Filter module

Abstract

The filter module includes an interface body and a filter holding body. The filter can be disposed between the filter holding body and a filter holder joined to the filter holding body. The filter holding body may further include a valve. The filter holder can be joined to the filter holding body by snap fitting, press fitting, or welding. The filter holder may include a standoff configured to contact the filter such that the filter is gripped away from the filter grill. The filter module can be used to provide purging to a wafer container such as a front opening unified pod (FOUP).

Description

Technical Field

[0001] The present disclosure relates to a module for containing a filter, and more particularly to a filter module for use in a wafer container.

Background Art

[0002] A purge assembly for a wafer container, such as a front-opening unified pod (FOUP), typically includes a number of individual components including grommets, filters, valves, and various sealing members. The filter is typically held by welding the filter in place within a filter element that is later included within the purge assembly. Further, the filter grill used to hold the filter can block the flow through the portion of the filter covered by such grill.

Summary of the Invention

[0003] The present disclosure relates to a module for containing a filter, and more particularly to a filter module for use in a wafer container.

[0004] By using an elastic interface body instead of a grommet and inserting a filter holder into the interface body, a simple and integrated construction can be provided for the purge module. This simplifies the construction and prevents failures such as not including a sealing element when installing the purge module.

[0005] By using standoffs provided on the filter grill to space the filter away from the grill, the effective surface area of the filter can be increased by reducing the blockage of the filter surface at the point of contact with the grill. This improves the flow and can reduce the pressure drop across the filter. The reduction in pressure drop can reduce vibrations or the lifting of the wafer container when purge is being supplied through the filter.

[0006] The filter can be held in place without the need for welding by only capturing the periphery of the filter and using snap fits such as an annular snap fit. This simplifies manufacturing and avoids potential particle generation that may result from having to use ultrasonic welding to fix the filter. Also, introduction of contaminants such as exhaust gases released by an adhesive formulation that might otherwise be used to hold the filter can be avoided.

[0007] In one embodiment, a gas exchange module for a substrate container includes a filter housing and an interface body. The interface body has a lumen configured to receive the filter housing. The gas exchange module further includes a filter disposed at an end of the filter housing and a filter holder joined to the filter housing.

[0008] In one embodiment, the filter housing further comprises a valve. In one embodiment, the valve is a check valve.

[0009] In one embodiment, the interface body includes one or more retention features disposed on an outer surface of the interface body.

[0010] In one embodiment, the filter holder is joined to the filter housing by a snap fit formed between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing. In one embodiment, the filter is held only by compression between a first holding surface provided on the filter holder and a second holding surface provided on the filter housing. In one embodiment, the filter holder is joined to the filter housing by welding. In one embodiment, the welding is laser welding. In one embodiment, the welding is ultrasonic welding. In one embodiment, the filter holder is joined to the filter housing by press fitting.

[0011] In one embodiment, the filter holder includes a holding element provided in an opening defined by the filter holder. The holding element includes a plurality of pairs of spokes. Each of the plurality of pairs of spokes extends toward a center, and the center defines a passage. Each of the plurality of spokes includes a filter holding beam configured to contact the filter, and the total surface area of the filter holding beam is smaller than the total surface area of the holding element.

[0012] In one embodiment, the interface body includes an elastic material.

[0013] In one embodiment, the substrate container includes a substrate container body that defines an internal space, and the substrate container includes a gas exchange port. The substrate container further includes a gas exchange module disposed at the gas exchange port. The gas exchange module includes a filter housing and an interface body. The interface body has an interface body and a lumen configured to receive the filter housing. The gas exchange module further includes a filter disposed at an end of the filter housing and a filter holder joined to the filter housing. The interface body is configured to form a sealing portion around the gas exchange port when the gas exchange module is disposed at the gas exchange port.

[0014] In one embodiment, the interface body includes one or more holding features disposed on an outer surface of the interface body, and the gas exchange port includes one or more openings configured to receive one or more holding features disposed on the outer surface of the interface body.

[0015] In one embodiment, the filter housing includes a valve.

[0016] In one embodiment, the filter holder is joined to the filter housing by a snap fit formed between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing. In one embodiment, the filter is held only by compression between a first holding surface provided on the filter holder and a second holding surface provided on the filter housing. In one embodiment, the filter holder is joined to the filter housing by welding. In one embodiment, the welding is laser welding. In one embodiment, the welding is ultrasonic welding. In one embodiment, the filter holder is joined to the filter housing by press fitting.

[0017] In one embodiment, the filter holder includes a holding element provided in an opening defined by the filter holder. The holding element includes a plurality of pairs of spokes. Each of the plurality of pairs of spokes extends towards a center, which defines a passage. Each of the plurality of spokes includes a filter holding beam configured to contact the filter, and the total surface area of the filter holding beams is smaller than the total surface area of the holding element.

[0018] In one embodiment, the interface body includes an elastic material.

[0019] In one embodiment, a method of providing gas exchange within a substrate container includes assembling a gas exchange module by inserting a filter housing into the lumen of an interface body, disposing a filter at an end of the filter housing, and attaching a filter holder to the filter housing. The method further includes inserting the gas exchange module into a gas exchange port of the substrate container.

[0020] In one embodiment, attaching the filter holder to the filter housing includes forming a snap fit between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing. In one embodiment, the filter is held only by compression between a first holding surface provided on the filter holder and a second holding surface provided on the filter housing.

[0021] In one embodiment, inserting the gas exchange module into the gas exchange port of the substrate container includes forming an interface between an opening provided in the gas exchange port and one or more holding features provided on the outer surface of the interface body.

[0022] In one embodiment, the method further includes directing a gas flow through the interface body, passing the gas flow through a valve provided in the filter housing, and passing the gas flow through the filter.

[0023] In one embodiment, the filter holder includes a filter holding body that defines an opening. The filter holding body has one or more holding elements that extend into the opening in a direction transverse to the opening. At least one of the one or more holding elements includes one or more standoffs, and each of the one or more standoffs protrudes from a side of the one or more holding elements configured to face a filter to be fixed by the filter holder. The surface area of the contact surface of the one or more standoffs is smaller than the surface area of the one or more holding elements.

[0024] In one embodiment, the opening is circular in shape.

[0025] In one embodiment, the one or more holding elements include a central body and a plurality of spokes. In one embodiment, the one or more standoffs are disposed at the junctions between the central body and the plurality of spokes.

[0026] In one embodiment, the one or more retaining elements include a plurality of spokes configured to intersect at the center of the opening.

[0027] In one embodiment, the one or more retaining elements form a grid across the opening.

[0028] In one embodiment, the one or more retaining elements include a plurality of pairs of spokes. Each of the plurality of pairs of spokes extends toward the center, and the center defines a passage. In one embodiment, the one or more standoffs are filter retaining beams provided on the spokes of the plurality of pairs of spokes.

[0029] In one embodiment, the filter retaining body includes an attachment portion including a snap - fit feature.

[0030] In one embodiment, the filter assembly includes a filter and a filter retainer. The filter retainer includes a filter retaining body defining an opening and having one or more retaining elements extending into the opening in a direction transverse to the opening. At least one of the one or more retaining elements includes one or more standoffs, and each of the one or more standoffs protrudes from a side of the one or more retaining elements configured to face the filter. The surface area of the contact surface of the one or more standoffs is smaller than the surface area of the one or more retaining elements. The filter contacts the filter retainer at the standoffs.

[0031] In one embodiment, the opening is circular in shape.

[0032] In one embodiment, the one or more retaining elements include a central body and a plurality of spokes. In one embodiment, the one or more standoffs are disposed at the junctions between the central body and the plurality of spokes. In one embodiment, the central body is a ring.

[0033] In one embodiment, the one or more retaining elements include a plurality of spokes configured to intersect at the center of the opening.

[0034] In one embodiment, one or more retaining elements form a grid across the opening.

[0035] In one embodiment, one or more retaining elements include a plurality of pairs of spokes. Each of the plurality of pairs of spokes extends toward a center that defines a passage. In one embodiment, one or more standoffs are filter retaining beams provided on the spokes of the plurality of pairs of spokes.

[0036] In one embodiment, the filter retaining body includes a mounting portion that includes a snap-fit feature.

[0037] In one embodiment, the filter assembly further includes a canister, and the filter retaining portion is joined to the canister. In one embodiment, the filter assembly further includes a purge port, and the filter retaining portion is joined to the purge port. In one embodiment, the filter assembly further includes a gas exchange module, and the filter retaining portion is joined to the gas exchange module. In one embodiment, the filter assembly further includes a housing having a port, and the filter retaining portion is joined to the port.

[0038] In one embodiment, a method of retaining a filter includes securing the filter using a filter retainer, the filter retainer including a filter retaining body that defines an opening, the filter retaining body having one or more retaining elements that extend into the opening in a direction transverse to the opening. At least one of the one or more retaining elements includes one or more standoffs, each of the one or more standoffs protruding from a side of the retaining element configured to face the filter to be secured by the filter retainer. The surface area of the contact surface of the one or more retaining elements is smaller than the surface area of the one or more retaining elements, and the filter contacts the filter retainer at the standoffs.

[0039] In one embodiment, the filter holder includes a filter holder body that defines an opening. The filter holder body has a contact surface surrounding the opening, a filter contact surface, and snap-fit retaining features provided on one or more inner surfaces of one or more walls. The one or more walls surround the filter contact surface.

[0040] In one embodiment, the snap-fit retaining features are annular protrusions.

[0041] In one embodiment, the snap-fit retaining features include a plurality of protrusions.

[0042] In one embodiment, the snap-fit retaining features are annular grooves.

[0043] In one embodiment, the snap-fit retaining features include a plurality of recesses formed in one or more inner surfaces.

[0044] In one embodiment, the filter assembly includes a port body. The port body includes a port filter contact surface and port snap-fit features. The filter assembly further includes a filter and a filter holder. The filter holder includes a filter holder body that defines an opening. The filter holder body has a contact surface surrounding the opening, a holder filter contact surface, and holder snap-fit features provided on one or more inner surfaces of one or more walls. The one or more walls surround the filter contact surface. A portion of the filter is compressed between the port filter contact surface and the holder filter contact surface. The port snap-fit features are configured to form a snap-fit with the holder snap-fit features.

[0045] In one embodiment, the filter is retained only by compression between the port filter contact surface and the holder filter contact surface.

[0046] In one embodiment, the port body is included in a canister, and the canister has a canister body that includes an elastic material. In one embodiment, the port body is included in a purge port. In one embodiment, the port body is included in a housing. In one embodiment, the port body is included in a gas exchange module.

[0047] In one embodiment, the filter retainer includes one or more retaining elements that extend across an opening of the filter retainer. At least one of the one or more retaining elements includes one or more standoffs, and each of the one or more standoffs protrudes from a side of the one or more retaining elements configured to face the filter. The surface area of the contact surface of the one or more standoffs is smaller than the surface area of the one or more retaining elements. The filter contacts the filter retainer at the standoffs.

[0048] In one embodiment, the filter retainer includes retaining elements provided in an opening defined by the filter retainer. The retaining elements include a plurality of pairs of spokes. Each of the plurality of pairs of spokes extends toward a center, and the center defines a passageway. Each of the plurality of spokes includes a filter retaining beam configured to contact the filter, and the total surface area of the filter retaining beams is smaller than the total surface area of the retaining elements.

[0049] In one embodiment, a method of assembling a filter assembly includes placing a filter between a port body and a filter retainer, and snap - fitting the filter retainer onto the port body such that one or more port body snap - fit features provided on the port body engage one or more retainer snap - fit features provided on the filter retainer.

[0050] In one embodiment, the filter is compressed between a port filter contact surface and a retainer filter contact surface.

[0051] In one embodiment, the method further includes holding the position of the filter only by compressing the filter between the port filter contact surface and the retainer filter contact surface.

[0052] In one embodiment, the method further includes contacting the filter at a standoff provided on one or more retaining elements extending into the opening of the filter retainer, the contact area of the standoff being smaller than the surface area of the one or more retaining elements.

[0053] In one embodiment, the port body is included in a canister. In one embodiment, the port body is included in a purge port. In one embodiment, the port body is included in a housing. In one embodiment, the port body is included in a gas exchange module.

Brief Description of the Drawings

[0054]

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[0055] The present disclosure relates to a module for containing a filter, and more particularly to a filter module for use in a wafer container.

[0056] FIG. 1 shows an exploded assembly view of a filter module according to an embodiment. The filter module 100 includes an interface body 102 and a filter housing 104. The filter module 100 may optionally include one or more operable elements. Optionally, a valve 106 may be included in the filter housing 104 as an operable element. The filter 108 may be held between the filter housing 104 and the filter holder 110. Optionally, a sensor 112 may be incorporated into the filter housing 104 as an operable element.

[0057] The filter module 100 is configured to be housed in a wafer container such as a front-opening unified pod (FOUP). The filter module is configured to interface with a fluid source such as a purge gas supply source and to direct the received fluid through the filter 108. The fluid can be any suitable liquid or gas to be introduced into the wafer container. Optionally, the filter module 100 further includes a valve 106 for measuring the flow into the wafer container or for preventing the flow out of the wafer container via the filter module 100.

[0058] The interface body 102 is a body configured to interface with a fluid source such as a purge gas supply source. The interface body 102 further has a lumen configured to receive a part of the filter housing, and thus, the filter housing 104 can be inserted into the lumen. The interface body 102 can be made of an elastic material configured to form a sealing portion between the interface body 102 and a part of the filter housing 104 inserted into the lumen of the interface body 102. Further, the elastic material of the interface body 102 can be configured to form a sealing portion between the interface body 102 and a part of the wafer container, such as a purge port opening into which the interface body 102 can be inserted. The interface body 102 can be configured such that the interface body 102 can be held at a part of the wafer container, such as a purge port opening into which the interface body 102 can be inserted. For example, holding can be achieved by sizing the interface body 102 to provide a press fit, providing one or more holding features such as protrusions on the surface of the interface body, or any other suitable structure included in the interface body 102.

[0059] The filter housing 104 is configured to be inserted into a lumen provided in the interface body 102 and is configured to be connected to the filter holder 110, and thus, the filter 108 can be fixed to the path of the fluid entering the filter module 100 in the interface body 102. The filter housing 104 can optionally include one or more features configured to interface with features provided in the lumen of the interface body 102 such that the filter housing 104 is held within the interface body 102. In one embodiment, the filter housing 104 forms a press fit with the lumen formed in the interface body 102.

[0060] One or more operable elements may be included in the filter module 100 and interact with the flow through the filter module 100. The operable elements can be, by way of non-limiting example, valves, sensors, or any other suitable device for interacting with the flow, such as to measure and / or control the characteristics of the flow. One example of an operable element can be the valve 106. The valve 106 can optionally be included in the filter housing 104 as an operable element. In one embodiment, the valve 106 is a check valve configured to prevent flow towards the interface body 102. The valve 106 can be, for example, a check valve assembly, an umbrella valve, or any other suitable valve for measuring the flow or preventing flow towards the interface body 102. The valve 106 can be held within the body of the filter housing 104, for example, by extending the protrusion of the umbrella valve through an opening provided in the filter housing 104.

[0061] The filter 108 can be any suitable material for filtering the fluid flowing through the filter module 100. The filter 108 can be, by way of non-limiting example, a disk of filter media. The filter 108 can further include a porous material surrounding the filter media. In one embodiment, the filter 108 is held by clamping between the filter housing 104 and the filter retainer 110. In one embodiment, the filter 108 is welded to the filter housing 104 or the filter retainer 110, for example, by ultrasonic welding.

[0062] The filter holder 110 is configured to be joined to the filter housing 104 such that the filter 108 is held in a fixed position. The filter holder 110 may include a contact surface configured to clamp the filter 108 against one or more surfaces provided on the filter housing 104. In one embodiment, the filter holder 110 includes one or more snap-fit retaining features for attachment to the filter housing 104. In one embodiment, the filter holder 110 includes one annular snap-fit retaining feature for attachment to a corresponding annular feature provided on the filter housing 104. In one embodiment, the filter holder 110 includes one or more retaining elements configured to support and hold the filter. Optionally, the retaining elements of the filter holder 110 may include standoffs configured to contact the filter 108 with a reduced surface area compared to the total surface area of the one or more retaining elements.

[0063] In one embodiment, one or more sensors may be included among the operable elements included in the filter module 100. One example of such an operable element is the sensor 112. The sensor 112 may optionally be included in the filter module 100. The sensor 112 may be a wired or wireless sensor disposed on either the filter housing 104 or the interface body 102. The sensor 112 may be any suitable sensor for measuring a characteristic of interest, such as relative humidity, the presence of volatile organic compounds (VOCs), pressure, or oxygen level.

[0064] FIG. 2 shows a cross-sectional view of a filter module according to one embodiment. The filter module 200 includes an interface body 202 and a filter housing 204. Optionally, a valve 206 may be included in the filter housing 204. The filter 208 may be held between the filter housing 204 and the filter holder 210. Optionally, a sensor 212 may be incorporated into the filter housing 204.

[0065] The filter module 200 is a filter module configured to be used with a wafer container such as a FOUP. For example, the filter module 200 can be inserted into a purge port of a wafer container to position a filter in a flow path through which a purge gas is introduced into the wafer container.

[0066] The interface body 202 includes an opening 214 configured to interface with a purge source, such as a purge source included in an appliance where the wafer container serves as an interface. The opening 214 can be configured to receive a portion of the purge source.

[0067] The interface body 202 further has a lumen 216 configured to receive an insertion portion 224 of the filter housing 204. One or more interface body retention features 218 can be formed in the lumen 216. The interface body retention features 218 can be, for example, one or more protrusions or recesses configured to hold the filter housing 204 within the lumen 216. In one embodiment, the interface body retention feature 218 is an annular protrusion. In one embodiment, the interface body retention feature 218 is an annular groove. In one embodiment, at least a portion of the lumen 216 is sized to provide the interface body retention feature 218 by forming a press fit between the filter housing 204 and the lumen 216.

[0068] The interface body 202 may further include an engagement feature 220 formed on the outer surface 222 of the interface body 202. The engagement feature 220 may be configured to engage with the wafer container, for example, at an opening provided on the inner surface of a port into which the filter module 200 is to be inserted. In one embodiment, the engagement feature 220 is a plurality of protrusions from the outer surface 222. In one embodiment, each of the protrusions is configured to facilitate insertion, for example, by having a surface inclined upwardly of the engagement feature 220. In one embodiment, the engagement feature 220 is one or more annular ribs surrounding the interface body 202. In one embodiment, the interface body 202 is press-fitted into the wafer container by contact made on the smooth outer surface of the interface body without using a dedicated engagement feature 220 that protrudes from or is formed on the outer surface of the interface body 202.

[0069] The interface body 202 may be made of, or may include, an elastic material that can be compressed when the interface body 202 is within a corresponding port provided in the wafer container, such that the interface body 202 can form a seal when within the port. The elastic material can be, for example, an elastomer such as a fluorine elastomer. A non-limiting example of such an elastic material is FKM. The elastic material can be, for example, a thermoplastic elastomer. Non-limiting examples of thermoplastic elastomers suitable for use as the elastic material include styrene block copolymers and thermoplastic polyolefin elastomers. The elastic material may further be included in the opening 214, such that the interface body 202 can seal a purge source used with a wafer container including the purge module 200.

[0070] The filter housing 204 includes an insertion portion 224 configured to be received within the lumen 216 of the interface body 202. The insertion portion 224 may include one or more filter housing retention features 226. The filter housing retention features 226 may be configured to cooperate with the interface body retention features 218 to secure the filter housing 204 to the interface body 202. The filter housing retention features 226 may be, for example, one or more protrusions or recesses formed on the surface of the insertion portion 224. In one embodiment, the filter housing retention features 226 are annular protrusions. In one embodiment, the filter housing retention features 226 are annular grooves. In one embodiment, at least a portion of the lumen insertion portion 224 is sized to provide the filter housing retention features 226 by forming an interference fit between the filter housing 204 and the lumen 216. The lumen 216 may be configured such that fluid received at the opening 214 can pass into the filter housing 204.

[0071] The valve 206 is a valve that may optionally be included in the filter housing 204. The valve 206 can be any suitable valve for controlling the flow through the filter housing 204. In one embodiment, the valve 206 is a check valve, such as a mechanical check valve, a duckbill valve, or an umbrella valve. In one embodiment, the valve 206 is an umbrella valve. When the valve 206 is an umbrella valve, the filter housing 204 may include a ring 228 through which the axis 230 of the valve 206 can extend to hold the umbrella valve in place within the filter housing 204. In one embodiment, the valve 206 is a mechanical check valve assembly.

[0072] Filter 208 is a filter held between filter housing 204 and filter holder 210. In one embodiment, filter 208 is one or more sheets of filter media. In one embodiment, filter 208 includes a coating or a container on or surrounding the filter media. In one embodiment, the container for the filter media of filter 208 is a sheet of permeable material joined together, for example, using ultrasonic welding. Filter 208 can be any suitable filter for the fluid passing through purge module 200.

[0073] The filter retainer 210 can be joined to the filter housing 204 to hold the filter 208. The filter retainer 210 includes an outer peripheral portion 232, one or more filter retaining elements 234, one or more standoffs 236, a filter contact surface 238, and a retainer attachment feature 240. The outer peripheral portion 232 is configured to surround an end of the filter housing 204 to which the filter retainer 210 is attached. The outer peripheral portion 232 defines an opening. Optionally, one or more filter retaining elements 234 can be positioned within the opening to prevent, for example, the filter 208 from being pushed out or otherwise escaping the filter housing 204 and the filter retainer 210. In one embodiment, the filter retaining element 234 includes a central ring and a plurality of spokes joining the central ring to the outer peripheral portion 232. In one embodiment, the filter retaining element 234 includes one or more lengths extending across the opening, for example, to provide a grill. In one embodiment, one or more standoffs 236 extend from one or more filter retaining elements 234 on a side facing the filter 208 when the purge module 200 is assembled. The one or more standoffs 236 can contact the filter 208 to position the filter 208 away from at least a portion of the one or more filter retaining elements 234. The surface area of the standoff 236 contacting the filter 208 can be less than the surface area of the filter retaining element 234, such that the filter 208 is less obstructed by contact with the standoff 236 compared to contact with the filter retaining element 234.

[0074] The filter contact surface 238 can be provided as part of the outer peripheral portion 232. The filter contact surface 238 faces the filter housing 204 when the purge module 200 is assembled. The filter contact surface 238 can be spaced apart from the filter contact surface 242 of the opposing filter housing 204 by a distance less than or equal to the thickness of the filter 208 so that the filter 208 is clamped between the filter contact surface 238 and the corresponding filter contact surface 242 provided on the filter housing 204. In one embodiment, the filter 208 can be held only by being clamped between the filter contact surface 238 and the filter housing 204. In one embodiment, the filter 208 can be fixed to one or both of the filter contact surface 238 and the filter housing 204 by an adhesive. In one embodiment, the filter 208 can be fixed to one or both of the filter contact surface 238 and the filter housing 204 by welding.

[0075] The retainer attachment feature 240 enables the filter retainer 210 to be mechanically joined to the filter housing 204. In one embodiment, the retainer attachment feature 240 is an annular recess or an annular protrusion configured to form a snap fit with a corresponding filter housing attachment feature 242 provided on the filter housing 204. In one embodiment, the retainer attachment feature 240 includes a plurality of protrusions or recesses, such as snaps or detents, configured to interface with a corresponding filter housing attachment feature 242.

[0076] The sensor 212 can optionally be included in the purge module 200. The sensor 212 can be any suitable sensor capable of measuring one or more parameters of interest, such as flow rate, relative humidity, the presence and / or amount of a chemical substance such as volatile organic compounds (VOCs) or oxygen. In one embodiment, the sensor 212 is positioned within the interface body 202. In one embodiment, the sensor 212 is positioned within the filter housing 204.

[0077] Figure 3 shows a filter holder according to one embodiment. The filter holder 300 includes an outer ring 302 having an inner surface 304 and mounting features 306 formed on the inner surface 304. The outer ring 302 defines an opening 308. The retaining element 310 extends into the opening 308. In the embodiment shown in Figure 3, the retaining element 310 includes a plurality of spokes 312 and a central ring 314. On the side facing the filter when the filter holder 300 is in use, standoffs 316 are provided on the retaining element 308. On the side facing the filter when the filter holder 300 is in use, a filter contact surface 318 is provided on the outer ring 302.

[0078] The filter holder 300 is configured to be attached to a structure such as a purge module, a port, or a filter adapter, for example, a filter housing 204 for holding a filter such as the filter 208, as described above and shown in Figure 2. The filter holder 300 can be, in an exemplary embodiment, a single piece. The filter holder 300 can be made of a rigid plastic material such as polycarbonate, high density polyethylene or ultra-high molecular weight polyethylene (HDPE or UHMWPE), or any other such suitable rigid polymer material.

[0079] The outer ring 302 defines the perimeter of the filter holder 300. In FIG. 3, the outer ring 302 is shown as having a circular outer shape, while the filter holder 300 is configured to be used together with a purge module, port, or filter adapter that can be shaped to correspond to the shape of the outer ring 302, such as an ellipse, square, rectangle, or other such outer shape. It is understood that the outer ring 302 includes an inner surface 304 on the inner cavity defined by the outer ring 302. The inner cavity defined by the inner surface 304 is configured to fit snugly with a purge module, port, or filter adapter. The attachment feature 306 can be formed on or within the inner cavity defined by the inner surface 304. The attachment feature 306 can include one or more protrusions from the inner surface 304 or depressions within the inner surface 304. In one embodiment, the attachment feature 306 is an annular groove formed within the inner surface 304. In one embodiment, the attachment feature 306 is an annular protrusion formed on the inner surface 304. The attachment feature 306 can be configured to interface with one or more features formed on a purge module, port, or filter adapter with which the filter holder 300 is used together. The attachment feature 306 can enable the filter holder 300 to be joined to a corresponding purge module, port, or filter adapter by a mechanical connection such as a snap fit. In one embodiment, the snap fit is a snap fit between the annular attachment feature 306 and a corresponding annular feature on a corresponding purge module, port, or filter adapter. Other examples of attachment features can include a long screw or a grooved screw, multiple snap fit features, one or more interference fit surfaces, or a detent, etc.

[0080] The opening 308 is defined by the outer ring 302. In one embodiment, the opening 308 is surrounded by a filter contact surface 318 described below. The opening 308 is configured such that fluid passing through the filter can further pass through the filter holder 300. The opening 308 may include a number of open regions separated by the retaining element 310. The retaining element 310 may extend into or across the opening 308. The retaining element 310 can prevent the filter from escaping and reduce or prevent warping of the filter when the filter is held by the filter holder 300 and pressure is applied to the filter, for example, by fluid passing through the filter. In one embodiment, the retaining element 310 may include one or more bars extending across the opening 308. In one embodiment, the retaining element 310 may include a number of elements that intersect each other, for example, intersect at the center, to form a grid or the like across the opening 308. In one embodiment, the retaining element 310 includes a central ring 314 connected to the outer ring 302 by a plurality of spokes 312.

[0081] The standoff 316 may project from the retaining element 310 at one or more predetermined positions on the retaining element 310. The standoff 316 provides a contact surface configured to contact the filter that is smaller than the surface of the retaining element 310 that would otherwise potentially contact the filter. The number, position, surface area, and height of the standoffs 316 may be based on the support requirements and mechanical properties of the filter for which the filter holder 300 is used to hold. For example, the stiffness of the filter medium and / or the pressure on the filter can affect the number of standoffs 316, their positioning, and / or the area of the standoffs 316 required to reduce filter buckling or warping beyond an acceptable degree. In one embodiment, the standoff is provided at one or more joints between the spokes 312 and the central ring 314. In one embodiment, one or more of the standoffs 316 may be continuous over a length defined from a first point on the outer ring 302 to a second point on the outer ring 302, such as the filter retaining beam 914 described below and shown in FIG. 9.

[0082] The filter contact surface 318 is the surface of the filter holder 300 between the inner surface 304 and the opening 308. The filter contact surface 318 may include some or all of that area between the inner surface 304 and the opening 308. The filter contact surface 318 faces towards the filter when the filter holder 300 is installed on the corresponding purge module, port, or filter adapter. In one embodiment, the filter contact surface 318 contacts the filter such that the filter is compressed when the filter holder 300 is installed. In one embodiment, the filter is attached to the filter contact surface 318 by welding or an adhesive. In one embodiment, the compression of the filter by the filter contact surface 318 and the surface of the purge module, port, or filter adapter is the only force holding the filter in place. In one embodiment, the filter contact surface 318 is a flat surface. In one embodiment, the filter contact surface includes textures such as protrusions, grooves, surface roughness, or combinations thereof for engaging the filter. In one embodiment, at least a portion of the standoff 316 may be continuous with the filter contact surface 318, such as the filter holding beam 914 described below and shown in FIG. 9.

[0083] FIG. 4A shows a cross-sectional view of a filter and filter holder according to one embodiment. The filter 400 is held by clamping between a filter holder 402 and a filter adapter 404. The filter holder 402 includes an outer ring 406, and snap-fit recesses 408 are formed in an inner surface 410 provided on the outer ring 406. The filter adapter 404 includes snap-fit protrusions 412.

[0084] The filter 400 is a filter held between a filter adapter 404 and a filter holder 402. In one embodiment, the filter 400 is one or more sheets of filter media. In one embodiment, the filter 400 includes a coating or container on or surrounding the filter media. In one embodiment, the container for the filter media of the filter 400 is a sheet of permeable material joined to each other, for example, using ultrasonic welding.

[0085] The filter holder 402 is configured to hold the filter 400 in a fixed position. The filter holder 402 can be, for example, the filter holder 300 discussed above and shown in FIG. 3. The filter holder 402 can be configured such that the filter 400 is clamped between the filter contact surface 414 of the filter holder 402 and the filter contact surface 416 of the corresponding filter adapter 404. In one embodiment, the filter contact surfaces 414, 416 can be flat surfaces. In one embodiment, the filter contact surfaces 414, 416 can be in the plane of the filter 400. In one embodiment, the filter contact surfaces 414, 416 can be angled with respect to the plane of the filter 400. In one embodiment, one or both of the filter contact surfaces 414, 416 can include surface features such as irregularities, ridges, grooves, textures, protrusions, or recesses. In one embodiment, the clamping between the filter contact surfaces 414, 416 can be the only holding of the filter 400. The outer ring 406 defines the perimeter of the filter holder 402. The outer ring 406 can have any suitable shape so as to correspond to the shape of the filter adapter 404. The outer ring 406 includes an inner surface 410 facing towards the center of the filter holder 402. A snap-fit recess 408 is formed in the inner surface 410. The snap-fit recess 408 is configured to receive a snap-fit protrusion 412. In one embodiment, a plurality of snap-fit recesses 408 are provided in the inner surface 410 corresponding to a plurality of snap-fit protrusions 412 on the filter adapter 404. In one embodiment, the snap-fit recess 408 is an annular recess formed in the inner surface 410.

[0086] The filter adapter 404 is configured to enable attachment of a filter retainer 402 such that a filter 400 can be held therebetween. In one embodiment, the filter adapter 404 is a filter housing such as the filter housing 204 shown in FIG. 2 and discussed above. In one embodiment, the filter adapter 404 is provided as a filter adapter for a canister such as the canister 600 described below and shown in FIG. 6. In one embodiment, the filter adapter 404 is a port included in a housing, such as the port 702 provided in the housing 700 shown in FIG. 7 and described below. In one embodiment, the filter adapter 404 is included in a container such as the container 800 shown in FIG. 8 and described below. The filter adapter 404 includes snap-fit protrusions near an end having a filter contact surface 416. The snap-fit protrusions 412 are protrusions formed on the outer surface of the filter adapter 404. The snap-fit protrusions 412 may include one or more protrusions. In one embodiment, the snap-fit protrusions 412 are annular protrusions. In one embodiment, the snap-fit protrusions 412 may include a surface inclined toward the end of the filter adapter 404 and a sharp corner on the side of the filter adapter 404 away from that end. The inclined surface may smooth the interface with the inner surface 410 of the filter retainer 402. The sharp corner may provide an interface by which the snap fit between the snap-fit protrusions 412 and the snap-fit recesses 408 can be fixed. The snap-fit protrusions 412 and the snap-fit recesses 408 are sized and positioned to form a snap-fit attachment of the filter retainer 402 and the filter adapter 404, respectively. In one embodiment, the snap fit formed by the snap-fit protrusions 412 and the snap-fit recesses 408 can be positioned opposite each other with the filter contact surfaces 414, 416 separated by a gap smaller than the uncompressed thickness of the filter 400, such that the filter 400 is compressed when tightened by the filter contact surfaces 414 and 416.

[0087] Figure 4B shows a cross-sectional view of a filter and a filter holder according to an embodiment. The filter 400 is held by clamping between a filter holder 420 and a filter adapter 422. The filter holder 420 includes an outer ring 406, and an inner surface 410 is provided on the outer ring 406. The inner surface 410 is a vertical surface, and a horizontal surface 424 is provided at the bottom of the outer ring 406. The filter adapter 422 includes a vertical surface 426 and a horizontal surface 428 surrounding the vertical surface 426. The filter holder 420 and the filter adapter 422 can be joined by laser welding formed between the inner surface 410 and the vertical surface 426 and / or between the horizontal surfaces 424, 426.

[0088] Figure 4C shows a cross-sectional view of a filter and a filter holder according to an embodiment. The filter 400 is held by clamping between a filter holder 430 and a filter adapter 432. The filter holder 430 includes an outer ring 406, and ultrasonic welding features 434 are formed on the inner surface 410 provided on the outer ring 406. The filter adapter 432 includes ultrasonic welding features 436. The ultrasonic welding features 434, 436 can interface with each other when the filter holder 430 and the filter adapter 432 are arranged together, and when ultrasonic energy is applied, welding can be formed to join the filter holder 430 to the filter holder 432.

[0089] Figure 4D shows a cross-sectional view of a filter and a filter holder according to an embodiment. The filter 400 is held by clamping between a filter holder 440 and a filter adapter 442. The filter holder 440 includes an outer ring 406 having an inner surface 410 provided on the outer ring 406. The filter adapter 442 includes a press-fit surface 444. The inner surface 410 and the press-fit surface 444 are sized such that the filter holder 440 can be attached to the filter adapter 442 by press-fitting and friction between the inner surface 410 and the press-fit surface 444.

[0090] Figure 4E shows a cross-sectional view of a filter and a filter holder according to an embodiment. The filter 400 is held by clamping between a filter holder 450 and a filter adapter 452. The filter holder 450 includes an outer ring 454 having an outer surface 456 that forms around the outer ring 454. The filter adapter 404 includes a recess 458 that defines an inner surface 460 around the recess 458. The outer surface 456 of the filter holder 450 and the inner surface 460 are sized such that the filter holder 450 can be attached to the filter adapter 452 by press-fitting and friction between the outer surface 456 and the inner surface 460.

[0091] Figure 5 shows another cross-sectional view of a filter and a filter holder according to an embodiment. The filter 500 is held by a filter holder 502. The filter holder 502 includes an outer ring 504 that defines an opening 506. A retaining element 508 extends into or across the opening 506. In the embodiment shown in Figure 5, the retaining element 508 includes spokes 510 and a central ring 512. The filter holder 502 is provided with a standoff 514 on the side facing the filter 500.

[0092] The filter 500 is a filter that is at least partially held by the filter holder 502. In one embodiment, the filter 500 is one or more sheets of filter media. In one embodiment, the filter 500 includes a coating or a container on or surrounding the filter media. In one embodiment, the container for the filter media of the filter 500 is a sheet of permeable material joined to each other, for example, using ultrasonic welding.

[0093] The filter holder 502 is configured to hold a filter 500 in a filter adapter such as the filter adapter 404 discussed above and shown in FIG. 4. The filter holder 502 can be, for example, the filter holder 302 discussed above and shown in FIG. 3. The filter holder 502 includes an outer ring 504. The filter holder 502 is shown as having a cylindrical shape with an outer ring 504 having a circular outer shape, while it is understood that the filter holder 502 can have any suitable shape corresponding to the filter adapter with which the filter holder 502 is to be used together. The outer ring 504 of the filter holder 502 defines an opening 506. The opening 506 allows fluid to pass into or out of the filter 500. A retaining element 508 extends into or across the opening 506. The retaining element 508 can support the filter 500, for example, to prevent pressure from blowing the filter 500 out of the filter holder 502 and its corresponding filter adapter. In one embodiment, the retaining element 508 extends across the opening 506. In one embodiment, the retaining element 508 forms a grid across the opening 506. The retaining elements can form a radial pattern, such as a plurality of retaining elements 508 that intersect at the center of the opening 506, or a plurality of spokes 510 that each join a central ring 512 as shown in FIG. 5.

[0094] The retaining element 508 has a standoff 514 provided on the side of the retaining element 508 facing the filter 500. In one embodiment, the standoff 514 is integrally formed with the retaining element 508. In one embodiment, the standoff 514 is the only point within the perimeter of the opening 506 where the filter holder 502 contacts the filter 500. The standoff 514 can be sized such that the surface area of the standoff 514 contacting the filter 500 is less than the surface area of the retaining element 508. Thus, the standoff can increase the unobstructed surface area of the filter 500 when the filter 500 is held by the filter holder 502. The increase in the unobstructed surface area can reduce the pressure drop across the filter 500. In one embodiment, the reduction in the pressure drop across the filter 500 can be up to 20% compared to a filter 500 held by contacting the entire corresponding surface of a retaining element without such a standoff. The standoff 514 can be sized and positioned based on the support requirements and mechanical properties of the filter 500 for which the filter holder 502 is used to hold. For example, the rigidity of the filter media and / or the pressure on the filter 500 can affect the number of standoffs 514, their positioning, and / or the area of the standoffs 514 required to reduce filter flexure or warping beyond an acceptable degree. In the embodiment shown in FIG. 5, the standoff 514 is provided at one or more junctions between the spokes 510 and the central ring 512.

[0095] FIG. 6 shows a perspective view of a canister according to an embodiment. The canister 600 includes an elastic canister body 602, a filter adapter 604, a filter 606, and a filter holder 608. The canister 600 is configured to contain a substance. In one embodiment, the substance can be a gas to be released. In one embodiment, the substance can be a solid or a liquid configured to generate a gas to be released. In one embodiment, the substance can be configured or selected to interact with a fluid passing through the filter 606, such as a desiccant or a reagent, etc. The canister 600 can be configured to be inserted inside another container or to be held at a specific position within a device, such as a desiccant container for use in a wafer container such as a FOUP, etc.

[0096] The container body 602 is an elastic body configured to define an internal space. The container body 602 can have a lumen configured to accommodate a part of the filter adapter 604, such as the lumen 216 described above and shown in FIG. 2.

[0097] The filter adapter 604 is configured to enable attachment of the filter 606 to the container body 602. The filter adapter 604 can include a portion configured to be inserted into the container body 602 within the lumen. The filter adapter 604 and / or the container body 602 can include features configured to hold both the container body 602 and the filter adapter 604 together, such as an annular protrusion and optionally a recess, etc., sized to form a press fit between the filter adapter 604 within the lumen. The filter adapter 604 can include an end having attachment features configured to enable attachment of the filter holder 608. The end and the attachment features can follow the structure of the filter housing attachment features 242 described above and shown in FIG. 2, for example.

[0098] Filter 606 includes a filter medium and optionally a coating or covering. Filter 606 can be any filter suitable for use in filtering fluid passing into or out of container 600. Filter 606 can be held in place by being clamped between port 604 and filter holder 608. In one embodiment, filter 606 is held only by the clamping between port 604 and filter holder 608. In one embodiment, filter 606 can be held, for example, by the use of an adhesive, welding, or any other such holding method.

[0099] Filter holder 608 can be joined to the end of filter adapter 604 so as to grip filter 606 in place on the end of filter adapter 604. In one embodiment, filter holder 608 includes features configured to engage mounting features provided at the end of filter adapter 604, such as one or more protrusions or recesses configured to form a snap fit or other such engagement with corresponding mounting features at the end of filter adapter 604. In one embodiment, the features on filter holder 608 are an annular protrusion or recess configured to form an annular snap fit with the end of filter adapter 604. Filter holder 608 can include a filter holding element, such as filter holding element 234 described above and shown in FIG. 2. In one embodiment, the filter holding element can include a standoff, such as standoff 236 described above and shown in FIG. 2.

[0100] Figure 7 shows a perspective view of a housing according to an embodiment. The housing 700 includes a port 702, a filter 704, and a filter holder 706. The housing 700 may define an internal space. The housing 700 may be, for example, a wafer container such as a FOUP. The housing 700 may include one or more ports 702 configured to supply fluid to the internal space, such as an additional purge port provided in the housing 700. The one or more ports 702 may each project into the internal space. Each of the one or more ports 702 may include an end portion having attachment features configured to enable attachment of the filter holder 706. The end portion and the attachment features may follow, for example, the structure of the filter housing attachment features 242 described above and shown in FIG. 2.

[0101] The filter 704 includes a filter medium and optionally a coating or covering. The filter 704 can be any filter suitable for use in filtering fluid passing through the port 702 into the housing 700. The filter 704 can be held in place by being clamped between the port 702 and the filter holder 706. In one embodiment, the filter 704 is held only by clamping between the port 702 and the filter holder 706. In one embodiment, the filter 704 can be held, for example, by the use of an adhesive, welding, or any other such method of retention.

[0102] The filter holder 706 can be joined to the port 702 so as to grip the filter 704 in a fixed position above the port 702. In one embodiment, the filter holder 706 is configured to engage with attachment features provided on the port 702, for example, including one or more protrusions or recesses configured to form a snap fit or other such engagement with corresponding attachment features of the port 702. In one embodiment, the features on the filter holder 706 are annular protrusions or recesses configured to form an annular snap fit with the port 702. The filter holder 706 can include a filter holding element, such as the filter holding element 234 described above and shown in FIG. 2. In one embodiment, the filter holding element can include standoffs, such as the standoff 236 described above and shown in FIG. 2.

[0103] FIG. 8 shows a container according to one embodiment. The container 800 includes a container body 802, a filter adapter 804, a filter 806, and a filter holder 808. The container 800 can be a rigid container configured to store a substance. In one embodiment, the substance can be a gas to be released. In one embodiment, the substance can be a solid or a liquid configured to generate a gas to be released. In one embodiment, the substance can be configured or selected to interact with a fluid passing through the filter 806 and can be, for example, a desiccant or a reagent.

[0104] The container body 802 is a rigid body that defines an internal space configured to contain a substance. The container body is further configured to be closed by the attachment of the filter adapter 804. The filter adapter 804 can be, for example, a lid for the container 800 configured to be joined to the container body 802 to close the internal space. The filter adapter 804 can include a protrusion having an end, and this end has attachment features configured to enable the attachment of the filter holder 808. The end and the attachment features can follow the structure of the filter housing attachment features 242 described above and shown in FIG. 2, for example.

[0105] Filter 806 includes a filter medium and optionally a coating or covering. Filter 806 can be any filter suitable for use in filtering fluid passing into or out of container 800. Filter 806 can be held in place by being clamped between port 804 and filter holder 808. In one embodiment, filter 806 is held only by the clamping between port 804 and filter holder 808. In one embodiment, filter 806 can be held, for example, by the use of an adhesive, welding, or any other such holding method.

[0106] Filter holder 808 can be joined to the protrusion formed on filter adapter 804 so as to grip filter 806 in place on the protrusion from filter adapter 804. In one embodiment, filter holder 808 is configured to engage with attachment features provided on the protrusion from filter adapter 804, for example, one or more protrusions or recesses configured to form a snap fit or other such engagement with corresponding attachment features of the protrusion from filter adapter 804. In one embodiment, the feature on filter holder 808 is an annular protrusion or recess configured to form an annular snap fit with the protrusion from filter adapter 804. Filter holder 808 can include a filter holding element, such as filter holding element 234 described above and shown in FIG. 2. In one embodiment, the filter holding element can include a standoff, such as standoff 236 described above and shown in FIG. 2.

[0107] FIG. 9 shows a filter holder according to one embodiment. Filter holder 900 includes an outer ring 902 having an inner surface 904 and attachment features 906. Outer ring 902 defines an opening 908. A holding element 910 can be provided within opening 908. Holding element 910 can define a passage 912. A filter holding beam 914 can be included in holding element 910. A filter contact surface 916 can also be provided on filter holder 900.

[0108] The filter holder 900 is configured to be attached to a structure such as a purge module, a port, or a filter adapter, for example, a filter housing 204 for holding a filter such as the filter 208, as described above and shown in FIG. 2. The filter holder 900 can be used, for example, in place of the filter holder 608 shown and described above in FIG. 6 or in place of the filter holder 808 shown and described above in FIG. 8. The filter holder 900 can be a single piece in an exemplary embodiment. The filter holder 900 can be made of a rigid plastic material such as polycarbonate, high density polyethylene or ultra-high molecular weight polyethylene (HDPE or UHMWPE), or any other such suitable rigid polymer material.

[0109] The outer ring 902 defines the perimeter of the filter holder 900. In FIG. 3, the outer ring 902 is shown with a circular outer shape, while the filter holder 900 is configured to be used together with a purge module, a port, or a filter adapter that is configured to accommodate a corresponding change in shape, such as an ellipse, a square, a rectangle, or other such outer shape. It is understood that the filter holder 900 can be shaped to correspond to the purge module, the port, or the filter adapter.

[0110] The inner surface 904 is provided on the inner cavity defined by the outer ring 902. The inner cavity defined by the inner surface 904 is configured to fit snugly into a purge module, port, or filter adapter. The attachment feature 906 may be formed on or within the inner cavity defined by the inner surface 904. The attachment feature 906 may include one or more protrusions from the inner surface 904 or depressions within the inner surface 904. In one embodiment, the attachment feature 906 is an annular groove formed within the inner surface 904. In one embodiment, the attachment feature 906 is an annular protrusion formed on the inner surface 904. The attachment feature 906 may be configured to interface with one or more features formed on a purge module, port, or filter adapter with which the filter holder 900 is used together. The attachment feature 906 may enable the filter holder 900 to be joined to a corresponding purge module, port, or filter adapter by a mechanical connection such as a snap fit. In one embodiment, the snap fit is a snap fit between the annular attachment feature 906 and a corresponding annular feature on a corresponding purge module, port, or filter adapter. Other examples of attachment features may include machine screws or tapped holes, multiple snap fit features, one or more interference fit surfaces, or detents, etc.

[0111] The opening 908 is defined by the outer ring 902. In one embodiment, the opening 908 is surrounded by a filter contact surface 916 described below. The opening 908 is configured such that fluid passing through the filter can further pass through the filter holder 900. A number of passages 912 may be defined within the opening 908 by a retaining element 910. The passages 912 may enable purge gas passing through the filter held by the filter holder 900 to exit the purge module after passing through the filter held by the filter holder 900.

[0112] The retaining element 910 may extend across the opening 908. The retaining element 910 can prevent the filter from escaping and reduce or prevent warping of the filter when the filter is held by the filter holder 900 and pressure is applied to the filter, for example, by the fluid passing through the filter. In the embodiment shown in FIG. 9, the retaining element includes the spokes that each define a rectangular passage 912, and these spokes intersect where another passage 912 is defined at the center of the opening 908.

[0113] The filter retaining beam 914 is included in the retaining element 910. In the embodiment shown in FIG. 9, the filter retaining beam extends along the outer periphery of the spokes of the retaining element 910. The filter retaining beam 914 may extend continuously over the distance from the first point of the outer ring 902 to the second point of the outer ring 902. The filter retaining beam 914 can be used as a standoff for the filter, for example, instead of or in addition to the standoffs 236, 316, and / or 514 described above and shown in FIGS. 2, 3, and 5. The filter retaining beam 914 provides a contact surface configured to contact the filter that is smaller than the surface of the retaining element 310 that might otherwise contact the filter. The stress resulting from the contact between the filter and the filter retaining beam 914 can be distributed over the length of the filter retaining beam 914.

[0114] The filter contact surface 916 is the surface of the filter holder 900 between the inner surface 904 and the opening 908. The filter contact surface 916 can include some or all of that area between the inner surface 904 and the opening 908. The filter contact surface 916 faces towards the filter when the filter holder 900 is installed on the corresponding purge module, port, or filter adapter. In one embodiment, the filter contact surface 916 contacts the filter such that the filter is compressed when the filter holder 900 is installed. In one embodiment, the filter is attached to the filter contact surface 916 by welding or an adhesive. In one embodiment, the compression of the filter by the filter contact surface 916 and the surface of the purge module, port, or filter adapter is the only force holding the filter in place. In one embodiment, the filter contact surface 916 is a flat surface. In one embodiment, the filter contact surface includes a texture such as protrusions, grooves, surface roughness, or combinations thereof for engaging the filter. In one embodiment, the filter retaining beams 914 are connected to the filter contact surface such that contact with the filter is continuous along the entire length of each of the filter retaining beams from the filter contact surface.

[0115] Aspect

[0116] It is understood that any one of Aspects 1 to 10 can be combined with any one of Aspects 11 to 19, 20 to 24, 25 to 33, 34 to 47, 48, 49 to 53, 54 to 61, or 62 to 69. It is understood that any one of Aspects 11 to 19 can be combined with any one of Aspects 20 to 24, 25 to 33, 34 to 47, 48, 49 to 53, 54 to 61, or 62 to 69. It is understood that any one of Aspects 20 to 24 can be combined with any one of Aspects 25 to 33, 34 to 47, 48, 49 to 53, 54 to 61, or 62 to 69. It is understood that any one of Aspects 25 to 33 can be combined with any one of 34 to 47, 48, 49 to 53, 54 to 61, or 62 to 69. It is understood that any one of Aspects 34 to 47 can be combined with any one of Aspects 48, 49 to 53, 54 to 61, or 62 to 69. It is understood that Aspect 48 can be combined with any one of Aspects 49 to 53, 54 to 61, or 62 to 69. It is understood that any one of Aspects 49 to 53 can be combined with any one of Aspects 54 to 61, or 62 to 69. It is understood that any one of Aspects 54 to 61 can be combined with any one of Aspects 62 to 69.

[0117] Aspect 1. A gas exchange module for a substrate container, a filter housing, an interface body having a lumen configured to receive the filter housing, a filter disposed at an end of the filter housing, and a filter holder joined to the filter housing comprising the gas exchange module.

[0118] Aspect 2. The gas exchange module according to Aspect 1, wherein the filter housing further includes a valve.

[0119] Aspect 3. The gas exchange module according to Aspect 2, wherein the valve is a check valve.

[0120] Aspect 4. A gas exchange module according to any one of Aspects 1 to 3, wherein the valve interface body includes one or more retention features disposed on an outer surface of the interface body.

[0121] Aspect 5. A gas exchange module according to any one of Aspects 1 to 4, wherein the filter holder is joined to the filter housing by a snap fit formed between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing.

[0122] Aspect 6. A gas exchange module according to any one of Aspects 1 to 4, wherein the filter holder is joined to the filter housing by welding.

[0123] Aspect 7. A gas exchange module according to any one of Aspects 1 to 4, wherein the filter holder is joined to the filter housing by press fitting.

[0124] Aspect 8. A gas exchange module according to Aspects 5 to 7, wherein the filter is held only by compression between a first holding surface provided on the filter holder and a second holding surface provided on the filter housing.

[0125] Aspect 9. A gas exchange module according to any one of Aspects 1 to 8, wherein the filter holder includes a retention element provided in an opening defined by the filter holder, the retention element includes a plurality of pairs of spokes, each of the plurality of pairs of spokes extends toward a center, the center defines a passage, each of the plurality of spokes includes a filter holding beam configured to contact the filter, and the total surface area of the filter holding beams is smaller than the total surface area of the retention element.

[0126] Aspect 10. A gas exchange module according to any one of Aspects 1 to 9, wherein the interface body includes an elastic material.

[0127] Aspect 11. A substrate container, A substrate container body that defines an internal space, the substrate container including: the substrate container body that includes a gas exchange port, and a gas exchange module disposed at the gas exchange port, the gas exchange module including: a filter housing, an interface body having a lumen configured to receive the filter housing, a filter disposed at an end of the filter housing, a filter holder joined to the filter housing, and the gas exchange module further including ; the substrate container comprising: the interface body being configured to form a seal around the gas exchange port when the gas exchange module is disposed at the gas exchange port.

[0128] Aspect 12. The substrate container according to Aspect 11, wherein the interface body includes one or more retaining features disposed on an outer surface of the interface body, and the gas exchange port includes one or more openings configured to receive the one or more retaining features disposed on the outer surface of the interface body.

[0129] Aspect 13. The substrate container according to Aspect 11 or 12, wherein the filter housing includes a valve.

[0130] Aspect 14. The substrate container according to any one of Aspects 11 to 13, wherein the filter holder is joined to the filter housing by a snap fit formed between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing.

[0131] Aspect 15. The substrate container according to any one of Aspects 11 to 13, wherein the filter holder is joined to the filter housing by welding.

[0132] Aspect 16. A substrate container according to any one of Aspects 11 to 13, wherein the filter holder is joined to the filter housing by press fitting.

[0133] Aspect 17. A substrate container according to any one of Aspects 14 to 16, wherein the filter is held only by compression between a first holding surface provided on the filter holder and a second holding surface provided on the filter housing.

[0134] Aspect 18. A substrate container according to any one of Aspects 11 to 17, wherein the filter holder includes a holding element provided in an opening defined by the filter holder, the holding element includes a plurality of pairs of spokes, each of the plurality of pairs of spokes extends toward the center, the center defines a passage, each of the plurality of spokes includes a filter holding beam configured to contact the filter, and the total surface area of the filter holding beams is smaller than the total surface area of the holding element.

[0135] Aspect 19. A substrate container according to any one of Aspects 11 to 18, wherein the interface body includes an elastic material.

[0136] Aspect 20. A method for effecting gas exchange within a substrate container, assembling a gas exchange module by inserting a filter housing into the lumen of an interface body, positioning a filter between the filter housing and a filter holder, and attaching the filter holder to the filter housing; inserting the gas exchange module into a gas exchange port of the substrate container; and including.

[0137] Aspect 21. A method according to Aspect 20, wherein attaching the filter holder to the filter housing includes forming a snap fit between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing.

[0138] Aspect 22. A method according to Aspect 21, wherein the filter is held only by compression between a first holding surface provided on the filter holder and a second holding surface provided on the filter housing.

[0139] Aspect 23. A method according to any one of Aspects 20 to 22, wherein inserting the gas exchange module into the gas exchange port of the substrate container includes forming an interface between an opening provided in the gas exchange port and one or more holding features provided on the outer surface of the interface body.

[0140] Aspect 24. A method according to any one of Aspects 20 to 23, further including guiding a gas flow through the interface body, passing the gas flow through a valve provided in the filter housing, and passing the gas flow through the filter.

[0141] Aspect 25. A filter holder, a filter holding body defining an opening, the filter holding body having one or more holding elements extending into the opening in a direction transverse to the opening comprising, at least one of the one or more holding elements includes one or more standoffs, each of the one or more standoffs protruding from a side of the one or more holding elements configured to face a filter to be fixed by the filter holder, the surface area of the contact surface of the one or more standoffs being smaller than the surface area of the one or more holding elements, the filter holder.

[0142] Aspect 26. A filter holder according to Aspect 25, wherein the opening is circular in shape.

[0143] Aspect 27. A filter holder according to Aspect 25 or 26, wherein the one or more holding elements include a central body and a plurality of spokes.

[0144] Aspect 28. The filter holder according to Aspect 27, wherein one or more standoffs are disposed at the junction between the central body and the plurality of spokes.

[0145] Aspect 29. The filter holder according to any one of Aspects 25 to 28, wherein one or more retaining elements include a plurality of spokes configured to intersect at the center of the opening.

[0146] Aspect 30. The filter holder according to any one of Aspects 25 to 29, wherein one or more retaining elements form a grid across the opening.

[0147] Aspect 31. The filter holder according to Aspect 25 or 26, wherein one or more retaining elements include a plurality of pairs of spokes, each of the plurality of pairs of spokes extending toward the center, and the center defining a passage.

[0148] Aspect 32. The filter holder according to Aspect 31, wherein one or more standoffs are filter holding beams provided on the spokes of the plurality of pairs of spokes.

[0149] Aspect 33. The filter holder according to any one of Aspects 25 to 32, wherein the filter holding body includes a mounting portion including a snap - fit feature.

[0150] Aspect 34. A filter assembly, a filter, a filter holder including a filter holding body defining an opening, the filter holding body having one or more retaining elements extending into the opening in a direction transverse to the opening, comprising, wherein at least one of the one or more retaining elements includes one or more standoffs, each of the one or more standoffs protruding from a side of the one or more retaining elements configured to face the filter, the surface area of the contact surface of the one or more standoffs being smaller than the surface area of the one or more retaining elements, A filter that contacts a filter holder at a standoff. Filter assembly.

[0151] Aspect 35. The opening has a circular shape. A filter assembly according to Aspect 34.

[0152] Aspect 36. A filter assembly according to Aspect 34 or 35, wherein one or more holding elements include a central body and a plurality of spokes.

[0153] Aspect 37. A filter assembly according to Aspect 36, wherein one or more standoffs are disposed at the junction between the central body and the plurality of spokes.

[0154] Aspect 38. A filter assembly according to Aspect 36 or 37, wherein the central body is a ring.

[0155] Aspect 39. A filter assembly according to any one of Aspects 34 to 38, wherein one or more holding elements include a plurality of spokes configured to intersect at the center of the opening.

[0156] Aspect 40. A filter assembly according to any one of Aspects 34 to 39, wherein one or more holding elements form a grid across the opening.

[0157] Aspect 41. A filter assembly according to Aspect 34 or 35, wherein one or more holding elements include a plurality of pairs of spokes, each of the plurality of pairs of spokes extending toward the center, and the center defining a passage.

[0158] Aspect 42. A filter holder according to Aspect 41, wherein one or more standoffs are filter holding beams provided on the spokes of the plurality of pairs of spokes.

[0159] Aspect 43. A filter assembly according to any one of Aspects 34 to 42, wherein the filter holding body includes a mounting portion including a snap fit feature.

[0160] Aspect 44. A filter assembly according to any one of Aspects 34 to 42, further comprising a canister, wherein the filter holding portion is joined to the canister.

[0161] Aspect 45. A filter assembly according to any one of Aspects 34 to 42, further comprising a purge port, wherein the filter holding portion is joined to the purge port.

[0162] Aspect 46. A filter assembly according to any one of Aspects 34 to 42, further comprising a gas exchange module, wherein the filter holding portion is joined to the gas exchange module.

[0163] Aspect 47. A filter assembly according to any one of Aspects 34 to 42, further comprising a housing having a port, wherein the filter holding portion is joined to the port.

[0164] Aspect 48. A method of holding a filter, comprising fixing the filter using a filter holder, wherein the filter holder includes a filter holding body defining an opening, and the filter holding body has one or more holding elements extending into the opening in a direction transverse to the opening. Including, At least one of the one or more holding elements includes one or more standoffs, each of the one or more standoffs protruding from a side of the holding element configured to face the filter to be fixed by the filter holder. The surface area of the contact surface of the one or more holding elements is smaller than the surface area of the one or more holding elements. The filter contacts the filter holder at the standoff. Method.

[0165] Aspect 49. A filter holder, A filter retainer body defining an opening, the filter retainer body having a contact surface surrounding the opening, a filter contact surface, and snap-fit retaining features provided on one or more inner surfaces of one or more walls, the one or more walls surrounding the filter contact surface, Filter retainer.

[0166] Aspect 50. The filter retainer according to aspect 49, wherein the snap-fit retaining feature is an annular protrusion.

[0167] Aspect 51. The filter retainer according to aspect 49, wherein the snap-fit retaining feature includes a plurality of protrusions.

[0168] Aspect 52. The filter retainer according to aspect 49, wherein the snap-fit retaining feature is an annular groove.

[0169] Aspect 53. The filter retainer according to aspect 49, wherein the snap-fit retaining feature includes a plurality of recesses formed in one or more inner surfaces.

[0170] Aspect 54. A filter assembly, a port body including a port filter contact surface and port snap-fit features, a filter, a filter retainer including a filter retainer body defining an opening, the filter retainer body having a contact surface surrounding the opening, a retainer filter contact surface, and retainer snap-fit features provided on one or more inner surfaces of one or more walls, the one or more walls surrounding the filter contact surface, the filter retainer comprising, a portion of the filter being compressed between the port filter contact surface and the retainer filter contact surface, the port snap-fit features being configured to form a snap-fit with the retainer snap-fit features. Filter assembly.

[0171] Aspect 55. The filter assembly according to Aspect 54, wherein the filter is held only by compression between the port filter contact surface and the retainer filter contact surface.

[0172] Aspect 56. The filter assembly according to Aspect 54 or 55, wherein the port body is included in a canister, and the canister has a canister body including an elastic material.

[0173] Aspect 57. The filter assembly according to Aspect 54 or 55, wherein the port body is included in a purge port.

[0174] Aspect 58. The filter assembly according to Aspect 54 or 55, wherein the port body is included in a housing.

[0175] Aspect 59. The filter assembly according to Aspect 54 or 55, wherein the port body is included in a gas exchange module.

[0176] Aspect 60. The filter retainer includes one or more retaining elements extending across an opening of the filter retainer, at least one of the one or more retaining elements includes one or more standoffs, each of the one or more standoffs protruding from a side of the one or more retaining elements configured to face the filter, the surface area of the contact surface of the one or more standoffs is smaller than the surface area of the one or more retaining elements, the filter contacts the filter retainer at the standoff. The filter assembly according to any one of Aspects 54 to 59.

[0177] Aspect 61. The filter holder includes a retaining element provided in an opening defined by the filter holder, the retaining element includes a plurality of pairs of spokes, each of the plurality of pairs of spokes extends toward a center, the center defines a passage, each of the plurality of spokes includes a filter retaining beam configured to contact the filter, and the total surface area of the filter retaining beams is smaller than the total surface area of the retaining element. A filter assembly according to any one of Aspects 54 to 59.

[0178] Aspect 62. A method of assembling a filter assembly, comprising: placing a filter between a port body and a filter holder; and snapping the filter holder onto the port body such that one or more port body snap-fit features provided on the port body engage one or more holder snap-fit features provided on the filter holder. A method comprising the above.

[0179] Aspect 63. A method according to Aspect 62, wherein the filter is compressed between a port filter contact surface and a holder filter contact surface.

[0180] Aspect 64. A method according to Aspect 63, further comprising holding the position of the filter solely by compression of the filter between the port filter contact surface and the holder filter contact surface.

[0181] Aspect 65. A method according to any one of Aspects 62 to 64, further comprising contacting the filter at a standoff provided on one or more retaining elements extending into an opening of the filter holder, wherein the contact area of the standoff is smaller than the surface area of the one or more retaining elements.

[0182] Aspect 66. A method according to any one of Aspects 62 to 65, wherein the port body is included in a canister.

[0183] Aspect 67. A method according to any one of Aspects 62 to 65, wherein the port body is included in a purge port.

[0184] Aspect 68. A method according to any one of Aspects 62 to 65, wherein the port body is included in the housing.

[0185] Aspect 69. A method according to any one of Aspects 62 to 65, wherein the port body is included in the gas exchange module.

[0186] The examples disclosed in this application should be regarded as illustrative rather than restrictive in every respect. The scope of the present invention is shown not by the foregoing description but by the appended claims, and all modifications that occur within the meaning and equivalent scope of the claims are intended to be included within the scope of the present invention.

Claims

1. A gas exchange module for a substrate container, comprising: a filter housing; an interface body having a lumen configured to receive the filter housing; a filter disposed at an end of the filter housing; and a filter holder joined to the filter housing. The gas exchange module.

2. The gas exchange module according to claim 1, wherein the filter housing further includes a valve.

3. The gas exchange module according to claim 2, wherein the valve is a check valve.

4. The gas exchange module according to claim 1, wherein the valve interface body includes one or more retaining features disposed on an outer surface of the interface body.

5. The gas exchange module according to claim 1, wherein the filter holder is joined to the filter housing by a snap fit formed between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing.

6. The gas exchange module according to claim 5, wherein the filter is held only by compression between a first holding surface provided on the filter holder and a second holding surface provided on the filter housing.

7. The gas exchange module according to claim 1, wherein the filter holder includes a retaining element provided in an opening defined by the filter holder, the retaining element includes a plurality of pairs of spokes, each of the plurality of pairs of spokes extends toward a center, the center defines a passage, each of the plurality of spokes includes a filter holding beam configured to contact the filter, and a total surface area of the filter holding beam is smaller than a total surface area of the retaining element.

8. The gas exchange module according to claim 1, wherein the interface body includes an elastic material.

9. A substrate container, comprising: a substrate container body defining an internal space, the substrate container including the substrate container body including a gas exchange port; a gas exchange module disposed at the gas exchange port, the gas exchange module including: a filter housing; an interface body having a lumen configured to receive the filter housing; a filter disposed at an end of the filter housing; and a filter holder joined to the filter housing. A gas exchange module including comprising a substrate container, wherein the interface body is configured to form a sealing portion around the gas exchange port when the gas exchange module is disposed at the gas exchange port.

10. The substrate container according to claim 9, wherein the interface body includes one or more retaining features disposed on an outer surface of the interface body, and the gas exchange port includes one or more openings configured to receive the one or more retaining features disposed on the outer surface of the interface body.

11. The substrate container according to claim 9, wherein the filter housing includes a valve.

12. The substrate container according to claim 9, wherein the filter holder is joined to the filter housing by a snap fit formed between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing.

13. The substrate container according to claim 12, wherein the filter is held only by compression between a first holding surface provided on the filter holder and a second holding surface provided on the filter housing.

14. The substrate container according to claim 9, wherein the filter holder includes a holding element provided in an opening defined by the filter holder, the holding element includes a plurality of pairs of spokes, each of the plurality of pairs of spokes extends toward a center, the center defines a passage, and each of the plurality of spokes includes a filter holding beam configured to contact the filter, and a total surface area of the filter holding beam is smaller than a total surface area of the holding element.

15. The substrate container according to claim 9, wherein the interface body includes an elastic material.

16. A method for effecting gas exchange within a substrate container, comprising: assembling a gas exchange module by inserting a filter housing into a lumen of an interface body, positioning a filter between the filter housing and a filter holder, and attaching the filter holder to the filter housing; inserting the gas exchange module into a gas exchange port of the substrate container; and.

17. The method according to claim 16, wherein attaching the filter holder to the filter housing includes forming a snap fit between one or more first snap fit features provided on the filter holder and one or more second snap fit features provided on the filter housing.

18. The method according to claim 17, wherein the filter is held only by compression between a first holding surface provided on the filter holder and a second holding surface provided on the filter housing.

19. The method according to claim 16, wherein inserting the gas exchange module into the gas exchange port of the substrate container includes forming an interface between an opening provided in the gas exchange port and one or more holding features provided on an outer surface of the interface body.

20. The method according to claim 16, further comprising guiding a gas flow through the interface body, passing the gas flow through a valve provided in the filter housing, and passing the gas flow through the filter.

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