Sintering apparatus and method

Abstract

The present invention relates to a sintering apparatus (10) and a sintering method for simultaneously connecting components of a plurality of electronic assemblies (22) arranged adjacent to one another by pressure sintering, the sintering apparatus and the sintering method comprising an upper tool (12) and a lower tool (14), a plurality of first pressure plungers (16) assignable to the upper tool (12), and at least one, in particular a plurality of second pressure plungers (18) assigned to the lower tool (14), between which the assemblies (22) are received, each of the first pressure plungers and / or each of the at least one second pressure plunger being assigned to a respective drive device, which drive device is configured to apply a pressure force to one of the assemblies by axially moving the assigned first pressure plunger and / or the assigned second pressure plunger along the effective direction of the pressure force (P).

Description

[Technical Field]

[0001] The present invention relates to a sintering apparatus and method for simultaneously joining adjacently positioned components of electronic assemblies by pressure sintering. [Background technology]

[0002] In pressure sintering, two or more components, particularly an electronic component and a substrate, can be electrically and / or thermally connected to one another using a joining material, and the joining material can be sintered. The components to be connected are pressed uniaxially between an upper tool and a lower tool to provide a joining pressure.

[0003] Forming the connection in a process atmosphere, particularly under negative pressure or vacuum, has proven particularly advantageous, particularly because it prevents unwanted chemical reactions such as oxidation, porosity, and contamination. The heat required for sintering is generally transferred to the components via the upper and lower tools, but can also be applied as radiant heat from the bottom and / or top. In many cases, multiple components, which may differ from each other in both lateral length and height, must be placed on a common substrate. To ensure uniform pressure transfer, multiple pressure plungers, each with dimensions corresponding to the components to be connected, can be provided in the upper and / or lower tools.

[0004] When a variety of different assemblies are processed in a facility, it becomes necessary to periodically adjust the placement of the pressure plungers in the upper or lower tool. This adjustment is time-consuming and is made even more difficult because the tools and / or pressure plungers can be hot. Furthermore, the tools, especially the pressure plungers, are typically made of metal because they must withstand high pressures. Consequently, these tools are heavy, require time to cool, and are costly. Furthermore, precise positional alignment of the tools / pressure plungers with respect to the components being joined is required. Summary of the Invention [Problem to be solved by the invention]

[0005] SUMMARY OF THE INVENTION It is an object of the present invention to provide a sintering apparatus and corresponding method that allows for quick and reliable adjustment of the position of a pressure plunger relative to the components being joined. [Means for solving the problem]

[0006] This object is achieved by a sintering device having the features of claim 1 and a method having the features of the independent claims. Preferred embodiments are set out in the dependent claims.

[0007] The sintering device according to the invention for simultaneously connecting components of a plurality of adjacently arranged electronic assemblies by pressure sintering comprises an upper tool and a lower tool, where a plurality of first pressure plungers can be assigned to the upper tool (12) and at least one, in particular a plurality of second pressure plungers are assigned to the lower tool. The assemblies are held between the first pressure plunger and at least one, in particular a plurality of second pressure plungers, and each of the first pressure plungers and / or each of the at least one second pressure plunger is assigned to a drive device configured to apply a pressure force to one of the assemblies by axially moving the assigned first pressure plunger and / or the assigned second pressure plunger along an effective direction of the pressure force (P).

[0008] It is proposed that a first pressure plunger is placed on the assembly before the start of the pressure operation, i.e. also outside the sintering device before the sintering operation, and presses the assembly against at least one second pressure plunger upon application of pressure.

[0009] In contrast to conventional sintering apparatuses in which the pressure plunger acting on the upper side of the assembly is permanently or replaceably fixed to the upper tool, the first pressure plunger acting on the upper side of the assembly is only loosely positioned on the assembly or its components. The first pressure plunger is preferably positioned on the assembly outside the sintering apparatus so that it can be inserted together with the components during the required step of inserting the components into the sintering apparatus, if any. When the drive unit moves the second pressure plunger to apply pressure, the first pressure plunger, together with the components below the assembly, presses against a pressure plate positioned above the assembly, which is stationary, e.g., fixed to the frame of the sintering apparatus, or is pressed against the respective drive unit of the upper tool. Alternatively, the second pressure plunger is supported on the pressure plate of the lower tool, and the first pressure plunger of the upper tool presses the assembly against the pressure plate or the second pressure plunger of the lower tool. Therefore, the pressure plate or its respective drive unit applies a counter force against the pressure force. Preferably, the pressure plates or drive devices of the lower tool and / or upper tool are temperature regulatable by corresponding heating and / or cooling devices for heat transfer to or from the components via the first and / or second pressure plungers. Preferably, a heating and / or cooling device is provided in at least the lower tool for heating the substrate of the assembly, while the first pressure plunger of the upper tool can be thermally heated in advance, e.g., before or after placement, so that a separate heating or cooling device in the upper tool can be omitted.

[0010] As an alternative or addition to placing the first pressure plungers on the assembly before the sintering operation begins, as described in EP 4080554 A1, at least some of the first pressure plungers, particularly all of them, can be fixed interchangeably inside the upper tool, particularly by thermal clamping in a clamping device. This allows for flexible configuration of the first pressure plungers. For example, the first pressure plungers can be received in the upper tool or its holding plate at a first temperature so as to be movable along the effective direction of the pressure, and then clamped on or within the holding plate or upper tool at a second temperature higher than the first temperature. This allows for quick and accurate adjustment of the heights of various components in each assembly. For example, in this way, the first, i.e., lower-temperature, first pressure plunger can be moved closer to the assembly to be connected or the corresponding alignment gauge until all contact surfaces of the first pressure plunger are in contact with their respective components. A pressure plunger contacting a relatively tall component or part is moved further than a pressure plunger contacting a relatively short component or part. When the pressure plunger is adjusted relative to the part or assembly in terms of its longitudinal position, it increases the temperature of the first pressure plunger and the retaining plate of the upper tool. As a result, the first pressure plunger is clamped onto or within the retaining plate and is therefore fixed in terms of its longitudinal or axial position. The clamp creates a non-positive connection between the first pressure plunger and the retaining plate.

[0011] Advantageously, a definable temperature gradient between the upper and lower plungers can be provided during the sintering operation by separately operable heating or cooling devices for the lower tool and the upper tool, particularly the associated pressure plunger. Typically, a heat-sensitive upper component of the assembly, such as a power semiconductor component, faces the upper tool, while a heat-insensitive, preferably highly thermally conductive, lower component of the assembly, such as a heat sink, faces the lower tool. Typically, when an intermediate layer of sintering paste is applied, a sintered bond is formed between the lower surface of the upper component and the lower component of the assembly. To avoid exceeding the upper component's critical temperature, the upper plunger can be heated or cooled during the sintering operation along a temperature curve with a lower temperature curve compared to the temperature curve with a higher temperature of the upper plunger. For example, a temperature gradient of 50°C to 100°C can be established between the hotter lower second pressure plunger and the cooler upper first pressure plunger, at least when the sintering temperature is reached.

[0012] If a single drive unit is used in the upper and / or lower tool, it can be designed, for example, as a single-acting hydraulic cylinder for the respective one or more first and / or second pressure plungers. The single-acting hydraulic cylinder can have a large piston surface that can substantially cover the surface for placing the assembly on the carrier frame. The single-acting hydraulic cylinder can be reset, for example, using a spring or other reset element. This eliminates the need for hydraulic tension on a single pressure surface and the need for expensive double-acting hydraulic cylinders. Instead, the single-acting hydraulic cylinder can be freely moved as a cylinder block, making the hydraulic pressure unit less expensive and reducing the demands on hydraulic control.

[0013] In an advantageous embodiment, the first pressure plunger can be supported against a pressure plate of the upper tool, and at least one drive of the lower tool, in particular a respective drive assigned to each second pressure plunger, applies a pressure force P via the at least one second pressure plunger in an effective direction in the direction of the upper tool. Alternatively, the at least one second pressure plunger can be supported against a pressure plate of the lower tool or formed from the aforementioned plate, and at least one drive of the lower tool, in particular a respective drive assigned to each first pressure plunger, applies a pressure force P in an effective direction of the lower tool. In this embodiment, at least one drive can be arranged on either the upper tool or the lower tool to apply a pressure force in an effective direction of the lower tool or the upper tool. If at least one drive is provided on the upper tool, the pressure force can be transmitted to the first pressure plunger in the effective direction of the lower tool, for example via a pressure plate. Alternatively, a separate drive unit (multi-drive) may be arranged in the upper tool, assigned to each of the first pressure plungers, and may apply individual pressure forces to the first pressure plungers. In this case, the second pressure plunger may be designed, for example, as a pressure plate in the lower tool. Alternatively, multiple second pressure plungers statically fixed to the lower tool may support the assembly relative to the lower tool. Alternatively, the lower plunger may be provided with at least one drive unit. This device may, for example, move the second pressure plunger designed as a pressure plate or multiple second pressure plungers statically connected to the drive unit in the effective direction of the pressure force toward the upper plunger. However, each of the multiple second pressure plungers, in particular each second pressure plunger assigned to the first pressure plunger, may also have a separate drive unit (multi-drive) arranged in the lower tool, which may apply individual pressure forces to the second pressure plunger. As such, this embodiment provides a common drive or multiple drives for the first or second pressure plungers in either the upper or lower tool.

[0014] As an alternative to the above-described embodiment, in a further advantageous embodiment, each drive unit in the upper tool can be assigned to a plurality of first pressure plungers, and each drive unit in the lower tool can be assigned to a plurality of second pressure plungers, with each electronic assembly being subjected to the influence of the drive units of the upper and lower tools on both sides due to the opposing effective directions of the pressure force P. In this embodiment, it is proposed that the assembly is sandwich-shaped and pressed by at least one drive unit of the upper and lower tools. The drive unit of the upper tool can be a single drive unit, for example, distributing the pressure force to the first pressure plungers arranged on the assembly via a pressure plate. Alternatively, a separate drive unit can be provided for each first pressure plunger. The same applies to the drive unit of the lower tool. This unit can be a single drive unit that applies the pressure force in the effective direction of the upper tool via, for example, a second pressure plunger designed as a pressure plate or multiple second pressure plungers statically arranged on the drive unit. Alternatively, a separate drive unit can be provided for each second pressure plunger. In contrast to the above-described embodiment, by pressing the assemblies against each other by oppositely operating drives in the upper and lower tools, it is possible to achieve individual temperature and pressure parameters in adjacently arranged assemblies, which is particularly advantageous for parallel sintering of different types of assemblies.

[0015] In a preferred embodiment, each drive is individually controllable, preferably hydraulically, electrically, piezoelectrically, or magnetostrictively, with respect to the travel distance and / or applied pressure. Preferably, each first and / or second pressure plunger is assigned to a respective assembly or component. This allows for uniform pressure application to the various assemblies or individual components. In particular, each assembly can be individually subjected to a predetermined pressure. This also prevents individual assemblies from being subjected to excessively high or low pressure, as occurs, for example, in conventional solutions where multiple assemblies are subject to only a single common pressure plunger. A further advantage is that height tolerances of assemblies or components can be equalized or taken into account. The required pressure can be set, for example, with the aid of an assigned force or pressure transducer or alternatively a displacement transducer, and the applied pressure can be achieved directly by setting the actuation pressure or indirectly by setting the travel distance of the second pressure plunger. The hydraulically controllable drive can be formed, for example, by a double-acting piston mechanism, which can be supplied by a corresponding control valve from a common pressurized fluid reservoir. However, as a general principle, each drive can also have its own fluid source for pressure generation, and valves can be omitted. Control of the electric motor type can be achieved with the help of drives with, for example, spindle drives. Furthermore, drives operating piezoelectrically or magnetostrictively can also be provided.

[0016] In a further preferred embodiment of the invention, each of the first and / or second pressure plungers is connected to an assigned drive unit, and advantageously the second pressure plunger is not arranged at a predetermined position but forms a unit with the assigned drive unit.

[0017] Alternatively or additionally, each of the first and / or second pressure plungers may have a respective heating and / or cooling device. This allows individually controllable heat transfer to and from the assembly for each second pressure plunger, and thus for each assembly in thermal contact therewith. The heating and / or cooling device may, for example, be electrically operated and / or include a respective fluid duct on the second pressure plunger, which communicates with a corresponding temperature-adjustable fluid source. Preferably, the heating and / or cooling device is designed as a pin-contact heating and / or cooling device. Highly thermally conductive elastic pins allow efficient transfer of heating or cooling temperature, and in particular, any alignment issues, such as surface parallelism, can be compensated for even before the second pressure plunger comes into full contact with the assembly. This type of heat-transfer pin contact is described, for example, in WO 2016 / 091962. These may already be used in a heating chamber for heating the assembly, the second pressure plunger, and / or the pressure plate. Preferably, the temperatures of the first and second pressure plungers are simultaneously adjusted in the combined temperature control of the heating and / or cooling device to match a predefined temperature gradient between each first pressure plunger and its associated second pressure plunger. As a result, temperature-sensitive components of the assembly can be protected from thermal overload. Furthermore, the same temperature conditions in the first and second pressure plungers can be maintained even after multiple sintering operations.

[0018] In a further preferred embodiment, a carrier frame insertable into a sintering apparatus is provided, in which the components of the assembly, preferably together with the first pressure plunger arranged therein, are held so as to be laterally guided. The carrier frame preferably has a through-hole assigned to the assembly and through which the second pressure plunger can make mechanical and thermal contact with the assembly. The assembly is placed in laterally aligned relation by the carrier frame to match the arrangement pattern of the second pressure plunger, the laterally aligned relation being transverse to the pressure direction. Thus, the carrier frame prevents any lateral movement of the components, while allowing movement along the effective direction of the pressure force. The through-hole allows the second pressure plunger to lift the components from the carrier frame.

[0019] Preferably, the carrier frame has a higher coefficient of thermal expansion than the upper component of the assembly. The assembly to be sintered may consist of individual components and stacked components, such as a power semiconductor component as the upper component of the assembly and a heat sink as the lower component, which may have different thermal expansions. Therefore, the power semiconductor component has a smaller thermal expansion than the heat sink. During heating to the sintering temperature, undesirable displacement of the stacked components relative to each other may occur. Since precise and positionally accurate alignment of the individual stacked components in the assembly relative to each other is important in further process steps, the carrier frame may advantageously have a thermal expansion that compensates for undesirable relative thermal displacement of the assembly components relative to each other, for example, by thermally displacing the upper component in the same way relative to the lower component. Advantageously, the carrier frame may have a higher thermal expansion than the upper component of the assembly to be received therein, and may be made of aluminum, in particular. Therefore, for example, in a subsequent process step, it is possible to connect a power supply board to the connection contacts of power semiconductor components, preferably converter components such as IGBTs for electrical energy conversion, sintered on a common or individual heat sink.

[0020] In a further preferred embodiment, at least one guide frame is preferably removably disposed on the carrier frame and configured to guide the first pressure plunger laterally relative to the assembly. The guide frame thus prevents the disposed pressure plunger from moving relative to the assembly components and / or the carrier frame. To facilitate loading of the carrier frame or reconfiguration for different assembly and / or plunger configurations, the at least one guide frame is fitted to or bolted to the carrier frame. For example, the guide frame can be disposed on the carrier frame only after component insertion is complete, and then the first pressure plunger can be disposed on the guide frame.

[0021] In a further preferred embodiment, each of the first and / or second pressure plungers has a plunger element axially movable along the effective direction of the pressure force and a contact surface capable of contacting a component of the assembly, the contact surface being tiltable about at least one spatial axis relative to the plunger element. However, the contact surface is preferably tiltable about two orthogonal spatial axes, with the third spatial axis of this orthogonal spatial axis system extending along the effective direction of the pressure force. Thus, the contact surface is actually Cardan-movable relative to the plunger element, allowing the contact surface to make uniform surface contact with the contacting component. Unlike a fixedly aligned contact surface, the contact surface may, in some cases, be tiltable relative to the contacting component, thereby avoiding the occurrence of force peaks or force gradients within the component and distributing the pressure force evenly. The contact surface here is self-aligning. The tiltable mounting of the contact surface relative to the plunger element can be achieved, for example, by an elastic equalization layer. Also, each pressure plunger may be, for example, two-part and, in addition to the plunger element described above, comprise a further plunger element having a contact surface as described above, both parts of the plunger element being connected via the elastic equalization layer described above or provided with a separate mounting part that allows tilting.

[0022] In a further preferred embodiment, a plurality of adjacently arranged first pressure plungers are assigned to each of the second pressure plungers. Alternatively, a plurality of adjacently arranged second pressure plungers may be assigned to each of the first pressure plungers. In particular, the first / second pressure plungers assigned to each of the second / first pressure plungers may have different heights. This also makes it possible to sinter assemblies, for example, in which multiple parts of different heights are arranged on a flat substrate. The heights of the first / second pressure plungers are dimensioned so that the contact surfaces of the first / second pressure plungers facing the pressure plate are in a common plane.

[0023] Advantageously, in a flow production setup, as described, for example, in WO 2021 / 069328, the first pressure plunger can be transported by a transport device from an unloading station downstream of the sintering device back to a loading station upstream of the sintering device, bypassing the sintering device, in particular after the end of the sintering operation. A continuous production process is thus ensured, in which a large number of connected parts can be sintered at high cycle speeds.

[0024] A method according to the invention for simultaneously connecting components of a plurality of electronic assemblies arranged next to one another by pressure sintering in a sintering apparatus, in particular according to any of the above-mentioned preferred embodiments or designed according to the invention, which sintering apparatus comprises a plurality of first pressure plungers and at least one, in particular a plurality of second pressure plungers, between which the assemblies are received, each of the first and / or at least the second pressure plungers being movable by an assigned drive device in an axial direction along an effective direction of the pressure force so as to apply a pressure force to one of the assemblies, said method comprising: - placing a first pressurizing plunger onto the assembly; - inserting the assembly into a sintering apparatus with the first pressure plunger aligned with the second pressure plunger; - performing a sintering operation by operating a drive device to move the first pressure applying plunger and / or at least a second pressure applying plunger arranged opposite the first pressure applying plunger to apply a counter force from a rest position to a working position in which the assembly is pressed together between the first pressure applying plunger and the at least second pressure applying plunger to generate pressure.

[0025] By placing the first pressure plunger on the assembly and inserting the assembly together into a sintering apparatus, the first pressure plunger can be configured in a simple manner that includes both the placement of the appropriately sized first pressure plunger and their precise alignment with the assembly, and / or indirectly also the placement geometry of the second pressure plunger.

[0026] Inserting the assembly together with the first pressure plunger into the sintering apparatus can advantageously be achieved with the aid of a carrier frame, on which the components of the assembly together with the disposed pressure plunger are held so as to be laterally guided. The carrier frame is preferably assigned to the assembly and can have a through-hole through which the second pressure plunger can be in mechanical and thermal contact with the assembly. The assembly can be lifted from the carrier frame when the second pressure plunger moves to the working position. The carrier frame can have a guide frame configured to guide the first pressure plunger laterally relative to the assembly to prevent the first plunger from sliding sideways or laterally during lifting before coming into contact with the pressure plate and being fixed by the accumulated pressure force. The guide frame allows the first pressure plunger to be displaced axially in the effective direction of the pressure force.

[0027] Advantageously, the guide frame and / or the carrier frame have complementary alignment elements, such as guide pins, guide grooves, guide recesses, etc., that allow the guide frame to be positioned on the carrier frame in an accurate position. When the assembly is loaded into the carrier frame, for example, it is possible to position a lower component of the assembly, such as a heat sink, on or in the carrier frame, which can also function as a lower component for the multiple upper components of the assembly. The guide frame can then be positioned on the carrier frame in a position aligned by the alignment elements. The guide frame can have a through-hole through which the upper component of the assembly, such as a power semiconductor component, is inserted together with the first pressure plunger positioned therein.

[0028] In a preferred embodiment of this method, at least the step of performing the sintering operation includes heating and / or cooling the first pressure plunger and / or at least one, particularly a plurality of, second pressure plungers. As a result, the heat required for sintering can be transferred to the assembly via the pressure plungers, with optional additional cooling, if necessary. To prevent the critical temperature of the upper component of the assembly, e.g., a power semiconductor component, from being exceeded, the first upper pressure plunger preferably maintains a lower temperature level during the sintering operation than the second lower pressure plunger, which faces, for example, a heat sink. Heat transfer can preferably be performed via an elastic heat transfer device, as known from WO 2016 / 091962. Preferably, the second pressure plunger is heated or cooled, and the first pressure plunger is preheated before or after being placed on the assembly and maintains a predeterminable temperature level due to its heat storage capacity. As a result, it may be possible to omit a heating and / or cooling device for the upper tool.

[0029] In a further preferred embodiment of the method, the various drives for moving the first and / or second pressure plungers to the working position are actuated with a time delay, and the various drives for moving the first and / or second pressure plungers from the working position back to the rest position can be actuated in the same time sequence, simultaneously, or in reverse time sequence.

[0030] In a further advantageous embodiment of this method, the various drives are activated with a time delay, such that at least one drive located in the central region is activated first, followed by the outer drives at time intervals. For example, in an arrangement of nine pressure plungers in three rows of three pressure plungers each, it is possible to first activate the middle pressure plunger, followed by the outermost pressure plungers surrounding it. Advantageously, by preferentially lifting the central part or central assembly, the aforementioned guide frame can also be lifted before the additional peripheral pressure plungers apply pressure, and all upper pressure plungers received therein, or the upper part of the assembly together with the upper pressure plungers, are also lifted and centered. This allows for early alignment of the assembly with the upper and lower pressure plungers or upper and lower drives. Advantageously, the guide frame includes three groups of three assemblies each, or, if applicable, four groups of three assemblies each, and the intermediate drive within the group first lifts the intermediate assembly together with the upper pressure plunger and guide frame from the carrier frame.

[0031] Preferably, at least the sintering operation is carried out in a process atmosphere, in particular in an oxygen-free and oxidation-resistant process atmosphere, preferably under negative pressure, in particular in vacuum.

[0032] Advantageously, a measurement carrier frame may be provided for calibration and / or validation of the sintering apparatus and sintering method, which may also include a measurement guide frame and a geometrically replicated assembly arranged in a precise position and geometry, and pressure and / or temperature sensors may be provided in or on the replicated assembly, which assembly is passed through the sintering apparatus for the first time during setup or calibration of the sintering apparatus and subjected to the intended sintering pressure and sintering temperature, in order to enable validation and calibration of the sintering method. Data from the pressure and / or temperature sensors may be used to set the process parameters and test the correct functioning of the sintering apparatus.

[0033] The heating and / or cooling temperature is preferably transferred by mechanical contact cooling. For example, heat radiation transfer by infrared radiant heaters or convection temperature transfer by process gas circulation can be used.

[0034] Further advantages become apparent from the drawings and the description associated with the drawings. The drawings show examples of the invention. The drawings, the detailed description and the claims encompass a number of features in combination. Also, a person skilled in the art can conveniently consider features individually and combine them into further meaningful combinations. In particular, a person skilled in the art can also apply features described with respect to embodiments of the sintering apparatus to embodiments of the method according to the invention, and vice versa. [Brief explanation of the drawings]

[0035] [Figure 1] FIG. 1 shows a schematic longitudinal cross-sectional view of a sintering apparatus in the first embodiment. [Figure 2] FIG. 2 shows a schematic perspective view of the carrier frame of the sintering apparatus of FIG. 1 with components inserted. [Figure 3] FIG. 3 shows a perspective view of the carrier frame of FIG. 2, further arranged with a first pressure plunger and a guide frame. [Figure 4-7] 4 to 7 show schematic cross-sectional views of the sintering apparatus of FIG. 1 in different operating positions. [Figure 8] FIG. 8 shows a schematic longitudinal cross-sectional view of a sintering apparatus in the second embodiment. [Figure 9] FIG. 9 shows a schematic longitudinal cross-sectional view of a sintering apparatus in the third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0036] 1 and 4 to 7 show a sintering apparatus 10 in a first embodiment, which includes an upper tool 12 and a lower tool 14. In the first embodiment, a sintering apparatus 10 is considered in which a first pressure plunger 16 is statically supported against a pressure plate 20 in the upper tool 12, and a plurality of second pressure plungers 18 in the lower tool 14 are movable by separate drive devices 28, 28.2.

[0037] The sintering apparatus 10 may include a rigid pressure frame that may be in contact with an evacuable process chamber, with the upper tool 12 and the lower tool 14 supported on the pressure frame.

[0038] The upper tool 12 comprises a flat pressure plate 20, which may have a heating and / or cooling device (not shown). The lower tool 14 comprises an array of second pressure plungers 18, each of which is assigned a drive 28. Each drive 28 may, for example, be designed as a hydraulically actuated piston / cylinder mechanism operated by a pressurized hydraulic fluid to raise or lower the assigned second pressure plunger 18. The second pressure plungers 18 may also have a heating and / or cooling device, for example a fluid duct through which a temperature-adjustable fluid flows, or an IR-based electric or induction heating element.

[0039] A working space 40 is defined between the second pressure plunger 18 of the lower tool 14 and the pressure plate 20 of the upper tool 12 into which the carrier frame 30 can be inserted or pushed and into which the components of the assembly 22 to be connected are placed.

[0040] The operation of the carrier frame 30 will be described in more detail with reference to FIGS. 2 and 3. The carrier frame 30 includes an outer frame 34 with a central opening in which an inner frame 36 is disposed. In this embodiment, a total of five substrates 24 are arranged on the inner frame 36 and held in a laterally guided manner. For example, the inner frame 36 holds three components 26, e.g., heat sinks or carrier plates for power semiconductor components, such as semiconductor units or molds in which multiple semiconductor components have already been bonded and pre-encapsulated. Next, each of the first pressure plungers 16 is placed on the components 26, and the three first pressure plungers 16 assigned to each of the substrates 24 are placed in a laterally guided manner on the guide frames 32. Thus, each guide frame 32 extends above a respective one of the substrates 24.

[0041] The carrier frame 30 is covered by the substrate 24 and has an opening or penetration through which the second pressure plunger 18 can pass to directly contact the assembly 22 or the substrate 24 .

[0042] In the sintering apparatus 10 shown in the example, a total of five assemblies 22 can be connected by pressure sintering, and each assembly 22 includes a common substrate 24 and three components 26 arranged in a row on the substrate. Accordingly, the second pressure plungers 18, each including an assigned drive unit 28, are arranged in a matrix, each including five rows of three second pressure plungers 18 or three drive units 28. The arranged first pressure plungers 16, components 26, second pressure plungers 18, and drive units 28 are aligned with one another, i.e., the above-mentioned components are arranged in 15 stacks in a plan view, i.e., arranged so as to overlap vertically in the effective direction of the pressure P.

[0043] The loading of the assemblies 22, the guide frame 32, and the first pressure plunger 16 into the carrier frame 30 preferably takes place outside the sintering machine 10. After the loading is complete, the carrier frame 30 with the elements arranged thereon is inserted into the sintering machine 10. The corresponding rest position is shown in FIG. 1, where the sintering machine 10 is shown in longitudinal section, so that a row comprising five pressure plungers 16, 18 and their corresponding five assemblies 22 and five drive devices 28 is visible in total. In contrast, the cross-sectional views shown in FIGS. 4 to 7 represent a cross section, so that in each case only one assembly 22 comprising a base plate 24 and three arranged components 26 is visible. Therefore, only three pressure plungers 16, 18 and three drive devices 28 are shown here.

[0044] 4, the second pressure plunger 18 may have a two-part plunger element 42, with an upper plunger element 44 facing the pressure plate 20 and a lower plunger element 46 facing the assigned drive device 28. The contact surface 48 between the upper plunger element 44 and the lower plunger element 46 is designed as a spherical surface, allowing the upper plunger element 44, which is in contact with the assembly 22 at its underside, to self-align by a slight sliding movement along the spherical surface. This makes it possible to avoid pressure peaks occurring inside the assembly 22.

[0045] In an embodiment of the operating method for operating the sintering apparatus 10, first, according to Fig. 4, only the central second pressure plunger 18 assigned to each assembly 22 is lifted. According to Fig. 5, the outer second pressure plungers 18 are lifted with a time delay, so that a certain height difference can temporarily occur between the upper sides of the second pressure plungers 18. As soon as the second pressure plungers 18 come into contact with the underside of the respective base plates 24 of the assembly 22, the above-mentioned assembly 22 is lifted from the carrier frame 30 in the effective direction of the pressure force, and at the same time, the arranged first pressure plungers 16 are lifted from the assigned guide frames 32.

[0046] 6, when the first pressure plunger 16 is lifted, it comes into contact with the pressure plate 20, and a reaction force counteracting the pressure force P generated by the drive device 28 is accumulated, causing a pressure increase inside the assembly 22. The heat required for heating the pressure sintering is provided by heating the pressure plate 20 or the second pressure plunger 18.

[0047] The operating position of the sintering apparatus 10 shown in FIG. 6 is maintained for a predetermined period of time until the formation of sintered bonds between the components of the assembly 22 is complete.

[0048] 7, after the sintering operation is completed, the drive device 28 then operates to lower the second pressure plunger 18 relative to the effective direction of the pressure force P. As a result, the assembly 22 including the disposed pressure plunger 16 also lowers and returns to the carrier frame 30 or guide frame 32. After the lowering process is completed, the carrier frame 30 with the sintered assembly 22 received therein can be moved out of the sintering apparatus 10, and a further carrier frame 30 including the assembly 22 to be sintered can be moved to perform a further sintering operation.

[0049] Further Figures 8 and 9 show alternative second and third embodiments of the sintering machine 10, in which a multi-drive unit comprising a plurality of drives 28, 28.1, 28.2 is arranged in the upper tool 12, see Figure 8 for the second embodiment, or in both the upper tool 12 and the lower tool 14, see Figure 9 for the third embodiment. Generally speaking, the second and third embodiments of Figures 8 and 9 are adapted in design to the first embodiment described in detail with reference to Figures 1 to 7. Therefore, the following is intended to describe only the different features.

[0050] The embodiment 10 shown in FIG. 8 differs from the embodiment shown in FIG. 1 in that a separate drive 28.1 is assigned to each first pressure plunger 16 and is arranged in the upper tool 12. A pressure plate 20, which functions as the second pressure plunger 18, is provided in the lower tool. The pressure plate 20 supports the assembly 22 in the lower tool 14 during the sintering operation. As soon as the carrier frame 30 including the assembly 22 and the guide frame 32 including the arranged first pressure plungers 16 are introduced into the working space 40, e.g., in a flow production configuration, by a conveying device (not shown), for example, from a preheating chamber to a vacuum-capable process chamber of the sintering apparatus 10, the drive 28.1 can contact the upper side of the first pressure plunger 16 and apply a pressure force P to the assembly 22 in an effective direction toward the lower tool 14. Suitable conveying devices are known, for example, from WO 2021 / 069328. The preheat chamber can preferably include a conductive induction coil located a short distance from the inductively heatable area of the assembly and / or carrier frame 30, insofar as it is capable of inductively increasing the temperature of the assembly, particularly the lower part, preferably the heat sink.

[0051] FIG. 9 shows a third embodiment 10, which essentially represents a combination of the embodiments of FIGS. 1 to 8. While in FIG. 1 the first pressure plunger 16 of the first embodiment is supported by a pressure plate 20 on the upper tool 12, and in FIG. 8 the second pressure plunger 18 is designed as a pressure plate 20 on the lower tool 14, in the third embodiment of FIG. 9 the pressure plate is omitted. A plurality of drives 28.1 are each assigned to the first pressure plunger 16 and are located on the upper tool 12. A plurality of drives 28.2 are each arranged on the lower tool 14 to drive the second pressure plunger 18. To this end, the carrier frame 30 has a through-hole 52 through which the second pressure plunger 18 can be applied. The pressure plunger 18 has an elastic pin-contact heat transfer device 50 to enable rapid heat transfer and compensate for any unevenness and non-parallelism between the surface of the pressure plunger 18 and the underside of the assembly 22.

[0052] Each assembly 22 is pressed into a sandwich shape by the drive unit 28.1 and the drive unit 28.2, and the temperature, pressure, travel distance, etc. can be set separately for each assembly 22. The third embodiment is particularly suitable for sintering non-uniform assemblies 22 in parallel.

[0053] The process atmosphere in the sintering apparatus 10 can preferably be set and advantageously made to flow with a cleaning gas such as formic acid and to remove oxygen up to a vacuum to prevent oxidation. [Explanation of symbols]

[0054] Reference Code List 10 Sintering equipment 12 Upper Tools 14 Lower Tool 16 First pressure plunger 18 Second pressure plunger 20 Pressure Plate 22 Assembly 24 PCB 26 parts 28, 28.1, 28.2 Drive, upper tool drive, lower tool drive 30 Carrier Frame 32 Guide Frame 34 outer frame 36 Inner frame 40 workspace 42 Plunger element 44 Upper plunger element 46 Lower plunger element 48 Contact surface 50 Pin Contact Heat Transfer Device 52 Carrier frame penetration P: Effective direction of pressure

Claims

1. A sintering device (10) for simultaneously connecting components of a plurality of electronic assemblies (22) arranged adjacent to one another by pressure sintering, comprising an upper tool (12) and a lower tool (14), including a plurality of first pressure plungers (16) assignable to the upper tool (12) and at least one, in particular a plurality of second pressure plungers (18) assigned to the lower tool (14), between which the assemblies (22) are received, and each of the first pressure plungers (16) and / or each of the at least one second pressure plunger (18) the sintering device (10) being assigned to a drive device (28, 28.1, 28.2) configured to apply a pressing force (P) to one of the assemblies (22) by axially moving the assigned first pressing plunger (16) and / or the assigned second pressing plunger (18) along an effective direction of the pressing force (P), the first pressing plunger (16) being positioned on the assembly (22) before the start of the pressing operation and pressing the assembly (22) against the at least one second pressing plunger (18) upon application of the pressing force.

2. 2. The sintering apparatus according to claim 1, wherein the first pressing plunger (16) is supported against a pressing plate (20) of the upper tool (14), and the at least one drive (28, 28.2) of the lower tool (14), in particular a respective drive (28, 28.2) assigned to each second pressing plunger (18), applies the pressing force P via the at least one second pressing plunger (18) in an effective direction in the direction of the upper tool (12); or the at least one second pressing plunger (18) is supported against or formed from a pressing plate (20) of the lower tool (14), and the at least one drive (28, 28.1) of the upper tool (12), in particular a respective drive (28, 28.1) assigned to each first pressing plunger (16), applies the pressing force P in an effective direction in the direction of the lower tool (14).

3. 2. The sintering apparatus (10) according to claim 1, wherein a drive (28, 28.1) of the upper tool (12) is assigned to the plurality of first pressure plungers (16), a drive (28, 28.2) of the lower tool (14) is assigned to the plurality of second pressure plungers (18), and each electronic assembly (22) is subjected to the influence of the drive (28, 28.1, 28.2) of the upper tool (12) and the lower tool (14) on both sides, since the effective directions of the pressure force (P) are opposite.

4. 4. The sintering device (10) according to claim 1, wherein each drive (28, 28.1, 28.2) is individually controllable, preferably hydraulically, electrically, piezoelectrically or magnetostrictively, with respect to the travel distance and / or the applied pressure force (P).

5. 10. A sintering apparatus (10) according to any of the preceding claims, wherein each of the second pressure plungers (18) is connected to an assigned drive device (28, 28.2) and / or has a respective heating and / or cooling device, preferably a pin contact heat transfer device.

6. 10. The sintering device (10) according to any of the above claims, wherein a carrier frame (30) is provided which can be inserted into the sintering device (10), in which at least the components of the assembly (22) are held so as to be laterally guided, preferably together with the first pressure plunger arranged thereon, the carrier frame (30) preferably having a through-hole (52) assigned to the assembly (22) and through which the second pressure plunger (18) can be in mechanical and thermal contact with the assembly (22), and preferably the carrier frame (30) has a higher thermal expansion coefficient than the upper part of the assembly (22).

7. 7. The sintering apparatus (10) of claim 6, wherein at least one guide frame (32) is preferably removably disposed on the carrier frame (30) and configured to guide the first pressure plunger (16) laterally relative to the assembly (22).

8. 10. The sintering apparatus (10) according to any one of the preceding claims, wherein each of the first and / or second pressing plungers (18) has a plunger element (42) axially movable along the effective direction of the pressing force (P) and a contact surface (48) capable of contacting a component of the assembly (22), the contact surface (48) being tiltably mounted relative to the plunger element (42) about at least one spatial axis.

9. 10. The sintering apparatus (10) according to any of the preceding claims, wherein a plurality of first pressure plungers (16) arranged adjacent to one another are assigned to each second pressure plunger (18), or a plurality of second pressure plungers (18) arranged adjacent to one another are assigned to each first pressure plunger (16).

10. A method according to the invention for simultaneously connecting components of a plurality of electronic assemblies (22) arranged next to one another by pressure sintering in a sintering device (10), in particular according to any of the preceding claims, said sintering device (10) comprising a plurality of first pressure plungers (16) and at least one, in particular a plurality of second pressure plungers (18), between which said assemblies (22) are received, said first pressure plunger (16) and / or said at least second pressure plunger (18) each being movable axially along an effective direction of a pressure force (P) by an assigned drive (28, 28.1, 28.2) so as to apply said pressure force to one of said assemblies (22), a. placing the first pressurizing plunger (16) onto the assembly (22); b) inserting the assembly (22) into the sintering apparatus (10) together with the first pressure plunger and into alignment with the second pressure plunger (18); c) performing a sintering operation by operating the drive device (28, 28.1, 28.2) to move the first pressure plunger (16) and / or the at least second pressure plunger (18) positioned opposite the first pressure plunger (16) to apply a counterforce from a rest position to a working position in which the assembly (22) is pressurized together between the first pressure plunger (18) and the at least second pressure plunger (18).

11. 11. The method according to claim 10, wherein at least the step of performing the sintering operation comprises heating and / or cooling the first pressing plunger (16) and / or the at least second pressing plunger (18), the first pressing plunger (16) preferably being maintained at a lower temperature level than the second pressing plunger (18).

12. 12. The method according to claim 10 or 11, wherein the various drives (28, 28.1, 28.2) for moving the first pressure plunger (16) and / or the second pressure plunger (18) to the working position are actuated with a time delay.

13. 13. The method according to claim 12, wherein the various drives (28, 28.1, 28.2) are activated with a time delay, such that at least one drive (28, 28.1, 28.2) located in a central region is activated first, and the further outer drives (28, 28.1, 28.2) are activated at time intervals.

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