Enhanced RF linac coil inductor including internal support structure

Abstract

To provide an internal support structure and a cooling structure for a coil inductor used in a LINAC.SOLUTION: A coil inductor includes one or more tubes, each including an internal support structure to stiffen the tube. Supporting the tube reduces vibration and allows the coil to resonate at its natural frequency. In some embodiments, the internal support structure includes one or more internal walls. The internal walls can be used to form multiple fluid channels that allow coolant to flow through the tubes. An end cap can be disposed at a second end of the tube to allow fluid communication between the supply and return fluid channels. A first end of the one or more tubes can be connected to a manifold that includes supply and return ports for coolant to flow through.SELECTED DRAWING: Figure 2A

Description

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims priority to U.S. Patent Application No. 17 / 479,313, filed September 20, 2021, the disclosure of which is incorporated herein by reference in its entirety. [Technical Field]

[0002] FIELD OF THE DISCLOSURE Embodiments of the present disclosure relate to coils having internal support structures, and more particularly to coils for use in LINACs. [Background technology]

[0003] The fabrication of semiconductor devices involves several separate and complex processes. In some of these processes, ions are accelerated toward a workpiece. These ions can be accelerated in a variety of ways. For example, an electric field is commonly used to attract and accelerate positively charged ions.

[0004] In certain embodiments, a linear accelerator (LINAC) may be used to accelerate the ions. In certain embodiments, the LINAC includes multiple RF cavities, each of which serves to further accelerate the ions passing through it. The LINAC may operate optimally when each of the RF cavities is energized at its respective resonant frequency.

[0005] This energy is typically provided by a coil wound around itself to form an inductor. The inductor provides the high voltage required by the LINAC. The coil is typically hollow and can become very hot due to the energy generated. Therefore, in some embodiments, a Teflon sleeve is inserted into the coil to allow a cooling fluid to flow through the coil. While this cools the coil, other problems can arise. For example, the Teflon sleeve does not provide structural support. Therefore, the coil may be prone to vibration. It is known that the spacing between the coils determines capacitance and inductance. Vibrations tend to change this spacing, which can result in a change in the coil's natural frequency. For example, the natural frequency is given by 1 / (2π√LC). Therefore, changing the ratio of L to C necessarily changes the coil's natural frequency. In normal operation, an RF generator supplies power at a constant frequency. If vibrations are introduced into the coil, the coil's natural frequency will shift as described by the previous equation. When this happens, the RF generator now supplies power at a frequency different from the optimum frequency of the resonant coil, and the induced voltage in the coil, the Q of the system, and the efficiency are all reduced, which can result in lower beam current and final energy than desired.

[0006] It would therefore be advantageous to have a system that could provide structural support for coils used in LINACs. Furthermore, it would be advantageous if this system was easily manufactured. Summary of the Invention

[0007] A coil inductor for use in a LINAC is disclosed. The coil inductor includes one or more tubes, each including an internal support structure to stiffen the tube. Supporting the tube reduces the amount of vibration and allows the coil to resonate at its natural frequency. In some embodiments, the internal support structure includes one or more internal walls. The internal walls can be used to form multiple fluid channels that allow coolant to flow through the tubes. An end cap can be disposed at a second end of the tube to allow fluid communication between the supply and return fluid channels. A first end of the one or more tubes can be connected to a manifold that includes supply and return ports for coolant to flow through.

[0008] According to one embodiment, a resonant coil for use in a linear accelerator (LINAC) is disclosed. The resonant coil includes a tube having a first end, a second end, and a helical-shaped section, and the interior of the tube includes one or more inner walls to provide structural support to the tube. In some embodiments, the exterior of the tube is plated with copper. In certain embodiments, the one or more inner walls divide the interior of the tube into multiple fluid channels. In some embodiments, a manifold is attached to the first end of the tube and has a supply port and a return port. In certain embodiments, the manifold is configured so that the supply port communicates with one or more of the multiple fluid channels, referred to as the supply fluid channel, and the return port communicates with another one or more of the multiple fluid channels, referred to as the return fluid channel. In some embodiments, an end cap is disposed at the second end of the tube to enable fluid communication between the supply fluid channel and the return fluid channel. In certain embodiments, the interior of the tube further includes a central conduit physically isolated from the multiple fluid channels. In some embodiments, a sensor is disposed within the central conduit near the second end. In some embodiments, a tension wire is attached to the end cap near the second end and passes through the central conduit to the manifold.

[0009] According to another embodiment, an ion implantation system is disclosed that includes an ion source, a mass spectrometer, a buncher, and a LINAC including a plurality of accelerating electrodes, a plurality of cavities, each cavity including an excitation coil, a resonant coil as described above, a second end of the resonant coil in communication with one of the plurality of accelerating electrodes, and a plurality of RF generators, each in communication with a respective excitation coil.

[0010] According to another embodiment, a resonant coil for use in a linear accelerator (LINAC) is disclosed. The resonant coil comprises a first tube having a first end, a second end, and a helical-shaped section, and a second tube having a first end, a second end, and a helical-shaped section, wherein the interior of the first tube and the interior of the second tube each include one or more internal walls for providing structural support to the first tube and the second tube. The resonant coil further comprises a manifold, where the first end of the first tube and the first end of the second tube converge at the manifold. In some embodiments, the helical-shaped section of the first tube and the helical-shaped section of the second tube are concentric. In some embodiments, the one or more internal walls divide the interior of the first tube and the interior of the second tube into multiple fluid channels. In some embodiments, the manifold is configured such that the supply port communicates with one or more of the plurality of fluid channels, referred to as supply channels, and the return port communicates with one or more of the plurality of fluid channels, referred to as return channels. In some embodiments, end caps are disposed at the second ends of the first tube and the second tube to enable fluid communication between the supply and return channels. In certain embodiments, the interior of the first tube further comprises a central conduit physically isolated from the plurality of fluid channels. In some embodiments, a sensor is disposed within the central conduit near the second end of the first tube. In some embodiments, a tension wire is attached to the end cap near the second end of the first tube and passes through the central conduit to the manifold.

[0011] According to another embodiment, an ion implantation system is disclosed that includes an ion source, a mass spectrometer, a buncher, and a LINAC including a plurality of accelerating electrodes, a plurality of cavities, each cavity including an excitation coil and the resonant coil described above, the second end of the first tube and the second end of the second tube each communicating with one of the plurality of accelerating electrodes, and a plurality of RF generators each communicating with a respective excitation coil.

[0012] For a better understanding of the present disclosure, reference is made to the accompanying drawings, which are incorporated herein by reference. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 1 illustrates a block diagram of a linear accelerator (LINAC) based ion implantation system according to one embodiment. [Figure 2A-B] 2A and 2B show two views of the resonant coil according to the embodiment of FIG. 1; [Figure 3A] 3 illustrates a cross section of the resonant coil of FIG. 2 according to one embodiment. [Figure 3B] 3 shows a cross section of the resonant coil of FIG. 2 according to another embodiment. [Figure 4A-C] 1 shows various views of a manifold. [Figure 5A-B] 1A-1C illustrate various views of an end cap according to one embodiment. [Figure 6] 1 shows a block diagram of a LINAC-based ion implantation system according to another embodiment. [Figure 7A-B] 7 shows two views of the resonant coil according to the embodiment of FIG. 6. DETAILED DESCRIPTION OF THE INVENTION

[0014] A linear accelerator (LINAC) may be used to accelerate ions toward a workpiece. FIG. 1 illustrates an ion implantation system 1. The ion implantation system 1 includes an ion source 10. The ion source 10 may be any suitable ion source, such as, but not limited to, an indirectly heated cathode (IHC) source, a Bernas source, a capacitively coupled plasma source, an inductively coupled plasma source, or other suitable device. The ion source 10 has an aperture through which ions may be extracted from the ion source 10. The ions may be extracted from the ion source 10 by applying a negative voltage to one or more electrodes located outside the ion source 10 near the extraction aperture.

[0015] The ions can then enter a mass spectrometer 30, which can be a magnet that allows ions with a specific mass-to-charge ratio to pass. The mass spectrometer 30 is used to separate out only the desired ions. The desired ions then enter a linear accelerator 40.

[0016] The desired ions then enter the buncher 20, which forms a group or bunch of ions that move together. The buncher 20 may include multiple drift tubes, at least one of which may be supplied with an AC voltage. One or more of the other drift tubes may be grounded. The AC-supplied drift tubes serve to accelerate and manipulate the ion beam into separate bunches.

[0017] The linear accelerator 40 includes one or more cavities 41. Each cavity 41 includes a resonant coil 42 that can be excited by an electromagnetic field generated by an excitation coil 45. The excitation coils 45 are disposed within the cavity 41 along with their respective resonant coils 42. An excitation voltage, which can be an RF signal, can be applied to the excitation coils 45. The excitation voltage can be supplied by a respective RF generator 44. Each excitation coil 45 is tuned to a single resonant frequency. In other words, the excitation voltage applied to each excitation coil 45 can be independent of the excitation voltages supplied to the other excitation coils 45. Each excitation voltage is preferably modulated with the resonant frequency of its respective cavity 41. The magnitude and phase of the excitation voltage can be determined and changed by a controller 90 in communication with the RF generator 44. By disposing the resonant coils 42 within the cavity 41, the magnitude of the excitation voltage can be increased or the phase can be shifted while keeping the amplitude the same.

[0018] When an excitation voltage is applied to the excitation coil 45, a voltage is induced in the resonant coil 42. The excitation voltage may be an RF voltage having a frequency between 13.56 MHz and 27 MHz. Furthermore, the amplitude of the voltage may be between 9 kV and 170 kV. As a result, the resonant coil 42 in each cavity 41 is driven by a sinusoidal voltage. Each resonant coil 42 may be electrically connected to two acceleration electrodes 43. The two acceleration electrodes 43 may be driven by opposite phases of the sinusoidal voltage. In other words, the two acceleration electrodes 43 are driven by the voltage across the resonant coil 42. Ions pass through an aperture in each acceleration electrode 43.

[0019] The entry of a bunch into a particular accelerating electrode 43 is speeded so that the potential of the accelerating electrode 43 becomes negative as the bunch approaches the accelerating electrode 43, but switches to positive as the bunch passes the accelerating electrode 43. In this way, the bunch is accelerated as it enters the accelerating electrode 43 and repelled as it leaves the accelerating electrode 43, resulting in an acceleration of the bunch. This process is repeated for each accelerating electrode 43 in the linear accelerator 40. Each accelerating electrode increases the acceleration of the ions, which can be measured.

[0020] After exiting the linear accelerator 40, the bunch is injected into a workpiece 50.

[0021] Of course, the ion implantation system 1 may include other components, such as an electrostatic scanner for generating a ribbon beam, a quadrupole element, additional electrodes for accelerating or decelerating the beam, and other elements.

[0022] A controller 90 can be used to control the system. The controller 90 can include a processing unit 91 and a memory device 92. The processing unit 91 can be a microprocessor, a signal processor, a customized FPGA (Field Programmable Gate Array), or other suitable unit. The memory device 92 can be a non-volatile memory, such as a flash ROM, an electrically erasable ROM, or other suitable device. In other embodiments, the memory device 92 can be a volatile memory, such as a RAM or a DRAM. The memory device 92 contains instructions that enable the controller 90 to control the linear accelerator 40.

[0023] A representative resonant coil 42 is shown in Figures 2A-2B. Figure 2A is a perspective view, and Figure 2B shows the resonant coil 42 mounted within the cavity 41. The resonant coil 42 may be constructed of materials such as aluminum, stainless steel, titanium, or other metals. In certain embodiments, the resonant coil 42 may have a circular cross section. As previously described, the resonant coil 42 includes two ends that are connected to two accelerating electrodes 43.

[0024] The resonant coil 42 may include a first tube 100 and a second tube 110. A first end 101 of the first tube 100 and a first end 111 of the second tube 110 converge at a manifold 120. A second end 102 of the first tube 100 and a second end 112 of the second tube 110 form two exposed tips.

[0025] Each of the first tube 100 and the second tube 110 includes a spiral-shaped section 105. The spiral-shaped section 105 may include one or more loops. For example, there may be 1 to 2.5 loops in each spiral-shaped section 105, although other numbers are possible. Furthermore, the spiral-shaped section 105 of the first tube 100 and the spiral-shaped section 115 of the second tube 110 overlap each other to form an inductor. In other words, the spiral-shaped section includes one or more loops having a center, and the loops of the two spiral-shaped sections are concentric.

[0026] Of course, the resonant coil 42 may have other shapes and configurations.

[0027] Manifold 120 is used to hold first tube 100 and second tube 110 and also includes channels used to form supply and return fluid channels. Figure 4A is a perspective view of the top of manifold 120, Figure 4B is a cross-sectional view of manifold 120 taken along line A-A', and Figure 4C is a perspective view of the bottom of manifold 120.

[0028] In one embodiment, manifold 120 has two ports: supply port 121 and return port 122. As best seen in FIG. 4C , the manifold includes a first internal junction 123 for directing fluid from supply port 121 to a portion of the fluid channels in first tube 100 and a portion of the fluid channels in second tube 110. Similarly, as best seen in FIG. 4A , manifold 120 includes a second internal junction 124 for directing the remaining fluid channels in first tube 100 and second tube 110 to return port 122. In other embodiments, manifold 120 can include two supply ports 121 and two return ports 122, thereby eliminating the use of an internal junction.

[0029] FIG. 3A illustrates a representative cross-section of a resonant coil 42 according to one embodiment. The interior of the resonant coil 42 is divided into multiple distinct fluid channels 150. The fluid channels 150 can be physically separated from one another along the entire length of the tube, as described in more detail below, and can connect to one another only at the second end. In certain embodiments, the number of fluid channels 150 is even, such that there are an equal number of fluid channels 150 supplying coolant from the manifold 120 (referred to as supply fluid channels) and fluid channels 150 returning the coolant to the manifold 120 (referred to as return fluid channels). These fluid channels 150 are formed by an interior structure having one or more interior walls 140 that extend from one portion of the inner diameter 109 of the resonant coil 42 to another portion of the inner diameter 109. In certain embodiments, the interior walls 140 pass through a center 141 of a circle defining the cross-section of the resonant coil 42. Additionally, in certain embodiments, the interior walls 140 are straight, such that each interior wall 140 is a diameter of a circle.

[0030] In other embodiments, the number of fluid channels 150 may be an odd number. In this embodiment, the inner walls 140 may be radii of a circle, extending from one portion of the inner diameter 109 to the center 141 of the circle. In this case, each inner wall 140 may connect to another inner wall 140 at the center 141 of the circle. For example, if there is an odd number of fluid channels of the same size, each inner wall 140 may extend from the inner diameter 109 to the center 141 of the circle and connect to another inner wall 140 there.

[0031] In yet another embodiment, the inner wall 140 may not pass through the center 141 of the circle. For example, the circle may be divided into separate fluid channels by multiple parallel inner walls.

[0032] 3A shows a cross section in which there are an even number of fluid channels 150 defined by two interior walls 140 extending from one portion of the inner diameter 109 through the center 141 of the circle to a second portion of the inner diameter 109. Furthermore, in this embodiment, the interior walls 140 are equally spaced apart so that all of the fluid channels 150 have the same cross-sectional area.

[0033] In certain embodiments, the sum of the cross-sectional areas of all of the supply fluid channels can be equal to the sum of the cross-sectional areas of all of the return fluid channels, and in some embodiments, the total cross-sectional area of ​​the supply fluid channels can be slightly greater than the total cross-sectional area of ​​the return fluid channels.

[0034] In all embodiments, the inner wall 140 is made of the same material as, and is manufactured simultaneously with, the resonant coil 42. For example, in one embodiment, the resonant coil 42 may be extruded in the pattern shown in FIG. 3A. In other embodiments, the resonant coil 42 may be manufactured using additive manufacturing (AM), where the inner wall 140 is manufactured simultaneously. In this manner, the inner wall 140 provides structural support for the resonant coil 42 and acts to damp any vibrations.

[0035] The tube of the resonant coil 42 has an outer diameter and an inner diameter, and each inner wall 140 may have a thickness. The thickness of the inner wall 140 may be a function of the inner diameter. In other words, as the inner diameter increases, it may be advantageous to thicken the inner wall to maintain structural rigidity. In certain embodiments, the inner diameter of the resonant coil 42 may be between 0.75 and 1.25 inches. In this configuration, the thickness of the inner wall may be between 0.05 and 0.050 inches. Of course, other dimensions are possible.

[0036] 3B shows a cross section of a tube of resonant coil 42 according to another embodiment. In this embodiment, there is a central conduit 160 within resonant coil 42. In certain embodiments, this central conduit 160 does not contact inner diameter 109. The central conduit 160 is physically separate from the other fluid channels 150. In some embodiments, as shown in FIG. 3B, the central conduit 160 is formed around the center 141 of resonant coil 42 in the region where the inner walls 140 meet.

[0037] The central conduit 160 can be used for a variety of functions. Unlike the other fluid channels, the central conduit can be isolated so that coolant does not flow through it. In one embodiment, a sensor 161 can be located at or near the second end 102 of the first tube 100 and / or the second end 112 of the second tube 110. The sensor 161 can be a temperature sensor, a voltage sensor, or another type of sensor. The electrical connection for the sensor 161 can run through the central conduit 160 to the manifold 120. Once outside the manifold 120, the electrical connection can be connected to an appropriate circuit or device to measure the parameter being monitored by the sensor 161.

[0038] In another embodiment, a tensioning wire may be disposed within the central conduit 160. This tensioning wire may be used to increase or decrease the stiffness of the resonant coil 42. For example, one end of the tensioning wire may be attached to the end cap 170 of the second end 102, and the other end of the tensioning wire may be accessible at the manifold 120. By pulling on the end of the tensioning wire at the manifold 120, the stiffness of the resonant coil 42 may be increased.

[0039] In the particular embodiment shown in Figure 3A, the resonant coil 42 has four fluid channels: the supply fluid channels are positioned adjacent to each other, as are the return fluid channels.

[0040] Additionally, as shown in Figures 5A-5B, end caps 170 may be disposed on the second end 102 of the first tube 100 and the second end 112 of the second tube 110. Figure 5A shows a perspective view, and Figure 5B shows a cross-sectional view. The end caps 170 are configured to allow communication between the supply and return fluid channels within the resonant coil 42. In certain embodiments, the end caps 170 are configured such that one supply fluid channel communicates with one return fluid channel. In other embodiments, a 1:1 relationship may not exist.

[0041] End cap 170 allows coolant entering resonant coil 42 via the supply fluid channel to enter the return fluid channels at second end 102 and second end 112. In certain embodiments, such as shown in FIG. 3B , end cap 170 can be designed such that central conduit 160 remains physically separated from fluid channel 150. For example, a plug can be attached to the end of the tube near end cap 170 to isolate central conduit 160.

[0042] In operation, a fluid such as glycol, water, or a combination of these fluids may be used as a coolant. The coolant enters the resonant coil 42 through a supply port 121 in the manifold 120, passes through a supply fluid channel, and reaches the second end 102 of the first tube 100 and the second end 112 of the second tube 110. At this point, due to the configuration of the end cap 170, the coolant enters a return fluid channel and is returned to the return port 122 on the manifold 120.

[0043] As previously mentioned, the resonant coil 42 described herein can be manufactured in several ways. In one embodiment, a tube having the inner wall 140 described herein is extruded, such as up to 20 feet in length. The tube is in a straight state when extruded. An induction bender can then be used to create the spiral-shaped section 105. The induction bender uses an induction heater to make the metal malleable. The specific shape of the resonant coil 42 can be created in such ways as are well known in the art. After the tube is properly shaped, an electrostatic plating process can be used to coat the outside of the tube with copper. The shaped and plated tube can then be attached to the manifold 120. Additionally, end caps 170 can be placed on the second end 102 of the first tube 100 and the second end 112 of the second tube 110.

[0044] Alternatively, the tube of the resonant coil 42 can be manufactured using AM techniques. In this embodiment, the tube can be printed in its final shape, thereby eliminating the use of inductive bending. Again, an electrostatic plating process can be used to coat the outside of the tube with copper. The shaped and plated tube can then be attached to the manifold 120. Additionally, the end cap 170 can be fabricated using AM techniques at the same time as the rest of the tube, such that the end cap 170 is part of the assembly.

[0045] The internal structure described herein may also be utilized in other embodiments. FIG. 6 illustrates an ion implantation system 601 according to another embodiment. Components that also appear in FIG. 1 are labeled with the same reference numerals and will not be described again. In this embodiment, each resonant coil 642 is in electrical communication with only one accelerating electrode 43. Thus, unlike the resonant coil 42 of FIG. 2A, in this embodiment, the resonant coil 642 has only one exposed tip. Specifically, unlike the resonant coil of FIG. 2, the resonant coil 642 includes only a first tube 700.

[0046] 7A-7B, a first end 701 of the first tube 700 may converge into the manifold 120. A second end 702 of the first tube 700 forms an exposed tip.

[0047] The first tube 700 includes a spiral-shaped section 705. The spiral-shaped section 705 of the first tube 700 forms an inductor. As previously described, the spiral-shaped section 705 can have between 1 and 2.5 loops, although other numbers are possible.

[0048] Additionally, as previously described, an end cap can be placed at the second end 702, allowing fluid flowing through the supply fluid channel to enter the return fluid channel and return to the first end 701. A manifold 120 similar to that shown in FIG. 4A can be used to provide the supply and return ports, as well as the interface for any electrical connections. In certain embodiments, the manifold 120 can be the same as that shown in FIGS. 4A-4C, except that some of the outlets are blocked. In other embodiments, a different manifold can be used that does not include internal joints.

[0049] Additionally, the first tube 700 may have a cross section as shown in Figure 3A or 3B. As previously described, when the cross section is as shown in Figure 3B, a sensor or tension wire may be inserted into the central conduit 160.

[0050] This system has many advantages. First, the inner wall 140 provides structural support for the resonant coil 42. As previously explained, vibrations tend to change the ratio of inductance to capacitance, which in turn changes the natural frequency of the resonant coil 42. The RF generator 44 is tuned to provide RF voltage at the natural frequency of the resonant coil 42. Vibrations that shift the natural frequency result in less efficient energy transfer and, consequently, reduced performance. Additionally, the fluid channels allow for efficient circulation of coolant through the tube. Additionally, the central conduit allows for the option of including sensors or tension wires.

[0051] The present disclosure is not limited in scope by the specific embodiments described herein. Indeed, various other embodiments of and modifications to the present disclosure, in addition to those described herein, will be apparent to those skilled in the art from the foregoing specification and accompanying drawings. Accordingly, such other embodiments and modifications are intended to be included within the scope of the present disclosure. Moreover, while the present disclosure has been described herein in the context of particular embodiments in particular environments for particular purposes, those skilled in the art will recognize that its utility is not limited thereto, and that the present disclosure may be beneficially implemented in any number of environments for any number of purposes. Correspondingly, the claims set forth below should be construed in light of the full breadth and spirit of the present disclosure as described herein.

Claims

1. 1. A resonant coil for use in a linear accelerator (LINAC), comprising: a tube having a first end, a second end, and a spiral-shaped section; A resonant coil, wherein the interior of the tube includes one or more interior walls for providing structural support to the tube.

2. 2. The resonant coil of claim 1, wherein the outside of the tube is plated with copper.

3. The resonant coil of claim 1 , wherein the one or more interior walls divide the interior of the tube into a plurality of fluid channels.

4. The resonant coil of claim 3 further comprising a manifold attached to the first end of the tube, the manifold having a supply port and a return port.

5. 5. The resonant coil of claim 4, wherein the manifold is configured such that the supply port communicates with one or more of the plurality of fluid channels, referred to as supply fluid channels, and the return port communicates with one or more other of the plurality of fluid channels, referred to as return fluid channels.

6. The resonant coil of claim 5 , further comprising an end cap disposed at the second end of the tube to allow fluid communication between the supply fluid channel and the return fluid channel.

7. The resonant coil of claim 6 , wherein the interior of the tube further comprises a central conduit physically isolated from the plurality of fluid channels.

8. The resonant coil of claim 7 further comprising a sensor disposed within the central conduit near the second end.

9. 8. The resonant coil of claim 7, further comprising a tension wire attached to the end cap near the second end and passing through the central conduit to the manifold.

10. 1. An ion implantation system comprising: an ion source; a mass spectrometer; Buncha and LINAC, a plurality of accelerating electrodes; a plurality of cavities, each cavity including an excitation coil and a resonant coil according to claim 1, wherein a second end of the resonant coil communicates with one of the plurality of acceleration electrodes; and a plurality of RF generators each in communication with a respective excitation coil; LINAC, including An ion implantation system comprising:

11. 1. A resonant coil for use in a linear accelerator (LINAC), comprising: a first tube having a first end, a second end, and a spiral-shaped section; a second tube having a first end, a second end, and a spiral-shaped section; Equipped with the interior of the first tube and the interior of the second tube each include one or more interior walls for providing structural support to the first tube and the second tube; The resonance coil is a manifold, wherein the first end of the first tube and the first end of the second tube converge at a manifold. The resonant coil further comprises:

12. The resonant coil of claim 11 , wherein the spiral-shaped section of the first tube and the spiral-shaped section of the second tube are concentric.

13. The resonant coil of claim 11 , wherein the one or more interior walls separate the interior of the first tube and the interior of the second tube into a plurality of fluid channels.

14. 14. The resonant coil of claim 13, wherein the manifold is configured such that a supply port communicates with one or more of the plurality of fluid channels, referred to as a supply fluid channel, and a return port communicates with one or more other of the plurality of fluid channels, referred to as a return fluid channel.

15. 15. The resonant coil of claim 14, further comprising end caps disposed at the second end of the first tube and the second end of the second tube to enable fluid communication between the supply fluid channel and the return fluid channel.

16. The resonant coil of claim 15 , wherein the interior of the first tube further comprises a central conduit physically isolated from the plurality of fluid channels.

17. 17. The resonant coil of claim 16, further comprising a sensor disposed within the central conduit near the second end of the first tube.

18. 17. The resonant coil of claim 16, further comprising a tension wire attached to the end cap near the second end of the first tube and passing through the central conduit to the manifold.

19. 1. An ion implantation system comprising: an ion source; a mass spectrometer; Buncha and LINAC, a plurality of accelerating electrodes; a plurality of cavities, each cavity including an excitation coil and the resonant coil of claim 11, wherein the second end of the first tube and the second end of the second tube each communicate with one of the plurality of acceleration electrodes; and a plurality of RF generators each in communication with a respective excitation coil; LINAC, including An ion implantation system comprising:

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