Jig

Abstract

To provide a jig which can attach a sample to a sample holder easily.SOLUTION: A jig 100 is used to attach a sample to a sample holder for a sample processing device which radiates an ion beam to the sample through a shield to process a portion of the sample which protrudes from the shield. The jig includes: a support part 20 for supporting the sample holder attached with the shield; and a guide 30 including a rail 34 and a slider 32 which may move along the rail 34 and moves the sample to the sample holder.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a jig. [Background technology]

[0002] A known sample processing device that processes a sample using an ion beam is a cross-section polisher (registered trademark) for processing the cross section of a sample. As disclosed in Patent Document 1, a cross-section polisher is a sample processing device that processes a sample using a broad ion beam and a shielding material. In a cross-section polisher, the sample is set so that it protrudes from the shielding material by about 20 μm to 100 μm, and the sample is irradiated with a broad ion beam to process the portion of the sample that protrudes from the shielding material. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2023-107397 Summary of the Invention [Problem to be solved by the invention]

[0004] When attaching a sample to a sample holder for a cross-section polisher, the sample is typically handled with tweezers; however, some samples to be processed are fragile and difficult to handle with tweezers, which can result in the sample being damaged. [Means for solving the problem]

[0005] One aspect of the jig according to the present invention is A jig for attaching a sample to a sample holder for a sample processing device that irradiates a sample with an ion beam through a shielding material and processes a portion of the sample protruding from the shielding material, comprising: a support portion that supports the sample holder to which the shielding material is attached; a guide including a rail and a first slider movable along the rail to move the sample to the sample holder; Includes.

[0006] In this type of jig, the sample can be placed in the sample holder with the shielding material attached by moving the first slider along the rail. Therefore, with this type of jig, the possibility of the sample being broken can be reduced and the sample can be easily attached to the sample holder compared to, for example, gripping the sample with tweezers and placing it in the sample holder. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a perspective view schematically showing a jig according to an embodiment of the present invention. [Figure 2] FIG. 2 is a perspective view schematically showing a slider. [Figure 3] FIG. [Figure 4] FIG. 1 is a cross-sectional view schematically showing a jig according to an embodiment of the present invention. [Figure 5] FIG. [Figure 6] 10 is a flowchart showing an example of a method for attaching a sample to a sample holder. [Figure 7] FIG. 10 is a diagram for explaining a process of attaching a sample to a sample holder. [Figure 8] FIG. 10 is a diagram for explaining a process of attaching a sample to a sample holder. [Figure 9] FIG. 10 is a diagram for explaining a process of attaching a sample to a sample holder. [Figure 10] FIG. 10 is a diagram for explaining a process of attaching a sample to a sample holder. [Figure 11] FIG. 10 is a diagram for explaining a process of attaching a sample to a sample holder. [Figure 12] FIG. 10 is a diagram for explaining a process of attaching a sample to a sample holder. [Figure 13] FIG. 10 is a diagram for explaining a process of attaching a sample to a sample holder. [Figure 14] FIG. 10 is a diagram for explaining a process of attaching a sample to a sample holder. [Figure 15] FIG. 10 is a diagram for explaining a process of attaching a sample to a sample holder. [Figure 16] FIG. 10 is a diagram for explaining a process of attaching a sample to a sample holder. [Figure 17] FIG. 1 is a diagram for explaining a sample processing method using a sample processing device. [Figure 18] 10A and 10B are diagrams for explaining a modified example of a jig according to an embodiment of the present invention. [Figure 19] 10A and 10B are diagrams for explaining a modified example of a jig according to an embodiment of the present invention. [Figure 20] 10A and 10B are diagrams for explaining a modified example of a jig according to an embodiment of the present invention. [Figure 21] FIG. 10 is a diagram for explaining a modified example of the sample holder. [Figure 22] FIG. 11 is a perspective view schematically showing a jig according to a third modified example. DETAILED DESCRIPTION OF THE INVENTION

[0008] Preferred embodiments of the present invention will be described in detail below with reference to the drawings. Note that the embodiments described below do not unduly limit the content of the present invention as defined in the claims. Furthermore, not all of the configurations described below are necessarily essential components of the present invention.

[0009] 1. Jig 1.1. Jig configuration First, a jig according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view that schematically shows a jig 100 according to an embodiment of the present invention.

[0010] Jig 100 is a jig for attaching a sample to a sample holder for a cross-section polisher. The cross-section polisher is a sample processing device that irradiates an ion beam onto the sample through a shielding material to process the portion of the sample that protrudes from the shielding material. The shielding material is a plate-shaped member.

[0011] As shown in FIG. 1, the jig 100 includes a material stage 10, a support portion 20 that supports a sample holder, a guide 30, and an elevation mechanism 40.

[0012] The jig 100 includes a first beam 2 provided with a material table 10, a second beam 4 provided with a guide 30, a base 6 provided with a support 20, and a column 8 provided with an elevating mechanism 40. The first beam 2 and the second beam 4 extend in opposite directions from the base 6. The column 8 is connected to the base 6. The column 8 is provided with the elevating mechanism 40, and supports the first beam 2, the second beam 4, and the base 6 so that they can be raised and lowered.

[0013] The material is placed on the material stage 10. The sample attached to the sample holder is formed by punching the material with a punching device. The material stage 10 has a notch 12 that can be inserted into the base of the punching device. By inserting the base of the punching device into the notch 12 and punching the material with the punching device, the sample formed into a predetermined shape can be separated from crushed pieces of the material. The material stage 10 may have a recess that matches the shape of the material to make it easier to set the material on the notch 12. A rim 18 that is higher than the mounting surface 16 is provided around the periphery of the mounting surface 16 on which the material of the material stage 10 is placed.

[0014] The material stage 10 includes a cap 14. The cap 14 is detachable from the first beam portion 2. The cap 14 is detachably attached to the first beam portion 2, for example, by a magnet. The material stage 10 is movable up and down. That is, the jig 100 allows the height of the material stage 10 to be changed. The material stage 10 can be raised and lowered by raising and lowering the first beam portion 2 with the lifting mechanism 40.

[0015] A sample holder is placed on the support part 20. The support part 20 includes a recess provided in the base part 6, and the recess is shaped to fit the sample holder. The support part 20 has a reference surface 22 for positioning the shielding material. The reference surface 22 is located at the end of the rail 34 of the guide 30. The shielding material can be positioned by pressing it against the reference surface 22.

[0016] The guide 30 guides the sample to the sample holder. The guide 30 includes a slider 32, two rails 34, and two stoppers 36. The slider 32 is movable along the two rails 34. The two rails 34 extend parallel to each other. A groove 38 for guiding the sample is formed between the two rails 34.

[0017] A notch 39 is formed in the movement path of the slider 32, into which the base of the punching device can be inserted. The notch 39 is formed, for example, between two rails 34. The notch 39 is provided in the bottom surface of the groove 38. The notch 39 is formed by cutting out the end of the second beam portion 4. The guide 30 can guide the sample from the base inserted into the notch 39 to the sample holder.

[0018] Stoppers 36 are provided at the tips of the two rails 34, i.e., at the ends of the two rails 34 on the support part 20 side. In the illustrated example, the stoppers 36 are plate-shaped members that close the tips of the rails 34. When the slider 32 hits the stoppers 36, the slider 32 can be stopped at a predetermined position.

[0019] The first beam 2, the second beam 4, and the base 6 are integrally constructed and can be raised and lowered by a lifting mechanism 40 provided on the column 8. The height of the material table 10 can be changed by the lifting mechanism 40.

[0020] Guide 2 is a perspective view schematically showing the slider 32. FIG. 3 is a perspective view schematically showing the guide 30.

[0021] As shown in FIG. 2, the slider 32 includes two rotating bodies 320, a base 322, a sample holder 324, and a gripper 326.

[0022] The two rotating bodies 320 are each connected to the lower surface of the base 322 via a shaft member 321. The rotating bodies 320 rotate around the shaft member 321 as the rotation axis.

[0023] The two rails 34 are two grooves that extend parallel to one another. One of the two rotating bodies 320 fits into one of the two rails 34, and the other of the two rotating bodies 320 fits into the other of the two rails 34. This allows the slider 32 to move along the two rails 34. The rear ends of the rails 34 are open. Therefore, the slider 32 is detachable from the two rails 34. When the user presses the slider 32, the slider 32 moves along the rails 34.

[0024] The sample holder 324 is provided between the two rotors 320. The sample holder 324 protrudes downward from the base 322. The sample holder 324 fits into a groove 38 provided between the two rails 34.

[0025] Although not shown, the slider 32 does not have to have the rotating body 320 as long as it can move along the rail 34, and may have, for example, a member that slides along the rail 34. Furthermore, although not shown, the configuration of the guide 30 is not particularly limited as long as it can move the slider 32 along the rail 34.

[0026] The sample holder 324 is provided with two guide surfaces 3a that guide the sample from the sides to prevent it from rotating, and a sample holder surface 3b that pushes against the rear end of the sample. The sample is sandwiched between the two guide surfaces 3a, so that the orientation of the sample can be kept constant. The sample can be moved by pushing against the sample holder surface 3b. The sample holder 324 is provided with a recess that holds the sample, and the two guide surfaces 3a and the sample holder surface 3b are the inner surfaces of the recess.

[0027] The grip portion 326 is for a user to hold and protrudes upward from the base portion 322. When the user grasps the grip portion 326 and slides the slider 32, the slider 32 moves along the two rails 34.

[0028] Fig. 4 is a cross-sectional view that schematically shows the jig 100. Fig. 4 illustrates a state in which the slider 32 has come into contact with the stopper 36 and stopped.

[0029] 4, when the sample S is moved until the slider 32 hits the stopper 36 and stops, the sample S is placed on the sample holder 200 (shielding material 210) to which the shielding material 210 is attached. At this time, the sample S protrudes from the shielding material 210 by a protrusion amount A. In other words, the stopper 36 stops the slider 32 so that the sample S protrudes from the shielding material 210 by the protrusion amount A.

[0030] Here, end 212 of shielding material 210 is in contact with reference surface 22. Therefore, the position of end 212 of shielding material 210 is the position of reference surface 22. In addition, sample support surface 3b presses the rear end of sample S. In slider 32, the position of sample support surface 3b is set so that when sample S is moved until slider 32 hits stopper 36 and stops, the distance between reference surface 22 and sample support surface 3b becomes protrusion amount A.

[0031] 1.3. Lifting mechanism Fig. 5 is a cross-sectional view schematically showing the lifting mechanism 40. As shown in Fig. 5, the lifting mechanism 40 includes a first slit 42a, a second slit 42b, a stopper 44, a spring 46, a shaft member 48, and a stopper pressing member 49.

[0032] The first slit 42a and the second slit 42b are provided in the column portion 8. The first slit 42a is located higher than the second slit 42b, i.e., on the support portion 20 side. The stopper 44 is formed to be caught in the first slit 42a or the second slit 42b. By hooking the stopper 44 in the first slit 42a, the stopper 44 is fixed at a position corresponding to the height of the first slit 42a. Similarly, by hooking the stopper 44 in the second slit 42b, the stopper 44 is fixed at a position corresponding to the height of the second slit 42b. A spring 46 applies an upward force to the stopper 44.

[0033] The shaft member 48 is connected to the base 6. The shaft member 48 is supported by a stopper 44. Therefore, by hooking the stopper 44 into the first slit 42a, the first beam portion 2, the second beam portion 4, and the base 6 are fixed at a position corresponding to the height of the first slit 42a. Similarly, by hooking the stopper 44 into the second slit 42b, the first beam portion 2, the second beam portion 4, and the base 6 are fixed at a position corresponding to the height of the second slit 42b. The heights of the first beam portion 2, the second beam portion 4, and the base 6 when the stopper 44 is hooked into the first slit 42a are higher than the heights of the first beam portion 2, the second beam portion 4, and the base 6 when the stopper 44 is hooked into the second slit 42b.

[0034] The stopper pressing member 49 presses the stopper 44 while it is caught in the second slit 42b. When the stopper pressing member 49 presses the stopper 44, the stopper 44 bends and is released from the second slit 42b. The stopper 44 is then pushed upward by the force of the spring 46, and the stopper 44 is caught in the first slit 42a. Note that when the stopper 44 caught in the first slit 42a is to be caught in the second slit 42b, the base 6 is pressed downward. As a result, the stopper 44 is released from the first slit 42a and is caught in the second slit 42b.

[0035] 2. Operation 6 is a flowchart showing an example of a method for attaching the sample S to the sample holder 200. FIGS.

[0036] 7, the sample holder 200 to which the shielding material 210 is attached is set in the jig 100 (S100). Specifically, the sample holder 200 is placed on the support part 20 of the jig 100. At this time, the shielding material 210 is pressed against the reference surface 22 to position the shielding material 210.

[0037] Next, the material M is placed on the notch 12 of the material table 10 (S102). At this time, the stopper 44 is hooked on the first slit 42a to raise the material table 10. The cap 14 is removed.

[0038] Next, as shown in FIGS. 8 and 9, the notch 12 is inserted into the base 510 of the punching device 500, and the material M is set in the punching device 500 (S104).

[0039] In the process of setting the material M in the punching device 500, first, as shown in FIG. 8, the notch 12 is inserted into the base 510 of the punching device 500. When the material table 10 is raised, the placement surface 16 on which the material M is placed is at the same height as or higher than the top surface of the base 510. Therefore, by inserting the base 510 into the notch 12, the base 510 can be placed below the material M. Next, the cap 14 is fixed to the material table 10 with the magnet 11, thereby closing the notch 12 with the cap 14. Next, as shown in FIG. 9, the base 6 is pushed downward to hook the stopper 44 into the second slit 42b. This lowers the material table 10, and the placement surface 16 is positioned below the base 510. As a result, the material M can be placed on the base 510. Through the above steps, the material M can be set on the base 510 of the punching device 500.

[0040] Next, as shown in FIG. 10, the material M is punched to form a sample S of a predetermined shape (S106). FIG. 10 is a diagram for explaining a method of forming the sample S using a punching device 500. As shown in FIG. 10, the punching device 500 includes a presser member 502 and a blade 504. When the material M is set on a base 510 of the punching device 500, the presser member 502 and the blade 504 are positioned above the material M. The tip of the presser member 502 has the same planar shape as the upper surface of the base 510. The blade 504 surrounds the periphery of the presser member 502.

[0041] First, with material M placed on base 510, presser member 502 and blade 504 are lowered. As a result, presser member 502 comes into contact with material M, and presses material M onto base 510. By further lowering blade 504, the portion of material M that protrudes from base 510 is crushed by the shear force of blade 504 and base 510. The portion of material M that is pressed by presser member 502 remains on base 510, so material M can be formed into a predetermined shape. In this way, a sample S of a predetermined shape can be formed. For example, The planar shape is a circle with a diameter of about 10 mm, and the planar shape of the sample S formed by the punching device 500 is a square with sides of 5 mm x 5 mm. As shown in Figure 11, crushed pieces D of the material M are scattered on the material table 10.

[0042] Next, as shown in FIG. 12, the crushed pieces D are collected (S108). First, the crushed pieces D scattered on the material table 10 are collected on the cap 14 as shown in FIG. 12. The material table 10 has an edge 18 that is higher than the placement surface 16, which prevents the crushed pieces D from falling off the material table 10. Next, with the crushed pieces D placed on the cap 14, the cap 14 is removed. This allows the crushed pieces D to be collected.

[0043] 13, the sample S is set in the guide 30 (S110). Specifically, first, with the sample S placed on the pedestal 510, the pedestal 510 is removed from the notch 12. Next, the orientation of the jig 100 is changed and the pedestal 510 is inserted into the notch 39. By inserting the pedestal 510 into the notch 39, the sample S placed on the pedestal 510 is positioned in the groove 38 between the two rails 34. This allows the sample S to be set in the guide 30.

[0044] 14, in the jig 100, the notch 39 can be inserted into the base 510 from three directions. Therefore, the surface to be processed can be selected from three cross sections of the sample S depending on the state of the sample S.

[0045] Next, as shown in FIG. 15, the sample S is moved to the sample holder 200 using the guide 30 (S112).

[0046] Specifically, first, the slider 32 is attached to the two rails 34. The slider 32 can be attached to the two rails 34 by fitting one of the two rotating bodies 320 into one of the two rails 34 and fitting the other of the two rotating bodies 320 into the other of the two rails 34. Because the rear ends of the rails 34 are open, the rotating body 320 can be fitted into the rails 34 by inserting the rotating body 320 from the rear end of the rails 34.

[0047] Next, the slider 32 is moved along the two rails 34 from the rear end to the front end of the rails 34. Because a stopper 36 is disposed at the front end of the rails 34, the slider 32 hits the stopper 36 and stops. By moving the slider 32 from the rear end to the front end of the rails 34, the sample S located on the movement path of the slider 32 can be collected by the sample holding portion 324 and the sample S can be moved to the sample holder 200. At this time, because the slider 32 accommodates the sample S in the sample holding portion 324, the sample S can be moved to the sample holder 200 without rotating the sample S and while maintaining the orientation of the sample S.

[0048] When the slider 32 hits the stopper 36 and stops, the sample S is positioned at a position protruding from the shielding material 210 by the protrusion amount A, as shown in Fig. 4. This allows the sample S to be placed in the sample holder 200 in a state where the sample S protrudes from the shielding material 210 by the protrusion amount A, as shown in Fig. 16.

[0049] Next, the sample S is fixed to the sample holder 200, and the sample holder 200 is removed from the jig 100 (S114). Although not shown, the sample S is fixed to the sample holder 200 using a leaf spring, screws, adhesive, or the like. Furthermore, although not shown, the sample S may be fixed to the sample holder 200 by sandwiching it between the shielding material 210 and a sample support plate. After the sample S is fixed to the sample holder 200, the sample holder 200 is removed from the jig 100. Through the above steps, the sample S can be attached to the sample holder 200.

[0050] 3. Sample Processing FIG. 17 is a diagram illustrating a method for processing a sample S using a sample processing apparatus 600. For convenience, the sample holder 200 is not shown in FIG. 17. As shown in FIG. 17, the sample processing apparatus 600 is a cross-section polisher. The sample processing apparatus 600 includes an ion source 610, and irradiates the sample S with an ion beam IB emitted from the ion source 610 through a shielding material 210. This allows etching of the portion of the sample S protruding from the shielding material 210.

[0051] As described above, by using the jig 100, the amount of protrusion of the sample S from the shielding material 210 can be accurately controlled, and therefore the processing position of the sample S can be accurately determined.

[0052] 4. Effects The jig 100 is a jig for attaching a sample S to a sample holder 200 for a sample processing device 600 that irradiates the sample S with an ion beam IB through a shielding material 210 and processes the portion of the sample S that protrudes from the shielding material 210, and includes a support part 20 that supports the sample holder 200 to which the shielding material 210 is attached, and a guide 30 that includes a rail 34 and a slider 32 that is movable along the rail 34 and moves the sample S to the sample holder 200.

[0053] Therefore, in the jig 100, the sample S can be placed in the sample holder 200 to which the shielding material 210 is attached by moving the slider 32 along the rail 34. Therefore, in the jig 100, the possibility of the sample S being broken can be reduced compared to when the sample S is grasped with tweezers and placed in the sample holder 200, and the sample S can be easily attached to the sample holder 200.

[0054] For example, all-solid-state batteries are made of brittle materials and are easily broken, making them difficult to handle with tweezers. Furthermore, all-solid-state batteries contain lithium, which is highly reactive with air, so they must be handled in a glove box. Therefore, it is difficult to attach an all-solid-state battery sample to the sample holder 200 using tweezers.

[0055] In contrast, with the jig 100, the sample S can be placed in the sample holder 200 by moving the slider 32 along the rails 34. Therefore, even if the sample is made of a brittle material that easily breaks, such as an all-solid-state battery, the sample S can be easily attached to the sample holder 200. Furthermore, with the jig 100, the sample S can be placed in the sample holder 200 by moving the slider 32 along the rails 34, which makes it easy to operate the jig in a glove box.

[0056] The sample S targeted by the jig 100 is not limited to an all-solid-state battery sample, and the jig 100 can be used to attach various types of samples, such as metal samples and ceramic samples, to the sample holder 200.

[0057] In the jig 100, the guide 30 includes a stopper 36 that stops the slider 32 so that the sample S protrudes from the shielding material 210 by a protrusion amount A. Therefore, in the jig 100, by moving the slider 32 along the rail 34 until it is stopped by the stopper 36, the sample S can be positioned so that the sample S protrudes from the shielding material 210 by the protrusion amount A. Therefore, in the jig 100, the sample S can be easily attached to the sample holder 200.

[0058] The jig 100 includes a reference surface 22 for positioning the shielding material 210, and the slider 32 has a sample support surface 3b for pressing the sample S. When the slider 32 is stopped by the stopper 36, the distance between the reference surface 22 and the sample support surface 3b is the protrusion amount A. In the example, the sample S can be positioned so that the sample S protrudes from the shielding material 210 by a protrusion amount A by moving the slider 32 along the rail 34 until it is stopped by the stopper 36 .

[0059] In the jig 100, a notch 39 is provided in the movement path of the slider 32 so that it can be inserted into a base 510 of a punching device 500 that punches out the material M to form the sample S. Therefore, in the jig 100, the sample S formed by punching out with the punching device 500 can be placed in the sample holder 200 without having to be grasped with tweezers or the like.

[0060] The jig 100 includes a material stage 10 on which the material M is placed, the material stage 10 being movable up and down, and having a notch 12 formed in the material stage 10 that can be inserted into a base 510 of a punching device 500 that punches the material M to form a sample S. Therefore, with the jig 100, the material M can be easily placed on the base 510 of the punching device 500.

[0061] 5. Variations 5.1. First Variant 18, 19, and 20 are diagrams for explaining modified examples of the jig 100. FIG.

[0062] In the above-described embodiment, the guide 30 has one slider 32. However, the guide 30 may have a first slider 32A, a second slider 32B, and a third slider 32C, as shown in Figures 18, 19, and 20. When the guide 30 has multiple sliders in this way, one slider is selected from the multiple sliders and moved along the rail 34.

[0063] 18, when the first slider 32A is stopped by the stopper 36, the distance between the reference surface 22 and the sample support surface 3b becomes the first protrusion amount A. Therefore, by using the first slider 32A, the sample S can be positioned so that the sample S protrudes from the shielding material 210 by the protrusion amount A.

[0064] 19, when the second slider 32B is stopped by the stopper 36, the distance between the reference surface 22 and the sample support surface 3b becomes a protrusion amount B, which is different from the protrusion amount A. Therefore, by using the second slider 32B, the sample S can be positioned so that the sample S protrudes from the shielding material 210 by the protrusion amount B.

[0065] 20, when the third slider 32C is stopped by the stopper 36, the distance between the reference surface 22 and the sample support surface 3b becomes a protrusion amount C, which is different from the protrusion amounts A and B. Therefore, by using the third slider 32C, the sample S can be positioned so that the sample S protrudes from the shielding material 210 by the protrusion amount C.

[0066] The first slider 32A, the second slider 32B, and the third slider 32C have the same shape except that the depth of the recess of the sample holder 324, that is, the position of the sample holder surface 3b, differs.

[0067] Since the guide 30 has the first slider 32A, the second slider 32B, and the third slider 32C, it is possible to select and use a slider according to the desired protrusion amount, and therefore the protrusion amount of the sample S from the shielding material 210 can be set to the desired protrusion amount.

[0068] Although the guide 30 includes three sliders in the above description, the number of sliders may be two, or may be four or more.

[0069] 5.2. Second Variant 21 is a diagram illustrating a modified example of the sample holder 200. In the embodiment described above, the sample S is placed on the shielding material 210 in the sample holder 200 as shown in FIG. 4. However, as shown in FIG. 21, the sample S may be placed on the sample holder 200 and on the shielding material 210 in the sample holder 200. In the sample holder 200 shown in FIG. 21, the sample S is fixed to the sample holder 200 by a leaf spring 220. In step S112 of moving the sample S to the sample holder 200 using the guide 30 shown in FIG. 6 described above, the leaf spring 220 is opened, and the slider 32 is moved to place the sample S on the sample holder 200.

[0070] In this manner, the jig 100 can mount the sample S on a variety of sample holders.

[0071] 5.3. Third Variant 22 is a perspective view schematically showing a jig 102 according to a third modified example. Hereinafter, in the jig 102, components having the same functions as the components of the jig 100 described above will be given the same reference numerals, and detailed description thereof will be omitted.

[0072] 1, the above-described jig 100 had a material stage 10 for setting the material M in the punching device 500, and an elevating mechanism 40 for raising and lowering the material stage 10. The jig 100 also had a notch 39 formed therein for setting the sample S formed by the punching device 500 in the guide 30. In other words, the jig 100 was a jig for setting the sample S formed by the punching device 500 in the sample holder 200.

[0073] In contrast, the jig 102 does not have a material stage 10 or an elevating mechanism 40, as shown in Fig. 22. Furthermore, the jig 102 does not have a notch 39. In the jig 102, the sample S is placed in the groove 38 of the guide 30 using tweezers or the like. By placing the sample S in the groove 38 of the guide 30, the sample S can be positioned by moving the slider 32 so that the sample S protrudes from the shielding material 210 by a protrusion amount A, as in the case of the jig 100 described above.

[0074] The above-described embodiment and modifications are merely examples, and the present invention is not limited to these. For example, the embodiment and modifications can be combined as appropriate.

[0075] The present invention is not limited to the above-described embodiments, and various modifications are possible. For example, the present invention includes configurations that are substantially identical to the configurations described in the embodiments. A substantially identical configuration means, for example, a configuration with the same function, method, and result, or a configuration with the same purpose and effect. The present invention also includes configurations in which non-essential parts of the configurations described in the embodiments are replaced. The present invention also includes configurations that achieve the same effects or purposes as the configurations described in the embodiments. The present invention also includes configurations in which publicly known technology is added to the configurations described in the embodiments. [Explanation of symbols]

[0076] 2...first beam portion, 3a...guide surface, 3b...specimen holding surface, 4...second beam portion, 6...base portion, 8...pillar portion, 10...material stand, 11...magnet, 12...notch, 14...cap, 16...mounting surface, 18...edge, 20...support portion, 22...reference surface, 30...guide, 32...slider, 32A...first slider, 32B...second slider, 32C...third slider, 34...rail, 36...stopper, 38...groove, 39...notch, 40...lifting mechanism, 42a...first slit, 42b...second slit, 44...stopper, 46...spring, 48...axis member, 49...stopper pressing member, 100...jig, 102...jig, 200...specimen holder, 210...shielding material, 212...edge part, 220... leaf spring, 320... rotating body, 321... shaft member, 322... base, 324... sample holding part, 326... gripping part, 500... punching device, 502... pressing member, 504... blade, 510... base, 600... sample processing device, 610... ion source

Claims

1. A jig for attaching a sample to a sample holder for a sample processing device that irradiates a sample with an ion beam through a shielding material and processes a portion of the sample protruding from the shielding material, comprising: a support portion that supports the sample holder to which the shielding material is attached; a guide including a rail and a first slider movable along the rail to move the sample to the sample holder; Including, a jig.

2. In claim 1, The guide includes a stopper that stops the first slider so that the sample protrudes from the shielding material by a first protrusion amount.

3. In claim 2, a reference surface for positioning the shielding material; the first slider has a first sample holding surface that presses against the sample; When the first slider is stopped by the stopper, the distance between the reference surface and the first sample holding surface becomes the first protrusion amount.

4. In claim 3, the guide has a second slider movable along the rail to move the sample along the rail to the sample holder; The stopper is a jig that stops the second slider so that the sample protrudes from the shielding material by a second protrusion amount that is different from the first protrusion amount.

5. In claim 4, the second slider has a second sample support surface that presses against the sample; When the second slider is stopped by the stopper, the distance between the reference surface and the second sample holding surface becomes the second protrusion amount.

6. In claim 1, a material table on which the material is placed, The material table is capable of being raised and lowered, The jig has a notch in the material base that can be inserted into a base of a punching device that punches the material to form the sample.

7. In any one of claims 1 to 5, The jig has a notch on the movement path of the first slider that can be inserted into a base of a punching device that punches out material to form the sample.

Images