Lamp and window configuration for substrate processing chamber

Abstract

The present disclosure relates to windows for heat sources (e.g., lamps) and processing chambers, and related methods. In one or more embodiments, a lamp applicable for use in semiconductor manufacturing includes a bulb tube extending along at least a segment of an arcuate profile. The bulb tube defines an arcuate central opening. The lamp includes a filament positioned in the arcuate central opening. The filament extends along at least a segment of the arcuate profile. The lamp includes a reflective coating formed on a first portion of an exterior surface of the bulb tube.

Description

[Technical Field]

[0001] FIELD OF THE DISCLOSURE

[0001] This disclosure relates to heat sources (eg, lamps) and windows for processing chambers, such as chambers suitable for semiconductor processing, and related methods. [Background technology]

[0002] Semiconductor substrates are processed for a wide variety of applications, including the fabrication of integrated and microdevices.

[0003]

[0003] However, thermal processing can be limited in terms of thermal efficiency, temperature uniformity, product life, yield and throughput, chamber cost, and operating cost. As one example, a heating device may have a relatively short operating life. As another example, the temperature on the substrate may become non-uniform during heating, such that the outer edge of the substrate is cooler than the center of the substrate. As a further example, only a relatively small percentage (e.g., 10%) of the heat generated in the chamber may actually be absorbed by the substrate.

[0004]

[0004] Therefore, there is a need for improved chambers and related apparatus and methods that facilitate increased yield and throughput, increased thermal efficiency, improved uniformity during processing, and reduced costs. Summary of the Invention

[0005]

[0005] The present disclosure relates to windows for heat sources (eg, lamps) and processing chambers, and related methods.

[0006] In one or more embodiments, a lamp applicable for use in semiconductor manufacturing includes a bulb tube extending along at least a segment of an arcuate profile. The bulb tube defines an arcuate central opening. The lamp includes a filament positioned in the arcuate central opening. The filament extends along at least a segment of the arcuate profile. The lamp includes a reflective coating formed on a first portion of an exterior surface of the bulb tube.

[0007] In one or more embodiments, a window applicable for use in semiconductor manufacturing includes an outer section and an inner section disposed within the outer section, the inner section including a first outer surface, a second outer surface opposite the first outer surface, and one or more grooves formed in the first outer surface.

[0008] In one or more embodiments, a processing chamber applicable for use in semiconductor manufacturing includes an interior region and a substrate support disposed in the interior region. The substrate support includes a support surface. The processing chamber includes a window at least partially defining a processing region of the interior region. The window includes an outer section and an inner section disposed inside the outer section and having a radial center and a radially outer edge joining the outer section. The inner section includes a first outer surface facing away from the support surface and a second outer surface opposite the first outer surface. The second outer surface faces toward the support surface. The inner section includes one or more grooves formed in the first outer surface. The processing chamber includes a plurality of lamps received in the one or more grooves of the window. The plurality of lamps are supported by the inner section such that the distance between the lamps and the support surface slopes from the radial center to the radially outer edge toward the support surface.

[0009]

[0009] In order that the above-described features of the present disclosure may be understood in detail, the above-summarized disclosure will be more particularly described by reference to embodiments, some of which are illustrated in the accompanying drawings. It should be noted, however, that the accompanying drawings depict only exemplary embodiments and therefore should not be considered limiting in scope, as the present disclosure may admit of other equally effective embodiments. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a schematic cross-sectional side view of a processing chamber according to one or more embodiments. [Figure 2] 2 is a schematic cross-sectional side view of the lamps and windows shown in FIG. 1 according to one or more embodiments. [Figure 3]3 is a schematic top view of the lamps and windows shown in FIG. 2 according to one or more embodiments. [Figure 4] 3 is an enlarged view of the lamps and windows shown in FIG. 2 according to one or more embodiments. [Figure 5] FIG. 5 is a schematic perspective view of a window and multiple lamps shown in FIGS. 1-4 according to one or more embodiments. [Figure 6] 6 is a schematic top view of the lamps and windows shown in FIG. 5 according to one or more embodiments. [Figure 7] 1 is a schematic perspective view of a window and multiple lamps according to one or more embodiments. [Figure 8] 8 is a schematic top view of the lamps and windows shown in FIG. 7 according to one or more embodiments. [Figure 9] 5 is a schematic cross-sectional side view of the lamps and windows shown in FIGS. 1-4 according to one or more embodiments. FIG. [Figure 10] 10 is a schematic top view of the lamps and windows shown in FIG. 9 according to one or more embodiments. [Figure 11] FIG. 10 is a schematic perspective view of the lamps and windows shown in FIG. 9 according to one or more embodiments. [Figure 12] 12 is a schematic cross-sectional view of the lamps and windows shown in FIG. 11 according to one or more embodiments. [Figure 13] 13 is a schematic cross-sectional side view of the lamps and windows shown in FIGS. 9-12 according to one or more embodiments. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0011]

[0023] To facilitate understanding, wherever possible, the same reference numerals have been used to designate identical elements common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.

[0012]

[0024] FIELD OF THE DISCLOSURE The present disclosure relates to heat sources (eg, lamps) and windows for processing chambers, and related methods.

[0013]

[0025] The present disclosure contemplates that terms such as "coupled," "coupled," "coupled," and "coupled" may include, but are not limited to, welding, fusion, melt bonding, interference fitting, and / or fastening such as by using bolts, threaded connections, pins, and / or screws. The present disclosure contemplates that terms such as "coupled," "coupled," "coupled," and "coupled" may include, but are not limited to, integral formation. The present disclosure contemplates that terms such as "coupled," "coupled," "coupled," and "coupled" may include, but are not limited to, direct bonding and / or indirect bonding such as through components such as links.

[0014]

[0026] 1 is a schematic cross-sectional side view of a processing chamber 100 according to one or more embodiments. The processing chamber 100 is a deposition chamber. In one embodiment, which can be combined with other embodiments, the processing chamber 100 is an epitaxial deposition chamber. The processing chamber 100 is used to grow an epitaxial film on a substrate 102. The processing chamber 100 generates a cross-flow of precursors across a top surface 150 of the substrate 102.

[0015]

[0027] The processing chamber 100 includes an upper body 156, a lower body 148 disposed below the upper body 156, and a flow module 112 disposed between the upper body 156 and the lower body 148. In one or more embodiments, the upper body 156 includes an upper clamp ring, and the lower body 148 includes a lower clamp ring. The upper body 156, the flow module 112, and the lower body 148 form a chamber body. Disposed within the chamber body are a substrate support 106, an upper window 250 (e.g., an upper dome), a lower window 110 (e.g., a lower dome), a plurality of upper lamps 210, and a plurality of lower lamps 143. As shown, a controller 120 is used to communicate with the processing chamber 100 and control processes and methods, such as steps of the methods described herein. The substrate support 106 has a support surface 109 that supports a substrate 102.

[0016]

[0028] The substrate support 106 is disposed between the upper window 250 and the lower window 110. The substrate support 106 includes a support surface 123 that supports the substrate 102. A plurality of upper lamps 210 are disposed between the upper window and the lid 154. The plurality of upper lamps 210 form part of an upper lamp module 155. The lid 154 may include a plurality of sensors (not shown) disposed therein to measure the temperature within the processing chamber 100. In one or more embodiments, a reflective coating is formed on one or more inner surfaces 187, 188 of the lid 154. The reflective coating may be similar to or the same as one or more of the reflective coatings 219 and / or the reflective coating of the reflective plate 280, described below. A plurality of lower lamps 143 are disposed between the lower window 110 and the floor 152. The plurality of lower lamps 143 form part of a lower lamp module 145. The upper window 250 is an upper dome and is formed of an energy-transmitting material, such as quartz. The lower window 110 is a lower dome and is made of an energy transparent material such as quartz.

[0017]

[0029] The process region 136 and the purge region 138 are formed between the upper window 250 and the lower window 110. The process region 136 and the purge region 138 are part of an interior region that is at least partially defined by the upper window 250, the lower window 110, and one or more liners 163.

[0018]

[0030] The interior region has a substrate support 106 disposed therein. The substrate support 106 includes an upper surface on which the substrate 102 is disposed. The processing chamber includes a first support frame 198 and a second support frame 199 disposed at least partially around the first support frame 198. The second support frame 199 includes arms coupled to the substrate support 106 such that raising and lowering the second support frame 199 raises and lowers the substrate support 106. A plurality of lift pins 132 depend from the substrate support 106. As the substrate support 106 lowers, the lift pins 132 begin to contact the arms of the first support frame 198. As the substrate support 106 continues to lower, the lift pins 132 begin to contact the substrate 102, causing the lift pins 132 to raise the substrate 102. The bottom region 205 of the chamber sides 201 a, 201 b is defined between the chamber body bottom 234 and the first and second pedestals 254 a, 254 b. The stem 118 (e.g., shaft) of each support frame 198, 199 extends through the bottom of the lower body 148.

[0019]

[0031] The substrate support 106 is attached to the stem 118 of the second support frame 199 via an arm. The stem 118 of each support frame 198, 199 is connected to a motion assembly 121. The motion assembly 121 includes one or more actuators and / or adjustment devices that move and / or adjust the support frames 198, 199 within the processing region 136. The substrate support 106 may include lift pin holes 107 disposed therein. Each lift pin hole 107 is sized to accommodate a respective one of the lift pins 132 for lifting the substrate 102 from the substrate support 106 before or after a deposition process is performed. The lift pins 132 may rest on lift pin stops 134 when the substrate support 106 is lowered from the process position to the transfer position. In the implementation shown in FIG. 1 , the lift pin stops 134 are part of the arms of the first support frame 198.

[0020]

[0032] The flow module 112 includes multiple gas inlets 114, multiple purge gas inlets 164, and one or more gas exhaust outlets 116. The multiple gas inlets 114 and the multiple purge gas inlets 164 are positioned on the opposite side of the flow module 112 from the one or more gas exhaust outlets 116. One or more flow guides 117a, 117b are positioned below the multiple gas inlets 114 and the one or more gas exhaust outlets 116. The one or more flow guides 117a, 117b are positioned above the purge gas inlet 164. One or more liners 163 are positioned on the inner surface of the flow module 112 to protect the flow module 112 from reactive gases used during deposition and / or cleaning processes. The gas inlet(s) 114 and the purge gas inlet(s) 164 are each positioned to flow gas parallel to the top surface 150 of the substrate 102 disposed in the process region 136. The gas inlet(s) 114 are fluidly connected to one or more process gas sources 151 and one or more cleaning gas sources 153. The purge gas inlet(s) 164 are fluidly connected to one or more purge gas sources 162. The one or more gas exhaust outlets 116 are fluidly connected to an exhaust pump 157. The one or more process gases supplied using the one or more process gas sources 151 may include one or more reactive gases (such as one or more of silicon (Si), phosphorus (P), and / or germanium (Ge)) and / or one or more carrier gases (such as one or more of nitrogen (N) and / or hydrogen (H)). The one or more purge gases supplied using the one or more purge gas sources 162 may include one or more inert gases (such as one or more of argon (Ar), helium (He), and / or nitrogen (N)). The one or more cleaning gases supplied using the one or more cleaning gas sources 153 can include one or more of hydrogen (H) and / or chlorine (Cl). In one embodiment, which can be combined with other embodiments, the one or more process gases include silicon phosphide (SiP) and / or phosphine (PH), and the one or more cleaning gases include hydrochloric acid (HCl).

[0021]

[0033] The one or more gas exhaust outlets 116 may further be connected to or may include an exhaust system 178. The exhaust system 178 fluidly connects the one or more gas exhaust outlets 116 to an exhaust pump 157. The exhaust system 178 can assist in controlled deposition of a layer on the substrate 102. The exhaust system 178 is located on an opposite side of the processing chamber 100 from the flow module 112.

[0022]

[0034] Controller 120 includes a central processing unit (CPU), memory containing instructions, and support circuitry for the CPU. Controller 120 controls various items directly or through other computers and / or controllers. In one or more embodiments, controller 120 is communicatively coupled to a dedicated controller, with controller 120 functioning as a central controller.

[0023]

[0035] The controller 120 is any form of general-purpose computer processor used in industrial environments to control various substrate processing chambers and equipment, as well as sub-processors thereon or therein. The memory, or non-transitory computer-readable medium, is one or more of readily available memory such as random access memory (RAM), dynamic random access memory (DRAM), static RAM (SRAM), and synchronous dynamic RAM (SDRAM (e.g., DDR1, DDR2, DDR3, DDR3L, LPDDR3, DDR4, LPDDR4, etc.)), read-only memory (ROM), floppy disk, hard disk, flash drive, or any other form of digital storage, local or remote. Support circuits of the controller 120 are coupled to the CPU (processor) to support the CPU. The support circuits include cache, power supplies, clock circuits, input / output circuits and subsystems, etc. Operating parameters (such as heating power applied to individual heat sources (e.g., lamps), process gas pressure, process gas flow rate, and / or rotational position of the substrate support 106) and operations are stored in memory as software routines that are executed or invoked to make the controller 120 a special-purpose controller to control the operation of the various chambers / modules described herein. The controller 120 is configured to perform any of the processes described herein. The instructions stored on the memory, when executed, cause one or more of the processes described herein to be performed.

[0024]

[0036] The various steps described herein may be performed automatically using the controller 120, or may be performed automatically or manually with specific operations performed by a user.

[0025]

[0037] FIG. 2 is a schematic cross-sectional side view of multiple lamps 210 and window 250 shown in FIG. 1 according to one or more embodiments.

[0026]

[0038] FIG. 3 is a schematic top view of multiple lamps 210 and window 250 shown in FIG. 2 according to one or more embodiments.

[0027]

[0039] FIG. 4 is an expanded view of the lamps 210 and window 250 shown in FIG. 2 according to one or more embodiments.

[0028]

[0040] Each lamp 210 includes a bulb tube 211 that extends along at least a segment of an arcuate profile 215. In one or more embodiments, the arcuate profile 215 is a circular profile. In one or more embodiments, the bulb tube 211 is cylindrical. In one or more embodiments, the cross-sectional shape of the bulb tube 211 is arcuate (e.g., circular). This disclosure contemplates that other shapes (e.g., rectangular) may be used for the cross-section of the bulb tube 211.

[0029]

[0041] Each bulb 211 defines an arcuate central opening 212. Each lamp 210 includes a filament 213 positioned in the arcuate central opening 212, the filament 213 extending along a segment of the arcuate profile. Each lamp 210 includes a reflective coating 219 formed on a first portion 216 of the exterior surface of the bulb 211. The reflective coating 219 is formed on the first portion 216, while a second portion 217 of the exterior surface is uncoated. The reflective coating 219 has a reflectivity of 0.8 or greater. In one or more embodiments, the reflective coating 219 includes one or more of gold (Au), silver (Ag), alumina (Al2O3), and / or one or more other ceramics. Other materials are also contemplated for the reflective coating 219. In each lamp 210, the reflective coating 219 is formed on the first portion 216 at a coating angle A1 around the bulb 211. The coating angle A1 is at least 180 degrees. For at least one lamp 210, the coating angle A1 is at least 210 degrees, for example, 240 degrees or more. For the radially innermost lamp 210A, the coating angle A1 is approximately 180 degrees. For the radially outermost lamp 210B, the coating angle A1 is approximately 300 degrees. The coating angle A1 increases as the lamp 210 is positioned radially outward.

[0030]

[0042] The reflective coating 219 helps direct light from the lamps 210 toward the substrate 102 being processed, reducing light lost to other chamber components, increasing heating efficiency, and reducing power consumption.

[0031]

[0043] In the implementation shown in FIG. 3 , seven radial positions (relative to the center of the window 250) are shown, with each radial position having a respective arcuate profile 215. For each radial position, multiple bulbs 211 (two are shown for each radial position in FIG. 3 ) are arranged along the respective arcuate profiles, defining angled gaps 221 between the terminal ends of adjacent bulbs 211. Two angled gaps 221 are shown at each radial position in FIG. 3 . The angled gaps 221 at each radial position each have a gap angle GA1 of less than 15 degrees. In one or more embodiments, the gap angle GA1 is 10 degrees or less. In one or more embodiments, the gap angles GA1 of the angled gaps 221 may vary from one another across the lamp 210. This disclosure contemplates other values ​​of the gap angle GA1.

[0032]

[0044] The window 250 includes an outer section 251 and an inner section 252 disposed inside the outer section 251. The inner section 252 includes a first outer surface 253, a second outer surface 254 opposite the first outer surface 253, and one or more grooves 255 formed in the first outer surface 253. In the implementation illustrated in FIGS. 2-4, a plurality (seven) of the grooves 255 are shown, with a groove 255 formed at each of seven radial positions. In the implementation illustrated in FIGS. 2-4, the grooves 255 are arranged concentrically with one another. The lamps 210 are received in the grooves 255. Each lamp 210 of the plurality of lamps 210 is disposed in an arcuate section 257 of a respective one of the plurality of grooves 255. In the implementation shown in FIGS. 2-4, multiple lamps 210 are disposed in each groove 255 (two lamps 210 are shown in each groove 255 in FIGS. 1-4). It is contemplated in this disclosure that a different number of radial positions (e.g., eight or more, or six or less) may be used, one or more grooves 255 may be disposed in each radial position, and one or more lamps 210 may be disposed in each groove 255.

[0033]

[0045] Inner section 252 has a radial center 261 and a radially outer edge 262 that joins outer section 251. As shown in Figures 2 and 4, first outer surface 253 has a slope that transitions from radial center 261 to second outer surface 254 in direction D1 of radially outer edge 262. In one or more embodiments, inner section 252 is transparent and outer section 251 is opaque. Inner section 252 is configured to transmit greater than 95% of infrared light, and outer section 251 is configured to absorb infrared light.

[0034]

[0046] The lamp's bulb 211 is transparent and configured to transmit 95% or more of infrared light. Each of bulb 211, inner section 252, and / or outer section 251 may be formed from one or more of quartz (such as clear quartz or opaque quartz), silicon carbide (SiC), and / or graphite coated with SiC and / or opaque quartz. In one or more embodiments, inner section 252 is formed from a transparent material (such as clear quartz) and outer section 251 is formed from an opaque material (such as opaque quartz, SiC, and / or graphite coated with SiC and / or opaque quartz).

[0035]

[0047] As described above, the window 250 and lamps 210 may be disposed in a processing chamber, such as the processing chamber 100 shown in FIG. 1 . When disposed in the processing chamber 100, the window 250 at least partially defines the processing region 136. The first outer surface 253 faces away from the support surface 109, and the second outer surface 254 faces toward the support surface 109. The lamps 210 are disposed in the grooves 255 and supported by the inner section 252 such that the distance DS1 between the lamps 210 and the support surface 109 slopes from the radial center 261 of the inner section 252 toward the support surface 109 in a direction D1 of the radial outer edge 262. In one or more embodiments, the distance DS1 is less than 5.0 inches for each lamp 210. The distance DS1 promotes more uniform heating, less power consumption, and less heat loss due to light-absorbing chamber components. In one or more embodiments, the distance DS1 is in the range of 2.0 inches to 3.0 inches for the radially innermost lamp 210A, and the distance DS1 is approximately 2.0 inches for the radially outermost lamp 210B. The distance DS1 decreases as each lamp 210 is farther from the radial center 261, promoting center-to-edge substrate temperature uniformity and deposition uniformity.

[0036]

[0048] In one or more embodiments, inner section 252 has a uniform thickness between radial center 261 and radial outer edge 262, except for portions aligned with grooves 255. The uniform thickness facilitates reducing or eliminating the effects of thermal stresses during processing.

[0037]

[0049] A reflective plate 280 may be positioned above the window 250. In one or more embodiments, the reflective plate 280 is part of the lid 154 or is disposed between the lid 154 and the window 250. In one or more embodiments, the reflective plate 280 is formed of aluminum (Al) and / or coated with a reflective coating having a reflectivity of 0.8 or greater. In one or more embodiments, the reflective coating includes one or more of gold (Au), silver (Ag), alumina (Al2O3), and / or one or more other ceramics. Other materials for the reflective coating of the reflective plate 280 are also contemplated. The present disclosure contemplates that the reflective plate 280 may be omitted.

[0038]

[0050] In one or more embodiments, a first power is applied to an innermost set of one or more lamps 210 at a radially innermost position (e.g., closest to the radial center 261), and a second power is applied to an outermost set of one or more lamps 210 at a radially outermost position (e.g., closest to the radial outer edge 262). The second power is higher than the first power. In one or more embodiments, the second power is a ratio of the first power, the ratio being at least 1.5, e.g., about 2.0. In one or more embodiments, the first power is less than 1.3 kW, e.g., about 1.0 kW. In one or more embodiments, the second power is in the range of 1.8 kW to 2.2 kW, e.g., about 2.0 kW.

[0039]

[0051] FIG. 5 is a schematic perspective view of window 250 and multiple lamps 510 shown in FIGS. 1-4 according to one or more embodiments.

[0040]

[0052] FIG. 6 is a schematic top view of multiple lamps 510 and window 250 shown in FIG. 5 according to one or more embodiments.

[0041]

[0053] Lamp 510 is similar to lamp 210 shown in FIGS. 1-4, including one or more of its aspects, features, components, operations, and / or operation.

[0042]

[0054] Each lamp 510 includes a first extension tube 523 disposed adjacent to a first terminal end 526 of the bulb tube 511 and extending across the bulb tube 511. Each lamp 510 includes a second extension tube 524 disposed adjacent to a second terminal end 527 of the bulb tube 511 and extending across the bulb tube 511. Each lamp 510 includes a first electrical connector 528 coupled to the first extension tube 523 and a second electrical connector 529 coupled to the second extension tube 524. The first electrical connector 528 is configured to couple to a supply line 531, and the second electrical connector 529 is configured to couple to a ground line 532. In one or more embodiments, the bulb tube 511 is cylindrical. In one or more embodiments, the cross-sectional shape of the bulb tube 511 is arcuate (e.g., circular). The present disclosure contemplates that other shapes (e.g., rectangular) may be used for the cross-section of the bulb tube 511.

[0043]

[0055] 6, the bulb tube 511 extends along at least a portion of a segment of the arcuate profile 215 at each radial location and defines an angled gap 521 between a first terminal end 526 and a second terminal end 527 of the bulb tube 511. The angled gap 521 at each radial location has a gap angle GA2 that is less than 45 degrees.

[0044]

[0056] In the implementation shown in FIGS. 5 and 6, a single lamp 510 is disposed in each groove 255 of the window 250 .

[0045]

[0057] FIG. 7 is a schematic perspective view of a window 750 and multiple lamps 710 according to one or more embodiments.

[0046]

[0058] FIG. 8 is a schematic top view of multiple lamps 710 and window 750 shown in FIG. 7 according to one or more embodiments.

[0047]

[0059] Lamp 710 is similar to lamps 210, 510 shown in Figures 1-6 and includes one or more of the aspects, features, components, actions, and / or operations thereof. Window 750 is similar to window 250 shown in Figures 1-6 and includes one or more of the aspects, features, components, actions, and / or operations thereof.

[0048]

[0060] The window 750 includes a plurality of grooves 755. The grooves 755 and the lamps 710 disposed therein are spaced apart from one another. The spaced apart arrangement is non-concentric such that neither the inner nor outer diameter of each bulb 711 lies within or overlaps the inner or outer diameter of any adjacent bulb 711. The spaced apart arrangement is non-concentric such that neither the inner nor outer diameter of each groove 755 lies within or overlaps the inner or outer diameter of any adjacent groove 755. In one or more embodiments, the bulb 711 is cylindrical. In one or more embodiments, the bulb 711 has an arcuate (e.g., circular) cross-sectional shape. The present disclosure contemplates that other shapes (e.g., rectangular) for the cross-section of the bulb 711 may be used.

[0049]

[0061] 7 and 8, three radial positions are shown. With the exception of central ramp 710a and central groove 755a, the geometric center 726 of each groove 755 and ramp 710 is aligned with the arcuate profile 215 at one of the radial positions.

[0050]

[0062] 9 is a schematic cross-sectional side view of multiple lamps 210 and a window 950 shown in FIGS. 1-4 in accordance with one or more embodiments. Window 950 is similar to window 250 shown in FIGS. 1-6, including one or more of its aspects, features, components, operations, and / or operations.

[0051]

[0063] FIG. 10 is a schematic top view of multiple lamps 210 and window 950 shown in FIG. 9 according to one or more embodiments.

[0052]

[0064] FIG. 11 is a schematic perspective view of multiple lamps 210 and window 950 shown in FIG. 9 according to one or more embodiments.

[0053]

[0065] FIG. 12 is a schematic cross-sectional view of multiple lamps 210 and window 950 shown in FIG. 11 according to one or more embodiments.

[0054]

[0066] The window 950 includes a plurality of grooves 955, each including an arcuate section 257 and a rectangular section 958 disposed between the arcuate section 257 and the first outer surface 253 such that the arcuate section 257 is recessed away from the first outer surface 253. The window 950 includes a second outer surface 954 having a plurality of protrusions 959 (e.g., ridges) formed thereon. The first outer surface 253 transitions into each rectangular section 958 at corners 956. The present disclosure contemplates that the corners 956 may be tapered (e.g., chamfered) or rounded. Each groove 955 is formed to a groove depth DE1. The bulb tube 211 of each lamp 210 has an outer diameter OD1, and the groove depth DE1 is equal to or greater than the outer diameter OD1. In one or more embodiments, the outer diameter OD1 is approximately 13 mm, and the groove depth DE1 is greater than or equal to the outer diameter OD1.

[0055]

[0067] 13 is a schematic cross-sectional side view of multiple lamps 210 and a window 1350 shown in FIGS. 9-12 in accordance with one or more embodiments. Window 1350 is similar to window 250 shown in FIGS. 1-6, including one or more of its aspects, features, components, operations, and / or operation.

[0056]

[0068] The inner section 1352 of the window 1350 is recessed relative to the top surface 271 of the outer section 251 such that the inner section 1352 is aligned between the top surface 271 and the bottom surface 272 of the outer section 251. In one or more embodiments, the bottom end of the inner section 1352 is recessed below the top surface 271 of the outer section 251 by a distance D1 of about 0.5 inches.

[0057]

[0069] The window 1350 includes a single groove 1355. The single groove 1355 is a recess that surrounds the radial center 261 of the inner section 252. The single groove 1355 defines a concave surface 1356 that has a slope that transitions from the radial center 261 to the radial outer edge 262 in the direction D1 toward the second outer surface 1354 of the window 1350. The concave surface 1356 is part of the first outer surface 1353 of the window 1350.

[0058]

[0070] A plurality of lamps 210 are received in a single groove 1355 , with each lamp 210 of the plurality of lamps 210 resting on a concave surface 1356 .

[0059]

[0071] Advantages of the present disclosure include reduced thermal (e.g., heating) efficiency and power consumption (e.g., power for heating) in a manner that improves yield and throughput and facilitates reduced or mitigated degradation of chamber components (e.g., seals). For example, using the lamp modules described herein (e.g., upper lamp modules including lamps 210), it is believed that higher process temperatures can be achieved at lower lamp input power (e.g., less than half, such as about 25%) than in other operations. As an example, a large portion of the processing region 136 that might otherwise be between 600 and 800°C can be made capable of higher process temperatures of 1000°C or greater (e.g., about 1200°C) when lower lamp input power is used. As a further example, portions of the substrate 102 (e.g., outer portion(s) of the substrate 102) can be heated to higher temperatures (e.g., 1000°C or greater), which promotes deposition uniformity and high growth rates. As a further example, the portion of the substrate support 106 aligned below the outer portion(s) of the substrate 102 may be heated to a higher temperature (eg, 1400° C. or higher).

[0060]

[0072] Benefits also include improved temperature and deposition uniformity (such as uniformity from the center to the edge of the substrate), improved device performance, product life, simplified and / or reduced component count, reduced component costs, reduced chamber costs, and reduced operational costs. As one example, the lamps described herein facilitate extended lamp life. As another example, the windows and lamps described herein facilitate reduced heat loss (e.g., to chamber components) and facilitate an increased fraction of the generated heat absorbed by the substrate being processed rather than by other components.

[0061]

[0073] It is contemplated that the aspects described herein may be combined. For example, one or more features, aspects, components, operations, and / or characteristics of process chamber 100, window 250, lamps 210, lamps 510, window 750, lamps 710, window 950, and / or window 1350 may be combined. It is further contemplated that any combination(s) may achieve the aforementioned advantages.

[0062]

[0074] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure may be devised without departing from the basic scope thereof as determined by the following claims.

Claims

1. 1. A lamp applicable to applications in semiconductor manufacturing, comprising: a bulb tube extending along at least a segment of the arcuate profile and defining an arcuate central opening; a filament positioned in the arcuate central opening and extending along at least a section of the arcuate profile; a reflective coating formed on a first portion of the exterior surface of the bulb; A lamp comprising:

2. 10. The lamp of claim 1, wherein the reflective coating is formed on the first portion and a second portion of the exterior surface is uncoated.

3. 3. The lamp of claim 2, wherein the reflective coating comprises one or more of gold (Au), silver, alumina, or one or more other ceramics.

4. 3. The lamp of claim 2, wherein the reflective coating is formed on the first portion at a coating angle around the bulb envelope, the coating angle being at least 180 degrees.

5. 5. The lamp of claim 4, wherein the coating angle is at least 210 degrees.

6. 10. The lamp of claim 1, wherein the bulb tube extends along at least a segment of the arcuate profile and defines an angled gap between first and second terminal ends of the bulb tube.

7. 7. The lamp of claim 6, wherein the angled gap has a gap angle of less than 45 degrees.

8. a first extension tube disposed adjacent to the first terminal end and extending across the bulb tube; a second extension tube disposed adjacent to the second terminal end and extending across the bulb tube; a first electrical connector coupled to the first extension tube and configured to couple to a supply line; a second electrical connector coupled to the second extension tube and configured to couple to a ground line; The lamp of claim 6 further comprising:

9. 1. A window applicable for use in semiconductor manufacturing, comprising: The outer section and an inner section disposed inward of the outer section, a first outer surface; a second outer surface opposite the first outer surface; and one or more grooves formed in the first outer surface; Including the inner section and A window equipped with:

10. 10. The window of claim 9, wherein the one or more grooves comprise a plurality of grooves arranged concentrically with one another.

11. 11. The window of claim 10, further comprising a plurality of lamps received in the plurality of grooves, each lamp of the plurality of lamps being disposed in an arcuate section of a respective one of the plurality of grooves.

12. 12. The window of claim 11, wherein a plurality of lamps are disposed in each groove of the one or more grooves.

13. 12. The window of claim 11, wherein each groove of the plurality of grooves further includes a rectangular section between the arcuate section and the first outer surface, the arcuate section being recessed from the first outer surface.

14. 11. The window of claim 10, wherein the inner section has a radial center and a radially outer edge that joins the outer section, and the first outer surface has a slope that transitions from the radial center to the radially outer edge toward a second outer surface.

15. 15. The window of claim 14, wherein the inner section is transparent and the outer section is opaque.

16. 10. The window of claim 9, wherein the one or more grooves comprise a plurality of grooves spaced apart from one another.

17. 17. The window of claim 16, further comprising a plurality of lamps received in the one or more grooves, each lamp of the plurality of lamps being disposed within an arcuate section of a respective one of the plurality of grooves.

18. 10. The window of claim 9, wherein the one or more grooves include a single groove, the inner section having a radial center and a radially outer edge joining the outer section, the single groove defining a concave surface having a slope that transitions toward the second outer surface in a direction from the radial center to the radially outer edge.

19. 20. The window of claim 18, further comprising a plurality of lamps received in the single groove, each lamp of the plurality of lamps resting on the concave surface.

20. 1. A processing chamber applicable for use in semiconductor manufacturing, comprising: An interior region; a substrate support disposed in the interior region and including a support surface; a window at least partially defining a treatment area of ​​the interior region, The outer section and an inner section disposed inwardly of the outer section, the inner section having a radial center and a radially outer edge joining the outer section, a first outer surface facing away from the support surface; a second outer surface opposite the first outer surface and facing the support surface; one or more grooves formed in the first outer surface; Including the inner section and a window, a plurality of lamps received in the one or more grooves of the window and supported by the inner section such that a distance between the lamps and the support surface has a gradient that transitions from the radial center to the radial outer edge toward the support surface; A processing chamber comprising:

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