Pressure sensor

Abstract

To provide a pressure sensor that suppresses discomfort given to a user of a sheet or a bedding and is improved in detection sensitivity.SOLUTION: A pressure sensor 2 includes an insulator sheet body 21, a first detection electrode 32, a second detection electrode 62, a first insulator sheet 31 and a first shield electrode 33. A thickness of the first insulator sheet 31 is equal to or less than a thickness of the insulator sheet body 21. The first shield electrode 33 is arranged so as to overlap with the first detection electrode 32 when viewed from a thickness direction of the first shield electrode 33, and includes an outer shape including an outer shape of the first detection electrode 32 and includes a plurality of first openings 33a penetrating in the thickness direction of the first shield electrode 33.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a pressure sensor. [Background technology]

[0002] A known pressure sensor that is placed in a seat of a vehicle such as an automobile to detect the biological information of a seated occupant is described in Patent Document 1. This pressure sensor is placed inside the seat cushion of the seat and detects the biological information of the person seated in the seat, such as breathing and heart rate.

[0003] The pressure sensor has an insulating sheet made of nonwoven fabric disposed between a pair of detection electrodes made of conductive fabric. When a person sits on the seat, pressure is applied to the pressure sensor by, for example, the occupant's breathing or heartbeat. This compresses the insulating sheet disposed between the pair of detection electrodes, changing the distance between the pair of detection electrodes. This changes the capacitance between the pair of detection electrodes. The biometric information of the seated person is detected by detecting this change in capacitance. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] International Publication No. 2019 / 116919 Summary of the Invention [Problem to be solved by the invention]

[0005] Various electrical devices may be arranged around the seat. For example, in a vehicle, there are many electrical devices around the seat. In such a case, it is desirable to electromagnetically shield noise generated by the electrical devices in order to improve the detection accuracy of the pressure sensor. Therefore, it is conceivable to arrange a shield electrode outside the detection electrode. In this case, an insulating intervening material is arranged between the detection electrode and the shield electrode. As a result, so-called parasitic capacitance occurs between the detection electrode and the shield electrode. The effect of the parasitic capacitance may reduce the detection sensitivity of the detection electrode.

[0006] One possible way to reduce the parasitic capacitance is to increase the distance between the detection electrode and the shield electrode by increasing the thickness of the insulating intervening material. If the insulating intervening material is made of a relatively hard material, increasing the thickness of the insulating intervening material may reduce the comfort of the seat occupant. On the other hand, if the insulating intervening material is made of a relatively soft material, the pressure corresponding to the biometric information applied by the occupant may be absorbed by the insulating intervening material, which may reduce the detection sensitivity of the pressure sensor.

[0007] Similar problems arise when pressure sensors are placed on bedding or other items other than the seat to acquire biometric information of the user.

[0008] One aspect of the present invention is to provide a pressure sensor that reduces discomfort to users of seats or bedding and has improved detection sensitivity, while another aspect of the present invention is to provide a pressure sensor that can be reduced in cost by using a simple configuration. [Means for solving the problem]

[0009] One aspect of the present invention is an insulating sheet comprising: an insulating sheet body; a first detection electrode disposed on a first surface side of the insulating sheet body; a second detection electrode disposed on a second surface side of the insulating sheet body so as to overlap the first detection electrode; a first insulating sheet disposed on an outer surface side of the first detection electrode; a first shield electrode disposed on an outer surface side of the first insulating sheet and electromagnetically shielding the first detection electrode; the thickness of the first insulator sheet is equal to or less than the thickness of the insulator sheet body; The first shield electrode is When viewed from the thickness direction of the first shield electrode, the first shield electrode is disposed so as to overlap the first detection electrode, and has an outer shape that includes an outer shape of the first detection electrode; The pressure sensor includes a plurality of first openings that penetrate the first shield electrode in the thickness direction.

[0010] Another aspect of the present invention is a sheet of insulation material comprising: a first electrode unit disposed on a first surface side of the insulator sheet body, disposed on the insulator sheet body without being adhered to the insulator sheet body, and configured separately from the insulator sheet body; a second detection electrode that is disposed on a second surface side of the insulator sheet main body, that is disposed on the insulator sheet main body without being adhered to the insulator sheet main body, and that is disposed so as to overlap the first electrode unit; The first electrode unit is a first insulating sheet; a first detection electrode bonded to the inner surface of the first insulating sheet; a first shield electrode bonded to the outer surface of the first insulating sheet and electromagnetically shielding the first detection electrode. [Effects of the Invention]

[0011] According to one aspect of the present invention, the thickness of the first insulating sheet is equal to or less than the thickness of the insulating sheet body, thereby reducing the overall thickness of the pressure sensor. This improves the comfort of an occupant sitting on a seat in which a pressure sensor is disposed. It also improves the comfort of a user who uses bedding in which a pressure sensor is disposed. In this way, it is possible to prevent discomfort felt by users of seats or bedding in which a pressure sensor is disposed.

[0012] Furthermore, by providing the first shield electrode, the pressure sensor can reduce the influence of external noise on the first detection electrode. Furthermore, by providing the first shield electrode with a plurality of first openings, the area where the first detection electrode and the first shield electrode face each other can be reduced. As a result, the parasitic capacitance generated between the first detection electrode and the first shield electrode can be reduced. This can improve the detection sensitivity of the pressure sensor.

[0013] As described above, according to one aspect of the present invention, it is possible to provide a pressure sensor that suppresses discomfort felt by a user of a seat or bedding and has improved detection sensitivity.

[0014] According to another aspect of the present invention, the first insulating sheet, the first detection electrode, and the first shield electrode constitute a first electrode unit. This simple configuration facilitates manufacturing and reduces costs. Furthermore, the distance between the first detection electrode and the first shield electrode can be stabilized. As a result, fluctuations in parasitic capacitance between the first detection electrode and the first shield electrode can be suppressed. This improves the detection sensitivity of the pressure sensor.

[0015] As described above, according to another aspect of the present invention, it is possible to provide a pressure sensor that can achieve cost reduction through a simple configuration. [Brief explanation of the drawings]

[0016] [Figure 1] FIG. 1 is a diagram showing the configuration of a user state estimation system including a pressure sensor according to an embodiment. [Figure 2] FIG. 3 is a perspective view of the pressure sensor as seen from above. [Figure 3] FIG. 4 is a perspective view of the pressure sensor as seen from below. [Figure 4] FIG. 2 is an exploded perspective view of the pressure sensor from which a protective film has been removed, as viewed from above. [Figure 5] FIG. 2 is an exploded perspective view of the pressure sensor from which a protective film has been removed, as viewed from below. [Figure 6] FIG. [Figure 7] FIG. 3 is an exploded cross-sectional view of an insulating sheet, a first electrode unit, and a second electrode unit that constitute the pressure sensor. [Figure 8] 8 is a plan view of the first electrode unit from which the protective film has been removed, viewed from above (external side). In Fig. 8, only the outer shapes (contours) of the first shield electrode, first main-wiring shield electrode, and first sub-wiring shield electrode are shown. [Figure 9] 9 is a plan view of the second electrode unit from which the protective film has been removed, viewed from above (inner surface side). In Fig. 9, only the outer shapes (contours) of the second shield electrode, second main-wiring shield electrode, and second sub-wiring shield electrode are shown. [Figure 10] FIG. 10 is a perspective view showing a first electrode unit (excluding a protective film) that constitutes a pressure sensor in a modified embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0017] (Embodiment) 1. Overview of User State Estimation System 1 An overview of a user state estimation system 1 in this embodiment will be described with reference to Fig. 1. The user state estimation system 1 is configured to estimate the state of an occupant seated in a vehicle seat 10 or a piece of furniture seat 10. However, in addition to targeting an occupant in a seat 10, the user state estimation system 1 can also target an occupant seated on a cushion, or even a user lying on bedding such as a bed or futon.

[0018] The state of the user to be estimated includes at least one piece of biological information selected from the user's heart rate information, breathing information, etc. Furthermore, the state of the user to be estimated may also include the seated posture (sitting posture) of a person sitting on the seat 10 or cushion, and the lying posture (supine posture) of a person lying on bedding. In this embodiment, the state of the user to be estimated includes the heart rate information, breathing information, and the seated posture (sitting posture) of a person sitting on the seat 10, as an example. The seated posture includes at least one of the seated posture itself, which indicates the seated position, etc., and a change in the seated posture.

[0019] 2. Sheet 10 Configuration As described above, in this embodiment, the user's state estimation system 1 estimates the biometric information and seating posture of a person seated in the seat 10. The configuration of the seat 10 will now be described with reference to FIG.

[0020] The seat 10 includes a seat frame 11, a seat cushion 12, a seat covering material 13, a back frame 14, a back cushion 15, a back covering material 16, a headrest frame 17, a headrest cushion 18, and a headrest covering material 19. In the seat 10, the seat cushion 12 and the seat covering material 13 may be configured to be fixed to the seat frame 11, or may be configured to be detachably placed on the seat frame 11 like a cushion.

[0021] 3. Basic configuration of user state estimation system 1 The basic configuration of a user's state estimation system 1 will be described with reference to Fig. 1. The state estimation system 1 includes a pressure sensor 2 and a state estimation device 3.

[0022] In this embodiment, the pressure sensor 2 is disposed within the seat cushion 12 of the seat 10. For example, the pressure sensor 2 is disposed at the vertical middle position of the seat cushion 12, sandwiched between the upper and lower cushions. The pressure sensor 2 outputs a signal according to the pressure input via the seat cushion 12. The pressure sensor 2 may also be disposed in the back cushion 15 instead of the seat cushion 12. The pressure sensor 2 may also be disposed within the cushion.

[0023] The pressure sensor 2 is configured so as not to cause a user seated on the seat 10 to feel uncomfortable due to the presence of the pressure sensor 2. For example, the pressure sensor 2 is formed in a sheet (film) shape and is flexible. The pressure sensor 2 may be configured to be stretchable in the planar direction, or may be configured to be non-stretchable.

[0024] The pressure sensor 2 is configured to detect a signal used to estimate the user's biological information. For example, the pressure sensor 2 is configured to detect pressure transmitted through the seat cushion 12 due to the pulsation of the femoral artery of the user. Here, the pulsation of the femoral artery includes movements corresponding to the heartbeat and breathing, which are biological information. Therefore, the pressure sensor 2 is configured to detect the pulsation of the femoral artery as a signal used to estimate the biological information.

[0025] Furthermore, in this embodiment, the pressure sensor 2 is configured to detect a signal used to estimate the user's sitting posture. Changes in the user's sitting position and sitting posture correspond to changes in the user's thigh position and thigh position. Therefore, the pressure sensor 2 is configured to detect the user's thigh position and thigh position changes as a signal used to estimate the user's posture.

[0026] When detecting the biometric information or lying posture of a user of bedding, the pressure sensor 2 can be placed inside bedding such as a mattress or a futon. The pressure sensor 2 can also be placed inside a sheet placed on top of the bedding. The pressure sensor 2 can also be placed between overlapping pieces of bedding.

[0027] The state estimation device 3 is configured to estimate the state of a user seated on the seat 10 by performing arithmetic processing based on the signal output by the pressure sensor 2. The state estimation device 3 may be disposed inside the seat cushion 12 or outside the seat cushion 12.

[0028] Specifically, the state estimation device 3 applies a voltage for pressure detection to the pressure sensor 2. Furthermore, when the detection voltage is applied to the pressure sensor 2, the state estimation device 3 detects a voltage corresponding to the capacitance detected by the pressure sensor 2. Then, the state estimation device 3 estimates the state of the user by performing arithmetic processing based on the signal output from the pressure sensor 2. As described above, the state of the user to be estimated includes the user's biometric information, the user's seated posture, etc.

[0029] In addition, when the user state estimation system 1 targets a user of bedding, the state estimation device 3 estimates the biometric information and lying posture of the user of the bedding by performing calculations based on the signal output from the pressure sensor 2 placed on the bedding.

[0030] 4. Basic configuration of pressure sensor 2 The basic configuration of the pressure sensor 2 will be described with reference to Figures 2 and 3. The pressure sensor 2 is formed in a sheet shape and constitutes an electrostatic sensor. The pressure sensor 2 is configured to include an insulating sheet main body 21, a first electrode unit 22, and a second electrode unit 23.

[0031] The insulator sheet main body 21 constitutes a dielectric layer of the electrostatic sensor. The insulator sheet main body 21 is made of an elastically deformable material. For example, the insulator sheet main body 21 is made of an insulating elastomer or rubber. Therefore, the insulator sheet main body 21 is configured to undergo compressive deformation when the pressure sensor 2 receives a compressive force in the direction normal to the surface. The insulator sheet main body 21 has a predetermined thickness that allows for compressive deformation. The thickness of the insulator sheet main body 21 is set to, for example, 0.1 mm to 5 mm. For example, in FIGS. 2 and 3, the outer shape of the insulator sheet main body 21 is rectangular, but it can be any shape.

[0032] The first electrode unit 22 is configured to include one electrode of a capacitive sensor. The first electrode unit 22 is formed in a sheet shape (film shape). The first electrode unit 22 is arranged on the first surface 21a side of the insulator sheet main body 21 (upper side in Figures 2 and 3). In this embodiment, the first electrode unit 22 is arranged in contact with the first surface 21a of the insulator sheet main body 21. However, the first electrode unit 22 is arranged on the insulator sheet main body 21 without being adhered to it. In other words, in this embodiment, the first electrode unit 22 is configured as a separate entity from the insulator sheet main body 21.

[0033] The first electrode unit 22 includes a first sensor electrode portion 22a, a first wiring portion 22b, and a first dummy wiring portion 22c. The first sensor electrode portion 22a is located in a portion corresponding to the insulator sheet main body 21. In this embodiment, the first sensor electrode portion 22a has the same external shape as the insulator sheet main body 21, but it may have a different shape. The first sensor electrode portion 22a is configured to include one electrode of a capacitive sensor. The first sensor electrode portion 22a is disposed in contact with the first surface 21a of the insulator sheet main body 21.

[0034] The first wiring portion 22b is formed in the shape of a long sheet. The first wiring portion 22b has a function of electrically connecting the state estimation device 3 and the first sensor electrode portion 22a. The first wiring portion 22b extends from a part of the side edge (outer peripheral edge) of the first sensor electrode portion 22a in the surface direction of the first sensor electrode portion 22a. In detail, a portion near one end of the first wiring portion 22b is connected to one side of the rectangle of the first sensor electrode portion 22a.

[0035] The first dummy wiring portion 22c is formed in a long sheet shape. The first dummy wiring portion 22c is formed slightly shorter than the second wiring portion 23b described later. The first dummy wiring portion 22c does not function as a wiring, but is provided for a shielding function. The first dummy wiring portion 22c extends from a part of the side edge (outer peripheral edge) of the first sensor electrode portion 22a in the surface direction of the first sensor electrode portion 22a. More specifically, a portion near one end of the first dummy wiring portion 22c is connected to another side of the rectangle of the first sensor electrode portion 22a. In this embodiment, the first wiring portion 22b and the first dummy wiring portion 22c are connected to adjacent sides of the rectangle of the first sensor electrode portion 22a.

[0036] The second electrode unit 23 is configured to include the other electrode of the electrostatic sensor. The second electrode unit 23 is formed in a sheet shape (film shape). The second electrode unit 23 is arranged on the second surface 21b side of the insulator sheet main body 21 (the lower side in Figures 2 and 3). In this embodiment, the second electrode unit 23 is arranged in contact with the second surface 21b of the insulator sheet main body 21. However, the second electrode unit 23 is arranged on the insulator sheet main body 21 without being adhered to it. In other words, in this embodiment, the second electrode unit 23 is configured as a separate entity from the insulator sheet main body 21.

[0037] The second electrode unit 23 includes a second sensor electrode portion 23a, a second wiring portion 23b, and a second dummy wiring portion 23c. The second sensor electrode portion 23a is located in a portion corresponding to the insulator sheet main body 21. In this embodiment, the second sensor electrode portion 23a has the same external shape as the insulator sheet main body 21, but it may have a different shape. The second sensor electrode portion 23a is configured to include the other electrode of the electrostatic sensor. The second sensor electrode portion 23a is disposed in contact with the second surface 21b of the insulator sheet main body 21.

[0038] The second wiring portion 23b is formed in the shape of a long sheet. The second wiring portion 23b has a function of electrically connecting the state estimation device 3 and the second sensor electrode portion 23a. The second wiring portion 23b extends from a part of the side edge (outer peripheral edge) of the second sensor electrode portion 23a in the surface direction of the second sensor electrode portion 23a. In detail, a portion near one end of the second wiring portion 23b is connected to one side of the rectangle of the second sensor electrode portion 23a.

[0039] The second dummy wiring portion 23c is formed in a long sheet shape. The second dummy wiring portion 23c is formed slightly shorter than the first wiring portion 22b. The second dummy wiring portion 23c does not function as a wiring, but is provided for shielding function. The second dummy wiring portion 23c extends from a part of the side edge (outer peripheral edge) of the second sensor electrode portion 23a in the surface direction of the second sensor electrode portion 23a. More specifically, a portion near one end of the second dummy wiring portion 23c is connected to another side of the rectangle of the second sensor electrode portion 23a. In this embodiment, the second wiring portion 23b and the second dummy wiring portion 23c are connected to adjacent sides of the rectangle of the second sensor electrode portion 23a.

[0040] The second electrode unit 23 is arranged so as to overlap the first electrode unit 22. That is, when viewed from the thickness direction of the insulator sheet main body 21, the first electrode unit 22 and the second electrode unit 23 are arranged so as to overlap. In this embodiment, the outer shape of the second electrode unit 23 is formed to be the same as the outer shape of the first electrode unit 22. Therefore, the first electrode unit 22 and the second electrode unit 23 are arranged so as to overlap over the entire area.

[0041] The first sensor electrode portion 22a of the first electrode unit 22 and the second sensor electrode portion 23a of the second electrode unit 23 face each other with the insulator sheet main body 21 sandwiched between them. The first wiring portion 22b of the first electrode unit 22 and the second dummy wiring portion 23c of the second electrode unit 23 face each other directly, without the insulator sheet main body 21 interposed therebetween. The first wiring portion 22b and the second dummy wiring portion 23c have portions in direct contact. The first dummy wiring portion 22c of the first electrode unit 22 and the second wiring portion 23b of the second electrode unit 23 face each other directly, without the insulator sheet main body 21 interposed therebetween. The first dummy wiring portion 22c and the second wiring portion 23b have portions in direct contact.

[0042] However, an insulator sheet similar to the insulator sheet main body 21 may be disposed between the first wiring portion 22b and the second dummy wiring portion 23c. Similarly, an insulator sheet similar to the insulator sheet main body 21 may be disposed between the first dummy wiring portion 22c and the second wiring portion 23b.

[0043] 4. Details of the first electrode unit 22 and the second electrode unit 23 4-1. Details of the first electrode unit 22 2 to 8, details of the first electrode unit 22, which is a component of the pressure sensor 2. As described above, the first electrode unit 22 includes the first sensor electrode portion 22a, the first wiring portion 22b, and the first dummy wiring portion 22c.

[0044] The first sensor electrode portion 22a includes a first insulating sheet 31, a first detection electrode 32, a first shield electrode 33, and a first sensor protection film 34 (shown in FIGS. 2 and 7).

[0045] The first insulator sheet 31 is, for example, a resin sheet. As shown in FIGS. 2 to 7, the first insulator sheet 31 is disposed so as to face the first surface 21a of the insulator sheet main body 21, and has the same outer shape as the insulator sheet main body 21. In this embodiment, the first insulator sheet 31 is formed in a rectangular shape similar to the insulator sheet main body 21. The thickness of the first insulator sheet 31 is set to be equal to or less than the thickness of the insulator sheet main body 21. In particular, it is preferable that the thickness of the first insulator sheet 31 is set to be thinner than the thickness of the insulator sheet main body 21. The thickness of the first insulator sheet 31 is set to be, for example, in the range of 10 μm to 2 mm.

[0046] The first insulator sheet 31 is made of a material having a Young's modulus greater than that of the insulator sheet main body 21. For example, the first insulator sheet 31 is made of polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide (PI), or the like. Furthermore, as described above, the thickness of the first insulator sheet 31 is set to be thinner than that of the insulator sheet main body 21. By setting it in this way, the first insulator sheet 31 can be made less susceptible to compressive deformation relative to the insulator sheet main body 21. Therefore, when the pressure sensor 2 is subjected to pressure, the thickness of the first insulator sheet 31 can be made to change very little.

[0047] 5 to 8, the first detection electrode 32 is disposed on the inner surface side of the first insulator sheet 31. Therefore, the first detection electrode 32 is disposed on the first surface 21a side of the insulator sheet main body 21, and the first insulator sheet 31 is disposed on the outer surface side of the first detection electrode 32. In this embodiment, the first detection electrode 32 is disposed on the insulator sheet main body 21 without being adhered thereto.

[0048] In this embodiment, the first detection electrode 32 is adhered to the inner surface of the first insulating sheet 31. The first detection electrode 32 is formed by printing a conductive material on the inner surface of the first insulating sheet 31. Therefore, the first detection electrode 32 is a printed material adhered to the inner surface of the first insulating sheet 31. Any material having conductivity can be used for the first detection electrode 32. For example, silver, copper, carbon, etc. can be used for the first detection electrode 32. The thickness of the first detection electrode 32 is set to be in the range of 1 μm to 100 μm, for example.

[0049] As shown in FIGS. 5 and 8, the first detection electrodes 32 are formed as a plurality of strip-shaped electrodes parallel to one side of the rectangular first insulator sheet 31. In this embodiment, the first detection electrodes 32 include four strip-shaped electrodes, but any number of strip-shaped electrodes may be used. The first detection electrodes 32 may also be formed as a plurality of electrodes arranged in a matrix of multiple rows and multiple columns. For example, if the first detection electrodes 32 are arranged in four rows and four columns, there will be 16 electrodes.

[0050] The first shield electrode 33 is configured to electromagnetically shield the first detection electrode 32. As shown in FIGS. 2, 4, 6 to 8, the first shield electrode 33 is disposed on the outer surface of the first insulator sheet 31. In this embodiment, the first shield electrode 33 is adhered to the outer surface of the first insulator sheet 31. In this embodiment, the first shield electrode 33 is formed by printing a conductive material on the outer surface of the first insulator sheet 31. Therefore, the first shield electrode 33 is a printed material adhered to the outer surface of the first insulator sheet 31. Any conductive material can be used for the first shield electrode 33. For example, silver, copper, carbon, etc. can be used for the first shield electrode 33. However, when silver or copper is used, it is preferable to coat it with carbon or the like to prevent oxidation. The thickness of the first shield electrode 33 is set to, for example, a range of 1 μm to 100 μm.

[0051] 4 and 6 to 8, the first shield electrode 33 is disposed so as to overlap the first detection electrode 32 when viewed in the thickness direction (vertical direction) of the first shield electrode 33, and has an outer shape that includes the outer shape of the first detection electrode 32. In other words, when viewed in the thickness direction of the first shield electrode 33, the outer shape that is the outline of the first shield electrode 33 is configured to encompass the first detection electrode 32.

[0052] Furthermore, the first shield electrode 33 has a plurality of first openings 33a penetrating through the first shield electrode 33 in the thickness direction. In this embodiment, the first shield electrode 33 has a linear outer frame and an inner region (inside the frame) also formed in a linear shape. In particular, the first shield electrode 33 has a lattice-shaped inner region and has rectangular first openings 33a. However, the first openings 33a may be circular or another polygonal shape in addition to a rectangular shape. Also, in this embodiment, the linear shape of the inner region of the first shield electrode 33 is formed at an angle with respect to the sides of the outer frame. However, the linear shape of the inner region of the first shield electrode 33 may be formed parallel to the sides of the outer frame.

[0053] As described above, the first shield electrode 33 has a plurality of first openings 33a, and is therefore arranged to face only a portion of the first detection electrode 32. In other words, the material forming the first shield electrode 33 is not present in the positions of the first detection electrode 32 that correspond to the first openings 33a. Note that the first shield electrode 33 may have a portion located in a region where no first detection electrode 32 is present, as viewed in the thickness direction of the first shield electrode 33.

[0054] As described above, the first shield electrode 33 is configured to electromagnetically shield the first detection electrode 32. Even when the first shield electrode 33 has the first opening 33a, the maximum across dimension of the first opening 33a is set so that target noise can be shielded. If the first opening 33a is rectangular, the maximum across dimension of the first opening 33a is the length of the diagonal of the rectangle. If the first opening 33a is circular, the maximum across dimension of the first opening 33a is the diameter.

[0055] In this embodiment, the multiple first openings 33a are set to have the same shape. However, the multiple first openings 33a may be set to have different shapes and sizes depending on the region. For example, the maximum cross dimension of the multiple first openings 33a may be set in accordance with the frequency of noise that the first shield electrode 33 electromagnetically shields.

[0056] As shown in FIGS. 2, 6, and 7, the first sensor protective film 34 is made of an insulating material and covers the outer surface of the first shield electrode 33. The first insulator sheet 31 faces outward at the location of the first opening 33a of the first shield electrode 33. Therefore, the first sensor protective film 34 covers this location of the first insulator sheet 31. In this embodiment, the first sensor protective film 34 is formed by printing an insulating material on the outer surface of the first shield electrode 33. Therefore, the first sensor protective film 34 is a printed product that is adhered to the outer surface of the first shield electrode 33 and part of the outer surface of the first insulator sheet 31.

[0057] Any insulating material can be used for the first sensor protective film 34. For example, epoxy resin or phenol resin, which has properties such as curability by heat or ultraviolet light, insulating properties, and heat resistance, can be used for the first sensor protective film 34. The thickness of the first sensor protective film 34 is set in the range of 1 μm to 100 μm, for example.

[0058] The first wiring portion 22b includes a first main extension insulator sheet 41, a first wiring 42, a first main wiring shield electrode 43, and a first wiring protective film 44 (shown in FIGS. 2 and 7).

[0059] The first main extension insulator sheet 41 is, for example, a sheet made of resin. As shown in FIGS. 2 to 8, the first main extension insulator sheet 41 extends from the side edge of the first insulator sheet 31 in the surface direction of the first insulator sheet 31. The first main extension insulator sheet 41 is located in a position where the insulator sheet body 21 is not present. In this embodiment, the first main extension insulator sheet 41 is formed of a resin sheet that is integrated with the first insulator sheet 31. Therefore, the first main extension insulator sheet 41 is formed of the same material as the first insulator sheet 31 and has the same thickness.

[0060] As shown in FIGS. 5 to 8, the first wiring 42 is disposed on the inner surface side of the first main extension insulating sheet 41. In this embodiment, the first wiring 42 is adhered to the inner surface of the first main extension insulating sheet 41. The first wiring 42 is formed by printing a conductive material on the inner surface of the first main extension insulating sheet 41. Therefore, the first wiring 42 is a printed material adhered to the inner surface of the first main extension insulating sheet 41.

[0061] The first wiring 42 is electrically connected to the first detection electrode 32. The first wiring 42 is formed of the same material as the first detection electrode 32 and to the same thickness as the first detection electrode 32. In this embodiment, the first wiring 42 is formed by printing simultaneously with the first detection electrode 32.

[0062] The first wiring 42 is connected to each of the plurality of strip-shaped electrodes that make up the first detection electrode 32. One end of the first wiring 42 is connected to the first detection electrode 32, and the other end is formed to a position that reaches the tip of the first main extension insulator sheet 41. The first wiring 42 is electrically connected to the connector 24 shown in FIG.

[0063] The first main wiring shield electrode 43 is configured to electromagnetically shield the first wiring 42. As shown in FIGS. 4 and 6 to 8, the first main wiring shield electrode 43 is disposed on the outer surface of the first main extension insulator sheet 41. In this embodiment, the first main wiring shield electrode 43 is adhered to the outer surface of the first main extension insulator sheet 41. The first main wiring shield electrode 43 is formed by printing a conductive material on the outer surface of the first main extension insulator sheet 41. Therefore, the first main wiring shield electrode 43 is a printed product adhered to the outer surface of the first main extension insulator sheet 41.

[0064] The first main wiring shield electrode 43 is electrically connected to the first shield electrode 33. The first main wiring shield electrode 43 is formed of the same material and to the same thickness as the first shield electrode 33. In this embodiment, the first main wiring shield electrode 43 is formed by printing simultaneously with the first shield electrode 33.

[0065] 4 and 6 to 8, the first main wiring shield electrode 43 is disposed so as to overlap the first wiring 42 when viewed in the thickness direction of the first main wiring shield electrode 43, and has an outer shape that includes the outer shape of the first wiring 42 excluding the region of the connector 24. In other words, when viewed in the thickness direction of the first main wiring shield electrode 43, the outer shape that is the outline of the first main wiring shield electrode 43 is configured to include the portion of the first wiring 42 excluding the region of the connector 24.

[0066] The first main wiring shield electrode 43 has one end connected to the first shield electrode 33 and the other end extending to a position that reaches the tip of the first main extension insulator sheet 41. The first main wiring shield electrode 43 is electrically connected to the connector 24 shown in FIG.

[0067] Furthermore, the first main wiring shield electrode 43 has a plurality of third openings 43a penetrating through the first main wiring shield electrode 43 in the thickness direction. In this embodiment, the first main wiring shield electrode 43 has a linear outer frame and an inner region (inside the frame) also formed in a linear shape. In particular, the first main wiring shield electrode 43 has a lattice-shaped inner region and has rectangular third openings 43a. However, the third openings 43a may be circular or another polygonal shape other than rectangular. Also, in this embodiment, the linear shape of the inner region of the first main wiring shield electrode 43 is formed at an angle with respect to the sides of the outer frame. However, the linear shape of the inner region of the first main wiring shield electrode 43 may be formed parallel to the sides of the outer frame.

[0068] As described above, the first main wiring shield electrode 43 has a plurality of third openings 43a, and is therefore disposed so as to face only a portion of the first wiring 42. In other words, the material forming the first main wiring shield electrode 43 is not present in the positions of the first wiring 42 corresponding to the third openings 43a. Note that the first main wiring shield electrode 43 may have a portion located in a region where no first wiring 42 is present, as viewed in the thickness direction of the first main wiring shield electrode 43.

[0069] As described above, the first main wiring shield electrode 43 is configured to electromagnetically shield the first wiring 42. Even when the first main wiring shield electrode 43 has the third opening 43a, the maximum cross dimension of the third opening 43a is set so that the target noise can be shielded.

[0070] In this embodiment, the multiple third openings 43a are set to have the same shape. Furthermore, the multiple third openings 43a are formed to have the same shape as the first opening 33a. Therefore, the diametric dimension of the third openings 43a is also the same as the maximum diametric dimension of the first opening 33a. However, the third openings 43a may be set to have different shapes and sizes from the first opening 33a. Furthermore, the multiple third openings 43a may be set to have different shapes and sizes depending on the region. For example, the maximum diametric dimension of the multiple third openings 43a may be set in accordance with the frequency of the noise to be electromagnetically shielded by the first main wiring shield electrode 43.

[0071] As shown in FIGS. 2, 6, and 7, the first wiring protective film 44 is made of an insulating material and covers the outer surface of the first main wiring shield electrode 43. The first main extension insulator sheet 41 faces outward at the location of the third opening 43a of the first main wiring shield electrode 43. Therefore, the first wiring protective film 44 covers this location of the first main extension insulator sheet 41. In this embodiment, the first wiring protective film 44 is formed by printing an insulating material on the outer surface of the first main wiring shield electrode 43. Therefore, the first wiring protective film 44 is a printed product that is adhered to the outer surface of the first main wiring shield electrode 43 and a portion of the first main extension insulator sheet 41.

[0072] The first wire protective film 44 is contiguous with the first sensor protective film 34. The first wire protective film 44 is formed of the same material and to the same thickness as the first sensor protective film 34. In this embodiment, the first wire protective film 44 is formed by printing simultaneously with the first sensor protective film 34.

[0073] The first dummy wiring portion 22c includes a first sub-extension insulator sheet 51, a first sub-wiring shield electrode 53, and a first dummy-wiring protective film 54 (shown in FIGS. 2 and 7).

[0074] The first sub-extension insulator sheet 51 is, for example, a sheet made of resin. As shown in Figures 2 to 8, the first sub-extension insulator sheet 51 extends from the side edge of the first insulator sheet 31 in the surface direction of the first insulator sheet 31. The first sub-extension insulator sheet 51 is located in a position where the insulator sheet main body 21 is not present. In this embodiment, the first sub-extension insulator sheet 51 is formed from a resin sheet that is integrated with the first insulator sheet 31. Therefore, the first sub-extension insulator sheet 51 is formed from the same type of material as the first insulator sheet 31 and has the same thickness.

[0075] 5, as described above, the first wiring 42 is formed on the inner surface of the first main extension insulator sheet 41. On the other hand, no conductive material such as electrodes or wiring is formed on the inner surface of the first sub-extension insulator sheet 51. Therefore, the first sub-extension insulator sheet 51 is exposed over the entire inner surface of the first sub-extension insulator sheet 51.

[0076] The first sub-extension insulator sheet 51 is arranged without being adhered to the second main extension insulator sheet 71 of the second wiring portion 23b of the second electrode unit 23 described later, and is arranged opposite the second main extension insulator sheet 71. The first sub-extension insulator sheet 51 is formed in the same shape as the second main extension insulator sheet 71. Therefore, the first sub-extension insulator sheet 51 is arranged so as to face the entire area of ​​the second main extension insulator sheet 71.

[0077] The first sub-wiring shield electrode 53 is configured to electromagnetically shield the second wiring 72 of the second wiring portion 23b of the second electrode unit 23, which will be described later. As shown in FIGS. 4 and 6 to 8, the first sub-wiring shield electrode 53 is disposed on the outer surface of the first sub-extension insulator sheet 51. In this embodiment, the first sub-wiring shield electrode 53 is formed by printing on the outer surface of the first sub-extension insulator sheet 51. Therefore, the first sub-wiring shield electrode 53 is a printed product adhered to the outer surface of the first sub-extension insulator sheet 51.

[0078] The first sub-wiring shield electrode 53 is electrically connected to the first shield electrode 33. The first sub-wiring shield electrode 53 is formed of the same material and to the same thickness as the first shield electrode 33. In this embodiment, the first sub-wiring shield electrode 53 is formed by printing simultaneously with the first shield electrode 33.

[0079] 4 and 6 to 9, the first sub-wire shield electrode 53 is disposed so as to overlap the second wiring 72 when viewed in the thickness direction of the first sub-wire shield electrode 53, and has an outer shape that includes the outer shape of the second wiring 72 excluding the region of the connector 25. In other words, when viewed in the thickness direction of the first sub-wire shield electrode 53, the outer shape that is the outline of the first sub-wire shield electrode 53 is configured to include the portion of the second wiring 72 excluding the region of the connector 25.

[0080] Furthermore, the first sub-wire shield electrode 53 has a plurality of fifth openings 53a penetrating in the thickness direction of the first sub-wire shield electrode 53. In this embodiment, the first sub-wire shield electrode 53 has a linear outer frame and an inner region (inside the frame) also formed in a linear shape. In particular, the first sub-wire shield electrode 53 has a lattice-shaped inner region and has rectangular fifth openings 53a. However, the fifth openings 53a may be circular or another polygonal shape other than rectangular. Also, in this embodiment, the linear shape of the inner region of the first sub-wire shield electrode 53 is formed at an angle with respect to the sides of the outer frame. However, the linear shape of the inner region of the first sub-wire shield electrode 53 may be formed parallel to the sides of the outer frame.

[0081] As described above, the first sub-wire shield electrode 53 has a plurality of fifth openings 53a, and is therefore disposed so as to face only a portion of the second wire 72. In other words, the material that forms the first sub-wire shield electrode 53 is not present in the positions of the second wire 72 that correspond to the fifth openings 53a. Note that the first sub-wire shield electrode 53 may have a portion that is located in a region where the second wire 72 is not present, as viewed in the thickness direction of the first sub-wire shield electrode 53.

[0082] As described above, the first sub-wiring shield electrode 53 is configured to electromagnetically shield the second wiring 72. Even when the first sub-wiring shield electrode 53 has the fifth opening 53a, the maximum across dimension of the fifth opening 53a is set so that the target noise can be shielded.

[0083] In this embodiment, the plurality of fifth openings 53a are set to have the same shape. Furthermore, the plurality of fifth openings 53a are formed to have the same shape as the first opening 33a. Therefore, the diametric dimension of the fifth openings 53a is also the same as the maximum diametric dimension of the first opening 33a. However, the fifth openings 53a may be set to have different shapes and sizes from the first opening 33a. Furthermore, the plurality of fifth openings 53a may be set to have different shapes and sizes depending on the region. For example, the maximum diametric dimension of the plurality of fifth openings 53a may be set in accordance with the frequency of the noise to be electromagnetically shielded by the first sub-wiring shield electrode 53.

[0084] As shown in FIGS. 2, 6, and 7, the first dummy-wiring protective film 54 is made of an insulating material and covers the outer surface of the first sub-wiring shield electrode 53. The first sub-extension insulator sheet 51 faces outward at the location of the fifth opening 53a of the first sub-wiring shield electrode 53. Therefore, the first dummy-wiring protective film 54 covers this location of the first sub-extension insulator sheet 51. In this embodiment, the first dummy-wiring protective film 54 is formed by printing an insulating material on the outer surface of the first sub-wiring shield electrode 53. Therefore, the first dummy-wiring protective film 54 is a printed material adhered to the outer surface of the first sub-wiring shield electrode 53 and a portion of the first sub-extension insulator sheet 51.

[0085] The first dummy wiring protective film 54 is contiguous with the first sensor protective film 34. The first dummy wiring protective film 54 is formed of the same material and to the same thickness as the first sensor protective film 34. In this embodiment, the first dummy wiring protective film 54 is formed by printing simultaneously with the first sensor protective film 34.

[0086] 4-2. Details of the second electrode unit 23 Details of second electrode unit 23, which is a component of pressure sensor 2, will be described with reference to Figures 2 to 7 and 9. As described above, second electrode unit 23 includes second sensor electrode portion 23a, second wiring portion 23b, and second dummy wiring portion 23c.

[0087] The second sensor electrode portion 23a is disposed opposite to the first sensor electrode portion 22a across the insulator sheet main body 21. The second sensor electrode portion 23a includes a second insulator sheet 61, a second detection electrode 62, a second shield electrode 63, and a second sensor protection film 64 (shown in FIGS. 3 and 7).

[0088] The second insulator sheet 61 is disposed so as to face the second surface 21b of the insulator sheet main body 21. The second insulator sheet 61 is formed in the same manner as the first insulator sheet 31. For example, the thickness of the second insulator sheet 61 is equal to or less than the thickness of the insulator sheet main body 21. The same applies to other configurations.

[0089] The second detection electrode 62 is disposed on the inner surface side of the second insulator sheet 61. Therefore, the second detection electrode 62 is disposed on the second surface 21b side of the insulator sheet main body 21, and the second insulator sheet 61 is disposed on the outer surface side of the second detection electrode 62. In this embodiment, the second detection electrode 62 is disposed on the insulator sheet main body 21 without being adhered thereto. The second detection electrode 62 is disposed so as to overlap the first detection electrode 32. In other words, when viewed from the thickness direction of the insulator sheet main body 21, at least a portion of the second detection electrode 62 is disposed so as to overlap the first detection electrode 32.

[0090] As shown in FIGS. 4 and 9, the second detection electrode 62 is formed as a plurality of strip-shaped electrodes parallel to one side of the rectangular second insulator sheet 61. In this embodiment, the second detection electrode 62 has four strip-shaped electrodes, but any number of strip-shaped electrodes may be used. The direction in which each strip-shaped electrode of the second detection electrode 62 extends intersects with the direction in which each strip-shaped electrode of the first detection electrode 32 extends. In this embodiment, the directions in which the two strip-shaped electrodes extend form an angle of 90 degrees. Therefore, when viewed from the thickness direction of the insulator sheet main body 21, there are 16 locations where the first detection electrode 32 and the second detection electrode 62 overlap. However, this number can be set arbitrarily.

[0091] The second detection electrodes 62 may be, for example, a plurality of electrodes arranged in a matrix of multiple rows and multiple columns. For example, if the second detection electrodes 62 are arranged in 4 rows and 4 columns, there will be 16 electrodes. Furthermore, if the first detection electrodes 32 are arranged in multiple rows and multiple columns, the second detection electrode 62 may be a single electrode.

[0092] The second detection electrode 62 is formed in the same manner as the first detection electrode 32. The relationship between the second detection electrode 62 and the second insulator sheet 61 is configured in the same manner as the relationship between the first detection electrode 32 and the first insulator sheet 31. For example, the second detection electrode 62 is a printed product adhered to the inner surface of the second insulator sheet 61. The other configurations are also similar.

[0093] The second shield electrode 63 is configured to electromagnetically shield the second detection electrode 62. The second shield electrode 63 is disposed on the outer surface side of the second insulator sheet 61. The second shield electrode 63 is formed in the same manner as the first shield electrode 33. The relationship between the second shield electrode 63 and the second insulator sheet 61 is configured in the same manner as the relationship between the first shield electrode 33 and the first insulator sheet 31. For example, the second shield electrode 63 is a printed material adhered to the outer surface of the second insulator sheet 61. The same applies to other configurations.

[0094] The second shield electrode 63 is disposed so as to overlap the second detection electrode 62 when viewed in the thickness direction of the second shield electrode 63, and has an outer shape that includes the outer shape of the second detection electrode 62. Furthermore, the second shield electrode 63 has a plurality of second openings 63a that penetrate the second shield electrode 63 in the thickness direction. The second openings 63a are formed in the same manner as the first openings 33a. However, the second openings 63a may be formed differently from the first openings 33a.

[0095] In this embodiment, the second openings 63a are set to have the same shape. However, the second openings 63a may be set to different shapes and sizes depending on the region. For example, the maximum cross dimension of the second openings 63a may be set according to the frequency of the noise to be electromagnetically shielded by the second shield electrode 63. The maximum cross dimension of the second openings 63a may be the same as or different from the maximum cross dimension of the first opening 33a.

[0096] The second sensor protective film 64 is made of an insulating material and covers the outer surface of the second shield electrode 63. The second sensor protective film 64 is formed in the same manner as the first sensor protective film 34. The relationship between the second sensor protective film 64, the second shield electrode 63, and the second insulator sheet 61 is configured in the same manner as the relationship between the first sensor protective film 34, the first shield electrode 33, and the first insulator sheet 31. For example, the second sensor protective film 64 is a printed material adhered to the outer surface of the second shield electrode 63 and part of the outer surface of the second insulator sheet 61. The other configurations are similar.

[0097] The second wiring portion 23b is disposed opposite the first dummy wiring portion 22c without the insulator sheet main body 21 therebetween. However, an insulator sheet similar to the insulator sheet main body 21 may be disposed between the second wiring portion 23b and the first dummy wiring portion 22c. The second wiring portion 23b includes a second main extension insulator sheet 71, a second wiring 72, a second main wiring shield electrode 73, and a second wiring protective film 74 (shown in FIGS. 3 and 7).

[0098] The second main extension insulator sheet 71 extends from the side edge of the second insulator sheet 61 in the surface direction of the second insulator sheet 61. The second main extension insulator sheet 71 is formed from a resin sheet that is integrated with the second insulator sheet 61. The second main extension insulator sheet 71 is disposed opposite the first sub-extension insulator sheet 51 and is disposed to the first sub-extension insulator sheet 51 without being adhesively bonded thereto. The second main extension insulator sheet 71 is formed in the same manner as the first sub-extension insulator sheet 51.

[0099] However, the second main extension insulating sheet 71 is formed to be slightly longer than the first sub-extension insulating sheet 51. Therefore, there is an area at the tip portion of the second main extension insulating sheet 71 that does not face the first sub-extension insulating sheet 51.

[0100] The second wiring 72 is disposed on the inner surface of the second main extension insulator sheet 71 and is electrically connected to the second detection electrode 62. The second wiring 72 is formed in the same manner as the first wiring 42. For example, the second wiring 72 is a printed material adhered to the inner surface of the second main extension insulator sheet 71. Other configurations are similar. The second wiring 72 is electrically connected to the connector 25 shown in FIG. 6. The tip portion of the second wiring 72 is an area that does not face the first sub-extension insulator sheet 51. This area is electrically connected to the terminal of the connector 25.

[0101] The second main wiring shield electrode 73 is configured to electromagnetically shield the second wiring 72. The second main wiring shield electrode 73 is disposed on the outer surface of the second main extension insulator sheet 71. The second main wiring shield electrode 73 is electrically connected to the second shield electrode 63. The second main wiring shield electrode 73 is formed in the same manner as the first main wiring shield electrode 43. The relationship between the second main wiring shield electrode 73 and the second main extension insulator sheet 71 is configured in the same manner as the relationship between the first main wiring shield electrode 43 and the first main extension insulator sheet 41. For example, the second main wiring shield electrode 73 is a printed formation adhered to the outer surface of the second main extension insulator sheet 71. The same applies to other configurations.

[0102] The second main wiring shield electrode 73 has one end connected to the second shield electrode 63 and the other end extending to a position that reaches the tip of the second main extension insulator sheet 71. The second main wiring shield electrode 73 is electrically connected to the connector 25 shown in FIG.

[0103] The second main wiring shield electrode 73 is disposed so as to overlap the second wiring 72 when viewed in the thickness direction of the second main wiring shield electrode 73, and has an outer shape that includes the outer shape of the second wiring 72 excluding the region of the connector 25. In other words, when viewed in the thickness direction of the second main wiring shield electrode 73, the outer shape that is the outline of the second main wiring shield electrode 73 is configured to include the portion of the second wiring 72 excluding the region of the connector 25.

[0104] Furthermore, the second main wiring shield electrode 73 has a plurality of fourth openings 73a penetrating through the second main wiring shield electrode 73 in the thickness direction. The fourth openings 73a are formed in the same manner as the third openings 43a. The fourth openings 73a may be formed differently from the third openings 43a.

[0105] In this embodiment, the multiple fourth openings 73a are set to have the same shape. However, the multiple fourth openings 73a may be set to different shapes and sizes depending on the region. For example, the maximum cross dimension of the multiple fourth openings 73a may be set according to the frequency of the noise to be electromagnetically shielded by the second main wiring shield electrode 73. The maximum cross dimension of the fourth openings 73a may be the same as or different from the maximum cross dimension of the third opening 43a.

[0106] The second wiring protective film 74 is made of an insulating material and covers the outer surface of the second main wiring shield electrode 73. The second wiring protective film 74 is formed in the same manner as the first wiring protective film 44. The relationship between the second wiring protective film 74, the second main wiring shield electrode 73, and the second main extension insulator sheet 71 is configured in the same manner as the relationship between the first wiring protective film 44, the first main wiring shield electrode 43, and the first main extension insulator sheet 41. For example, the second wiring protective film 74 is a printed material adhered to the outer surface of the second main wiring shield electrode 73 and a portion of the outer surface of the second main extension insulator sheet 71. The same applies to other configurations.

[0107] The second dummy wiring portion 23c is disposed opposite the first wiring portion 22b without the insulator sheet main body 21 therebetween. However, an insulator sheet similar to the insulator sheet main body 21 may be disposed between the second dummy wiring portion 23c and the first wiring portion 22b. The second dummy wiring portion 23c includes a second sub-extension insulator sheet 81, a second sub-wiring shield electrode 83, and a second dummy-wiring protective film 84 (shown in FIGS. 3 and 7).

[0108] The second sub-extension insulator sheet 81 extends from the side edge of the second insulator sheet 61 in the surface direction of the second insulator sheet 61. The second sub-extension insulator sheet 81 is formed from a resin sheet that is integrated with the second insulator sheet 61. The second sub-extension insulator sheet 81 is disposed opposite the first main extension insulator sheet 41 and is disposed on the first main extension insulator sheet 41 without being adhesively bonded thereto. The second sub-extension insulator sheet 81 is formed in the same manner as the first main extension insulator sheet 41.

[0109] However, the second sub-extension insulator sheet 81 is formed slightly shorter than the first main extension insulator sheet 41. Therefore, there is an area at the tip of the first main extension insulator sheet 41 that does not face the second sub-extension insulator sheet 81. Therefore, the tip of the first wiring 42 is an area that does not face the second sub-extension insulator sheet 81. This area is electrically connected to the terminal of the connector 24.

[0110] The second sub-wiring shield electrode 83 is configured to electromagnetically shield the first wiring 42 of the first wiring portion 22b of the first electrode unit 22. The second sub-wiring shield electrode 83 is disposed on the outer surface side of the second sub-extension insulator sheet 81. The second sub-wiring shield electrode 83 is electrically connected to the second shield electrode 63. The second sub-wiring shield electrode 83 is formed in the same manner as the first sub-wiring shield electrode 53. The relationship between the second sub-wiring shield electrode 83 and the second sub-extension insulator sheet 81 is configured in the same manner as the relationship between the first sub-wiring shield electrode 53 and the first sub-extension insulator sheet 51. For example, the second sub-wiring shield electrode 83 is a printed formation adhered to the outer surface of the second sub-extension insulator sheet 81. The same applies to other configurations.

[0111] The second sub-wiring shield electrode 83 is disposed so as to overlap the first wiring 42 when viewed in the thickness direction of the second sub-wiring shield electrode 83, and has an outer shape that includes the outer shape of the first wiring 42 excluding the region of the connector 24. In other words, when viewed in the thickness direction of the second sub-wiring shield electrode 83, the outer shape that is the outline of the second sub-wiring shield electrode 83 is configured to include the portion of the first wiring 42 excluding the region of the connector 24.

[0112] The second sub-wiring shield electrode 83 has a plurality of sixth openings 83a penetrating in the thickness direction of the second sub-wiring shield electrode 83. The sixth openings 83a are formed in the same manner as the fifth openings 53a. The sixth openings 83a may be formed differently from the fifth openings 53a.

[0113] In this embodiment, the sixth openings 83a are set to have the same shape. However, the sixth openings 83a may be set to have different shapes and sizes depending on the region. For example, the maximum cross dimension of the sixth openings 83a may be set according to the frequency of the noise to be electromagnetically shielded by the second sub-wiring shield electrode 83. The maximum cross dimension of the sixth openings 83a may be the same as or different from the maximum cross dimension of the fifth opening 53a.

[0114] The second dummy-wiring protective film 84 is made of an insulating material and covers the outer surface of the second sub-wiring shield electrode 83. The second dummy-wiring protective film 84 is formed in the same manner as the first dummy-wiring protective film 54. The relationship between the second dummy-wiring protective film 84, the second sub-wiring shield electrode 83, and the second sub-extension insulator sheet 81 is configured in the same manner as the relationship between the first dummy-wiring protective film 54, the first sub-wiring shield electrode 53, and the first sub-extension insulator sheet 51. For example, the second dummy-wiring protective film 84 is a printed material adhered to the outer surface of the second sub-wiring shield electrode 83 and part of the outer surface of the second sub-extension insulator sheet 81. The same applies to other configurations.

[0115] 5. Effects The effects of this embodiment will be described.

[0116] The pressure sensor 2 includes an insulator sheet main body 21, a first detection electrode 32 arranged on the first surface 21a of the insulator sheet main body 21, a second detection electrode 62 arranged on the second surface 21b of the insulator sheet main body 21 so as to overlap the first detection electrode 32, a first insulator sheet 31 arranged on the outer surface side of the first detection electrode 32, and a first shield electrode 33 arranged on the outer surface side of the first insulator sheet 31 and electromagnetically shielding the first detection electrode 32. By including the first shield electrode 33, the pressure sensor 2 can reduce the influence of external noise on the first detection electrode 32. As a result, the detection accuracy of the pressure sensor 2 can be improved.

[0117] The thickness of the first insulator sheet 31 is equal to or less than the thickness of the insulator sheet main body 21. Therefore, the overall thickness of the pressure sensor 2 can be reduced. This improves the comfort of an occupant sitting on the seat 10 on which the pressure sensor 2 is arranged. It also improves the comfort of a user sleeping on bedding on which the pressure sensor 2 is arranged. In this way, it is possible to prevent the seat 10 or bedding on which the pressure sensor 2 is arranged from causing discomfort to the user.

[0118] More preferably, the thickness of the first insulator sheet 31 is thinner than the thickness of the insulator sheet body 21. In this case, it is possible to more effectively prevent the user from feeling uncomfortable.

[0119] Furthermore, the first shield electrode 33 is disposed so as to overlap the first detection electrode 32 when viewed in the thickness direction of the first shield electrode 33, has an outer shape that includes the outer shape of the first detection electrode 32, and includes a plurality of first openings 33a that penetrate the first shield electrode 33 in the thickness direction. By providing the first shield electrode 33 with a plurality of first openings 33a, the area where the first detection electrode 32 and the first shield electrode 33 face each other can be reduced. As a result, the parasitic capacitance generated between the first detection electrode 32 and the first shield electrode 33 can be reduced. This can improve the detection sensitivity of the pressure sensor 2.

[0120] The pressure sensor 2 further includes a second insulating sheet 61 disposed on the outer surface side of the second detection electrode 62, and a second shield electrode 63 disposed on the outer surface side of the second insulating sheet 61 and electromagnetically shielding the second detection electrode 62. By including the second shield electrode 63, the pressure sensor 2 can reduce the influence of external noise on the second detection electrode 62. As a result, the detection accuracy of the pressure sensor 2 can be improved.

[0121] The thickness of the second insulator sheet 61 is equal to or less than the thickness of the insulator sheet main body 21. This can prevent the user from feeling uncomfortable when using the sheet 10 or bedding on which the pressure sensor 2 is placed. More preferably, the thickness of the first insulator sheet 31 is thinner than the thickness of the insulator sheet main body 21. In this case, it is possible to more effectively prevent the user from feeling uncomfortable.

[0122] Furthermore, the second shield electrode 63 is disposed so as to overlap the second detection electrode 62 when viewed in the thickness direction of the second shield electrode 63, has an outer shape that includes the outer shape of the second detection electrode 62, and includes a plurality of second openings 63a that penetrate the second shield electrode 63 in the thickness direction. By providing the second shield electrode 63 with a plurality of second openings 63a, the area where the second detection electrode 62 and the second shield electrode 63 face each other can be reduced. As a result, the parasitic capacitance generated between the second detection electrode 62 and the second shield electrode 63 can be reduced. This can improve the detection sensitivity of the pressure sensor 2.

[0123] The pressure sensor 2 is also configured to include a first electrode unit 22 that is disposed on the first surface 21a side of the insulator sheet main body 21 and configured separately from the insulator sheet main body 21. The first electrode unit 22 includes a first insulator sheet 31, a first detection electrode 32 that is adhered to the inner surface of the first insulator sheet 31 and disposed without being adhered to the insulator sheet main body 21, and a first shield electrode 33 that is adhered to the outer surface of the first insulator sheet 31.

[0124] In this way, the first insulator sheet 31, the first detection electrode 32, and the first shield electrode 33 constitute the first electrode unit 22. This simple configuration facilitates manufacturing and reduces costs. Furthermore, the distance between the first detection electrode 32 and the first shield electrode 33 can be stabilized. As a result, fluctuations in parasitic capacitance between the first detection electrode 32 and the first shield electrode 33 can be suppressed. This improves the detection sensitivity of the pressure sensor 2.

[0125] Furthermore, the first detection electrode 32 is a printed product adhered to the inner surface of the first insulating sheet 31, and the first shield electrode 33 is a printed product adhered to the outer surface of the first insulating sheet 31. In this case, the first detection electrode 32 and the first shield electrode 33 can be positioned with high precision. As a result, desired shielding performance can be obtained, and the detection precision of the pressure sensor 2 can be improved.

[0126] In addition to the first electrode unit 22, the pressure sensor 2 is configured to include a second electrode unit 23 that is arranged on the second surface 21b side of the insulator sheet main body 21, arranged so as to overlap the first electrode unit 22, and configured separately from the insulator sheet main body 21.

[0127] The second electrode unit 23 comprises a second insulator sheet 61, a second detection electrode 62 adhered to the inner surface of the second insulator sheet 61 and arranged non-adhered to the insulator sheet main body 21, and a second shield electrode 63 adhered to the outer surface of the second insulator sheet 61.

[0128] In this way, the second insulator sheet 61, the second detection electrode 62, and the second shield electrode 63 constitute the second electrode unit 23. This simple configuration facilitates manufacturing and reduces costs. Furthermore, the distance between the second detection electrode 62 and the second shield electrode 63 can be stabilized. As a result, fluctuations in parasitic capacitance between the second detection electrode 62 and the second shield electrode 63 can be suppressed. This improves the detection sensitivity of the pressure sensor 2.

[0129] Furthermore, the second detection electrode 62 is a printed product adhered to the inner surface of the second insulating sheet 61, and the second shield electrode 63 is a printed product adhered to the outer surface of the second insulating sheet 61. In this case, the second detection electrode 62 and the second shield electrode 63 can be positioned with high precision. As a result, desired shielding performance can be obtained, and the detection precision of the pressure sensor 2 can be improved.

[0130] The pressure sensor 2 further includes a first main extension insulator sheet 41 extending from the side edge of the first insulator sheet 31 in the surface direction of the first insulator sheet 31, a first wiring 42 disposed on the inner surface of the first main extension insulator sheet 41 and electrically connected to the first detection electrode 32, and a first main wiring shield electrode 43 disposed on the outer surface of the first main extension insulator sheet 41 and electrically connected to the first shield electrode 33 to electromagnetically shield the first wiring 42. By including the first main wiring shield electrode 43, the pressure sensor 2 can reduce the influence of external noise on the first wiring 42. As a result, the detection accuracy of the pressure sensor 2 can be improved.

[0131] Furthermore, the first main wiring shield electrode 43 is disposed so as to overlap the first wiring 42 when viewed in the thickness direction of the first main wiring shield electrode 43, has an outer shape that includes the outer shape of the first wiring 42 excluding the region of the connector 24, and has a plurality of third openings 43a that penetrate the first main wiring shield electrode 43 in the thickness direction. By providing the first main wiring shield electrode 43 with a plurality of third openings 43a, the area over which the first wiring 42 and the first main wiring shield electrode 43 face each other can be reduced. As a result, the parasitic capacitance generated between the first wiring 42 and the first main wiring shield electrode 43 can be reduced. This can improve the detection sensitivity of the pressure sensor 2.

[0132] Furthermore, the first electrode unit 22 is configured to include a first main extension insulator sheet 41, a first wiring 42, and a first main wiring shield electrode 43. This simplifies the configuration of the pressure sensor 2. Furthermore, the first wiring 42 and the first main wiring shield electrode 43 can be connected to a common connector 24. This allows the pressure sensor 2 to be made smaller.

[0133] The pressure sensor 2 further includes a second main extension insulator sheet 71 extending from the side edge of the second insulator sheet 61 in the surface direction of the second insulator sheet 61, a second wiring 72 disposed on the inner surface of the second main extension insulator sheet 71 and electrically connected to the second detection electrode 62, and a second main wiring shield electrode 73 disposed on the outer surface of the second main extension insulator sheet 71 and electrically connected to the second shield electrode 63 to electromagnetically shield the second wiring 72. By including the second main wiring shield electrode 73, the pressure sensor 2 can reduce the influence of external noise on the second wiring 72. As a result, the detection accuracy of the pressure sensor 2 can be improved.

[0134] Furthermore, the second main wiring shield electrode 73 is disposed so as to overlap the second wiring 72 when viewed in the thickness direction of the second main wiring shield electrode 73, has an outer shape that includes the outer shape of the second wiring 72 excluding the region of the connector 25, and has a plurality of fourth openings 73a that penetrate the second main wiring shield electrode 73 in the thickness direction. By providing the second main wiring shield electrode 73 with the plurality of fourth openings 73a, it is possible to reduce the area where the second wiring 72 and the second main wiring shield electrode 73 face each other. As a result, it is possible to reduce the parasitic capacitance that occurs between the second wiring 72 and the second main wiring shield electrode 73. This allows the detection sensitivity of the pressure sensor 2 to be improved.

[0135] Furthermore, the second electrode unit 23 is configured to include a second main extension insulator sheet 71, a second wiring 72, and a second main wiring shield electrode 73. This simplifies the configuration of the pressure sensor 2. Furthermore, the second wiring 72 and the second main wiring shield electrode 73 can be connected to a common connector 25. This allows the pressure sensor 2 to be made smaller.

[0136] The pressure sensor 2 further includes a first sub-extension insulator sheet 51 extending from the side edge of the first insulator sheet 31 in the surface direction of the first insulator sheet 31, disposed on the second main extension insulator sheet 71 without being adhered thereto, and disposed opposite the second main extension insulator sheet 71, and a first sub-wiring shield electrode 53 disposed on the outer surface of the first sub-extension insulator sheet 51, electrically connected to the first shield electrode 33, and electromagnetically shielding the second wiring 72. By including the first sub-wiring shield electrode 53, the pressure sensor 2 can reduce the influence of external noise on the second wiring 72. As a result, the detection accuracy of the pressure sensor 2 can be improved.

[0137] Furthermore, the first sub-wire shield electrode 53 is disposed so as to overlap the second wire 72 when viewed in the thickness direction of the first sub-wire shield electrode 53, has an outer shape that includes the outer shape of the second wire 72 excluding the region of the connector 25, and has a plurality of fifth openings 53a that penetrate the first sub-wire shield electrode 53 in the thickness direction. By providing the first sub-wire shield electrode 53 with the plurality of fifth openings 53a, it is possible to reduce the area where the second wire 72 and the first sub-wire shield electrode 53 face each other. As a result, it is possible to reduce the parasitic capacitance that occurs between the second wire 72 and the first sub-wire shield electrode 53. This allows the detection sensitivity of the pressure sensor 2 to be improved.

[0138] Furthermore, the first electrode unit 22 is configured to include a first sub-extension insulator sheet 51 and a first sub-wiring shield electrode 53. This allows the pressure sensor 2 to have a simple configuration.

[0139] The pressure sensor 2 further includes a second sub-extension insulator sheet 81 extending from a side edge of the second insulator sheet 61 in the surface direction of the second insulator sheet 61, disposed without being adhered to the first main extension insulator sheet 41, and disposed opposite the first main extension insulator sheet 41, and a second sub-wiring shield electrode 83 disposed on the outer surface of the second sub-extension insulator sheet 81, electrically connected to the second shield electrode 63, and electromagnetically shielding the first wiring 42. By including the second sub-wiring shield electrode 83, the pressure sensor 2 can reduce the influence of external noise on the first wiring 42. As a result, the detection accuracy of the pressure sensor 2 can be improved.

[0140] Furthermore, the second sub-wire shield electrode 83 is disposed so as to overlap the first wiring 42 when viewed in the thickness direction of the second sub-wire shield electrode 83, has an outer shape that includes the outer shape of the first wiring 42 excluding the region of the connector 24, and has a plurality of sixth openings 83a that penetrate the second sub-wire shield electrode 83 in the thickness direction. By providing the second sub-wire shield electrode 83 with the plurality of sixth openings 83a, it is possible to reduce the area where the first wiring 42 and the second sub-wire shield electrode 83 face each other. As a result, it is possible to reduce the parasitic capacitance that occurs between the first wiring 42 and the second sub-wire shield electrode 83. This allows the detection sensitivity of the pressure sensor 2 to be improved.

[0141] The insulator sheet main body 21, the first detection electrode 32, and the second detection electrode 62 are arranged without being bonded to each other. This simplifies the configuration. However, the insulator sheet main body 21, the first detection electrode 32, and the second detection electrode 62 may also be bonded to each other.

[0142] In the first shield electrode 33, the maximum across dimensions of the multiple first openings 33a may be set to be of the same type. However, the multiple maximum across dimensions of the multiple first openings 33a may be set differently depending on the frequency of the noise to be electromagnetically shielded by the first shield electrode 33. The shielding performance of the first detection electrode 32 can be adjusted depending on the frequency of the noise to be suppressed.

[0143] Furthermore, in the second shield electrode 63, the maximum across dimensions of the multiple second openings 63a may be set to be of the same type. However, the multiple maximum across dimensions of the multiple second openings 63a may be set according to the frequency of the noise to be electromagnetically shielded by the second shield electrode 63. The shielding performance of the second detection electrode 62 can be adjusted according to the frequency of the noise to be suppressed.

[0144] Furthermore, the maximum across dimensions of the multiple third openings 43a in the first main wiring shield electrode 43 may be set to be the same type. However, the multiple maximum across dimensions of the multiple third openings 43a may be set according to the frequency of the noise to be electromagnetically shielded by the first main wiring shield electrode 43. The shielding performance can be adjusted according to the frequency of the noise to be suppressed from the first wiring 42.

[0145] Furthermore, the maximum across dimensions of the multiple fourth openings 73a in the second main wiring shield electrode 73 may be set to be the same type. However, the multiple fourth openings 73a may have different maximum across dimensions depending on the frequency of the noise to be electromagnetically shielded by the second main wiring shield electrode 73. The shielding performance for the second wiring 72 can be adjusted depending on the frequency of the noise to be suppressed.

[0146] Furthermore, the maximum across dimensions of the plurality of fifth openings 53a in the first sub-wiring shield electrode 53 may be set to be the same type. However, the maximum across dimensions of the plurality of fifth openings 53a may be set differently depending on the frequency of noise to be electromagnetically shielded by the first sub-wiring shield electrode 53. The shielding performance can be adjusted depending on the frequency of noise to be suppressed from the second wiring 72.

[0147] Furthermore, the maximum across dimensions of the plurality of sixth openings 83a in the second sub-wiring shield electrode 83 may be set to be the same type. However, the maximum across dimensions of the plurality of sixth openings 83a may be set differently depending on the frequency of noise to be electromagnetically shielded by the second sub-wiring shield electrode 83. The shielding performance can be adjusted depending on the frequency of noise to be suppressed from the first wiring 42.

[0148] Any of the first opening 33a, second opening 63a, third opening 43a, fourth opening 73a, fifth opening 53a, and sixth opening 83a may be set to have a different maximum diameter dimension than at least one of the others, thereby ensuring appropriate shielding performance at each position according to the frequency of the noise to be suppressed.

[0149] For example, the maximum diameter dimension of the first opening 33a may be set to be different from at least one of the maximum diameter dimensions of the second opening 63a, the third opening 43a, the fourth opening 73a, the fifth opening 53a, and the sixth opening 83a. Also, the maximum diameter dimension of the second opening 63a may be set to be different from at least one of the maximum diameter dimensions of the first opening 33a, the third opening 43a, the fourth opening 73a, the fifth opening 53a, and the sixth opening 83a.

[0150] (Variations) As described above, the first opening 33a, the second opening 63a, the third opening 43a, the fourth opening 73a, the fifth opening 53a, and the sixth opening 83a can be set to any shape and size. For example, as shown in Fig. 10, the first opening 33a may be set to have a smaller maximum diameter dimension than the third opening 43a and the fifth opening 53a. The same applies to the other openings. [Explanation of symbols]

[0151] 1 State estimation system 2 Pressure Sensors 3 State Estimation Device 21 Insulation sheet body 21a First surface of the insulating sheet body 21b Second surface of the insulating sheet body 22 First electrode unit 22a First sensor electrode part 22b 1st wiring section 22c First dummy wiring section 23 Second electrode unit 23a Second sensor electrode part 23b 2nd wiring section 23c Second dummy wiring section 31 First insulating sheet 32 First detection electrode 33 First shield electrode 33a 1st opening 34 First sensor protection film 41 First main extension insulator sheet 42 1st wiring 43 First main wiring shield electrode 43a 3rd opening 44 1st wiring protective film 51 First sub-extension insulation sheet 53 First sub-wiring shield electrode 53a 5th opening 54 First dummy wiring protective film 61 Second insulating sheet 62 Second detection electrode 63 Second shield electrode 63a 2nd opening 64 Second sensor protection film 71 Second main extension insulation sheet 72 2nd wiring 73 Second main wiring shield electrode 73a 4th opening 74 2nd wiring protective film 81 Second sub-extension insulation sheet 83 Second sub-wiring shield electrode 83a 6th opening 84 Second dummy wiring protective film

Claims

1. an insulating sheet body; a first detection electrode disposed on a first surface side of the insulating sheet body; a second detection electrode disposed on a second surface side of the insulating sheet body so as to overlap the first detection electrode; a first insulating sheet disposed on an outer surface side of the first detection electrode; a first shield electrode disposed on an outer surface side of the first insulating sheet and electromagnetically shielding the first detection electrode; the thickness of the first insulating sheet is equal to or less than the thickness of the insulating sheet main body; The first shield electrode is When viewed from a thickness direction of the first shield electrode, the first shield electrode is disposed so as to overlap the first detection electrode, and has an outer shape that includes an outer shape of the first detection electrode; A pressure sensor comprising a plurality of first openings penetrating the first shield electrode in a thickness direction.

2. moreover, a second insulating sheet disposed on an outer surface side of the second detection electrode; a second shield electrode disposed on an outer surface side of the second insulating sheet and electromagnetically shielding the second detection electrode; the thickness of the second insulating sheet is equal to or less than the thickness of the insulating sheet main body; The second shield electrode is When viewed from a thickness direction of the second shield electrode, the second shield electrode is disposed so as to overlap the second detection electrode, and has an outer shape that includes an outer shape of the second detection electrode; and The pressure sensor according to claim 1 , further comprising a plurality of second openings penetrating the second shield electrode in a thickness direction thereof.

3. moreover, a first electrode unit disposed on a first surface side of the insulating sheet main body and configured separately from the insulating sheet main body, The first electrode unit is the first insulating sheet; The first detection electrode is adhered to the inner surface of the first insulating sheet and is disposed on the insulating sheet body without being adhered thereto; The pressure sensor of claim 1 , further comprising: the first shield electrode adhered to an outer surface of the first insulator sheet.

4. the first detection electrode is a printed formation adhered to the inner surface of the first insulating sheet, The pressure sensor according to claim 3 , wherein the first shield electrode is a printed formation adhered to the outer surface of the first insulating sheet.

5. moreover, a first electrode unit disposed on a first surface side of the insulating sheet main body and configured separately from the insulating sheet main body; a second electrode unit disposed on a second surface side of the insulator sheet main body, arranged so as to overlap the first electrode unit, and configured separately from the insulator sheet main body, The first electrode unit is the first insulating sheet; The first detection electrode is adhered to the inner surface of the first insulating sheet and is disposed on the insulating sheet body without being adhered thereto; the first shield electrode bonded to an outer surface of the first insulator sheet, The second electrode unit is the second insulating sheet; The second detection electrode is adhered to the inner surface of the second insulating sheet and is disposed on the insulating sheet body without being adhered thereto; The pressure sensor of claim 2 , further comprising: the second shield electrode adhered to an outer surface of the second insulator sheet.

6. the first detection electrode is a printed formation adhered to the inner surface of the first insulating sheet, the first shield electrode is a printed formation adhered to the outer surface of the first insulating sheet, the second detection electrode is a printed formation adhered to the inner surface of the second insulating sheet, The pressure sensor according to claim 5 , wherein the second shield electrode is a printed formation adhered to the outer surface of the second insulating sheet.

7. moreover, a first main extension insulator sheet extending from a side edge of the first insulator sheet in a surface direction of the first insulator sheet; a first wiring disposed on the inner surface side of the first main extension insulator sheet and electrically connected to the first detection electrode; a first main wiring shield electrode disposed on an outer surface side of the first main extension insulator sheet, electrically connected to the first shield electrode, and electromagnetically shielding the first wiring; The first main wiring shield electrode is When viewed from the thickness direction of the first main wiring shield electrode, the first main wiring shield electrode is disposed so as to overlap the first wiring, and has an outer shape including an outer shape of the first wiring excluding a connector region, The pressure sensor according to claim 1 , further comprising a plurality of third openings penetrating the first main wiring shield electrode in a thickness direction.

8. moreover, a first main extension insulator sheet extending from a side edge of the first insulator sheet in a surface direction of the first insulator sheet; a first wiring disposed on the inner surface side of the first main extension insulator sheet and electrically connected to the first detection electrode; a first main wiring shield electrode disposed on an outer surface side of the first main extension insulator sheet, electrically connected to the first shield electrode, and electromagnetically shielding the first wiring; The first main wiring shield electrode is When viewed from the thickness direction of the first main wiring shield electrode, the first main wiring shield electrode is disposed so as to overlap the first wiring, and has an outer shape including an outer shape of the first wiring excluding a connector region, a plurality of third openings penetrating the first main wiring shield electrode in a thickness direction; moreover, a second main extension insulator sheet extending from a side edge of the second insulator sheet in a surface direction of the second insulator sheet; a second wiring disposed on the inner surface side of the second main extension insulator sheet and electrically connected to the second detection electrode; a second main wiring shield electrode disposed on an outer surface side of the second main extension insulator sheet, electrically connected to the second shield electrode, and electromagnetically shielding the second wiring; The second main wiring shield electrode is When viewed from a thickness direction of the second main wiring shield electrode, the second main wiring shield electrode is disposed so as to overlap the second wiring, and has an outer shape including an outer shape of the second wiring excluding a connector region, The pressure sensor according to claim 2 , further comprising a plurality of fourth openings penetrating the second main wiring shield electrode in a thickness direction.

9. moreover, a first secondary extension insulating sheet extending from a side edge of the first insulating sheet in a surface direction of the first insulating sheet, disposed on the second main extension insulating sheet without being adhered thereto, and disposed opposite the second main extension insulating sheet; a first sub-wiring shield electrode disposed on an outer surface side of the first sub-extension insulator sheet, electrically connected to the first shield electrode, and electromagnetically shielding the second wiring; The first sub-wiring shield electrode is When viewed from the thickness direction of the first sub-wiring shield electrode, the first sub-wiring shield electrode is disposed so as to overlap the second wiring, and has an outer shape including an outer shape of the second wiring excluding a connector region, The pressure sensor according to claim 8 , further comprising a plurality of fifth openings penetrating the first sub-wiring shield electrode in a thickness direction.

10. moreover, a second sub-extension insulating sheet extending from a side edge of the second insulating sheet in a surface direction of the second insulating sheet, disposed without being adhered to the first main extension insulating sheet, and disposed opposite the first main extension insulating sheet; a second sub-wiring shield electrode disposed on an outer surface side of the second sub-extension insulator sheet, electrically connected to the second shield electrode, and electromagnetically shielding the first wiring; The second sub-wiring shield electrode is When viewed from a thickness direction of the second sub-wiring shield electrode, the second sub-wiring shield electrode is disposed so as to overlap the first wiring, and has an outer shape including an outer shape of the first wiring excluding a connector region, The pressure sensor according to claim 9 , further comprising a plurality of sixth openings penetrating the second sub-wiring shield electrode in a thickness direction.

11. The pressure sensor according to claim 1 , wherein the insulating sheet main body, the first detection electrode, and the second detection electrode are arranged without being bonded to each other.

12. The pressure sensor according to claim 1 , wherein the first openings have a plurality of maximum cross sectional dimensions set in accordance with frequencies of noise that are to be electromagnetically shielded by the first shield electrode.

13. a plurality of maximum cross sectional dimensions of the plurality of first openings are set in accordance with frequencies of noise to be electromagnetically shielded by the first shield electrode, The pressure sensor according to claim 2 , wherein the second openings have a plurality of maximum cross sectional dimensions set in accordance with frequencies of noise that are to be electromagnetically shielded by the second shield electrode.

14. a plurality of maximum cross sectional dimensions of the plurality of first openings are set in accordance with frequencies of noise to be electromagnetically shielded by the first shield electrode, 8. The pressure sensor according to claim 7, wherein the third openings have a plurality of maximum cross sectional dimensions set according to frequencies of noise that are to be electromagnetically shielded by the first main wiring shield electrode.

15. a plurality of maximum cross sectional dimensions of the plurality of first openings are set in accordance with frequencies of noise to be electromagnetically shielded by the first shield electrode, a plurality of maximum cross sectional dimensions of the plurality of second openings are set in accordance with frequencies of noise to be electromagnetically shielded by the second shield electrode, a plurality of maximum cross sectional dimensions of the third openings are set in accordance with frequencies of noise to be electromagnetically shielded by the first main-wiring shield electrode, 9. The pressure sensor according to claim 8, wherein the maximum cross sectional dimensions of the plurality of fourth openings are set in a plurality of settings according to frequencies of noise to be electromagnetically shielded by the second main wiring shield electrode.

16. 11. The pressure sensor of claim 10, wherein a maximum diametric dimension of the first opening is different from a maximum diametric dimension of at least one of the second opening, the third opening, the fourth opening, the fifth opening, and the sixth opening.

17. 11. The pressure sensor of claim 10, wherein the second opening has a maximum diametric dimension that is different from at least one of the first opening, the third opening, the fourth opening, the fifth opening, and the sixth opening.

18. an insulating sheet body; a first electrode unit disposed on a first surface side of the insulator sheet main body, disposed on the insulator sheet main body without being adhered to the insulator sheet main body, and configured separately from the insulator sheet main body; a second detection electrode that is disposed on a second surface side of the insulator sheet main body, that is disposed on the insulator sheet main body without being adhered to the insulator sheet main body, and that is disposed so as to overlap the first electrode unit; The first electrode unit is a first insulating sheet; a first detection electrode bonded to the inner surface of the first insulating sheet; a first shield electrode bonded to an outer surface of the first insulating sheet and electromagnetically shielding the first detection electrode.

19. moreover, a second electrode unit that is disposed on a second surface side of the insulator sheet main body, that is disposed so as to overlap the first electrode unit, and that is configured separately from the insulator sheet main body; The second electrode unit is A second insulating sheet; a second detection electrode adhered to the inner surface of the second insulator sheet; 20. The pressure sensor of claim 18, further comprising: a second shield electrode bonded to an outer surface of the second insulator sheet to electromagnetically shield the second sensing electrode.

20. the first detection electrode is a printed formation adhered to the inner surface of the first insulating sheet, 20. The pressure sensor of claim 18, wherein the first shield electrode is a printed formation adhered to an outer surface of the first insulator sheet.

21. the first detection electrode is a printed formation adhered to the inner surface of the first insulating sheet, the first shield electrode is a printed formation adhered to the outer surface of the first insulating sheet, the second detection electrode is a printed formation adhered to the inner surface of the second insulating sheet, 20. The pressure sensor of claim 19, wherein the second shield electrode is a printed formation adhered to the outer surface of the second insulator sheet.

Images