High-precision Micro Scanner

Abstract

The present invention discloses a high-precision microscope scanner. It includes a main body base, on which a Y-axis cross-roller sliding unit is provided via a ZY-axis common bottom plate, and a Y-axis sliding drive unit is arranged on one side of the main body base. An X-axis cross-roller sliding unit and an X-axis sliding drive unit are provided on the Y-axis cross-roller sliding unit. A slide holder and an overall illumination unit are provided on the X-axis cross-roller sliding unit, and a lifting focus unit is arranged at the center of the main body base. In addition, there is a Z-axis sliding unit on the ZY-axis common bottom plate, and an oil-immersion lens unit is installed on the Z-axis sliding unit. Above the X-axis cross-roller sliding unit, a fluorescence module is arranged via a gantry, the lower end of the fluorescence module is connected to the oil-immersion lens unit, and the upper end is connected to a scanning camera. Furthermore, an overall camera and an upper illumination unit are provided on the gantry. The present invention significantly improves the control accuracy during scanning through the optimized design of the X, Y, and Z-axis movement structures of the fiber scanner.

Description

Technical Field

[0001] The present invention relates to the field of automated microscope technology, and particularly to a high-precision microscope scanner.

Background Art

[0002] A fully automated microscope uses an advanced distributed control system and a modular embedded structure to achieve XYZ three-axis control of the stage and automatic adjustment of the brightness of the light source, and has functions such as automation of panoramic scanning by software, automation of image synthesis, automatic reset, synchronous viewing, remote operation, etc., aiming to improve work efficiency. It is an optoelectronic integrated high-tech product.

[0003] A fully automated microscope adopts a standard RS232 communication interface, and users can easily adjust the field of view, focus, and brightness of the microscope through a computer. Furthermore, functions such as automatic focusing of the control system, automatic control of XYZ three-axis movement, and automatic conversion of high and low magnifications enable sequential movement and meandering scanning of the sample, and automatic measurement and analysis of multi-viewpoint images.

[0004] Thus, since a fully automated microscope has high reliability, excellent stability, and high precision, it has become an indispensable device in an automatic analyzer for microscopic images. However, the control accuracy due to the structure of conventional automated microscopes is 1 - 2 μm, and it only corresponds to scanning with 20x or 40x dry (air) objective lenses, and cannot correspond to scanning with oil immersion objective lenses of 60x or higher. In the latter case, the control accuracy of the automated microscope structure needs to reach 0.2 μm, which has been a long-standing issue in the high-precision microscope scanner industry.

Summary of the Invention

[0005] In order to solve the drawbacks of the prior art, the present invention provides a high-precision microscope scanner with significantly improved control accuracy during scanning.

[0006] To achieve the above technical effects and solve the conventional technical problems, the present invention uses the following technical means.

[0007] A high-precision microscope scanner including a main body base, a Y-axis cross-roller sliding unit, a Y-axis sliding drive unit, an X-axis cross-roller sliding unit, an X-axis sliding drive unit, a slide holder, a lifting focus unit, a whole illumination unit, a Z-axis sliding unit, an oil-immersion lens unit, a whole camera, an upper illumination unit, a fluorescence module, and a scanning camera, The Y-axis cross-roller sliding unit is installed on the main body base via a ZY-axis shared bottom plate, the Y-axis sliding drive unit is arranged on one side of the main body base and is transmission-connected to the Y-axis cross-roller sliding unit. Both the X-axis cross-roller sliding unit and the X-axis sliding drive unit are installed on the Y-axis cross-roller sliding unit, and the X-axis sliding drive unit is transmission-connected to the X-axis cross-roller sliding unit. The slide holder and the whole illumination unit are arranged on the X-axis cross-roller sliding unit. The lifting focus unit is arranged at the central part of the main body base and is located below the slide holder. The Z-axis sliding unit is arranged on the ZY-axis shared bottom plate and is located on one side of the assembly of the Y-axis cross-roller sliding unit and the X-axis cross-roller sliding unit. The oil-immersion lens unit is arranged on the Z-axis sliding unit and is located above the slide holder. The fluorescence module is arranged above the assembly of the Y-axis cross-roller sliding unit and the X-axis cross-roller sliding unit via a gantry. The lower end of the fluorescence module is connected to the oil-immersion lens unit, and the upper end is connected to the scanning camera. Both the whole camera and the upper illumination unit are installed on the gantry and are located on one side of the fluorescence module.

[0008] Furthermore, the main body base includes a single base bottom plate, and a front support block of the base bottom plate and a rear support block of the base bottom plate are respectively arranged on both front and rear sides of the lower surface of the base bottom plate. A marble base is installed between the front support block of the base bottom plate and the rear support block of the base bottom plate, and the marble base is fixedly attached in close contact with the lower surface of the base bottom plate. Handles are respectively provided on both left and right sides of the base bottom plate, and each handle is fixedly connected to the end of the base bottom plate support block on the corresponding side. In addition, the base bottom plate is provided with a Y-axis sliding drive unit mounting hole for mounting the Y-axis sliding drive unit and a lifting focus unit mounting slot for mounting the bottom structure of the lifting focus unit.

[0009] Furthermore, the Y-axis cross roller sliding unit includes a Y-axis cross roller mounting bottom plate. On the upper surface of the Y-axis cross roller mounting bottom plate, a Y-axis slide area top plate is arranged via two sets of left and right Y-axis cross roller guides. On the outer surfaces of the two sets of Y-axis cross roller guides, one Y-axis independent adjustment screw plate is installed respectively, and the Y-axis independent adjustment screw plates are fixedly connected to the lower surfaces on both the left and right sides of the Y-axis slide area top plate respectively. Also, the adjustment screws of the two Y-axis independent adjustment screw plates face the outer surfaces of the two sets of Y-axis cross roller guides inward respectively. Furthermore, a Y-axis cross roller rear stopper plate is arranged between the two sets of Y-axis cross roller guides. The lower surface of the Y-axis cross roller rear stopper plate is fixedly connected to the upper surface of the Y-axis cross roller mounting bottom plate, but its upper surface does not contact the lower surface of the Y-axis slide area top plate. Also, the left and right side surfaces of the Y-axis cross roller rear stopper plate are fixedly connected to the inner surfaces of the corresponding side Y-axis cross roller guides respectively. At the central part of the Y-axis cross roller mounting bottom plate, a first focus lens mounting hole for mounting the lifting focus unit is provided. Furthermore, in front of the center of the upper surface of the Y-axis slide area top plate, there is an X-axis cross roller sliding unit mounting area for installing the X-axis cross roller sliding unit, and the rear part of the Y-axis slide area top plate is an X-axis sliding drive unit mounting area for mounting the X-axis sliding drive unit. The upper surface of the Y-axis slide area top plate between the X-axis cross roller sliding unit mounting area and the X-axis sliding drive unit mounting area is a Y-axis sliding drive unit connection area for transmission connection with the Y-axis sliding drive unit. Furthermore, at the central part of the Y-axis slide area top plate and the corresponding position of the Y-axis cross roller rear stopper plate, a first escape hole for the focus lens is provided to avoid the top structure of the lifting focus unit.

[0010] Furthermore, the Y-axis sliding drive unit includes a crossbar for being flexibly and fixedly connected to the Y-axis sliding drive unit connection area. Soft pads are respectively installed before and after the Y-axis sliding drive unit connection area, and the crossbar is clamped and connected to the top plate of the Y-axis slide area through the front and rear soft pads. Also, one end of the crossbar is fixedly connected to a crossbar right support block through a crossbar right support column, and the crossbar right support block is slidably connected to a Y-axis sliding right guide fixed to the ZY-axis shared bottom plate 15. The other end of the crossbar is fixedly connected to a crossbar left support column connection block through a crossbar left support column, and the crossbar left support column connection block is fixedly connected to a rack fixing plate. The rack fixing plate is slidably connected to a Y-axis sliding left guide fixed to a Y-axis motor fixing plate. The Y-axis motor fixing plate is fixedly connected to the main body base. A Y-axis motor is installed on the Y-axis motor fixing plate through a Y-axis motor mounting base, and a Y-axis gear is provided on the output shaft of the Y-axis motor. A Y-axis rack is provided on the rack fixing plate, and the Y-axis gear meshes with the Y-axis rack. A spring fixing block is provided on the rack fixing plate, and a spring for tightening the rack fixing plate is installed between the spring fixing block and the Y-axis motor fixing plate.

[0011] Furthermore, the X-axis cross-roller sliding unit 4 includes a first X-axis cross-roller mounting bottom plate. On the upper surface of the first X-axis cross-roller mounting bottom plate, a first X-axis slide area top plate is installed via two sets of front and rear first X-axis cross-roller guides. The first X-axis slide area top plate is fixedly connected to the upper surfaces of the two sets of front and rear first X-axis cross-roller guides by three fixing screws arranged in a triangle. Also, around each fixing screw, several adjusting screws are installed on the two sets of front and rear first X-axis cross-roller guides to adjust the levelness of the first X-axis slide area top plate. Between the two sets of first X-axis cross-roller guides, an X-axis cross-roller rear stopper plate is installed. The lower surface of the X-axis cross-roller rear stopper plate is fixedly connected to the upper surface of the first X-axis cross-roller mounting bottom plate. The upper surface of the X-axis cross-roller rear stopper plate does not contact the lower surface of the first X-axis slide area top plate, and both the front and rear sides of the X-axis cross-roller rear stopper plate are fixedly connected to the inner side surfaces of the two sets of front and rear first X-axis cross-roller guides respectively. Furthermore, first X-axis independent adjustment screw plates are installed on the outer side surfaces of the two sets of first X-axis cross-roller guides respectively. The two first X-axis independent adjustment screw plates are fixedly connected to both the front and rear sides of the lower surface of the first X-axis slide area top plate respectively. Note that the adjustment screws of the two first X-axis independent adjustment screw plates 5 face the outer side surfaces of the two sets of first X-axis cross-roller guides inward respectively. At the central part of the first X-axis cross-roller mounting bottom plate and the corresponding position of the X-axis cross-roller rear stopper plate, a relief hole for the second focus lens is provided to avoid the upper structure of the lifting focus unit. A vertically penetrating slide holder mounting slot is provided at the central part of the first X-axis slide area top plate, and the rear part of the first X-axis slide area top plate serves as an X-axis slide drive unit connection area for driving connection with the X-axis slide drive unit.On the upper surface of the rear stopper plate of the X-axis cross roller, there is an overall lighting unit mounting slot for fixing the overall lighting unit, and a part of the overall lighting unit is fixedly connected to the rear stopper plate of the X-axis cross roller through the overall lighting unit mounting slot. Another part of the overall lighting unit extends inside between the slide holder mounting slot and the relief hole for the second focus lens.

[0012] Furthermore, on one side of the frame of the slide holder mounting slot, an electromagnetic adsorption unit for adsorbing the slide holder is installed. The electromagnetic adsorption unit includes an electromagnet mounting base fixed to one side of the frame of the slide holder mounting slot, and at least two electromagnet coils are embedded on the upper surface of the electromagnet mounting base. The electromagnet mounting base is provided with an electromagnet connection terminal for connecting an external power source to the electromagnet coil. On the inner side surface of the electromagnet mounting base, two steel balls for contacting the side surface of the slide holder are embedded, and on the opposite side of the electromagnet mounting base, on the upper surface of the frame of the slide holder mounting slot, one steel ball for contacting the lower surface of the slide holder is embedded.

[0013] Furthermore, the X-axis sliding drive unit includes an X-axis soft pad disposed in the X-axis sliding drive unit mounting area at the rear part of the upper surface of the Y-axis slide area top plate, and an X-axis power fixing plate is installed on the X-axis soft pad. At the front part of the X-axis power fixing plate, a second X-axis cross roller mounting bottom plate is disposed. On the front and rear of the upper surface of the second X-axis cross roller mounting bottom plate, a second X-axis slide area top plate is installed via two sets of second X-axis cross roller guides. On the outer sides of the two sets of the second X-axis cross roller guides, second X-axis independent adjustment screw plates are respectively installed, and the two second X-axis independent adjustment screw plates are fixed to the front and rear sides of the lower surface of the second X-axis slide area top plate. Also, the screws of the two second X-axis independent adjustment screw plates respectively face the outer surfaces of the two sets of the second X-axis cross roller guides inward. At the rear part of the upper surface of the X-axis power fixing plate, an X-axis linear motor is installed via a pair of left and right linear motor mounting bases, and the X-axis linear motor is fixed to the rear part of the second X-axis slide area top plate via an X-axis transmission connection part. Furthermore, X-axis movement pressing blocks are respectively attached to the left and right ends of the second X-axis slide area top plate. An X-axis movement pressing block fixture is installed in the X-axis sliding drive unit connection area at the rear part of the first X-axis slide area top plate, and X-axis movement pressing block fine movement lifting guides are respectively provided on the left and right of the X-axis movement pressing block fixture. The two X-axis movement pressing blocks are connected to the X-axis movement pressing block fine movement lifting guides.

[0014] Furthermore, the slide holder includes a slide holder body, and a slide holder handle is disposed on one side of the slide holder body. In addition, at least one slide mounting hole for placing a slide is provided on the slide holder body, and the central part of each slide mounting hole has a hollow structure. On the frame of each slide mounting hole, a slide end stopper, a slide inner support block, and a slide outer plate spring-type composite pressing block structure are provided, and the slide inner support block and the slide outer plate spring-type composite pressing block structure are arranged at opposite positions. Furthermore, on the frame of each slide mounting hole, a slide bottom support protrusion and two adjustment screw holes are provided, and slide adjustment screws are inserted into these two adjustment screw holes. The slide bottom support protrusion and the two slide adjustment screws are structured to support the slide at three points in an inverted triangular arrangement.

[0015] Furthermore, the lifting focus unit includes a T-shaped frame, a condenser lens lifting motor is provided at the rear part of the upper end surface of the T-shaped frame, and a ball screw is arranged at the front part of the upper end surface. A driving pulley is installed on the shaft of the condenser lens lifting motor, a driven pulley is attached to the upper end of the ball screw, and a timing belt is mounted between the driving pulley and the driven pulley. In addition, a ball screw auxiliary guide is provided on the front surface of the vertical plate of the T-shaped frame, and the nut of the ball screw is fixedly coupled to the slider of the ball screw auxiliary guide. Furthermore, a condenser lens support plate is provided on the nut of the ball screw via a condenser lens lifting block. An intermediate condenser lens adjustment plate is attached to the condenser lens support plate, and a condenser lens adjustment upper plate is further arranged thereon. A condenser lens is installed on the condenser lens adjustment upper plate via a condenser lens connecting pipe. A small photoelectric switch for limiting the condenser lens is attached to the side surface of the vertical plate of the T-shaped frame, and a condenser lens limiter that senses the photoelectric switch is installed on the nut of the ball screw. In addition, a lower illumination unit is arranged at the lower part of the condenser lens support plate, and the lower illumination unit is fixedly connected to the ZY-axis common bottom plate.

[0016] Furthermore, the Z-axis sliding unit includes a Z-axis support column fixed to the common bottom plate of the ZY axes. The Z-axis support column is arranged on one side of the assembly of the Y-axis cross-roller sliding unit and the X-axis cross-roller sliding unit. A Z-axis ball screw is arranged on the inner surface of the Z-axis support column via a pair of upper and lower bearing blocks, and a Z-axis guide is attached to the inner surface of the Z-axis support column in parallel with the Z-axis ball screw. Also, a Z-axis driving motor is installed at the upper part of the Z-axis support column, and the shaft of the Z-axis driving motor is connected to the upper end of the Z-axis ball screw. A Z-axis lifting plate is attached to the nut of the Z-axis ball screw, and the Z-axis lifting plate is fixedly coupled to the slider of the Z-axis guide. Furthermore, a Z-axis support column is provided on the Z-axis lifting plate, and a Z-axis arm is attached to the side surface of the Z-axis support column via two sets of Z-axis cross-roller guides. Also, a piezoelectric ceramic stack moving device suspension is arranged at the upper part of the Z-axis support column, and a pen-type piezoelectric ceramic stack moving device is connected between the piezoelectric ceramic stack moving device suspension and the Z-axis arm. An attachment hole for an oil-immersion lens is formed in the Z-axis arm, and an oil-immersion lens adjustment plate is attached to the attachment hole for the oil-immersion lens. The oil-immersion lens adjustment plate is fixed to the Z-axis arm by three locking bolts arranged in a triangle, and an adjustment screw for finely adjusting the levelness of the oil-immersion lens adjustment plate is provided on one side of each locking bolt.

[0017] Furthermore, the oil-immersion lens unit includes an objective lens, an elastic dropping nozzle, and a dropping nozzle fixing block. The objective lens is attached to the oil-immersion lens attachment hole of the Z-axis arm and fixed to the oil-immersion lens adjustment plate. The dropping nozzle fixing block is fixed to the lower surface of the Z-axis arm, the elastic dropping nozzle is attached to the dropping nozzle fixing block, fixed to the side wall of the objective lens by the pressing plate of the dropping oil pipe, and the oil outlet is arranged at a position facing the lens part of the objective lens.

[0018] The beneficial effects of the present invention are as follows. In the present invention, through the new structural design and installation method of the X and Y cross-roller sliders, the random vibration in the Z direction can be controllably reduced to within 0.2 μm. Also, due to the driving of the X and Y axes by non-rigid direct connection, the instability of a part of the moving axes is not transmitted to the X and Y movement areas. Furthermore, with the base structure and fixing method that enable the lens to be adjusted in the vertical direction, the occurrence of bias during the high-speed up and down movement of the Z axis is prevented, and the Z-axis grating ruler can effectively correct the instability of the Z-axis structure through the feedback from the Y movement base. Additionally, with the three-point support slide holder, the levelness of the slide within the slide holder can be easily adjusted, and by adsorbing and fixing the slide holder with three-point support electromagnets, the load on the slide holder during movement in the X and Y directions is minimized. Considering the above advantages comprehensively, the present invention can significantly improve the scanning accuracy of the microscope scanner. The above description is only a general outline of the technical means of the present invention. In order to more clearly understand the technical means of the present invention and be able to implement it according to this specification, the following will be described in detail using better embodiments and drawings of the present invention. The specific implementation methods of the present invention are shown in detail in the following embodiments and drawings.

Brief Description of the Drawings

[0019] The drawings shown below are for a deeper understanding of the present invention and form a part of this application. The schematic embodiments and their descriptions of this application do not constitute inappropriate restrictions on the present invention. The following are the drawings.

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Figure 16

Figure 17

Figure 18

Figure 19

Figure 20

Figure 21

Figure 22

Figure 23

Figure 24

Figure 25

Figure 26

Figure 27

Figure 28

Embodiments for Carrying Out the Invention

[0020] Hereinafter, with reference to the drawings, the present invention will be described in detail based on embodiments. The following description is for a deeper understanding of the present invention and constitutes a part of this application. The schematic embodiments and their descriptions of this application do not constitute inappropriate restrictions on the present invention.

[0021] As shown in FIGS. 1 and 2, it is a high-precision microscope scanner including a main body base 1, a Y-axis cross roller sliding unit 2, a Y-axis sliding drive unit 3, an X-axis cross roller sliding unit 4, an X-axis sliding drive unit 5, a slide holder 6, a lifting focus unit 7, a whole illumination unit 8, a Z-axis sliding unit 9, an oil immersion lens unit 10, a whole camera 11, an upper illumination unit 12, a fluorescence module 13, and a scanning camera 14.

[0022] The Y-axis cross roller sliding unit 2 is installed on the main body base 1 via a ZY-axis shared bottom plate 15. The Y-axis slide drive unit 3 is arranged on one side of the main body base 1 and is in transmission connection with the Y-axis cross roller sliding unit 2. Both the X-axis cross roller sliding unit 4 and the X-axis slide drive unit 5 are installed on the Y-axis cross roller sliding unit 2, and the X-axis slide drive unit 5 is in transmission connection with the X-axis cross roller sliding unit 4. The slide holder 6 and the whole illumination unit 8 are arranged on the X-axis cross roller sliding unit 4. The lifting focus unit 7 is arranged at the central part of the main body base 1 and is located below the slide holder 6. The Z-axis sliding unit 9 is arranged on the ZY-axis shared bottom plate 15 and is located on one side of the assembly of the Y-axis cross roller sliding unit 2 and the X-axis cross roller sliding unit 4. The oil immersion lens unit 10 is arranged on the Z-axis sliding unit 9 and is located above the slide holder 6. The fluorescence module 13 is arranged above the assembly of the Y-axis cross roller sliding unit 2 and the X-axis cross roller sliding unit 4 via a gantry 16. The lower end of the fluorescence module 13 is connected to the oil immersion lens unit 10, and the upper end is connected to the scanning camera 14. Both the whole camera 11 and the upper illumination unit 12 are installed on the gantry 16 and are located on one side of the fluorescence module 13.

[0023] As an embodiment of the present invention, as shown in FIGS. 3 and 4, the main body base 1 includes a single base bottom plate 101, and a base bottom plate front support block 102 and a base bottom plate rear support block 103 are respectively arranged on both front and rear sides of the lower surface of the base bottom plate 101. A marble base 104 is installed between the base bottom plate front support block 102 and the base bottom plate rear support block 103, and the marble base 104 is fixedly attached in close contact with the lower surface of the base bottom plate 101. Handles 105 are respectively provided on both left and right sides of the base bottom plate 101, and each handle 105 is fixedly connected to the end of the base bottom plate support block on the corresponding side. Further, the base bottom plate 101 is provided with a Y-axis slide drive unit mounting hole 106 for mounting the Y-axis slide drive unit 3 and a lift focus unit mounting slot 107 for mounting the bottom structure of the lift focus unit 7.

[0024] As an embodiment of the present invention, as shown in FIGS. 5 and 6, the Y-axis cross roller sliding unit 2 includes a Y-axis cross roller mounting base plate 201 fixed to the ZY-axis shared base plate 15. On the upper surface of the Y-axis cross roller mounting base plate 201, a Y-axis slide area top plate 203 is arranged via two sets of left and right Y-axis cross roller guides 202. On the outer surfaces of the two sets of Y-axis cross roller guides 202, one Y-axis independent adjustment screw plate 204 is installed respectively, and the Y-axis independent adjustment screw plates 204 are fixedly connected to the lower surfaces on the left and right sides of the Y-axis slide area top plate 203 respectively. Also, the adjustment screws of the two Y-axis independent adjustment screw plates 204 face the outer surfaces of the two sets of Y-axis cross roller guides 202 inward respectively. Further, a Y-axis cross roller rear stopper plate 213 is arranged between the two sets of Y-axis cross roller guides 202. The lower surface of the Y-axis cross roller rear stopper plate 213 is fixedly connected to the upper surface of the Y-axis cross roller mounting base plate 201, but its upper surface does not contact the lower surface of the Y-axis slide area top plate 203. Also, the left and right side surfaces of the Y-axis cross roller rear stopper plate 213 are fixedly connected to the inner surfaces of the corresponding side Y-axis cross roller guides 202 respectively. With this structure, the parallelism in the space of the two sets of Y-axis cross roller guides 202 is optimized and can withstand a large load.

[0025] At the center of the Y-axis cross roller mounting bottom plate 201, a first focus lens mounting hole 205 for mounting the lifting focus unit 7 is provided. Further, in front of the center of the upper surface of the Y-axis slide area top plate 203, there is an X-axis cross roller sliding unit mounting area for installing the X-axis cross roller sliding unit 4, and the rear part of the Y-axis slide area top plate 203 is an X-axis sliding drive unit mounting area for mounting the X-axis sliding drive unit 5. The upper surface of the Y-axis slide area top plate 203 between the X-axis cross roller sliding unit mounting area and the X-axis sliding drive unit mounting area is a Y-axis sliding drive unit connection area for transmitting and connecting with the Y-axis sliding drive unit 3. Further, at the center of the Y-axis slide area top plate 203 and the corresponding position of the Y-axis cross roller rear stopper plate 213, a first escape hole 206 for the focus lens is provided to avoid the top structure of the lifting focus unit 7.

[0026] As a more preferred embodiment, as shown in FIG. 6, on one side of the Y-axis cross roller sliding unit 2, a Y-axis sliding limiting mechanism for limiting the sliding position of the Y-axis slide area top plate 203 in the Y direction is installed. The Y-axis sliding limiting mechanism includes a Y-axis photocoupler limiting plate 207 and a Y-axis optical limiter 208 for triggering the photocouplers at both front and rear ends of the Y-axis photocoupler limiting plate 207. The Y-axis photocoupler limiting plate 207 is installed on the ZY-axis shared bottom plate 15, the Y-axis optical limiter 208 is installed on the left or right end face of the Y-axis slide area top plate 203, and the positions of the Y-axis optical limiter 208 and the Y-axis photocoupler limiting plate 207 correspond vertically.

[0027] As a more preferred embodiment, as shown in FIGS. 5 and 7, on the other side of the Y-axis cross roller sliding unit 2, a Y-axis sliding grating mechanism for sensing the sliding distance of the Y-axis slide area top plate 203 in the Y direction is installed. The Y-axis sliding grating mechanism includes a Y-axis grating ruler 209, a Y-axis grating ruler reading head 210, a Y-axis grating ruler reading head base 211, and a Y-axis zero position magnet 212. The Y-axis grating ruler reading head 210 is installed on the ZY-axis shared bottom plate 15 via the Y-axis grating ruler reading head base 211. The Y-axis grating ruler 209 is installed on the left or right end face of the Y-axis slide area top plate 203. The Y-axis grating ruler 209 and the Y-axis grating ruler reading head 210 correspond to each other in the left and right positions. The Y-axis zero position magnet 212 is located below the Y-axis grating ruler 209 and is fixedly connected to the side end face of the Y-axis slide area top plate 203.

[0028] As an embodiment of the present invention, as shown in FIGS. 8 and 9, the Y-axis sliding drive unit 3 includes a cross bar 301 for being flexibly and fixedly connected to the Y-axis sliding drive unit connection area.

[0029] The right end of the cross bar 301 is fixedly connected to a cross bar right support block 303 via a cross bar right support column 302. The cross bar right support block 303 is slidably connected to a Y-axis sliding right guide 304 fixed to the ZY-axis shared bottom plate 15.

[0030] The left end of the crossbar 301 is fixedly connected to the crossbar left support connection block 306 via the crossbar left support 305, and the crossbar left support connection block 306 is fixedly connected to the rack fixing plate 307. The rack fixing plate 307 is slidably connected to the Y-axis sliding left guide 314 fixed to the Y-axis motor fixing plate 308. The Y-axis motor fixing plate 308 is located in the Y-axis sliding drive unit mounting hole 106 on the base bottom plate 101, and the height of the position of the Y-axis motor fixing plate 308 is lower than the height of the position of the base bottom plate 101. The Y-axis motor fixing plate 308 is fixedly connected to the lower surface of the base bottom plate 101. A Y-axis motor 310 is installed on the Y-axis motor fixing plate 308 via a Y-axis motor mounting base 309, and a Y-axis gear 311 is provided on the output shaft of the Y-axis motor 310. A Y-axis rack 312 is provided on the rack fixing plate 307, and the Y-axis gear 311 meshes with the Y-axis rack 312. A spring fixing block 313 is provided on the rack fixing plate 307, and a spring (not shown) for tightening the rack fixing plate 307 is installed between the spring fixing block 313 and the Y-axis motor fixing plate 308.

[0031] As shown in FIG. 10, the crossbar 301 is clamped and connected to the top plate 203 of the Y-axis slide area via the front and rear soft pads 316, whereby the Y-axis sliding drive unit 3 drives the Y-axis cross roller sliding unit 2 to slide. The specific process is as follows. The Y-axis electric motor 310 rotates the Y-axis gear 311 forward or backward, thereby sliding the Y-axis rack 312 engaged with it back and forth on the Y-axis slide left guide 314. The Y-axis rack 312 functions as a power source and moves the crossbar 301 back and forth in the Y-axis direction via the gear fixing plate 307, the crossbar left strut connection block 306, and the crossbar left strut 305. At the same time, the crossbar right strut 302 and the crossbar right strut support block 303 assist in synchronously sliding the crossbar 301 back and forth on the Y-axis slide right guide 304. Due to the transmission of the crossbar 301, the top plate 203 of the Y-axis slide area reciprocally slides along the two sets of Y-axis cross roller guides 202 on the Y-axis cross roller mounting bottom plate 201, thereby enabling the X-axis cross roller sliding unit 4 and the X-axis sliding drive unit 5 located on the Y-axis cross roller sliding unit 2 to move in the Y-axis direction. Also, through the cooperation with the Y-axis sliding limit mechanism and the Y-axis sliding grating mechanism, the slide holder 6 is realized to move stably and accurately in the Y-axis direction.

[0032] The Y-axis cross roller sliding unit 2 is driven by the Y-axis electric motor 310, the Y-axis gear 311, and the Y-axis rack 312, and is transmitted by the gantry structure composed of the crossbar 301, the crossbar left strut 305, and the crossbar right strut 302. The crossbar 301 straddles the upper surface of the top plate 203 of the Y-axis slide area and is clamped and connected to the top plate 203 of the Y-axis slide area via the soft pad 316. When the Y-axis sliding drive unit 3 drives the Y-axis cross roller sliding unit 2, the crossbar 301 is not in a rigid connection with the top plate 203 of the Y-axis slide area, and the torsional force applied therebetween is difficult to transmit. Moreover, since the rack fixing plate is tightened by a spring (not shown) on one side, backlash is eliminated.

[0033] As an embodiment of the present invention, as shown in FIGS. 11 and 12, the X-axis cross roller sliding unit 4 includes a first X-axis cross roller mounting bottom plate 401 fixed to the X-axis cross roller sliding unit mounting area of the Y-axis slide area top plate 203. On the upper surface of the first X-axis cross roller mounting bottom plate 401, a first X-axis slide area top plate 403 is installed via two sets of front and rear first X-axis cross roller guides 402. The first X-axis slide area top plate 403 is fixedly connected to the upper surfaces of the two sets of front and rear first X-axis cross roller guides 402 by three fixing screws arranged in a triangle. Also, several adjusting screws are installed around each fixing screw. In this way, the first X-axis slide area top plate 403 is supported on the two sets of front and rear first X-axis cross roller guides 402 by the adjusting screws around the fixing screws. Two fixing screws are set on one set of the first X-axis cross roller guides 402, and one fixing screw is set on the other set of the first X-axis cross roller guides 402. By utilizing the principle that three points determine a plane and adjusting the adjusting screws around the three fixing screws, the first X-axis slide area top plate 403 can be quickly adjusted horizontally on the two sets of front and rear first X-axis cross roller guides 402. Finally, by tightening the three fixing screws, the first X-axis slide area top plate 403 is fixed to the two sets of front and rear first X-axis cross roller guides 402. With this structure and mounting method, the first X-axis cross roller guide 402 is placed in a state where no force is applied in the Z direction, eliminating the deviation of the levelness of the first X-axis slide area top plate 403 due to the deformation of the first X-axis cross roller guide 402, and it is suitable for small loads.

[0034] Between two sets of first X-axis cross roller guides 402, an X-axis cross roller rear stopper plate 404 is installed. The lower surface of the X-axis cross roller rear stopper plate 404 is fixedly connected to the upper surface of the first X-axis cross roller mounting bottom plate 401. The upper surface of the X-axis cross roller rear stopper plate 404 does not contact the lower surface of the first X-axis slide area top plate 403. The front and rear sides of the X-axis cross roller rear stopper plate 404 are respectively fixedly connected to the inner surfaces of the front and rear two sets of the first X-axis cross roller guides 402. Furthermore, first X-axis independent adjustment screw plates 405 are respectively installed on the outer surfaces of the two sets of the first X-axis cross roller guides 402. The two first X-axis independent adjustment screw plates 405 are respectively fixedly connected to the front and rear sides of the lower surface of the first X-axis slide area top plate 403. It should be noted that the adjustment screws of the two first X-axis independent adjustment screw plates 405 respectively face the outer surfaces of the two sets of the first X-axis cross roller guides 402 inward.

[0035] At the central part of the first X-axis cross roller mounting bottom plate 401 and the corresponding position of the X-axis cross roller rear stopper plate 404, a second focus lens escape hole 406 is provided to avoid the top structure of the lifting focus unit 7. A vertically penetrating slide holder mounting slot 407 is provided at the central part of the first X-axis slide area top plate 403. The rear part of the first X-axis slide area top plate 403 is an X-axis slide drive unit connection area for driving connection with the X-axis slide drive unit 5. An overall lighting unit mounting slot 408 for fixing the overall lighting unit 8 is provided on the upper surface of the X-axis cross roller rear stopper plate 404. A part of the overall lighting unit 8 is fixedly connected to the X-axis cross roller rear stopper plate 404 through the overall lighting unit mounting slot 408. Another part of the overall lighting unit 8 extends internally between the slide holder mounting slot 407 and the second focus lens escape hole 406.

[0036] As a more preferred embodiment, as shown in FIGS. 11 to 13, an electromagnetic adsorption unit 409 for adsorbing the slide holder 6 is installed on one side of the frame of the slide holder mounting slot 407. The electromagnetic adsorption unit 409 includes an electromagnet mounting base 4091 fixed to one side of the frame of the slide holder mounting slot 407. At least two electromagnet coils 4092 are embedded in the upper surface of the electromagnet mounting base 4091. The electromagnet mounting base 4091 is provided with an electromagnet connection terminal 4093 for connecting an external power source to the electromagnet coil 4092. Two steel balls 4094 for contacting the side surface of the slide holder 6 are embedded in the inner side surface of the electromagnet mounting base 4091, and one steel ball 4094 for contacting the lower surface of the slide holder 6 is embedded on the opposite side of the electromagnet mounting base 4091 and on the upper surface of the frame of the slide holder mounting slot 407. With this structure, the slide holder 6 is installed in the slide holder mounting slot 407 in a three-point support manner, and two of the support points are located on the electromagnet mounting base 4091. These two fulcrums are magnetic force output points, and after energization, the iron slide holder 6 is firmly fixed at the three fulcrums. Thereby, the force received when the slide holder 6 moves in the X and Y directions is minimized.

[0037] As a more preferred embodiment, as shown in FIG. 12, on one side of the X-axis cross roller sliding unit 4, an X-axis sliding grating mechanism for sensing the sliding distance in the X direction of the top plate 403 of the first X-axis slide area is installed. The X-axis sliding grating mechanism includes an X-axis grating ruler 514, an X-axis grating ruler reading head 515, an X-axis grating ruler reading head base 516, and an X-axis zero position magnet (not shown). Here, the X-axis grating ruler reading head 515 is installed on the first X-axis cross roller mounting bottom plate 401 via the X-axis grating ruler reading head base 516, the X-axis grating ruler 514 is installed on the front or rear end face of the top plate 403 of the first X-axis slide area, and the X-axis grating ruler 514 corresponds to the position of the X-axis grating ruler reading head 515 front and back. The X-axis zero position magnet (not shown) is located below the X-axis grating ruler 514 and is fixedly connected to the side end face of the top plate 403 of the first X-axis slide area.

[0038] As an embodiment of the present invention, as shown in FIGS. 14 and 15, the X-axis sliding drive unit 5 includes an X-axis soft pad 501 disposed in the X-axis sliding drive unit mounting area at the rear part of the upper surface of the top plate 203 of the Y-axis slide area, and an X-axis power fixing plate 502 is installed on the X-axis soft pad 501.

[0039] At the front of the X-axis power fixing plate 502, a second X-axis cross roller mounting bottom plate 503 is arranged. On the front and rear of the upper surface of the second X-axis cross roller mounting bottom plate 503, a second X-axis slide area top plate 506 is installed via two sets of second X-axis cross roller guides 504. On the outside of the two sets of the second X-axis cross roller guides 504, second X-axis independent adjustment screw plates 505 are respectively installed, and the two second X-axis independent adjustment screw plates 505 are fixed to the front and rear sides of the lower surface of the second X-axis slide area top plate 506. Also, the screws of the two second X-axis independent adjustment screw plates 505 respectively face the outer surfaces of the two sets of the second X-axis cross roller guides 504 inward.

[0040] At the rear of the upper surface of the X-axis power fixing plate 502, an X-axis linear motor 508 is installed via a pair of left and right linear motor mounting bases 507, and the X-axis linear motor 508 is fixed to the rear of the second X-axis slide area top plate 506 via an X-axis transmission connection part 509. Further, X-axis movement pressing blocks 510 are respectively attached to the left and right ends of the second X-axis slide area top plate 506.

[0041] As a more preferred embodiment, as shown in FIG. 15, at the rear side of the X-axis sliding drive unit 5, an X-axis sliding limiting mechanism for limiting the movement range of the second X-axis slide area top plate 506 in the X direction is installed. The X-axis sliding limiting mechanism includes an X-axis photocoupler limiting plate 512 and an X-axis optical limiter 513 for triggering the photocouplers at both the front and rear ends of the X-axis photocoupler limiting plate 512. The X-axis photocoupler limiting plate 512 is installed on the X-axis power fixing plate 502, the X-axis optical limiter 513 is attached to the rear end surface of the second X-axis slide area top plate 506, and the positions of the X-axis optical limiter 513 and the X-axis photocoupler limiting plate 512 correspond vertically.

[0042] As shown in FIG. 16, an X-axis movement pressing block fixture 511 is installed in the X-axis sliding drive unit connection area at the rear of the top plate 403 of the first X-axis slide area. On the left and right sides of the X-axis movement pressing block fixture 511, X-axis movement pressing block fine elevation and depression guides 517 are respectively provided. The two X-axis movement pressing blocks 510 drive the X-axis cross roller sliding unit 4 to slide by connecting with the X-axis movement pressing block fine elevation and depression guides 517. The specific process is as follows. The X-axis linear motor 508 slides the top plate 506 of the second X-axis slide area left and right along two sets of second X-axis cross roller guides 504 on the bottom plate 503 for mounting the second X-axis cross roller via the X-axis movement connection part 509. A pair of ox-horn-shaped X-axis movement pressing blocks 510 on the top plate 506 of the second X-axis slide area sandwich both ends of the X-axis movement pressing block fixture 511 on the top plate 506 of the second X-axis slide area, and slide the top plate 403 of the first X-axis slide area left and right along two sets of first X-axis cross roller guides 402 on the bottom plate 401 for mounting the first X-axis cross roller. Also, through the cooperation with the X-axis sliding limiting mechanism and the X-axis sliding grating mechanism, it is realized that the slide holder 6 moves stably and accurately in the X-axis direction.

[0043] The X-axis cross roller sliding unit 4 is driven by the X-axis linear motor 508. The top plate 506 of the second X-axis slide area of the X-axis cross roller sliding unit 4 is mounted on two independent second X-axis cross roller guides 504, and is designed to suppress the vibration during the movement of the mover of the X-axis linear motor 508. Also, due to the X-axis movement pressing block fine elevation and depression guides 517 arranged at both ends of the X-axis movement pressing block fixture 511, a slidable rigid connection is formed between the X-axis movement pressing block 510 and the X-axis movement pressing block fixture 511, so that the vibration transmitted to the X-axis cross roller sliding unit 4 by the operation of the X-axis sliding drive unit 5 can be minimized.

[0044] As an embodiment of the present invention, as shown in FIGS. 17 to 19, the slide holder 6 includes a slide holder main body 601, and a slide holder handle 602 is disposed on one side of the slide holder main body 601. Further, at least one slide mounting hole 604 for mounting the slide 603 is provided on the slide holder main body 601, and the central portion of each slide mounting hole 604 has a hollow structure. On the frame of each slide mounting hole 604, a slide end stopper 605, a slide inner support block 606, and a slide outer plate spring-type composite pressing block structure 607 are provided, and the slide inner support block 606 and the slide outer plate spring-type composite pressing block structure 607 are disposed at opposite positions. Furthermore, a slide bottom support protrusion 608 and two adjustment screw holes 609 are provided on the frame of each slide mounting hole 604, and a slide adjustment screw (not shown) is inserted into these two adjustment screw holes 609. The slide bottom support protrusion 608 and the two slide adjustment screws are structured to support the slide 603 at three points in an inverted triangle arrangement. With this structure, the slide 603 is placed on the slide mounting hole 604 with three-point support. The tail portion of the slide 603 uses the slide bottom support protrusion 608 as one fulcrum, and the head portion uses the two slide adjustment screws as fulcrums, and can be horizontally adjusted on the slide holder main body 601.

[0045] As a more preferred embodiment, as shown in FIG. 19, the slide outer plate spring type composite pressing block structure 607 is composed of a leaf spring fixing base 6071, a leaf spring 6072, a pressing head 6073, and a pressing head operating part 6074. The leaf spring fixing base 6071 is fixed to one end of the slide mounting hole 604 on one side, and the front end of the leaf spring 6072 is fixed to the front end of the inner surface of the leaf spring fixing base 6071. Further, the pressing head 6073 is fixed to the inner surface of the rear part of the leaf spring 6072, and the pressing head operating part 6074 is attached to the outer surface of the pressing head 6073. On the inner surface of the pressing head 6073, a horizontally pressing contact head 6075 having an inverted triangle shape is provided. The slide inner support block 606 is fixed to the front end of the other end of the slide mounting hole 604 and is arranged at a position facing the pressing head 6073. Also, on the slide 603 contact surface side of the slide inner support block 606, an inverted triangle support contact head 6061 is arranged. When mounting the slide 603, the pressing head operating part 6074 is rotated to move the pressing head 6073 outward to open the slide mounting hole 604. Next, the slide 603 is placed on the slide mounting hole 604, and positioning in the X and Y directions is performed by the slide end stopper 605 and the slide inner support block 606. Finally, when the pressing head operating part 6074 is released, the pressing head 6073 returns to its original position due to the restoring force of the leaf spring 6072, and the slide 603 is clamped by the slide inner support block 606 and the pressing head 6073. At this time, the inverted triangle horizontally pressing contact head 6075 and the support contact head 6061 apply a downward pressure to the slide 603, so that the slide 603 is placed in a stable position of three-point support composed of the slide bottom support protrusion 608 and two slide adjustment screws.

[0046] As an embodiment of the present invention, as shown in FIGS. 20 and 21, the elevating focus unit 7 includes a T-shaped frame 701. A condenser lens elevating motor 702 is provided at the rear part of the upper end surface of the T-shaped frame 701, and a ball screw 703 is arranged at the front part of the upper end surface. A driving pulley 704 is installed on the shaft of the condenser lens elevating motor 702. A driven pulley 705 is attached to the upper end of the ball screw 703, and a timing belt (not shown) is mounted between the driving pulley 704 and the driven pulley 705. Further, a ball screw auxiliary guide 706 is provided on the front surface of the vertical plate of the T-shaped frame 701, and the nut of the ball screw 703 is fixedly coupled to the slider of the ball screw auxiliary guide 706. Furthermore, a condenser lens support plate 708 is provided on the nut of the ball screw 703 via a condenser lens elevating block 707. A condenser lens adjustment intermediate plate 709 is attached to the condenser lens support plate 708, and a condenser lens adjustment upper plate 710 is further arranged thereon. A condenser lens 712 is installed on the condenser lens adjustment upper plate 710 via a condenser lens connecting pipe 711. A small photoelectric switch 713 for limiting the condenser lens is attached to the side surface of the vertical plate of the T-shaped frame 701, and a condenser lens limiter 714 that is sensitive to the photoelectric switch 713 is installed on the nut of the ball screw 703. Also, a lower illumination unit 715 is arranged at the lower part of the condenser lens support plate 708, and the lower illumination unit 715 is fixedly connected to the ZY-axis common bottom plate 15.

[0047] As shown in FIG. 8, a second focus lens mounting hole 315 for mounting the lifting focus unit 7 is formed in the ZY-axis common bottom plate 15. When the lifting focus unit 7 is mounted on the main body base 1, the lower part of the lifting focus unit 7 penetrates through the first focus lens mounting hole 205 located at the center of the Y-axis cross roller mounting bottom plate 201 and the second focus lens mounting hole 315 on the ZY-axis common bottom plate 15, and is fixed to the lifting focus unit mounting slot 107 of the base bottom plate 101. Also, the upper part of the lifting focus unit 7 passes through the first focus lens relief hole 206 at the center of the Y-axis slide area top plate 203, reaches the second focus lens relief hole 406 at the center of the first X-axis cross roller mounting bottom plate 401, and finally faces the slide holder 6 arranged on the slide holder mounting slot 407 at the center of the first X-axis slide area top plate 403. The lifting operation of the condenser lens 712 is performed as follows. First, the condenser lens lifting motor 702 rotates the drive pulley 704, and the driven pulley 705 rotates via a timing belt (not shown), whereby the nut on the ball screw 703 moves up and down. Along with this movement, the condenser lens lifting block 707 moves up and down along the ball screw auxiliary guide 706, and the condenser lens lifting block 707 moves the condenser lens 712 up and down via the condenser lens support plate 708, the condenser lens adjustment intermediate plate 709, the condenser lens adjustment upper plate 710, and the condenser lens connection pipe 711. Also, in cooperation with the condenser lens limit small photoelectric switch 713 and the condenser lens limiter 714, the position of the condenser lens 712 is precisely controlled.

[0048] As an embodiment of the present invention, as shown in FIGS. 22 and 23, the Z-axis sliding unit 9 includes a Z-axis support column 901 fixed to the ZY-axis common bottom plate 15, and the Z-axis support column 901 is disposed on one side of the assembly of the Y-axis cross roller sliding unit 2 and the X-axis cross roller sliding unit 4. A Z-axis ball screw 902 is disposed on the inner surface of the Z-axis support column 901 via a pair of upper and lower bearing blocks, and a Z-axis guide 903 is attached to the inner surface of the Z-axis support column 901 in parallel with the Z-axis ball screw 902. Further, a Z-axis driving motor 904 is installed at the upper part of the Z-axis support column 901, and the shaft of the Z-axis driving motor 904 is connected to the upper end of the Z-axis ball screw 902. A Z-axis lifting plate 905 is attached to the nut of the Z-axis ball screw 902, and the Z-axis lifting plate 905 is fixedly coupled to the slider of the Z-axis guide 903. Furthermore, a Z-axis support column 906 is provided on the Z-axis lifting plate 905, and a Z-axis arm 909 is attached to the side surface of the Z-axis support column 906 via two sets of Z-axis cross roller guides 908. Also, a piezoelectric ceramic stack moving device suspension bracket 912 is disposed at the upper part of the Z-axis support column 906, and a pen-type piezoelectric ceramic stack moving device 913 is connected between the piezoelectric ceramic stack moving device suspension bracket 912 and the Z-axis arm 909. An attachment hole for an oil immersion lens is formed in the Z-axis arm 909, and an oil immersion lens adjustment plate 907 is attached to the attachment hole for the oil immersion lens. The oil immersion lens adjustment plate 907 is fixed to the Z-axis arm 909 by three lock bolts arranged in a triangle, and an adjustment screw for finely adjusting the levelness of the oil immersion lens adjustment plate 907 is provided on one side of each lock bolt.

[0049] As a more preferred embodiment, a ball screw adapter is provided on the main body of the Z-axis ball screw 902, and the ball screw adapter is fixed to the Z-axis support column 901. Also, an upper limit limit block for the Z-axis ball screw, which comes into contact with and controls the ball screw adapter, is provided at the upper part of the Z-axis lifting plate 905.

[0050] As a more preferred embodiment, a Z-axis sliding limiting mechanism for limiting the sliding position of the Z-axis lifting plate 905 in the Z direction is installed on one side of the Z-axis sliding unit 9. The Z-axis sliding limiting mechanism includes a Z-axis photocoupler limiting plate 914 and a Z-axis optical limiter 915 for triggering the photocouplers at both front and rear ends of the Z-axis photocoupler limiting plate 914. The Z-axis photocoupler limiting plate 914 is installed on the Z-axis support column 901, the Z-axis optical limiter 915 is attached to the Z-axis lifting plate 905, and the Z-axis optical limiter 915 and the Z-axis photocoupler limiting plate 914 are aligned front and back.

[0051] As a more preferred embodiment, a Z-axis sliding grating mechanism for detecting the Z-direction movement distance of the Z-axis arm 909 is installed on the other side of the Z-axis sliding unit 9. The Z-axis sliding grating mechanism includes a Z-axis grating ruler 911, a Z-axis grating ruler reading head 916, a Z-axis grating ruler reading head base 917, and a Z-axis zero position magnet (not shown). The Z-axis grating ruler reading head 916 is attached to the Z-axis support column 906 via the Z-axis grating ruler reading head base 917, and the Z-axis grating ruler reading head base 917 is fixedly connected to the ZY-axis common bottom plate 15. The Z-axis grating ruler 911 is attached to the Z-axis arm 909, and the Z-axis grating ruler 911 and the Z-axis grating ruler reading head 916 are arranged at corresponding left and right positions. Also, the Z-axis zero position magnet is located on the left side of the Z-axis grating ruler 911 and is fixed to the side end face of the Z-axis arm 909.

[0052] As a more preferred embodiment, the pen-type piezoelectric ceramic stack moving device includes a pressure-resistant cylinder, a piezoelectric ceramic stack, an upper cap, a lower nut, a load nut, a load nut adapter, and a disc spring. The pressure-resistant cylinder is straight tubular, the piezoelectric ceramic stack is rod-shaped with a variable length and is disposed within the pressure-resistant cylinder. The upper cap is attached to the upper end of the pressure-resistant cylinder, and its inner surface is fixed to the upper part of the piezoelectric ceramic stack. The lower nut is attached to the lower end of the pressure-resistant cylinder, and the load nut is disposed within the lower nut in a telescopic manner. The output end of the load nut is located outside the pressure-resistant cylinder, and the input end is located inside the pressure-resistant cylinder. The load nut adapter and the disc spring are disposed within the pressure-resistant cylinder. The upper end of the load nut adapter is fixed to the bottom of the piezoelectric ceramic stack, and the lower end of the load nut adapter is fixedly coupled to the input end of the load nut. The upper end of the disc spring contacts the lower end of the load nut adapter, and the lower end contacts the inner wall bottom surface of the lower nut.

[0053] The Z-axis sliding unit 9 controls the vertical movement of the microscope lens, and its specific operation is as follows. The Z-axis driving motor 904 moves the Z-axis lifting plate 905 up and down on the Z-axis support 901 along the Z-axis guide 903 via the Z-axis ball screw 902. The Z-axis lifting plate 905 moves the Z-axis arm 909 up and down with a large coarse adjustment via the Z-axis support 906. On the other hand, the pen-type piezoelectric ceramic stack moving device 913 moves the Z-axis arm 909 up and down with a fine adjustment along the Z-axis cross roller guide 908 on the Z-axis support 906, and in cooperation with the Z-axis sliding limiting mechanism and the Z-axis sliding grating mechanism, precise movement of the lens in the Z-axis direction is realized.

[0054] The Z-axis sliding unit 9 has a two-stage structure of coarse adjustment and fine adjustment. The coarse adjustment stage is driven by a high-rigidity Z-axis crossed roller guide 908 and a Z-axis ball screw 902, with a stroke of 30 mm to undertake large-step movement. The fine adjustment stage is driven by a pen-type piezoelectric ceramic stack moving device 913, with a stroke of 100 μm to perform small-step movement of the lens.

[0055] Also, the Z-axis sliding unit 9 is also used for the position adjustment of the microscope lens. The microscope lens is attached to an oil-immersion lens adjustment plate 907, and this oil-immersion lens adjustment plate 907 is supported by three adjustment screws and fixed to the Z-axis arm 909 by three lock bolts. By adjusting the height of the adjustment screws around the three lock bolts, the perpendicularity between the oil-immersion lens and the slide can be adjusted. After the adjustment is completed, by tightening the three lock bolts with a large torque and fixing them to the Z-axis arm 909, it is possible to prevent the oil-immersion lens from shaking during the high-speed up and down movement of the Z-axis.

[0056] The Z-axis sliding unit 9 is fixed to the ZY-axis shared bottom plate 15. By receiving feedback from the grating ruler of the Z-axis from the Y-axis base, the instability of the Z-axis sliding unit 9 can be corrected to the maximum extent.

[0057] As an embodiment of the present invention, as shown in FIGS. 24 to 26, the oil-immersion lens unit 10 includes an objective lens 1001, an elastic dropping nozzle 1003, and a dropping nozzle fixing block 1002. The objective lens 1001 is attached to the oil-immersion lens mounting hole 910 of the Z-axis arm 909 and fixed to the oil-immersion lens adjustment plate 907. The dropping nozzle fixing block 1002 is fixed to the lower surface of the Z-axis arm 909. The elastic dropping nozzle 1003 is attached to the dropping nozzle fixing block 1002 and fixed to the side wall of the objective lens 1001 by the pressing plate of the dropping oil pipe. The oil outlet is arranged at a position facing the lens portion of the objective lens 1001.

[0058] As an embodiment of the present invention, as shown in FIGS. 25 and 26, an oil supply unit 17 is installed on one side of the Z-axis sliding unit 9, and the oil supply unit 17 is connected to an elastic dropping nozzle 1003 via an oil pipe.

[0059] As shown in FIGS. 27 to 28, the fluorescence module 13 includes a six-hole wheel component 1301, a fluorescence rotating disk 1302, and a fluorescence lamp head 1303. The six-hole wheel component 1301, the fluorescence rotating disk 1302, and the fluorescence lamp head 1303 are all attached to the gantry 16. The lower end of the six-hole wheel component 1301 is located directly above the objective lens 1001, and the scanning camera 14 is fixed to the gantry 16 and faces downward toward the upper end of the six-hole wheel component 1301. The fluorescence lamp head 1303 faces the rear end of the six-hole wheel component 1301 via the fluorescence rotating disk 1302. Further, the overall camera 11 and the upper illumination unit 12 are also arranged on the gantry 16, and both are located on one side of the six-hole wheel component 1301.

[0060] What has been described above is only a preferred embodiment of the present invention and does not limit the present invention. Those skilled in the art can make various changes and variations based on the present invention. However, any modifications, equivalent replacements, improvements, etc. made without departing from the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A high-precision microscope scanner comprising a main body base (1), a Y-axis cross-roller sliding unit (2), a Y-axis sliding drive unit (3), an X-axis cross-roller sliding unit (4), an X-axis sliding drive unit (5), a slide holder (6), a lifting focus unit (7), a whole illumination unit (8), a Z-axis sliding unit (9), an oil-immersion lens unit (10), a whole camera (11), an upper illumination unit (12), a fluorescence module (13), and a scanning camera (14), wherein the Y-axis cross-roller sliding unit (2) is installed on the main body base (1) via a ZY-axis shared bottom plate (15), the Y-axis slide drive unit (3) is arranged on one side of the main body base (1) and is in transmission connection with the Y-axis cross-roller sliding unit (2), the X-axis cross-roller sliding unit (4) and the X-axis slide drive unit (5) are both installed on the Y-axis cross-roller sliding unit (2), and the X-axis slide drive unit (5) is in transmission connection with the X-axis cross-roller sliding unit (4), the slide holder (6) and the whole illumination unit (8) are arranged on the X-axis cross-roller sliding unit (4), the lifting focus unit (7) is arranged at the central part of the main body base (1) and is located below the slide holder (6), the Z-axis sliding unit (9) is arranged on the ZY-axis shared bottom plate (15) and is located on one side of the assembly of the Y-axis cross-roller sliding unit (2) and the X-axis cross-roller sliding unit (4), the oil-immersion lens unit (10) is arranged on the Z-axis sliding unit (9) and is located above the slide holder (6), the fluorescence module (13) is arranged above the assembly of the Y-axis cross-roller sliding unit (2) and the X-axis cross-roller sliding unit (4) via a gantry (16), the lower end of the fluorescence module (13) is connected to the oil-immersion lens unit (10), the upper end is connected to the scanning camera (14), and the whole camera (11) and the upper illumination unit (12) are both installed on the gantry (16) and are located on one side of the fluorescence module (13). A high-precision microscope scanner characterized by this.

2. The main body base (1) includes a single base bottom plate (101). On both the front and rear sides of the lower surface of the base bottom plate (101), a front base bottom plate support block (102) and a rear base bottom plate support block (103) are respectively arranged. A marble base (104) is installed between the front base bottom plate support block (102) and the rear base bottom plate support block (103). The marble base (104) is closely attached and fixed to the lower surface of the base bottom plate (101). Handles (105) are respectively provided on both the left and right sides of the base bottom plate (101). Each handle (105) is fixedly connected to the end of the base bottom plate support block on the corresponding side. The base bottom plate (101) is provided with a Y-axis slide drive unit mounting hole (106) for mounting the Y-axis slide drive unit (3) and a lift focus unit mounting slot (107) for mounting the bottom structure of the lift focus unit (7). The high-precision microscope scanner according to claim 1, characterized in that.

3. The Y-axis cross roller sliding unit (2) includes a Y-axis cross roller mounting bottom plate (201). On the upper surface of the Y-axis cross roller mounting bottom plate (201), a Y-axis slide area top plate (203) is arranged via two sets of left and right Y-axis cross roller guides (202). On the outer surfaces of the two sets of Y-axis cross roller guides (202), one Y-axis independent adjustment screw plate (204) is respectively installed. The Y-axis independent adjustment screw plates (204) are fixedly connected to the lower surfaces on both the left and right sides of the Y-axis slide area top plate (203). The adjustment screws of the two Y-axis independent adjustment screw plates (204) respectively face inward and are opposite to the outer surfaces of the two sets of Y-axis cross roller guides (202). A Y-axis cross roller rear stopper plate (213) is arranged between the two sets of Y-axis cross roller guides (202). The lower surface of the Y-axis cross roller rear stopper plate (213) is fixedly connected to the upper surface of the Y-axis cross roller mounting bottom plate (201), but its upper surface does not contact the lower surface of the Y-axis slide area top plate (203). The left and right side surfaces of the Y-axis cross roller rear stopper plate (213) are respectively fixedly connected to the inner surfaces of the corresponding side Y-axis cross roller guides (202). At the center of the Y-axis cross roller mounting base plate (201), a first focus lens mounting hole (205) for mounting the lifting focus unit (7) is provided. In front of the center of the upper surface of the Y-axis slide area top plate (203), there is an X-axis cross roller sliding unit mounting area for installing the X-axis cross roller sliding unit (4). The rear part of the Y-axis slide area top plate (203) is an X-axis slide drive unit mounting area for mounting the X-axis slide drive unit (5). The upper surface of the Y-axis slide area top plate (203) between the X-axis cross roller sliding unit mounting area and the X-axis slide drive unit mounting area is a Y-axis slide drive unit connection area for transmitting and connecting with the Y-axis slide drive unit (3). At the corresponding positions of the center of the Y-axis slide area top plate (203) and the Y-axis cross roller rear stopper plate (213), a first escape hole (206) for the focus lens is provided to avoid the top structure of the lifting focus unit (7). The high-precision microscope scanner according to claim 1, characterized in that.

4. The Y-axis slide drive unit (3) includes a cross bar (301) for being flexibly and fixedly connected to the Y-axis slide drive unit connection area. Soft pads (316) are installed in front of and behind the Y-axis slide drive unit connection area respectively. The cross bar (301) is clamped and connected to the Y-axis slide area top plate (203) through the front and rear soft pads. The right end of the cross bar (301) is fixedly connected to a cross bar right support block (303) through a cross bar right support column (302). The cross bar right support block (303) is slidably connected to a Y-axis slide right guide (304) fixed to the ZY-axis common base plate (15). The left end of the crossbar (301) is fixedly connected to the crossbar left support connection block (306) via the crossbar left support (305). The crossbar left support connection block (306) is fixedly connected to the rack fixing plate (307). The rack fixing plate (307) is slidably connected to a Y-axis sliding left guide (314) fixed to the Y-axis motor fixing plate (308). The Y-axis motor fixing plate (308) is fixedly connected to the main body base (1). On the Y-axis motor fixing plate (308), a Y-axis motor (310) is installed via a Y-axis motor mounting base (309). A Y-axis gear (311) is provided on the output shaft of the Y-axis motor (310). A Y-axis rack (312) is provided on the rack fixing plate (307). The Y-axis gear (311) and the Y-axis rack (312) are engaged with each other. A spring fixing block (313) is provided on the rack fixing plate (307). A spring for tightening the rack fixing plate (307) is installed between the spring fixing block (313) and the Y-axis motor fixing plate (308). The high-precision microscopic scanner according to claim 3, characterized in that.

5. The X-axis cross roller sliding unit (4) includes a first X-axis cross roller mounting bottom plate (401). On the upper surface of the first X-axis cross roller mounting bottom plate (401), a first X-axis slide area top plate (403) is installed via two sets of front and rear first X-axis cross roller guides (402). The first X-axis slide area top plate (403) is fixedly connected to the upper surfaces of two sets of the front and rear first X-axis cross roller guides (402) by three fixing screws arranged in a triangle. Around each fixing screw, several adjusting screws for adjusting the horizontal direction on the two sets of the front and rear first X-axis cross roller guides (402) of the first X-axis slide area top plate (403) are installed. Between two sets of first X-axis cross roller guides (402), an X-axis cross roller rear stopper plate (404) is installed. The lower surface of the X-axis cross roller rear stopper plate (404) is fixedly connected to the upper surface of the first X-axis cross roller mounting bottom plate (401). The upper surface of the X-axis cross roller rear stopper plate (404) does not contact the lower surface of the first X-axis slide area top plate (403). Both the front and rear sides of the X-axis cross roller rear stopper plate (404) are fixedly connected to the inner surfaces of the front and rear two sets of the first X-axis cross roller guides (402) respectively. On the outer surfaces of the two sets of the first X-axis cross roller guides (402), first X-axis independent adjustment screw plates (405) are installed respectively. The two first X-axis independent adjustment screw plates (405) are fixedly connected to both the front and rear sides of the lower surface of the first X-axis slide area top plate (403) respectively. The adjustment screws of the two first X-axis independent adjustment screw plates (405) face the outer surfaces of the two sets of the first X-axis cross roller guides (402) inward respectively. At the central part of the first X-axis cross roller mounting bottom plate (401) and the corresponding position of the X-axis cross roller rear stopper plate (404), a second focus lens escape hole (406) is provided to avoid the top structure of the lifting focus unit (7). At the central part of the first X-axis slide area top plate (403), a vertically penetrating slide holder mounting slot (407) is provided. The rear part of the first X-axis slide area top plate (403) is an X-axis slide drive unit connection area for driving connection with the X-axis slide drive unit (5). On the upper surface of the X-axis cross roller rear stopper plate (404), an overall lighting unit mounting slot (408) for fixing the overall lighting unit (8) is provided. A part of the overall lighting unit (8) is fixedly connected to the X-axis cross roller rear stopper plate (404) through the overall lighting unit mounting slot (408). Another part of the overall lighting unit (8) extends inside between the slide holder mounting slot (407) and the second focus lens escape hole (406). On one side of the frame of the slide holder mounting slot (407), an electromagnetic adsorption unit (409) for adsorbing the slide holder (6) is installed. The electromagnetic adsorption unit (409) includes an electromagnet mounting base (4091) fixed to one side of the frame of the slide holder mounting slot (407). On the upper surface of the electromagnet mounting base (4091), at least two electromagnet coils (4092) are embedded. The electromagnet mounting base (4091) is provided with an electromagnet connection terminal (4093) for connecting an external power source to the electromagnet coil (4092). On the inner side surface of the electromagnet mounting base (4091), two steel balls (4094) for contacting the side surface of the slide holder 6 are embedded. On the opposite side of the electromagnet mounting base (4091), on the upper surface of the frame of the slide holder mounting slot (407), one steel ball (4094) for contacting the lower surface of the slide holder (6) is embedded. The high-precision microscope scanner according to claim 1, characterized in that.

6. The X-axis sliding drive unit (5) includes an X-axis soft pad (501) arranged in the X-axis sliding drive unit mounting area at the rear part of the upper surface of the Y-axis slide area top plate (203). An X-axis power fixing plate (502) is installed on the X-axis soft pad (501). At the front part of the X-axis power fixing plate (502), a second X-axis cross roller mounting bottom plate (503) is arranged. On the front and rear of the upper surface of the second X-axis cross roller mounting bottom plate (503), a second X-axis slide area top plate (506) is installed via two sets of second X-axis cross roller guides (504). On the outside of the two sets of the second X-axis cross roller guides (504), second X-axis independent adjustment screw plates (505) are respectively installed. The two second X-axis independent adjustment screw plates (505) are fixed to the front and rear sides of the lower surface of the second X-axis slide area top plate (506). The screws of the two second X-axis independent adjustment screw plates (505) face the outer side surfaces of the two sets of the second X-axis cross roller guides (504) inward respectively. On the rear part of the upper surface of the X-axis power fixing plate (502), an X-axis linear motor (508) is installed via a pair of left and right linear motor mounting bases (507). The X-axis linear motor (508) is fixed to the rear part of the second X-axis slide area top plate (506) via an X-axis transmission connection part (509). X-axis movement pressing blocks (510) are respectively attached to both the left and right ends of the second X-axis slide area top plate (506). The high-precision microscope scanner according to claim 5, characterized in that.

7. The slide holder (6) includes a slide holder main body (601). A slide holder handle (602) is arranged on one side of the slide holder main body (601). At least one slide mounting hole (604) for placing a slide (603) is provided on the slide holder main body (601). The central part of each slide mounting hole (604) has a hollow structure. A slide end stopper (605), a slide inner support block (606), and a slide outer plate spring-type composite pressing block structure (607) are provided on the frame of each slide mounting hole (604). The slide inner support block (606) and the slide outer plate spring-type composite pressing block structure (607) are arranged at opposite positions. A slide bottom support protrusion (608) and two adjustment screw holes (609) are provided on the frame of each slide mounting hole (604). Slide adjustment screws are inserted into these two adjustment screw holes (609). The slide bottom support protrusion (608) and the two slide adjustment screws are structured to support the slide (603) at three points in an inverted triangle arrangement. The high-precision microscope scanner according to claim 5, characterized in that.

8. The lifting focus unit (7) includes a T-shaped frame (701), a condenser lens lifting motor (702) is provided at the rear part of the upper end surface of the T-shaped frame (701), a ball screw (703) is arranged at the front part of the upper end surface, a driving pulley (704) is installed on the shaft of the condenser lens lifting motor (702), a driven pulley (705) is attached to the upper end of the ball screw (703), a timing belt is mounted between the driving pulley (704) and the driven pulley (705), a ball screw auxiliary guide (706) is provided on the front surface of the vertical plate of the T-shaped frame (701), the nut of the ball screw (703) is fixedly connected to the slider of the ball screw auxiliary guide (706), a condenser lens support plate (708) is provided on the nut of the ball screw (703) via a condenser lens lifting block (707), a condenser lens adjustment intermediate plate (709) is attached to the condenser lens support plate (708), and a condenser lens adjustment upper plate (710) is further arranged thereon. A condenser lens (712) is installed on the condenser lens adjustment upper plate (710) via a condenser lens connecting pipe (711). A small photoelectric switch (713) for limiting the condenser lens is attached to the side surface of the vertical plate of the T-shaped frame (701), and a condenser lens limiter (714) that senses the photoelectric switch (713) is installed on the nut of the ball screw (703). A lower illumination unit (715) is arranged at the lower part of the condenser lens support plate (708), and the lower illumination unit (715) is fixedly connected to the ZY-axis common bottom plate (15). The high-precision microscope scanner according to claim 1, characterized in that.

9. The Z-axis sliding unit (9) includes a Z-axis support column (901) fixed to the ZY-axis shared bottom plate (15). The Z-axis support column (901) is arranged on one side of the assembly of the Y-axis cross-roller sliding unit (2) and the X-axis cross-roller sliding unit (4). On the inner surface of the Z-axis support column (901), a Z-axis ball screw (902) is arranged via a pair of upper and lower bearing blocks. On the inner surface of the Z-axis support column (901), a Z-axis guide (903) is attached in parallel with the Z-axis ball screw (902). At the upper part of the Z-axis support column (901), a Z-axis driving motor (904) is installed. The shaft of the Z-axis driving motor (904) is connected to the upper end of the Z-axis ball screw (902). A Z-axis lifting plate (905) is attached to the nut of the Z-axis ball screw (902). The Z-axis lifting plate (905) is fixedly coupled to the slider of the Z-axis guide (903). A Z-axis support column (906) is provided on the Z-axis lifting plate (905). A Z-axis arm (909) is attached to the side of the Z-axis support column (906) via two sets of Z-axis cross-roller guides (908). At the upper part of the Z-axis support column (906), a piezoelectric ceramic stack moving device suspension rack (912) is arranged. A pen-type piezoelectric ceramic stack moving device (913) is connected between the piezoelectric ceramic stack moving device suspension rack (912) and the Z-axis arm (909). An attachment hole for an oil-immersion lens is formed in the Z-axis arm (909). An oil-immersion lens adjustment plate (907) is attached to the attachment hole for the oil-immersion lens. The oil-immersion lens adjustment plate (907) is fixed to the Z-axis arm (909) by three locking bolts arranged in a triangle. An adjustment screw for finely adjusting the levelness of the oil-immersion lens adjustment plate (907) is provided on one side of each of the locking bolts. The high-precision microscope scanner according to claim 1, characterized in that...

10. The oil immersion lens unit (10) includes an objective lens (1001), an elastic dropping nozzle (1003), and a dropping nozzle fixing block (1002). The objective lens (1001) is mounted in the oil immersion lens mounting hole (910) of the Z-axis arm (909) and fixed to the oil immersion lens adjustment plate (907). The dropping nozzle fixing block (1002) is fixed to the lower surface of the Z-axis arm (909). The elastic dropping nozzle (1003) is mounted on the dropping nozzle fixing block (1002) and fixed to the side wall of the objective lens (1001) by a pressing plate of the dropping oil pipe. The oil outlet is arranged at a position facing the lens portion of the objective lens (1001). The high-precision microscope scanner according to claim 9, characterized in that

Images