Grinding device

Abstract

To provide a grinding device capable of improving the efficiency of blade adjustment work, including adjustment of a blade.SOLUTION: This grinding device comprises: a table 11 for holding a wafer; one or a plurality of blades 12a, 12b for cutting the wafer 1 as a result of the blades being rotated by a spindle; three or more adjustment parts 17a, 17b, 18a, 18b having a region for adjusting the blades; and movement parts for moving the adjustment parts 17a, 17b, 18a, 18b and the blades 12a, 12b relative to one another.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a grinding device for adjusting a blade. [Background technology]

[0002] A wafer on which various elements such as semiconductor devices and electronic components are formed is divided into individual chips by dicing along dicing lines. For example, Patent Document 1 describes a cutting device that performs flat dressing by rotating and moving a cutting blade in the radial direction of a stationary dresser board. The cutting device then moves the dresser board from one end to the other. This leaves a cutting mark area on the dresser board that extends from one end to the other. The dresser board is then rotated, so that the tip of the cutting blade faces the non-cutting mark area. The next flat dressing is then performed. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2013-82021 Summary of the Invention [Problem to be solved by the invention]

[0004] In grinding such blades, it is desired to improve the efficiency of blade adjustment operations such as blade processing, including dressing and truing. [Means for solving the problem]

[0005] A grinding device that solves the above problem includes a table that holds a wafer, one or more blades that are rotated by a spindle to cut the wafer, three or more adjustment units that have areas for adjusting the blades, and a moving unit that moves the adjustment units and the blades relative to each other. [Effects of the Invention]

[0006] According to the present invention, the efficiency of blade adjustment work such as blade processing can be improved. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a perspective view of a grinding device according to a first embodiment. [Figure 2] FIG. 2 is a plan view showing the operation during truing in the grinding device of the first embodiment. [Figure 3] FIG. 3 is a perspective view of the grinding device of the second embodiment. [Figure 4] FIG. 4 is a plan view showing the operation during truing in the grinding device of the second embodiment. [Figure 5] FIG. 5 is a perspective view of a grinding device according to the third embodiment. [Figure 6] FIG. 6 is a perspective view of a grinding device according to the fourth embodiment. [Figure 7] FIG. 7 is a plan view showing the operation during truing in the grinding device of the fourth embodiment. [Figure 8] FIG. 8 is a perspective view of a grinding device according to the fifth embodiment. [Figure 9] FIG. 9 is a front view showing an operation (first example) at the start of truing in the fourth and fifth embodiments. [Figure 10] FIG. 10 is a plan view showing an operation (first example) during truing in the fourth and fifth embodiments. [Figure 11] FIG. 11 is a cross-sectional view showing an operation (first example) during truing in the fourth and fifth embodiments. [Figure 12] FIG. 12 is a cross-sectional view showing an operation (first example) during truing in the fourth and fifth embodiments. [Figure 13] FIG. 13 is a cross-sectional view showing an operation (second example) during truing in the fourth and fifth embodiments. [Figure 14] FIG. 14 is an enlarged cross-sectional view of FIG. [Figure 15] FIG. 15 is a perspective view showing an operation (second example) during truing in the fourth and fifth embodiments. [Figure 16] FIG. 16 is a perspective view showing an operation (second example) during truing in the fourth and fifth embodiments. [Figure 17] FIG. 17 is a schematic diagram showing an example of the arrangement of the adjustment unit. [Figure 18] FIG. 18 is a schematic diagram showing a modified example of the arrangement of the adjustment unit. [Figure 19] FIG. 19 is a schematic diagram showing a modified example of the arrangement of the adjustment unit. DETAILED DESCRIPTION OF THE INVENTION

[0008] An embodiment of a grinding device and a truing method will be described with reference to FIGS. (First embodiment) The grinding apparatus 10 shown in FIG. 1 is a grinding apparatus related to the grinding apparatus of the first embodiment described below. The grinding apparatus 10 cuts the wafer 1 along lattice-shaped dicing lines by relatively moving blades 12a and 12b and a table 11 that holds the wafer 1. The wafer 1, which is a difficult-to-cut material, is a silicon carbide wafer made of silicon carbide (SiC), for example. However, the wafer 1 is not limited to being made of silicon carbide. For example, the wafer 1 may be made of silicon, sapphire, gallium nitride (GaN), gallium oxide (Ga2O3), gallium arsenide (GaAs), etc.

[0009] The grinding apparatus 10 includes a table 11, a first blade 12a and a second blade 12b, an X-carriage 13 as an X-axis moving unit, a first Y-axis moving unit 14a and a second Y-axis moving unit 14b, a first Z-axis moving unit 15a and a second Z-axis moving unit 15b, and a control unit 16. The grinding apparatus 10 further includes a first dressing unit 17a and a second dressing unit 17b, and a first truing unit 18a and a second truing unit 18b. The first dressing unit 17a and the first truing unit 18a are adjustment units that adjust the first blade 12a. The second dressing unit 17b and the second truing unit 18b are adjustment units that adjust the second blade 12b.

[0010] The table 11 holds the wafer 1 on its horizontal surface by sucking the wafer 1 from its backside. Each of the first blade 12a and the second blade 12b cuts the wafer 1 held on the table 11. Each of the blades 12a and 12b is an extremely thin cutting wheel having a ring shape. Each of the blades 12a and 12b is detachably attached to a first spindle 12c and a second spindle 12d, respectively. Each of the spindles 12c and 12d is rotatably supported in a housing. Each of the spindles 12c and 12d is connected to a blade drive source housed in the housing. Each of the blades 12a and 12b is rotationally driven by the rotational force generated by the respective blade drive source.

[0011] X-carriage 13 is provided with table 11, dressing units 17a and 17b, and truing units 18a and 18b. X-carriage 13 is driven by an X-axis drive unit equipped with a pulse motor or the like, and is guided by a guide mechanism to move in the X-axis direction. X-carriage 13 is equipped with a table rotation unit that rotates table 11. The table rotation unit can adjust the relative angle with blades 12a and 12b.

[0012] The first Y-axis moving unit 14a and the second Y-axis moving unit 14b are provided on a first Z-axis moving unit 15a and a second Z-axis moving unit 15b, respectively, which are provided separately from the X-carriage 13. The Y-axis moving units 14a and 14b are connected to the spindles 12c and 12d, respectively. The Y-axis moving units 14a and 14b move the blades 12a and 12b in the Y-axis direction relative to the wafer 1 held on the table 11. The Y-axis moving units 14a and 14b each use a Y-axis driving unit including a pulse motor or the like as a drive source. The Y-axis moving units 14a and 14b are guided by a guide mechanism to move the spindles 12c and 12d in the Y-axis direction.

[0013] Each of the first Z-axis moving unit 15a and the second Z-axis moving unit 15b moves the blades 12a and 12b in the Z-axis direction relative to the wafer 1 held on the table 11, i.e., in the direction toward and away from the table 11. Specifically, each of the Z-axis moving units 15a and 15b uses a Z-axis driving unit including a pulse motor or the like as a drive source. Each of the Z-axis moving units 15a and 15b is guided by a guide mechanism to move the spindles 12c and 12d in the Z-axis direction integrally with the Y-axis moving units 14a and 14b.

[0014] The first dressing unit 17a and the second dressing unit 17b are arranged symmetrically on the X carriage 13 with respect to the X center line 9, which passes through the rotation center O1 of the table 11 and extends in the X-axis direction. Each of the dressing units 17a and 17b, which serve as adjustment units, dresses each of the blades 12a and 12b. Each of the dressing units 17a and 17b includes a first dressing board 17c and a second dressing board 17d, which are dressing grindstones serving as adjustment boards, and a first dressing stage 17e and a second dressing stage 17f serving as adjustment stages. Each of the dressing stages 17e and 17f supports each of the dressing boards 17c and 17d. Each of the dressing units 17a and 17b is arranged in an area of ​​the X carriage 13 where the table 11 is not located. Each of the dressing portions 17a and 17b has a rectangular shape. Each of the dressing portions 17a and 17b dresses both sides of the blades 12a and 12b by moving relatively in the X-axis direction while in contact with the dressing boards 17c and 17d. After dressing is performed on each of the dressing boards 17c and 17d, a dressing mark having a linear groove shape extending in the X-axis direction is formed.

[0015] The first truing portion 18a and the second truing portion 18b are arranged symmetrically with respect to the X-center line 9. The truing portions 18a and 18b are arranged inside the dressing portions 17a and 17b. Each of the truing portions 18a and 18b serving as adjustment portions has a rectangular shape. Each of the truing portions 18a and 18b is a portion that truths each of the blades 12a and 12b. Each of the truing portions 18a and 18b includes a first truing board 18c and a second truing board 18d, which are truing grindstones serving as adjustment boards, and a first truing stage 18e and a second truing stage 18f serving as adjustment stages. The truing stages 18e and 18f support the truing boards 18c and 18d. The truing sections 18a, 18b move relatively in the Y-axis direction while in contact with the truing boards 18c, 18d, thereby truing the tip surfaces, which are the outer peripheral surfaces of the blades 12a, 12b. After truing is performed on each of the truing boards 18c, 18d, a truing mark in the shape of a linear groove extending in the Y-axis direction is formed.

[0016] The control unit 16 controls the dicing operation, the dressing operation, and the truing operation according to a program. In the dressing operation, the blades 12a and 12b are dressed simultaneously. In the truing operation, the blades 12a and 12b are trued simultaneously.

[0017] (Operation of the first embodiment) When dressing is performed, the control unit 16 operates the X-carriage 13, the first Y-axis moving unit 14a, and the first Z-axis moving unit 15a to move the first blade 12a to the dressing start point DS on the first dressing board 17c. At the same time, the control unit 16 operates the X-carriage 13, the second Y-axis moving unit 14b, and the second Z-axis moving unit 15b to move the second blade 12b to the dressing start point DS on the second dressing board 17d.

[0018] Then, the control unit 16 rotates each blade 12a, 12b. Then, the control unit 16 moves the X-carriage 13 in one direction while bringing each blade 12a, 12b into contact with the dressing boards 17c, 17d. Then, each rotating blade 12a, 12b moves from the dressing start point DS to the dressing end point DE. Dressing marks 17g, 17h extending in the X-axis direction are formed on each dressing board 17c, 17d. For example, the dressing start point DS is set at the edge of each dressing board 17c, 17d that is closer to the table 11. The dressing end point DE is set at the edge of each dressing board 17c, 17d opposite to the edge where the dressing start point DS is set. When dressing is performed next time, a position shifted in the Y-axis direction from the previous dressing end point DE is set as a new dressing start point DS, and a position shifted in the Y-axis direction by the same amount from the previous dressing start point DS is set as a new dressing end point DE.

[0019] When truing is performed, control unit 16 operates X-carriage 13, first Y-axis moving unit 14a, and first Z-axis moving unit 15a to move first blade 12a to truing start point TS of first truing board 18c. At the same time, control unit 16 operates X-carriage 13, first Y-axis moving unit 14a, and first Z-axis moving unit 15a to move second blade 12b to truing start point TS of second truing board 18d.

[0020] The control unit 16 rotates the blades 12a and 12b and brings them into contact with the truing boards 18c and 18d. The control unit 16 then controls the Y-axis moving units 14a and 14b to move from the truing start point TS to the truing end point TE. Truing marks 19a and 19b extending in the Y-axis direction are formed on the truing boards 18c and 18d.

[0021] 2 is a diagram specifically illustrating the truing operation. A truing start point TS1 is set at the edge of each truing board 18c, 18d that is closer to the X-center line 9. A truing end point TE1 is set at the edge of each truing board 18c, 18d that is opposite to the edge at which the truing start point TS1 is set. When truing is performed next, a new truing start point TS2 is set at a position shifted in the X-axis direction from the previous truing end point TE1, and a new truing end point TE2 is set at a position shifted in the X-axis direction from the previous truing start point TS1 by the same amount. Then, linear movement occurs between the truing start points TS1, TS2 and the truing end points TE1, TE2.

[0022] (Effects of the first embodiment) (1-1) In the case where there are two blades, the same number of dressing portions 17a, 17b are provided. Also, truing portions 18a, 18b are provided. Therefore, dressing can be performed on the two blades 12a, 12b simultaneously. Truing can be performed on the two blades 12a, 12b simultaneously. Furthermore, while dressing is being performed on one of the blades 12a, 12b, truing can also be performed on the other. In this way, adjustments such as dressing and truing are performed on the two blades 12a, 12b simultaneously. Therefore, the efficiency of adjusting the blades 12a, 12b can be improved.

[0023] (Second embodiment) As shown in FIG. 3, the first embodiment differs from the grinding apparatus 10 described above in that the first truing unit 18a and the second truing unit 18b are configured to be rotatable in the R direction. That is, the first truing unit 18a includes a first truing drive unit 18g that rotatably supports the first truing stage 18e. The second truing unit 18b includes a second truing drive unit 18h that rotatably supports the second truing stage 18f. As an example, each of the truing boards 18c and 18d is ring-shaped. Each of the truing stages 18e and 18f is circular so as to support each of the truing boards 18c and 18d. The top surfaces of the truing boards 18c and 18d, where truing is performed, are flat.

[0024] Each truing portion 18a, 18b is arranged so that a Y center line 8 extending in the Y-axis direction passing through the rotation center of each blade 12a, 12b passes over the rotation center O2 of each truing portion 18a, 18b. Each truing portion 18a, 18b is a truing rotation portion. During truing, each blade 12a, 12b simply moves linearly along the truing board 18c, 18d in the radial direction, which is the Y-axis direction.

[0025] 4, each of the truing drive units 18g, 18h includes a rotation drive source and rotates each of the truing stages 18e, 18f on the X-carriage 13. Furthermore, each of the truing drive units 18g, 18h moves each of the truing boards 18c, 18d in the Z-axis direction to adjust the height of each of the blades 12a, 12b and each of the truing boards 18c, 18d in the Z-axis direction. That is, each of the truing drive units 18g, 18h is a truing rotation drive unit and a truing Z-axis movement unit.

[0026] When truing, as the rotating blades 12a, 12b come into contact with the rotating truing boards 18c, 18d, the blades 12a, 12b gradually move linearly in the Y-axis direction, i.e., in the radial direction of the truing boards 18c, 18d. For example, the truing start point TS1 of each truing board 18c, 18d is set at the intersection of a line 7 extending in the Y-axis direction through the rotation center O2 and the outer circumferential edge of the truing board 18c, 18d. The truing end point TE1 is set at the intersection of the line 7 and the inner circumferential edge of the truing board 18c, 18d. The next truing start point TS2 is the same as the truing end point TE1. The next truing end point TE2 is also the same as the truing start point TS1. Truing marks are formed on the entire upper surface of each truing board 18c, 18d as each blade 12a, 12b gradually moves from the outer peripheral edge to the inner peripheral edge or from the inner peripheral edge to the outer peripheral edge of the truing board 18c, 18d. That is, the upper surface of each truing board 18c, 18d is thinly and uniformly scraped. Then, the next truing is performed using the newly revealed surface.

[0027] (Effects of the second embodiment) (2-1) As with the polishing device of the first embodiment (see FIGS. 1 and 2), the dressing and truing of the blades 12a and 12b can be performed simultaneously.

[0028] (2-2) After the entire surface of each truing board 18c, 18d is scraped off by each truing, the entire surface that is next exposed is used for truing. In this way, each truing board 18c, 18d is used by scraping off the entire surface from the top layer onwards, so it can be used until it becomes too thin to be used, which reduces the frequency of replacement.

[0029] (2-3) Since the blades 12a and 12b are rotated while the truing boards 18c and 18d are rotated, the wear rate of the truing boards 18c and 18d can be slowed. The wear rate of the truing boards 18c and 18d can be controlled by adjusting the rotation speed of the truing boards 18c and 18d. During each truing, the rotation speed of the truing boards 18c and 18d is set slower than the rotation speed of the blades 12a and 12b.

[0030] (Third embodiment) The third embodiment is a modification of the second embodiment. As shown in Fig. 5, dressing units 17a, 17b may be disposed on X carriage 13, while truing units 18a, 18b may not be mounted on X carriage 13. Truing units 18a, 18b are disposed outside X carriage 13 in the Y-axis direction, outside dressing units 17a, 17b.

[0031] Each truing portion 18a, 18b is disposed at a position retreated in the Y-axis direction from the X-carriage 13. Specifically, each truing portion 18a, 18b is disposed so that the Y-center line 8 passes over its rotation center O2. When each truing portion 18a, 18b rotates, each blade 12a, 12b simply moves linearly in the radial direction on each truing board 18c, 18d.

[0032] (Effects of the third embodiment) (3-1) As with the polishing device of the first embodiment (see FIGS. 1 and 2), the dressing and truing of the blades 12a and 12b can be performed simultaneously.

[0033] (3-2) The X carriage 13 does not have the truing portions 18a and 18b mounted thereon, so the configuration can be simplified. (3-3) Since each truing board 18c, 18d is used by scraping the entire surface from the top layer onwards, it can be used until it becomes too thin to be usable, thereby reducing the frequency of replacement. In addition, since each truing board 18c, 18d is rotated while each blade 12a, 12b is rotated, the wear rate of each truing board 18c, 18d can be slowed.

[0034] (Fourth embodiment) 6, even if there are multiple blades, a single truing unit may be mounted on X-carriage 13. That is, the single truing unit 21 is rotatable, and its center of rotation O3 is located on X-center line 9 passing through center of rotation O1 of table 11. Furthermore, truing unit 21 is disposed so that Y-center line 8 passing through the centers of rotation of each of blades 12a and 12b passes over center of rotation O3 of truing unit 21.

[0035] The truing unit 21 includes a ring-shaped truing board 21a and a truing stage 21b that supports the truing board 21a. The truing unit 21 also includes a truing drive unit 21c that rotates the truing stage 21b and moves it in the Z-axis direction. That is, the truing drive unit 21c is a truing rotation drive unit and a truing Z-axis movement unit.

[0036] The truing board 21a has a larger diameter than the ring-shaped truing boards 18c and 18d of the second and third embodiments. The top surface of the truing board 21a, where truing is performed, is flat. The height of each blade 12a and 12b is adjusted in the Z-axis direction by each Z-axis moving unit 15a and 15b, so that the blades 12a and 12b are in contact with the flat top surface. The first region 22a on the first blade 12a side of the X-center line 9 is the region closer to the first blade 12a as the first blade 12a moves in the Y-axis direction. The first region 22a on the first blade 12a side of the X-center line 9 is the range in which the rotating first blade 12a moves in the Y-axis direction and makes contact. The second region 22b on the second blade 12b side of the X-center line 9 is the region closer to the second blade 12b as the second blade 12b moves in the Y-axis direction. Second region 22b on the second blade 12b side of X center line 9 is a range in which rotating second blade 12b operates to come into contact with second region 22b while moving in the Y axis direction.

[0037] When truing, the truing drive unit 21c rotates the single truing board 21a. As a result, the blades 12a and 12b are linearly moved toward and away from each other in the Y-axis direction. That is, the blades 12a and 12b are linearly moved in the radial direction of the truing board 21a.

[0038] Specifically, as shown in Fig. 7, when the rotating first blade 12a comes into contact with the first region 22a, it gradually moves linearly in the Y-axis direction, i.e., in the radial direction of the truing boards 18c and 18d. The truing start point TS1 of the truing board 21a is set at the intersection of a line 7 passing through the rotation center O3 and extending in the Y-axis direction with the outer circumferential edge of the first region 22a. The truing end point TE1 is set at the intersection of the line 7 with the inner circumferential edge of the first region 22a. This truing end point TE1 is set as the truing start point TS1 of the next truing. The previous truing start point TS1 then becomes the truing end point TE1.

[0039] Furthermore, when the rotating second blade 12b comes into contact with the second region 22b, it gradually moves linearly in the Y-axis direction, i.e., in the radial direction of the truing boards 18c, 18d. A truing start point TS2 of the truing board 21a is set at the intersection of a line 7 passing through the rotation center O3 and extending in the Y-axis direction with the outer circumferential edge of the second region 22b. A truing end point TE2 is set at the intersection of the line 7 with the inner circumferential edge of the second region 22b. This truing end point TE2 is set as the truing start point TS2 of the next truing. The previous truing start point TS2 then becomes the truing end point TE2.

[0040] As a result, truing marks are formed on the entire upper surface of the truing board 21a. That is, the upper surface of the truing board 21a is thinly and uniformly scraped. After that, the next truing is performed using the newly exposed surface.

[0041] (Effects of the fourth embodiment) (4-1) As with the polishing device of the first embodiment (see FIGS. 1 and 2), the dressing and truing of the blades 12a and 12b can be performed simultaneously.

[0042] (4-2) The truing unit 21 can simultaneously perform the first blade 12a and the second blade 12b with a single truing board 21a. Furthermore, the single truing unit contributes to the miniaturization of the entire device.

[0043] (4-3) Each truing board 21a is used by scraping the entire surface from the top layer onwards, so it can be used until it becomes too thin to be usable, thereby reducing the frequency of replacement. In addition, since the blades 12a and 12b are rotated while the truing board 21a is rotated, the wear rate of the truing board 21a can be slowed.

[0044] (Fifth embodiment) This is a modification of the fourth embodiment. As shown in Fig. 8, it is also possible to arrange each dressing unit 17a, 17b on the X carriage 13, so that a single truing unit 21 is not mounted on the X carriage 13. Truing unit 21 is arranged on one outer side of X carriage 13 in the Y axis direction, outside dressing unit 17a.

[0045] The truing unit 21 is disposed below the first blade 12a at a position retracted in the Y-axis direction from the X-carriage 13. Here, the truing unit 21 further includes an X-axis moving unit 23. The X-axis moving unit 23 moves the truing unit 21 so that the rotation center O3 of the truing unit 21 coincides with the Y center line 8.

[0046] Truing begins by driving the Y-axis moving units 14a and 14b to move each blade 12a and 12b onto the truing unit 21. Then, the X-axis moving unit 23 is driven to move the blades 12a and 12b in the X direction so that the rotation center O3 of the truing unit 21 coincides with the Y center line 8. Then, when the rotating first blade 12a contacts the first region 22a and the rotating second blade 12b contacts the second region 22b, the blades 12a and 12b are linearly moved toward and away from each other in the Y-axis direction. That is, the blades 12a and 12b move linearly in the radial direction of the truing board 21a. For example, the first blade 12a moves from the outer circumferential edge of the first region 22a toward the inner circumferential edge, or from the inner circumferential edge toward the outer circumferential edge. The second blade 12b moves from the outer circumferential edge toward the inner circumferential edge of the second region 22b, or moves from the inner circumferential edge toward the outer circumferential edge.

[0047] As a result, truing marks are formed on the entire upper surface of the truing board 21a. That is, the upper surface of the truing board 21a is thinly and uniformly scraped. After that, the next truing is performed using the newly exposed surface.

[0048] (Effects of the fifth embodiment) (5-1) As with the polishing device of the first embodiment (see FIGS. 1 and 2), the dressing and truing of the blades 12a and 12b can be performed simultaneously.

[0049] (5-2) The X-carriage 13 does not have a truing unit 21 mounted thereon, so the configuration can be simplified. (5-3) The truing board 21a is used by scraping the entire surface from the top layer onwards, so it can be used until it becomes too thin to be usable, thereby reducing the frequency of replacement. In addition, since the blades 12a and 12b are rotated while the truing board 21a is rotated, the wear rate of the truing board 21a can be slowed.

[0050] (Specific Operation 1 (Truing) of the Fourth and Fifth Embodiments) In the fourth and fifth embodiments, the upper surface of the truing board 21a on which truing is performed is a flat surface. When truing starts, the heights of the blades 12a and 12b in the Z-axis direction are adjusted by the Z-axis moving units 15a and 15b, respectively, and the blades 12a and 12b are brought into contact with the flat upper surface.

[0051] 9, the first blade 12a is positioned at a truing start point TS1, which is the intersection of a line 7 that passes through the rotation center O3 and extends in the Y-axis direction and the outer circumferential edge of the first region 22a. The second blade 12b is positioned at a truing start point TS2, which is the intersection of the line 7 and the outer circumferential edge of the second region 22b.

[0052] Each of the blades 12a and 12b is rotated at a first speed. Here, the first blade 12a and the second blade 12b rotate in the same direction. At the same time, the truing board 21a is rotated at a second speed. Here, the first speed is faster than the second speed. That is, the blades 12a and 12b rotate faster than the truing board 21a. Furthermore, the control unit 16 rotates the truing board 21a half a turn while the Y-axis moving units 14a and 14b linearly move the blades 12a and 12b toward each other by the thickness of each blade 12a and 12b. As a result, the first blade 12a forms a first truing mark 24a along half the circumference of the truing board 21a, and the second blade 12b also forms a second truing mark 24b along half the circumference so as not to overlap the first truing mark 24a. The width of each truing mark 24a, 24b gradually increases as it advances from the truing start points TS1, TS2.

[0053] 10 and 11 show a state in which each blade 12a, 12b has moved partway from the outer circumferential edge toward the inner circumferential edge of each region 22a, 22b. Then, as shown in Fig. 12, each blade 12a, 12b moves to truing end points TE1, TE2, which are the intersections of a line 7 passing through the rotation center O3 and extending in the Y-axis direction with the inner circumferential edges of the regions 22a, 22b. As a result, the entire upper surface of the truing board 21a to be trued becomes a new flat surface whose surface has been scraped away by truing.

[0054] The next truing is performed using this new flat surface. In the next truing, the truing end points TE1 and TE2 from the previous truing become the new truing start points TS1 and TS2. Then, each blade 12a and 12b moves linearly from the inner peripheral end of the region 22a and 22b gradually toward the outer peripheral end. Each blade 12a and 12b moves linearly away from each other by the thickness of each blade 12a and 12b while the truing board 21a makes a half rotation. Then, the truing start points TS1 and TS2 from the previous truing become the truing end points TE1 and TE2.

[0055] With this configuration, the first blade 12a and the second blade 12b can be trued simultaneously using the upper surface of a single truing board 21a, which is at the same height. The upper surface of the truing board 21a can be uniformly worn. Therefore, the truing board 21a can be used repeatedly for truing, reducing the frequency of replacement.

[0056] (Specific Operation 2 (Truing) of the Fourth and Fifth Embodiments) As shown in Figures 13, 14, and 15, the truing board 21a here has a top surface 25, a first annular region 26a, and a second annular region 26b on the upper surface where truing is performed. The first annular region 26a performs truing of the first blade 12a. The second annular region 26b performs truing of the second blade 12b. The first annular region 26a and the second annular region 26b are concentric circles. The first annular region 26a is a surface that is one step lower than the top surface 25, and the second annular region 26b is a surface that is one step lower than the first annular region 26a. The first annular region 26a is located more inward than the second annular region 26b.

[0057] When truing, the first blade 12a contacts the outer peripheral edge of the first annular region 26a. This position is the truing start point TS1 of the first blade 12a. The second blade 12b contacts the outer peripheral edge of the second annular region 26b. The blades 12a and 12b are rotated in the same direction at a first speed. The truing board 21a is rotated at a second speed, which is slower than the blades 12a and 12b. As shown in FIG. 16 , the first blade 12a gradually moves from the truing start point TS1 of the first annular region 26a toward the inner peripheral edge, which is the truing end point TE1. The second blade 12b also gradually moves from the truing start point TS2 of the second annular region 26b toward the inner peripheral edge, which is the truing end point TE2.

[0058] According to this configuration, the first blade 12a is trued in the first annular region 26a, and the second blade 12b is trued in the second annular region 26b, so that the first blade 12a and the second blade 12b can be trued simultaneously.

[0059] (Variation) This embodiment can be modified as follows: This embodiment and the following modifications can be combined and implemented within the scope of technical compatibility.

[0060] In the first, second, and third embodiments, the first dressing portion 17a and the second dressing portion 17b do not have to be arranged symmetrically on the X carriage 13 with the X center line 9 as the axis of symmetry. Furthermore, the first truing portion 18a and the second truing portion 18b do not have to be arranged symmetrically on the X carriage 13 with the X center line 9 as the axis of symmetry.

[0061] In the fourth and fifth embodiments, the first dressing portion 17a and the second dressing portion 17b do not have to be arranged symmetrically on the X carriage 13 with the X center line 9 as the axis of symmetry.

[0062] The grinding device in the second embodiment shown in FIG. 3 and the third embodiment shown in FIG. 5 may be a device with one blade. In this case, there will be at least one dressing unit and at least one truing unit. Even with this configuration, if the rotating blade is moved in the Y-axis direction while the truing board is rotating, the upper surface of the truing board to be polished can be uniformly worn. Furthermore, the frequency of replacing the truing board can be reduced. In addition, since the blade is rotated while the truing board is rotating, the wear rate of the truing board can be slowed.

[0063] The grinding device in the fourth embodiment shown in FIG. 6 and the fifth embodiment shown in FIG. 8 may be a device with one blade. In this case, the truing unit can be made smaller than when there are two blades. Also, there will be at least one dressing unit. With such a configuration, similar effects can be obtained.

[0064] In the second embodiment shown in Fig. 3 and the third embodiment shown in Fig. 5, truing may be stopped on the upper surface of each truing board 18c, 18d while the blades 12a, 12b are moving from the outer circumferential edge to the inner circumferential edge or from the inner circumferential edge to the outer circumferential edge. In this case, the next truing is resumed from the previous stop position.

[0065] In the fourth embodiment shown in Fig. 6 and the fifth embodiment shown in Fig. 8, truing may be stopped on the upper surface of each truing board 21a while the blades 12a and 12b are moving from the outer circumferential edge to the inner circumferential edge or from the inner circumferential edge to the outer circumferential edge. In this case, the next truing is resumed from the previous stop position.

[0066] (Modification of Adjustment Unit Arrangement) (Example in Figure 17) The grinding device of the first embodiment includes a first dressing unit 17a, a second dressing unit 17b, a first truing unit 18a, and a second truing unit 18b as adjustment units for adjusting the blades 12a and 12b. That is, the grinding device of the first embodiment includes four adjustment units 31 to 34 for adjusting the blades 12a and 12b. The first dressing unit 17a and the second dressing unit 17b both include dressing boards 17c and 17d and dressing stages 17e and 17f, and these have the same configuration. The first truing unit 18a and the second truing unit 18b also both include truing boards 18c and 18d and truing stages 18e and 18f, and these have the same configuration. The dressing units 17a and 17b and the truing units 18a and 18b also have the same configuration.

[0067] Hereinafter, the dressing portions 17a, 17b and the truing portions 18a, 18b will be referred to as adjustment portions 31 to 34, the dressing boards 17c, 17d and the truing boards 18c, 18d will be referred to as adjustment boards, and the dressing stages 17e, 17f and the truing stages 18e, 18f will be referred to as adjustment stages.

[0068] That is, as shown in FIG. 17, the dressing units 17a, 17b and the truing units 18a, 18b are four adjustment units 31, 32, 33, 34, and the adjustment units 31 to 34 include adjustment boards 31a to 34a and adjustment stages 31b to 34b that support the adjustment boards 31a to 34a. The adjustment boards 31a to 34a are, for example, grindstone boards. When the adjustment units 31 to 34 are used as dressing units, grindstones with a roughness suitable for dressing, i.e., a grit size suitable for dressing, are selected. When the adjustment units 31 to 34 are used as truing units, grindstones with a roughness suitable for truing, i.e., a grit size suitable for truing, are selected. That is, all of the adjustment boards 31a to 34a may be dressing units, or all of the adjustment boards 31a to 34a may be truing units. Furthermore, a part of the adjustment boards 31a to 34a may be a dressing part, and the rest may be a truing part.

[0069] The adjustment boards 31a to 34a used in the adjustment units 31 to 34 have the same size and shape, although they may have different roughnesses. As an example, the surfaces of the adjustment boards 31a to 34a are set to the same height as the processing surface of the wafer 1 placed on the table 11.

[0070] On the X carriage 13, the adjustment units are arranged in the order of first adjustment unit 31, third adjustment unit 33, fourth adjustment unit 34, and second adjustment unit 32, from right to left in the figure. The first adjustment unit 31 and second adjustment unit 32 are arranged side by side in the Y axis direction at the same position in the X axis direction and at a position overlapping with the table 11 in the X axis direction. The first adjustment unit 31 is arranged on one side (the right side in the figure) of the X center line 9. The second adjustment unit 32 is arranged on the other side (the left side in the figure).

[0071] The third adjustment unit 33 and the fourth adjustment unit 34 are arranged side by side in the Y axis direction at positions different from the first adjustment unit 31 and the second adjustment unit 32 in the X axis direction and at positions not overlapping with the table 11 in the X axis direction. The third adjustment unit 33 and the fourth adjustment unit 34 are located more inward in the Y axis direction than the first adjustment unit 31 and the second adjustment unit 32. The third adjustment unit 33 is arranged on one side (the right side in the figure) of the X center line 9, and the fourth adjustment unit 34 is arranged on the other side (the left side in the figure). In other words, the first adjustment unit 31 and the third adjustment unit 33 and the second adjustment unit 32 and the fourth adjustment unit 34 are arranged symmetrically on the X carriage 13 with the X center line 9 as the axis of symmetry.

[0072] It should be noted that the first and third adjustment units 31 and 33 and the second and fourth adjustment units 32 and 34 do not have to be arranged symmetrically on the X carriage 13 with the X center line 9 as the axis of symmetry.

[0073] Each of the adjustment units 31 to 34 has a rectangular shape and, for example, the same shape and size. As an example, each of the adjustment stages 31b to 34b supporting each of the adjustment boards 31a to 34a has a similar shape but is slightly larger than each of the adjustment boards 31a to 34a. Corners 31c to 34c of each of the adjustment boards 31a to 34a, which are closest to the table 11, are located on an imaginary circle 36 whose center is the rotation center O1 of the table 11. Corners 31d to 34d of each of the adjustment stages 31b to 34b, which are closest to the table 11, are located on an imaginary circle 35 whose diameter is smaller than the imaginary circle 36 whose center is the rotation center O1 of the table 11. Here, the imaginary circles 35 and 36 are circles used to identify the positions of the adjustment units 31 to 34 relative to the table 11, taking into consideration the miniaturization of the X-carriage 13 including the table 11 and the adjustment units 31 to 34. The imaginary circles 35 and 36 are circles whose diameter is larger than that of the table 11 and whose center is the rotation center O1. The sizes of the imaginary circles 35 and 36 are set in consideration of, for example, how difficult it is for cutting water to get on them.

[0074] Furthermore, taking into consideration that components with a larger diameter than the table 11, such as a diaphragm, may be positioned on the table 11, the virtual circles 35 and 36 are set to a size that prevents interference between the components and the adjustment units 31 to 34 when the table is rotated.

[0075] Note that the nearest corners 31c to 34c of the adjustment boards 31a to 34a do not have to be located on the imaginary circle 36, and the nearest corners 31d to 34d of the adjustment stages 31b to 34b do not have to be located on the imaginary circle 35. Furthermore, for example, the corners 31c to 34c of the adjustment boards 31a to 34a do not have to be located on the imaginary circle 36 outside the imaginary circle 35.

[0076] These adjustment units 31 to 34 are arranged on one side 38 where blades 12a, 12b are arranged, away from a Y center line 6 that passes through the rotation center O1 of table 11 and extends in the Y-axis direction. On table 11, the opposite side from one side 38 is a supply side 37 where cutting water is supplied to the wafer. The cutting water is discharged from a nozzle arranged on supply side 37 and flows to one side 38. Adjustment units 31 to 34 are arranged in positions where they are less likely to be splashed with cutting water used in cutting the wafer.

[0077] The first adjustment unit 31 and the third adjustment unit 33 on the right side of the figure are used to adjust the first blade 12a, and the second adjustment unit 32 and the fourth adjustment unit 34 on the left side of the figure are used to adjust the second blade 12b.

[0078] Here, if grindstones of a first coarseness for dressing are used on the adjustment boards 31a and 32a in the first adjustment unit 31 and the second adjustment unit 32, and grindstones of a second coarseness for truing are used on the adjustment boards 33a and 34a in the third adjustment unit 33 and the fourth adjustment unit 34, the same configuration as the first embodiment will be achieved. In the case of the first embodiment, grindstones of the same coarseness suitable for dressing are installed on the adjustment boards 31a and 32a, and grindstones of the same coarseness suitable for truing are installed on the adjustment boards 33a and 34a.

[0079] In addition, in the first adjustment unit 31 and the second adjustment unit 32, a grindstone for truing may be used on the adjustment boards 31a, 32a, and in the third adjustment unit 33 and the fourth adjustment unit 34, a grindstone for dressing may be used on the adjustment boards 33a, 34a.

[0080] When the first adjustment unit 31 adjusts the first blade 12a and the second adjustment unit 32 adjusts the second blade 12b, the control unit 16 operates the X-carriage 13, the Y-axis movement units 14a and 14b, and the Z-axis movement units 15a and 15b to move the blades 12a and 12b to adjustment start points on the adjustment boards 31a and 32a. The control unit 16 then rotates the blades 12a and 12b, moving the X-carriage 13 in one direction while bringing the blades 12a and 12b into contact with the adjustment boards 31a and 32a, thereby performing dressing. Alternatively, the control unit 16 moves the blades 12a and 12b in the Y-axis direction, which moves them toward and away from each other, to perform truing. This improves the efficiency of adjusting the blades 12a and 12b.

[0081] (Variations of the initial dressing section and intermediate dressing section) As a further modification, the first adjustment unit 31 and the second adjustment unit 32 may be either an initial dressing unit or an intermediate dressing unit, and the third adjustment unit 33 and the fourth adjustment unit 34 may be the other dressing unit. Here, the first adjustment unit 31 and the second adjustment unit 32 are the initial dressing units, and the third adjustment unit 33 and the fourth adjustment unit 34 are the intermediate dressing units. The adjustment board used in the initial dressing unit is, for example, a grindstone with a first roughness, and the adjustment board used in the intermediate dressing unit is, for example, a grindstone with a second roughness. The grindstone with the second roughness is finer than the grindstone with the first roughness. Of course, the first adjustment unit 31 and the second adjustment unit 32 may be intermediate dressing units, and the third adjustment unit 33 and the fourth adjustment unit 34 may be initial dressing units. Furthermore, a precut wafer may be used as the adjustment board for the adjustment unit functioning as the initial dressing unit.

[0082] The initial dressing unit is an adjustment unit that adjusts the outer peripheral side surface when a new blade is first used. It is also an adjustment unit that adjusts the outer peripheral side surface to suppress surface wobble due to blade eccentricity. The intermediate dressing unit is an adjustment unit that performs dressing during use. Therefore, a coarser grinding stone is selected for the adjustment board used in the initial dressing unit than for the adjustment board used in the intermediate dressing unit. According to this modification, initial dressing can be performed on blades 12a and 12b simultaneously, and intermediate dressing can be performed on blades 12a and 12b simultaneously. This improves the adjustment efficiency of blades 12a and 12b.

[0083] Furthermore, the two adjusting boards used in the intermediate dressing section may be finer and of different coarseness than the adjusting boards used in the initial dressing section. In this case, when dressing each blade 12a, 12b in the intermediate dressing section, an appropriate adjusting board is selected from the two adjusting boards depending on the state of each blade 12a, 12b, and the selected adjusting board is used for dressing. In this example, the two adjusting boards functioning as the intermediate dressing section may dress the first blade 12a or may dress the second blade 12b. According to this example, each blade 12a, 12b can be dressed using a more appropriate adjusting board.

[0084] (All dressing modifications) As a further modification, all of the adjustment units 31 to 34 may be dressing units. In this case, the adjustment boards 31a to 34a may all use grindstones of the same roughness, or may all use grindstones of different roughness.

[0085] (When all the adjustment boards have the same roughness) When the roughnesses of the adjusting boards 31a to 34a in the adjusting units 31 to 34 are all the same, the first blade 12a is dressed by the adjusting board 31a of the first adjusting unit 31, and at the same time, the second blade 12b is dressed by the adjusting board 32a of the second adjusting unit 32. When the adjusting boards 31a and 32a reach the time for replacement, the first blade 12a is dressed by the adjusting board 33a of the third adjusting unit 33, and at the same time, the second blade 12b is dressed by the adjusting board 34a of the fourth adjusting unit 34. During this time, the adjusting board 31a of the first adjusting unit 31 and the adjusting board 32a of the second adjusting unit 32 are replaced with new ones.

[0086] Conversely, the first blade 12a is dressed by the adjustment board 33a of the third adjustment unit 33, and at the same time, the second blade 12b is dressed by the adjustment board 34a of the fourth adjustment unit 34. When the adjustment boards 33a and 34a reach the time for replacement, the first blade 12a is dressed by the adjustment board 31a of the first adjustment unit 31, and at the same time, the second blade 12b is dressed by the adjustment board 32a of the second adjustment unit 32. During this time, the adjustment board 33a of the third adjustment unit 33 and the adjustment board 34a of the fourth adjustment unit 34 are replaced with new ones.

[0087] (When the roughness of the adjustment boards is different) When the adjustment boards 31a to 34a in the adjustment units 31 to 34 all have different roughnesses, the operation is as follows.

[0088] On the X carriage 13, the first adjustment unit 31 and the second adjustment unit 32 are disposed at different positions in the X axis direction than the third adjustment unit 33 and the fourth adjustment unit 34. Therefore, the first blade 12a and the second blade 12b cannot be dressed simultaneously unless the combination of the first adjustment unit 31 and the second adjustment unit 32 and the combination of the third adjustment unit 33 and the fourth adjustment unit 34 are used. In other words, the combination of the first adjustment unit 31 and the third adjustment unit 33, the combination of the second adjustment unit 32 and the fourth adjustment unit 34, the combination of the first adjustment unit 31 and the fourth adjustment unit 34, and the combination of the second adjustment unit 32 and the third adjustment unit 33 cannot dress the first blade 12a and the second blade 12b simultaneously.

[0089] For example, consider a case where the adjustment unit suitable for adjusting a blade whose outer peripheral side surface is in a first state is first adjustment unit 31, and the adjustment unit suitable for adjusting a blade whose outer peripheral side surface is in a second state is second adjustment unit 32. Furthermore, consider a case where the adjustment unit suitable for adjusting a blade whose outer peripheral side surface is in a third state is third adjustment unit 33, and the adjustment unit suitable for adjusting a blade whose outer peripheral side surface is in a fourth state is fourth adjustment unit 34.

[0090] In such a case, if the state of the outer peripheral side surface of the first blade 12a is in the first state, the first blade 12a is dressed by the first adjustment unit 31. At this time, if the state of the outer peripheral side surface of the second blade 12b is in the second state, the second blade 12b is dressed simultaneously with the first blade 12a.

[0091] When the state of the outer peripheral side surface of the second blade 12b is other than the second state (i.e., the first, third, or fourth state), it is preferable not to simultaneously dress the second blade 12b and the first blade 12b. This is because it is not possible to select an adjustment unit optimal for the state of the outer peripheral side surface of the second blade 12b. Furthermore, not using an optimal adjustment board for dressing will accelerate wear and tear on the adjustment board. When the second blade 12b is in the first state, like the first blade 12a, the second blade 12b is dressed using the first adjustment unit 31 after dressing the first blade 12a. Furthermore, when the second blade 12b is in the third or fourth state, the second blade 12b is dressed using the third adjustment unit 33 or fourth adjustment unit 34 after dressing the first blade 12a. In this way, dressing using an adjustment unit optimal for the blade state can suppress wear and tear on the adjustment board and reduce the frequency of replacing the adjustment board.

[0092] Of course, even if the optimal adjustment unit cannot be selected for dressing the second blade 12b, the blade adjustment efficiency can be improved by dressing the second blade 12b simultaneously with the first blade 12a. For example, even if the dressing of the second blade 12b by the second adjustment unit 32 is not optimal, this does not prevent the second blade 12b from being dressed by the second adjustment unit 32, with priority given to improving the adjustment efficiency.

[0093] (Example of FIG. 18 (modification of FIG. 17)) In the example of FIG. 18, first adjustment unit 31 and second adjustment unit 32 are positioned close to Y center line 6. Third adjustment unit 33 and fourth adjustment unit 34 are positioned on one side 38 of first adjustment unit 31 and second adjustment unit 32 and inside first adjustment unit 31 and second adjustment unit 32 in the Y axis direction (the positions of third adjustment unit 33 and fourth adjustment unit 34 are unchanged from those shown in FIG. 17). First adjustment unit 31 and third adjustment unit 33 and second adjustment unit 32 and fourth adjustment unit 34 are arranged symmetrically on X carriage 13 with X center line 9 as the axis of symmetry. Note that in FIGS. 17 and 18, first adjustment unit 31 and third adjustment unit 33 and second adjustment unit 32 and fourth adjustment unit 34 do not have to be arranged symmetrically on X carriage 13 with X center line 9 as the axis of symmetry.

[0094] Each of the adjustment units 31 to 34 has a rectangular shape and, for example, the same shape and size. As an example, each of the adjustment stages 31b to 34b supporting each of the adjustment boards 31a to 34a has a similar shape but is slightly larger than each of the adjustment boards 31a to 34a. Corners 31c to 34c of each of the adjustment boards 31a to 34a, closest to the table 11, are located on an imaginary circle 36. Corners 31d to 34d of each of the adjustment stages 31b to 34b, closest to the table 11, are located on an imaginary circle 35 having a smaller diameter than the imaginary circle 36 and having a center O1 of rotation of the table 11 as its center. In the first adjustment unit 31 and the second adjustment unit 32, sides 31e and 32e of the adjustment stages 31b and 32b that are close to the Y center line 6 are located on the Y center line 6. Note that sides 31f and 32f of the adjustment boards 31a and 31b that are close to the Y center line 6 may also be located on the Y center line 6.

[0095] Note that the nearest corners 31c to 34c of the adjustment boards 31a to 34a do not have to be located on the imaginary circle 35, and the nearest corners 31d to 34d of the adjustment stages 31b to 34b do not have to be located on the imaginary circle 36. Furthermore, for example, the corners 31c to 34c of the adjustment boards 31a to 34a do not have to be located on the imaginary circle 36 outside the imaginary circle 35.

[0096] Even with the above configuration, it is possible to use the first adjustment unit 31 and the second adjustment unit 32 as dressing units and the third adjustment unit 33 and the fourth adjustment unit 34 as truing units, as in the first embodiment. Conversely, it is also possible to use the first adjustment unit 31 and the second adjustment unit 32 as truing units and the third adjustment unit 33 and the fourth adjustment unit 34 as dressing units. In such a case, the operation is similar to that in FIG. 17.

[0097] Furthermore, the first adjustment unit 31 and the second adjustment unit 32 can be used as initial dressing units, and the third adjustment unit 33 and the fourth adjustment unit 34 can be used as intermediate dressing units. Conversely, the first adjustment unit 31 and the second adjustment unit 32 can be used as intermediate dressing units, and the third adjustment unit 33 and the fourth adjustment unit 34 can be used as initial dressing units. In such cases, the same operation as in the case of FIG. 17 is possible.

[0098] Furthermore, the adjustment boards 31a to 34a can all have the same roughness, or the adjustment boards 31a to 34a can all have different roughnesses. In such cases, the same operation as in the case of FIG.

[0099] (Example in Figure 19) In the example of Fig. 19, adjustment units 31 to 34 are aligned in a row in the Y-axis direction. Specifically, adjustment units 31 to 34 are arranged on one side 38 at positions that do not overlap with table 11 in the X-axis direction. Adjustment units 31 to 34 are aligned in a straight line along Y-axis center line 5 that extends in the Y-axis direction. Third adjustment unit 33 and fourth adjustment unit 34 are positioned inside first adjustment unit 31 and second adjustment unit 32 in the Y-axis direction. First adjustment unit 31 and third adjustment unit 33 and second adjustment unit 32 and fourth adjustment unit 34 are aligned symmetrically on X-carriage 13 with X-center line 9 as the axis of symmetry.

[0100] Each of the adjustment units 31 to 34 has a rectangular shape, and for example, is the same shape and size. As an example, each of the adjustment stages 31b to 34b supporting each of the adjustment boards 31a to 34a has a similar shape but is slightly larger than each of the adjustment boards 31a to 34a. As an example, corners 33c and 34c of the third adjustment board 33a and the fourth adjustment board 34a, which are closest to the table 11, may be located on the imaginary circle 36. Furthermore, corners 33d and 34d of the adjustment stages 33b and 34b, which are closest to the table 11, may be located on the imaginary circle 35.

[0101] Furthermore, taking into consideration that components with a larger diameter than the table 11, such as a diaphragm, may be positioned on the table 11, the virtual circles 35 and 36 are set to a size that prevents interference between the components and the adjustment units 31 to 34 when the table is rotated.

[0102] Even with the above configuration, it is possible to use the first adjustment unit 31 and the second adjustment unit 32 as dressing units, and the third adjustment unit 33 and the fourth adjustment unit 34 as truing units, as in the first embodiment. Conversely, it is also possible to use the first adjustment unit 31 and the second adjustment unit 32 as truing units, and the third adjustment unit 33 and the fourth adjustment unit 34 as dressing units.

[0103] Furthermore, since the adjustment units 31 to 34 are aligned in a row in the Y-axis direction, the first adjustment unit 31 and the third adjustment unit 33 can be used as dressing units, and the second adjustment unit 32 and the fourth adjustment unit 34 can be used as truing units. Furthermore, the first adjustment unit 31 and the third adjustment unit 33 can be used as truing units, and the second adjustment unit 32 and the fourth adjustment unit 34 can be used as dressing units. In addition, the first blade 12a and the second blade 12b can be dressed or trued simultaneously. This improves the efficiency of adjusting the blades 12a and 12b.

[0104] Furthermore, the first adjustment unit 31 and the second adjustment unit 32 can be used as initial dressing units, and the third adjustment unit 33 and the fourth adjustment unit 34 can be used as intermediate dressing units. Conversely, the first adjustment unit 31 and the second adjustment unit 32 can be used as intermediate dressing units, and the third adjustment unit 33 and the fourth adjustment unit 34 can be used as initial dressing units.

[0105] Furthermore, since the adjustment units 31 to 34 are aligned in a row in the Y-axis direction, the first adjustment unit 31 and the third adjustment unit 33 can be used as initial dressing units, and the second adjustment unit 32 and the fourth adjustment unit 34 can be used as intermediate dressing units. Conversely, the first adjustment unit 31 and the third adjustment unit 33 can be used as intermediate dressing units, and the second adjustment unit 32 and the fourth adjustment unit 34 can be used as initial dressing units. The first blade 12a and the second blade 12b can be simultaneously subjected to initial dressing or intermediate dressing. This improves the efficiency of adjusting the blades 12a and 12b.

[0106] Furthermore, the roughness of the adjusting boards 31a to 34a can all be the same, or the roughness of the adjusting boards 31a to 34a can all be different. When the roughness of the adjusting boards 31a to 34a in the adjusting units 31 to 34 are all the same, the first blade 12a can be dressed by any one of the adjusting units 31 to 34. At the same time, the second blade 12b can be dressed by any one of the adjusting units 31 to 34 other than the adjusting unit used for the first blade 12a. In this way, since the adjusting units 31 to 34 are aligned in a row in the Y-axis direction, the blades 12a and 12b can be dressed simultaneously. Then, when it is time to replace the used adjusting board, the other adjusting unit will be used to dress the first blade 12a and the second blade 12b.

[0107] When the adjustment boards 31a to 34a are all made to have different roughnesses, the operation is as follows. On the X-carriage 13, adjustment units 31 to 34 are aligned in a row in the Y-axis direction. Therefore, the first blade 12a and the second blade 12b can be simultaneously dressed using different adjustment units. When the first blade 12a and the second blade 12b are both in the same state, one blade can be dressed using the optimal adjustment unit. At this time, the other blade can be left undressed because the optimal adjustment unit is in use, or it can be dressed using the next most appropriate adjustment unit.

[0108] For example, assume that the state of the outer peripheral side surfaces of the first blade 12a and the second blade 12b is a first state, and the first adjustment unit 31 is the optimal adjustment unit for the first state. In this case, the first blade 12a is dressed by the first adjustment unit 31. At this time, if the second blade 12b is in the first state, the first adjustment unit 31 is in use, so dressing is not performed. Alternatively, the next most appropriate adjustment unit is selected, and dressing is performed by the selected adjustment unit. Also, if the first blade 12a is in the first state and the second blade 12b is in the second state, the first blade 12a can be dressed by the first adjustment unit 31 while the second blade 12b is dressed by the second adjustment unit 32.

[0109] In this way, by dressing the blade at an adjustment section that is optimal for the blade condition, wear on the adjustment board can be reduced. Also, by dressing the second blade 12b simultaneously with the first blade 12a, the blade adjustment efficiency can be improved.

[0110] In the example of Figure 19, three of the adjustment units 31 to 34 may be configured to use adjustment boards with the same roughness. Even in this configuration, an optimal adjustment unit may be used for one blade, and other blades may not be dressed if there is no optimal adjustment unit. Alternatively, any adjustment unit may be selected from the three adjustment units with the same roughness, and dressing may be performed using the selected adjustment unit.

[0111] In FIG. 19, the first adjustment unit 31 and the third adjustment unit 33 and the second adjustment unit 32 and the fourth adjustment unit 34 do not have to be arranged symmetrically on the X carriage 13 with the X center line 9 as the axis of symmetry.

[0112] It is clear that the technical scope of the present invention is not limited to these embodiments, but extends to the inventions set forth in the claims and their equivalents. (Addendum) Other technical ideas that can be understood from the above-described embodiment and modifications will be described.

[0113] When the dresser board of Patent Document 1 is subjected to flat dressing multiple times, cutting trace areas are formed radially. As the cutting trace areas increase and the non-cutting trace areas decrease, flat dressing becomes difficult, and the dresser board is replaced. Therefore, even in the replaced dresser board, there will be some non-cutting trace areas that allow flat dressing. For this reason, effective use of the dresser board is desired. According to the invention described in the appendix below, the truing board can be used effectively.

[0114] (Appendix 1) a table for holding a wafer; a blade that is rotated by a spindle to cut the wafer; a ring-shaped truing board for grinding the outer peripheral surface of the blade, the truing board being rotatably disposed at a position different from the table; a truing rotation unit that rotates the truing board; a Y-axis moving unit that moves the blade in a radial direction of the truing board; a control unit that controls the truing rotation unit and the Y-axis movement unit, The control unit rotates the blade while rotating the truing board during truing, and moves the blade in the radial direction of the truing board. Grinding equipment.

[0115] (Appendix 2) the blade is a first blade, the spindle is a first spindle; the truing board is a first truing board, the truing rotation portion is a first truing rotation portion, the Y-axis moving unit is a first Y-axis moving unit, a second blade that is rotated by a second spindle to cut the wafer; A ring-shaped second truing board for grinding the outer peripheral surface of the second blade, the second truing board being rotatably disposed at a position different from the table; a second truing rotating unit that rotates the second blade; a second Y-axis moving unit that moves the second spindle in a radial direction of the second truing board, The control unit rotates the second blade while rotating the second truing board during truing of the first blade, and moves in a radial direction of the second truing board. 10. The grinding apparatus of claim 1.

[0116] (Appendix 3) the blade is a first blade, the spindle is a first spindle; the Y-axis moving unit is a first Y-axis moving unit, a second blade that is rotated by a second spindle to cut the wafer; a second Y-axis moving unit that moves the second blade in a radial direction of the truing board, the truing board is a board disposed between the first blade and the second blade, The control unit rotates the second blade while rotating the truing board during truing of the first blade, and moves the first blade and the second blade in a radial direction of the truing board in a direction toward and away from each other. 10. The grinding apparatus of claim 1.

[0117] (Appendix 4) The first blade and the second blade contact an upper surface of the truing board, the upper surface being a flat surface, The control unit rotates the truing board half a turn while the first blade and the second blade move by the thickness of each blade. 4. The grinding apparatus of claim 3.

[0118] (Appendix 5) The upper surface of the truing board has a first annular region and a second annular region having different heights, The first blade contacts the first annular region and the second blade contacts the second annular region. 4. The grinding apparatus of claim 3.

[0119] (Appendix 6) While rotating a ring-shaped truing board that grinds the outer peripheral surface of the blade, the blade that cuts the wafer is rotated and the blade is moved in the radial direction of the truing board. Truing method. [Explanation of symbols]

[0120] 11...table, 12a, 12b...blade, 12c, 12d...spindle, 13...X carriage, 14a, 14b...Y-axis moving part, 15a, 15b...Z-axis moving part, 17a, 17b...dressing part, 17c, 17d...dressing board, 17e, 17f...dressing stage, 17g, 17h...dressing marks, 18a, 18b...truing part, 18c, 18d...truing board, 18e, 18f...truing stage, 18g, 18h...truing drive part, 19a, 19b...truing ing marks, 21... truing portion, 21a... truing board, 21b... truing stage, 21c... truing drive portion, 22a, 22b... area, 23... X-axis moving portion, 24a, 24b... truing marks, 25... top surface, 26a... first annular region, 26b... second annular region, 31-34... adjustment portion, 31a-34a... adjustment board, 31b-34b... adjustment board, 31b-34b... adjustment stage, 31c-34c... corner, 31d-34d... corner, 35... virtual circle, 36... virtual circle, 37... supply side, 38... one side.

Claims

1. a table for holding a wafer; one or more blades that are rotated by a spindle to cut the wafer; three or more adjustment units each having an area for adjusting the blade; a moving unit that moves the adjustment unit and the blade relatively; A grinding device comprising:

2. The moving unit is an X-axis moving unit that is provided with the table and the adjustment unit and is movable in the X-axis direction; a Y-axis moving unit that moves the blade in the Y-axis direction; The grinding device according to claim 1 .

3. The three or more adjustment units are a first adjustment unit and a second adjustment unit aligned in the Y-axis direction; the first adjustment unit and the second adjustment unit are aligned in the Y axis direction at different positions in the X axis direction, and include a pair of third adjustment unit and fourth adjustment unit located more inward in the Y axis direction than the first adjustment unit and the second adjustment unit. The grinding device according to claim 2 .

4. The three or more adjustment units are Lined up in the Y-axis direction The grinding device according to claim 2 .

5. The three or more adjustment units are Located on one side of the center of the table, The one side is opposite to the supply side of cutting water supplied to the wafer. The grinding device according to claim 4.

6. the adjustment unit is a dressing unit for dressing the blade, The dressing portion includes a first dressing portion having an area with a first roughness, and a second dressing portion having an area with a second roughness that is finer than the first roughness.

6. A grinding apparatus according to claim 1.

7. The three or more adjustment units are All of them are dressing parts for dressing the blade, The dressing portions may all have the same roughness or all have different roughnesses.

6. A grinding apparatus according to claim 1.

8. The adjustment unit includes a dressing unit that dresses the blade and a truing unit that trues the blade.

6. A grinding apparatus according to claim 1.

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