Reticle container with magnetic particle capture - Patents.com

Abstract

The reticle container includes a cover and a base plate, and a magnetic particle trap is included in at least one of the cover or the base plate. The cover and base plate each include a sealing surface, and at least one of the sealing surfaces includes a magnetic material that can be attracted by the magnetic particle trap. The sealing surface can be selected such that particulates generated by wear at the sealing surface are primarily of magnetic material. The magnetic particle trap can be further configured to be cleaned by reducing attraction of particulate matter to the magnetic particle trap.

Description

[Technical field]

[0001] The present disclosure relates to a reticle container configured to magnetically capture particulate matter.

[0002] Priority claim This disclosure claims priority to U.S. Provisional Patent No. 63 / 346,736, filed May 27, 2022, which is incorporated by reference herein. [Background technology]

[0003] Reticle containers can contain metal components that may come into contact with one another. Friction can cause the generation of metal particulate contamination as these metal components come into contact with other parts of the reticle container. Metal particulates can be contaminants that can adversely affect the reticles contained in the reticle container, causing costly losses and reducing yields for processing of the reticles, such as photolithography processes, e.g., extreme ultraviolet (EUV) photolithography. Summary of the Invention

[0004] The present disclosure relates to a reticle container configured to magnetically capture particulate matter.

[0005] The use of magnetic materials in the sealing surfaces of the cover and base plate of the reticle container results in particulates being generated by contact at these sealing surfaces.

[0006] In one embodiment, an article includes a reticle container, the reticle container including a cover including a cover sealing surface, a base plate including a base plate sealing surface, and one or more magnetic particle traps, each of the magnetic particle traps including a magnet, the cover and base plate defining an interior space configured to accommodate a reticle, and one or both of the cover sealing surface and the base plate sealing surface including a magnetic material.

[0007] In one embodiment, an article includes a reticle container. The reticle container includes a cover including a cover sealing surface and a base plate including a base plate sealing surface. The cover and base plate define an interior space configured to accommodate a reticle. The reticle container further includes one or more magnetic particle traps disposed on or in the cover, the base plate, or a combination thereof.

[0008] In one embodiment, the one or more magnetic particle traps include a plurality of recesses disposed on one of the cover sealing surface or the baseplate sealing surface, hi one embodiment, the other of the cover sealing surface or the baseplate sealing surface includes a plurality of protrusions, each protrusion configured to extend into one of the plurality of recesses.

[0009] In one embodiment, the cover includes one or more filter openings, and the one or more magnetic particle traps are each disposed in one of the one or more filter openings.

[0010] In one embodiment, one or more magnetic particle traps are disposed within the interior space.

[0011] In one embodiment, at least one of the cover sealing surface and the base plate sealing surface includes a magnetic material, hi one embodiment, the magnetic material is included in a coating applied to the cover or base plate to form the cover or base plate sealing surface.

[0012] In one embodiment, the magnetic particle trap is configured such that the force of attraction between the magnetic particle trap and the cover or base plate is less than the weight of the base plate.

[0013] In one embodiment, a method including a reticle includes placing the reticle in an interior space of a reticle container, the reticle container including a cover, a base plate, and one or more magnetic particle traps each including a magnet, the cover including a cover sealing surface, and the base plate including a base plate sealing surface.

[0014] In one embodiment, the method further comprises trapping the magnetic particles in one or more magnetic particle traps. In one embodiment, the method further comprises cleaning the magnetic particle traps by reducing the attraction between a magnet and the magnetic particles in each of the one or more magnetic particle traps. In one embodiment, cleaning the magnetic particle trap further comprises applying a gas flow to the magnetic particle trap.

[0015] In one embodiment, one or both of the cover sealing surface and the baseplate sealing surface comprise a magnetic material, and the magnetic particles result from wear at the one or both of the cover sealing surface and the baseplate sealing surface that comprise a magnetic material.

[0016] In one embodiment, the method further includes separating the cover and the base plate by supporting the cover and allowing the base plate to drop.

[0017] In one embodiment, a method of manufacturing a reticle container includes providing a cover having a cover sealing surface, providing a base plate having a base plate sealing surface, and providing one or more magnetic particle traps on or in the cover, the base plate, or a combination thereof.

[0018] In one embodiment, the method further includes providing a magnetic material on one or both of the cover sealing surface and the baseplate sealing surface. In one embodiment, providing a magnetic material on one or both of the cover sealing surface and the baseplate sealing surface includes applying a coating including a magnetic material to one or both of the cover sealing surface and the baseplate sealing surface.

[0019] In one embodiment, providing the one or more magnetic particle traps includes providing a plurality of recesses in one of the cover sealing surface or the base plate sealing surface and disposing a magnet in each of the plurality of recesses.

[0020] In one embodiment, the cover includes one or more filter openings, and providing the one or more magnetic particle traps includes disposing each of the one or more magnetic particle traps in one of the one or more filter openings.

[0021] In one embodiment, providing the one or more magnetic particle traps includes disposing each of the one or more magnetic particle traps on a surface of a cover or base plate that defines an interior space of the reticle container. [Brief description of the drawings]

[0022] [Figure 1] FIG. 2 illustrates a reticle container, according to one embodiment. [Diagram 2] FIG. 2 illustrates a cover for a reticle container, according to one embodiment. [Diagram 3] FIG. 2 illustrates a base plate of a reticle container, according to one embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] The present disclosure relates to a reticle container configured to magnetically capture particulate matter.

[0024] 1 shows a reticle container, according to one embodiment. Reticle container 100 includes a cover 102 and a base plate 104. Cover 102 includes a cover sealing surface 106 and a protrusion 108. Base plate 104 includes a base plate sealing surface 110 and includes a magnetic particle trap 112, which may optionally be disposed in a recess 114.

[0025] Reticle container 100 is a container configured to house a reticle 116, for example, during storage, transport, or processing of the reticle. The storage, transport, and / or processing of the reticle may be part of a process such as photolithography, for example, extreme ultraviolet (EUV) photolithography.

[0026] The cover 102 forms a portion of the reticle container 100. The cover 102 in combination with the base plate 104 defines an interior space that can accommodate a reticle 116 to be contained within the reticle container 100. The cover 102 includes a cover sealing surface 106 configured to face or contact the base plate 110 at one or more locations of the cover 102. In one embodiment, the cover sealing surface 106 can include a magnetic material, such as nickel, or any other material that can be attracted by a magnetic field. A protrusion 108 can optionally be included in the reticle container 100, such as the cover 102, extending from the cover sealing surface 106.

[0027] The base plate 104 forms another portion of the reticle container 100. The base plate 104 is configured such that when the base plate 104 is combined with the cover 102, an interior space capable of housing a reticle is defined. In one embodiment, a magnetic particle trap 112 may be included in the base plate 104 instead of the cover 102, as described above. The base plate 104 includes a base plate sealing surface 110 corresponding to the cover sealing surface 106 at one or more locations. The base plate sealing surface 110 may be configured to form a seal with the cover sealing surface 106, for example, by contact between the cover sealing surface 106 and the base plate sealing surface 110. Contact between the cover sealing surface 106 and the base plate sealing surface 110 may result in particle generation by frictional wear of one or both of the cover sealing surface 106 and the base plate sealing surface 110.

[0028] At least one of the cover sealing surface 106 or the base plate sealing surface 110 may be provided with a magnetic material at a surface. The magnetic material may include any material capable of being attracted to a magnet. The magnetic material may or may not be magnetized itself. In one embodiment, the magnetic material may include one or more of nickel, iron, cobalt, gadolinium, and the like. In one embodiment, the magnetic material at the surface of one or both of the cover sealing surface 106 and the base plate sealing surface 110 may be magnetized such that the entire sealing surface 106, 110 can function in the magnetic particle trap 112. The magnetic material may be a coating applied to at least one of the cover sealing surface 106 or the base plate sealing surface 110, such as a nickel plating applied to the cover 102 or the base plate 104 at the corresponding sealing surface 106, 110. In one embodiment, both the cover sealing surface 106 and the base plate sealing surface 110 include a magnetic material. In one embodiment, only one of the cover sealing surface 106 or the base plate sealing surface 110 includes a magnetic material. In such an embodiment, the material of one of the cover seal surface 106 or the base plate seal surface 110 that is not a magnetic material may be selected such that wear due to contact between the seal surfaces 106, 110 produces particles of primarily magnetic material. For example, when one of the cover seal surface 106 or the base plate seal surface 110 is not a magnetic material, the material has a hardness that is greater than the hardness of the magnetic material included in the other of the cover seal surface 106 or the base plate seal surface 110. In one embodiment, the difference in hardness between the non-magnetic material and the magnetic material may be at least 15 Rockwell C. Non-limiting examples of non-magnetic materials that may be included in the cover seal surface or the base plate seal surface 110 in some embodiments may include aluminum, titanium, molybdenum, and non-magnetic alloys or combinations thereof.

[0029] The magnetic particle trap 112 includes a magnet configured to attract and trap magnetic particles to reduce particulates within an interior space formed by the cover 102 and the base plate 104. The magnetic particle trap 112 includes a magnet configured to provide a magnetic field capable of attracting magnetic particles to the magnetic particle trap. The magnet may be any suitable magnet, such as a permanent magnet. Non-limiting examples of such magnets include neodymium permanent magnets, samarium cobalt magnets, and the like. The magnetic particles may be captured and held to the magnet by the magnetic field. The magnetic particle trap may be disposed in any suitable location on one or both of the cover 102 and the base plate 104. Non-limiting examples of suitable locations for the magnetic particle trap 112 on a cover, such as the cover 102, are shown in FIG. 2 and described below. Non-limiting examples of suitable locations for the magnetic particle trap 112 on a base plate, such as the base plate 104, are shown in FIG. 3 and described below. The magnetic particle trap 112 may further include additional structures, for example, for positioning the magnets and directing a flow that may carry particulates with the magnets, or any other suitable structure. In the embodiment shown in FIG. 1, the magnetic particle trap 112 is included as a puck or disk configured to be received in the recess 114. The magnetic particle trap 112 may be included in any suitable location and configuration that allows the magnetic particle trap to capture particulate matter before said particulate matter contacts a reticle contained within the interior space formed by the cover 102 and the base plate 104. Other non-limiting examples of locations for the magnetic particle trap 112 include being provided on the cover 102 immediately inside the cover sealing surface 106, on or at the end of the protrusion 108, at or near a filter opening formed in the cover 102, on the base plate 104 immediately inside the base plate sealing surface 110, etc. The magnetic particle trap 112 includes one or more magnets that provide a magnetic field that can attract magnetic material contained in one or both of the cover sealing surface 106 and the base plate sealing surface 110.The one or more magnets included in the magnetic particle trap 112 can be selected such that the force of attraction between the magnetic particle trap and the cover 102 and / or base plate 104 is such that the force of attraction does not interfere with opening, closing, or other operation of the reticle container 100. For example, the force of attraction can be less than the weight of the base plate 104 such that the base plate 104 can drop away from the cover 102 to open the reticle container 100.

[0030] The magnetic particle trap 112 may be configured such that trapped particles may be removed from the magnetic particle trap 112. Removal of trapped particles may include a reduction in the extent to which the magnetic particle trap 112 attracts particulate matter. Removal of trapped particles may additionally or alternatively include applying a flow of gas or liquid fluid to expel trapped particles. As a non-limiting example, a gas such as nitrogen, or clean dry air may be blown through the magnetic particle trap 112 to remove the particles. As another non-limiting example, a flow of liquid such as deionized water may be sprayed to remove the particles. In one embodiment, the magnetic particle trap 112 includes electrical contacts that may be energized to form an electromagnet such that attraction of trapped particles is reduced. In one embodiment, the magnetic particle trap 112 is configured to be placed within a magnet capable of providing a field that may reduce attraction of trapped particles to the magnetic particle trap 112. In one embodiment, the magnetic particle trap 112 is removable from the cover 102 or the base plate 104. In one embodiment, the entire cover 102 or base plate 104 may be placed in an apparatus that includes a magnet that is used to reduce attraction of microparticles to the magnetic particle trap 112. In one embodiment, washing the magnetic particle trap 112 may include providing a stronger magnetic field to draw the captured microparticles out of the magnetic particle trap 112 back to the magnet, which applies the stronger magnetic field.

[0031] A recess 114 may optionally be provided on the base plate 104 based on the location and / or configuration of the magnetic particle trap 112. In one embodiment, the recess 114 includes the magnetic particle trap 112, e.g., a magnetic disk or puck, placed within the recess 114. In one embodiment, the recess 114 is configured to receive the protrusion 108 to allow assembly of the cover 102 to the base plate 104. In embodiments where the protrusion 108 is instead provided on the base plate 104, the recess 114 may instead be provided on the cover 102 at a location corresponding to the protrusion 108. The recess 114 may be omitted in embodiments where the magnetic particle trap 112 does not interfere with the interface of the cover 102 and base plate 104 or the containment of the reticle 116 within the reticle container 100. In one embodiment, the recess 114 may be configured such that the cover sealing surface 106 and the base plate sealing surface 110 contact one another when the cover 102 and base plate 104 are joined together. In one embodiment, the recess 114 and the protrusion 108 may be configured to provide a gap between the cover sealing surface 106 and the base plate sealing surface 110 when the cover 102 and base plate 104 are joined together.

[0032] 2 illustrates a cover for a reticle container, according to one embodiment. Cover 200 includes a cover sealing surface 202 and, optionally, a protrusion 204. In one embodiment, cover 200 can include magnetic particle trap 206a, magnetic particle trap 206b, and / or magnetic particle trap 206c.

[0033] The cover sealing surface 202 is a portion of the cover 200 configured to contact a base plate when a reticle container including the cover 200 is assembled. The cover sealing surface 202 can include a magnetic material at a surface such that particles generated by wear of the cover sealing surface 202 can be attracted by a magnet included in a magnetic particle trap, such as magnetic particle traps 206a, b, or c. In one embodiment, the cover sealing surface 202 does not include a magnetic material. In such an embodiment, the base plate includes a magnetic material at a surface corresponding to the cover sealing surface 202, and the cover sealing surface includes a material having a hardness greater than the magnetic material such that wear particles generated by friction involving the cover sealing surface 202 predominantly include the magnetic material. The magnetic material can include, for example, nickel.

[0034] In one embodiment, the cover 200 can include a protrusion 204. The protrusion 204 extends from the cover sealing surface 202. The protrusion 204 can be positioned to extend into a recess formed in a base plate that is used with the cover 200 to form a reticle container. In one embodiment, the height of the protrusion is such that the cover sealing surface 202 contacts the base plate when a reticle container including the cover 200 is assembled. In one embodiment, the height of the protrusion 204 is such that the cover sealing surface 202 is separated from a corresponding surface of the base plate by a gap of such size that a pressure differential can be maintained between the exterior and interior of the reticle container for a period of time. In one embodiment, the protrusion 204 can include a magnetic particle trap 206a. The magnetic particle trap 206a can be optionally provided as a coating on the protrusion 204 and / or by providing a magnet at the tip of each of the protrusions 204. The magnetic particle trap 206a includes a magnet that provides a field that can attract magnetic particles, such as particulate material generated by wear due to friction involving the cover sealing surface 202. The magnetic particle trap 206a may further include platings, coatings, or other materials, including magnets, for example.

[0035] In one embodiment, the magnetic particle trap 206b may be optionally included in the cover 200. The magnetic particle trap 206b may be provided in an interior space of the reticle receptacle defined by the cover 200 and the corresponding base plate. The magnetic particle trap 206b may be provided inside the cover sealing surface 202. In one embodiment, the magnetic particle trap 206b is continuous around the inner circumference of the cover sealing surface 202. In one embodiment, the magnetic particle trap 206b includes one or more segments, each extending corresponding to a portion of the inner circumference of the cover sealing surface 202. In one embodiment, the magnetic particle trap 206b is applied as a coating. In one embodiment, the magnetic particle trap 206b is attached via a mechanical connection and / or adhesive. In one embodiment, the magnetic particle trap 206b is flush with an adjacent surface of the cover 200 inside the cover sealing surface 202. In one embodiment, the magnetic particle trap 206b is disposed in a recess relative to an adjacent surface of the cover 200. In one embodiment, the magnetic particle trap 206b can protrude relative to an adjacent surface of the cover 200. The magnetic particle trap 206b can further include, for example, a plating, coating, or other material including a magnet. In one embodiment, the magnetic particle trap 206b can be provided in some or all of the cover sealing surface 202. For example, a coating on the cover sealing surface 202 can be magnetized to provide the magnetic particle trap 206b.

[0036] In one embodiment, the magnetic particle trap 206c may be optionally included in the cover 200. The magnetic particle trap 206c may be provided at or near the filter opening 208. In one embodiment, the magnetic particle trap 206c surrounds the filter opening 208. In one embodiment, the magnetic particle trap 206c is provided around a portion of the filter opening 208. In one embodiment, the magnetic particle trap 206c is provided between at least two of the filter openings 208. In one embodiment, the magnetic particle trap 206c is provided on a mesh over one or more of the filter openings 208. In one embodiment, the magnetic particle trap 206c is applied as a coating. In one embodiment, the magnetic particle trap 206c is attached via a mechanical connection and / or adhesive. In one embodiment, the magnetic particle trap 206c is flush with an adjacent surface of the cover 200 at or near the filter opening 208. In one embodiment, the magnetic particle trap 206c is disposed in a recess relative to an adjacent surface of the cover 200. In one embodiment, the magnetic particle trap 206c can protrude relative to an adjacent surface of the cover 200. The magnetic particle trap 206c can further include platings, coatings, or other materials including magnets, for example.

[0037] When optional magnetic particle traps 206a, b, and / or c are included in cover 200, the attractive force of magnetic particle traps 206a-c included in cover 200 may be selected such that the attractive force does not interfere with separation of cover 200 from a corresponding base plate. For example, the attractive force between magnetic particle traps 206a-c and a base plate may be less than the weight of the base plate such that the base plate can separate from cover 200 when cover 200 is lifted or when the support for the base plate is removed while cover 200 is held in a tool.

[0038] 3 illustrates a base plate of a reticle container, according to one embodiment. Base plate 300 includes a base plate sealing surface 302 and, optionally, a recess 304. In one embodiment, base plate 300 can include magnetic particle trap 306a and / or magnetic particle trap 306b.

[0039] The baseplate sealing surface 302 is a portion of the baseplate 300 configured to contact a corresponding surface of a cover used with the baseplate 300 to provide a reticle receptacle. The baseplate sealing surface 302 may include a magnetic material that may be attracted by a magnetic field, such as the magnetic field provided by the magnetic particle traps 206a-c or magnetic particle traps 306a or b described above and shown in FIG. 2. The magnetic material may be nickel, as a non-limiting example. In one embodiment, the baseplate sealing surface 302 does not include a magnetic material, but the corresponding surface of a cover used with the baseplate 300 does include a magnetic material. In such an embodiment, the hardness of the baseplate sealing surface 302 may be greater than the hardness of the magnetic material, such that particulates generated by friction involving the baseplate sealing surface 302 are predominantly of the magnetic material.

[0040] Optionally, recess 304 may be included in base plate 300. In one embodiment, recess 304 is included and a cover for use with base plate 300 includes a protrusion. Recess 304 may be positioned to accommodate such a protrusion from the cover, for example at a particular location along base plate sealing surface 302. In one embodiment, recess 304 is sized such that a corresponding protrusion may be received such that when the cover is assembled to base plate 300, base plate sealing surface 302 and the corresponding surface of the cover contact one another. In one embodiment, recess 304 is sized such that when a protrusion from the cover is received in recess 304, base plate sealing surface 302 is spaced from the corresponding surface of the cover by a gap sized such that a pressure differential may be maintained between the exterior and interior of the reticle container for a period of time. In one embodiment, recess 304 may be a trench or groove formed in or within base plate sealing surface 302. Recess 304 may be configured to accommodate particulate matter from outside or at base plate sealing surface 302.

[0041] The magnetic particle trap 306a can be optionally located within the recess 304. The magnetic particle trap 306a includes a magnet that provides a field capable of attracting magnetic particles, such as particulate material generated by wear due to friction involving the base plate sealing surface 302. The magnetic particle trap 306a can further include, for example, a plating, coating, or other material including a magnet. The magnetic particle trap 306a can be, for example, a magnetic disk or puck sized to correspond to the recess 304 in which the magnetic particle trap 306a is placed. In one embodiment, the magnetic particle trap 306a is provided as a coating applied in the recess 304. In one embodiment, the magnetic particle trap 306a is attached to the recess 304 by a mechanical connection and / or adhesive. By being located in the recess 304, the magnetic particle trap 306a can draw particulate matter into the recess 304 out of plane with a path to the interior space of the reticle container including the base plate 300. Thus, intrusion of particulates into the interior space of the reticle container including the base plate 300 can be reduced.

[0042] The magnetic particle trap 306b may be optionally included in the interior space of the reticle container when the base plate 300 is joined with the corresponding cover. The magnetic particle trap 306b includes a magnet and may further include, for example, a plating, coating, or other material including a magnet. The magnetic particle trap 306b may be provided inside the base plate sealing surface 302. In one embodiment, the magnetic particle trap 306b is continuous around the inner circumference of the base plate sealing surface 302. In one embodiment, the magnetic particle trap 306b includes one or more segments each extending corresponding to a portion of the inner circumference of the base plate sealing surface 302. In one embodiment, the magnetic particle trap 306b is applied as a coating. In one embodiment, the magnetic particle trap 306b is attached via a mechanical connection and / or adhesive. In one embodiment, the magnetic particle trap 306b is flush with an adjacent surface of the base plate 300 inside the base plate sealing surface 302. In one embodiment, the magnetic particle trap 306b is disposed in a recess with respect to an adjacent surface of the base plate 300. In one embodiment, the magnetic particle trap 306b may protrude with respect to an adjacent surface of the base plate 300.

[0043] When optional magnetic particle traps 306a and / or b are included in the base plate 300, the attractive force of the magnetic particle traps 306a and / or b included in the base plate 300 may be selected such that the attractive force does not interfere with separation of the base plate 300 from the corresponding cover. For example, the attractive force between the magnetic particle traps 306a and / or b and the base plate may be less than the weight of the base plate 300 such that the base plate 300 can separate from the cover when the cover is lifted or when the support for the base plate 300 is removed while the cover is held in a tool.

[0044] Aspects:

[0045] It is understood that any of embodiments 1-8 can be combined with any of embodiments 9-14 or 15-20. It is understood that any of embodiments 9-14 can be combined with any of embodiments 15-20.

[0046] Aspect 1. An article comprising a reticle container, the reticle container comprising: a cover including a cover sealing surface; A base plate including a base plate sealing surface; Including, the cover and the base plate define an interior space configured to accommodate a reticle; The article, wherein the reticle container further comprises one or more magnetic particle traps disposed on or in the cover, the base plate, or a combination thereof.

[0047] Embodiment 2. The article of embodiment 1, wherein the one or more magnetic particle traps comprise a plurality of depressions disposed on one of the cover sealing surface or the base plate sealing surface.

[0048] Embodiment 3. The article of embodiment 2, wherein the other of the cover sealing surface or the base plate sealing surface includes a plurality of protrusions, each protrusion configured to extend into one of the plurality of recesses.

[0049] Embodiment 4. An article according to any of embodiments 1 to 3, wherein the cover comprises one or more filter openings, and wherein the one or more magnetic particle traps are each disposed in one of the one or more filter openings.

[0050] Embodiment 5. The article of any of embodiments 1 to 4, wherein the one or more magnetic particle traps are disposed within the interior space.

[0051] Embodiment 6. The article of any one of embodiments 1 to 5, wherein at least one of the cover sealing surface and the base plate sealing surface comprises a magnetic material.

[0052] Embodiment 7. The reticle container of embodiment 6, wherein the magnetic material is included in a coating applied to the cover or base plate to form the cover or base plate sealing surface.

[0053] Aspect 8. A reticle container according to any of aspects 1 to 7, wherein the magnetic particle trap is configured such that the force of attraction between the magnetic particle trap and the cover or base plate is less than the weight of the base plate.

[0054] Aspect 9. A method involving a reticle, comprising placing the reticle in an interior space of a reticle container, the reticle container comprising a cover, a base plate, and one or more magnetic particle traps each comprising a magnet, the cover comprising a cover sealing surface, and the base plate comprising a base plate sealing surface.

[0055] Embodiment 10. The method of embodiment 9, further comprising capturing the magnetic particles in one or more magnetic particle traps.

[0056] The method of embodiment 10, further comprising washing the magnetic particle traps by reducing the attraction between the magnet and the magnetic particles in each of the one or more magnetic particle traps.

[0057] Embodiment 12. The method of embodiment 11, wherein cleaning the magnetic particle trap further comprises applying a gas flow to the magnetic particle trap.

[0058] Embodiment 13. The method of any of embodiments 10 to 12, wherein one or both of the cover sealing surface and the base plate sealing surface comprise a magnetic material, and the magnetic particles result from wear on one or both of the cover sealing surface and the base plate sealing surface that comprise a magnetic material.

[0059] Example 14. The method of any of examples 9 to 13, further comprising separating the cover and base plate by supporting the cover and allowing the base plate to drop.

[0060] Embodiment 15. A method of manufacturing a reticle container, comprising: providing a cover having a cover sealing surface; providing a base plate having a base plate sealing surface; Providing one or more magnetic particle traps on or in the cover, base plate, or a combination thereof; A method comprising:

[0061] Example 16. The method of example 15, further comprising providing a magnetic material at one or both of the cover sealing surface and the baseplate sealing surface.

[0062] Aspect 17. The method of aspect 16, wherein providing a magnetic material on one or both of the cover sealing surface and the base plate sealing surface comprises applying a coating including a magnetic material to one or both of the cover sealing surface and the base plate sealing surface.

[0063] Aspect 18. A method as described in any of aspects 15 to 17, wherein providing one or more magnetic particle traps includes providing a plurality of recesses in one of the cover sealing surface or the base plate sealing surface, and disposing a magnet in each of the plurality of recesses.

[0064] Embodiment 19. A method according to any of embodiments 15 to 18, wherein the cover includes one or more filter openings, and wherein providing the one or more magnetic particle traps includes disposing each of the one or more magnetic particle traps in one of the one or more filter openings.

[0065] A method according to any of embodiments 15 to 19, wherein providing one or more magnetic particle traps includes disposing each of the one or more magnetic particle traps on a surface of a cover or base plate defining an interior space of the reticle container.

[0066] The examples disclosed in this application are to be considered in all respects as illustrative and not restrictive. The scope of the invention is indicated by the appended claims, rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.

Claims

1. 1. An article comprising a reticle container, the reticle container comprising: a cover including a cover sealing surface; A base plate including a base plate sealing surface; Including, the cover and the base plate defining an interior space configured to accommodate a reticle; The article, wherein the reticle container further comprises one or more magnetic particle traps disposed on or in the cover, the base plate, or a combination thereof.

2. The article of claim 1 , wherein the one or more magnetic particle traps comprise a plurality of depressions disposed on one of the cover sealing surface or the base plate sealing surface.

3. The article of claim 2 , wherein the other of the cover sealing surface or the base plate sealing surface includes a plurality of protrusions, each protrusion configured to extend into one of the plurality of recesses.

4. The article of claim 1 , wherein the cover includes one or more filter openings, and the one or more magnetic particle traps are each disposed in one of the one or more filter openings.

5. The article of claim 1 , wherein the one or more magnetic particle traps are disposed within the interior space.

6. The article of claim 1 , wherein at least one of the cover sealing surface and the baseplate sealing surface comprises a magnetic material.

7. 7. The reticle container of claim 6, wherein the magnetic material is included in a coating applied to the cover or base plate to form the cover sealing surface or the base plate sealing surface.

8. The reticle container of claim 1 , wherein the magnetic particle trap is configured such that the force of attraction between the magnetic particle trap and the cover or the base plate is less than a weight of the base plate.

9. A method including a reticle, the method comprising placing the reticle in an interior space of a reticle container, the reticle container including a cover, a base plate, and one or more magnetic particle traps each including a magnet, the cover including a cover sealing surface, and the base plate including a base plate sealing surface.

10. The method of claim 9 , further comprising capturing magnetic particles in the one or more magnetic particle traps.

11. The method of claim 10 , further comprising cleaning the magnetic particle traps by reducing the attraction between the magnet and the magnetic particles in each of the one or more magnetic particle traps.

12. The method of claim 11 , wherein cleaning the magnetic particle trap further comprises applying a gas flow to the magnetic particle trap.

13. 11. The method of claim 10, wherein one or both of the cover sealing surface and the base plate sealing surface comprise a magnetic material, and the magnetic particles result from wear on one or both of the cover sealing surface and the base plate sealing surface that comprise the magnetic material.

14. The method of claim 9 , further comprising separating the cover and the base plate by supporting the cover and allowing the base plate to drop.

15. 1. A method for manufacturing a reticle container, comprising: providing a cover having a cover sealing surface; providing a base plate having a base plate sealing surface; providing one or more magnetic particle traps on or in said cover, said base plate, or a combination thereof; A method comprising:

16. The method of claim 15 further comprising providing a magnetic material at one or both of the cover sealing surface and the base plate sealing surface.

17. 17. The method of claim 16, wherein the providing a magnetic material on the one or both of the cover sealing surface and the base plate sealing surface comprises applying a coating including the magnetic material to the one or both of the cover sealing surface and the base plate sealing surface.

18. 16. The method of claim 15, wherein the providing one or more magnetic particle traps comprises providing a plurality of recesses in one of the cover sealing surface or the base plate sealing surface and disposing a magnet in each of the plurality of recesses.

19. 16. The method of claim 15, wherein the cover includes one or more filter openings, and providing the one or more magnetic particle traps includes disposing each of the one or more magnetic particle traps in one of the one or more filter openings.

20. 16. The method of claim 15, wherein providing the one or more magnetic particle traps comprises disposing each of the one or more magnetic particle traps on a surface of the cover or base plate that defines an interior space of the reticle container.

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