Annular seal material

Abstract

To provide an annular seal material which can achieve seal performance in a reliable manner even if an attachment object is divided into two components.SOLUTION: A semiconductor manufacturing device includes an annular seal material which is attached straddling outer peripheries of cylindrical two components divided in a vertical direction. The annular seal material includes, on its cross section, a body part having a substantially rectangular shape, and a concave part formed on an inner peripheral surface of the body part. When the annular seal material is attached to the two components, the concave part is disposed at a position corresponding to a parting part between the two components.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to an annular seal that is attached to a cylinder divided into two parts in a semiconductor manufacturing device and is used to properly seal the gap between the two parts. [Background technology]

[0002] 2. Description of the Related Art Conventionally, semiconductor manufacturing apparatuses have been known that manufacture semiconductors such as silicon wafers by performing device film formation processes such as plasma etching in a clean environment and in a high vacuum. In such semiconductor manufacturing equipment, annular seals are used in various locations to manufacture high-quality semiconductors (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2023-081419 Summary of the Invention [Problem to be solved by the invention]

[0004] However, such an annular sealing material may not be able to exhibit sufficient sealing performance in the installation location shown in Patent Document 1 above. For example, as shown in Figure 7, suppose the object to which the annular sealing material 100 is to be attached is divided into a first cylindrical part 102 and a second cylindrical part 104, and it is necessary to seal a gap 106 that occurs at the separation between the two.

[0005] In this case, because there are machining tolerances between the two parts separated by the gap 106, the diameters of the two parts are not the same, resulting in a slight step 107 in the radial direction. The two parts may also become eccentric during assembly. Furthermore, if the two parts are made of different materials, the difference in thermal expansion coefficients may cause step 107 to occur between the two parts when heated.

[0006] When a step or eccentricity occurs, a gap 108 is generated between the annular seal 100 and the first cylindrical part 102. In this case, the annular seal 100 cannot be kept in constant contact with both the first cylindrical part 102 and the second cylindrical part 104. This makes it impossible to seal the gap 106 properly, and in some cases, foreign matter may enter the gap 106.

[0007] On the other hand, the radial elongation rate of the annular sealing material 100 needs to be suppressed so as to prevent cracks from occurring when heated by degraded gas, etc. Therefore, there is a problem in that the sealing performance cannot be exhibited by increasing the radial elongation rate.

[0008] An object of the present invention is to provide an annular sealing material that can reliably exhibit sealing performance even when the object to which it is attached is divided into two parts. [Means for solving the problem]

[0009] The annular sealing material of the present invention comprises: In a semiconductor manufacturing device, an annular seal is attached across the outer periphery of two cylindrical parts that are divided in the vertical direction, The annular sealing material has a cross section as follows: a main body portion having a substantially rectangular shape; a concave portion formed on the inner circumferential surface of the main body portion; Equipped with When the annular seal is attached to the two components, The recessed portion is disposed at a position corresponding to the dividing portion between the two components.

[0010] In this way, the concave portion formed on the inner surface of the main body portion is arranged across the dividing portion at a position corresponding to the dividing portion between the two parts, so that the annular sealing material can contact the two parts with a predetermined contact area. This blocks the space inside and outside the gap between the two components, maintaining the desired sealing performance and preventing foreign matter from entering the gap.

[0011] Furthermore, even if the outer diameters of the upper and lower components change and the depth of the step changes, the main body can deform using the position where the concave portion is formed as a fulcrum. Therefore, even if the radial elongation rate of the annular seal is low, it can always maintain contact with the attachment object above and below the position where the concave portion is formed. As a result, even if the object to be attached is divided into two parts, the sealing performance can be reliably exhibited.

[0012] The annular sealing material of the present invention is The minimum thickness of the main body at the position where the concave portion is formed is It is characterized in that the thickness is within a range of 50% to 80% of the maximum thickness of the main body portion.

[0013] In this way, by making the thickness of the wall at the position where the concave portion is formed thinner, even when the outer diameter of the two upper and lower parts changes, the position where the concave portion is formed becomes a fulcrum and the part can always maintain contact with the object to be attached above and below the position where the concave portion is formed.

[0014] The annular sealing material of the present invention is The range in which the concave portion is formed is: The maximum height of the main body is within a range of 8% to 40% of the center of the maximum height of the main body.

[0015] In this way, by limiting the range in which the concave portion is formed, even when the outer diameters of the upper and lower parts change, the position where the concave portion is formed becomes a fulcrum and the part can easily deform, and contact with the object to be attached can always be maintained above and below the position where the concave portion is formed.

[0016] The annular sealing material of the present invention is The annular seal is characterized in that its outer diameter decreases from one end to the other end. This makes it possible to easily release the annular sealing material from the mold when the annular sealing material is molded using the mold. [Effects of the Invention]

[0017] According to the present invention, it is possible to provide an annular sealing material that can reliably exhibit sealing performance even when the object to which it is attached is divided into two parts. [Brief explanation of the drawings]

[0018] [Figure 1] 1 is a diagram showing an overview of a semiconductor manufacturing apparatus in which an annular sealing material according to an embodiment is used; [Figure 2] 1 is a perspective view of an annular sealing material according to an embodiment, viewed from above; [Figure 3] 3 is a cross-sectional view showing the annular sealing material shown in FIG. 2 cut at the center. FIG. [Figure 4] FIG. 4 is an enlarged view of a cross section of the annular sealing material shown in FIG. [Figure 5] 3A and 3B are explanatory views showing the shape and dimensions of a main body portion constituting the annular sealing material according to the embodiment; [Figure 6] 1 is a diagram showing a state in which the annular sealing material according to the embodiment is attached to an attachment object. [Figure 7] FIG. 10 is a diagram showing a state in which a conventional annular sealing material is attached to an attachment object. DETAILED DESCRIPTION OF THE INVENTION

[0019] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An annular sealing material according to an embodiment of the present invention will be described below with reference to the drawings, taking as an example a case where it is used in a semiconductor manufacturing device. 1 is a diagram showing a semiconductor manufacturing apparatus equipped with an annular sealant according to an embodiment of the present invention. As shown in FIG. 1, an annular sealant 42 according to the embodiment of the present invention is attached to straddle the outer periphery of two vertically separated cylindrical components, such as an electrostatic chuck 10 and a pedestal 12, an inner focus ring 14a and a side surface protection member 16, and an outer focus ring 14b and a side surface protection member 16.

[0020] Fig. 2 is a perspective view of an annular sealing material 42 according to an embodiment of the present invention as viewed from above, and Fig. 3 is a cross-sectional view showing the annular sealing material 42 cut at the center shown in Fig. 2. In Figs. 2 and 3, in order to explain the cross-sectional shape of the annular sealing material 42, a main body portion 44 (described later) is exaggerated so as to be larger than the outer diameter of the annular sealing material 42.

[0021] 2 and 3, the annular seal 42 is formed so that its outer diameter decreases from the top to the bottom. This makes it easier to release the annular seal 42 from a mold (not shown) when the annular seal 42 is molded using the mold. It also makes it easier to create the mold.

[0022] Furthermore, rubber is used as the material for the annular seal member 42. The rubber is not particularly limited as long as it is one that is commonly used in seal members, but various synthetic rubber materials such as nitrile rubber, hydrogenated nitrile rubber, fluororubber, silicone rubber, urethane rubber, and ethylene propylene rubber (EPDM) can be used.

[0023] Specific examples of the rubber component include perfluoroelastomer (FFKM), fluororubber (FKM), silicone rubber, fluorosilicone rubber, ethylene-propylene rubber (EPM), ethylene-propylene-diene rubber (EPDM), nitrile rubber (NBR; acrylonitrile butadiene rubber), hydrogenated nitrile rubber (HNBR; hydrogenated acrylonitrile butadiene rubber), butyl rubber (IIR), and acrylic rubber.

[0024] Furthermore, the radial elongation rate of the annular seal 42 is 15% or less, and the Shore hardness of the annular seal 42 is within a range of 50 to 70. This reduces the risk of cracks occurring in the main body 44 when the annular seal 42 elongates in the radial direction due to heating of the degraded gas, etc.

[0025] Fig. 4 is an enlarged view of the cross section of the annular sealing material 42 shown in the circle R in Fig. 3. As shown in Fig. 4, the annular sealing material 42 has a main body 44 having a substantially rectangular cross section, and a concave portion 46 is formed on the inner peripheral surface of the main body 44, with the central portion in the up-down direction being concave. The outer peripheral surface of the main body 44 is flat.

[0026] Fig. 5 is an explanatory diagram showing the shape and dimensions of main body 44. As shown in Fig. 5, a concave bottom 46a is formed in the center of concave surface 46, where main body 44 is at its thinnest, and curved surface portions 46b are formed above and below concave bottom 46a, gradually rising from concave bottom 46a toward the ends of main body 44 and increasing in thickness.

[0027] Furthermore, in the main body 44, the minimum thickness A of the concave portion 46 is within a range of 50% to 80% of the maximum thickness B of the main body 44, and the formation range C of the concave portion 46 is within a range of 8% to 40% based on the center of the maximum height D of the main body 44.

[0028] Next, a state in which the annular seal 42 according to the embodiment of the present invention is attached to an attachment target will be described. As shown in Fig. 6, in semiconductor manufacturing equipment 2, the annular seal 42 is attached across the outer peripheries of two cylindrical parts that are divided vertically.

[0029] Note that because there is a processing tolerance in the outer diameters of the separated first cylindrical part 52 and second cylindrical part 54, the outer diameters of the two will not be the same. Furthermore, if the thermal expansion coefficients of the first cylindrical part 52 and the second cylindrical part 54 are different, a difference in the outer diameters of the two will occur when the temperature inside the chamber 4 (see FIG. 1) is raised. Due to these circumstances, a step 56 will occur in the radial direction between the two.

[0030] When the annular sealing material 42 is attached to the two parts, the first cylindrical part 52 and the second cylindrical part 54, to which it is to be attached, the main body part 44 is arranged in a position where the concave part 46 corresponds to the step 56 formed at the dividing part between the two parts.

[0031] In this case, the upper and lower curved surface portions 46b contact the first cylindrical part 52 and the second cylindrical part 54 with a predetermined contact area, respectively. The second cylindrical part 54 has a flange 54a, and the bottom surface of the main body 44 contacts the flange 54a.

[0032] This blocks the space inside and outside the gap 58 generated between the two components, making it possible to maintain the desired sealing performance. Furthermore, it is possible to prevent situations such as the intrusion of foreign matter into the gap 58.

[0033] Here, if the outer diameters of the first cylindrical part 52 and the second cylindrical part 54 change due to heating or the like, causing a change in the depth of the step 56, the main body 44 can deform while maintaining a predetermined contact area at the upper and lower curved parts 46b, with the concave bottom part 46a, which is the thinnest at the position where the concave part 46 is formed, as a fulcrum.

[0034] Therefore, even if the radial elongation rate of the annular sealing material 42 is low, 15% or less, the annular sealing material 42 can always maintain contact with the object to which it is attached above and below the position where the concave surface portion 46 is formed.

[0035] As described above, the annular sealing material 42 according to the embodiment of the present invention can reliably exhibit sealing performance even when the object to which it is attached is divided into two parts. The main body 44 is formed so that the outer diameter decreases from the top to the bottom, has a recessed bottom 46a, and has curved surfaces 46b that gradually increase in thickness above and below the recessed bottom 46a. This makes it easier to release the annular seal 42 from the mold when it is molded using a mold.

[0036] Furthermore, in the main body 44, the minimum thickness A of the recessed bottom 46a, where the recessed surface 46 is formed, is within a range of 50% to 80% of the maximum thickness B of the main body 44, and the formation range C of the recessed surface 46 is within a range of 8% to 40% based on the center of the maximum height D of the main body 44. Therefore, the formation range and thickness of the recessed surface 46 are limited, and even when the outer diameters of the two components change, the recessed surface 46 is likely to deform with the position where the recessed surface 46 is formed as a fulcrum. Therefore, it is possible to constantly maintain contact with the attachment object above and below the position where the recessed surface 46 is formed.

[0037] In the above embodiment, the annular sealing material 42 is described as being attached to the semiconductor manufacturing equipment 2, but it can also exhibit sealing performance in other equipment when it is attached across the outer periphery of two cylindrical parts that are divided vertically.

[0038] The same effect can be obtained even if the first cylindrical part 52 and the second cylindrical part 54 are eccentric during assembly. 2 of the above-described embodiment, the annular sealing material 42 does not necessarily have to be formed so that the outer diameter decreases from the upper end to the lower end, as long as the outer diameter decreases from one end to the other. In other words, the annular sealing material 42 can be attached to the attachment object with the end with the smaller outer diameter facing upward.

[0039] In addition, in the above-described embodiment, the concave surface 46 is formed on the main body 44, and is composed of the concave bottom 46a and the curved surfaces 46b above and below it. However, the shape of the concave surface 46 is not necessarily limited to that shown in the embodiment, as long as it can ensure a predetermined contact area and provide reliable sealing performance when the attachment target is divided into two parts. For example, the shape of the outer periphery of the main body 44 may be formed with rectangular recesses on the upper and lower ends of the main body 44, or the design can be modified as appropriate, such as by forming an arc shape or a "L" shape so that the upper and lower ends of the main body 44 are thinner than the center. [Explanation of symbols]

[0040] 2. Semiconductor manufacturing equipment 4 chambers 10 Electrostatic chuck 12 Mounting stand 14a Inner focus ring 14b Outer focus ring 16 Side protection member 42 Annular seal material 44 Main body 46 Concave part 46a Concave bottom 46b Curved section 52 First cylindrical part 54 Second cylindrical part 54a flange 56 steps 58 Gap 100 Annular seal material 102 First cylindrical part 104 Second cylindrical part 106 Gap 107 Steps 108 void A: Minimum thickness at the position where the concave portion 46 is formed B Maximum thickness of main body 44 C. Formation range of the concave portion 46 D. Maximum height of main body 44

Claims

1. In a semiconductor manufacturing device, an annular seal is attached across the outer periphery of two cylindrical parts that are divided in the vertical direction, The annular sealing material has a cross section as follows: a main body portion having a substantially rectangular shape; a concave portion formed on the inner circumferential surface of the main body portion; Equipped with When the annular seal is attached to the two components, The annular seal is characterized in that the concave portion is disposed at a position corresponding to the dividing portion between the two components.

2. The minimum thickness of the main body at the position where the concave portion is formed is 2. The annular seal according to claim 1, wherein the thickness of the annular seal is within a range of 50% to 80% of the maximum thickness of the main body portion.

3. The range in which the concave portion is formed is:

2. The annular sealing material according to claim 1, wherein the maximum height of the main body portion is within a range of 8% to 40% of the center of the maximum height of the main body portion.

4. 2. The annular seal according to claim 1, wherein the annular seal is formed so that its outer diameter decreases from one end to the other end.

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