Microwave heating device, microwave heating system, and microwave heating method

Abstract

To provide a technique suitable for suppressing microwave leakage when microwave-heating an object to be heated within a cavity resonator in the opening state for supplying / discharging the object to be heated into / from the cavity resonator.SOLUTION: A microwave heating device 300 includes a cylindrical cavity resonator 320, an inlet section 350, and an outlet section 360. The inlet section 350 supplies an object 20 to be heated into a cylindrical cavity resonator 320. The outlet section 360 discharges the object 20 to be heated from the cylindrical cavity resonator 320. The cylindrical cavity resonator 320 includes a wall 330 and an introduction opening 343. The wall 330 includes an inner circumferential surface 335. The introduction opening 343 introduces microwaves into the cylindrical cavity resonator 320. The inlet section 350 and outlet section 360 protrude from the wall 330. Within the cylindrical cavity resonator 320, the object 20 to be heated is heated by the microwaves.SELECTED DRAWING: Figure 3B

Description

[Technical Field]

[0001] The present invention relates to a microwave heating device, a microwave heating system, and a microwave heating method. [Background technology]

[0002] Microwave heating has been studied. An example of microwave heating is described in Patent Document 1. Specifically, Patent Document 1 describes heating a magnetic material by microwave heating. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-140103 Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention provides a technique suitable for suppressing leakage of microwaves when an object to be heated is heated by microwaves in a cavity resonator in an open state for supplying and discharging the object to be heated into and from the cavity resonator. [Means for solving the problem]

[0005] The present invention provides a cylindrical cavity resonator; an inlet portion for supplying an object to be heated into the cylindrical cavity resonator; an outlet portion for discharging the object to be heated from the cylindrical cavity resonator, The cylindrical cavity resonator comprises: a wall having an inner circumferential surface; an introduction opening for introducing a microwave into the cylindrical cavity resonator; the inlet and outlet portions protrude from the wall; The object to be heated is heated by the microwaves in the cylindrical cavity resonator. [Effects of the Invention]

[0006] The technology according to the present invention is suitable for suppressing leakage of microwaves when an object to be heated is heated by microwaves in a cavity resonator in an open state for supplying and discharging the object to be heated into and from the cavity resonator. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a configuration diagram of a microwave heating system according to the first embodiment. [Figure 2A] FIG. 2A is a top view for explaining the first object to be heated and the second object to be heated. [Figure 2B] FIG. 2B is a cross-sectional view for explaining the second object to be heated. [Figure 3A] FIG. 3A is a perspective view of a microwave heating device. [Figure 3B] FIG. 3B is a schematic cross-sectional view of a microwave heating device. [Figure 3C] FIG. 3C is a schematic cross-sectional view of a microwave heating device. [Figure 3D] FIG. 3D is a schematic diagram of a waveguide and a cavity. [Figure 4A] FIG. 4A is a perspective view of the input coupling portion. [Figure 4B] FIG. 4B is a cross-sectional view of the input coupling portion. [Figure 5] FIG. 5 is an enlarged schematic diagram of the inlet section, the outlet section, and the cylindrical cavity resonator. [Figure 6] FIG. 6 is an explanatory diagram of a microwave heating device according to a specific example of the first embodiment. [Figure 7] FIG. 7 is an enlarged cross-sectional view of the input coupling portion according to the first embodiment. [Figure 8] FIG. 8 is an enlarged cross-sectional view of an input coupling portion according to the second embodiment. [Figure 9]FIG. 9 is an enlarged schematic view of an inlet portion, an outlet portion, and a cylindrical cavity resonator according to a first example of the third embodiment. [Figure 10] FIG. 10 is an enlarged schematic view of an inlet portion, an outlet portion, and a cylindrical cavity resonator according to a second example of the third embodiment. [Figure 11A] FIG. 11A is a perspective view for explaining the actually fabricated structure. [Figure 11B] FIG. 11B is an enlarged cross-sectional view for explaining the measurement content in the structure. [Figure 11C] FIG. 11C is a perspective view for explaining the simulation model. [Figure 11D] FIG. 11D is a scatter plot showing the accuracy of the simulation. [Figure 12A] FIG. 12A is a perspective view showing a simulation model. [Figure 12B] FIG. 12B is a cross-sectional view showing the simulation model.

[0008] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, the following is merely an example of an embodiment of the present invention and is not intended to limit the present invention.

[0009] [Embodiment 1] FIG. 1 is a configuration diagram of a microwave heating system 1A according to the first embodiment.

[0010] 1 shows a first direction D1, a second direction D2, and a third direction D3. In this embodiment, the first direction D1 is the machine direction (MD). The second direction D2 is the transverse direction (TD). The third direction D3 is the vertical direction (VD). The first direction D1, the second direction D2, and the third direction D3 are perpendicular to each other.

[0011] 1, the microwave heating system 1A includes a conveying device 70, a coating device 200, and a microwave heating device 300. The conveying device 70 includes a payout roller 100 and a take-up roller 400. In the microwave heating system 1A, a conveying path 50 is configured in which the payout roller 100, the coating device 200, the microwave heating device 300, and the take-up roller 400 appear in this order.

[0012] The payout roller 100 pays out the object to be heated S from a roll of the object to be heated S. The coating device 200 coats the object to be heated S. The microwave heating device 300 heats the object to be heated S. The take-up roller 400 takes up the object to be heated S, thereby forming a roll of the wound object to be heated S. In this way, in this embodiment, the object to be heated S is transported along the transport path 50 in a roll-to-roll manner, and coating and heating are performed in this order on the object to be heated S during transport.

[0013] In this embodiment, when the object to be heated S is coated in the coating device 200 and heated in the microwave heating device 300, its conveying direction is parallel to the first direction D1, its longitudinal direction is parallel to the first direction D1, its short direction is parallel to the second direction D2, and its thickness direction is parallel to the third direction D3.

[0014] The object to be heated S, the conveying device 70, the coating device 200, and the microwave heating device 300 will be described in detail below.

[0015] <1. Heated object S> The object to be heated S has a first configuration upstream of the coating device 200 on the conveying path 50. The object to be heated S has a second configuration downstream of the coating device 200 on the conveying path 50. The first configuration is the configuration of the object to be heated S before coating by the coating device 200. The second configuration is the configuration of the object to be heated S after coating by the coating device 200.

[0016] Hereinafter, the object to be heated S having the first configuration will be referred to as a first object to be heated 10. The object to be heated S having the second configuration will be referred to as a second object to be heated 20.

[0017] 2A is a top view illustrating the first object to be heated 10 and the second object to be heated 20. FIG. 2B is a cross-sectional view illustrating the second object to be heated 20.

[0018] The first object to be heated 10 is a single layer body of a substrate 11.

[0019] The second object to be heated 20 is a laminate. The second object to be heated 20 includes a substrate 11 and a film 21. The film 21 is located on the substrate 11.

[0020] In this embodiment, the substrate 11 is a resin film. Specifically, the substrate 11 is a polyethylene terephthalate (PET) film. The substrate is also a nonwoven fabric.

[0021] The film 21 is an adhesive film. Specifically, the adhesive is an acrylic adhesive. Here, the acrylic adhesive is an adhesive containing an acrylic resin. The adhesive is also called a pressure-sensitive adhesive layer. The adhesive can stably maintain a wet state.

[0022] Hereinafter, the dimension of the substrate 11 in the second direction D2 will be referred to as width W11. In this embodiment, the width W11 is 200 mm or more and 2000 mm or less. Specifically, the width W11 is 250 mm or more and 1300 mm or less.

[0023] Hereinafter, the dimension of the substrate 11 in the third direction D3 will be referred to as thickness T11. In this embodiment, the thickness T11 is 10 μm or more and 300 μm or less. Specifically, the thickness T11 is 15 μm or more and 100 μm or less.

[0024] Hereinafter, the dimension of the membrane 21 in the second direction D2 will be referred to as width W21. Typically, width W21 is smaller than width W11. In this embodiment, width W21 is 195 mm or more and 1995 mm or less. Specifically, width W21 is 245 mm or more and 1295 mm or less.

[0025] Hereinafter, the dimension of the film 21 in the third direction D3 immediately after coating by the coating device 200 will be referred to as thickness T21. In this embodiment, the thickness T21 is 1 μm or more and 200 μm or less. Specifically, the thickness T21 is 10 μm or more and 120 μm or less. More specifically, the thickness T21 is 10 μm or more and 100 μm or less. The thickness T21 is also referred to as the initial coating thickness.

[0026] In this embodiment, the dimension of the first object to be heated 10 in the second direction D2 is 200 mm to 2000 mm, specifically 250 mm to 1300 mm, and the dimension of the first object to be heated 10 in the third direction D3 is 10 μm to 300 μm, specifically 15 μm to 100 μm.

[0027] In this embodiment, the dimension of the second object to be heated 20 in the second direction D2 is 200 mm or more and 2000 mm or less, specifically 250 mm or more and 1300 mm or less. There is a period during which the dimension of the second object to be heated 20 in the third direction D3 is 11 μm or more and 500 μm or less, specifically 25 μm or more and 200 μm or less.

[0028] In this embodiment, the object to be heated S, the first object to be heated 10, and the second object to be heated 20 are long sheets. Here, the long sheet is a sheet whose length in the conveying direction is longer than the cylindrical cavity resonator 320 described below. Specifically, the long sheet is a sheet whose length in the conveying direction is longer than the combination of the inlet section 350, the cylindrical cavity resonator 320, and the outlet section 360 described below. However, the shapes of the object to be heated S, the first object to be heated 10, and the second object to be heated 20 are not particularly limited. Another example of the object to be heated S, the first object to be heated 10, and the second object to be heated 20 is a sheet.

[0029] <2. Conveyor device 70> The conveying device 70 conveys the object to be heated S. Specifically, the conveying device 70 conveys the object to be heated S to an entrance section 350, a cavity 370 in the cylindrical cavity resonator 320, and an exit section 360, which will be described later. The payout roller 100 pays out the object to be heated S so that the object to be heated S is conveyed along the conveying path 50. The winding roller 400 winds up the object to be heated S so that the object to be heated S is conveyed along the conveying path 50.

[0030] The transport device 70 determines the speed (hereinafter referred to as the transport speed) of the object S to be heated transported along the transport path 50. The transport speed is, for example, not less than 0.1 m / min and not more than 100 m / min.

[0031] The conveying device 70 determines the tension applied to the object to be heated S conveyed along the conveying path 50. The tension per unit width of the object to be heated S (hereinafter referred to as conveying tension) applied to the object to be heated S conveyed along the conveying path 50 is, for example, 10 N / m or more and 200 N / m or less. In this context, the "unit width of the object to be heated S" is the unit length of the object to be heated S in a direction perpendicular to the conveying direction of the object to be heated S and the thickness direction of the object to be heated S.

[0032] <Coating device 200> The coating device 200 forms a second object to be heated 20 from a first object to be heated 10. Specifically, the coating device 200 applies a coating liquid onto the substrate 11 to form a film 21 on the substrate 11. In other words, the film 21 is a coating film. Hereinafter, the film 21 that is a coating film may be referred to as the coating film 21.

[0033] In this embodiment, the solvent of the coating liquid contains water. The solvent of the coating liquid does not contain an organic solvent. The film 21 is a film of an emulsion pressure-sensitive adhesive.

[0034] The solute of the coating liquid includes a resin, specifically, an acrylic resin.

[0035] The solid content concentration in the coating liquid is determined so as to be able to form the film 21. In this embodiment, the solid content concentration is 20% by weight or more and 80% by weight or less. Specifically, the solid content concentration is 20% by weight or more and 60% by weight or less.

[0036] <3. Microwave heating device 300> Fig. 3A is a perspective view of a microwave heating device 300. Fig. 3B and Fig. 3C are schematic cross-sectional views of the microwave heating device 300.

[0037] In this embodiment, the term "cylindrical cavity resonator" refers to a resonator that operates based on the principle of a cylindrical cavity resonator. The term "cylindrical cavity resonator" does not imply that the shape of the resonator is required to be cylindrical in the strict sense. Similarly, the term "cylindrical cavity 370" described below does not imply that the shape of the cavity 370 is required to be cylindrical in the strict sense. The same applies to the term "cylindrical surface" described below.

[0038] The microwave heating device 300 includes a waveguide 310, a cylindrical cavity resonator 320, an inlet section 350, and an outlet section 360. The waveguide 310, the inlet section 350, and the outlet section 360 are coupled to the cylindrical cavity resonator 320. The inlet section 350 is also referred to as an inlet collar. The outlet section 360 is also referred to as an outlet collar.

[0039] The waveguide 310 has a waveguide 311 therein. The cylindrical cavity resonator 320 has an introduction opening 343. The introduction opening 343 is also called an iris. The cylindrical cavity resonator 320 also has a cavity 370 therein that communicates with the introduction opening 343. The second object to be heated 20 is heated in the cavity 370. In this embodiment, the waveguide 310 is a rectangular waveguide, and the waveguide 311 is a rectangular waveguide. The cavity 370 has a cylindrical shape. FIG. 3D is a schematic diagram of the waveguide 311 and the cavity 370.

[0040] 3B, the second object to be heated 20 enters the cavity 370 through the inlet 350 and exits from the cavity 370 through the outlet 360. Microwaves are introduced into the cavity 370 from the waveguide 311 via the introduction opening 343. In this manner, the microwaves are irradiated onto the second object to be heated 20 in the cavity 370 within the cylindrical cavity resonator 320, and the second object to be heated 20 is heated.

[0041] Specifically, in the cavity 370 within the cylindrical cavity resonator 320, microwaves are irradiated onto the second object to be heated 20, thereby dielectrically heating the dielectric contained in the second object to be heated 20. The relative dielectric constant of the dielectric is, for example, not less than 1 and not more than 85. The relative dielectric constant of the dielectric may be not less than 2 and not more than 85.

[0042] Specifically, the dielectric contains water. The water is the water in the coating liquid. When microwaves are applied to the second object to be heated 20, the water is heated, the water evaporates, and the second object to be heated 20 is dried. In this way, the microwave heating according to this embodiment can be intended for drying.

[0043] Microwaves can efficiently evaporate water, which can contribute to reducing the energy required to dry the second object to be heated 20 and the carbon dioxide generated in association with the drying of the second object to be heated 20.

[0044] In this embodiment, microwaves are irradiated onto the second object to be heated 20 while the second object to be heated 20 is being transported. This improves the productivity of products obtained through heating the second object to be heated 20. However, as another embodiment, when the second object to be heated 20 is a sheet, the transport device 70 may be temporarily stopped once the second object to be heated 20 is transported into the cylindrical cavity resonator 320, and microwaves may be irradiated onto the second object to be heated 20.

[0045] The microwave source, waveguide 310, cylindrical cavity resonator 320, inlet section 350 and outlet section 360 will now be described in detail.

[0046] <3-1. Microwave Source and Waveguide 310> In this embodiment, the waveguide 310 is connected to a microwave source (not shown). The waveguide 310 has an input port 312. Microwaves are introduced into the waveguide 311 from the microwave source via the input port 312.

[0047] Hereinafter, the power of the microwaves input to the waveguide 311 in the waveguide 310 will be referred to as microwave power Pi. The microwave power Pi is, for example, 1 W or more and 10 kW or less. In one numerical example, the microwave power Pi is 200 W. In another numerical example, the microwave power Pi is 3 kW.

[0048] Hereinafter, the frequency of the microwaves input to the waveguide 311 in the waveguide 310 will be referred to as the microwave frequency f. The microwave frequency f is, for example, not less than 13 MHz and not more than 6 GHz. In this embodiment, the microwave frequency f is not less than 2.4 GHz and not more than 2.5 GHz. In one numerical example, the microwave frequency f is 2.45 GHz. In another numerical example, the microwave frequency f is 915 MHz.

[0049] In this embodiment, the power of the microwave output from the microwave source is the microwave power Pi plus the loss in the microwave path from the microwave source to the waveguide 311. The frequency of the microwave output from the microwave source is the same as the microwave frequency f.

[0050] The microwave source may be one that outputs microwaves of a constant power or one that outputs microwaves of a variable power.The microwave source may be one that outputs microwaves of a constant frequency or one that outputs microwaves of a variable frequency.

[0051] The microwave source may be, for example, a magnetron, a semiconductor solid-state device, etc. The microwave source may be a voltage-controlled oscillator (VCO), a voltage-controlled Xtal oscillator (VCXO), or a phase-locked loop (PLL) oscillator. The microwave source may include an amplifier.

[0052] 3D, a waveguide 311 is defined by an inner surface 315 of a waveguide 310. In this embodiment, defining B by A means that A defines B by itself, or A defines B in cooperation with one or more other elements.

[0053] <3-2. Cylindrical Cavity Resonator 320> An example of the resonant frequency of the cavity 370 is the microwave frequency f mentioned above.

[0054] 3B, the cylindrical cavity resonator 320 includes a wall 330 and an input coupling portion 340. The wall 330 and the input coupling portion 340 function as side walls surrounding a cavity 370.

[0055] The wall 330 has an inner peripheral surface 335. The inner peripheral surface 335 defines a cavity 370. Hereinafter, the term "central axis 390 of the inner peripheral surface 335" may be used. The central axis 390 of the inner peripheral surface 335 is a virtual central axis for the purpose of explanation and does not necessarily exist in reality. In this embodiment, the central axis 390 does not exist in reality.

[0056] In the following, the expression "axial direction Da of inner circumferential surface 335" may be used. Axial direction Da is the direction in which central axis 390 extends. In this embodiment, axial direction Da is equal to second direction D2.

[0057] The input coupling portion 340 is coupled to the wall 330 and the waveguide 310. Here, the expression "the input coupling portion 340 is coupled to the wall 330 and the waveguide 310" will be explained. This expression is intended to encompass both a form in which the input coupling portion 340 is integrated with the wall 330 and a form in which the input coupling portion 340 is separate from the wall 330. In this embodiment, the input coupling portion 340 is separate from the wall 330. Specifically, the input coupling portion 340 is a microwave coupler that is detachable from the wall 330.

[0058] The input coupling portion 340 is disposed between the wall 330 and the waveguide 310. In this embodiment, a flange 347 of the input coupling portion 340 and a flange 317 of the waveguide 310 are aligned, and the input coupling portion 340 is fitted into the wall 330, and then the waveguide 310, the input coupling portion 340, and the wall 330 are fixed to one another with screws 349.

[0059] 4A is a perspective view of input coupling section 340. FIG. 4B is a cross-sectional view of input coupling section 340.

[0060] The input coupling section 340 has an introduction opening 343, a first adjacent section 345, and a second adjacent section 346. The introduction opening 343 is adjacent to the first adjacent section 345 and the second adjacent section 346. The introduction opening 343 is located between the first adjacent section 345 and the second adjacent section 346.

[0061] Microwaves are introduced into cylindrical cavity resonator 320 from inside waveguide 310 via introduction opening 343. Specifically, microwaves are introduced into cavity 370 from waveguide 311 via introduction opening 343.

[0062] The first adjacent portion 345 has a first adjacent curved surface 341. The first adjacent curved surface 341 is continuous with the inner circumferential surface 335 of the wall 330. The first adjacent curved surface 341 is adjacent to the introduction opening 343. That is, the first adjacent curved surface 341 extends from the inner circumferential surface 335 to the introduction opening 343. Specifically, the first adjacent curved surface 341 is connected flush with the inner circumferential surface 335. The first adjacent curved surface 341 is a part of a cylindrical surface. Here, the cylindrical surface is the side surface of a cylinder.

[0063] The second adjacent portion 346 has a second adjacent curved surface 342. The second adjacent curved surface 342 is continuous with the inner circumferential surface 335 of the wall 330. The second adjacent curved surface 342 is adjacent to the introduction opening 343. In this manner, the second adjacent curved surface 342 extends from the inner circumferential surface 335 to the introduction opening 343. Specifically, the second adjacent curved surface 342 is connected flush with the inner circumferential surface 335. The second adjacent curved surface 342 is a part of a cylindrical surface.

[0064] As shown in Figures 3B and 3D, a continuous curved surface 385 is formed including the inner circumferential surface 335 of the wall 330, the first adjacent curved surface 341, and the second adjacent curved surface 342. In this way, the shapes of the first adjacent curved surface 341 and the second adjacent curved surface 342 of the input coupling portion 340 contribute to the formation of the cylindrical shape of the cavity 370. If the cylindrical shape of the cavity 370 is not precise enough, the electric field of the cylindrical cavity resonator 320 may be disturbed. However, the above contribution can suppress the disturbance of the electric field. This is advantageous from the viewpoint of heating the second object 20 to be heated with microwaves.

[0065] In this embodiment, the diameter of the cylindrical shape of the cavity 370 is 80 mm or more and 300 mm or less. Specifically, this diameter is 85 mm or more and 260 mm or less.

[0066] In this embodiment, the dimension of the cavity 370 in the axial direction Da is not less than 250 mm and not more than 2050 mm. Specifically, this dimension is not less than 300 mm and not more than 1500 mm.

[0067] 4A and 4B, in the input coupling section 340 of this embodiment, the thickness of the first adjacent section 345 decreases toward the introduction opening 343. This forms the first adjacent curved surface 341. A flat surface facing the waveguide 311 is formed on the back side of the first adjacent curved surface 341 in the first adjacent section 345.

[0068] In the input coupling section 340 of this embodiment, the thickness of the second adjacent section 346 decreases toward the introduction opening 343. This forms the second adjacent curved surface 342. A flat surface facing the waveguide 311 is formed on the back side of the second adjacent curved surface 342 in the second adjacent section 346.

[0069] The first adjacent portion 345 has a first proximal end 345a and a first distal end 345b. The first proximal end 345a is an end that is adjacent to the introduction opening 343. The first distal end 345b is an end that is located farther from the introduction opening 343 than the first proximal end 345a.

[0070] The second adjacent portion 346 has a second proximal end 346a and a second distal end 346b. The second proximal end 346a is an end that is adjacent to the introduction opening 343. The second distal end 346b is an end that is located farther from the introduction opening 343 than the second proximal end 346a.

[0071] In this embodiment, the thickness ta1 of the first proximal end 345a is not less than 0 mm and not more than 10 mm. Having the thickness ta1 this small is advantageous from the viewpoint of improving the precision of the cylindrical shape of the cavity 370. Specifically, the thickness ta1 is not less than 0.5 mm and not more than 10 mm. More specifically, the thickness ta1 is not less than 0.5 mm and not more than 5 mm. Even more specifically, the thickness ta1 is not less than 0.5 mm and not more than 2 mm.

[0072] In this embodiment, the thickness ta2 of the second proximal end 346a is not less than 0 mm and not more than 10 mm. Having the thickness ta2 this small is advantageous from the viewpoint of improving the precision of the cylindrical shape of the cavity 370. Specifically, the thickness ta2 is not less than 0.5 mm and not more than 10 mm. More specifically, the thickness ta2 is not less than 0.5 mm and not more than 5 mm. Even more specifically, the thickness ta2 is not less than 0.5 mm and not more than 2 mm.

[0073] In this embodiment, the thickness ta1 and the thickness ta2 are equal.

[0074] The use of the cylindrical cavity resonator 320 is advantageous from the viewpoint of forming a uniform electric field in the internal cavity 370. This is advantageous from the viewpoint of uniformly heating the second object 20 to be heated.

[0075] Uniform heating can improve the quality of the second object to be heated 20. For example, uneven drying, foaming, etc. in the second object to be heated 20 can be suppressed.

[0076] In this embodiment, microwaves are irradiated into the cavity 370 in the cylindrical cavity resonator 320, thereby generating TM 0n0 A standing wave of the mode is formed, where n is a natural number greater than or equal to 1. 0n0 Forming a standing wave of the mode is advantageous from the viewpoint of uniformly heating the second object to be heated 20.

[0077] In this embodiment, n is 1. However, n may be 2, or 3 or more.

[0078] In this embodiment, the introduction opening 343 is rectangular. Specifically, this rectangle has a side extending in the axial direction Da and a side extending in a direction perpendicular to the axial direction Da. The direction perpendicular to the axial direction Da is specifically the direction from the waveguide 310 toward the introduction opening 343 and the direction perpendicular to the axial direction Da. Here, the concept of rectangle includes a square. In this context, in this embodiment, the axial direction Da is equal to the second direction D2. The direction from the waveguide 310 toward the introduction opening 343 is equal to the third direction D3. Furthermore, the direction perpendicular to the axial direction Da (specifically, the direction from the waveguide 310 toward the introduction opening 343 and the direction perpendicular to the axial direction Da) is equal to the first direction D1.

[0079] Hereinafter, the dimension of the introduction opening 343 in the axial direction Da will be referred to as height x. The dimension of the introduction opening 343 in the direction perpendicular to the axial direction Da will be referred to as width y. Specifically, the width y is the dimension of the introduction opening 343 in the direction from the waveguide 310 toward the introduction opening 343 and in the direction perpendicular to the axial direction Da.

[0080] In one example, the height x is 5 mm or more and 150 mm or less. In one specific example, the height x is 20 mm or more and 50 mm or less.

[0081] The height x may be the same as the dimension of the waveguide 311 in the second direction D2. The waveguide 310 can be selected based on the JIS standard or the EIAJ standard, taking into account the frequency f to be used.

[0082] In one example, the width y is 5 mm or more and 300 mm or less, and in one specific example, the width y is 10 mm or more and 90 mm or less.

[0083] In one example, the ratio y / x of the width y to the height x is equal to or greater than 0.05 and equal to or less than 2. In one specific example, the ratio y / x is equal to or greater than 0.1 and equal to or less than 1.9.

[0084] In one example, the area of ​​the introduction opening 343 is 400 mm 2 More than 43000mm 2 In one embodiment, the area of ​​the inlet opening 343 is 430 mm 2 Over 3800mm 2 In this description, the "area of ​​the introduction opening 343" may be read as the product x x y of the height x and the width y.

[0085] The material of the wall 330 and the input coupling portion 340 is preferably a material that has good electrical conductivity.

[0086] In one example, the wall 330 is made of metal. Examples of the metal include aluminum, copper, iron, magnesium, brass, stainless steel, and alloys thereof. The metal is preferably aluminum, copper, magnesium, brass, or alloys thereof. In another example, the wall 330 is made of resin, ceramic, metal, or the like, and the inner circumferential surface 335 is coated. Materials including silver, copper, gold, tin, and rhodium can be used for the coating.

[0087] In one example, the input coupling portion 340 is made of metal. Examples of the metal include aluminum, copper, iron, magnesium, brass, stainless steel, and alloys thereof. The metal is preferably aluminum, copper, magnesium, brass, or alloys thereof. In another example, the input coupling portion 340 is made of resin, ceramic, metal, or the like, and the first adjacent curved surface 341 and the second adjacent curved surface 342 are coated. Materials including silver, copper, gold, tin, and rhodium can be used for the coating.

[0088] The material of the wall 330 and the material of the in-coupling portion 340 may be the same or different.

[0089] In this embodiment, it is possible to improve the efficiency of incidence of microwaves from the waveguide 311 into the cavity 370. This point will be described below with reference to FIGS. 3C and 3D.

[0090] The electric field intensity En at the antinode of the standing wave of the microwave in the waveguide 311 in the waveguide 310 is denoted as electric field intensity Q1. The electric field intensity En at the position where the electric field intensity En is greatest in the cavity 370 in the cylindrical cavity resonator 320 is denoted as electric field intensity Q2. Figures 3C and 3D show the position q1 where the electric field intensity Q1 appears and the position q2 where the electric field intensity Q2 appears.

[0091] Specifically, when the number of antinodes of the standing wave of the microwave formed in the waveguide 311 is one, the electric field intensity Q1 is the electric field intensity En at that antinode. When the number of antinodes of the standing wave of the microwave formed in the waveguide 311 is multiple, the electric field intensity Q1 is the electric field intensity En at the antinode that is closest to the introduction opening 343 among the multiple antinodes.

[0092] In this embodiment, in the planar direction in which the introduction opening 343 extends, position q1 is at the same position as the geometric center of the introduction opening 343. Position q2 is on the central axis 390, and is at the same position as the geometric center of the introduction opening 343 in the planar direction. In this embodiment, the planar direction is a direction perpendicular to the direction from the waveguide 310 toward the introduction opening 343.

[0093] In this embodiment, microwaves are propagated so that the ratio Q2 / Q1 of electric field intensity Q2 to electric field intensity Q1 is 0.8 or more in the waveguide 311 in the waveguide 310 and the cavity 370 in the cylindrical cavity resonator 320. In this way, in this embodiment, it is possible to improve the efficiency of incidence of microwaves from the waveguide 311 to the cavity 370.

[0094] In this embodiment, the ratio Q2 / Q1 is 0.8 or more. In one example, the ratio Q2 / Q1 is 1 or more. In one specific example, the ratio Q2 / Q1 is 0.8 or more and 10 or less. In a more specific example, the ratio Q2 / Q1 is 1 or more and 5 or less.

[0095] Here, electric field strength En will be explained. Electric field strength En is the strength of the electric field E. The unit of electric field strength En is V / m. Specifically, electric field strength En is given by the following Equation 1 using a component E1 of the electric field E in a first direction D1, a component E2 of the electric field E in a second direction D2, and a component E3 of the electric field E in a third direction D3. Formula 1: En = (E1 2 +E2 2 +E3 2 ) 1 / 2

[0096] <3-3. Inlet section 350 and outlet section 360> FIG. 5 is an enlarged schematic view of the inlet section 350, the outlet section 360 and the cylindrical cavity resonator 320. As shown in FIG.

[0097] 3A, 3B, and 5, a first wall hole 351a and a second wall hole 361a are provided in the wall 330. The first wall hole 351a and the second wall hole 361a are through-holes that penetrate the wall 330. In this manner, the wall 330 is provided with a pair of through-holes 351a and 361a.

[0098] The inlet portion 350 is a member that protrudes from the wall 330 in a first protruding direction Dp1. The outlet portion 360 is a member that protrudes from the wall 330 in a second protruding direction Dp2.

[0099] The deviation angle of the first protrusion direction Dp1 from the horizontal direction is, for example, 30° or less, and in a specific example, 10° or less. The deviation angle of the second protrusion direction Dp2 from the horizontal direction is, for example, 30° or less, and in a specific example, 10° or less. To be clear, when the first protrusion direction Dp1 is horizontal, the deviation angle of the first protrusion direction Dp1 is 0°, and when the second protrusion direction Dp2 is horizontal, the deviation angle of the second protrusion direction Dp2 is 0°. The deviation between the first protrusion direction Dp1 and the second protrusion direction Dp2 is, for example, 30° or less, and in a specific example, 10° or less. In the example of FIG. 5, the first protrusion direction Dp1 and the second protrusion direction Dp2 are parallel to the horizontal direction. Here, the horizontal direction is a direction perpendicular to the vertical direction.

[0100] A first extension hole 351b is provided in the inlet portion 350. The first extension hole 351b is a through-hole that penetrates the inlet portion 350.

[0101] A second extension hole 361b is provided in the outlet portion 360. The second extension hole 361b is a through-hole that penetrates the outlet portion 360.

[0102] A first communication hole 351 is formed including a first wall hole 351a and a first extension hole 351b. The first communication hole 351 is a through hole. Specifically, in the first communication hole 351, the first wall hole 351a and the first extension hole 351b are directly connected to each other.

[0103] A second communication hole 361 is formed including a second wall hole 361a and a second extension hole 361b. The second communication hole 361 is a through hole. Specifically, in the second communication hole 361, the second wall hole 361a and the second extension hole 361b are directly connected to each other.

[0104] The transfer path 50 (see FIG. 1) passes through the cylindrical cavity resonator 320. Specifically, the transfer path 50 passes through the entrance portion 350, the cylindrical cavity resonator 320, and the exit portion 360 in this order. More specifically, the transfer path 50 passes through the first extension hole 351b, the first wall hole 351a, the cavity 370, the second wall hole 361a, and the second extension hole 361b in this order.

[0105] As can be understood from the above description, the inlet portion 350 supplies the second object to be heated 20 into the cylindrical cavity resonator 320. The second object to be heated 20 is heated by microwaves in the cylindrical cavity resonator 320. The outlet portion 360 discharges the second object to be heated 20 from the cylindrical cavity resonator 320.

[0106] The inlet portion 350 and the outlet portion 360 act to suppress leakage of microwaves from the cavity 370 to the outside of the cylindrical cavity resonator 320. Therefore, this configuration is advantageous from the viewpoint of suppressing leakage of microwaves when microwave-heating the second object to be heated 20 in the cylindrical cavity resonator 320 in the open state for supplying and discharging the second object to be heated 20 into and from the cylindrical cavity resonator 320.

[0107] In this embodiment, the inlet portion 350 and the outlet portion 360 are made of metal. Specifically, the metal is aluminum.

[0108] In this embodiment, the first extension hole 351b and the second extension hole 361b extend straight in a cross section perpendicular to the axial direction Da. Furthermore, the cylindrical cavity resonator 320, the inlet portion 350, and the outlet portion 360 are arranged so that a straight line connecting the first extension hole 351b and the second extension hole 361b in this cross section passes through the central axis 390. Specifically, the straight line may be a straight line connecting an inlet opening 351e and an outlet opening 361e, which will be described later.

[0109] In this embodiment, the first extended hole 351b and the second extended hole 361b extend horizontally in a cross section perpendicular to the axial direction Da.

[0110] In this embodiment, the conveying device 70 conveys the second object to be heated 20 along the conveying path 50 so that the second object to be heated 20 passes through the first extension hole 351b in the entrance portion 350, the first wall hole 351a in the cylindrical cavity resonator 320, the cavity 370 in the cylindrical cavity resonator 320, the second wall hole 361a in the cylindrical cavity resonator 320, and the second extension hole 361b in the exit portion 360, in this order. During this conveying, the second object to be heated 20 is irradiated with microwaves in the cavity 370 in the cylindrical cavity resonator 320, with one or more portions of the second object to be heated 20 protruding from the entrance portion 350, the cylindrical cavity resonator 320, and the exit portion 360. This heats the second object to be heated 20. In this manner, in this embodiment, it is possible to heat the second object to be heated 20, which is longer than the cavity 370. Specifically, while the second object to be heated 20 is being transported, the second object to be heated 20 is irradiated with microwaves in the cavity 370 in the cylindrical cavity resonator 320, in a state in which the second object to be heated 20 has a plurality of portions that protrude from the inlet portion 350, the cylindrical cavity resonator 320, and the outlet portion 360. The plurality of portions include portions on the transport path 50 that are upstream of the cylindrical cavity resonator 320, the inlet portion 350, and the outlet portion 360, and portions on the transport path 50 that are downstream of the cylindrical cavity resonator 320, the inlet portion 350, and the outlet portion 360.

[0111] In this embodiment, the second object to be heated 20 is suspended in the first extension hole 351b in the inlet portion 350, the first wall hole 351a in the cylindrical cavity resonator 320, the cavity 370 in the cylindrical cavity resonator 320, the second wall hole 361a in the cylindrical cavity resonator 320, and the second extension hole 361b in the outlet portion 360. Specifically, tension is applied to the second object to be heated 20 so that the second object to be heated 20 is spaced apart from the walls of the inlet portion 350, the wall 330, and the wall of the outlet portion 360, and the second object to be heated 20 is suspended in the air. In this state, the second object to be heated 20 is irradiated with microwaves in the cavity 370 in the cylindrical cavity resonator 320.

[0112] As described above, the tension can be applied by the conveying device 70. Supports may be provided on the conveying path 50 upstream and / or downstream of the cylindrical cavity resonator 320, the entrance 350, and the exit 360, and tension may be applied to the second object to be heated 20 to suspend the second object to be heated 20 while the supports support the second object to be heated 20. This configuration makes it easier to homogenize the electric field within the cylindrical cavity resonator 320 compared to a configuration in which supports are provided within the cylindrical cavity resonator 320. However, in another embodiment, supports may be provided within the cylindrical cavity resonator 320. The supports, together with the unwinding roller 100 and the winding roller 400, constitute the conveying device 70. The supports may be, for example, support rolls, support belts, or the like.

[0113] Hereinafter, the circumferential direction of the inner circumferential surface 335 will be referred to as a fourth direction D4. In this embodiment, the introduction opening 343 is located in one central division of the area between the pair of through holes 351a and 361a when the area is divided into five parts in the fourth direction D4. Specifically, the introduction opening 343 is located at a position that divides the area between the pair of through holes 351a and 361a into two equal parts in the fourth direction D4.

[0114] In this embodiment, the inlet portion 350 includes a first plate 350a and a second plate 350b. A first extension hole 351b is formed between the first plate 350a and the second plate 350b.

[0115] In this embodiment, the outlet portion 360 includes a third plate 360a and a fourth plate 360b. A second extension hole 361b is formed between the third plate 360a and the fourth plate 360b.

[0116] In this embodiment, the first extension hole 351b has a slit shape. The second extension hole 361b has a slit shape. With this configuration, the inlet portion 350 and the outlet portion 360 can easily suppress leakage of microwaves from the cavity 370 to the outside of the cylindrical cavity resonator 320.

[0117] Here, the expression "a hole is slit-shaped" will be explained. This expression means that the ratio of the length of the cross section of the hole in the longitudinal direction to the length of the cross section in the lateral direction of the hole is 10 or more.

[0118] Below, as shown in Figure 5, A portion of the wall 330 that faces the conveying path 50 and is adjacent to the entrance portion 350 is referred to as a first wall portion 331. A portion of the wall 330 that faces the conveying path 50 and is adjacent to the exit portion 360 is referred to as a second wall portion 332.

[0119] As shown in Figs. 3A and 5, The direction perpendicular to the first protrusion direction Dp1 and the axial direction Da is referred to as the first height direction Dh1, The direction perpendicular to the second protrusion direction Dp2 and the axial direction Da is referred to as the second height direction Dh2. In the examples of FIGS. 3A and 5, the first height direction Dh1 and the second height direction Dh2 are equal to the third direction D3.

[0120] As shown in Figs. 3A and 5, The dimension of the first wall portion 331 in the first protruding direction Dp1 is denoted as c1, The dimension of the first extension hole 351b in the first protruding direction Dp1 is denoted as d1, The sum of dimensions c1 and d1 is expressed as b1, The dimension of the first extension hole 351b in the first height direction Dh1 is denoted as h1, The dimension of the first extension hole 351b in the axial direction Da is denoted as w1, The dimension of the second wall portion 332 in the second protruding direction Dp2 is denoted as c2, The dimension of the second extension hole 361b in the second protruding direction Dp2 is denoted as d2, The sum of dimensions c2 and d2 is expressed as b2, The dimension of the second extension hole 361b in the second height direction Dh2 is denoted as h2, The dimension of the second extension hole 361b in the axial direction Da is denoted as w2.

[0121] In this embodiment, the inlet portion 350 is configured so that the dimensions d1, h1, and w1 are fixed. In this embodiment, the dimension of the first wall hole 351a in the first height direction Dh1 is equal to the dimension h1.

[0122] In this embodiment, the ratio w1 / h1 of the dimension w1 to the dimension h1 is 10 or more. That is, the first extended hole 351b is slit-shaped. The ratio w1 / h1 may be 20 or more. For example, the ratio w1 / h1 is 10 or more and 200 or less, and in one specific example, it is 20 or more and 200 or less.

[0123] From the viewpoint of suppressing leakage of microwaves from the cavity 370 to the outside of the cylindrical cavity resonator 320, it is advantageous that the dimensions h1, w1, and d1 are small. On the other hand, the second object to be heated 20 may bend vertically downward due to gravity during transportation. If the second object to be heated 20 is bent, it may come into contact with the inlet portion 350 and be damaged. From the viewpoint of ensuring the quality of the second object to be heated 20, it is advantageous that the dimensions h1, w1, and d1 are large.

[0124] By appropriately setting the dimensions d1, w1, and h1, it is possible to suppress the leakage of microwaves and ensure the quality of the second object to be heated 20 at the same time.

[0125] In one example, the dimension d1 is 10 mm or more and 300 mm or less. In one specific example, the dimension d1 is 20 mm or more and 90 mm or less. In a more specific example, the dimension d1 is 20 mm or more and 65 mm or less.

[0126] In one example, the dimension w1 is 100 mm or more and 5000 mm or less. In one specific example, the dimension w1 is 100 mm or more and 3000 mm or less. In a more specific example, the dimension w1 is 300 mm or more and 3000 mm or less. In an even more specific example, the dimension w1 is 300 mm or more and 600 mm or less.

[0127] In one example, the dimension h1 is 1 mm or more and 50 mm or less. In one specific example, the dimension h1 is 4 mm or more and 50 mm or less. In a more specific example, the dimension h1 is 4 mm or more and 30 mm or less.

[0128] In this embodiment, the dimension d1 is greater than the dimension c1. This configuration is advantageous from the viewpoint of making the inlet portion 350 contribute to suppressing leakage of microwaves.

[0129] In one example, the ratio d1 / c1 of the dimension d1 to the dimension c1 is greater than 1 and not greater than 20. In one specific example, the ratio d1 / c1 is not less than 1.1 and not greater than 10.

[0130] In this embodiment, the outlet 360 is configured so that the dimensions d2, h2, and w2 are fixed. In this embodiment, the dimension of the second wall hole 361a in the second height direction Dh2 is equal to the dimension h2.

[0131] In this embodiment, the ratio w2 / h2 of the dimension w2 to the dimension h2 is 10 or more. That is, the second extended hole 361b is slit-shaped. The ratio w2 / h2 may be 20 or more. For example, the ratio w2 / h2 is 10 or more and 200 or less, and in one specific example, it is 20 or more and 200 or less.

[0132] From the viewpoint of suppressing leakage of microwaves from the cavity 370 to the outside of the cylindrical cavity resonator 320, it is advantageous that the dimensions h2, w2, and d2 are small. On the other hand, the second object to be heated 20 may bend vertically downward due to gravity during transportation. If the second object to be heated 20 is bent, it may come into contact with the outlet portion 360 and be damaged. From the viewpoint of ensuring the quality of the second object to be heated 20, it is advantageous that the dimensions h2, w2, and d2 are large.

[0133] By appropriately setting the dimensions d2, w2, and h2, it is possible to suppress the leakage of microwaves and ensure the quality of the second object 20 to be heated at the same time.

[0134] In one example, the dimension d2 is 10 mm or more and 300 mm or less. In one specific example, the dimension d2 is 20 mm or more and 90 mm or less. In a more specific example, the dimension d2 is 20 mm or more and 65 mm or less.

[0135] In one example, the dimension w2 is 100 mm or more and 5000 mm or less. In one specific example, the dimension w2 is 100 mm or more and 3000 mm or less. In a more specific example, the dimension w2 is 300 mm or more and 3000 mm or less. In an even more specific example, the dimension w2 is 300 mm or more and 600 mm or less.

[0136] In one example, the dimension h2 is 1 mm or more and 50 mm or less. In one specific example, the dimension h2 is 4 mm or more and 50 mm or less. In a more specific example, the dimension h2 is 4 mm or more and 30 mm or less.

[0137] In this embodiment, the dimension d2 is greater than the dimension c2. This configuration is advantageous from the viewpoint of making the outlet 360 contribute to suppressing leakage of microwaves.

[0138] In one example, the ratio d2 / c2 of the dimension d2 to the dimension c2 is greater than 1 and not greater than 20. In one specific example, the ratio d2 / c2 is not less than 1.1 and not greater than 10.

[0139] In this embodiment, the dimensions c1 and c2 are equal, the dimensions d1 and d2 are equal, the dimensions w1 and w2 are equal, and the dimensions h1 and h2 are equal.

[0140] The first extended hole 351b has an inlet opening 351e that is an opening on the opposite side to the cavity 370. The second extended hole 361b has an outlet opening 361e that is an opening on the opposite side to the cavity 370.

[0141] below, The longitudinal direction of the inlet opening 351e is referred to as the first longitudinal direction. The short-side direction of the entrance opening 351e is referred to as the first short-side direction, The longitudinal direction of the outlet opening 361e is referred to as the second longitudinal direction, The short-side direction of the outlet opening 361e is referred to as a second short-side direction.

[0142] In this embodiment, the first longitudinal direction and the second longitudinal direction are parallel to the axial direction Da of the inner circumferential surface. The first short-side direction and the second short-side direction are perpendicular to the axial direction Da. In the examples of Figures 3A and 5, the first short-side direction and the second short-side direction are equal to the third direction D3.

[0143] In one example, the first longitudinal dimension of inlet opening 351e is greater than or equal to 100 mm and less than or equal to 5000 mm. In one specific example, this dimension is greater than or equal to 100 mm and less than or equal to 3000 mm. In a more specific example, this dimension is greater than or equal to 300 mm and less than or equal to 3000 mm. In an even more specific example, this dimension is greater than or equal to 300 mm and less than or equal to 600 mm.

[0144] In one example, the dimension of the inlet opening 351e in the first short direction is 1 mm or more and 50 mm or less. In one specific example, this dimension is 4 mm or more and 50 mm or less. In a more specific example, this dimension is 4 mm or more and 30 mm or less.

[0145] In one example, the second longitudinal dimension of outlet opening 361e is greater than or equal to 100 mm and less than or equal to 5000 mm. In one specific example, this dimension is greater than or equal to 100 mm and less than or equal to 3000 mm. In a more specific example, this dimension is greater than or equal to 300 mm and less than or equal to 3000 mm. In an even more specific example, this dimension is greater than or equal to 300 mm and less than or equal to 600 mm.

[0146] In one example, the dimension of the outlet opening 361e in the second short direction is 1 mm or more and 50 mm or less. In one specific example, this dimension is 4 mm or more and 50 mm or less. In a more specific example, this dimension is 4 mm or more and 30 mm or less.

[0147] In this embodiment, the dimension of the entrance opening 351e in the first longitudinal direction is equal to the dimension of the exit opening 361e in the second longitudinal direction. The dimension of the entrance opening 351e in the first lateral direction is equal to the dimension of the exit opening 361e in the second lateral direction.

[0148] below, The power of the microwaves passing through the entrance opening 351e so as to leak out from the entrance portion 350 is represented as microwave power Po1. The power of the microwaves passing through the outlet opening 361e so as to leak out from the outlet portion 360 is represented as microwave power Po2.

[0149] In one example, the ratio Po1 / Pi of the microwave power Po1 to the microwave power Pi is 0.2 or less. This configuration is advantageous from the viewpoint of suppressing microwave leakage from the cavity 370 to the outside of the cylindrical cavity resonator 320. In one specific example, the ratio Po1 / Pi is 0.185 or less.

[0150] In one example, the ratio Po2 / Pi of the microwave power Po2 to the microwave power Pi is 0.2 or less. This configuration is advantageous from the viewpoint of suppressing microwave leakage from the cavity 370 to the outside of the cylindrical cavity resonator 320. In one specific example, the ratio Po2 / Pi is 0.185 or less.

[0151] By the way, the guideline value for electromagnetic field strength (average value for 6 minutes) in condition P in the Radio Wave Protection Guidelines is 5mW / cm in terms of power density for electromagnetic waves with frequencies between 1.5GHz and 300GHz. 2 The following conditions are set out: Here, condition P is a condition that radio wave use based on the concept of the Radio Wave Protection Guidelines can be carried out.

[0152] Fig. 6 is an explanatory diagram of a microwave heating device 300 according to a specific example of the first embodiment. In the specific example of Fig. 6, the microwave heating device 300 is housed in a housing 500. The housing 500 has an entrance opening 511 and an exit opening 512. The transfer path 50 includes a portion 50p extending on a straight line parallel to the first direction D1. The portion 50p passes through the entrance opening 511, the first extension hole 351b, the first wall hole 351a, the cavity 370, the second wall hole 361a, the second extension hole 361b, and the exit opening 512 in this order.

[0153] Hereinafter, a cross section perpendicular to the central axis 390 and passing through the inlet opening 511, the first extension hole 351b, the first wall hole 351a, the cavity 370, the second wall hole 361a, the second extension hole 361b, and the outlet opening 512 will be referred to as a reference cross section 570. The cross section shown in FIG. 6 is the reference cross section 570. In the reference cross section 570, the distance from the central axis 390 to the inlet opening 511 is 375 mm. In the reference cross section 570, the distance from the central axis 390 to the outlet opening 512 is 375 mm.

[0154] The housing 500 acts as an electromagnetic shield. In this embodiment, the housing 500 has an electromagnetic wave shielding ability that attenuates microwaves with a frequency of 1 GHz or more and 3 GHz or less by 35 dB or more. Specifically, the housing 500 has an electromagnetic wave shielding ability that attenuates microwaves with a frequency of 1 GHz or more and 3 GHz or less by 40 dB or more.

[0155] Of the space outside the housing 500, a portion adjacent to the entrance opening 511 is denoted as position 551. Of the space outside the housing 500, a portion adjacent to the exit opening 512 is denoted as position 552. According to this embodiment, under the condition that the microwave frequency f is 1.5 GHz or more and 300 GHz or less and the microwave power Pi is 200 W, the power density at positions 551 and 552 is set to 5 mW / cm. 2 It is possible to do the following:

[0156] The second embodiment will be described below. In the following, the description of the contents already described in the first embodiment may be omitted. The descriptions of these embodiments may be mutually applied unless there is a technical contradiction. These embodiments may be combined with each other unless there is a technical contradiction.

[0157] [Embodiment 2] In the second embodiment, an input coupling section 740 having a different shape from the input coupling section 340 of the first embodiment is used. The input coupling section 740 of the second embodiment will be described below in comparison with the input coupling section 340 of the first embodiment using enlarged cross-sectional views.

[0158] Fig. 7 is an enlarged cross-sectional view of the input coupling section 340 according to the first embodiment. In contrast, Fig. 8 is an enlarged cross-sectional view of the input coupling section 740 according to the second embodiment.

[0159] Hereinafter, the input coupling section 340 according to the first embodiment may be referred to as a "ZA type" input coupling section. Among ZA type input coupling sections, those in which the thickness ta1 and the thickness ta2 are zero may be referred to as a "Z-A1 type" input coupling section. Among ZA type input coupling sections, those in which the thickness ta1 and the thickness ta2 are greater than zero may be referred to as a "Z-A2 type" input coupling section. The input coupling section 740 according to the second embodiment may be referred to as a "ZB type" input coupling section.

[0160] 8 includes a first intermediate portion 845, a first adjacent portion 745, an introduction opening 343, a second adjacent portion 746, and a second intermediate portion 846. In the input coupling portion 740, the first intermediate portion 845, the first adjacent portion 745, the introduction opening 343, the second adjacent portion 746, and the second intermediate portion 846 are positioned in this order.

[0161] The introduction opening 343 is adjacent to a first adjacent portion 745 and a second adjacent portion 746. The introduction opening 343 is located between the first adjacent portion 745 and the second adjacent portion 746.

[0162] The first adjacent portion 745 has a first adjacent flat surface 741. The first adjacent flat surface 741 is adjacent to the introduction opening 343. That is, the first adjacent flat surface 741 extends to the introduction opening 343.

[0163] The first adjacent plane 741 extends perpendicular to the direction from the waveguide 310 toward the introduction opening 343. In this embodiment, the direction from the waveguide 310 toward the introduction opening 343 is the third direction D3.

[0164] The first intermediate portion 845 is located between the wall 330 and the first adjacent portion 745. Specifically, the wall 330, the first intermediate portion 845, and the first adjacent portion 745 are provided continuously in this order.

[0165] The first intermediate portion 845 has a first intermediate curved surface 841. The first intermediate curved surface 841 is located between the inner circumferential surface 335 of the wall 330 and the first adjacent flat surface 741. The first intermediate curved surface 841 is continuous with the inner circumferential surface 335.

[0166] Specifically, the first intermediate curved surface 841 is flush with and connected to the inner circumferential surface 335. The first intermediate curved surface 841 is a part of a cylindrical surface.

[0167] The second adjacent portion 746 has a second adjacent flat surface 742. The second adjacent flat surface 742 is adjacent to the introduction opening 343. That is, the second adjacent flat surface 742 extends to the introduction opening 343.

[0168] The second adjacent plane 742 extends perpendicular to the direction from the waveguide 310 toward the introduction opening 343 .

[0169] The second intermediate portion 846 is located between the wall 330 and the second adjacent portion 746. Specifically, the wall 330, the second intermediate portion 846, and the second adjacent portion 746 are provided in this order.

[0170] The second intermediate portion 846 has a second intermediate curved surface 842. The second intermediate curved surface 842 is located between the inner circumferential surface 335 of the wall 330 and the second adjacent flat surface 742. The second intermediate curved surface 842 is continuous with the inner circumferential surface 335.

[0171] Specifically, the second intermediate curved surface 842 is flush with and connected to the inner circumferential surface 335. The second intermediate curved surface 842 is a part of a cylindrical surface.

[0172] A continuous curved surface 385 is formed including the inner circumferential surface 335 of the wall 330, the first intermediate curved surface 841, and the second intermediate curved surface 842. In this way, the shapes of the first intermediate curved surface 841 and the second intermediate curved surface 842 of the input coupling portion 740 contribute to the formation of the cylindrical shape of the cavity 370. If the cylindrical shape of the cavity 370 is not precise enough, the electric field of the cylindrical cavity resonator 320 may be disturbed. However, the above contribution can suppress the disturbance of the electric field. This is advantageous from the viewpoint of heating the second object to be heated 20 with microwaves.

[0173] As described above, in this embodiment, there are the first adjacent plane 741 and the second adjacent plane 742. The presence of the first adjacent plane 741 and the second adjacent plane 742 can contribute to improving the ratio Q2 / Q1 of the electric field strength Q2 to the electric field strength Q1.

[0174] The first adjacent portion 745 has a first proximal end 745a and a first distal end 745b. The first proximal end 745a is an end that is adjacent to the introduction opening 343. The first distal end 745b is an end that is located farther from the introduction opening 343 than the first proximal end 745a.

[0175] The second adjacent portion 746 has a second proximal end 746a and a second distal end 746b. The second proximal end 746a is an end that is adjacent to the introduction opening 343. The second distal end 746b is an end that is located farther from the introduction opening 343 than the second proximal end 746a.

[0176] Unless there is a particular contradiction, the dimensions described in the first embodiment can also be used in the second embodiment.

[0177] For example, in embodiment 2, the thickness ta1 of the first proximal end 745a is not less than 0 mm and not more than 10 mm. A thickness ta1 of this magnitude is advantageous from the viewpoint of improving the precision of the cylindrical shape of the cavity 370. Specifically, the thickness ta1 is not less than 0.5 mm and not more than 10 mm. More specifically, the thickness ta1 is not less than 0.5 mm and not more than 5 mm. Even more specifically, the thickness ta1 is not less than 0.5 mm and not more than 2 mm. In embodiment 2, other numerical examples of the thickness ta1 are not less than 1 mm and not more than 10 mm, such as not less than 2 mm and not more than 10 mm, or not more than 3 mm and not more than 9 mm. The above other numerical examples may be adopted in embodiment 1.

[0178] Furthermore, in the second embodiment, the thickness ta2 of the second proximal end 746a is not less than 0 mm and not more than 10 mm. A thickness ta2 of this magnitude is advantageous from the viewpoint of improving the precision of the cylindrical shape of the cavity 370. Specifically, the thickness ta2 is not less than 0.5 mm and not more than 10 mm. More specifically, the thickness ta2 is not less than 0.5 mm and not more than 5 mm. Even more specifically, the thickness ta2 is not less than 0.5 mm and not more than 2 mm. In the second embodiment, other numerical examples of the thickness ta2 include not less than 1 mm and not more than 10 mm, not more than 2 mm and not more than 10 mm, and not more than 3 mm and not more than 9 mm. The above other numerical examples may be adopted in the first embodiment.

[0179] [Embodiment 3] FIG. 9 is an enlarged schematic view of an inlet section 950, an outlet section 960, and a cylindrical cavity resonator 320 according to a first example of the third embodiment.

[0180] In the first example of the third embodiment, in a cross section perpendicular to the axial direction Da, the first extension hole 951b has a tapered shape that narrows as it goes away from the cavity 370 of the cylindrical cavity resonator 320. This configuration makes it easy to make the inlet opening 951e small, which is advantageous from the viewpoint of suppressing leakage of microwaves from the cavity 370.

[0181] In the first example of the third embodiment, in a cross section perpendicular to the axial direction Da, the second extension hole 961b has a tapered shape that narrows as it goes away from the cavity 370 of the cylindrical cavity resonator 320. This configuration makes it easy to make the exit opening 961e small, which is advantageous from the viewpoint of suppressing leakage of microwaves from the cavity 370.

[0182] The inlet portion 950 has a first upper surface 950j and a first lower surface 950k facing the first extended hole 951b, and the outlet portion 960 has a second upper surface 960j and a second lower surface 960k facing the second extended hole 961b.

[0183] In a cross section perpendicular to the axial direction Da, the first lower surface 950k extends so that its vertical height decreases toward the cavity 370. With this configuration, even if the second object to be heated 20 bends vertically downward due to gravity, the second object to be heated 20 is unlikely to come into contact with the first lower surface 950k.

[0184] In a cross section perpendicular to the axial direction Da, the second lower surface 960k extends so that its vertical height decreases toward the cavity 370. With this configuration, even if the second object to be heated 20 bends vertically downward due to gravity, the second object to be heated 20 is unlikely to come into contact with the second lower surface 960k.

[0185] In a cross section perpendicular to the axial direction Da, the first upper surface 950j extends so that its vertical height increases as it approaches the cavity 370. In this cross section, the second upper surface 960j extends so that its vertical height increases as it approaches the cavity 370.

[0186] FIG. 10 is an enlarged schematic view of an inlet section 950, an outlet section 960, and a cylindrical cavity resonator 320 according to a second example of the third embodiment.

[0187] In the second example of the third embodiment, similarly to the first example of the third embodiment, in a cross section perpendicular to the axial direction Da, the first lower surface 950k extends so that its vertical height decreases as it approaches the cavity 370. In this cross section, the second lower surface 960k extends so that its vertical height decreases as it approaches the cavity 370.

[0188] In the second example of the third embodiment, in a cross section perpendicular to the axial direction Da, the first upper surface 950j extends so that its vertical height decreases toward the cavity 370. With this configuration, when the second object to be heated 20 is bent vertically downward due to gravity, the extension direction of the second object to be heated 20 and the extension direction of the first upper surface 950j are likely to align. This is advantageous from the viewpoint of preventing the second object to be heated 20 from contacting the first upper surface 950j.

[0189] In the second example of the third embodiment, in a cross section perpendicular to the axial direction Da, the second upper surface 960j extends so that its vertical height decreases toward the cavity 370. With this configuration, when the second object to be heated 20 is bent vertically downward due to gravity, the extension direction of the second object to be heated 20 and the extension direction of the second upper surface 960j are likely to align. This is advantageous from the viewpoint of preventing the second object to be heated 20 from coming into contact with the second upper surface 960j.

[0190] In the second example of the third embodiment, the first protruding direction Dp1 and the second protruding direction Dp2 deviate from the first direction D1.

[0191] Although not shown in the drawings, in a third example of the third embodiment, in a cross section perpendicular to the axial direction Da, the first lower surface 950k extends so that its vertical height increases as it approaches the cavity 370. In this cross section, the second lower surface 960k extends so that its vertical height increases as it approaches the cavity 370.

[0192] The technology according to the present disclosure will be further explained below using examples. In the following simulation accuracy check, examples, and comparative examples, the axial direction Da is equal to the second direction D2. The direction from the waveguide 310 toward the introduction opening 343 is equal to the third direction D3. [Example]

[0193] Simulations were performed using the simulation software COMSOL Multiphysics (registered trademark) manufactured by COMSOL, Inc. Specifically, the accuracy of the simulations was confirmed, and examples and comparative examples were performed by simulation.

[0194] Table 1 below shows the simulation conditions. [Table 1]

[0195] (A. Simulation model for accuracy verification and accuracy of simulation) Hereinafter, a simulation model for accuracy verification and the accuracy of the simulation will be described.

[0196] <A-1. Simulation Model for Accuracy Verification> FIG. 11A is a perspective view for explaining the actually fabricated structure ST. FIG. 11B is an enlarged cross-sectional view for explaining the measurement contents in the structure ST. In FIG. 11B, the cylindrical cavity resonator 320, the inlet portion 350, and the outlet portion 360 are drawn together to simplify the drawing. FIG. 11C is a perspective view for explaining the simulation model MR. FIG. 11D is a scatter diagram showing the accuracy of the simulation.

[0197] The structure ST shown in FIG. 11A includes a waveguide 310, a cylindrical cavity resonator 320, an inlet portion 350, and an outlet portion 360. The waveguide 310, the cylindrical cavity resonator 320, the inlet portion 350, and the outlet portion 360 in the structure ST respectively correspond to the waveguide 310, the cylindrical cavity resonator 320, the inlet portion 350, and the outlet portion 360 according to Embodiment 1. In the structure ST, the radius of the cavity 370 of the cylindrical cavity resonator 320 is 46 mm. In the structure ST, the thicknesses ta1 and ta2 of the input coupling portion 340 are zero. That is, the input coupling portion 340 in the structure ST is of the Z-A1 type.

[0198] The simulation model MR shown in FIG. 11C is a simulation model for accuracy verification. The waveguide model 310M, the cylindrical cavity resonator model 320M, the inlet model 350M, and the outlet model 360M in the simulation model MR shown in FIG. 11C respectively simulate the waveguide 310, the cylindrical cavity resonator 320, the inlet 350, and the outlet 360 in the structure ST shown in FIG. 11A. The input port model 312M and the wall model 330M in the simulation model MR shown in FIG. 11C respectively simulate the input port 312 and the wall 330 in the structure ST shown in FIG. 11A. The input coupling part model 340M in the simulation model MR shown in FIG. 11C simulates the input coupling part 340 in the structure ST shown in FIG. 11A. That is, the input coupling part model 340M in the simulation model MR is of the Z-A1 type.

[0199] In the structure ST, the waveguide 310, the input coupling part 340, the wall 330, the inlet 350, and the outlet 360 are separate bodies. On the other hand, in the simulation model MR, the waveguide model 310M, the input coupling part model 340M, the wall model 330M, the inlet model 350M, and the outlet model 360M are represented by assigning the common material specifications shown in Table 1 to a plurality of continuous elements (regions) in the finite element method.

[0200] <A-2. Accuracy of Simulation> As shown in FIG. 11A, a microwave detector 910 was constructed. In the microwave detector 910, a loop antenna 912 is fixed to a support rod 911. The loop antenna 912 has a loop 913. The microwave detector 910 was inserted into the structure ST from the inlet 350 side. Thereby, the intensity of the microwave was detected. Hereinafter, the detection will be specifically described.

[0201] 11B , the boundary position between the cavity 370 of the cylindrical cavity resonator 320 and the first wall hole 351a was set as the reference position j0. A position 4.5 mm from the reference position j0 toward the central axis 390 was set as the measurement position ja. A position within the first extended hole 351b 19 mm from the reference position j0 in the opposite direction to the central axis 390 was set as the measurement position jf. The measurement positions jb, jc, jd, and je were set between the measurement positions ja and jf such that the measurement positions ja, jb, jc, jd, je, and jf were set in this order at 4.7 mm intervals in the first direction D1.

[0202] A predetermined microwave power Pi was input into the waveguide 310 via the input port 312. In this state, loops 913 were sequentially placed at the measurement positions ja, jb, jc, jd, je, and jf. Microwave power Pa at measurement position ja, Microwave power Pb at measurement position jb, Microwave power Pc at measurement position jc, Microwave power Pd at measurement position jd, The microwave power Pe at the measurement location je, and Microwave power Pf at measurement position jf was detected.

[0203] The transmitted intensity S21 (unit: dB) at each measurement position was calculated based on the following formula: ·Transmission intensity S21 at measurement position ja = 10 * log 10 (Pa / Pi) ·Transmission intensity S21 at measurement position jb = 10 * log 10 (Pb / Pi) ·Transmission intensity S21 at measurement position jc = 10 * log 10 (Pc / Pi) ·Transmitted intensity S21 at measurement position jd = 10 * log 10 (Pd / Pi) ·Transmission intensity S21 at measurement position je=10 * log 10 (Pe / Pi) ·Transmission intensity S21 at measurement position jf = 10 * log 10 (Pf / Pi)

[0204] Hereinafter, the transmission intensity S21 calculated based on the detection by the loop 913 may be referred to as the actual measurement value of the transmission intensity S21.

[0205] Furthermore, electromagnetic field simulation using simulation model MR was performed to calculate the transmission intensity S21 at each of measurement positions ja, jb, jc, jd, je, and jf. Specifically, in the electromagnetic field simulation, an electric field was forcibly applied at input port model 312M of waveguide model 310M. Microwave power Pi was calculated from the forcibly applied electric field. Furthermore, power Pa, power Pb, power Pc, power Pd, power Pe, and power Pf were calculated based on the electric fields at each of measurement positions ja, jb, jc, jd, je, and jf. Based on these calculated values ​​and the above formula, transmission intensity S21 at each of measurement positions ja, jb, jc, jd, je, and jf was calculated.

[0206] Hereinafter, the transmission intensity S21 calculated based on the electromagnetic field simulation may be referred to as the simulation value of the transmission intensity S21.

[0207] 11D is a scatter plot showing the relationship between the simulated values ​​of transmission intensity S21 and the measured values ​​of transmission intensity S21 at measurement positions ja, jb, jc, jd, je, and jf. In this scatter plot, the x-axis, which is the horizontal axis, represents the simulated values ​​of transmission intensity S21, and the y-axis, which is the vertical axis, represents the measured values ​​of transmission intensity S21.

[0208] In FIG. 11D, the formula "y=1x-8E-05" of the approximate line for each plot at measurement position ja, measurement position jb, measurement position jc, measurement position jd, measurement position je, and measurement position jf is shown. This formula is based on the least squares method. In addition, the coefficient of determination of the approximate line "R 2 =0.986". It can be seen from FIG. 11D that the simulated value and the measured value of the transmitted intensity S21 match with high accuracy, and that the accuracy of the electromagnetic field simulation is high.

[0209] (B. Simulation Experiments) The experiments of Examples 1 to 7 and Comparative Examples 1 to 5 were carried out by electromagnetic field simulation using the simulation parameters shown in Table 1.

[0210] In addition, the experiments of Examples 8 to 10 were Number of elements: 552400 Number of nodes: 144500 Solution method: finite element method This was done by electromagnetic field simulation using the following simulation parameters.

[0211] In Examples 1 to 10, electromagnetic field simulation was performed on simulation model MA1. Simulation model MA1 is obtained by adding coating model 21M to simulation model MR. Coating model 21M simulates the coating 21 extending over the region from inlet opening 351e to outlet opening 361e. The material specifications shown in Table 1 were assigned to coating model 21M. The input coupling part model 340M in simulation model MA1 is of the Z-A1 type.

[0212] Fig. 12A is a perspective view showing the simulation model MA1, and Fig. 12B is a cross-sectional view showing the simulation model MA1.

[0213] In contrast, comparative simulation models were created for Comparative Example 1 to Comparative Example 5. The comparative simulation models were obtained by removing the inlet section model 350M and the outlet section model 360M from the simulation model MA1, and in Comparative Example 1 to Comparative Example 5, electromagnetic field simulations were performed on the comparative simulation models.

[0214] In Examples 1 to 10 and Comparative Examples 1 to 5, ·Dimensions c1 and c2 are equal, ·Dimensions d1 and d2 are equal, ·Dimensions h1 and h2 are equal ·Dimensions w1 and w2 are equal, · Thickness ta1 and thickness ta2 are equal The situation was simulated.

[0215] In the following, ·Dimensions c1 and c2 are expressed as the wall thickness c, Dimensions d1 and d2 are expressed as the length d of the flange. Dimensions h1 and h2 are expressed as the height h of the flange hole, Dimensions w1 and w2 are expressed as the width w of the flange hole, Thickness ta1 and thickness ta2 may be written as thickness ta.

[0216] In addition, in Examples 1 to 10 and Comparative Examples 1 to 5, The dimension of the waveguide 311 in the first direction D1 is 86.4 mm, The dimension of the waveguide 311 in the second direction D2 is 43.2 mm, The thickness ta of the input coupling portion 340 is 0 mm, The height x of the introduction opening 343 is 43.2 mm, The width y of the introduction opening 343 is 20 mm, The diameter of the cavity 370 is 92 mm, The dimensions of the first wall hole 351a and the second wall hole 361a in the third direction D3 are the same as the height h of the flange hole, A 2.45 GHz microwave is injected into the waveguide 310 and generated in the cavity 370 by TM 010 A standing wave of the mode is formed, In a cross section perpendicular to the axial direction Da, the first extension hole 351b and the second extension hole 361b extend straight in the first direction D1. The situation was simulated.

[0217] In Examples 1 to 10, at least one selected from the group consisting of the thickness c of the simulated wall, the length d of the flange, the height h of the flange hole, the width w of the flange hole, the thickness T21 of the coating film 21, and the width W21 of the coating film 21 was changed. The same applies to Comparative Examples 1 to 5.

[0218] In the electromagnetic field simulation, the electric field at the input port model 312M of the waveguide model 310M was forced. The microwave power Pi was calculated from the forced electric field.

[0219] In this electromagnetic field simulation, the microwave power Po1 and the microwave power Po2 are the same. Hereinafter, the microwave power Po1 and the microwave power Po2 may be referred to as the microwave power Po.

[0220] In the electromagnetic field simulations in Examples 1 to 10, the microwave power Po was calculated as follows. That is, the inlet portion model 350M has an inlet opening model corresponding to the inlet opening 351e. The inlet opening model is composed of multiple elements (regions) in the finite element method. For each of these elements, the product of the Poynting vector of the first protrusion direction Dp1 and the area perpendicular to the first protrusion direction Dp1 was calculated. The sum of the products related to these elements was treated as the microwave power Po.

[0221] On the other hand, in the electromagnetic field simulations of Comparative Examples 1 to 5, the microwave power Po was calculated as follows. That is, in the wall model 330M, there is an outer opening model corresponding to the outer opening of the first wall hole 351a. Here, the outer opening is the opening of the first wall hole 351a on the opposite side from the cavity 370. The outer opening model is composed of multiple elements (regions) in the finite element method. For each of these elements, the product of the outward Poynting vector and the area perpendicular to the outward direction was calculated. Then, the sum of the products of these elements was treated as the microwave power Po. Note that in the electromagnetic field simulations, the outward direction is the same direction as the first protrusion direction Dp1.

[0222] In the electromagnetic field simulation, the ratio Po / Pi of the microwave power Po to the microwave power Pi was calculated.

[0223] Table 2 shows the experimental results for Examples 1 to 10 and Comparative Examples 1 to 5. [Table 2]

[0224] The difference between Example 1 and Comparative Example 1 is the presence or absence of an inlet portion model 350M and an outlet portion model 360M (i.e., the presence or absence of a flange). Comparing Example 1 and Comparative Example 1, it can be seen that the inlet portion 350 and the outlet portion 360 reduce Po / Pi. From this, it can be seen that the inlet portion 350 and the outlet portion 360 contribute to suppressing leakage of microwaves from the cylindrical cavity resonator 320.

[0225] The same can be seen from a comparison between Example 2 and Comparative Example 1. The same can be seen from a comparison between Example 4 and Comparative Example 2. The same can be seen from a comparison between Example 5 and Comparative Example 3. The same can be seen from a comparison between Example 6 and Comparative Example 4. The same can be seen from a comparison between Example 7 and Comparative Example 5.

[0226] Furthermore, the combination of Example 1 and Comparative Example 1 has a thickness T21 of 30 μm, the combination of Example 4 and Comparative Example 2 has a thickness T21 of 50 μm, and the combination of Example 5 and Comparative Example 3 has a thickness T21 of 10 μm. Although the thickness T21 differs between 30 μm, 50 μm, and 10 μm in each combination, it can be seen that the inlet portion 350 and the outlet portion 360 reduce Po / Pi. This shows that the microwave leakage suppression effect of the inlet portion 350 and the outlet portion 360 is exerted at various thicknesses T21.

[0227] Furthermore, the height h is 10 mm in the combination of Example 1 and Comparative Example 1, the height h is 5 mm in the combination of Example 6 and Comparative Example 4, and the height h is 20 mm in the combination of Example 7 and Comparative Example 5. Although the height h differs between 10 mm, 5 mm, and 20 mm in each combination, it can be seen that the inlet portion 350 and the outlet portion 360 reduce Po / Pi. From this, it can be seen that the microwave leakage suppression effect of the inlet portion 350 and the outlet portion 360 is exerted at various heights h.

[0228] (Technologies applicable to the embodiments) The following describes techniques that can be applied to the above-described first to third embodiments.

[0229] The second object to be heated 20 may include a substrate without a coating. In this case, the substrate may contain a dielectric substance such as water. For example, the substrate can be dried by heating it.

[0230] In the above-described embodiment, both the substrate 11 and the film 21 are objects to be heated by microwaves. However, this is not essential. For example, the substrate 11 does not have to be an object to be heated by microwaves. The "first object to be heated 10" may be read as the "transported object 10."

[0231] The dielectric of the second object to be heated 20 may contain alcohol in addition to or instead of water. In this case, by heating the second object to be heated 20, the alcohol can be evaporated and the second object to be heated 20 can be dried.

[0232] The purpose of microwave heating may be annealing.

[0233] The input coupling portion 340 or the input coupling portion 740 may be integral with the wall 330. Specifically, the input coupling portion 340 or the input coupling portion 740 may be continuous with the wall 330 without any boundary.

[0234] The introduction opening 343 may be an opening whose size and / or shape is fixed, or may be an opening whose size and / or shape is variable.

[0235] The cylindrical cavity resonator 320, the inlet portion 350, and the outlet portion 360 may be arranged so that a line connecting the first extension hole 351b and the second extension hole 361b in a cross section perpendicular to the axial direction Da is deviated from the central axis 390. This configuration is advantageous from the viewpoint of suppressing leakage of microwaves from the cavity 370.

[0236] In a cross section perpendicular to the axial direction Da, the first extended hole 351b and / or the second extended hole 361b may be curved.

[0237] The inlet portion 350 may be configured so that the dimension h1 is variable. For example, a first adjuster may be provided to adjust the gap between the first plate 350a and the second plate 350b.

[0238] The outlet portion 360 may be configured so that the dimension h2 is variable. For example, a second adjuster may be provided to adjust the gap between the third plate 360a and the fourth plate 360b.

[0239] The inlet 350 and / or the outlet 360 may be made of an electromagnetic wave absorbing material, such as carbon black, graphite, foamed resin such as expanded polystyrene, or urethane.

[0240] The material of the inlet section 350 and / or the material of the outlet section 360 may be different.

[0241] The dimension c1 may be greater than or less than the dimension c2. The dimension d1 may be greater than or less than the dimension d2. The dimension w1 may be greater than or less than the dimension w2. The dimension h1 may be greater than or less than the dimension h2. The dimension h1 may be greater than or less than the dimension in the first height direction Dh1 of the first wall hole 351a. The dimension h2 may be greater than or less than the dimension in the second height direction Dh2 of the second wall hole 361a. The dimension in the first longitudinal direction of the entrance opening 351e may be greater than or less than the dimension in the second longitudinal direction of the exit opening 361e. The dimension in the first short-side direction of the entrance opening 351e may be greater than or less than the dimension in the second short-side direction of the exit opening 361e.

[0242] In one example, the dimension d1 is smaller than the dimension d2. The portion of the membrane 21 of the second object to be heated 20 located in the first extension hole 351b (hereinafter referred to as the first portion) is not irradiated with microwaves in the cavity 370. On the other hand, the portion of the membrane 21 of the second object to be heated 20 located in the second extension hole 361b (hereinafter referred to as the second portion) is irradiated with microwaves in the cavity 370. Therefore, the first portion contains more water than the second portion and can therefore absorb more microwaves. Therefore, even if the dimension d1 is smaller than the dimension d2, significant leakage of microwaves from the first extension hole 351b is unlikely to occur. Furthermore, because the dimension d1 is smaller than the dimension d2, the risk of the second object to be heated 20 bending vertically downward due to gravity coming into contact with the inlet portion 350 and being damaged can be reduced.

[0243] (Addendum) The present disclosure provides the following techniques.

[0244] (Technology 1) a cylindrical cavity resonator; an inlet portion for supplying an object to be heated into the cylindrical cavity resonator; an outlet portion for discharging the object to be heated from the cylindrical cavity resonator, The cylindrical cavity resonator comprises: a wall having an inner circumferential surface; an introduction opening for introducing a microwave into the cylindrical cavity resonator; the inlet and outlet portions protrude from the wall; A microwave heating device that heats the object to be heated by the microwaves in the cylindrical cavity resonator.

[0245] (Technology 2) When the microwave is irradiated into the cylindrical cavity resonator, TM 0n0 A standing wave of the mode is formed, n is a natural number greater than or equal to 1. The microwave heating device according to claim 1.

[0246] (Technology 3) The inlet portion and the outlet portion have slits. The microwave heating device according to technique 1 or 2.

[0247] (Technology 4) the inlet portion has an inlet opening; the outlet portion has an outlet opening; the inlet opening has a first longitudinal direction and a first lateral direction; the outlet opening has a second longitudinal direction and a second lateral direction; the first longitudinal direction and the second longitudinal direction are parallel to the axial direction of the inner circumferential surface, The first short-side direction and the second short-side direction are perpendicular to the axial direction. The microwave heating device according to any one of techniques 1 to 3.

[0248] (Technology 5) (a) the dimension of the inlet opening in the first short-side direction is 4 mm or more and 50 mm or less; and (b) the dimension of the outlet opening in the second short-side direction is 4 mm or more and 50 mm or less; having at least one configuration selected from the group consisting of: 5. The microwave heating device according to claim 4.

[0249] (Technology 6) a transfer path passing through the inlet portion, the cylindrical cavity resonator, and the outlet portion in this order is configured; The inlet portion protrudes from the wall in a first protruding direction, The outlet portion protrudes from the wall in a second protruding direction, The wall is a first wall portion facing the conveying path and adjacent to the entrance portion; a second wall portion facing the conveying path and adjacent to the outlet portion, (c) a dimension of the inlet portion in the first protruding direction is larger than a dimension of the first wall portion in the first protruding direction; and (d) a dimension of the outlet portion in the second protruding direction is larger than a dimension of the second wall portion in the second protruding direction; having at least one configuration selected from the group consisting of: 6. The microwave heating device according to any one of techniques 1 to 5.

[0250] (Technology 7) a waveguide; the microwave is introduced from the waveguide into the cylindrical cavity resonator through the introduction opening; the inlet portion has an inlet opening; the outlet portion has an outlet opening; The microwave power input to the waveguide is denoted as Pi, The power of the microwave passing through the entrance opening so as to leak out of the entrance portion is denoted as Po1, When the power of the microwave passing through the outlet opening so as to leak out from the outlet portion is expressed as Po2, (e) a configuration in which Po1 / Pi is 0.2 or less; and (f) A configuration in which Po2 / Pi is 0.2 or less; having at least one configuration selected from the group consisting of: 7. The microwave heating device according to any one of claims 1 to 6.

[0251] (Technology 8) In a cross section perpendicular to the axial direction of the inner circumferential surface, (g) the entrance portion has a first hole that narrows with increasing distance from the cylindrical cavity; and (h) the outlet portion has a second hole that narrows as it goes away from the cylindrical cavity resonator; having at least one configuration selected from the group consisting of: 8. The microwave heating device according to any one of claims 1 to 7.

[0252] (Technology 9) A microwave heating device according to any one of techniques 1 to 8; A conveying device that conveys the object to be heated to the inlet portion, Microwave heating system.

[0253] (Technology 10) A microwave heating method using the microwave heating device according to any one of techniques 1 to 8, a microwave heating method including irradiating the object to be heated with the microwaves in the cylindrical cavity resonator.

[0254] (Technology 11) 11. The microwave heating method according to claim 10, further comprising: dielectrically heating a dielectric material contained in the object to be heated by the microwaves in the cylindrical cavity resonator.

[0255] (Technology 12) 12. The microwave heating method according to claim 11, wherein the dielectric material comprises water.

[0256] (Technology 13) 13. The microwave heating method according to any one of claims 10 to 12, comprising: conveying the object to be heated so that the object passes through the inlet portion, the cylindrical cavity resonator, and the outlet portion in this order, and irradiating the object to be heated with the microwaves in the cylindrical cavity resonator in a state where the object has a portion protruding from the inlet portion, the cylindrical cavity resonator, and the outlet portion.

[0257] (Technology 14) 14. The microwave heating method according to any one of claims 10 to 13, further comprising suspending the object to be heated in the inlet portion, the cylindrical cavity resonator, and the outlet portion. [Industrial Applicability]

[0258] The technology according to the present invention can be applied to, for example, microwave drying.

[0259] For example, a film may be formed using a coating liquid diluted with a solvent, and the film may then be dried. From the viewpoint of improving environmental friendliness, it may be considered to change the solvent from an organic solvent to a solvent containing water. In this case, the energy required for evaporating the solvent may increase. In this regard, microwave drying technology can efficiently evaporate the water-containing solvent compared to drying technology using hot air or the like. Therefore, it is easy to improve environmental friendliness, even when the energy required for evaporating water is taken into consideration. [Explanation of symbols]

[0260] 1A Microwave Heating System 10, 20, S Heated object 11 Base material 21 Membrane 21M Painted Model 50 Transport Route 70 Conveyor 100 Payout roller 200 Coating device 300 Microwave Heating Device 310 Waveguide 310M Waveguide Model 311 Waveguide 312 input ports 312M input port model 315 Inside 317, 347 flange 320 Cylindrical Cavity Resonator 320M Cylindrical Cavity Resonator Model 330 Wall 330M Wall Model 331, 332 Wall section 335 Inner surface 340, 740 Input coupling section 340M, 740M input coupling model 341, 342, 385, 841, 842 curved surface 343, 351e, 361e, 511, 512, 951e, 961e aperture 345, 346, 745, 746 adjacent areas 345a, 346a, 345b, 346b, 745a, 745b, 746a, 746b end 349 Screw 350, 950 Entrance 350M Entrance Model 350a, 350b, 360a, 360b board 351, 361 communication hole 351a, 361a wall hole 351b, 361b extension hole 360, 960 exit section 360M Exit Model 370 Cavity 390 center axis 400 Winding roller 500 cabinets 570 Reference cross section 741, 742 adjacent planes 845 First Intermediate Section 846 Second Intermediate Section 910 Microwave Detector 911 Support rod 912 Loop Antenna 913 Loop 951b First extension hole 961b Second extension hole D1 1st direction D2 2nd direction D3 Third direction D4 4th direction Da axis direction Dh1 First height direction Dh2 Second height direction Dp1 1st protrusion direction Dp2 2nd protrusion direction MA1, MR simulation model ST structure

Claims

1. a cylindrical cavity resonator; an inlet portion for supplying an object to be heated into the cylindrical cavity resonator; an outlet portion for discharging the object to be heated from the cylindrical cavity resonator, The cylindrical cavity resonator comprises: a wall having an inner circumferential surface; an introduction opening for introducing a microwave into the cylindrical cavity resonator; the inlet and outlet portions protrude from the wall; A microwave heating device that heats the object to be heated by the microwaves in the cylindrical cavity resonator.

2. When the microwave is irradiated into the cylindrical cavity resonator, TM 0n0 A standing wave of the mode is formed, n is a natural number equal to or greater than 1, The microwave heating device according to claim 1.

3. The inlet portion and the outlet portion have slits. The microwave heating device according to claim 1.

4. the inlet portion has an inlet opening; the outlet portion has an outlet opening; the inlet opening has a first longitudinal direction and a first lateral direction; the outlet opening has a second longitudinal direction and a second transverse direction; the first longitudinal direction and the second longitudinal direction are parallel to the axial direction of the inner circumferential surface, the first short-side direction and the second short-side direction are perpendicular to the axial direction; The microwave heating device according to claim 1.

5. (a) a dimension of the inlet opening in the first short-side direction is 4 mm or more and 50 mm or less; and (b) a dimension of the outlet opening in the second short-side direction is 4 mm or more and 50 mm or less; having at least one configuration selected from the group consisting of: The microwave heating device according to claim 4.

6. a transfer path passing through the inlet portion, the cylindrical cavity resonator, and the outlet portion in this order is configured; The inlet portion protrudes from the wall in a first protruding direction, The outlet portion protrudes from the wall in a second protruding direction, The wall is a first wall portion facing the transport path and adjacent to the entrance portion; a second wall portion facing the conveying path and adjacent to the outlet portion, (c) a dimension of the inlet portion in the first protruding direction is greater than a dimension of the first wall portion in the first protruding direction; and (d) a dimension of the outlet portion in the second protruding direction is larger than a dimension of the second wall portion in the second protruding direction; having at least one configuration selected from the group consisting of: The microwave heating device according to claim 1.

7. a waveguide; the microwave is introduced from the waveguide into the cylindrical cavity resonator through the introduction opening; the inlet portion has an inlet opening; the outlet portion has an outlet opening; The microwave power input to the waveguide is denoted as Pi, The power of the microwave passing through the entrance opening so as to leak out from the entrance portion is denoted as Po1, When the power of the microwave passing through the outlet opening so as to leak out from the outlet portion is expressed as Po2, (e) Po1 / Pi is 0.2 or less; and (f) A configuration in which Po2 / Pi is 0.2 or less; having at least one configuration selected from the group consisting of: The microwave heating device according to claim 1.

8. In a cross section perpendicular to the axial direction of the inner circumferential surface, (g) the entrance portion has a first hole that narrows with increasing distance from the cylindrical cavity; and (h) the outlet portion has a second hole that narrows as it goes away from the cylindrical cavity resonator; having at least one configuration selected from the group consisting of: The microwave heating device according to claim 1.

9. A microwave heating device according to any one of claims 1 to 8; A conveying device that conveys the object to be heated to the inlet portion, Microwave heating system.

10. A microwave heating method using the microwave heating device according to any one of claims 1 to 8, a microwave heating method including irradiating the object to be heated with the microwaves in the cylindrical cavity resonator.

11. The microwave heating method according to claim 10, further comprising: dielectrically heating a dielectric material contained in the object to be heated by the microwaves in the cylindrical cavity resonator.

12. 12. The microwave heating method of claim 11, wherein the dielectric material comprises water.

13. 11. The microwave heating method according to claim 10, comprising: conveying the object to be heated so that the object passes through the inlet portion, the cylindrical cavity resonator, and the outlet portion in this order, and irradiating the object to be heated with the microwaves in the cylindrical cavity resonator in a state where the object has a portion protruding from the inlet portion, the cylindrical cavity resonator, and the outlet portion.

14. The microwave heating method according to claim 10, further comprising suspending the object to be heated in the inlet portion, the cylindrical cavity resonator, and the outlet portion.

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