Cleaning device and processing device

Abstract

To provide a cleaning device which can efficiently clean a member to be cleaned, and to provide a processing device.SOLUTION: A cleaning device is incorporated into a processing device to be used. The cleaning device includes a cleaning device body 64, a pressure chamber 66, a cleaning fluid supply port provided at the cleaning device body so as to supply a cleaning fluid K to the pressure chamber 66, and jet parts 70a to 70d provided at the cleaning device body so as to jet the cleaning fluid to a cleaning area. Each of the jet parts 70a to 70d has: jet wall parts 76, 80 forming parts of a wall part of the cleaning device body; and pairs of jet holes 78a, 78b and 84a, 84b which are respectively formed on the jet wall parts so as to be open on outer surfaces 76a, 80a of the jet wall parts and allow an external space S of the cleaning device body and the pressure chamber to communicate with each other. The pairs of jet holes are formed so that portions of the cleaning fluid jetted from the pairs of jet holes in a columnar form collide with each other and spread in a fan shape. The jet wall parts of at least two of the jet parts are formed so that outer surfaces of the jet wall parts face in different direction.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a cleaning device that cleans a component by applying a cleaning liquid linearly to a cleaning area of ​​the component, and a processing apparatus that includes the cleaning device. [Background technology]

[0002] Examples of conventional cleaning devices are described in Patent Documents 1, 2 and 3 below.

[0003] The spray nozzle (cleaning device) described in Patent Document 1 includes a cleaning nozzle disposed in the internal space of a tank (container) and a cleaning liquid supply pipe for supplying cleaning liquid to the cleaning nozzle. When this spray nozzle is used to clean an object to be cleaned, cleaning liquid is supplied from the cleaning liquid supply pipe to the cleaning nozzle. The cleaning liquid is then sprayed in a columnar shape from multiple cleaning liquid spray holes formed in the cleaning nozzle and applied in dots to the object to be cleaned.

[0004] However, the spray nozzle described in Patent Document 1 employs a spray pattern that sprays the cleaning liquid onto the object to be cleaned in dots, i.e., a dot-like spray pattern, which limits design flexibility and makes it difficult to efficiently clean the object to be cleaned. In particular, if the object to be cleaned has a long and narrow shape, the designer must increase the number of cleaning liquid spray holes and finely adjust the spray direction of the cleaning liquid, which limits design flexibility from both cost and technical standpoints.

[0005] The cleaning device described in Patent Document 2 includes an inlet pipe disposed in the internal space of a sealed tank (container) and multiple injection nozzles attached to the inlet pipe, and is configured to be able to clean elongated screw blades. When using this cleaning device to clean a screw blade, a cleaning liquid is supplied from the inlet pipe to each of the multiple injection nozzles. The cleaning liquid is then sprayed in a fan shape from the injection ports attached to the injection nozzles and applied linearly to the screw blade. In other words, this cleaning device employs a linear injection pattern. Therefore, compared to cleaning devices employing a point-like injection pattern, the object to be cleaned can be cleaned more efficiently.

[0006] However, in the cleaning device described in Patent Document 2, multiple spray nozzles are installed at intervals along the length of the pipe wall of the inlet pipe, which requires the length of the inlet pipe to be increased, resulting in a large size of the cleaning device. Therefore, if this cleaning device is permanently installed in the internal space of a sealed tank, there is a risk that the cleaning device will interfere with the agitation of the powder (material to be treated), making it difficult to install it permanently. In addition, the complex structure of the nozzle for spraying the cleaning liquid in a fan shape poses a problem of high manufacturing costs.

[0007] The spray nozzle described in Patent Document 3 has a pair of nozzle holes formed in the front wall of a cylinder, and is configured to be able to spray pesticide water in a fan shape with a simple structure. However, this spray nozzle is used for spraying pesticide water, and its use for cleaning objects to be cleaned was not taken into consideration. Therefore, this spray nozzle and the spray nozzle of Patent Document 2 are completely different in shape and size, and it was not easy to combine this spray nozzle with the spray nozzle of Patent Document 2. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Patent No. 4606208 [Patent Document 2] Japanese Patent Application Laid-Open No. 2000-237567 [Patent Document 3] Japanese Utility Model Application Publication No. 49-143005 Summary of the Invention

[0009] The present invention has been made to address the above-mentioned problems, and has an object to provide a cleaning device and a processing device that can efficiently clean objects to be cleaned while having a simple and compact structure.

[0010] In order to achieve the above object, a cleaning device according to the present invention is characterized in that it is a cleaning device that cleans a component by applying cleaning liquid in a line to a cleaning area of ​​the component, and comprises: a cleaning device main body; a pressure chamber formed inside the cleaning device main body; a cleaning liquid supply port provided in the cleaning device main body to supply cleaning liquid to the pressure chamber; and a plurality of spray units provided in the cleaning device main body to spray cleaning liquid toward the cleaning area, wherein each of the plurality of spray units has a spray wall portion that is a part of a wall portion of the cleaning device main body that constitutes the pressure chamber, and a pair of spray holes formed in the spray wall portion so as to open to the outer surface of the spray wall portion and communicating the space outside the cleaning device main body with the pressure chamber, the pair of spray holes being formed so that cleaning liquid sprayed in columns from them collides with each other and spreads out in a fan shape, and the spray wall portions of at least two of the spray units are formed so that their outer surfaces face in different directions.

[0011] In this cleaning device, the cleaning liquid sprayed in columns from a pair of injection holes collides with each other and spreads in a fan shape, so by appropriately selecting the position, size, and orientation of each of the pair of injection holes, the linear injection pattern of the cleaning liquid can be appropriately determined depending on the position and shape of the component. Furthermore, because each of the pair of injection holes can be formed as a through-hole with a simple shape, the injection holes are easy to machine and foreign matter adhesion to the injection holes can be suppressed, thereby suppressing the introduction of foreign matter (contamination). Furthermore, because the injection wall portions of at least two injection parts are formed so that their outer surfaces face in different directions, a wide area of ​​the component can be efficiently cleaned despite a simple and compact structure.

[0012] Another feature of the cleaning device according to the present invention is that when the area in which the cleaning liquid sprayed from the pair of spray holes spreads in a fan shape is defined as a fan-shaped spray area, the fan-shaped spray areas corresponding to at least two of the spray sections are configured along a single imaginary plane.

[0013] In this cleaning device, the fan-shaped spray areas corresponding to at least two spraying portions are configured along one imaginary plane, so that a member having an elongated shape that extends linearly can be efficiently cleaned.

[0014] Another feature of the cleaning device according to the present invention is that the fan-shaped spray areas corresponding to at least two of the spray portions partially overlap each other.

[0015] In this cleaning device, the fan-shaped spray areas corresponding to at least two spray sections partially overlap, so that a linear, elongated member can be cleaned evenly.

[0016] Another feature of the cleaning device of the present invention is that when two of the multiple injection sections are designated as a first injection section and a second injection section, an imaginary plane including the center lines of each of the pair of injection holes is designated as a first reference plane, a reference point is designated as the point where each of the center lines of the pair of injection holes intersects with an imaginary outer surface of the wall section when it is assumed that the injection holes are not formed, and an imaginary plane including the two reference points and extending in the thickness direction of the wall section is designated as a second reference plane, a first angle at which the first reference plane and the second reference plane at the first injection section intersect, and a second angle at which the first reference plane and the second reference plane at the second injection section intersect are determined to be different from each other.

[0017] In this cleaning device, the first angle in the first spray section and the second angle in the second spray section are set to be different from each other, so that even if the outer surfaces of the spray wall sections in these spray sections face the same direction, the spray directions of the cleaning liquid can be directed in different directions, thereby increasing the degree of freedom in design.

[0018] Another feature of the cleaning device of the present invention is that when one of the two opposite ends of the cleaning device body is a base end and the other is a tip end, the base end is provided with the cleaning liquid supply port, the tip end is formed with a tapered portion that tapers smoothly without any steps toward the tip side, and at least one of the multiple injection portions is provided in the tapered portion.

[0019] In this cleaning device, the tip of the cleaning device body is formed with a tapered portion that tapers smoothly without any steps toward the tip, so when the tip is positioned at the lowest position of the cleaning device body, cleaning liquid adhering to the surface of the cleaning device body can be made to flow down the surface of the tapered portion and drop from the tip. Therefore, even if foreign matter adheres to the surface of the cleaning device body, the foreign matter can be efficiently washed away with cleaning liquid.

[0020] Another feature of the cleaning device according to the present invention is that when one of the two opposite ends of the cleaning device main body is a base end and the other is a tip end, the cleaning liquid supply port is provided at the base end, and a flared portion is formed on the tip side of the cleaning liquid supply port in the cleaning device main body, which has a shape that flares smoothly toward the tip side without any steps, and at least one of the multiple injection portions is provided on the flared portion.

[0021] In this cleaning device, a diverging portion is formed on the tip side of the cleaning liquid supply port of the cleaning device body, which has a shape that diverges smoothly toward the tip side without any steps. This makes it possible to increase the surface area of ​​the diverging portion and the portion connected to the diverging portion, making it easy to ensure a spray area. Furthermore, when the cleaning device body is placed with the direction from the base end to the tip aligned with the vertical direction, the surface of the diverging portion is inclined with respect to the horizontal plane, making it difficult for foreign matter to adhere to this surface.

[0022] In order to achieve the above-mentioned object, the processing device according to the present invention is characterized in that it is a processing device comprising a container having a container body having a storage space for storing the object to be processed and the above-mentioned cleaning device, and the cleaning device body is arranged in the storage space.

[0023] In this processing apparatus, the cleaning device body of the above-mentioned cleaning device is disposed in the accommodation space, so that the effects obtained by the above-mentioned cleaning device can be obtained as they are.

[0024] In order to achieve the above-mentioned object, a feature of the processing device of the present invention is that the member is formed in an elongated shape independent of the container body, and is equipped with a rotation drive device for rotating the member about a rotation center extending in the longitudinal direction.

[0025] In this processing apparatus, the member formed in an elongated shape can be washed in the washing device while being rotated by the rotary drive device, so that even if there is only one washing device, the member can be washed evenly.

[0026] In order to achieve the above object, the processing device of the present invention defines the two cleaning areas lined up in the axial direction on the outer peripheral surface of the member as a first cleaning area and a second cleaning area, defines any portion in the first cleaning area that is linearly hit by the cleaning liquid as a first sprayed area, defines any portion in the second cleaning area that is linearly hit by the cleaning liquid as a second sprayed area, defines a region extending circumferentially of the member through an end of the first sprayed area that is close to the second sprayed area as a first end area, and defines a region extending circumferentially of the member through an end of the second sprayed area that is close to the first sprayed area as a second end area, so that the first end area and the second end area overlap.

[0027] In this processing device, the first end region and the second end region overlap, so when cleaning a component while rotating it with a rotary drive device, it is possible to prevent an area between the first end region and the second end region from being exposed to the cleaning liquid, and the component can be cleaned efficiently.

[0028] In order to achieve the above-mentioned object, a feature of the processing device according to the present invention is that it is a processing device comprising a container having a container body having a storage space for storing the object to be processed, a pipeline connected to the container body, and the above-mentioned cleaning device, wherein the pipeline has a main pipe having an internal space communicating with the storage space, and a branch pipe branching from the wall of the main pipe and arranged so that its position becomes higher as it moves away from the main pipe, and the cleaning device body has a tubular portion arranged in the internal space of the main pipe extending in the longitudinal direction of the main pipe, and at least one of the multiple spray portions is arranged in the tubular portion so as to spray cleaning liquid toward the inner surface of the branch pipe.

[0029] In this treatment device, the inner surface of the branch pipe can be cleaned with a cleaning solution. In addition, the branch pipe is positioned so that its position increases as it moves away from the main pipe, so that the cleaning solution that has cleaned the inner surface of the branch pipe can be discharged by gravity into the interior space of the main pipe. [Brief explanation of the drawings]

[0030] [Figure 1] 1 is a cross-sectional view showing the configuration of a processing apparatus according to a first embodiment. [Figure 2] 1A and 1B are diagrams showing the configuration of a cleaning device according to a first embodiment, in which (A) is an enlarged cross-sectional view showing the mounting structure of the cleaning device, (B) is a perspective view showing the configuration of the cleaning device (excluding the connecting pipe), and (C) is a cross-sectional view taken along line IIC-IIC in (A). [Figure 3] FIG. 1A is a diagram showing a spraying mode of the cleaning device according to the first embodiment, and FIG. 1B is an enlarged view showing the main part of FIG. [Figure 4] 2A is an enlarged view of the IVA portion of FIG. 2A, and FIG. 2B is a cross-sectional view taken along line IVB-IVB of FIG. 2A. [Figure 5] FIG. 10(A) is a diagram showing a first modified example of the ejection mode, and FIG. 10(B) is a diagram showing a second modified example of the ejection mode. [Figure 6] FIG. 10(A) is a cross-sectional view showing a first modified example of the ejection section, and FIG. 10(B) is a cross-sectional view showing a second modified example of the ejection section. [Figure 7]6A is a cross-sectional view showing a third modified example of the injection part, and FIG. 6B is an enlarged view of a portion VIIB in FIG. 6A. [Figure 8] FIG. 10 is a diagram showing a fourth modified example of the ejection section. [Figure 9] (A) is a perspective view showing a first modified example of the cleaning device body, (B) is a perspective view showing a second modified example of the cleaning device body, (C) is a perspective view showing a third modified example of the cleaning device body, and (D) is a perspective view showing a fourth modified example of the cleaning device body. [Figure 10] FIG. 10 is a cross-sectional view showing the configuration of a processing apparatus according to a second embodiment. [Figure 11] FIG. 10 is a partially enlarged cross-sectional view showing the configuration of a processing apparatus according to a third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0031] A cleaning apparatus and a processing apparatus according to an embodiment of the present invention will be described below with reference to the drawings.

[0032] FIG. 1 is a cross-sectional view showing the configuration of a processing apparatus 10 according to a first embodiment. The directions of "front, rear, top, and bottom" used in the following description correspond to the directions indicated by arrows in FIG. 1. FIG. 2 shows the configuration of a cleaning apparatus 28 according to a first embodiment, with FIG. 2(A) being an enlarged cross-sectional view showing the mounting structure of the cleaning apparatus 28, FIG. 2(B) being a perspective view showing the configuration of the cleaning apparatus 28, and FIG. 2(C) being a cross-sectional view taken along line IIC-IIC in FIG. 2(A). FIG. 3(A) is a view showing the spraying mode of the cleaning apparatus 28 according to the first embodiment, and FIG. 3(B) is an enlarged view showing the main parts of FIG. 3(A). In FIG. 1, the flow of cleaning liquid K is indicated by black arrows (straight lines).

[0033] (Configuration of the processing apparatus according to the first embodiment) The processing device 10 shown in FIG. 1 is a filtration and drying device used to filter and dry materials to be processed in chemical plants and the like, and is equipped with a vessel body 12, a jacket 14, a filtration section 16, a vibration generator 18, an agitator 20, a first leg 22, a second leg 24, a tilt drive section 26, a cleaning device 28, and a control section 30.

[0034] In this embodiment, a vessel 32 for performing various processes including filtration and drying is configured by the vessel body 12, jacket 14, filtration unit 16, vibration generator 18, agitator 20, and cleaning unit 28. In addition, a support unit 34 for supporting the vessel 32 so that it can tilt is configured by the first leg 22, second leg 24, and tilt driver 26.

[0035] The container body 12 is a member having a storage space S for storing the workpiece (not shown), and has a cylindrical peripheral wall portion 12a, a lower wall portion 12b formed to close the lower opening of the peripheral wall portion 12a, and an upper wall portion 12c formed to close the upper opening of the peripheral wall portion 12a. The lower wall portion 12b is formed in a disk shape, and the upper wall portion 12c is formed in a curved shape that bulges upward. The peripheral wall portion 12a, the lower wall portion 12b, and the upper wall portion 12c form a wall portion 36 of the container body 12.

[0036] A discharge port 38 constituting an opening (not shown) is formed in the front part of the lower part of the peripheral wall portion 12a, and an automatic opening and closing lid portion 38a is attached to the discharge port 38. The control unit 30 is electrically connected to the lid portion 38a, and the lid portion 38a opens and closes in response to a control signal given from the control unit 30.

[0037] The upstream end of a discharge pipe 40 is connected to the center of the lower wall portion 12b so as to communicate with the storage space S, and an on-off valve 42 is attached to the discharge pipe 40. The control unit 30 is electrically connected to the on-off valve 42, and the on-off valve 42 is opened and closed in response to a control signal given from the control unit 30.

[0038] A cylindrical drive shaft nozzle 44 is formed in the center of the upper wall portion 12c, and a cylindrical input nozzle 46 and a cylindrical cleaning device nozzle 48 are formed on the outer periphery of the upper wall portion 12c. The drive shaft nozzle 44 is a portion that forms an opening (not shown) through which the rotating shaft 54a of the agitator 20 is inserted. The input nozzle 46 is a portion that forms an opening 46a for inputting the workpiece into the storage space S, and a lid 46b is detachably attached to the input nozzle 46. The cleaning device nozzle 48 is a portion that forms an opening 48a through which the cleaning device 28 is inserted.

[0039] The jacket 14 is a heating means for heating the vessel body 12, and has a jacket body 14a provided along the outer peripheral surface of the peripheral wall portion 12a. A heat medium flow path 50 for flowing a heat medium such as steam or hot water is formed between the peripheral wall portion 12a and the jacket body 14a. When the heat medium flows through the heat medium flow path 50, the vessel body 12 is heated by the heat of the heat medium, and thus the workpiece accommodated in the accommodation space S is heated. A pump (not shown) for supplying the heat medium to the jacket 14 is electrically connected to the control unit 30, and the pump is driven or stopped in response to a control signal given by the control unit 30.

[0040] The filtration unit 16 has a filtration plate 16a provided at the bottom of the storage space S so as to fit along the upper surface of the lower wall portion 12b. A flow path 52 is formed between the lower wall portion 12b and the filtration plate 16a to guide the filtrate that has passed through the filtration plate 16a to the discharge pipe 40.

[0041] The vibration generator 18 has a vibration unit 18a attached to the center of the filter plate 16a, a rod-shaped vibration shaft 18b, and a vibration generating unit 18c provided below the container body 12. One end of the vibration shaft 18b is connected to the vibration unit 18a, and the other end of the vibration shaft 18b is connected to the vibration generating unit 18c. When the vibration generating unit 18c generates vibrations, the vibrations are transmitted to the filter plate 16a via the vibration shaft 18b and the vibration unit 18a. A control unit 30 is electrically connected to the vibration generating unit 18c, and the vibration generating unit 18c is driven or stopped in response to a control signal provided by the control unit 30.

[0042] The agitator 20 has an agitator blade 54, a rotation drive device 56, and an elevator device 58. The agitator blade 54 is a member that agitates the material to be processed in the storage space S, and has a rod-shaped rotating shaft 54a and a plurality of blade members 54b attached to the lower end of the rotating shaft 54a. The upper end of the rotating shaft 54a is inserted into an opening (not shown) formed by the drive shaft nozzle 44, and protrudes above the upper wall portion 12c.

[0043] The rotation drive device 56 is a device for rotating the agitating blade 54 about a rotation center extending in the length direction, and has a motor 56a and a power transmission mechanism 56b for transmitting the rotational force of the motor 56a to the agitating blade 54. The control unit 30 is electrically connected to the motor 56a, and the motor 56a is driven or stopped in response to a control signal given from the control unit 30.

[0044] The lifting device 58 is a device for raising or lowering the agitating blade 54, and has a lifting cylinder 58a. Although not shown, the lifting cylinder 58a has a cylinder, a piston that is hydraulically driven inside the cylinder, and a piston rod connected to the piston, and the piston rod is connected to the agitating blade 54.

[0045] The control unit 30 is electrically connected to a valve device (not shown) for supplying hydraulic oil to the lifting cylinder 58a, and the valve device is operated in response to a control signal given from the control unit 30, thereby driving the piston of the lifting cylinder 58a. When the piston is driven and the piston rod is pushed out of the cylinder, the agitating blade 54 is raised. On the other hand, when the piston is driven and the piston rod is retracted into the cylinder, the agitating blade 54 is lowered.

[0046] The first leg 22 is a rod-shaped member that supports the front of the container 32, and is disposed so as to extend in the vertical direction below the front of the container 32. The front of the lower wall 12b that constitutes the container 32 is connected to the upper end of the first leg 22 via a rotation shaft (not shown) that extends in a direction (left-right direction) perpendicular to the vertical and front-rear directions.

[0047] The second leg 24 is a rod-shaped member that supports the rear of the container 32, and is disposed so as to extend vertically behind the container 32. A supported portion 60 is formed at the rear of the peripheral wall 12a that constitutes the container 32 so as to protrude rearward from the peripheral wall 12a. As shown in FIG. 1, when the supported portion 60 is placed on the upper surface of the second leg 24, the upper surface of the lower wall 12b becomes horizontal.

[0048] The tilting drive unit 26 has a tilting cylinder 26a that generates power for tilting the container 32. The tilting cylinder 26a has a cylinder 62a fixed to the second leg 24, a piston (not shown) that is hydraulically driven inside the cylinder 62a, and a piston rod 62b connected to the piston. The cylinder 62a is disposed so as to extend in the vertical direction with the piston rod 62b protruding upward, and the upper end of the piston rod 62b is connected to the supported unit 60.

[0049] A valve device (not shown) for supplying hydraulic oil to the tilting cylinder 26a is electrically connected to the control unit 30, and the valve device is operated in response to a control signal given from the control unit 30, thereby driving the piston of the tilting cylinder 26a. When the piston is driven and the piston rod 62b is pushed out of the cylinder 62a, the supported portion 60 is pushed upward and the rear part of the container body 12 is lifted. On the other hand, when the piston is driven and the piston rod 62b is retracted into the cylinder 62a, the rear part of the container body 12 is lowered.

[0050] The cleaning device 28 shown in Fig. 1 is a device for cleaning components with cleaning liquid K. In this embodiment, the components to be cleaned are the inner surface of the container body 12, the drive shaft nozzle 44, and the stirring blades 54. The cleaning device 28 is configured to spray the cleaning liquid K onto these components.

[0051] As shown in FIG. 2(A), the cleaning device 28 includes a cleaning device main body 64 arranged in the storage space S, a pressure chamber 66 formed inside the cleaning device main body 64, a cleaning liquid supply port 68 provided in the cleaning device main body 64, a plurality of (16 in this embodiment) spray portions 70a to 70d provided in the cleaning device main body 64, and a connecting pipe 72 connected to the cleaning liquid supply port 68.

[0052] The maximum outer diameter of the cleaning device main body 64 is set to be smaller than the inner diameter of the opening 48a formed by the cleaning device nozzle 48. Therefore, a user can insert the cleaning device 28 into the storage space S through the opening 48a. In the following description, the end of each part of the cleaning device 28 in the insertion direction will be referred to as the "tip end," and the end in the opposite direction will be referred to as the "base end." Furthermore, of the two ends of each part located opposite each other, the base end (one) will be referred to as the "base end," and the tip end (the other) will be referred to as the "tip portion."

[0053] The cleaning device main body 64 is a hollow member having a wall portion 74 that forms the pressure chamber 66, and has a small-diameter cylindrical portion 64a, a flared portion 64b, a large-diameter cylindrical portion 64c, and a tapered portion 64d that continue from the base end to the tip. That is, the small-diameter cylindrical portion 64a is formed at the base end of the cleaning device main body 64, and the tapered portion 64d is formed at the tip end of the cleaning device main body 64. The flared portion 64b is formed further tip-side than the small-diameter cylindrical portion 64a of the cleaning device main body 64, i.e., further tip-side than a cleaning liquid supply port 68 (described later).

[0054] As shown in Figure 2(B), the small-diameter cylindrical portion 64a is formed as a straight tube with a circular cross section, and the large-diameter cylindrical portion 64c is formed as a straight tube with a larger circular cross section than the small-diameter cylindrical portion 64a. The flared portion 64b is formed as a truncated cone that flares smoothly toward the tip without any steps. The tapered portion 64d is formed as a cone that tapers smoothly toward the tip without any steps. The thickness of each of these portions is constant.

[0055] The base end of the cleaning device main body 64, i.e., the base end of the small-diameter cylindrical portion 64a, serves as a cleaning liquid supply port 68 for supplying cleaning liquid K (FIG. 1) to the pressure chamber 66. That is, the base end of the cleaning device main body 64 is provided with the cleaning liquid supply port 68 for supplying cleaning liquid K to the pressure chamber 66. At least one (eight in this embodiment) of the multiple jetting portions 70a to 70d is provided in the tapered portion 64d, and at least one (four in this embodiment) of the multiple jetting portions 70a to 70d is provided in the divergent portion 64b. At least one (four in this embodiment) of the multiple jetting portions 70a to 70d is provided in the large-diameter cylindrical portion 64c.

[0056] As shown in FIG. 2B, each of the multiple sprayers 70a-70d is configured to spray cleaning liquid K toward a component in a different direction. Specifically, four sprayers 70a are provided at 90-degree intervals on the diverging portion 64b, and four sprayers 70b are provided at 90-degree intervals on the large-diameter cylindrical portion 64c. Four sprayers 70c are provided at 90-degree intervals on the base end of the tapered portion 64d, and four sprayers 70d are provided at 90-degree intervals on the tip end of the tapered portion 64d. Note that FIG. 2C shows the four sprayers 70b formed on the large-diameter cylindrical portion 64c.

[0057] When the cleaning device main body 64 is viewed from a direction perpendicular to the central axis M of the cleaning device main body 64, one spraying portion 70a, one spraying portion 70b, one spraying portion 70c, and one spraying portion 70d are arranged so as to be aligned on an imaginary line (not shown) extending parallel to the central axis M. As shown in FIG. 3(A), the spraying portion 70a is directed toward the inner surface of the upper wall portion 12c that constitutes the container main body 12, the spraying portion 70b is directed toward the drive shaft nozzle 44, and the spraying portions 70c and 70d are directed toward the rotation shaft 54a of the agitating blade 54.

[0058] As shown in FIG. 3B, when the four ejection sections 70a to 70d are viewed individually, the ejection sections 70a, 70b, and 70c are configured in substantially the same manner except for the ejection direction, while the ejection section 70d is configured differently from the others. Therefore, the following will focus on one ejection section 70c and one ejection section 70d, and describe their configurations in detail. In the following description, to clearly distinguish between the two ejection sections 70c and 70d, they will be referred to as the "first ejection section 70c" and the "second ejection section 70d." The same reference numerals will be used for the respective parts of the ejection sections 70a, 70b, and 70c.

[0059] Fig. 4(A) is an enlarged view of the IVA portion in Fig. 2(A), and Fig. 4(B) is a cross-sectional view taken along line IVB-IVB in Fig. 4(A). Fig. 4(A) shows the first injection part 70c and the second injection part 70d, and Fig. 4(B) shows the first injection part 70c.

[0060] 4(A) and 4(B), the first injection section 70c has an injection wall section 76 that is part of the wall section 74 of the cleaning device main body 64 that constitutes the pressure chamber 66, and a pair of injection holes 78a, 78b formed in the injection wall section 76 so as to open to an outer surface 76a of the injection wall section 76. Each of the pair of injection holes 78a, 78b is a through hole with a cylindrical inner surface that connects the pressure chamber 66 with the accommodation space S, which is the space outside the cleaning device main body 64.

[0061] As shown in Fig. 4(B), the pair of injection holes 78a, 78b are formed so that their center lines L1, L2 intersect at an intersection P so that the cleaning liquid K injected from them in a columnar shape collides with each other and spreads in a fan shape (Fig. 4(A)). The injection wall portion 76 in which the pair of injection holes 78a, 78b are formed has a constant thickness and is curved so as to bulge out toward the intersection P.

[0062] When an imaginary plane including the center lines L1, L2 of the pair of injection holes 78a, 78b is defined as a first reference plane Q1, the points where the center lines L1, L2 of the pair of injection holes 78a, 78b intersect with an imaginary outer surface of the wall portion 74 if the injection holes 78a, 78b were not formed are defined as reference points G1, G2, and an imaginary plane including the two reference points G1, G2 and extending in the thickness direction of the wall portion 74 is defined as a second reference plane Q2, the first reference plane Q1 and the second reference plane Q2 overlap each other. In other words, the first angle at which the first reference plane Q1 and the second reference plane Q2 intersect in the first injection part 70c is "0 degrees."

[0063] 4(B), when a line segment (not shown) connecting the two reference points G1 and G2 is bisected and an imaginary line extending in the thickness direction of the wall portion 74 is defined as a direction line X, the direction from the inside to the outside of the cleaning device main body 64 along the direction line X is the direction in which the outer surface 76a of the injection wall portion 76 faces. In other words, the direction in which the outer surface 76a of the injection wall portion 76 constituting the first injection portion 70c faces means the direction from the inside to the outside of the cleaning device main body 64 along the direction line X.

[0064] 4(A), the second injection section 70d has an injection wall section 80 which is part of the wall section 74 of the cleaning device main body 64 which constitutes the pressure chamber 66, and a pair of injection holes 84a, 84b formed in the injection wall section 80 so as to open to an outer surface 80a of the injection wall section 80. Each of the pair of injection holes 84a, 84b is a through hole having a cylindrical inner surface which connects the pressure chamber 66 with the storage space S which is the space outside the cleaning device main body 64.

[0065] The pair of injection holes 84a, 84b are formed so that their center lines L1, L2 intersect at an intersection P so that the cleaning liquid K injected from them in a columnar shape collides with each other and spreads in a fan shape. The injection wall portion 80 in which the pair of injection holes 84a, 84b are formed has a constant thickness and is curved so as to bulge out toward the intersection P side.

[0066] When an imaginary plane including the center lines L1, L2 of the pair of injection holes 84a, 84b is defined as a first reference plane Q1, the points where the center lines L1, L2 of the pair of injection holes 84a, 84b intersect with the imaginary outer surface of the wall portion 74 assuming that the injection holes 84a, 84b are not formed are defined as reference points G1, G2, and an imaginary plane including the two reference points G1, G2 and extending in the thickness direction of the wall portion 74 is defined as a second reference plane Q2, the first reference plane Q1 and the second reference plane Q2 intersect with each other. In this embodiment, the second angle at which the first reference plane Q1 and the second reference plane Q2 of the second injection portion 70d intersect is 30 degrees. In other words, the first angle of the first injection portion 70c and the second angle of the second injection portion 70d are set to be different from each other.

[0067] 4A, the direction in which the outer surface 80a of the injection wall portion 80 of the second injection portion 70d faces is the direction from the inside to the outside of the cleaning device body 64 along the direction line X of the second injection portion 70d, and coincides with the direction in which the outer surface 76a of the injection wall portion 76 of the first injection portion 70c faces. Meanwhile, the first angle of the first injection portion 70c and the second angle of the second injection portion 70d are different from each other. Therefore, the injection direction of the cleaning liquid K injected from the second injection portion 70d is different from the injection direction of the cleaning liquid K injected from the first injection portion 70c.

[0068] 3(B) is common to the first jetting portion 70c in that the first reference plane Q1 and the second reference plane Q2 coincide (not shown). On the other hand, the direction in which the outer surface 76a of the jetting wall portion 76 of the jetting portion 70a faces is the direction of the inner surface of the upper wall portion 12c of the container body 12, which is different from the direction in which the outer surface 76a of the jetting wall portion 76 of the first jetting portion 70c faces. In other words, the jetting direction of the cleaning liquid K jetted from the jetting portion 70a is different from the jetting direction of the cleaning liquid K jetted from the first jetting portion 70c.

[0069] 3(B) formed in the large-diameter cylindrical portion 64c is common to the first ejection portion 70c in that the first reference plane Q1 and the second reference plane Q2 coincide (not shown). On the other hand, the direction in which the outer surface 76a of the ejection wall portion 76 of the ejection portion 70b faces is the direction of the drive shaft nozzle 44, which is different from the direction in which the outer surface 76a of the ejection wall portion 76 of the first ejection portion 70c faces. In other words, the ejection direction of the cleaning liquid K ejected from the ejection portion 70b is different from the ejection direction of the cleaning liquid K ejected from the first ejection portion 70c.

[0070] As shown in Fig. 4(B), when the bisector that bisects the angle formed by the center lines L1 and L2 is defined as a reference line E, the reference line E of the first jetting part 70c shown in Fig. 4(A) and the reference line E of the second jetting part 70d shown in Fig. 4(A) are located in the same imaginary plane (not shown). Furthermore, as shown in Fig. 3(B), the reference line E of the jetting part 70a and the reference line E of the jetting part 70b are also located in the same imaginary plane. Therefore, when the area where the cleaning liquid K jetted from each of the jetting parts 70a to 70d spreads in a fan shape is defined as a fan-shaped jetting area F, the fan-shaped jetting areas F corresponding to one jetting part 70a, one jetting part 70b, one first jetting part 70c, and one second jetting part 70d are configured along the same imaginary plane.

[0071] As shown in FIG. 2(A), the connecting pipe 72 is a straight pipe member for supporting the cleaning device main body 64 in the accommodation space S. A socket 72a is formed at the tip of the connecting pipe 72, and the cleaning liquid supply port 68 of the cleaning device main body 64 is connected to the socket 72a. A first flange 72b and a second flange 72c are formed at the base end of the connecting pipe 72. The first flange 72b is connected to the open end 48b of the cleaning device nozzle 48 using a first clamp 88. The second flange 72c is connected to the downstream end 92a of the cleaning liquid supply pipe 92 using a second clamp 90.

[0072] With the first flange 72b connected to the open end 48b of the cleaning device nozzle 48, the spraying portions 70a to 70d of the cleaning device 28 are directed toward the rotation shaft 54a of the agitating blade 54 shown in FIG. 1. That is, the reference lines E (FIG. 3(B)) of the spraying portions 70a to 70d and the rotation shaft 54a are arranged along the same imaginary plane (not shown). Therefore, the fan-shaped surface of the cleaning liquid K sprayed from the spraying portions 70a to 70d and the rotation shaft 54a are arranged along the same imaginary plane, and the cleaning liquid K can be applied linearly to the rotation shaft 54a.

[0073] 1, the cleaning liquid supply pipe 92 is provided with a pump 94 for supplying the cleaning liquid K to the cleaning device 28. The control unit 30 is electrically connected to the pump 94, and the pump 94 is driven or stopped in response to a control signal given from the control unit 30.

[0074] The control unit 30 is a device that controls each electrical device for operating the processing device 10, and is configured by a microcomputer (not shown) that includes a CPU, ROM, RAM, etc. The ROM stores operation programs for each electrical device. Note that in Figure 1, the electrical circuit for executing the cleaning process is shown by dashed lines, and electrical circuits for executing other processes are omitted.

[0075] (Operation of the processing apparatus according to the first embodiment) In the processing device 10 shown in FIG. 1, a filtering step, a drying step, a discharging step, and a washing step are carried out in this order.

[0076] In the filtration step, the user puts the material to be treated into the storage space S through the opening 46a of the charging nozzle 46, and then attaches the lid 46b to the charging nozzle 46. The control unit 30 controls the valve device (not shown) of the lifting cylinder 58a to lift the mixing blade 54. It also controls the valve 42 of the discharge pipe 40 to open. It also controls the valve (not shown) of the gas introduction pipe connected to the container body 12 to open. Then, the liquid contained in the material to be treated is discharged through the filter plate 16a and the discharge pipe 40, and the solid matter contained in the material to be treated is deposited on the surface of the filter plate 16a.

[0077] In the drying step, the control unit 30 controls a pump (not shown) to supply hot water to the jacket 14. It also controls a valve device (not shown) of the lifting cylinder 58a to lower the mixing blades 54. It also controls the rotation drive device 56 to rotate the mixing blades 54. As a result, the material to be treated is heated while being mixed, and is efficiently dried.

[0078] In the discharge step, the control unit 30 controls the lid 38a of the discharge port 38 to open. Also, the control unit 30 controls the valve device (not shown) of the tilting cylinder 26a to lift the rear part of the container body 12. Furthermore, the control unit 30 controls the vibration generating unit 18c of the vibration generating unit 18 to be driven, and controls the rotation driving unit 56 to rotate the stirring blades 54. Then, the processed material (solid matter) obtained through the filtration step and the drying step is discharged from the discharge port 38.

[0079] In the cleaning step, the control unit 30 controls the pump 94 to supply cleaning liquid K to the cleaning device 28. It also controls the rotary drive device 56 to rotate the agitating blade 54 about a rotation center extending in the longitudinal direction. It also controls the on-off valve 42 of the discharge pipe 40 to open. Then, the cleaning liquid K is sprayed from the spray units 70a-70d of the cleaning device 28 toward the inner surface of the vessel body 12, the drive shaft nozzle 44, and the agitating blade 54, thereby cleaning them. In the cleaning step, the control unit 30 may control the valve device (not shown) of the lifting cylinder 58a to repeatedly move the agitating blade 54 up and down, or may control the valve device (not shown) of the lifting cylinder 58a to gradually move the agitating blade 54 up and down.

[0080] (Effects of the processing apparatus according to the first embodiment) The processing apparatus 10 and cleaning apparatus 28 of the first embodiment can achieve the following effects through the above configuration. Specifically, as shown in FIG. 4A, the cleaning liquid K sprayed in a columnar shape from the pair of injection holes 78a, 78b and 84a, 84b collide with each other and spread out in a fan shape. Therefore, by appropriately selecting the position, size, and orientation of each of the pair of injection holes 78a, 78b and 84a, 84b, the injection pattern of the cleaning liquid K can be appropriately determined depending on the position and shape of the component. In other words, the degree of freedom in designing the injection pattern of the cleaning liquid K can be increased, allowing the component to be cleaned efficiently. Furthermore, because each of the pair of injection holes 78a, 78b and 84a, 84b can be formed as a through-hole with a simple shape, the injection holes can be easily machined, and adhesion of foreign matter can be suppressed, thereby suppressing the introduction of foreign matter (contamination).

[0081] As shown in FIG. 3(B), the injection wall portions 76 of the injection portions 70a, 70b, and 70c and the injection wall portion 80 of the injection portion 70d are formed so that their outer surfaces 76a and 80a face in different directions, so that a wide range of components can be efficiently cleaned despite the simple and compact structure.

[0082] As shown in FIG. 3(B), the fan-shaped injection areas F corresponding to one injection portion 70a, one injection portion 70b, one first injection portion 70c, and one second injection portion 70d are configured along one imaginary plane (not shown), so that the rotating shaft 54a, which is a member formed in an elongated shape, can be efficiently cleaned.

[0083] 4A, the first angle (0 degrees) at which the first reference plane Q1 and the second reference plane Q2 intersect in the first ejection part 70c and the second angle (30 degrees) at which the first reference plane Q1 and the second reference plane Q2 intersect in the second ejection part 70d are set to be different from each other. Therefore, in these ejection parts 70c and 70d, even though the outer surfaces 76a and 80a of the ejection wall parts 76 and 80 face in the same direction, it is possible to direct the ejection directions of the cleaning liquid K in different directions, thereby increasing the degree of freedom in design.

[0084] 3(B), a tapered portion 64d is formed at the tip of the cleaning device main body 64, smoothly tapering toward the tip without any steps, so that when the tip is positioned at the lowest position of the cleaning device main body 64, the cleaning liquid K adhering to the surface of the cleaning device main body 64 can be made to flow down the surface of the tapered portion 64d and drop from the tip. Therefore, even if foreign matter adheres to the surface of the cleaning device main body 64, the foreign matter can be efficiently washed away with the cleaning liquid K.

[0085] 3(B), a flared portion 64b that smoothly flares toward the tip side is formed on the tip side of the cleaning liquid supply port 68 in the cleaning device main body 64, without any steps. This makes it possible to increase the surface area of ​​the flared portion 64b and the large-diameter cylindrical portion 64c connected to the flared portion 64b, making it easy to ensure the spray portions 70a, 70b. Furthermore, as shown in FIGS. 10 and 11, when the cleaning device main body 64 is placed with the direction from the base end toward the tip aligned with the vertical direction, the surface of the flared portion 64b is inclined with respect to the horizontal plane, making it difficult for foreign matter to adhere to the surface.

[0086] As shown in FIG. 3(A), the processing device 10 rotates the elongated rotating shaft 54a with a rotary drive device 56 (FIG. 1) while cleaning it with a cleaning device 28. Therefore, even if there is only one cleaning device 28, the rotating shaft 54a can be cleaned evenly.

[0087] (Variation) The present invention is not limited to the above-described embodiment, and various modifications are possible without departing from the scope of the present invention. For example, in the above-described embodiment, the cleaning device main body 64 shown in FIG. 3(B) is provided with 16 jetting sections 70a to 70d, but the number of jetting sections may be changed as appropriate as long as it is at least two. Furthermore, the number of jetting sections formed so that the outer surfaces of the jetting walls face in different directions may be changed as appropriate as long as it is at least two.

[0088] The number and configuration of the injection portions provided in each of the small-diameter cylindrical portion 64a, the diverging portion 64b, the large-diameter cylindrical portion 64c, and the tapered portion 64d shown in Figure 3(B) may be changed as appropriate. For example, in the above embodiment, no injection portion is provided in the small-diameter cylindrical portion 64a, but an injection portion may also be provided in the small-diameter cylindrical portion 64a. Furthermore, the angle at which the first reference plane Q1 and the second reference plane Q2 intersect in each injection portion may be changed as appropriate.

[0089] In the above embodiment, the sectorial injection regions F corresponding to each of the four injection portions 70a, 70b, 70c, and 70d shown in Fig. 3(B) are configured along one imaginary plane (not shown), but sectorial injection regions F corresponding to two, three, or five or more injection portions may be configured along one imaginary plane. In other words, it is sufficient that the sectorial injection regions F corresponding to at least two injection portions are configured along one imaginary plane.

[0090] In the above embodiment, the rotating shaft 54a, which is a member (object to be cleaned), is rotated by the rotation drive device 56. However, the member rotated by the rotation drive device 56 is not limited to the rotating shaft 54a. For example, the member may be a cylindrical cover member (not shown) disposed around the rotating shaft 54a to protect the rotating shaft 54a. This cover member, like the rotating shaft 54a, is formed in an elongated shape and rotates together with the rotating shaft 54a. Therefore, the processing device 10 can efficiently clean the cover member with the cleaning device 28.

[0091] 5A shows a first modified example of the spraying mode, and FIG. 5B shows a second modified example of the spraying mode. As shown in FIGS. 3A, 5A, and 5B, two cleaning regions aligned axially on the outer circumferential surface of a rotating shaft 54a are designated as a first cleaning region V1 and a second cleaning region V2. Any portion of the first cleaning region V1 that is linearly hit by the cleaning liquid K is designated a first target region W1, and any portion of the second cleaning region V2 that is linearly hit by the cleaning liquid K is designated a second target region W2. Furthermore, a region extending circumferentially around the rotating shaft 54a that passes through an end W1a of the first target region W1 adjacent to the second target region W2 is designated a first end region Z1. A region extending circumferentially around the rotating shaft 54a that passes through an end W2a of the second target region W2 adjacent to the first target region W1 is designated a second end region Z2.

[0092] When defined in this manner, the processing apparatus 10 shown in Fig. 3(A) employs a spraying mode in which the first end region Z1 and the second end region Z2 are separated, but as shown in Figs. 5(A) and (B), a spraying mode in which the first end region Z1 and the second end region Z2 overlap may be employed. In other words, the cleaning device 28 of the processing apparatus 10 shown in Fig. 3(A) employs a spraying mode in which the fan-shaped spraying regions F of the two sprayers 70c, 70d do not overlap before the rotation axis 54a, but a spraying mode in which the fan-shaped spraying regions F corresponding to at least the two sprayers 70c, 70d partially overlap before the rotation axis 54a may be employed.

[0093] 5(A), the sector-shaped injection areas F (not shown) corresponding to the two injection portions 70c, 70d partially overlap in front of the rotary shaft 54a, and the end W1a of the first injection target portion W1 adjacent to the second injection target portion W2 and the end W2a of the second injection target portion W2 adjacent to the first injection target portion W1 overlap with each other. Therefore, when the rotary shaft 54a is rotated by the rotary drive device 56, the rotary shaft 54a is sufficiently cleaned in the area where the first end area Z1 and the second end area Z2 overlap. In other words, the rotary shaft 54a, which is a member formed in an elongated shape, can be cleaned evenly.

[0094] 5(B), the fan-shaped injection areas F (not shown) corresponding to the two injection portions 70c, 70d are partially opposed to each other in front of the rotary shaft 54a, and the end portion W1a of the first injection target portion W1 adjacent to the second injection target portion W2 and the end portion W2a of the second injection target portion W2 adjacent to the first injection target portion W1 are spaced apart in the circumferential direction of the rotary shaft 54a. Therefore, when the rotary shaft 54a is rotated by the rotary drive device 56, the rotary shaft 54a is thoroughly cleaned in the area where the first end area Z1 and the second end area Z2 overlap. In other words, the rotary shaft 54a, which is a member formed in an elongated shape, can be cleaned evenly.

[0095] Fig. 6(A) is a cross-sectional view showing a first modified example of the ejector, Fig. 6(B) is a cross-sectional view showing a second modified example of the ejector, Fig. 7(A) is a cross-sectional view showing a third modified example of the ejector, Fig. 7(B) is an enlarged view of part VIIB in Fig. 7(A), Fig. 8 is a view showing a fourth modified example of the ejector.

[0096] 4(B), in the first spraying unit 70c of the above embodiment, the reference line E that bisects the angle formed by the center lines L1, L2 of the pair of spray holes 78a, 78b is disposed so as to extend in the thickness direction of the wall portion 74. However, as in the spraying unit 96 according to the first modified example shown in FIG. 6(A), the reference line E that bisects the angle formed by the center lines L1, L2 of the pair of spray holes 102a, 102b may be disposed so as to extend in a direction intersecting with the thickness direction (the direction indicated by the directional line X) of the wall portion 74. Even in this case, the entire cleaning liquid K can be sprayed in the direction along the reference line E, and therefore the spray direction of the cleaning liquid K can be adjusted depending on the position of the member to be cleaned.

[0097] As shown in Fig. 4(B), in the first spray unit 70c of the above embodiment, the inner diameters of the pair of spray holes 78a, 78b are set to be the same. However, as in a spray unit 98 according to a second modified example shown in Fig. 6(B), the inner diameters of the pair of spray holes 104a, 104b may be set to be different. In this case, the cleaning liquid K sprayed from the spray hole 104a having a larger inner diameter prevails over the cleaning liquid sprayed from the spray hole 104b having a smaller inner diameter, so the overall spray direction of the cleaning liquid K is biased toward the spray direction of the spray hole 104a with respect to the reference line E. Therefore, the overall spray direction of the cleaning liquid K can be adjusted by adjusting the inner diameters of the pair of spray holes 104a, 104b.

[0098] As shown in Fig. 4(B), in the first injection section 70c of the above embodiment, the injection wall section 76 in which the pair of injection holes 78a, 78b are formed in the wall section 74 is curved in an arc shape so as to bulge toward the intersection P. However, as in the injection section 100 according to a third modified example shown in Figs. 7(A) and (B), the injection wall section 108 in which the pair of injection holes 106a, 106b are formed may be curved so as to bulge toward the intersection P. Note that in the injection section 100 according to the third modified example, one injection hole 106a is formed in the base end of the large-diameter cylindrical section 64c, and the other injection hole 106b is formed in the tip end of the divergent section 64b.

[0099] As shown in FIG. 3(B), in the injection portions 70a to 70d of the above embodiment, pairs of injection holes 78a, 78b and 84a, 84b are formed side by side in a direction perpendicular to the central axis M of the cleaning device main body 64. However, the pair of injection holes may be formed side by side in a direction parallel to the central axis M or inclined at any angle relative to the central axis M. For example, as shown in FIG. 8, the pair of injection holes 78a, 78b of the injection portion 70b provided in the large-diameter cylindrical portion 64c may be formed side by side in a direction parallel to the central axis M. In this case, the fan-shaped injection area F corresponding to the injection portion 70b expands in a direction perpendicular to the central axis M, so that members extending in a direction perpendicular to the central axis M can be efficiently cleaned.

[0100] Figure 9(A) is a perspective view showing a first modified example of the cleaning device body, Figure 9(B) is a perspective view showing a second modified example of the cleaning device body, Figure 9(C) is a perspective view showing a third modified example of the cleaning device body, and Figure 9(D) is a perspective view showing a fourth modified example of the cleaning device body.

[0101] As shown in FIG. 2B, the cleaning device body 64 of the above embodiment has a small-diameter cylindrical portion 64a, a truncated conical flared portion 64b, a large-diameter cylindrical portion 64c, and a conical tapered portion 64d. However, the shape of the cleaning device body is not limited to this and may be modified as appropriate. For example, the flared portion 64b may be formed in another shape that smoothly flares toward the tip without a step, such as a truncated pyramid, a hemisphere, or a semi-ellipsoid. Furthermore, the tapered portion 64d may be formed in another shape that smoothly tapers toward the tip without a step, such as a pyramid, a hemisphere, or a semi-ellipsoid.

[0102] Also, like the cleaning device main body 110 according to the first modification example shown in FIG. 9(A), the tapered portion 64d may be omitted, or like the cleaning device main body 111 according to the second modification example shown in FIG. 9(B), the large-diameter cylindrical portion 64c may be omitted, and the flared portion 64b and the tapered portion 64d may be directly connected. Further, like the cleaning device main body 112 according to the third modification example shown in FIG. 9(C), the portion excluding the small-diameter cylindrical portion 64a may be changed to a spherical portion 116. Furthermore, like the cleaning device main body 114 according to the fourth modification example shown in FIG. 9(D), the portion excluding the small-diameter cylindrical portion 64a may be changed to a rectangular parallelepiped or cubic portion 118.

[0103] In the above embodiment, the processing device 10 is configured as a filtration and drying device. However, the processing device of the present invention does not necessarily have to be configured as a filtration and drying device. For example, it may be configured as a filtration device without a drying function, or it may be configured as a drying device without a filtration function. Also, it may be configured as a reaction tank for reacting the workpiece.

[0104] (Processing device according to the second embodiment) FIG. 10 is a cross-sectional view showing the configuration of the processing device 120 according to the second embodiment. The processing device 120 according to the second embodiment is configured as a reaction tank for reacting the workpiece, and includes a container 128 having a container main body 122, a stirring device 124, a baffle 126, and the above-described cleaning device 28. The stirring blade 130 constituting the stirring device 124 has a rotating shaft 130a. The baffle 126 is a so-called baffle plate for causing a change in the flow of the workpiece stirred by the stirring blade 130, and has a baffle main body 126a formed in an elongated shape extending linearly (including rod-shaped). The rotating shaft 130a of the stirring blade 130 and the baffle main body 126a of the baffle 126 are provided parallel to each other with a gap therebetween, and the cleaning device 28 is disposed therebetween. Therefore, both the rotating shaft 130a and the baffle main body 126a formed in an elongated shape can be efficiently cleaned by the cleaning liquid K sprayed from the cleaning device 28.

[0105] (Processing device according to the third embodiment) Fig. 11 is a partially enlarged cross-sectional view showing the configuration of a processing apparatus 132 according to a third embodiment. The processing apparatus 132 according to the third embodiment shown in Fig. 11 includes a container 32 and a support part 34 (not shown) similarly to the processing apparatus 10 according to the first embodiment, and further includes a pipeline 134 connected to the container body 12. Furthermore, a cleaning device 136 is used instead of the cleaning device 28 shown in Fig. 2(A).

[0106] The conduit 134 includes a main pipe 138 extending in the vertical direction and a branch pipe 140 branching off from a pipe wall 138a of the main pipe 138. The main pipe 138 is a straight pipe member having an internal space U communicating with the storage space S. A first flange 138b is formed at the lower end of the main pipe 138, and a second flange 138c is formed at the upper end of the main pipe 138. The first flange 138b is connected to an open end 48b of the cleaning device nozzle 48 using a first clamp 144. The main pipe 138 may be provided to extend in a direction intersecting the vertical direction.

[0107] Branch pipes 140 are provided so that their positions become higher as they move away from main pipe 138. End 140a of branch pipe 140 farther from main pipe 138 is closed, and devices 140b such as a pressure sensor and a temperature sensor are provided inside end 140a. The number of branch pipes 140 is not particularly limited, and may be two or more.

[0108] 2(A), the cleaning device 136 includes a cleaning device main body 64 disposed in the accommodation space S, a cleaning liquid supply port 68 provided in the cleaning device main body 64, and a plurality of spray units 70a to 70d provided in the cleaning device main body 64. The cleaning device 136 further includes a tubular part 146 that functions as a second cleaning device main body. Note that the tubular part 146 is configured in substantially the same manner as the connecting pipe 72 of the cleaning device 28, except that it is provided with a spray unit 150, which will be described later. Therefore, corresponding parts are denoted by the same reference numerals, and redundant explanations will be omitted.

[0109] The tubular portion 146 is disposed in the internal space U of the main pipe 138 and extends in the longitudinal direction of the main pipe 138, and the lower end of the tubular portion 146 is connected to a cleaning liquid supply port 68 of the cleaning device main body 64. A pressure chamber 66 is formed by a wall portion 148 of the tubular portion 146 and a wall portion 74 of the cleaning device main body 64. At least one jetting portion 150 (one in the third embodiment) is provided in the tubular portion 146 so as to jet the cleaning liquid K toward the inner surface of the branch pipe 140. The jetting portion 150 is configured substantially similarly to the second jetting portion 70d shown in FIG. 4(A), and the angle at which the first reference plane Q1 and the second reference plane Q2 of the jetting portion 150 intersect is determined so that a portion of the fan-shaped spreading cleaning liquid K hits the vertically upper portion of the inner surface of the branch pipe 140 in the circumferential direction.

[0110] In the treatment device 132 according to the third embodiment, the spraying manner of the cleaning liquid K sprayed from the cleaning device 136 can be appropriately determined according to the position and shape of the inner surface of the branch pipe 140. Moreover, the cleaning liquid K can be made to flow down the inner surface of the branch pipe 140, thereby efficiently cleaning the inner surface. Furthermore, since the branch pipe 140 is provided so that its position increases with increasing distance from the main pipe 138, the cleaning liquid K that has flowed down the inner surface of the branch pipe 140 can be discharged by gravity into the internal space U of the main pipe 138, as shown by the white arrow in Fig. 11, and foreign matter adhering to the surfaces of the tubular portion 146 and the cleaning device main body 64 can be washed away by the cleaning liquid K. [Explanation of symbols]

[0111] E... Reference line, F... Fan-shaped injection area, G1, G2... Reference point, K... Cleaning liquid, L1, L2... Center line, M... Central axis, P... Intersection, Q1... First reference plane, Q2... Second reference plane, S... Accommodation space, U... Internal space, V1... First cleaning area, V2... Second cleaning area, W1 ...First sprayed part, W1a...End, Z1...First end region, W2...Second sprayed part, W2a...End, Z2...Second end region, 4a... jacket body, 16... filtration section, 16a... filtration plate, 18... vibration generator, 18a... vibration section, 18b... vibration shaft, 18c... vibration generator, 20... agitator, 22... first leg section, 24... second leg section, 26... tilt drive section, 26a... tilting cylinder, 28... cleaning device, 30... control section, 32... container, 34... support section, 36... wall section, 38... discharge port, 38a... lid section, 40... discharge pipe, 42... on-off valve, 44... drive shaft nozzle, 46... input nozzle, 46a... opening, 46b... lid body, 48... cleaning device nozzle , 48a...opening, 48b...opening end, 50...heat medium flow path, 52...flow path, 54...agitating blade, 54a...rotating shaft, 54b...blade member, 56...rotation drive device, 56a...motor, 56b...power transmission mechanism, 58...lifting device, 58a...lifting cylinder, 60...supported portion, 62a...cylinder, 62b...piston rod, 64...cleaning device main body, 64a...small diameter cylindrical portion, 64b...flared portion, 64c...large diameter cylindrical portion, 64d...tapered portion, 66...pressure chamber, 68...cleaning liquid supply port, 70a, 70b, 70c, 70d...spray Injection portion, 72...connection pipe, 72a...receptacle, 72b...first flange, 72c...second flange, 74...wall portion, 76, 80...injection wall portion, 76a, 80a...outer surface, 78a, 78b...injection hole, 84a, 84b...injection hole, 88...first clamp, 90...second clamp, 92...cleaning liquid supply pipe, 92a...downstream end, 94...pump, 96, 98, 100...injection portion, 102a, 102b...injection hole, 104a, 104b...injection hole, 106a, 106b...injection hole, 108...injection wall portion, 110, 111, 112,114... cleaning device body, 116... spherical part, 118... rectangular parallelepiped or cubic part, 120... treatment device, 122... container body, 124... stirring device, 126... baffle, 126a... baffle body, 128... container, 130... stirring blade, 130a... rotating shaft, 132... treatment device, 134... pipe, 136... cleaning device, 138... main pipe, 138a... pipe wall, 138b... first flange, 138c... second flange, 140... branch pipe, 140a... end, 140b... equipment, 144... first clamp, 146... tubular part, 148... wall part, 150... injection part.

Claims

1. A cleaning device that cleans a component by applying a cleaning liquid in a line to a cleaning area of ​​the component, A cleaning device body, a pressure chamber formed inside the cleaning device body; a cleaning liquid supply port provided in the cleaning device body so as to supply a cleaning liquid to the pressure chamber; a plurality of spraying units provided on the cleaning device body to spray cleaning liquid toward the cleaning area; each of the plurality of injection sections has an injection wall section that is a part of a wall section of the cleaning device main body that configures the pressure chamber, and a pair of injection holes that are formed in the injection wall section so as to open on an outer surface of the injection wall section and that communicate the pressure chamber with a space outside the cleaning device main body; The pair of injection holes are formed so that the cleaning liquid injected from them in a columnar shape collides with each other and spreads in a fan shape, The cleaning device, wherein the jet wall portions of at least two of the jet portions are formed so that their outer surfaces face in different directions from each other.

2. When the area in which the cleaning liquid sprayed from the pair of spray holes spreads in a fan shape is defined as a fan-shaped spray area, The cleaning device according to claim 1 , wherein the fan-shaped spray areas corresponding to at least two of the spray portions are configured along one imaginary plane.

3. The cleaning device of claim 2 , wherein the fan-shaped jet areas corresponding to at least two of the jets partially overlap.

4. Two of the plurality of injection sections are a first injection section and a second injection section, When an imaginary plane including the center lines of the pair of injection holes is defined as a first reference plane, a point where each center line of the pair of injection holes intersects with an imaginary outer surface of the wall portion on the assumption that the injection holes are not formed is defined as a reference point, and an imaginary plane including the two reference points and extending in the thickness direction of the wall portion is defined as a second reference plane, 2. The cleaning device according to claim 1, wherein a first angle at which the first reference plane and the second reference plane intersect in the first jetting part and a second angle at which the first reference plane and the second reference plane intersect in the second jetting part are determined to be different from each other.

5. When one of the two ends located on opposite sides of the cleaning device body is defined as a base end and the other is defined as a tip end, The base end portion is provided with the cleaning liquid supply port, The tip end has a tapered portion formed thereon that tapers smoothly toward the tip end without any steps, The cleaning device according to claim 1 , wherein at least one of the plurality of jets is provided on the tapered portion.

6. When one of the two ends located on opposite sides of the cleaning device body is defined as a base end and the other is defined as a tip end, The base end portion is provided with the cleaning liquid supply port, a diverging portion having a shape that smoothly diverges toward the tip side without any step is formed on the tip side of the cleaning liquid supply port in the cleaning device body, The cleaning device according to claim 1 , wherein at least one of the plurality of jets is provided on the divergent portion.

7. A processing apparatus including a container having a container body having a storage space for storing an object to be processed and the cleaning device according to any one of claims 1 to 4, The cleaning device main body is disposed in the accommodation space.

8. The member is formed in an elongated shape independently of the container body, The processing device of claim 7 , further comprising a rotational drive for rotating the member about a center of rotation extending in the longitudinal direction.

9. two cleaning areas aligned in the axial direction on the outer peripheral surface of the component are defined as a first cleaning area and a second cleaning area, any part in the first cleaning area that is linearly hit by the cleaning liquid is defined as a first sprayed part, and any part in the second cleaning area that is linearly hit by the cleaning liquid is defined as a second sprayed part, When a region extending in the circumferential direction of the member through an end of the first injected portion close to the second injected portion is defined as a first end region, and a region extending in the circumferential direction of the member through an end of the second injected portion close to the first injected portion is defined as a second end region, The processing device of claim 8 , wherein the first end region and the second end region overlap.

10. A processing apparatus comprising a container having a container body having a storage space for storing an object to be processed, a pipeline connected to the container body, and the cleaning device according to any one of claims 1 to 4, The pipeline includes a main pipe having an internal space communicating with the storage space, and a branch pipe branching from a wall of the main pipe and positioned higher as it moves away from the main pipe, the cleaning device main body has a tubular portion disposed in an internal space of the main pipe and extending in a longitudinal direction of the main pipe, At least one of the plurality of jetting portions is provided on the tubular portion so as to jet a cleaning liquid toward the inner surface of the branch pipe.

Images