Semiconductor device

Abstract

To provide a novel semiconductor device.SOLUTION: A semiconductor device includes a memory cell including a transistor and a capacitor including a ferroelectric, a word line, a bit line, and a plate line. A gate of the transistor is electrically connected to the word line, and one of a source and a drain of the transistor is electrically connected to the bit line. The other of the source and the drain of the transistor is electrically connected to one electrode of the capacitor; and the other electrode of the capacitor is electrically connected to the plate line. The memory device includes a function of supplying a potential for controlling an on state or an off state of a transistor to a word line, a function of supplying a first potential or a second potential to a bit line, and a function of supplying a third potential, a fourth potential, or a fifth potential to a plate line.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] One embodiment of the present invention relates to a semiconductor device and an electronic device.

[0002] Note that one embodiment of the present invention is not limited to the above technical field. The technical field of the invention disclosed in this specification relates to an object, a method, or a manufacturing method. Alternatively, one embodiment of the present invention relates to a process, a machine, a manufacture, or a composition of matter. Therefore, more specific examples of the technical field of one embodiment of the present invention disclosed in this specification include semiconductor devices, display devices, liquid crystal display devices, light-emitting devices, power storage devices, imaging devices, memory devices, signal processing devices, processors, electronic devices, systems, driving methods thereof, manufacturing methods thereof, and testing methods thereof. [Background technology]

[0003] In recent years, the development of semiconductor devices such as LSIs, CPUs, and memories (storage devices) has progressed. These semiconductor devices are used in a variety of electronic devices, including computers and personal digital assistants. Furthermore, various types of memory have been developed to suit various applications, such as temporary storage during arithmetic processing and long-term storage of data. Typical memory types include DRAM, SRAM, and flash memory.

[0004] Furthermore, as shown in Non-Patent Document 1, research and development of memories using ferroelectrics is being actively carried out. For the next generation of ferroelectric memories, research is being conducted on ferroelectric HfO2-based materials (Non-Patent Document 2), research on the ferroelectricity of hafnium oxide thin films (Non-Patent Document 3), research on the ferroelectricity of HfO2 thin films (Non-Patent Document 4), and research on the ferroelectric Hf 0.5 Zr 0.5 Research related to hafnium oxide is also being actively conducted, including the demonstration of the integration of FeRAM and CMOS using O2 (Non-Patent Document 5). [Prior art documents] [Non-patent literature]

[0005] [Non-Patent Document 1] TSBoescke,et al,“Ferroelectricity in hafnium oxide thin films”,APL99,2011 [Non-patent document 2] Zhen Fan,et al,“Ferroelectric HfO2-based materials for next-generation ferroelectric memories”,JOURNAL OF ADVANCED DIELECTRICS,Vol.6,No.2,2016 [Non-patent document 3] Jun Okuno,et al,“SoC compatible 1T1C FeRAM memory array based on ferroelectric Hf0.5Zr0.5O2”,VLSI 2020 [Non-patent document 4] Akira Toriumi, "Ferroelectricity of HfO2 Thin Films," The Japan Society of Applied Physics, Vol. 88, No. 9, 2019 [Non-Patent Document 5] T.Francois,et al,“Demonstration of BEOL-compatible ferroelectric Hf0.5Zr0.5O2 scaled FeRAM co-integrated with 130nm CMOS for embedded NVM applications”,IEDM 2019 Summary of the Invention [Problem to be solved by the invention]

[0006] An object of one embodiment of the present invention is to provide a novel memory device. Another object of one embodiment of the present invention is to provide a memory device with low power consumption. Another object of one embodiment of the present invention is to provide a highly reliable memory device. Another object of one embodiment of the present invention is to provide a memory device with a small occupation area. Another object of one embodiment of the present invention is to provide a memory device with a large storage capacity. Another object of one embodiment of the present invention is to provide a novel semiconductor device. Another object of one embodiment of the present invention is to provide a semiconductor device with low power consumption. Another object of one embodiment of the present invention is to provide a highly reliable semiconductor device. Another object of one embodiment of the present invention is to provide a semiconductor device with a small occupation area. Another object of one embodiment of the present invention is to provide a semiconductor device with a large storage capacity.

[0007] Note that the problems of one embodiment of the present invention are not limited to the problems listed above. The problems listed above do not preclude the existence of other problems. Note that the other problems are problems not mentioned in this section, which will be described below. Problems not mentioned in this section can be derived by a person skilled in the art from the description in the specification or drawings, and can be appropriately extracted from these descriptions. Note that one embodiment of the present invention solves at least one of the problems listed above and other problems. Note that one embodiment of the present invention does not necessarily solve all of the problems listed above and other problems. [Means for solving the problem]

[0008] One embodiment of the present invention is a semiconductor device including a memory cell including a transistor and a capacitor including a ferroelectric material, and first to third wirings, in which a gate of the transistor is electrically connected to the first wiring, one of a source or a drain of the transistor is electrically connected to a second wiring, the other of the source or the drain of the transistor is electrically connected to one electrode of the capacitor, and the other electrode of the capacitor is electrically connected to a third wiring, and the semiconductor device has a function of supplying a potential to the first wiring to turn the transistor on or off, a function of supplying the first potential or the second potential to the second wiring, and a function of supplying the third potential, the fourth potential, or the fifth potential to the third wiring.

[0009] The transistor preferably includes an oxide semiconductor as a semiconductor in which a channel is formed, and the oxide semiconductor preferably contains at least one of indium and zinc.

[0010] The ferroelectric may be a material containing at least one of aluminum, gallium, and indium, and nitrogen.

[0011] The ferroelectric may be a material containing at least one of aluminum, gallium, and indium, at least one of boron, scandium, yttrium, lanthanum, cerium, neodymium, europium, titanium, zirconium, hafnium, vanadium, niobium, tantalum, and chromium, at least one of magnesium, calcium, strontium, zinc, and cadmium, and nitrogen.The ferroelectric may be a material containing at least one of zirconium, silicon, aluminum, gadolinium, yttrium, lanthanum, and strontium, hafnium, and oxygen.

[0012] Another embodiment of the present invention is a method for driving a semiconductor device, which includes supplying a first potential to a second wiring, bringing the second wiring into a floating state, supplying a potential to turn on a transistor to the first wiring, supplying a third potential to a third wiring, and then supplying the first potential or the second potential to the second wiring depending on the potential of the second wiring, supplying a fourth potential to the third wiring, and then supplying the first potential to the second wiring, supplying a fifth potential to the third wiring, and supplying a potential to turn off the transistor to the first wiring.

[0013] Another embodiment of the present invention is a method for driving a semiconductor device, which includes supplying a potential to turn on a transistor to a first wiring, supplying a second potential to a second wiring, supplying a fourth potential to a third wiring, and then supplying a first potential to the second wiring, supplying a fifth potential to the third wiring, and supplying a potential to turn off the transistor to the first wiring.

[0014] Another embodiment of the present invention is a method for driving a semiconductor device, which includes supplying a potential to a first wiring to turn on a transistor, supplying a first potential to a second wiring, supplying a third potential to a third wiring, and then supplying a fifth potential to the third wiring and a potential to turn off the transistor to the first wiring.

[0015] The second potential is preferably 80% or less of the saturated polarization voltage of the capacitance element, more preferably 50% or less, and even more preferably 20% or less. [Effects of the Invention]

[0016] According to one embodiment of the present invention, a novel memory device can be provided. According to one embodiment of the present invention, a memory device with low power consumption can be provided. According to one embodiment of the present invention, a memory device with high reliability can be provided. According to one embodiment of the present invention, a memory device with a small occupation area can be provided. According to one embodiment of the present invention, a memory device with a large storage capacity can be provided. According to one embodiment of the present invention, a novel semiconductor device can be provided. According to one embodiment of the present invention, a semiconductor device with low power consumption can be provided. According to one embodiment of the present invention, a semiconductor device with high reliability can be provided. According to one embodiment of the present invention, a semiconductor device with a small occupation area can be provided. According to one embodiment of the present invention, a semiconductor device with a large storage capacity can be provided.

[0017] The effects of one embodiment of the present invention are not limited to the effects listed above. The effects listed above do not preclude the existence of other effects. The other effects are described below and are not mentioned in this section. Effects not mentioned in this section can be derived by a person skilled in the art from the description in the specification or drawings, and can be extracted as appropriate from these descriptions. One embodiment of the present invention has at least one of the effects listed above and other effects. Therefore, one embodiment of the present invention may not have the effects listed above in some cases. [Brief explanation of the drawings]

[0018] [Figure 1] Fig. 1A is a block diagram illustrating an example of the configuration of a semiconductor device, and Fig. 1B is a perspective view illustrating an example of the configuration of a semiconductor device. [Figure 2] 2A to 2C are diagrams illustrating a semiconductor device. [Figure 3] FIG. 3 is a diagram illustrating a semiconductor device. [Figure 4] 4A to 4C are diagrams illustrating a semiconductor device. [Figure 5]FIG. 5 is a diagram illustrating an example of a hysteresis characteristic. [Figure 6] FIG. 6 is a timing chart for explaining the read operation. [Figure 7] 7A and 7B are diagrams showing the operating states of a memory cell. [Figure 8] 8A and 8B are diagrams showing the operating states of a memory cell. [Figure 9] 9A and 9B are diagrams showing the operating states of a memory cell. [Figure 10] 10A and 10B are diagrams showing the operating states of a memory cell. [Figure 11] 11A and 11B are diagrams showing the operating states of a memory cell. [Figure 12] 12A and 12B are diagrams showing the operating states of a memory cell. [Figure 13] 13A and 13B are diagrams showing the operating states of a memory cell. [Figure 14] FIG. 14 is a timing chart for explaining the read operation. [Figure 15] 15A and 15B are diagrams showing the operating states of a memory cell. [Figure 16] 16A and 16B are diagrams showing the operating states of a memory cell. [Figure 17] 17A and 17B are timing charts for explaining the write operation. [Figure 18] 18A and 18B are diagrams showing the operating states of a memory cell. [Figure 19] 19A and 19B are diagrams showing the operating states of a memory cell. [Figure 20] FIG. 20 is a timing chart for explaining the read operation. [Figure 21] 21A and 21B are diagrams showing modified examples of the semiconductor device. [Figure 22] FIG. 22 is a cross-sectional view showing a configuration example of a semiconductor device. [Figure 23] 23A is a top view illustrating an example of the structure of a transistor, and FIGS. 23B to 23D are cross-sectional views illustrating an example of the structure of a transistor. [Figure 24] FIG. 24 is a cross-sectional view showing an example of the configuration of a transistor. [Figure 25] Fig. 25A is a diagram illustrating the classification of crystal structures, Fig. 25B is a diagram illustrating the XRD spectrum of a CAAC-IGZO film, and Fig. 25C is a diagram illustrating the electron microbeam diffraction pattern of a CAAC-IGZO film. [Figure 26] FIG. 26A is a perspective view showing an example of a semiconductor wafer, FIG. 26B is a perspective view showing an example of a chip, and FIGS. 26C and 26D are perspective views showing an example of an electronic component. [Figure 27] 27A to 27J are perspective views or schematic diagrams illustrating examples of electronic devices. [Figure 28] 28A to 28E are perspective views or schematic diagrams illustrating examples of electronic devices. [Figure 29] 29A to 29C are diagrams illustrating an example of an electronic device. [Figure 30] FIG. 30 is a diagram illustrating the memory cell size. [Figure 31] 31A1, 31A2, 31B1, 31B2, 31C1, and 31C2 are schematic diagrams of memory cells. 31D1 and 31D2 are diagrams showing examples of the arrangement of peripheral drive circuits and memory cell arrays. 31E is a diagram showing an example of a memory cell array. 31F is a graph showing the relationship between the number of memory cells connected to a bit line and the voltage read out. DETAILED DESCRIPTION OF THE INVENTION

[0019] In this specification, a semiconductor device is a device that utilizes semiconductor characteristics, and refers to a circuit including a semiconductor element (transistor, diode, photodiode, etc.), a device having such a circuit, etc. It also refers to any device that can function by utilizing semiconductor characteristics. For example, an integrated circuit, a chip including an integrated circuit, or an electronic component that houses a chip in a package are examples of semiconductor devices. Furthermore, memory devices, display devices, light-emitting devices, lighting devices, electronic devices, etc. are themselves semiconductor devices and may include semiconductor devices.

[0020] Furthermore, when it is stated in this specification that X and Y are connected, it is understood that the following cases are disclosed in this specification: when X and Y are electrically connected, when X and Y are functionally connected, and when X and Y are directly connected. Therefore, it is not limited to a predetermined connection relationship, for example, a connection relationship shown in a figure or text, and it is understood that connections other than those shown in a figure or text are also disclosed in a figure or text. X and Y are understood to be objects (e.g., devices, elements, circuits, wiring, electrodes, terminals, conductive films, layers, etc.).

[0021] As an example of a case where X and Y are electrically connected, one or more elements (for example, a switch, a transistor, a capacitance element, an inductor, a resistance element, a diode, a display device, a light-emitting device, a load, etc.) that enable the electrical connection between X and Y can be connected between X and Y. The on and off states of the switch are controlled. In other words, the switch can be said to have the function of being in a conductive state (on state) or a non-conductive state (off state), and controlling whether or not a current flows.

[0022] As an example of a case where X and Y are functionally connected, one or more circuits that enable the functional connection between X and Y (for example, logic circuits (inverters, NAND circuits, NOR circuits, etc.), signal conversion circuits (digital-analog conversion circuits, analog-digital conversion circuits, gamma correction circuits, etc.), potential level conversion circuits (power supply circuits (boost circuits, step-down circuits, etc.), level shifter circuits that change the potential level of signals, etc.), voltage sources, current sources, switching circuits, amplifier circuits (circuits that can increase the signal amplitude or current amount, operational amplifiers, differential amplifier circuits, source follower circuits, buffer circuits, etc.), signal generation circuits, memory circuits, control circuits, etc.) can be connected between X and Y. As an example, even if another circuit is sandwiched between X and Y, X and Y are considered to be functionally connected if a signal output from X is transmitted to Y.

[0023] When it is explicitly stated that X and Y are electrically connected, this includes the case where X and Y are electrically connected (i.e., the case where X and Y are connected with another element or circuit between them) and the case where X and Y are directly connected (i.e., the case where X and Y are connected without another element or circuit between them).

[0024] Furthermore, for example, it can be expressed as follows: "X, Y, and the source (or first terminal, etc.) and drain (or second terminal, etc.) of the transistor are electrically connected to each other, and are electrically connected in the order of X, the source (or first terminal, etc.) of the transistor, the drain (or second terminal, etc.) of the transistor, and Y." Or, it can be expressed as follows: "The source (or first terminal, etc.) of the transistor is electrically connected to X, and the drain (or second terminal, etc.) of the transistor is electrically connected to Y, and X, the source (or first terminal, etc.) of the transistor, the drain (or second terminal, etc.) of the transistor, and Y are electrically connected in this order." Or, it can be expressed as follows: "X is electrically connected to Y via the source (or first terminal, etc.) and drain (or second terminal, etc.) of the transistor, and X, the source (or first terminal, etc.) of the transistor, the drain (or second terminal, etc.) of the transistor, and Y are provided in this connection order." By using expressions similar to these examples to define the order of connections in a circuit configuration, the source (or first terminal, etc.) and drain (or second terminal, etc.) of a transistor can be distinguished and the technical scope can be determined. Note that these expressions are merely examples and are not limiting. Here, X and Y are assumed to be objects (e.g., devices, elements, circuits, wiring, electrodes, terminals, conductive films, layers, etc.).

[0025] Note that even when independent components are shown electrically connected in a circuit diagram, one component may have the functions of multiple components. For example, if part of a wiring also functions as an electrode, one conductive film has the functions of both a wiring and an electrode. Therefore, in this specification, the term "electrically connected" also includes such cases where one conductive film has the functions of multiple components.

[0026] Furthermore, in this specification and the like, the term "resistance element" can refer to, for example, a circuit element, wiring, or the like having a resistance value higher than 0 Ω. Therefore, in this specification and the like, the term "resistance element" includes wiring having a resistance value, a transistor in which a current flows between the source and drain, a diode, a coil, and the like. Therefore, the term "resistance element" can be replaced with terms such as "resistance," "load," or "region having a resistance value," and conversely, the terms "resistance," "load," or "region having a resistance value" can be replaced with terms such as "resistance element." The resistance value can be, for example, preferably 1 mΩ or more and 10 Ω or less, more preferably 5 mΩ or more and 5 Ω or less, and even more preferably 10 mΩ or more and 1 Ω or less. Furthermore, for example, the resistance value can be, for example, 1 Ω or more and 1×10 9 It may be set to Ω or less.

[0027] When a wiring is used as a resistor, the resistance value may be determined by the length of the wiring, or a conductor having a different resistivity from that of the wiring may be used as the resistor, or the resistance value may be determined by doping impurities into a semiconductor.

[0028] Furthermore, in this specification, the term "capacitive element" can refer to, for example, a circuit element having a capacitance value greater than 0 F, a region of wiring having a capacitance value greater than 0 F, parasitic capacitance, or the gate capacitance of a transistor. Therefore, in this specification, the term "capacitive element" includes not only a circuit element including a pair of electrodes and a dielectric between the electrodes, but also parasitic capacitance occurring between wiring and one of the source or drain of a transistor and the gate, and the like. Furthermore, terms such as "capacitive element," "parasitic capacitance," and "gate capacitance" can be replaced with terms such as "capacitance," and conversely, the term "capacitance" can be replaced with terms such as "capacitive element," "parasitic capacitance," and "gate capacitance." Furthermore, the term "pair of electrodes" in "capacitance" can be replaced with "pair of conductors," "pair of conductive regions," or "pair of regions." The capacitance value can be, for example, 0.05 fF or more and 10 pF or less. It can also be, for example, 1 pF or more and 10 μF or less.

[0029] In this specification, a transistor has three terminals called a gate, a source, and a drain. The gate is a control terminal that controls the conduction state of the transistor. The two terminals that function as a source or a drain are the input / output terminals of the transistor. One of the two input / output terminals becomes a source and the other becomes a drain depending on the transistor's conductivity type (n-channel or p-channel) and the level of the potential applied to the three terminals of the transistor. Therefore, in this specification, the terms source and drain are interchangeable. In addition, in this specification, when describing the connection relationship of a transistor, the terms "one of the source or drain" (or first electrode or first terminal) and "the other of the source or drain" (or second electrode or second terminal) are used. Note that, depending on the transistor structure, a backgate may be included in addition to the three terminals described above. In this case, in this specification, one of the gate or backgate of the transistor may be referred to as the first gate, and the other of the gate or backgate of the transistor may be referred to as the second gate. Furthermore, for the same transistor, the terms "gate" and "backgate" may be interchangeable. Furthermore, when a transistor has three or more gates, the gates may be referred to as a first gate, a second gate, a third gate, and so on in this specification and the like.

[0030] Furthermore, in this specification and the like, the term "node" can be rephrased as a terminal, wiring, electrode, conductive layer, conductor, impurity region, etc., depending on the circuit configuration, device structure, etc. Furthermore, the term "node" can be rephrased as a terminal, wiring, etc.

[0031] Furthermore, in this specification and the like, the terms "voltage" and "potential" can be interchanged as appropriate. "Voltage" refers to the potential difference from a reference potential. For example, if the reference potential is the ground potential (earth potential), then "voltage" can be interchanged with "potential." Note that ground potential does not necessarily mean 0 V. Furthermore, potential is relative, and as the reference potential changes, the potential applied to wiring, the potential applied to a circuit, etc., the potential output from a circuit, etc. also changes.

[0032] Furthermore, in this specification and the like, the terms "high-level potential (also referred to as "high-level potential," "H potential," or "H")" and "low-level potential (also referred to as "low-level potential," "L potential," or "L")" do not refer to specific potentials. For example, when two wirings are both described as "functioning as wirings that supply high-level potentials," the high-level potentials provided by both wirings do not have to be equal to each other. Similarly, when two wirings are both described as "functioning as wirings that supply low-level potentials," the low-level potentials provided by both wirings do not have to be equal to each other.

[0033] "Current" refers to the phenomenon of charge transfer (electrical conduction). For example, a statement that "electrical conduction of a positively charged body is occurring" can be rephrased as "electrical conduction of a negatively charged body is occurring in the opposite direction." Therefore, in this specification, unless otherwise specified, "current" refers to the phenomenon of charge transfer (electrical conduction) associated with the movement of carriers. The carriers referred to here include electrons, holes, anions, cations, complex ions, etc., and the carriers differ depending on the system through which the current flows (e.g., semiconductor, metal, electrolyte, vacuum, etc.). Furthermore, the "direction of current" in wiring, etc., refers to the direction in which positive carriers move, and the amount of current is expressed as a positive value. In other words, the direction in which negative carriers move is opposite to the direction of current, and the amount of current is expressed as a negative value. Therefore, in this specification, etc., unless otherwise specified regarding the positive / negative sign of the current (or the direction of current), a statement such as "current flows from element A to element B" can be rephrased as "current flows from element B to element A," etc. Furthermore, statements such as "current is input to element A" can be rephrased as "current is output from element A" or the like.

[0034] Furthermore, in this specification, the ordinal numbers "first," "second," and "third" are used to avoid confusion between components. Therefore, they do not limit the number of components. Furthermore, they do not limit the order of the components. For example, a component referred to as "first" in one embodiment of this specification may be a component referred to as "second" in another embodiment, in the claims, etc. Furthermore, for example, a component referred to as "first" in one embodiment of this specification, etc. may be omitted in another embodiment, in the claims, etc.

[0035] Furthermore, in this specification, terms indicating position, such as "above" and "below," may be used for convenience in describing the positional relationship between components with reference to the drawings. Furthermore, the positional relationship between components changes as appropriate depending on the direction in which each component is depicted. Therefore, the terms are not limited to those used in the specification, and can be rephrased appropriately depending on the situation. For example, the expression "insulator located on the upper surface of a conductor" can be rephrased as "insulator located on the lower surface of a conductor" by rotating the orientation of the drawing 180 degrees.

[0036] Furthermore, the terms "above" and "below" do not limit the positional relationship of components to being directly above or below and in direct contact with each other. For example, the expression "electrode B on insulating layer A" does not require that electrode B be formed on insulating layer A in direct contact with it, and does not exclude the inclusion of other components between insulating layer A and electrode B.

[0037] Furthermore, in this specification and the like, terms such as "film" and "layer" can be interchanged depending on the situation. For example, the term "conductive layer" may be interchanged with the term "conductive film." Or, for example, the term "insulating film" may be interchanged with the term "insulating layer." Or, in some cases or depending on the situation, terms such as "film" and "layer" may not be used and may be interchanged with other terms. For example, the terms "conductive layer" or "conductive film" may be interchanged with the term "conductor." Or, for example, the terms "insulating layer" and "insulating film" may be interchanged with the term "insulator."

[0038] Furthermore, in this specification and the like, terms such as "electrode," "wiring," and "terminal" do not functionally limit these components. For example, an "electrode" may be used as part of a "wiring," and vice versa. Furthermore, the terms "electrode" and "wiring" include cases where multiple "electrodes" or "wirings" are integrally formed. Furthermore, for example, a "terminal" may be used as part of a "wiring" or "electrode," and vice versa. Furthermore, the term "terminal" includes cases where multiple "electrodes," "wirings," "terminals," etc. are integrally formed. Therefore, for example, an "electrode" can be part of a "wiring" or "terminal," and a "terminal" can be part of a "wiring" or "electrode." Furthermore, terms such as "electrode," "wiring," and "terminal" may be replaced with terms such as "region" in some cases.

[0039] Furthermore, in this specification and the like, terms such as "wiring," "signal line," and "power line" may be interchangeable depending on the circumstances. For example, the term "wiring" may be changed to the term "signal line." For example, the term "wiring" may be changed to the term "power line." Vice versa, terms such as "signal line" and "power line" may be changed to the term "wiring." A term such as "power line" may be changed to the term "signal line." Vice versa, terms such as "signal line" may be changed to the term "power line." Furthermore, the term "potential" applied to a wiring may be changed to the term "signal" depending on the circumstances. Vice versa, terms such as "signal" may be changed to the term "potential."

[0040] In this specification and the like, the term "impurities" in semiconductors refers to, for example, elements other than the main components constituting the semiconductor layer. For example, an element with a concentration of less than 0.1 atomic % is an impurity. The presence of impurities can cause, for example, an increase in the defect level density of the semiconductor, a decrease in carrier mobility, and a decrease in crystallinity. When the semiconductor is an oxide semiconductor, impurities that change the semiconductor characteristics include, for example, Group 1 elements, Group 2 elements, Group 13 elements, Group 14 elements, Group 15 elements, and transition metals other than the main components, particularly, for example, hydrogen (also contained in water), lithium, sodium, silicon, boron, phosphorus, carbon, and nitrogen. Specifically, when the semiconductor is a silicon layer, impurities that change the semiconductor characteristics include, for example, oxygen, Group 1 elements excluding hydrogen, Group 2 elements, Group 13 elements, and Group 15 elements.

[0041] In this specification, a switch refers to a device that can be in a conductive state (on state) or a non-conductive state (off state) and has the function of controlling whether or not a current flows. Alternatively, a switch refers to a device that has the function of selecting and switching a path through which a current flows. Examples include electrical switches and mechanical switches. In other words, the switch is not limited to a specific type as long as it can control a current.

[0042] Examples of electrical switches include transistors (e.g., bipolar transistors, MOS transistors, etc.), diodes (e.g., PN diodes, PIN diodes, Schottky diodes, MIM (Metal Insulator Metal) diodes, MIS (Metal Insulator Semiconductor) diodes, diode-connected transistors, etc.), and logic circuits combining these. When a transistor is used as a switch, the "conductive state" of the transistor refers to a state in which the source electrode and drain electrode of the transistor can be considered to be electrically short-circuited. The "non-conductive state" of the transistor refers to a state in which the source electrode and drain electrode of the transistor can be considered to be electrically disconnected. When a transistor is operated simply as a switch, the polarity (conductivity type) of the transistor is not particularly limited.

[0043] An example of a mechanical switch is a switch that uses MEMS (Micro Electro Mechanical Systems) technology. This switch has a mechanically movable electrode, and the movement of the electrode controls conduction and non-conduction.

[0044] As used herein, "parallel" refers to a state in which two straight lines are arranged at an angle of -10° or more and 10° or less. This therefore includes cases in which the angle is -5° or more and 5° or less. "Substantially parallel" or "roughly parallel" refers to a state in which two straight lines are arranged at an angle of -30° or more and 30° or less. "Perpendicular" refers to a state in which two straight lines are arranged at an angle of 80° or more and 100° or less. This therefore includes cases in which the angle is 85° or more and 95° or less. "Substantially perpendicular" or "approximately perpendicular" refers to a state in which two straight lines are arranged at an angle of 60° or more and 120° or less.

[0045] In this specification and the like, a metal oxide refers to an oxide of a metal in a broad sense. Metal oxides are classified into oxide insulators, oxide conductors (including transparent oxide conductors), oxide semiconductors (also referred to as oxide semiconductors or simply as OSs), and the like. For example, when a metal oxide is used in a semiconductor layer of a transistor, the metal oxide may be referred to as an oxide semiconductor. That is, when a metal oxide can form a channel formation region of a transistor having at least one of an amplifying function, a rectifying function, and a switching function, the metal oxide can be referred to as a metal oxide semiconductor. Furthermore, the term "OS transistor" can be rephrased as a transistor having a metal oxide or an oxide semiconductor.

[0046] In this specification and the like, nitrogen-containing metal oxides may also be collectively referred to as metal oxides. Nitrogen-containing metal oxides may also be referred to as metal oxynitrides.

[0047] In this specification and the like, the configurations shown in each embodiment can be combined as appropriate with the configurations shown in other embodiments to form one aspect of the present invention. In addition, when multiple configuration examples are shown in one embodiment, the configuration examples can be combined as appropriate with each other.

[0048] The embodiments described in this specification will be described with reference to the drawings. However, it will be readily understood by those skilled in the art that the embodiments can be implemented in many different ways, and that various changes in form and details can be made without departing from the spirit and scope of the invention. Therefore, the present invention should not be interpreted as being limited to the description of the embodiments. Note that in the configuration of the invention of the embodiments, the same reference numerals are used in different drawings for the same parts or parts having similar functions, and repeated description thereof may be omitted. Furthermore, to make the drawings easier to understand, the illustration of some components may be omitted in perspective views, top views, etc.

[0049] In addition, in the drawings of this specification, the size, layer thickness, or region may be exaggerated for clarity. Therefore, the size or aspect ratio is not necessarily limited. Note that the drawings are schematic illustrations of ideal examples and are not limited to the shapes or values ​​shown in the drawings. For example, variations in signal, voltage, or current due to noise, or variations in signal, voltage, or current due to timing deviations may be included.

[0050] In this specification and the like, when the same symbol is used for multiple elements, and particularly when it is necessary to distinguish between them, an identification symbol such as “_1”, “[i]”, or “[m,n]” may be added to the symbol. For example, one of two wirings CL may be written as wiring CL[1], and the other as wiring CL[2].

[0051] (Embodiment 1) A configuration example of a semiconductor device 100 including a memory cell 10 (also referred to as a "memory element") will be described.

[0052] 1A is a block diagram illustrating a configuration example of a semiconductor device 100 according to one embodiment of the present invention. The semiconductor device 100 illustrated in FIG. 1A includes a driver circuit 21 and a memory array 20. The memory array 20 includes a plurality of memory cells 10. FIG. 1A illustrates an example in which the memory array 20 includes a plurality of memory cells 10 arranged in a matrix of m rows and n columns (m and n are integers equal to or greater than 2).

[0053] The rows and columns extend in directions perpendicular to each other. In this embodiment, the X direction is referred to as the "rows" and the Y direction is referred to as the "columns," but the X direction may also be referred to as the "columns" and the Y direction may also be referred to as the "rows."

[0054] 1A, the memory cell 10 in the first row and first column is indicated as memory cell 10[1,1], the memory cell 10 in the mth row and nth column is indicated as memory cell 10[m,n], and the memory cell 10 in the ith row and jth column (i is an integer between 1 and m, and j is an integer between 1 and n) is indicated as memory cell 10[i,j].

[0055] The memory array 20 also includes m wirings WL (word lines) extending in the row direction, n wirings BL (bit lines) extending in the column direction, n switches SW1, and n switches SW2 (not shown). A plurality of memory cells 10 provided in the jth column are electrically connected to the jth column wiring BL (wiring BL[j]). A plurality of memory cells 10 provided in the ith row are electrically connected to the ith row wiring WL (wiring WL[i]).

[0056] The drive circuit 21 includes a PSW 22 (power switch), a PSW 23, and a peripheral circuit 31. The peripheral circuit 31 includes a peripheral circuit 41, a control circuit 32, and a voltage generation circuit 33.

[0057] In the semiconductor device 100, each circuit, signal, and voltage can be appropriately selected or omitted as needed. Alternatively, other circuits or signals may be added. The signals BW, CE, GW, CLK, WAKE, ADDR, WDA, PON1, and PON2 are input signals from the outside, and the signal RDA is an output signal to the outside. The signal CLK is a clock signal.

[0058] Furthermore, signals BW, CE, and GW are control signals. Signal CE is a chip enable signal, signal GW is a global write enable signal, and signal BW is a byte write enable signal. Signal ADDR is an address signal. Signal WDA is write data, and signal RDA is read data. Signals PON1 and PON2 are power gating control signals. Note that signals PON1 and PON2 may be generated by control circuit 32.

[0059] The control circuit 32 is a logic circuit having a function of controlling the overall operation of the semiconductor device 100. For example, the control circuit performs a logical operation on the signals CE, GW, and BW to determine the operation mode (e.g., write operation, read operation) of the semiconductor device 100. Alternatively, the control circuit 32 generates a control signal for the peripheral circuit 41 so that this operation mode is executed.

[0060] The voltage generating circuit 33 has a function of generating a negative voltage. The signal WAKE has a function of controlling the input of the signal CLK to the voltage generating circuit 33. For example, when an H-level signal is given to the signal WAKE, the signal CLK is input to the voltage generating circuit 33, and the voltage generating circuit 33 generates a negative voltage.

[0061] The peripheral circuit 41 is a circuit for writing and reading data to and from the memory cells 10. The peripheral circuit 41 includes a row decoder 42, a column decoder 44, a row driver 43, a column driver 45, an input circuit 47, an output circuit 48, and a sense amplifier 46.

[0062] The row decoder 42 and the column decoder 44 have the function of decoding the signal ADDR. The row decoder 42 is a circuit for specifying a row to be accessed, and the column decoder 44 is a circuit for specifying a column to be accessed. The row driver 43 has the function of selecting the wiring WL specified by the row decoder 42. The column driver 45 has the function of writing data to the memory cell 10, the function of reading data from the memory cell 10, the function of retaining the read data, etc.

[0063] The input circuit 47 has a function of holding a signal WDA. The data held by the input circuit 47 is output to the column driver 45. The output data of the input circuit 47 is data (Din) to be written to the memory cell 10. The data (Dout) read from the memory cell 10 by the column driver 45 is output to the output circuit 48. The output circuit 48 has a function of holding Dout. In addition, the output circuit 48 has a function of outputting Dout to the outside of the semiconductor device 100. The data output from the output circuit 48 is a signal RDA.

[0064] PSW22 is the V to the peripheral circuit 31 DD The PSW 23 has the function of controlling the supply of V to the row driver 43. HM Here, the high power supply voltage of the semiconductor device 100 is V DD and the low power supply voltage is GND (ground potential). HM is the high supply voltage used to drive the word line high, and V DD The signal PON1 controls the on / off of the PSW 22, and the signal PON2 controls the on / off of the PSW 23. In FIG. 1A, in the peripheral circuit 31, V DD Although the number of power domains to which power is supplied is set to one, it is also possible to set multiple power domains. In this case, a power switch should be provided for each power domain.

[0065] The driving circuit 21 and the memory array 20 may be provided on the same plane. Alternatively, as shown in FIG. 1B, the driving circuit 21 and the memory array 20 may be provided overlapping each other. By providing the driving circuit 21 and the memory array 20 overlapping each other, the signal propagation distance can be shortened. Furthermore, the semiconductor device 100 can be made smaller.

[0066] Using Figure 2A, the connection relationship between the memory cell 10[i,j], the wiring BL[j] which is the wiring BL of the jth column, the wiring WL[i] which is the wiring WL of the ith row, the row driver 43, and the sense amplifier 46 will be described.

[0067] 2A shows a circuit diagram of a memory cell 10[i,j] included in the memory array 20. The memory cell 10[i,j] includes a transistor 120[i,j] and a capacitor 130[i,j]. A memory cell consisting of one transistor and one capacitor is also called a 1T1C type memory cell.

[0068] The gate of the transistor 120[i,j] is electrically connected to the wiring WL[i], and one of the source and drain of the transistor 120[i,j] is electrically connected to the wiring BL[j]. One electrode of the capacitor 130[i,j] is electrically connected to the wiring PL (plate line), and the other electrode is electrically connected to the other of the source and drain of the transistor 120[i,j]. A region where the other electrode of the capacitor 130[i,j] and the other of the source and drain of the transistor 120[i,j] are electrically connected is called a node SN[i,j].

[0069] The wiring BL[j] is electrically connected to the switch SW1[j] and the switch SW2[j]. One terminal of the switch SW1[j] is electrically connected to the wiring BL[j], and the other terminal is electrically connected to the wiring COM. One terminal of the switch SW2[j] is electrically connected to the wiring BL[j], and the other terminal is electrically connected to the sense amplifier 46. The region where the other terminal of the switch SW2[j] and the sense amplifier 46 are electrically connected is called the node SAN[j]. The wiring WL[i] is electrically connected to the row driver 43.

[0070] The n switches SW1 and the n switches SW2 may be provided outside the memory array 20. For example, the switches SW1 and SW2 may be provided between the memory array 20 and the sense amplifier 46 (see FIG. 3). Alternatively, the switches SW1 and SW2 may be provided in the drive circuit 21. For example, the switches SW1 and SW2 may be provided in the sense amplifier 46. Alternatively, one of the switches SW1 and SW2 may be provided in the memory array 20, and the other may be provided in the drive circuit 21.

[0071] An enable signal SAE is supplied to the sense amplifier 46. When the enable signal SAE is at potential H, power is supplied to the sense amplifier 46, and the sense amplifier 46 is in an operating state. When the enable signal SAE is at potential L, power supply to the sense amplifier 46 is stopped, and the sense amplifier 46 is in a stopped state. By supplying power to the sense amplifier 46 only when operation of the sense amplifier 46 is required, the power consumption of the semiconductor device 100 can be reduced.

[0072] As shown in FIGS. 2B and 2C, a transistor having a back gate may be used as the transistor 120. The gate and the back gate are arranged to sandwich a semiconductor channel formation region between them. The gate and the back gate are formed of a conductor. The back gate can function in the same way as the gate. The threshold voltage of the transistor can be changed by changing the potential of the back gate. The potential of the back gate may be the same as the gate, ground potential, or any other potential.

[0073] Because the gate and back gate are made of conductors, they also function to prevent external electric fields from acting on the semiconductor where the channel is formed (particularly as an electrostatic shield against static electricity). In other words, they can prevent the electrical characteristics of the transistor from fluctuating due to the influence of external electric fields such as static electricity. In addition, the back gate can reduce the change in the transistor's threshold voltage before and after BT testing.

[0074] 2B illustrates an example in which the back gate of the transistor 120 is electrically connected to a wiring BGL. FIG. 2C illustrates an example in which the gate and back gate of the transistor 120 are electrically connected.

[0075] As mentioned above, the switches can be replaced with transistors. Figures 4A to 4C are circuit diagrams in which the switch SW1[j] is replaced with a transistor Tr1[j] and the switch SW2[j] is replaced with a transistor Tr2[j].

[0076] A material that can have ferroelectricity is used for the dielectric that constitutes the capacitive element 130. The capacitive element 130 functions as a ferroelectric capacitor.

[0077] Examples of materials that can exhibit ferroelectricity include metal nitrides containing elements M1, M2, and nitrogen. The element M1 corresponds to the first element, and the element M2 corresponds to the second element. The element M1 is one or more elements selected from aluminum (Al), gallium (Ga), indium (In), etc. The element M2 is one or more elements selected from boron (B), scandium (Sc), yttrium (Y), lanthanum (La), cerium (Ce), neodymium (Nd), europium (Eu), etc. The ratio of the sum of the numbers of atoms of elements M1 and M2 to the number of nitrogen atoms may be 1:1 or close to 1:1. The ratio of the number of atoms of element M1 to the number of atoms of element M2 can be set as appropriate. For example, the number of atoms of element M1 is preferably greater than the number of atoms of element M2, and more preferably 1.5 times or more the number of atoms of element M2. The ratio of the number of atoms of element M1 to the number of atoms of element M2 is preferably within a range that allows the metal nitride to form a solid solution. When two or more elements are selected as element M1 from aluminum, gallium, indium, etc., a metal nitride containing element M1 and nitrogen may have ferroelectricity even without containing element M2.

[0078] Representative examples of metal nitrides containing elements M1, M2, and nitrogen include aluminum scandium nitride (Al 1-a Sc a N b (where a is a real number greater than 0 and less than 0.5, and b is 1 or a value close to 1.)), Al-Ga-Sc nitride (Al 1-c-d Ga c Sc d N b (c and d are each a positive real number, c+d is greater than 0 and less than 0.5, and b is 1 or a value close to 1.)), Ga—Sc nitride (Ga 1-e Sc e Nb (e is a real number greater than 0 and less than 1, and b is 1 or a value close to 1.) In other words, materials that can have ferroelectric properties include materials containing aluminum nitride and / or scandium nitride.

[0079] Another example of a material that may exhibit ferroelectricity is a metal nitride having an element M1, an element M3, and nitrogen. The element M1 corresponds to the first element, and the element M3 corresponds to the second element. Here, the element M1 is one or more elements selected from aluminum (Al), gallium (Ga), indium (In), etc. The element M3 is one or more elements selected from titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), etc. In metal nitrides of titanium, zirconium, hafnium, vanadium, niobium, tantalum, or chromium, the valence of these metal elements is +3. Therefore, in a metal nitride having the element M1, the element M3, and nitrogen, the valence of the element M3 may also be +3. Therefore, when the ratio of the sum of the number of atoms of element M1 and element M3 to the number of nitrogen atoms is 1:1 or close to 1:1, the charge of the metal nitride may be compensated for.

[0080] The metal nitride having elements M1, M3, and nitrogen may also contain element M4. Here, element M4 is one or more elements selected from magnesium (Mg), calcium (Ca), strontium (Sr), zinc (Zn), cadmium (Cd), etc. Titanium, zirconium, hafnium, vanadium, niobium, tantalum, and chromium can have a valence of +4 or higher. Therefore, it is presumed that the inclusion of element M4, which has a valence of +2, in the metal nitride compensates for the charge of the metal nitride. The ratio of the number of atoms of elements M1, M3, and M4 can be appropriately set. For example, the number of atoms of element M1 is preferably greater than the sum of the number of atoms of elements M3 and M4.

[0081] Furthermore, a metal nitride having elements M1, M2, and nitrogen may contain element M3 or M4. In this case, the ratio of the number of atoms of element M3 or M4 to the sum of the number of atoms of elements M1 and M2 is preferably 0.05 or less, more preferably 0.02 or less. This can suppress the number of defects formed to compensate for the charge of the metal nitride. Reducing the number of defects improves the crystallinity of the metal nitride, making it easier for ferroelectricity to be exhibited.

[0082] Furthermore, a metal nitride having elements M1, M3, and nitrogen may contain element M2. In this case, there is no particular limitation on the ratio of the sum of the numbers of atoms of elements M1 and M3 to the number of atoms of element M2. This is because the charge of the metal nitride is compensated even if element M2 is contained in the metal nitride.

[0083] Furthermore, a metal nitride having elements M1, M3, M4, and nitrogen may contain element M2. In this case, there is no particular limitation on the ratio of the sum of the numbers of atoms of elements M1, M3, and M4 to the number of atoms of element M2. This is because the charge of the metal nitride is compensated even if element M2 is contained in the metal nitride.

[0084] Since the above metal nitrides contain at least a Group 13 element and nitrogen, which is a Group 15 element, the metal nitrides are sometimes called Group 13-15 ferroelectrics or Group 13 nitride ferroelectrics.

[0085] Materials that can have ferroelectric properties include hafnium oxide, zirconium oxide, and HfZrO XExamples of materials that can have ferroelectricity include metal oxides such as J1 (wherein X is a real number greater than 0). Ferroelectric materials include hafnium oxide to which element J1 is added (here, element J1 is one or more selected from zirconium (Zr), silicon (Si), aluminum (Al), gadolinium (Gd), yttrium (Y), lanthanum (La), strontium (Sr), etc.). The atomic ratio of hafnium atoms to element J1 can be set appropriately; for example, the ratio may be 1:1 or close to 1:1. Ferroelectric materials include zirconium oxide to which element J2 is added (here, element J2 is one or more selected from hafnium (Hf), silicon (Si), aluminum (Al), gadolinium (Gd), yttrium (Y), lanthanum (La), strontium (Sr), etc.). The ratio of the number of zirconium atoms to the number of atoms of element J2 can be set as appropriate, for example, to 1:1 or approximately 1:1. The crystal structure of hafnium oxide or a material containing hafnium oxide and zirconium oxide may be one or more selected from the group consisting of cubic, tetragonal, orthorhombic, and monoclinic.

[0086] Furthermore, lead titanate (PbTiO) is a material that can have ferroelectric properties. X Piezoelectric ceramics having a perovskite structure, such as barium strontium titanate (BST), strontium titanate, lead zirconate titanate (PZT), strontium bismuth tantalate (SBT), bismuth ferrite (BFO), and barium titanate, may also be used. Ferroelectric materials include perovskite-type oxynitrides such as SrTaO2N and BaTaO2N, and GaFeO3 with a κ-alumina structure.

[0087] In the above description, metal oxides and metal nitrides are used as examples, but the present invention is not limited thereto. For example, metal oxynitrides in which nitrogen is added to the above metal oxides, or metal oxynitrides in which oxygen is added to the above metal nitrides, may also be used.

[0088] Furthermore, as a material capable of exhibiting ferroelectricity, for example, a mixture or compound composed of multiple materials selected from the materials listed above can be used. However, since the crystal structure (characteristics) of the materials listed above may change depending not only on the film formation conditions but also on various processes, in this specification and the like, a material that exhibits ferroelectricity is not only referred to as a ferroelectric, but also as a material capable of exhibiting ferroelectricity or a material that imparts ferroelectricity. In other words, when the term "ferroelectric" is used in this specification and the like, it includes both a material that exhibits ferroelectricity and a material capable of exhibiting ferroelectricity.

[0089] Furthermore, hafnium oxide or a material containing hafnium oxide and zirconium oxide is likely to exhibit ferroelectricity even in a film thickness of a few nanometers. Using a ferroelectric that can be thinned as the dielectric of the capacitance element 130 makes it easier to combine a semiconductor element such as a miniaturized transistor with the capacitance element 130 that functions as a ferroelectric capacitor. In other words, it becomes easier to realize a semiconductor device with a reduced footprint. Note that, in this specification, a layer of a material that can exhibit ferroelectricity may be referred to as a "ferroelectric layer." Note that, in this specification, a device having a ferroelectric layer may be referred to as a ferroelectric device.

[0090] The ferroelectric layer has hysteresis characteristics. FIG. 5 is a diagram showing an example of the hysteresis characteristics. The hysteresis characteristics can be measured using a capacitance element (ferroelectric capacitor) that uses a ferroelectric layer as a dielectric. In FIG. 5, the horizontal axis represents the voltage (electric field) applied to the ferroelectric layer. This voltage is the potential difference between one electrode and the other electrode of the capacitance element that uses the ferroelectric layer as a dielectric. The electric field strength can be calculated by dividing this potential difference by the thickness of the ferroelectric layer.

[0091] In Figure 5, the vertical axis represents the polarization of the ferroelectric layer. When the polarization is positive, it indicates that the positive charges in the ferroelectric layer are biased toward one electrode of the capacitance element, and the negative charges are biased toward the other electrode of the capacitance element. On the other hand, when the polarization is negative, it indicates that the negative charges in the ferroelectric layer are biased toward one electrode of the capacitance element, and the positive charges are biased toward the other electrode of the capacitance element.

[0092] In addition, the polarization shown on the vertical axis of the graph in Figure 5 may be positive when negative charges are biased toward one electrode of the capacitance element and positive charges are biased toward the other electrode of the capacitance element, and may be negative when positive charges are biased toward one electrode of the capacitance element and negative charges are biased toward the other electrode of the capacitance element.

[0093] 5, the hysteresis characteristics of the ferroelectric layer can be represented by curve 51 and curve 52. The voltages at the intersections of curve 51 and curve 52 are called the saturated polarization voltage VSP and the saturated polarization voltage −VSP. VSP and −VSP can be said to have opposite polarities.

[0094] When a voltage equal to or less than -VSP is applied to the ferroelectric layer and then the voltage applied to the ferroelectric layer is increased, the polarization of the ferroelectric layer increases according to curve 51. On the other hand, when a voltage equal to or greater than VSP is applied to the ferroelectric layer and then the voltage applied to the ferroelectric layer is decreased, the polarization of the ferroelectric layer decreases according to curve 52. Note that VSP is sometimes called the "positive saturation polarization voltage" or "first saturation polarization voltage," and -VSP is sometimes called the "negative saturation polarization voltage" or "second saturation polarization voltage." The absolute values ​​of the first saturation polarization voltage and the second saturation polarization voltage may be the same or different.

[0095] Here, when the polarization of the ferroelectric layer changes according to curve 51, the voltage at which the polarization becomes zero is called the coercive voltage Vc. Also, when the polarization of the ferroelectric layer changes according to curve 52, the voltage at which the polarization becomes zero is called the coercive voltage -Vc. The values ​​of Vc and -Vc are between -VSP and VSP. Note that Vc may also be called the "positive coercive voltage" or "first coercive voltage," and -Vc may also be called the "negative coercive voltage" or "second coercive voltage." The absolute values ​​of the first coercive voltage and the second coercive voltage may be the same or different.

[0096] Furthermore, when no voltage is applied to the ferroelectric layer (when the voltage is 0V), the maximum value of polarization is called the "residual polarization Pr" and the minimum value is called the "residual polarization -Pr." The absolute value of the difference between the remnant polarization Pr and the remnant polarization -Pr is called the "residual polarization 2Pr." The larger the remnant polarization 2Pr, the greater the fluctuation range of the capacitance value of the ferroelectric capacitor due to polarization reversal. The larger the remnant polarization 2Pr, the more preferable it is.

[0097] The memory cell 10 includes a capacitance element 130, which is a ferroelectric capacitor, and a transistor 120, and has the function of storing information using a change in capacitance value caused by polarization reversal of the capacitance element 130. The memory cell 10 functions as a ferroelectric memory. A memory cell consisting of one transistor and one ferroelectric capacitor is also called a 1T1F type memory cell.

[0098] A semiconductor layer in which a channel of the transistor 120 is formed can be formed using a single crystal semiconductor, a polycrystalline semiconductor, a microcrystalline semiconductor, an amorphous semiconductor, or a combination of these. Examples of semiconductor materials that can be used include silicon and germanium. Compound semiconductors such as silicon germanium, silicon carbide, gallium arsenide, oxide semiconductors, and nitride semiconductors can also be used.

[0099] Note that the transistor 120 is preferably a transistor (also referred to as an "OS transistor") that uses an oxide semiconductor, which is a type of metal oxide, for a semiconductor layer in which a channel is formed. An oxide semiconductor has a band gap of 2 eV or more, and therefore has a significantly small off-state current. Therefore, the power consumption of the memory cell 10 can be reduced. Therefore, the power consumption of the semiconductor device 100 including the memory cell 10 can be reduced.

[0100] A memory cell including an OS transistor can be called an “OS memory.” The semiconductor device 100 including the memory cell can also be called an “OS memory.”

[0101] Furthermore, OS transistors operate stably even in high-temperature environments, with little fluctuation in their characteristics. For example, the off-state current hardly increases even in high-temperature environments. Specifically, the off-state current hardly increases even in temperatures above room temperature and below 200°C. Furthermore, the on-state current is unlikely to decrease even in high-temperature environments. Therefore, OS memory operates stably even in high-temperature environments, achieving high reliability.

[0102] Furthermore, an OS transistor has a high breakdown voltage between the source and drain. By using an OS transistor as the transistor 120, the voltage required for polarization inversion can be supplied to the capacitor 130 even if the channel length of the transistor 120 is reduced. This reduces the area occupied by the memory cell 10. This increases the storage capacity and / or storage density of the semiconductor device.

[0103] Next, the read and write operations of the memory cell 10, which is a ferroelectric memory, will be described with reference to the drawings. Note that the operations described in this embodiment are common to all memory cells 10, and therefore identification symbols such as "[i]" and "[i,j]" will be omitted.

[0104] As a prerequisite, VSP required for polarization reversal is 4V, and -VSP is -4V. Furthermore, it is assumed that polarization reversal does not occur when the absolute value of the voltage applied to the capacitance element 130 is 3V or less. It is also assumed that the capacitance value of the capacitance element 130 is larger when the polarization is negative than when it is positive. It is also assumed that data "1" is held when the polarization of the capacitance element 130 is negative, and data "0" is held when it is positive. It is also assumed that 0V is supplied to the wiring COM.

[0105] <Read operation> The operation of reading data from the memory cell 10 will now be described. FIGS. 6 and 14 are timing charts illustrating the read operation. A in FIGS. 7 to 13, 15, and 16 is a circuit diagram illustrating the operating state of the memory cell 10. B in FIGS. 7 to 13, 15, and 16 shows the hysteresis characteristics of the polarization of the capacitor 130, and the polarization 55 in the operating state shown in A is indicated by a white circle. The horizontal axis of B in FIGS. 7 to 13, 15, and 16 represents the voltage applied to the capacitor 130. More specifically, it represents the potential of the wiring PL when the node SN is 0V. The vertical axis of B in FIGS. 7 to 13, 15, and 16 represents the polarization of the capacitor 130.

[0106] In addition, in circuit diagrams showing operating states, symbols such as "H" indicating potential H or "L" indicating potential L may be written next to the wiring to clearly indicate the potential of the wiring. Wiring where a potential change has occurred may be written with the symbol "H" or "L" enclosed in a box. An "x" symbol may also be written over an off-state transistor or an off-state circuit.

[0107] In this specification and the like, the potential H applied to the gate of an n-channel transistor is a potential that turns the transistor on, and the potential L is a potential that turns the transistor off. The potential L applied to the gate of a p-channel transistor is a potential that turns the transistor on, and the potential H is a potential that turns the transistor off.

[0108] [Reading data "1"] FIG. 6 is a timing chart for explaining the read operation of data "1." FIG. 7A is a circuit diagram showing the initial state of the memory cell 10. FIG. 7B shows the polarization 55 when the memory cell 10 is in the initial state. In the initial state, it is assumed that the memory cell 10 holds data "1." It is also assumed that the switches SW1 and SW2 are conductive and that 0V is supplied to the wiring BL and the node SAN. It is also assumed that the potential of the enable signal SAE is potential L. It is also assumed that the potential of the wiring WL is potential L. Therefore, the transistor 120 is in the off state. It is also assumed that the potentials of the wiring PL and the node SN are 0V. In the initial state, no voltage is applied to the capacitance element 130, so the polarization 55 is -Pr (see FIG. 5).

[0109] In a period T11, the switch SW1 is turned off, which causes the wiring BL and the node SAN to be in a floating state. In addition, a potential H is supplied to the wiring WL, which turns on the transistor 120.

[0110] Furthermore, in period T11, 4 V is supplied to the wiring PL. This reverses the polarization of the capacitor 130. At this time, current flows through the nodes SN, BL, and SAN. Because the nodes SN, BL, and SAN are in a floating state, the potentials of the nodes SN, BL, and SAN increase. The potentials of the nodes SN, BL, and SAN increase to a potential Vf2 (see FIG. 8A). The polarization 55 at this time is shown in FIG. 8B.

[0111] The magnitude of the potential Vf2 is determined by the ratio of the parasitic capacitance of the node SN, the wiring BL, and the node SAN to the capacitance of the capacitor 130. The potential Vf2 is higher than the potential Vf1, which will be described later.

[0112] In addition, during the period T11, the polarization of the capacitive element 130 is reversed, so that the data "1" written in the memory cell 10 is destroyed.

[0113] In period T12, the switch SW1 is turned on and the switch SW2 is turned off (see FIG. 9A). Then, the potentials of the wiring BL and the node SN become 0 V, and 4 V (saturation polarization voltage VSP) is applied to the capacitor 130. Polarization 55 at this time is shown in FIG. 9B. By applying VSP to the capacitor 130, the polarization of the capacitor 130 is almost completely reversed.

[0114] Furthermore, the enable signal SAE is set to potential H to supply power to the sense amplifier 46. The sense amplifier 46 has a function of comparing the potential of the node SAN with a reference potential. The reference potential is preferably a potential between potential Vf2 and potential Vf1, which will be described later.

[0115] The sense amplifier 46 has a function of supplying a potential VSAH to the node SAN when the potential of the node SAN is higher than the reference potential. Furthermore, when the potential of the node SAN is equal to or lower than the reference potential, the sense amplifier 46 has a function of supplying a potential VSAL to the node SAN. The potential VSAH is preferably equal to or lower than 80% of VSP, more preferably equal to or lower than 50% of VSP, and even more preferably equal to or lower than 20% of VSP. The potential VSAL is a potential lower than the potential VSAH. In this embodiment, the potential VSAH is set to 1V, and the potential VSAL is set to 0V. Since the potential Vf2 is higher than the reference potential, the sense amplifier 46 supplies the potential VSAH to the node SAN.

[0116] The output voltage of the sense amplifier 46 can be used to know the data stored in the memory cell 10 .

[0117] In a period T13, the switch SW1 is turned off and the switch SW2 is turned on (see FIG. 10A). Then, the potentials of the wiring BL and the node SN become 1 V, and 3 V is applied to the capacitor 130. Polarization 55 at this time is shown in FIG. 10B.

[0118] In a period T14, −3 V is supplied to the wiring PL (see FIG. 11A). At this time, since the potential of the node SN is 1 V, −4 V is applied to the capacitor 130. That is, −VSP is applied to the capacitor 130. The polarization 55 at this time is shown in FIG. 11B. In this way, the destroyed data “1” can be rewritten.

[0119] In a period T15, 0V is supplied to the wiring PL (see FIGS. 12A and 12B).

[0120] In period T16, the switch SW1 is turned on, and the enable signal SAE is set to potential L. This stops the power supply to the sense amplifier 46, and the potentials of the wiring BL, the node SAN, and the node SN become 0 V (see FIGS. 13A and 13B). After that, the potential L is supplied to the wiring WL, and the transistor 120 is turned off.

[0121] [Reading data "0"] Next, a read operation when data "0" is stored in the memory cell 10 will be described. To avoid repetition, differences from the read operation of data "1" will be mainly described. FIG. 14 is a timing chart for explaining the read operation of data "0". FIG. 15A is a circuit diagram showing the initial state of the memory cell 10. FIG. 15B shows the polarization 55 when the memory cell 10 is in the initial state. It is assumed that data "0" is stored in the memory cell 10 in the initial state. In the initial state, no voltage is applied to the capacitive element 130, so the polarization 55 is Pr (see FIG. 5).

[0122] In a period T11, the switch SW1 is turned off, which causes the wiring BL and the node SAN to be in a floating state. In addition, a potential H is supplied to the wiring WL, which turns on the transistor 120.

[0123] Furthermore, in period T11, 4V is supplied to the wiring PL. In the read operation of data "1" described above, charge is supplied to the node SN as the polarization inversion of the capacitor 130 occurs, and the potential of the node SN rises to potential Vf2. On the other hand, in the read operation of data "0", polarization inversion hardly occurs. In period T11 of the read operation, if the potential of the node SN after 4V is supplied to the wiring PL is potential Vf1, potential Vf1 becomes lower than potential Vf2 (see Figures 16A and 16B).

[0124] During period T12, switch SW1 is turned on and switch SW2 is turned off. As in period T11, the read operation of data "0" does not invert the polarization of the capacitive element 130. Also, during period T12, when the enable signal SAE is set to potential H, power is supplied to the sense amplifier 46, which compares the reference potential with the potential of node SAN. As a result, potential VSAL (0 V) is supplied to node SAN.

[0125] As with the read operation of data "1", the data held in the memory cell 10 can be known using the output voltage of the sense amplifier 46.

[0126] In a period T13, the switch SW1 is turned off and the switch SW2 is turned on, so that the potential VSAL (0 V) is supplied from the sense amplifier 46 to the node SAN, the wiring BL, and the node SN.

[0127] In a period T14, −3 V is supplied to the wiring PL. At this time, the potential of the node SN is 0 V, and therefore −3 V is applied to the capacitor 130. That is, the voltage applied to the capacitor 130 does not reach −VSP, and polarization reversal does not occur. When reading data “0”, the data can be read without being destroyed.

[0128] The explanation of the period T15 and thereafter in the read operation of data "0" can be understood by taking into consideration the explanation of the read operation of data "1".

[0129] <Write operation> Next, the write operation of the memory cell 10 will be described.

[0130] [Write operation of data "1"] 17A shows a timing chart illustrating an operation of writing data "1" to the memory cell 10. In a period T21, the switch SW1 is turned off and the switch SW2 is turned on. In addition, a potential H is supplied to the wiring WL to turn on the transistor 120.

[0131] In period T22, the enable signal SAE is set to potential H, and a potential VSAH (1 V) is output from the sense amplifier 46. As a result, the potentials of the node SAN, the wiring BL, and the node SN become 1 V. Furthermore, −3 V is supplied to the wiring PL. As a result, −4 V is applied to the capacitor 130. That is, −VSP is applied to the capacitor 130. FIG. 18A is a circuit diagram showing the operating state of the memory cell 10 in period T22. FIG. 18B is a diagram showing the polarization 55 in period T22.

[0132] In period T23, the enable signal SAE is set to potential L, and power supply to the sense amplifier 46 is stopped. Also, the switch SW1 is turned on. Then, the potentials of the node SAN, the wiring BL, and the node SN become 0 V. Also, 0 V is supplied to the wiring PL. After that, potential L is supplied to the wiring WL, and the transistor 120 is turned off. In this way, data "1" can be written to the memory cell 10.

[0133] [Write operation of data "0"] 17B shows a timing chart for explaining the operation of writing data "0" to the memory cell 10. In period T21, the enable signal SAE is set to potential L to turn on the switches SW1 and SW2. In addition, a potential H is supplied to the wiring WL to turn on the transistor 120. Therefore, the potentials of the node SAN, the wiring BL, and the node SN become 0 V.

[0134] In period T22, the enable signal SAE is set to potential H, and a potential VSAL (0V) is output from the sense amplifier 46. Then, the potentials of the node SAN, the wiring BL, and the node SN also become 0V. In addition, 4V is supplied to the wiring PL. Then, 4V is applied to the capacitor 130. That is, VSP is applied to the capacitor 130. FIG. 19A is a circuit diagram showing the operating state of the memory cell 10 in period T22. FIG. 19B is a diagram showing the polarization 55 in period T22.

[0135] In period T23, the enable signal SAE is set to potential L, and power supply to the sense amplifier 46 is stopped. Furthermore, the switch SW1 is turned on, and 0 V is supplied to the wiring PL. Thereafter, potential L is supplied to the wiring WL, and the transistor 120 is turned off. In this manner, data "0" can be written to the memory cell 10.

[0136] Furthermore, when supplying 0V to node SN in a write operation of data "0", enable signal SAE may be set to potential L and switch SW1 may be turned on. That is, 0V may be supplied to node SN without using sense amplifier 46. Not using the sense amplifier 46 reduces power consumption.

[0137] In data read and write operations, the sense amplifier 46 consumes more power than the memory array 20. According to the configuration and / or operation method described in this embodiment, the output voltage of the sense amplifier 46 can be set to 80% or less of VSP, preferably 50% or less, and more preferably 20% or less of VSP. This allows the operating voltage of the sense amplifier 46 to be reduced. This allows the power consumption of the sense amplifier 46 to be reduced. Furthermore, the power consumption of the semiconductor device can be reduced.

[0138] <Modification> In the data read operation described above, period T12 may be omitted. Fig. 20 shows a timing chart illustrating the read operation of data "1" when period T12 is not performed. Since period T12 is not performed, the enable signal SAE is set to potential H in period T13.

[0139] Furthermore, if the period T12 is not performed, the switch SW2 does not need to be provided, as shown in Fig. 21 A. The circuit configuration shown in Fig. 21 A also allows the above-described data read and write operations to be performed.

[0140] 21B, two adjacent columns of memory cells 10 may be electrically connected to one wiring BL. By sharing one wiring BL between two columns of memory cells 10, the area occupied by the memory array 20 can be reduced and the packaging density of the memory cells 10 can be increased.

[0141] This embodiment mode can be appropriately combined with other embodiment modes described in this specification.

[0142] (Embodiment 2) In this embodiment, a cross-sectional structure example of a semiconductor device of one embodiment of the present invention will be described.

[0143] 22 is a cross-sectional view illustrating a structural example of a semiconductor device according to one embodiment of the present invention. Components of the semiconductor device according to one embodiment of the present invention, such as a transistor 300, a transistor 200a, and a capacitor 400, are illustrated in FIG. The transistor 200a is provided above the transistor 300. The capacitor 400 is provided above the transistor 200a. The transistor 200a can be a transistor in which a channel is formed in a semiconductor layer including an oxide semiconductor.

[0144] The transistor 300 corresponds to, for example, the transistor included in the driver circuit 21 described in Embodiment 1. The transistor 200a corresponds to, for example, the transistor 120 described in Embodiment 1. The capacitor 400 corresponds to, for example, the capacitor 130 described in Embodiment 1.

[0145] 22, a wiring 1001 is electrically connected to one of the source and drain of the transistor 300, and a wiring 1002 is electrically connected to the other of the source and drain of the transistor 300. A wiring 1003 is electrically connected to one of the source and drain of the transistor 200a. The other of the source and drain of the transistor 200a is electrically connected to one electrode of the capacitor 400, and the other electrode of the capacitor 400 is electrically connected to a wiring 1005. A wiring 1004 is electrically connected to the gate of the transistor 200a, and a wiring 1006 is electrically connected to the backgate of the transistor 200a. A wiring 1007 is electrically connected to the gate of the transistor 300.

[0146] <Transistor 300> The transistor 300 is provided over a substrate 311 and includes a conductor 316 functioning as a gate, an insulator 315 functioning as a gate insulator, a semiconductor region 313 formed of part of the substrate 311, and low-resistance regions 314a and 314b functioning as source and drain regions. The transistor 300 may be either a p-channel type or an n-channel type.

[0147] Here, in the transistor 300 shown in FIG. 22, a semiconductor region 313 (a part of a substrate 311) where a channel is formed has a convex shape. A conductor 316 is provided to cover a part of the side surface and a part of the top surface of the semiconductor region 313 with an insulator 315 interposed therebetween. Note that the conductor 316 may be made of a material that adjusts the work function. Such a transistor 300 is also called a FIN transistor because it utilizes the convex portion of the semiconductor substrate. Note that an insulator may be provided in contact with the top of the convex portion and function as a mask for forming the convex portion. Although the case where the convex portion is formed by processing a part of the semiconductor substrate has been shown, a semiconductor film having a convex shape may also be formed by processing an SOI substrate.

[0148] Note that the transistor 300 illustrated in FIG. 22 is just an example, and the structure is not limited thereto. An appropriate transistor may be used depending on the circuit configuration or driving method.

[0149] <Wiring layer> Between each structure, a wiring layer provided with an interlayer film, wiring, plugs, etc. may be provided. Furthermore, multiple wiring layers may be provided depending on the design. Here, for a conductor functioning as a plug or wiring, multiple structures may be collectively assigned the same reference numeral. Furthermore, in this specification and the like, the wiring and the plug electrically connected to the wiring may be integrated. That is, there are cases where a part of the conductor functions as the wiring, and cases where a part of the conductor functions as the plug.

[0150] For example, an insulator 320, an insulator 322, an insulator 324, and an insulator 326 are stacked in this order as an interlayer film over the transistor 300. Conductors 328, 330, and the like are embedded in the insulators 320, 322, 324, and 326. The conductors 328 and 330 function as plugs or wirings.

[0151] The insulator functioning as an interlayer film may also function as a planarizing film that covers the underlying unevenness. For example, the top surface of the insulator 322 may be planarized by a planarization process using a chemical mechanical polishing (CMP) method or the like to enhance flatness.

[0152] A wiring layer may be provided over the insulator 326 and the conductor 330. For example, in FIG. 22, an insulator 350, an insulator 352, and an insulator 354 are stacked in this order. A conductor 356 is formed in the insulator 350, the insulator 352, and the insulator 354. The conductor 356 functions as a plug or a wiring.

[0153] Similarly, conductors 218 and the like are embedded in insulators 211, 212, 214, and 216. Furthermore, conductors 240 and the like are embedded in insulators 222, 275, 280, 282, 283, and 285. Furthermore, conductor 209 is provided on conductor 240. Note that conductors 218, 240, and 209 function as plugs or wirings.

[0154] Here, insulator 217 is provided in contact with the side surface of conductor 218, which functions as a plug. Insulator 217 is provided in contact with the inner wall of the opening formed in insulators 211, 212, 214, and 216. In other words, insulator 217 is provided between conductor 218 and insulators 211, 212, 214, and 216.

[0155] The insulator 217 may be, for example, an insulator such as silicon nitride, aluminum oxide, or silicon nitride oxide. The insulator 217 is provided in contact with the insulators 211, 212, 214, and 216, and can therefore prevent impurities such as water or hydrogen from the insulator 211 or the insulator 216 from entering the semiconductor layer of the transistor 200a through the conductor 218. Silicon nitride is particularly suitable because it has a high blocking property against hydrogen. Furthermore, the insulator 217 can prevent oxygen contained in the insulator 211 or the insulator 216 from being absorbed by the conductor 218.

[0156] In this specification and the like, the term "oxynitride" refers to a material that contains more oxygen than nitrogen as a main component. For example, "silicon oxynitride" refers to a material that contains more oxygen than nitrogen and that contains silicon, nitrogen, and oxygen. In this specification and the like, the term "nitride oxide" refers to a material that contains more nitrogen than oxygen as a main component. For example, "aluminum nitride oxide" refers to a material that contains more nitrogen than oxygen and that contains aluminum, nitrogen, and oxygen.

[0157] Insulators that can be used as the interlayer film include oxides, nitrides, oxynitrides, nitride oxides, metal oxides, metal oxynitrides, and metal nitride oxides, each having insulating properties.

[0158] For example, by using a material with a low dielectric constant for the insulator that functions as an interlayer film, the parasitic capacitance that occurs between wirings can be reduced. Therefore, it is advisable to select a material depending on the function of the insulator.

[0159] For example, the insulators 211, 352, and 354 preferably have an insulator with a low dielectric constant. For example, the insulator preferably includes silicon oxide doped with fluorine, silicon oxide doped with carbon, silicon oxide doped with carbon and nitrogen, silicon oxide having pores, or a resin. Alternatively, the insulator preferably has a layered structure of silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide doped with fluorine, silicon oxide doped with carbon, silicon oxide doped with carbon and nitrogen, or silicon oxide having pores, and a resin. Silicon oxide and silicon oxynitride are thermally stable, and therefore, by combining them with a resin, a thermally stable layered structure with a low dielectric constant can be achieved. Examples of the resin include polyester, polyolefin, polyamide (nylon, aramid, etc.), polyimide, polycarbonate, and acrylic.

[0160] Furthermore, the electrical characteristics of a transistor including an oxide semiconductor can be stabilized by surrounding the transistor with an insulator that has a function of suppressing the permeation of impurities such as hydrogen and oxygen. Therefore, the insulators 214, 212, 350, and the like can be insulators that have a function of suppressing the permeation of impurities such as hydrogen and oxygen.

[0161] Examples of insulators that can suppress the permeation of impurities such as hydrogen and oxygen include insulators containing boron, carbon, nitrogen, oxygen, fluorine, magnesium, aluminum, silicon, phosphorus, chlorine, argon, gallium, germanium, yttrium, zirconium, lanthanum, neodymium, hafnium, and tantalum, and can be used in a single layer or a stacked layer. Specifically, examples of insulators that can suppress the permeation of impurities such as hydrogen and oxygen include metal oxides such as aluminum oxide, magnesium oxide, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide, and tantalum oxide, silicon nitride oxide, and silicon nitride.

[0162] Conductors that can be used for wiring and plugs include materials containing one or more metal elements selected from aluminum, chromium, copper, silver, gold, platinum, tantalum, nickel, titanium, molybdenum, tungsten, hafnium, vanadium, niobium, manganese, magnesium, zirconium, beryllium, indium, ruthenium, etc. Also usable are semiconductors with high electrical conductivity, typified by polycrystalline silicon containing impurity elements such as phosphorus, and silicides such as nickel silicide.

[0163] For example, the conductors 328, 330, 356, conductor 218, conductor 240, and conductor 209 can be formed using a single layer or a stack of conductive materials such as metal materials, alloy materials, metal nitride materials, or metal oxide materials formed from the above materials. High-melting-point materials such as tungsten and molybdenum that have both heat resistance and conductivity are preferably used, and tungsten is preferred. Alternatively, they are preferably formed using low-resistance conductive materials such as aluminum and copper. The use of low-resistance conductive materials can reduce wiring resistance.

[0164] <Wiring or plug of layer provided with oxide semiconductor> When an oxide semiconductor is used for the semiconductor layer of the transistor 200a, an insulator having an excess oxygen region may be provided near the oxide semiconductor. In this case, an insulator having a barrier property is preferably provided between the insulator having the excess oxygen region and a conductor provided in the insulator having the excess oxygen region.

[0165] 22, for example, an insulator 241 is preferably provided between the insulator 280 containing excess oxygen and the conductor 240. When the insulator 241 is provided in contact with the insulator 222, the insulator 282, and the insulator 283, the transistor 200a can be sealed with an insulator having barrier properties.

[0166] That is, the insulator 241 can prevent excess oxygen contained in the insulator 280 from being absorbed by the conductor 240. Furthermore, the insulator 241 can prevent hydrogen, which is an impurity, from diffusing into the transistor 200a through the conductor 240.

[0167] The insulator 241 may be made of an insulating material that has the function of suppressing the diffusion of impurities such as water or hydrogen, and oxygen. For example, it is preferable to use silicon nitride, silicon nitride oxide, aluminum oxide, or hafnium oxide. Silicon nitride is particularly preferable because it has a high blocking property against hydrogen. Other examples that can be used include metal oxides such as magnesium oxide, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, and tantalum oxide.

[0168] Here, the conductor 240 penetrates the insulators 283 and 282, and the conductor 218 penetrates the insulators 214 and 212. As described above, the insulator 241 is provided in contact with the conductor 240, and the insulator 217 is provided in contact with the conductor 218. This makes it possible to reduce hydrogen that enters the inside of the insulators 212, 214, 282, and 283 through the conductors 240 and 218. In this way, the transistor 200a is sealed with the insulators 212, 214, 282, 283, 241, and 217, and it is possible to reduce the intrusion of impurities such as hydrogen contained in the insulator 274 from the outside.

[0169] The capacitor 400 includes a conductor 208, an insulator 221 that covers the conductor 208, and a conductor 220 (conductor 220a and conductor 220b) that has a region that overlaps with the conductor 208 via the insulator 221. The insulator 221 may be made of a material that can have ferroelectricity.

[0170] The conductor 208 is formed in the same layer as the conductor 209 and is in contact with the top surface of the conductor 240. The conductor 208 is electrically connected to the other of the source and the drain of the transistor 200a through the conductor 240.

[0171] Furthermore, it is preferable that an insulator 155 is provided to cover the conductor 220, the insulator 221, and the conductor 209. The insulator 155 is preferably an insulator having a function of capturing and fixing hydrogen. For example, it is preferable to use aluminum oxide. By providing such an insulator 155 to cover the capacitor 400, it is possible to capture and fix hydrogen contained in the insulator 221 of the capacitor 400, thereby reducing the hydrogen concentration in the insulator 221. This can improve the ferroelectricity of the insulator 221. It is also possible to reduce leakage current between the conductor 208 and the conductor 220. Note that this is not a limitation, and a configuration without providing the insulator 155 is also possible.

[0172] Furthermore, insulators 152a and 152b, which function as barrier insulating films against hydrogen, are preferably provided over the conductor 209 and the conductor 220. The insulators 152a and 152b are provided over the insulator 155. Providing such insulators 152a and 152b can prevent impurities such as hydrogen contained in the insulator 286 over the insulator 152b from diffusing into the transistor 200a through the capacitor 400, the conductor 209, and the conductor 240.

[0173] <Dicing line> The following describes dicing lines (sometimes called scribe lines, dividing lines, or cutting lines) that are provided when dividing a large-area substrate into individual semiconductor elements to extract multiple semiconductor devices in chip form. As a dividing method, for example, first, grooves (dicing lines) for dividing the semiconductor elements are formed in the substrate, and then the substrate is cut along the dicing lines to divide (divide) the multiple semiconductor devices.

[0174] 22, for example, it is preferable to design the insulator 282, the insulator 280, the insulator 275, the insulator 222, and the insulator 216 so that the region where the insulator 283 and the insulator 214 contact each other overlaps with the dicing line. That is, openings are provided in the insulators 282, 280, 275, 222, and 216 near the region that will become the dicing line provided on the outer edge of the memory cell having the multiple transistors 200a.

[0175] That is, the insulator 214 and the insulator 283 are in contact with each other through the openings formed in the insulators 282, 280, 275, 222, and 216.

[0176] Furthermore, for example, openings may be provided in the insulator 214 in addition to the insulators 282, 280, 275, 222, and 216. With this configuration, the insulators 212 and 283 are in contact with each other through the openings provided in the insulators 282, 280, 275, 222, 216, and 214. In this case, the insulators 212 and 283 may be formed using the same material and the same method. Providing the insulators 212 and 283 using the same material and the same method can improve adhesion. For example, it is preferable to use silicon nitride.

[0177] With this structure, the transistor 200a can be surrounded by the insulator 212, the insulator 214, the insulator 282, and the insulator 283. At least one of the insulators 212, 214, 282, and 283 has a function of suppressing diffusion of oxygen, hydrogen, and water. Therefore, even when the substrate is divided into a plurality of chips by dividing the substrate into each circuit region in which the semiconductor element described in this embodiment is formed, impurities such as hydrogen or water can be prevented from entering from the side surface of the divided substrate and diffusing into the transistor 200a.

[0178] Furthermore, this structure can prevent excess oxygen in the insulator 280 from diffusing to the outside. Therefore, the excess oxygen in the insulator 280 is efficiently supplied to the oxide in which the channel of the transistor 200a is formed. The oxygen can reduce oxygen vacancies in the oxide in which the channel of the transistor 200a is formed. This allows the oxide in which the channel of the transistor 200a is formed to be an oxide semiconductor with a low density of defect states and stable characteristics. That is, fluctuations in the electrical characteristics of the transistor 200a can be suppressed and reliability can be improved.

[0179] <Transistor configuration example> 23A to 23D are top views and cross-sectional views illustrating an example configuration of a transistor 200 that can be applied to the transistor 200a. FIG. 23B is a cross-sectional view of the portion indicated by the dashed-dotted line A1-A2 in FIG. 23A, which is also a cross-sectional view of the transistor 200 in the channel length direction. FIG. 23C is a cross-sectional view of the portion indicated by the dashed-dotted line A3-A4 in FIG. 23A, which is also a cross-sectional view of the transistor 200 in the channel width direction. FIG. 23D is a cross-sectional view of the portion indicated by the dashed-dotted line A5-A6 in FIG. 23A. Note that some elements are omitted from the top view in FIG. 23A for clarity.

[0180] 23B to 23D show an insulator 212, an insulator 214 on the insulator 212, a transistor 200 on the insulator 214, an insulator 280 on the transistor 200, an insulator 282 on the insulator 280, an insulator 283 on the insulator 282, an insulator 274 on the insulator 283, and an insulator 285 on the insulator 283 and on the insulator 274. The insulators 212, 214, 216, 280, 282, 283, 285, and 274 function as interlayer films. The transistor 200 also includes a conductor 240 (conductor 240a and conductor 240b) that is electrically connected to the transistor 200 and functions as a plug. Insulator 241 (insulator 241a and insulator 241b) is provided in contact with the side surface of conductor 240, which functions as a plug. In addition, conductor 246 (conductor 246a and conductor 246b), which is electrically connected to conductor 240 and functions as wiring, is provided on insulator 285 and conductor 240. Insulator 283 is in contact with a part of the top surface of insulator 214, the side surface of insulator 216, the side surface of insulator 222, the side surface of insulator 275, the side surface of insulator 280, and the side surface and top surface of insulator 282.

[0181] Insulator 241a is provided in contact with the inner walls of the openings of insulators 280, 282, 283, and 285, and conductor 240a is provided in contact with the side surfaces of insulator 241a. Insulator 241b is provided in contact with the inner walls of the openings of insulators 280, 282, 283, and 285, and conductor 240b is provided in contact with the side surfaces of insulator 241b. Note that insulator 241 has a structure in which a first insulator is provided in contact with the inner walls of the openings, and a second insulator is provided further inward. Note that conductor 240 has a structure in which a first conductor is provided in contact with the side surfaces of insulator 241, and a second conductor is provided further inward. Here, the height of the top surface of conductor 240 and the height of the top surface of insulator 285 in the region overlapping with conductor 246 can be made approximately the same.

[0182] Although the transistor 200 has been described as having a stacked structure of the first insulator of the insulator 241 and the second insulator of the insulator 241, the present invention is not limited to this. For example, the insulator 241 may be provided as a single layer or a stacked structure of three or more layers. Furthermore, the transistor 200 has been described as having a stacked structure of the first conductor of the conductor 240 and the second conductor of the conductor 240, but the present invention is not limited to this. For example, the conductor 240 may be provided as a single layer or a stacked structure of three or more layers. When a structure has a stacked structure, the structures may be distinguished by assigning ordinal numbers to the order of formation.

[0183] [Transistor 200] As shown in FIGS. 23A to 23D, the transistor 200 includes an insulator 216 on an insulator 214, a conductor 205 (conductor 205a and conductor 205b) disposed so as to be embedded in the insulator 214 and / or the insulator 216, an insulator 222 on the insulator 216 and on the conductor 205, an insulator 224 on the insulator 222, an oxide 230a on the insulator 224, an oxide 230b on the oxide 230a, a conductor 242a on the oxide 230b, and a conductor 242b on the oxide 230b. 42a, conductor 242b on oxide 230b, insulator 271b on conductor 242b, insulator 250 on oxide 230b, conductor 260 (conductor 260a and conductor 260b) located on insulator 250 and overlapping with part of oxide 230b, and insulator 275 arranged on insulator 222, insulator 224, oxide 230a, oxide 230b, conductor 242a, conductor 242b, insulator 271a, and insulator 271b. 23B and 23C, the insulator 250 contacts the upper surface of the insulator 222, the side surface of the insulator 224, the side surface of the oxide 230a, the side surface and upper surface of the oxide 230b, the side surface of the conductor 242, the side surface of the insulator 271, the side surface of the insulator 275, and the side surface of the insulator 280. The upper surface of the conductor 260 is disposed so as to be at approximately the same height as the top of the insulator 250 and the upper surface of the insulator 280. The insulator 282 contacts at least a portion of the upper surfaces of the conductor 260, the insulator 250, and the insulator 280.

[0184] In the following, the oxide 230a and the oxide 230b may be collectively referred to as the oxide 230. The conductor 242a and the conductor 242b may be collectively referred to as the conductor 242. The insulator 271a and the insulator 271b may be collectively referred to as the insulator 271.

[0185] Openings that reach the oxide 230b are provided in the insulator 280 and the insulator 275. The insulator 250 and the conductor 260 are disposed in the openings. In addition, the conductor 260 and the insulator 250 are provided between the insulator 271a and the conductor 242a and between the insulator 271b and the conductor 242b in the channel length direction of the transistor 200. The insulator 250 has a region in contact with the side surface of the conductor 260 and a region in contact with the bottom surface of the conductor 260.

[0186] The oxide 230 preferably includes an oxide 230a disposed on the insulator 224 and an oxide 230b disposed on the oxide 230a. By providing the oxide 230a below the oxide 230b, it is possible to suppress the diffusion of impurities from structures formed below the oxide 230a to the oxide 230b.

[0187] Note that in the transistor 200, the oxide 230 has a two-layer structure of the oxide 230a and the oxide 230b, but the present invention is not limited to this. For example, the oxide 230b may have a single layer or a stacked structure of three or more layers, or each of the oxide 230a and the oxide 230b may have a stacked structure.

[0188] The conductor 260 functions as a gate electrode, and the conductor 205 functions as a backgate electrode. The insulator 250 functions as a gate insulator for the gate electrode, and the insulators 222 and 224 function as gate insulators for the backgate electrode. The conductor 242a functions as one of a source and a drain, and the conductor 242b functions as the other of the source and the drain. At least a part of the region of the oxide 230 that overlaps with the conductor 260 functions as a channel formation region.

[0189] FIG. 24 shows an enlarged view of the vicinity of the channel formation region in FIG. 23B. When oxygen is supplied to the oxide 230b, a channel formation region is formed in the region between the conductor 242a and the conductor 242b. Therefore, as shown in FIG. 24, the oxide 230b includes a region 230bc that functions as the channel formation region of the transistor 200, and regions 230ba and 230bb that are provided on either side of the region 230bc and function as source and drain regions. At least a portion of the region 230bc overlaps with the conductor 260. In other words, the region 230bc is located in the region between the conductor 242a and the conductor 242b. The region 230ba overlaps with the conductor 242a, and the region 230bb overlaps with the conductor 242b.

[0190] The region 230bc, which functions as a channel formation region, has fewer oxygen vacancies or a lower impurity concentration than the regions 230ba and 230bb, and is therefore a high-resistance region with a lower carrier concentration. Therefore, the region 230bc can be said to be i-type (intrinsic) or substantially i-type.

[0191] Furthermore, the regions 230ba and 230bb, which function as source and drain regions, have many oxygen vacancies or high concentrations of impurities such as hydrogen, nitrogen, and metal elements, which increases the carrier concentration and reduces resistance. That is, the regions 230ba and 230bb are n-type regions with a higher carrier concentration and lower resistance than the region 230bc.

[0192] Here, the carrier concentration of the region 230bc that functions as a channel forming region is 1×10 18 cm -3 Preferably, it is 1×10 or less. 17 cm -3 More preferably, it is less than 1×10 16 cm -3 More preferably, it is less than 1×10 13 cm -3 More preferably, it is less than 1×10 12 cm -3The lower limit of the carrier concentration of the region 230bc that functions as a channel formation region is not particularly limited, but is preferably, for example, 1×10 -9 cm -3 It can be said that:

[0193] Furthermore, a region may be formed between region 230bc and region 230ba or region 230bb, whose carrier concentration is equal to or lower than that of region 230ba and region 230bb, and equal to or higher than that of region 230bc. That is, this region functions as a junction region between region 230bc and region 230ba or region 230bb. The junction region may have a hydrogen concentration equal to or lower than that of region 230ba and region 230bb, and equal to or higher than that of region 230bc. The junction region may also have oxygen vacancies equal to or lower than those of region 230ba and region 230bb, and equal to or higher than those of region 230bc.

[0194] 24 shows an example in which the regions 230ba, 230bb, and 230bc are formed in the oxide 230b, but the present invention is not limited to this. For example, each of the above regions may be formed not only in the oxide 230b but also in the oxide 230a.

[0195] Furthermore, it may be difficult to clearly detect the boundaries between regions in the oxide 230. The concentrations of metal elements and impurity elements such as hydrogen and nitrogen detected in each region may not necessarily vary stepwise from region to region, but may also vary continuously within each region. In other words, it is sufficient that the concentrations of metal elements and impurity elements such as hydrogen and nitrogen decrease in regions closer to the channel formation region.

[0196] In the transistor 200, the oxide 230 including the channel formation region (the oxide 230a and the oxide 230b) is preferably a metal oxide that functions as a semiconductor (hereinafter also referred to as an oxide semiconductor).

[0197] The metal oxide functioning as a semiconductor preferably has a band gap of 2 eV or more, preferably 2.5 eV or more. By using such a metal oxide with a wide band gap, the off-state current of the transistor can be reduced.

[0198] For example, a metal oxide such as In-M-Zn oxide containing indium, element M, and zinc (element M is one or more elements selected from aluminum, gallium, yttrium, tin, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, etc.) may be used as the oxide 230. Alternatively, In-Ga oxide, In-Zn oxide, or indium oxide may be used as the oxide 230.

[0199] Here, it is preferable that the atomic ratio of In to element M in the metal oxide used for oxide 230b is greater than the atomic ratio of In to element M in the metal oxide used for oxide 230a.

[0200] In this way, by disposing the oxide 230a below the oxide 230b, it is possible to suppress the diffusion of impurities and oxygen from the structure formed below the oxide 230a into the oxide 230b.

[0201] Furthermore, since the oxide 230a and the oxide 230b have a common element other than oxygen (as a main component), the defect state density at the interface between the oxide 230a and the oxide 230b can be reduced. Because the defect state density at the interface between the oxide 230a and the oxide 230b can be reduced, the effect of interface scattering on carrier conduction is reduced, and a high on-current can be obtained.

[0202] The oxide 230b preferably has crystallinity, and it is particularly preferable to use c-axis aligned crystalline oxide semiconductor (CAAC-OS) as the oxide 230b.

[0203] CAAC-OS has a highly crystalline and dense structure, and is free of impurities and defects (e.g., oxygen vacancies (V O In particular, the CAAC-OS can be made to have a dense structure with higher crystallinity by performing heat treatment at a temperature (for example, 400°C or higher and 600°C or lower) at which the metal oxide is not polycrystallized after formation of the metal oxide. In this way, the density of the CAAC-OS can be increased, thereby further reducing the diffusion of impurities or oxygen in the CAAC-OS.

[0204] On the other hand, since it is difficult to identify clear grain boundaries in CAAC-OS, it is said that the decrease in electron mobility due to grain boundaries is unlikely to occur. Therefore, metal oxides with CAAC-OS have stable physical properties. As a result, metal oxides with CAAC-OS are heat-resistant and highly reliable.

[0205] In a transistor using an oxide semiconductor, if impurities and oxygen vacancies exist in a region where a channel is formed in the oxide semiconductor, the electrical characteristics are likely to fluctuate and the reliability may be reduced. In addition, hydrogen in the vicinity of the oxygen vacancy is converted into a defect where hydrogen enters the oxygen vacancy (hereinafter referred to as V O H) and generate electrons that serve as carriers. Therefore, if oxygen vacancies are present in the region where a channel is formed in the oxide semiconductor, the transistor is likely to have normally-on characteristics (a channel exists and current flows through the transistor even when no voltage is applied to the gate electrode). Therefore, in the region where a channel is formed in the oxide semiconductor, impurities, oxygen vacancies, and V O It is preferable that H is reduced as much as possible. In other words, it is preferable that the region in the oxide semiconductor where a channel is formed has a reduced carrier concentration and is i-type (intrinsic) or substantially i-type.

[0206] In response to this problem, an insulator containing oxygen that is released by heating (hereinafter may be referred to as excess oxygen) is provided near the oxide semiconductor, and heat treatment is performed to supply oxygen from the insulator to the oxide semiconductor, thereby eliminating oxygen vacancies and V O H can be reduced. However, if an excessive amount of oxygen is supplied to the source region or the drain region, this may cause a decrease in the on-state current or a decrease in the field-effect mobility of the transistor 200. Furthermore, if the amount of oxygen supplied to the source region or the drain region varies within the substrate surface, the characteristics of a semiconductor device having the transistor will vary.

[0207] Therefore, in the oxide semiconductor, the region 230bc that functions as a channel formation region preferably has a reduced carrier concentration and is i-type or substantially i-type, whereas the regions 230ba and 230bb that function as source and drain regions preferably have a high carrier concentration and are n-type. O It is preferable to reduce H so that an excessive amount of oxygen is not supplied to the regions 230ba and 230bb.

[0208] Therefore, in this embodiment, in a state where the conductors 242a and 242b are provided on the oxide 230b, microwave processing is performed in an atmosphere containing oxygen, and oxygen vacancies in the region 230bc and V O The microwave treatment here refers to a treatment using a device with a power source that generates high-density plasma using microwaves, for example.

[0209] By performing microwave processing in an atmosphere containing oxygen, oxygen gas can be converted into plasma using microwaves or high frequency waves such as RF, and the oxygen plasma can be activated. At this time, microwaves or high frequency waves such as RF can also be irradiated onto the region 230bc. The V of the region 230bc can be activated by the action of the plasma, microwaves, etc. O H is split off, hydrogen H is removed from the region 230bc, and oxygen vacancy V is formed.O can be compensated with oxygen. O H → H + V O This reaction occurs, and the hydrogen concentration in the region 230bc can be reduced. O H can be reduced to lower the carrier concentration.

[0210] Furthermore, when microwave processing is performed in an atmosphere containing oxygen, the effects of microwaves, high frequency waves such as RF, oxygen plasma, etc. are shielded by the conductors 242a and 242b and do not reach the regions 230ba and 230bb. Furthermore, the effects of oxygen plasma can be reduced by the insulators 271 and 280 that are provided to cover the oxide 230b and the conductor 242. As a result, during microwave processing, V O Since there is no reduction in H and no excessive supply of oxygen, it is possible to prevent a decrease in the carrier concentration.

[0211] It is also preferable to perform microwave treatment in an atmosphere containing oxygen after forming the insulating film that becomes the insulator 250. By performing microwave treatment in an atmosphere containing oxygen through the insulator 250 in this manner, oxygen can be efficiently injected into the region 230bc.

[0212] The oxygen implanted into the region 230bc can take various forms, such as oxygen atoms, oxygen molecules, and oxygen radicals (atoms, molecules, or ions with an unpaired electron, also known as O radicals). The oxygen implanted into the region 230bc may take one or more of the above forms, and oxygen radicals are particularly preferred. This also improves the film quality of the insulator 250, thereby improving the reliability of the transistor 200.

[0213] In this way, oxygen vacancies and V OBy removing H, the region 230bc can be made i-type or substantially i-type. Furthermore, the supply of excess oxygen to the regions 230ba and 230bb, which function as source and drain regions, can be suppressed, thereby maintaining conductivity. This suppresses fluctuations in the electrical characteristics of the transistor 200 and suppresses variations in the electrical characteristics of the transistor 200 within the substrate surface.

[0214] By adopting the above-described configuration, it is possible to provide a semiconductor device with less variation in transistor characteristics, a highly reliable semiconductor device, and a semiconductor device with good electrical characteristics.

[0215] 23C , in a cross-sectional view of the transistor 200 in the channel width direction, a curved surface may be formed between the side surface of the oxide 230b and the top surface of the oxide 230b. That is, the end of the side surface and the end of the top surface may be curved (hereinafter also referred to as rounded).

[0216] The radius of curvature of the curved surface is preferably greater than 0 nm and smaller than the film thickness of the oxide 230b in the region overlapping with the conductor 242, or smaller than half the length of the region not having the curved surface. Specifically, the radius of curvature of the curved surface is greater than 0 nm and smaller than 20 nm, preferably greater than 1 nm and smaller than 15 nm, and more preferably greater than 2 nm and smaller than 10 nm. By using such a shape, it is possible to improve the coverage of the oxide 230b with the insulator 250 and the conductor 260.

[0217] The oxide 230 preferably has a stacked structure of multiple oxide layers with different chemical compositions. Specifically, in the metal oxide used for the oxide 230a, the atomic ratio of the element M to the metal element that is the main component is preferably larger than the atomic ratio of the element M to the metal element that is the main component in the metal oxide used for the oxide 230b. Furthermore, in the metal oxide used for the oxide 230a, the atomic ratio of the element M to In is preferably larger than the atomic ratio of the element M to In in the metal oxide used for the oxide 230b. Furthermore, in the metal oxide used for the oxide 230b, the atomic ratio of In to the element M is preferably larger than the atomic ratio of In to the element M in the metal oxide used for the oxide 230a.

[0218] Furthermore, the oxide 230b is preferably a crystalline oxide such as CAAC-OS. Crystalline oxides such as CAAC-OS have few impurities and defects (oxygen vacancies, etc.), have high crystallinity, and have a dense structure. This can prevent the source or drain electrode from extracting oxygen from the oxide 230b. This reduces the extraction of oxygen from the oxide 230b even during heat treatment, making the transistor 200 stable against high temperatures (so-called thermal budget) during the manufacturing process.

[0219] Here, the conduction band minimum changes gradually at the junction between the oxide 230a and the oxide 230b. In other words, the conduction band minimum at the junction between the oxide 230a and the oxide 230b changes continuously or can be said to be a continuous junction. To achieve this, it is advisable to reduce the defect level density of the mixed layer formed at the interface between the oxide 230a and the oxide 230b.

[0220] Specifically, when the oxide 230a and the oxide 230b contain a common element other than oxygen as a main component, a mixed layer with a low density of defect states can be formed. For example, when the oxide 230b is an In-M-Zn oxide, the oxide 230a may be an In-M-Zn oxide, an M-Zn oxide, an oxide of element M, an In-Zn oxide, an indium oxide, or the like.

[0221] Specifically, the oxide 230a may be a metal oxide having an atomic ratio of In:M:Zn=1:3:4 or a similar composition, or an atomic ratio of In:M:Zn=1:1:0.5 or a similar composition. The oxide 230b may be a metal oxide having an atomic ratio of In:M:Zn=1:1:1 or a similar composition, an atomic ratio of In:M:Zn=1:1:2 or a similar composition, or an atomic ratio of In:M:Zn=4:2:3 or a similar composition. Note that a similar composition includes a range of ±30% of the desired atomic ratio. Gallium is preferably used as the element M.

[0222] When a metal oxide film is formed by sputtering, the atomic ratio is not limited to the atomic ratio of the formed metal oxide film, but may be the atomic ratio of a sputtering target used to form the metal oxide film.

[0223] By configuring the oxide 230a and the oxide 230b as described above, the defect state density at the interface between the oxide 230a and the oxide 230b can be reduced, which reduces the influence of interface scattering on carrier conduction, and the transistor 200 can achieve a large on-state current and high frequency characteristics.

[0224] At least one of the insulators 212, 214, 271, 275, 282, 283, and 285 preferably functions as a barrier insulating film that suppresses diffusion of impurities such as water and hydrogen from the substrate side or from above the transistor 200 into the transistor 200. Therefore, at least one of the insulators 212, 214, 271, 275, 282, 283, and 285 is preferably made of an insulating material that suppresses diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, nitrogen atoms, nitrogen molecules, nitrogen oxide molecules (NO, NO, NO, etc.), and copper atoms (i.e., through which the above impurities are less likely to permeate). Alternatively, it is preferably made of an insulating material that suppresses diffusion of oxygen (e.g., at least one of oxygen atoms, oxygen molecules, etc.) (i.e., through which the above oxygen is less likely to permeate).

[0225] Note that in this specification, a barrier insulating film refers to an insulating film having a barrier property. In this specification, the barrier property refers to a function of suppressing the diffusion of a corresponding substance (also referred to as low permeability) or a function of capturing and fixing a corresponding substance (also referred to as gettering).

[0226] For the insulators 212, 214, 271, 275, 282, 283, and 285, it is preferable to use an insulator that has the function of suppressing the diffusion of impurities such as water and hydrogen and oxygen. For example, aluminum oxide, magnesium oxide, hafnium oxide, gallium oxide, indium gallium zinc oxide, silicon nitride, silicon nitride oxide, or the like can be used. For example, it is preferable to use silicon nitride or the like, which has a higher hydrogen barrier property, for the insulators 212, 275, and 283. Furthermore, it is preferable to use aluminum oxide or magnesium oxide, which has a high function of capturing and fixing hydrogen, for the insulators 214, 271, 282, and 285. This can suppress the diffusion of impurities such as water and hydrogen from the substrate side to the transistor 200 side through the insulators 212 and 214. Alternatively, it is possible to suppress diffusion of impurities such as water and hydrogen from an interlayer insulating film or the like disposed outside the insulator 285 toward the transistor 200. Alternatively, it is possible to suppress diffusion of oxygen contained in the insulator 224 or the like toward the substrate through the insulators 212 and 214. Alternatively, it is possible to suppress diffusion of oxygen contained in the insulator 280 or the like toward an upper side of the transistor 200 through the insulator 282 or the like. In this way, it is preferable to have a structure in which the transistor 200 is surrounded by the insulators 212, 214, 271, 275, 282, 283, and 285, which have the function of suppressing diffusion of impurities such as water and hydrogen, and oxygen.

[0227] Here, it is preferable to use an oxide having an amorphous structure as the insulators 212, 214, 271, 275, 282, 283, and 285. For example, AlO x (x is any number greater than 0), or MgO yIt is preferable to use a metal oxide such as y (where y is any number greater than 0). In such a metal oxide having an amorphous structure, oxygen atoms have dangling bonds, and the dangling bonds may have the property of capturing or fixing hydrogen. By using such a metal oxide having an amorphous structure as a component of the transistor 200 or providing it around the transistor 200, hydrogen contained in the transistor 200 or hydrogen present around the transistor 200 can be captured or fixed. In particular, it is preferable to capture or fix hydrogen contained in the channel formation region of the transistor 200. By using a metal oxide having an amorphous structure as a component of the transistor 200 or providing it around the transistor 200, a highly reliable transistor 200 and a semiconductor device can be manufactured that have excellent characteristics.

[0228] Furthermore, the insulators 212, 214, 271, 275, 282, 283, and 285 preferably have an amorphous structure, but may have a polycrystalline structure in part. The insulators 212, 214, 271, 275, 282, 283, and 285 may have a multilayer structure in which an amorphous layer and a polycrystalline layer are stacked. For example, they may have a stacked structure in which a polycrystalline layer is formed on an amorphous layer.

[0229] The insulators 212, 214, 271, 275, 282, 283, and 285 may be deposited by, for example, sputtering. Sputtering does not require the use of hydrogen-containing molecules in the deposition gas, and therefore can reduce the hydrogen concentrations of the insulators 212, 214, 271, 275, 282, 283, and 285. Note that the deposition method is not limited to sputtering, and other methods such as chemical vapor deposition (CVD), molecular beam epitaxy (MBE), pulsed laser deposition (PLD), and atomic layer deposition (ALD) may also be used as appropriate.

[0230] It may also be preferable to reduce the resistivity of the insulators 212, 275, and 283. For example, it may be preferable to reduce the resistivity of the insulators 212, 275, and 283 to approximately 1×10 13 By setting the resistivity to Ωcm, the insulators 212, 275, and 283 may be able to reduce charge-up of the conductor 205, the conductor 242, the conductor 260, or the conductor 246 in a process using plasma or the like in a semiconductor device manufacturing process. The resistivity of the insulators 212, 275, and 283 is preferably 1×10 10 Ωcm or more 1×10 15 Ωcm or less.

[0231] The insulators 216, 274, 280, and 285 preferably have a lower dielectric constant than the insulator 214. Using a material with a low dielectric constant as an interlayer film can reduce parasitic capacitance between wirings. For example, silicon oxide, silicon oxynitride, silicon oxide to which fluorine has been added, silicon oxide to which carbon has been added, silicon oxide to which carbon and nitrogen have been added, silicon oxide having vacancies, or the like can be used as appropriate for the insulators 216, 274, 280, and 285.

[0232] The conductor 205 is arranged so as to overlap the oxide 230 and the conductor 260. Here, the conductor 205 is preferably provided by being embedded in an opening formed in the insulator 216. In addition, a part of the conductor 205 may be embedded in the insulator 214.

[0233] The conductor 205 includes a conductor 205a and a conductor 205b. The conductor 205a is provided in contact with the bottom surface and sidewall of the opening. The conductor 205b is provided so as to be embedded in a recess formed in the conductor 205a. Here, the height of the upper surface of the conductor 205b is approximately the same as the height of the upper surface of the conductor 205a and the height of the upper surface of the insulator 216.

[0234] Here, the conductor 205a is preferably made of a conductive material that has a function of suppressing the diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, nitrogen atoms, nitrogen molecules, nitrogen oxide molecules (NO, NO, NO, etc.), copper atoms, etc. Alternatively, it is preferably made of a conductive material that has a function of suppressing the diffusion of oxygen (for example, at least one of oxygen atoms, oxygen molecules, etc.).

[0235] By using a conductive material for the conductor 205a that has the function of reducing hydrogen diffusion, it is possible to prevent impurities such as hydrogen contained in the conductor 205b from diffusing into the oxide 230 via the insulator 224 or the like. Furthermore, by using a conductive material for the conductor 205a that has the function of suppressing oxygen diffusion, it is possible to suppress oxidation of the conductor 205b and a decrease in conductivity. Examples of conductive materials that have the function of suppressing oxygen diffusion include titanium, titanium nitride, tantalum, tantalum nitride, ruthenium, and ruthenium oxide. Therefore, the conductor 205a may be formed as a single layer or a multilayer of the above conductive materials. For example, the conductor 205a may be made of titanium nitride.

[0236] The conductor 205b is preferably made of a conductive material containing tungsten, copper, or aluminum as a main component, for example, tungsten.

[0237] The conductor 205 may function as a back gate electrode. In this case, the threshold voltage (Vth) of the transistor 200 can be controlled by changing the potential applied to the conductor 205 independently of the potential applied to the conductor 260. In particular, applying a negative potential to the conductor 205 can increase the Vth of the transistor 200 and reduce the off-state current. Therefore, applying a negative potential to the conductor 205 can reduce the drain current when the potential applied to the conductor 260 is 0 V compared to not applying a negative potential to the conductor 205.

[0238] Note that if the oxide 230 is highly pure and intrinsic, and impurities are removed as much as possible from the oxide 230, it may be possible to make the transistor 200 normally off (to make the threshold voltage of the transistor 200 higher than 0 V) ​​without applying a potential to the conductor 205 and / or the conductor 260. In this case, it is preferable to connect the conductor 260 and the conductor 205 so that they are given the same potential.

[0239] Furthermore, the electrical resistivity of the conductor 205 is designed taking into consideration the potential applied to the conductor 205, and the film thickness of the conductor 205 is set to match this electrical resistivity. Furthermore, the film thickness of the insulator 216 is approximately the same as that of the conductor 205. Here, it is preferable to make the film thicknesses of the conductor 205 and the insulator 216 thin within the range permitted by the design of the conductor 205. By making the film thickness of the insulator 216 thin, the absolute amount of impurities such as hydrogen contained in the insulator 216 can be reduced, thereby reducing the diffusion of the impurities into the oxide 230.

[0240] As shown in FIG. 23A, the conductor 205 is preferably larger than the area of ​​the oxide 230 that does not overlap with the conductors 242a and 242b. In particular, as shown in FIG. 23C, the conductor 205 preferably extends to areas outside the channel width direction ends of the oxide 230a and the oxide 230b. That is, outside the side surfaces of the oxide 230 in the channel width direction, the conductor 205 and the conductor 260 preferably overlap with each other via an insulator. This structure allows the channel formation region of the oxide 230 to be electrically surrounded by the electric field of the conductor 260, which functions as a gate electrode, and the electric field of the conductor 205, which functions as a back gate electrode. In this specification, a transistor structure in which the channel formation region is electrically surrounded by the electric fields of the gate and back gate is referred to as a surrounded channel (S-channel) structure.

[0241] In this specification and the like, a transistor with an S-channel structure refers to a transistor structure in which a channel formation region is electrically surrounded by the electric fields of one and the other of a pair of gate electrodes. The S-channel structure disclosed in this specification and the like differs from a fin structure and a planar structure. By adopting the S-channel structure, the transistor can be made more resistant to the short-channel effect, in other words, less susceptible to the short-channel effect.

[0242] By configuring the transistor 200 as a normally-off transistor and adopting the above-described S-Channel structure, the channel formation region can be electrically surrounded. Therefore, the transistor 200 can also be considered to have a GAA (Gate All Around) structure or an LGAA (Lateral Gate All Around) structure. By adopting the S-Channel, GAA, or LGAA structure for the transistor 200, the channel formation region formed at or near the interface between the oxide 230 and the gate insulating film can be the entire bulk of the oxide 230. In other words, by adopting the S-Channel, GAA, or LGAA structure for the transistor 200, the entire bulk can be used as a carrier path, making it a so-called bulk-flow type. The bulk-flow type transistor structure can increase the current density flowing through the transistor, which is expected to improve the on-state current or field-effect mobility of the transistor.

[0243] 23C, the conductor 205 is extended to function as wiring. However, the present invention is not limited to this, and a conductor functioning as wiring may be provided below the conductor 205. Furthermore, it is not necessary to provide one conductor 205 for each transistor. For example, the conductor 205 may be shared by multiple transistors.

[0244] Note that although the conductor 205 in the transistor 200 has a stacked structure of the conductor 205a and the conductor 205b, the present invention is not limited to this. For example, the conductor 205 may have a single layer structure or a stacked structure of three or more layers.

[0245] The insulator 222 and the insulator 224 function as gate insulators.

[0246] The insulator 222 preferably has a function of suppressing the diffusion of hydrogen (e.g., at least one of hydrogen atoms, hydrogen molecules, etc.). The insulator 222 preferably has a function of suppressing the diffusion of oxygen (e.g., at least one of oxygen atoms, oxygen molecules, etc.). For example, the insulator 222 preferably has a function of suppressing the diffusion of one or both of hydrogen and oxygen more than the insulator 224.

[0247] The insulator 222 may be an insulator containing an oxide of one or both of aluminum and hafnium, which are insulating materials. Aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), or the like is preferably used as the insulator. Alternatively, an oxide containing hafnium and zirconium, such as hafnium zirconium oxide, is preferably used. When the insulator 222 is formed using such a material, the insulator 222 functions as a layer that suppresses oxygen release from the oxide 230 to the substrate and the diffusion of impurities such as hydrogen from the periphery of the transistor 200 to the oxide 230. Therefore, the insulator 222 can suppress the diffusion of impurities such as hydrogen into the inside of the transistor 200 and the generation of oxygen vacancies in the oxide 230. Furthermore, the conductor 205 can be prevented from reacting with the oxygen contained in the insulator 224 and the oxide 230.

[0248] Alternatively, for example, aluminum oxide, bismuth oxide, germanium oxide, niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttrium oxide, or zirconium oxide may be added to the insulator. Alternatively, these insulators may be nitrided. Furthermore, the insulator 222 may be formed by stacking silicon oxide, silicon oxynitride, or silicon nitride on these insulators.

[0249] The insulator 222 may be a single layer or a multilayer insulator containing a so-called high-k material, such as aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, or hafnium zirconium oxide. As transistors become smaller and more highly integrated, thinning of the gate insulator can lead to problems such as leakage current. Using a high-k material as the gate insulator can reduce the gate potential during transistor operation while maintaining the physical film thickness. Alternatively, the insulator 222 may be made of a material with a high dielectric constant, such as lead zirconate titanate (PZT), strontium titanate (SrTiO3), or (Ba,Sr)TiO3 (BST).

[0250] The insulator 224 in contact with the oxide 230 may be made of, for example, silicon oxide, silicon oxynitride, or the like, as appropriate.

[0251] In addition, during the manufacturing process of the transistor 200, heat treatment is preferably performed with the surface of the oxide 230 exposed. The heat treatment may be performed, for example, at a temperature of 100° C. to 600° C., more preferably 350° C. to 550° C. Note that the heat treatment is performed in an atmosphere of nitrogen gas or an inert gas, or an atmosphere containing an oxidizing gas at 10 ppm or more, 1% or more, or 10% or more. For example, the heat treatment is preferably performed in an oxygen atmosphere. This supplies oxygen to the oxide 230, thereby eliminating oxygen deficiencies (V O ) can be reduced. The heat treatment may be performed under reduced pressure. Alternatively, the heat treatment may be performed in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas after the heat treatment in a nitrogen gas or inert gas atmosphere to compensate for the desorbed oxygen. Alternatively, the heat treatment may be performed in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas, and then the heat treatment may be performed in a nitrogen gas or inert gas atmosphere.

[0252] By subjecting the oxide 230 to oxygen addition treatment, oxygen vacancies in the oxide 230 are repaired by the supplied oxygen. In other words, OFurthermore, the reaction of the hydrogen remaining in the oxide 230 with the supplied oxygen can be removed as H2O (dehydration). As a result, the hydrogen remaining in the oxide 230 recombines with the oxygen vacancies to form V O The formation of H can be suppressed.

[0253] The insulators 222 and 224 may have a stacked structure of two or more layers. In this case, the stacked structure is not limited to a stacked structure made of the same material, and may be a stacked structure made of different materials. The insulator 224 may be formed in an island shape by overlapping with the oxide 230a. In this case, the insulator 275 is configured to contact the side surface of the insulator 224 and the top surface of the insulator 222.

[0254] The conductor 242a and the conductor 242b are provided in contact with the top surface of the oxide 230b. The conductor 242a and the conductor 242b function as a source electrode and a drain electrode of the transistor 200, respectively.

[0255] As the conductor 242 (conductor 242a and conductor 242b), it is preferable to use, for example, a nitride containing tantalum, a nitride containing titanium, a nitride containing molybdenum, a nitride containing tungsten, a nitride containing tantalum and aluminum, or a nitride containing titanium and aluminum. In one embodiment of the present invention, a nitride containing tantalum is particularly preferable. Also, for example, ruthenium oxide, ruthenium nitride, an oxide containing strontium and ruthenium, an oxide containing lanthanum and nickel, or the like may be used. These materials are preferable because they are conductive materials that are resistant to oxidation or materials that maintain conductivity even when absorbing oxygen.

[0256] Note that hydrogen contained in the oxide 230b, etc. may diffuse into the conductor 242a or the conductor 242b. In particular, by using a nitride containing tantalum for the conductor 242a and the conductor 242b, hydrogen contained in the oxide 230b, etc. may easily diffuse into the conductor 242a or the conductor 242b, and the diffused hydrogen may bond with nitrogen contained in the conductor 242a or the conductor 242b. In other words, hydrogen contained in the oxide 230b, etc. may be absorbed by the conductor 242a or the conductor 242b.

[0257] Preferably, no curved surface is formed between the side surface of the conductor 242 and the top surface of the conductor 242. By forming the conductor 242 without such a curved surface, the cross-sectional area of ​​the conductor 242 in the cross section in the channel width direction can be increased, as shown in Fig. 23D. This increases the conductivity of the conductor 242 and the on-state current of the transistor 200.

[0258] The insulator 271a is provided in contact with the upper surface of the conductor 242a, and the insulator 271b is provided in contact with the upper surface of the conductor 242b. The insulator 271 preferably functions as a barrier insulating film at least against oxygen. Therefore, the insulator 271 preferably has a function of suppressing oxygen diffusion. For example, the insulator 271 preferably has a function of suppressing oxygen diffusion more than the insulator 280. The insulator 271 may be made of, for example, aluminum oxide or magnesium oxide.

[0259] The insulator 275 is provided to cover the insulator 224, the oxide 230a, the oxide 230b, the conductor 242, and the insulator 271. The insulator 275 preferably has the function of capturing and fixing hydrogen. In this case, the insulator 275 preferably includes an insulator such as silicon nitride or a metal oxide having an amorphous structure, such as aluminum oxide or magnesium oxide. Alternatively, for example, the insulator 275 may be a stacked film of aluminum oxide and silicon nitride on the aluminum oxide.

[0260] By providing the insulators 271 and 275 as described above, the conductor 242 can be wrapped in an insulator that has a barrier property against oxygen. In other words, it is possible to prevent oxygen contained in the insulators 224 and 280 from diffusing into the conductor 242. This makes it possible to suppress the conductor 242 from being directly oxidized by the oxygen contained in the insulators 224 and 280, which would increase the resistivity and reduce the on-current.

[0261] The insulator 250 functions as part of the gate insulator. As with the insulator 224, the insulator 250 preferably has a reduced concentration of impurities such as water and hydrogen. The thickness of the insulator 250 is preferably 1 nm or more and 20 nm or less, and more preferably 0.5 nm or more and 15.0 nm or less. In this case, the insulator 250 only needs to have a region with the above-mentioned thickness in at least a portion thereof.

[0262] The conductor 260 functions as the gate electrode of the transistor 200. The conductor 260 preferably includes a conductor 260a and a conductor 260b disposed on the conductor 260a. For example, the conductor 260a is preferably disposed so as to surround the bottom and side surfaces of the conductor 260b. As shown in FIGS. 23B and 23C, the top surface of the conductor 260 is generally flush with the top surface of the insulator 250. Note that although the conductor 260 is shown as having a two-layer structure of the conductor 260a and the conductor 260b in FIGS. 23B and 23C, it may have a single-layer structure or a stacked structure of three or more layers.

[0263] The conductor 260a is preferably made of a conductive material that has a function of suppressing the diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, nitrogen atoms, nitrogen molecules, nitrogen oxide molecules, copper atoms, etc. Alternatively, it is preferably made of a conductive material that has a function of suppressing the diffusion of oxygen (for example, at least one of oxygen atoms, oxygen molecules, etc.).

[0264] Furthermore, since the conductor 260a has the function of suppressing oxygen diffusion, it is possible to suppress a decrease in conductivity due to oxidation of the conductor 260b caused by oxygen contained in the insulator 250. As a conductive material having the function of suppressing oxygen diffusion, it is preferable to use, for example, titanium, titanium nitride, tantalum, tantalum nitride, ruthenium, ruthenium oxide, or the like.

[0265] Furthermore, since the conductor 260 also functions as wiring, it is preferable to use a conductor with high conductivity. For example, the conductor 260b can be made of a conductive material containing tungsten, copper, or aluminum as a main component. The conductor 260b may also have a layered structure, such as a layered structure of titanium or titanium nitride and the above-mentioned conductive material.

[0266] Furthermore, in the transistor 200, the conductor 260 is formed in a self-aligned manner so as to fill the opening formed in the insulator 280, etc. By forming the conductor 260 in this manner, the conductor 260 can be reliably placed in the region between the conductor 242a and the conductor 242b without alignment.

[0267] 23C , in the channel width direction of the transistor 200, the height of the bottom surface of the conductor 260 in a region where the conductor 260 and the oxide 230b do not overlap is preferably lower than the height of the bottom surface of the oxide 230b, relative to the bottom surface of the insulator 222. When the conductor 260, which functions as a gate electrode, covers the side and top surfaces of the channel formation region of the oxide 230b via the insulator 250 or the like, the electric field of the conductor 260 can be easily applied to the entire channel formation region of the oxide 230b. This increases the on-state current of the transistor 200 and improves its frequency characteristics. The difference between the height of the bottom surface of the conductor 260 and the height of the bottom surface of the oxide 230b in a region where the oxides 230a and 230b do not overlap with the conductor 260, relative to the bottom surface of the insulator 222, is 0 nm or more and 100 nm or less, preferably 3 nm or more and 50 nm or less, and more preferably 5 nm or more and 20 nm or less.

[0268] The insulator 280 is provided on the insulator 275, and openings are formed in the regions where the insulator 250 and the conductor 260 are to be provided. The top surface of the insulator 280 may be flattened.

[0269] The insulator 280, which functions as an interlayer film, preferably has a low dielectric constant. Using a material with a low dielectric constant as the interlayer film can reduce the parasitic capacitance that occurs between wirings. The insulator 280 is preferably formed using, for example, the same material as the insulator 216. In particular, silicon oxide and silicon oxynitride are preferred because they are thermally stable. In particular, materials such as silicon oxide, silicon oxynitride, and silicon oxide with vacancies are preferred because they can easily form a region containing oxygen that is released by heating.

[0270] The insulator 280 preferably has a reduced concentration of impurities such as water and hydrogen in the insulator 280. For example, the insulator 280 may be made of an oxide containing silicon, such as silicon oxide or silicon oxynitride, as appropriate.

[0271] The insulator 282 preferably functions as a barrier insulating film that suppresses the diffusion of impurities such as water and hydrogen from above into the insulator 280 and preferably has a function of capturing impurities such as hydrogen. The insulator 282 also preferably functions as a barrier insulating film that suppresses oxygen permeation. The insulator 282 may be an insulator made of a metal oxide having an amorphous structure, such as aluminum oxide. In this case, the insulator 282 contains at least oxygen and aluminum. By providing the insulator 282, which is in contact with the insulator 280 and has a function of capturing impurities such as hydrogen, in the region sandwiched between the insulators 212 and 283, the insulator 282 can capture impurities such as hydrogen contained in the insulator 280 and maintain a constant amount of hydrogen in the region. In particular, using aluminum oxide having an amorphous structure as the insulator 282 is preferable because it may be able to more effectively capture or fix hydrogen. This enables the manufacture of a highly reliable transistor 200 and semiconductor device with excellent characteristics.

[0272] The insulator 283 functions as a barrier insulating film that suppresses diffusion of impurities such as water and hydrogen from above into the insulator 280. The insulator 283 is disposed on the insulator 282. It is preferable to use a nitride containing silicon, such as silicon nitride or silicon nitride oxide, as the insulator 283. For example, silicon nitride formed by a sputtering method can be used as the insulator 283. By forming the insulator 283 by a sputtering method, a high-density silicon nitride film can be formed. Alternatively, as the insulator 283, silicon nitride formed by a PEALD method or a CVD method may be stacked on silicon nitride formed by a sputtering method.

[0273] The conductors 240a and 240b are preferably made of a conductive material containing tungsten, copper, or aluminum as a main component. The conductors 240a and 240b may have a layered structure.

[0274] Furthermore, when the conductor 240 has a layered structure, it is preferable to use a conductive material that has the function of suppressing the permeation of impurities such as water and hydrogen for the first conductor arranged near the insulators 285, 283, 282, 280, 275, and 271. For example, it is preferable to use tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, ruthenium oxide, etc. Furthermore, the conductive material that has the function of suppressing the permeation of impurities such as water and hydrogen may be used in a single layer or a layered structure. Furthermore, it is possible to suppress impurities such as water and hydrogen contained in layers above the insulator 283 from mixing into the oxide 230 through the conductors 240a and 240b.

[0275] The insulators 241a and 241b may be a barrier insulating film that can be used for the insulator 275, etc. For example, the insulators 241a and 241b may be made of an insulator such as silicon nitride, aluminum oxide, or silicon nitride oxide. The insulators 241a and 241b are provided in contact with the insulators 283, 282, and 271, and therefore can prevent impurities such as water and hydrogen contained in the insulator 280, etc., from mixing into the oxide 230 through the conductors 240a and 240b. Silicon nitride is particularly suitable because it has a high blocking property against hydrogen. Furthermore, it can prevent oxygen contained in the insulator 280 from being absorbed by the conductors 240a and 240b.

[0276] When the insulators 241a and 241b are formed into a layered structure as shown in FIG. 23B, it is preferable that the first insulator in contact with the inner wall of the opening of the insulator 280, etc., and the second insulator inside it, are made of a combination of a barrier insulating film against oxygen and a barrier insulating film against hydrogen.

[0277] For example, the first insulator may be aluminum oxide formed by ALD, and the second insulator may be silicon nitride formed by PEALD. This configuration can suppress oxidation of the conductor 240 and reduce hydrogen contamination of the conductor 240.

[0278] Conductors 246 (conductors 246a and 246b) may be disposed in contact with the upper surfaces of the conductors 240a and 240b, functioning as wiring. Conductor 246 is preferably made of a conductive material containing tungsten, copper, or aluminum as its main component. The conductor may have a layered structure, for example, a layered structure of titanium or titanium nitride and the above-mentioned conductive material. The conductor may be formed so as to be embedded in an opening provided in an insulator.

[0279] <Classification of crystal structures> Below, classification of crystal structures in oxide semiconductors will be explained with reference to Fig. 25A, which is a diagram for explaining classification of crystal structures of oxide semiconductors, typically IGZO (a metal oxide containing In, Ga, and Zn).

[0280] As shown in FIG. 25A, oxide semiconductors are broadly classified into "amorphous," "crystalline," and "crystal." "Amorphous" includes completely amorphous. "Crystalline" includes c-axis-aligned crystalline (CAAC), nanocrystalline (nc), and cloud-aligned composite (CAC) (excluding single crystal and polycrystal). "Crystalline" excludes single crystal, polycrystal, and completely amorphous. "Crystalline" includes single crystal and polycrystal.

[0281] The structure within the bold frame in Figure 25A is an intermediate state between "Amorphous" and "Crystal" and belongs to a new boundary region (New crystalline phase). In other words, this structure can be said to be completely different from the energetically unstable "Amorphous" and "Crystal."

[0282] The crystalline structure of a film or substrate can be evaluated using X-ray diffraction (XRD) spectroscopy. Figure 25B shows an XRD spectrum obtained by GIXD (Grazing-Incidence XRD) measurement of a CAAC-IGZO film classified as "Crystalline." The GIXD method is also known as the thin-film method or the Seemann-Bohlin method. Hereinafter, the XRD spectrum obtained by GIXD measurement shown in Figure 25B will be simply referred to as the XRD spectrum. The composition of the CAAC-IGZO film shown in Figure 25B is approximately In:Ga:Zn = 4:2:3 [atomic ratio]. The thickness of the CAAC-IGZO film shown in Figure 25B is 500 nm.

[0283] In Figure 25B, the horizontal axis is 2θ [deg.] and the vertical axis is intensity [au]. As shown in Figure 25B, a peak indicating clear crystallinity is detected in the XRD spectrum of the CAAC-IGZO film. Specifically, a peak indicating c-axis orientation is detected near 2θ = 31° in the XRD spectrum of the CAAC-IGZO film. Note that, as shown in Figure 25B, the peak near 2θ = 31° is asymmetrical with respect to the angle at which the peak intensity is detected.

[0284] The crystalline structure of a film or substrate can be evaluated by a diffraction pattern (also called a nanobeam electron diffraction pattern) observed using nanobeam electron diffraction (NBED). The diffraction pattern of a CAAC-IGZO film is shown in Figure 25C. Figure 25C shows a diffraction pattern observed using NBED, in which an electron beam is incident parallel to the substrate. The composition of the CAAC-IGZO film shown in Figure 25C is approximately In:Ga:Zn = 4:2:3 [atomic ratio]. In nanobeam electron diffraction, electron diffraction is performed using a probe diameter of 1 nm.

[0285] As shown in FIG. 25C, multiple spots indicating c-axis orientation are observed in the diffraction pattern of the CAAC-IGZO film.

[0286] <<Structure of oxide semiconductor>> Note that oxide semiconductors may be classified differently from those shown in FIG. 25A when focusing on their crystal structures. For example, oxide semiconductors are divided into single-crystal oxide semiconductors and other non-single-crystal oxide semiconductors. Examples of non-single-crystal oxide semiconductors include the above-mentioned CAAC-OS and nc-OS. Non-single-crystal oxide semiconductors include polycrystalline oxide semiconductors, amorphous-like oxide semiconductors (a-like OSs), amorphous oxide semiconductors, and the like.

[0287] Here, the above-mentioned CAAC-OS, nc-OS, and a-like OS will be described in detail.

[0288] [CAAC-OS] CAAC-OS is an oxide semiconductor having multiple crystalline regions, each with its c-axis aligned in a specific direction. The specific direction can be the thickness direction of the CAAC-OS film, the normal direction to the surface on which the CAAC-OS film is formed, or the normal direction to the surface of the CAAC-OS film. A crystalline region is a region with periodic atomic arrangement. Considering an atomic arrangement as a lattice arrangement, a crystalline region can also be a region with a uniform lattice arrangement. Furthermore, CAAC-OS has a region where multiple crystalline regions are connected in the ab-plane direction, and the region may have distortion. The distortion refers to a location where the lattice orientation changes between a region with a uniform lattice arrangement and a region with a different uniform lattice arrangement in the region where multiple crystalline regions are connected. In other words, CAAC-OS is an oxide semiconductor with a c-axis aligned but no clear orientation in the ab-plane direction.

[0289] Each of the multiple crystalline regions is composed of one or more minute crystals (crystals with a maximum diameter of less than 10 nm). When a crystalline region is composed of one minute crystal, the maximum diameter of the crystalline region is less than 10 nm. When a crystalline region is composed of many minute crystals, the size of the crystalline region may be several tens of nm.

[0290] In an In-M-Zn oxide (wherein element M is one or more elements selected from aluminum, gallium, yttrium, tin, titanium, etc.), the CAAC-OS tends to have a layered crystal structure (also referred to as a layered structure) in which a layer containing indium (In) and oxygen (hereinafter referred to as an In layer) and a layer containing element M, zinc (Zn), and oxygen (hereinafter referred to as an (M, Zn) layer) are stacked. Note that indium and element M are mutually substituted. Therefore, the (M, Zn) layer may contain indium. Furthermore, the In layer may contain element M. Furthermore, the In layer may contain Zn. The layered structure is observed as a lattice image in a high-resolution TEM image, for example.

[0291] When the CAAC-OS film is subjected to structural analysis using, for example, an XRD apparatus, a peak indicating c-axis orientation is detected at or near 2θ=31° in out-of-plane XRD measurement using θ / 2θ scan. Note that the position of the peak indicating c-axis orientation (2θ value) may vary depending on the type and composition of the metallic elements constituting the CAAC-OS.

[0292] Furthermore, for example, in the electron diffraction pattern of the CAAC-OS film, multiple bright spots are observed, and the spots are observed at positions that are point-symmetric with respect to the spot of the incident electron beam that has passed through the sample (also called the direct spot).

[0293] When the crystalline region is observed from the specific direction, the lattice arrangement in the crystalline region is basically a hexagonal lattice, but the unit cell is not necessarily a regular hexagon and may be non-regular hexagonal. Furthermore, the distortion may have a pentagonal, heptagonal, or other lattice arrangement. In the CAAC-OS, no clear grain boundaries can be observed even near the distortion. This indicates that the formation of grain boundaries is suppressed by the distortion of the lattice arrangement. This is thought to be because the CAAC-OS can tolerate distortion due to the lack of close-packed arrangement of oxygen atoms in the ab-plane direction and the change in interatomic bond distance caused by metal atom substitution.

[0294] A crystal structure with clear grain boundaries is called polycrystalline. Grain boundaries act as recombination centers, trapping carriers and potentially causing a decrease in the on-state current and field-effect mobility of a transistor. Therefore, CAAC-OS, which lacks clear grain boundaries, is one of the crystalline oxides with a crystal structure suitable for use in the semiconductor layer of a transistor. Zn is preferred for use in CAAC-OS. For example, In-Zn oxide and In-Ga-Zn oxide are suitable because they can suppress the generation of grain boundaries more effectively than In oxide.

[0295] CAAC-OS is an oxide semiconductor with high crystallinity and no clear crystal grain boundaries. Therefore, it can be said that the CAAC-OS is less susceptible to a decrease in electron mobility due to crystal grain boundaries. Furthermore, since the crystallinity of an oxide semiconductor can be reduced by impurities or defects, the CAAC-OS can be said to be an oxide semiconductor with few impurities and defects (such as oxygen vacancies). Therefore, oxide semiconductors with CAAC-OS have stable physical properties. Therefore, oxide semiconductors with CAAC-OS are heat-resistant and highly reliable. Furthermore, the CAAC-OS is stable even under high temperatures (so-called thermal budgets) during the manufacturing process. Therefore, using a CAAC-OS for an OS transistor can increase the flexibility of the manufacturing process.

[0296] [nc-OS] The nc-OS has periodic atomic arrangement in a microscopic region (e.g., a region of 1 nm to 10 nm, particularly a region of 1 nm to 3 nm). In other words, the nc-OS has microcrystals. Note that the size of the microcrystals is, for example, 1 nm to 10 nm, particularly 1 nm to 3 nm, and therefore the microcrystals are also called nanocrystals. Furthermore, the nc-OS exhibits no regularity in the crystal orientation between different nanocrystals. Therefore, no orientation is observed throughout the film. Therefore, depending on the analytical method, the nc-OS may be indistinguishable from an a-like OS or an amorphous oxide semiconductor. For example, when a structural analysis of an nc-OS film is performed using an XRD apparatus, no peaks indicating crystallinity are detected in out-of-plane XRD measurements using θ / 2θ scanning. Furthermore, when an nc-OS film is subjected to electron diffraction (also known as selected-area electron diffraction) using an electron beam with a probe diameter larger than that of nanocrystals (e.g., 50 nm or larger), a halo-like diffraction pattern is observed. On the other hand, when electron diffraction (also called nanobeam electron diffraction) is performed on an nc-OS film using an electron beam with a probe diameter close to or smaller than the size of the nanocrystals (for example, 1 nm to 30 nm), an electron diffraction pattern can be obtained in which multiple spots are observed within a ring-shaped region centered on the direct spot.

[0297] [a-like OS] The a-like OS is an oxide semiconductor having a structure between the nc-OS and the amorphous oxide semiconductor. The a-like OS has a pore or low-density region. That is, the a-like OS has lower crystallinity than the nc-OS and CAAC-OS. Furthermore, the a-like OS has a higher hydrogen concentration in the film than the nc-OS and CAAC-OS.

[0298] <<Oxide semiconductor structure>> Next, the above-mentioned CAC-OS will be described in detail, which relates to the material composition.

[0299] [CAC-OS] CAC-OS is a material structure in which elements constituting a metal oxide are unevenly distributed in a size range of 0.5 nm to 10 nm, preferably 1 nm to 3 nm, or in the vicinity thereof. Note that, hereinafter, a metal oxide in which one or more metal elements are unevenly distributed and the regions containing the metal elements are mixed in a size range of 0.5 nm to 10 nm, preferably 1 nm to 3 nm, or in the vicinity thereof, is also referred to as a mosaic or patch state.

[0300] Furthermore, CAC-OS has a mosaic structure in which the material is separated into first and second regions, and the first regions are distributed throughout the film (hereinafter also referred to as a cloud structure). That is, CAC-OS is a composite metal oxide having a structure in which the first and second regions are mixed.

[0301] Here, the atomic ratios of In, Ga, and Zn to the metal elements constituting the CAC-OS in the In-Ga-Zn oxide are denoted as [In], [Ga], and [Zn], respectively. For example, in the CAC-OS in the In-Ga-Zn oxide, the first region is a region where [In] is larger than [In] in the composition of the CAC-OS film. The second region is a region where [Ga] is larger than [Ga] in the composition of the CAC-OS film. Alternatively, for example, the first region is a region where [In] is larger than [In] in the second region and [Ga] is smaller than [Ga] in the second region. The second region is a region where [Ga] is larger than [Ga] in the first region and [In] is smaller than [In] in the first region.

[0302] Specifically, the first region is a region whose main component is indium oxide, indium zinc oxide, or the like. The second region is a region whose main component is gallium oxide, gallium zinc oxide, or the like. In other words, the first region can be rephrased as a region whose main component is In. The second region can be rephrased as a region whose main component is Ga.

[0303] It should be noted that there are cases where a clear boundary between the first region and the second region cannot be observed.

[0304] For example, in the case of CAC-OS in In-Ga-Zn oxide, EDX mapping obtained using EDX (Energy Dispersive X-ray spectroscopy) confirms that the CAC-OS has a structure in which a region mainly composed of In (first region) and a region mainly composed of Ga (second region) are unevenly distributed and mixed.

[0305] When CAC-OS is used in a transistor, the conductivity due to the first region and the insulating property due to the second region act in a complementary manner, thereby providing the CAC-OS with a switching function (the ability to turn on and off). In other words, CAC-OS has a conductive function in part of the material and an insulating function in part of the material, and the material as a whole functions as a semiconductor. By separating the conductive function from the insulating function, both functions can be maximized. Therefore, by using CAC-OS in a transistor, a high on-current (I on ), high field-effect mobility (μ), and good switching behavior can be achieved.

[0306] Oxide semiconductors have a variety of structures, each with different characteristics. The oxide semiconductor of one embodiment of the present invention may include two or more of an amorphous oxide semiconductor, a polycrystalline oxide semiconductor, an a-like OS, a CAC-OS, an nc-OS, and a CAAC-OS.

[0307] <Transistors containing oxide semiconductors> Next, a case where the oxide semiconductor is used in a transistor will be described.

[0308] By using the oxide semiconductor for a transistor, a transistor with high field-effect mobility and high reliability can be realized.

[0309] An oxide semiconductor with a low carrier concentration is preferably used for a channel formation region of a transistor. For example, the carrier concentration of the channel formation region of an oxide semiconductor is 1×10 17 cm -3 Less than 1 × 10 15 cm -3 or less, more preferably 1 × 10 13 cm -3 Less than 1×10, more preferably 11 cm -3 or less, more preferably 1 × 10 10 cm -3Less than 1 x 10 -9 cm -3 The above is the case. Note that in order to reduce the carrier concentration of an oxide semiconductor film, the impurity concentration in the oxide semiconductor film may be reduced to reduce the density of defect states. In this specification and the like, a semiconductor having a low impurity concentration and a low density of defect states is referred to as a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor. Note that an oxide semiconductor having a low carrier concentration may also be referred to as a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor.

[0310] Furthermore, a highly purified intrinsic or substantially highly purified intrinsic oxide semiconductor film has a low density of defect states, and therefore the density of trap states may also be low.

[0311] Furthermore, charges trapped in the trap states of an oxide semiconductor take a long time to disappear and may behave like fixed charges. Therefore, a transistor in which a channel formation region is formed in an oxide semiconductor with a high density of trap states may have unstable electrical characteristics.

[0312] Therefore, in order to stabilize the electrical characteristics of a transistor, it is effective to reduce the impurity concentration in the oxide semiconductor. Furthermore, in order to reduce the impurity concentration in the oxide semiconductor, it is preferable to also reduce the impurity concentration in the adjacent film. Examples of impurities include hydrogen, nitrogen, alkali metals, alkaline earth metals, iron, nickel, and silicon.

[0313] <Impurities> Here, the influence of each impurity in an oxide semiconductor will be described.

[0314] When an oxide semiconductor contains silicon or carbon, which is one of the Group 14 elements, defect levels are formed in the oxide semiconductor. Therefore, the concentrations of silicon and carbon in the channel formation region of the oxide semiconductor and the silicon or carbon near the interface with the channel formation region of the oxide semiconductor (concentrations obtained by secondary ion mass spectrometry (SIMS)) are calculated to be 2×10 18atoms / cm 3 Less than or equal to 2 x 10 17 atoms / cm 3 The following applies.

[0315] Furthermore, when an oxide semiconductor contains an alkali metal or alkaline earth metal, defect states may be formed and carriers may be generated. Therefore, a transistor using an oxide semiconductor containing an alkali metal or alkaline earth metal is likely to have normally-on characteristics. For this reason, when the concentration of the alkali metal or alkaline earth metal in the channel formation region of the oxide semiconductor obtained by SIMS is set to 1×10 18 atoms / cm 3 Less than or equal to 2 x 10 16 atoms / cm 3 Do the following:

[0316] Furthermore, when nitrogen is contained in an oxide semiconductor, electrons serving as carriers are generated, the carrier concentration increases, and the semiconductor is likely to become n-type. As a result, a transistor using an oxide semiconductor containing nitrogen as a semiconductor tends to have normally-on characteristics. Alternatively, when nitrogen is contained in an oxide semiconductor, trap states may be formed. As a result, the electrical characteristics of the transistor may become unstable. For this reason, the nitrogen concentration in the channel formation region of the oxide semiconductor obtained by SIMS is set to 5×10 19 atoms / cm 3 Less than 5 x 10 18 atoms / cm 3 Less than 1×10, more preferably 18 atoms / cm 3 Less than 5 × 10, more preferably 17 atoms / cm 3 Do the following:

[0317] Furthermore, hydrogen contained in an oxide semiconductor may react with oxygen bonded to a metal atom to form water, which may form an oxygen vacancy. When hydrogen enters the oxygen vacancy, electrons serving as carriers may be generated. Furthermore, some of the hydrogen may bond with oxygen bonded to a metal atom to generate electrons serving as carriers. Therefore, a transistor using an oxide semiconductor containing hydrogen is likely to have normally-on characteristics. For this reason, it is preferable to reduce the amount of hydrogen in the channel formation region of the oxide semiconductor as much as possible. Specifically, the hydrogen concentration measured by SIMS in the channel formation region of the oxide semiconductor is 1×10 20 atoms / cm 3 Less than 5 x 10 19 atoms / cm 3 less than 1×10 19 atoms / cm 3 less than 5 × 10 18 atoms / cm 3 less than 1×10 18 atoms / cm 3 Make it less than.

[0318] When an oxide semiconductor with sufficiently reduced impurities is used for a channel formation region of a transistor, stable electrical characteristics can be obtained.

[0319] This embodiment mode can be appropriately combined with other embodiment modes described in this specification.

[0320] (Embodiment 3) In this embodiment mode, an example of a semiconductor wafer on which the semiconductor device or the like described in the above embodiment mode is formed and an electronic component in which the semiconductor device is incorporated will be described.

[0321] <Semiconductor wafer> First, an example of a semiconductor wafer on which semiconductor devices and the like are formed will be described with reference to FIG. 26A.

[0322] 26A includes a wafer 4801 and a plurality of circuit portions 4802 provided on the upper surface of wafer 4801. Note that on the upper surface of wafer 4801, a portion where circuit portions 4802 are not present is spacing 4803, which is an area for dicing.

[0323] The semiconductor wafer 4800 can be manufactured by forming a plurality of circuit portions 4802 on the surface of the wafer 4801 in a previous process. After that, the surface of the wafer 4801 opposite to the surface on which the plurality of circuit portions 4802 are formed may be ground to thin the wafer 4801. This process reduces warping of the wafer 4801 and allows for miniaturization of the component.

[0324] The next step is the dicing process. Dicing is performed along scribe lines SCL1 and SCL2 (sometimes called dicing lines or cutting lines) indicated by dashed lines. To facilitate the dicing process, spacing 4803 is preferably arranged so that multiple scribe lines SCL1 are parallel to each other, multiple scribe lines SCL2 are parallel to each other, and scribe lines SCL1 and SCL2 are perpendicular to each other.

[0325] By performing a dicing process, chips 4800a as shown in FIG. 26B can be cut out from semiconductor wafer 4800. Chip 4800a has wafer 4801a, circuit portion 4802, and spacing 4803a. It is preferable to make spacing 4803a as small as possible. In this case, it is sufficient that the width of spacing 4803 between adjacent circuit portions 4802 is approximately the same length as the cutting margin of scribe line SCL1 or the cutting margin of scribe line SCL2.

[0326] 26A 。 Note that the shape of the element substrate of one embodiment of the present invention is not limited to the shape of the semiconductor wafer 4800 shown in Figure 26A. For example, the semiconductor wafer may have a rectangular shape. The shape of the element substrate can be changed as appropriate depending on the manufacturing process and the device for manufacturing the element.

[0327] <Electronic components> 26C is a perspective view of an electronic component 4700 and a substrate (mounting substrate 4704) on which the electronic component 4700 is mounted. The electronic component 4700 shown in FIG. 26C includes a chip 4800a in a mold 4711. A semiconductor device according to one embodiment of the present invention or the like can be used as the chip 4800a.

[0328] 26C omits some parts to show the interior of electronic component 4700. Electronic component 4700 has lands 4712 on the outside of mold 4711. Lands 4712 are electrically connected to electrode pads 4713, and electrode pads 4713 are electrically connected to chip 4800a via wires 4714. Electronic component 4700 is mounted on, for example, a printed circuit board 4702. A plurality of such electronic components are combined and electrically connected on printed circuit board 4702 to complete mounted board 4704.

[0329] 26D shows a perspective view of electronic component 4730. Electronic component 4730 is an example of a SiP (System in Package) or MCM (Multi Chip Module). Electronic component 4730 has an interposer 4731 provided on a package substrate 4732 (printed circuit board), and a semiconductor device 4735 and multiple semiconductor devices 4710 provided on interposer 4731.

[0330] The semiconductor device 4710 may be, for example, a chip 4800a, the semiconductor device described in the above embodiment, or a high bandwidth memory (HBM). The semiconductor device 4735 may be an integrated circuit (semiconductor device) such as a CPU, a GPU, an FPGA, or a memory device.

[0331] A ceramic substrate, a plastic substrate, a glass epoxy substrate, or the like can be used for the package substrate 4732. A silicon interposer, a resin interposer, or the like can be used for the interposer 4731.

[0332] The interposer 4731 has multiple wirings and functions to electrically connect multiple integrated circuits with different terminal pitches. The multiple wirings are provided in a single layer or multiple layers. The interposer 4731 also functions to electrically connect the integrated circuits provided on the interposer 4731 to electrodes provided on the package substrate 4732. For these reasons, the interposer is sometimes called a "rewiring substrate" or "intermediate substrate." In some cases, through electrodes are provided in the interposer 4731, and the integrated circuits and the package substrate 4732 are electrically connected using the through electrodes. In addition, in a silicon interposer, TSVs (Through Silicon Vias) can also be used as through electrodes.

[0333] It is preferable to use a silicon interposer as the interposer 4731. Since a silicon interposer does not require an active element, it can be manufactured at a lower cost than an integrated circuit. On the other hand, since the wiring of a silicon interposer can be formed using a semiconductor process, it is easy to form fine wiring that is difficult to form with a resin interposer.

[0334] HBM requires many interconnects to achieve a wide memory bandwidth. Therefore, the interposer that implements HBM requires fine and high-density interconnects. Therefore, it is preferable to use a silicon interposer for implementing HBM.

[0335] Furthermore, in SiP or MCM using silicon interposers, a decrease in reliability due to differences in the expansion coefficient between the integrated circuit and the interposer is unlikely to occur. Furthermore, because the silicon interposer has a highly flat surface, poor connection between the integrated circuit mounted on the silicon interposer and the silicon interposer is unlikely to occur. In particular, it is preferable to use silicon interposers in 2.5D packages (2.5-dimensional packaging), in which multiple integrated circuits are arranged horizontally on the interposer.

[0336] A heat sink (heat sink) may be provided overlapping the electronic component 4730. When a heat sink is provided, it is preferable to align the height of an integrated circuit provided on the interposer 4731. For example, in the electronic component 4730 shown in this embodiment, it is preferable to align the height of the semiconductor device 4710 and the height of the semiconductor device 4735.

[0337] In order to mount electronic component 4730 on another substrate, electrodes 4733 may be provided on the bottom of package substrate 4732. Fig. 26D shows an example in which electrodes 4733 are formed with solder balls. By providing solder balls in a matrix on the bottom of package substrate 4732, BGA (Ball Grid Array) mounting can be achieved. Electrodes 4733 may also be formed with conductive pins. By providing conductive pins in a matrix on the bottom of package substrate 4732, PGA (Pin Grid Array) mounting can be achieved.

[0338] The electronic component 4730 can be mounted on other substrates using various mounting methods, including but not limited to BGA and PGA, such as a staggered pin grid array (SPGA), a land grid array (LGA), a quad flat package (QFP), a quad flat J-leaded package (QFJ), or a quad flat non-leaded package (QFN).

[0339] This embodiment mode can be appropriately combined with other embodiment modes described in this specification.

[0340] (Fourth embodiment) In this embodiment, application examples of a semiconductor device according to one embodiment of the present invention will be described.

[0341] The semiconductor device according to one embodiment of the present invention can be applied to, for example, memory devices of various electronic devices (e.g., information terminals, computers, smartphones, e-book readers, digital still cameras, video cameras, recording / playback devices, navigation systems, game consoles, and the like). It can also be used in image sensors, IoT (Internet of Things) devices, healthcare-related devices, and the like. Note that the term "computer" as used herein refers to a tablet computer, a notebook computer, a desktop computer, and a large-scale computer such as a server system.

[0342] 27A to 27J and 28A to 28E illustrate examples of electronic devices including an electronic component 4700 or an electronic component 4730 including the semiconductor device according to one embodiment of the present invention.

[0343] [mobile phone] 27A is a mobile phone (smartphone), which is one type of information terminal. The information terminal 5500 has a housing 5510 and a display unit 5511. As input interfaces, a touch panel is provided on the display unit 5511 and buttons are provided on the housing 5510.

[0344] By applying the semiconductor device according to one embodiment of the present invention, the information terminal 5500 can hold temporary files (for example, caches when using a web browser) generated when an application is executed.

[0345] [Wearable devices] 27B illustrates an information terminal 5900, which is an example of a wearable terminal. The information terminal 5900 includes a housing 5901, a display portion 5902, operation switches 5903 and 5904, a band 5905, and the like.

[0346] Like the above-described information terminal 5500, the wearable terminal can hold temporary files generated when an application is executed by applying a semiconductor device according to one embodiment of the present invention.

[0347] [Information terminal] 27C shows a desktop information terminal 5300. The desktop information terminal 5300 includes a main body 5301 of the information terminal, a display unit 5302, and a keyboard 5303.

[0348] Like the above-described information terminal 5500, the desktop information terminal 5300 can hold temporary files generated when an application is executed by applying a semiconductor device according to one embodiment of the present invention.

[0349] 27A to 27C are taken as examples of electronic devices, and are illustrated in Fig. 27A to 27C, respectively. However, information terminals other than smartphones, wearable terminals, and desktop information terminals can also be applied. Examples of information terminals other than smartphones, wearable terminals, and desktop information terminals include PDAs (Personal Digital Assistants), notebook information terminals, and workstations.

[0350] [electric appliances] 27D also illustrates an electric refrigerator-freezer 5800 as an example of an electrical appliance. Electric refrigerator-freezer 5800 has a housing 5801, a refrigerator compartment door 5802, a freezer compartment door 5803, etc. For example, electric refrigerator-freezer 5800 is an electric refrigerator-freezer compatible with IoT (Internet of Things).

[0351] The semiconductor device according to one embodiment of the present invention can be applied to an electric refrigerator-freezer 5800. The electric refrigerator-freezer 5800 can transmit and receive information such as food ingredients stored in the electric refrigerator-freezer 5800 and expiration dates of the food ingredients to an information terminal or the like via the Internet. The electric refrigerator-freezer 5800 can store a temporary file generated when transmitting the information in the semiconductor device.

[0352] In this example, an electric refrigerator-freezer has been described as an electrical appliance, but other electrical appliances include, for example, vacuum cleaners, microwave ovens, electric ovens, rice cookers, water heaters, induction cookers, water dispensers, heating and cooling appliances including air conditioners, washing machines, dryers, and audio-visual equipment.

[0353] [Game consoles] 27E shows a portable game machine 5200, which is an example of a game machine. The portable game machine 5200 includes a housing 5201, a display portion 5202, buttons 5203, and the like.

[0354] FIG. 27F further illustrates a home video game console 7500, an example of a video game console. The home video game console 7500 includes a main unit 7520 and a controller 7522. The controller 7522 can be connected to the main unit 7520 wirelessly or via a cable. Although not shown in FIG. 27F, the controller 7522 can include a display unit for displaying game images and an input interface other than buttons, such as a touch panel, a stick, a rotary knob, or a sliding knob. The shape of the controller 7522 is not limited to the shape shown in FIG. 27F, and the shape of the controller 7522 may be modified in various ways depending on the genre of the game. For example, in a shooting game such as an FPS (First Person Shooter), a controller shaped like a gun with a trigger as a button can be used. In a music game, for example, a controller shaped like a musical instrument or musical equipment can be used. Furthermore, the stationary game console may not use a controller, but may instead be equipped with a camera, depth sensor, microphone, etc., and be operated by the game player's gestures and / or voice.

[0355] Furthermore, the images of the above-mentioned game machines can be output by display devices such as television devices, personal computer displays, game displays, and head-mounted displays.

[0356] A low-power portable game machine 5200 or a low-power stationary game machine 7500 can be realized by applying the semiconductor device described in the above embodiments to the portable game machine 5200 or the stationary game machine 7500. Furthermore, the low power consumption can reduce heat generation from a circuit, thereby reducing the influence of heat on the circuit itself, peripheral circuits, and modules.

[0357] Furthermore, by applying the semiconductor device described in the above embodiments to the portable game console 5200 or the stationary game console 7500, temporary files and the like necessary for calculations occurring during game execution can be stored.

[0358] As an example of a game machine, a portable game machine is shown in FIG. 27E. Also, a home-use stationary game machine is shown in FIG. 27F. Note that the electronic device of one embodiment of the present invention is not limited to this. Examples of the electronic device of one embodiment of the present invention include arcade game machines installed in entertainment facilities (game centers, amusement parks, etc.) and pitching machines for batting practice installed in sports facilities.

[0359] [Moving object] The semiconductor device described in the above embodiment mode can be applied to automobiles, which are moving objects, and to the vicinity of the driver's seat of an automobile.

[0360] FIG. 27G illustrates an automobile 5700 as an example of a moving object.

[0361] An instrument panel that provides various information by displaying a speedometer, tachometer, mileage, fuel gauge, gear status, air conditioning settings, etc. may be provided around the driver's seat of the automobile 5700. A display device that shows this information may also be provided around the driver's seat.

[0362] In particular, the display device can compensate for the view obstructed by pillars and the blind spot of the driver's seat by displaying an image from an imaging device (not shown) provided on the automobile 5700, thereby improving safety. That is, by displaying an image from an imaging device provided on the outside of the automobile 5700, it is possible to compensate for the blind spot and improve safety.

[0363] The semiconductor device described in the above embodiment can temporarily store data, and therefore, for example, the semiconductor device can be used to store necessary temporary data in a system that performs automatic driving, road guidance, hazard prediction, or the like of the automobile 5700. The display device may be configured to display temporary data such as road guidance and hazard prediction. The display device may also be configured to store video images from a driving recorder installed in the automobile 5700.

[0364] Although an automobile is described above as an example of a moving body, the moving body is not limited to an automobile. For example, moving bodies can include trains, monorails, ships, and flying bodies (helicopters, unmanned aerial vehicles (drones), airplanes, and rockets).

[0365] [camera] The semiconductor device described in the above embodiment can be applied to a camera.

[0366] 27H shows a digital camera 6240, which is an example of an imaging device. The digital camera 6240 has a housing 6241, a display unit 6242, operation switches 6243, a shutter button 6244, etc., and is also equipped with a detachable lens 6246. Note that, here, the digital camera 6240 is configured so that the lens 6246 can be detached from the housing 6241 and replaced, but the lens 6246 and the housing 6241 may be integrated. The digital camera 6240 may also be configured so that a strobe device, a viewfinder, etc. can be separately attached.

[0367] A low-power digital camera 6240 can be realized by applying the semiconductor device described in the above embodiment modes to the digital camera 6240. Furthermore, low power consumption can reduce heat generation from the circuit, thereby reducing the influence of heat on the circuit itself, peripheral circuits, and modules.

[0368] [Video camera] The semiconductor device described in the above embodiment can be applied to a video camera.

[0369] 27I shows a video camera 6300, which is an example of an imaging device. The video camera 6300 has a first housing 6301, a second housing 6302, a display unit 6303, an operation switch 6304, a lens 6305, a connection unit 6306, and the like. The operation switch 6304 and the lens 6305 are provided in the first housing 6301, and the display unit 6303 is provided in the second housing 6302. The first housing 6301 and the second housing 6302 are connected by the connection unit 6306, and the angle between the first housing 6301 and the second housing 6302 can be changed by the connection unit 6306. The image on the display unit 6303 may be switched according to the angle between the first housing 6301 and the second housing 6302 at the connection unit 6306.

[0370] When recording video captured by the video camera 6300, it is necessary to encode the video according to the data recording format. By using the semiconductor device described above, the video camera 6300 can store temporary files generated during encoding.

[0371] [ICD] The semiconductor device described in the above embodiment can be applied to an implantable cardioverter defibrillator (ICD).

[0372] 27J is a cross-sectional schematic diagram showing an example of an ICD. ICD main body 5400 has at least battery 5401, electronic components 4700, a regulator, a control circuit, antenna 5404, wire 5402 to the right atrium, and wire 5403 to the right ventricle.

[0373] The ICD body 5400 is surgically placed in the body, and the two wires are passed through the subclavian vein 5405 and superior vena cava 5406 of the human body so that one wire tip is placed in the right ventricle and the other wire tip is placed in the right atrium.

[0374] The ICD main body 5400 functions as a pacemaker and paces the heart when the heart rate falls outside a specified range. If the heart rate does not improve with pacing (fast ventricular tachycardia, ventricular fibrillation, etc.), treatment with an electric shock is administered.

[0375] The ICD main body 5400 must constantly monitor the heart rate in order to properly perform pacing and administer electric shocks. Therefore, the ICD main body 5400 has a sensor for detecting the heart rate. The ICD main body 5400 can also store in the electronic component 4700 heart rate data acquired by the sensor, the number of pacing treatments performed, the duration, and so on.

[0376] Furthermore, the antenna 5404 can receive power, which is then charged into the battery 5401. Furthermore, the ICD main body 5400 can improve safety by having multiple batteries. Specifically, even if some of the batteries in the ICD main body 5400 become unusable, the remaining batteries can continue to function, so the ICD main body 5400 can also function as an auxiliary power source.

[0377] In addition to the antenna 5404 that can receive power, an antenna that can transmit physiological signals may be provided, and a system for monitoring cardiac activity may be configured in which physiological signals such as pulse rate, respiratory rate, heart rate, and body temperature can be confirmed on an external monitor device.

[0378] [PC expansion device] The semiconductor device described in the above embodiment can be applied to an expansion device for a computer such as a PC (Personal Computer) or an information terminal.

[0379] Figure 28A shows an example of such an expansion device: a portable expansion device 6100 that is external to a PC and equipped with a chip capable of storing information. The expansion device 6100 can store information using the chip by connecting to a PC via, for example, a USB (Universal Serial Bus). Note that while Figure 28A shows a portable expansion device 6100, the expansion device according to one aspect of the present invention is not limited to this; for example, it may be a relatively large expansion device equipped with a cooling fan or the like.

[0380] The expansion device 6100 has a housing 6101, a cap 6102, a USB connector 6103, and a board 6104. The board 6104 is housed in the housing 6101. The board 6104 is provided with circuits that drive the semiconductor devices described in the above embodiments. For example, the board 6104 is equipped with an electronic component 4700 and a controller chip 6106. The USB connector 6103 functions as an interface for connecting to an external device.

[0381] [SD card] The semiconductor device described in the above embodiment can be applied to an SD card which can be attached to electronic devices such as information terminals and digital cameras.

[0382] FIG. 28B is a schematic diagram of the external appearance of an SD card, and FIG. 28C is a schematic diagram of the internal structure of the SD card. The SD card 5110 has a housing 5111, a connector 5112, and a substrate 5113. The connector 5112 functions as an interface for connecting to an external device. The substrate 5113 is housed in the housing 5111. A semiconductor device and a circuit for driving the semiconductor device are provided on the substrate 5113. For example, an electronic component 4700 and a controller chip 5115 are attached to the substrate 5113. Note that the circuit configurations of the electronic component 4700 and the controller chip 5115 are not limited to those described above, and the circuit configurations may be changed as appropriate depending on the situation. For example, the write circuit, row driver, read circuit, and the like provided in the electronic component may be incorporated into the controller chip 5115 rather than the electronic component 4700.

[0383] The capacity of the SD card 5110 can be increased by providing the electronic component 4700 also on the back side of the substrate 5113. A wireless chip with a wireless communication function may be provided on the substrate 5113. This allows wireless communication between an external device and the SD card 5110, and enables reading and writing of data from and to the electronic component 4700.

[0384] [SSD] The semiconductor device described in the above embodiment can be applied to an SSD (Solid State Drive) that can be attached to electronic devices such as information terminals.

[0385] FIG. 28D is a schematic diagram of the external appearance of an SSD, and FIG. 28E is a schematic diagram of the internal structure of the SSD. The SSD 5150 has a housing 5151, a connector 5152, and a circuit board 5153. The connector 5152 functions as an interface for connecting to an external device. The circuit board 5153 is housed in the housing 5151. The circuit board 5153 is provided with a storage device and a circuit for driving the storage device. For example, the circuit board 5153 is equipped with an electronic component 4700, a memory chip 5155, and a controller chip 5156. The capacity of the SSD 5150 can be increased by providing an electronic component 4700 on the back side of the circuit board 5153. The memory chip 5155 incorporates a work memory. For example, a DRAM chip may be used for the memory chip 5155. The controller chip 5156 incorporates a processor, an ECC circuit, and the like. The circuit configurations of the electronic component 4700, the memory chip 5155, and the controller chip 5115 are not limited to those described above, and may be changed as appropriate depending on the situation. For example, the controller chip 5156 may also be provided with a memory that functions as a work memory.

[0386] [Calculator] 29A is an example of a large-scale computer. The computer 5600 has a rack 5610 in which a plurality of rack-mounted computers 5620 are stored.

[0387] Computer 5620 can have the configuration shown in the perspective view in Fig. 29B, for example. In Fig. 29B, computer 5620 has motherboard 5630, which has a plurality of slots 5631 and a plurality of connection terminals. PC card 5621 is inserted into slot 5631. In addition, PC card 5621 has connection terminal 5623, connection terminal 5624, and connection terminal 5625, which are each connected to motherboard 5630.

[0388] PC card 5621 shown in FIG. 29C is an example of a processing board equipped with a CPU, a GPU, a storage device, etc. PC card 5621 includes board 5622. Board 5622 includes connection terminal 5623, connection terminal 5624, connection terminal 5625, semiconductor device 5626, semiconductor device 5627, semiconductor device 5628, and connection terminal 5629. Note that FIG. 29C illustrates semiconductor devices other than semiconductor device 5626, semiconductor device 5627, and semiconductor device 5628, but for these semiconductor devices, the following descriptions of semiconductor device 5626, semiconductor device 5627, and semiconductor device 5628 may be referred to.

[0389] The connection terminal 5629 has a shape that allows it to be inserted into a slot 5631 of a motherboard 5630, and the connection terminal 5629 functions as an interface for connecting the PC card 5621 and the motherboard 5630. An example of the standard for the connection terminal 5629 is PCIe.

[0390] Connection terminals 5623, 5624, and 5625 can be interfaces for supplying power to PC card 5621, inputting signals, and the like. They can also be interfaces for outputting signals calculated by PC card 5621, and the like. Examples of standards for connection terminals 5623, 5624, and 5625 include USB (Universal Serial Bus), SATA (Serial ATA), and SCSI (Small Computer System Interface). Examples of standards for outputting video signals from connection terminals 5623, 5624, and 5625 include HDMI (registered trademark).

[0391] The semiconductor device 5626 has a terminal (not shown) for inputting and outputting signals, and the semiconductor device 5626 and the board 5622 can be electrically connected by inserting the terminal into a socket (not shown) provided on the board 5622.

[0392] The semiconductor device 5627 has a plurality of terminals, and the semiconductor device 5627 can be electrically connected to the board 5622 by, for example, reflow soldering the terminals to wiring provided on the board 5622. Examples of the semiconductor device 5627 include an FPGA (Field Programmable Gate Array), a GPU, and a CPU. For example, the electronic component 4730 can be used as the semiconductor device 5627.

[0393] The semiconductor device 5628 has a plurality of terminals, and the semiconductor device 5628 can be electrically connected to the board 5622 by, for example, reflow soldering the terminals to wiring on the board 5622. The semiconductor device 5628 can be, for example, a memory device. The electronic component 4700 can be used as the semiconductor device 5628.

[0394] The computer 5600 can also function as a parallel computer. By using the computer 5600 as a parallel computer, it is possible to perform large-scale calculations required for, for example, learning and inference in artificial intelligence.

[0395] By using the semiconductor device of one embodiment of the present invention in the various electronic devices described above, the electronic devices can be miniaturized and / or consume less power. Furthermore, the semiconductor device of one embodiment of the present invention consumes less power, which reduces heat generation from the circuit. Therefore, adverse effects of the heat generation on the circuit itself, peripheral circuits, and modules can be reduced. Furthermore, by using the semiconductor device of one embodiment of the present invention, electronic devices that operate stably even in high-temperature environments can be realized. Therefore, the reliability of the electronic devices can be improved.

[0396] This embodiment mode can be appropriately combined with other embodiment modes described in this specification. [Example]

[0397] In this embodiment, the sizes of a 1T1F type memory cell using a Si transistor (SiFET) and a ferroelectric capacitor (FE) and a 1T1F type memory cell using an OS transistor (OSFET) and an FE will be described.

[0398] Figure 30 shows the circuit diagram, design parameters, and layout diagram for a memory cell using SiFET and FE, and a memory cell using OSFET and FE. The technology node for SiFET was assumed to be the 130 nm node, and the technology nodes for OSFET were assumed to be the 55 nm node and 7 nm node.

[0399] The channel length L and channel width W of a SiFET at the 130 nm node require L of approximately 350 nm and W of approximately 300 nm, assuming an available voltage of 3.3 V. The channel area at this time is 0.105 μm 2 When the available voltage is 3.3 V, the dielectric thickness that can realize sufficient polarization reversal in FE is estimated to be approximately 8 to 11 nm.

[0400] For the 55nm node OSFET, even if L is 60nm and W is 60nm, the usable voltage can be 4.5V. In this case, the channel area is 0.0036μm 2 In addition, for an OSFET at the 7-nm node, even if L is 30 nm and W is 30 nm, the usable voltage can be 4.5 V. The channel area at this time is 0.0009 μm 2 In addition, when the available voltage is 4.5 V, the thickness of the dielectric that can realize sufficient polarization reversal in FE is estimated to be approximately 10 to 12.5 nm.

[0401] In memory cells using SiFETs fabricated at the 130nm node, the memory size is 0.5μm 2 , FE size is 0.112 μm 2 In addition, it is estimated that the memory size of a memory cell using OSFET manufactured at the 55 nm node will be 0.153 μm 2 , FE size is 0.05 μm 2In addition, it is estimated that the memory size of a memory cell using OSFET fabricated at the 7 nm node will be 0.018 μm 2 , FE size is 0.004 μm 2 It is estimated to be.

[0402] From these facts, it can be said that the memory cell size is determined almost entirely by the performance of the transistor. As shown in the layout diagram in Figure 30, by using OSFETs in the memory cells, the memory cell size can be reduced to about 1 / 3, or even 1 / 8.

[0403] Furthermore, because OSFETs have a high dielectric strength between the source and drain, the usable voltage can be increased even with small L and W. This allows for sufficient voltage to be supplied to reverse the polarization of the FE. Since memory cells using OSFETs can increase the usable voltage, the film thickness of the ferroelectric dielectric that makes up the FE can be increased, thereby increasing 2Pr. This improves the reliability of the memory cell. [Example]

[0404] In this example, the integration of a 1T1F type memory cell having one transistor (FET) and one ferroelectric capacitor (FE) will be described. FIG. 31A1 is a cross-sectional view of the memory cell, and FIG. 31A2 is a plan view of the memory cell shown in FIG. 31A1. FIG. 31B1 is a cross-sectional view of the memory cell, and FIG. 31B2 is a plan view of the memory cell shown in FIG. 31B1. FIG. 31C1 is a cross-sectional view of the memory cell, and FIG. 31C2 is a plan view of the memory cell shown in FIG. 31C1.

[0405] Figures 31A1 and 31A2 show memory cells with a relatively small 2Pr of FE. In this case, the size of the FE becomes large, preventing an increase in integration density. To increase integration density, cylindrical FEs, as shown in Figures 31B1 and 31B2, are known. However, cylindrical FEs have problems such as a complex manufacturing process and difficulty in controlling the crystallinity of the ferroelectric. As shown in Figures 31C1 and 31C2, when 2Pr is large, the size of the FE can be reduced.

[0406] As the size of the FE decreases, the wiring capacitance (parasitic capacitance) of the bit line (wiring BL) also needs to be reduced. Fig. 31D1 shows an example in which a memory cell array 81 and a peripheral driving circuit 82 are arranged side by side in a plane. In the configuration shown in Fig. 31D1, it is difficult to reduce the wiring capacitance of the bit line.

[0407] 31D2 shows an example in which the memory cell array 81 is arranged on top of the peripheral drive circuit 82. By arranging the memory cell array 81 on top of the peripheral drive circuit 82, the bit lines become shorter and the wiring capacitance of the bit lines can be reduced. In addition, the occupied area can be reduced, which is suitable for integrating memory cells.

[0408] Here, consider the case where 16 memory cells (16 cells) are connected to one bit line of 4.8 μm in length (see FIG. 31E). If the wiring capacitance of the bit line per 1 μm is 0.5 fF / μm, the wiring capacitance of the bit line of 4.8 μm in length is 2.4 fF. If 2Pr of FE is 40 μC / cm 2 The size of the FE is 0.004 μm. 2 In this case, the potential of the bit line changes by 0.7V when the charge amount is 1.6fC.

[0409] Figure 31F shows the relationship between the number of memory cells electrically connected to one bit line and the read voltage. It can be seen that the read voltage decreases as the number of memory cells increases. For miniaturization and high integration of memory cell arrays, it is preferable to use OSFETs rather than SiFETs. [Explanation of symbols]

[0410] 10: memory cell, 20: memory array, 21: driver circuit, 22: PSW, 23: PSW, 31: peripheral circuit, 32: control circuit, 33: voltage generation circuit, 41: peripheral circuit, 42: row decoder, 43: row driver, 44: column decoder, 45: column driver, 46: sense amplifier, 47: input circuit, 48: output circuit, 51: curve, 52: curve, 55: polarization, 100: semiconductor device, 120: transistor, 130: capacitance element

Claims

[Claim 1] a memory cell including a transistor and a capacitive element including a ferroelectric; first to third wirings, a gate of the transistor electrically connected to the first wiring; one of the source and the drain of the transistor is electrically connected to the second wiring; the other of the source and the drain of the transistor is electrically connected to one electrode of the capacitor element; the other electrode of the capacitance element is electrically connected to the third wiring; a function of supplying a potential to the first wiring to turn on or off the transistor; a function of supplying a first potential or a second potential to the second wiring; a function of supplying a third potential, a fourth potential, or a fifth potential to the third wiring; A semiconductor device comprising:

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