Semiconductor device

Abstract

To provide a semiconductor device with a novel configuration.SOLUTION: A semiconductor device includes a first transistor, a second transistor, a third transistor, and a capacitor. The first transistor has a function of holding a first potential in accordance with first data supplied to a gate of the third transistor through the first transistor when the first transistor is off. The capacitor has a function of changing the first potential held in the gate of the third transistor to a second potential in accordance with a change in the potential in accordance with the second data supplied to the one electrode. The second transistor has a function of setting the potential of one of a source and a drain of the third transistor to the potential corresponding to the potential of the gate of the second transistor. The third transistor has a function of supplying an output current corresponding to the potential of the gate of the third transistor to the other of the source and the drain. The output current is a current that flows when the third transistor operates in a subthreshold region.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] This specification describes semiconductor devices and the like.

[0002] Note that one embodiment of the present invention is not limited to the above technical field. Examples of the technical field of one embodiment of the present invention disclosed in this specification and the like include a semiconductor device, an imaging device, a display device, a light-emitting device, a power storage device, a memory device, a display system, an electronic device, a lighting device, an input device, an input / output device, a driving method thereof, or a manufacturing method thereof. [Background technology]

[0003] Currently, active development is underway on integrated circuits that mimic the workings of the human brain. These integrated circuits incorporate the workings of the brain as electronic circuits, and have circuits that correspond to the "neurons" and "synapses" of the human brain. For this reason, such integrated circuits are sometimes called "neuromorphic," "brainmorphic," or "brain-inspired." These integrated circuits have a non-von Neumann architecture, and are expected to be able to perform parallel processing with significantly less power consumption than von Neumann architectures, which consume more power as processing speed increases.

[0004] An information processing model that mimics a neural network with "neurons" and "synapses" is called an artificial neural network (ANN). By using an artificial neural network, it is possible to make inferences with accuracy comparable to or even exceeding that of humans. In an artificial neural network, the main operation is the weighted sum of neuron outputs, i.e., the sum-of-products operation.

[0005] Non-Patent Document 1 proposes a multiply-and-accumulate circuit using non-volatile memory elements. In this multiply-and-accumulate circuit, each memory element utilizes the subthreshold operation of a transistor having silicon in its channel formation region to output a current corresponding to the multiplication of data corresponding to a multiplier stored in each memory element and input data corresponding to a multiplicand. Furthermore, the multiply-and-accumulate circuit obtains data corresponding to the multiply-and-accumulate operation by summing the currents output by the memory elements in each column. Because this multiply-and-accumulate circuit has internal memory elements, it is not necessary to read or write data from an external memory during multiplication and addition. This reduces the number of data transfers due to reads and writes, which is expected to reduce power consumption. [Prior art documents] [Non-patent literature]

[0006] [Non-Patent Document 1] X. Guo et al., “Fast, Energy-Efficient, Robust, and Reproducible Mixed-Signal Neuromorphic Classifier Based on Embedded NOR Flash Memory Technology” IEDM2017, pp.151-154. Summary of the Invention [Problem to be solved by the invention]

[0007] When the above-described multiply-accumulate circuit performs an operation using data stored in an external memory, a data signal or potential is applied to each wiring when writing and reading data. In the transistor used to perform the operation, the voltage applied to the drain terminal varies when writing and reading data. The variation in the drain terminal voltage causes a variation in transistor characteristics, such as the threshold voltage, which may reduce the accuracy of the read data.

[0008] Furthermore, when multiply-accumulate operations are performed in digital circuits, there is a risk of power consumption increasing due to an increase in through-current caused by miniaturization of transistors. In repetitive arithmetic operations such as multiply-accumulate operations, it is important to improve not only the processing speed but also the processing capacity per unit of power.

[0009] An object of one embodiment of the present invention is to provide a semiconductor device with improved accuracy of read data.An object of one embodiment of the present invention is to provide a semiconductor device with excellent arithmetic processing capability per unit power.An object of one embodiment of the present invention is to provide a semiconductor device with a novel structure capable of performing product-sum operations.

[0010] Note that one embodiment of the present invention does not necessarily have to solve all of the above problems, but it is sufficient that it can solve at least one of the problems. Furthermore, the description of the above problems does not preclude the existence of other problems. Problems other than these will become apparent from the description in the specification, claims, drawings, etc., and other problems can be extracted from the description in the specification, claims, drawings, etc. [Means for solving the problem]

[0011] One embodiment of the present invention is a semiconductor device including a first transistor, a second transistor, a third transistor, and a capacitor. When the first transistor is in an off state, the first transistor holds a first potential corresponding to first data provided to a gate of the third transistor via the first transistor. The capacitor changes the first potential held at the gate of the third transistor to a second potential in response to a change in potential corresponding to second data provided to one electrode of the capacitor. The second transistor sets a potential of one of a source and a drain of the third transistor to a potential corresponding to a potential of the gate of the second transistor. The third transistor flows an output current corresponding to the potential of the gate of the third transistor to the other of the source and the drain. The output current is a current that flows when the third transistor operates in a subthreshold region.

[0012] One embodiment of the present invention is a semiconductor device including a first transistor, a second transistor, a third transistor, and a capacitor. When the first transistor is in an off state, the first transistor holds a first potential corresponding to first data provided to a gate of the third transistor via the first transistor. The capacitor changes the first potential held at the gate of the third transistor to a second potential in response to a change in potential corresponding to second data provided to one electrode of the capacitor. The second transistor sets a potential at one of a source or a drain of the third transistor to a potential corresponding to a potential at the gate of the second transistor. The third transistor flows an output current corresponding to the potential at the gate of the third transistor to the other of the source or the drain. The output current is a current that flows when the third transistor operates in a subthreshold region. Each of the second transistor and the third transistor has a back gate. The potential provided to the back gate is the potential of the other of the source or the drain of the third transistor.

[0013] One embodiment of the present invention is a semiconductor device including a first transistor, a second transistor, a third transistor, and a capacitor. When the first transistor is in an off state, the first transistor holds a first potential corresponding to first data provided to a gate of the third transistor via the first transistor. The capacitor changes the first potential held at the gate of the third transistor to a second potential in response to a change in potential corresponding to second data provided to one electrode of the capacitor. The second transistor sets a potential at one of a source or a drain of the third transistor to a potential corresponding to the potential of the gate of the second transistor. The third transistor flows an output current corresponding to the potential of the gate of the third transistor to the other of the source or the drain. The output current is a current that flows when the third transistor operates in a subthreshold region. The second transistor and the third transistor each have a back gate, and a potential applied to the back gate is lower than a potential of the other of the source or the drain of the third transistor.

[0014] In one embodiment of the present invention, the first transistor is preferably a semiconductor device including a semiconductor layer having a metal oxide in a channel formation region.

[0015] In one embodiment of the present invention, the metal oxide preferably contains In, Ga, and Zn.

[0016] In one embodiment of the present invention, the second transistor and the third transistor are preferably semiconductor devices each having a semiconductor layer containing silicon in a channel formation region.

[0017] One embodiment of the present invention is an electronic device that includes the semiconductor device of any of the above embodiments of the present invention and a housing, and performs calculations on a neural network using the semiconductor device.

[0018] Other aspects of the present invention will be described in the following embodiments and in the drawings. [Effects of the Invention]

[0019] According to one embodiment of the present invention, a semiconductor device capable of reading data with improved accuracy can be provided. According to one embodiment of the present invention, a semiconductor device having excellent arithmetic processing performance per unit power can be provided. According to one embodiment of the present invention, a semiconductor device capable of performing product-sum operations with a novel structure can be provided.

[0020] The description of multiple effects does not preclude the existence of other effects. Furthermore, one embodiment of the present invention does not necessarily have all of the exemplified effects. Furthermore, problems, effects, and novel features of one embodiment of the present invention other than those described above will become apparent from the description and drawings of this specification. [Brief explanation of the drawings]

[0021] [Figure 1] FIG. 1 is a diagram illustrating an example of the configuration of a semiconductor device. [Figure 2] 2A and 2B are diagrams illustrating an example of the configuration of a semiconductor device. [Figure 3] 3A and 3B are diagrams illustrating an example of the configuration of a semiconductor device. [Figure 4] 4A, 4B, 4C, and 4D are diagrams illustrating configuration examples of a semiconductor device. [Figure 5] FIG. 5 is a diagram illustrating an example of the configuration of a semiconductor device. [Figure 6] 6A and 6B are diagrams illustrating a configuration example of a semiconductor device. [Figure 7] FIG. 7 is a diagram illustrating an example of the configuration of an arithmetic circuit. [Figure 8] 8A, 8B, and 8C are diagrams illustrating configuration examples of arithmetic circuits. [Figure 9] 9A, 9B, 9C, and 9D are diagrams for explaining configuration examples of arithmetic circuits. [Figure 10] 10A, 10B, and 10C are diagrams for explaining configuration examples of arithmetic circuits. [Figure 11] FIG. 11 is a timing chart illustrating an example of the configuration of the arithmetic circuit. [Figure 12] 12A and 12B are diagrams illustrating a neural network. [Figure 13] FIG. 13 is a diagram illustrating an example of the configuration of a transistor. [Figure 14] 14A and 14B are diagrams showing examples of the configuration of a transistor. [Figure 15] FIG. 15 is a diagram illustrating an example of the configuration of an integrated circuit. [Figure 16] 16A and 16B are diagrams illustrating an application example of an integrated circuit. [Figure 17] 17A and 17B are diagrams illustrating an application example of an integrated circuit. [Figure 18] 18A, 18B and 18C are diagrams illustrating an application example of an integrated circuit. [Figure 19] FIG. 19 is a diagram illustrating an application example of an integrated circuit. [Figure 20]20A, 20B, and 20C are diagrams illustrating configuration examples of semiconductor devices. [Figure 21] 21A, 21B, and 21C are diagrams illustrating the simulation results of the semiconductor device. [Figure 22] 22A, 22B, and 22C are diagrams illustrating the simulation results of the semiconductor device. [Figure 23] FIG. 23 is a diagram illustrating the arithmetic unit. [Figure 24] 24A and 24B are diagrams illustrating a calculation device. [Figure 25] FIG. 25 is a diagram illustrating the arithmetic unit. [Figure 26] 26A and 26B are diagrams illustrating the arithmetic unit. [Figure 27] 27A and 27B are diagrams illustrating the arithmetic unit. [Figure 28] FIG. 28 is a diagram illustrating the arithmetic unit. [Figure 29] FIG. 29 is a diagram illustrating the arithmetic unit. DETAILED DESCRIPTION OF THE INVENTION

[0022] The following describes an embodiment of the present invention. However, one embodiment of the present invention is not limited to the following description, and it will be readily understood by those skilled in the art that various changes in form and details can be made without departing from the spirit and scope of the present invention. Therefore, one embodiment of the present invention should not be interpreted as being limited to the description of the embodiment shown below.

[0023] In this specification, the ordinal numbers "first," "second," and "third" are used to avoid confusion between components. Therefore, they do not limit the number of components. Furthermore, they do not limit the order of the components. For example, a component referred to as "first" in one embodiment of this specification may be a component referred to as "second" in another embodiment or in the claims. For example, a component referred to as "first" in one embodiment of this specification may be omitted in another embodiment or in the claims.

[0024] In the drawings, the same elements or elements having similar functions, elements made of the same material, or elements formed at the same time may be given the same reference numerals, and repeated description thereof may be omitted.

[0025] In this specification, for example, the power supply potential VDD may be abbreviated to potential VDD, VDD, etc. This also applies to other components (for example, signals, voltages, circuits, elements, electrodes, wiring, etc.).

[0026] Furthermore, when the same reference numeral is used for multiple elements, and particularly when it is necessary to distinguish between them, the reference numeral may be accompanied by an identification symbol such as "_1", "_2", "_n", or "_m,n". For example, the second wiring GL is written as wiring GL_2.

[0027] (Embodiment 1) The structure, operation, and the like of a semiconductor device according to one embodiment of the present invention will be described.

[0028] In this specification and the like, a semiconductor device refers to any device that can function by utilizing semiconductor characteristics. Semiconductor elements such as transistors, semiconductor circuits, arithmetic devices, and memory devices are all embodiments of semiconductor devices. Display devices (liquid crystal display devices, light-emitting display devices, etc.), projection devices, lighting devices, electro-optical devices, power storage devices, memory devices, semiconductor circuits, imaging devices, electronic devices, and the like may be considered to include semiconductor devices.

[0029] FIG. 1 is a diagram illustrating a semiconductor device 10 according to one embodiment of the present invention.

[0030] The semiconductor device 10 has a reference cell 21 and an operation cell 31. The reference cell 21 has a transistor 22, a transistor 23, a transistor 24, and a capacitor 25. The operation cell 31 has a transistor 32, a transistor 33, a transistor 34, and a capacitor 35. As shown in FIG. 1 , the transistors and capacitors of the reference cell 21 and the operation cell 31 are connected to at least one of a wiring WSL, a wiring XCL, a wiring VBL, a wiring WCL, and a wiring that applies a ground potential.

[0031] The reference cell 21 has the function of causing a set current to flow when writing data and when reading data, thereby causing the calculation cell 31 to perform calculation operations. Specifically, when writing data, the reference cell 21 causes a reference current to flow, thereby maintaining a reference voltage within the reference cell 21, and then, when reading data, causes a current corresponding to the input data (X) given to the calculation cell 31 to flow through the reference cell 21, thereby controlling the current flowing through the calculation cell 31. Note that the reference cell 21 may also be simply referred to as a cell.

[0032] Next, the connections within the reference cell 21 will be described.

[0033] The gate of the transistor 22 is connected to the wiring WSL. One of the source or the drain of the transistor 22 is connected to one of the source or the drain of the transistor 23 and the wiring XCL. The other of the source or the drain of the transistor 22 is connected to the gate of the transistor 24 and one electrode of the capacitor 25. When writing data, the transistor 22 is turned on to write a reference voltage to a holding node (the gate of the transistor 24) in the reference cell 21, and is turned off to hold the reference voltage in the reference cell 21.

[0034] The gate of the transistor 23 is connected to the wiring VBL. The back gate of the transistor 23 is connected to the other of the source and the drain of the transistor 24. The one of the source and the drain of the transistor 23 is connected to the one of the source and the drain of the transistor 22 and the wiring XCL. The other of the source and the drain of the transistor 23 is connected to the one of the source and the drain of the transistor 24. The transistor 23 sets the potential of the one of the source and the drain of the transistor 24 to a potential corresponding to the potential of the gate of the transistor 23.

[0035] The gate of the transistor 24 is connected to the other of the source or drain of the transistor 22 and one electrode of the capacitor 25. The node to which the gate of the transistor 24, the other of the source or drain of the transistor 22, and one electrode of the capacitor 25 are connected is also referred to as a retention node. The retention node can be set to a potential corresponding to the current flowing through the transistor 24. The backgate of the transistor 24 is connected to the other of the source or drain of the transistor 24. The other of the source or drain of the transistor 24 is connected to a wiring that applies a low power supply potential (e.g., ground potential). The wiring that applies the ground potential functions as a wiring for flowing current between the source and drain of the transistor 24. The other of the source or drain of the transistor 24 is connected to the backgate of the transistor 23 and the backgate of the transistor 24. A fixed potential is applied to the backgate of the transistor 23 and the backgate of the transistor 24, thereby stabilizing the transistor characteristics of the transistors 23 and 24. The transistor 24 flows an output current corresponding to the potential of the gate of the transistor 24 to the other of the source or drain.

[0036] One electrode of the capacitor 25 is connected to the other of the source or drain of the transistor 22 and the gate of the transistor 24. The other electrode of the capacitor 25 is connected to the wiring XCL. When one electrode of the capacitor 25 is in an electrically floating state, the potential of one electrode of the capacitor 25 changes in response to a change in the potential of the other electrode.

[0037] When writing data, the arithmetic cell 31 has the function of passing a current corresponding to the weight data (W) held in the arithmetic cell 31, thereby holding a voltage corresponding to the current. When reading data, the arithmetic cell 31 has the function of passing a current corresponding to the calculation of the weight data and input data, by boosting the voltage held when writing data according to the current flowing through the reference cell 21. The weight data may be referred to as first data, and the input data may be referred to as second data. The arithmetic cell 31 may also be simply referred to as a cell. The weight data may be data (weight data) corresponding to weight parameters used in product-sum calculations of an artificial neural network, for example.

[0038] Next, the connections within the operation cell 31 will be described.

[0039] A gate of the transistor 32 is connected to the wiring WSL. One of the source or the drain of the transistor 32 is connected to one of the source or the drain of the transistor 33 and the wiring WCL. The other of the source or the drain of the transistor 32 is connected to the gate of the transistor 34 and one electrode of the capacitor 35. When writing data, the transistor 32 is turned on to write a voltage corresponding to the weight data into the arithmetic cell 31, and is turned off to hold the voltage corresponding to the weight data in the arithmetic cell 31.

[0040] The gate of the transistor 33 is connected to the wiring VBL. The back gate of the transistor 33 is connected to the other of the source and the drain of the transistor 34. The one of the source and the drain of the transistor 33 is connected to the one of the source and the drain of the transistor 32 and the wiring WCL. The other of the source and the drain of the transistor 33 is connected to the one of the source and the drain of the transistor 34. The transistor 33 sets the potential of the one of the source and the drain of the transistor 34 to a potential corresponding to the potential of the gate of the transistor 33.

[0041] The gate of the transistor 34 is connected to the other of the source or drain of the transistor 32 and one electrode of the capacitor 35. Note that a node to which the gate of the transistor 34, the other of the source or drain of the transistor 32, and one electrode of the capacitor 35 are connected is also referred to as a retention node. The back gate of the transistor 34 is connected to the other of the source or drain of the transistor 34. The other of the source or drain of the transistor 34 is connected to a wiring that applies a low power supply potential (e.g., ground potential). The wiring that applies the ground potential functions as a wiring for flowing current between the source and drain of the transistor 34. The other of the source or drain of the transistor 34 is connected to the back gate of the transistor 33 and the back gate of the transistor 34. A fixed potential is applied to the back gate of the transistor 33 and the back gate of the transistor 34, thereby stabilizing the transistor characteristics of the transistors 33 and 34. The transistor 34 flows an output current to the other of the source or drain according to the potential of the gate of the transistor 34.

[0042] One electrode of the capacitor 35 is connected to the other of the source or drain of the transistor 32 and the gate of the transistor 34. The other electrode of the capacitor 35 is connected to the wiring XCL. When one electrode of the capacitor 35 is in an electrically floating state, the potential of one electrode of the capacitor 35 changes in response to a change in the potential of the other electrode.

[0043] Next, the transistors included in the reference cell 21 and the operation cell 31 will be described.

[0044] Unless otherwise specified, the transistors 24 and 34 operate in the subthreshold region. The drain current Id of a transistor operating in the subthreshold region can be expressed by equation (1).

[0045]

number

[0046] In equation (1), I0 is V g =V th The drain current when , q is the elementary charge, V g is the gate voltage, V th is the threshold voltage, η is a coefficient determined by the device structure, etc., and k B is the Boltzmann constant, and T is temperature. As shown in equation (1), the drain current Id of a transistor operating in the subthreshold region does not depend on the drain voltage. The current flowing through transistors 24 and 34 is the same as the current flowing when they operate in the subthreshold region. The current in the subthreshold region of transistors 24 and 34 can reduce the influence of variations in the drain voltage. This can improve the accuracy of the data obtained by calculation.

[0047] In this specification, the subthreshold region refers to the region where the gate voltage is lower than the threshold voltage in a graph showing the gate voltage (Vg)-drain current (Id) characteristics of a transistor. Alternatively, the subthreshold region refers to the region where current flows due to carrier diffusion, which deviates from the gradual channel approximation (a model that only considers drift current). Alternatively, the subthreshold region refers to the region where the drain current increases exponentially with increasing gate voltage. Alternatively, the subthreshold region includes the regions that can be considered as the regions described above.

[0048] The drain current when a transistor operates in the subthreshold region is called the subthreshold current. The subthreshold current increases exponentially with gate voltage, regardless of drain voltage. Circuit operation using the subthreshold current can reduce the effect of drain voltage variations.

[0049] When the transistor 32 and the transistor 22 are turned off, they can hold potentials of the gates of the transistors 24 and 34. Specifically, they can hold potentials corresponding to data applied to the gate of the transistor 34 through the transistor 32. As an example, the transistors 32 and 22 are preferably OS transistors. For example, the channel formation regions of the transistors 32 and 22 are preferably oxides containing at least one of indium, gallium, and zinc. Alternatively, an oxide containing at least one of indium, an element M (examples of the element M include one or more elements selected from the group consisting of aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium) and zinc may be used.

[0050] The OS transistor has an extremely small current flowing between the source and drain in an off state, i.e., a leakage current. Using an OS transistor as the transistor 32 and / or the transistor 22 can suppress the leakage current of the transistor 32 and / or the transistor 22, thereby reducing the power consumption of the semiconductor device 10. Specifically, fluctuations in the potentials held at the gates of the transistors 24 and 34 can be significantly reduced, thereby reducing the number of refresh operations for the potentials. Furthermore, reducing the number of refresh operations can reduce the power consumption of the semiconductor device 10. Furthermore, by significantly reducing the leakage current from the retention node to the wiring WCL or XCL, the cell can retain the potential of the retention node for a long time.

[0051] In addition, when the gate voltage is lower than the threshold voltage of the OS transistor, the -20 Less than A, 1 x 10 -22 Less than A or 1 x 10 -24The OS transistor can pass an extremely small drain current per 1 μm of channel width, less than 1.0 × 10 A. When the gate voltage is the threshold voltage of the transistor, -8 A or less, 1.0×10 -12 A or less, or 1.0 x 10 -15 A or less per 1 μm of channel width can flow. Therefore, OS transistors can flow subthreshold currents of different magnitudes within the range of gate voltages that operate in the subthreshold region. In other words, OS transistors can operate in a wide range of gate voltages in the subthreshold region. Specifically, if the threshold voltage of an OS transistor is V th In the subthreshold region, (V th -1.0V) or more V th Below, or (V th -0.5V) or more V th The circuit can operate using gate voltages in the following voltage ranges:

[0052] On the other hand, Si transistors have a large off-state current and a narrow range of gate voltages for operation in the subthreshold region.When utilizing subthreshold current, OS transistors can operate in circuits over a wider range of gate voltages than Si transistors.

[0053] Because the band gap of metal oxides that function as oxide semiconductors is 2.5 eV or more, OS transistors have extremely small off-state currents. For example, when the source-drain voltage is 3.5 V and the temperature is room temperature (25°C), the off-state current per 1 μm of channel width is 1×10 -20 Less than A, 1 x 10 -22 Less than A or 1 x 10 -24 Therefore, the OS memory has an extremely small amount of charge leaking from the retention node through the OS transistor.

[0054] Metal oxides suitable for OS transistors include Zn oxide, Zn-Sn oxide, Ga-Sn oxide, In-Ga oxide, In-Zn oxide, and In-M-Zn oxide (where M is Ti, Ga, Y, Zr, La, Ce, Nd, Sn, or Hf). Metal oxides using Ga as M are particularly preferred for OS transistors because they can provide transistors with excellent electrical properties, such as field-effect mobility, by adjusting the ratio of elements. Furthermore, the oxide containing indium and zinc may contain one or more elements selected from the group consisting of aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.

[0055] To improve the reliability and electrical characteristics of OS transistors, the metal oxide used in the semiconductor layer is preferably a metal oxide having a crystalline portion, such as CAAC-OS, CAC-OS, or nc-OS. CAAC-OS is an abbreviation for c-axis-aligned crystalline oxide semiconductor. CAC-OS is an abbreviation for cloud-aligned composite oxide semiconductor. nc-OS is an abbreviation for nanocrystalline oxide semiconductor.

[0056] CAAC-OS has a c-axis orientation and a distorted crystal structure in which multiple nanocrystals are connected in the ab-plane direction. The distorted crystal structure refers to the change in the lattice orientation between regions with a uniform lattice arrangement and regions with a different uniform lattice arrangement in the regions where multiple nanocrystals are connected.

[0057] CAC-OS has the function of both allowing electrons (or holes) to flow and preventing electrons from flowing. By separating the electron flow function from the electron blocking function, both functions can be maximized. In other words, using CAC-OS in the channel formation region of an OS transistor can achieve both a high on-state current and an extremely low off-state current.

[0058] OS transistors are accumulation-type transistors that use electrons as majority carriers. Therefore, they are less susceptible to drain-induced barrier lowering (DIBL), a short-channel effect, compared to inversion-type transistors with pn junctions. In other words, OS transistors have higher resistance to short-channel effects than Si transistors.

[0059] Furthermore, by using OS transistors for the transistors 33, 34, and the transistors 23, 24, the transistors can operate over a wide current range in the subthreshold region, thereby reducing current consumption. Furthermore, by using OS transistors for the transistors 33, 34, and the transistors 23, 24, the transistors can be manufactured simultaneously with the transistors 22 and 32, which may shorten the manufacturing process of the arithmetic circuit. The transistors 33, 34, and the transistors 23, 24 can be transistors containing silicon in their channel formation regions (hereinafter referred to as Si transistors) other than OS transistors. Examples of silicon that can be used include amorphous silicon (sometimes referred to as hydrogenated amorphous silicon), microcrystalline silicon, polycrystalline silicon, and single crystal silicon.

[0060] When the transistors 33, 34 and the transistors 23, 24 are Si transistors, it is preferable to provide a structure that functions as a back gate of the transistor, for example, a structure that provides an electrode or a body electrode, and the potential applied to the back gate is the ground potential applied to the other of the source or drain of the transistors 34, 24. By using such a structure, the electrical characteristics of the transistors 33, 34 and the transistors 23, 24 can be stabilized.

[0061] 1 have back gates, the semiconductor device of one embodiment of the present invention is not limited to this. For example, the transistor 22 and the transistor 32 shown in FIG. 1 may have a structure without a back gate, that is, a single-gate transistor. The potential or signal applied to the back gate can be a fixed potential such as ground potential or a signal applied to the gate.

[0062] 1 are n-channel transistors, the semiconductor device of one embodiment of the present invention is not limited to this. For example, some or all of the transistors 32 to 34 and 22 to 24 may be replaced with p-channel transistors. Note that when some or all of the transistors 32 to 34 and 22 to 24 are replaced with p-channel transistors, the voltage applied to the wiring may be changed as necessary so that the transistors 32 to 34 and 22 to 24 operate as desired.

[0063] The above-described examples of changes in the structure and polarity of the transistors are not limited to the transistors 32 to 34 and the transistors 22 to 24. For example, the structure, polarity, etc. of transistors described elsewhere in the specification or illustrated in other drawings may also be changed in the same way.

[0064] Next, the wiring WSL, the wiring XCL, the wiring VBL, and the wiring WCL connected to the reference cell 21 and the calculation cell 31 will be described.

[0065] The wiring WSL is supplied with a signal that controls the on / off of the transistors 22 and 32, which function as switches. The wiring WSL functions as a write word line when writing data to the reference cell 21 and the operation cell 31. Data is written to the reference cell 21 and the operation cell 31 by applying a current or voltage corresponding to the data to be written to the wiring XCL or the wiring WCL. The data is written by turning on the transistors 22 and 32. In this case, the wiring WCL is set to H level (high level potential). Furthermore, in the reference cell 21 and the operation cell 31, the transistors 22 and 32 are controlled to be turned off, so that the data is held in the reference cell 21 and the operation cell 31. In this case, the wiring WCL is set to L level (low level potential).

[0066] The wiring WCL supplies a current amount (weight current or current I Wut ) or a function of applying a constant potential Vd to cause a current to flow according to the potential held in the processing cell.

[0067] The wiring XCL supplies a current amount (reference current or current I Xut ), or the amount of current (input current or current I X ) has the function of flowing.

[0068] The wiring VBL is a wiring to which a constant potential Vb is applied. The constant potential Vb is a potential for fixing the potentials of the drain terminals of the transistors 24 and 34 in the reference cell 21 and the calculation cell 31. By applying the constant potential Vb to the gates of the transistors 23 and 33, it is possible to stabilize the transistor characteristics, such as the threshold voltages of the transistors 24 and 34, in response to fluctuations in the potential of the wiring WCL.

[0069] In particular, when transistor 34 and transistor 24 are short-channel transistors with short channel lengths, the threshold voltage decreases due to drain-induced barrier lowering (DIBL), causing the drain current Id to depend on the drain voltage Vd. Therefore, it is effective to apply a constant potential Vb to the gates of transistors 23 and 33, thereby reducing the change in the drain voltage of transistors 24 and 34. This configuration can improve the accuracy of data obtained by calculation.

[0070] Next, a configuration including a plurality of reference cells 21 and calculation cells 31 in Fig. 1 will be described with reference to Fig. 2A and Fig. 2B. Fig. 2A shows an overview of the operation when writing data, and Fig. 2B shows an overview of the operation when reading data.

[0071] 2A and 2B, a reference cell section 20 includes a plurality of reference cells 21_1 to 21_m (corresponding to the reference cell 21 in FIG. 1), and a calculation cell section 30 includes a plurality of calculation cells 31_1,1 to 31_m,n (corresponding to the calculation cell 31 in FIG. 1). Also, in FIGS. 2A and 2B, a plurality of wirings XCL are illustrated as wirings XCL_1 to XCL_m. Also, in FIGS. 2A and 2B, a plurality of wirings WCL are illustrated as wirings WCL_1 to WCL_n. Note that both m and n are natural numbers.

[0072] 2A and 2B, the cells in the reference cell unit 20 and the calculation cell unit 30 are arranged in a matrix with n+1 cells in the row direction and m cells in the column direction. The cells in the reference cell unit 20 and the calculation cell unit 30 may be arranged in a matrix with two or more cells in the row direction and one or more cells in the column direction.

[0073] 2A and 2B, the reference cell 21 and the operation cell 31 are shown in a simplified form for the sake of explanation. P corresponds to the other electrode of the capacitor 25 in FIG. 1. The terminal T W corresponds to the terminal to which one of the source or drain of the transistor 22 and one of the source or drain of the transistor 23 in FIG. 1 are connected. P corresponds to the other electrode of the capacitor 35 in FIG. 1. Terminal T X corresponds to a terminal to which one of the source or drain of the transistor 32 and one of the source or drain of the transistor 33 in FIG. 1 are connected.

[0074] In the data write operation shown in FIG. 2A, a current I Xut The current given to each row is the normalized current I Xut and are equal. Current I Xut corresponds to the amount of current (reference current) corresponding to the reference data. Since the arithmetic cells 31 in each row are connected via capacitance, no current flows. The reference cells 21 operate to maintain a voltage corresponding to the current flowing.

[0075] In addition, in the data write operation shown in Figure 2A, a current I W1 ~I Wn (I W ) is applied to each column. The current given to each column is the normalized current I Wut is equivalent to the current amount obtained by multiplying the weight data w (I W =w×I Wut ). current I W1 ~IWn may be different for each column.

[0076] In the data read operation shown in FIG. 2B, a current I X1 ~I Xm (I X ) is applied to each row. X1 ~I Xm is the normalized current I Xut is equivalent to the current amount obtained by multiplying the input data x (I X =x×I Xut ). current I X1 ~I Xm The current I Xut is the current I Wut is preferably equal to

[0077] In the data read operation shown in FIG. 2B, the current I X1 ~I Xm The voltage held in the reference cell 21 is boosted by this voltage boost. In response to this boost, the voltages of the wires XCL_1 to XCL_m are also boosted, so that the voltage held in the processing cell 31 is boosted by the capacitive coupling of the capacitor 35. Then, the potential of the wires WCL_1 to WCL_n is set to the voltage Vd. At this time, the amount of current I flowing through the transistor 34 r is the current value (I W ) and the current value (I X ) and the product of (current I r11 ~I rmn ) The current I r11 ~I rm By estimating the sum of the input data and the weight data, it is possible to output data equivalent to the result of the sum of the products of the input data and the weight data.

[0078] It is preferable that the sizes (e.g., channel length, channel width, transistor configuration, etc.) of the transistors 32 to 34 included in each of the cells of the arithmetic cell unit 30 are equal to each other. It is also preferable that the sizes of the transistors 22 to 24 included in each of the cells of the reference cell unit 20 are equal to each other. It is also preferable that the sizes of the transistors 22 and 32 are equal to each other. It is also preferable that the sizes of the transistors 23 and 33 are equal to each other. It is also preferable that the sizes of the transistors 24 and 34 are equal to each other.

[0079] By making the transistors equal in size, the electrical characteristics of each transistor can be made approximately equal. Therefore, by making the size of the transistor 32 included in each of cells 31_1,1 through 31_m,n equal, making the size of the transistor 33 included in each of cells 31_1,1 through 31_m,n equal, and making the size of the transistor 34 included in each of cells 31_1,1 through 31_m,n equal, each of cells 31_1,1 through 31_m,n can perform approximately the same operation under the same conditions. Here, the same conditions refer to, for example, input potentials to the source, drain, gate, etc. of transistor 32, input potentials to the source, drain, gate, etc. of transistor 33, input potentials to the source, drain, gate, etc. of transistor 34, and voltages held in each of cells 31_1,1 through 31_m,n. Furthermore, by making the sizes of the transistors 22 included in each of the cells 21_1 to 21_m equal, making the sizes of the transistors 23 included in each of the cells 21_1 to 21_m equal, and making the sizes of the transistors 24 included in each of the cells 21_1 to 21_m equal, for example, the cells 21_1 to 21_m can perform substantially the same operations and achieve substantially the same results. The cells 21_1 to 21_m can perform substantially the same operations under the same conditions. The same conditions here refer to, for example, input potentials to the source, drain, gate, etc. of the transistor 22, input potentials to the source, drain, gate, etc. of the transistor 23, input potentials to the source, drain, gate, etc. of the transistor 24, and voltages held in each of the cells 21_1 to 21_m.

[0080] The operations of the reference cell 21 and the operation cell 31 during data writing will be described with reference to FIG. 3A.

[0081] The wiring WSL is set to H level, and the transistors 22 and 32 are turned on (ON). A current I corresponding to the reference current flows through the wiring XCL. Xut In addition, the current IW The current I W is the current I normalized to the weight data w Wut The current multiplied by (in the figure, I W =wI Wut ) is equivalent to

[0082] In the reference cell 21, the transistor 22 is turned on. The potential of the retention node, which is the gate of the transistor 24, drives the transistor 24 with a current I Xut is the potential at which g1 As a result, the transistor 24 outputs a current I Xut In this specification, such an operation is referred to as "the current flowing between the source and drain of the transistor 24 of the reference cell 21 is I Xut This is sometimes referred to as "setting (programming)".

[0083] In the operation cell 31, the transistor 32 is turned on. The potential of the holding node, which is the gate of the transistor 34, is set to a value that causes the transistor 34 to flow a current I W is the potential at which g2 As a result, the current flowing between the source and drain of the transistor 34 of the processing cell 31 is expressed as I W Set to.

[0084] When writing data, the current I is applied to the reference cell 21 via the wiring XCL. Xut can be expressed by equation (2).

[0085]

number

[0086] In equation (2), V g1 is the potential of the storage node, which is the gate of transistor 24. In equation (2), V th1 ' is the threshold voltage of transistor 24.

[0087] When writing data, the current I is applied to the processing cell 31 via the wiring WCL. W can be expressed by equation (3).

[0088]

number

[0089] In equation (3), V g2 is the potential of the storage node, which is the gate of transistor 34. In equation (3), V th1 is the threshold voltage of transistor 34. Current I W is the weight data w and the normalized current I Wut It can be expressed as a product of

[0090] The voltage Vb applied to the wiring VBL is V th2 Let Vb be the threshold voltage of the transistor 33 and Vth2' be the threshold voltage of the transistor 23, then Vb>Vth2' and Vb>Vth2. With this configuration, the drain voltage of the transistor 24 can be set to (Vb-Vth2). Therefore, the drain voltage of the transistor 34 can also be set to (Vb-Vth2'). That is, the drain voltages of the transistors 24 and 34 can be set to potentials that are independent of the potentials of the wirings WCL and XCL. This prevents the threshold voltages of the transistors 34 and 24 from decreasing due to DIBL, thereby improving the accuracy of data obtained by calculation.

[0091] The operations of the reference cell 21 and the calculation cell 31 during data read will be described with reference to FIG. 3B. A period during which a set current is held can be provided between the time of writing data and the time of reading data. During the period during which the set current is held, the transistors 22 and 32 are turned off (OFF). By configuring the transistors 22 and 32 as OS transistors, the potential of the holding node corresponding to the set current can be held.

[0092] In the reference cell 21, the line WSL is set to the L level, and the transistor 22 is set to the OFF state. A current I corresponding to the input current flows into the line XCL. X The current I X is the current Ix normalized to the input data x ut The current multiplied by (in the figure, I X =xIx ut The potential at the storage node, which is the gate of transistor 24, drives transistor 24 with a current I X By flowing, V g1 +Δ, and the potential of the wiring XCL also fluctuates accordingly.

[0093] In the operation cell 31, the wiring WSL is set to the L level, and the transistor 32 is set to the OFF state. Therefore, the storage node of the operation cell 31 is in an electrically floating state. The potential V of the storage node of the operation cell 31 is changed by the capacitive coupling of the capacitor 35 caused by the change in the potential of the wiring XCL due to the operation of the reference cell 21. g2 fluctuates, and V g1 +Δ. The potential of the storage node of the operation cell 31 becomes V g2 +Δ, the transistor 34 of the calculation cell 31 flows with a current I r is playing.

[0094] When reading data, the current I is applied to the reference cell 21 through the wiring WSL. X can be expressed by equation (4). g1 +Δ is the current I X This is the change in potential of the retention node of the reference cell 21 due to the flow of

[0095]

number

[0096] In equation (4), Δ can be expressed by the input data x shown in equation (5).

[0097]

number

[0098] From equations (4) and (5), the current I X is the input data x and the normalized current I Xut It can be expressed as a product of

[0099] When reading data, the wiring WCL is set to a voltage V d Then, the potential of the storage node of the operation cell 31 is set to V g2 +Δ, the current I r can be expressed by equation (6).

[0100]

number

[0101] I in Equation (3), Equation (5) and Equation (6) r can be estimated as a current equivalent to the product of the weight data w and the input data x. The currents flowing through the arithmetic cells 31 in each row can be added together, so that by outputting the current flowing through the wiring WCL to the outside, it is possible to output a signal corresponding to the calculation result of the sum-of-products calculation process according to the weight data w and the input data x.

[0102] 4A and 4B are circuit diagrams showing a comparative example in which the transistor 22 and the transistor 33 are not included in the semiconductor device 10 of FIG. 1. In order to explain a specific example of operation, the threshold value of the transistor 34A of the calculation cell 31A is set to 0.5 V in FIG. 4A and 4B. The potential Vb is set to 0.7 V.

[0103] In the data write operation shown in FIG. 4A, when transistor 32A is turned on, a current I W The voltage 0.4V required to pass the voltage is V g2 is written to the hold node, which is the gate of transistor 34A.

[0104] In the data read operation shown in FIG. 4B, the transistor 32A is turned off, and the potential of the wiring WCL is V d is set to 1.2V. A current I r Therefore, V d needs to be set higher.

[0105] In the arithmetic cell 31A of the semiconductor device 10B shown in FIGS. 4A and 4B, the drain voltage of the transistor 34A becomes 0.4 V and 1.2 V during the data write operation and the data read operation, resulting in a large voltage difference. Therefore, the current I r The variability also increases.

[0106] A semiconductor device 10 according to one embodiment of the present invention will be described with reference to Figures 4C and 4D. For comparison, Figures 4C and 4D illustrate a case where the same operation as in Figures 4A and 4B is performed.

[0107] 4C and 4D illustrate the components of the arithmetic cell 31. In Fig. 4C and 4D, the threshold voltages of the transistors 33 and 34 are both set to 0.5 V. The potential Vb is set to 0.7 V.

[0108] In the data write operation shown in FIG. 4C, when transistor 32 is turned on, a current I W The voltage 0.4V required to pass the voltage is V g2 4C, the drain voltage of transistor 34 is 0.2 V, which is a voltage that is lower than voltage Vb by the threshold voltage of transistor 33.

[0109] In the data read operation shown in FIG. 4D, the transistor 32 is turned off, and the voltage of the wiring WCL, V d is set to 1.2V. A current I r Therefore, V d4D, the drain voltage of the transistor 34 is 0.2 V, which is a voltage that is lower than the voltage Vb by the threshold voltage of the transistor 33, as in the case of FIG.

[0110] 4C and 4D, the drain voltage of the transistor 34A is 0.2 V in both the data write operation and the data read operation, and the voltage difference is small. r The variation can also be reduced.

[0111] A modified example of the semiconductor device 10 shown in Fig. 1 will be described with reference to a semiconductor device 10B shown in Fig. 5. In the description of Fig. 5, differences from Fig. 1 will be described, and a description of the overlapping configuration will be omitted.

[0112] 5 includes a reference cell 21B and a calculation cell 31B. The reference cell 21B includes a transistor 22, a transistor 23B, a transistor 24B, and a capacitor 25. The calculation cell 31B includes a transistor 32, a transistor 33B, a transistor 34B, and a capacitor 35.

[0113] The back gates of the transistors 23B and 24B are connected to a voltage V body is given. Voltage V body is a voltage lower than the ground potential, and the transistor characteristics of the transistor 23B and the transistor 24B are stabilized.

[0114] Similarly, the back gates of the transistors 33B and 34B are connected to the voltage V body The transistor characteristics of the transistors 33B and 34B are stabilized.

[0115] The semiconductor device 10B in FIG. 5 will be described in the same manner as in FIGS. 4A, 4B, 4C, and 4D with reference to FIGS. 6A and 6B.

[0116] 6A and 6B illustrate the components of the arithmetic cell 31B. In FIGS. 6A and 6B, the threshold voltages of the transistors 33B and 34B are both set to 0.8 V. The voltage Vb is set to 1.0 V. The threshold voltages of the transistors 33B and 34B are set to, for example, a voltage V of -1 V. body This is expressed as a positive shift, for example, from 0.5V to 0.8V.

[0117] In the data write operation shown in FIG. 6A, when transistor 32 is turned on, a current I W The voltage of 0.7V to flow is the V g2 6A, the drain voltage of transistor 34B is 0.2 V, which is a voltage that is lower than voltage Vb by the threshold voltage of transistor 33B.

[0118] In the data read operation shown in FIG. 6B, the transistor 32 is turned off, and the voltage of the wiring WCL, V d is set to 1.2V. A current I r Therefore, V d 4D, the drain voltage of transistor 34B is 0.2V, which is a voltage that is lower than voltage Vb by the threshold voltage of transistor 33B, as in FIG. 6A.

[0119] 6A and 6B, the drain voltage of the transistor 34B is 0.2 V in both the data write operation and the data read operation, and the voltage difference is small. r The variation can also be reduced.

[0120] In addition, the calculation cell 31B shown in FIGS. 6A and 6B calculates the voltage V bodyThis reduces the change in the drain voltage of the transistor 33B. For example, in FIGS. 6A and 6B, the difference in the drain voltage of the transistor 33B between the data write operation and the data read operation is 0.5 V (the difference between 1.2 V and 0.7 V). On the other hand, the voltage V body 4C and 4D, where V is the ground potential, the difference in drain voltage of the transistor 33B between the data write operation and the data read operation is 0.8 V (the difference between 1.2 V and 0.4 V).

[0121] From the above, the semiconductor device 10B of FIG. 5 suppresses the fluctuation in transistor characteristics caused by the fluctuation in drain voltage, and reduces the current I r The variation in the

[0122] As described above, one embodiment of the present invention can provide a semiconductor device in which the accuracy of read data is improved.

[0123] (Embodiment 2) In this embodiment, an example of an arithmetic device to which the semiconductor device of one embodiment of the present invention can be applied will be described. The arithmetic device includes a circuit capable of performing a product-sum operation. The arithmetic device may also be referred to as an arithmetic circuit.

[0124] <Configuration example of the computing device> Fig. 7 shows an example of the configuration of an arithmetic device that performs a product-sum operation on first data and second data. The arithmetic device MAC1 shown in Fig. 7 is a circuit that performs a product-sum operation on first data (weight data) corresponding to the potential held in each cell and input second data (input data), and calculates an activation function using the result of the product-sum operation. Note that the first data and the second data can be, for example, analog data or multi-valued data (discrete data).

[0125] The arithmetic unit MAC1 has a circuit WCS, a circuit XCS, a circuit WSD, a circuit SWS1, a circuit SWS2, a cell array CA, and conversion circuits ITRZ_1 to ITRZ_n.

[0126] The cell array CA includes cells 31_1,1 through 31_m,n and cells 21_1 through 21_m. Each of cells 31_1,1 through 31_m,n includes, for example, a transistor 32, a transistor 33, a transistor 34, and a capacitor 35, similar to the operation cell 31 described in the above embodiment. Each of cells 21_1 through 21_m includes, for example, a transistor 22, a transistor 23, a transistor 24, and a capacitor 25, similar to the reference cell 21 described in the above embodiment. In the following description, the "one of the source or the drain" described in the first embodiment may be referred to as a "first terminal," and the "other of the source or the drain" may be referred to as a "second terminal." In the following description, the "one electrode" of a capacitor may be referred to as a "first terminal," and the "other electrode" may be referred to as a "second terminal."

[0127] 7, in cell 31_1,1, the connection point between the first terminal of transistor 32, the gate of transistor 34, and the first terminal of capacitor 35 is designated as node NN_11. Similarly, in FIG. 7, in cells 31_1,n, 31_m,1, and 31_m,n, similar connection points are designated as nodes NN_1n, NN_m1, and NN_mn. Similarly, in FIG. 7, in cells 21_1 and 21_m, similar connection points are designated as nodes NN_ref1 and NNref_m. Note that nodes NN_11 to NN_mn and nodes NNref_1 to NNref_m function as retention nodes for the respective cells.

[0128] The circuit SWS1 includes, for example, transistors F3_1 to F3_n. A first terminal of the transistor F3_1 is electrically connected to the wiring WCL_1, a second terminal of the transistor F3_1 is electrically connected to the circuit WCS, and a gate of the transistor F3_1 is electrically connected to the wiring SWL1. A first terminal of the transistor F3_n is electrically connected to the wiring WCL_n, a second terminal of the transistor F3_n is electrically connected to the circuit WCS, and a gate of the transistor F3_n is electrically connected to the wiring SWL1.

[0129] For example, a transistor applicable to the transistors included in the cell array CA can be used as each of the transistors F3_1 to F3_n. In particular, it is preferable to use an OS transistor as each of the transistors F3_1 to F3_n.

[0130] The circuit SWS1 functions as a circuit that brings the circuit WCS and each of the wirings WCL_1 to WCL_n into a conductive state or a non-conductive state.

[0131] The circuit SWS2 includes, for example, transistors F4_1 to F4_n. A first terminal of the transistor F4_1 is electrically connected to the wiring WCL_1, a second terminal of the transistor F4_1 is electrically connected to the input terminal of the conversion circuit ITRZ_1, and a gate of the transistor F4_1 is electrically connected to the wiring SWL2. A first terminal of the transistor F4_n is electrically connected to the wiring WCL_n, a second terminal of the transistor F4_n is electrically connected to the input terminal of the conversion circuit ITRZ_n, and a gate of the transistor F4_n is electrically connected to the wiring SWL2.

[0132] For example, a transistor applicable to the transistors included in the cell array CA can be used as each of the transistors F4_1 to F4_n. In particular, it is preferable to use an OS transistor as each of the transistors F4_1 to F4_n.

[0133] The circuit SWS2 has a function of bringing the wiring WCL_1 and the conversion circuit ITRZ_1 and the wiring WCL_n and the conversion circuit ITRZ_n into a conductive state or a non-conductive state.

[0134] The circuit WCS has a function of supplying data to be stored in each cell of the cell array CA.

[0135] The circuit XCS is electrically connected to the wirings XCL_1 to XCL_m and has a function of supplying a current of an amount corresponding to reference data or second data to each of the cells 21_1 and 21_m included in the cell array CA.

[0136] The circuit WSD is electrically connected to the wirings WSL_1 to WSL_m. When writing first data to the cells 31_1,1 to 31_m,n, the circuit WSD has a function of selecting a row of the cell array CA to which the first data is to be written by supplying a predetermined signal to the wirings WSL_1 to WSL_m. In other words, the wirings WSL_1 to WSL_m function as write word lines.

[0137] For example, the circuit WSD is electrically connected to a wiring SWL1 and a wiring SWL2. The circuit WSD has a function of bringing the circuit WCS and the cell array CA into a conductive state or a non-conductive state by supplying a predetermined signal to the wiring SWL1, and a function of bringing the conversion circuits ITRZ_1 to ITRZ_n and the cell array CA into a conductive state or a non-conductive state by supplying a predetermined signal to the wiring SWL2.

[0138] Each of the conversion circuits ITRZ_1 to ITRZ_n has, for example, an input terminal and an output terminal. For example, the output terminal of the conversion circuit ITRZ_1 is electrically connected to the wiring OL_1, and the output terminal of the conversion circuit ITRZ_n is electrically connected to the wiring OL_n.

[0139] Each of the conversion circuits ITRZ_1 to ITRZ_n has a function of receiving a current input to an input terminal, converting the current into a voltage corresponding to the amount of the current, and outputting the voltage from an output terminal. The voltage may be, for example, an analog voltage or a digital voltage. Each of the conversion circuits ITRZ_1 to ITRZ_n may also include a function-based arithmetic circuit. In this case, for example, the arithmetic circuit may perform a function calculation using the converted voltage, and the calculation result may be output to the wirings OL_1 to OL_n.

[0140] In particular, when performing calculations on a hierarchical neural network, the above-mentioned functions may be, for example, a sigmoid function, a tanh function, a softmax function, a ReLU function, a threshold function, or the like.

[0141] <<Circuit WCS, Circuit XCS>> Here, specific examples of the circuit WCS and the circuit XCS will be described.

[0142] First, the circuit WCS will be described. Fig. 8A is a block diagram showing an example of the circuit WCS. Note that Fig. 8A also shows a circuit SWS1, a transistor F3, a wiring SWL1, and a wiring WCL in order to show the electrical connection of the circuit WCS with peripheral circuits. The transistor F3 is any one of the transistors F3_1 to F3_n included in the arithmetic unit MAC1 of Fig. 7, and the wiring WCL is any one of the wirings WCL_1 to WCL_n included in the arithmetic unit MAC1 of Fig. 7.

[0143] The circuit WCS shown in FIG. 8A includes, as an example, a switch SWW. A first terminal of the switch SWW is electrically connected to a second terminal of the transistor F3, and a second terminal of the switch SWW is electrically connected to a wiring VINIL1. The wiring VINIL1 functions as a wiring that applies an initialization potential to the wiring WCL, and the initialization potential can be a ground potential (GND), a low-level potential, a high-level potential, or the like. Note that the switch SWW is turned on only when the initialization potential is applied to the wiring WCL, and is turned off otherwise.

[0144] The switch SWW may be, for example, an electrical switch such as an analog switch or a transistor. When a transistor is used as the switch SWW, the transistor may be, for example, a transistor that can be used as a transistor included in the cell array CA. In addition to an electrical switch, a mechanical switch may also be used.

[0145] 8A has a plurality of current sources CS. Specifically, the circuit WCS has K bits (2 K In this case, the circuit WCS has a function of outputting the first data of the value (K is an integer of 1 or more) as a current. K The circuit WCS has one current source CS that outputs information corresponding to the value of the first bit as a current, two current sources CS that output information corresponding to the value of the second bit as a current, and two current sources CS that output information corresponding to the value of the K-th bit as a current. K-1 There are individual ones.

[0146] 8A, each current source CS has a terminal T1 and a terminal T2. The terminal T1 of each current source CS is electrically connected to the second terminal of the transistor F3 of the circuit SWS1. The terminal T2 of one current source CS is electrically connected to a wiring DW_1, and the terminals T2 of the two current sources CS are electrically connected to a wiring DW_2. K-1Each of the terminals T2 of the current sources CS is electrically connected to the wiring DW_K.

[0147] The multiple current sources CS in the circuit WCS each have the same constant current I Wut It has the function of outputting a constant current I from terminal T1. Wut is the normalized current I Wut In reality, during the manufacturing stage of the arithmetic unit MAC1, errors may occur due to variations in the electrical characteristics of the transistors included in each current source CS. Therefore, the constant current I output from each of the terminals T1 of the multiple current sources CS may be Wut The error is preferably within 10%, more preferably within 5%, and even more preferably within 1%. In this embodiment, the constant current I output from the terminal T1 of each of the multiple current sources CS included in the circuit WCS is Wut The following explanation will be given assuming that there is no error.

[0148] The wirings DW_1 to DW_K are electrically connected to a current source CS, which supplies a constant current I Wut Specifically, for example, when a high-level potential is applied to the wiring DW_1, the current source CS electrically connected to the wiring DW_1 outputs a constant current I Wut flows to the second terminal of the transistor F3, and when a low-level potential is applied to the wiring DW_1, the current source CS electrically connected to the wiring DW_1 flows as follows: Wut Do not output.

[0149] The current flowing from one current source CS electrically connected to wiring DW_1 corresponds to the value of the first bit, the current flowing from two current sources CS electrically connected to wiring DW_2 corresponds to the value of the second bit, and the current flowing from K current sources CS electrically connected to wiring DW_K corresponds to the value of the Kth bit.

[0150] 8A illustrates the circuit WCS when K is an integer equal to or greater than 3, but when K is 1, the circuit WCS in Fig. 8A may be configured without a current source CS electrically connected to the wirings DW_2 to DW_K. When K is 2, the circuit WCS in Fig. 8A may be configured without a current source CS electrically connected to the wirings DW_3 to DW_K.

[0151] Next, a specific example of the configuration of the current source CS will be described.

[0152] The current source CS1 shown in FIG. 9A is a circuit that can be applied to the current source CS included in the circuit WCS of FIG. 8A, and the current source CS1 has a transistor Tr1 and a transistor Tr2.

[0153] A first terminal of the transistor Tr1 is electrically connected to the wiring VDDL, and a second terminal of the transistor Tr1 is electrically connected to the gate of the transistor Tr1, the back gate of the transistor Tr1, and the first terminal of the transistor Tr2. A second terminal of the transistor Tr2 is electrically connected to the terminal T1, and a gate of the transistor Tr2 is electrically connected to the terminal T2. The terminal T2 is also electrically connected to the wiring DW.

[0154] The wiring DW is any one of the wirings DW_1 to DW_n in FIG. 8A.

[0155] The line VDDL functions as a line that applies a constant voltage, which may be, for example, a high-level potential.

[0156] When the constant voltage applied by the wiring VDDL is set to a high-level potential, a high-level potential is input to the first terminal of the transistor Tr1. The potential of the second terminal of the transistor Tr1 is set to a potential lower than the high-level potential. At this time, the first terminal of the transistor Tr1 functions as a drain, and the second terminal of the transistor Tr1 functions as a source. Since the gate of the transistor Tr1 and the second terminal of the transistor Tr1 are electrically connected, the gate-source voltage of the transistor Tr1 is 0V. Therefore, when the threshold voltage of the transistor Tr1 is within an appropriate range, a current (drain current) in the subthreshold region current range flows between the first terminal and the second terminal of the transistor Tr1. When the transistor Tr1 is an OS transistor, the amount of this current is, for example, 1.0×10 -8 A or less, and 1.0 × 10 -12 A or less is more preferable, and 1.0 × 10 -15 It is more preferable that the current is less than or equal to I. Also, for example, it is more preferable that the current is in a range that increases exponentially with respect to the gate-source voltage. In other words, the transistor Tr1 functions as a current source for supplying a current in the current range when operating in the subthreshold region. Note that the current is the above-mentioned I Wut , or I, as described below. Xut is equivalent to

[0157] Transistor Tr2 functions as a switching element. When the potential of the first terminal of transistor Tr2 is higher than the potential of the second terminal of transistor Tr2, the first terminal of transistor Tr2 functions as a drain, and the second terminal of transistor Tr2 functions as a source. Because the back gate of transistor Tr2 and the second terminal of transistor Tr2 are electrically connected, the back gate-source voltage is 0 V. Therefore, when the threshold voltage of transistor Tr2 is within an appropriate range, transistor Tr2 is turned on when a high-level potential is input to the gate of transistor Tr2, and turned off when a low-level potential is input to the gate of transistor Tr2. Specifically, when transistor Tr2 is on, a current in the subthreshold region flows from the second terminal of transistor Tr1 to terminal T1. When transistor Tr2 is off, the current does not flow from the second terminal of transistor Tr1 to terminal T1.

[0158] Note that the circuit applicable to the current source CS included in the circuit WCS of FIG. 8A is not limited to the current source CS1 of FIG. 9A. For example, while the current source CS1 is configured such that the back gate of the transistor Tr2 is electrically connected to the second terminal of the transistor Tr2, the back gate of the transistor Tr2 may be electrically connected to a separate wiring. An example of such a configuration is shown in FIG. 9B. The current source CS2 shown in FIG. 9B is configured such that the back gate of the transistor Tr2 is electrically connected to a wiring VTHL. By electrically connecting the wiring VTHL to an external circuit or the like, the current source CS2 can apply a predetermined potential to the wiring VTHL via the external circuit or the like, thereby applying the predetermined potential to the back gate of the transistor Tr2. This allows the threshold voltage of the transistor Tr2 to be varied. In particular, increasing the threshold voltage of the transistor Tr2 can reduce the off-state current of the transistor Tr2.

[0159] For example, the current source CS1 has a configuration in which the back gate of the transistor Tr1 is electrically connected to the second terminal of the transistor Tr1, but a configuration in which a capacitor is used to maintain a voltage between the back gate of the transistor Tr2 and the second terminal of the transistor Tr2 is also possible. Such a configuration example is shown in FIG. 9C. The current source CS3 shown in FIG. 9C includes a transistor Tr3 and a capacitor C6 in addition to the transistors Tr1 and Tr2. The current source CS3 differs from the current source CS1 in that the second terminal of the transistor Tr1 is electrically connected to the back gate of the transistor Tr1 via the capacitor C6 and the back gate of the transistor Tr1 is electrically connected to the first terminal of the transistor Tr3. The current source CS3 also has a configuration in which the second terminal of the transistor Tr3 is electrically connected to the wiring VTL and the gate of the transistor Tr3 is electrically connected to the wiring VWL. The current source CS3 can apply a high-level potential to the wiring VWL to turn on the transistor Tr3, thereby establishing electrical continuity between the wiring VTL and the back gate of the transistor Tr1. At this time, a predetermined potential can be input to the back gate of transistor Tr1 from line VTL. Then, by applying a low-level potential to line VWL to turn off transistor Tr3, the capacitor C6 can maintain the voltage between the second terminal of transistor Tr1 and the back gate of transistor Tr1. In other words, by determining the voltage applied to the back gate of transistor Tr1 from line VTL, the threshold voltage of transistor Tr1 can be varied, and the threshold voltage of transistor Tr1 can be fixed by transistor Tr3 and capacitor C6.

[0160] 9D is another example of a circuit that can be applied to the current source CS included in the circuit WCS of FIG. 8A. The current source CS4 is configured such that the back gate of the transistor Tr2 in the current source CS3 of FIG. 9C is electrically connected to the line VTHL instead of the second terminal of the transistor Tr2. In other words, the current source CS4, like the current source CS2 of FIG. 9B, can vary the threshold voltage of the transistor Tr2 depending on the potential provided by the line VTHL.

[0161] In the current source CS4, when a large current flows between the first and second terminals of the transistor Tr1, it is necessary to increase the on-current of the transistor Tr2 in order to pass that current from the terminal T1 to the outside of the current source CS4. In this case, the current source CS4 applies a high-level potential to the line VTHL to lower the threshold voltage of the transistor Tr2 and increase the on-current of the transistor Tr2, thereby allowing the large current flowing between the first and second terminals of the transistor Tr1 to flow from the terminal T1 to the outside of the current source CS4.

[0162] 9A to 9D as the current source CS included in the circuit WCS of Fig. 8A, the circuit WCS can output a current corresponding to the K-bit first data. The amount of the current can be, for example, a current flowing between the first terminal and the second terminal within a range in which the transistor 34 operates in the subthreshold region.

[0163] 8A may be replaced by the circuit WCS shown in FIG. 8B. The circuit WCS in FIG. 8B has a configuration in which the current source CS shown in FIG. 9A is connected to each of the wirings DW_1 to DW_K. When the channel width of the transistor Tr1_1 is w_1, the channel width of the transistor Tr1_2 is w_2, and the channel width of the transistor Tr1_K is w_K, the ratio of the channel widths is w_1:w_2:w_K=1:2:2. K-1Since the current flowing between the source and drain of a transistor operating in the subthreshold region is proportional to the channel width, the circuit WCS shown in FIG. 8B can output a current corresponding to the K-bit first data, similar to the circuit WCS in FIG. 8A.

[0164] Note that the transistors Tr1 (including transistors Tr1_1 to Tr2_K), Tr2 (including transistors Tr2_1 to Tr2_K), and Tr3 can be, for example, transistors that can be used as transistors included in the cell array CA. In particular, OS transistors are preferably used as the transistors Tr1 (including transistors Tr1_1 to Tr2_K), Tr2 (including transistors Tr2_1 to Tr2_K), and Tr3.

[0165] Next, a specific example of the circuit XCS will be described.

[0166] 8C is a block diagram showing an example of a circuit XCS. In addition, in order to show electrical connection between the circuit WCS and peripheral circuits, a wiring XCL is also shown in FIG. 7. The wiring XCL is any one of the wirings XCL_1 to XCL_m included in the arithmetic unit MAC1 in FIG.

[0167] The circuit XCS shown in FIG. 8C includes, as an example, a switch SWX. A first terminal of the switch SWX is electrically connected to the wiring XCL and a plurality of current sources CS, and a second terminal of the switch SWX is electrically connected to the wiring VINIL2. The wiring VINIL2 functions as a wiring that applies an initialization potential to the wiring XCL, and the initialization potential can be a ground potential (GND), a low-level potential, a high-level potential, or the like. The initialization potential applied by the wiring VINIL2 may be equal to the potential applied by the wiring VINIL1. Note that the switch SWX is turned on only when the initialization potential is applied to the wiring XCL, and is turned off otherwise.

[0168] The switch SWX may be, for example, a switch applicable to the switch SWW.

[0169] The circuit configuration of the circuit XCS in FIG. 8C can be configured to be substantially the same as that of the circuit WCS in FIG. 8A. Specifically, the circuit XCS has a function of outputting reference data as a current and a function of outputting L bits (2 L and a function of outputting second data of a value (L is an integer of 1 or more) as a current. In this case, the circuit XCS has a function of outputting second data of a value (L is an integer of 1 or more) as a current. L The circuit XCS has one current source CS that outputs information corresponding to the value of the first bit as a current, two current sources CS that output information corresponding to the value of the second bit as a current, and two current sources CS that output information corresponding to the value of the Lth bit as a current. L-1 There are individual ones.

[0170] Incidentally, the reference data output as a current by the circuit XCS can be, for example, information in which the value of the first bit is "1" and the values ​​of the second and subsequent bits are "0".

[0171] In FIG. 8C, the terminal T2 of one current source CS is electrically connected to the wiring DX_1, and the terminals T2 of two current sources CS are electrically connected to the wiring DX_2. L-1 Each of the terminals T2 of the current sources CS is electrically connected to the wiring DX_L.

[0172] The multiple current sources CS in the circuit XCS are each set to the same constant current I Xut from the terminal T1. The wirings DX_1 to DX_L are electrically connected to the current source CS and the Xut That is, the circuit XCS has a function of causing a current corresponding to L-bit information transmitted from the wirings DX_1 to DX_L to flow through the wiring XCL.

[0173] In addition, if an error occurs due to variations in the electrical characteristics of the transistors included in each current source CS of the circuit XCS, the constant current I output from each of the terminals T1 of the multiple current sources CS will Xut The error is preferably within 10%, more preferably within 5%, and even more preferably within 1%. In this embodiment, the constant current I output from the terminal T1 of each of the multiple current sources CS included in the circuit XCS is Xut The following explanation will be given assuming that there is no error.

[0174] 9A to 9D can be used as the current source CS of the circuit XCS, similar to the current source CS of the circuit WCS. In this case, the wiring DW shown in FIGS. 9A to 9D can be replaced with the wiring DX. This allows the circuit XCS to pass a current in the subthreshold current range to the wiring XCL as reference data or L-bit second data.

[0175] Furthermore, the circuit XCS in Fig. 8C can have the same circuit configuration as the circuit WCS shown in Fig. 8B. In this case, the circuit WCS shown in Fig. 8B can be replaced with the circuit XCS, the wiring DW_1 with the wiring DX_1, the wiring DW_2 with the wiring DX_2, the wiring DW_K with the wiring DX_L, the switch SWW with the switch SWX, and the wiring VINIL1 with the wiring VINIL2.

[0176] <<Conversion Circuits ITRZ_1 to ITRZ_n>> Here, a specific example of a circuit that can be applied to the conversion circuits ITRZ_1 to ITRZ_n included in the arithmetic unit MAC1 in FIG. 7 will be described.

[0177] The conversion circuit ITRZ1 shown in Fig. 10A is an example of a circuit that can be applied to the conversion circuits ITRZ_1 to ITRZ_n in Fig. 7. Note that Fig. 10A also illustrates a circuit SWS2, wiring WCL, wiring SWL2, and a transistor F4 in order to show electrical connection between the conversion circuit ITRZ1 and peripheral circuits. The wiring WCL is any one of the wirings WCL_1 to WCL_n included in the arithmetic device MAC1 in Fig. 7, and the transistor F4 is any one of the transistors F4_1 to F4_n included in the arithmetic device MAC1 in Fig. 7.

[0178] The conversion circuit ITRZ1 in FIG. 10A is electrically connected to the wiring WCL via a transistor F4. The conversion circuit ITRZ1 is also electrically connected to the wiring OL. The conversion circuit ITRZ1 has a function of converting a current flowing from the conversion circuit ITRZ1 to the wiring WCL or a current flowing from the wiring WCL to the conversion circuit ITRZ1 into an analog voltage and outputting the analog voltage to the wiring OL. In other words, the conversion circuit ITRZ1 has a current-voltage conversion circuit.

[0179] The conversion circuit ITRZ1 in FIG. 10A includes, for example, a resistor R5 and an operational amplifier OP1.

[0180] The inverting input terminal of the operational amplifier OP1 is electrically connected to the first terminal of the resistor R5 and the second terminal of the transistor F4. The non-inverting input terminal of the operational amplifier OP1 is electrically connected to the wiring VRL. The output terminal of the operational amplifier OP1 is electrically connected to the second terminal of the resistor R5 and the wiring OL.

[0181] The wiring VRL functions as a wiring that applies a constant voltage, which may be, for example, a ground potential (GND) or a low-level potential.

[0182] By configuring the conversion circuit ITRZ1 as shown in Figure 10A, the current flowing from the wiring WCL to the conversion circuit ITRZ1 via transistor F4, or the current flowing from the conversion circuit ITRZ1 to the wiring WCL via transistor F4, can be converted into an analog voltage and output to the wiring OL.

[0183] In particular, by setting the constant voltage provided by the line VRL to ground potential (GND), the inverting input terminal of the operational amplifier OP1 becomes a virtual ground, and the analog voltage output to the line OL can be a voltage based on ground potential (GND).

[0184] Furthermore, while the conversion circuit ITRZ1 in FIG. 10A is configured to output an analog voltage, the circuit configuration applicable to the conversion circuits ITRZ_1 to ITRZ_n in FIG. 7 is not limited to this. For example, the conversion circuit ITRZ1 may be configured to include an analog-to-digital conversion circuit ADC, as shown in FIG. 10B. Specifically, the conversion circuit ITRZ2 in FIG. 10B is configured such that the input terminal of the analog-to-digital conversion circuit ADC is electrically connected to the output terminal of the operational amplifier OP1 and the second terminal of the resistor R5, and the output terminal of the analog-to-digital conversion circuit ADC is electrically connected to the wiring OL. With this configuration, the conversion circuit ITRZ2 in FIG. 10B can output a digital signal to the wiring OL.

[0185] Also, in the conversion circuit ITRZ2, when the digital signal output to the wiring OL is 1 bit (binary), the conversion circuit ITRZ2 may be replaced with the conversion circuit ITRZ3 shown in FIG. 10C. The conversion circuit ITRZ3 in FIG. 10C has a configuration in which a comparator CMP1 is provided in the conversion circuit ITRZ1 of FIG. 10A. Specifically, in the conversion circuit ITRZ3, the first input terminal of the comparator CMP1 is electrically connected to the output terminal of the operational amplifier OP1 and the second terminal of the resistor R5, the second input terminal of the comparator CMP1 is electrically connected to the wiring VRL2, and the output terminal of the comparator CMP1 is electrically connected to the wiring OL. The wiring VRL2 functions as a wiring for providing a potential for comparing with the potential of the first terminal of the comparator CMP1. With such a configuration, the conversion circuit ITRZ3 in FIG. 10C can output a low-level potential or a high-level potential (binary digital signal) to the wiring OL according to the magnitude relationship between the voltage converted from the current flowing between the source and drain of the transistor F4 by the current-voltage conversion circuit and the voltage provided by the wiring VRL2.

[0186] Also, the conversion circuits ITRZ_1 to ITRZ_n applicable to the arithmetic unit MAC1 in FIG. 7 are not limited to the conversion circuits ITRZ1 to ITRZ3 shown in FIGS. 10A to 10C respectively. For example, when using the arithmetic unit MAC1 for the operation of a hierarchical neural network, it is preferable that the conversion circuits ITRZ1 to ITRZ3 have a functional arithmetic unit. Further, as the functional arithmetic unit, it can be an arithmetic unit such as a sigmoid function, a tanh function, a softmax function, a ReLU function, or a threshold function.

[0187] <Operation Example of Arithmetic Unit> Next, an operation example of the arithmetic unit MAC1 will be described.

[0188] 11 shows a timing chart of an example of the operation of the arithmetic unit MAC1. The timing chart of FIG. 11 shows fluctuations in the potentials of the wiring SWL1, wiring SWL2, wiring WSL_i (i is an integer of 1 to m-1), wiring WSL_i+1, wiring XCL_i, wiring XCL_i+1, node NN_i,j (j is an integer of 1 to n-1), node NN_i+1,j, node NNref_i, and node NNref_i+1 between time T11 and time T23 and in the vicinity thereof. Furthermore, the timing chart of FIG. 11 also shows fluctuations in the potentials of the wiring SWL1, wiring SWL2, wiring WSL_i (i is an integer of 1 to m-1), wiring WSL_i+1, wiring XCL_i, wiring XCL_i+1, node NN_i,j (j is an integer of 1 to n-1), node NN_i+1,j, node NNref_i, and node NNref_i+1, flowing between the first terminal and the second terminal of the transistors 33 and 34 included in the cell 31_i,j. 34 _i,j and the current I flowing between the first terminal and the second terminal of the transistors 23 and 24 included in the cell 21_i. 24 _i and the current I flowing between the first terminal and the second terminal of the transistors 33 and 34 included in the cell 31_i+1,j 34 _i+1,j and the current I flowing between the first terminal and the second terminal of the transistors 23 and 24 included in the cell 21_i+1. 24 The respective variations of _i+1 and _i+1 are also shown.

[0189] It is to be noted that the circuit WCS of the arithmetic unit MAC1 is the circuit WCS of FIG. 8A, and the circuit XCS of the arithmetic unit MAC1 is the circuit XCS of FIG. 8C.

[0190] In this operation example, the source potentials of the transistors 24 and 34 are set to the ground potential GND. Also, before time T11, the potentials of the nodes NN_i,j, NN_i+1,j, NNref_i, and NNref_i+1 are set to the ground potential GND as an initial setting. Specifically, for example, by setting the initialization potential of the wiring VINIL1 in FIG. 8A to the ground potential GND and turning on the switch SWW, the transistor F3, and the respective transistors 32 included in the cells 31_i,j and 31_i+1,j, the potentials of the nodes NN_i,j and NN_i+1,j can be set to the ground potential GND. Also, for example, by setting the initialization potential of the wiring VINIL2 in FIG. 8C to the ground potential GND and turning on the switch SWX and the respective transistors 22 included in the cells 31_i,j and 31_i+1,j, the potentials of the nodes NNref_i,j and NNref_i+1,j can be set to the ground potential GND.

[0191] In this operation example, the gate potential of transistors 23 and 33 is set to a constant potential Vb. By setting the gate potential of transistors 23 and 33 to the constant potential Vb, the first terminals of transistors 23 and 33 can be set to a voltage Vb-Vth, which is lower than the constant potential Vb by the threshold voltage. This makes it possible to suppress an increase in the second terminals (drain sides) of transistors 24 and 34.

[0192] <<From time T11 to time T12>> Between time T11 and time T12, a high-level potential (denoted as "High" in FIG. 11) is applied to the wiring SWL1, and a low-level potential (denoted as "Low" in FIG. 11) is applied to the wiring SWL2. As a result, a high-level potential is applied to the gates of the transistors F3_1 to F3_n, turning on the transistors F3_1 to F3_n, and a low-level potential is applied to the gates of the transistors F4_1 to F4_n, turning off the transistors F4_1 to F4_n.

[0193] Furthermore, between time T11 and time T12, a low-level potential is applied to the wiring WSL_i and the wiring WSL_i+1. As a result, a low-level potential is applied to the gate of the transistor 32 included in the cells 31_i,1 to 31_i,n in the i-th row of the cell array CA and the gate of the transistor 22 included in the cell 21_i, turning off the respective transistors 32 and 22. Furthermore, a low-level potential is applied to the gate of the transistor 32 included in the cells 31_i+1,1 to 31_i+1,n in the i+1-th row of the cell array CA and the gate of the transistor 22 included in the cell 21_i+1, turning off the respective transistors 32 and 22.

[0194] 8C is the wiring XCL_i and the wiring XCL_i+1, the potential of the wiring XCL_i and the wiring XCL_i+1 can be set to the ground potential GND by setting the initialization potential of the wiring VINIL2 to the ground potential GND and turning on the switch SWX.

[0195] 8A corresponds to the wirings WCL_1 to WCL_K, the first data is not input to the wirings DW_1 to DW_K. Also, when the wiring XCL shown in FIG. 8C corresponds to the wirings XCL_1 to XCL_K, the second data is not input to the wirings DX_1 to DX_L. Here, in the circuit WCS of FIG. 8A, a low-level potential is input to each of the wirings DW_1 to DW_K, and in the circuit XCS of FIG. 8C, a low-level potential is input to each of the wirings DX_1 to DX_L.

[0196] Furthermore, between time T11 and time T12, no current flows through the wiring WCL_j, the wiring XCL_i, and the wiring XCL_i+1. 34 _i,j,I 24 _i, I 34 _i+1,j,I 24 _i+1 becomes 0.

[0197] <<From time T12 to time T13>> Between time T12 and time T13, a high-level potential is applied to the wiring WSL_i. As a result, a high-level potential is applied to the gates of the transistors 32 included in the cells 31_i,1 to 31_i,n in the i-th row of the cell array CA and the gates of the transistors 22 included in the cells 21_i, so that the transistors 32 and 22 are turned on. Also, between time T12 and time T13, a low-level potential is applied to the wirings WSL_1 to WSL_m except for the wiring WSL_i. Therefore, the transistors 32 included in the cells 31_1,1 to 31_m,n other than the i-th row of the cell array CA and the transistors 22 included in the cells 21_1 to 21_m other than the i-th row are turned off.

[0198] Furthermore, the ground potential GND continues to be applied to the wirings XCL_1 to XCL_m from before time T12.

[0199] <<From time T13 to time T14>> Between time T13 and time T14, a current I is supplied as first data from the circuit WCS to the cell array CA via the transistor F3_j. 0_ Specifically, when the wiring WCL shown in FIG. 8A is the wiring WCL_j, a signal corresponding to the first data is input to each of the wirings DW_1 to DW_K, and a current I flows from the circuit WCS to the second terminal of the transistor F3_j. 0_ i,j flows. In other words, the value of the K-bit signal input as the first data is α_i,j (α_i,j is 0 or more, 2 K -1 or less), then I0_i,j=α_i,j×I Wut (In the figure, "x" is shown as "*").

[0200] Note that when α_i,j is 0, I0_i,j=0, so strictly speaking, no current flows from circuit WCS to cell array CA via transistor F3_j, but in this specification, etc., it may be stated that "a current of I0_i,j=0 flows."

[0201] Between time T13 and time T14, there is a state of conduction between the first terminal of transistor 32 included in cell 31_i,j in the i-th row of cell array CA and wiring WCL_j, and there is a state of non-conduction between the first terminal of transistor 32 included in cells 31_1,j to 31_m,j other than the i-th row of cell array CA and wiring WCL_j, so that a current I0_i,j flows from wiring WCL_j to cell 31_i,j.

[0202] Meanwhile, the transistor 32 included in the cell 31_i,j is turned on. In the transistor 34, the gate-source voltage is V g _i,j-GND, and the current flowing between the first terminal and the second terminal of the transistor 34 is set to the current I0_i,j.

[0203] In addition, between time T13 and time T14, the circuit XCS supplies the wire XCL_i with a current I ref0 Specifically, when the wiring XCL shown in FIG. 8C is the wiring XCL_i, a high-level potential is input to the wiring DX_1 and a low-level potential is input to each of the wirings DX_2 to DX_K, and a current I flows from the circuit XCS to the wiring XCL_i. ref0 In other words, I ref0 =I Xut This becomes:

[0204] Between time T13 and time T14, a state of conduction is established between the first terminal of the transistor 22 included in the cell 21_i and the wiring XCL_i, and therefore, a current I ref0 is playing.

[0205] As in the cell 31_i,j, the transistor 22 included in the cell 21_i is turned on. In the transistor 24, the gate-source voltage is V gm _i-GND, and the current flowing between the first terminal and the second terminal of the transistor 24 is the current I ref0 is set.

[0206] <<From time T14 to time T15>> Between time T14 and time T15, a low-level potential is applied to the wiring WSL_i, which applies a low-level potential to the gates of the transistors 32 included in the cells 31_i,1 to 31_i,n in the i-th row of the cell array CA and the gate of the transistor 22 included in the cell 21_i, turning off the transistors 32 and 22.

[0207] When the transistor 32 included in the cell 31_i,j is turned off, the capacitor 35 is charged with V g _i,jV gmIn addition, when the transistor 32 included in the cell 21_i is turned off, the capacitor 25 holds 0, which is the difference between the potential of the gate of the transistor 24 (node ​​NNref_i) and the potential of the wiring XCL_i.

[0208] <<From time T15 to time T16>> 8C is the wiring XCL_i, the potential of the wiring XCL_i can be set to the ground potential GND by setting the initialization potential of the wiring VINIL2 to the ground potential GND and turning on the switch SWX.

[0209] Therefore, the potentials of nodes NN_i,1 to NN_i,n change due to capacitive coupling by capacitance 35 contained in each of cells 31_i,1 to 31_i,n in the i-th row, and the potential of node NNref_i changes due to capacitive coupling by capacitance 25 contained in cell 21_i.

[0210] The amount of change in the potential of the nodes NN_i,1 to NN_i,n is the potential obtained by multiplying the amount of change in the potential of the wiring XCL_i by a capacitive coupling coefficient determined by the configuration of each of the cells 31_i,1 to 31_i,n included in the cell array CA. The capacitive coupling coefficient is calculated based on the capacitance of the capacitor 35, the gate capacitance of the transistor 34, the parasitic capacitance, etc. In each of the cells 31_i,1 to 31_i,n, when the capacitive coupling coefficient due to the capacitor 35 is p, the potential of the node NN_i,j of the cell 31_i,j is calculated by multiplying the potential at the time point between time T14 and time T15 by p(V gm _i-GND) decreases.

[0211] Similarly, when the potential of the wiring XCL_i changes, the potential of the node NNref_i also changes due to the capacitive coupling of the capacitor 25 included in the cell 21_i. When the capacitive coupling coefficient of the capacitor 25 is p, the same as the capacitor 35, the potential of the node NNref_i of the cell 21_i changes from the potential between time T14 and time T15 to p(V gm 11, p=1 is set as an example. Therefore, the potential of the node NNref_i between time T15 and time T16 becomes GND.

[0212] As a result, the potential of the node NN_i,j of the cell 31_i,j drops, turning off the transistor 34. Similarly, the potential of the node NNref_i of the cell 21_i drops, turning off the transistor 24. Therefore, between time T15 and time T16, I 34 _i,j,I 24 Each of _i will be 0.

[0213] <<From time T16 to time T17>> Between time T16 and time T17, a high-level potential is applied to the wiring WSL_i+1. As a result, a high-level potential is applied to the gate of the transistor 32 included in cells 31_i+1,1 to 31_i+1,n in the (i+1)th row of the cell array CA and to the gate of the transistor 22 included in cell 21_i+1, turning on the transistors 32 and 22. Also, between time T16 and time T17, a low-level potential is applied to the wirings WSL_1 to WSL_m except for the wiring WSL_i+1. Therefore, the transistors 32 included in cells 31_1,1 to 31_m,n other than those in the (i+1)th row of the cell array CA and the transistors 22 included in cells 21_1 to 21_m other than those in the (i+1)th row are turned off.

[0214] Furthermore, the ground potential GND has been continuously applied to the wirings XCL_1 to XCL_m since before time T16.

[0215] <<From time T17 to time T18>> Between time T17 and time T18, a current I0_i+1,j flows as the first data from the circuit WCS to the cell array CA via the transistor F3_j. Specifically, when the wiring WCL shown in FIG. 8A is wiring WCL_j+1, a signal corresponding to the first data is input to each of the wirings DW_1 to DW_K, and a current I0_i+1,j flows from the circuit WCS to the second terminal of the transistor F3_j. That is, the value of the K-bit signal input as the first data is changed to α_i+1,j (α_i+1,j is 0 to 2). K -1 or less integer.) Then, I0_i+1,j=α_i+1,j×I Wut (In the figure, "x" is shown as "*").

[0216] Note that when α_i+1,j is 0, I0_i+1,j=0, so strictly speaking, no current flows from circuit WCS to cell array CA via transistor F3_j. However, in this specification, etc., it may be stated that "a current of I0_i+1,j=0 flows," as in the case of I0_i,j=0.

[0217] At this time, there is a conductive state between the first terminal of the transistor 32 included in the cell 31_i+1,j in the i+1th row of the cell array CA and the wiring WCL_j, and there is a non-conductive state between the first terminal of the transistor 32 included in the cells 31_1,j to 31_m,j other than the i+1th row of the cell array CA and the wiring WCL_j, so that a current I0_i+1,j flows from the wiring WCL_j to the cell 31_i+1,j.

[0218] Now, suppose that the transistor 32 included in the cell 31_i+1,j is in an on state. In the transistor 34, the gate-source voltage is V g _i+1,j-GND, and the current flowing between the first terminal and the second terminal of the transistor 34 is set to current I0_i+1,j.

[0219] In addition, between time T17 and time T18, the circuit XCS supplies the current I ref0 Specifically, similarly to the period from time T13 to time T14, when the wiring XCL shown in FIG. 8C is the wiring XCL_i+1, a high-level potential is input to the wiring DX_1 and a low-level potential is input to each of the wirings DX_2 to DX_K, and a current I flows from the circuit XCS to the wiring XCL_i+1. ref0 =I Xut is playing.

[0220] Between time T17 and time T18, a state of conduction is established between the first terminal of the transistor 22 included in the cell 21_i+1 and the wiring XCL_i+1, so that a current I ref0 is playing.

[0221] As in the case of the cell 31_i+1,j, the transistor 22 included in the cell 21_i+1 is in an on state. In the transistor 24, the gate-source voltage is V gm _i+1-GND, and the current flowing between the first terminal and the second terminal of the transistor 24 is the current I ref0 is set.

[0222] <<From time T18 to time T19>> Between time T18 and time T19, a low-level potential is applied to the wiring WSL_i+1, which applies a low-level potential to the gates of the transistors 32 included in the cells 31_i+1,1 to 31_i+1,n in the i+1th row of the cell array CA and the gate of the transistor 22 included in the cell 21_i+1, turning off the transistors 32 and 22.

[0223] When the transistor 32 included in the cell 31_i+1,j is turned off, the capacitor 35 is charged with a potential difference V g _i+1,jV gm_i+1 is held. Also, by turning off the transistor 32 included in the cell 21_i+1, the capacitor 25 holds 0, which is the difference between the potential of the gate (node ​​NNref_i+1) of the transistor 24 and the potential of the wiring XCL_i+1. Note that the voltage held by the capacitor 25 is a voltage (here, for example, V ds In this case, the potential of the node NNref_i+1 is V ds This can be thought of as the sum of the potentials.

[0224] <<From time T19 to time T20>> 8C is the wiring XCL_i+1, the potential of the wiring XCL_i+1 can be set to the ground potential GND by setting the initialization potential of the wiring VINIL2 to the ground potential GND and turning on the switch SWX.

[0225] Therefore, the potentials of nodes NN_i,1 to NN_i+1,n change due to capacitive coupling by capacitance 35 contained in each of cells 31_i+1,1 to 31_i+1,n in the i+1th row, and the potential of node NNref_i+1 changes due to capacitive coupling by capacitance 25 contained in cell 21_i+1.

[0226] The amount of change in the potential of the nodes NN_i+1,1 to NN_i+1,n is the potential obtained by multiplying the amount of change in the potential of the wiring XCL_i+1 by a capacitive coupling coefficient determined by the configuration of each of the cells 31_i+1,1 to 31_i+1,n included in the cell array CA. The capacitive coupling coefficient is calculated based on the capacitance of the capacitor 35, the gate capacitance of the transistor 34, the parasitic capacitance, etc. In each of the cells 31_i+1,1 to 31_i+1,n, when the capacitive coupling coefficient of the capacitor 35 is set to p, which is the same as the capacitive coupling coefficient of the capacitor 35 in each of the cells 31_i,1 to 31_i,n, the potential of the node NN_i+1,j of the cell 31_i+1,j is calculated by multiplying the amount of change in the potential of the wiring XCL_i+1 by p(V gm _i+1-GND) decreases.

[0227] Similarly, when the potential of the wiring XCL_i+1 changes, the potential of the node NNref_i+1 also changes due to the capacitive coupling of the capacitor 25 included in the cell 21_i+1. When the capacitive coupling coefficient of the capacitor 25 is p, the same as for the capacitor 35, the potential of the node NNref_i+1 of the cell 21_i+1 changes from the potential between time T18 and time T19 to p(V gm 11, p=1 is used as an example. Therefore, the potential of the node NNref_i+1 between time T20 and time T21 becomes GND.

[0228] As a result, the potential of the node NN_i+1,j of the cell 31_i+1,j drops, turning off the transistor 34. Similarly, the potential of the node NNref_i+1 of the cell 21_i+1 drops, turning off the transistor 24. Therefore, between time T19 and time T20, I 34 _i+1,j,I 24 Each of _i+1 will be 0.

[0229] <<From time T20 to time T21>> A low-level potential is applied to the wiring SWL1 from time T20 to time T21, so that a low-level potential is applied to the gates of the transistors F3_1 to F3_n, turning off the transistors F3_1 to F3_n.

[0230] <<From time T21 to time T22>> A high-level potential is applied to the wiring SWL2 from time T21 to time T22, so that a high-level potential is applied to the gates of the transistors F4_1 to F4_n, turning on the transistors F4_1 to F4_n.

[0231] <<From time T22 to time T23>> Between time T22 and time T23, the circuit XCS supplies the current I ref0 x_i times x_iI ref0 Specifically, for example, when the wiring XCL shown in FIG. 8C is the wiring XCL_i, a high-level potential or a low-level potential is input to each of the wirings DX_1 to DX_K according to the value of x_i, and a current x_iI flows from the circuit XCS to the wiring XCL_i. ref0 =x_iI Xut In this operation example, x_i corresponds to the value of the second data. At this time, the potential of the wiring XCL_i varies from 0 to V gm _i+ΔV_i.

[0232] When the potential of the wiring XCL_i changes, the potentials of the nodes NN_i,1 to NN_i,n also change due to capacitive coupling by the capacitors 35 included in each of the cells 31_i,1 to 31_i,n in the i-th row of the cell array CA. Therefore, the potential of the node NN_i,j of the cell 31_i,j is V g _i,j+pΔV_i.

[0233] Similarly, when the potential of the wiring XCL_i changes, the potential of the node NNref_i also changes due to capacitive coupling by the capacitor 25 included in the cell 21_i. Therefore, the potential of the node NNref_i of the cell 21_i changes as follows: V gm _i+pΔV_i.

[0234] Therefore, the current flowing between the first terminal and the second terminal of the transistor 34 included in the cell 31_i,j is proportional to the product of the first data w_i,j and the second data x_i, as described in the first embodiment.

[0235] In addition, between time T22 and time T23, the current I ref0 x_i+1 times x_i+1I ref0 Specifically, for example, when the wiring XCL shown in FIG. 8C is the wiring XCL_i+1, a high-level potential or a low-level potential is input to each of the wirings DX_1 to DX_K according to the value of x_i+1, and a current x_i+1I flows from the circuit XCS to the wiring XCL_i+1. ref0 =x_i+1I Xut In this operation example, x_i+1 corresponds to the value of the second data. At this time, the potential of the wiring XCL_i+1 changes from 0 to V gm _i+1+ΔV_i+1.

[0236] When the potential of the wiring XCL_i+1 changes, the potentials of the nodes NN_i+1,1 to NN_i+1,n also change due to capacitive coupling by the capacitors 35 included in each of the cells 31_i+1,1 to 31_i+1,n in the i+1th row of the cell array CA. Therefore, the potential of the node NN_i+1,j of the cell 31_i+1,j is V g _i+1,j+pΔV_i+1.

[0237] Similarly, when the potential of the wiring XCL_i+1 changes, the potential of the node NNref_i+1 also changes due to capacitive coupling by the capacitor 25 included in the cell 21_i+1. Therefore, the potential of the node NNref_i+1 of the cell 21_i+1 is V gm _i+1+pΔV_i+1.

[0238] Therefore, as described in the first embodiment, the current flowing between the first terminal and the second terminal of the transistor 34 included in the cell 31_i+1,j is proportional to the product of the first data w_i+1,j and the second data x_i+1.

[0239] Therefore, the current output from the conversion circuit ITRZ_j is proportional to the sum of the products of the weighting coefficients w_i,j and w_i+1,j, which are the first data, and the neuron signal values ​​x_i and x_i+1, which are the second data.

[0240] Therefore, even in the case of the arithmetic unit MAC1 having three or more rows and two or more columns of cell arrays CA, it is possible to perform the product-sum operation as described above. In this case, the arithmetic unit MAC1 selects one of the multiple columns as a current I ref0 , and xI ref0 By using a cell that holds a multiply-and-accumulate signal, it is possible to simultaneously perform multiply-and-accumulate operations for the remaining number of columns among the multiple columns. In other words, by increasing the number of columns in the memory cell array, it is possible to provide a semiconductor device that realizes high-speed multiply-and-accumulate operations. As a result, it is possible to provide a computing device with excellent computing performance per unit power.

[0241] Although the transistors included in the arithmetic unit MAC1 are OS transistors or Si transistors in this embodiment, one embodiment of the present invention is not limited thereto. The transistors included in the arithmetic unit MAC1 may be, for example, transistors including Ge or the like in a channel formation region, transistors including a compound semiconductor such as ZnSe, CdS, GaAs, InP, GaN, or SiGe in a channel formation region, transistors including a carbon nanotube in a channel formation region, or transistors including an organic semiconductor in a channel formation region.

[0242] Note that this embodiment mode can be appropriately combined with other embodiment modes described in this specification.

[0243] (Embodiment 3) In this embodiment, a hierarchical artificial neural network (hereinafter referred to as a neural network) will be described. Note that the operation of the hierarchical neural network can be performed by using the semiconductor device and the operation device described in the above embodiment.

[0244] In neural networks, the strength of synapses can be changed by providing existing information to the neural network. This process of providing existing information to the neural network and determining the strength of connections is sometimes called "learning."

[0245] Furthermore, by providing some information to a neural network that has undergone "learning" (with connection strengths determined), new information can be output based on the connection strengths. In this way, in a neural network, the process of outputting new information based on the provided information and connection strengths is sometimes called "inference" or "cognition." The signals input from neurons in the previous layer to neurons in the next layer are determined by the connection strengths (hereinafter referred to as weight coefficients) of the synapses connecting those neurons. The weight coefficients correspond to the weight data described in the above embodiment.

[0246] Neural network models include, for example, Hopfield and hierarchical types. In particular, neural networks with multi-layer structures are sometimes called "deep neural networks" (DNNs), and machine learning using deep neural networks is sometimes called "deep learning."

[0247] <Hierarchical neural network> As an example, a hierarchical neural network has one input layer, one or more intermediate layers (hidden layers), and one output layer, for a total of three or more layers. The hierarchical neural network 100 shown in FIG. 12A shows an example, and the neural network 100 has a first layer through an Rth layer (where R can be an integer equal to or greater than four). In particular, the first layer corresponds to the input layer, the Rth layer corresponds to the output layer, and the other layers correspond to intermediate layers. Note that FIG. 12A illustrates the (k-1)th layer and the kth layer (where k is an integer equal to or greater than three and equal to or less than R-1) as intermediate layers, and does not illustrate the other intermediate layers.

[0248] Each layer of the neural network 100 has one or more neurons. In FIG. 12A, the first layer is made up of neurons N1 (1) Neuron N p (1) (where p is an integer equal to or greater than 1), and the (k-1)th layer has neurons N1 (k-1) Neuron N m (k-1) (where m is an integer greater than or equal to 1), and the kth layer has neurons N1 (k) Neuron N n (k) (where n is an integer greater than or equal to 1), and the Rth layer has neurons N1 (R) Neuron N q (R) (where q is an integer equal to or greater than 1).

[0249] In addition, in Figure 12A, neuron N1 (1) , neuron Np (1) , neuron N1 (k-1) , neuron N m (k-1) , neuron N1 (k) , neuron N n (k) , neuron N1 (R) , neuron N q (R) In addition, the (k-1)th layer neuron N i (k-1) (where i is an integer between 1 and m), and the kth layer neuron N j (k) (where j is an integer between 1 and n) are also shown, and other neurons are omitted from the illustration.

[0250] Next, we will explain the transmission of signals from neurons in the previous layer to neurons in the next layer, and the signals input and output at each neuron. j (k) Focus on.

[0251] Figure 12B shows the k-th layer neuron N j (k) and neuron N j (k) and the signal input to neuron N j (k) 10 shows the signal output from the

[0252] Specifically, the neuron N1 in the (k-1)th layer (k-1) Neuron N m (k-1) The output signal z1 (k-1) ~z m (k-1) But neuron N j (k) The output is directed to neuron N j (k) is z1 (k-1) ~z m (k-1) Depending on z j (k) Generate zj (k) is output as an output signal to each neuron in the (k+1)th layer (not shown).

[0253] The degree of signal transmission for a signal input from a neuron in the previous layer to a neuron in the next layer is determined by the connection strength (hereinafter referred to as a weighting coefficient) of the synapse connecting those neurons. In the neural network 100, the signal output from a neuron in the previous layer is multiplied by the corresponding weighting coefficient before being input to a neuron in the next layer. If i is an integer between 1 and m, then the (k-1)th layer neuron N i (k-1) and the k-th layer neuron N j (k) The weight coefficient of the synapse between i (k-1) j (k) Then, the k-th layer neuron N j (k) The signal input to can be expressed by equation (7).

[0254]

number

[0255] That is, the neuron N1 in the (k-1)th layer (k-1) Neuron N m (k-1) From each of these, the k-th layer neuron N j (k) When a signal is transmitted to the (k-1) ~z m (k-1) The weighting coefficients (w1 (k-1) j (k) Or even w m (k-1) j (k) ) is multiplied by the k-th layer neuron N j (k) has w1 (k-1) j (k) z1(k-1) Or even w m (k-1) j (k) z m (k-1) is input. At this time, the k-th layer neuron N j (k) The sum of the signals input to j (k) is expressed as equation (8).

[0256]

number

[0257] Also, the weighting factor w1 (k-1) j (k) Or even w m (k-1) j (k) and the neuron signal z1 (k-1) ~z m (k-1) A bias may be applied to the result of the sum of products of and. When the bias is b, equation (8) can be rewritten as the following equation (9).

[0258]

number

[0259] Neuron N j (k) u j (k) Depending on j (k) where neuron N j (k) Output signal z from j (k) is defined by the following equation (10).

[0260]

number

[0261] The function f(u j (k) ) is an activation function in a hierarchical neural network, and can be a step function, a linear ramp function, a sigmoid function, etc. The activation function can be the same for all neurons or different for each layer. In addition, the activation functions of neurons can be the same or different for each layer.

[0262] The signals, weighting coefficients w, and biases b output by neurons in each layer may be analog or digital values. Digital values ​​may be, for example, binary or ternary. Values ​​with even larger bit counts are also acceptable. For example, in the case of analog values, activation functions such as linear ramp functions and sigmoid functions may be used. In the case of binary digital values, for example, step functions that output −1 or 1, or 0 or 1 may be used. Furthermore, the signals output by neurons in each layer may be ternary or more. In this case, ternary activation functions may be used, such as step functions that output −1, 0, or 1, or step functions that output 0, 1, or 2. Furthermore, for example, a step function that outputs five values, such as −2, −1, 0, 1, or 2, may be used. Using digital values ​​for at least one of the signals, weighting coefficients w, and biases b output by neurons in each layer can reduce the circuit size, power consumption, and computation speed. Furthermore, the accuracy of calculations can be improved by using analog values ​​for at least one of the signals output by neurons in each layer, the weighting coefficients w, and the biases b.

[0263] When an input signal is input to the first layer (input layer), neural network 100 generates an output signal in each layer, from the first layer (input layer) to the last layer (output layer), based on the signal input from the previous layer, using equations (7), (8) (or (9)), and (10), and outputs the output signal to the next layer. The signal output from the last layer (output layer) corresponds to the result of calculation by neural network 100.

[0264] When the calculation device MAC1 described in the second embodiment is applied as the hidden layer, the weight coefficient w s[k-1] (k-1) s_K (k) (where s[k-1] is an integer between 1 and m, and s_K is an integer between 1 and n) is used as the first data, and a current corresponding to the first data is stored in each cell IM of the same column, and the neuron N in the (k-1) layer s[k-1] (k-1) Output signal z from s[k-1] (k-1) is used as the second data, and a current corresponding to the second data is passed from the circuit XCS to the wiring XCL of each row, thereby generating a current I S In addition, by using the value of the sum of products to calculate the value of the activation function, the value of the activation function is used as a signal to activate the neuron N in the kth layer. s_K (k) The output signal z s_K (k) It can be said that:

[0265] In addition, when the arithmetic unit MAC1 described in the second embodiment is applied to the output layer, the weighting coefficient w s[R-1] (R-1) s[R] (R) (s[R-1] is an integer equal to or greater than 1, and s[R] is an integer equal to or greater than 1 and equal to or less than q) is used as the first data, and a current corresponding to the first data is stored in each cell IM of the same column, and the neuron N in the (R-1) layer s[R-1] (R-1) Output signal z from s[R-1] (R-1)is used as the second data, and a current corresponding to the second data is passed from the circuit XCS to the wiring XCL of each row, thereby generating a current I S In addition, by using the value of the sum of products to calculate the value of the activation function, the value of the activation function is used as a signal to activate the neuron N in the Rth layer. s[R] (R) The output signal z s[R] (R) It can be said that:

[0266] The input layer described in this embodiment may function as a buffer circuit that outputs an input signal to the second layer.

[0267] Note that this embodiment mode can be appropriately combined with other embodiment modes described in this specification.

[0268] (Fourth embodiment) In this embodiment, an example of a transistor configuration applicable to the semiconductor device 10 and the arithmetic unit MAC1 described in the above embodiment will be described. As an example, a configuration in which transistors having different electrical characteristics are stacked will be described. This configuration can increase the degree of freedom in designing the semiconductor device. Furthermore, stacking transistors having different electrical characteristics can increase the degree of integration of the semiconductor device.

[0269] FIG. 13 shows a part of a cross-sectional structure of a semiconductor device. The semiconductor device shown in FIG. 13 includes a transistor 550, a transistor 500, and a capacitor 600. FIG. 14A is a cross-sectional view of the transistor 500 in the channel length direction, and FIG. 14B is a cross-sectional view of the transistor 500 in the channel width direction. For example, the transistor 500 corresponds to an OS transistor included in the reference cell 21 and the calculation cell 31 described in the above embodiment, that is, a transistor having an oxide semiconductor in a channel formation region. The transistor 550 corresponds to a Si transistor included in the reference cell 21 and the calculation cell 31 described in the above embodiment, that is, a transistor having silicon in a channel formation region. The capacitor 600 corresponds to capacitance included in the reference cell 21 and the calculation cell 31.

[0270] In FIG. 13, the transistor 500 is provided above the transistor 550 , and the capacitor 600 is provided above the transistor 550 and the transistor 500 .

[0271] The transistor 550 is provided on a substrate 311. The substrate 311 is, for example, a p-type silicon substrate. The substrate 311 may also be an n-type silicon substrate. The oxide layer 314 is preferably an insulating layer (also referred to as a BOX layer) formed by buried oxidation (buried oxide) in the substrate 311, such as silicon oxide. The transistor 550 is provided on a single-crystal silicon substrate provided on the substrate 311 with the oxide layer 314 interposed therebetween, a so-called SOI (Silicon On Insulator) substrate.

[0272] A substrate 311 in the SOI substrate is provided with an insulator 313 that functions as an element isolation layer. The substrate 311 also has a well region 312. The well region 312 is a region that is given n-type or p-type conductivity depending on the conductivity type of the transistor 550. The single crystal silicon in the SOI substrate is provided with a semiconductor region 315, and low-resistance regions 316a and 316b that function as source and drain regions. A low-resistance region 316c is also provided on the well region 312.

[0273] The transistor 550 can be provided overlapping a well region 312 to which an impurity element imparting conductivity is added. The well region 312 can function as a bottom gate electrode of the transistor 550 by independently changing the potential through the low-resistance region 316c. This allows the threshold voltage of the transistor 550 to be controlled. In particular, applying a negative potential to the well region 312 can increase the threshold voltage of the transistor 550 and reduce the off-state current. Therefore, applying a negative potential to the well region 312 can reduce the drain current when the potential applied to the gate electrode of the Si transistor is 0 V. As a result, power consumption in the semiconductor device 10 and the computing device MAC1, etc., including the transistor 550, can be reduced, and computing efficiency can be improved.

[0274] The transistor 550 is preferably a so-called fin type transistor in which the top surface of the semiconductor layer and the side surfaces in the channel width direction are covered with a conductor 318 via an insulator 317. By using the fin type transistor 550, the effective channel width can be increased, thereby improving the on-state characteristics of the transistor 550. Furthermore, the contribution of the electric field of the gate electrode can be increased, thereby improving the off-state characteristics of the transistor 550.

[0275] Note that the transistor 550 may be either a p-channel transistor or an n-channel transistor.

[0276] The conductor 318 may function as a first gate (also called a top gate) electrode, and the well region 312 may function as a second gate (also called a bottom gate) electrode. In this case, the potential applied to the well region 312 can be controlled via the low-resistance region 316c.

[0277] The region where the channel of the semiconductor region 315 is formed, the region nearby, the low-resistance region 316a and low-resistance region 316b that serve as the source or drain region, and the low-resistance region 316c connected to an electrode that controls the potential of the well region 312 preferably contain a semiconductor such as a silicon-based semiconductor, and preferably single-crystal silicon. Alternatively, they may be formed of a material containing Ge (germanium), SiGe (silicon germanium), GaAs (gallium arsenide), GaAlAs (gallium aluminum arsenide), or the like. A configuration using silicon in which the effective mass is controlled by applying stress to the crystal lattice and changing the lattice spacing may also be used. Alternatively, the transistor 550 may be a high electron mobility transistor (HEMT) by using GaAs and GaAlAs, or the like.

[0278] Well region 312, low resistance region 316a, low resistance region 316b, and low resistance region 316c contain, in addition to the semiconductor material applied to semiconductor region 315, an element that imparts n-type conductivity, such as arsenic or phosphorus, or an element that imparts p-type conductivity, such as boron.

[0279] The conductor 318 functioning as the gate electrode can be made of a conductive material such as a semiconductor material, metal material, alloy material, or metal oxide material, including an element that imparts n-type conductivity, such as arsenic or phosphorus, or an element that imparts p-type conductivity, such as boron. The conductor 318 may also be made of a silicide, such as nickel silicide.

[0280] Since the work function is determined by the material of the conductor, the threshold voltage of the transistor can be adjusted by selecting the material of the conductor. Specifically, it is preferable to use a material such as titanium nitride or tantalum nitride as the conductor. Furthermore, in order to achieve both conductivity and embeddability, it is preferable to use a metal material such as tungsten or aluminum as the conductor in a stacked structure, and tungsten is particularly preferable in terms of heat resistance.

[0281] The low-resistance regions 316a, 316b, and 316c may be formed by stacking another conductor, for example, a silicide such as nickel silicide. This configuration can increase the conductivity of the regions that function as electrodes. In this case, an insulator that functions as a sidewall spacer (also referred to as a sidewall insulating layer) may be provided on the side surface of the conductor 318 that functions as the gate electrode and on the side surface of the insulator that functions as the gate insulating film. This configuration can prevent electrical conduction between the conductor 318 and the low-resistance regions 316a and 316b.

[0282] An insulator 320, an insulator 322, an insulator 324, and an insulator 326 are stacked in this order over the transistor 550.

[0283] The insulators 320, 322, 324, and 326 can be made of, for example, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, aluminum oxynitride, aluminum nitride oxide, aluminum nitride, or the like.

[0284] In this specification, silicon oxynitride refers to a material whose composition contains more oxygen than nitrogen, silicon nitride oxide refers to a material whose composition contains more nitrogen than oxygen, aluminum oxynitride refers to a material whose composition contains more oxygen than nitrogen, and aluminum nitride oxide refers to a material whose composition contains more nitrogen than oxygen.

[0285] The insulator 322 may function as a planarizing film that flattens steps caused by the transistor 550 or the like provided thereunder. For example, the top surface of the insulator 322 may be planarized by planarization treatment using a chemical mechanical polishing (CMP) method or the like to improve the planarity.

[0286] The insulator 324 is preferably a film having a barrier property that prevents hydrogen, impurities, and the like from diffusing from the substrate 311 or the transistor 550 to a region where the transistor 500 is provided.

[0287] An example of a film having a barrier property against hydrogen is silicon nitride formed by a CVD method. Here, hydrogen diffusion into a semiconductor element having an oxide semiconductor, such as the transistor 500, may degrade the characteristics of the semiconductor element. Therefore, it is preferable to use a film that suppresses hydrogen diffusion between the transistor 500 and the transistor 550. Specifically, the film that suppresses hydrogen diffusion is a film that releases a small amount of hydrogen.

[0288] The amount of desorption of hydrogen can be analyzed using, for example, thermal desorption spectroscopy (TDS). For example, the amount of desorption of hydrogen from the insulator 324 is calculated as 10×10 per area of ​​the insulator 324 when the surface temperature of the film is in the range of 50° C. to 500° C. in TDS analysis. 15 atoms / cm 2 Less than or equal to 5 x 10 15 atoms / cm 2 The following is fine.

[0289] It is preferable that the insulator 326 has a lower dielectric constant than the insulator 324. For example, the relative dielectric constant of the insulator 326 is preferably less than 4, and more preferably less than 3. Furthermore, for example, the relative dielectric constant of the insulator 326 is preferably 0.7 times or less, and more preferably 0.6 times or less, the relative dielectric constant of the insulator 324. By using a material with a low dielectric constant as the interlayer film, the parasitic capacitance that occurs between wirings can be reduced.

[0290] Conductors 328 and 330, which connect to the capacitor 600 or the transistor 500, are embedded in the insulators 320, 322, 324, and 326. The conductors 328 and 330 function as plugs or wiring. A plurality of conductors that function as plugs or wiring may be collectively assigned the same reference numeral. In this specification and the like, a wiring and a plug connected to the wiring may be integrated. That is, a part of a conductor may function as a wiring, and a part of a conductor may function as a plug.

[0291] The materials for each plug and wiring (conductor 328, conductor 330, etc.) can be a conductive material such as a metal material, an alloy material, a metal nitride material, or a metal oxide material, and can be used in a single layer or a laminated layer. High-melting-point materials such as tungsten and molybdenum, which have both heat resistance and conductivity, are preferably used, and tungsten is preferred. Alternatively, they are preferably formed from a low-resistance conductive material such as aluminum or copper. The use of a low-resistance conductive material can reduce the wiring resistance.

[0292] A wiring layer may be provided over the insulator 326 and the conductor 330. For example, in FIG. 13, the insulator 350, the insulator 352, and the insulator 354 are stacked in this order. The conductor 356 is formed in the insulator 350, the insulator 352, and the insulator 354. The conductor 356 functions as a plug or wiring connected to the transistor 550. Note that the conductor 356 can be formed using a material similar to that of the conductor 328 and the conductor 330.

[0293] Note that, for example, the insulator 350 preferably uses an insulator having a barrier property against hydrogen, similar to the insulator 324. The conductor 356 preferably includes a conductor having a barrier property against hydrogen. In particular, a conductor having a barrier property against hydrogen is formed in an opening of the insulator 350 having a barrier property against hydrogen. With this structure, the transistor 550 and the transistor 500 can be separated by a barrier layer, and diffusion of hydrogen from the transistor 550 to the transistor 500 can be suppressed.

[0294] Note that, for example, tantalum nitride or the like is preferably used as a conductor having a barrier property against hydrogen. Stacking tantalum nitride and highly conductive tungsten can suppress diffusion of hydrogen from the transistor 550 while maintaining the conductivity of the wiring. In this case, it is preferable that the tantalum nitride layer having a barrier property against hydrogen be in contact with the insulator 350 having a barrier property against hydrogen.

[0295] A wiring layer may be provided over the insulator 354 and the conductor 356. For example, in FIG. 13, an insulator 360, an insulator 362, and an insulator 364 are stacked in this order. A conductor 366 is formed in the insulator 360, the insulator 362, and the insulator 364. The conductor 366 functions as a plug or a wiring. The conductor 366 can be provided using the same material as the conductors 328 and 330.

[0296] Note that, for example, the insulator 360 preferably uses an insulator having a barrier property against hydrogen, similar to the insulator 324. The conductor 366 preferably includes a conductor having a barrier property against hydrogen. In particular, a conductor having a barrier property against hydrogen is formed in an opening of the insulator 360 having a barrier property against hydrogen. With this structure, the transistor 550 and the transistor 500 can be separated by a barrier layer, and diffusion of hydrogen from the transistor 550 to the transistor 500 can be suppressed.

[0297] A wiring layer may be provided over the insulator 364 and the conductor 366. For example, in FIG. 13, an insulator 370, an insulator 372, and an insulator 374 are stacked in this order. A conductor 376 is formed in the insulator 370, the insulator 372, and the insulator 374. The conductor 376 functions as a plug or wiring. The conductor 376 can be formed using the same material as the conductors 328 and 330.

[0298] Note that, for example, the insulator 370 preferably uses an insulator having a barrier property against hydrogen, similar to the insulator 324. The conductor 376 preferably includes a conductor having a barrier property against hydrogen. In particular, a conductor having a barrier property against hydrogen is formed in an opening of the insulator 370 having a barrier property against hydrogen. With this structure, the transistor 550 and the transistor 500 can be separated by a barrier layer, and diffusion of hydrogen from the transistor 550 to the transistor 500 can be suppressed.

[0299] A wiring layer may be provided over the insulator 374 and the conductor 376. For example, in FIG. 13, an insulator 380, an insulator 382, ​​and an insulator 384 are stacked in this order. A conductor 386 is formed in the insulator 380, the insulator 382, ​​and the insulator 384. The conductor 386 functions as a plug or a wiring. The conductor 386 can be formed using a material similar to that of the conductor 328 and the conductor 330.

[0300] Note that, for example, the insulator 380 preferably uses an insulator having a barrier property against hydrogen, similar to the insulator 324. The conductor 386 preferably includes a conductor having a barrier property against hydrogen. In particular, a conductor having a barrier property against hydrogen is formed in an opening of the insulator 380 having a barrier property against hydrogen. With this structure, the transistor 550 and the transistor 500 can be separated by a barrier layer, and diffusion of hydrogen from the transistor 550 to the transistor 500 can be suppressed.

[0301] Although the above describes a wiring layer including the conductor 356, a wiring layer including the conductor 366, a wiring layer including the conductor 376, and a wiring layer including the conductor 386, the semiconductor device according to this embodiment is not limited to this. There may be three or fewer wiring layers similar to the wiring layer including the conductor 356, or there may be five or more wiring layers similar to the wiring layer including the conductor 356.

[0302] An insulator 510, an insulator 512, an insulator 514, and an insulator 516 are stacked in this order on the insulator 384. Any of the insulators 510, 512, 514, and 516 is preferably made of a substance that has a barrier property against oxygen or hydrogen.

[0303] For example, the insulator 510 and the insulator 514 are preferably formed using a film having a barrier property against hydrogen or impurities in a region from the substrate 311 or a region where the transistor 550 is provided to a region where the transistor 500 is provided. Therefore, a material similar to that of the insulator 324 can be used.

[0304] An example of a film having a barrier property against hydrogen is silicon nitride formed by a CVD method. Here, hydrogen diffusion into a semiconductor element including an oxide semiconductor, such as the transistor 500, may degrade the characteristics of the semiconductor element. Therefore, a film that suppresses hydrogen diffusion is preferably used between the transistor 500 and the transistor 550.

[0305] As a film having a barrier property against hydrogen, for example, the insulators 510 and 514 are preferably made of a metal oxide such as aluminum oxide, hafnium oxide, or tantalum oxide.

[0306] In particular, aluminum oxide has a high blocking effect against both oxygen and impurities such as hydrogen and moisture, which can cause fluctuations in the electrical characteristics of a transistor. Therefore, aluminum oxide can prevent impurities such as hydrogen and moisture from entering the transistor 500 during and after the transistor manufacturing process. Furthermore, aluminum oxide can suppress the release of oxygen from the oxide that constitutes the transistor 500. Therefore, aluminum oxide is suitable for use as a protective film for the transistor 500.

[0307] For example, the insulator 512 and the insulator 516 can be made of a material similar to that of the insulator 320. By using a material with a relatively low dielectric constant for these insulators, the parasitic capacitance generated between wirings can be reduced. For example, the insulators 512 and 516 can be made of a silicon oxide film, a silicon oxynitride film, or the like.

[0308] A conductor 518, a conductor constituting the transistor 500 (for example, the conductor 503), and the like are embedded in the insulators 510, 512, 514, and 516. The conductor 518 functions as a plug or wiring connected to the capacitor 600 or the transistor 550. The conductor 518 can be formed using a material similar to that of the conductor 328 and the conductor 330.

[0309] In particular, the conductor 518 in the region in contact with the insulator 510 and the insulator 514 is preferably a conductor having a barrier property against oxygen, hydrogen, and water. With this structure, the transistor 550 and the transistor 500 can be separated by a layer having a barrier property against oxygen, hydrogen, and water, and diffusion of hydrogen from the transistor 550 to the transistor 500 can be suppressed.

[0310] Above the insulator 516 is the transistor 500 .

[0311] As shown in Figures 14A and 14B, transistor 500 has conductor 503 arranged so as to be embedded in insulator 514 and insulator 516, insulator 522 arranged on insulator 516 and conductor 503, insulator 524 arranged on insulator 522, oxide 530a arranged on insulator 524, oxide 530b arranged on oxide 530a, conductors 542a and 542b arranged apart from each other on oxide 530b, insulator 580 arranged on conductors 542a and 542b and having an opening formed therein overlapping with conductors 542a and 542b, insulator 545 arranged on the bottom and side surfaces of the opening, and conductor 560 arranged on the surface on which insulator 545 is formed.

[0312] 14A and 14B, it is preferable that insulator 544 be disposed between oxide 530a, oxide 530b, conductor 542a, and conductor 542b and insulator 580. It is preferable that conductor 560 have conductor 560a disposed inside insulator 545 and conductor 560b disposed so as to be embedded inside conductor 560a. It is preferable that insulator 574 be disposed on insulator 580, conductor 560, and insulator 545, as shown in FIGS.

[0313] In this specification and other documents, the oxide 530a and the oxide 530b may be collectively referred to as the oxide 530.

[0314] Note that although the transistor 500 has a structure in which two layers of the oxide 530a and the oxide 530b are stacked in and around the channel formation region, the present invention is not limited to this. For example, a single layer of the oxide 530b or a stacked structure of three or more layers may be used.

[0315] Although the transistor 500 has a two-layer structure in which the conductor 560 is stacked, the present invention is not limited to this. For example, the conductor 560 may have a single-layer structure or a stacked structure of three or more layers. The transistor 500 shown in FIGS. 13, 14A, and 14B is merely an example and is not limited to this structure. An appropriate transistor may be used depending on the circuit configuration, driving method, and the like.

[0316] Here, the conductor 560 functions as the gate electrode of the transistor, and the conductors 542a and 542b function as the source and drain electrodes, respectively. As described above, the conductor 560 is formed so as to be embedded in the opening of the insulator 580 and in the region sandwiched between the conductors 542a and 542b. The arrangement of the conductors 560, 542a, and 542b is selected in a self-aligned manner with respect to the opening of the insulator 580. That is, in the transistor 500, the gate electrode can be positioned between the source and drain electrodes in a self-aligned manner. Therefore, the conductor 560 can be formed without providing a margin for alignment, thereby reducing the area occupied by the transistor 500. This allows for miniaturization and high integration of semiconductor devices.

[0317] Furthermore, since the conductor 560 is formed in a self-aligned manner in the region between the conductor 542a and the conductor 542b, the conductor 560 does not have a region that overlaps with the conductor 542a or the conductor 542b. This reduces the parasitic capacitance formed between the conductor 560 and the conductor 542a and between the conductor 560 and the conductor 542b. This improves the switching speed of the transistor 500 and provides high frequency characteristics.

[0318] The conductor 560 may function as a first gate (also referred to as a top gate) electrode. The conductor 503 may function as a second gate (also referred to as a bottom gate) electrode. In this case, the threshold voltage of the transistor 500 can be controlled by changing the potential applied to the conductor 503 independently of the potential applied to the conductor 560. In particular, applying a negative potential to the conductor 503 can increase the threshold voltage of the transistor 500 and reduce the off-state current. Therefore, applying a negative potential to the conductor 503 can reduce the drain current when the potential applied to the conductor 560 is 0 V compared to not applying a negative potential to the conductor 503.

[0319] The conductor 503 is arranged to overlap the oxide 530 and the conductor 560. In this way, when a potential is applied to the conductor 560 and the conductor 503, the electric field generated from the conductor 560 and the electric field generated from the conductor 503 are connected, and a channel formation region formed in the oxide 530 can be covered.

[0320] In this specification and the like, a transistor configuration in which a channel formation region is electrically surrounded by the electric field of a pair of gate electrodes (a first gate electrode and a second gate electrode) is called a surrounded channel (S-channel) configuration. The S-channel configuration disclosed in this specification and the like differs from the fin type configuration and the planar type configuration. By adopting the S-channel configuration, the transistor can be made more resistant to the short channel effect, in other words, less susceptible to the short channel effect.

[0321] The conductor 503 has a structure similar to that of the conductor 518, in which the conductor 503a is formed in contact with the inner walls of the openings of the insulators 514 and 516, and the conductor 503b is formed further inward. Note that although the transistor 500 has a structure in which the conductors 503a and 503b are stacked, the present invention is not limited to this. For example, the conductor 503 may have a single layer structure or a stacked structure of three or more layers.

[0322] Here, the conductor 503a is preferably made of a conductive material that has the function of suppressing the diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, and copper atoms (the impurities are less likely to permeate). Alternatively, it is preferably made of a conductive material that has the function of suppressing the diffusion of oxygen (for example, at least one of oxygen atoms, oxygen molecules, etc.) (the oxygen is less likely to permeate). In this specification, the function of suppressing the diffusion of impurities or oxygen refers to the function of suppressing the diffusion of one or more of the impurities or oxygen.

[0323] For example, the conductor 503a has a function of suppressing the diffusion of oxygen, so that the conductor 503b can be prevented from being oxidized and its conductivity from decreasing.

[0324] Furthermore, when the conductor 503 also functions as a wiring, it is preferable that the conductor 503b be made of a highly conductive material containing tungsten, copper, or aluminum as a main component. Note that, although the conductor 503 is illustrated in this embodiment as a stack of the conductors 503a and 503b, the conductor 503 may have a single-layer structure.

[0325] The insulator 522 and the insulator 524 function as a second gate insulating film.

[0326] Here, the insulator 524 in contact with the oxide 530 preferably contains more oxygen than the oxygen required for the stoichiometric composition. The oxygen is easily released from the film by heating. In this specification and elsewhere, oxygen released by heating may be referred to as "excess oxygen." In other words, the insulator 524 preferably has a region containing excess oxygen (also referred to as an "excess oxygen region"). By providing such an insulator containing excess oxygen in contact with the oxide 530, oxygen vacancies (V O When hydrogen enters the oxygen vacancy in the oxide 530, the defect (hereinafter referred to as V OH.) functions as a donor and may generate electrons as carriers. In addition, some of the hydrogen may bond with oxygen that is bonded to a metal atom to generate electrons as carriers. Therefore, a transistor using an oxide semiconductor containing a large amount of hydrogen is likely to have normally-on characteristics. Furthermore, hydrogen in an oxide semiconductor is easily moved by stress such as heat or an electric field. Therefore, if an oxide semiconductor contains a large amount of hydrogen, the reliability of the transistor may be reduced. In one embodiment of the present invention, V in the oxide 530 O It is preferable to reduce H as much as possible to obtain high-purity intrinsic or substantially high-purity intrinsic V. O To obtain an oxide semiconductor with sufficiently reduced H, it is important to remove impurities such as moisture and hydrogen from the oxide semiconductor (also called "dehydration" or "dehydrogenation treatment") and to supply oxygen to the oxide semiconductor to compensate for oxygen vacancies (also called "oxygenation treatment"). O When an oxide semiconductor in which impurities such as H are sufficiently reduced is used for a channel formation region of a transistor, stable electrical characteristics can be obtained.

[0327] Specifically, it is preferable to use an oxide material from which a portion of oxygen is released by heating as an insulator having an excess oxygen region. The oxide material from which oxygen is released by heating is an oxide material from which the amount of released oxygen converted to oxygen atoms is 1.0 × 10 in TDS (Thermal Desorption Spectroscopy) analysis. 18 atoms / cm 3 or more, preferably 1.0 × 10 19 atoms / cm 3 More preferably, 2.0 × 10 19 atoms / cm 3 or more, or 3.0 x 10 20 atoms / cm 3 The oxide film is one having the above properties. The surface temperature of the film during the TDS analysis is preferably in the range of 100°C or higher and 700°C or lower, or 100°C or higher and 400°C or lower.

[0328] Alternatively, the oxide 530 may be brought into contact with the insulator having the excess oxygen region and subjected to one or more of heat treatment, microwave treatment, and RF treatment. By performing such treatment, water or hydrogen in the oxide 530 can be removed. For example, a reaction occurs in the oxide 530 that breaks the VOH bond, in other words, "V O The reaction "H → Vo + H" occurs, resulting in dehydrogenation. Some of the generated hydrogen may combine with oxygen to form HO, which may be removed from the oxide 530 or an insulator near the oxide 530. Some of the hydrogen may also be gettered to the conductor 542.

[0329] The microwave treatment is preferably performed using, for example, an apparatus having a power source for generating high-density plasma or an apparatus having a power source for applying RF to the substrate side. For example, high-density oxygen radicals can be generated by using an oxygen-containing gas and high-density plasma, and the oxygen radicals generated by the high-density plasma can be efficiently introduced into the oxide 530 or an insulator near the oxide 530 by applying RF to the substrate side. The microwave treatment is performed at a pressure of 133 Pa or higher, preferably 200 Pa or higher, and more preferably 400 Pa or higher. The gases introduced into the microwave treatment apparatus may be, for example, oxygen and argon, with an oxygen flow ratio (O2 / (O2+Ar)) of 50% or less, preferably 10% to 30%.

[0330] During the manufacturing process of the transistor 500, heat treatment is preferably performed with the surface of the oxide 530 exposed. The heat treatment may be performed, for example, at a temperature of 100° C. to 450° C., more preferably 350° C. to 400° C. Note that the heat treatment is performed in a nitrogen gas or inert gas atmosphere, or an atmosphere containing an oxidizing gas at 10 ppm or more, 1% or more, or 10% or more. For example, the heat treatment is preferably performed in an oxygen atmosphere. This supplies oxygen to the oxide 530, thereby eliminating oxygen vacancies (V O) can be reduced. The heat treatment may be performed under reduced pressure. Alternatively, the heat treatment may be performed in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas after the heat treatment in a nitrogen gas or inert gas atmosphere to compensate for the desorbed oxygen. Alternatively, the heat treatment may be performed in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas, and then the heat treatment may be performed in a nitrogen gas or inert gas atmosphere.

[0331] By subjecting the oxide 530 to oxygen addition treatment, the oxygen vacancies in the oxide 530 can be repaired by the supplied oxygen, in other words, the reaction "Vo + O → null" can be promoted. Furthermore, the supplied oxygen reacts with the hydrogen remaining in the oxide 530, and the hydrogen can be removed as H2O (dehydration). As a result, the hydrogen remaining in the oxide 530 recombines with the oxygen vacancies to form V O The formation of H can be suppressed.

[0332] When the insulator 524 has an excess oxygen region, the insulator 522 preferably has a function of suppressing the diffusion of oxygen (for example, oxygen atoms, oxygen molecules, etc.) (preferably making the oxygen less permeable).

[0333] The insulator 522 preferably has a function of suppressing diffusion of oxygen, impurities, and the like, which prevents oxygen contained in the oxide 530 from diffusing toward the conductor 503. Furthermore, reaction of the conductor 503 with oxygen contained in the insulator 524, the oxide 530, and the like can be suppressed.

[0334] The insulator 522 is preferably a single-layer or multi-layer insulator containing a high-k material, such as aluminum oxide, hafnium oxide, oxide containing aluminum and hafnium (hafnium aluminate), tantalum oxide, zirconium oxide, lead zirconate titanate (PZT), strontium titanate (SrTiO3), or (Ba,Sr)TiO3 (BST). As transistors become smaller and more highly integrated, thinner gate insulating films can cause problems such as leakage current. Using a high-k material for the insulator that functions as the gate insulating film allows for a reduction in the gate potential during transistor operation while maintaining the physical film thickness.

[0335] In particular, an insulator containing an oxide of one or both of aluminum and hafnium, which is an insulating material that has the function of suppressing the diffusion of impurities and oxygen (i.e., is difficult for oxygen to permeate), is preferably used. As an insulator containing an oxide of one or both of aluminum and hafnium, aluminum oxide, hafnium oxide, or an oxide containing aluminum and hafnium (hafnium aluminate) is preferably used. When the insulator 522 is formed using such a material, the insulator 522 functions as a layer that suppresses oxygen release from the oxide 530 and / or the intrusion of impurities such as hydrogen into the oxide 530 from the periphery of the transistor 500.

[0336] Alternatively, for example, aluminum oxide, bismuth oxide, germanium oxide, niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttrium oxide, or zirconium oxide may be added to these insulators. Alternatively, these insulators may be nitrided. Silicon oxide, silicon oxynitride, or silicon nitride may be stacked on the above insulators.

[0337] 14A and 14B, the second gate insulating film has a two-layer structure including the insulators 522 and 524. However, the second gate insulating film may have a single layer, a three-layer structure, or a four- or more-layer structure. In this case, the second gate insulating film is not limited to a stack structure made of the same material, and may have a stack structure made of different materials.

[0338] The transistor 500 uses a metal oxide functioning as an oxide semiconductor for the oxide 530 including the channel formation region. For example, the oxide 530 may be a metal oxide such as In-M-Zn oxide (wherein M is one or more elements selected from aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, or the like).

[0339] The metal oxide functioning as an oxide semiconductor may be formed by a sputtering method or an ALD (Atomic Layer Deposition) method. Note that the metal oxide functioning as an oxide semiconductor will be described in detail in other embodiments.

[0340] The metal oxide that functions as a channel formation region in the oxide 530 preferably has a band gap of 2 eV or more, preferably 2.5 eV or more. By using a metal oxide with a wide band gap, the off-state current of the transistor can be reduced.

[0341] The oxide 530 has the oxide 530a below the oxide 530b, and thus can suppress the diffusion of impurities from components formed below the oxide 530a to the oxide 530b.

[0342] Note that oxide 530 preferably has a stacked structure of multiple oxide layers with different atomic ratios of each metal atom. Specifically, the atomic ratio of element M among the constituent elements in the metal oxide used for oxide 530a is preferably greater than the atomic ratio of element M among the constituent elements in the metal oxide used for oxide 530b. Furthermore, the atomic ratio of element M to In in the metal oxide used for oxide 530a is preferably greater than the atomic ratio of element M to In in the metal oxide used for oxide 530b. Furthermore, the atomic ratio of In to element M in the metal oxide used for oxide 530b is preferably greater than the atomic ratio of In to element M in the metal oxide used for oxide 530a.

[0343] The energy of the conduction band minimum of the oxide 530a is preferably higher than that of the oxide 530b, or in other words, the electron affinity of the oxide 530a is preferably smaller than that of the oxide 530b.

[0344] Here, the energy level of the conduction band minimum changes gradually at the junction between the oxide 530a and the oxide 530b. In other words, the energy level of the conduction band minimum at the junction between the oxide 530a and the oxide 530b changes continuously or forms a continuous junction. To achieve this, it is preferable to reduce the defect level density of the mixed layer formed at the interface between the oxide 530a and the oxide 530b.

[0345] Specifically, when the oxide 530a and the oxide 530b have a common element (main component) other than oxygen, a mixed layer with a low density of defect states can be formed. For example, when the oxide 530b is an In-Ga-Zn oxide, the oxide 530a may be an In-Ga-Zn oxide, a Ga-Zn oxide, a gallium oxide, or the like.

[0346] In this case, the main carrier path is the oxide 530b. By configuring the oxide 530a as described above, the defect state density at the interface between the oxide 530a and the oxide 530b can be reduced. As a result, the influence of interface scattering on carrier conduction is reduced, and the transistor 500 can obtain a high on-state current.

[0347] Conductors 542a and 542b, which function as a source electrode and a drain electrode, are provided on oxide 530b. Conductors 542a and 542b are preferably made of a metal element selected from aluminum, chromium, copper, silver, gold, platinum, tantalum, nickel, titanium, molybdenum, tungsten, hafnium, vanadium, niobium, manganese, magnesium, zirconium, beryllium, indium, ruthenium, iridium, strontium, and lanthanum, or an alloy containing any of the above metal elements or an alloy combining any of the above metal elements. For example, tantalum nitride, titanium nitride, tungsten, a nitride containing titanium and aluminum, a nitride containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, an oxide containing strontium and ruthenium, or an oxide containing lanthanum and nickel is preferably used. In addition, tantalum nitride, titanium nitride, nitrides containing titanium and aluminum, nitrides containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, oxides containing strontium and ruthenium, and oxides containing lanthanum and nickel are preferred because they are conductive materials that are resistant to oxidation or materials that maintain conductivity even when absorbing oxygen.Furthermore, metal nitride films such as tantalum nitride are preferred because they have barrier properties against hydrogen or oxygen.

[0348] 14A, the conductors 542a and 542b are shown as single-layer structures, but they may be stacked with two or more layers. For example, a tantalum nitride film and a tungsten film may be stacked. Alternatively, a titanium film and an aluminum film may be stacked. Alternatively, a two-layer structure in which an aluminum film is stacked on a tungsten film, a two-layer structure in which a copper film is stacked on a copper-magnesium-aluminum alloy film, a two-layer structure in which a copper film is stacked on a titanium film, or a two-layer structure in which a copper film is stacked on a tungsten film may be used.

[0349] Other examples include a three-layer structure in which a titanium film or titanium nitride film is laminated on the titanium film or titanium nitride film, an aluminum film or copper film is laminated on the titanium film or titanium nitride film, and a titanium film or titanium nitride film is further formed thereon, and a three-layer structure in which a molybdenum film or molybdenum nitride film is laminated on the molybdenum film or molybdenum nitride film, an aluminum film or copper film is laminated on the molybdenum film or molybdenum nitride film, and a molybdenum film or molybdenum nitride film is further formed thereon. Note that a transparent conductive material containing indium oxide, tin oxide, or zinc oxide may also be used.

[0350] 14A, regions 543a and 543b may be formed as low-resistance regions at and near the interface of the oxide 530 with the conductor 542a (conductor 542b). In this case, the region 543a functions as either a source region or a drain region, and the region 543b functions as the other. A channel formation region is formed in the region sandwiched between the regions 543a and 543b.

[0351] By providing the conductor 542a (conductor 542b) so as to be in contact with the oxide 530, the oxygen concentration in the region 543a (region 543b) may be reduced. Also, a metal compound layer containing the metal contained in the conductor 542a (conductor 542b) and components of the oxide 530 may be formed in the region 543a (region 543b). In such a case, the carrier density in the region 543a (region 543b) increases, and the region 543a (region 543b) becomes a low-resistance region.

[0352] The insulator 544 is provided to cover the conductors 542a and 542b and suppresses oxidation of the conductors 542a and 542b. In this case, the insulator 544 may be provided to cover the side surface of the oxide 530 and to be in contact with the insulator 524.

[0353] The insulator 544 can be a metal oxide containing one or more elements selected from hafnium, aluminum, gallium, yttrium, zirconium, tungsten, titanium, tantalum, nickel, germanium, neodymium, lanthanum, magnesium, etc. Alternatively, the insulator 544 can be silicon nitride oxide, silicon nitride, or the like.

[0354] In particular, it is preferable to use, as the insulator 544, an insulator containing an oxide of either or both aluminum and hafnium, such as aluminum oxide, hafnium oxide, or an oxide containing aluminum and hafnium (hafnium aluminate). Hafnium aluminate is particularly preferable because it has higher heat resistance than hafnium oxide film. Therefore, it is less likely to crystallize during heat treatment in a later process. Note that if the conductors 542a and 542b are made of oxidation-resistant materials or materials whose conductivity does not decrease significantly even when they absorb oxygen, the insulator 544 is not an essential component. It can be designed appropriately depending on the desired transistor characteristics.

[0355] The insulator 544 can prevent impurities such as water and hydrogen contained in the insulator 580 from diffusing into the oxide 530b. The insulator 544 can also prevent the conductor 542 from being oxidized by excess oxygen contained in the insulator 580.

[0356] The insulator 545 functions as a first gate insulating film. Like the insulator 524, the insulator 545 is preferably formed using an insulator that contains excess oxygen and releases oxygen by heating.

[0357] Specifically, silicon oxide having excess oxygen, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, and silicon oxide having vacancies can be used. In particular, silicon oxide and silicon oxynitride are preferable because they are stable against heat.

[0358] By providing the insulator 545 as an insulator containing excess oxygen, oxygen can be effectively supplied from the insulator 545 to the channel formation region of the oxide 530b. Similarly to the insulator 524, the concentration of impurities such as water or hydrogen in the insulator 545 is preferably reduced. The thickness of the insulator 545 is preferably 1 nm or more and 20 nm or less. The microwave treatment described above may be performed before and / or after the formation of the insulator 545.

[0359] Furthermore, a metal oxide may be provided between the insulator 545 and the conductor 560 to efficiently supply excess oxygen contained in the insulator 545 to the oxide 530. The metal oxide preferably suppresses oxygen diffusion from the insulator 545 to the conductor 560. By providing a metal oxide that suppresses oxygen diffusion, the diffusion of excess oxygen from the insulator 545 to the conductor 560 is suppressed. That is, a decrease in the amount of excess oxygen supplied to the oxide 530 can be suppressed. Furthermore, oxidation of the conductor 560 due to excess oxygen can be suppressed. As the metal oxide, any material that can be used for the insulator 544 may be used.

[0360] Note that the insulator 545 may have a layered structure, similar to the second gate insulating film. As transistors become smaller and more highly integrated, thinner gate insulating films can cause problems such as leakage current. Therefore, by using a layered structure of a high-k material and a thermally stable material for the insulator that functions as the gate insulating film, it is possible to reduce the gate potential during transistor operation while maintaining the physical film thickness. Furthermore, a layered structure that is thermally stable and has a high dielectric constant can be achieved.

[0361] The conductor 560 functioning as the first gate electrode is shown as having a two-layer structure in FIGS. 14A and 14B, but may have a single-layer structure or a stacked structure of three or more layers.

[0362] The conductor 560a is preferably made of a conductive material that suppresses the diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, nitrogen atoms, nitrogen molecules, nitrogen oxide molecules (e.g., NO, NO, and the like), and copper atoms. Alternatively, a conductive material that suppresses the diffusion of oxygen (e.g., at least one of oxygen atoms, oxygen molecules, and the like) is preferably used. The oxygen-suppressing function of the conductor 560a can suppress the oxidation of the conductor 560b due to oxygen contained in the insulator 545, which can reduce the conductivity. Examples of conductive materials that suppress the diffusion of oxygen include tantalum, tantalum nitride, ruthenium, and ruthenium oxide. Alternatively, an oxide semiconductor that can be used for the oxide 530 can be used for the conductor 560a. In this case, the conductor 560b can be formed by sputtering to reduce the electrical resistance of the conductor 560a, thereby making it a conductor. This can be called an OC (Oxide Conductor) electrode.

[0363] The conductor 560b is preferably made of a conductive material containing tungsten, copper, or aluminum as a main component. Because the conductor 560b also functions as wiring, it is preferable to use a conductor with high conductivity. For example, a conductive material containing tungsten, copper, or aluminum as a main component can be used. The conductor 560b may have a layered structure, such as a layered structure of titanium or titanium nitride and the above-mentioned conductive material.

[0364] The insulator 580 is provided over the conductor 542a and the conductor 542b with the insulator 544 interposed therebetween. The insulator 580 preferably has an excess oxygen region. For example, the insulator 580 preferably includes silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide doped with fluorine, silicon oxide doped with carbon, silicon oxide doped with carbon and nitrogen, silicon oxide having voids, or a resin. Silicon oxide and silicon oxynitride are particularly preferred because they are thermally stable. Silicon oxide and silicon oxide having voids are particularly preferred because they allow for easy formation of an excess oxygen region in a later step.

[0365] The insulator 580 preferably has an excess oxygen region. By providing the insulator 580 from which oxygen is released by heating, oxygen in the insulator 580 can be efficiently supplied to the oxide 530. Note that the concentration of impurities such as water or hydrogen in the insulator 580 is preferably reduced.

[0366] The opening of the insulator 580 is formed to overlap the region between the conductor 542a and the conductor 542b, so that the conductor 560 is formed to be embedded in the opening of the insulator 580 and the region sandwiched between the conductor 542a and the conductor 542b.

[0367] When miniaturizing semiconductor devices, it is necessary to shorten the gate length, but it is also necessary to prevent the conductivity of the conductor 560 from decreasing. If the film thickness of the conductor 560 is increased to achieve this, the conductor 560 may have a shape with a high aspect ratio. In this embodiment, the conductor 560 is provided so as to be embedded in the opening of the insulator 580. Therefore, even if the conductor 560 has a shape with a high aspect ratio, the conductor 560 can be formed without collapsing during the process.

[0368] The insulator 574 is preferably provided in contact with the top surface of the insulator 580, the top surface of the conductor 560, and the top surface of the insulator 545. By forming the insulator 574 by a sputtering method, an excess oxygen region can be provided in the insulator 545 and the insulator 580. This allows oxygen to be supplied from the excess oxygen region into the oxide 530.

[0369] For example, the insulator 574 can be a metal oxide containing one or more selected from hafnium, aluminum, gallium, yttrium, zirconium, tungsten, titanium, tantalum, nickel, germanium, magnesium, and the like.

[0370] In particular, aluminum oxide has high barrier properties and can suppress the diffusion of hydrogen and nitrogen even when it is a thin film with a thickness of 0.5 nm to 3.0 nm. Therefore, aluminum oxide formed by sputtering can function as both an oxygen source and a barrier film against impurities such as hydrogen.

[0371] An insulator 581 functioning as an interlayer film is preferably provided over the insulator 574. Like the insulator 524, the insulator 581 preferably has a reduced concentration of impurities such as water or hydrogen.

[0372] Furthermore, conductors 540a and 540b are arranged in openings formed in insulators 581, 574, 580, and 544. Conductor 540a and 540b are arranged opposite each other with conductor 560 interposed therebetween. Conductor 540a and 540b have the same configuration as conductors 546 and 548, which will be described later.

[0373] An insulator 582 is provided over the insulator 581. The insulator 582 is preferably made of a substance that has a barrier property against oxygen and / or hydrogen. Therefore, the insulator 582 can be made of a material similar to that of the insulator 514. For example, the insulator 582 is preferably made of a metal oxide such as aluminum oxide, hafnium oxide, or tantalum oxide.

[0374] In particular, aluminum oxide has a high blocking effect against both oxygen and impurities such as hydrogen and moisture, which can cause fluctuations in the electrical characteristics of a transistor. Therefore, aluminum oxide can prevent impurities such as hydrogen and moisture from entering the transistor 500 during and after the transistor manufacturing process. Furthermore, aluminum oxide can suppress the release of oxygen from the oxide that constitutes the transistor 500. Therefore, aluminum oxide is suitable for use as a protective film for the transistor 500.

[0375] An insulator 586 is provided over the insulator 582. The insulator 586 can be formed using a material similar to that of the insulator 320. By using a material with a relatively low dielectric constant for these insulators, parasitic capacitance between wirings can be reduced. For example, a silicon oxide film, a silicon oxynitride film, or the like can be used as the insulator 586.

[0376] Furthermore, conductors 546, 548, etc. are embedded in insulators 522, 524, 544, 580, 574, 581, 582, and 586.

[0377] The conductor 546 and the conductor 548 function as plugs or wirings that connect to the capacitor 600, the transistor 500, or the transistor 550. The conductor 546 and the conductor 548 can be formed using a material similar to that of the conductor 328 and the conductor 330.

[0378] After the transistor 500 is formed, an opening may be formed to surround the transistor 500, and an insulator with high barrier properties against hydrogen or water may be formed to cover the opening. By surrounding the transistor 500 with the insulator with high barrier properties, it is possible to prevent moisture and hydrogen from entering from the outside. Alternatively, multiple transistors 500 may be collectively surrounded by an insulator with high barrier properties against hydrogen or water. When forming an opening to surround the transistor 500, for example, it is preferable to form an opening that reaches the insulator 522 or the insulator 514 and form the insulator with high barrier properties in contact with the insulator 522 or the insulator 514, because this can serve as part of the manufacturing process of the transistor 500. For example, the insulator with high barrier properties against hydrogen or water may be made of a material similar to that of the insulator 522 or the insulator 514.

[0379] Subsequently, a capacitor 600 is provided above the transistor 500. The capacitor 600 includes a conductor 610, a conductor 620, and an insulator 630.

[0380] A conductor 612 may be provided over the conductor 546 and the conductor 548. The conductor 612 functions as a plug or a wiring connected to the transistor 500. The conductor 610 functions as an electrode of the capacitor 600. Note that the conductor 612 and the conductor 610 can be formed at the same time.

[0381] A metal film containing an element selected from molybdenum, titanium, tantalum, tungsten, aluminum, copper, chromium, neodymium, and scandium, or a metal nitride film containing any of the above elements (tantalum nitride film, titanium nitride film, molybdenum nitride film, tungsten nitride film), etc. can be used for the conductor 612 and the conductor 610. Alternatively, a conductive material such as indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, or indium tin oxide with silicon oxide added can also be used.

[0382] In this embodiment, the conductor 612 and the conductor 610 have a single-layer structure, but the present invention is not limited to this structure and may have a stacked structure of two or more layers. For example, a conductor having a barrier property and a conductor having high adhesion to the conductor having high conductivity may be formed between a conductor having a barrier property and a conductor having high conductivity.

[0383] The conductor 620 is provided so as to overlap with the conductor 610 with the insulator 630 interposed therebetween. Note that the conductor 620 can be formed using a conductive material such as a metal material, an alloy material, or a metal oxide material. It is preferable to use a high-melting-point material such as tungsten or molybdenum that has both heat resistance and conductivity, and tungsten is particularly preferable. Furthermore, when the conductor 620 is formed simultaneously with other components such as a conductor, a low-resistance metal material such as Cu (copper) or Al (aluminum) can be used.

[0384] An insulator 640 is provided over the conductor 620 and the insulator 630. The insulator 640 can be provided using a material similar to that of the insulator 320. The insulator 640 may also function as a planarizing film that covers the uneven shape underneath.

[0385] With this structure, miniaturization or high integration can be achieved in a semiconductor device including a transistor including an oxide semiconductor.

[0386] The configurations, structures, methods, and the like described in this embodiment can be used in appropriate combination with the configurations, structures, methods, and the like described in other embodiment modes and examples.

[0387] (Embodiment 5) In this embodiment, the configuration of an integrated circuit including the components of the semiconductor device 10 and the arithmetic device MAC1 described in the above embodiments will be described with reference to FIG.

[0388] FIG. 15 shows an example of a semiconductor chip 391 incorporating an integrated circuit 390. The semiconductor chip 391 shown in FIG. 15 includes leads 392 and an integrated circuit 390. The integrated circuit 390 includes various circuits, including the semiconductor device 10 and the arithmetic unit MAC1 described in the above embodiment, on a single die. The integrated circuit 390 has a stacked structure and is broadly divided into a layer having Si transistors (Si transistor layer 393), a wiring layer 394, and a layer having OS transistors (OS transistor layer 395). The OS transistor layer 395 can be stacked on the Si transistor layer 393, which facilitates miniaturization of the semiconductor chip 391.

[0389] 15, a QFP (Quad Flat Package) is used for the package of the semiconductor chip 391, but the form of the package is not limited to this. Other examples of configurations that can be used as appropriate include an insertion mounting type DIP (Dual In-line Package) and PGA (Pin Grid Array), a surface mounting type SOP (Small Outline Package), SSOP (Shrink Small Outline Package), TSOP (Thin-Small Outline Package), LCC (Leaded Chip Carrier), QFN (Quad Flat Non-leaded package), BGA (Ball Grid Array), FBGA (Fine pitch Ball Grid Array), and a contact mounting type DTP (Dual Tape carrier Package) and QTP (Quad Tape-carrier Package).

[0390] The semiconductor device 10 having Si transistors and the arithmetic unit MAC1 can all be formed in the Si transistor layer 393, the wiring layer 394, and the OS transistor layer 395. That is, the elements constituting the semiconductor device can be formed in the same manufacturing process. Therefore, the semiconductor chip shown in FIG. 15 does not need to increase the manufacturing process even if the number of constituent elements increases, and the semiconductor device can be incorporated at low cost.

[0391] According to the above-described embodiment of the present invention, a novel semiconductor device and electronic device can be provided. Alternatively, according to one embodiment of the present invention, a semiconductor device and electronic device with low power consumption can be provided. Alternatively, according to one embodiment of the present invention, a semiconductor device and electronic device in which heat generation can be suppressed can be provided.

[0392] This embodiment mode can be combined with the descriptions of other embodiment modes as appropriate.

[0393] (Embodiment 6) In this embodiment, electronic devices, mobile objects, and computing systems to which the integrated circuit 390 described in the above embodiment (or a semiconductor chip 391 incorporating the integrated circuit 390) can be applied will be described with reference to Figures 16 to 19.

[0394] Fig. 16A shows an external view of an automobile as an example of a moving body. Fig. 16B is a simplified diagram of data exchange within the automobile. The automobile 590 has a plurality of cameras 591 and the like. The automobile 590 also has various sensors (not shown) such as infrared radar, millimeter-wave radar, and laser radar.

[0395] The above-described integrated circuit 390 can be used for a camera 591 or the like in an automobile 590. The automobile 590 processes a plurality of images acquired by a camera 591 in a plurality of imaging directions 592 using the integrated circuit 390 described in the above embodiment, and analyzes the plurality of images collectively using a host controller 594 or the like via a bus 593 or the like, thereby determining the surrounding traffic conditions, such as the presence or absence of guardrails or pedestrians, and can perform autonomous driving. The automobile 590 can also be used in systems that provide road guidance, hazard prediction, and the like.

[0396] In the integrated circuit 390, the obtained image data is subjected to arithmetic processing such as neural networks, making it possible to perform processes such as increasing the image resolution, reducing image noise, facial recognition (for security purposes, etc.), object recognition (for autonomous driving purposes, etc.), image compression, image correction (wide dynamic range), image restoration for lensless image sensors, positioning, character recognition, and reducing reflected glare.

[0397] Although an automobile is described above as an example of a moving body, the moving body is not limited to an automobile. For example, moving bodies may include trains, monorails, ships, and flying bodies (helicopters, unmanned aerial vehicles (drones), airplanes, and rockets). A computer according to one embodiment of the present invention may be applied to these moving bodies to provide a system using artificial intelligence.

[0398] Fig. 17A is an external view showing an example of a portable electronic device. Fig. 17B is a simplified diagram showing data exchange within the portable electronic device. Portable electronic device 595 has printed circuit board 596, speaker 597, camera 598, microphone 599, etc.

[0399] In portable electronic device 595, the integrated circuit 390 can be provided on printed circuit board 596. Portable electronic device 595 can improve user convenience by processing and analyzing a plurality of pieces of data obtained by speaker 597, camera 598, microphone 599, etc. using integrated circuit 390 described in the above embodiment.

[0400] In the integrated circuit 390, the obtained image data is subjected to arithmetic processing such as neural networks, making it possible to perform processes such as increasing the image resolution, reducing image noise, facial recognition (for security purposes, etc.), object recognition (for autonomous driving purposes, etc.), image compression, image correction (wide dynamic range), image restoration for lensless image sensors, positioning, character recognition, and reducing reflected glare.

[0401] 18A includes a housing 1101, a housing 1102, a housing 1103, a display unit 1104, a connection unit 1105, operation keys 1107, and the like. The housings 1101, 1102, and 1103 are detachable. By attaching the connection unit 1105 provided on the housing 1101 to the housing 1108, a video image displayed on the display unit 1104 can be output to another video device. On the other hand, by attaching the housings 1102 and 1103 to the housing 1109, the housings 1102 and 1103 are integrated and function as an operation unit. The integrated circuit 390 described in the above embodiment can be incorporated into a chip provided on a substrate of the housing 1102 or the housing 1103.

[0402] 18B shows a stick-type electronic device 1120 that is USB-connected. The electronic device 1120 has a housing 1121, a cap 1122, a USB connector 1123, and a board 1124. The board 1124 is housed in the housing 1121. For example, a memory chip 1125 and a controller chip 1126 are attached to the board 1124. The integrated circuit 390 shown in the previous embodiment can be incorporated into the controller chip 1126 of the board 1124.

[0403] 18C shows a humanoid robot 1130. The robot 1130 has sensors 2101 to 2106 and a control circuit 2110. For example, the control circuit 2110 can incorporate the integrated circuit 390 shown in the previous embodiment.

[0404] The integrated circuit 390 described in the above embodiment can be used in a server that communicates with the electronic device instead of being built into the electronic device. In this case, the electronic device and the server form a computing system. Figure 19 shows an example of the configuration of a system 3000.

[0405] The system 3000 is configured by an electronic device 3001 and a server 3002. Communication between the electronic device 3001 and the server 3002 can be performed via an internet line 3003.

[0406] Server 3002 has a plurality of racks 3004. A plurality of circuit boards 3005 are provided in the racks, and integrated circuits 390 described in the above embodiment can be mounted on the circuit boards 3005. This forms a neural network in server 3002. Server 3002 can perform neural network calculations using data input from electronic device 3001 via internet line 3003. The results of calculations by server 3002 can be transmitted to electronic device 3001 via internet line 3003 as necessary. This reduces the calculation load on electronic device 3001.

[0407] This embodiment mode can be combined with the descriptions of other embodiment modes as appropriate. [Example]

[0408] In this example, the semiconductor devices 10 and 10B shown in the first embodiment and a comparative example thereof are described. Monte Carlo simulation was performed on the variation in output current according to input data, and the calculation accuracy of the semiconductor devices 10 and 10B was verified.

[0409] FIG. 20A shows a comparative example of a configuration of the semiconductor device 10 without the transistors 23 and 33. FIG. 20A illustrates transistors M11, M21, M12, and M22. The connections of the circuits and wiring are as shown in the figure. The transistors M11 and M21 are OS transistors. The transistors M12 and M22 are Si transistors. The channel length (L) and channel length (W) of the OS transistors are both 60 nm. The channel length (L) of the Si transistor is 0.65 μm, and the channel length (W) is 0.4 μm. The high level potential of the wiring WSL is 2.5 V when writing data, and the low level potential is −0.8 V when reading data. The drain voltage Vd of the wiring WCL is 1.2 V when reading data. 0 V is applied to the back gate of the OS transistor. I, which flows as weight data, W The input data current I X When the value is changed from 0nA to 1.0nA, the current I that flows through the wiring WCL r The number of trials for the Monte Carlo simulation was set to 50.

[0410] FIG. 20B shows the configuration of the semiconductor device 10. FIG. 20B illustrates transistors M11, M21, M12, M22, M13, and M23. The connections of the circuits and wiring are as shown in the figure. The transistors M11 and M21 were OS transistors. The transistors M12, M22, M13, and M23 were Si transistors. The channel lengths (L) and (W) of the OS transistors were both 60 nm. The channel lengths (L) and (W) of the Si transistors were 0.65 μm and 0.4 μm, respectively. The high-level potential of the wiring WSL was 2.5 V during data write and −0.8 V during data read. The drain voltage Vd of the wiring WCL was 1.2 V during data read. The voltage Vb applied to the wiring VBL was 0.7 V at 27°C and 0.8 V at 85°C. 0 V was applied to the back gates of the OS transistors. Send as weight data I W The input data current I X When the value is changed from 0nA to 1.0nA, the current I that flows through the wiring WCL r The number of trials for the Monte Carlo simulation was set to 50.

[0411] FIG. 20C shows the configuration of the semiconductor device 10B. FIG. 20C illustrates transistors M11, M21, M12, M22, M13, and M23. The connections of the circuits and wiring are as shown in the figure. The transistors M11 and M21 are OS transistors. The transistors M12, M22, M13, and M23 are Si transistors. The channel lengths (L) and (W) of the OS transistors are both 60 nm. The channel lengths (L) and (W) of the Si transistors are 0.65 μm and 0.4 μm, respectively. The high-level potential of the wiring WSL during data write is 2.5 V, and the low-level potential of the wiring WCL during data read is −0.8 V. The drain voltage Vd of the wiring WCL during data read is 1.2 V. The voltage Vb applied to the wiring VBL is 0.6 V at 27° C. and 0.8 V at 85° C. The voltage V applied to the back gate of the Si transistor is 0.65 μm and 0.4 μm. bodywas set to -0.5V. 0V was applied to the back gate of the OS transistor. I W The input data current I X When the value is changed from 0nA to 1.0nA, the current I that flows through the wiring WCL r The number of trials for the Monte Carlo simulation was set to 50.

[0412] FIG. 21A shows the current I X current I r FIG. 21B shows the output results of the current I X current I r FIG. 21C shows the output results of the current I X current I r FIG.

[0413] Figure 22A shows the current I X current I r FIG. 22B shows the output results of the current I X current I r FIG. 22C shows the output results of the current I X current I r FIG.

[0414] Table 1 shows the σ / μ and bit precision (Δ) in Figures 21A to 21C or Figures 22A to 22C. σ represents the standard deviation, and μ represents the average. σ / μ indicates the variance of the data in each figure. Also, Δ in the table is σ / μ converted into bit precision. It can be said that the smaller the value of σ / μ or the larger the value of Δ, the higher the calculation precision.

[0415] [Table 1]

[0416] (A) in Table 1 represents the configuration in FIG. 20A, (B) in the table represents the configuration in FIG. 20B (semiconductor device 10), and (C) in the table represents the configuration in FIG. 20C (semiconductor device 10B).

[0417] 21A to 21C, 22A to 22C, and Table 1 show that the calculation accuracy of the semiconductor devices 10 and 10B is higher than that of the comparative example under all conditions. In particular, the calculation accuracy of the semiconductor device 10B is higher than that of the semiconductor device 10. [Example]

[0418] In this example, an arithmetic device to which the semiconductor device of one embodiment of the present invention can be applied was fabricated as a prototype, and an output signal in response to an input signal was measured. The arithmetic device consumes a current of several nA per cell, enabling extremely high arithmetic efficiency.

[0419] The prototype was fabricated using a process that combines a 60nm CAAC-IGZO FET (a transistor containing In-Ga-Zn oxide with a CAAC structure in the channel formation region) with a 55nm Si CMOS. The cell array has the block diagram shown in Figure 23, with 512 rows and 512 columns of cells. In the configuration shown in Figure 23, the columns of cells MC are grouped into pairs of two columns, with one column storing the absolute value of the weight data W when the weight data is positive, and the other column storing the absolute value of the weight data W when the weight data is negative. The calculation result, the differential current flowing through the paired wiring, is read out as a digital value by the analog-to-digital conversion circuit ADC.

[0420] 23 shows a W-driver corresponding to the circuit WCS of the second embodiment, a W-driver corresponding to the circuit WCS of the second embodiment, an X-driver corresponding to the circuit XCS of the second embodiment, and a G-driver corresponding to the circuit WSD of the second embodiment. The W-driver has a circuit (WDAC control logic) that controls the writing of weight data, a current output type digital-to-analog conversion circuit (IDAC), and a switch controlled by a signal (write en.). The X-driver has a circuit (XDAC control logic) that controls the writing of input data, and an IDAC.

[0421] 23 also shows MCA corresponding to the cell array CA of the second embodiment, a cell DC corresponding to the reference cell 21, and a cell MC corresponding to the calculation cell 31. As shown in the figure, input data (x[0], x[i]), weight data (w[0]+, w[0]-), and control signals (G[0], G[i]) are supplied to each wiring, and a current (ΣW i0 +X i ), ΣW i0 -X i )) to the R-driver. The R-driver has a switch controlled by a signal (read en.), a digital-to-analog converter (ADC) that operates according to the differential signal, and a circuit that controls the ADC (ADC control logic), and outputs the data of the multiplication and accumulation operation (MAC data).

[0422] Fig. 24A is a perspective view showing the structures of a CAAC-IGZO FET, Si CMOS, and capacitor (MIM) included in the computing device. The CAAC-IGZO FET has a top gate electrode (TGE), a gate insulating layer (TGI) on the top gate electrode side, a back gate electrode (BGE), a gate insulating layer (BGI) on the back gate electrode side, and an electrode (S / D) functioning as a source or drain. The transistor has an S-channel structure.

[0423] Figure 24B shows the top gate voltage-drain current characteristics (also known as Id-Vg characteristics) of a typical CAAC-IGZO FET, alongside the Id-Vg characteristics of Si transistors (PMOS, NMOS). As shown in Figure 24B, CAAC-IGZO FETs are characterized by a very small off-current (Ioff) and a large ratio of on-current (Ion) to off-current compared to Si transistors (PMOS, NMOS).

[0424] Figure 25 is a chip photograph of the prototype arithmetic unit. In the chip photograph of Figure 25, the W-driver, X-driver, G-driver, and R-driver are arranged around the memory cell array. The chip size is 4 mm x 4 mm.

[0425] Figure 26A is a graph showing the change in the current Iy output from cell MC in response to changes in input data when the current Iw corresponding to the weight data is changed from 0 to 0.5 nA in increments of 0.05 nA. In Figure 26A, the horizontal axis represents the current Ix corresponding to the input data, and the vertical axis represents the current Iy. The current output from cell MC increased proportionally to changes in the input data and weight data. The correlation coefficient r was a good 0.999.

[0426] Figure 26B is a graph showing the change in current Iy in response to changes in weight data when the current Ix corresponding to the input data is changed from 0 to 0.5 nA in increments of 0.05 nA. In Figure 26B, the horizontal axis represents the current Iw corresponding to the weight data, and the vertical axis represents the current Iy. The current output from cell MC increased proportionally to changes in the weight data and input data. The correlation coefficient r was a good 0.997.

[0427] Figure 27A is a graph showing the influence of variations between cells MC. Figure 27A is a graph showing the cumulative distribution function (CDF) when the current Iw corresponding to the weight data is changed from 0 to 0.4nA in increments of 0.05nA, with the horizontal axis representing the current Iy output from the cell MC when the current Ix corresponding to the input data is 0.5nA. As shown in Figure 27A, good results were obtained when the current corresponding to the input data and weight data was small.

[0428] Figure 27B is a graph showing the retention characteristics of the potential retained by passing a current Iw corresponding to the weight data in cell MC. Figure 27B is a graph showing the change in current Iy when the current Ix corresponding to the input data is 0.5 nA and the current Iw corresponding to the weight data is changed from 0 to 0.4 nA in 0.1 nA increments, with retention time (Time) on the horizontal axis. As shown in Figure 27B, the results were particularly good when the current corresponding to the weight data was small.

[0429] Figure 28 is a pie chart showing the power consumption of each circuit in the prototype arithmetic unit. As shown in Figure 28, the control circuit (Control logic) accounts for 66%, the R-driver for 27%, the X-driver for 4%, and the proportion of power consumption in the memory cell array (MC-Array) is small at 3%.

[0430] Next, we investigated the effect of variations in the threshold voltage of OS transistors (e.g., transistor 32 in Figure 1). Figure 29 is a graph showing simulation results when 3σ in the threshold voltage distribution of OS transistors is set to 0.1V, 0.3V, and 0.5V. The smaller the 3σ, the smaller the variations in the threshold voltage of the OS transistors. Figure 29 shows the results of repeated multiplications in which the current Ix corresponding to the input data is 1.0 nA, the current Iw corresponding to the weight data is 1.0 nA, and the output current Iy is 1.0 nA. The closer the current Iy is to 1.0 nA, the better the results.

[0431] As shown in FIG. 29, by reducing the variation in the threshold voltage of the OS transistor, the current Iy, which is the output current, becomes a constant value, and favorable results are obtained.

[0432] This embodiment can be implemented in appropriate combination with other embodiment modes described in this specification.

[0433] (Notes regarding the present specification, etc.) The above-described embodiment and each configuration in the embodiment will be described below with additional notes.

[0434] The configurations shown in each embodiment can be combined as appropriate with configurations shown in other embodiments or examples to form one aspect of the present invention. In addition, when multiple configuration examples are shown in one embodiment, the configuration examples can be combined as appropriate.

[0435] In addition, the content (or even a part of the content) described in one embodiment can be applied to, combined with, or replaced with another content (or even a part of the content) described in that embodiment, and / or with the content (or even a part of the content) described in one or more other embodiments.

[0436] The contents described in the embodiments refer to the contents described in each embodiment using various figures or the contents described using text in the specification.

[0437] Furthermore, a figure (or even a part thereof) described in one embodiment can be combined with another part of that figure, another figure (or even a part thereof) described in that embodiment, and / or a figure (or even a part thereof) described in one or more other embodiments to form even more figures.

[0438] In addition, in the block diagrams in this specification, components are classified by function and shown as independent blocks. However, in actual circuits, it is difficult to separate components by function, and there may be cases where a single circuit is involved in multiple functions, or where a single function is involved across multiple circuits. Therefore, the blocks in the block diagrams are not limited to the components described in the specification, but may be rephrased appropriately depending on the situation.

[0439] In addition, in the drawings, the size, layer thickness, or region is shown at an arbitrary size for convenience of explanation. Therefore, it is not necessarily limited to the scale. Note that the drawings are shown schematically for clarity, and are not limited to the shapes or values ​​shown in the drawings. For example, it is possible to include variations in signal, voltage, or current due to noise, or variations in signal, voltage, or current due to timing deviations.

[0440] Furthermore, the positional relationships of components shown in the drawings are relative. Therefore, when describing components with reference to the drawings, terms such as "above" and "below" indicating the positional relationships may be used for convenience. The positional relationships of components are not limited to the content described in this specification, and can be rephrased appropriately depending on the situation.

[0441] In this specification and the like, when describing the connection relationship of a transistor, the term "one of the source or drain" (or first electrode or first terminal) is used, and the other of the source and drain is referred to as "the other of the source or drain" (or second electrode or second terminal). This is because the source and drain of a transistor vary depending on the structure or operating conditions of the transistor. Note that the names of the source and drain of a transistor can be appropriately changed to source (drain) terminal, source (drain) electrode, or the like depending on the situation.

[0442] Furthermore, in this specification and the like, terms such as "electrode" or "wiring" do not limit the functionality of these components. For example, an "electrode" may be used as part of a "wiring," and vice versa. Furthermore, terms such as "electrode" or "wiring" also include cases where multiple "electrodes" or "wirings" are integrally formed.

[0443] In this specification and the like, a node can be referred to as a terminal, a wiring, an electrode, a conductive layer, a conductor, an impurity region, etc. depending on the circuit configuration or device structure, etc. A terminal, a wiring, etc. can also be referred to as a node.

[0444] Furthermore, in this specification and the like, voltage and potential can be interchanged as appropriate. Voltage refers to the potential difference from a reference potential. For example, if the reference potential is a ground voltage (earth voltage), voltage can be interchanged with potential. Ground potential does not necessarily mean 0 V. Note that potential is relative, and the potential applied to wiring, etc. may change depending on the reference potential.

[0445] Furthermore, in this specification, the terms "high-level potential" and "low-level potential" do not refer to specific potentials. For example, when two wirings are both described as "functioning as wirings that supply a high-level potential," the high-level potentials provided by both wirings do not have to be equal to each other. Similarly, when two wirings are both described as "functioning as wirings that supply a low-level potential," the low-level potentials provided by both wirings do not have to be equal to each other.

[0446] "Current" refers to the phenomenon of charge transfer (electrical conduction). For example, a statement that "electrical conduction of a positively charged body is occurring" can be rephrased as "electrical conduction of a negatively charged body is occurring in the opposite direction." Therefore, in this specification, unless otherwise specified, "current" refers to the phenomenon of charge transfer (electrical conduction) associated with the movement of carriers. The carriers referred to here include electrons, holes, anions, cations, complex ions, etc., and the carriers differ depending on the system through which the current flows (e.g., semiconductor, metal, electrolyte, vacuum, etc.). Furthermore, the "direction of current" in wiring, etc., refers to the direction in which positively charged carriers move, and is expressed as a positive current. In other words, the direction in which negatively charged carriers move is opposite to the direction of current, and is expressed as a negative current. Therefore, in this specification, etc., unless otherwise specified regarding the positive / negative sign of the current (or the direction of current), a statement such as "current flows from element A to element B" can be rephrased as "current flows from element B to element A," etc. Furthermore, statements such as "current is input to element A" can be rephrased as "current is output from element A" or the like.

[0447] In this specification, "A and B are connected" means that A and B are electrically connected. Here, "A and B are electrically connected" means a connection in which an electrical signal can be transmitted between A and B when an object (such as a switch, transistor element, or diode, or a circuit including such an object and wiring) is present between A and B. Note that "A and B are electrically connected" also includes a case in which A and B are directly connected. Here, "A and B are directly connected" means a connection in which an electrical signal can be transmitted between A and B via wiring (or electrodes) or the like, without passing through the object. In other words, a direct connection means a connection that can be regarded as the same circuit diagram when represented by an equivalent circuit.

[0448] In this specification, a switch refers to a device that has the function of controlling whether a current flows by being in a conductive state (on state) or a non-conductive state (off state), or a device that has the function of selecting and switching a path for a current to flow.

[0449] In this specification, the channel length refers to, for example, in a top view of a transistor, a region where a semiconductor (or a portion in the semiconductor through which current flows when the transistor is on) and a gate overlap, or a distance between a source and a drain in a region where a channel is formed.

[0450] In this specification, the channel width refers to, for example, the length of the region where the semiconductor (or the portion in the semiconductor through which current flows when the transistor is on) and the gate electrode overlap, or the length of the portion where the source and drain face each other in the region where the channel is formed.

[0451] In this specification and the like, terms such as "film" and "layer" can be interchangeable depending on the circumstances. For example, the term "conductive layer" can be changed to the term "conductive film." Or, for example, the term "insulating film" can be changed to the term "insulating layer." [Explanation of symbols]

[0452] 10: semiconductor device, 20: reference cell unit, 21: reference cell, 22: transistor, 23: transistor, 24: transistor, 25: capacitor, 31: calculation cell, 32: transistor, 33: transistor, 34: transistor, 35: capacitor

Claims

1. a first transistor, a second transistor, a third transistor, and a capacitor; the first transistor has a function of holding a first potential corresponding to first data given to a gate of the third transistor via the first transistor when in an off state; the capacitor has a function of changing a first potential held at a gate of the third transistor to a second potential in response to a change in potential according to second data given to one electrode of the capacitor; the second transistor has a function of setting a potential of one of a source and a drain of the third transistor to a potential corresponding to a potential of a gate of the second transistor; the third transistor has a function of causing an output current corresponding to a potential of a gate of the third transistor to flow to the other of a source or a drain; The output current is a current that flows when the third transistor operates in a subthreshold region.

2. a first transistor, a second transistor, a third transistor, and a capacitor; the first transistor has a function of holding a first potential corresponding to first data given to a gate of the third transistor via the first transistor when in an off state; the capacitor has a function of changing a first potential held at a gate of the third transistor to a second potential in response to a change in potential according to second data given to one electrode of the capacitor; the second transistor has a function of setting a potential of one of a source and a drain of the third transistor to a potential corresponding to a potential of a gate of the second transistor; the third transistor has a function of causing an output current corresponding to a potential of a gate of the third transistor to flow to the other of a source or a drain; the output current is a current that flows when the third transistor operates in a subthreshold region, The semiconductor device, wherein the second transistor and the third transistor each have a back gate, and a potential applied to the back gate is a potential of the other of the source or the drain of the third transistor.

3. a first transistor, a second transistor, a third transistor, and a capacitor; the first transistor has a function of holding a first potential corresponding to first data given to a gate of the third transistor via the first transistor when in an off state; the capacitor has a function of changing a first potential held at a gate of the third transistor to a second potential in response to a change in potential according to second data given to one electrode of the capacitor; the second transistor has a function of setting a potential of one of a source and a drain of the third transistor to a potential corresponding to a potential of a gate of the second transistor; the third transistor has a function of causing an output current corresponding to a potential of a gate of the third transistor to flow to the other of a source or a drain; the output current is a current that flows when the third transistor operates in a subthreshold region; The semiconductor device, wherein the second transistor and the third transistor each have a back gate, and a potential applied to the back gate is lower than a potential of the other of the source or the drain of the third transistor.

4. In any one of claims 1 to 3, the first transistor has a semiconductor layer having a metal oxide in a channel formation region; The semiconductor device, wherein the metal oxide contains at least one of indium, gallium, and zinc.

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