Mask plate frame and mask plate assembly

Abstract

This application discloses a mask plate frame and a mask plate assembly. The mask plate frame includes a main body and a mounting block assembly. The main body has a deposition opening and a solid area surrounding the deposition opening and having a mounting surface. The mounting block assembly includes a plurality of mounting blocks disposed on the mounting surface of the main body and detachably connected to the main body. In the mask plate frame disclosed in this application, since the mounting blocks are detachably connected to the main body, the mask plate / support bar does not need to be separated from the mounting blocks during the mask plate precision adjustment process; only the relative positions of the mounting blocks and the main body need to be adjusted, preventing damage to the mask plate and support bar. This allows the mask plate and support bar to be reused, reducing mask plate loss and saving production costs. At the same time, the adjustment process is simplified and the desired stretching precision can be achieved.

Description

[Technical Field]

[0001] This application claims priority to Chinese Patent Application No. 202211174360.4, entitled "Mask Plate Frame and Mask Plate Assembly," filed on September 26, 2022, the entire contents of which are incorporated herein by reference.

[0002] The present application is in the field of display technology, and in particular relates to mask plate frames and mask plate assemblies. [Background technology]

[0003] Organic light-emitting diodes (OLEDs), also known as organic electroluminescence displays or organic light-emitting semiconductors, are increasingly replacing liquid crystal displays (LCDs) due to their many advantages, including low driving voltage, active light emission, wide viewing angle, high efficiency, fast response speed, and ease of implementation in full-color, large-area wall-mounted displays and flexible displays.

[0004] In OLED manufacturing technology, the mask plate for vacuum deposition is a crucial component, as it controls the deposition position of organic materials on the substrate. If there is an error in the accuracy of a mask plate during the deposition process, the mask plate must be removed and reassembled, resulting in material waste and increased production costs. Summary of the Invention [Problem to be solved by the invention]

[0005] The embodiments of the present application provide a mask plate frame and a mask plate assembly that can reduce the loss of the mask plate in the process of adjusting the stretching accuracy of the mask plate and achieve the desired effect of the stretching accuracy. [Means for solving the problem]

[0006] An embodiment of a first aspect of the present application provides a mask plate frame comprising a main body including a deposition opening and a solid area surrounding the deposition opening and having a mounting surface, and a mounting block assembly including a plurality of mounting blocks provided on the mounting surface of the main body and detachably connected to the main body.

[0007] An embodiment of a second aspect of the present application further provides a mask plate assembly including any of the mask plate frames according to the first aspect of the present application, further including a mask plate and a support bar, wherein a mounting block in the mask plate frame corresponds to one of the mask plates or one of the support bars, and both ends of the mask plate are fixed to the surface of the mounting block on the side away from the substance area in the thickness direction of the substance area, and both ends of the support bar are fixed to the surface of the mounting block on the side away from the substance area in the thickness direction of the substance area.

[0008] The mask plate frame according to the present application includes a main body and a mounting block assembly. The main body has a deposition opening and a solid area surrounding the deposition opening. During the deposition process, the solid area can shield the deposition material, while the deposition opening allows the deposition material to pass through and be deposited at a predetermined position on the substrate. The solid area has a mounting surface for mounting a mounting block that is detachably connected to the main body. The surface of the mounting block away from the mounting surface supports a support bar or a mask plate, allowing the mask plate / support bar to be fixed to the main body via the mounting block for tensioning the mask plate. Each mounting block corresponds to one mask plate or one support bar, so that if the tensioning accuracy changes due to external influences, the relative position of the mounting block and the main body can be changed to adjust the tensioning accuracy of the mask plate. Because the mounting block and the main body are detachably connected, the adjustment process does not require separating the mask plate / support bar from the mounting block; it only requires adjusting the positional relationship between the mounting block and the main body, preventing damage to the mask plate and the support bar. This allows the mask plate and support bar to be reused, reducing the loss of the mask plate and saving production costs, while facilitating the adjustment process and achieving the desired stretching accuracy. [Brief explanation of the drawings]

[0009] In order to more clearly explain the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required for the embodiments of the present application. Obviously, the drawings described below are only some embodiments of the present application, and those skilled in the art can obtain other drawings based on these drawings without any creative efforts.

[0010] [Figure 1] 1 is a schematic structural diagram of a mask plate frame according to an embodiment of the present application, as viewed from above; [Figure 2] FIG. 2 is a schematic cross-sectional view taken along the line AA' in FIG. [Figure 3]1 is a reference diagram of a mask plate frame according to an embodiment of the present application in use; [Figure 4] FIG. 10 is a schematic structural diagram of another mask plate frame according to an embodiment of the present application. [Figure 5] FIG. 10 is a schematic structural diagram of another mask plate frame according to an embodiment of the present application. [Figure 6] FIG. 2 is an enlarged schematic structural diagram of the P region of FIG. 1. [Figure 7] 2 is another enlarged structural schematic diagram of the P region of FIG. 1. [Figure 8] FIG. 10 is a schematic structural diagram of another mask plate frame according to an embodiment of the present application. [Figure 9] FIG. 10 is a schematic structural diagram of another mask plate frame according to an embodiment of the present application. [Figure 10] FIG. 10 is a schematic structural diagram of another mask plate frame according to an embodiment of the present application. [Figure 11] FIG. 11 is a schematic cross-sectional view taken along the line BB' in FIG. [Figure 12] FIG. 10 is a schematic structural diagram of another mask plate frame according to an embodiment of the present application. [Figure 13] FIG. 10 is a schematic structural diagram of another mask plate frame according to an embodiment of the present application. [Figure 14] FIG. 10 is a schematic structural diagram of another mask plate frame according to an embodiment of the present application. [Figure 15] 10A and 10B are schematic structural diagrams of a first position restricting member and a second position restricting member in another mask plate frame according to an embodiment of the present application. [Figure 16] 1 is a schematic structural diagram of a mask plate assembly according to an embodiment of the present application; DETAILED DESCRIPTION OF THE INVENTION

[0011] The features and exemplary embodiments of each aspect of the present application will be described in detail below. In the following detailed description, many specific details are presented to provide a thorough understanding of the present application. However, it will be apparent to those skilled in the art that the present application may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide examples of the present application for a better understanding of the present application.

[0012] As used herein, relational terms such as "first" or "second" are merely used to distinguish one entity or operation from another and do not necessarily require or imply any actual relationship or ordering between those entities or operations. Additionally, the terms "comprises," "includes," or any variation thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or device that includes a set of elements includes not only those elements but also other elements not expressly listed or that are inherent in such process, method, article, or device. Unless further limited, an element qualified by the phrase "comprises" does not exclude the presence of other identical elements in a process, method, article, or device that includes that element.

[0013] The inventors have found that a mask plate for vacuum deposition is a crucial component in OLED manufacturing technology, controlling the deposition position of organic materials on a substrate. During the deposition process, the mask plate needs to be fixed to a mask plate frame to support the mask plate. However, as deposition time and the number of depositions increase, the difference between the deformation of the mask plate and the substrate becomes increasingly large due to the influence of thermal radiation. Therefore, to improve deposition accuracy, the mask plate must be adjusted to match the deposition chamber during the mounting process. The inventors have found that if a mask plate has an inaccuracy, it must be removed and remounted, resulting in material waste and increased production costs. Based on their research into the above problem, the inventors have proposed a mask plate frame and a mask plate assembly that allow for both adjustment of the mask plate mounting accuracy and reuse of the mask plate.

[0014] For a better understanding of the present application, a mask plate frame and a mask plate assembly according to an embodiment of the present application will be described in detail below with reference to FIGS.

[0015] 1 and 2 , an embodiment of the present application provides a mask plate frame 1 including a main body 10 and a mounting block assembly 11. The main body 10 includes a deposition opening 101 and a solid region 102 surrounding the deposition opening 101 and having a mounting surface 1021. The mounting block assembly 11 includes a plurality of mounting blocks 111, which are disposed on the mounting surface 1021 of the main body 10 and are detachably connected to the main body 10.

[0016] The mask plate frame 1 according to the present application includes a main body 10 and a mounting block assembly 11. The main body 10 has a deposition opening 101 and a substance area 102 surrounding the deposition opening 101. During the deposition process, the substance area 102 can shield the deposition material, while the deposition opening 101 allows the deposition material to pass through and be deposited at a predetermined position on the substrate. The substance area 102 has a mounting surface 1021 on which a mounting block 111, which is detachably connected to the main body 10, is mounted. The surface of the mounting block 111 away from the mounting surface 1021 supports a support bar 22 or a mask plate 21, allowing the mask plate 21 / support bar 22 to be fixed to the main body 10 via the mounting block 111 and the mask plate 21 to be stretched. Each mounting block 111 corresponds to one mask plate 21 or one support bar 22. Therefore, if the tensioning accuracy changes due to external influences, the relative position of the mounting block 111 and the main body 10 can be changed to adjust the tensioning accuracy of the mask plate 21. Because the mounting block 111 and the main body 10 are detachably connected, the adjustment process does not require separating the mask plate 21 / support bar 22 from the mounting block 111; it only requires adjusting the relative position of the mounting block 111 and the main body 10, preventing damage to the mask plate 21 and support bar 22. This allows the mask plate 21 and support bar 22 to be reused, reducing loss of mask plates 21 and saving production costs. At the same time, the adjustment process is simplified and the desired tensioning accuracy can be achieved.

[0017] In the mask plate frame 1 according to the present application, by adjusting the positions of the mounting block 111 and the main body 10, it is possible to adjust the tension and contraction of the mask plate 21 and the tilt angle of the mask plate 21. Furthermore, by adjusting the positions of the support bars 22 in synchronization with this, it is possible to adjust the tension accuracy of the mask plate 21.

[0018] In the mask plate frame 1 of the present application, the mask plate 21 and the surface of the mounting block 111 facing away from the mounting surface 1021, and the support bar 22 and the surface of the mounting block 111 facing away from the mounting surface 1021, may both be fixed by welding, thereby making the fixing effect stronger.

[0019] In the mask plate frame 1 according to the present application, the substance area 102 may be a closed ring-shaped area that surrounds the periphery of the vapor deposition opening 101, or may be an open shape that surrounds only a portion of the vapor deposition opening 101, but is not particularly limited in the present application.

[0020] In one possible embodiment, as shown in FIG. 3 , each mounting block 111 corresponds to one mask plate 21, and each mask plate 21 may correspond to two mounting blocks 111. Specifically, the mask plate 21 is elongated and includes a first end and a second end that face each other along its longitudinal direction x. The mask plate 21 is stretched through both ends, and each of the first end and the second end is fixed to one mounting block 111 and connected to the main body 10 via the mounting block 111, thereby achieving the stretching of the mask plate 21. When adjusting the stretching accuracy of the mask plate 21, the relative positions of the two mounting blocks 111 fixed to the mask plate 21 and the main body 10 may be adjusted simultaneously, or only the relative position of one of the mounting blocks 111 and the main body 10 may be adjusted.

[0021] In one possible embodiment, as shown in FIG. 3 , each mounting block 111 corresponds to one support bar 22, and each support bar 22 may correspond to two mounting blocks 111. Specifically, the support bar 22 is elongated and includes a first end and a second end that face each other along its longitudinal direction x. The support bar 22 is installed at both ends, and each of the first end and the second end is fixed to one mounting block 111 and connected to the main body 10 via the mounting block 111, thereby supporting the mask plate 21. When adjusting the tension accuracy of the mask plate 21, the relative positions of the mounting blocks 111 on which the support bars 22 are mounted and the main body 10 may be adjusted simultaneously, or only the relative position of one of the mounting blocks 111 and the main body 10 may be adjusted.

[0022] It should be understood that the shape and size of the mounting block 111 corresponding to the mask plate 21 may be the same as or different from the shape and size of the mounting block 111 corresponding to the support bar 22, but are not particularly limited thereto in this application.

[0023] 4, the substance area 102 includes a via hole 1022 that opens to the mounting surface 1021, and a fixing post 1112 is provided on one surface of the mounting block 111. The mounting block 111 is inserted and fitted into the via hole 1022 of the substance area 102 by the fixing post 1112.

[0024] 4, the via hole 1022 may be a blind hole extending in the thickness direction of the solid region 102. Alternatively, as shown in FIG. 5, the via hole 1022 may be a through hole penetrating the solid region 102 in the thickness direction of the solid region 102.

[0025] In the above embodiment, the mounting block 111 and the solid area 102 are detachably connected to each other through the insertion and fitting of the fixing posts 1112 and the via holes 1022. This fixing method is simple and the adjustment process is convenient.

[0026] 6 and 7, in one possible embodiment, the cross-sectional shape and size of the fixed posts 1112 are the same as those of the via holes 1022. Specifically, the cross-sectional shape of the via holes 1022 is a circle or a regular polygon. The cross-section of the via holes 1022 is parallel to the mounting surface 1021, and the cross-section of the fixed posts 1112 is perpendicular to the length direction of the fixed posts 1112. Naturally, the cross-sectional shape of the via holes 1022 may be other shapes as long as it can be guaranteed that they are the same as those of the corresponding fixed posts 1112, but is not particularly limited here.

[0027] In the above embodiment, the cross section of the via hole 1022 is circular or regular polygonal, so that when adjusting the position of the mask plate 21 or the support bar 22, the position of the via hole 1022 into which the fixing post 1112 is inserted can be swapped, and then the fixing post 1112 can be suitably inserted into the via hole 1022. This prevents the insertion direction of the fixing post 1112 from being significantly restricted by the diameter or shape of the via hole 1022, and allows the fixing post 1112 to be inserted into the via hole 1022 at more angles. For example, if the cross section of the via hole 1022 and the cross section of the fixing post 1112 are both circular, the fixing post 1112 can rotate 360° within the via hole 1022, that is, the fixing post 1112 can be fitted into the via hole 1022 at any angle. When the cross-sectional shapes of the via hole 1022 and the fixed post 1112 are both regular hexagonal, the fixed post 1112 can be rotated in 60° increments to fit into the via hole 1022, allowing for six angles to be selected, thereby allowing for more appropriate adjustment when correcting the angle of the mask plate 21.

[0028] In one possible embodiment, the cross-sectional shape of the via hole 1022 may be different from that of the corresponding fixed post 1112. Specifically, the cross-sectional shape of the via hole 1022 may be circular, and the cross-sectional shape of the fixed post 1112 may be polygonal, and the diameter of the cross-section of the via hole is the same as the diameter of the circumscribed circle of the cross-section of the fixed post 1112, so that the fixed post 1112 can be inserted into the via hole 1022 and adjusted to the size of the via hole 1022.

[0029] In one possible embodiment, the spacing between adjacent via holes 1022 is the same, making it easier for the fixing posts 1112 of each mounting block 111 to fit into different via holes 1022. The spacing between adjacent via holes 1022 may be 1.5 to 2.5 μm, which makes it easier to ensure the accuracy of the stretching after adjustment. Specifically, the spacing between adjacent via holes 1022 may be 1.5 μm, 1.8 μm, 1.9 μm, 2 μm, 2.3 μm, 2.5 μm, etc., but is not particularly limited in the present application. Here, the spacing between adjacent via holes 1022 refers to the distance between the central axes of adjacent via holes.

[0030] In one possible embodiment, the inner diameter of the via hole 1022 may be 1.5 to 2.5 μm, where the inner diameter is the diameter of the inscribed circle of the via hole, and may be specifically 1.5 μm, 1.8 μm, 1.9 μm, 2 μm, 2.3 μm, 2.5 μm, etc., but is not particularly limited in this application.

[0031] 8 and 9, in one possible embodiment, the via holes 1022 are through-holes that penetrate the solid region 102 in the thickness direction of the solid region 102. The mask plate frame 1 further includes lock blocks 12 that correspond one-to-one to the fixed posts 1112. The lock blocks 12 are provided at the ends of the fixed posts 1112 that are remote from the mounting blocks 111, and are screwed to the fixed posts 1112.

[0032] In the above embodiment, a lock block 12 is provided at the end of the fixed post 1112, which is screwed onto the fixed post 1112. After the end of the fixed post 1112 passes through the via hole 1022, the lock block 12 is fitted onto the end of the fixed post 1112 and rotated, whereby the lock block 12 cooperates with the solid region 102 to fix the position of the fixed post 1112 and prevent rattle of the fixed post 1112 within the via hole 1022. In this case, it is preferable that the fixed post 1112 has a circular cross section and is threaded on its outer periphery.

[0033] In the above embodiment, the substance region 102 is provided with a lock block accommodating section 1022 for accommodating the lock block 12. After the lock block 12 is screwed onto the fixed post 1112, it is accommodated in the lock block accommodating section 1022, preventing the lock block 12 from protruding from the substance region 102 and affecting the positioning of the substance region 102.

[0034] In one possible embodiment, the mounting block 111 and the substance area 102 are fixed by electromagnetic attraction, and at least one of the mounting block 111 and the substance area 102 is an electromagnet.

[0035] In the above embodiment, the mounting block 111 and the solid area 102 are fixed by electromagnetic attraction, so that the relative position between the mounting block 111 and the solid area 102 can be adjusted arbitrarily, thereby increasing the accuracy of the position adjustment and making the adjustment process more convenient.

[0036] At least one of the mounting block 111 and the substance area 102 is an electromagnet. Specifically, both may be electromagnets, or one may be an electromagnet and the other may be a magnetically attractable material, but this is not particularly limited in the present application. By using at least one of the mounting block 111 and the substance area 102 as an electromagnet, its magnetism can be controlled by controlling the flow of electricity. When adjusting the position, the power is turned off to facilitate movement of the mounting block 111, and after the position selection is completed, the relative position between the mounting block 111 and the substance area 102 is fixed by controlling the flow of electricity, which simplifies the adjustment process and improves the accuracy of the position adjustment.

[0037] 10 and 11 , in one possible embodiment, a mounting block 111 is used to mount the mask plate 21 and / or the support bar 22. The mask plate frame 1 further includes a first position restricting member 13 and a second position restricting member 14, which are detachably connected to the substance region 102, respectively, and which are located on both sides of the mounting block 111 in the longitudinal direction x of the mask plate 21 and / or the support bar 22, respectively, and which are fitted to clamp the mounting block 111.

[0038] In the above embodiment, the method for fixing the first position restricting member 13 and the second position restricting member 14 to the substance region 102 may be the same as the method for fixing the mounting block 111 to the substance region 102. Specifically, fixed columns 1311 and 1411 are provided on the surfaces of the first position restricting member 13 and the second position restricting member 14 facing the mounting surface 1021, respectively. The fixed columns 1311 and 1411 are inserted into and fixed in via holes 1022 in the substance region 102, thereby realizing the fixation of the first position restricting member 13 and the second position restricting member 14 to the substance region 102. Alternatively, the first position regulating member 13 and the second position regulating member 14 can be electromagnets and the solid region 102 can be made of a magnetic material that can be magnetically attracted by an electromagnet, or the solid region 102 can be made of an electromagnet and the first position regulating member 13 and the second position regulating member 14 can be made of a magnetic material that can be magnetically attracted by an electromagnet, or the first position regulating member 13, the second position regulating member 14 and the solid region 102 can all be electromagnets, thereby fixing the first position regulating member 13 and the second position regulating member 14 to the solid region 102 by magnetic attraction.

[0039] In the above embodiment, the first position restricting member 13 and the second position restricting member 14 cooperate to clamp the mounting block 111, thereby further fixing the relative position between the mounting block 111 and the substance area 102, thereby further ensuring the positional accuracy between the mounting block 111 and the substance area 102. Specifically, after being fixed to the mounting block 111, the mask plate 21 and / or the support bar 22 apply a tensile force to the mounting block 111 in the length direction x of the mask plate 21 and / or the support bar 22 themselves. The first position restricting member 13 and the second position restricting member 14 are provided on both sides of the mounting block 111 in the length direction x of the mask plate 21 and / or the support bar 22 themselves, thereby providing support to the mounting block 111 from both sides of the mounting block 111 and thereby resisting the tensile force and reducing the effect of the tensile force on the positional accuracy of the mounting block 111.

[0040] The display panel may be provided with one of a first position regulating member 13 and a second position regulating member 14 so as to provide a supporting force to the mounting block 111 from one side, but this application is not particularly limited thereto.

[0041] In one possible embodiment, as shown in Figure 12, the second position control member 14 is located on the side of the mounting block 111 away from the center of the mask plate 21 or support bar 22, and covers the edge of the mask plate 21 or support bar 22 away from the center on the surface away from the mounting surface 1021 of the mounting block 111.

[0042] In the above embodiment, the second positioning member 14 has an inverted L-shaped cross section parallel to the arrangement direction of the first positioning member 13 and the second positioning member 14 and parallel to the arrangement direction of the mounting block 111 and the substance area 102. This covers the edge of the mounting block 111 away from the mounting surface 1021, away from the center of the mask plate 21 or the support bar 22, and provides the mounting block 111 with an acting force toward the first positioning member 13 and toward the substance area 102, thereby ensuring the positional accuracy of the mounting block 111 and the substance area 102. In addition, both the first positioning member 13 and the second positioning member 14 are detachably connected to the substance area 102, which facilitates position adjustment in synchronization with the mounting block 111. After damage, only the damaged member can be replaced instead of the entire mask plate frame 1, thereby saving costs.

[0043] In one feasible embodiment, as shown in Figure 12, in the thickness direction of the solid area 102, the distance between the surface of the second position control member 14 facing away from the solid area 102 and the surface of the mounting block 111 facing away from the solid area 102 is a, and a is less than the thickness h of the mask plate 21 or support bar 22.

[0044] In the deposition process, the substrate is placed on the side of the mask plate 21 away from the mask plate frame 1, and the deposition source is placed on the side of the mask plate frame 1 away from the substrate. The deposition material in the deposition source passes sequentially through the deposition opening 101 in the mask plate frame 1 and the mask plate 21 to be deposited on the substrate. By making the distance a between the surface of the second position regulating member 14 on the side away from the substance area 102 and the surface of the mounting block 111 on the side away from the substance area 102 equal to or less than the thickness of the mask plate 21 or the support bar 22, the substrate can be brought closer to the mask plate 21, making the deposition position of the deposition material more accurate and contributing to improved deposition quality. This also prevents the second position regulating member 14 from interfering with the mask plate 21 or the support bar during the deposition process, thereby affecting the deposition quality.

[0045] In one feasible embodiment, as shown in Figure 13, the end of the second position regulating member 14 away from the actual region 102 includes a protruding end 141 protruding toward the first position regulating member 13, and the end of the mounting block 111 away from the actual region 102 on the side facing the second position regulating member 14 has a accommodating portion 1113 for accommodating the protruding end 141, and the protruding end 141 of the second position regulating member 14 is fitted into the accommodating portion 1113 of the mounting block 111.

[0046] In the above embodiment, the protruding end 141 of the second position restricting member 14 fits into the accommodation portion 1113 of the mounting block 111, and the second position restricting member 14 applies an acting force to the mounting block 111 toward the first position restricting member 13 and an acting force toward the substance region 102, thereby restricting the position of the mounting block 111 by the second position restricting member 14. In addition, the surface of the second position restricting member 14 on the side away from the substance region 102 and the surface of the mounting block 111 on the side away from the substance region 102 are made flush with each other, thereby preventing interference with the fixation of the mask plate 21.

[0047] In one possible embodiment, the first position restricting member 13 and the second position restricting member 14 may be arranged to at least partially surround the mounting block 111. As shown in Figures 14 and 15, the first position restricting member 13 and the second position restricting member 14 are fitted together to form a accommodating cavity 1111 for surrounding the mounting block 111 along the circumferential direction of the mounting block 111, and the accommodating cavity 1111 has an opening on the side away from the solid region.

[0048] In the above embodiment, a storage cavity 1111 for storing the mounting block 111 is formed between the first position restricting member 13 and the second position restricting member 14, and the side walls of the storage cavity 1111 surround the mounting block 111 along the circumferential direction of the mounting block parallel to the direction of the mounting surface 1121. This helps support the mounting block 111 and reduces its positional deviation, thereby further restricting the position of the mounting block 111 and improving its positional accuracy.

[0049] As shown in Figure 16, the present application provides a mask plate assembly 2 including a mask plate frame 1 according to the above embodiment of the present application, further including a mask plate 21 and a support bar 22, wherein the mounting blocks 111 in the mask plate frame 1 correspond to one mask plate 21 or one support bar 22, and both ends of the mask plate 21 are fixed to the surface of the mounting block 111 on the side away from the substance area 102 in the thickness direction of the substance area 102, and both ends of the support bar 22 are fixed to the surface of the mounting block 111 on the side away from the substance area 102 in the thickness direction of the substance area 102.

[0050] The mask plate 21 and the support bar 22 are fixed to a mounting block 111 by welding, and the mounting block 111 is detachably connected to the main body 10 of the mask plate frame 1.

[0051] In the mask plate assembly 2 according to the present application, the mask plate 21 and the support bar 22 are detachably fixed to the main body 10 of the mask plate frame 1 via the mounting block 111. Therefore, depending on the actual deposition situation, the mask plate 21 can be stretched or contracted and its orientation can be adjusted by changing the relative position of the mounting block 111 and the main body 10 without separating the mask plate 21 from the mounting block 111 or the support bar 22 from the mounting block 111. For example, the mask plate 21 includes a precision deposition opening 101. The precision deposition opening 101 may have a certain shape deviation during shipment. This deviation can be compensated for by stretching the mask plate 21 in a specific direction. In this case, the relative position of the mounting block 111 and the main body 10 is adjusted to offset the mask plate 21 by a certain angle from its previous orientation, i.e., the orientation is changed, thereby compensating for the opening shape of the mask plate 21. This contributes to improving the yield of deposition, and also prevents the mask plate 21 from being damaged in the adjustment process, significantly reducing loss of the mask plate 21 and reducing production costs.

[0052] According to the foregoing examples of the present application, these examples are not specifically described in all details, nor are they limited to the specific examples described in the present application. Of course, many modifications and variations will be apparent to those skilled in the art from the above description. These examples are selected and specifically described herein to better explain the principles and practical applications of the present application, thereby enabling those skilled in the art to fully utilize the present application and modifications based thereon. The present application is limited only by the claims, and the full scope and equivalents thereof.

Claims

1. a body including a deposition opening and a solid region surrounding the deposition opening and having a mounting surface; a mounting block assembly including a plurality of mounting blocks provided on the mounting surface of the main body and detachably connected to the main body;

2. 2. The mask plate frame according to claim 1, wherein the solid region is a closed ring-shaped region that surrounds the periphery of the vapor deposition opening.

3. The mask plate frame of claim 1, characterized in that the actual area includes a via hole opening to the mounting surface, a fixed pillar is provided on one surface of the mounting block, and the mounting block is inserted and fitted into the via hole of the actual area by the fixed pillar.

4. The mask plate frame of claim 3, wherein the via hole is a blind hole extending in the thickness direction of the solid region, or the via hole is a through hole penetrating the solid region in the thickness direction of the solid region.

5. The mask plate frame according to claim 3 , wherein the spacing between adjacent via holes is the same.

6. The mask plate frame according to claim 3 , wherein the cross-sectional shape and size of the fixing post are the same as the cross-sectional shape and size of the via hole.

7. 6. The mask plate frame according to claim 5, wherein the cross-sectional shape of the via hole is a circle or a regular polygon.

8. 4. The mask plate frame according to claim 3, wherein the via hole is a through hole penetrating the solid region in the thickness direction of the solid region, and the mask plate frame further includes a lock block corresponding one-to-one to the fixed column, and the lock block is provided at an end of the fixed column away from the mounting block.

9. The mask plate frame according to claim 8 , wherein the lock block is threadedly engaged with the fixed post.

10. The mask plate frame according to claim 8 , wherein the solid region is provided with a lock block receiving portion for receiving the lock block.

11. The mask plate frame according to claim 1 , wherein the mounting block and the substance area are fixed together by electromagnetic attraction.

12. The mask plate frame of claim 11 , wherein at least one of the mounting block and the solid area is an electromagnet.

13. 2. The mask plate frame according to claim 1, wherein the mounting block is for mounting a mask plate and / or a support bar, the mask plate frame further includes a first position regulating member and a second position regulating member, the first position regulating member and the second position regulating member are each detachably connected to the substance area, the first position regulating member and the second position regulating member are each located on both sides of the mounting block in the longitudinal direction of the mask plate and / or the support bar, and the first position regulating member and the second position regulating member are fitted to clamp the mounting block.

14. The mask plate frame of claim 13, wherein the second position control member is located on a side of the mounting block away from the center of the mask plate or the support bar, and covers the edge of the mask plate or the support bar away from the center on the surface of the mounting block away from the mounting surface.

15. A mask plate frame as described in claim 14, wherein the distance between the surface of the second position control member facing away from the actual area and the surface of the mounting block facing away from the actual area is less than the thickness of the mask plate or the support bar.

16. A mask plate frame as described in claim 13, wherein the end of the second position regulating member away from the actual area includes a protruding end protruding toward the first position regulating member, and a storage portion for accommodating the protruding end is formed at the end of the mounting block away from the actual area on the side facing the second position regulating member, and the protruding end of the second position regulating member is fitted into the storage portion of the mounting block by a concave-convex engagement.

17. 14. The mask plate frame of claim 13, wherein the first position regulating member and the second position regulating member are arranged to at least partially surround the mounting block, the first position regulating member and the second position regulating member are fitted together to form a storage cavity for surrounding the mounting block along the circumferential direction of the mounting block, and the storage cavity has an opening on a side away from the actual area.

18. A mask plate assembly comprising a mask plate frame according to any one of claims 1 to 17.

19. 19. The mask plate assembly of claim 18, further comprising a mask plate and a support bar, wherein each mounting block in the mask plate frame corresponds to one of the mask plates or one of the support bars, and both ends of the mask plate are fixed to the surface of the mounting block on the side away from the material area in the thickness direction of the material area, and both ends of the support bar are fixed to the surface of the mounting block on the side away from the material area in the thickness direction of the material area.

20. 19. The mask plate assembly according to claim 18, wherein the mask plate and the support bar are respectively welded to the mounting blocks of the mask plate frame.

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