Building and arrangement state changing method

Abstract

To provide a building in which precision equipment is arranged and which can improve the degree of freedom of the arrangement of the precision equipment, and a method for changing the arrangement state of the precision equipment.SOLUTION: A building is a building in which precision equipment that hates vibration in a microvibration region is arranged, and includes a base isolation structure that allows relative movement between a ground-side portion of the building and a building portion located above the ground-side portion, and the base isolation structure includes a plurality of spherical sliding bearings that share and support a vertical load of the building portion.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a building and a method for changing the layout of precision equipment in a building. [Background technology]

[0002] As a building where precision equipment that is sensitive to micro-vibrations is installed, a seismic isolation structure has been proposed to reduce damage caused by earthquakes and the like (see, for example, Patent Document 1). The building in Patent Document 1 is divided into a vibration-sensitive area where precision equipment that is sensitive to micro-vibrations is installed, and other areas. The vibration-sensitive area is provided with planar sliding bearings, with flat sliding surfaces arranged opposite each other, as rigid sliding bearings, and the other areas are provided with laminated rubber bearings. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-002559 Summary of the Invention [Problem to be solved by the invention]

[0004] Because planar sliding bearings do not have a return-to-origin function that returns them to the origin before horizontal vibration due to an earthquake or the like, it is necessary to install a device with elasticity to ensure the return-to-origin function. In the building of Patent Document 1, the return-to-origin function is ensured by installing laminated rubber bearings. However, because laminated rubber bearings have low vertical and horizontal rigidity and may resonate with minute vibrations, they cannot be installed in areas that are sensitive to vibrations and must be installed in other areas. As a result, in the building of Patent Document 1, precision equipment cannot be installed in areas other than those where laminated rubber bearings are installed, and the areas in which precision equipment can be installed are limited to areas that are sensitive to vibrations. This limits the flexibility in the placement of precision equipment.

[0005] The present disclosure has been made in consideration of the above-mentioned circumstances, and aims to provide a building in which precision equipment is placed, and a method for changing the placement state, which can improve the degree of freedom in the placement of precision equipment. [Means for solving the problem]

[0006] A building according to one aspect of the present disclosure is a building in which precision equipment that is sensitive to vibrations in the micro-vibration range is installed, and is equipped with a seismic isolation structure that allows relative movement between the ground side portion of the building and the building portion located above the ground side portion, and the seismic isolation structure is equipped with a plurality of spherical sliding bearings that share and support the vertical load of the building portion.

[0007] A building according to another aspect of the present disclosure is a building having an area that is sensitive to vibrations in the micro-vibration range, and is equipped with a seismic isolation structure that allows relative movement between the ground side portion of the building and the building portion located above the ground side portion, and the seismic isolation structure is equipped with a plurality of spherical sliding bearings that share and support the vertical load of the building portion.

[0008] A method for changing the layout state according to one aspect of the present disclosure is a method for changing the layout state of the precision equipment in the above-mentioned building, and includes an equipment layout state changing process for changing the layout state of the precision equipment, and a spherical sliding support layout state changing process for changing the layout state of the plurality of spherical sliding support bearings in accordance with the layout state of the precision equipment after the change in the equipment layout state changing process.

[0009] A method for changing the layout state according to another aspect of the present disclosure is a method for changing the layout state of the precision equipment in the above-mentioned building, and includes an equipment layout state changing step for changing the layout state of the precision equipment, and a conditional spherical sliding bearing layout state changing step for not changing the layout state of the plurality of spherical sliding bearings if the distribution state of the loads supported by the plurality of spherical sliding bearings in the layout state of the precision equipment after change in the equipment layout state changing step is within a preset tolerance range, and for changing the layout state of the plurality of spherical sliding bearings so that the distribution state falls within the tolerance range if the distribution state exceeds the tolerance range. [Effects of the Invention]

[0010] According to one aspect of the present disclosure, it is possible to provide a building in which precision equipment is placed, and a method for changing the placement state, which can improve the degree of freedom in the placement of precision equipment. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a vertical cross-sectional view of a building according to a first embodiment. [Figure 2] FIG. 2 is a diagram showing a spherical sliding bearing according to the first embodiment. [Figure 3] 3A to 3C are diagrams illustrating a method for changing an arrangement state according to the first embodiment. [Figure 4] 3A to 3C are diagrams illustrating a method for changing an arrangement state according to the first embodiment. [Figure 5] FIG. 10 is a vertical cross-sectional view of a building according to a third embodiment. [Figure 6] FIG. 10 is a diagram showing a U-shaped damper according to a third embodiment. [Figure 7] FIG. 10 is a vertical cross-sectional view of a building according to a fourth embodiment. [Figure 8] FIG. 10 is a view showing a laminated rubber device according to a fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0012] First Embodiment Hereinafter, a building according to a first embodiment of the present disclosure and a method for changing the arrangement state of precision equipment in a building will be described with reference to the drawings.

[0013] Fig. 1 is a cross-sectional view of a building 1 according to the first embodiment. As shown in Fig. 1, the building 1 comprises a ground side portion 2, a building portion 3, and a seismic isolation structure 4. The ground side portion 2 has a foundation 21. The building portion 3 is located above the ground side portion 2. The building portion 3 comprises a floor slab 31, a plurality of columns 32 extending vertically, and a plurality of beams 33 extending horizontally.

[0014] Precision equipment 5 that is sensitive to vibrations in the micro-vibration range is placed in the building portion 3. The precision equipment 5 is, for example, semiconductor manufacturing-related equipment. The semiconductor manufacturing-related equipment is various equipment used in semiconductor manufacturing, including semiconductor inspection equipment. The precision equipment 5 may be a microscope such as a transmission electron microscope (TEM). In this case, the microscope may be placed on a vibration isolation table to satisfy the reference curve in the VC (Vibration Criteria), which is an environmental vibration standard. The precision equipment 5 may also be an inspection device that inspects the finish accuracy of parts, intermediate products, or products that require high dimensional accuracy.

[0015] The seismic isolation structure 4 is disposed between the ground side portion 2 and the building portion 3. The seismic isolation structure 4 allows relative movement between the ground side portion 2 and the building portion 3 in the building 1.

[0016] The seismic isolation structure 4 is equipped with a plurality of spherical sliding bearings 6. The seismic isolation structure 4 is not equipped with laminated rubber bearings. The plurality of spherical sliding bearings 6 share and support the vertical load of the building portion 3. In this embodiment, the plurality of spherical sliding bearings 6 share and support the entire vertical load of the building portion 3.

[0017] As shown in FIG. 2 , the spherical sliding bearing 6 has an upper shoe 61, a lower shoe 62, and a slider 63. The upper shoe 61 is disposed in the building portion 3. The upper shoe 61 has a sliding surface that has a curvature on the surface that faces the slider 63. The lower shoe 62 is disposed in the ground side portion 2. The lower shoe 62 has a sliding surface that has a curvature on the surface that faces the slider 63. The slider 63 slides between the upper shoe 61 and the lower shoe 62. The slider 63 has a sliding surface that has a curvature on the surface that faces the upper shoe 61 and the lower shoe 62, respectively.

[0018] For example, if an earthquake occurs and the ground side portion 2 and the building portion 3 attempt to move relative to each other, the upper shoe 61 and slider 63 slide against each other, and the slider 63 and lower shoe 62 slide against each other. In this way, the spherical sliding bearing 6 allows relative movement between the ground side portion 2 and the building portion 3. Furthermore, because the upper shoe 61, the lower shoe 62, and the slider 63 each have a sliding surface with curvature, the spherical sliding bearing 6 acts to return the ground side portion 2 and the building portion 3 to the positions they were in before the relative movement. In other words, the spherical sliding bearing 6 has a return-to-origin function.

[0019] Returning to FIG. 1 , some of the plurality of spherical sliding bearings 6 are arranged between the columns 32 and the foundation 21 of the ground side portion 2. In other words, some of the plurality of spherical sliding bearings 6 are arranged directly below the columns 32. At least one spherical sliding bearing 6A of the multiple spherical sliding bearings 6 is arranged directly below the beam 33. This spherical sliding bearing 6A is arranged directly below or near the precision equipment 5. By using the spherical sliding bearing 6A to support the load of the precision equipment 5, which is a heavy object, reinforcement of the floor slab 31 and beam 33 directly below or near the precision equipment 5 is not required.

[0020] Each of the spherical sliding bearings 6 is configured to operate as a seismic isolation device when subjected to vibrations with a vibration velocity exceeding an operating speed set based on the vibration velocity of vibrations in the micro-vibration range. In other words, the spherical sliding bearings 6 are configured not to operate as a seismic isolation device when vibrations in the micro-vibration range are applied. The operating speed is, for example, 0.1 mm / s. This configuration makes it possible to adjust the start-up load of the spherical sliding bearings 6. Note that this configuration may be achieved by adjusting the friction coefficient of the spherical sliding bearings 6, or by providing a stopper (regulating device) on the spherical sliding bearings 6. In other words, the start-up load may be adjusted by a regulating device that regulates the relative movement between the upper shoe 61 and the lower shoe 62 of the spherical sliding bearing 6, maintaining a regulated state when the horizontal force of the vibration is equal to or less than a predetermined horizontal force, and switching to a deregulated state when the horizontal force exceeds the predetermined horizontal force.

[0021] Furthermore, the multiple spherical sliding bearings 6 are a mixture of multiple types of spherical sliding bearings with different friction coefficients. For example, the seismic isolation structure 4 is a mixture of spherical sliding bearings 6 with a medium friction coefficient of about 4% and spherical sliding bearings with a low friction coefficient of about 1%. This configuration makes it possible to adjust the amount of damping when the seismic isolation structure 4 operates during an earthquake.

[0022] Next, a method for changing the layout of the precision equipment 5 in the building 1 will be described with reference to Figures 3 and 4. The layout changing method includes an equipment layout changing step and a spherical sliding bearing layout changing step.

[0023] 3, in the equipment layout state changing step, the layout state of the precision equipment 5 is changed. In the illustrated example, a second precision equipment 5A is newly added as the precision equipment 5. Note that in the equipment layout state changing step, the precision equipment 5 may be replaced with the second precision equipment 5A.

[0024] As shown in FIG. 4, in the spherical sliding support arrangement state changing process, the arrangement state of the multiple spherical sliding support bearings 6 is changed depending on the arrangement state of the precision equipment 5 (5A) after the change in the equipment arrangement state changing process. Specifically, in the illustrated example, a new spherical sliding support 6B that was not installed before the equipment arrangement state changing process is placed directly below the beam 33. The new spherical sliding support 6B is placed directly below or near the precision equipment 5A that was newly installed in the equipment arrangement state changing process. Due to the new installation of the precision equipment 5A, which is a heavy object, the load distribution near the precision equipment 5A may exceed the expected load distribution. By placing the new spherical sliding support 6B, the load of the precision equipment 5A can be supported without reinforcing the floor slab 31 and beam 33 directly below or near the precision equipment 5A.

[0025] As described above, precision equipment 5 is placed in building 1 according to this embodiment. Building 1 is equipped with a seismic isolation structure 4 that allows relative movement between ground-side portion 2 and building portion 3. The seismic isolation structure 4 is equipped with a plurality of spherical sliding bearings 6 that share and support the vertical load of building portion 3.

[0026] Traditionally, some buildings have been equipped with planar sliding bearings and laminated rubber bearings as seismic isolation structures. Planar sliding bearings do not have a return-to-origin function, so the provision of laminated rubber bearings ensures this function. Laminated rubber bearings have low vertical and horizontal rigidity and may resonate with minute vibrations, so they cannot be installed in vibration-sensitive areas and must be installed in other areas. As a result, in conventional buildings, precision equipment cannot be placed in areas other than those equipped with laminated rubber bearings, and the areas in which precision equipment can be placed are limited to vibration-sensitive areas. In the building 1 according to this embodiment, the seismic isolation structure 4 is provided with a plurality of spherical sliding bearings 6 with a return-to-origin function, and the vertical load of the building portion 3 is shared and supported by the plurality of spherical sliding bearings 6. This reduces the need to place laminated rubber bearings in the building 1 to ensure the return-to-origin function, and allows for greater freedom in the placement of the precision equipment 5.

[0027] In addition, the plurality of spherical sliding bearings 6 share and support all of the vertical load of the building section 3. According to the above configuration, it is no longer necessary to provide laminated rubber bearings in the building 1 to support the vertical load of the building section 3, further improving the degree of freedom in arranging the precision equipment 5. In addition, since only the spherical sliding bearings 6 are used as the bearings to support the vertical load of the building section 3, the ease of construction of the building 1 is improved. Furthermore, because all vertical loads on the building portion 3 are shared and supported by multiple spherical sliding bearings 6, the center of gravity and the center of rigidity in the height range where the seismic isolation structure 4 is located (hereinafter referred to as the seismic isolation layer) tend to coincide. Therefore, when large vibrations occur due to an earthquake, deterioration of seismic isolation performance due to twisting of the seismic isolation layer can be suppressed. Furthermore, even if the center of gravity of the building portion 3 changes due to changes in the placement of precision equipment 5 in the building portion 3 or structural reinforcement of the building portion 3, the alignment or misalignment of the center of gravity and the center of rigidity in the seismic isolation layer is less likely to change compared to seismic isolation structures that use elastic bearings such as laminated rubber bearings. Therefore, even if the placement of precision equipment 5 is changed after the building 1 has begun operation, the seismic isolation function is less likely to be impaired, and in this respect, the building 1 offers a high degree of freedom in the placement of precision equipment 5.

[0028] Furthermore, the building 1 does not have laminated rubber bearings. According to the above configuration, since the building 1 does not have laminated rubber bearings, the degree of freedom in arranging the precision equipment 5 is further improved. In addition, the ease of construction of the building 1 is improved.

[0029] At least one of the plurality of spherical sliding bearings 6 (spherical sliding bearing 6A) is disposed directly below the beam 33. According to the above configuration, the vertical load of the building section 3 can be supported directly below the beam 33 by the spherical sliding bearing 6A. Furthermore, for example, if the spherical sliding bearing 6A is placed directly below the beam 33 and directly below or near the precision equipment 5, the spherical sliding bearing 6A can support the load of the precision equipment 5, which is a heavy object, thereby eliminating the need to reinforce the floor slab 31 and beam 33 directly below or near the precision equipment 5. This can suppress torsional deformation of the building 1. In other words, if reinforcement of the floor slab 31 and beam 33 is necessary, the reinforcement of the floor slab 31 and beam 33 may change the center of rigidity of the building 1, potentially increasing the misalignment between the center of rigidity and the center of gravity of the building 1. The misalignment between the center of rigidity and the center of gravity of the building 1 is a cause of torsional deformation of the building 1. By providing the spherical sliding bearing 6A as described above, reinforcement of the floor slab 31 and beam 33 is unnecessary, thereby suppressing torsional deformation of the building 1. Furthermore, for example, when placing a new precision device 5A in the building 1, the addition of the new precision device 5A can be accommodated by placing the spherical sliding support 6 directly below the beam 33 and directly below or in the vicinity of the new precision device 5A.

[0030] Furthermore, the plurality of spherical sliding bearings 6 are a mixture of a plurality of types of spherical sliding bearings with different friction coefficients. According to the above configuration, it is possible to adjust the amount of damping when the seismic isolation structure 4 operates to isolate the structure during an earthquake.

[0031] The precision equipment 5 is a semiconductor manufacturing related device. According to the above configuration, in the building 1 where semiconductor manufacturing related equipment that is sensitive to micro-vibrations is installed, it is possible to improve the degree of freedom in arranging the semiconductor manufacturing related equipment.

[0032] The method for changing the arrangement state according to this embodiment includes an equipment arrangement state change process for changing the arrangement state of the precision equipment 5, and a spherical sliding support arrangement state change process for changing the arrangement state of the plurality of spherical sliding support bearings 6 according to the arrangement state of the precision equipment 5 after the change in the equipment arrangement state change process. According to the above configuration, by changing the arrangement of the multiple spherical sliding bearings 6 depending on the arrangement of the precision equipment 5, it is possible to accommodate changes in the arrangement of the precision equipment 5, thereby improving the degree of freedom in the arrangement of the precision equipment 5.

[0033] The spherical sliding support arrangement state changing step also includes arranging a new spherical sliding support 6B immediately below the beam 33, which was not provided before the arrangement state was changed. According to the above configuration, even if the load distribution of the building 1 exceeds the expected load distribution due to a change in the placement of the precision equipment 5, the load of the building 1 after the change can be supported by placing a new spherical sliding bearing 6B, and the change in the placement of the precision equipment 5 can be accommodated.

[0034] Second Embodiment Next, a method for changing the layout state of precision equipment 5 in a building 1 according to a second embodiment of the present disclosure will be described. In this embodiment, the layout state changing method includes a conditional spherical sliding support layout state changing step instead of the spherical sliding support layout state changing step. That is, in this embodiment, the layout state changing method includes an equipment layout state changing step and a conditional spherical sliding support layout state changing step.

[0035] In the conditional spherical sliding bearing arrangement state change process, if the distribution state of the loads supported by the plurality of spherical sliding bearings 6 in the arrangement state of the precision equipment 5 after the change in the equipment arrangement state change process (hereinafter referred to as the changed distribution state) satisfies a predetermined condition, the arrangement state of the plurality of spherical sliding bearings 6 is changed. In other words, if the changed distribution state is within a preset tolerance range, the arrangement state of the plurality of spherical sliding bearings 6 is not changed. If the changed distribution state exceeds the above-mentioned tolerance range, the arrangement state of the plurality of spherical sliding bearings 6 is changed so that the distribution state of the loads supported by the plurality of spherical sliding bearings 6 falls within the tolerance range. The determination of whether the changed distribution state is within or exceeds a preset tolerance range may be made, for example, by determining that the changed distribution state exceeds the tolerance range if the support load of the spherical sliding bearing 6 that is the maximum load in the changed distribution state exceeds a set upper limit. In this case, changing the arrangement of the multiple spherical sliding bearings 6 includes, for example, placing a new spherical sliding bearing 6B that was not installed before the equipment arrangement state change process near the spherical sliding bearing 6 that is the maximum load. Furthermore, the changed distribution state may be determined to exceed the tolerance range if the difference between the support load of the spherical sliding bearing 6 that is the minimum load and the support load of the spherical sliding bearing 6 that is the maximum load in the changed distribution state exceeds a set upper limit.

[0036] As described above, the arrangement state changing method according to this embodiment comprises an equipment arrangement state changing process for changing the arrangement state of the precision equipment 5, and a conditional spherical sliding bearing arrangement state changing process for not changing the arrangement state of the multiple spherical sliding bearings 6 if the distribution state of the load supported by the multiple spherical sliding bearings 6 in the arrangement state of the precision equipment 5 after change in the equipment arrangement state changing process is within a preset tolerance range, and for changing the arrangement state of the multiple spherical sliding bearings 6 so that the distribution state falls within the tolerance range if the distribution state exceeds the tolerance range. According to the above configuration, if the distribution of the load supported by the multiple spherical sliding bearings 6 in the arrangement state of the precision equipment 5 after the change in the equipment arrangement state change process is within the allowable range, the arrangement state of the spherical sliding bearings 6 will not be changed, but if it exceeds the allowable range, the arrangement state of the spherical sliding bearings 6 will be changed.Therefore, in accordance with the change in the load distribution state accompanying the equipment arrangement state change process, the arrangement state of the spherical sliding bearings 6 can be changed only when necessary, and it is possible to prevent unnecessary changes to the arrangement state of the spherical sliding bearings 6 when there is no need to change it.

[0037] Third Embodiment Next, a building according to a third embodiment of the present disclosure will be described. In this embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and their description will be omitted, with only the differences being described.

[0038] Fig. 5 is a cross-sectional view of a building 1A according to the third embodiment. As shown in Fig. 5, in this embodiment, the building 1A further includes a damper 7 between the ground side portion 2 and the building portion 3, which damps vibrations of the building portion 3. The damper 7 does not support the vertical load of the building portion 3.

[0039] In this embodiment, the damper 7 is a U-shaped damper 70. As shown in Fig. 6, the U-shaped damper 70 has an upper plate 71 that is square in plan view and made of steel, a lower plate 72 that is square in plan view and made of steel, and four U-shaped damper rods 73 that are made of steel.

[0040] The upper plate 71 is fixed to the building portion 3, and the lower plate 72 is fixed to the ground portion 2. The upper plate 71 is fixed to the building portion 3, for example, by attaching stud bolts (not shown) to the upper surface of the upper plate 71 and burying the stud bolts in the building portion 3. The lower plate 72 is fixed to the ground portion 2, for example, by attaching stud bolts (not shown) to the underside of the lower plate 72 and burying the stud bolts in the ground portion 2. The U-shaped damper rods 73 connect the upper plate 71 and the lower plate 72. The U-shaped damper rods 73 are connected to the upper plate 71 and the lower plate 72, for example, via high-strength bolts. The four U-shaped damper rods 73 are arranged with a 90-degree offset from one another. For example, when horizontal forces generated by an earthquake act on the seismic isolation structure 4, the U-shaped damper rods 73 plastically deform to absorb vibration energy. This allows the U-shaped damper 70 to damp vibrations in the building portion 3. The U-shaped damper rod 73 undergoes plastic deformation such that the U-shaped curved portion is displaced in the extension direction of the U-shaped damper rod 73. At this time, by moving the point where the strain is maximum during plastic deformation within the U-shaped damper rod 73 in accordance with changes in the horizontal displacement amount, the strain of the U-shaped damper rod 73 is not concentrated locally, and the entire U-shaped damper rod 73 can be effectively used to absorb or attenuate earthquake energy.

[0041] As described above, the building 1A according to this embodiment further includes the damper 7 between the ground side portion 2 and the building portion 3, which damps vibrations of the building portion 3. According to the above configuration, vibrations of the building section 3 can be damped by the damper 7, and the response acceleration and shear force of the building 1A when an earthquake or the like occurs can be suppressed.

[0042] <Fourth embodiment> Next, a fourth embodiment of the building according to the present disclosure will be described. In this embodiment, the same components as those in the first embodiment are designated by the same reference numerals, and their description will be omitted, with only the differences being described.

[0043] Fig. 7 is a cross-sectional view of a building 1B according to the fourth embodiment. As shown in Fig. 7, in this embodiment, the building 1B further includes a laminated rubber device 80 between the ground side portion 2 and the building portion 3. The laminated rubber device 80 has a limiter function that suppresses relative movement between the ground side portion 2 and the building portion 3 so that the amount of horizontal movement between the upper shoe 61 and the lower shoe 62 of the spherical sliding bearing 6 does not become too large. The laminated rubber device 80 does not support the vertical load of the building portion 3.

[0044] As shown in Fig. 8, the laminated rubber device 80 comprises a laminated rubber device main body M having an upper flange portion 81, a lower flange portion 82, and a laminate portion 83, and a horizontal force transmission portion 84. The upper flange portion 81 is located on the upper surface of the laminated rubber device main body M. The lower flange portion 82 is located on the lower surface of the laminated rubber device main body M. The laminate portion 83 is formed by alternately stacking rubber material and steel plates between the upper flange portion 81 and the lower flange portion 82. The laminate portion 83 exerts a spring function and a damping function when the upper flange portion 81 and the lower flange portion 82 move relative to each other in the horizontal direction.

[0045] The laminated rubber device 80 is fixed to either the ground side portion 2 or the building portion 3. In the illustrated example, a lower flange portion 82 of the laminated rubber device 80 is fixed to the ground side portion 2. An upper flange portion 81 of the laminated rubber device 80 is not fixed to the building portion 3. A horizontal force transmission portion 84 is installed on the upper flange portion 81.

[0046] A stopper portion 85 is provided on the other of the ground side portion 2 and the building portion 3. In the illustrated example, the stopper portion 85 is formed so as to extend downward from the building portion 3. The stopper portion 85 is formed around the upper flange portion 81 and the horizontal force transmission portion 84 of the laminated rubber device 80.

[0047] The horizontal force transmission portion 84 transmits the horizontal force applied from the stopper portion 85 to the laminated rubber device main body M. Specifically, the horizontal force transmission portion 84 comes into contact with the stopper portion 85 when a large relative movement equal to or greater than a predetermined horizontal movement occurs, for example, due to an earthquake. The stopper portion 85 presses the horizontal force transmission portion 84, causing the laminated portion 83 of the laminated rubber device main body M to deform. At this time, the spring function and damping function of the laminated portion 83 are exerted. In this way, the laminated rubber device 80 suppresses relative movement between the ground side portion 2 and the building portion 3.

[0048] The present disclosure is not limited to the above-described embodiment described with reference to the drawings, and various modifications are possible within the technical scope thereof.

[0049] For example, in the above embodiment, the spherical sliding bearing 6 is of a so-called double pendulum type, which has sliding surfaces above and below the slider 63. However, the spherical sliding bearing 6 is not limited to this, and may be of a so-called single pendulum type, for example.

[0050] In the above embodiment, the seismic isolation structure 4 may be provided with a seismic isolation device other than the spherical sliding bearing 6, and the vertical load of the building section 3 may be shared and supported by the spherical sliding bearing 6 and this seismic isolation device. In this case, the seismic isolation device does not include laminated rubber bearings. The seismic isolation device may be, for example, a bearing-type rolling bearing. For example, the seismic isolation device may be configured to perform seismic isolation operation when subjected to vibrations having a vibration speed slower than an operating speed (e.g., 0.1 mm / s) set based on the vibration speed of vibrations in the micro-vibration range.

[0051] Furthermore, in addition to multiple types of spherical sliding bearings 6 with different friction coefficients, the seismic isolation structure 4 may further include bearings with friction coefficients different from those of the multiple types of spherical sliding bearings 6. In this case, the amount of damping can be more appropriately adjusted when the seismic isolation structure 4 operates during an earthquake. For example, the seismic isolation structure 4 may further include bearing-type rolling bearings with a low friction coefficient of less than 1%. In this case, for example, the seismic isolation structure 4 may include a mixture of spherical sliding bearings 6 with a medium friction coefficient of about 4%, spherical sliding bearings 6 with a low friction coefficient of about 1%, and spherical bearing-type rolling bearings with a low friction coefficient of less than 1%.

[0052] Furthermore, at least one of the plurality of spherical sliding bearings 6 may be disposed in the center of the floor slab 31. In this case, the floor slab 31 may be reinforced with a small beam.

[0053] Furthermore, in the third embodiment, the U-shaped damper 70 is exemplified as the damper 7. However, the present disclosure is not limited to this. The damper 7 may be an oil damper or a laminated rubber device.

[0054] Furthermore, in the above embodiment, the buildings 1 and 1A in which precision equipment 5 that is sensitive to vibrations in the micro-vibration range is installed have been described, but the present disclosure is not limited to this. The present disclosure also includes buildings in which no precision equipment is installed but which have areas that are sensitive to vibrations in the micro-vibration range (for example, rooms that are sensitive to vibrations in the micro-vibration range).

[0055] In addition, within the scope of the present disclosure, the components in the above-described embodiments may be replaced with well-known components as appropriate, and the above-described modified examples may be combined as appropriate.

[0056] (Addendum) The building and the method for changing the layout state according to the embodiment can be understood, for example, as follows. <1> A building according to one aspect of the present disclosure is a building in which precision equipment that is sensitive to vibrations in the micro-vibration range is installed, and is equipped with a seismic isolation structure that allows relative movement between the ground side portion of the building and the building portion located above the ground side portion, and the seismic isolation structure is equipped with a plurality of spherical sliding bearings that share and support the vertical load of the building portion. According to the above configuration, the seismic isolation structure is equipped with multiple spherical sliding bearings with a return-to-origin function, which share and support the vertical load of the building. This reduces the need to install laminated rubber bearings in the building to ensure the return-to-origin function, and improves the flexibility of the placement of precision equipment.

[0057] <2> the above <1> In the building according to the above, the plurality of spherical sliding bearings may share and support all of the vertical loads of the building portion. With the above configuration, it is no longer necessary to provide laminated rubber bearings to support the vertical load of the building, which further improves the flexibility of precision equipment placement. In addition, since only spherical sliding bearings are used as the bearings to support the vertical load of the building, the ease of construction of the building is improved. Furthermore, because all vertical loads on the building are shared and supported by multiple spherical sliding bearings, the center of gravity and center of rigidity in the seismic isolation layer (the height range where the seismic isolation structure is installed) tend to coincide. Therefore, when large vibrations occur due to an earthquake, deterioration of seismic isolation performance due to twisting of the seismic isolation layer can be suppressed. Furthermore, even if the center of gravity of the building changes due to changes in the placement of precision equipment in the building or structural reinforcement of the building, the alignment or misalignment of the center of gravity and center of rigidity in the seismic isolation layer is less likely to change compared to seismic isolation structures that use elastic bearings such as laminated rubber bearings. Therefore, even if the placement of precision equipment is changed after the building has begun operation, the seismic isolation function is less likely to be impaired, and in this respect, too, the building offers a high degree of freedom in the placement of precision equipment.

[0058] <3> the above <1> The building in question does not have to be equipped with laminated rubber bearings. According to the above-mentioned configuration, since laminated rubber bearings are not provided in the building, the degree of freedom in arranging precision equipment is further improved, and the ease of construction of the building is also improved.

[0059] <4> the above <1> from <3> In the building according to any one of the above, the building portion may include a beam extending in a horizontal direction, and at least one of the plurality of spherical sliding bearings may be disposed directly below the beam. According to the above configuration, the vertical load of the building portion directly below the beam can be supported by the at least one spherical sliding bearing.

[0060] <5> the above <1> from <4> In the building according to any one of the above, the plurality of spherical sliding bearings may be a mixture of a plurality of types of spherical sliding bearings having different friction coefficients. According to the above configuration, the amount of damping can be adjusted when the seismic isolation structure operates in seismic isolation mode during an earthquake.

[0061] <6> the above <5> In the building according to the above, the seismic isolation structure may further include a bearing having a different friction coefficient from the plurality of types of spherical sliding bearings. According to the above configuration, the amount of damping can be more appropriately adjusted when the seismic isolation structure operates in seismic isolation mode during an earthquake.

[0062] <7> the above <1> from <6> In the building according to any one of the above, a damper may be provided between the ground side portion and the building portion to attenuate vibrations of the building portion. According to the above configuration, vibrations of the building parts can be attenuated by the damper, and the response acceleration and shear force of the building when an earthquake or the like occurs can be suppressed.

[0063] <8> the above <1> from <7> In the building according to any one of the above, the precision equipment may be a semiconductor manufacturing related device. According to the above configuration, in a building where semiconductor manufacturing related equipment that is sensitive to micro-vibrations is installed, it is possible to improve the degree of freedom in arranging the semiconductor manufacturing related equipment.

[0064] <9> A building according to another aspect of the present disclosure is a building having an area that is sensitive to vibrations in the micro-vibration range, and is equipped with a seismic isolation structure that allows relative movement between the ground side portion of the building and the building portion located above the ground side portion, and the seismic isolation structure is equipped with a plurality of spherical sliding bearings that share and support the vertical load of the building portion. According to the above configuration, the seismic isolation structure is equipped with multiple spherical sliding bearings with a return-to-origin function, which share and support the vertical load of the building. This reduces the need to place laminated rubber bearings in the building to ensure the return-to-origin function, and improves the degree of freedom in the placement of areas that should not be affected by vibrations in the micro-vibration range (for example, rooms that should not be affected by vibrations in the micro-vibration range).

[0065] <10> The method for changing the arrangement state according to one aspect of the present disclosure includes the steps of: <1> from <8> The method for changing the layout state of the precision equipment in a building according to any one of the above items comprises an equipment layout state changing step for changing the layout state of the precision equipment, and a spherical sliding support layout state changing step for changing the layout state of the plurality of spherical sliding support bearings in accordance with the layout state of the precision equipment after the change in the equipment layout state changing step. According to the above configuration, by changing the arrangement of the multiple spherical sliding bearings depending on the arrangement of the precision equipment, it is possible to accommodate changes in the arrangement of the precision equipment, thereby improving the freedom of arrangement of the precision equipment.

[0066] <11> the above <10> In the method for changing the arrangement state according to the present invention, the building portion may have a beam extending horizontally, and the spherical sliding support arrangement state changing step may include placing a new spherical sliding support directly below the beam, the new spherical sliding support being one that was not provided before the arrangement state was changed. According to the above configuration, even if the load distribution of a building exceeds the expected load distribution due to a change in the placement of precision equipment, the load of the building after the change can be supported by placing a new spherical sliding bearing, and it is possible to respond to changes in the placement of precision equipment.

[0067] <12> A method for changing an arrangement state according to another aspect of the present disclosure includes the steps of: <1> from <8> a method for changing the layout state of the precision equipment in a building according to any one of the above, comprising: an equipment layout state changing step for changing the layout state of the precision equipment; and a conditional spherical sliding bearing layout state changing step for not changing the layout state of the plurality of spherical sliding bearings if the distribution state of the loads supported by the plurality of spherical sliding bearings in the layout state of the precision equipment after being changed in the equipment layout state changing step is within a preset tolerance range, and for changing the layout state of the plurality of spherical sliding bearings so that the distribution state falls within the tolerance range if the distribution state exceeds the tolerance range. According to the above configuration, if the distribution of the loads supported by the multiple spherical sliding bearings in the precision equipment arrangement state after the change in the equipment arrangement state change process is within the allowable range, the arrangement state of the spherical sliding bearings will not be changed, but if it exceeds the allowable range, the arrangement state of the spherical sliding bearings will be changed.Therefore, in accordance with the change in the load distribution state accompanying the equipment arrangement state change process, the arrangement state of the spherical sliding bearings can be changed only when necessary, and it is possible to prevent unnecessary changes to the arrangement state of the spherical sliding bearings when there is no need to change it. [Explanation of symbols]

[0068] 1, 1A Buildings 2 Ground side part 3 Building section 4. Seismic isolation structure 5, 5A precision equipment 6, 6A, 6B Spherical sliding bearing 7 Damper 32 pillars 33 Beam

Claims

1. A building in which precision equipment that is sensitive to vibrations in the micro-vibration range is installed, The building is provided with a seismic isolation structure that allows relative movement between a ground side portion of the building and a building portion located above the ground side portion, A building, wherein the seismic isolation structure is provided with a plurality of spherical sliding bearings that share and support the vertical load of the building portion.

2. The building according to claim 1 , wherein the plurality of spherical sliding bearings share and support all vertical loads of the building portion.

3. 2. The building according to claim 1, which does not include laminated rubber bearings.

4. The building portion includes a beam extending in a horizontal direction, The building according to claim 1 , wherein at least one of the plurality of spherical sliding bearings is disposed directly below the beam.

5. 2. The building according to claim 1, wherein the plurality of spherical sliding bearings are a mixture of a plurality of types of spherical sliding bearings with different friction coefficients.

6. The building according to claim 5, wherein the seismic isolation structure further comprises a bearing having a different friction coefficient from the plurality of types of spherical sliding bearings.

7. The building according to claim 1 , further comprising a damper between the ground side portion and the building portion for damping vibrations of the building portion.

8. 2. The building according to claim 1, wherein the precision equipment is a semiconductor manufacturing related device.

9. A building having an area that is sensitive to vibrations in the micro-vibration area, The building is provided with a seismic isolation structure that allows relative movement between a ground side portion of the building and a building portion located above the ground side portion, A building, wherein the seismic isolation structure is provided with a plurality of spherical sliding bearings that share and support the vertical load of the building portion.

10. A method for changing the layout state of the precision equipment in a building according to any one of claims 1 to 8, comprising: a device layout change step of changing the layout of the precision device; a spherical sliding support arrangement state changing step of changing the arrangement state of the plurality of spherical sliding support bearings in accordance with the arrangement state of the precision equipment after the change in the equipment arrangement state changing step; A method for changing a placement state.

11. The building portion includes a beam extending in a horizontal direction, The method for changing the arrangement state according to claim 10, wherein the spherical sliding support arrangement change step includes placing a new spherical sliding support directly below the beam that was not provided before the arrangement state was changed.

12. A method for changing the layout state of the precision equipment in a building according to any one of claims 1 to 8, comprising: a device layout change step of changing the layout of the precision device; a conditional spherical sliding bearing arrangement state changing process for not changing the arrangement state of the plurality of spherical sliding bearings if the distribution state of the loads supported by the plurality of spherical sliding bearings in the arrangement state of the precision equipment after the change in the equipment arrangement state changing process is within a preset tolerance range, and for changing the arrangement state of the plurality of spherical sliding bearings so that the distribution state falls within the tolerance range if the distribution state exceeds the tolerance range; A method for changing a placement state.

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