feed roller 42 of the feed unit 40. In addition, in the method for applying the tape 220, the annular frame 320 and the plate-like object 310 to which the tape is to be applied are previously held in the holding unit 20. More specifically, the annular frame 320 is positioned at a predetermined position in the annular frame holding portion 22 of the holding unit 20 and held by suction. In addition, the plate-like object 310 is positioned at a predetermined position in the plate-like object holding portion 24 of the holding unit 20 and held by suction. At this time, the annular frame 320 and the plate-like object 310 are held by suction while being centered in the center of the holding surface of the holding unit 20. As a result, the plate-like object 310 is positioned in the opening 322 of the annular frame 320.

[0046] (Pre-measurement step 1) Fig. 3 is a side view showing one state of pre-measurement step 1 shown in Fig. 2. Fig. 4 is a side view showing one state of pre-measurement step 1 shown in Fig. 2 after Fig. 3. Fig. 5 is a side view showing one state of pre-measurement step 1 shown in Fig. 2 after Fig. 4. Pre-measurement step 1 is a step of measuring diameter 226 of tape 220 to be attached to annular frame 320 and plate-like object 310 before tape attachment step 2 is performed.

[0047] In the pre-measurement step 1 of the embodiment, the diameter 226 of the tape 220 is measured while the tape unit 200 is being fed by the feed unit 40 toward the peel plate 60 and the application roller 70. In the pre-measurement step 1, the feed roller 42 of the feed unit 40 is rotated about its axis by a motor (not shown), thereby feeding the tape unit 200 toward the peel plate 60.

[0048] As shown in FIGS. 1, 3, and 4, the tape 220 attached to the sheet 210 passes through the detection range of the pre-measurement unit 80. In this embodiment, the detection range is the range irradiated with light 82. As shown in FIG. 3, when light 82 is irradiated onto the sheet 210, reflected light 84 returns to the light receiving unit of the pre-measurement unit 80. As shown in FIG. 4, when light 82 is irradiated onto the tape 220, the light 82 is diffused, and diffused light 86 does not return to the light receiving unit. As a result, in the pre-measurement step 1 of this embodiment, the presence or absence of the tape 220 can be detected based on the difference in the amount of reflected light 84. As shown in FIG. 5, in the pre-measurement step 1, the distance from when the leading edge of the tape 220 is detected to when the trailing edge of the tape 220 is detected is detected as the diameter 226 of the tape 220 before attachment.

[0049] Here, a specific example will be given to explain how to calculate the diameter 226 of the tape 220 when the preliminary measurement step 1 is performed in the tape application device 10. The measurement period [mm] is calculated by (the amount of tape unit 200 fed out by the tape unit 200) ÷ (the number of data points measured by the preliminary measurement unit 80). For example, if the number of data points measured by the preliminary measurement unit 80 when the tape unit 200 feeds out 374 mm is 462, the measurement period is 374 ÷ 462 = 0.81 mm. If the feed speed is constant and the number of data points from when the preliminary measurement unit 80 detects the leading edge of the tape 220 until when it detects the trailing edge of the tape 220 is 456, the diameter 226 of the tape 220 is 456 × 0.81 mm = 369.81 mm. If the feed speed changes midway, the calculation can be performed in several stages for each speed.

[0050] (Tape application step 2) Fig. 6 is a side view showing one state of tape application step 2 shown in Fig. 2. Fig. 7 is a side view showing one state of tape application step 2 shown in Fig. 2 after Fig. 6. Tape application step 2 is a step of applying tape 220 to plate-like object 310 positioned in opening 322 of annular frame 320, and forming frame unit 300 in which annular frame 320 and plate-like object 310 are integrated via tape 220.

[0051] 6, in the tape application step 2, the holding unit 20 is moved in advance by the moving unit 30 so that the end of the holding unit 20 opposite the feed unit 40 is positioned immediately below the application roller 70. In the tape application step 2, continuing from the preliminary measurement step 1, the feed roller 42 of the feed unit 40 is rotated around its axis by a motor (not shown), thereby feeding the tape unit 200 toward the peel plate 60.

[0052] When the leading edge of the tape 220 passes the leading edge of the peel plate 60, the sheet 210 is folded back at the leading edge of the peel plate 60 and directed toward the winding unit 50, where the tape 220 is peeled off from the folded back sheet 210 and fed out between the bonding roller 70 and the annular frame 320 and plate-like object 310 held by the holding unit 20. At this time, as shown in Fig. 7 , by moving the holding unit 20 by the moving unit 30 toward the opposite side (-X side) from the feed unit 40 at the same speed as the tape 220 is fed, the tape 220 peeled off from the sheet 210 is pressed from above against the annular frame 320 and plate-like object 310 by the bonding roller 70. As a result, the tape 220 is bonded to the annular frame 320 and plate-like object 310, and the frame unit 300 is formed. In the present invention, the movement speed of the holding unit 20 does not have to be exactly the same as the speed at which the tape 220 is fed, and may be faster or slower than the speed at which the tape 220 is fed as long as there is no problem with the adhesion of the tape 220.

[0053] (Measurement step 3) Fig. 8 is a side view showing one state of measurement step 3 shown in Fig. 2. Fig. 9 is a side view showing one state of measurement step 3 shown in Fig. 2 after Fig. 8. Fig. 10 is a side view showing one state of measurement step 3 shown in Fig. 2 after Fig. 9. Measurement step 3 is a step of measuring diameter 228 of tape 220 attached to annular frame 320 and plate-like object 310 after tape attachment step 2 has been performed.

[0054] In measurement step 3 of the embodiment, diameter 228 of tape 220 is measured in a state where frame unit 300, in which tape 220 is attached to annular frame 320 and plate-like object 310, is held by holding unit 20. In measurement step 3, as shown in Figures 8, 9, and 10, holding unit 20 and measurement unit 90 are moved relatively in the X-axis direction, causing measurement unit 90 to detect tape 220 from its leading edge to its trailing edge.

[0055] 8 and 9, the distance in the Z-axis direction from the measurement unit 90 to the tape 220 is shorter than the distance in the Z-axis direction from the measurement unit 90 to the annular frame 320. The tape 220 is detected based on changes in this distance. As shown in FIG. 10, in measurement step 3, the distance from when the leading edge of the tape 220 is detected to when the trailing edge is detected is detected as the diameter 228 of the tape 220 after application.

[0056] (Decision Step 4) Judgment step 4 is a step for judging the quality of the adhesion state based on diameter 228 of tape 220 measured in measurement step 3. In judgment step 4 of the embodiment, the quality of the adhesion state is judged based on the rate of change between diameter 226 of tape 220 measured in pre-measurement step 1 and diameter 228 of tape 220 measured in measurement step 3.

[0057] Note that if the dimensional error of the diameter 226 of the tape 220 in the state where it is attached to the sheet 210 before being attached to the annular frame 320 and the plate-like object 310 is sufficiently small, the pre-measurement step 1 may be omitted. In this case, in the determination step 4, the quality of the attachment state may be determined based on whether the diameter 228 of the tape 220 measured in the measurement step 3 falls within a predetermined range. The design dimension and the predetermined range of the diameter 226 of the tape 220 are stored in advance in the storage device of the controller 100, for example.

[0058] As described above, in the tape application method and tape application device 10 of the embodiment, the diameter 228 of the tape 220 is measured after the tape 220 has been applied to the plate-like object 310 and the annular frame 320. This makes it clear how stretched the tape 220 was when applied compared to the tape 220 before application, making it possible to confirm whether the tape has been applied properly. Furthermore, if it is determined that the tape has not been applied properly, the application state can be improved and differences between devices can be reduced by controlling device operation parameters such as the movement speed of the holding unit 20 and the rotation speed of the feed roller 42.

[0059] The present invention is not limited to the above-described embodiment, and can be implemented in various modifications without departing from the gist of the present invention. [Explanation of symbols]

[0060] 10 Tape application device 12 Foundation 20 holding unit 22 Annular frame holding part 24 Plate-shaped object holding part 26 Recess 30 Mobile Units 40 Sending unit 42 Feed roller 50 Winding unit 52 Winding roller 54 Tension roller 60 Peel Plates 70 Adhesive roller 80 pre-measured units 90 measurement units 100 Controllers 102 Judgment section 200 tape units 210 seats 220 Tape 226, 228 diameter 300 Frame Unit 310 Plate-shaped objects 320 Annular Frame 322 Opening

Claims

1. A tape application method for applying tape to a plate-like object, comprising: a tape adhering step of adhering tape to a plate-like object positioned in the opening of the annular frame to form a frame unit in which the annular frame and the plate-like object are integrated via the tape; a measuring step of measuring diameters of the tape attached to the annular frame and the plate-like object after the tape attaching step is performed; a determining step of determining whether the tape is properly attached based on the diameter of the tape measured in the measuring step; Equipped with A method for applying tape.

2. Before performing the tape application step, The method further includes a pre-measurement step of measuring the diameter of the tape attached to the annular frame and the plate-like object.

2. The method for applying tape according to claim 1.

3. In the determination step, The quality of the adhesion state is determined based on the rate of change between the diameter of the tape measured in the pre-measurement step and the diameter of the tape measured in the measurement step.

3. The method for applying tape according to claim 2.

4. In the determination step, The quality of the tape adhesion is determined based on whether the diameter of the tape measured in the measuring step is within a predetermined range.

2. The method for applying tape according to claim 1.

5. A tape application device that peels off circular tapes from a tape unit having circular tapes aligned in the longitudinal direction of a strip-shaped sheet, and applies the tapes to an annular frame and a plate-like object disposed within an opening of the annular frame, a holding unit including an annular frame holding portion that holds the annular frame and a plate-like object holding portion that holds the plate-like object in the opening of the annular frame; a feeding unit that feeds out the tape unit; a winding unit that winds up the sheet from which the tape has been peeled; a peel plate disposed between the delivery unit and the take-up unit, the peel plate contacting the sheet to bend the tape unit and peel the tape from the sheet; an adhering roller for adhering the tape peeled from the sheet to the annular frame and the plate-like object while pressing the tape against the annular frame and the plate-like object; a moving unit that moves the bonding roller and the holding unit relative to each other; a controller for controlling each of the components; Equipped with a measuring unit for measuring the diameter of the tape attached to the annular frame and the plate-like object; The controller A determination unit is provided to determine whether the tape is properly attached based on the diameter of the tape measured by the measurement unit. A tape application device characterized by:

6. disposed between the delivery unit and the peel plate; The tape measuring device further includes a pre-measurement unit for measuring the diameter of the tapes attached to the strip-shaped sheet.

6. The tape application device according to claim 5, wherein:

7. The determination unit The quality of the adhesion state is determined based on the rate of change between the diameter of the tape measured by the pre-measurement unit and the diameter of the tape measured by the measurement unit.

7. The tape application device according to claim 6, wherein:

8. The determination unit The quality of the tape adhesion is judged based on whether the diameter of the tape measured by the measuring unit is within a predetermined range.

6. The tape application device according to claim 5, wherein:

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