Processing system, removal jig, and removal method

Abstract

To provide a technique capable of easily taking out a transfer unit provided in a processing system.SOLUTION: The processing system includes a transfer module having a guide rail extending in a transfer direction, a transfer frame configured to support the guide rail, and a transfer unit configured to be movable along the guide rail, and a plurality of processing modules connected to the transfer module and configured to receive a transfer object transferred by the transfer unit. The conveyance frame has a frame end provided at a position longer than a position of a terminal end of the guide rail along the conveyance direction. Then, the processing system includes a take-out jig having a carry-out rail that enters the carrier frame beyond the frame end and comes close to or into contact with a terminal end of the guide rail, the take-out jig being capable of taking out the carrier unit from the guide rail to the carry-out rail.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to a processing system, an extraction jig, and an extraction method. [Background technology]

[0002] Patent Document 1 discloses a processing system (wafer inspection system) in which a wafer is transported to one of a plurality of cells by a transport unit (transport mechanism), and the wafer is inspected by a test head provided in the cell.

[0003] When replacing a worn main board of a test head with a new one, this processing system transfers the test head from the cell to a maintenance cart. The maintenance cart includes a test head case capable of accommodating the test head, slide rails provided at the upper end of the test head case for supporting and sliding the flange of the test head, and a lift mechanism capable of adjusting the height position of the slide rails. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2020-21967 Summary of the Invention [Problem to be solved by the invention]

[0005] The present disclosure provides a technique that allows a transport unit provided in a processing system to be easily removed. [Means for solving the problem]

[0006] According to one aspect of the present disclosure, there is provided a processing system including a transport module having a guide rail extending in a transport direction, a transport frame supporting the guide rail, and a transport unit movable along the guide rail, and a plurality of processing modules connected to the transport module and through which transported objects are transported by the transport unit, wherein the transport frame has a frame end that is located at a position along the transport direction longer than the terminal position of the guide rail, has an unloading rail that enters the transport frame beyond the frame end and is close to or in contact with the terminal end of the guide rail, and is equipped with an extraction jig that enables the transport unit to be removed from the guide rail to the unloading rail. [Effects of the Invention]

[0007] According to one aspect, the transport unit provided in the processing system can be easily removed. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 2 is an enlarged plan view showing a transfer system including a processing system according to an embodiment. [Figure 2] FIG. 10 is an enlarged perspective view showing the negative X-axis direction side of the transfer module and the inspection device. [Figure 3] Fig. 3(A) is a side view schematically showing a removal jig used when removing the transport unit, and Fig. 3(B) is a plan view schematically showing the removal jig. [Figure 4] 10 is a flowchart showing a method for removing the transport unit. [Figure 5] Fig. 5(A) is a first side view showing the operation of the removal method. Fig. 5(B) is a second side view showing the operation of the removal method. Fig. 5(C) is a third side view showing the operation of the removal method. Fig. 5(D) is a fourth side view showing the operation of the removal method. [Figure 6] FIG. 10 is a perspective view showing a processing system according to a first modified example. [Figure 7]7(A) and 7(B) are side views showing a removal jig according to a second modified example. [Figure 8] FIG. 11 is a side view showing a removal jig according to a third modified example. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and redundant explanations may be omitted.

[0010] FIG. 1 is an enlarged plan view of a transfer system 1 having a processing system 20 according to an embodiment. As shown in FIG. 1, the transfer system 1 is constructed in a work area such as a semiconductor manufacturing facility or a semiconductor inspection facility. The transfer system 1 transfers a substrate W, which is an object to be transferred, to an inspection device 50 of the processing system 20, and inspects the substrate W in the inspection device 50. The substrate W to be inspected is, for example, a wafer on which a plurality of semiconductor devices, which are devices under test (DUTs), are arranged in a matrix. Note that the substrate W is not limited to a wafer, and may be a carrier having semiconductor devices, a glass substrate, a single chip, an electronic circuit board, or the like.

[0011] Specifically, the transport system 1 includes an overhead hoist transport (OHT) 10 that transports the carrier C, and a processing system 20. Note that Fig. 1 shows one processing system 20, and the overhead transport device 10 also shows only the vicinity of this processing system 20. However, this is not limiting, and a plurality of processing systems 20 may be provided in a work area, and the overhead transport device 10 may be formed on a route that can transport the carrier C to the plurality of processing systems 20.

[0012] The carrier C is a container capable of accommodating a plurality of (e.g., 25) substrates W. An example of this carrier C is a FOUP (Front Opening Unified Pod) with one side that can be opened and closed. The ceiling transport device 10 transports the carrier C in a state where it accommodates a plurality of substrates W or in an empty state.

[0013] The ceiling conveying device 10 includes a rail 11 fixed to the ceiling of the work site, and a hoist mechanism (not shown) that runs along the rail 11 while holding a carrier C and can move the carrier C up and down. For example, the hoist mechanism raises and lowers the carrier C using a belt that holds the carrier C in a suspending manner.

[0014] The rails 11 are installed so as to pass above the loader modules 30 of multiple processing systems 20. A hoist mechanism that moves along the rails 11 moves directly above the loader module 30 of a target processing system 20 and lowers the carrier C, thereby automatically setting the carrier C in the loader module 30. Conversely, the hoist mechanism moves directly above the carrier C of the loader module 30 and holds and lifts the carrier C, thereby removing the carrier C from the processing system 20.

[0015] The transport system 1 is installed so that the longitudinal direction of the multiple processing systems 20 is perpendicular to the extension direction of the rails 11 in the work area. Each processing system 20 is configured as a unit combining multiple types of modules, and continuously transports and processes each substrate W accommodated in a carrier C.

[0016] Specifically, the processing system 20 includes a loader module 30, a transfer module 40 connected to the loader module 30, and a plurality of inspection apparatuses 50, which are processing modules connected to the transfer module 40. The processing system 20 removes a substrate W from a carrier C transferred to the loader module 30 by the ceiling transfer device 10, transfers the substrate W to a target inspection apparatus 50 via the transfer module 40, and inspects the substrate W in the inspection apparatus 50. In the description of the processing system 20, the positions and directions of each component will be described based on the directions of arrows in FIG. 1. The X-axis direction in FIG. 1 is the horizontal direction of the paper and is the direction along the extension direction of the transfer module 40. The Y-axis direction in FIG. 1 is the vertical direction of the paper and is the direction along the extension direction of the loader module 30. The Z-axis direction in FIG. 1 is the front and rear direction of the paper and is the height direction of the processing system 20.

[0017] The loader module 30 of the processing system 20 is provided vertically below the rails 11 of the ceiling conveying device 10. The longitudinal direction of the loader module 30 is along the Y-axis direction. In other words, the loader module 30 is installed so that its longitudinal direction coincides with the extension direction of the rails 11. The loader module 30 has multiple (four in FIG. 1) load ports 31 arranged side by side along the Y-axis direction, each capable of loading multiple carriers C.

[0018] The load port 31 of the loader module 30 receives the carrier C from the hoist mechanism of the ceiling conveyance device 10 and hands over the carrier C to the hoist mechanism. The loader module 30 has therein a loader-side conveyance device (not shown) that removes the substrate W from the carrier C of each load port 31 and conveys it to the conveyance module 40. A passage is provided inside the loader module 30 that allows the loader-side conveyance device to move in the Y-axis direction.

[0019] The loader module 30 is configured to include a main housing 35 having each load port 31, and a sub-housing 36 formed separately from the main housing 35 and acting as an intermediate between the main housing 35 and the transfer module 40. The main housing 35 and the sub-housing 36 are installed so as to be aligned in the Y-axis direction.

[0020] The main housing 35 is formed by assembling multiple frames (not shown) into a box that is rectangular when viewed from the X-axis direction and L-shaped when viewed from the Y-axis direction. The main housing 35 has each load port 31 on the upper surface of a stepped portion of the L-shape.

[0021] The sub-housing 36 is formed by assembling a plurality of frames (not shown) into a rectangular shape that is long in the X-axis direction and short in the Y-axis direction in plan view, and is a rectangular parallelepiped having a predetermined height in the Z-axis direction. This sub-housing 36 is smaller than the main housing 35. An aligner device 34 is provided inside the sub-housing 36, which detects the position and circumferential orientation (posture) of the substrate W and adjusts the positional deviation and posture of the substrate W in cooperation with the loader-side transport device. A controller 90 is also provided inside the sub-housing 36, which controls the operation of each component of the processing system 20. Furthermore, the sub-housing 36 has a control panel (not shown) that can be operated by a user on its side surface in the positive direction of the Y-axis.

[0022] The loader module 30 described above has two housings, the main housing 35 of which is versatile enough to be applied to various processing systems 20. In other words, the same main housing 35 can be applied even if the type of processing system 20 changes. In contrast, the loader module 30 has two housings, the sub-housing 36 of which is customizable so that the configuration and shape can be changed according to the needs of each customer. For example, if a customer does not need the aligner device 34, the sub-housing 36 can be changed to one that does not have the aligner device 34.

[0023] The transfer module 40 is connected to the side surface of the sub-housing 36 of the loader module 30 on the positive X-axis direction side, and extends linearly along the X-axis direction. In other words, the longitudinal direction of the transfer module 40 is perpendicular to the longitudinal direction of the loader module 30. A plurality of (three) inspection devices 50 are connected to each of both sides of the extension direction of the transfer module 40 (the side surface on the positive Y-axis direction and the side surface on the negative Y-axis direction). Each inspection device 50 is connected to the transfer module 40 perpendicularly (at an angle of 90°). However, each inspection device 50 may be connected to the transfer module 40 at an angle of, for example, approximately 45° to 90°.

[0024] Specifically, the transfer module 40 includes a transfer housing 41 extending in the X-axis direction, a buffer section 42 provided on the negative side of the X-axis of the transfer housing 41, and a transfer device 43 that moves back and forth along the X-axis direction within the transfer housing 41. Note that the transfer module 40 may be a vacuum transfer module that transfers the substrate W with the transfer space of the transfer housing 41 depressurized to a vacuum atmosphere.

[0025] 2 is an enlarged perspective view of the negative X-axis direction side of the transport module 40 and the inspection device 50. As shown in Fig. 2, the framework of the transport housing 41 is formed by assembling a base plate 411 and a plurality of transport frames 412. The transport housing 41 forms an enclosed transport space by attaching panels (not shown) to the base plate 411 and the plurality of transport frames 412.

[0026] The base plate 411 is provided inside the transport frame 412 and forms a floor that supports the transport device 43. The transport frame 412 supports the transport device 43 via the base plate 411. The bottom of the transport frame 412 is fixed to the floor of the work area via multiple legs 413. Each of the multiple legs 413 has a level adjuster function that allows adjustment of the height in the Z-axis direction. By adjusting the height of each leg 413 when installing the transport module 40, the upper surface of the base plate 411 is adjusted to be a horizontal plane.

[0027] The buffer section 42 provided in the transport housing 41 is arranged at an appropriate height position by a platform 421 placed on a base plate 411. This buffer section 42 temporarily stores the substrate W transported by the loader-side transport device of the loader module 30 and transfers it to the transport device 43. The buffer section 42 also temporarily stores the substrate W transported by the transport device 43 and transfers it to the loader-side transport device. A gate valve 422 that opens and closes the opening of the buffer section 42 is provided on a side surface of the buffer section 42 facing the negative direction of the X axis. The gate valve 422 may also be provided on a side surface facing the positive direction of the X axis.

[0028] The transport device 43 includes an X-axis movement mechanism 44 for moving along the X-axis direction within the transport module 40. The X-axis movement mechanism 44 includes a pair of guide rails 441 extending in the X-axis direction, an endless belt 442 extending laterally of the guide rails 441, a drive motor 443 that rotates the belt 442 via a pulley, and an X-axis movable body 444 that engages with the belt 442. The X-axis movable body 444 has, on its underside, multiple rolling bodies 445 that can roll on each of the guide rails 441 (see FIG. 3(A)). The X-axis movable body 444 bridges the pair of guide rails 441 and moves the components of the transport device 43 (hereinafter also referred to as transport units 48) above each of the guide rails 441 together.

[0029] The drive motor 443 is connected to a controller 90 (see FIG. 1) via a driver (not shown), and the drive force and drive direction are controlled by the controller 90. The drive motor 443 rotates the belt 442 forward or backward via a pulley. The rotation of the belt 442 is transmitted to the X-axis movable body 444, allowing the rolling bodies 445 to move back and forth on the pair of guide rails 441 while rolling. Note that the conveyance device 43 is not limited to the X-axis movement mechanism 44 including the belt 442 and the drive motor 443, and various mechanisms may be employed. As an example, the X-axis movement mechanism 44 may be configured to slide the X-axis movable body 444 using a linear motor.

[0030] The above-described transport device 43 loads and unloads the substrate W between it and the buffer unit 42, and is moved in the X-axis direction by the X-axis movement mechanism 44 to be positioned opposite a target inspection device 50 among the multiple inspection devices 50. The transport device 43 receives, hands over, transports, etc. the substrate W between it and the inspection device 50 by moving up and down in the Z-axis direction (vertical direction), rotating about the vertical axis, and moving forward and backward in the Y-axis direction. Specifically, the transport device 43 includes the above-described X-axis movement mechanism 44 at the bottom on the vertical downward side, and includes, from the X-axis movement mechanism 44 toward the vertical upward side, a Z-axis movement mechanism 45, a rotation mechanism 46, and an advance and retreat movement mechanism 47, in this order.

[0031] The Z-axis movement mechanism 45 is fixed to the upper surface of the X-axis movable body 444. The Z-axis movement mechanism 45 employs a ball screw mechanism, a cylinder mechanism, or the like, and raises and lowers the rotation mechanism 46 and the advance / retract movement mechanism 47 provided above. The rotation mechanism 46 is provided between the Z-axis movement mechanism 45 and the advance / retract movement mechanism 47, and rotates the advance / retract movement mechanism 47 relative to the Z-axis movement mechanism 45. The advance / retract movement mechanism 47 has an end effector 471 that directly supports the substrate W in the transport device 43, and transports the substrate W to the inspection device 50. The transport unit 48 that moves relative to each guide rail 441 in the transport device 43 is composed of each rolling element 445, the X-axis movable body 444, the Z-axis movement mechanism 45, the rotation mechanism 46, and the advance / retract movement mechanism 47.

[0032] The transport unit 48 may also include a container 70 that travels integrally on a pair of guide rails 441 and temporarily stores the substrate W. For example, the container 70 has one or more openings 71 on its side surface on the negative X-axis direction side through which the substrate W can be loaded and unloaded. The transport unit 48 rotates and raises and lowers the advancing and retracting mechanism 47 so that it faces the openings 71, and then advances the end effector 471 of the advancing and retracting mechanism 47, thereby loading and unloading the substrate W into and from the container 70 through the openings 71. The container 70 may also include an attitude adjustment device (aligner device) therein that cooperates with the transport unit 48 to adjust the position and attitude of the stored substrate W.

[0033] The inspection device 50 connected to the transfer module 40 inspects the electrical characteristics of the substrate W transferred by the transfer module 40. The inspection device 50 has an inspection device housing 51 (only the frame is shown in FIG. 2) and a stage 52 that supports the substrate W inside the inspection device housing 51. The stage 52 moves the substrate W in the X-axis direction, Y-axis direction, and Z-axis direction inside the inspection device housing 51.

[0034] 1, the inspection device 50 includes a tester 53 for inspecting the substrate W above the inspection device housing 51. The inspection device 50 also includes a tester moving mechanism 54 that holds the tester 53 and moves the tester 53 between a test position (see the dashed line in FIG. 1) and a retracted position (see the two-dot chain line in FIG. 1). A support table 55 that supports the tester 53 is provided at the retracted position. The inspection device 50 also includes a chiller that adjusts the temperature of the substrate W during inspection, a suction mechanism that sucks the substrate W onto the stage 52, and other devices installed around the inspection device housing 51 and the tester moving mechanism 54.

[0035] The inspection device 50 is connected to the transport module 40 at a 90° angle via a connection buffer 60 consisting of multiple frames 61 and a panel (not shown). By connecting the inspection device 50 to the transport module 40 via the connection buffer 60, the tester movement mechanism 54 and the like can be installed without interfering with the transport housing 41. The connection buffer 60 is formed into a rectangular parallelepiped that is larger than the advance / retract movement mechanism 47 of the transport unit 48, allowing the advance / retract movement mechanism 47 to enter.

[0036] The controller 90 of the processing system 20 is a computer including a processor, memory, input / output interface, communication interface, etc. (not shown). The processor is one or a combination of a central processing unit (CPU), a graphics processing unit (GPU), an application specific integrated circuit (ASIC), a field-programmable gate array (FPGA), a circuit made up of a plurality of discrete semiconductors, etc., and executes and processes programs stored in memory. The memory includes a main storage device made up of semiconductor memory, etc., and an auxiliary storage device made up of disks, drives, semiconductor memory (flash memory), etc.

[0037] For example, the controller 90 controls the operation of the X-axis movement mechanism 44 to move the transport unit 48 along the pair of guide rails 441 and position the transport unit 48 at a position facing the target inspection device 50. Thereafter, the transport unit 48 operates the Z-axis movement mechanism 45, the rotation mechanism 46, the advance / retract movement mechanism 47, etc. to transport the substrate W to the stage 52 of the inspection device 50. Then, under the command of the controller 90, the inspection device 50 inspects the substrate W placed on the stage 52.

[0038] Here, in the processing system 20, an operator may perform maintenance (or replacement) on the transport unit 48 of the transport module 40. However, it is inefficient for the operator to perform maintenance on the transport unit 48 while the transport unit 48 remains housed in the transport housing 41. Therefore, the processing system 20 according to the embodiment is configured so that the transport unit 48 can be removed outside the transport housing 41 and maintenance of the transport unit 48 can be performed.

[0039] FIG. 3A is a side view schematically illustrating a removal jig 80 used when removing the transport unit 48. FIG. 3B is a plan view schematically illustrating the removal jig 80. In the processing system 20, the removal jig 80 is installed in the transport housing 41 of the transport module 40, making it possible to remove the transport unit 48 from the transport module 40. The pair of guide rails 441 of the X-axis movement mechanism 44 described above are fixed to the upper surface of the base plate 411 of the transport housing 41 and extend to near the frame end 412e in the positive direction of the X-axis of the transport frame 412. The removal jig 80 is installed at the end of the pair of guide rails 441 in the positive direction of the X-axis so as to extend the pair of guide rails 441. The removal jig 80 removes the transport unit 48 by transferring it from the pair of guide rails 441 to the removal jig 80.

[0040] Specifically, as described above, the bottom of the transport frame 412 is supported by a plurality of legs 413 having a level adjuster function, thereby making it possible to adjust the height position in the Z-axis direction. The height positions of the base plate 411, transport frame 412, and guide rails 441 are adjusted so that they extend horizontally. Note that in Figures 3(A), 3(B), and 5 and subsequent figures, the transport frame 412 constituting parts other than the bottom (ceiling and side parts) are not shown in order to make the structure easier to understand.

[0041] The top surface of the base plate 411 is set so as to be slightly higher in the vertical direction than the bottom of the transport frame 412. An end 411e of the base plate 411 in the positive direction of the X axis is located inside (on the negative direction of the X axis) more than a frame end 412e of the transport frame 412.

[0042] A pair of guide rails 441 are installed on the upper surface of this base plate 411. An end 441e of each guide rail 441 in the positive X-axis direction is located inside (in the negative X-axis direction) relative to the end 411e of the base plate 411. Therefore, the transport frame 412 has a frame end 412e at a position (on the positive X-axis side) longer than the position of the end 441e of each guide rail 441 extending along the X-axis direction (transport direction).

[0043] Further, stoppers 446 are provided at the ends 441e of the pair of guide rails 441 to prevent the transport unit 48 from falling off in the positive direction of the X axis when the transport module 40 is in operation. The stoppers 446 are removably attached to each guide rail 441, and are removed by an operator when removing the transport unit 48, thereby allowing the transport unit 48 to move from the transport module 40 in the positive direction of the X axis.

[0044] On the other hand, the removal jig 80 applied to the transport module 40 includes two (a pair of) rail members 81, a carriage 82, and an (extendable) carry-out rail 84 corresponding to the guide rail 441. The carry-out rail 84 is a divided rail provided on both each rail member 81 and the carriage 82. Although not shown in the drawings, each rail member 81 is held on the side of the carriage 82, and when removing the transport unit 48, the worker takes it out of the carriage 82 and uses it.

[0045] The cart 82 includes a base body 821 and a push part 822 that protrudes vertically upward from the base body 821. The push part 822 is gripped by an operator, allowing the entire cart 82 to be pushed out or pulled out. In addition, the cart 82 has a plurality of (for example, four) moving members 823 that move the cart 82 installed on the underside of the base body 821.

[0046] Each moving member 823 has a wheel 823a and a height position adjustment unit 823b that pivots around the wheel 823a. The wheel 823a is a so-called caster that rolls on the floor of the work area and is configured to be rotatable by θ around the axis of the height position adjustment unit 823b. It is preferable that the moving member 823 is provided with a locking mechanism that locks the rolling of the wheel 823a. After the carriage 82 is positioned, the carriage 82 can be prevented from moving by locking the locking mechanism. It is to be noted that the carriage 82 is not limited to being fixed by the locking mechanism of the wheel 823a, and a separate member may also be used, such as by extending a separate leg from the height position adjustment unit 823b.

[0047] The height adjustment units 823b have a level adjuster function that can displace each moving member 823 in the height direction and maintain the displaced position. The dolly 82 can position the platform body 821 at a target height position by adjusting the height position of each height adjustment unit 823b. For example, the height position of the top surface of the platform body 821 is adjusted so that it approximately matches the height position of the bottom of the transport frame 412.

[0048] The carriage 82 is provided with a support plate 824 on the upper surface of a base body 821, and a pair of carriage-side rails 842 on the upper surface of this support plate 824. The outer edge of the support plate 824 is located inside the outer edge of the base body 821. In addition, the upper surface of the support plate 824 can be adjusted to a height position that approximately coincides with the upper surface of the base plate 411 by adjusting the height position adjustment parts 823b of each of the moving members 823 described above.

[0049] The carriage-side rail 842 constitutes one of the divided rails (second divided rail) obtained by dividing the carry-out rail 84. The pair of carriage-side rails 842 extend parallel to each other on the upper surface of the support plate 824. The width between the pair of carriage-side rails 842 matches the pair of guide rails 441 of the transport module 40. The extension direction of each carriage-side rail 842 is along the direction in which the platform main body 821 and the push section 822 are aligned. One end 842a of each carriage-side rail 842 is located inside the outer edge of the support plate 824 (positive direction of the X-axis in FIG. 3(A)). The other end 842b of each carriage-side rail 842 is located inside the outer edge of the support plate 824 (negative direction of the X-axis in FIG. 3(A)).

[0050] Further, a stopper 825 is provided at the other end 842b of each carriage-side rail 842 to prevent the transport unit 48 from falling off when the transport unit 48 is transferred onto the carriage-side rail 842. Note that it is preferable that a stopper 826 (see FIG. 5(D)) is also attached to one end 842a of each carriage-side rail 842 to prevent the transport unit 48 from falling off after the transport unit 48 has been transferred.

[0051] On the other hand, the pair of rail members 81 are used to connect the pair of guide rails 441 and the pair of carriage-side rails 842 when removing the transport unit 48. Each rail member 81 includes a fixed plate 811 and a relay rail 841 fixed to one surface of the fixed plate 811.

[0052] The fixed plate 811 is placed so as to bridge the upper surface of the frame end 412e of the transport frame 412 and the upper surface of one end of the carriage 82 (table main body 821). The thickness of the fixed plate 811 is approximately equal to the dimension from the upper surface of the transport frame 412 to the upper surface of the base plate 411 and the dimension from the upper surface of the table main body 821 to the upper surface of the support plate 824.

[0053] The relay rail 841 constitutes the other (first divided rail) of the divided rails obtained by dividing the carry-out rail 84, and is firmly connected to the upper surface (one surface) of the fixed plate 811. The width of the relay rail 841 is smaller than the width of the fixed plate 811. The height of the relay rail 841 matches the height of the guide rail 441 and the height of the carriage-side rail 842. One end 841a and the other end 841b of the relay rail 841 protrude from both longitudinal ends of the fixed plate 811, respectively.

[0054] The amount of protrusion P of one end 841a and the other end 841b from the fixed plate 811 is preferably set based on the distance D1 between the frame end 412e of the transport frame 412 and the terminal end 441e of each guide rail 441. For example, the amount of protrusion P of the relay rail 841 is set to be smaller than the distance D1 between the frame end 412e of the transport frame 412 and the terminal end 441e of each guide rail 441, and longer than the distance D2 between the terminal end 411e of the base plate 411 and the terminal end 441e of each guide rail 441. This allows the relay rail 841 to be close to or in contact with the terminal end 441e of the guide rail 441 when the fixed plate 811 is placed on the frame end 412e of the transport frame 412.

[0055] Furthermore, when the rail member 81 is placed on the transport frame 412 and the carriage 82, it is preferably fixed by a fastener 85. For example, a fastening bolt can be used as the fastener 85. In this case, the fastener 85 is fastened to any of the base plate 411, the transport frame 412, the platform main body 821, the support plate 824, etc. through a hole formed in the fixing plate 811 and / or the relay rail 841. The rail member 81 may be fixed to either the transport frame 412 or the carriage 82 by the fastener 85, but it is more preferable to fix the rail member 81 to both the transport frame 412 and the carriage 82. This allows the removal jig 80 to firmly maintain the guide rail 441, the relay rail 841, and the carriage-side rail 842 in a linear arrangement.

[0056] The rail member 81 described above is installed between the transportation casing 41 and the carriage 82. In this installed state, one end 841a of the relay rail 841 is sufficiently close to or in contact with the end 441e of the guide rail 441, and the other end 841b of the relay rail 841 is sufficiently close to or in contact with one end 842a of the carriage-side rail 842. Note that the rail members 81 do not necessarily have to be prepared in pairs. For example, the rail member 81 may be configured such that a fixing plate 811 that is long in the Y-axis direction (width direction) is applied and both of the pair of relay rails 841 are fixed to this fixing plate 811.

[0057] The processing system 20 according to the embodiment is basically configured as described above, and its operation (the method of removing the transport unit 48) will be described below with reference to FIG. 4 and FIGS. 5(A) to 5(D). FIG. 4 is a flowchart showing the method of removing the transport unit 48. FIG. 5(A) is a first side view showing the operation of the removal method. FIG. 5(B) is a second side view showing the operation of the removal method. FIG. 5(C) is a third side view showing the operation of the removal method. FIG. 5(D) is a fourth side view showing the operation of the removal method.

[0058] In the removal method, the worker first removes stopper 446 from guide rail 441 of transport casing 41, and also removes X-axis movable body 444 from belt 442 that moves transport unit 48 (step S101). This allows transport unit 48 to be manually moved in the positive direction of the X-axis by the worker. Note that the timing for removing stopper 446 or belt 442 is not limited to the beginning of the removal method, and may be, for example, after rail member 81 is attached (after step S103), etc.

[0059] Next, the worker moves the carriage 82 and positions it relative to the transport module 40 (step S102). Specifically, as shown in FIG. 5(A), the worker places the carriage 82 at an appropriate interval on the tip side of the end of the transport module 40 in the positive direction of the X axis. At this time, the worker also adjusts the position of the carriage 82 in the width direction so that the carriage-side rails 842 are roughly aligned with the guide rails 441 of the transport module 40.

[0060] Then, the worker installs a pair of rail members 81 between the transport module 40 and the carriage 82 (step S103). For example, the worker adjusts the spacing between each guide rail 441 and each carriage-side rail 842 so that the fixing plate 811 and the relay rail 841 fit in perfectly, and inserts each rail member 81 between the transport module 40 and the carriage 82. Furthermore, the worker fixes each rail member 81 with a fixing device 85 and locks the moving member 823 of the carriage 82 to prevent it from moving. As a result, as shown in FIG. 5(B), the guide rails 441, the relay rail 841, and the carriage-side rail 842 are aligned in a straight line. In this state, one end 841a of the relay rail 841 is sufficiently close to or in contact with the end 441e of the guide rail 441, and the other end 841b of the relay rail 841 is sufficiently close to or in contact with one end of the carriage-side rail 842.

[0061] Thereafter, the worker moves the transport unit 48 of the transport module 40 along the guide rails 441, the relay rails 841, and the carriage-side rails 842 in that order, and places it on the carriage 82 (step S104). As shown in FIG. 5(C), the transport unit 48 can move smoothly along the rails that are aligned in a straight line, and is easily transferred and placed on the carriage 82. When performing maintenance on the transport unit 48, the worker can perform the work with the transport unit 48 placed on the carriage 82.

[0062] Alternatively, the worker may transport the transport unit 48 to another location to perform maintenance or replacement. The process flow in FIG. 4 below is an example of a case where the transport unit 48 is transported to another location or where the current transport unit 48 is replaced with another transport unit 48. In detail, the worker releases the fixing of each rail member 81 by the fixing device 85 and removes each rail member 81 connecting between the transport module 40 and the carriage 82 (step S105). At this time, the worker may also attach a stopper 826 to one end of the carriage-side rail 842 to prevent the transport unit 48 from falling off.

[0063] As shown in FIG. 5(D), the carriage 82 carrying the transport unit 48 is now in a free state relative to the transport module 40. Therefore, the worker separates the carriage 82 from the transport module 40 and moves the carriage 82 to another location (step S106). The transport module 40 is now in a state where there is no transport unit 48 that is the target of maintenance. When transferring the transport unit 48 after maintenance or another transport unit 48 to the transport module 40, the above steps S102 and S103 are performed. Then, the worker can return the transport unit 48 to the transport module 40 by moving the transport unit 48 on the carriage 82 along the carriage-side rail 842, the relay rail 841, and the guide rail 441 in that order.

[0064] As described above, in the removal method according to the embodiment, by using the rail member 81, the transport unit 48 can be smoothly moved from the transport module 40 to the carriage 82. In particular, even if the terminal end 441e of the guide rail 441 is located deeper than the frame end 412e of the transport frame 412, the rail member 81 can bring the relay rail 841 close to or into contact with the terminal end 441e, making it easier to remove the transport unit 48.

[0065] The processing system 20 according to the present disclosure is not limited to the above embodiment, and various modifications can be applied. For example, the processing system 20 is not limited to a configuration in which the substrate W is transported to each inspection apparatus 50 and inspected by the inspection apparatus 50, but may also be a system in which the substrate W is transported to a semiconductor manufacturing apparatus that performs substrate processing on the substrate W. Examples of substrate processing performed by the semiconductor manufacturing apparatus include film formation processing, etching processing, modification processing, cleaning processing, bonding processing, peeling processing, and ashing processing.

[0066] Fig. 6 is a perspective view showing a processing system 20A according to a first modified example. As shown in Fig. 6, the processing system 20A for inspecting a substrate W may be a cell tower type inspection system having a plurality of inspection cells 56 and having therein a transport unit 48 for transporting the substrate W to each inspection cell 56. Even in this case, when performing maintenance on the transport unit 48, the transport unit 48 can be removed using the removal jig 80 (cart 82 and rail member 81) in the same manner as described above.

[0067] 7A and 7B are side views showing a removal jig 80A according to a second modified example. The removal jig 80A according to the second modified example integrates the carriage 82 and the rail member 81. For example, the carriage 82 accommodates the rail member 81 so that it folds via a hinge (not shown) when the carriage 82 moves. After positioning the carriage 82A relative to the transport module 40, the operator extends the rail member 81 linearly to bring it close to or into contact with the end 441e of the guide rail 441, thereby enabling the transport unit 48 to be withdrawn. In this way, the removal jig 80A integrates the rail member 81 and the carriage 82, thereby simplifying the transportation and installation of the rail member 81.

[0068] FIG. 8 is a side view showing a removal jig 80B according to a third modified example. The removal jig 80B according to the third modified example differs from the above embodiment in that it includes only a rail member 81A and does not use a carriage 82. For example, the rail member 81A includes a fixed plate 811 and an unloading rail 84 that are longer than the transport unit 48, and a height adjustment unit 823b at the other end of the fixed plate 811. The height adjustment unit 823b adjusts the height of the unloading rail 84 so that it is level and at the same height as the guide rail 441 while it is placed on the transport frame 412. Even in this case, an operator can easily pull out the transport unit 48 of the transport module 40 onto the rail member 81A and perform maintenance on the rail member 81A.

[0069] The technical ideas and effects of the present disclosure explained in the above embodiments will be described below.

[0070] A first aspect of the present disclosure is a processing system 20, 20A including a transport module 40 having a guide rail 441 extending in the transport direction, a transport frame 412 supporting the guide rail 441, and a transport unit 48 movable along the guide rail 441, and a plurality of processing modules (inspection devices 50) connected to the transport module 40, to which a transported object (substrate W) is transported by the transport unit 48, wherein the transport frame 412 has a frame end 412e that is positioned longer along the transport direction than the position of the end 441e of the guide rail 441, has an unloading rail 84 that enters the transport frame 412 beyond the frame end 412e and is close to or in contact with the end 441e of the guide rail 441, and is equipped with removal jigs 80, 80A, 80B that enable the transport unit 48 to be removed from the guide rail 441 to the unloading rail 84.

[0071] As described above, in the processing systems 20 and 20A, the unloading rails 84 of the removal jigs 80, 80A, and 80B can be easily set on the guide rails 441 provided at a position shorter than the frame end 412e of the transport frame 412, and the transport unit 48 can be smoothly removed. This enables the operator to perform maintenance on the transport unit 48 quickly and stably.

[0072] Furthermore, removal jigs 80 and 80A include rail member 81 having a first divided rail (relay rail 841) formed by dividing carry-out rail 84, and a fixed plate 811 that fixes the first divided rail (relay rail 841), and rail member 81 brings the first divided rail protruding from fixed plate 811 into close proximity to or into contact with the end of guide rail 441 when fixed plate 811 is placed on transport frame 412. This allows removal jigs 80 and 80A to easily align guide rail 441 and the first divided rail based on the placement of fixed plate 811 on transport frame 412.

[0073] Furthermore, guide rail 441 is supported by transport frame 412 via base plate 411, and the thickness of fixed plate 811 matches the dimension from the upper surface of transport frame 412 to the upper surface of base plate 411. This allows removal jigs 80, 80A to easily adjust the height of guide rail 441 and the height of first divided rail (relay rail 841) based on the arrangement of fixed plate 811 on transport frame 412.

[0074] Also provided are fixtures 85 that fix the fixed plate 811 and / or the first divided rail (relay rail 841) to the transport frame 412 and / or the base plate 411. This allows the processing system 20, 20A to stably remove the transport unit 48 with the rail member 81 fixed.

[0075] The removal jig 80, 80A also includes a carriage 82 having a second divided rail (carriage-side rail 842) formed by dividing the carry-out rail 84, a base body 821 that supports the second divided rail, and a moving member 823 that can move the base body 821. This allows the processing system 20, 20A to easily transfer the transport unit 48 onto the carriage 82 by arranging the carriage 82 in a position along the guide rail 441 of the transport module 40.

[0076] Furthermore, with the carriage 82 positioned relative to the transport module 40 and the rail member 81 connecting the transport module 40 and the carriage 82, the guide rail 441, the first divided rail (relay rail 841), and the second divided rail (carriage-side rail 842) are aligned in a straight line. This allows the worker to smoothly pull the transport unit 48 along the rails to the carriage 82.

[0077] Furthermore, the moving member 823 has a height adjustment section 823b that can adjust the height position of the second divided rail (carriage-side rail 842). This makes it possible to easily adjust the height position of the second divided rail to match the height of the transport frame 412 that differs.

[0078] Furthermore, the removal jig 80A integrates the rail member 81 and the carriage 82. This allows the worker to move the rail member 81 and the carriage 82 easily.

[0079] The guide rail 441 also has a stopper 446 that is removably attached to the guide rail 441 and prevents the transport unit 48 from falling off. As a result, the processing system 20, 20A uses the stopper 446 to prevent the transport unit 48 from falling off before the transport unit 48 is removed, and by releasing the stopper 446 when the transport unit 48 is removed, the transport unit 48 can be allowed to move along the rail.

[0080] Furthermore, a second aspect of the present disclosure is an extraction jig 80, 80A, 80B that is applicable to a processing system 20, 20A that includes a transport module 40 having a guide rail 441 extending in the transport direction, a transport frame 412 that supports the guide rail 441, and a transport unit 48 that is movable along the guide rail 441, and a plurality of processing modules (inspection devices 50) that are connected to the transport module 40 and to which the transported object (substrate W) is transported by the transport unit 48, and includes an ejection rail 84 that enters the transport frame 412 beyond the frame end 412e of the transport frame 412 that is located at a position longer than the position of the end 441e of the guide rail 441 along the transport direction and is close to or in contact with the end 441e of the guide rail 441, and a fixed plate 811 that fixes the ejection rail 84, and by placing the fixed plate 811 on the transport frame 412, the transport unit 48 can be removed from the guide rail 441 to the ejection rail 84. Even in this case, the removal jigs 80, 80A, and 80B can easily remove the transport unit 48 provided in the processing systems 20 and 20A.

[0081] Moreover, a third aspect of the present disclosure is a method for removing a transfer unit 48 of a processing system 20, 20A, including a transfer module 40 having a guide rail 441 extending in the transfer direction, a transfer frame 412 supporting the guide rail 441, and a transfer unit 48 movable along the guide rail 441, and a plurality of processing modules (inspection device 50) connected to the transfer module 40 and through which an object to be transferred (substrate W) is transferred by the transfer unit 48. The method includes entering the transfer frame 412 from a position longer than the end position of the guide rail 441 along the transfer direction, closer to or in contact with the unloading rail 84 of the unloading jig 80, 80A, 80B at the end 441e of the guide rail 441, and removing the transfer unit 48 from the guide rail 441 to the unloading rail 84. Even in this case, the removal method can easily remove the transfer unit 48 provided in the processing system 20, 20A.

[0082] The processing systems 20, 20A, the unloading jigs 80, 80A, 80B, and the removal method according to the embodiments disclosed this time are illustrative in all respects and not restrictive. The embodiments can be modified and improved in various forms without departing from the scope and gist of the appended claims. The matters described in the above embodiments can also adopt other configurations within a non - conflicting range and can be combined within a non - conflicting range.

Explanation of Reference Numerals

[0083] 20, 20A Processing System 40 Transfer Module 48 Transfer Unit 50 Inspection Device 80, 80A, 80B Unloading Jig 84 Unloading Rail 412 Transfer Frame 412e Frame End 441 Guide Rail 441e End W Substrate

Claims

1. a conveying module including a guide rail extending in a conveying direction, a conveying frame supporting the guide rail, and a conveying unit movable along the guide rail; a plurality of processing modules connected to the transport module, to which the transport unit transports the object, the transport frame has a frame end that is provided at a position longer than the end of the guide rail along the transport direction, a conveying rail that enters the conveying frame beyond the frame end and is close to or in contact with the end of the guide rail, and a removal tool that enables the conveying unit to be removed from the guide rail to the conveying rail; Processing system.

2. the removal jig includes a rail member having a first divided rail obtained by dividing the carrying-out rail, and a fixing plate that fixes the first divided rail, the rail member is configured such that, with the fixed plate disposed on the transport frame, the first divided rail protruding from the fixed plate is brought into proximity with or into contact with the end of the guide rail. The processing system of claim 1 .

3. The guide rail is supported by the conveying frame via a base plate, The thickness of the fixed plate is equal to the dimension from the top surface of the conveying frame to the top surface of the base plate. The processing system of claim 2 .

4. a fixing member for fixing the fixing plate and / or the first divided rail to the conveying frame and / or the base plate; The processing system of claim 3 .

5. The removal jig is The carriage includes a second divided rail obtained by dividing the carry-out rail, a platform body supporting the second divided rail, and a moving member capable of moving the platform body. The processing system according to any one of claims 2 to 4.

6. the carriage is positioned relative to the transport module, and the guide rail, the first divided rail, and the second divided rail are aligned in a straight line with the rail member connecting the transport module and the carriage. The processing system of claim 5 .

7. the moving member has a height position adjusting portion that can adjust the height position of the second divided rail; The processing system of claim 5 .

8. The removal jig integrates the rail member and the carriage. The processing system of claim 5 .

9. the guide rail has a stopper that is removably attached to the guide rail and prevents the transport unit from falling off; The processing system of claim 1 .

10. a conveying module including a guide rail extending in a conveying direction, a conveying frame supporting the guide rail, and a conveying unit movable along the guide rail; a plurality of processing modules connected to the transport module and to which the transported object is transported by the transport unit, a carry-out rail that is provided at a position longer than the end of the guide rail along the conveying direction and that enters the conveying frame beyond a frame end of the conveying frame and is close to or in contact with the end of the guide rail; a fixing plate for fixing the carrying-out rail, The fixing plate is disposed on the transport frame, so that the transport unit can be removed from the guide rail to the unloading rail. Removal jig.

11. a conveying module including a guide rail extending in a conveying direction, a conveying frame supporting the guide rail, and a conveying unit movable along the guide rail; a plurality of processing modules connected to the transport module and to which the transport unit transports the object, the method comprising: a step of entering the transport frame beyond a frame end of the transport frame that is provided at a position longer than the terminal end of the guide rail along the transport direction, and bringing a carry-out rail of the removal jig into proximity with or into contact with the terminal end of the guide rail; and removing the transport unit from the guide rail to the unloading rail. How to take out.

Images