Metal mask for OLED deposition, manufacturing facilities for the same, and method for manufacturing the same

Abstract

To provide a metal mask for OLED deposition, manufacturing facilities for the same, and a method for manufacturing the same.SOLUTION: A metal mask for OLED deposition includes: multiple unit mother glass materials arranged adjacent to each other with a preset thickness and width and coupled to each other; a coupling unit that couples the multiple unit mother glass materials arranged adjacent to each other; and a welding unit welding and fixing the coupling unit.SELECTED DRAWING: Figure 1a

Description

[Technical Field]

[0001] The present invention relates to a metal mask for OLED deposition, a manufacturing process thereof, and a manufacturing equipment for the metal mask for OLED deposition. More specifically, the present invention relates to a metal mask for OLED deposition, a manufacturing process thereof, and a manufacturing equipment for the metal mask for OLED deposition, which can manufacture mother glass materials with a width of 1400 mm or more that can be used for 8th generation half mother glass by bonding and welding unit mother glass materials to form various required sizes. [Background technology]

[0002] OLED metal masks are a key component used in the manufacture of OLED displays. They are made from thin metal films with precise patterns and serve to precisely deposit the light-emitting organic materials of OLED elements.

[0003] The manufacturing process of OLED metal masks can be roughly divided into the following stages: substrate preparation stage -> pattern formation stage -> etching inspection and correction stage -> finishing stage -> quality control stage -> packaging and shipping stage.

[0004] In the substrate preparation step, a metal substrate material such as nickel, iron alloy, or stainless steel is selected. Then, the surface of the substrate is cleaned by pickling, plasma treatment, or the like, and surface treatment is performed to remove oxides. Then, the flatness of the substrate is improved by roller polishing, rolling, or the like.

[0005] In the pattern formation step, a photomask having a desired pattern is fabricated, and then the pattern is transferred onto a photoresist (PR) using the photomask, followed by exposure. The exposed photoresist is then developed to form the desired pattern.

[0006] In the etching step, an etchant selected according to the photoresist pattern is selected, and the metal substrate is etched using the etchant according to the photoresist pattern, and the remaining photoresist is then removed (lift-off).

[0007] In the inspection and correction step, the accuracy of the pattern is inspected using an optical microscope, SEM, etc., and defects such as poor etching and damaged patterns are corrected.

[0008] In the finishing process, the metal surface is coated to protect it from oxidation and corrosion, and then a frame is attached so that it can be attached to an OLED display.

[0009] In the quality control stage, the accuracy and dimensions of the pattern are measured to perform quality control, and then the pattern is attached to an OLED display for a functional test.

[0010] In the packaging and shipping step, the manufactured OLED metal mask is safely packaged and shipped to the customer.

[0011] Meanwhile, the 6th generation half-size metal mask will be made into a mother glass-like mask using the 1040mm width already set at the time of production.

[0012] The 6th generation half-size metal mask is a precision part used in the manufacture of OLED displays. It is made half the size of the conventional 6th generation metal mask and is suitable for mobile displays such as smartphones.

[0013] The 6th generation half-size metal mask is half the size of the 6th generation metal mask (1040mm x 1330mm).

[0014] Typically, a 6th generation half-size metal mask is made in the shape of mother glass using a preset width of 1040 mm, and fine holes are formed using a laser process.

[0015] These 6th generation half-size metal masks can create tens of millions of minute holes of 20 to 30 μm in size, making it possible to manufacture high-resolution OLED displays. The precise manufacturing process reduces the defect rate and improves yield, and the reduced amount of material used compared to 6th generation metal masks reduces production costs.

[0016] However, in the case of 8th generation half-size metal masks, there is a problem in that it is impossible to manufacture them into mother glass-like masks due to limitations on the width of the material.

[0017] The reasons why it is impossible to produce an 8th generation half-size metal mask in the shape of mother glass are as follows.

[0018] It is impossible to produce an 8th generation half-size metal mask in the shape of mother glass due to the width limitations of the material.

[0019] The size of an 8th generation OLED substrate is approximately 2200mm x 2500mm, and when this is divided in half, the size of an 8th generation half-size substrate is approximately 1100mm x 2500mm.

[0020] In terms of a manufacturing method of a metal mask, a metal mask is manufactured by forming a precise pattern on a thin metal plate, but the laser process or photo process that is mainly used has a limit on the maximum width.

[0021] Currently, the maximum width possible for laser processes is approximately 1040 mm, and the maximum width possible for photo processes is approximately 1200 mm.

[0022] The width of an 8th generation half-size substrate is approximately 1100 mm, which is larger than or close to the maximum width of the laser and photo processes currently used.

[0023] Therefore, in order to manufacture 8th generation half-size substrates in the form of mother glass, a new process technology that supports a maximum width of 1,100 mm or more is required. [Prior art documents] [Patent documents]

[0024] [Patent Document 1] Republic of Korea Patent No. 10-259556 (Registration date: October 25, 2023) Summary of the Invention [Problem to be solved by the invention]

[0025] The present invention has been devised to solve the above-mentioned problems, and the objects of the present invention are as follows.

[0026] An object of the present invention is to provide a metal mask for OLED deposition, a manufacturing process thereof, and a manufacturing equipment for a metal mask for OLED deposition, which can manufacture mother glass materials with a width of 1400 mm or more that can be used for 8th generation half mother glass by bonding and welding unit mother glass materials to form various required sizes.

[0027] Another object of the present invention is to provide a metal mask for OLED deposition, a manufacturing process thereof, and a manufacturing equipment for the metal mask for OLED deposition, which can effectively prevent mask bending that may occur when unit mother glass materials are bonded and connected to each other.

[0028] The objects of the present invention are not limited to those mentioned above, and other objects and advantages of the present invention not mentioned above can be understood from the following description and can be more clearly understood from the examples of the present invention. Furthermore, it can be easily understood that the objects and advantages of the present invention can be achieved by the means and combinations thereof set forth in the claims. [Means for solving the problem]

[0029] To achieve the above object, the present invention provides a metal mask for OLED deposition.

[0030] The metal mask for OLED deposition includes a plurality of unit mother glass materials that are arranged adjacent to each other with a predetermined thickness and width and are bonded to each other, a bonding portion that bonds the plurality of unit mother glass materials arranged adjacent to each other to each other, and a welding portion that welds and fixes the bonding portion.

[0031] Here, the plurality of unit mother glass materials are It is preferable that the connection be performed via the connection portion that forms one or more step portions.

[0032] Preferably, the upper surfaces of the plurality of unit mother glass materials bonded together are surface-treated by etching to form a substantially uniform plane.

[0033] In addition, the joining lines of the joining portion formed by joining the plurality of unit mother glass materials to each other are Preferably, it follows a straight or zigzag path.

[0034] According to another embodiment, the present invention provides a manufacturing equipment for a metal mask for OLED deposition.

[0035] The manufacturing equipment for the metal mask for OLED deposition is: a mounting unit provided in the main body and having mounting areas for mounting a plurality of unit mother glass materials prepared in advance adjacent to each other but spaced apart from each other; a joining device unit disposed on the main body unit, which grips the plurality of unit mother glass materials and moves them so that they are adjacent to each other and tightly joined; a welding fixing part that is installed on the main body and that welds and fixes the joints between the plurality of unit mother glass materials that are formed by joining; and The welding device further includes a control unit for controlling the driving of the joining device unit and the welding fixing unit.

[0036] Here, the plurality of unit mother glass materials are one or a plurality of inner unit mother glass materials each having a first coupling portion formed on both sides thereof; It is preferable that the glass substrate further includes a pair of outer unit mother glass materials, each of which is disposed on either side of one or a plurality of inner unit mother glass materials and has a second connecting portion that connects with the first connecting portion.

[0037] The coupling device unit is a first gripping portion for gripping the inner unit mother glass material and seating it at a predetermined position in the seating area; a pair of second gripping portions that grip the pair of outer unit mother glass blanks and space them apart from each other on both sides of the inner unit mother glass blank to seat them at predetermined positions in the seating area; It is preferable that the device further includes a moving unit that moves the pair of second grip units in directions opposite to each other under the control of the control unit, thereby joining the pair of outer unit mother glass materials to both sides of the inner unit mother glass material.

[0038] In addition, the control unit While the welding fixture is being driven, It is preferable that the moving unit is used to control the pair of outer unit mother glass materials to maintain the state of being joined to both sides of the inner unit mother glass material for a predetermined period of time.

[0039] In addition, the landing area includes: A pair of fixing members are formed to fix upper and lower ends of the inner unit mother glass material, Preferably, a pair of movement guide members are provided to guide the pair of outer unit mother glass materials to move so as to be coupled to both sides of the inner unit mother glass material.

[0040] In particular, the control unit has a setting unit, and the size of the metal mask to be manufactured can be set through the setting unit.

[0041] The main body has a trunk that is supported on the ground and stands upright.

[0042] The seat is fixed to the body.

[0043] The mounting portion has a flat mounting plate, and the pair of fixing members are installed on the mounting plate, and the pair of fixing members are detachably connected to the mounting plate.

[0044] The pair of moving guide members are formed side by side on both sides of the pair of fixed members, respectively.

[0045] The coupling device portion includes the first grip portion, the pair of second grip portions, and the moving portion.

[0046] The coupling device is installed on the body so as to be disposed above the seat.

[0047] The body is provided with a support member that is installed on the body and positioned above the seat.

[0048] The first gripper includes a first lifting cylinder having a first lifting shaft and a first vacuum suction member installed at a lower end of the first lifting shaft. The first vacuum suction member is connected to a first vacuum provider via a tube and is provided with a vacuum suction force to form a vacuum or grip. The first vacuum provider is driven under the control of the controller.

[0049] The support member has a lower support member connected to the support member in a rail manner so as to be movable along a horizontal direction.

[0050] The lower support member is moved horizontally along the support member by driving a first linear motor, which is driven under the control of the control unit.

[0051] The upper end of the first lifting cylinder is fixed to the center of the lower support member.

[0052] Each of the pair of second grippers includes a second lifting cylinder having a second lifting shaft and a second vacuum suction member installed at a lower end of the second lifting shaft. The first vacuum suction member is connected to a first vacuum provider via a tube and receives a vacuum suction force to form a vacuum or grip. The first vacuum provider is driven under the control of the controller.

[0053] The first and second lifting cylinders raise and lower the first and second lifting shafts under the control of the control unit.

[0054] The lower support member has a pair of moving rails formed on the center of the lower support member as a boundary.

[0055] The upper ends of the second lifting cylinders of the pair of second grip portions are movably connected to the pair of moving rails, respectively.

[0056] The moving parts include respective second linear motors.

[0057] The pair of moving rails are connected to the respective second linear motors, and the respective second linear motors can independently move the pair of second lifting cylinders along the pair of moving rails under the control of the control unit.

[0058] Meanwhile, a material standby section is disposed in the main body section at a position spaced apart from the seating section.

[0059] The inner mother glass unit member and the pair of outer mother glass unit members are placed on standby in the material standby section.

[0060] The welding fixing unit includes a current provider installed on the main body and providing a current, a welding rod member that forms a welded portion by receiving the current from the current provider, and a moving device that moves the welding rod member along a set moving path under the control of the control unit. The moving path may be set by the control unit.

[0061] According to yet another embodiment, the present invention provides a method for manufacturing a metal mask for OLED deposition, which is characterized by manufacturing a metal mask using the above-mentioned manufacturing equipment for a metal mask for OLED deposition. [Effects of the Invention]

[0062] As a means for solving the above problems, the present invention has the effect of manufacturing mother glass materials with a width of 1400 mm or more, which can be used for 8th generation half mother glass, by combining and welding unit mother glass materials to form various sizes as required.

[0063] Furthermore, the present invention has the effect of effectively preventing mask bending that may occur when unit mother glass materials are bonded and connected to each other.

[0064] The above-mentioned effects and specific effects of the present invention will be described in conjunction with the following description of the preferred embodiment of the invention. [Brief explanation of the drawings]

[0065] [Figure 1a] 1 is a diagram showing an example of the configuration of a manufacturing facility for a metal mask for OLED deposition according to the present invention. [Figure 1b] FIG. 2 is a perspective view showing the bonding relationship between the inner and outer unit mother glass materials. [Figure 2] FIG. 2 is a plan view showing a seating portion according to the present invention. [Figure 3] 10 is a diagram showing a state in which a large number of unit mother glass materials are waiting in a material waiting section. FIG. [Figure 4] FIG. 10 is a view showing a state in which the first and second lifting cylinders are moved to transfer a number of unit mother glass materials. [Figure 5] 10A and 10B are diagrams illustrating a process of gripping a unit mother glass material, moving it to a seating section, and seating it thereon. [Figure 6]10A and 10B are diagrams illustrating a process of gripping a unit mother glass material, moving it to a seating section, and seating it thereon. [Figure 7] 10A and 10B are views showing a process of bonding a pair of outer unit mother glass materials to both sides of an inner unit mother glass material; [Figure 8] 10A and 10B are views showing a process of welding along a joint between inner and outer unit mother glass materials joined together with a step; [Figure 9] 10 is a plan view showing an example in which a weld is formed at the joining line between the inner and outer unit mother glass materials. FIG. [Figure 10] 10A to 10C are partial cross-sectional views taken along view AA in FIG. 9, showing various connection configurations between first and second connection portions where a weld is formed. [Figure 11] 10 is a perspective view showing an example in which predetermined unit mother glass materials having second coupling portions formed on both sides are coupled and welded to each other so as to have a step. FIG. [Figure 12] 12 shows a cross section along view BB in FIG. 11, illustrating an example of a pattern of bonding portions according to the present invention. [Figure 13] 12 is a cross-sectional view taken along view CC in FIG. 11, showing another example of a pattern of the coupling portion according to the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0066] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention.

[0067] As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention.

[0068] In order to clearly explain the present invention, parts that are not relevant to the description will be omitted, and the same reference numerals will be used to refer to the same or similar components throughout the specification.

[0069] Hereinafter, when an arbitrary structure is provided or disposed on the "top (or bottom)" of a substrate or "on (or under)" a substrate, it means that the arbitrary structure is provided or disposed in contact with the upper surface (or lower surface) of the substrate.

[0070] Furthermore, it is not limited to a structure that does not include any other structure between the substrate and any structure provided or disposed on (or under) the substrate.

[0071] Next, an example of a manufacturing equipment for a metal mask for OLED deposition according to the present invention will be described with reference to the accompanying drawings. In describing the manufacturing equipment, a manufacturing method for a metal mask for OLED deposition will be described. Then, a metal mask for OLED deposition will be described.

[0072] The manufacturing equipment for manufacturing the metal mask for OLED deposition according to the present invention is not limited to the following configuration, but is characterized in that a plurality of unit mother glass materials or materials are joined together and welded to form one mother glass, and the upper surface thereof can be surface-treated by etching.

[0073] Fig. 1a is a diagram showing an example of the configuration of a manufacturing equipment for a metal mask for OLED deposition according to the present invention, Fig. 1b is a perspective view showing the coupling relationship between inner and outer unit mother glass materials, and Fig. 2 is a plan view showing a mounting part according to the present invention.

[0074] 1a, the manufacturing equipment for a metal mask for OLED deposition according to the present invention includes a main body 100, a seating unit 200, a joining device unit 300, a welding and fixing unit 400, and a control unit 500. The above configuration will be described.

[0075] Main body 100 The main body 100 has a trunk that is supported on the ground and stands upright.

[0076] Arrival area 200 The seating unit 200 is provided on the body 100 and has a seating plate 210 having seating areas for seating a plurality of unit mother glass materials 10 and 20 prepared in advance, spaced apart from each other and adjacent to each other.

[0077] A pair of fixing members 211 for fixing the upper and lower ends of the inner unit mother glass material 10 are formed in the seating area.

[0078] A pair of movement guide members 212 are formed to guide the movement of the pair of outer unit mother glass materials 20 so that they are coupled to both sides of the inner unit mother glass material 10, respectively.

[0079] That is, the seating part 200 is fixedly installed on the main body part 100 .

[0080] The mounting unit 200 has a flat mounting plate 210. The pair of fixing members 211 are installed on the mounting plate 210. The pair of fixing members 211 may be detachably coupled to the mounting plate 210.

[0081] The pair of moving guide members 212 are formed side by side on both sides of the pair of fixing members 211, respectively.

[0082] Coupling device section 300 The coupling device part 300 is installed on the body part 100 so as to be disposed above the seating part 200 .

[0083] The joining device part 300 is installed on the body part 100, grips the plurality of unit mother glass materials 10 and 20, and moves them so that they are adjacent to each other and closely joined.

[0084] The joining device unit 300 includes a first gripping unit 310 that grips the inner unit mother glass material 10 and seats it at a predetermined position in the seating area, a pair of second gripping units 320 that grip the pair of outer unit mother glass materials 20 and space them on both sides of the inner unit mother glass material 10 to seat them at predetermined positions in the seating area, and a moving unit 330 that moves the pair of second gripping units 320 in directions facing each other under the control of the control unit to join the pair of outer unit mother glass materials 20 to both sides of the inner unit mother glass material 10.

[0085] The body 100 is provided with a support member 110 installed on the body 100 so as to be positioned above the seat 200 .

[0086] The first gripper 310 includes a first lifting cylinder 311 having a first lifting shaft 311a and a first vacuum suction member 312 installed at the lower end of the first lifting shaft 311a. The first vacuum suction member 312 is connected to a first vacuum provider 313 via a tube, and a vacuum suction force is applied to the first vacuum suction member 312 to form a vacuum or grip the workpiece. The first vacuum provider 313 is driven under the control of the controller 500.

[0087] The support member 110 includes a lower support member 120 connected to the support member 110 in a rail manner so as to be movable in the horizontal direction.

[0088] The lower support member 120 is moved horizontally along the support member by driving a first linear motor 510. The first linear motor 510 is driven under the control of the control unit 500.

[0089] The upper end of the first lifting cylinder 311 is fixed to the center of the lower support member 120 .

[0090] Each of the pair of second grippers 320 includes a second lifting cylinder 321 having a second lifting shaft 321a and a second vacuum suction member 322 installed at the lower end of the second lifting shaft 321a. The second vacuum suction member 322 is connected to a second vacuum provider 323 via a tube, and a vacuum suction force is applied to the second vacuum provider 323 to form a vacuum or grip. The second vacuum provider 323 is driven under the control of the control unit 500.

[0091] The first and second lifting cylinders 311 and 321 move the first and second lifting shafts 311 a and 321 a up and down under the control of the control unit 500 .

[0092] Here, the lower support member 120 is formed with a pair of moving rails 121 with the center of the lower support member 120 as a boundary.

[0093] The upper ends of the second lifting cylinders 321 of the pair of second gripping parts 320 are movably connected to the pair of moving rails 121, respectively.

[0094] The moving part 300 includes a respective second linear motor 520 .

[0095] The second linear motors 520 are connected to the pair of moving rails 120. The second linear motors 520 can independently move the pair of second lifting cylinders 321 along the pair of moving rails 120 under the control of the control unit 500.

[0096] Material standby section 150 The main body 100 is provided with a material standby unit 150 at a position spaced apart from the seating unit 200 .

[0097] In the material standby section 150, the inner mother glass unit member 10 and the pair of outer mother glass unit members 10 are on standby.

[0098] Referring to FIG. 1b, the material employed in the present invention as an example may include an inner mother glass unit member 10 and a pair of outer mother glass unit members 10.

[0099] First coupling parts 11 are formed on both sides of the inner mother glass unit member 10. The first coupling parts 11 are formed in a shape that protrudes along both sides of the inner mother glass unit member 10.

[0100] The pair of outer unit mother glass materials 20 are disposed on both sides of the inner mother glass unit member 10. Second coupling portions 21 are formed on one surface of the pair of outer unit mother glass materials 20, respectively, to couple to the respective first coupling portions 11 in a stepped or insert-type manner.

[0101] Here, the first coupling portion 11 may be formed in a protruding shape, and the second coupling portion 21 may be formed in a groove shape into which the protruding first coupling portion 11 is inserted for coupling. Of course, the positions of the protrusion and groove of the first and second coupling portions 11 and 21 may be reversed.

[0102] Welded fixing part 400 The welding fixture 400 includes a current provider 410 installed in the main body 100 to provide current, a welding rod member 420 that receives current from the current provider 410 and forms a weld, and a moving device 430 that is driven under the control of the control unit 500. The moving device 430 moves the welding rod member 420 along a set moving path. The moving path may be set by the control unit 500.

[0103] The moving device 430 can move the welding electrode member 420 along three axes.

[0104] The moving device 430 includes a cylinder 431 having a shaft 431a protruding along the X-axis, a moving motor 432 for moving the cylinder 431 along the Y-axis, and an elevating module 433 mounted on the shaft 431a and having an elevating shaft 433a that moves up and down along the Z-axis. A welding rod module 420 is mounted on the lower end of the elevating shaft 433a. The cylinder 431 is coupled to a screw shaft 432a extending along the Y-axis 431a, and the moving motor 432 rotates the screw shaft 432a to move the cylinder 431 along the Y-axis. A guide shaft (not shown) extending along the Y-axis may pass through the cylinder 432 to guide its movement.

[0105] control unit 500 The control unit 500 can control the moving unit 330 to maintain the state in which the pair of outer unit mother glass materials 20 are joined to both sides of the inner unit mother glass material 10 for a certain period of time while the welding fixing unit 400 is driven.

[0106] The control unit 500 includes a setting unit 600. The setting unit 600 can be used to set the size of the metal mask to be manufactured.

[0107] Next, the operation of the manufacturing equipment for the metal mask for OLED deposition configured as above will be described, and an example of joining and welding three unit mother glass materials as shown in FIG. 1b will be described.

[0108] FIG. 3 is a diagram showing a state in which a large number of unit mother glass materials are waiting in the material waiting section.

[0109] Referring to FIG. 3, the size of the metal mask to be manufactured is set through a setting unit according to the present invention.

[0110] 2, a number of unit mother glass materials 10 and 20 are placed on standby on the material standby unit 150 according to the present invention. The number of unit mother glass materials 10 and 20 includes an inner unit mother glass material and a pair of outer unit mother glass materials.

[0111] FIG. 4 shows a state in which the first and second lifting cylinders are moved to transport a number of unit mother glass materials.

[0112] Referring to FIG. 4, the control unit uses the first linear motor to move the lower support member along the support member to the upper part of the material waiting unit.

[0113] At this time, the first vacuum suction member 312 installed at the lower end of the first lifting shaft 311 a of the first lifting cylinder 311 may be positioned above the unit mother glass material 10 inside.

[0114] The control unit 500 uses a pair of second linear motors 520 to move a pair of second lifting cylinders 321 along the respective moving rails 121. Here, second vacuum suction members 322 installed at the lower ends of second lifting shafts 321a of the pair of second lifting cylinders 321 are positioned above the respective outer unit mother glass materials 30.

[0115] Next, the control unit 500 lowers the first lifting shaft 311a of the first lifting cylinder 311 so that the first vacuum suction member 312 comes into close contact with the upper end of the unit mother glass material 10 inside.

[0116] At the same time, the control unit 500 lowers the second lifting shafts 321 a of the pair of second lifting cylinders 321 so that the second vacuum suction members 322 come into close contact with the upper ends of the outer unit mother glass materials 20 .

[0117] Then, the first and second vacuum providers 313 and 323 provide a vacuum suction force to the first and second vacuum suction members 3 .

[0118] Therefore, the inner unit mother glass material 10 may be adsorbed by the first vacuum suction member 312, and the pair of outer unit mother glass materials 20 may be adsorbed by each second vacuum suction member 322, and may be gripped by vacuum suction for movement.

[0119] 5 and 6 are diagrams showing the process of gripping the unit mother glass material, moving it to the seating section and seating it.

[0120] Referring to FIG. 5, the control unit moves the lower support member along the moving rail in the state of FIG. 4 using the first linear motor, and positions the first and second lifting cylinders above the seating unit.

[0121] 6, the control unit 500 first lowers the first lifting shaft 311a of the first lifting cylinder 311 to seat the inner unit mother glass material 10, which has been adsorbed to the first vacuum suction member 312, in the seating area of ​​the seating plate 210. At this time, the upper and lower ends of the inner unit mother glass material 10 are supported by the pair of fixing members 211 to prevent it from shifting.

[0122] Then, the control unit 500 controls the vacuum suction force applied to the first vacuum suction member 312 to raise the first lifting shaft 311a to its original position.

[0123] Next, the control unit simultaneously lowers the second lifting shafts 321a of the pair of second lifting cylinders 321, and seats the pair of outer unit mother glass materials 20, which are adsorbed to the second vacuum suction members 322 installed at the lower ends of each second lifting shaft 321a, on the seating plate 210.

[0124] At this time, the pair of outer unit mother glass materials 20 are positioned on both sides of the inner unit mother glass material 10 at a distance from each other.

[0125] In addition, each of the pair of outer unit mother glass materials 20 is supported by a pair of movement guide members 212, so that when the pair of outer unit mother glass materials 20 moves in the horizontal direction, the movement can be guided without deviation.

[0126] FIG. 7 is a diagram showing a process of bonding a pair of outer unit mother glass blanks to both sides of an inner unit mother glass blank.

[0127] Referring to Figure 7, the control unit 500 uses a pair of second linear motors 520 to move the second lifting cylinders 321 in opposite directions along each moving rail 121 while each outer mother glass material 20 is adsorbed by each second vacuum suction member 312.

[0128] Thus, each of the outer unit mother glass materials 20 may be bonded to both sides of the inner unit mother glass material 10 .

[0129] As mentioned above, the above-mentioned coupling method may preferably be a step coupling.

[0130] Fig. 8 is a diagram showing a process of welding along the joint between the inner and outer unit mother glass materials that are joined with a step, and Fig. 9 is a plan view showing an example in which a weld is formed at the joint line between the inner and outer unit mother glass materials.

[0131] 8 and 9, the control unit 500 according to the present invention uses a separate vision sensor (not shown) to extract information on the connection line (L) that forms the connection between the inner unit mother glass material 10 and a pair of outer unit mother glass materials 20. The connection line (L) is linearly configured with X, Y, and Z coordinate information.

[0132] Then, the control unit 500 controls the welding rod member 420 to move along the extracted joining line (L) while the lower end of the welding rod member 420 is in contact with the joining line (L). At the same time, the control unit 500 controls the current provider 410 to form a weld (W) along the joining line (L) through the welding rod member 420.

[0133] 10A to 10C are partial cross-sectional views taken along view AA in FIG. 9, showing various connection configurations between the first and second connection portions where a weld is formed.

[0134] Referring to (a) of Figure 10, the first joint portion 11 of the inner unit mother glass material 10 and the second joint portion 21 of the outer unit mother glass material 20 are inserted and joined to each other to form a joint, and a welded portion (W) may be formed here.

[0135] Referring to (b) of Figure 10, the first joint portion 11 of the inner unit mother glass material 10 and the second joint portion 21 of the outer unit mother glass material 20 may be joined to each other with a step to form a joint, where a weld (W) may be formed.

[0136] 10(c), the first joint portion 11 of the inner unit mother glass material 10 and the second joint portion 21 of the outer unit mother glass material 20 are joined to each other with a step, but a space of a certain depth may be formed between the first and second joint portions 11 and 12. For this reason, a welded portion (W) may be formed in the space by welding in the manner described above to fill the space.

[0137] Meanwhile, in the present invention, after forming the welded portion (W) as described above, the upper surfaces of the inner and outer unit mother glass materials 10 and 20, which are connected and fixed by welding to each other, can be surface-treated by an etching process.

[0138] At this time, it is preferable that the etching solution does not penetrate into the inside of the joint.

[0139] Fig. 11 is a perspective view showing an example in which predetermined unit mother glass materials having second coupling portions formed on both sides are coupled and welded to form a step. Fig. 12 is a cross-sectional view taken along view BB of Fig. 11, showing an example of a coupling pattern according to the present invention. Fig. 13 is a cross-sectional view taken along view CC of Fig. 11, showing another example of a coupling pattern according to the present invention.

[0140] 11, unit mother glass materials 30 having a predetermined width and having joint portions 31 formed on both sides are joined together to form a joint line L, and a welded portion W is formed along the joint line L. The step joint between the joint portions 31 is not limited to the step shape.

[0141] Referring to FIG. 12, a coupling line (L) is formed through the coupling portion 31 according to the present invention, and the coupling line (L) may be zigzag or unevenly coupled.

[0142] In this case, the zigzag or uneven shape may be formed along the horizontal direction.

[0143] Also, referring to FIG. 13, a coupling line (L) is formed through the coupling portion 31 according to the present invention, and although the coupling line (L) forms a zigzag or uneven coupling, the zigzag or uneven shape may be formed along the vertical direction.

[0144] As a result, even if the etching solution used during surface treatment penetrates into the interior of the joints 31 through gaps between the joints 31 from the outside, the uneven joint surface can act as a water barrier to prevent penetration into the inside of the joints 31.

[0145] This prevents weakening of the bonding strength and damage caused by etching inside the bonding portion 31, and furthermore, the mother glass materials that are welded together to form a single body can also be prevented from bending due to gravity.

[0146] With the above overall configuration and operation, the present invention can manufacture mother glass materials with a width of 1400 mm or more, which can be used for 8th generation half mother glass, by combining and welding unit mother glass materials together to form various sizes as required.

[0147] Furthermore, the present invention can effectively prevent mask bending that may occur when unit mother glass materials are bonded and connected to each other.

[0148] The present invention is not limited to the specific preferred embodiments described above, and it goes without saying that anyone having ordinary skill in the art to which the invention pertains can make various modifications without departing from the gist of the invention as claimed in the claims, and such modifications are within the scope of the claims. [Explanation of symbols]

[0149] 100 Main body 110 Support member 120 Lower support member 121 Moving Rail 150 Material Standby Section 200 Landing point 210 Safety board 211 Fixing member 212 Moving guide member 300 Coupling device section 310 First Grip 311 First lifting cylinder 311a First lifting axis 312 First vacuum suction member 313 1st vacuum provider 320 Second Grip 321a Second lifting axis 322 Second vacuum suction member 323 Second vacuum provider 400 Welded Fixture 410 Current provider 420 Welding rod components 430 Mobile Device 431 cylinder 431a axis 432 Travel Motor 432a Screw shaft 433 Lifting Module 433a Elevating shaft 500 control section 510 First Linear Motor 520 Second Linear Motor 600 Settings

Claims

1. In metal masks for OLED deposition, The metal mask for OLED deposition is The inner unit mother glass material and a pair of outer unit mother glass materials disposed on both sides of the inner mother glass material; a pair of first coupling portions formed to protrude from both sides of the inner unit mother glass material; a pair of second coupling portions formed in groove shapes on one surface of each of the pair of outer unit mother glass materials, the pair of second coupling portions being inserted into and coupled to the pair of first coupling portions, the pair of first coupling portions and the pair of second coupling portions being coupled to each other to form respective coupling portions; a welding portion for welding and fixing the connecting portion, After the welds are formed, the upper surfaces of the inner unit mother glass material and the pair of outer unit mother glass materials bonded to each other are surface-treated by etching to form substantially the same plane. Metal mask for OLED deposition.

2. In metal masks for OLED deposition, The metal mask for OLED deposition is The inner unit mother glass material and a pair of outer unit mother glass materials disposed on both sides of the inner mother glass material; a pair of first coupling portions formed on both sides of the inner unit mother glass material; a step-connected portion formed on one surface of each of the pair of outer unit mother glass materials and connected to the pair of first connecting portions at a step, respectively, to form respective connecting portions; a welding portion for welding and fixing the respective coupling portions, The pair of first coupling portions includes: " shape, The pair of second coupling portions are "" so as to couple to the pair of first coupling portions with a step. " shape, After the welds are formed, the upper surfaces of the inner unit mother glass material and the pair of outer unit mother glass materials bonded to each other are surface-treated by etching to form substantially the same plane. Metal mask for OLED deposition.

3. In metal masks for OLED deposition, The metal mask for OLED deposition is The inner unit mother glass material and a pair of outer unit mother glass materials disposed on both sides of the inner mother glass material; a pair of first coupling portions formed on both sides of the inner unit mother glass material; a step-connected portion formed on one surface of each of the pair of outer unit mother glass materials and connected to the pair of first connecting portions at a step, respectively, to form respective connecting portions; a welding portion for welding and fixing the respective coupling portions, The pair of first coupling portions includes: " shape, The pair of second coupling portions are "" so as to couple to the pair of first coupling portions with a step. " shape, a space having a certain depth is formed between the pair of first coupling portions and the pair of second coupling portions coupled to each other, and the space is filled with a weld; After the welds are formed, the upper surfaces of the inner unit mother glass material and the pair of outer unit mother glass materials bonded to each other are subjected to a surface treatment by etching so that the upper surfaces of the welds and the upper surfaces of the welds are substantially flush with each other. Metal mask for OLED deposition.

4. Each of the bonding portions forms a bonding line, The coupling line is Although it forms a zigzag or uneven bond, The metal mask is formed along the horizontal and vertical directions. The metal mask for OLED vapor deposition according to claim 1 , claim 2 , or claim 3 .

5. In manufacturing equipment for metal masks for OLED deposition, The manufacturing equipment for the metal mask for OLED deposition includes: a mounting portion provided in the main body, in which mounting areas are formed for mounting a number of unit mother glass materials prepared in advance adjacent to each other while being spaced apart from each other; a joining device unit disposed on the main body unit, which grips the plurality of unit mother glass materials and moves them so that they are adjacent to each other and tightly joined; a welding fixing part that is installed on the main body and that fixes the plurality of unit mother glass materials by forming welding parts at respective joining parts between the unit mother glass materials; and a control unit for controlling the driving of the joining device unit and the welding fixing unit; The plurality of unit mother glass materials include inner unit mother glass materials each having a first coupling portion formed on both sides thereof, and a pair of outer unit mother glass materials each having a pair of second coupling portions on both sides thereof, the pair of second coupling portions being disposed on both sides of the inner unit mother glass material and coupled to the pair of first coupling portions, the coupling device unit includes a first gripping unit that grips the inner unit mother glass material and seats it at a predetermined position in the seating area; a pair of second gripping units that grip the pair of outer unit mother glass materials and space them apart on both sides of the inner unit mother glass material and seat them at a predetermined position in the seating area; and a moving unit that moves the pair of second gripping units in directions opposite to each other under the control of the control unit to couple the pair of outer unit mother glass materials to both sides of the inner unit mother glass material, the control unit controls the pair of outer unit mother glass blanks to be connected to both sides of the inner unit mother glass blank for a predetermined time using the moving unit while the welding fixing unit is driven, The seating area is provided with a pair of fixing members for fixing the upper and lower ends of the inner unit mother glass material, and a pair of moving guide members for guiding the pair of outer unit mother glass materials to be coupled to both sides of the inner unit mother glass material, the control unit has a setting unit, and sets the size of the metal mask to be manufactured via the setting unit; The main body has a trunk that is supported on the ground and stands upright, The mounting portion is fixed to the main body portion, the mounting portion has a flat mounting plate, the pair of fixing members are installed on the mounting plate, and the pair of fixing members are detachably connected to the mounting plate; The pair of moving guide members are formed side by side on both sides of the pair of fixed members, the coupling device unit has the first grip unit, the pair of second grip units, and the moving unit, the coupling device is installed on the body so as to be disposed above the seating portion, The main body is provided with a support member positioned above the seating portion, the first grip portion includes a first lifting cylinder having a first lifting shaft, and a first vacuum suction member installed at a lower end of the first lifting shaft; The first vacuum suction member is connected to a first vacuum provider via a tube, and a vacuum suction force is applied to the first vacuum provider to form or hold a vacuum, and the first vacuum provider is driven under the control of the control unit, the support member includes a lower support member connected to the support member in a rail manner so as to be movable along a horizontal direction; the lower support member is moved horizontally along the support member by driving a first linear motor, the first linear motor being driven under the control of the control unit, The upper end of the first lifting cylinder is fixed to the center of the lower support member, each of the pair of second gripping units includes a second lifting cylinder having a second lifting shaft and a second vacuum suction member installed at a lower end of the second lifting shaft; the first vacuum suction member is connected to a first vacuum provider via a tube, and a vacuum suction force is applied to form a vacuum or grip; the first vacuum provider is driven under the control of the control unit; The first and second lifting cylinders raise and lower the first and second lifting shafts under the control of the control unit, The lower support member is provided with a pair of moving rails with the center of the lower support member as a boundary, an upper end of each of the second lifting cylinders of the pair of second grip portions is movably connected to each of the pair of moving rails; the moving unit includes a respective second linear motor; The pair of moving rails are connected to the respective second linear motors, and the respective second linear motors independently move the pair of second lifting cylinders along the pair of moving rails under the control of the control unit; a material standby unit is disposed in the main body at a position separated from the seating unit; In the material standby section, the inner mother glass unit member and the pair of outer mother glass unit members are standby, the welding fixing unit includes a current provider installed on the main body and providing a current, a welding rod member that forms the welded portion by receiving the current from the current provider, and a moving device driven under the control of the control unit, wherein the moving device moves the welding rod member along a set moving path, and the moving path is set in the control unit. Manufacturing equipment for metal masks for OLED deposition.

6. the control unit extracts, using a vision sensor, information about a coupling line formed by coupling the pair of first coupling portions of the inner unit mother glass material and the pair of second coupling portions of the pair of outer unit mother glass material to form the respective coupling portions; The connecting line is composed of X, Y, and Z coordinate information; The control unit controls the welding rod member to be moved along the extracted joining line in a state where the lower end of the welding rod member is in contact with the joining line, and forms the weld along the joining line via the welding rod member using the current provider. The coupling line is Although it forms a zigzag or uneven bond, The metal mask is formed along the horizontal and vertical directions.

6. Equipment for manufacturing the metal mask for OLED deposition according to claim 5.

7. The pair of first coupling portions includes: " shape, The pair of second coupling portions are "" so as to couple to the pair of first coupling portions with a step. " shape, After the welds are formed, the upper surfaces of the inner unit mother glass material and the pair of outer unit mother glass materials bonded to each other are surface-treated by etching to form substantially the same plane.

7. Equipment for manufacturing the metal mask for OLED deposition according to claim 6.

8. The pair of first coupling portions includes: " shape, The pair of second coupling portions are "" so as to couple to the pair of first coupling portions with a step. " shape, After the welds are formed, the upper surfaces of the inner unit mother glass material and the pair of outer unit mother glass materials bonded to each other are surface-treated by etching to form substantially the same plane.

7. Equipment for manufacturing the metal mask for OLED deposition according to claim 6.

9. The pair of first coupling portions includes: " shape, The pair of second coupling portions are "" so as to couple to the pair of first coupling portions with a step. " shape, a space having a certain depth is formed between the pair of first coupling portions and the pair of second coupling portions coupled to each other, and the space is filled with a weld; After the welds are formed, the upper surfaces of the inner unit mother glass material and the pair of outer unit mother glass materials bonded to each other are subjected to a surface treatment by etching so that the upper surfaces of the welds and the upper surfaces of the welds are substantially flush with each other.

7. Equipment for manufacturing the metal mask for OLED deposition according to claim 6.

10. A metal mask is manufactured using the manufacturing equipment for a metal mask for OLED deposition according to claim 6. A method for manufacturing a metal mask for OLED deposition.

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