Radio frequency ionizer, radio frequency neutralizer and control method thereof

Abstract

The present invention relates to a radio frequency ionizer, a radio frequency neutralizer and its control method, the radio frequency ionizer is applied to a radio frequency neutralizer, and includes an ionization chamber and a radio frequency coil, the side wall of the ionization chamber is built with a spiral passage, the radio frequency coil is a spiral design, and its structure is consistent with the structure of the spiral passage, the radio frequency coil is attached to the spiral passage from one end of the ionization chamber by a spiral, and both ends of the radio frequency coil are connected to a radio frequency line. According to the above technical solution, by building a spiral passage into the side wall of the ionization chamber, the radio frequency coil is firmly fixed in the spiral passage, so that the use efficiency of the radio frequency is higher, the possibility of oxidation is reduced, and the effect of the radio frequency neutralizer is improved. And the control method of the radio frequency neutralizer reduces the operation complexity of the start-up and adjustment process of the radio frequency neutralizer, and improves the control efficiency of the radio frequency neutralizer.

Description

[Technical field]

[0001] The present invention relates to the technical field of ion source devices, in particular to a radio frequency ionizer, a radio frequency neutralizer and a control method thereof. [Background technology]

[0002] Radio frequency neutralizers mainly use radio frequency to ionize gas and separate electrons using an electric field to provide neutralizing electrons to the ion source, and have a stable effect in practical applications. Due to its stable characteristics, radio frequency neutralizers are suitable for use in neutralization environments of 2A or less.

[0003] A conventional radio frequency neutralizer generally includes structures such as a housing, an ionization chamber, a positive ion collector, a radio frequency coil and a sustaining electrode, and its basic principle is that a working gas is fed into the ionization chamber, and plasma is generated by ionization using the radio frequency coil. The positive ion collector absorbs the positive ions in the plasma, and the electrons in the plasma are continuously guided to the outside and output from the electron output port of the ionization chamber under the action of the sustaining electrode.

[0004] The inventor of the present invention found that the radio frequency coil is easily deformed by high temperature and contaminated by oxidation, and the maintenance period is short, and the introduction efficiency of the radio frequency coil into the ionization chamber is low. At present, one way to solve the above problems is to provide a thread groove on the ionization chamber and add an outer cover, but there is still room for improvement in terms of stability. In addition, the structure of the entire radio frequency neutralizer becomes complicated, which affects the effect of the radio frequency neutralizer. Summary of the Invention

[0005] Therefore, in view of one of the above technical deficiencies, there is a need to provide a radio frequency ionizer and a radio frequency neutralizer that improves the effectiveness of the radio frequency neutralizer.

[0006] A radio frequency ionization device applied to a radio frequency neutralizer, comprising: an ionization chamber; and a radio frequency coil; A spiral passage is formed in a side wall of the ionization chamber; said radio frequency coil being of helical design, the structure of which corresponds to the structure of said helical passage; the radio frequency coil is attached to the helical passage from one end of the ionization chamber by a helix, and both ends of the radio frequency coil are connected to a radio frequency line; Radio frequency ionizer.

[0007] In one embodiment, both ends of the helical passage of the ionization chamber are sealed so that the radio frequency coil within the helical passage is isolated from the outside.

[0008] A radio frequency ionization device applied to a radio frequency neutralizer, comprising: an ionization chamber, a radio frequency coil, and an insulating grommet; the radio frequency coil is of helical design and is disposed external to the ionization chamber; the radio frequency coil is welded to the outside of the ionization chamber by brazing, and the insulating grommet is welded to the outside of the radio frequency coil by brazing, and the welded outer wall of the ionization chamber, the radio frequency coil and the inner wall of the insulating grommet are fixedly connected; Radio frequency ionizer.

[0009] In one embodiment, the welded outer wall of the ionization chamber, the radio frequency coil and the inner wall of an insulating grommet are integrated together such that the radio frequency coil is isolated from the outside.

[0010] In one embodiment, the bottom of the ionization chamber is connected to a gas injection insulator, and the exhaust pipe of the gas injection insulator is connected to a gas injection hole of the ionization chamber; A first metallic member of the gas-filled insulation is connected to an emitter power supply and a second metallic member is grounded, with the first metallic member functioning as the emitter of the radio frequency neutralizer.

[0011] A radio frequency neutralizer including the radio frequency ionizer described above, a housing, and a sustaining pole, The radio frequency ionizer comprises: an ionization chamber; and a radio frequency coil; A spiral passage is formed in a side wall of the ionization chamber; said radio frequency coil being of helical design, the structure of which corresponds to the structure of said helical passage; the radio frequency coil is attached to the helical passage from one end of the ionization chamber by a helix, and both ends of the radio frequency coil are connected to a radio frequency line; When a working gas is fed into the ionization chamber of the radio frequency ionization device, the working gas is insulated and isolated under the action of an electric field of the first metal member and the second metal member of the gas injection insulating section; The working gas is ionized by the radio frequency coil to generate a plasma; Electrons in the plasma move toward an electron output port under the action of the electric field of the first metal member, and are guided to the outside from the electron output port of the ionization chamber under the action of the sustain electrode. Radio frequency neutralizer.

[0012] A radio frequency neutralizer including a radio frequency ionizer, a housing, and a sustaining pole, The radio frequency ionizer comprises: an ionization chamber, a radio frequency coil, and an insulating grommet; the radio frequency coil is of helical design and is disposed external to the ionization chamber; the radio frequency coil is welded to the outside of the ionization chamber by brazing, the insulating grommet is welded to the outside of the radio frequency coil by brazing, and the welded outer wall of the ionization chamber, the radio frequency coil and the inner wall of the insulating grommet are fixedly connected; When a working gas is fed into the ionization chamber of the radio frequency ionization device, the working gas is insulated and isolated under the action of an electric field of the first metal member and the second metal member of the gas injection insulating section; The working gas is ionized by the radio frequency coil to generate a plasma; Electrons in the plasma move toward an electron output port under the action of the electric field of the first metal member, and are guided to the outside from the electron output port of the ionization chamber under the action of the sustain electrode. Radio frequency neutralizer.

[0013] In one embodiment, the radio frequency neutralizer further comprises a radio frequency adapter integral with the housing; The radio frequency adapter is provided with a sealed gas supply port for connection to a gas isolation assembly, a sealed radio frequency feed port for connection to a radio frequency power source, and a sealed control port for connection to a radio frequency controller, the radio frequency feed port being connected to a radio frequency coil via a radio frequency line.

[0014] In one embodiment, the housing of the radio frequency neutralizer is hermetically connected to a wall of a vacuum chamber via a vacuum flange, the housing is located within the vacuum chamber, the radio frequency adapter is located outside the vacuum chamber, and a cooling water channel is incorporated in the vacuum flange.

[0015] In one embodiment, the radio frequency neutralizer further comprises a radio frequency adapter, a radio frequency feed assembly, and a support structure; a housing of the radio frequency neutralizer connected to a vacuum chamber via the support structure; the radio frequency feed assembly is mounted on a wall of the vacuum chamber and is connected to the radio frequency coil via a radio frequency line for feeding radio frequencies into the vacuum chamber; The radio frequency adapter is provided with a radio frequency feed port for connecting a radio frequency power source and a matching network.

[0016] In one embodiment, the support structure includes a support rod and an active coupling, the support rod is connected to the bottom of the housing of the radio frequency neutralizer via the active coupling, and the active coupling is used to adjust the direction.

[0017] The radio frequency ionizer and radio frequency neutralizer have a spiral passage built into the side wall of the ionization chamber, so that the radio frequency coil is firmly fixed in the spiral passage, which can avoid deformation caused by high temperature and unstable position that affects the introduction of radio frequency, and the radio frequency coil is closer to the ionization chamber, so that the radio frequency is used more efficiently. Furthermore, the sealing treatment at the connection ports on both ends prevents the radio frequency coil from contacting the atmosphere, reduces the possibility of oxidation, and improves the effect of the radio frequency neutralizer.

[0018] The radio frequency coil is brazed to the outer wall of the ionization chamber, and the insulating grommet is brazed to the outer circumference of the radio frequency coil, so that the brazing method makes the radio frequency coil more stable and avoids the instability of the radio frequency caused by the deformation of the radio frequency coil due to heat. In addition, the outer wall of the ionization chamber, the radio frequency coil and the inner wall of the insulating grommet are welded together to isolate the radio frequency coil from the outside, so as to avoid the reaction and contamination of the radio frequency coil with the outside gas, and improve the effect of the radio frequency neutralizer.

[0019] Furthermore, by connecting the gas injection insulator to the bottom of the ionization chamber and utilizing its first metal member as the emitter, the emitter assembly is reduced, the device structure of the entire ionization apparatus is simplified, and the effect of the radio frequency neutralizer is improved.

[0020] The present invention further provides a method for controlling a radio frequency neutralizer, which improves the control efficiency of the radio frequency neutralizer.

[0021] A method for controlling a radio frequency neutralizer, which is applied to a neutralizer controller of the radio frequency neutralizer, comprising: receiving, by a radio frequency controller, radio frequency control parameters of the radio frequency ion source transmitted by the radio frequency controller; a neutralizer controller calculating a cathode control parameter of a corresponding radio frequency neutralizer based on the radio frequency control parameter; a neutralizer controller controlling a corresponding radio frequency neutralizer based on the cathode control parameters; The radio frequency ion source is used in combination with the radio frequency neutralizer, and a radio frequency controller of the radio frequency ion source and a neutralizer controller of the radio frequency neutralizer are connected via a communication line, and the radio frequency controller transmits control parameters of the radio frequency ion source to the neutralizer controller; The radio frequency neutralizer comprises: a radio frequency ionizer, a housing, and a sustaining pole; The radio frequency ionizer comprises: an ionization chamber; and a radio frequency coil; A spiral passage is formed in a side wall of the ionization chamber; said radio frequency coil being of helical design, the structure of which corresponds to the structure of said helical passage; the radio frequency coil is attached to the helical passage from one end of the ionization chamber by a helix, and both ends of the radio frequency coil are connected to a radio frequency line; When a working gas is fed into the ionization chamber of the radio frequency ionization device, the working gas is insulated and isolated under the action of an electric field of the first metal member and the second metal member of the gas injection insulating section; The working gas is ionized by the radio frequency coil to generate a plasma; Electrons in the plasma move toward an electron output port under the action of the electric field of the first metal member, and are guided to the outside from the electron output port of the ionization chamber under the action of the sustain electrode. A method for controlling a radio frequency neutralizer.

[0022] A method for controlling a radio frequency neutralizer, which is applied to a neutralizer controller of a radio frequency neutralizer, comprising: receiving, by a radio frequency controller, radio frequency control parameters of the radio frequency ion source transmitted by the radio frequency controller; a neutralizer controller calculating a cathode control parameter of a corresponding radio frequency neutralizer based on the radio frequency control parameter; a neutralizer controller controlling a corresponding radio frequency neutralizer based on the cathode control parameters; The radio frequency ion source is used in combination with the radio frequency neutralizer, and a radio frequency controller of the radio frequency ion source and a neutralizer controller of the radio frequency neutralizer are connected via a communication line, and the radio frequency controller transmits control parameters of the radio frequency ion source to the neutralizer controller; The radio frequency neutralizer comprises: a radio frequency ionizer, a housing, and a sustaining pole; The radio frequency ionizer comprises: an ionization chamber, a radio frequency coil, and an insulating grommet; the radio frequency coil is of helical design and is disposed external to the ionization chamber; the radio frequency coil is welded to the outside of the ionization chamber by brazing, the insulating grommet is welded to the outside of the radio frequency coil by brazing, and the welded outer wall of the ionization chamber, the radio frequency coil and the inner wall of the insulating grommet are fixedly connected; When a working gas is fed into the ionization chamber of the radio frequency ionization device, the working gas is insulated and isolated under the action of an electric field of the first metal member and the second metal member of the gas injection insulating section; The working gas is ionized by the radio frequency coil to generate a plasma; Electrons in the plasma move toward an electron output port under the action of the electric field of the first metal member, and are guided to the outside from the electron output port of the ionization chamber under the action of the sustain electrode. A method for controlling a radio frequency neutralizer.

[0023] In the above-mentioned control method for the radio frequency neutralizer, during the operation process of the radio frequency ion source, the radio frequency controller and the neutralizer controller can realize that the radio frequency neutralizer is started according to the radio frequency ion source and changes according to the change in the load, without the need for separate setting. Through the automatic start-up of the entire process and the coordinated control with the radio frequency ion source, the operation complexity of the start-up and adjustment process of the radio frequency neutralizer is reduced, and the control efficiency of the radio frequency neutralizer is improved.

[0024] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. [Brief description of the drawings]

[0025] To better describe and explain the embodiments and / or examples of the inventions disclosed herein, reference may be made to one or more of the accompanying drawings, in which additional details or examples are provided to illustrate the accompanying drawings without limiting the scope of the disclosed inventions, the presently described embodiments and / or examples, or any of the best modes of these inventions as currently understood. [Figure 1] FIG. 2 is a cross-sectional schematic diagram of a radio frequency neutralizer according to one embodiment. [Diagram 2] 1 is a schematic diagram of a cross-section of a radio frequency ionization device according to one embodiment. [Diagram 3] FIG. 1 is a schematic diagram of the installation of gas-injected insulation according to one embodiment. [Figure 4] FIG. 2 is a schematic diagram of a structure of a gas-injected insulator according to one embodiment. [Diagram 5] 2 is a schematic diagram of a cross-section of a radio frequency ionization device according to another embodiment. [Figure 6] FIG. 2 is a schematic diagram of a three-dimensional structure of a radio frequency neutralizer according to one embodiment. [Figure 7] 1 is a schematic diagram of a mounting structure for a radio frequency neutralizer according to one embodiment; [Figure 8] FIG. 13 is a schematic diagram of the configuration and installation of a radio frequency neutralizer according to another embodiment. [Figure 9] FIG. 2 is a schematic diagram of the electrical structure of a radio frequency neutralizer according to one embodiment. [Figure 10] FIG. 1 is a schematic diagram of a hardware environment in which a radio frequency neutralizer according to one embodiment is applied. [Figure 11] 4 is a flowchart of a method for controlling a radio frequency neutralizer according to one embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0026] In order to make the objectives, technical solutions and advantages of the present invention clearer and easier to understand, the present invention will be described in more detail below in conjunction with the accompanying drawings and examples. It should be understood that the specific examples described herein are only for illustrating the present invention, and are not intended to limit the present invention.

[0027] The term "comprising" and any other variations of the embodiments of the invention are intended to cover a non-exclusive inclusion, for example, a process, method, system, product, or device comprising a series of steps is not limited to the recited steps or modules, but may optionally further include unrecited steps or modules, or may optionally further include other steps or modules inherent to such process, method, product, or device.

[0028] Refer to Fig. 1, which is a schematic diagram of a cross section of a radio frequency neutralizer according to an embodiment, and a part of the structure of the radio frequency neutralizer is also shown in the figure. The radio frequency ionizer part includes an ionization chamber 10 and a radio frequency coil 20 (see Fig. 2-3), the side wall of the ionization chamber 10 is built with a spiral passage 10a, the radio frequency coil 20 is of a spiral design, and its structure is consistent with that of the spiral passage 10a, the radio frequency coil 20 is attached to the spiral passage 10a from one end of the ionization chamber 10 by a spiral, and both ends of the radio frequency coil 20 are connected to a radio frequency line.

[0029] As shown in FIG. 2, FIG. 2 is a schematic cross-sectional view of a radio frequency ionization device according to an embodiment, when the ionization chamber 10 is formed, a spiral passage 10a is provided in the side wall of the ionization chamber 10, and the spiral structure of the radio frequency coil 20 is consistent with the structure of the spiral passage 10a, so that when installed, the radio frequency coil 20 is attached to the spiral passage 10a from one end of the ionization chamber 10 by a spiral, and both ends of the radio frequency coil 20 are connected to a radio frequency line, and preferably, the spiral passage 10a of the ionization chamber 10 is further sealed at the connection port positions at both ends (dashed frame in FIG. 3), so that the radio frequency coil 20 in the spiral passage 10a is isolated from the outside.

[0030] According to the radio frequency ionization device with the above structure, the radio frequency coil 20 is firmly fixed in the spiral passage 10a, which can avoid deformation due to high temperature and unstable positioning that affects the introduction of radio frequency; and the connection ports at both ends are sealed to prevent the radio frequency coil 20 from contacting the atmosphere, reduce the possibility of oxidation, and extend the maintenance cycle; and since the radio frequency coil 20 based on the above design is closer to the ionization chamber 10, the use efficiency of the radio frequency introduced into the ionization chamber 10 is higher, and the complexity of the overall radio frequency neutralization structure is reduced, improving the effect of the radio frequency neutralizer.

[0031] In one embodiment, as shown in Fig. 3, Fig. 3 is a schematic diagram of the installation of the gas injection insulation part according to one embodiment, combined with the structure of Fig. 1, the bottom of the ionization chamber 10 is connected to the gas injection insulation part 30, and the exhaust pipe 35 of the gas injection insulation part 30 is connected to the gas injection hole of the ionization chamber 10, which is used to introduce and insulate the working gas. In the radio frequency ionization device of the present invention, the first metal member 31 of the gas injection insulation part 30 is in close contact with the bottom of the ionization chamber 10, and the first metal member 31 of the gas injection insulation part 30 is connected to the emitter power supply, and the second metal member 32 is grounded, so that the first metal member 31 functions as the emitter of the radio frequency neutralizer.

[0032] Regarding the structure of the gas injection insulation part 30, as shown in FIG. 4, FIG. 4 is a schematic diagram of the structure of the gas injection insulation part according to one embodiment, which mainly includes a first metal member 31, an insulating ceramic member 33, a gas branching insulation member 34 and a second metal member 32, etc., and an exhaust pipe 35 and an intake pipe 36 are connected to the top and bottom, respectively. The exhaust pipe 35 is inserted into the gas injection hole of the ionization chamber 10.

[0033] According to the radio frequency ionization device having the above-mentioned structure, the gas injection insulating part 30 is attached to the bottom of the ionization chamber 10 and the first metal member 31 is used as an emitter, thereby eliminating the need to provide a separate emitter assembly in the ionization device, greatly simplifying the device structure of the entire ionization device, reducing the device volume, making the device more compact, and improving the effect of the radio frequency neutralizer.

[0034] 5, which is a schematic diagram of a cross section of a radio frequency ionization device according to another embodiment, in this embodiment, the radio frequency ionization device includes an ionization chamber 10, a radio frequency coil 20, and an insulating grommet 40, the radio frequency coil 20 is of a spiral design and is provided outside the ionization chamber 10, the radio frequency coil 20 is welded to the outside of the ionization chamber 10 by brazing, the insulating grommet 40 is welded to the outside of the radio frequency coil 20 by brazing, and the welded outer wall of the ionization chamber 10, the radio frequency coil 20 and the inner wall of the insulating grommet 40 are fixedly connected. Furthermore, the welded outer wall of the ionization chamber 10, the radio frequency coil 20 and the inner wall of the insulating grommet 40 are integrated together so that the radio frequency coil 20 is isolated from the outside.

[0035] As in the technical solution of the above embodiment, the radio frequency coil 20 is brazed to the outer wall of the ionization chamber 10, and the insulating grommet 40 is brazed to the outer periphery of the radio frequency coil 20, so that the brazing method can make the radio frequency coil 20 more stable and avoid the instability of the radio frequency caused by the deformation of the radio frequency coil 20 due to heat. In addition, the outer wall of the ionization chamber 10, the radio frequency coil 20, and the inner wall of the insulating grommet 40, which are welded together, are integrated to isolate the radio frequency coil 20 from the outside, so as to avoid the reaction or contamination between the radio frequency coil 20 and the external gas, and improve the effect of the radio frequency neutralizer.

[0036] In one embodiment, as shown in Figure 3, the bottom of the ionization chamber 10 is connected to the gas injection insulation part 30, the first metal member 31 of the gas injection insulation part 30 is connected to the emitter power supply, and the second metal member 32 is grounded, and the first metal member 31 serves as the emitter of the radio frequency neutralizer. The technical solution of this embodiment is consistent with the above description, so the description is omitted here.

[0037] An embodiment of a radio frequency neutralizer is described below.

[0038] As shown in FIGS. 1 to 5, the radio frequency neutralizer of the present invention includes the radio frequency ionization device of the above embodiment, a housing 13, and a sustain electrode 11, and the sustain electrode 11 is provided at the front end of the ionization chamber .

[0039] During operation, when a working gas is fed into the ionization chamber 10 of the radio frequency ionization device, the working gas is insulated under the action of the electric field of the first metal member 31 and the second metal member 32 of the gas injection insulation section 30, the working gas is ionized by the radio frequency coil 20, plasma is generated, and electrons in the plasma move toward the electron output port under the action of the electric field of the first metal member 31, and are guided to the outside from the electron output port of the ionization chamber 10 under the action of the sustain electrode 11.

[0040] As in the radio frequency neutralizer of the above embodiment, the spiral passage 10a is directly provided in the side wall of the ionization chamber 10, so that the radio frequency coil 20 is firmly fixed in the spiral passage 10a, and the positional instability caused by deformation due to high temperature, which affects the introduction of the radio frequency, is avoided, and the efficiency of the radio frequency is higher and the overall structure is less complicated. The brazing method makes the radio frequency coil 20 more stable, avoids the instability of the radio frequency, and improves the effect of the radio frequency neutralizer. In addition, the first metal member 31 of the gas injection insulation part 30 is used as an emitter, so there is no need to provide a separate emitter assembly, which simplifies the structure of the entire device and further improves the effect of the radio frequency neutralizer.

[0041] Based on the above embodiment of the radio frequency neutralizer, more embodiments of its structure and installation are provided below.

[0042] In one embodiment, as shown in FIG. 6, FIG. 6 is a schematic diagram of the three-dimensional structure of a radio frequency neutralizer according to one embodiment, the radio frequency neutralizer of the present invention further includes a radio frequency adapter 50 integrally formed with the housing 13, the radio frequency adapter 50 is provided with a sealed gas supply port 54 for connecting to a gas isolation assembly, a sealed radio frequency feed port 52 for connecting to a radio frequency power source, and a sealed control port 55 for connecting to a radio frequency controller, and the radio frequency feed port 52 is connected to the radio frequency coil 20 via a radio frequency line.

[0043] As shown in FIG. 7, FIG. 7 is a schematic diagram of the mounting structure of a radio frequency neutralizer according to one embodiment, in which the housing 13 of the radio frequency neutralizer is hermetically connected to the wall of the vacuum chamber 100 via a vacuum flange 53, the housing 13 is disposed within the vacuum chamber 100, the radio frequency adapter 50 is disposed outside the vacuum chamber 100, and a cooling water channel 56 is built into the vacuum flange 53.

[0044] Like the radio frequency neutralizer and its mounting method of the above embodiment, by adopting an integrated design structure, the mounting connection part can adopt a standard ISO flange (ISO 100 or above), or a non-standard or other standard flange of a certain diameter (76 mm or above). The mounting method of the radio frequency neutralizer of this structure is diverse and is compatible with the mounting of most (90% or more) of the vacuum coating machines currently on the market.

[0045] In one embodiment, as shown in Fig. 8, Fig. 8 is a schematic diagram of the spatial structure and installation of a radio frequency neutralizer according to another embodiment, the radio frequency neutralizer of the present invention further includes a radio frequency adapter 50, a radio frequency feed assembly 57 and a support structure 58, the housing 13 of the radio frequency neutralizer is connected to the vacuum chamber 100 through the support structure 58, the radio frequency feed assembly 57 is provided on the wall of the vacuum chamber 100 and is connected to the radio frequency coil 20 through a radio frequency line to feed radio frequency into the vacuum chamber 100, and the radio frequency adapter 50 is provided with a radio frequency feed port 52 for connecting a radio frequency power source and a matching network. Preferably, the support structure 58 includes a support rod 58a and an active coupling 58b, the support rod 58a is connected to the bottom of the housing 13 of the radio frequency neutralizer through the active coupling 58b, and the active coupling 58b is used to adjust the direction.

[0046] In the above embodiment, the gas supply pipe can enter the vacuum chamber 100 through a vacuum feed connector, which is also used to connect to the power supply to the emitter and the power supply to the sustain electrode 11. A vacuum electrode and a radio frequency feed port 52 are provided in the radio frequency adapter 50, and the radio frequency feed port 52 of the radio frequency adapter 50 is connected to a matching network through a radio frequency line to provide a radio frequency to the radio frequency coil 20 of the radio frequency neutralizer.

[0047] As the radio frequency neutralizer and its installation method of the above embodiment, an internal installation method is adopted by connecting the radio frequency feed assembly, and the installation connection part can be installed in any through hole with a certain diameter (usually 25mm or more), the design of the installation method is more flexible, the space requirement of the vacuum chamber is lower, and the application range is wider. In addition, the method of active coupling is adopted to connect the support rod to the radio frequency neutralizer, which realizes flexible adjustment of the installation height, and the emission angle can be selected as vertical, any angle, or parallel, etc., which can be applied to many scenarios and can better meet the actual on-site use needs of customers.

[0048] In one embodiment, in order to reduce the distance between the communication line and the radio frequency line, to avoid radio frequency interference, and to reduce device costs, the technical solution of the radio frequency neutralizer of the present invention can also integrate each device component. As shown in Figure 9, Figure 9 is a schematic diagram of the electrical structure of a radio frequency neutralizer according to an embodiment, as shown in the figure, the electrical structure of the radio frequency neutralizer includes a neutralizer controller, a DC power module, a radio frequency power supply, and a matching network.

[0049] The radio frequency power supply is connected to the radio frequency coil of the radio frequency neutralizer through the matching network, the DC power supply module and the radio frequency power supply are respectively connected to the radio frequency controller, and the neutralizer controller, the DC power supply module, the radio frequency power supply and the matching network are built into a 4U chassis.

[0050] Further, the 4U chassis is provided with a power supply port, at least one radio frequency coil port, at least one DC power supply control port, a communication port and at least one gas control port, the power supply port being connected to an external power supply and a radio frequency power supply, a matching network and a DC power supply module in the chassis, the radio frequency coil port being connected to a radio frequency coil of the radio frequency neutralizer and a matching network in the chassis, the DC power supply control port being connected to an emitter, a sustaining electrode and a DC power supply module in the chassis of the radio frequency neutralizer, the communication port being connected to a radio frequency controller and a neutralizer controller in the chassis, and the gas control port being connected to a flow meter in a gas supply pipe of the radio frequency neutralizer and a neutralizer controller in the chassis.

[0051] The technical solution of the above embodiment uses a 4U chassis to mount each device structure through optimized design, and integrates multiple device structures into one standard 4U chassis, saving the device costs for multiple housings and the conduction and communication between the housings, and not only solving the problems of long wires and high wire costs, but also greatly reducing the installation space of the device structures, facilitating the installation of devices, and improving the overall quality of products.

[0052] An embodiment of a method for controlling a radio frequency neutralizer will now be described.

[0053] The control method of the radio frequency neutralizer of the present invention can be applied to the neutralizer controller of any of the radio frequency neutralizers in the above embodiments. Referring to Fig. 10, Fig. 10 is a schematic diagram of a hardware environment in which the radio frequency neutralizer according to one embodiment is applied, as shown in the figure, the applied hardware environment includes a radio frequency ion source and at least one radio frequency neutralizer used in combination with the radio frequency ion source, and in Fig. 10, an example of two radio frequency neutralizers is shown, and the radio frequency controller of the radio frequency ion source and the neutralizer controller of the radio frequency neutralizer are connected via a communication line.

[0054] During operation, the radio frequency controller is used to control the activation and sustained operation of the radio frequency ion source and to send control parameters of the radio frequency ion source to the neutralizer controller, which is used to control the activation and sustained operation of the radio frequency neutralizer based on the control parameters.

[0055] 11, which is a flowchart of a method for controlling a radio frequency neutralizer according to an embodiment, the method is a method for controlling a radio frequency neutralizer during operation, which may include:

[0056] In S11, the radio frequency controller receives radio frequency control parameters of the radio frequency ion source transmitted by the radio frequency controller.

[0057] As shown in FIG. 10, in the operation process of the radio frequency ion source, the radio frequency controller can obtain the radio frequency control parameters of the radio frequency ion source, and as shown in the figure, the two radio frequency neutralizers can provide neutralizing electrons to the radio frequency ion source from different directions.

[0058] Based on the communication link, the radio frequency controller of the radio frequency ion source can transmit the operating control parameters of the radio frequency ion source to the neutralizer controller in real time.

[0059] At S12, the neutralizer controller calculates the cathode control parameters of the corresponding radio frequency neutralizer based on the radio frequency control parameters.

[0060] The radio frequency control parameters include related parameters such as the radio frequency source screen grid current, for example, since it is necessary to ensure that the emitter current of the cathode neutralizer is always greater than or equal to the screen grid current of the radio frequency ion source, the neutralizer controller may calculate the emitter current to be assigned to each radio frequency neutralizer based on the radio frequency source screen grid current of the radio frequency ion source.

[0061] At S13, a neutralizer controller controls a corresponding radio frequency neutralizer based on the cathode control parameters.

[0062] Specifically, the neutralizer controller controls the two DC power supply modules respectively to output matching emitter currents to the radio frequency neutralizer based on the assigned emitter current, so that the radio frequency neutralizer operates according to the radio frequency ion source.

[0063] Based on the technical solution of the above embodiment, taking the emitter current of the cathode neutralizer and the screen grid current of the radio frequency ion source as an example, the radio frequency ion source is used in combination with two radio frequency neutralizers, namely a first radio frequency neutralizer and a second radio frequency neutralizer. The current of the first radio frequency neutralizer is I1, the current of the second radio frequency neutralizer is I2, and the screen grid current of the radio frequency ion source is I, it is necessary to always ensure that I1+I2≧I. Therefore, in the operation process, the neutralizer controller can calculate the current of the radio frequency ion source received in real time. According to the screen grid current I of the source and the number of electrons required for each radio frequency neutralizer of the detected radio frequency ion source, the current I1 and the current I2 are calculated in real time, and the ratios of the current I1 and the current I2 can be preset, for example, I1:I2=1:1, or I1:I2=4:1 or other arbitrary ratio parameters, or can be set according to actual needs. The above technical solution realizes the automatic tracking adjustment of the radio frequency neutralizer and does not require setting operations, which greatly improves the control efficiency and control accuracy.

[0064] In the technical solution of the above embodiment, during the operation process of the radio frequency ion source, the radio frequency controller and the neutralizer controller can realize that the radio frequency neutralizer starts according to the radio frequency ion source and changes according to the change in load, without the need for separate setting. Through the automatic start-up of the entire process and the coordinated control with the radio frequency ion source, the operation complexity of the start-up and adjustment process is reduced, and the control efficiency of the radio frequency neutralizer is improved.

[0065] In addition, in the case of insufficient ion neutralization, multiple radio frequency neutralizers may be installed around the radio frequency ion source and operated simultaneously to ensure that the cathode provides uniform neutralizing electrons to the radio frequency ion source, and the number of electrons required in each direction of the radio frequency ion source during operation can be detected in real time and the number of electrons provided by each radio frequency neutralizer can be automatically adjusted, thereby greatly improving the ion neutralization effect and improving the vacuum coating effect.

[0066] In one embodiment, the startup process of the radio frequency neutralizer may specifically include the following steps:

[0067] At s1, the neutralizer controller sets the start-up parameters of the radio frequency neutralizer.

[0068] Specifically, the start-up parameters of the radio frequency neutralizer may be set in the operation page of the neutralizer controller, and the start-up parameters include emitter voltage and current, sustain electrode voltage, gas flow parameters, etc.

[0069] At s2, the neutralizer controller receives the one-touch start-up control command sent by the radio frequency controller and pumps in the working gas.

[0070] Specifically, a one-touch start-up function may be set, and the user may perform one-touch start-up operation through the radio frequency controller, and the radio frequency controller outputs a one-touch start-up control command to the neutralizer controller in response to the user's one-touch start-up operation, and the neutralizer controller controls the switch and flow rate of the gas flow meter in the gas supply pipe of the radio frequency neutralizer, so that the working gas enters the gas injection insulating section, is diverted, and then enters the ionization chamber. The set working gas is sent to the gas injection insulating section for insulation and isolation, and the working gas slowly passes through the gas pipe and enters the ionization chamber to be ionized under the action of the gas diverting insulating member of the gas injection insulating section, ensuring that the working gas is fully ionized.

[0071] At s3, the neutralizer controller activates the radio frequency power supply and outputs radio frequency power to the radio frequency coil of the radio frequency neutralizer.

[0072] At the start-up, the radio frequency power is relatively large, the power is between 120W-150W, and the higher the power, the easier it is to generate electric arcs, which is helpful for starting.

[0073] At s4, the neutralizer controller activates the DC power supply to supply voltage to the sustain pole and emitter of the radio frequency neutralizer until the electron beam is extracted.

[0074] Specifically, after the radio frequency power reaches a predetermined value, the first DC power supply supplies a constant voltage to the sustain pole and emitter of the radio frequency neutralizer, and under the action of the radio frequency energy, a faint glow occurs in the ionization chamber. Before the electron beam is drawn out, the neutralizer controller controls the relay to keep switching, so that the emitter has and does not have a voltage, and high and low voltages alternate, and the sustain pole is controlled to always maintain a constant voltage. When electrons are drawn out of the ionization chamber to form an electron beam, the radio frequency neutralizer is successfully started.

[0075] In s5, the neutralizer controller controls the DC power supply to output voltages of set parameters to the sustain pole and emitter of the radio frequency neutralizer.

[0076] Specifically, after the radio frequency neutralizer is successfully activated, the neutralizer controller controls the relay to stop switching, maintains the emitter at a constant small voltage to maintain the ionization of the working gas in the ionization chamber, and maintains the operating state of the radio frequency neutralizer.

[0077] In the technical solution of the above embodiment, in the start-up process of the radio frequency neutralizer, the radio frequency controller and the neutralizer controller can realize that the radio frequency neutralizer starts according to the radio frequency ion source, without the need for separate setting, and the whole process is automatically started, reducing the complexity of the start-up operation and improving the control efficiency of the radio frequency neutralizer. In the technical solution adopting multiple radio frequency neutralizers, each radio frequency neutralizer can be connected to one common neutralizer controller, reducing the device cost and reducing the space occupied. In addition, the output state of the electron beam can also be detected according to the position of each radio frequency neutralizer, so that when the radio frequency ion source is adjusted, the number of output electron beams of each radio frequency neutralizer can be adjusted accordingly to realize the tracking control.

[0078] The above examples merely describe some embodiments of the present invention, and although the description is more specific and detailed, it should not be understood as limiting the scope of the invention. It should be noted that a person skilled in the art can make some modifications and improvements without departing from the spirit of the present invention, but all of these are within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be as defined by the appended claims.

Claims

1. A radio frequency ionization device applied to a radio frequency neutralizer, comprising: an ionization chamber; and a radio frequency coil; A spiral passage is formed in a side wall of the ionization chamber; said radio frequency coil being of helical design, the structure of which corresponds to the structure of said helical passage; the radio frequency coil is attached to the helical passage from one end of the ionization chamber by a helix, and both ends of the radio frequency coil are connected to a radio frequency line; 1. A radio frequency ionization device comprising:

2. the connection ports at both ends of the helical passage of the ionization chamber are sealed so that the radio frequency coil in the helical passage is isolated from the outside; 2. The radio frequency ionization device of claim 1.

3. The bottom of the ionization chamber is connected to a gas injection insulating part, and an exhaust pipe of the gas injection insulating part is connected to a gas injection hole of the ionization chamber; a first metal member of the gas-injected insulating section connected to an emitter power source and a second metal member grounded, the first metal member functioning as an emitter of the radio frequency neutralizer; 2. The radio frequency ionization device of claim 1.

4. A radio frequency ionization device applied to a radio frequency neutralizer, comprising: an ionization chamber, a radio frequency coil, and an insulating grommet; the radio frequency coil is of helical design and is disposed external to the ionization chamber; the radio frequency coil is welded to the outside of the ionization chamber by brazing, and the insulating grommet is welded to the outside of the radio frequency coil by brazing, and the welded outer wall of the ionization chamber, the radio frequency coil and the inner wall of the insulating grommet are fixedly connected; 1. A radio frequency ionization device comprising:

5. the welded outer wall of the ionization chamber, the radio frequency coil and the inner wall of the insulating grommet are integrated together so that the radio frequency coil is isolated from the outside; 5. A radio frequency ionization device according to claim 4.

6. The bottom of the ionization chamber is connected to a gas injection insulating part, and an exhaust pipe of the gas injection insulating part is connected to a gas injection hole of the ionization chamber; a first metal member of the gas-injected insulating section connected to an emitter power source and a second metal member grounded, the first metal member functioning as an emitter of the radio frequency neutralizer; 5. A radio frequency ionization device according to claim 4.

7. A radio frequency neutralizer including a radio frequency ionizer, a housing, and a sustaining pole, The radio frequency ionization device comprises: an ionization chamber; and a radio frequency coil; A spiral passage is formed in a side wall of the ionization chamber; said radio frequency coil being of helical design, the structure of which corresponds to the structure of said helical passage; the radio frequency coil is attached to the helical passage from one end of the ionization chamber by a helix, and both ends of the radio frequency coil are connected to a radio frequency line; When a working gas is fed into the ionization chamber of the radio frequency ionization device, the working gas is insulated and isolated under the action of an electric field of the first metal member and the second metal member of the gas injection insulation part; The working gas is ionized by the radio frequency coil to generate a plasma; Electrons in the plasma move toward an electron output port under the action of the electric field of the first metal member, and are guided to the outside from the electron output port of the ionization chamber under the action of the sustain electrode. A radio frequency neutralizer characterized by:

8. the connection ports at both ends of the helical passage of the ionization chamber are sealed so that the radio frequency coil in the helical passage is isolated from the outside; 8. A radio frequency neutralizer as claimed in claim 7.

9. further comprising a radio frequency adapter integral with the housing; the radio frequency adapter is provided with a sealed gas supply port for connection to a gas isolation assembly, a sealed radio frequency feed port for connection to a radio frequency power source, and a sealed control port for connection to a radio frequency controller, the radio frequency feed port being connected to a radio frequency coil via a radio frequency line; 8. A radio frequency neutralizer as claimed in claim 7.

10. The housing of the radio frequency neutralizer is hermetically connected to a wall of a vacuum chamber via a vacuum flange, the housing is provided within the vacuum chamber, the radio frequency adapter is provided outside the vacuum chamber, and a cooling water channel is built into the vacuum flange.

10. A radio frequency neutralizer as claimed in claim 9.

11. a radio frequency adapter, a radio frequency feed assembly, and a support structure; a housing of the radio frequency neutralizer connected to a vacuum chamber via the support structure; the radio frequency feed assembly is mounted on a wall of the vacuum chamber and is connected to the radio frequency coil via a radio frequency line for feeding radio frequencies into the vacuum chamber; the radio frequency adapter is provided with a radio frequency feed port for connecting a radio frequency power source and a matching network; The support structure includes a support rod and an active coupling, the support rod is connected to the bottom of the housing of the radio frequency neutralizer through the active coupling, and the active coupling is used to adjust the direction.

8. A radio frequency neutralizer as claimed in claim 7.

12. A radio frequency neutralizer including a radio frequency ionizer, a housing, and a sustaining pole, The radio frequency ionization device comprises: an ionization chamber, a radio frequency coil, and an insulating grommet; the radio frequency coil is of helical design and is disposed external to the ionization chamber; the radio frequency coil is welded to the outside of the ionization chamber by brazing, the insulating grommet is welded to the outside of the radio frequency coil by brazing, and the welded outer wall of the ionization chamber, the radio frequency coil and the inner wall of the insulating grommet are fixedly connected; When a working gas is fed into the ionization chamber of the radio frequency ionization device, the working gas is insulated and isolated under the action of an electric field of the first metal member and the second metal member of the gas injection insulation part; The working gas is ionized by the radio frequency coil to generate a plasma; Electrons in the plasma move toward an electron output port under the action of the electric field of the first metal member, and are guided to the outside from the electron output port of the ionization chamber under the action of the sustain electrode. A radio frequency neutralizer characterized by:

13. the connection ports at both ends of the helical passage of the ionization chamber are sealed so that the radio frequency coil in the helical passage is isolated from the outside; 13. A radio frequency neutralizer as claimed in claim 12.

14. further comprising a radio frequency adapter integral with the housing; the radio frequency adapter is provided with a sealed gas supply port for connection to a gas isolation assembly, a sealed radio frequency feed port for connection to a radio frequency power source, and a sealed control port for connection to a radio frequency controller, the radio frequency feed port being connected to a radio frequency coil via a radio frequency line; 13. A radio frequency neutralizer as claimed in claim 12.

15. The housing of the radio frequency neutralizer is hermetically connected to a wall of a vacuum chamber via a vacuum flange, the housing is provided within the vacuum chamber, the radio frequency adapter is provided outside the vacuum chamber, and a cooling water channel is built into the vacuum flange.

15. A radio frequency neutralizer as claimed in claim 14.

16. a radio frequency adapter, a radio frequency feed assembly, and a support structure; a housing of the radio frequency neutralizer connected to a vacuum chamber via the support structure; the radio frequency feed assembly is mounted on a wall of the vacuum chamber and is connected to the radio frequency coil via a radio frequency line for feeding radio frequencies into the vacuum chamber; the radio frequency adapter is provided with a radio frequency feed port for connecting a radio frequency power source and a matching network; The support structure includes a support rod and an active coupling, the support rod is connected to the bottom of the housing of the radio frequency neutralizer through the active coupling, and the active coupling is used to adjust the direction.

13. A radio frequency neutralizer as claimed in claim 12.

17. A method for controlling a radio frequency neutralizer, which is applied to a neutralizer controller of a radio frequency neutralizer, comprising: receiving, by a radio frequency controller, radio frequency control parameters of the radio frequency ion source transmitted by the radio frequency controller; a neutralizer controller calculating a cathode control parameter of a corresponding radio frequency neutralizer based on the radio frequency control parameter; a neutralizer controller controlling a corresponding radio frequency neutralizer based on the cathode control parameters; The radio frequency ion source is used in combination with the radio frequency neutralizer, and a radio frequency controller of the radio frequency ion source and a neutralizer controller of the radio frequency neutralizer are connected via a communication line, and the radio frequency controller transmits control parameters of the radio frequency ion source to the neutralizer controller; The radio frequency neutralizer comprises: a radio frequency ionizer, a housing, and a sustaining pole; The radio frequency ionization device comprises: an ionization chamber; and a radio frequency coil; A spiral passage is formed in a side wall of the ionization chamber; said radio frequency coil being of helical design, the structure of which corresponds to the structure of said helical passage; the radio frequency coil is attached to the helical passage from one end of the ionization chamber by a helix, and both ends of the radio frequency coil are connected to a radio frequency line; When a working gas is fed into the ionization chamber of the radio frequency ionization device, the working gas is insulated and isolated under the action of an electric field of the first metal member and the second metal member of the gas injection insulation part; The working gas is ionized by the radio frequency coil to generate a plasma; Electrons in the plasma move toward an electron output port under the action of the electric field of the first metal member, and are guided to the outside from the electron output port of the ionization chamber under the action of the sustain electrode. A method for controlling a radio frequency neutralizer comprising:

18. A method for controlling a radio frequency neutralizer, which is applied to a neutralizer controller of a radio frequency neutralizer, comprising: receiving, by a radio frequency controller, radio frequency control parameters of the radio frequency ion source transmitted by the radio frequency controller; a neutralizer controller calculating a cathode control parameter of a corresponding radio frequency neutralizer based on the radio frequency control parameter; a neutralizer controller controlling a corresponding radio frequency neutralizer based on the cathode control parameters; The radio frequency ion source is used in combination with the radio frequency neutralizer, and a radio frequency controller of the radio frequency ion source and a neutralizer controller of the radio frequency neutralizer are connected via a communication line, and the radio frequency controller transmits control parameters of the radio frequency ion source to the neutralizer controller; The radio frequency neutralizer comprises: a radio frequency ionizer, a housing, and a sustaining pole; The radio frequency ionization device comprises: an ionization chamber, a radio frequency coil, and an insulating grommet; the radio frequency coil is of helical design and is disposed external to the ionization chamber; the radio frequency coil is welded to the outside of the ionization chamber by brazing, the insulating grommet is welded to the outside of the radio frequency coil by brazing, and the welded outer wall of the ionization chamber, the radio frequency coil and the inner wall of the insulating grommet are fixedly connected; When a working gas is fed into the ionization chamber of the radio frequency ionization device, the working gas is insulated and isolated under the action of an electric field of the first metal member and the second metal member of the gas injection insulation part; The working gas is ionized by the radio frequency coil to generate a plasma; Electrons in the plasma move toward an electron output port under the action of the electric field of the first metal member, and are guided to the outside from the electron output port of the ionization chamber under the action of the sustain electrode. A method for controlling a radio frequency neutralizer comprising:

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