Maintenance device, substrate processing system, and maintenance method

Abstract

To provide a technology that can reduce the manpower required for maintenance and ensure work safety.SOLUTION: A maintenance device according to an embodiment of the present disclosure includes a housing that can be transported by a transport mechanism that transports a carrier that houses a substrate, and a maintenance robot attached to the housing.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present disclosure relates to a maintenance apparatus, a substrate processing system, and a maintenance method. [Background technology]

[0002] BACKGROUND ART A substrate processing apparatus is known that removes and applies lubricant to a ball screw or an LM guide at a high location of an elevator (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2003-287101 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technology that can reduce the number of personnel required for maintenance and ensure work safety. [Means for solving the problem]

[0005] A maintenance device according to one aspect of the present disclosure includes a housing that can be transported by a transport mechanism that transports a container that houses substrates, and a maintenance robot attached to the housing. [Effects of the Invention]

[0006] According to the present disclosure, the number of personnel required for maintenance can be reduced and work safety can be ensured. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a diagram showing a substrate processing system according to an embodiment; [Figure 2] 1 is a cross-sectional view showing a substrate processing apparatus according to an embodiment. [Figure 3]FIG. 1 is a plan view showing a substrate processing apparatus according to an embodiment. [Figure 4] FIG. 1 is a perspective view showing a maintenance device according to an embodiment. [Figure 5] 3 is a flowchart showing a maintenance method according to the embodiment. [Figure 6] FIG. 1 is a cross-sectional view (1) showing a maintenance method according to an embodiment. [Figure 7] FIG. 10 is a cross-sectional view (2) showing the maintenance method according to the embodiment. [Figure 8] FIG. 10 is a cross-sectional view (3) showing the maintenance method according to the embodiment. [Figure 9] FIG. 4 is a cross-sectional view (4) showing the maintenance method according to the embodiment. [Figure 10] FIG. 5 is a cross-sectional view (5) showing the maintenance method according to the embodiment. [Figure 11] FIG. 6 is a cross-sectional view (6) showing the maintenance method according to the embodiment. [Figure 12] FIG. 7 is a cross-sectional view (7) showing the maintenance method according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. In all the accompanying drawings, the same or corresponding reference numerals are used to designate the same or corresponding members or components, and redundant descriptions will be omitted.

[0009] [Substrate Processing System] A substrate processing system 1 according to an embodiment will be described with reference to Fig. 1. Fig. 1 is a diagram showing a substrate processing system 1 according to an embodiment.

[0010] The substrate processing system 1 includes a plurality of substrate processing apparatuses 100 and a maintenance apparatus 200.

[0011] Each substrate processing apparatus 100 is an apparatus that performs a predetermined process such as a heat treatment on a substrate. The multiple substrate processing apparatuses 100 may be apparatuses that perform the same process on a substrate, or may be apparatuses that perform different processes on a substrate.

[0012] The maintenance apparatus 200 is an apparatus that performs maintenance on a plurality of substrate processing apparatuses 100. The maintenance apparatus 200 is carried into each substrate processing apparatus 100 by, for example, an operator. The maintenance apparatus 200 may be carried into each substrate processing apparatus 100 by a transfer apparatus provided outside the substrate processing apparatus 100. For example, one maintenance apparatus 200 is provided for a plurality of substrate processing apparatuses 100. Alternatively, one maintenance apparatus 200 may be provided for one substrate processing apparatus 100.

[0013] [Substrate Processing Apparatus] The substrate processing apparatus 100 included in the substrate processing system 1 according to the embodiment will be described with reference to Figures 2 and 3. Figure 2 is a cross-sectional view showing the substrate processing apparatus 100 according to the embodiment. Figure 3 is a plan view showing the substrate processing apparatus 100 according to the embodiment.

[0014] The substrate processing apparatus 100 is housed in a housing 2 that forms the exterior of the apparatus. A carrier transport area S1 and a substrate transport area S2 are formed within the housing 2. The carrier transport area S1 and the substrate transport area S2 are separated by a partition wall 4. A transport opening 6 for transporting a substrate W is provided in the partition wall 4. The transport opening 6 connects the carrier transport area S1 and the substrate transport area S2. The substrate W is, for example, a semiconductor wafer. The transport opening 6 is opened and closed by a door mechanism 8 that complies with the FIMS (Front-opening Interface Mechanical Standard) standard. A drive mechanism for a lid opening and closing device 7 is connected to the door mechanism 8, and the drive mechanism allows the door mechanism 8 to move freely in the front-back and up-down directions, thereby opening and closing the transport opening 6.

[0015] Hereinafter, the direction in which the carrier transport region S1 and the substrate transport region S2 are arranged will be referred to as the front-to-back direction (corresponding to the second horizontal direction in Figure 3), and the horizontal direction perpendicular to the front-to-back direction will be referred to as the left-to-right direction (corresponding to the first horizontal direction in Figure 3).

[0016] The carrier transfer region S1 is an area under atmospheric conditions. The carrier transfer region S1 is an area where carriers C storing substrates W are transferred between elements described below within the substrate processing apparatus 100, where carriers C are loaded into the substrate processing apparatus 100 from the outside, and where carriers C are loaded out of the substrate processing apparatus 100 to the outside. The carriers C are, for example, FOUPs (Front-Opening Unified Pods). By maintaining a predetermined level of cleanliness within the FOUP, it is possible to prevent adhesion of foreign matter and formation of a natural oxide film on the surface of the substrate W. The carrier transfer region S1 has a first transfer region 10 and a second transfer region 12. The second transfer region 12 is located behind the first transfer region 10 (on the substrate transfer region S2 side).

[0017] The first transfer region 10 is provided with, for example, two load ports 14 arranged vertically (see FIG. 2), with two load ports 14 on each tier (see FIG. 3). The load ports 14 are loading platforms that receive carriers C when they are loaded into the substrate processing apparatus 100. The load ports 14 are provided in open areas of the walls of the housing 2. The load ports 14 are accessible from outside the substrate processing apparatus 100. Specifically, a transfer device (not shown) provided outside the substrate processing apparatus 100 can load and place carriers C onto the load ports 14 and unload carriers C from the load ports 14 to the outside. Since the load ports 14 are provided with, for example, two tiers, vertically, carriers C can be loaded and unloaded from both tiers. A stocker 16 for storing carriers C may be provided in the lower tier of the load ports 14. Positioning pins 18 for positioning carriers C are provided at, for example, three locations on the surface of the load port 14 on which the carriers C are placed. With the carrier C placed on the load port 14, the load port 14 may be configured to be movable in the front-rear direction.

[0018] Two FIMS ports 24 (see FIG. 2) are arranged vertically side by side below the second transfer area 12. The FIMS ports 24 are holders that hold the carriers C when the substrates W in the carriers C are loaded into and unloaded from a heat treatment furnace 80 (described later) in the substrate transfer area S2. The FIMS ports 24 are configured to be movable in the front-to-rear direction. Similar to the load port 14, positioning pins 18 for positioning the carriers C are provided at three locations on the surface of the FIMS port 24 on which the carriers C are placed.

[0019] A stocker 16 for storing carriers C is provided above the second transport area 12. The stocker 16 is composed of, for example, three shelves, and each shelf can hold two or more carriers C in the left-right direction. A stocker 16 may also be provided below the second transport area 12 in an area where no carrier placement table is located.

[0020] A carrier transport mechanism 30 is provided between the first transport region 10 and the second transport region 12. The carrier transport mechanism 30 transports carriers C between the load port 14, the stocker 16, and the FIMS port 24.

[0021] The carrier transport mechanism 30 includes a first guide 31, a second guide 32, a moving unit 33, an arm unit 34, a hand unit 35, and a sensor 36. The first guide 31 extends in the vertical direction. The second guide 32 is connected to the first guide 31. The second guide 32 extends in the left-right direction (first horizontal direction). The second guide 32 moves in the vertical direction while being guided by the first guide 31. The moving unit 33 moves in the left-right direction while being guided by the second guide 32. The arm unit 34 is connected to the moving unit 33. The arm unit 34 has one joint and two arms. The hand unit 35 is provided at the tip of the arm unit 34. The hand unit 35 has pins 18 at three locations for positioning the carrier C. The sensor 36 detects the state of the carrier transport mechanism 30. The state of the carrier transport mechanism 30 includes, for example, the state of a lubricant applied to the drive unit of the carrier transport mechanism 30. Examples of the drive unit of the carrier transport mechanism 30 include a ball screw, an LM (Linear Motion) guide, and a rack gear. The sensor 36 may be a sensor that visualizes the state of the lubricant applied to the drive unit of the carrier transport mechanism 30. The sensor 36 is, for example, an acceleration sensor that detects the acceleration of the operation of the carrier transport mechanism 30. The sensor 36 may also be a camera that captures an image including the lubricant applied to the drive unit of the carrier transport mechanism 30.

[0022] The substrate transfer region S2 is a region where the substrates W are removed from the carrier C and subjected to various processes. The substrate transfer region S2 is filled with an inert gas atmosphere, such as a nitrogen (N2) gas atmosphere, to prevent the formation of an oxide film on the substrates W. A vertical heat treatment furnace 80 having an opening at the lower end as a furnace port is provided in the substrate transfer region S2.

[0023] The heat treatment furnace 80 has a processing vessel 82. The processing vessel 82 can accommodate a substrate W therein. The processing vessel 82 has a cylindrical shape. The processing vessel 82 is made of, for example, quartz. A cylindrical heater 81 is arranged around the processing vessel 82. The heater 81 heats the substrate W accommodated inside the processing vessel 82. This causes the substrate W inside the processing vessel 82 to be thermally processed. A shutter (not shown) is provided below the processing vessel 82. The shutter closes the bottom end of the heat treatment furnace 80 after the boat 50 is unloaded from the heat treatment furnace 80 and until the next boat 50 is loaded in. Below the heat treatment furnace 80, the boat 50 is placed on a lid 54 via a heat-retaining cylinder 52. The lid 54 is provided below the boat 50 as a single unit with the boat 50.

[0024] The boat 50 holds a plurality of substrates W substantially horizontally at a predetermined interval in the vertical direction. The number of substrates W held by the boat 50 is not particularly limited, but may be, for example, 50 to 200. The boat 50 is made of, for example, quartz. The lid 54 is supported by a lifting mechanism (not shown). The lifting mechanism raises and lowers the lid 54 to load or unload the boat 50 into or from the heat treatment furnace 80. A substrate transport device 60 is provided between the boat 50 and the transport port 6.

[0025] The substrate transfer device 60 transfers substrates W between the carrier C held on the FIMS port 24 and the boat 50. The substrate transfer device 60 includes a guide mechanism 61, a moving body 62, a fork 63, a lifting mechanism 64, and a rotation mechanism 65. The guide mechanism 61 is shaped like a rectangular parallelepiped. The guide mechanism 61 is attached to a vertically extending lifting mechanism 64, and is configured to be movable vertically by the lifting mechanism 64 and to be rotatable by the rotation mechanism 65. The moving body 62 is mounted on the guide mechanism 61 so as to be movable back and forth along the longitudinal direction. The fork 63 is a transfer device attached via the moving body 62. For example, multiple forks 63 (five in the example of FIG. 2) are provided. In this case, multiple substrates W can be transferred simultaneously, thereby reducing the time required to transport the substrates W. The number of forks 63 may be one.

[0026] A filter unit (not shown) may be provided on the ceiling or sidewall of the substrate transfer area S2. In this case, clean air can be supplied to the substrate transfer area S2. Examples of the filter unit include a HEPA (High Efficiency Particulate Air Filter) filter and a ULPA (Ultra-Low Penetration Air Filter) filter.

[0027] The substrate processing apparatus 100 includes a control unit 90. The control unit 90 is an electronic circuit such as a central processing unit (CPU), a field programmable gate array (FPGA), or an application specific integrated circuit (ASIC). The control unit 90 executes various control operations described in this specification by executing instruction codes stored in a memory or by being a circuit designed for a specific application.

[0028] [Maintenance device] The maintenance device 200 provided in the substrate processing system 1 according to this embodiment will be described with reference to Fig. 4. Fig. 4 is a perspective view showing the maintenance device 200 according to this embodiment.

[0029] The maintenance device 200 includes a housing 210 , a maintenance robot 220 , a container 230 , a camera 240 , a wireless communication device 250 , a switching hub 260 , and a battery 270 .

[0030] The housing 210 is configured to be able to be placed on the load port 14 and the stocker 16. The housing 210 is configured to be able to be transported by the carrier transport mechanism 30. The housing 210 is configured to be able to be positioned by positioning pins 18 provided on the load port 14. The housing 210 has a rectangular parallelepiped shape with two open sides. The housing 210 has a bottom plate 211, a top plate 212, a first side plate 213, a second side plate 214, a flange 215, and a handle 216. The bottom plate 211, the top plate 212, the first side plate 213, and the second side plate 214 each have a rectangular plate shape. The top plate 212 faces the bottom plate 211. The first side plate 213 and the second side plate 214 each have a lower end connected to the bottom plate 211 and an upper end connected to the top plate 212. The first side plate 213 and the second side plate 214 are disposed adjacent to each other. A flange 215 is provided on the top plate 212. The flange 215 is, for example, an interface flange conforming to the SEMI (Semiconductor Equipment and Materials International) standard. In this case, a transport device provided outside the substrate processing apparatus 100 holds the flange 215, thereby enabling the maintenance apparatus 200 to be carried into each substrate processing apparatus 100. The transport device is, for example, an overhead hoist transport (OHT). The handle 216 is fixed to the bottom plate 211. By providing the handle 216, an operator can hold the handle 216 and easily transport the maintenance apparatus 200.

[0031] The maintenance robot 220 is attached to the housing 210. The maintenance robot 220 is provided on the bottom plate 211. The maintenance robot 220 is configured to perform maintenance on the carrier transport mechanism 30. The maintenance includes, for example, applying a lubricant to the drive unit of the carrier transport mechanism 30 and wiping off the lubricant from the drive unit of the carrier transport mechanism 30.

[0032] The maintenance robot 220 is, for example, a vertical articulated robot. The maintenance robot 220 has a fixed part 221, a rotating part 222, an arm part 223, and a hand part 224. The fixed part 221 is fixed to the bottom plate 211 by, for example, bolts. The rotating part 222 rotates horizontally relative to the fixed part 221. The arm part 223 is attached to the rotating part 222. The arm part 223 has multiple axes that move vertically. The hand part 224 is attached to the tip of the arm part 223. The hand part 224 is configured to be able to hold an applicator and a wiper. The applicator is used to apply lubricant to the drive part of the carrier transport mechanism 30. The applicator is, for example, a rod-shaped member such as a cleaning stick. The wiper is used to wipe off the lubricant applied to the drive part of the carrier transport mechanism 30. The wiper is, for example, a sponge or a scraper.

[0033] The maintenance robot 220 can take a plurality of postures. The plurality of postures includes a first posture in which the hand unit 224 is positioned inside the housing 210, and a second posture in which the hand unit 224 is positioned outside the housing 210. For example, the maintenance robot 220 takes the first posture when being transported, and takes the second posture when performing maintenance.

[0034] The maintenance robot 220 uses the hand unit 224 to take out and hold the applicator housed in the container 230. With the applicator held by the hand unit 224, the maintenance robot 220 applies lubricant to the drive unit of the carrier transport mechanism 30. The maintenance robot 220 returns the applicator held by the hand unit 224 into the container 230.

[0035] The maintenance robot 220 uses the hand unit 224 to take out and hold the wiping tool stored in the container 230. With the wiping tool held by the hand unit 224, the maintenance robot 220 wipes away the lubricant applied to the drive unit of the carrier transport mechanism 30. The maintenance robot 220 returns the wiping tool held by the hand unit 224 into the container 230.

[0036] The maintenance robot 220 may be a horizontal articulated robot (SCARA robot).

[0037] The container 230 is provided on the bottom plate 211. The container 230 is provided at a position accessible to the hand unit 224 of the maintenance robot 220. The container 230 contains an applicator and a wiper.

[0038] The camera 240 is attached to the maintenance robot 220. The camera 240 is configured to be able to communicate with the maintenance robot 220. When the maintenance robot 220 applies lubricant to the drive unit of the carrier transport mechanism 30, the camera 240 acquires an image including the drive unit of the carrier transport mechanism 30. The maintenance robot 220 corrects the position at which the lubricant is to be applied based on the image acquired by the camera 240. In this case, the lubricant can be applied to the desired position with high precision. When the maintenance robot 220 wipes off the lubricant applied to the drive unit of the carrier transport mechanism 30, the camera 240 acquires an image of the drive unit of the carrier transport mechanism 30. The maintenance robot 220 corrects the position at which the lubricant is to be wiped off based on the image acquired by the camera 240. In this case, the lubricant can be wiped off from the desired position with high precision.

[0039] The wireless communication device 250 is provided on the bottom plate 211. The wireless communication device 250 is configured to be able to wirelessly communicate with the control unit 90 included in each substrate processing apparatus 100. The wireless communication device 250 is, for example, a wireless LAN (Local Area Network) adapter.

[0040] The switching hub 260 is provided on the bottom plate 211. The maintenance robot 220 and the wireless communication device 250 are connected to the switching hub 260 via a communication cable such as a LAN cable. In this case, the maintenance robot 220 and the control unit 90 can communicate with each other. The camera 240 and the wireless communication device 250 are connected to the switching hub 260 via a communication cable such as a LAN cable, and the switching hub 260 is, for example, a switching hub compatible with PoE (Power over Ethernet). In this case, power can be supplied to the camera 240 and the wireless communication device 250 via the communication cable. Therefore, the camera 240 and the wireless communication device 250 do not require power cables.

[0041] The battery 270 is provided on the bottom plate 211. The battery 270 supplies power to the maintenance robot 220 and the switching hub 260.

[0042] As described above, the maintenance device 200 according to the embodiment includes the housing 210 that can be transported by the carrier transport mechanism 30, and the maintenance robot 220 that is attached to the housing 210. In this case, by transporting the maintenance device 200 into the carrier transport area S1, maintenance of the drive unit of the carrier transport mechanism 30 can be automatically performed. This reduces the number of man-hours required for maintenance and ensures work safety.

[0043] Furthermore, instead of a worker entering the carrier transport area S1 to perform maintenance on the carrier transport mechanism 30, the maintenance device 200 performs the maintenance. This eliminates the need for workers to enter high areas, narrow areas, areas within the movement range of robots, etc. Furthermore, maintenance can be performed without time constraints. Furthermore, work reproducibility (repeatable accuracy) is improved.

[0044] [Maintenance method] A method for performing maintenance on the substrate processing apparatus 100 using the maintenance apparatus 200 according to the embodiment will be described with reference to FIGS. 5 to 12. FIG. 5 is a flowchart showing the maintenance method according to the embodiment. FIGS. 6 to 12 are cross-sectional views showing the maintenance method according to the embodiment. The following describes, as an example, a method for performing maintenance on a drive unit of a carrier transport mechanism 30 using the maintenance apparatus 200. In the maintenance method according to the embodiment, processes from step ST1 to step ST3 shown in FIG. 5 are performed.

[0045] In step ST1, the control unit 90 determines whether maintenance of the carrier transport mechanism 30 is required based on the detection result of the sensor 36. If the sensor 36 is an acceleration sensor, the control unit 90 determines whether maintenance of the carrier transport mechanism 30 is required based on the acceleration of the operation of the carrier transport mechanism 30 detected by the acceleration sensor. For example, if the acceleration detected by the acceleration sensor is smaller than a predetermined threshold, the control unit 90 determines that the lubricant has deteriorated or is insufficient, and determines that maintenance of the carrier transport mechanism 30 is required. If the sensor 36 is a camera, the control unit 90 determines whether maintenance of the carrier transport mechanism 30 is required based on an image captured by the camera that includes the lubricant applied to the drive unit of the carrier transport mechanism 30. For example, if the control unit 90 analyzes the image captured by the camera and determines that the lubricant has deteriorated or is insufficient, the control unit 90 determines that maintenance of the carrier transport mechanism 30 is required.

[0046] If it is determined that maintenance of the carrier transport mechanism 30 is necessary (YES in step ST1), the control unit 90 proceeds to step ST2. If it is determined that maintenance of the carrier transport mechanism 30 is not necessary (NO in step ST1), the control unit 90 ends the process.

[0047] In step ST2, the maintenance device 200 performs maintenance on the drive unit of the carrier transport mechanism 30.

[0048] 6, a transfer device provided outside the substrate processing apparatus 100 or an operator places the maintenance apparatus 200 on the load port 14. At this time, the maintenance robot 220 takes the first posture.

[0049] 7, the carrier transport mechanism 30 extends the arm unit 34 and holds the housing 210 of the maintenance apparatus 200 placed on the load port 14 with the hand unit 35. At this time, the maintenance robot 220 takes the first posture.

[0050] 8, the carrier transport mechanism 30 retracts the arm unit 34 while holding the housing 210 with the hand unit 35. At this time, the maintenance robot 220 takes the first posture.

[0051] Next, the maintenance robot 220 uses the hand unit 224 to take out and hold the wiping tool stored in the container 230. Subsequently, as shown in FIG. 9 , while the carrier transport mechanism 30 raises and lowers the second guide 32 relative to the first guide 31, the maintenance robot 220, holding the wiping tool with the hand unit 224, wipes away the old lubricant applied to the first guide 31. At this time, the maintenance robot 220 takes the second posture. When wiping off the old lubricant is complete, the maintenance robot 220 returns the wiping tool held by the hand unit 224 into the container 230.

[0052] Next, the maintenance robot 220 removes the applicator from the container 230 with the hand unit 224 and holds it. Subsequently, as shown in FIG. 9 , the carrier transport mechanism 30 raises and lowers the second guide 32 relative to the first guide 31, while the maintenance robot 220 holds the applicator with the hand unit 224 and applies new lubricant to the first guide 31. At this time, the maintenance robot 220 takes the second posture. After finishing applying the new lubricant, the maintenance robot 220 returns the applicator held by the hand unit 224 into the container 230.

[0053] 10, the carrier transport mechanism 30, while holding the casing 210 with the hand unit 35, moves the casing 210 to a height position for carrying it out to the load port 14. At this time, the maintenance robot 220 takes the first posture.

[0054] 11, the carrier transport mechanism 30 extends the arm unit 34 and moves the housing 210 held by the hand unit 35 above the load port 14. At this time, the maintenance robot 220 takes the first posture.

[0055] 12, the carrier transport mechanism 30 places the housing 210 on the load port 14 and retracts the arm 34. At this time, the maintenance robot 220 takes the first posture. This completes step ST2.

[0056] In step ST3, the control unit 90 determines whether the condition of the carrier transport mechanism 30 is good based on the detection result of the sensor 36. If the sensor 36 is an acceleration sensor, the control unit 90 determines whether maintenance of the carrier transport mechanism 30 is necessary based on the acceleration of the operation of the carrier transport mechanism 30 detected by the acceleration sensor. For example, if the acceleration detected by the acceleration sensor is equal to or greater than a predetermined threshold, the control unit 90 determines that the condition of the lubricant is good and determines that the condition of the carrier transport mechanism 30 is good. If the sensor 36 is a camera, the control unit 90 determines whether the condition of the carrier transport mechanism 30 is good based on an image captured by the camera that includes the lubricant applied to the drive unit of the carrier transport mechanism 30. For example, if the control unit 90 analyzes the image captured by the camera and determines that the condition of the lubricant is good, the control unit 90 determines that the condition of the carrier transport mechanism 30 is good.

[0057] If it is determined that the condition of the carrier transport mechanism 30 is good (YES in step ST3), the control unit 90 ends the process. If it is determined that the condition of the carrier transport mechanism 30 is not good (NO in step ST3), the control unit 90 returns the process to step ST2. In this way, the control unit 90 performs maintenance on the drive unit of the carrier transport mechanism 30 by the maintenance device 200 until the condition of the carrier transport mechanism 30 becomes good.

[0058] As described above, in the maintenance method according to the embodiment, the maintenance robot 220 performs maintenance on the carrier transport mechanism 30 while the carrier transport mechanism 30 holds the housing 210. In this case, maintenance of the drive unit of the carrier transport mechanism 30 can be performed automatically. This reduces the number of man-hours required for maintenance and ensures work safety.

[0059] Furthermore, instead of a worker entering the carrier transport area S1 to perform maintenance on the carrier transport mechanism 30, the maintenance device 200 performs the maintenance. This eliminates the need for workers to enter high areas, narrow areas, areas within the movement range of robots, etc. Furthermore, maintenance can be performed without time constraints. Furthermore, work reproducibility (repeatable accuracy) is improved.

[0060] Furthermore, according to the maintenance method of the embodiment, the control unit 90 determines whether maintenance of the carrier transport mechanism 30 is necessary based on the detection result of the sensor 36, and performs maintenance of the carrier transport mechanism 30 if it determines that maintenance is necessary. In this case, the maintenance cycle of the carrier transport mechanism 30 can be optimized. Also, old lubricant can be wiped off and new lubricant can be applied before the lubricant in the drive unit of the carrier transport mechanism 30 deteriorates. This reduces the occurrence of problems with the carrier transport mechanism 30 due to deteriorated lubricant.

[0061] In the above maintenance method, a case has been described in which one maintenance device 200 performs both wiping off and applying lubricant in step ST2, but this is not limiting. For example, different maintenance devices 200 may perform wiping off and applying lubricant.

[0062] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive, and the above-described embodiments may be omitted, substituted, or modified in various ways without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0063] 30 Carrier transport mechanism 200 Maintenance Equipment 210 cabinet 220 Maintenance Robot C Carrier W substrate

Claims

1. a housing that can be transported by a transport mechanism that transports a carrier that houses a substrate; a maintenance robot attached to the housing; A maintenance device comprising:

2. The maintenance robot is configured to perform maintenance on the transport mechanism. The maintenance device according to claim 1 .

3. the maintenance includes applying a lubricant to a drive unit of the transport mechanism; The maintenance device according to claim 2 .

4. the maintenance includes wiping off lubricant from a drive unit of the transport mechanism; The maintenance device according to claim 2 .

5. The maintenance robot is an articulated robot. The maintenance device according to any one of claims 1 to 4.

6. a camera attached to the maintenance robot; The maintenance device according to any one of claims 1 to 4.

7. The housing has a flange that can be held by a conveying device. The maintenance device according to any one of claims 1 to 4.

8. The housing has a handle that can be held by an operator. The maintenance device according to any one of claims 1 to 4.

9. a substrate processing apparatus; A maintenance device, Equipped with the substrate processing apparatus has a carrier transport area provided with a transport mechanism for transporting a carrier in which a substrate is accommodated, The maintenance device includes: a housing that can be transported by the transport mechanism; a maintenance robot attached to the housing; having Substrate processing system.

10. The substrate processing apparatus includes: a sensor for detecting a state of the transport mechanism; A control unit; and the control unit determines whether or not maintenance of the transport mechanism is required based on the detection result of the sensor, and when it determines that maintenance of the transport mechanism is required, carries the maintenance device into the carrier transport area. The substrate processing system of claim 9 .

11. The maintenance device includes: a battery for supplying power to the maintenance robot; a wireless communication device for wirelessly communicating with the control unit; having The substrate processing system of claim 10 .

12. A method for maintaining a conveyance mechanism by a maintenance device, comprising: The maintenance device includes: a housing that can be transported by a transport mechanism that transports a carrier that houses a substrate; a maintenance robot attached to the housing; and the maintenance robot performs maintenance on the transport mechanism while the transport mechanism is holding the housing. Maintenance methods.

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