Substrate container with gas diffusion device for allowing fluid to enter

Abstract

To provide a substrate container having a gas diffusion device for allowing a fluid to enter, in which the gas diffusion device is stably mounted on housing means.SOLUTION: A substrate container 100 includes: housing means 10 including a housing body 1, and at least one holding assembly; and at least one gas diffusion device 20. The housing body 1 has a connecting wall 12 and defines a housing space 14 with a front opening 141. The holding assembly is arranged on the connecting wall 12 of the housing body 1 so as to be located in the housing space 14, and the holding assembly has two side arms. The gas diffusion device 20 disposed in the housing space 14 has a holding frame, and the holding frame has a frame body held by each side arm and a connecting part connected to a gas entrance hole. Each gas diffusion device 20 is stably mounted on the housing means 10 by each side arm, each frame bodies, each connection part, and each gas entry hole.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a container for housing a substrate, and more particularly to a substrate container having a gas diffuser for allowing fluid ingress. [Background technology]

[0002] Substrates used in semiconductor manufacturing processes (for example, disks thinly sliced ​​from cylindrical ingots made of single-crystal silicon with highly controlled composition, commonly known as wafers) must be kept in a highly clean environment, and therefore must be transported in a substrate container that is shock-resistant and can protect the substrate from external atmospheric contamination. Patent Document 1 describes an example of such a substrate container.

[0003] In the semiconductor industry today, to maintain the cleanliness of substrates and prevent contamination by airborne particles, moisture, and other impurities, several gas diffusion devices are installed in the main body of a substrate container, as described in the aforementioned patent document. These gas diffusion devices are used to uniformly introduce clean, dry air (i.e., clean dry gas (CDA)) into the enclosure and replace the air inside the enclosure with the clean dry gas. The enclosure main body has a bottom on which each gas diffusion device is installed and multiple annular side walls extending downward from the bottom and adjacent to each gas diffusion device. Each annular side wall, together with a gas introduction module for the CDA to enter, defines a chamber. This chamber communicates with the outside through the gas introduction module and also with the interior of the corresponding gas diffusion device. Furthermore, a base for holding the gas introduction module in the installation space is attached to the bottom of the enclosure main body. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent Publication No. 2021-15951 Summary of the Invention [Problem to be solved by the invention]

[0005] However, mounting each gas diffusion device within the enclosure body presents problems such as instability and rattle, inconvenient installation / removal, and the risk of the device becoming detached from the enclosure body during operation. Current technology requires a large number of components to mount each gas introduction module, making installation difficult and reducing the airtightness after CDA is introduced into the chamber, leading to problems with component failure. Furthermore, the mounting method between the annular sidewall of the enclosure body, the gas introduction module, and the pedestal increases the overall thickness and volume of the substrate container, resulting in increased space consumption. Furthermore, because the pedestal must cooperate with each gas introduction module, the pedestal is bulky and requires additional manufacturing materials, increasing the manufacturing cost of the substrate container.

[0006] In view of the above problems, therefore, one object of the present invention is to provide a substrate container having a gas diffusion device for allowing fluid to enter, which can improve at least one of the drawbacks of the prior art. [Means for solving the problem]

[0007] In order to achieve the above object, the present invention provides a gas diffusion device comprising: a housing means; and at least one gas diffusion device; the housing means includes a housing body and at least one holding assembly, the housing body having a housing top wall, a housing bottom wall, and a connecting wall connected between the housing top wall and the housing bottom wall, the housing body having an accommodating space and at least one gas inlet hole, the accommodating space having a front opening, the holding assembly being disposed on the connecting wall of the housing body so as to be located within the accommodating space, the holding assembly having two side arms; The at least one gas diffusion device is arranged in the storage space and has a holding frame, the holding frame having a frame body held by clamping each of the side arms and a connection portion connected to the gas inlet hole, and a substrate container having a gas diffusion device for allowing a fluid to enter is provided.

[0008] The present invention also provides a gas diffusion device comprising: a housing means; and at least one gas diffusion device; the housing means includes a housing body and at least one holding assembly, the housing body having a housing top wall, a housing bottom wall, and a connecting wall connected between the housing top wall and the housing bottom wall, the housing body having an accommodating space and at least one gas inlet hole, the accommodating space having a front opening, the holding assembly being disposed on the housing body so as to be located within the accommodating space, the holding assembly having a first engaging member; The at least one gas diffusion device is arranged in the storage space and has a holding frame, the holding frame having a connection portion that connects to the gas inlet hole and at least one second engaging member that engages with the first engaging member, and a substrate container having such a gas diffusion device for allowing a fluid to enter is provided.

[0009] The present invention also provides a gas supply system including a housing body, at least one outer cover, and at least one gas introduction valve module, the housing main body has a housing top wall, a housing bottom wall, and a connecting wall connected between the housing top wall and the housing bottom wall, an accommodation space is formed in the housing main body, and the accommodation space has a front opening; The bottom wall of the housing is formed with at least one recessed groove recessed inward and at least one gas inlet hole communicating with the recessed groove, the at least one outer lid is connected to the bottom wall of the housing so as to define, together with the bottom wall of the housing, a chamber communicating with the gas inlet hole, and a gas inlet hole communicating with the chamber is formed in the outer lid; The at least one gas introduction valve module is disposed on the outer lid and corresponds to the gas introduction hole, and provides a substrate container having a gas diffusion device for introducing a fluid thereinto, the gas diffusion device operating as a gas diffusion device for introducing gas into the chamber via the gas introduction hole. [Effects of the Invention]

[0010] In the substrate container having a gas diffusion device for admitting a fluid according to the present invention, the correspondence between each side arm of the holding assembly of the housing means and the frame body of the holding frame of the gas diffusion device, and the correspondence between the gas inlet holes of the housing means and the connecting parts of the holding frame, ensure that the gas diffusion device is stably attached to the housing means and facilitate easy attachment and detachment of the gas diffusion device. In addition, the correspondence between the first engaging member of the holding assembly of the housing means and the second engaging member of the holding frame of the gas diffusion device, and the correspondence between the gas inlet holes of the housing means and the connecting parts of the holding frame, ensure that the gas diffusion device is stably attached to the housing means and facilitate easy attachment and detachment of the gas diffusion device. Furthermore, since each recessed groove, each gas inlet hole, each outer cover, each gas introduction hole, each gas introduction valve module, and each chamber can be located within the bottom wall of the housing, the complexity of installation is reduced, the stability of airtightness is improved, and the service life is extended.In addition, since each chamber is defined without disposing a bottom plate (not shown), the volume of the substrate container can be reduced and the manufacturing costs of the substrate container can be reduced. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a perspective view showing a first embodiment of a substrate container having a gas diffusion device for allowing fluid to enter, according to the present invention; [Figure 2] FIG. 2 is an exploded perspective view showing the mounting relationship between two gas diffusion devices and a housing means in the first embodiment. [Figure 3]This is a partially exploded oblique view showing how one of the two gas introduction valve modules, four of the eight screws, and one of the two outer covers and their two seal rings in the first embodiment are attached to the housing bottom wall of the housing main body of the housing means. [Figure 4] FIG. 10 is another exploded perspective view showing the state in which two recessed grooves and two gas inlet holes are formed in the bottom wall of the housing in the first embodiment. [Figure 5] FIG. 2 is a partially exploded perspective view showing the mounting relationship between the housing body, the holding assembly, the holding frame, and the porous tube in the first embodiment. [Figure 6] 3 is a partially exploded perspective view showing the mounting relationship between a holding frame and a fixed holding frame in the first embodiment. FIG. [Figure 7] FIG. 2 is a perspective view showing the configuration of one gas diffusion device in the first embodiment. [Figure 8] FIG. 2 is an exploded perspective view showing the mounting relationship between a porous tube and a holding frame of the gas diffusion device according to the first embodiment. [Figure 9] FIG. 2 is a partially exploded perspective view showing the mounting relationship between the connection portion, the elastic seal ring, and one gas inlet hole of the first embodiment. [Figure 10] This is a partial cross-sectional view showing how two elastic abutment members of the holding frame in the first embodiment abut against the top wall of the housing body, and how two second engagement members of the gas diffusion device are engaged with the first engagement members of the holding assembly. [Figure 11] FIG. 2 is a partial cross-sectional view of the first embodiment. [Figure 12] FIG. 2 is a partially exploded perspective view showing a configuration in which each outer cover of the first embodiment has a ring-shaped fastening rib. [Figure 13] 10 is a partial cross-sectional view showing how one gas introduction valve module is attached to a corresponding outer lid, and how the outer lid and the corresponding seal ring are attached to a bottom wall of the housing in the first embodiment. FIG. [Figure 14]FIG. 2 is an exploded perspective view showing the configuration of one gas introduction valve module in the first embodiment. [Figure 15] FIG. 10 is a partial cross-sectional view of another embodiment of the first example. [Figure 16] 10 is an exploded perspective view of a gas diffusion device in a second embodiment of a substrate container having a gas diffusion device for allowing fluid to enter, according to the present invention. FIG. [Figure 17] 10 is a partial cross-sectional view of a third embodiment of a substrate container having a fluid inlet gas diffusion device of the present invention. [Figure 18] FIG. 10 is a partial cross-sectional view of another embodiment of the third example. DETAILED DESCRIPTION OF THE INVENTION

[0012] Before describing the present invention in detail, it should be noted that in the following description, elements that perform the same role or function are designated by the same numerals even if they do not have exactly the same configuration.

[0013] 1, 2, and 3 show a first embodiment of a substrate container 100 of the present invention (a substrate container having a gas diffusion device for allowing fluid to enter). As shown, the substrate container 100 is a front-opening wafer transport case (Front Opening Unified Pod, abbreviated as FOUP). The substrate container 100 includes a housing means 10, two gas diffusion devices 20, two seal rings 4, two outer lids 6, a plurality of screws 7, and two gas introduction valve modules 8.

[0014] The housing means 10 has a housing body 1 and two holding assemblies 2. The housing body 1 has: The housing has a top wall 11, a bottom wall 13, and a connecting wall 12 connected between the top wall 11 and the bottom wall 13. The top wall 11, the bottom wall 13, and the connecting wall 12 together define an accommodation space 14. Two gas inlet holes 139 are formed through the bottom wall 13. The accommodation space 14 has a front opening 141.

[0015] 4, the housing bottom wall 13 has two recessed grooves 132 formed to recess inward, and two gas inlet holes 139 formed in the housing bottom wall 13, each communicating with each recessed groove 132. More specifically, the housing bottom wall 13 has an outer wall surface 131, two recessed wall bodies 134 connected to the outer wall surface 131, and two inner wall bodies 135 connected to the ends of each recessed wall body 134 opposite the outer wall surface 131 and spaced apart from the outer wall surface 131. A corresponding gas inlet hole 139 is formed in each inner wall body 135. Each recessed wall body 134 defines a corresponding recessed groove 132 together with the corresponding inner wall body 135.

[0016] Each recessed wall 134 has an annular shoulder surface 136 and an annular peripheral surface 137 connected between the outer wall surface 131 and the annular shoulder surface 136. Each annular shoulder surface 136 has a plurality of threaded holes 138 formed therein.

[0017] 1 and 4, the housing body 1 is an integrally formed component, and is made as a single component from a plastic material by a method such as injection molding. That is, the housing top wall 11, the connecting wall 12, and the housing bottom wall 13 (including the outer wall surface 131, the recessed wall members 134, and the inner wall members 135) are integrally formed.

[0018] As shown in Figures 2, 5, and 6, each holding assembly 2 is disposed on the connecting wall 12 of the housing body 1 so as to be located within the accommodation space 14. Each holding assembly 2 includes a connecting frame 21 and a fixed holding frame 22. In this first embodiment, the connecting frame 21 and the housing body 1 are fabricated as a single component by a method such as injection molding. An annular groove 211 is formed in the connecting frame 21. The fixed holding frame 22 includes two side arms 23, a first engaging member 24 located between the two side arms 23, and a back frame body 25 connected to each side arm 23 and the first engaging member 24. The back frame body 25 includes a back plate 251 and an annular peripheral wall 252. The back plate 251 is connected between each side arm 23 and the first engaging member 24. The annular peripheral wall 252 is formed to protrude from the back surface of the back plate 251 so as to be fitted into the annular groove 211, and the annular peripheral wall 252 of the back frame body 25 is fixedly connected to the connecting frame 21 by, for example, ultrasonic welding. In some other embodiments, each annular peripheral wall 252 can be removably attached to be fitted into the corresponding annular groove 211, thereby realizing removably attaching the fixed holding frame 22 to the corresponding connecting frame 21.

[0019] Each side arm 23 has a side arm member 231 connected to the back plate 251 and a front hook member 232 formed to protrude from the front end of the side arm member 231. The first engagement member 24 has a connection plate 240, an extension arm 241, and an engagement arm 242. The connection plate 240 is integrally formed on the tip surface of the back plate 251 so as to be flush with the tip of the back plate 251. The extension arm 241 further protrudes from the tip of the connection plate 240. The engagement arms 242 are connected to the tips of the extension arms 241 and protrude from both sides of the extension arms 241. The connection plate 240, extension arms 241, and engagement arms 242 of the first engagement member 24 together define two grooves 243 located rearward of the engagement arms 242 and spaced apart laterally. The engagement arms 242 have a front inclined surface 244.

[0020] As shown in FIGS. 1, 7 and 8, each gas diffusion device 20 is disposed in the accommodation space 14 and includes a holding frame 3, an elastic sealing ring 321 and a porous tube 5.

[0021] 5, 6, 8, and 9, the holding frame 3 is made as a single component by a method such as injection molding. The holding frame 3 has a frame body 31 that is used to be held by being sandwiched between the side arms 23, a connection portion 32 that is used to connect to the corresponding gas inlet holes 139, two second engaging members 33 that are used to engage with the corresponding first engaging members 24 and are spaced apart from each other, two elastic abutment members 34, a limiting protrusion portion 35, and two engaging hooks 36.

[0022] The frame body 31 has a frame member 310, a frame bottom wall 311 connected to the lower end of the frame member 310, and a frame top wall 312 located on the opposite side to the frame bottom wall 311 and connected to the upper end of the frame member 310. The connecting portion 32 extends so as to protrude downward from the lower surface of the frame bottom wall 311 and is inserted into the surrounding wall of the corresponding gas inlet hole 139.

[0023] Each second engagement member 33 has an arm portion 331 that is used to abut against the upper end of the corresponding engagement arm 242, and a rear hook member 332 that is formed to protrude from the rear end of the arm portion 331. The rear hook member 332 is used to engage the corresponding engagement arm 242 by being fitted into the corresponding groove 243. The rear hook member 332 has a rear inclined surface 333 that is used to contact the corresponding front inclined surface 244.

[0024] 6, 8, and 10, the elastic abutment members 34 are arranged on the frame top wall 312 at intervals and abut against the housing top wall 11 of the housing main body 1. Each elastic abutment member 34 has a protruding abutment arm 341 that extends so as to protrude upward from the frame top wall 312, and a flexible abutment arm 342 that is formed at the upper end of the protruding abutment arm 341 and abuts against the housing top wall 11 of the housing main body 1. The flexible abutment arm 342 has a spring arm segment 343 that extends laterally from the upper end of the protruding abutment arm 341, and a abutment segment 344 that extends so as to protrude upward from the upper end of the spring arm segment 343 and abuts against the housing top wall 11 of the housing main body 1.

[0025] The limiting protrusions 35 extend upward from the upper surface of the frame bottom wall 311. The engagement hooks 36 are spaced apart on the frame top wall 312. The frame top wall 312 of the frame body 31 has a front edge 315. The frame top wall 312 is recessed inward from the front edge 315 at the position of each engagement hook 36 and has two gaps 316 located on both sides of the engagement hook 36, allowing the engagement hook 36 to elastically connect to the frame top wall 312 and engage the porous tube 5. The configuration of each gap 316 allows the engagement hook 36 to elastically connect to the frame top wall 312 without protruding from the frame top wall 312. This prevents the engagement hook 36 from blocking the movement path of the corresponding elastic abutment member 34 when it deforms under pressure.

[0026] 9 and 11, elastic seal ring 321 is an O-shaped ring made of an elastic material such as rubber or silicone. Elastic seal ring 321 is fitted into connecting portion 32 of holding frame 3, and is sandwiched and held between housing bottom wall 13 of housing main body 1 and frame bottom wall 311 of frame body 31. This maintains an excellent airtight state between housing bottom wall 13 and holding frame 3, preventing gas leakage.

[0027] 4, each seal ring 4 is made of an elastic material such as rubber or silicone, and is formed as a ring-shaped plate. Each seal ring 4 is disposed in a corresponding recessed groove 132 and abuts against a corresponding annular shoulder surface 136. Each seal ring 4 is formed with a plurality of through holes 41 that communicate with each screw hole 138.

[0028] As shown in Figures 7 and 8, the porous tube 5 is positioned between the frame bottom wall 311 and the frame top wall 312 of the frame body 31. The porous tube 5 engages with the limiting protrusions 35 of the holding frame 3 and is engaged with the engaging hooks 36, thereby stably securing the porous tube 5 to the holding frame 3. When a user attempts to attach the porous tube 5 to the holding frame 3, the user first diagonally engages the porous tube 5 with the limiting protrusions 35. Then, the engaging hooks 36 are bent upward to deform and accumulate restoring force. The porous tube 5 is then rotated toward the frame member 310, moving the porous tube 5 below the frame top wall 312. Finally, when the engaging hooks 36 are released, the accumulated elastic restoring force causes the engaging hooks 36 to return to their original position and automatically engage the tip of the porous tube 5, completing the attachment of the porous tube 5. When a user wishes to remove a porous tube 5 from the corresponding holding frame 3, they simply push each of the engaging hooks 36 upward, causing the engaging hooks 36 to separate from the porous tube 5, and then they can rotate the upper end of the porous tube 5 forward and separate from the frame top wall 312. Finally, they simply move the porous tube 5 upward to separate it from the limiting protrusions 35, thereby completing the removal of the porous tube 5. This improves the ease of installation and removal of the porous tube 5.

[0029] The angle formed by the surface formed by the front ends of the front hook members 232 of each side arm 23 and the surface for connecting to the connecting frame 21 of the connecting wall 12 is a specific angle, which allows the gas diffusion device 20 to face the center of the accommodation space 14. More specifically, the specific angle is 0° to 45°, preferably 5° to 30°, and most preferably 7° to 20°. When the angle formed by the surface formed by the front ends of the front hook members 232 and the surface for connecting to the connecting frame 21 of the connecting wall 12 is within the range of 7° to 20°, the frame body 31 sandwiched and held by the side arms 23 rotates by 7° to 20° toward the center of the accommodation space 14 from the surface for connecting to the connecting frame 21 of the connecting wall 12. Therefore, by orienting the diffusion surface of the porous tube 5 engaged with the holding frame 3 toward the center of the accommodation space 14, clean dry gas (clean dry air, abbreviated as CDA) can be uniformly diffused throughout the accommodation space 14.

[0030] In addition, the connection part 32 can extend so as to protrude upward from the housing bottom wall 13 of the housing main body 1, and can also be an enclosing wall that is inserted into an air hole (not shown) in the frame bottom wall 311 of the frame body 31 to surround and define the gas inlet hole 139.As long as the CDA can enter the corresponding porous tube 5 via the connection part 32, the position at which the connection part 32 is connected is not limited to the configuration described in this embodiment.

[0031] As shown in Figures 4, 12, and 13, each outer lid 6 is connected to the housing bottom wall 13 and is at least partially fitted into a corresponding recessed groove 132. Each outer lid 6, together with the housing bottom wall 13, defines a chamber 133 communicating with a corresponding gas inlet hole 139, and each outer lid 6 is formed with a gas inlet hole 61 communicating with the corresponding chamber 133. More specifically, each outer lid 6 is surrounded by an annular peripheral surface 137 of a corresponding recessed wall 134 and is spaced from a corresponding inner wall 135. Each outer lid 6 has a cap plate 62 and a ring-shaped fastening rib 63. The cap plate 62 has a plate body 621 and a tube body 622 formed in the plate body 621. The plate body 621 has an inner cap surface 623 and an outer cap surface 624 opposite the inner cap surface 623. The tube body 622 has a peripheral wall 625 that connects to the plate body 621 and protrudes from the inner cap surface 623 and the outer cap surface 624, and an end wall 626 that connects to the inner end of the peripheral wall 625 and is located inside the inner cap surface 623. A threaded hole 627 is formed in the peripheral wall 625. A gas inlet hole 61 that communicates with the threaded hole 627 is formed in the end wall 626. The position of the gas inlet hole 61 projected perpendicularly onto the inner wall body 135 is offset from the position of the gas inlet hole 139, so that the gas inlet hole 61 is positioned offset from the gas inlet hole 139. A plurality of through holes 628 extending between the inner cap surface 623 and the outer cap surface 624 are formed in the plate body 621, so that each through hole 628 communicates with each passage hole 41.

[0032] Each ring-shaped fastening rib 63 is formed to protrude from the inner cap surface 623 of the corresponding cap plate 62 and surrounds the gas inlet hole 61. The ring-shaped fastening rib 63 comes into compressive contact with the corresponding seal ring 4. As a result, each outer cover 6 and the corresponding annular shoulder surface 136 hold the corresponding seal ring 4 together.

[0033] 4 , each screw 7 passes through a corresponding through hole 628 of the corresponding outer lid 6 and a corresponding through hole 41 of the corresponding seal ring 4 and is threaded into a corresponding screw hole 138 to fix the outer lid 6 and the seal ring 4 to the annular shoulder surface 136 of the housing bottom wall 13. Each outer lid 6 is pressed against the corresponding seal ring 4 by the ring-shaped fastening rib 63, thereby maintaining a good airtight state between each outer lid 6 and the corresponding annular shoulder surface 136 and preventing the CDA in the chamber 133 from leaking through the gap between the housing bottom wall 13 and the outer lid 6. Because the sealing effect is achieved by screwing the corresponding outer lid 6 and the corresponding seal ring 4 to the corresponding annular shoulder surface 136 with the screw 7, the complexity of installing each outer lid 6 is reduced.

[0034] The method of fixing each outer lid 6 to the housing bottom wall 13 is not limited to the above embodiment, and it is also possible to connect each outer lid 6 to the housing bottom wall 13 using, for example, ultrasonic welding technology, in which case there is no need to use each screw 7 and each seal ring 4.

[0035] 1 and 13, the housing bottom wall 13 is recessed to form a recessed groove 132, and at least a portion of the outer lid 6 is fitted into the recessed groove 132, thereby reducing the overall thickness of the outer lid 6 when attached to the housing bottom wall 13. Specifically, in this embodiment, the outer cap surface 624 of each outer lid 6 is flush with the outer wall surface 131 of the housing bottom wall 13, thereby effectively reducing the overall thickness of the outer lid 6 when attached to the housing bottom wall 13.

[0036] 4 and 13, each porous tube 5 is located within the storage space 14. Each porous tube 5 has a connecting portion 32 that is inserted into and connected to a corresponding gas inlet hole 139. Each porous tube 5 communicates between the storage space 14 and a corresponding chamber 133.

[0037] 13 and 14, each gas introduction valve module 8 is disposed on a corresponding outer lid 6, corresponds to a gas introduction hole 61, and operates as a gas diffusion device that introduces gas into a corresponding chamber 133 via the gas introduction hole 61. More specifically, each gas introduction valve module 8 includes a check valve 82, a middle communication pipe member 81 that is threadedly connected to a corresponding threaded hole 627 of the outer lid 6, and a base 83 that is attached to the middle communication pipe member 81. The check valve 82 is attached within the base 83. The base 83 may be made of an elastic material, but is not limited to an elastic material. A corresponding connection hole 831 is formed in the base 83. The corresponding connection hole 831 is connected to a CDA supply device (not shown; one example is the SELOP-7-N series FOUP-compatible load port from Sinfonia Technology) that supplies CDA, and the CDA provided by the CDA supply device flows into the chamber 133 via the check valve 82, the middle connecting pipe member 81, and the gas inlet hole 61. Because the position of the gas inlet hole 61 of each outer cover 6, projected perpendicularly onto the inner wall body 135, is offset from the position of the gas inlet hole 139, the CDA diffuses evenly within each chamber 133 before entering each porous tube 5, thereby stabilizing the flow entering the porous tube 5. Each porous tube 5 can deliver CDA evenly into the storage space 14, so the CDA diffuses evenly within the storage space 14.

[0038] 6, 9, 10, and 11, when a user attempts to mount each gas diffusion device 20 on the housing means 10, the user first inserts the connecting portion 32, on which the elastic seal ring 321 is fitted, obliquely into the corresponding gas inlet hole 139. Then, the user rotates the gas diffusion device 20 toward the fixed holding frame 22 of the corresponding holding assembly 2. The front inclined surface 244 of each engagement arm 242 is configured to press against the rear inclined surface 333 of the corresponding second engagement member 33, bending and deforming the corresponding arm portion 331, causing the rear hook member 332 to engage with the engagement arm 242. Therefore, when the front inclined surface 244 of each engagement arm 242 contacts the rear inclined surface 333 of the corresponding second engagement member 33, the force applied by the front inclined surface 244 to the rear inclined surface 333 bends and deforms the arm portion 331 upward, accumulating an elastic restoring force. When the rear hook member 332 of each second engagement member 33 passes over the engagement arm 242 and becomes adjacent to the corresponding groove 243, the elastic restoring force accumulated in the arm portion 331 returns the rear hook member 332, causing the arm portion 331 to abut against the tip of the engagement arm 242 and for the rear hook member 332 to fit into the corresponding groove 243 and engage with the corresponding engagement arm 242, so that each second engagement member 33 becomes engaged with the corresponding first engagement member 24.

[0039] At this time, the engagement arms 242 are pressed against the frame members 310 of the frame body 31, preventing rearward movement of the gas diffusion device 20. Because the frame member 310 side of the frame body 31 is pressed against the side arm members 231 of each side arm 23, the side arm members 231 of each side arm 23 sandwich the frame member 310 together, preventing left and right swinging of the gas diffusion device 20. The front hook members 232 of each side arm 23 are engaged with the front ends of the frame members 310 of the frame body 31, preventing forward movement of the gas diffusion device 20. The abutment segments 344 of each elastic abutment member 34 contact the underside of the housing top wall 11 of the housing main body 1 and are pressed by the housing top wall 11, so that the spring arm segments 343 are bent downward relative to the protruding abutment arms 341 and deform, accumulating elastic restoring force. As a result, the elastic restoring force of the abutment segments 344 of each elastic abutment member 34 is applied to the bottom surface of the housing top wall 11, causing the frame bottom wall 311 of the frame body 31 to press the elastic seal ring 321 against the housing bottom wall 13 of the housing main body 1, and the frame bottom wall 311 and the housing bottom wall 13 tightly hold the elastic seal ring 321, thereby achieving a good airtight seal. In this way, the effect of stably mounting each gas diffusion device 20 to the housing means 10 is achieved.

[0040] When a user wishes to remove a gas diffusion device 20, they first push the front hook member 232 of the corresponding side arm 23 outward to separate it from the frame member 310 of the frame body 31. Then, they push the rear hook members 332 upward on the frame member 310 to separate them from the grooves 243. At this time, the holding frame 3 is removed from the housing means 10. Finally, the porous tube 5 is removed from the holding frame 3 as described above. This improves the ease of installation and removal of the gas diffusion device 20.

[0041] When using the substrate container 100, the user connects the CDA supply device to each gas introduction valve module 8 and starts the CDA supply device. The CDA supply device continuously sends CDA from each gas introduction valve module 8 to each chamber 133, and the CDA flows uniformly through each chamber 133, stably entering each porous tube 5 through each connection part 32, and then uniformly diffusing into the storage space 14 through each porous tube 5, thereby essentially operating as a gas diffusion device.

[0042] As shown in FIG. 15, in some other embodiments of this first embodiment, the check valve 82 is mounted in the middle communication pipe member 81.

[0043] In some other embodiments of the first example, each recessed wall 134 does not have the annular shoulder surface 136 and the annular peripheral surface 137, and each recessed wall 134 is recessed from the outer wall surface 131 and directly connects to the inner wall 135. Each cap plate 62 has an abutting top wall (not shown) that protrudes from the peripheral portion of the inner cap surface 623 to the corresponding inner wall 135, each through hole 628 penetrates from the outer cap surface 624 through the plate body 621 and the abutting top wall, and each screw 7 has a length sufficient to be threaded from the outer cap surface 624 into each screw hole 138. The position of the gas introduction hole 61 projected vertically onto the inner wall 135 is offset from the position of the gas entry hole 139.

[0044] As shown in Figure 16, the second embodiment of the substrate container 100 of the present invention has almost the same overall structure as the first embodiment, with the following differences: Each gas diffusion device 20 has a front filter 51 and a rear filter 52. The frame body 31 of the holding frame 3 has a front case 313 and a rear case 314 connected to the rear side of the front case 313. A plurality of front exhaust ports 317 are formed in the front case 313. A plurality of rear exhaust ports 318 are formed in the rear case 314. The front filters 51 are disposed inside the corresponding front cases 313 so as to correspond to each front exhaust port 317. The rear filters 52 are disposed inside the corresponding rear cases 314 so as to correspond to each rear exhaust port 318. The front cases 313, together with the rear cases 314, define a frame bottom wall 311 and a frame top wall 312.

[0045] As shown in Figure 17, the overall structure of the third embodiment of the substrate container 100 of the present invention is almost the same as that of the first embodiment, but the differences are that a portion of the cap plate 62 of each outer lid 6 protrudes outside the outer wall surface 131 of the housing bottom wall 13, and the outer cap surface 624 of each outer lid 6 and the outer wall surface 131 of the housing bottom wall 13 are not flush with each other, and each screw 7 has a length sufficient to be screwed from the outer cap surface 624 into each screw hole 138.

[0046] As shown in FIG. 18, in some other embodiments of this third embodiment, the check valve 82 is mounted in the middle communicating pipe member 81.

[0047] In some other embodiments of this third example, each recessed wall 134 does not have the annular shoulder surface 136 and the annular peripheral surface 137, and the recessed wall 134 is recessed from the outer wall surface 131 and directly connected to the inner wall 135. Each plate body 621 is directly connected to the periphery of the corresponding recessed groove 132 of the outer wall surface 131, the outer cover 6 holds the corresponding seal ring 4 together with the outer wall surface 131, and each screw hole 138 is formed at a position corresponding to the through hole 628 of the outer wall surface 131. To be more specific, the plate body 621 and the ring-shaped fastening rib 63 of the outer cover 6 hold the corresponding seal ring 4 together with the outer wall surface 131.

[0048] In some other embodiments of this third example, each recessed wall 134 does not have the annular shoulder surface 136 and the annular peripheral surface 137, and instead the recessed wall 134 is recessed from the outer wall surface 131 and directly connects to the inner wall 135. Each cap plate 62 has an abutting top wall (not shown) that projects from the peripheral portion of the inner cap surface 623 to the corresponding inner wall 135, and each through-hole 628 passes through the outer cap surface 624, through the plate body 621, and the abutting top wall. The position of the gas introduction hole 61 projected perpendicularly onto the inner wall 135 is offset from the position of the gas entry hole 139.

[0049] It should be emphasized again that the method of fixing the outer lids 6 and the housing bottom wall 13 of the present invention is not limited to the above embodiments, and it is also possible to connect the outer lids 6 and the housing bottom wall 13 together by a method such as ultrasonic welding, and in such an embodiment it is not necessary to have the screws 7 and the sealing rings 4.

[0050] In summary, the correspondence between the side arms 23 of the holding assembly 2 of the housing means 10 and the frame body 31 of the holding frame 3 of the gas diffusion device 20, and the correspondence between the gas inlet holes 139 of the housing means 10 and the connecting portions 32 of the holding frame 3, ensures that the gas diffusion device 20 is stably attached to the housing means 10 and also improves the convenience of attaching and detaching the gas diffusion device 20, thereby reliably achieving the object of the present invention. In addition, the correspondence between the first engaging members 24 of the holding assembly 2 of the housing means 10 and the second engaging members 33 of the holding frame 3 of the gas diffusion device 20, and the correspondence between the gas inlet holes 139 of the housing means 10 and the connecting portions 32 of the holding frame 3, ensures that the gas diffusion device 20 is stably attached to the housing means 10 and also improves the convenience of attaching and detaching the gas diffusion device 20. Furthermore, since each recessed groove 132, each gas inlet hole 139, each outer cover 6, each gas introduction hole 61, each gas introduction valve module 8, and each chamber 133 can be located within the bottom wall 13 of the housing, the complexity of installation is reduced, the stability of airtightness is improved, and the service life is extended. In addition, since each chamber 133 is defined without disposing a bottom plate (not shown), the volume of the substrate container 100 can be reduced and the manufacturing cost of the substrate container 100 can be reduced.

[0051] Although the embodiment of the present invention has been described above, the present invention is not limited to this, and various modifications are possible without departing from the spirit of the present invention. [Explanation of symbols]

[0052] 100 Substrate container 10. Housing means 1. Main body 11 Top wall of the enclosure 12 Connecting Wall 13 Bottom wall of the enclosure 131 Exterior wall 132 Depressed groove 133 Chamber 134 Recessed Wall 135 Inner Wall 136 Annular shoulder surface 137 Circumferential Surface 138 screw holes 139 Gas inlet hole 14 Containment Space 141 Front opening 2 Retaining Assembly 21 Connection Frame 211 Circular groove 22 Fixed holding frame 23 Sidearm 231 Side arm member 232 Front hook member 24 first engaging member 240 Connecting Plate 241 Extension Arm 242 Engagement arm 243 Groove 244 Front Slope 25 Back frame body 251 Backplate 252 Circular wall 20 Gas Diffuser 3 Retaining Frame 31 Frame body 310 Frame members 311 Frame Bottom Wall 312 Frame Top Wall 313 Front Case 314 Rear case 315 Front edge 316 Gap 317 Front outlet 318 Rear outlet 32 Connection 321 Elastic seal ring 33 second engaging member 331 Arm 332 Rear hook member 333 Rear slope 34 Elastic contact member 341 Protrusion abutment arm 342 Elastic Contact Arm 343 Spring Arm Segment 344 abutting segments 35 Restriction protrusion 36 Engagement hook 4 seal rings 41 Passing hole 5. Porous tube 51 Front filter 52 Rear filter 6 Outer lid 61 Gas inlet 62 Cap Plate 621 Plate Body 622 Tube Body 623 Inner cap surface 624 Outer cap surface 625 Perimeter Wall 626 End Wall 627 screw hole 628 Through hole 63 Ring-shaped fastening rib 7 screws 8 Gas Inlet Valve Module 81 Middle connecting pipe member 82 Check valve 83 Pedestal 831 compatible connection hole

Claims

1. a housing means and at least one gas diffusion device; the housing means includes a housing body and at least one holding assembly, the housing body having a housing top wall, a housing bottom wall, and a connecting wall connected between the housing top wall and the housing bottom wall, the housing body having an accommodating space and at least one gas inlet hole, the accommodating space having a front opening, the holding assembly being disposed on the connecting wall of the housing body so as to be located within the accommodating space, the holding assembly having two side arms; The at least one gas diffusion device is arranged in the storage space and has a holding frame, the holding frame having a frame body held by clamping each of the side arms and a connection portion connected to the gas inlet hole, a substrate container having a gas diffusion device for allowing a fluid to enter.

2. 2. The substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 1, wherein the holding assembly has a first engagement member located between each of the side arms, and the holding frame has at least one second engagement member engaged with the first engagement member.

3. 3. A substrate container having a gas diffusion device for allowing a fluid to enter, as described in claim 2, wherein the first engagement member has an engagement arm that presses the frame body, and the first engagement member has at least one groove formed on the rear side of the engagement arm, and the second engagement member has an arm portion that abuts against the top end of the engagement arm and a rear hook member formed to protrude from the rear end of the arm portion, and the rear hook member is fitted into the groove and engaged with the engagement arm.

4. the engagement arm has a front ramp, and the rear hook member has a rear ramp adapted to contact the front ramp; 4. A substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 3, wherein the front slope is configured to push and move the rear slope, thereby bending and deforming the arm portion and causing the rear hook member to engage with the engagement arm.

5. 2. A substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 1, wherein the frame body has a frame bottom wall and a frame top wall opposite the frame bottom wall, and the holding frame further has at least one elastic abutment member arranged on the frame top wall so as to abut against the enclosure body.

6. 2. The substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 1, wherein each of the side arms has a side arm member that presses one side of the frame body, and a front hook member that is arranged to protrude from the front end of the side arm member and engages with the frame body.

7. The holding assembly further includes a connection frame and a fixed holding frame, the connection frame being integrally connected to the connection wall of the housing body; 2. The substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 1, wherein the fixed holding frame has each of the side arms and a back frame body connected to each of the side arms, and the back frame body is connected to the connection frame.

8. 2. A substrate container having a gas diffusion device for allowing a fluid to enter, as described in claim 1, wherein the frame body has a frame bottom wall and a frame top wall on the opposite side of the frame bottom wall, and the connection portion extends to protrude downward from the frame bottom wall of the frame body and is positioned to be inserted into the surrounding wall of the gas inlet hole.

9. 2. A substrate container having a gas diffusion device for allowing a fluid to enter, as described in claim 1, wherein the frame body has a frame bottom wall and a frame top wall on the opposite side of the frame bottom wall, and the connection portion extends to protrude upward from the frame bottom wall of the enclosure body and is inserted into the surrounding wall of the frame bottom wall of the frame body.

10. 9. A substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 8, wherein the gas diffusion device further has an elastic seal ring fitted to the surrounding wall and sandwiched and held by the enclosure main body and the frame bottom wall of the frame body.

11. 10. A substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 9, wherein the gas diffusion device further has an elastic seal ring fitted to the surrounding wall and sandwiched and held by the enclosure main body and the frame bottom wall of the frame body.

12. 6. A substrate container having a gas diffusion device for allowing a fluid to enter, as described in claim 5, wherein the elastic abutment member has a protrusion abutment arm extending so as to protrude upward from the frame top wall of the frame body, and an elastic abutment arm formed at the upper end of the protrusion abutment arm so as to abut against the housing main body.

13. 13. A substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 12, wherein the elastic abutment arm has a spring arm segment extending laterally from the upper end of the protruding abutment arm, and an abutment segment extending upward from the upper end of the spring arm segment to protrude upward and abut against the housing body.

14. 9. A substrate container having a gas diffusion device for allowing a fluid to enter, as described in claim 8, wherein the holding frame further has a limiting protrusion extending to protrude upward from the frame bottom wall of the frame body, and the gas diffusion device further has a porous tube arranged between the frame bottom wall of the frame body and the frame top wall of the frame body, the porous tube being engaged with the limiting protrusion.

15. 10. A substrate container having a gas diffusion device for allowing a fluid to enter, as described in claim 9, wherein the holding frame further has a limiting protrusion extending to protrude upward from the frame bottom wall of the frame body, and the gas diffusion device further has a porous tube arranged between the frame bottom wall of the frame body and the frame top wall of the frame body, the porous tube being engaged with the limiting protrusion.

16. The substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 14, wherein the holding frame further has an engagement hook arranged on the frame top wall of the frame body, and the porous tube is engaged with the engagement hook.

17. The substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 15, wherein the holding frame further has an engagement hook arranged on the frame top wall of the frame body, and the porous tube is engaged with the engagement hook.

18. 14. The substrate container with a fluid inlet gas diffuser of claim 13, wherein the holding frame is an integrally formed single piece.

19. 2. A substrate container having a gas diffusion device for allowing a fluid to enter, as described in claim 1, wherein the frame body has a front case and a rear case connected to the rear side of the front case, the front case having a plurality of front exhaust ports formed therein and the rear case having a plurality of rear exhaust ports formed therein, and the gas diffusion device has a front filter arranged inside the front case corresponding to each of the front exhaust ports and a rear filter arranged within the rear case corresponding to each of the rear exhaust ports.

20. 2. The substrate container having a gas diffusion device that allows a fluid to enter, as described in claim 1, wherein the holding assembly further includes a connecting frame and a fixed holding frame, the connecting frame being integrally connected to the connecting wall of the enclosure body, the fixed holding frame having each of the side arms and a back frame body connected to each of the side arms, the back frame body being connected to the connecting frame, and a surface where the front end edges of each of the side arms are formed continuously with each other and a surface of the connecting wall connected to the connecting frame forming a specific angle so as to direct the gas diffusion device toward the center of the storage space.

21. 15. The substrate container with a fluid inlet gas diffuser of claim 14, wherein the holding frame is an integrally formed single piece.

22. 16. The substrate container with a fluid inlet gas diffuser of claim 15, wherein the holding frame is an integrally formed single piece.

23. a housing means and at least one gas diffusion device; the housing means includes a housing body and at least one holding assembly, the housing body having a housing top wall, a housing bottom wall, and a connecting wall connected between the housing top wall and the housing bottom wall, the housing body having an accommodating space and at least one gas inlet hole, the accommodating space having a front opening, the holding assembly being disposed on the housing body so as to be located within the accommodating space, and the holding assembly having a first engaging member; The at least one gas diffusion device is disposed in the storage space and has a holding frame, the holding frame having a connection portion that connects to the gas inlet hole and at least one second engaging member that engages with the first engaging member.

24. The device includes a housing body, at least one outer cover, and at least one gas introduction valve module; the housing main body has a housing top wall, a housing bottom wall, and a connecting wall connected between the housing top wall and the housing bottom wall, an accommodation space is formed in the housing main body, and the accommodation space has a front opening; The bottom wall of the housing is formed with at least one recessed groove recessed inward and at least one gas inlet hole communicating with the recessed groove, the at least one outer lid is connected to the bottom wall of the housing so as to define, together with the bottom wall of the housing, a chamber communicating with the gas inlet hole, and a gas inlet hole communicating with the chamber is formed in the outer lid; The at least one gas introduction valve module is disposed on the outer lid and corresponds to the gas introduction hole, and the substrate container has a gas diffusion device for introducing a fluid thereinto, the gas diffusion device operating as a gas diffusion device for introducing a gas into the chamber via the gas introduction hole.

25. 25. A substrate container having a gas diffusion device for allowing a fluid to enter, as described in claim 24, wherein the housing bottom wall has an outer wall surface, a recessed wall body connected to the outer wall surface so as to surround the outer lid, and an inner wall body connected to an end of the recessed wall body opposite the outer wall surface and spaced apart from the outer wall surface, the gas inlet hole being formed in the inner wall body, the outer lid being spaced apart from the inner wall body, and the position of the gas introduction hole projected perpendicularly onto the inner wall body being offset from the position of the gas inlet hole.

26. 25. The substrate container having a gas diffusion device for allowing fluid ingress as recited in claim 24, wherein the enclosure body is an integrally formed single component.

27. 25. A substrate container having a gas diffusion device for allowing a fluid to enter, as described in claim 24, wherein the housing bottom wall has an outer wall surface, a recessed wall body connected to the outer wall surface so as to surround the outer lid, and an inner wall body connected to an end of the recessed wall body opposite the outer wall surface and spaced apart from the outer wall surface, the recessed wall body together with the inner wall body defining the recessed groove, and the gas inlet hole formed in the inner wall body.

28. 25. The substrate container with fluid inlet gas diffuser of claim 24, further comprising a seal ring positioned between the enclosure bottom wall and the outer lid.

29. 29. A substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 28, wherein the housing bottom wall has an outer wall surface and a recessed wall connected to the outer wall surface and surrounding the outer lid, and the seal ring is positioned in the recessed groove.

30. 30. A substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 29, wherein the recessed wall has an annular shoulder surface for the seal ring to abut against, and the annular shoulder surface holds the seal ring in place together with the outer lid.

31. 31. The substrate container with a gas diffuser for fluid entry of claim 30, wherein the recessed wall further comprises an annular peripheral surface connected between the outer wall surface and the annular shoulder surface and surrounding the outer lid.

32. 30. A substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 29, wherein the outer lid has a cap plate surrounded by the recessed wall and defining the gas inlet hole, and a ring-shaped fastening rib formed to protrude from one side of the cap plate and surrounding the gas inlet hole, the ring-shaped fastening rib contacting the seal ring in a compressive manner.

33. A substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 30, wherein a plurality of screw holes are formed on the annular shoulder surface, and the substrate container further has a plurality of screws that penetrate the outer lid and the seal ring and are screwed into each of the screw holes.

34. 25. A substrate container having a gas diffusion device for allowing a fluid to enter, as described in claim 24, wherein the bottom wall of the housing has an outer wall surface and a recessed groove formed so as to recess inward from the outer wall surface, the outer lid has an outer cap surface, and the outer cap surface and the outer wall surface of the bottom wall of the housing are flush with each other.

35. 25. The substrate container with a fluid inlet gas diffuser of claim 24, wherein the at least one gas introduction valve module comprises a check valve.

36. 36. A substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 35, wherein the at least one gas introduction valve module has a middle connecting pipe member connected to the outer lid and a base attached to the middle connecting pipe member, and the check valve is attached within the base.

37. 36. A substrate container having a gas diffusion device for allowing fluid to enter, as described in claim 35, wherein the at least one gas introduction valve module has a middle connecting pipe member connected to the outer lid and a base attached to the middle connecting pipe member, and the check valve is attached within the middle connecting pipe member.

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