Heating device and heating plate

Abstract

To provide a heating device that achieves high temperature uniformity in a plane of a large-area plate-shaped or sheet-shaped object to be heated.SOLUTION: A heating device comprises a plurality of heating plates vertically disposed at intervals, and a heating space demarcated by heating surfaces of heating plates vertically facing each other. Each of the heating plates has a rectangular metallic plate, and a plurality of heater elements (11A-11C) which are embedded in the metallic plate and on which heating wires (13A-13C) are routed. The heater elements (11A-11C) are arranged in an arrangement direction L of the metallic plate, and each extend in an extension direction W orthogonal to the arrangement direction L. The plurality of heater elements (11A-11C) vary in width in the arrangement direction L, and in the extension direction W, the respective routing densities of the heating wires (13A-13C) of the plurality of heater elements (11A-11C) vary.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a heating apparatus used for heat treatment of various plate-like or sheet-like members such as glass substrates, semiconductor lead frames, or other metal or synthetic resin plates. [Background technology]

[0002] As an apparatus for heat-treating relatively large glass substrates that are components of liquid crystal display panels and the like, a heating furnace has been proposed in which a number of shelf-like heaters, each consisting of a double-sided far-infrared panel heater that radiates far-infrared rays from both sides by heating a heat sink, are arranged in multiple stages at regular intervals in the vertical direction within the furnace body, and each space formed between these shelf-like heaters is used as a drying chamber (see Patent Document 1).

[0003] In the case of the heating furnace described in Patent Document 1, a large number of shelf-like heaters consisting of double-sided far-infrared panel heaters are arranged, which is advantageous in that each space (drying chamber) formed between these shelf-like heaters can be efficiently heated.

[0004] However, the heat generated by the numerous shelf-like heaters arranged vertically tends to rise within the heating furnace and collect in the area near the top wall of the furnace, so the temperature in the upper area of ​​the furnace becomes higher than the temperature in the lower area of ​​the furnace, and it is extremely difficult to eliminate this temperature difference between the upper and lower areas of the furnace.

[0005] Patent document 2 discloses a heating device comprising a plurality of heating walls arranged opposite each other at a distance in a space surrounded by heat insulating material, a heat generating means provided on the heating walls, a plurality of heat transfer walls arranged at a distance between the heating walls, a plurality of heat radiation members arranged in a shelf-like manner between the heat transfer walls, and a heating space for the heated object provided between adjacent heat radiation members in the vertical direction. The heating device disclosed in Patent Document 2 uses vertically installed heating walls to heat, so the size of the object that can be accommodated in the heating space is limited. The technology disclosed in Patent Document 2 does not anticipate uniform heating of a large-area plate-shaped or sheet-shaped object, so it is difficult to heat a large-area object to a uniform temperature across its surface. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2001-317872 [Patent Document 2] Japanese Patent Application Laid-Open No. 2005-352306 Summary of the Invention [Problem to be solved by the invention]

[0007] Generally, it is difficult to achieve a uniform temperature distribution over a large surface with precision because heating devices are placed in the atmosphere and are constantly affected by external disturbances. Although it is possible to heat a large area with precision and uniformity by installing multiple heaters and temperature sensors and controlling the temperature within the surface, this increases the cost of the device. Furthermore, installing multiple heaters and temperature sensors makes it difficult to stack the heating spaces vertically.

[0008] The problem to be solved by the present invention is to provide a heating device that can uniformly heat a large-area plate-shaped or sheet-shaped object to be heated at low cost. [Means for solving the problem]

[0009] The heating device of the present invention comprises a plurality of heating plates arranged at intervals in the vertical direction; a heating space for accommodating an object to be heated, the heating space being defined by the heating surfaces of the heating plates facing each other in the vertical direction; Each of the heating plates comprises: a rectangular metal plate; a plurality of heating elements built into the metal plate and wired with heating wires; the plurality of heating elements are arranged in a first direction of the metal plate and extend in a second direction perpendicular to the first direction; the plurality of heating elements have widths that vary in the first direction, or arrangement intervals that vary in the first direction; In the second direction, the wiring density of the heating wires of each of the plurality of heating elements varies. [Effects of the Invention]

[0010] According to the present invention, a heating space is defined between opposing heating plates and the configuration of the heating elements built into the heating plates is optimized, so that a large-area plate-shaped or sheet-shaped object to be heated can be heated uniformly. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a front view showing a heating device according to an embodiment of the present invention; [Figure 2] FIG. 2 is an enlarged view of the area circled by the arrow A in FIG. 1. [Figure 3] FIG. 2 is a side view of the heating device shown in FIG. [Figure 4A] 3 is an enlarged side view of the area surrounded by the ellipse indicated by the arrow B in FIG. 3, illustrating how an object to be heated is placed and set in the heating space of the heating device shown in FIG. 1. FIG. [Figure 4B] 4B is a side view corresponding to FIG. 4A, showing a state in which an object to be heated is set in the heating space of the heating device shown in FIG. 1. FIG. [Figure 4C] 4B is a side view corresponding to FIG. 4A, showing a state in which an object to be heated is removed from the heating space of the heating device shown in FIG. 1. FIG. [Figure 5] 2 is a plan view showing an embodiment of a heating plate employed in the heating device shown in FIG. 1. FIG. [Figure 6] FIG. 6 is a front view of the heating plate shown in FIG. 5 . [Figure 7]6 is a plan view conceptually showing the wiring of heating wire elements installed inside the heating plate shown in FIG. 5. FIG. [Figure 8] 1. FIG. 4 is a front view showing another embodiment of the heating plate employed in the heating device shown in FIG. [Figure 9] FIG. 9 is a plan view of the heating plate shown in FIG. 8 . [Figure 10] 9 is a schematic diagram of a rod-shaped heater installed inside the heating plate shown in FIG. 8. [Figure 11] FIG. 2 is an exploded perspective view showing an object to be heated, a guide member that guides the object to be heated into a heating space, and a heating plate. [Figure 12] 10 is a perspective view showing a state in which pins are provided upright on a heating element to prevent an object to be heated from coming into direct contact with the heating surface of a heating plate in a heating space. FIG. [Figure 13] FIG. 10 is an exploded perspective view conceptually showing that, when the object to be heated is a sheet-like object, the object to be heated is fixed to a frame and guided into a heating space along a guide member. [Figure 14] This is a perspective view showing how pins are installed on the heating plate corresponding to the position of the jig so that when a sheet-like object to be heated is fixed to the frame, the frame does not come into direct contact with the heating plate in the heating space. [Figure 15] 2 is a front view showing the heating device shown in FIG. 1 provided with a back plate at the back of the heating space, the back plate having a plurality of gas supply holes for supplying gas into the heating space. [Figure 16] FIG. 10 is a side view showing a state in which an inert gas is supplied into the heating space. [Figure 17] 6 is a cross-sectional view taken along line CC in FIG. 5. [Figure 18] FIG. 18 is an enlarged view of the circled area indicated by arrow D in FIG. 17. DETAILED DESCRIPTION OF THE INVENTION

[0012] A heating device 1 according to an embodiment of the present invention will be described below with reference to the drawings. 1 to 7, the heating device 1 has a plurality of rectangular heating plates 10 arranged at equal intervals in the vertical direction, and a heating space 30 defined by the opposing heating plates 10, 10 for accommodating a plate- or sheet-shaped object to be heated 20. In addition, the heating device 1 has a temperature adjustment device 40 for adjusting the temperature of each heating plate 10. Note that the heating plates 10 are arranged at equal intervals in the vertical direction, but this is not limiting and the intervals do not have to be equal.

[0013] FIG. 1 shows the front of the heating device 1. The left and right ends of the front side of each of the heating plates 10 are supported by a pair of left and right support plates 50L, 50R, and the left and right ends of the rear side are similarly supported by a pair of left and right support plates 50L, 50R. The pair of front and rear support plates 50L, 50R are arranged opposite each other, and a plurality of grooves 51 with rectangular cross sections are formed horizontally at equal intervals in the vertical direction (corresponding to the height of the heating space 30) on their opposing surfaces (see FIGS. 1 and 2). The left and right ends of the front and rear sides of each heating plate 10 are fitted into these grooves 51, respectively, to position each heating plate 10 in the vertical direction. An object to be heated placed in the heating space 30 is heated by the upper and lower heating plates 10.

[0014] The front and back sides of the heating space 30 are open, and both side surfaces of the heating space 30 are open between the support plates 50L, 50L and between the support plates 50R, 50R. In other words, the heating space 30 is open on all four sides. By providing an opening in each heating space 30, the heat treatment process by the heating device 1 can be continuously connected to other processes.

[0015] Further, strip-shaped guide members 60L, 60R with an L-shaped cross section are fixed to the opposing surfaces of each pair of support plates 50L, 50R slightly above the grooves 51 using screws or the like (not shown) for guiding the object to be heated 20 into the heating space 30 (see FIGS. 1 to 3 and 11). The guide members 60L, 60R are arranged horizontally in the front-to-rear direction L (see FIG. 3) of the heating device 1. Guide members 61L, 61R for smoothly guiding the object to be heated 20 into the heating space 30 are attached to the front side of the guide members 60L, 60R (the front side of the heating device 1, the left side in FIG. 3).

[0016] The upper and lower ends of a pair of support plates 50L, 50R on the front and back sides of the heating device 1 are connected by a top plate 71 and a bottom plate 72, respectively. Shorter leg members 73L, 73R are attached to the underside of the bottom plate 72, and the lower ends of these leg members 73L, 73R are fixed to a middle plate 74. Longer leg members 75L, 75R are attached to the underside of the middle plate 74, and the lower ends of these leg members 75L, 75R are fixed to a base 76.

[0017] The pair of left and right support plates 50L, 50R on the front side of the heating device 1 and the pair of left and right support plates 50L, 50R on the back side thereof are formed of stainless steel, and the top plate 71, bottom plate 72, leg members 73L, 73R, middle plate 74, leg members 75L, 75R and base 76 are preferably formed of the same stainless steel material as the pair of left and right support plates 50L, 50R, but are not limited to this and may be formed of aluminum or an aluminum alloy (or aluminum or an aluminum alloy that has been subjected to a matte surface treatment to suppress the dissipation of radiant heat).

[0018] As shown in Fig. 4A, the plate-shaped object to be heated 20 is inserted horizontally into the heating space 30 from the guide members 61L and 61R side. As shown in Fig. 4B, the object to be heated 20 is heated while sandwiched between the upper and lower heating plates 10. After the heating process, the object to be heated 20 is carried out horizontally from the opening on the rear side opposite the guide members 61L and 61R side, as shown in Fig. 4C.

[0019] Here, the heating plate 10 of this embodiment will be described. 5 to 7, the heating plate 10 incorporates three heat generating elements 11A, 11B, and 11C. Here, the direction in which the heat generating elements 11A, 11B, and 11C are arranged is defined as an arrangement direction L (first direction), and the direction in which the heat generating elements 11A, 11B, and 11C extend is defined as an extension direction W (second direction). The heating elements 11A, 11B, and 11C are so-called planar heaters in which heating wires 13A, 13B, and 13C are folded back in a zigzag pattern and wired on approximately rectangular electrically insulating sheets 12A, 12B, and 12C such as mica. The heating elements 11A, 11B, 11C have heating wires 13A, 13B, 13C with higher wiring density in end regions W1, W1 on both sides than in a central region W2 in the extending direction W of the sheets 12A, 12B. The width of the heating element 11B in the central region L2 in the arrangement direction L of the heating element 11A, 11B, and 11C is relatively wide, while the width of the heating element 11A, 11C in the edge regions L1 on both sides is relatively narrow. The heating elements 11A and 11C have the same configuration and the same width and wiring density distribution. The heating plate 10 is configured such that heating elements 11A, 11B, and 11C are sandwiched on both sides between metal plates 15A and 15B made of stainless steel alloy or the like. The metal plates 15A and 15B are joined to each other at their peripheries by welding or the like. The metal plates 15A and 15B constituting both sides of the heating plate 10 have the same temperature distribution.

[0020] In this embodiment, the heating plate 10 is equipped with a plurality of heating elements, each with a heating wire extending from one end to the other in the extending direction W. The width of the heating elements in the arrangement direction L and the wiring density in the extending direction W are varied to adjust the in-plane distribution of heat generation of the heating plate 10 to accommodate disturbances from the environment in which the heating plate 10 is installed. By optimizing the in-plane distribution of heat generation of the heating plate 10 in response to environmental disturbances and combining it with the temperature control device 40 described above, the heating plate 10 can achieve high in-plane temperature uniformity. The configuration of the heating elements of the heating plate 10 is merely an example, and it goes without saying that various modifications can be made in response to environmental disturbances.

[0021] Each of the heating plates 10 is provided with temperature sensors 14A and 14B, each of which is made up of a thermocouple or the like. The temperature sensor 14A is provided at the center Ct of the heat generating element 11B in the arrangement direction L, and the temperature sensor 14B is provided at approximately the center of the heat generating element 11A in one end region L1. The number of temperature sensors is not limited to this, but at least one temperature sensor must be provided on one heating plate 10. No temperature sensor is provided on the heating element 11C. The heating element 11C is formed symmetrically with the heating element 11A and has the same size and structure as the heating element 11A. The temperature distribution on the heating element 11C can be estimated from the detected temperature of the heating element 11A. In other words, by making the arrangement and configuration of the multiple heating elements symmetrical with respect to the center lines in the arrangement direction L and the extension direction W, the number of temperature sensors can be reduced.

[0022] 5, a power cable 16 that supplies current to the heating wires 13A, 13B, and 13C is led out from one end face of the heating plate 10 in the extending direction W, and a cable 17 that connects the temperature sensors 14A and 14B to the temperature adjustment device 40 is also led out from one end face of the heating plate 10 in the extending direction W. This is a great advantage because the power cable 16 and the cable 17 do not interfere with the heating plates 10 when the heating plates 10 are stacked.

[0023] 1 is electrically connected to the heating wires 13A, 13B, and 13C of each heating plate 10, and is capable of independently controlling the power supplied to each of the heating wires 13A, 13B, and 13C. Specifically, the temperature adjustment device 40 independently controls the heat generation amount of each of the plurality of heating elements 11A, 11B, and 11C of the plurality of heating plates 10 so that the temperatures detected by the temperature sensors 14A and 14B provided on each of the plurality of heating plates 10 track the target temperature. In temperature adjustment of a single heating plate 10, for example, if the temperature in the central region is higher than the target temperature and the temperature in the edge region is lower than the target temperature, the power supplied to the heating wire 13B in the central region L2 is relatively reduced and the power supplied to the heating wires 13A and 13C in both edge regions L1 is relatively increased, thereby making it possible to uniformize the temperature distribution within the surface of the heating plate 10 regardless of environmental disturbances. When multiple heating plates 10 are stacked, heat rises from the bottom to the top, so the temperature of the heating plates 10 arranged at the top becomes higher than that of the heating plates 10 arranged at the bottom. The temperature adjustment device 40 controls the power supply so that the temperatures of all of the multiple heating plates 10 are uniform by relatively reducing the heat generation amount of each of the heating element 11A, 11B, 11C of the heating plates 10 arranged at the top and relatively increasing the heat generation amount of each of the heating element 11A, 11B, 11C of the heating plates 10 arranged at the bottom. As a result, the large-area plate-shaped or sheet-shaped object to be heated 20 can be uniformly heated in all heating spaces 30 of the heating device 1.

[0024] The heating elements 11A, 11B, and 11C built into the heating plate 10 may be, for example, a planar heater or a strip heater, which will be described below. Planar heaters are classified into the following two types, for example, depending on the material and shape of the heating wire (heating wire). 1) Wire type (also called dual-wire type) Materials: Ni-Cr (nichrome wire), Fe-Cr-Al (iron-chrome wire), Kanthal wire, etc. For example, a wire-shaped heating wire is wound around an insulator or routed on a flat surface of an insulator. In the case of a type in which the wire is wound around an insulator, it is possible to make the winding loose or tight by changing the winding pitch. In addition, in the case of a type in which the wire is routed on a flat surface of an insulator, it is possible to ensure an intimate contact surface by changing the wire layout. 2) Strip type (also called tape type) Materials: Ni-Cr (nichrome wire), Fe-Cr-Al (iron-chrome wire), stainless steel wire, etc. A heating wire is wound around an insulator, or it is etched from a sheet into a flat surface. In the case of a type where a heating wire is wound around an insulator, it is possible to achieve a tight winding by changing the winding pitch. In addition, in the case of a type formed by etching, it is possible to achieve a coarse or dense surface by changing the pattern layout.

[0025] In the above embodiment, the heating elements 11A, 11B, and 11C are formed in three regions: a central region W2 where the wiring density of the heating wires 13A, 13B, and 13C is sparse, and end regions W1, W1 on both sides where the wiring density is dense. However, this is not limited to this, and more regions may be formed. Furthermore, the number of heating elements constituting the heating plate 10 is not limited to three, and four or more may be arranged side by side. Furthermore, the wiring density of the heating wires 13A, 13B, and 13C is gradually increased in the end regions W1 on both sides compared to the central region W2 in the width direction. However, it may also be gradually increased from the center to both ends in the width direction.

[0026] Other embodiments The heating plate 10 is configured by sandwiching a planar heater between two metal plates, but it is also possible to incorporate a rod-shaped heater into one metal plate. 8 to 10, the heating plate 100 has a plurality of holes 102 arranged in an arrangement direction L in a single, substantially rectangular metal plate 101, and these holes extend in an extension direction W that is perpendicular to the arrangement direction L. A rod-shaped heater 103 is inserted into each of the plurality of holes 102. The arrangement intervals of the rod-shaped heaters 103 in the arrangement direction L gradually narrow from the center Ct to both ends E. The rod-shaped heaters 103 are arranged symmetrically with respect to the center Ct. Although the multiple holes 102 are preferably through-holes, they do not necessarily have to be through-holes and may be determined appropriately taking into account the performance of the rod-shaped heaters 103, etc. As shown in FIG. 10, the rod-shaped heater 103 has a higher wiring density of the heating wire 103A in end regions W1, W1 on both sides of the central region W2 in the extending direction W. In this embodiment, the heating plate 100 is equipped with a plurality of rod-shaped heaters 103 as heating elements, and each rod-shaped heater 103 is arranged from one end to the other end in the extending direction W of the heating plate 100. By varying the arrangement intervals of the heating elements in the arrangement direction L and by varying the wiring density in the extending direction W, the in-plane distribution of the heat generation amount of the heating plate 100 can respond to disturbances received from the environment in which the heating plate 100 is installed. The in-plane distribution of the heat generation amount of the heating plate 100 is optimized in response to environmental disturbances, and by combining it with the temperature adjustment device 40 described above, high in-plane temperature uniformity of the heating plate 100 can be achieved.

[0027] 9, temperature sensors 104A and 104B are disposed on the heating plate 100 at the center Ct and one end in the arrangement direction L. The temperature sensors 104A and 104B may be embedded in the heating plate 100 or may be fixed to the surface of the heating plate 100. Regarding the wiring density of the heating wire 103A of the rod-shaped heater 103, the wiring density is made gradually denser in the end regions W1 on both sides compared to the central region W2, but it may also be made gradually denser from the center to both end regions in the width direction.

[0028] Here, a specific example of the rod-shaped heater 103 will be described. An example of a rod-shaped heater structure is as follows. 1) Bobbin winding type A wire-shaped heating wire is wound around the outer periphery of a magnesium oxide bobbin. By winding it around the bobbin, even thin heating wires can be used, allowing for a wide range of capacity settings. The heating wire can be stably fixed, allowing for drawing of the entire heater, making it possible to use it at high temperatures. 2) Air-core type This is a wire-like heating wire formed into a coil without a bobbin. Because it is a coil, the mechanical strength of the heating wire is required to stabilize the shape after forming, so the range of heating capacity is small. In both cases, powdered magnesium oxide is placed between the heating element and the outer cylindrical metal for insulation.

[0029] The object to be heated 20 may be a sheet-like object or a plate-like object. The object to be heated 20 is inserted into the heating space 30 by a crane, robot arm, or the like (not shown). At this time, the left and right guide members 61L, 61R guide the object to be heated 20 into the heating space 30 without damaging it.

[0030] Here, the object to be heated 20 will be described. Generally, there are two types of objects to be heated (workpieces): 1) Hard type (also called board type) It is a sturdy sheet-like material. This applies to substrates, plastic plates, glass plates, etc. This type of heated object (workpiece) can be placed directly into the furnace and heated. The method of holding it in the furnace is to have a holding part contact the part of the heated object (workpiece) that can come into contact with it. In the case of a substrate, this means holding a discarded part of the substrate. Holding parts include guides and pins installed on the upper surface of the heating plate 10, which will be described later. This type of workpiece can also be held directly by the guide members 60L and 60R mentioned above. 2) Soft type (also called sheet type) It is a soft sheet-like object for the waist. Films, foils, rubber sheets, etc. are targeted. This type of heated object (workpiece) cannot be placed directly into the furnace due to handling issues, so it is placed in a jig and heated. The method of holding it in the furnace refers to holding it with a jig. The holding parts are the same as those in 1) above.

[0031] In Figure 12, when the heated object 20 is sheet-shaped and is inserted into the heating space 30, multiple pins 81 are arranged in a row at equal intervals, facing the longitudinal direction to the side of the heating element, so that the heated object 20 does not come into direct contact with the heating plate 10, 100.

[0032] In Figure 13, when the object to be heated 20 is a flexible sheet, the peripheral portion of the object to be heated 20 is fixed to a rectangular frame-shaped jig 82, so that the object to be heated 20 can be placed in the heating space 30 while still attached to the jig 82.

[0033] In Figure 14, multiple pins 81 are arranged in a row facing the longitudinal direction to the side of the heating element so that the object to be heated 20 fixed to a jig 82 such as that shown in Figure 13 does not come into direct contact with the heating plate 10, 100 when being guided into the heating space 30.

[0034] In this embodiment, the heating space 30 containing the object to be heated 20 is uniformly heated from above and below by the heating plates 10 as described above, and the interior of each heating space 30 is heated evenly and without unevenness.

[0035] The heating device 1 of this embodiment may further include a gas supply means 90 for supplying an inert gas or a specific gas into the multiple heating spaces 30 (see FIG. 17). The gas supply means 90 includes a jet nozzle device 92 having multiple jet ports 91 arranged in a horizontal row at the opening on the rear side of each heating space 30. Each jet nozzle device 92 is box-shaped extending in the width direction W, and multiple jet ports 91 are formed at equal intervals on its surface facing the heating space 30. Gas is supplied to each jet nozzle device 92 from a gas supply source (not shown) via a supply pipe 93 from its rear. When gas is supplied, it is evenly dispersed to the left and right within the jet nozzle device 92 and ejected evenly from each jet port 91. The supplied gas can also replace the air in the heating space 30 with an inert gas or a specific gas. Therefore, the introduction of an inert gas can prevent oxidation of the object to be heated 20, or the reaction with the introduced specific gas can be utilized to perform surface treatment on the object to be heated 20.

[0036] In the heating device 1 of this embodiment, a plurality of heating plates 10 or 100 arranged like shelves are supported by support plates, and the spaces between the support plates, i.e., the front, back, left and right sides of the device, are open. This makes it easy to take in and out the object 20 to be heated from the front and back of the heating device 1, and also makes it possible to take in and out the object 20 to be heated from the left and right sides of the device as needed, making it easy to take in and out.

[0037] When gas is supplied into the heating space 30 from the back of the heating device 1, instead of the left and right support plates 50L, 50R that support the heating plate 10 or 100 at the front and back, a single side support plate 83L, 83R that covers the entire side can be installed on each side of the device, thereby confining the gas within the heating space 30 (see Figures 15 to 18).

[0038] In this embodiment, a guide member 60 is used as an example to hold the object to be heated 20, but this is not limited to this. For example, it is possible to provide a clamping member that clamps the object to be heated 20 from above and below on the support plates 50L, 50R, or to form a holding groove directly on the support plates 50L, 50R and have the support plates 50L, 50R hold the object to be heated 20. [Industrial Applicability]

[0039] The heating device according to the present invention can be widely used in industrial fields where various plate-like or sheet-like members such as glass substrates, semiconductor lead frames, or other metal or synthetic resin plates are subjected to heat treatment. [Explanation of symbols]

[0040] 1 Heating device 10 Heating Plate 11A, 11B, 11C heating element 12A, 12B, 12C sheet materials 13A, 13B, 13C heating wire 14A, 14B temperature sensors 15A, 15B Metal Plate 16 Power cable 17 Cable 20 Object to be heated 30 heating space 40 Temperature control device 50L, 50R support plate 51 Groove 60L, 60R guide members 61L, 61R Guide member 71 Top plate 72 Bottom plate 73L, 73R leg parts 74 Middle Plate 75L, 75R leg parts 76 Foundation 81 pins 82 Jig 83L, 83R Side support plate 90 Gas supply means 91 spout 92 Jet nozzle device 93 Supply Pipe 100 heating plates 101 Metal Plate 102 holes 103 Rod heater 103A heating wire 104A, 104B temperature sensors W Extending direction L array direction

Claims

[Claim 1] At least three heating plates arranged at predetermined intervals in the vertical direction; a heating space for accommodating an object to be heated, the heating space being defined by the heating surfaces of the heating plates facing each other in the vertical direction; The heating spaces adjacent to each other in the vertical direction are separated by the heating plate, The heating space further includes a gas supply means for supplying an inert gas or a specific gas in one direction from one opening of the heating space to another opening opposite the opening, a heating device, wherein the gas supply means has a plurality of gas outlets arranged at equal intervals along the width direction of the one opening and ejecting gas evenly;

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