Piezoelectric micromotor and method for manufacturing the same

Abstract

The present invention relates to a piezoelectric micromotor and a method for manufacturing the same. Here, the piezoelectric micromotor includes a stator and a rotor, and the stator includes a control deformation part, a passive deformation part, and a transmission link group. A rotor through-hole is provided in the control deformation part and the passive deformation part, and the rotor is installed in at least one of the rotor through-holes. A reverse piezoelectric part for generating deformation is further provided in the control deformation part. The transmission link group is located between the control deformation part and the passive deformation part. The transmission link group includes at least two transmission links, and both ends of the transmission link are respectively connected to the control deformation part and the passive deformation part. The control deformation part, the passive deformation part, and the transmission link group are integrally formed. According to an embodiment of the present invention, the processing requirements of a piezoelectric micromotor 10 in the millimeter to micrometer range can be satisfied.

Description

Technical Field

[0001] The present invention relates to the field of piezoelectric motors, and more particularly to piezoelectric micromotors and methods for manufacturing the same.

Background Art

[0002] In related technologies, different from conventional electromagnetic motors, piezoelectric motors are motors based on a novel principle. Piezoelectric motors utilize the inverse piezoelectric effect of piezoelectric ceramics to cause minute vibrations of the stator, and the minute vibrations of the stator are converted into the macro motion of the rotor by the frictional action at the contact interface between the stator and the rotor. Therefore, piezoelectric motors have characteristics such as a compact structure, no electromagnetic interference, easy miniaturization, and high energy density. Due to these characteristics, piezoelectric motors can be applied in many fields such as digital cameras, biomedical therapies, aerospace equipment, and precision systems.

[0003] However, piezoelectric micromotors processed by mechanical machining methods have limitations in dimensions. When the dimensions are less than a predetermined value, the motor performance drops sharply.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present invention provides a piezoelectric micromotor and a method for manufacturing the same.

Means for Solving the Problems

[0005] The piezoelectric micromotor provided in the first aspect of an embodiment of the present invention includes a stator and a rotor. The stator includes a control deformation part, a passive deformation part, and a transmission link group. At least one rotor through-hole is provided in the control deformation part and the passive deformation part, and the rotor is installed in the rotor through-hole. The control deformation part is further provided with an inverse piezoelectric part for causing deformation. The transmission link group is located between the control deformation part and the passive deformation part. The transmission link group includes at least two transmission links. Both ends of the transmission link are respectively connected to the control deformation part and the passive deformation part. The control deformation part, the passive deformation part, and the transmission link group are integrally formed.

[0006] In some embodiments, the control deformation part includes a first control deformation part and a second control deformation part. The transmission link group includes a first link group and a second link group. The first link group is located between the first control deformation part and the passive deformation part. The second link group is located between the second control deformation part and the passive deformation part. The first control deformation part and the second control deformation part are symmetrically installed on both sides of the passive deformation part.

[0007] In some embodiments, the first control deformation part and the second control deformation part are rectangular. The inverse piezoelectric part is located on four sides of the first control deformation part and the second control deformation part. Four corner parts of the first control deformation part and the second control deformation part are arc-shaped.

[0008] In some embodiments, the inverse piezoelectric part is used to generate deformation when receiving an excitation signal. Two opposite inverse piezoelectric parts in each control deformation part form a set. Two sets of inverse piezoelectric parts in each control deformation part are respectively used to receive a cosine excitation signal and a sine excitation signal. The frequency of the excitation signal is within the resonance excitation range of the control deformation part. At this time, two resonance modes of the stator are excited, and the rotor is driven by the resonance vibration of the stator.

[0009] In some embodiments, the resonance excitation range of the control deformation part is 393.368 kHz to 393.871 kHz.

[0010] In some embodiments, the direction of the control deformation part directed to the passive deformation part is the lateral direction, the direction perpendicular to the lateral direction is the longitudinal direction. At this time, the frequency of the excitation signal may not be close to the resonance frequency of the operation mode, and the stator forms an elliptical motion locus at the driving point due to non-resonance. The piezoelectric part located in the first control deformation part includes a first group and a second group. The first group is located on the lateral side of the first control deformation part, and the second group is located on the longitudinal side of the first control deformation part. The piezoelectric part located in the second control deformation part includes a third group and a fourth group. The third group is located on the lateral side of the second control deformation part, and the fourth group is located on the longitudinal side of the second control deformation part. The first group and the fourth group are used to receive a sine excitation signal, and the second group and the third group are used to receive a cosine excitation signal, or the first and the fourth groups are used to receive a cosine excitation signal, and the second group and the third group are used to receive a sine excitation signal.

[0011] In some embodiments, the piezoelectric micromotor further includes micro teeth. The micro teeth are installed in the rotor through hole and located between the stator and the rotor. The micro teeth are installed on at least one of the stator and the rotor, and the stator contacts the rotor through the micro teeth.

[0012] In some embodiments, the micro teeth are distributed at equal intervals, and the interval between adjacent micro teeth is an integer multiple of the wavelength. The wavelength follows the formula λ = v×T, where λ is the wavelength, v is the speed of sound in the stator or the rotor, and T is the period to which the sine excitation signal is applied.

[0013] In some embodiments, the piezoelectric micromotor further includes a micro driving structure. The micro drive structure includes a conductive post and a micro drive circuit. The micro drive circuit is installed on a flexible carrier board. One end of the conductive post is electrically connected to the micro drive circuit, and the other end is electrically connected to the inverse piezoelectric part.

[0014] The method for manufacturing a piezoelectric micromotor provided in the second aspect of the embodiment of the present invention includes providing a base, laser cutting the base to form a stator base, and plating an inverse piezoelectric part with a thickness of 0.01 millimeter to 0.1 millimeter on the stator base by magnetron sputtering technology, after forming the inverse piezoelectric part, polarizing the inverse piezoelectric part by a polarization process to form a stator, after polarizing the inverse piezoelectric part, providing a flexible carrier board, forming a micro drive circuit on the flexible carrier board to form a micro drive structure, and electrically connecting pads of the micro drive circuit to the inverse piezoelectric part.

[0015] In some embodiments, plating the inverse piezoelectric part on the stator base by magnetron sputtering technology and polarizing the inverse piezoelectric part by a polarization process include installing a polymer mask plate on the stator base, and plating the inverse piezoelectric part on the stator base by magnetron sputtering technology, after forming the inverse piezoelectric part, removing the polymer mask plate, and polarizing the inverse piezoelectric part by a corona polarization process.

[0016] In some embodiments, after polarizing the inverse piezoelectric part by a polarization process, installing a polymer mask plate on the stator, and plating a rotor in a rotor through hole by magnetron sputtering technology, and after forming the rotor, further removing the polymer mask plate.

[0017] In some embodiments, after forming the rotor, attach a preloading structure to the stator, form a micro drive circuit on a flexible carrier board by an inkjet printing method, install a solid sleeve on a pad of the micro drive circuit, wherein a hollow portion of the solid sleeve is aligned with the pad of the micro drive circuit, pour a conductive adhesive into the solid sleeve, after the conductive adhesive solidifies, remove the solid sleeve, and polish the solidified conductive adhesive to form a conductive post, and further include electrically connecting the other end of the conductive post to the inverse piezoelectric portion.

Advantages of the Invention

[0018] According to the embodiments of the present invention, when the dimensions of the piezoelectric micromotor are millimeter-level or less, if each part of the stator is formed and combined respectively, errors will occur during the processing of each part. Therefore, it can be seen that the processing error becomes larger after combination. As a result of repeated experiments by the inventors, it was found that for a piezoelectric micromotor, even if the processing error of the substrate is at the 0.1 millimeter level, the piezoelectric micromotor cannot operate stably. By integrally forming the control deformation portion, the passive deformation portion, and the transmission link group, the processing error of the entire stator can be effectively reduced, thereby meeting the processing requirements of millimeter-level to micrometer-level piezoelectric micromotors.

[0019] As can be understood, the above general description and the following detailed description are merely exemplary and explanatory and cannot limit the present invention.

Brief Description of the Drawings

[0020] The drawings herein are incorporated in and form a part of the specification, showing embodiments consistent with the present invention and used to interpret the principles of the present invention together with the specification.

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Embodiments for Carrying out the Invention

[0021] Here, exemplary embodiments will be described in detail, and the examples are shown in the drawings. In the following description, when referring to the drawings, unless otherwise indicated, the same numbers in different drawings indicate the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present invention as detailed in the appended claims.

[0022] Embodiments of the present invention provide a piezoelectric micromotor 10. FIG. 1 shows a schematic structural diagram of the piezoelectric micromotor 10. As shown in FIG. 1, the piezoelectric micromotor 10 includes a stator 11 and a rotor 12.

[0023] The stator 11 includes a control deformation part 13, a passive deformation part 14, and a transmission link group 15.

[0024] At least one rotor through hole 16 is provided in the control deformation part 13 and the passive deformation part 14, and the rotor 12 is installed in the rotor through hole 16.

[0025] Specifically, at least one rotor through hole 16 is provided in the control deformation part 13 and the passive deformation part 14, that is, one or more rotor through holes 16 may be provided only in the control deformation part 13, or one or more rotor through holes 16 may be provided only in the passive deformation part 14, or one or more rotor through holes 16 may be provided in both the control deformation part 13 and the passive deformation part 14. By different installation methods of the rotor through hole 16 and the rotor 12, the number of loads accessing the piezoelectric micromotor 10 can be flexibly adjusted, and moreover, it can be flexibly adjusted so that loads with different parameters access the piezoelectric micromotor 10, thereby expanding the use scene and use range of the piezoelectric micromotor 10.

[0026] A reverse piezoelectric part 17 for generating deformation is further provided in the control deformation part 13.

[0027] The transmission link group 15 is located between the control deformation part 13 and the passive deformation part 14. The transmission link group 15 includes at least two transmission links 151, and both ends of the transmission link 151 are connected to the control deformation part 13 and the passive deformation part 14 respectively.

[0028] Specifically, the inverse piezoelectric part 17 is made of a piezoelectric material, which may include, but is not limited to, piezoelectric ceramics. Therefore, when the inverse piezoelectric part 17 receives an excitation signal, it generates a deformation that continues to change under the action of the excitation signal. The deformed inverse piezoelectric part 17 drives the control deformation part 13 to generate a deformation that continues to change, and the deformation of the control deformation part 13 drives the rotor through-hole 16 to generate a deformation that continues to change. Thereby, the rotor 12 can be rotated by the rotor through-hole 16 that generates a continuously changing deformation, and the load connected to the piezoelectric micromotor 10 can be driven.

[0029] Moreover, the deformation of the control deformation part 13 is transmitted to the passive deformation part 14 through the transmission link group 15, and the passive deformation part 14 can also be moved. Thereby, the deformation of the control deformation part 13 and the passive deformation part 14 can drive a plurality of rotor through-holes 16 to generate a continuously changing deformation simultaneously. As a result, a plurality of rotors 12 can be rotated through the rotor through-holes 16 that generate a continuously changing deformation, and a plurality of loads connected to the piezoelectric micromotor 10 can be driven.

[0030] On the other hand, FIG. 2 shows a schematic structure diagram of the stator 11. As shown in FIG. 1 and referring to FIG. 2, the control deformation part 13 of the stator 11 may be rectangular or cross-shaped, but is not limited thereto. The shape of the control deformation part 13 may be other shapes that are easily deformed under the action of the inverse piezoelectric part 17.

[0031] The control deformation part 13, the passive deformation part 14, and the transmission link group 15 are integrally formed.

[0032] Specifically, the term "integrally formed" referred to in the present invention means that there is no need to perform an assembly process after separately forming the control deformation part 13, the passive deformation part 14, and the transmission link group 15, and the control deformation part 13, the passive deformation part 14, and the transmission link group 15 are formed by processing the same material.

[0033] When the dimensions of the piezoelectric micromotor 10 are in the millimeter range or less, if each part of the stator 11 is formed and combined respectively, errors will occur during the processing of each part, so the processing error will become larger after combination. As a result of repeated experiments by the inventors, it was found that for the piezoelectric micromotor 10 with dimensions in the range of 1 millimeter to 5 millimeters, even if the processing deviation of the substrate is at the 0.1 millimeter level, the piezoelectric micromotor 10 cannot operate stably. By integrally forming the control deformation part 13, the passive deformation part 14, and the transmission link group 15, the processing error of the entire stator 11 can be effectively reduced, thereby meeting the processing requirements of the piezoelectric micromotor 10 at the millimeter level or the micrometer level.

[0034] In some embodiments, as shown in FIG. 1, the control deformation part 13 and the passive deformation part 14 are located on the same central axis X. The center of each rotor through hole 16 may be located on the central axis X.

[0035] Specifically, when the control deformation part 13 and the passive deformation part 14 are not deformed, the rotor through hole 16 is circular, and the center of the rotor through hole 16 is the center of the circle. When the control deformation part 13 and the passive deformation part 14 are deformed, the rotor through hole 16 is elliptical, and the center of the rotor through hole 16 is the intersection of the major axis and the minor axis of the ellipse.

[0036] It should be noted that the fact that the center of each rotor through hole 16 is located on the central axis X is only a feasible embodiment of the present invention. However, in some other embodiments of the present invention, according to actual requirements, the centers of some rotor through holes 16 may be located on the central axis X, and the centers of some rotor through holes 16 may not be located on the central axis X, or the centers of all rotor through holes 16 may not be located on the central axis X, or the centers of all rotor through holes 16 may be located on the central axis X.

[0037] In some embodiments, as shown in FIG. 1, the piezoelectric micromotor 10 further includes a preloading structure 19. The preloading structure 19 is used to hold the relative fixation of the stator 11. By holding the relative fixation of the stator 11 by the preloading structure 19, the relative fixation of the entire other structure connected to the stator 11 can be held, thereby enabling the normal operation of the piezoelectric micromotor 10 to be maintained and preventing other structures from interfering with the stator 11 and obstructing the deformation range of the stator 11.

[0038] The preloading structure 19 includes a bezel 191, a fastening nut 192, and a disc spring 193.

[0039] The fastening nut 192 is screwed into the bezel 191. The preloading structure 19 is used to hold the relative fixation of the stator 11, that is, the distance between the fastening nut 192 and the passive deformation part 14 is adjusted so that the disc spring 193 can generate an elastic force without being overly pressed. Moreover, since the disc spring 193 still retains a certain amount of space for elastic deformation, it does not overly interfere with the deformation generated by the passive deformation part 14.

[0040] At the same time, the deformation range generated by the passive deformation part 14 is smaller than that of the control deformation part 13. Therefore, by positioning the pressing position of the preloading structure 19 at the passive deformation part 14, the influence of the preloading structure 19 on the deformation range of the stator 11 can be minimized.

[0041] In some embodiments, as shown in FIG. 1, the transmission link 151 forms an angle α with the central axis X. Installed in this way, the deformation generated by the control deformation part 13 can be enlarged through the transmission link group 15 and transmitted to the passive deformation part 14 based on the principle of triangular expansion, thereby enabling the control deformation part 13 and the passive deformation part 14 to be used to drive different required loads.

[0042] In this embodiment, the deformation generated by the control deformation part 13 is enlarged through the transmission link group 15 and transmitted to the passive deformation part 14 according to the principle of triangular expansion. However, the present invention is not limited thereto. In other embodiments, the deformation generated by the control deformation part 13 is reduced through the transmission link group 15 and transmitted to the passive deformation part 14, so that the control deformation part 13 and the passive deformation part 14 are used to drive loads with different requirements.

[0043] In some embodiments, as shown in FIG. 1, the control deformation part 13 includes a first control deformation part 131 and a second control deformation part 132. The transmission link group 15 includes a first link group 152 and a second link group 153. The first link group 152 is located between the first control deformation part 131 and the passive deformation part 14, and the second link group 153 is located between the second control deformation part 132 and the passive deformation part 14. The first control deformation part 131 and the second control deformation part 132 are symmetrically installed on both sides of the passive deformation part 14.

[0044] By symmetrically installing the first control deformation part 131 and the second control deformation part 132 on both sides of the passive deformation part 14, the force applied to the passive deformation part 14 can be made more uniform. Thereby, the situation where the deformation caused by the non-uniform force applied to the passive deformation part 14 is different from the deformation of the control deformation part 13 can be reduced. As a result, the stability of the passive deformation part 14 can be improved, and the operation stability of the entire piezoelectric micromotor 10 can be improved.

[0045] In some embodiments, FIG. 3 shows a schematic structural view of the control deformation part 13. As shown in FIGS. 1 and 3, the first control deformation part 131 and the second control deformation part 132 are rectangular. The inverse piezoelectric part 17 is located on the four sides of the first control deformation part 131 and the second control deformation part 132, and the four corners of the first control deformation part 131 and the second control deformation part 132 may be arc-shaped.

[0046] Specifically, in this embodiment, the inverse piezoelectric part 17 is symmetrically installed on the four sides of the first control deformation part 131 and the second control deformation part 132. FIG. 1 shows the central axis X, the first axis Y1 of the first control deformation part 131, and the second axis Y2 of the second control deformation part 132. The inverse piezoelectric part 17 installed opposite to the first control deformation part 131 is symmetric with respect to the central axis X or the first axis Y1, and the inverse piezoelectric part 17 installed opposite to the second control deformation part 132 is symmetric with respect to the central axis X or the second axis Y2.

[0047] FIGS. 4 and 5 show schematic simulation diagrams of the deformation amounts at various locations of the stator 11 after the first control deformation part 131 and the second control deformation part 132 are deformed as a result of the inventors' repeated simulation experiments. Referring to FIGS. 4 and 5, the inverse piezoelectric part 17 is located on the four sides of the first control deformation part 131 and the second control deformation part 132. After receiving the excitation signal and deforming, the inverse piezoelectric part 17 produces different deformation states and drives the control deformation part 13 to deform. As is apparent from FIGS. 4 and 5, the inverse piezoelectric part 17 is the part that deforms the most in the stator 11.

[0048] After the control deformation part 13 is deformed, the rotor through hole 16 becomes elliptical due to the deformation of the control deformation part 13. By controlling the inverse piezoelectric part 17 on the four sides of the first control deformation part 131 or the second control deformation part 132, the deformation state of the first control deformation part 131 or the second control deformation part 132 can be adjusted, and the ellipse formed by the deformation of the rotor through hole 16 can be rotated around its center, thereby achieving the effect of rotating the rotor 12.

[0049] As can be further observed from FIGS. 4 and 5, at the four corner portions of the control deformation portion 13, there are clearly portions with small deformation, that is, the dark portions shown in regions Q1, Q2, Q3, Q4, and Q5 in FIGS. 4 and 5. By arranging the four corner portions of the first control deformation portion 131 and the second control deformation portion 132 in an arc shape, it is possible to reduce the portions with small deformation at the four corner portions of the first control deformation portion 131 and the second control deformation portion 132. Thereby, in a state where the same amount of deformation occurs in the inverse piezoelectric portion 17, the amount of deformation generated by the control deformation portion 13 can be improved. As a result, the operating efficiency of the stator 11 and the operating efficiency of the entire piezoelectric micromotor 10 can be improved.

[0050] Note that due to the perspective problem, FIGS. 4 and 5 cannot show the deformation amounts of all the corner portions of the first control deformation portion 131 and the second control deformation portion 132. However, for the remaining corner portions that do not show the deformation amounts, the deformation amounts of the shown corner portions can still be referred to.

[0051] In some embodiments, the inverse piezoelectric portion 17 is used to generate deformation when receiving an excitation signal. Two opposing inverse piezoelectric portions 17 in each control deformation portion 13 form a set. The two sets of inverse piezoelectric portions 17 in each control deformation portion 13 are respectively used to receive a cosine excitation signal and a sine excitation signal.

[0052] The frequency of the excitation signal is 393.368 kHz or more and 393.871 kHz or less.

[0053] Specifically, as shown in FIG. 1, two opposing inverse piezoelectric portions 17 in the control deformation portion 13 form a set. That is, in the first control deformation portion 131, the inverse piezoelectric portions 17 located on both sides of the first axis Y1 form a set, and the inverse piezoelectric portions 17 located on both sides of the central axis X form another set. Similarly, in the second control deformation portion 132, the inverse piezoelectric portions 17 located on both sides of the second axis Y2 form a set, and the inverse piezoelectric portions 17 located on both sides of the central axis X form another set.

[0054] The frequency of the excitation signal is 393.368 kHz or more and 393.871 kHz or less. When the excitation signal is within this range, it is exactly within the resonance excitation range of the two control deformation parts 13, whereby the deformation amount after receiving the excitation signal can be improved by the resonance excitation of the control deformation parts 13, and thus parameters such as the rotation speed and output torque of the entire piezoelectric micromotor 10 can be improved.

[0055] In some embodiments, as shown in FIG. 1, the direction of the control deformation part 13 facing the passive deformation part 14 is the lateral direction Z1, and the direction perpendicular to the lateral direction Z1 is the longitudinal direction Z2.

[0056] The piezoelectric part 17 located in the first control deformation part 131 includes a first set 171 and a second set 172. The first set 171 is located on the side in the lateral direction Z1 of the first control deformation part 131, and the second set 172 is located on the side in the longitudinal direction Z2 of the first control deformation part 131. The piezoelectric part 17 located in the second control deformation part 132 includes a third set 173 and a fourth set 174. The third set 173 is located on the side in the lateral direction Z1 of the second control deformation part 132, and the fourth set 174 is located on the side in the longitudinal direction Z2 of the second control deformation part 132.

[0057] The first set 171 and the fourth set 174 are used to receive a sine excitation signal, and the second set 172 and the third set 173 are used to receive a cosine excitation signal, or the first set 171 and the fourth set 174 are used to receive a cosine excitation signal, and the second set 172 and the third set 173 are used to receive a sine excitation signal.

[0058] With such an arrangement, when the frequency of the excitation signal is within the range of 393.368 kHz to 393.871 kHz and the excitation signal is input to the piezoelectric part 17 in the above manner, the two resonance modes of the control deformation part 13 can be excited simultaneously, whereby the deformation amount after receiving the excitation signal can be further improved by the resonance excitation of the control deformation part 13, and thus parameters such as the rotation speed and output torque of the entire piezoelectric micromotor 10 can be further improved.

[0059] Also, the frequency of the excitation signal may not be within the range of 393.368 kHz to 393.871 kHz. At this time, when the excitation signal is still applied in the above-described manner, the piezoelectric portions of the first set 171 and the fourth set 174 are excited by the electrical signal to generate vibrations in the vertical direction, and the piezoelectric portions of the second set 172 and the third set 173 are excited by the electrical signal to generate vibrations in the horizontal direction. The superposition of the vibrations in the two directions can similarly form an elliptical motion that drives the rotor to rotate. However, at this time, the piezoelectric micromotor operates in a non-resonant state.

[0060] Note that the deformation amount of the passive deformation portion 14 shown in FIG. 4 is smaller than the deformation amount of the passive deformation portion 14 shown in FIG. 5, but this is actually a simulation diagram obtained by the inventors under different data conditions. Therefore, the difference in the deformation amounts between FIGS. 4 and 5 does not conflict with the effects of this embodiment.

[0061] In some embodiments, the transmission link group 15 includes at least one of a flexible hinge, a horn, and a rigid link. When installed in this way, the displacement amplification effect of the transmission link group 15 can be better realized. That is, the deformation amount transmitted by the transmission link group 15 to the passive deformation portion 14 can approach a preset value, whereby when the piezoelectric portion 17 generates the same deformation amount, the deformation amount generated by the passive deformation portion 14 can be further improved, and thus, the operating efficiency of the stator 11 and the operating efficiency of the entire piezoelectric micromotor 10 can be further improved.

[0062] In some embodiments, as shown in FIG. 1, the piezoelectric micromotor 10 further includes micro teeth 18.

[0063] The micro teeth 18 are installed in the rotor through hole 16 and are located between the stator 11 and the rotor 12. The micro teeth 18 are installed on at least one of the stator 11 and the rotor 12. The stator 11 contacts the rotor 12 via the micro teeth 18.

[0064] Specifically, the micro teeth 18 may be installed only on the stator 11 as shown in FIG. 1, or the micro teeth 18 may be installed only on the rotor 12, or the micro teeth 18 may be installed on both the stator 11 and the rotor 12.

[0065] Moreover, by bringing the stator 11 into contact with the rotor 12 through the micro teeth 18, the working area of the stator 11 with respect to the rotor 12 can be increased. Specifically, FIG. 6 shows a partial enlarged view of a portion located in the control deformation portion 13 of the piezoelectric micromotor 10. Referring to FIG. 6, taking the situation where the micro teeth 18 are located on the stator 11 as an example, when the shape of the rotor through hole 16 is elliptical, the minor axis of the ellipse is shorter than the diameter of the circular rotor through hole 16 before deformation, and the micro teeth 18 are pressed against the rotor 12, playing a role in improving the working area of the rotor through hole 16 with respect to the rotor 12.

[0066] Note that, in order to visually show the micro teeth 18, the gap between the stator 11 and the rotor 12 shown in the figure is relatively large. However, in reality, since the micro teeth 18 themselves are small and the shape of the rotor through hole 16 is elliptical, and the materials of the stator 11 and the rotor 12 have flexibility, the stator 11 can contact the rotor 12.

[0067] When the stator 11 contacts the rotor 12 through the micro teeth 18, the working area of the stator 11 with respect to the rotor 12 can be increased, thereby improving the power transmission efficiency from the stator 11 to the rotor 12, and ultimately improving the performance of the piezoelectric micromotor 10.

[0068] In some embodiments, the micro teeth 18 are distributed at equal intervals, and the interval between adjacent micro teeth 18 is an integer multiple of the wavelength. The wavelength follows the formula λ = v × T. Here, λ is the wavelength, v is the speed of sound in the stator 11 or the rotor 12, and T is the period to which the sinusoidal excitation signal is applied.

[0069] Specifically, when the micro teeth 18 are installed only on the stator 11, v is the speed of sound in the stator 11. When the micro teeth 18 are installed only on the rotor 12, v is the speed of sound in the rotor 12.

[0070] By simultaneously matching the micro teeth 18 with the above distribution rule, the stator 11 can be brought into better contact with the rotor 12 through the micro teeth 18, increasing the working area of the stator 11 with respect to the rotor 12, thereby further improving the power transmission efficiency from the stator 11 to the rotor 12, and ultimately further improving the performance of the piezoelectric micromotor 10.

[0071] In some embodiments, FIG. 7 shows a schematic structural diagram of the micro drive structure 20, and the flexible carrier board 21 has a hollow rectangular plate-like structure. As shown in FIG. 7, the piezoelectric micromotor 10 further includes the micro drive structure 20.

[0072] Referring to FIG. 8, which shows a schematic structural diagram of the micro drive circuit 23, the micro drive structure 20 includes the conductive post 22 and the micro drive circuit 23. The micro drive circuit 23 is installed on the flexible carrier board 21. One end of the conductive post 22 is electrically connected to the micro drive circuit 23, and the other end is electrically connected to the inverse piezoelectric part 17.

[0073] Specifically, the region Q6 shown in FIG. 7 is used to refer to parts such as the stator 11, rotor 12, control deformation part 13, passive deformation part 14, transmission link group 15, rotor through hole 16, inverse piezoelectric part 17, micro teeth 18, and preloading structure 19 of the piezoelectric micromotor 10.

[0074] Moreover, as shown in FIG. 7, the frame of the flexible carrier board 21 has a hollow rectangular plate-like structure, and the flexible carrier board 21 surrounds the stator 11. The micro drive circuit 23 is a flexible composite circuit board, which includes not only rigid devices such as a low-voltage drive piezoelectric micromotor dedicated drive control chip, chip resistor, capacitor, and inductor, but also pads and lead wires. All of the above devices are integrated on the flexible carrier board 21. The flexible carrier board 21 adopts a flexible base material. For example, polyimide, polyethylene, or polyethylene terephthalate can be adopted, but it is not limited thereto. By integrating the micro drive structure 20 into the piezoelectric micromotor 10, the integration of the motor part and the drive part of the piezoelectric micromotor 10 can be realized, and the integration degree of the piezoelectric micromotor 10 can be improved.

[0075] Each device of the micro drive circuit 23, such as lead wires and pads, is formed on the flexible carrier board 21 by an electrohydrodynamic inkjet printing method, whereby a finer micro drive circuit 23 structure can be formed.

[0076] Note that the flexible carrier board 21 with a hollow rectangular plate structure adopted in the embodiments of the present invention is an executable embodiment, but it is not limited to this in other embodiments. For example, the flexible carrier board 21 may be an overall rectangular flexible carrier board, and the micro drive structure 20 may be laminated in layers and installed on the piezoelectric micromotor 10. At this time, referring to the schematic structural diagram of the micro drive circuit 23 shown in FIG. 8, the first pad 40, the second pad 41, the third pad 42, and the fourth pad 43 to be connected to the piezoelectric ceramic in the piezoelectric micromotor 10 on the micro drive circuit 23 are installed at positions parallel to the inverse piezoelectric part 17 in the first control deformation part 131 or the second control deformation part 132. The first pad 40, the second pad 41, the third pad 42, and the fourth pad 43 may be installed in a rectangular shape, and the conductive post 22 is electrically connected to the corresponding pad and the inverse piezoelectric part 17, so that the conduction of the circuit and the supporting effect on the micro drive structure 20 can be realized simultaneously through the conductive post 22.

[0077] The embodiments of the present invention further provide a manufacturing method of the piezoelectric micromotor 10. FIG. 9 shows a flowchart of the manufacturing method of the piezoelectric micromotor 10. As shown in FIG. 9, the manufacturing method of the piezoelectric micromotor 10 includes steps S110 to S140.

[0078] In step S110, a base is provided.

[0079] In step S120, the base is laser cut to form a stator base, and an inverse piezoelectric part with a thickness of 0.01 millimeter to 0.1 millimeter is plated on the stator base by magnetron sputtering technology.

[0080] Specifically, the stator base includes a first control deformation part 131, a second control deformation part 132, a passive deformation part 14, and a transmission link group 15.

[0081] In step S130, after forming the inverse piezoelectric part 17, the inverse piezoelectric part 17 is polarized by a polarization process to form the stator 11.

[0082] In step S140, after polarizing the inverse piezoelectric part 17, a flexible carrier board 21 is provided. A micro drive circuit 23 is formed on the flexible carrier board 21 to form a micro drive structure 20. The pads of the micro drive circuit 23 are electrically connected to the inverse piezoelectric part 17.

[0083] Installed in this way, the stator 11 can be formed by an integral molding method, that is, the control deformation part 13, the passive deformation part 14, and the transmission link group 15 can be integrally formed, thereby meeting the processing requirements of the piezoelectric micromotor 10 at the millimeter level or the micrometer level. Furthermore, the processing error of each part can be reduced to ensure the stable operation of the piezoelectric micromotor 10.

[0084] In some embodiments, plating the inverse piezoelectric part 17 on the stator base by magnetron sputtering technology and polarizing the inverse piezoelectric part 17 by a polarization process is including installing a polymer mask plate on the stator base, plating the inverse piezoelectric part 17 on the stator base by magnetron sputtering technology to form it, and after forming the inverse piezoelectric part 17, removing the polymer mask plate and polarizing the inverse piezoelectric part 17 by a corona polarization process.

[0085] Since the size of the stator base is small, accordingly, the size of the inverse piezoelectric part 17 is also small, and higher accuracy is required. By installing a polymer mask plate and depositing the inverse piezoelectric part 17 directly on the stator base by magnetron sputtering, the inverse piezoelectric part 17 can be formed with a small error, and the error requirement for the inverse piezoelectric part 17 of the piezoelectric micromotor 10 can be achieved. Moreover, by directly depositing and forming the inverse piezoelectric part 17, the assembly process is omitted compared with the case of separately manufacturing and assembling the inverse piezoelectric part 17, so the error can be further reduced.

[0086] In some embodiments, after polarizing the inverse piezoelectric part 17 by a polarization process, a polymer mask plate is installed on the stator 11, and the rotor 12 is plated in the rotor through-hole 16 by magnetron sputtering technology to form it, and after forming the rotor 12, removing the polymer mask plate is further included.

[0087] Specifically, when plating and forming the rotor 12 in the rotor through-hole 16, there is a gap between the rotor 12 and the rotor through-hole 16. Therefore, the rotor 12 formed by plating can be held independently of the rotor through-hole 16. Moreover, a part of the material that has fallen into the gap between the rotor 12 and the rotor through-hole 16 can also be removed in a later process without affecting the processing accuracy of the stator 11 and the rotor 12.

[0088] Since the size of the stator 11 is small, accordingly, the size of the rotor 12 is also small, and higher accuracy is required. By installing a polymer mask plate and depositing the rotor 12 directly on the stator 11 in a magnetron sputtering method, the rotor 12 can be formed with a small error, and the error requirement for the rotor 12 of the piezoelectric micromotor 10 can be achieved. Moreover, by directly depositing and forming the rotor 12, the assembly process is omitted compared with the case of manufacturing and assembling the rotor 12 separately, so the error can be further reduced.

[0089] In some embodiments, after forming the rotor 12, attaching the preloading structure 19 to the stator 11 and forming the micro drive circuit 23 on the flexible carrier board 21 by an inkjet printing method, Installing a solid sleeve on the pads of the micro drive circuit 23, wherein the hollow portion of the solid sleeve is aligned with the pads of the micro drive circuit 23, pouring a conductive adhesive into the solid sleeve, removing the solid sleeve after the conductive adhesive has solidified, and polishing the solidified conductive adhesive to form a conductive post 22, and electrically connecting the other end of the conductive post 22 to the inverse piezoelectric portion 17.

[0090] Specifically, the micro drive circuit 23 includes a first pad 40, a second pad 41, a third pad 42, and a fourth pad 43. The installed solid sleeve may be a hollow rectangular sleeve with a height of 1.5 millimeters, but is not limited thereto. Here, the conductive adhesive may be an epoxy-based conductive adhesive, specifically, it may be E-Solder3022, but is not limited thereto.

[0091] By such a method, the micro drive structure 20 can be manufactured. By integrating the micro drive circuit 23 into the flexible carrier board 21, the micro drive structure 20 can be integrated into the piezoelectric micromotor 10, thereby realizing the integration of the motor portion and the drive portion of the piezoelectric micromotor 10 and improving the integration degree of the piezoelectric micromotor 10.

[0092] The above embodiments of the present invention can complement each other in a situation where no contradiction occurs.

[0093] Note that in the drawings, the dimensions of layers and regions may be exaggerated for clarity of illustration. Also, when an element or layer is referred to as being "on" another element or layer, it is understood that it may be directly disposed on the other element or an intermediate layer may be present. Also, when an element or layer is referred to as being "under" another element or layer, it may be directly disposed under the other element, or one or more intermediate layers or elements may be present. Also, when an element or layer is referred to as being "between" two layers or two elements, it may be the only layer between the two layers or two elements, or one or more intermediate layers or elements may be present. Throughout this specification, like reference numerals refer to like elements.

[0094] The term "plurality" refers to two or more, unless otherwise specified.

[0095] Those skilled in the art will readily conceive of other embodiments of the present invention upon considering this specification and practicing the disclosure set forth herein. The present invention is intended to cover any variations, uses, or adaptations of the invention, including those that depart from the general principles of the invention and include known common general knowledge or conventional technical means in the art not disclosed in the present invention. The specification and examples are to be regarded as illustrative only, and the true scope and spirit of the present invention are indicated by the following claims.

[0096] As will be understood, the present invention is not limited to the precise structures described above and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of the present invention is limited only by the appended claims.

Claims

1. A piezoelectric micromotor including a stator and a rotor, wherein the stator includes a control deformation part, a passive deformation part, and a transmission link group, at least one rotor through hole is provided in the control deformation part and the passive deformation part, and the rotor is installed in the rotor through hole, a reverse piezoelectric part for generating deformation is further installed in the control deformation part, the transmission link group is located between the control deformation part and the passive deformation part, the transmission link group includes at least two transmission links, and both ends of the transmission link are respectively connected to the control deformation part and the passive deformation part, the control deformation part, the passive deformation part, and the transmission link group are integrally formed. A piezoelectric micromotor characterized by this.

2. The control deformation part includes a first control deformation part and a second control deformation part, the transmission link group includes a first link group and a second link group, the first link group is located between the first control deformation part and the passive deformation part, the second link group is located between the second control deformation part and the passive deformation part, and the first control deformation part and the second control deformation part are symmetrically installed on both sides of the passive deformation part. The piezoelectric micromotor according to Claim 1, characterized by this.

3. The first control deformation part and the second control deformation part are rectangular, the reverse piezoelectric part is located on four sides of the first control deformation part and the second control deformation part, and four corner parts of the first control deformation part and the second control deformation part are arc-shaped. The piezoelectric micromotor according to Claim 2, characterized by this.

4. The reverse piezoelectric part is used to generate deformation when receiving an excitation signal. Two opposite reverse piezoelectric parts in each control deformation part are a set, and two sets of reverse piezoelectric parts in each control deformation part are respectively used to receive a cosine excitation signal and a sine excitation signal. The frequency of the excitation signal is within the resonance excitation range of the control deformation part. The piezoelectric micromotor according to Claim 3, characterized by this.

5. The resonance excitation range of the control deformation part is 393.368 kHz to 393.871 kHz. The piezoelectric micromotor according to Claim 4, characterized by this.

6. The direction of the control deformation part pointing to the passive deformation part is the horizontal direction, and the direction perpendicular to the horizontal direction is the vertical direction. The inverse piezoelectric part located at the first control deformation part includes a first set and a second set. The first set is located on the lateral side of the first control deformation part, and the second set is located on the longitudinal side of the first control deformation part. The inverse piezoelectric part located at the second control deformation part includes a third set and a fourth set. The third set is located on the lateral side of the second control deformation part, and the fourth set is located on the longitudinal side of the second control deformation part. The first set and the fourth set are used to receive a sine excitation signal, and the second set and the third set are used to receive a cosine excitation signal, or the first and fourth sets are used to receive a cosine excitation signal, and the second set and the third set are used to receive a sine excitation signal. The piezoelectric micromotor according to claim 4, characterized in that.

7. The piezoelectric micromotor further includes micro teeth. The micro teeth are installed in the rotor through hole and located between the stator and the rotor. The micro teeth are installed on at least one of the stator and the rotor, and the stator contacts the rotor through the micro teeth. The piezoelectric micromotor according to claim 1, characterized in that.

8. The micro teeth are distributed at equal intervals, and the interval between adjacent micro teeth is an integer multiple of the wavelength. The wavelength follows the formula λ = v × T, where λ is the wavelength, v is the speed of sound in the stator or rotor, and T is the period to which the sine excitation signal is applied. The piezoelectric micromotor according to claim 7, characterized in that.

9. The piezoelectric micromotor further includes a micro drive structure. The micro drive structure includes a conductive post and a micro drive circuit. The micro drive circuit is installed on a flexible carrier board. One end of the conductive post is electrically connected to the micro drive circuit, and the other end is electrically connected to the inverse piezoelectric part. The piezoelectric micromotor according to claim 1, characterized in that.

10. Providing a base; Laser cutting the base to form a stator base, and plating an inverse piezoelectric part with a thickness of 0.01 millimeter to 0.1 millimeter on the stator base by magnetron sputtering technology. After forming the inverse piezoelectric part, polarizing the inverse piezoelectric part by a polarization process to form a stator; After polarizing the inverse piezoelectric part, providing a flexible carrier board; Forming a micro drive circuit on the flexible carrier board to form a micro drive structure; Electrically connecting the pads of the micro drive circuit to the inverse piezoelectric part; and A method for manufacturing a piezoelectric micromotor, characterized by the above.

11. Forming the inverse piezoelectric part on the stator base by plating using magnetron sputtering technology, and polarizing the inverse piezoelectric part by a polarization process, which Comprises installing a polymer mask plate on the stator base, and forming the inverse piezoelectric part on the stator base by plating using magnetron sputtering technology; After forming the inverse piezoelectric part, removing the polymer mask plate, and polarizing the inverse piezoelectric part by a corona polarization process. A method for manufacturing a piezoelectric micromotor according to claim 10, characterized by the above.

12. After polarizing the inverse piezoelectric part by a polarization process, Installing a polymer mask plate on the stator, and forming a rotor in the rotor through hole by plating using magnetron sputtering technology; After forming the rotor, further removing the polymer mask plate. A method for manufacturing a piezoelectric micromotor according to claim 10, characterized by the above.

13. After forming the rotor, Attaching a preloading structure to the stator; Forming a micro drive circuit on the flexible carrier board by inkjet printing; Installing a solid sleeve on the pad of the micro drive circuit, wherein the hollow part of the solid sleeve is aligned with the pad of the micro drive circuit; Pouring a conductive adhesive into the solid sleeve; After the conductive adhesive solidifies, removing the solid sleeve, and polishing the solidified conductive adhesive to form a conductive post; Electrically connecting the other end of the conductive post to the inverse piezoelectric part. A method for manufacturing a piezoelectric micromotor according to claim 12, characterized by the above.

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