Alignment apparatus and substrate processing apparatus including the same

Abstract

To provide an alignment device for precisely aligning a tray on which a substrate is arranged.SOLUTION: A plate including first to fourth sides, first and second connection parts spaced apart from each other and coupled to the first side, third and fourth connection parts spaced apart from each other and coupled to the second side, a first support part having a first end coupled to the first connection part and a second end coupled to the second connection part, a second support part having a first end coupled to the third connection part and a second end coupled to the fourth connection part, and a third support part adjacent to the third side and having a first end coupled to a first end of the first support part, the apparatus includes a first driving part for coupling a first end of a third support part to a first end of a first support part so as to be movable in a Y-axis direction and a Z-axis direction and rotatable around an X-axis direction, and a first holding part coupled to the third support part and holding a tray.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to an alignment apparatus and a substrate processing apparatus including the same, and more particularly to an alignment apparatus used in manufacturing a display device and a substrate processing apparatus including the same. [Background technology]

[0002] Flat panel display devices are being used as a replacement for cathode ray tube display devices due to their light weight and thinness, etc. Flat panel display devices include liquid crystal display devices and organic light emitting display devices.

[0003] The display device includes a substrate and a thin film patterned on the substrate. The thin film is patterned using a deposition mask that defines multiple slits in a deposition chamber. Accurate patterning of the thin film requires precise alignment of the substrate and the deposition mask. Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE INVENTION An object of the present invention is to provide an alignment apparatus for precisely aligning a tray on which a substrate is placed (seated).

[0005] Another object of the present invention is to provide a substrate processing apparatus that precisely aligns a tray on which a substrate is placed (seated).

[0006] The present invention is not limited to the above-mentioned objects, and can be variously expanded within the scope of the present invention. [Means for solving the problem]

[0007] In order to achieve the object of the present invention, an alignment device according to one aspect of the present invention includes a plate extending in an X-axis direction and including first and second sides facing each other and third and fourth sides extending in a Y-axis direction facing each other; first and second connecting parts spaced apart from each other in the X-axis direction and fixedly coupled to the first side of the plate; third and fourth connecting parts spaced apart from each other in the X-axis direction and fixedly coupled to the second side of the plate; a first support part extending in the X-axis direction and having a first end coupled to the first connecting part and a second end coupled to the second connecting part; and a second support part extending in the X-axis direction and having a first end coupled to the third connecting part. a second support part connected to the fourth connecting part and having a second end connected to the fourth connecting part; a third support part extending in the Y-axis direction, adjacent to the third side of the plate, and having a first end connected to the first end of the first support part; a first driving part disposed between the first end of the first support part and the first end of the third support part, and connecting the first end of the third support part to the first end of the first support part so that the first end of the third support part is movable in the Y-axis direction and the Z-axis direction and rotatable about the X-axis direction; and a first holding part fixedly connected to the third support part and holding a tray on which a substrate is seated.

[0008] The first drive unit includes a 1-1 linear guide extending in the Z-axis direction, a 1-2 linear guide extending in the Y-axis direction, a 1-1 moving block coupled to the 1-1 linear guide so as to be slidable in the Z-axis direction, and a 1-2 moving block coupled to the 1-2 linear guide so as to be slidable in the Y-axis direction and fixedly coupled to the 1-1 moving block.

[0009] The first-first moving block is adjacent to the first-first linear guide and defines a cylindrical first receiving groove extending in the Z-axis direction, and a plurality of balls are disposed in the first receiving groove.

[0010] The first-second moving block is adjacent to the first-second linear guide and defines a cylindrical second receiving groove extending in the Y-axis direction, and a plurality of balls are disposed in the second receiving groove.

[0011] The first driving unit further includes a first motor that drives the 1-1st moving block to slide in the Z-axis direction.

[0012] The first linear guide is fixedly coupled to one side of the first end of the first support portion opposite to the first end of the third support portion.

[0013] The first-second linear guide is coupled to the first end of the third support portion so as to be rotatable about the X-axis direction.

[0014] The alignment device further includes a second drive unit disposed between the first end of the first support and the first connecting unit, and coupled to the first connecting unit so that the first end of the first support can move in the X-axis direction and the Z-axis direction and can rotate about the Y-axis direction.

[0015] The second drive unit includes a 2-1 linear guide extending in the Z-axis direction, a 2-2 linear guide extending in the X-axis direction, a 2-1 moving block coupled to the 2-1 linear guide so as to be slidable in the Z-axis direction, and a 2-2 moving block coupled to the 2-2 linear guide so as to be slidable in the X-axis direction and fixedly coupled to the 2-1 moving block.

[0016] The second drive unit further includes a 2-1 motor that drives the 2-1 moving block to slide in the Z-axis direction, and a 2-2 motor that drives the 2-2 moving block to slide in the X-axis direction.

[0017] The 2-1 linear guide is fixedly coupled to one surface of the first connecting portion opposite the first end of the first support portion.

[0018] The 2-2 linear guide is coupled to the first end of the first support portion so as to be rotatable about the Y-axis direction.

[0019] A second end of the third support is coupled to the first end of the second support so as to be rotatable about the X-axis direction.

[0020] The alignment device further includes a fourth support portion extending in the Y-axis direction, adjacent to the fourth side of the plate, and having a first end coupled to the second end of the first support portion, and a second holding portion fixedly coupled to the fourth support portion and holding the tray.

[0021] The alignment device further includes a third drive unit disposed between the second end of the first support and the second connecting unit, and coupled to the second connecting unit so that the second end of the first support can move in the X-axis direction and the Z-axis direction and can rotate about the Y-axis direction.

[0022] A second end of the fourth support is coupled to the second end of the second support so as to be rotatable about the X-axis direction.

[0023] In order to achieve another object of the present invention, a substrate processing apparatus according to another aspect of the present invention includes: a mask frame on which a mask is placed; a tray placed on the mask frame and on which a substrate is placed; an alignment device placed on the tray and holding the tray; and a stage placed on the alignment device, wherein the alignment device includes a plate that extends in an X-axis direction and includes first and second sides that face each other and third and fourth sides that extend in a Y-axis direction and face each other, and is coupled to the stage so as to be movable in the X-axis direction and the Y-axis direction; first and second connecting parts that are spaced apart from each other in the X-axis direction and fixedly coupled to the first side of the plate; and third and fourth connecting parts that are spaced apart from each other in the X-axis direction and fixedly coupled to the second side of the plate. a first support part extending in the X-axis direction and having a first end coupled to the first connecting part and a second end coupled to the second connecting part; a second support part extending in the X-axis direction and having a first end coupled to the third connecting part and a second end coupled to the fourth connecting part; a third support part extending in the Y-axis direction and adjacent to the third side of the plate and having a first end coupled to the first end of the first support part; a first drive part disposed between the first end of the first support part and the first end of the third support part and coupled to the first end of the first support part so that the first end of the third support part is movable in the Y-axis direction and the Z-axis direction and rotatable about the X-axis direction; and a first holder fixedly coupled to the third support part and configured to hold the tray.

[0024] The alignment device further includes a second drive unit disposed between the first end of the first support and the first connecting unit, and coupled to the first connecting unit so that the first end of the first support can move in the X-axis direction and the Z-axis direction and can rotate about the Y-axis direction.

[0025] The alignment device further includes a fourth support portion extending in the Y-axis direction, adjacent to the fourth side of the plate, and having a first end coupled to the second end of the first support portion, and a second holding portion fixedly coupled to the fourth support portion and holding the tray.

[0026] The alignment device further includes a third drive unit disposed between the second end of the first support and the second connecting unit, and coupled to the second connecting unit so that the second end of the first support can move in the X-axis direction and the Z-axis direction and can rotate about the Y-axis direction. [Effects of the Invention]

[0027] The alignment apparatus and substrate processing apparatus according to the present invention can precisely align a deposition mask and a substrate, thereby minimizing misalignment between the substrate and the mask and enabling precise patterning.

[0028] However, the effects of the present invention are not limited to the above-described effects, and can be expanded in various ways without departing from the spirit and scope of the present invention. [Brief explanation of the drawings]

[0029] [Figure 1] FIG. 1 is a cross-sectional view showing a substrate processing apparatus according to an embodiment. [Figure 2] FIG. 2 is a perspective view showing a tray, an alignment device, and a stage according to one embodiment. [Figure 3] FIG. 3 is a perspective view showing a tray, an alignment device, and a stage according to one embodiment. [Figure 4] FIG. 4 is an exploded perspective view showing an alignment device according to one embodiment. [Figure 5] FIG. 5 is an exploded perspective view showing an enlarged area of ​​FIG. [Figure 6] FIG. 6 is an exploded perspective view showing a partial configuration of FIG. [Figure 7]FIG. 7 is a plan view showing the first driving unit in FIG. [Figure 8] 8 is a side view showing the first driving unit in FIG. [Figure 9] FIG. 9 is a cross-sectional view taken along line II in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0030] Specific structural or functional descriptions of the embodiments of the present invention set forth herein are merely exemplary for purposes of describing the embodiments of the present invention, and the example embodiments of the present invention may be embodied in various forms and should not be construed as being limited to the embodiments set forth herein.

[0031] The present invention can be modified in various ways and can have various forms, and specific embodiments have been shown by way of example in the drawings and will be described in detail herein, but it should be understood that this is not to limit the invention to the particular forms disclosed, but rather to include all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

[0032] Terms such as "first" and "second" are used to describe various components, but the components should not be limited by these terms. These terms are used only to distinguish one component from another. For example, a first component can be referred to as a second component, and similarly, a second component can be referred to as a first component, without departing from the scope of the present invention.

[0033] When a component is said to be "coupled" or "connected" to another component, it should be understood that the component may be directly coupled or connected to the other component, but there may also be other components in between. On the other hand, when a component is said to be "directly coupled" or "directly connected" to another component, it should be understood that there are no other components in between. Other expressions describing the relationship between components, such as "between" and "immediately between," or "adjacent to" and "directly adjacent to," should be interpreted similarly.

[0034] The terms used in this application are merely used to describe specific embodiments and are not intended to limit the present invention. The singular expressions include the plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprise" or "have" are intended to specify the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and should be understood not to preclude the presence or possibility of addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0035] Terms such as "under," "below," "bottom," "up," "upper," and "above" are used to describe the relative relationships of components shown in the drawings. These terms are relative concepts and are described with reference to the directions shown in the drawings.

[0036] Unless otherwise defined, all terms used herein, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. Terms as defined in commonly used dictionaries should be interpreted to have a meaning consistent with the meaning they have in the context of the relevant art, and should not be interpreted as having an ideal or overly formal meaning unless expressly defined in this application.

[0037] In this specification, the X-axis, Y-axis, and Z-axis are not limited to the three axes on a Cartesian coordinate system, but may be interpreted in a broader sense including this. For example, the X-axis, Y-axis, and Z-axis may be perpendicular to each other, or may not be perpendicular to each other and may point in different directions.

[0038] Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. The same or similar reference numerals will be used to refer to the same components in the accompanying drawings, and redundant descriptions of the same components will be omitted or simplified.

[0039] FIG. 1 is a cross-sectional view showing a substrate processing apparatus according to an embodiment.

[0040] As shown in FIG. 1, a substrate processing apparatus 1 according to one embodiment of the present invention includes a chamber 10, a fixing member 20, a tray 30, an alignment device 40, a stage 50, a mask frame 60, and a deposition source 70.

[0041] The substrate processing apparatus 1 is an apparatus for processing a substrate (S) that is an object to be processed. For example, the processing of the substrate (S) is a deposition process in which a deposition material is sprayed onto one surface of the substrate (S) to form a thin film and / or a pattern. However, the present invention is not limited thereto. In other embodiments, the processing of the substrate (S) is a dry etching process, a photolithography process, a laser drilling process, or the like, in which case the deposition source 70 is variously changed to a UV light source, a laser device, or the like.

[0042] The chamber 10 provides an internal space in which the substrate (S) is processed. The internal space is in a vacuum state while the substrate (S) is processed. The chamber 10 has a bottom surface, a ceiling surface, and side walls. The bottom surface of the chamber 10 is substantially parallel to the XY plane. The normal direction of the bottom surface of the chamber 10 is substantially parallel to the Z-axis direction.

[0043] The fixing member 20 is disposed inside the chamber 10 and above the deposition source 70 (for example, in the +Z direction). The fixing member 20 fixes the mask (M) and the mask frame 60 on which the mask (M) is disposed (seated). In one embodiment, the fixing member 20 is provided on the ceiling surface of the chamber 10. The fixing member 20 includes a magnet, a jig, a robot arm, or the like for fixing the mask (M) and the mask frame 60. For example, the fixing member 20 fixes the mask (M) and the mask frame 60 by magnetic force, thereby closely adhering the mask (M) to the substrate (S).

[0044] The substrate (S) is placed (seated) on the tray 30. The tray 30 is disposed between the fixing member 20 and the mask frame 60. For example, the substrate (S) is a substrate in an intermediate stage in manufacturing a display panel, but the present invention is not limited thereto.

[0045] The alignment device 40 is disposed on the tray 30 and holds the tray 30. The alignment device 40 includes a holding portion 42 and an alignment portion 44. The holding portion 42 is coupled to the alignment portion 44 and holds the tray 30.

[0046] The stage 50 is disposed on the alignment device 40 and is coupled to the alignment section 44 of the alignment device 40. The stage 50 moves the alignment device 40 in the X-axis and Y-axis directions.

[0047] The alignment device 40 and the stage 50 adjust the position and angle of the tray 30 so that the mask M and the substrate S are aligned with each other. While held by the alignment device 40, the tray 30 is moved in the X-, Y-, and Z-axis directions or rotated around the X-, Y-, and Z-axis directions by the alignment device 40 and the stage 50. In other words, the alignment device 40 and the stage 50 can adjust the position and angle of the tray 30 with six degrees of freedom to more precisely align the mask M and the substrate S. Details of the alignment device 40 and the stage 50 will be described later.

[0048] A mask (M) is placed on the mask frame 60. The mask frame 60 is placed between the tray 30 and the deposition source 70. For example, the mask (M) is a deposition mask including a plurality of deposition regions. Each of the deposition regions has a plurality of slits defined therein. However, the present invention is not limited thereto. In another embodiment, the mask (M) is a photomask.

[0049] The deposition source 70 evaporates a deposition material, for example, an organic light-emitting material, and sprays the vapor. The deposition material sprayed from the deposition source 70 passes through slits in the mask (M) and is deposited onto one surface of the substrate (S) in a predetermined pattern.

[0050] In one embodiment, the substrate processing apparatus 1 further includes a measurement unit and a control unit. The measurement unit measures the alignment state between the substrate (S) and the mask (M). For example, the measurement unit includes a visual sensor, a confocal sensor, etc. The control unit can control the operation of the alignment device 40 and the driving units included in the stage 50 (e.g., the stage driving unit 52 in FIG. 3 and the first to sixth driving units (DP1a, DP2a, DP3a, DP1b, DP2b, DP3b) in FIG. 4) based on the alignment state measurement value between the substrate (S) and the mask (M) measured by the measurement unit. This allows the substrate processing apparatus 1 to adjust the position and angle of the tray 30 with six degrees of freedom to more precisely align the mask (M) and the substrate (S). Therefore, misalignment between the substrate (S) and the mask (M) can be minimized, enabling precise patterning.

[0051] 2 and 3 are perspective views showing a tray, an alignment device, and a stage according to one embodiment.

[0052] FIG. 3 shows a part of the configuration in FIG.

[0053] 2 and 3, in one embodiment, the tray 30 has a rectangular shape including long sides that extend in the X-axis direction and face each other, and short sides that extend in the Y-axis direction and face each other. The substrate (S) is placed inside the tray 30.

[0054] In one embodiment, the alignment device 40 includes a holding portion 42 and an alignment portion 44. The holding portion 42 includes a first holding portion 42a and a second holding portion 42b. The alignment portion 44 includes a first plate 441, a first connecting portion 442a, a second connecting portion 442b, a third connecting portion 442c, a fourth connecting portion 442d, a first support portion 443a, a second support portion 443b, a third support portion 443c, and a fourth support portion 443d.

[0055] The first plate 441 includes a first side 441a and a second side 441b extending in the X-axis direction and facing each other, and a third side 441c and a fourth side 441d extending in the Y-axis direction and facing each other. The first side 441a and the second side 441b are long sides, and the third side 441c and the fourth side 441d are short sides.

[0056] 3, the first side 441a extending in the X-axis direction includes a central portion and a first step portion 441a-1 and a second step portion 441a-2 located on both sides of the central portion. Each of the first step portion 441a-1 and the second step portion 441a-2 is recessed in a direction from the central portion toward the second side 441b (for example, in the −Y direction).

[0057] The second side 441b extending in the X-axis direction includes a central portion and a first step portion 441b-1 and a second step portion 441b-2 located on both sides of the central portion. Each of the first step portion 441b-1 and the second step portion 441b-2 is recessed in a direction from the central portion toward the first side 441a (for example, in the +Y direction).

[0058] The first connecting portion 442a and the second connecting portion 442b are spaced apart from each other in the X-axis direction and fixedly coupled to the first side 441a of the first plate 441. The first connecting portion 442a is fixedly coupled to the first step portion 441a-1 of the first side 441a. The second connecting portion 442b is fixedly coupled to the second step portion 441a-2 of the first side 441a. In one embodiment, each of the first connecting portion 442a and the second connecting portion 442b is spaced apart from the center of the first side 441a.

[0059] The third connecting portion 442c and the fourth connecting portion 442d are spaced apart from each other in the X-axis direction and fixedly coupled to the second side 441b of the first plate 441. The third connecting portion 442c is fixedly coupled to the first step portion 441b-1 of the second side 441b. The fourth connecting portion 442d is fixedly coupled to the second step portion 441b-2 of the second side 441b. In one embodiment, each of the third connecting portion 442c and the fourth connecting portion 442d is spaced apart from the center of the second side 441b.

[0060] The first support portion 443a extends in the X-axis direction. The first support portion 443a is coupled to the first connecting portion 442a and the second connecting portion 442b. The first support portion 443a includes a first end and a second end opposite the first end. The first end of the first support portion 443a is coupled to the first connecting portion 442a, and the second end of the first support portion 443a is coupled to the second connecting portion 442b.

[0061] The second support portion 443b extends in the X-axis direction. The second support portion 443b is coupled to the third connecting portion 442c and the fourth connecting portion 442d. The second support portion 443b includes a first end and a second end opposite the first end. The first end of the second support portion 443b is coupled to the third connecting portion 442c, and the second end of the second support portion 443b is coupled to the fourth connecting portion 442d.

[0062] The third support portion 443c extends in the Y-axis direction. The third support portion 443c is adjacent to the third side 441c of the first plate 441. The third support portion 443c is coupled to the first support portion 443a and the second support portion 443b. The third support portion 443c includes a first end and a second end opposite the first end. The first end of the third support portion 443c is coupled to the first end of the first support portion 443a, and the second end of the third support portion 443c is coupled to the first end of the second support portion 443b.

[0063] The fourth support portion 443d extends in the Y-axis direction. The fourth support portion 443d is adjacent to the fourth side 441d of the first plate 441. The fourth support portion 443d is coupled to the first support portion 443a and the second support portion 443b. The fourth support portion 443d includes a first end and a second end opposite the first end. The first end of the fourth support portion 443d is coupled to the second end of the first support portion 443a, and the second end of the fourth support portion 443d is coupled to the second end of the second support portion 443b.

[0064] The specific coupling relationship between the first to fourth support portions 443a, 443b, 443c, and 443d will be described later with reference to FIG.

[0065] The first holding portion 42a extends in the Y-axis direction and is fixedly coupled to the third support portion 443c.

[0066] In one embodiment, the first holder 42a includes a first extension 421a and a magnet 422a disposed on the first extension 421a. The first extension 421a extends in the Y-axis direction and is fixedly coupled to the third support 443c. The magnet 422a is disposed on the first extension 421a and holds the tray 30. The magnet 422a includes a permanent electromagnet. For example, as shown in FIG. 3, a plurality of magnets 422a are disposed on the first extension 421a spaced apart from one another in the Y-axis direction. In another embodiment, a single magnet 422a extending in the Y-axis direction is disposed on the first extension 421a.

[0067] The second holding portion 42b extends in the Y-axis direction and faces the first holding portion 42a. The second holding portion 42b is fixedly coupled to the fourth support portion 443d.

[0068] In one embodiment, the second holder 42b includes a second extension 421b and a magnet 422b arranged on the second extension 421b. The second extension 421b extends in the Y-axis direction and is fixedly coupled to the fourth support 443d. The magnet 422b is arranged on the second extension 421b and holds the tray 30. The magnet 422b includes a permanent electromagnet. For example, as shown in FIG. 3, a plurality of magnets 422b are arranged on the second extension 421b at intervals in the Y-axis direction. In another embodiment, a single magnet 422b extending in the Y-axis direction is arranged on the second extension 421b.

[0069] The first holding portion 42a and the second holding portion 42b hold the tray 30. The first holding portion 42a and the second holding portion 42b hold the short sides of the tray 30, respectively.

[0070] In one embodiment, the holder 42 further includes a third holder and a fourth holder that respectively hold the long sides of the tray 30. The third holder extends in the X-axis direction and is fixedly coupled to the first support portion 443a, and the fourth holder extends in the X-axis direction and is fixedly coupled to the second support portion 443b.

[0071] The stage 50 includes a second plate 51 and a stage driver 52. The stage driver 52 is coupled to the first plate 441 and the second plate 51, and moves the first plate 441 in the X-axis direction and the Y-axis direction relative to the second plate 51. That is, the first plate 441 is coupled to the second plate 51 (or the stage 50) so as to be movable in the X-axis direction and the Y-axis direction.

[0072] In one embodiment, as shown in FIG. 3, the stage drive unit 52 includes an X-axis linear guide 521, a Y-axis linear guide 522, and a moving block 523.

[0073] The X-axis linear guides 521 extend in the X-axis direction and are spaced apart from each other in the Y-axis direction. The X-axis linear guides 521 are fixedly coupled to one surface 51a of the second plate 51 facing the first plate 441.

[0074] The Y-axis linear guides 522 extend in the Y-axis direction and are spaced apart from each other in the X-axis direction. The Y-axis linear guides 522 are fixedly coupled to one surface 441s of the first plate 441 that faces the second plate 51.

[0075] Each of the moving blocks 523 is coupled to an X-axis linear guide 521 and a Y-axis linear guide 522. In one embodiment, each of the moving blocks 523 includes an X-axis moving block 523a and a Y-axis moving block 523b. The X-axis moving block 523a is coupled to the X-axis linear guide 521 so as to be slidable in the X-axis direction. The Y-axis moving block 523b is coupled to the Y-axis linear guide 522 so as to be slidable in the Y-axis direction. The Y-axis moving block 523b is fixedly coupled to the X-axis moving block 523a. In one embodiment, the stage driving unit 52 further includes an X-axis motor (not shown) that drives the X-axis moving block 523a to slide in the X-axis direction, and a Y-axis motor (not shown) that drives the Y-axis moving block 523b to slide in the Y-axis direction.

[0076] FIG. 4 is an exploded perspective view showing an alignment device according to one embodiment.

[0077] As shown in FIG. 4, in one embodiment, the alignment device 40 (or the alignment section 44 in FIG. 2) further includes a first drive section (DP1a), a second drive section (DP2a), a third drive section (DP3a), a fourth drive section (DP1b), a fifth drive section (DP2b), and a sixth drive section (DP3b).

[0078] In one embodiment, the first driving unit (DP1a) is disposed between a first end of the first support unit 443a and a first end of the third support unit 443c. The first driving unit (DP1a) couples the first end of the first support unit 443a to the first end of the third support unit 443c. That is, the first end of the third support unit 443c is coupled to the first end of the first support unit 443a through the first driving unit (DP1a).

[0079] In one embodiment, the first drive unit (DP1a) couples a first end of the third support unit 443c to a first end of the first support unit 443a so that the first end of the third support unit 443c is movable in the Y-axis direction and the Z-axis direction and rotatable about the X-axis direction.

[0080] Fig. 5 is an exploded perspective view showing an enlarged area of ​​Fig. 4. Fig. 6 is an exploded perspective view showing a partial configuration of Fig. 5.

[0081] Figure 5 is an enlarged view of the area (upper right area of ​​Figure 4) near the first drive unit (DP1a) and the second drive unit (DP2a) in Figure 4. Figure 6 shows the first drive unit (DP1a), the first rotation coupling unit (R1a), and the first fastening member (F1a) in Figure 5.

[0082] 5 and 6, in one embodiment, the first drive unit (DP1a) includes a first linear guide (G1a), a first linear guide (G1b), and a first moving block (B1).

[0083] The first linear guide (G1a) extends in the Z-axis direction. In one embodiment, the first linear guide (G1a) is fixedly coupled to a first side surface 443a-1 of a first end portion of the first support portion 443a, which faces a first end portion of the third support portion 443c.

[0084] The first-second linear guide (G1b) extends in the Y-axis direction. In one embodiment, the first-second linear guide (G1b) is coupled to a first end of the third support portion 443c so as to be rotatable about the X-axis direction.

[0085] In one embodiment, a first rotation coupling portion (R1a) is coupled to a first end of the third support portion 443c. For example, as shown in FIG. 5, the first end of the third support portion 443c defines a recess having a shape corresponding to the first rotation coupling portion (R1a), and the first rotation coupling portion (R1a) is coupled to the recess in the first end of the third support portion 443c. The first rotation coupling portion (R1a) defines a through hole (R1a-h) in the center.

[0086] In one embodiment, the first-2 linear guide (G1b) defines a fastening groove (G1b-f) recessed in a direction (e.g., the +X direction) from one surface facing the first end of the third support portion 443c toward the first support portion 443a.

[0087] The first fastening member (F1a) includes a fastening portion (F1a-p) protruding in one direction (e.g., the +X direction). The fastening portion (F1a-p) of the first fastening member (F1a) is fastened to the fastening groove (G1b-f) of the first-second linear guide (G1b) through the through hole (R1a-h) of the first rotation coupling portion (R1a). For example, the outer peripheral surface of the fastening portion (F1a-p) of the first fastening member (F1a) includes a first thread, the inner peripheral surface defining the fastening groove (G1b-f) of the first-second linear guide (G1b) includes a second thread corresponding to the first thread, and the inner peripheral surface defining the through hole (R1a-h) of the first rotation coupling portion (R1a) does not include a thread. However, the present invention is not limited to this.

[0088] The first moving block (B1) includes a first moving block (B1a) and a second moving block (B1b). The first moving block (B1a) is coupled to the first linear guide (G1a) so as to be slidable in the Z-axis direction. The first-second moving block (B1b) is coupled to the first linear guide (G1b) so as to be slidable in the Y-axis direction. The first-second moving block (B1b) is fixedly coupled to the first moving block (B1a). In one embodiment, the first driving unit (DP1a) further includes a first motor (not shown) that drives the first moving block (B1a) to slide in the Z-axis direction.

[0089] Fig. 7 is a plan view showing the first driving unit in Fig. 5. Fig. 8 is a side view showing the first driving unit in Fig. 5. Fig. 9 is a cross-sectional view taken along line II in Fig. 7.

[0090] The first driving unit (DP1a) will be described in more detail below with reference to FIGS.

[0091] As shown in Figures 7 to 9, in one embodiment, the first moving block (B1a) defines first receiving grooves (B1a-r) adjacent to the first linear guide (G1a). Figures 7 to 9 show that the first moving block (B1a) defines four first receiving grooves (B1a-r), but the present invention is not limited thereto, and the number of first receiving grooves (B1a-r) can be changed in various ways.

[0092] In one embodiment, each of the first housing grooves (B1a-r) extends in the Z-axis direction along the first linear guide (G1a). For example, each of the first housing grooves (B1a-r) has a cylindrical shape extending in the Z-axis direction. A plurality of balls (BL) are disposed in each of the first housing grooves (B1a-r). The balls (BL) are arranged in the Z-axis direction in each of the first housing grooves (B1a-r).

[0093] In one embodiment, the first-second moving block (B1b) defines second receiving grooves (B1b-r) adjacent to the first-second linear guide (G1b). Although Figures 7 to 9 show that the first-second moving block (B1b) defines four second receiving grooves (B1b-r), the present invention is not limited thereto, and the number of second receiving grooves (B1b-r) can be changed in various ways.

[0094] In one embodiment, each of the second housing grooves (B1b-r) extends in the Y-axis direction along the first-second linear guide (G1b). For example, each of the second housing grooves (B1b-r) has a cylindrical shape extending in the Y-axis direction. A plurality of balls (BL) are disposed in each of the second housing grooves (B1b-r). The balls (BL) are arranged in the Y-axis direction in each of the second housing grooves (B1b-r).

[0095] By arranging a plurality of balls (BL) in each of the first housing grooves (B1a-r) and the second housing grooves (B1b-r), the load applied to the plurality of balls (BL) is evenly distributed, thereby improving the durability of the first moving block (B1) when the first driving unit (DP1a) is driven.

[0096] 5 to 9, the description of the first driving unit (DP1a) also applies to the second to sixth driving units (DP2a, DP3a, DP1b, DP2b, DP3b). Therefore, overlapping descriptions will be omitted or simplified.

[0097] 4 and 5, in one embodiment, the second driving unit (DP2a) is disposed between the first end of the first support unit 443a and the first connecting unit 442a. The second driving unit (DP2a) couples the first end of the first support unit 443a to the first connecting unit 442a. That is, the first end of the first support unit 443a is coupled to the first connecting unit 442a through the second driving unit (DP2a).

[0098] In one embodiment, the second drive unit (DP2a) couples the first end of the first support unit 443a to the first connection unit 442a so that the first end is movable in the X-axis direction and the Z-axis direction and rotatable about the Y-axis direction.

[0099] In one embodiment, the second drive part (DP2a) includes a 2-1 linear guide (G2a), a 2-2 linear guide (G2b), and a second moving block (B2).

[0100] The 2-1st linear guide (G2a) extends in the Z-axis direction. In one embodiment, the 2-1st linear guide (G2a) is fixedly coupled to one surface 442as of the first connecting portion 442a, which faces the first end portion of the first support portion 443a.

[0101] The second-second linear guide (G2b) extends in the X-axis direction. In one embodiment, the second-second linear guide (G2b) is coupled to a first end of the first support portion 443a so as to be rotatable about the Y-axis direction.

[0102] In one embodiment, a second rotation coupling (R2a) is coupled to a first end of the first support portion 443a. For example, as shown in Figure 5, the first end of the first support portion 443a defines a recess shaped to correspond to the second rotation coupling (R2a), and the second rotation coupling (R2a) is coupled to the recess in the first end of the first support portion 443a. The second rotation coupling (R2a) defines a through hole in the center.

[0103] In one embodiment, the 2-2 linear guide (G2b) defines a fastening groove (G2b-f) recessed in a direction (e.g., the -Y direction) from one surface facing the first end of the first support portion 443a toward the first connecting portion 442a.

[0104] The second fastening member (F2a) includes a fastening portion protruding in one direction (e.g., the -Y direction). The fastening portion of the second fastening member (F2a) is fastened to the fastening groove (G2b-f) of the second-second linear guide (G2b) through the through-hole of the second rotary coupling portion (R2a). For example, the outer peripheral surface of the fastening portion of the second fastening member (F2a) includes a first thread, the inner peripheral surface defining the fastening groove (G2b-f) of the second-second linear guide (G2b) includes a second thread, and the inner peripheral surface defining the through-hole of the second rotary coupling portion (R2a) does not include a thread. However, the present invention is not limited to this.

[0105] The second moving block (B2) includes a 2-1 moving block (B2a) and a 2-2 moving block (B2b). The 2-1 moving block (B2a) is coupled to the 2-1 linear guide (G2a) so as to be slidable in the Z-axis direction. The 2-2 moving block (B2b) is coupled to the 2-2 linear guide (G2b) so as to be slidable in the X-axis direction. The 2-2 moving block (B2b) is fixedly coupled to the 2-1 moving block (B2a). In one embodiment, the second driving unit (DP2a) further includes a 2-1 motor (not shown) that drives the 2-1 moving block (B2a) to slide in the Z-axis direction, and a 2-2 motor (not shown) that drives the 2-2 moving block (B2b) to slide in the X-axis direction.

[0106] 4, in one embodiment, the third driving unit (DP3a) is disposed between the second end of the first support unit 443a and the second connecting unit 442b. The third driving unit (DP3a) couples the second end of the first support unit 443a to the second connecting unit 442b. That is, the second end of the first support unit 443a is coupled to the second connecting unit 442b through the third driving unit (DP3a).

[0107] In one embodiment, the third drive unit (DP3a) couples the second end of the first support unit 443a to the second connecting unit 442b so that the second end is movable in the X-axis direction and the Z-axis direction and rotatable about the Y-axis direction.

[0108] In one embodiment, the third drive unit (DP3a) includes a 3-1 linear guide, a 3-2 linear guide, and a third moving block.

[0109] The 3-1 linear guide extends in the Z-axis direction. In one embodiment, the 3-1 linear guide is fixedly coupled to one surface 442bs of the second connecting portion 442b facing the second end portion of the first support portion 443a.

[0110] The 3-2 linear guide extends in the X-axis direction. In one embodiment, the 3-2 linear guide is coupled to the second end of the first support portion 443a so as to be rotatable about the Y-axis direction.

[0111] In one embodiment, a third rotation coupling (R3a) is coupled to the second end of the first support portion 443a. For example, as shown in Figure 4, the second end of the first support portion 443a defines a recess shaped to correspond to the third rotation coupling (R3a), and the third rotation coupling (R3a) is coupled to the recess in the second end of the first support portion 443a. The third rotation coupling (R3a) defines a through hole in the center.

[0112] In one embodiment, the 3-2 linear guide defines a fastening groove recessed in a direction (e.g., the -Y direction) from one surface facing the second end of the first support portion 443a toward the second connecting portion 442b.

[0113] The third fastening member (F3a) includes a fastening portion protruding in one direction (e.g., the -Y direction). The fastening portion of the third fastening member (F3a) is fastened to the fastening groove of the 3-2 linear guide through the through hole of the third rotation coupling portion (R3a). For example, the outer peripheral surface of the fastening portion of the third fastening member (F3a) includes a first thread, the inner peripheral surface defining the fastening groove of the 3-2 linear guide includes a second thread, and the inner peripheral surface defining the through hole of the third rotation coupling portion (R3a) does not include a thread. However, the present invention is not limited to this.

[0114] The third moving block includes a 3-1 moving block and a 3-2 moving block. The 3-1 moving block is coupled to the 3-1 linear guide so as to be slidable in the Z-axis direction. The 3-2 moving block is coupled to the 3-2 linear guide so as to be slidable in the X-axis direction. The 3-2 moving block is fixedly coupled to the 3-1 moving block. In one embodiment, the third drive unit (DP3a) further includes a third motor (not shown) that drives the 3-1 moving block to slide in the Z-axis direction.

[0115] In one embodiment, the fourth drive unit (DP1b) is disposed between the second end of the first support unit 443a and the first end of the fourth support unit 443d. The fourth drive unit (DP1b) couples the second end of the first support unit 443a to the first end of the fourth support unit 443d. That is, the first end of the fourth support unit 443d is coupled to the second end of the first support unit 443a through the fourth drive unit (DP3d).

[0116] In one embodiment, the fourth drive unit (DP1b) couples a first end of the fourth support unit 443d to a second end of the first support unit 443a so that the first end of the fourth support unit 443d is movable in the Y-axis direction and the Z-axis direction and rotatable about the X-axis direction.

[0117] In one embodiment, the fourth drive unit (DP1b) includes a 4-1 linear guide, a 4-2 linear guide, and a fourth moving block.

[0118] The 4-1 linear guide extends in the Z-axis direction. In one embodiment, the 4-1 linear guide is fixedly coupled to a second side surface 443a-2 of a second end portion of the first support portion 443a, which faces the first end portion of the fourth support portion 443d.

[0119] The 4-2nd linear guide extends in the Y-axis direction. In one embodiment, the 4-2nd linear guide is coupled to a first end of the fourth support portion 443d so as to be rotatable about the X-axis direction.

[0120] In one embodiment, a fourth rotation coupling (R1b) is coupled to a first end of the fourth support portion 443d. For example, as shown in FIG. 4, the first end of the fourth support portion 443d defines a recess shaped to correspond to the fourth rotation coupling (R1b), and the fourth rotation coupling (R1b) is coupled to the recess in the first end of the fourth support portion 443d. The fourth rotation coupling (R1b) defines a through hole in the center.

[0121] In one embodiment, the 4-2 linear guide defines a fastening groove recessed in a direction (e.g., the −X direction) from one surface facing the first end of the fourth support portion 443d toward the first support portion 443a.

[0122] The fourth fastening member (F1b) includes a fastening portion protruding in one direction (e.g., the -X direction). The fastening portion of the fourth fastening member (F1b) is fastened to the fastening groove of the 4-2 linear guide through the through hole of the fourth rotation coupling portion (R1b). For example, the outer peripheral surface of the fastening portion of the fourth fastening member (F4a) includes a first thread, the inner peripheral surface defining the fastening groove of the 4-2 linear guide includes a second thread, and the inner peripheral surface defining the through hole of the fourth rotation coupling portion (R1b) does not include a thread. However, the present invention is not limited to this.

[0123] The fourth moving block includes a 4-1 moving block and a 4-2 moving block. The 4-1 moving block is coupled to the 4-1 linear guide so as to be slidable in the Z-axis direction. The 4-2 moving block is coupled to the 4-2 linear guide so as to be slidable in the Y-axis direction. The 4-2 moving block is fixedly coupled to the 4-1 moving block. In one embodiment, the fourth drive unit (DP1b) further includes a fourth motor (not shown) that drives the 4-1 moving block to slide in the Z-axis direction.

[0124] In one embodiment, the fifth driving unit (DP2b) is disposed between the first end of the second support unit 443b and the third connecting unit 442c. The fifth driving unit (DP2b) couples the first end of the second support unit 443b to the third connecting unit 442c. That is, the first end of the second support unit 443b is coupled to the third connecting unit 442c through the fifth driving unit (DP2b).

[0125] In one embodiment, the fifth drive unit (DP2b) couples the first end of the second support unit 443b to the third connection unit 442c so that the first end of the second support unit 443b is movable in the X-axis direction and the Z-axis direction and rotatable about the Y-axis direction.

[0126] In one embodiment, the fifth drive unit (DP2b) includes a fifth linear guide, a fifth linear guide, and a fifth moving block.

[0127] The 5-1st linear guide extends in the Z-axis direction. In one embodiment, the 5-1st linear guide is fixedly coupled to one surface 442cs of the third connecting portion 442c facing the first end of the second support portion 443b.

[0128] The 5-2nd linear guide extends in the X-axis direction. In one embodiment, the 5-2nd linear guide is coupled to a first end of the second support portion 443b so as to be rotatable about the Y-axis direction.

[0129] In one embodiment, a fifth rotation coupling (R2b) is coupled to a first end of the second support portion 443b. For example, as shown in FIG. 4, the first end of the second support portion 443b defines a recess shaped to correspond to the fifth rotation coupling (R2b), and the fifth rotation coupling (R2b) is coupled to the recess in the first end of the second support portion 443b. The fifth rotation coupling (R2b) defines a through hole in the center.

[0130] In one embodiment, the 5-2 linear guide defines a fastening groove recessed in a direction (e.g., the +Y direction) from one surface facing the first end of the second support portion 443b toward the third connecting portion 442c.

[0131] The fifth fastening member (F2b) includes a fastening portion protruding in one direction (e.g., the +Y direction). The fastening portion of the fifth fastening member (F2b) is fastened to the fastening groove of the 5-2 linear guide through the through hole of the fifth rotation coupling portion (R2b). For example, the outer peripheral surface of the fastening portion of the fifth fastening member (F5a) includes a first thread, the inner peripheral surface defining the fastening groove of the 5-2 linear guide includes a second thread, and the inner peripheral surface defining the through hole of the fifth rotation coupling portion (R5a) does not include a thread. However, the present invention is not limited to this.

[0132] The fifth moving block includes a 5-1 moving block and a 5-2 moving block. The 5-1 moving block is coupled to the 5-1 linear guide so as to be slidable in the Z-axis direction. The 5-2 moving block is coupled to the 5-2 linear guide so as to be slidable in the X-axis direction. The 5-2 moving block is fixedly coupled to the 5-1 moving block. In one embodiment, the fifth drive unit (DP2b) further includes a 5-1 motor (not shown) that drives the 5-1 moving block to slide in the Z-axis direction, and a 5-2 motor (not shown) that drives the 5-2 moving block to slide in the X-axis direction.

[0133] In one embodiment, the sixth driving unit (DP3b) is disposed between the second end of the second support unit 443b and the fourth connecting unit 442d. The sixth driving unit (DP3b) couples the second end of the second support unit 443b to the fourth connecting unit 442d. That is, the second end of the second support unit 443b is coupled to the fourth connecting unit 442d through the sixth driving unit (DP3b).

[0134] In one embodiment, the sixth drive unit (DP3b) couples the second end of the second support unit 443b to the fourth connection unit 442d so that the second end is movable in the X-axis direction and the Z-axis direction and rotatable about the Y-axis direction.

[0135] In one embodiment, the sixth drive unit (DP3b) includes a sixth linear guide, a sixth linear guide, and a sixth moving block.

[0136] The 6-1st linear guide extends in the Z-axis direction. In one embodiment, the 6-1st linear guide is fixedly coupled to one surface 442ds of the fourth connecting portion 442d facing the second end portion of the second support portion 443b.

[0137] The 6-2nd linear guide extends in the X-axis direction. In one embodiment, the 6-2nd linear guide is coupled to a second end of the second support portion 443b so as to be rotatable about the Y-axis direction.

[0138] In one embodiment, a sixth rotation coupling portion (R3b) is coupled to the second end of the second support portion 443b. For example, as shown in FIG. 4, the second end of the second support portion 443b defines a recess having a shape corresponding to the sixth rotation coupling portion (R3b), and the sixth rotation coupling portion (R3b) is coupled to the recess in the second end of the second support portion 443b. The sixth rotation coupling portion (R3b) defines a through hole in the center.

[0139] In one embodiment, the 6-2 linear guide defines a fastening groove recessed in a direction (e.g., the +Y direction) from one surface facing the second end of the second support portion 443b toward the fourth connecting portion 442d.

[0140] The sixth fastening member (F3b) includes a fastening portion protruding in one direction (e.g., the +Y direction). The fastening portion of the sixth fastening member (F3b) is fastened to the fastening groove of the 6-2 linear guide through the through hole of the sixth rotation coupling portion (R3b). For example, the outer peripheral surface of the fastening portion of the sixth fastening member (F6a) includes a first thread, the inner peripheral surface defining the fastening groove of the 6-2 linear guide includes a second thread, and the inner peripheral surface defining the through hole of the sixth rotation coupling portion (R3b) does not include a thread. However, the present invention is not limited to this.

[0141] The sixth moving block includes a 6-1 moving block and a 6-2 moving block. The 6-1 moving block is coupled to the 6-1 linear guide so as to be slidable in the Z-axis direction. The 6-2 moving block is coupled to the 6-2 linear guide so as to be slidable in the X-axis direction. The 6-2 moving block is fixedly coupled to the 6-1 moving block. In one embodiment, the sixth drive unit (DP3b) further includes a sixth motor (not shown) that drives the 6-1 moving block to slide in the Z-axis direction.

[0142] In one embodiment, the second end of the third support portion 443c is coupled to the first end of the second support portion 443b so as to be rotatable about the X-axis direction.

[0143] In one embodiment, the first end of the second support portion 443b includes a first protrusion (AXa) that protrudes in a direction toward the third support portion 443c (e.g., the −X direction). The first protrusion (AXa) protrudes in the −X direction from a first side surface 443b-1 of the first end of the second support portion 443b that faces the second end of the third support portion 443c.

[0144] A seventh rotation coupling portion (R4a) is coupled to a second end of the third support portion 443c. For example, as shown in Fig. 4, the second end of the third support portion 443c defines a recess having a shape corresponding to the seventh rotation coupling portion (R4a), and the seventh rotation coupling portion (R4a) is coupled to the recess in the second end of the third support portion 443c. The seventh rotation coupling portion (R4a) defines a through hole in the center corresponding to the first protrusion (AXa).

[0145] The first protrusion (AXa) is fastened to the seventh fastener (F4a) through the through hole of the seventh rotary coupling (R4a). For example, the outer peripheral surface of the first protrusion (AXa) includes a third thread, the inner peripheral surface of the seventh fastener (F4a) includes a fourth thread corresponding to the third thread, and the inner peripheral surface defining the through hole of the seventh rotary coupling (R4a) does not include a thread. However, the present invention is not limited to this.

[0146] In one embodiment, the second end of the fourth support portion 443d is coupled to the second end of the second support portion 443b so as to be rotatable about the X-axis direction.

[0147] In one embodiment, the second end of the second support portion 443b includes a second protrusion (AXb) that protrudes in a direction toward the fourth support portion 443d (e.g., the +X direction). The second protrusion (AXb) protrudes in the +X direction from a second side surface 443b-2 of the second end of the second support portion 443b that faces the second end of the fourth support portion 443d.

[0148] The eighth rotation coupling portion (R4b) is coupled to the second end of the fourth support portion 443d. For example, as shown in FIG. 4, the second end of the fourth support portion 443d defines a recess having a shape corresponding to the eighth rotation coupling portion (R4b), and the eighth rotation coupling portion (R4b) is coupled to the recess in the second end of the fourth support portion 443d. The eighth rotation coupling portion (R4b) defines a through hole in the center corresponding to the second protrusion (AXb).

[0149] The second protrusion (AXb) is fastened to the eighth fastening member (F4b) through the through hole of the eighth rotary coupling (R4b). For example, the outer peripheral surface of the second protrusion (AXb) includes the third thread, the inner peripheral surface of the eighth fastening member (F4b) includes the fourth thread, and the inner peripheral surface defining the through hole of the eighth rotary coupling (R4b) does not include a thread. However, the present invention is not limited to this.

[0150] According to the embodiment of the present invention, the substrate processing apparatus 1 can adjust the position and angle of the tray 30 on which the substrate (S) is placed with six degrees of freedom, thereby enabling the substrate processing apparatus 1 to align the mask (M) and the substrate (S) more precisely. [Industrial Applicability]

[0151] The present invention is applicable to various electronic device manufacturing apparatuses, for example, display devices for vehicles, ships, and aircraft, portable communication devices, display devices for exhibitions or information transmission, medical display devices, etc.

[0152] Although the present invention has been described above with reference to exemplary embodiments, those skilled in the art will recognize that various modifications and variations can be made thereto without departing from the spirit and scope of the invention as set forth in the following claims. [Explanation of symbols]

[0153] 1: Substrate processing equipment 10: Chamber 20: Fixing member S: Substrate 30: Tray 40: Alignment device 42: Holding part 44: Alignment section 50: Stage 60: Mask frame 70: Vapor deposition source

Claims

1. a plate including first and second sides extending in the X-axis direction and facing each other, and third and fourth sides extending in the Y-axis direction and facing each other; a first connecting portion and a second connecting portion spaced apart from each other in the X-axis direction and fixedly coupled to the first side of the plate; a third connecting portion and a fourth connecting portion spaced apart from each other in the X-axis direction and fixedly coupled to the second side of the plate; a first support portion extending in the X-axis direction, the first end portion being coupled to the first connecting portion and the second end portion being coupled to the second connecting portion; a second support portion extending in the X-axis direction, the first end of which is coupled to the third connecting portion and the second end of which is coupled to the fourth connecting portion; a third support portion extending in the Y-axis direction, adjacent to the third side of the plate, and having a first end portion coupled to the first end portion of the first support portion; a first drive unit that is disposed between the first end of the first support unit and the first end of the third support unit, and that couples the first end of the third support unit to the first end of the first support unit so that the first end of the third support unit is movable in the Y-axis direction and the Z-axis direction and rotatable about the X-axis direction; a first holder fixedly coupled to the third support, the first holder holding a tray on which a substrate is disposed.

2. The first drive unit includes: a first linear guide extending in the Z-axis direction; a first-second linear guide extending in the Y-axis direction; a first moving block coupled to the first linear guide so as to be slidable in the Z-axis direction; 2. The alignment device of claim 1, further comprising: a first-second moving block coupled to the first-second linear guide so as to be slidable in the Y-axis direction, and fixedly coupled to the first-first moving block.

3. the first-1st moving block is adjacent to the first-1st linear guide and defines a first cylindrical receiving groove extending in the Z-axis direction; The alignment device according to claim 2 , wherein a plurality of balls are disposed in the first receiving groove.

4. the first-second moving block defines a second cylindrical receiving groove adjacent to the first-second linear guide and extending in the Y-axis direction; The alignment device according to claim 2 , wherein a plurality of balls are disposed in the second receiving groove.

5. 3. The alignment apparatus according to claim 2, wherein the first drive unit further includes a first motor that drives the first-1 moving block to slide in the Z-axis direction.

6. 3. The alignment device according to claim 2, wherein the first-1 linear guide is fixedly coupled to one side of the first end of the first support portion opposite the first end of the third support portion.

7. 3. The alignment device of claim 2, wherein the first and second linear guides are coupled to the first end of the third support portion so as to be rotatable about an X-axis direction.

8. 2. The alignment device of claim 1, further comprising a second drive unit disposed between the first end of the first support and the first connecting unit, and coupled to the first connecting unit so that the first end of the first support can move in the X-axis direction and the Z-axis direction and can rotate about the Y-axis direction.

9. The second drive unit includes: a second linear guide extending in the Z-axis direction; a second-2 linear guide extending in the X-axis direction; a second-first moving block coupled to the second-first linear guide so as to be slidable in the Z-axis direction; 9. The alignment device of claim 8, further comprising: a second-second moving block coupled to the second-second linear guide so as to be slidable in the X-axis direction, and fixedly coupled to the second-first moving block.

10. The second driving unit includes a second motor that drives the second moving block to slide in the Z-axis direction; 10. The alignment apparatus according to claim 9, further comprising: a second-second motor that drives the second-second moving block to slide in the X-axis direction.

11. 10. The alignment device according to claim 9, wherein the second linear guide is fixedly coupled to one surface of the first connecting portion opposite the first end of the first support portion.

12. 10. The alignment device of claim 9, wherein the second-2 linear guide is coupled to the first end of the first support so as to be rotatable about a Y-axis direction.

13. 2. The alignment device of claim 1, wherein a second end of the third support is coupled to the first end of the second support so as to be rotatable about an X-axis direction.

14. a fourth support portion extending in the Y-axis direction, adjacent to the fourth side of the plate, and having a first end coupled to the second end of the first support portion; The alignment device of claim 1 , further comprising: a second holder fixedly coupled to the fourth support and configured to hold the tray.

15. 15. The alignment device of claim 14, further comprising a third drive unit disposed between the second end of the first support and the second connecting unit, and coupled to the second connecting unit so that the second end of the first support can move in the X-axis direction and the Z-axis direction and can rotate about the Y-axis direction.

16. 15. The alignment device of claim 14, wherein a second end of the fourth support is coupled to the second end of the second support so as to be rotatable about an X-axis direction.

17. a mask frame in which a mask is placed; a tray disposed on the mask frame and on which a substrate is placed; an alignment device disposed on the tray and holding the tray; a stage disposed on the alignment device; The alignment device a plate that includes first and second sides that extend in the X-axis direction and are opposed to each other, and third and fourth sides that extend in the Y-axis direction and are opposed to each other, and that is coupled to the stage so as to be movable in the X-axis direction and the Y-axis direction; a first connecting portion and a second connecting portion spaced apart from each other in the X-axis direction and fixedly coupled to the first side of the plate; a third connecting portion and a fourth connecting portion spaced apart from each other in the X-axis direction and fixedly coupled to the second side of the plate; a first support portion extending in the X-axis direction, the first end portion being coupled to the first connecting portion and the second end portion being coupled to the second connecting portion; a second support portion extending in the X-axis direction, the first end of which is coupled to the third connecting portion and the second end of which is coupled to the fourth connecting portion; a third support portion extending in the Y-axis direction, adjacent to the third side of the plate, and having a first end portion coupled to the first end portion of the first support portion; a first drive unit that is disposed between the first end of the first support unit and the first end of the third support unit, and that couples the first end of the third support unit to the first end of the first support unit so that the first end of the third support unit is movable in the Y-axis direction and the Z-axis direction and rotatable about the X-axis direction; a first holder fixedly coupled to the third support and configured to hold the tray.

18. 18. The substrate processing apparatus of claim 17, wherein the alignment device further includes a second drive unit disposed between the first end of the first support and the first connecting unit, and coupled to the first connecting unit so that the first end of the first support is movable in the X-axis direction and the Z-axis direction and rotatable about the Y-axis direction.

19. The alignment device a fourth support portion extending in the Y-axis direction, adjacent to the fourth side of the plate, and having a first end coupled to the second end of the first support portion; The substrate processing apparatus of claim 17 , further comprising: a second holder fixedly coupled to the fourth support, the second holder holding the tray.

20. 20. The substrate processing apparatus of claim 19, wherein the alignment device further includes a third drive unit disposed between the second end of the first support and the second connecting unit, and coupled to the second connecting unit so that the second end of the first support is movable in the X-axis direction and the Z-axis direction and rotatable about the Y-axis direction.

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