Apparatus for transferring substrate in vacuum chamber for transferring substrate in vacuum chamber

Abstract

To provide a substrate transfer device for transferring a substrate in a vacuum chamber.SOLUTION: The substrate transfer device may include a lift robot, a travel robot, and a substrate transfer robot. (i) a first side b1 vertical through-hole and a second side b2 vertical through-hole are formed in the travel robot, the travel robot is separated from the first side b2 vertical through-hole by a partition wall, the travel robot has an inner groove formed inside the first side b2 vertical through-hole, and a lower open space is formed in the travel robot to connect the first side b2 vertical through-hole and the inner groove to each other, the robot may further include: a traveling arm having an internal wiring hole formed therein to connect the first side b1 vertical through-hole and the internal groove; a second driving motor installed in the internal groove of the traveling arm; and a second decelerator installed in the first side b2 vertical through-hole.SELECTED DRAWING: Figure 2b

Description

[Technical Field]

[0001] The present invention relates to a substrate transport device, and more particularly to a substrate transport device that is capable of transporting a heavy-load substrate over a long distance within a vacuum chamber. [Background technology]

[0002] Generally, substrates such as wafers for semiconductor devices, glass substrates for display devices, or glass substrates for thin-film solar cells are manufactured by performing various processes on the substrate. At this time, the substrate is loaded into a substrate processing apparatus that provides optimal conditions required for each process and processed. In addition, masks are used as substrates to form various patterns.

[0003] In recent years, in order to improve productivity, a cluster-type substrate processing apparatus capable of processing substrates collectively has been developed and is now in use.

[0004] The cluster-type substrate processing apparatus includes a load lock chamber into which substrates are loaded and unloaded, a transfer chamber for transferring the substrates, and a plurality of process chambers for performing respective processes.

[0005] The transfer robot for transporting the substrate is installed in a transfer chamber under vacuum and can perform tasks such as transporting the substrate from the load lock chamber to the transfer chamber, transporting the substrate from the transfer chamber to the load lock chamber, transporting the substrate between transfer chambers, or transporting the substrate to and from the process chamber.

[0006] Recently, in order to improve substrate processing capacity in response to the increasing size of substrates, research is being conducted on structures that allow two substrates to be processed in one process chamber, and on changing the octagonal structure in which four process chambers are installed at equal intervals in the transfer chamber to a quadrangular structure in which process chambers are installed on both sides of the substrate transfer path in the transfer chamber.

[0007] In particular, when two substrates are placed in one process chamber, there is a need to accommodate positional offsets for each substrate, and in a square structure, positional movement of the transfer robot may be necessary to accommodate the installation positions of each process chamber.

[0008] For this reason, recently, a traveling robot is installed inside a vacuum chamber, and with a transport robot attached to the traveling robot, the traveling robot is driven to move the transport robot to a set position inside the vacuum chamber, and then the transport robot is driven to transport the substrate.

[0009] However, the traveling robot in such a conventional substrate transfer device has a complex structure in order to move the transfer robot for substrate transfer within the vacuum chamber, and since the equipment for traveling must be installed in the internal space, it has a large volume in the height direction.

[0010] Therefore, the conventional substrate transfer device has a drawback in that it requires a lot of cost to manufacture the traveling robot.

[0011] In addition, the installation of the traveling robot increases the height from the bottom of the transfer chamber to the top of the substrate transfer device, which in turn increases the volume of the transfer chamber itself in which the substrate transfer device is installed, thereby increasing the manufacturing costs of the substrate manufacturing equipment.

[0012] This increases the volume of the transfer chamber itself, which increases the operating costs for maintaining the vacuum in the transfer chamber.

[0013] Therefore, the present applicant proposes a solution to enable the traveling robot in the substrate transport device to be formed with a simple structure. Summary of the Invention [Problem to be solved by the invention]

[0014] An object of the present invention is to solve all of the above-mentioned problems.

[0015] Another object of the present invention is to provide a more compact substrate transport apparatus in order to improve the efficiency of installation area and installation height.

[0016] It is yet another object of the present invention to provide a substrate transfer device that has a simple structure, minimizes vibrations and / or disturbances, and minimizes changes in posture due to thermal expansion.

[0017] It is yet another object of the present invention to provide a substrate transfer apparatus having a vacuum sealed structure that fundamentally prevents particle generation within a vacuum chamber.

[0018] It is yet another object of the present invention to provide a substrate transport device that can reduce manufacturing and operating costs of a substrate manufacturing facility. [Means for solving the problem]

[0019] According to one embodiment of the present invention, a substrate transport device for transporting a substrate within a vacuum chamber includes: an a-th hollow lift shaft; and an elevating robot that is coupled to a vacuum chamber through-hole formed in a lower region of the vacuum chamber so as to be sealed; a b-th first end region has a b-th vertical through-hole that penetrates an upper surface and a lower surface (the lower surface faces the ground), and a b-th other end region has a b-th vertical through-hole that penetrates the upper surface and the lower surface, and a b-th vertical through-hole that is separated from the b-th vertical through-hole by a partition wall and penetrates the b-th a travel arm having an internal groove formed inside the vertical through-hole and a lower open space formed with a predetermined depth from the lower surface toward the upper surface, connecting the b2 vertical through-hole and the internal groove, and having an internal wiring hole formed therein connecting the b1 vertical through-hole and the internal groove; a b drive motor installed in the internal groove of the travel arm; and a b reducer installed in the b2 vertical through-hole of the travel arm, rotating in conjunction with the b drive motor, and having a b hollow-formed rotary drive shaft exposed from the upper surface; a traveling robot in which the lifting shaft is sealedly coupled to a first specific lower surface area of ​​the lower surface corresponding to the b1 vertical through-hole in an end region so that the a hollow of the lifting shaft corresponds to the b1 vertical through-hole, a b1 cover is sealedly coupled to a first specific upper surface area of ​​the upper surface corresponding to the b1 vertical through-hole in the b-first tip region, and a b2 cover is sealedly coupled to a second specific lower surface area of ​​the lower surface corresponding to the lower open space in the b-other tip region; and The c1 upper space is divided into a c1 upper space and a c1 lower space by a c1 stop member formed in a c1 central region, which is a specific region on a central line corresponding to the linear movement direction of the substrate for feeding, and having a c1 vertical through-hole formed therein corresponding to the b hollow of the rotation drive shaft of the b reducer of the traveling robot, and the c1 upper space is divided into a c2 upper space and a c2 lower space by a c1 coupling hole sealed by a c1 cover and a c2 stop member formed in a c1 tip region of one side region based on the central line and having a c2 vertical through-hole formed therein,the c2 lower space is a c2 coupling hole sealed by a c2 cover; the c2 other end region is formed in a c3 other end region corresponding to the c1 end region in an other side region based on the center line, and is divided into a c3 upper space and a c3 lower space by a c3 stop member having a c3 vertical through hole; the c3 lower space is a c3 coupling hole sealed by a c3 cover; a 1_1 blade and a 1_2 blade formed respectively in front and rear of the c2 coupling hole; and a 2_1 blade formed respectively in the front and rear of the c3 coupling hole. and a 2_2 blade, and the rotation drive shaft of the b reducer of the traveling robot retracted into the c1 lower space is fixedly coupled to the c1 stop member. A c1 drive motor and a c1 reducer that is interlocked with the c1 drive motor and reduces the rotation speed to 1 / 2 are installed in the sealed internal space, and a c1_1 drive shaft with a c1_1 hollow formed and interlocked with the c1 reducer and a c1_1 output shaft that is interlocked with the c1_1 drive shaft are installed so as to be sealed in the c1_1 tip area, and the c1 a c1_2 driving shaft having a c1_2 hollow formed therein and interlocked with a driving motor, and a c1_2 output shaft interlocked with the c1_2 driving shaft, which are installed to be sealed in a c1_1 other end region; a 1_1 conveying link arm in which the c1_1 output shaft is fixedly connected to a 2_1 connecting member which is drawn into the c2 upper space of the conveying arm platform and fixedly connected to the c2 stop member; and a 1_2 conveying link arm in which a c1_2 one end region is fixedly connected to the c1_2 output shaft of the 1_1 conveying link arm through a first fixed connecting shaft; a first common link arm having a c1 central region rotatably connected to the first fixed connection shaft, the first common link arm being parallel to the first conveying link arm and having a c1_4 first end region rotatably connected to the first blade of the conveying arm platform; a first auxiliary link arm having a c1_4 other end region rotatably connected to the c1_3 first end region of the first common link arm, the first auxiliary link arm being parallel to the first conveying link arm and having a c1_5 first end region rotatably connected to the first blade of the conveying arm platform;a 1_2 auxiliary link arm having a c1_5 other end region rotatably connected to the c1_3 other end region of the first common link arm; a 1_3 auxiliary link arm parallel to the 1_2 conveying link arm and having a c1_6 one end region rotatably connected to the c1_3 other end region of the first common link arm; a 1_3 auxiliary link arm parallel to the first common link arm and having a c1_7 one end region rotatably connected to the c1_6 other end region of the 1_3 auxiliary link arm and having a c1_7 other end region rotatably connected to the c1_2 other end region of the 1_2 conveying link arm; a first transfer arm unit including a first end effector fixed to the c1_7 other end region of the 1_4 auxiliary link arm so as to be rotatable about the c1_7 other end region of the 1_4 auxiliary link arm and supporting the substrate; and a c2 drive motor and a c2 reducer interlocked with the c2 drive motor to reduce the rotation speed to 1 / 2 are installed in the sealed internal space, and a c2_1 drive shaft interlocked with the c2 reducer and having a c2_1 hollow formed therein and a c2_1 output shaft interlocked with the c2_1 drive shaft are installed to be sealed in the c2_1 other end region. a c2_2 driving shaft having a c2_2 hollow formed therein and interlocked with the c2 driving motor, and a c2_2 output shaft interlocked with the c2_2 driving shaft, are installed to be sealed in the other end region of the c2_1; a 2_1 conveying link arm in which the c2_1 output shaft is fixedly connected to a 2_2 connecting member which is drawn into the c3 upper space of the conveying arm platform and fixedly connected to the c3 stop member; and a 2_2 conveying link arm in which a c2_2 one end region is fixedly connected to the c2_2 output shaft of the 2_1 conveying link arm through a second fixed connecting shaft. a second common link arm having a c2 central region rotatably coupled to the second fixed coupling shaft, a second auxiliary link arm parallel to the 2_1 transport link arm and having a c2_4 first end region rotatably coupled to the 2_1 blade of the transport arm platform, and a c2_4 second end region rotatably coupled to the c2_3 first end region of the second common link arm, a second auxiliary link arm parallel to the 2_1 transport link arm and having a c2_5 first end region rotatably coupled to the 2_2 blade of the transport arm platform;A substrate transport device is provided, comprising: a substrate transport robot including: a 2_2 auxiliary link arm having a c2_5 other end region rotatably connected to the c2_3 other end region of the second common link arm; a 2_3 auxiliary link arm parallel to the 2_2 transport link arm and having a c2_6 one end region rotatably connected to the c2_3 other end region of the second common link arm; a 2_4 auxiliary link arm parallel to the second common link arm and having a c2_7 one end region rotatably connected to the c2_6 other end region of the 2_3 auxiliary link arm and a c2_7 other end region rotatably connected to the c2_2 other end region of the 2_2 transport link arm; and a second transport arm unit including a second end effector fixed to the c2_7 other end region of the 2_4 auxiliary link arm to support the substrate.

[0020] In one example, when a certain direction on a plane viewed from above the vacuum chamber is defined as a first direction and a direction perpendicular to the first direction is defined as a second direction, the central axis of the lifting shaft of the lifting robot is located at a predetermined distance from a first direction center line, which is the center line in the first direction, and is located on a second direction center line, which is the center line in the second direction, or on a second direction parallel line parallel to the second direction center line, and the traveling robot's traveling trajectory is an arc between a first contact point and a second contact point that meet the first direction center line on the rotation radius of the rotation drive shaft that moves by rotation of the first other tip region of the traveling arm around the lifting shaft.

[0021] In one example, when the traveling robot causes the transport robot coupled to the rotary drive shaft to travel between the first contact point and the second contact point, the front of the transport robot faces either one of the two ends in the first direction.

[0022] In one example, when the traveling robot moves the transport robot between the first contact point and the second contact point, the rotation direction of the b drive motor is set to be the same as or opposite to the rotation direction of the lifting shaft of the lifting robot.

[0023] In one example, when the traveling robot causes the transport robot to travel between the first contact point and the second contact point, the operation of the b drive motor at the first contact point or the second contact point causes the front of the transport robot to move toward one of the two ends in the first direction, and the operation of the b drive motor is interrupted while the transport robot is traveling between the first contact point and the second contact point.

[0024] In one example, the vacuum chamber has a rectangular shape in which the length in the first direction is greater than the length in the second direction.

[0025] In one example, the internal wiring hole of the traveling arm of the traveling robot is formed by creating a horizontal through-hole that penetrates from a side surface of the first b tip region of the traveling arm to the internal groove, and a third b cover that seals the horizontal through-hole is attached to a side surface of the first b tip region corresponding to the horizontal through-hole.

[0026] In one example, in the transport robot, the height of the second fixed coupling shaft is higher than the height of the first fixed coupling shaft, so that the first end effector and the second end effector are positioned at different heights on the same path.

[0027] In one example, in the transport robot, the transport arm platform further includes a c1 wiring hole connecting the c1 upper space and the c2 lower space, and a c2 wiring hole connecting the c1 upper space and the c3 lower space.

[0028] In one example, in the transfer robot, the transfer arm platform includes an upper plate including the 1_1 blade, the 1_2 blade, the 2_1 blade, and the 2_2 blade, and a lower plate coupled to the upper plate, a c1 upper coupling hole that is a part of the c1 coupling hole is formed in the c central region of the upper plate, a c2 upper coupling hole that is a part of the c2 coupling hole is formed in the c-first tip region of the upper plate, the c2 stop member having the c2 vertical through hole formed therein is formed inside the c2 upper coupling hole to separate an internal space of the c2 upper coupling hole, and a c3 coupling hole is formed in the c-second tip region of the upper plate. A c3 upper connecting hole, which is a part of the connecting hole, is formed, and the c3 stop member with the c3 vertical through hole formed therein is formed inside the c3 upper connecting hole to separate the internal space of the c3 upper connecting hole. A c1 lower connecting hole, which is another part of the c1 connecting hole, is formed in the c central region of the lower plate. A c1 stop member with the c1 vertical through hole formed therein is formed inside the c1 lower connecting hole to separate the internal space of the c1 lower connecting hole. A c2 lower connecting hole, which is another part of the c2 connecting hole, is formed in the c first end region of the lower plate. A c3 lower connecting hole, which is another part of the c3 connecting hole, is formed in the c other end region of the lower plate.

[0029] In one example, a c1 upper wiring groove connecting the internal space of the c1 upper coupling hole and the lower space of the c2 upper coupling hole, and a c2 upper wiring groove connecting the internal space of the c1 upper coupling hole and the lower space of the c3 upper coupling hole are formed on the lower surface of the upper plate, and a c1 lower wiring groove connecting the upper space of the c1 lower coupling hole and the internal space of the c2 lower coupling hole, and a c2 lower wiring groove connecting the upper space of the c1 lower coupling hole and the internal space of the c3 lower coupling hole are formed on the upper surface of the lower plate. [Effects of the Invention]

[0030] The present invention can provide a compact substrate transport device by forming the traveling robot into a single body and integrating the drive system for substrate transport within the link arm of the transport robot.

[0031] The present invention provides a substrate transport device that minimizes vibration and / or disturbance by forming the link arm of the transport robot into a double parallel link, and minimizes posture changes due to thermal expansion.

[0032] The present invention provides a substrate transfer apparatus that completely blocks particle generation by providing a structure in which the traveling robot and the transfer robot located in the transfer chamber are completely sealed from the transfer chamber.

[0033] The present invention provides a substrate transfer apparatus that can minimize the volume of a transfer chamber due to its compact configuration, thereby reducing the manufacturing and operating costs of a substrate manufacturing facility.

[0034] The following drawings, attached for use in explaining embodiments of the present invention, are merely a part of the embodiments of the present invention, and a person having ordinary knowledge in the technical field to which the present invention pertains (hereinafter referred to as "ordinary engineer") can derive each of the other drawings based on these drawings without performing any inventive work. [Brief explanation of the drawings]

[0035] [Figure 1a] 10 illustrates another example of a cluster-type substrate processing apparatus equipped with a substrate transfer apparatus according to an embodiment of the present invention. [Figure 1b] 10 illustrates another example of a cluster-type substrate processing apparatus equipped with a substrate transfer apparatus according to an embodiment of the present invention. [Figure 1c] 10 illustrates another example of a cluster-type substrate processing apparatus equipped with a substrate transfer apparatus according to an embodiment of the present invention. [Figure 2a] 1 is a simplified illustration of a substrate transport apparatus according to one embodiment of the present invention. [Figure 2b] 1 is a simplified illustration of a substrate transport apparatus according to one embodiment of the present invention. [Figure 3a] 1 is a simplified diagram illustrating a lifting robot in a substrate transport apparatus according to an embodiment of the present invention. [Figure 3b] 1 is a simplified diagram illustrating a lifting robot in a substrate transport apparatus according to an embodiment of the present invention. [Figure 3c] 1 is a simplified diagram illustrating a lifting robot in a substrate transport apparatus according to an embodiment of the present invention. [Figure 4a] 1 is a simplified diagram of a traveling robot in a substrate transport apparatus according to an embodiment of the present invention. [Figure 4b] 1 is a simplified diagram of a traveling robot in a substrate transport apparatus according to an embodiment of the present invention. [Figure 4c] 1 is a simplified diagram of a traveling robot in a substrate transport apparatus according to an embodiment of the present invention. [Figure 4d] 1 is a simplified diagram of a traveling robot in a substrate transport apparatus according to an embodiment of the present invention. [Figure 5a] 1 is a simplified diagram illustrating a transfer robot in a substrate transfer apparatus according to an embodiment of the present invention. [Figure 5b] 1 is a simplified diagram illustrating a transfer robot in a substrate transfer apparatus according to an embodiment of the present invention. [Figure 6a] 1 is a simplified diagram illustrating a transfer arm platform of a transfer robot in a substrate transfer apparatus according to an embodiment of the present invention. [Figure 6b] 1 is a simplified diagram illustrating a transfer arm platform of a transfer robot in a substrate transfer apparatus according to an embodiment of the present invention. [Figure 6c] 1 is a simplified diagram illustrating a transfer arm platform of a transfer robot in a substrate transfer apparatus according to an embodiment of the present invention. [Figure 7] 1 is a simplified diagram illustrating a first transport link arm of a transport robot in a substrate transport apparatus according to an embodiment of the present invention; [Figure 8]1 is a simplified diagram showing a connection portion between a first transport link arm and a first transport link arm of a transport robot in a substrate transport apparatus according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0036] The following detailed description of the present invention will refer to the accompanying drawings which show, by way of example, specific embodiments in which the present invention may be practiced, in order to clarify the objects, technical solutions, and advantages of the present invention. These embodiments will be described in sufficient detail to enable those of ordinary skill in the art to practice the present invention.

[0037] The following detailed description of the present invention refers to the accompanying drawings, which show, by way of illustration, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable one of ordinary skill in the art to practice the invention. It should be understood that various embodiments of the present invention, although different from one another, are not necessarily mutually exclusive. For example, specific shapes, structures, and characteristics described herein may be embodied in other embodiments without departing from the spirit and scope of the invention. It should also be understood that the location or arrangement of individual components within each disclosed embodiment may be modified without departing from the spirit and scope of the invention. Therefore, the following detailed description is not intended to be taken in a limiting sense, and the scope of the present invention is limited only by the appended claims, along with the full scope of equivalents to which such claims, when properly interpreted, are entitled. Like reference numerals in the drawings refer to the same or similar functionality throughout the various aspects.

[0038] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily practice the present invention.

[0039] 1a to 1c are simplified diagrams showing a cluster-type substrate processing apparatus equipped with a substrate transfer apparatus according to an embodiment of the present invention.

[0040] 1a to 1c show a substrate processing apparatus in which one process chamber PC1, PC2 is installed on each side of a vacuum chamber VC, which is a rectangular transfer chamber, and each process chamber can accommodate two substrates. A substrate transfer apparatus TA including a lifting robot 1000, a traveling robot 2000 connected to the top of the lifting robot 1000, and a transfer robot 3000 connected to the top of the traveling robot 2000 is fixedly installed at a specific position P1 within the vacuum chamber VC, and the traveling robot 2000 moves the transfer robot 3000, which transfers substrates, to correspond to the positions of each process chamber and the positions of two substrates in each process chamber.

[0041] For example, if a certain direction on a plane viewed from the vacuum chamber VC is defined as a first direction and a direction perpendicular to the first direction is defined as a second direction, the central axis of the lift robot 1000, i.e., the central axis of the lift robot 1000's lift shaft, may be installed to be located at a position P1 spaced a predetermined distance from a first-direction center line L1, which is the center line in the first direction, and to be located on a second-direction center line L2, which is the center line in the second direction. That is, the central axis of the lift robot 1000 may be installed to be located on the second-direction center line L2 and at a specific position P1 spaced a predetermined distance from the first-direction center line L1. However, the present invention is not limited thereto, and the central axis of the lift shaft may also be located on a line parallel to the first direction that is parallel to the second-direction center line L2. For reference, FIGS. 1A to 1C show a rectangular vacuum chamber whose length in the first direction is greater than its length in the second direction.

[0042] The traveling robot 2000 can use the arc between the first contact point P2 and the second contact point P3, which meet the first direction center line L1 on the rotation radius of the rotation drive axis that moves by rotating the b-th other end region of the traveling arm around the lifting shaft to which the b-th first end region of the traveling arm is connected, i.e., the position where the transport robot is connected to the traveling robot, as the traveling trajectory DT.

[0043] The process of transferring a substrate within the transfer chamber VC using the substrate transfer device TA will be briefly described below.

[0044] The traveling robot 2000 of the substrate transport device TA travels the transport robot 3000 to position the transport robot 3000 at the first contact point P2, and then rotates the transport robot 3000 so that the front of the transport robot 3000, i.e., the linear direction in which the substrate is transported by the transport robot 3000 and the direction in which the substrate moves away, faces the first load lock chamber LC1, allowing the transport robot 3000 to transport the substrate from the first load lock chamber LC1 into the transport chamber VC. After the substrate is transported, the traveling robot 2000 rotates the transport robot 3000 at the first contact point P2 so that the front of the transport robot 3000 faces the left process stage of the first process chamber PC1 or the left process stage of the second process chamber PC2, which are located in the second direction, allowing the transport robot 3000 to transport the substrate to the left process stage of the first process chamber PC1 or the left process stage of the second process chamber PC2.

[0045] In addition, the process in which the traveling robot 2000 moves the transport robot 3000 to the second contact point P3 and then rotates the transport robot 3000 to transport the substrate to the right processing stage of the first processing chamber PC1, the right processing stage of the second processing chamber PC2, and the second load lock chamber LC2 can also be easily understood through the above process, so detailed explanation of this will be omitted.

[0046] On the other hand, when the traveling robot 2000 moves the transport robot 3000 between the first contact point P2 and the second contact point P3, the front of the transport robot 3000 faces either of the two ends in the first direction, thereby preventing a collision between the substrate and the transport chamber VC.

[0047] At this time, the movement of the transfer robot 3000 by the traveling robot 2000 and the rotation of the transfer robot 3000 can be combined in various ways to minimize the substrate transfer time.

[0048] In other words, the traveling robot 2000 can be configured so that the front of the transport robot 3000 faces either one of the two ends in the first direction at the first contact point P2 or the second contact point P3, and the transport robot 3000 can be prevented from rotating while traveling between the first contact point P2 and the second contact point P3.

[0049] Alternatively, when the traveling robot 2000 moves the transport robot 3000 between the first contact point P2 and the second contact point P3, the rotation direction of the transport robot 3000 can be set to be the same as or opposite to the traveling direction.

[0050] As an example, when the transport robot 3000 is moved to the second contact point P3 while the front of the transport robot 3000 is facing the second load lock chamber LC2 at the first contact point P2 as shown in Figure 1c, the transport robot 3000 can be moved from the first contact point P2 to the second contact point P3 without rotating the transport robot 3000.

[0051] As another example, when the traveling robot 2000 transports the transport robot 3000 to the second contact point P3, with the front of the transport robot 3000 facing the first load lock chamber LC1 at the first contact point P2, the traveling robot 2000 can rotate the transport robot 3000 counterclockwise so that when the transport robot 3000 arrives at the second contact point P3, the front of the transport robot 3000 faces the right process stage of the second process chamber PC2, allowing the transport robot 3000 to transport the substrate to the right process stage of the second process chamber PC2 immediately at the second contact point P3.

[0052] As another example, as shown in FIG. 1a, the traveling robot 2000 may move the transport robot 3000 from the first contact point P2 to the second contact point P3 so that the front of the transport robot 3000 faces the left process progression stage of the first process chamber PC1 and the substrate is transported to the second load lock chamber LC2. At the same time, the traveling robot 2000 may rotate the transport robot 3000 clockwise so that the front of the transport robot 3000 faces the second load lock chamber LC2 when the transport robot 3000 reaches the second contact point P3. This allows the transport robot 3000 to immediately transport the substrate from the vacuum chamber VC to the second load lock chamber LS2 at the second contact point P3.

[0053] 1a to 1c are illustrative of a substrate processing apparatus having a square structure, but the present invention is not limited thereto. A substrate transport apparatus TA according to one embodiment of the present invention can be fixedly installed at a specific position in a vacuum chamber of various structures, and a traveling robot can move the transport robot along various set routes.

[0054] 2a and 2b show a simplified representation of a substrate transport apparatus TA according to one embodiment of the present invention.

[0055] 2a and 2b, the substrate transport apparatus TA may include a lifting robot 1000, a traveling robot 2000 coupled to the lifting robot 1000, and a transport robot 3000 coupled to the traveling robot 2000.

[0056] First, the lifting robot 1000 is located in the outer lower region of the housing that seals the inside of the vacuum chamber VC, and its upper end can be sealed and connected to a vacuum chamber through-hole (not shown) formed in the lower region of the housing of the vacuum chamber VC, and can move the lifting shaft 1100, which has a hollow a, up and down and rotate.

[0057] Through this, the lifting robot 1000 adjusts the vertical position of the transport robot 3000 by the up and down movement of the lifting shaft 1100, so that the transport robot 3000 can be positioned at an appropriate height for loading or unloading substrates in a process chamber, etc., and the traveling robot 2000 can move the transport robot 3000 by the rotational movement.

[0058] As an example, the lifting robot 1000 will be described in more detail with reference to FIGS. 3a to 3c as follows.

[0059] The lifting robot 1000 may be formed at the bottom of the vacuum chamber and may include a lifting plate 1200 that moves up and down as a lifting driver, and the lifting plate 1200 may have an a-th vertical through-hole 1210 formed in an a-th central region.

[0060] The lifting robot 1000 may also include a lifting shaft 1100 that is rotatably coupled to the a-th vertical through-hole 1210 and has an a-th hollow.

[0061] As an example, a tubular shaft housing 1110 is fixedly coupled to the a-th vertical through-hole 1210 in a vertical direction, and a lift-off shaft 1100 is rotatably installed inside the shaft housing 1110, and the upper and lower sides of the lift-off shaft 1100 may extend to outer regions of the shaft housing 1110 in the vertical direction, and an upper flange 1121 may be coupled to the upper side of the lift-off shaft 1100, and a lower flange 1122 may be coupled to the lower side of the lift-off shaft 1100. However, the present invention is not limited thereto, and various structures may be used to allow the lift-off shaft 1100 to be rotatably coupled to the a-th vertical through-hole 1210.

[0062] Meanwhile, the lifting / lowering driving unit of the lifting robot 1000 may include a first screw shaft 1220_1 that is connected to one side of the lifting plate 1200 through a screw nut and formed in a vertical direction, and a second screw shaft 1220_2 that is connected to the other side of the lifting plate 1200 through a screw nut and formed in a vertical direction. In this case, the one side and the other side of the lifting plate 1200 may be symmetrical to each other with respect to the a-th vertical through-hole 1210 of the lifting plate 1200, but are not limited thereto.

[0063] In addition, the lifting driving unit of the lifting robot 1000 may include a first driving motor 1310 that provides a driving force for rotating the first screw shaft 1220_1 and the second screw shaft 1220_2.

[0064] At this time, timing belts may be used to transmit the driving force of the a1 driving motor 1310 to the first screw shaft 1220_1 and the second screw shaft 1220_2, and each timing belt may be coupled to a timing pulley coupled to the driving shaft of the a1 driving motor 1310 and the first screw shaft 1220_1 and the second screw shaft 1220_2, respectively. Although the transmission of driving force between the a1 driving motor 1310 and the first screw shaft 1220_1 and the second screw shaft 1220_2 has been described as being performed using a pulley system, the present invention is not limited thereto, and various other systems for transmitting driving force, such as a gear system, may also be used.

[0065] As a result, the lifting drive unit of the lifting robot 1000 rotates the first screw shaft 1220_1 and the second screw shaft 1220_2 through the operation of the a1 drive motor, and thereby the lifting plate 1200 moves up and down in accordance with the rotation direction of the a1 drive motor 1310, thereby moving the lifting shaft 1100 up and down.

[0066] In addition, the lifting / lowering driving unit of the lifting robot 1000 may include at least one first sliding guide 1230_1 formed on one side of the lifting plate 1200 to support the lifting plate 1200 in the vertical movement direction, and at least one second sliding guide 1230_2 formed on the other side of the lifting plate 1200 to support the lifting plate 1200 in the vertical movement direction. In this case, a plurality of sliding guides may be formed on each side to more stably support the lifting plate 1200 in the vertical movement direction.

[0067] In addition, a second driving motor 1320 may be fixedly coupled to the lifting plate 1200, and the second driving motor 1320 may provide a driving force for rotating the lifting shaft 1100.

[0068] In this case, a timing belt 1321 may be used to transmit the driving force of the a2 drive motor 1320 to the lift shaft 1100, and the timing belt 1321 may be coupled to timing pulleys respectively coupled to the drive shaft of the a2 drive motor 1320 and the input shaft of the a-th reducer 1130, and the output shaft of the a-th reducer 1130 may be fixedly coupled to a lower side of the lift shaft 1100, preferably to a lower flange 1122 fixedly coupled to the lower side of the lift shaft 1100. Meanwhile, although the transmission of driving force between the a2 drive motor 1320 and the lift shaft 1100 has been described as being performed using a pulley system, the present invention is not limited thereto, and various other systems for transmitting driving force, such as a gear system, may also be used.

[0069] As a result, the lifting drive unit of the lifting robot 1000 can rotate the lifting shaft 1100 by operating the a2 drive motor.

[0070] The lifting robot 1000 can be sealed and connected to the vacuum chamber through-hole of the vacuum chamber using the a-th cover 1500, and the a-th cover 1500 can have a hole through which the lifting shaft 1100 can be inserted.

[0071] The lifting robot 1000 may include a lifting shaft 1100, preferably a shaft housing 1100 including the lifting shaft 1100, one end of which is coupled to a lower region of the lifting plate 1100, preferably a lower region of the shaft housing 1110 where the lifting shaft 1100 is installed, and the other end of which is coupled to an a-th cover 1500. Thus, the vacuum chamber is sealed from the external environment by the bellows 1400, thereby maintaining a vacuum.

[0072] Next, the traveling robot 2000 in the substrate transport apparatus will be described with reference to FIGS. 4a to 4d.

[0073] 4a to 4d are simplified diagrams showing a traveling robot 2000 in a substrate transport apparatus according to one embodiment of the present invention, and the traveling robot 2000 may include a traveling arm 2100, a b-th drive motor 2200, and a b-th reducer 2300.

[0074] The traveling arm 2100 is formed of one body, and in the b-first tip region, when the surface facing the ground is the lower surface, a b-1 vertical through-hole 2110 is formed through the upper and lower surfaces, and in the b-other tip region, a b-2 vertical through-hole 2120 is formed through the upper and lower surfaces.

[0075] In addition, the bth other tip region of the traveling arm 2100 may be formed with an internal groove 2140 formed inside the b2 vertical through-hole 2120, separated from the b2 vertical through-hole 2120 by a partition wall, and a lower open space 2150 having a predetermined depth from the lower surface to the upper surface and connecting the b2 vertical through-hole 2120 and the internal groove 2140 to each other.

[0076] In addition, an internal wiring hole 2130 connecting the b1 vertical through-hole 2110 of the b1 tip region and the internal groove 2140 may be formed inside the traveling arm 2100 .

[0077] At this time, the internal wiring hole 2130 can be formed by creating a horizontal through hole that penetrates from the side surface of the b-th first tip region of the traveling arm 2100 to the internal groove 2140 .

[0078] The bth drive motor 2200 of the traveling robot 2000 can be installed in an internal groove 2140 formed in the bth other end region of the traveling arm 2100, and the bth drive motor 2200 can provide a driving force for rotating the transport robot.

[0079] In addition, the bth reducer 2300 of the traveling robot 2000 is installed in the bth second vertical through-hole 2120 formed in the bth other end region of the traveling arm 2100, and rotates in conjunction with the bth driving motor 2200, and can be installed so that the bth hollow-formed rotary drive shaft is exposed from the upper surface of the traveling arm 2100.

[0080] In this case, the driving force between the bth driving motor 2200 and the bth reducer 2300 of the traveling robot 2000 may be transmitted through a timing belt in the lower open space 2150, and the timing belt may be connected to a timing pulley connected to the driving shaft of the bth driving motor 2200 and the lower part of the bth reducer 2300. However, the present invention is not limited thereto, and various methods for transmitting driving force, such as a gear method, may be used for transmitting driving force between the bth driving motor 2200 and the bth reducer 2300.

[0081] Meanwhile, a lifting shaft of a lifting robot can be sealedly coupled to a first specific lower surface region of the lower surface of the traveling arm 2100 corresponding to the b1 vertical through-hole 2110 in the b1 tip region of the traveling arm 2100 so that the a-th hollow of the lifting shaft of the lifting robot corresponds to the b1 vertical through-hole 2120, and a b1 cover 2111 can be sealedly coupled to a first specific upper surface region of the upper surface corresponding to the b1 vertical through-hole in the b1 tip region.

[0082] A b2 cover 2121 may be coupled to a second specific lower surface area of ​​the lower surface corresponding to the lower open space 2150 in the b2 end area of ​​the traveling arm 2100 in a sealed manner.

[0083] In addition, a b-th third cover 2131 for sealing the horizontal through-hole may be coupled to a side of the b-th first tip region of the transfer arm 2100.

[0084] As described above, the traveling robot 2000 in the substrate transport device according to one embodiment of the present invention is formed using a traveling arm 2100 consisting of a single body, thereby simplifying the structure and minimizing the height of the traveling robot 2000 itself.

[0085] Next, the transfer robot 3000 in the substrate transfer apparatus according to an embodiment of the present invention will be described with reference to FIGS. 5a to 8. FIG.

[0086] 5a and 5b, the transfer robot 3000 may include a transfer arm platform 3100 coupled to a rotation drive shaft of the bth reducer of the traveling robot, and a first transfer arm unit 3200 and a second transfer arm unit 3300 coupled to the transfer arm platform 3100. A first end effector 3400 and a second end effector 3500 for supporting a substrate may be coupled to the first transfer arm unit 3200 and the second transfer arm unit 3300, respectively. For reference, FIG. 5a illustrates a state in which a mask, which is a substrate, is supported by the first end effector 3400, and a glass substrate, which is a substrate, is supported by the second end effector 3500, and FIG. 5b illustrates a state in which the forks supporting the substrates are removed from the first end effector 3400 and the second end effector 3500.

[0087] Through this, the transport robot 3000 moves within the vacuum chamber and positions itself at a specific position through the operation of the traveling robot, and with the first end effector 3400 or the second end effector 3500 positioned at a substrate loading or unloading position through the up and down movement of the lifting robot, the substrate supported by the first end effector 3400 or the second end effector 3500 can be loaded or unloaded through the operation of the first transport arm unit 3200 or the second transport arm unit 3300.

[0088] The transport arm platform 3100 may include a c1 coupling hole 3110 formed in a c-th central region, which is a specific region on a central line CL that divides the transport arm platform 3100 based on the linear movement direction of the first transport arm unit 3200 or the second transport arm unit 3300, i.e., the linear movement direction of the substrate moved by the transport robot 3000; a c2 coupling hole 3120 formed in a c-th tip region of one side region based on the central line CL; and a c3 coupling hole 3130 formed in a c-th other tip region of the other side region corresponding to the c-th tip region based on the central line CL.

[0089] Furthermore, a 1_1 blade 3171 and a 1_2 blade 3172 for link connection can be formed in front and behind the c2 coupling hole 3120 in the transport arm platform 3100, and a 2_1 blade 3181 and a 2_2 blade 3182 for link connection can be formed in front and behind the c3 coupling hole 3130.

[0090] At this time, referring to FIG. 6a, the c1 coupling hole 3110 of the transport arm platform 3100 is divided into a c1 upper space 3113 and a c1 lower space 3114 by a c1 stop member 3112 having a c1 vertical through hole 3111 formed in the c central region, which corresponds to the b hollow of the rotation drive shaft of the b reducer of the traveling robot, and the c1 upper space 3113 can be sealed by a c1 cover 3140.

[0091] The c2 coupling hole 3120 of the transport arm platform 3100 is divided into a c2 upper space 3123 and a c2 lower space 3124 by a c2 stop member 3122 having a c2 vertical through hole 3121 formed in the c1 tip region, and the c2 lower space 3124 can be sealed by a c2 cover 3150.

[0092] In addition, the c3 coupling hole 3130 of the transport arm platform 3100 is divided into a c3 upper space 3133 and a c3 lower space 3134 by a c3 stop member 3132 having a c3 vertical through hole 3131 formed in the c3 other end region, and the c3 lower space 3134 can be sealed by a c3 cover 3160.

[0093] The transport arm platform 3100 may include a wiring hole for drawing the wiring drawn through the bth hollow of the rotation drive shaft of the bth reducer of the traveling robot into the first transport arm part 3200 and the second transport arm part 3300.

[0094] That is, inside the transport arm platform 3100, a c1 wiring hole H110 connecting the c1 upper space 3113 and the c2 lower space 3124, and a c2 wiring hole H120 connecting the c1 upper space 3113 and the c3 lower space 3134 can be formed.

[0095] As an example, referring to Figures 6b and 6c in addition to Figure 6a, the transport arm platform 3100 may be formed by combining an upper plate 3100a including a 1_1 blade 3171, a 1_2 blade 3172, a 2_1 blade 3181, and a 2_2 blade 3182 with a lower plate 3100b.

[0096] The upper plate 3100a has a c1 upper connecting hole 3110_1 formed in the c central region, which is part of the c1 connecting hole, a c2 upper connecting hole 3120_1 formed in the c1 tip region, and a c3 upper connecting hole 3130_1 formed in the c2 other tip region, which is part of the c3 connecting hole.

[0097] A c2 stop member 3122 having a c2 vertical through hole 3121 formed therein is formed inside the c2 upper coupling hole 3120_1, separating the internal space of the c2 upper coupling hole 3120_1, and a c3 stop member 3132 having a c3 vertical through hole 3131 formed therein is formed inside the c3 upper coupling hole 3130_1, separating the internal space of the c3 upper coupling hole 3130_1.

[0098] In addition, the lower surface of the upper plate 3100a is formed with a c1 upper wiring groove H110_1 that connects the internal space of the c1 upper coupling hole 3110_1 and the lower space of the c2 upper coupling hole 3120_1, and a c2 upper wiring groove H120_1 that connects the internal space of the c1 upper coupling hole 3110_1 and the lower space of the c3 upper coupling hole 3130_1.

[0099] Meanwhile, the c1 lower connecting hole 3110_2, which is another part of the c1 connecting hole, is formed in the c central region of the lower plate 3100b, the c2 lower connecting hole 3120_2, which is another part of the c2 connecting hole, is formed in the c1 tip region, and the c3 lower connecting hole 3130_2, which is another part of the c3 connecting hole, is formed in the c other tip region.

[0100] A c1 stopper member 3112 having a c1 vertical through-hole 3111 formed therein is formed inside the c1 lower coupling hole 3110_2 to separate the inner space of the c1 lower coupling hole 3110_2.

[0101] In addition, the upper surface of the lower plate 3100b is formed with a c1 lower wiring groove H110_2 connecting the upper space of the c1 lower coupling hole 3110_2 and the internal space of the c2 lower coupling hole 3120_2, and a c2 lower wiring groove H120_2 connecting the upper space of the c1 lower coupling hole 3110_2 and the internal space of the c3 lower coupling hole 3130_2.

[0102] Therefore, by combining the upper plate 3100a and the lower plate 3100b, the c1 upper coupling hole 3110_1 and the c1 lower coupling hole 3110_2 are combined to form the c1 coupling hole 3110, the c2 upper coupling hole 3120_1 and the c2 lower coupling hole 3120_2 are combined to form the c2 coupling hole 3120, and the c3 upper coupling hole 3130_1 and the c3 lower coupling hole 3130_2 are combined to form the c2 coupling hole 3130. In addition, by combining the upper plate 3100a and the lower plate 3100b, the c1 upper wiring groove H110_1 and the c1 lower wiring groove H110_2 are combined to form the c1 wiring hole H110, and the c2 upper wiring groove H120_1 and the c2 lower wiring groove H120_2 are combined to form the c2 wiring hole H120.

[0103] 5a and 5b, the transfer arm platform 3100 can be coupled to the traveling robot. Specifically, the rotational drive shaft of the bth reducer of the traveling robot can be pulled into the c1 lower space of the c1 coupling hole 3110, so that the rotational drive shaft of the bth reducer of the traveling robot can be fixedly coupled to the c1 stop member. When the rotational drive shaft of the bth reducer of the traveling robot is fixedly coupled to the c1 stop member, a sealing member such as an O-ring or gasket can be added to improve the sealing performance of the fixed coupling area. The configuration of adding a sealing member such as an O-ring or gasket can be similarly applied to other coupling parts described below, so a description thereof will be omitted below.

[0104] Thereby, the external environment through the bth hollow of the rotation drive shaft of the bth reducer of the traveling robot can be sealed from the vacuum environment inside the vacuum chamber through the c1 coupling hole 3110.

[0105] The 1_1 transport link arm 3210 of the first transport arm unit 3200 can be coupled to the c2 coupling hole 3120 of the transport arm platform 3100, and the 2_1 transport link arm 3310 of the second transport arm unit 3300 can be coupled to the c3 coupling hole 3130 of the transport arm platform 3100.

[0106] At this time, referring to FIG. 7, the 1_1 transport link arm 3210 of the first transport arm unit 3200 has a sealed internal space, in which a c1 driving motor 3211 and a c1 reducer 3212 that is linked to the c1 driving motor 3211 and reduces the rotational speed by half can be installed.

[0107] In addition, the c1_1 first end region of the 1_1 conveying link arm 3210 may be sealed to accommodate the c1_1 driving shaft 3213 having a c1_1 hollow formed therein and linked to the c1 reducer 3212, and the c1_1 output shaft 3214 linked to the c1_1 driving shaft 3213, and the c1_1 other end region of the 1_1 conveying link arm 3210 may be sealed to accommodate the c1_2 driving shaft 3216 having a c1_2 hollow formed therein and linked to the c1 drive motor 3211, and the c1_2 output shaft 3217 linked to the c1_2 driving shaft 3216. Here, the interlocking between the c1 drive motor 3211 and the c1 reducer 3212, the interlocking between the c1 reducer 3212 and the c1_1 drive shaft 3213, and the interlocking between the c1 drive motor 3211 and the c1_2 drive shaft 3216 may be performed using a pulley system, but the present invention is not limited to this and various systems for transmitting rotational force, such as a gear system, may be used. Also, the c1_1 drive shaft 3213 and the c1_1 output shaft 3214, and the c1_2 drive shaft 3216 and the c1_2 output shaft 3217 may be formed by reducers having the same reduction ratio, respectively. In addition, the c1_1 output shaft 3214 and the c1_2 output shaft 3217 may rotate in opposite directions.

[0108] Referring again to Figures 5a and 5b, the c1_1 output shaft installed in the c1_1 tip region of the 1_1 transport link arm 3210 of the first transport arm unit 3200 can be pulled into the c2 upper space of the c2 coupling hole 3120 of the transport arm platform 3100 and fixedly coupled to the c2 stop member.

[0109] In this case, a 2_1 connecting member (3215 in FIG. 7) can be used to connect the c1_1 output shaft and the c2 stop member, and the 2_1 connecting member is a tubular shaft having a length extended by the distance between the c1_1 output shaft and the c2 stop member at the position where the transport arm platform 3100 and the 1_1 transport link arm 3210 are connected, and both ends of the 2_1 connecting member can be fixedly connected to the c1_1 output shaft and the c2 stop member, respectively.

[0110] The c1_2-th output shaft of the 1_1 transport link arm 3210 of the first transport arm unit 3200 may be fixedly coupled to the c1_2-th tip region of the 1_2 transport link arm 3220.

[0111] In this case, a first fixed coupling shaft (3218 in FIG. 7) may be used to connect the c1_2 output shaft of the 1_1 conveying link arm 3210 and the c1_2-first end region of the 1_2 conveying link arm 3220, and the first fixed coupling shaft is a tubular shaft having a length extended by the distance between the coupling region of the c1_2 output shaft and the c1_2-first end region at the position where the 1_1 conveying link arm 3210 and the 1_2 conveying link arm 3220 are connected, and both ends of the first fixed coupling shaft may be fixedly coupled to the coupling region of the c1_2 output shaft and the c1_2-first end region, respectively.

[0112] A first common link arm 3230 may be installed in a coupling region between the 1_1 conveying link arm 3210 and the 1_2 conveying link arm 3220, that is, a coupling region between the c1_2 output shaft and the c1_2-1 tip region.

[0113] That is, referring to FIG. 8, the first common link arm 3230 may have a c1 center region rotatably coupled to a first fixed coupling shaft 3218 that couples the c1_2 output shaft 3217 and the c1_2 first distal region.

[0114] 5a and 5b, the first transport arm section 3200 may include a 1_1 auxiliary link arm 3240, which is parallel to the 1_1 transport link arm 3210, and the c1_4-th end region of the 1_1 auxiliary link arm 3240 may be rotatably connected to the 1_1 blade 3171 of the transport arm platform 3100, and the c1_4-th other end region of the 1_1 auxiliary link arm 3240 may be rotatably connected to the c1_3-th end region of the first common link arm 3230.

[0115] In addition, the first transport arm section 3200 may include a first_2 auxiliary link arm 3250, which is parallel to the first_1 transport link arm 3210, and the c1_5 first end region of the first_2 auxiliary link arm 3250 may be rotatably connected to the first_2 blade 3172 of the transport arm platform 3100, and the c1_5 other end region of the first_2 auxiliary link arm 3250 may be rotatably connected to the c1_3 other end region of the first common link arm 3230.

[0116] Thus, in the area of ​​the 1_1 conveying link arm 3210, a double parallel link may be formed in which two single parallel links face each other with the 1_1 conveying link arm 3210 as a reference.

[0117] That is, the joint connecting the c1_1 first tip region of the 1_1 transport link arm 3210 with the c2 connecting hole 3120 of the transport arm platform 3100 and the joint connecting the c1_4 first tip region of the 1_1 auxiliary link arm 3240 with the 1_1 blade 3171 of the transport arm platform 3100 form a frame, the 1_1 transport link arm 3210 forms an input link, and the first common link arm between the joint connecting the c1_1 other tip region of the 1_1 transport link arm 3210 with the c1 central region of the first common link arm 3230 and the joint connecting the c1_3 first tip region of the first common link arm 3230 with the c1_4 other tip region of the 1_1 auxiliary link arm 3240 forms a connecting arm, and the 1_1 auxiliary link arm 3240 forms a follower, thereby constituting a single parallel link. Here, the frame is a concept that may or may not physically exist, and is a predetermined reference line or reference plane that fixes one end of the input link and one end of the follower that constitute the parallel linkage, and the term frame mentioned below should be interpreted in a similar manner.

[0118] In addition, the joint connecting the c1_1 first tip region of the 1_1 transport link arm 3210 with the c2 connecting hole 3120 of the transport arm platform 3100 and the joint connecting the c1_5 first tip region of the 1_2 auxiliary link arm 3250 with the 1_2 blade 3172 of the transport arm platform 3100 form a frame, the 1_1 transport link arm 3210 forms an input link, and the first common link arm between the joint connecting the c1_1 other tip region of the 1_1 transport link arm 3210 with the c1 central region of the first common link arm 3230 and the joint connecting the c1_3 other tip region of the first common link arm 3230 with the c1_5 other tip region of the 1_2 auxiliary link arm 3250 forms a connecting arm, and the 1_2 auxiliary link arm 3250 forms a follower, thereby forming another single parallel link.

[0119] Such a double parallel link makes it possible to reduce vibrations and / or disturbances of the first end effector 3400 in the substrate transport path.

[0120] The first transport arm unit 3200 may include a first_3 auxiliary link arm 3260, which is parallel to the first_2 transport link arm 3220, and a c1_6 first end region of the first_3 auxiliary link arm 3260 may be rotatably coupled to the c1_3 other end region of the first common link arm 3230. In this case, the joint where the c1_6 first end region of the first_3 auxiliary link arm 3260 and the c1_3 other end region of the first common link arm 3230 are coupled may be formed at the same position as the joint where the c1_5 other end region of the first_2 auxiliary link arm 3250 and the c1_3 other end region of the first common link arm 3230 are coupled, or may be formed at a different position.

[0121] In addition, the first transport arm unit 3200 may include a 1_4 auxiliary link arm 3270, which is parallel to the first common link arm 3230, and the c1_7 first end region of the 1_4 auxiliary link arm 3270 may be rotatably connected to the c1_6 other end region of the 1_3 auxiliary link arm 3260, and the c1_7 other end region of the 1_4 auxiliary link arm 3270 may be rotatably connected to the c1_2 other end region of the 1_2 transport link arm 3220.

[0122] The first transfer arm unit 3200 may include a first end effector 3400, which is fixed to the c1_7 other tip region of the 1_4 auxiliary link arm 3270 to support a substrate. For reference, FIG. 5b shows that a plate for fixing a fork that supports a substrate of the first end effector 3400 is integrally formed with the 1_4 auxiliary link arm 3270.

[0123] The first transport arm unit 3200 configured in this manner allows the first end effector 3400 to move forward and backward in a straight line through each transport arm and auxiliary arm by operation of the c1 drive motor 3211, thereby making it possible to load and unload substrates at a set position through the first end effector 3400.

[0124] 5a and 5b, the second transport arm unit 3300 may be configured similarly to the first transport arm unit 3200 and may be installed on the transport arm platform 3100 so as to be symmetrical to the first transport arm unit 3200 based on the center line CL of the transport arm platform 3100.

[0125] That is, the 2_1 transport link arm 3310 of the second transport arm unit 3300 has a sealed internal space, and a c2 driving motor and a c2 reducer that is linked to the c2 driving motor and reduces the rotation speed by half can be installed in the sealed internal space.

[0126] In addition, a c2_1 driving shaft having a c2_1 hollow formed therein and linked to a c2 reducer and a c2_1 output shaft linked to the c2_1 driving shaft may be installed in a sealed manner at a c2_1 first end region of the 2_1 conveying link arm 3310, and a c2_2 driving shaft having a c2_2 hollow formed therein and linked to a c2 driving motor and a c2_2 output shaft linked to the c2_2 driving shaft may be installed in a sealed manner at a c2_1 other end region of the 2_1 conveying link arm 3310. Here, the interlocking between the c2 driving motor and the c2 reducer, the interlocking between the c2 reducer and the c2_1 driving shaft, and the interlocking between the c2 driving motor and the c2_2 driving shaft may each be performed using a pulley system, but the present invention is not limited thereto, and various systems for transmitting rotational force, such as a gear system, may be used. In addition, the c2_1 driving shaft and the c2_1 output shaft, and the c2_2 driving shaft and the c2_2 output shaft may be formed by reducers having the same reduction ratio, respectively. In addition, the c2_1 output shaft and the c2_2 output shaft may rotate in opposite directions.

[0127] The c2_1 output shaft installed in the c2_1 tip region of the 2_1 transport link arm 3310 of the second transport arm unit 3300 can be pulled into the c3 upper space of the c3 coupling hole 3130 of the transport arm platform 3100 and fixedly coupled to the c3 stop member.

[0128] In this case, a 2_2 connecting member can be used to connect the c2_1 output shaft and the c3 stop member, and the 2_2 connecting member is a tubular shaft having a length extended by the distance between the c2_1 output shaft and the c3 stop member at the position where the transport arm platform 3100 and the 2_1 transport link arm 3310 are connected, and both ends of the 2_2 connecting member can be fixedly connected to the c2_1 output shaft and the c3 stop member, respectively.

[0129] The c2_2-th output shaft of the 2_1 transport link arm 3310 of the second transport arm unit 3300 may be fixedly coupled to the c2_2-th tip region of the 2_2 transport link arm 3320.

[0130] In this case, a second fixed coupling shaft 3318 may be used to connect the c2_2 output shaft of the 2_1 conveying link arm 3310 and the c2_2-first end region of the 2_2 conveying link arm 3320, and the second fixed coupling shaft 3318 is a tubular shaft having a length extended by the distance between the connecting region of the c2_2 output shaft and the c2_2-first end region at the position where the 2_1 conveying link arm 3310 and the 2_2 conveying link arm 3320 are connected, and both ends of the second fixed coupling shaft 3318 may be fixedly connected to the connecting region of the c2_2 output and the c2_2-first end region, respectively. The height of the second fixed coupling shaft 3318 connecting the 2_1 transport link arm 3310 and the 2_2 transport link arm 3320 of the second transport arm unit 3300 may be higher than the height of the first fixed coupling shaft connecting the 1_1 transport link arm 3210 and the 1_2 transport link arm 3220 of the first transport arm unit 3200, so that the first end effector 3400 of the first transport arm unit 3200 and the second end effector 3500 of the second transport arm unit 3300 may be positioned at different heights on the same path. However, the present invention is not limited thereto, and the height of the first fixed coupling shaft may be formed higher than the height of the second fixed coupling shaft.

[0131] Next, a second common link arm 3330 may be installed in a coupling region between the 2_1 conveying link arm 3310 and the 2_2 conveying link arm 3320, that is, a coupling region between the c2_2 output shaft and the c2_2-1 tip region.

[0132] That is, the second common link arm 3330 may have a c2 center region rotatably coupled to a second fixed coupling shaft that couples the c2_2 output shaft and the c2_2 distal end region.

[0133] The second transport arm section 3300 may include a 2_1 auxiliary link arm 3340, which is parallel to the 2_1 transport link arm 3310, and has a c2_4-1 tip region rotatably connected to the 2_1 blade 3181 of the transport arm platform 3100, and a c2_4-2 tip region rotatably connected to the c2_3-1 tip region of the second common link arm 3330.

[0134] In addition, the second transport arm section 3300 may include a 2_2 auxiliary link arm 3350, which is parallel to the 2_1 transport link arm 3310, and the c2_5 first end region of the 2_2 auxiliary link arm 3350 may be rotatably connected to the 2_2 blade 3182 of the transport arm platform 3100, and the c2_5 other end region of the 2_2 auxiliary link arm 3350 may be rotatably connected to the c2_3 other end region of the second common link arm 3330.

[0135] Thus, in the area of ​​the 2_1 conveying link arm 3310, a double parallel link may be formed in which two single parallel links face each other with the 2_1 conveying link arm 3310 as a reference.

[0136] That is, the joint connecting the c2_1 first tip region of the 2_1 transport link arm 3310 with the c3 connecting hole 3320 of the transport arm platform 3100 and the joint connecting the c2_4 first tip region of the 2_1 auxiliary link arm 3340 with the 2_1 blade 3181 of the transport arm platform 3100 form a frame, the 2_1 transport link arm 3310 forms an input link, the second common link arm 3330 between the joint connecting the c2_1 other tip region of the 2_1 transport link arm 3310 with the c2 central region of the second common link arm 3330 and the joint connecting the c2_3 first tip region of the second common link arm 3330 with the c2_4 other tip region of the 2_1 auxiliary link arm 3340 forms a connecting arm, and the 2_1 auxiliary link arm 3340 forms a follower, thereby forming a single parallel link.

[0137] In addition, the joint connecting the c2_1 first tip region of the 2_1 transport link arm 3310 to the c3 connecting hole 3130 of the transport arm platform 3100 and the joint connecting the c2_5 first tip region of the 2_2 auxiliary link arm 3350 to the 2_2 blade 3182 of the transport arm platform 3100 form a frame, the 2_1 transport link arm 3310 forms an input link, and the second common link arm 3330 between the joint connecting the c2_1 other tip region of the 2_1 transport link arm 3310 to the c2 central region of the second common link arm 3330 and the joint connecting the c2_3 other tip region of the second common link arm 3330 to the c2_5 other tip region of the 2_2 auxiliary link arm 3350 forms a connecting arm, and the 2_2 auxiliary link arm 3250 forms a follower, thereby forming another single parallel link.

[0138] Such a double parallel link makes it possible to reduce vibrations and / or disturbances of the second end effector 3500 in the substrate transport path.

[0139] The second transport arm unit 3300 may include a 2_3 auxiliary link arm 3360, which is parallel to the 2_2 transport link arm 3320, and a c2_6 first end region thereof may be rotatably coupled to the c2_3 other end region of the second common link arm 3330. In this case, the joint where the c2_6 first end region of the 2_3 auxiliary link arm 3360 and the c2_3 other end region of the second common link arm 3330 are coupled may be formed at the same position as the joint where the c2_5 other end region of the 2_2 auxiliary link arm 3350 and the c2_3 other end region of the second common link arm 3330 are coupled, or may be formed at a different position.

[0140] In addition, the second transport arm unit 3300 may include a 2_4 auxiliary link arm 3370, which is parallel to the second common link arm 3330, and the c2_7 one end region may be rotatably connected to the c2_6 other end region of the 2_3 auxiliary link arm 3360, and the c2_7 other end region may be rotatably connected to the c2_2 other end region of the 2_2 transport link arm 3320.

[0141] The second transfer arm unit 3300 may include a second end effector 3500, which may be fixed to the c2_7 other tip region of the 2_4 auxiliary link arm 3370 to support a substrate. For reference, Fig. 5b shows that a plate for fixing a fork for supporting a substrate of the second end effector 3500 is configured separately from the 2_4 auxiliary link arm 3370 and fixedly coupled to the c2_7 other tip region of the 2_4 auxiliary link arm 3370.

[0142] The second transport arm unit 3300 configured in this manner allows the second end effector 3500 to move forward and backward in a straight line through each transport arm and auxiliary arm in accordance with the operation of the c2 drive motor, thereby enabling the second end effector 3500 to load and unload substrates at a set position.

[0143] At this time, the c1_1 other tip region of the 1_1 transport link arm 3210 of the first transport arm section 3200 and the c2_1 other tip region of the 2_1 transport link arm 3310 of the second transport arm section 3300 can be positioned in the same front region or rear region of the transport arm platform 3100.

[0144] Alternatively, the c1_1 other tip region of the 1_1 transport link arm 3210 of the first transport arm section 3200 can be positioned in the front region of the transport arm platform 3100, and the c2_1 other tip region of the 2_1 transport link arm 3310 of the second transport arm section 3300 can be positioned in the rear region of the transport arm platform 3100.

[0145] A c1 wiring for operating the c1 driving motor 3211 and a c2 wiring for operating the c2 driving motor may be arranged in a sealed space inside the transfer robot 3000, respectively.

[0146] At this time, the c1 wiring may be drawn into the c1 driving motor 3211 through the hollows of the lifting shaft of the lifting robot, the rotation driving shaft of the b-th reducer of the traveling robot, and the c1_1 driving shaft 3213 of the transport robot 3000, and may be sealed from the internal space of the vacuum chamber, and the c2 wiring may be drawn into the c2 driving motor through the hollows of the lifting shaft of the lifting robot, the rotation driving shaft of the b-th reducer of the traveling robot, and the c2_1 driving shaft of the transport robot 3000, and may be sealed from the internal space of the vacuum chamber. Meanwhile, the c1 wiring and the c2 wiring may be branched from the rotation driving shaft of the b-th reducer of the traveling robot to the first transport arm unit 3200 and the second transport arm unit 3300, respectively, through the c1 wiring hole and the c2 wiring hole formed in the transport arm platform 3100.

[0147] Although the present invention has been described above using specific details such as specific components and limited examples and drawings, this is provided merely to aid in a more general understanding of the present invention, and the present invention is not limited to the above examples. Various modifications and variations can be made from such descriptions by those having ordinary knowledge in the technical field to which the present invention pertains.

[0148] Therefore, the concept of the present invention should not be limited to the above-described embodiments, and all modifications equivalent to or equivalent to the scope of the claims, as well as the scope of the claims described below, are within the scope of the concept of the present invention. [Explanation of symbols]

[0149] TA: Substrate transport device 1000: Elevating robot 2000: Running robot 3000:Transport robot

Claims

1. A substrate transport device that transports a substrate within a vacuum chamber, a lifting robot including a lifting shaft having a hollow a) formed therein and a lifting driver for vertically and rotationally moving the lifting shaft, the lifting robot being connected to a vacuum chamber through-hole formed in a lower region of the vacuum chamber in a sealed manner; The b-first tip region is formed with a b-th vertical through-hole penetrating the upper surface and the lower surface (the lower surface is the surface facing the ground), and the b-th other tip region is formed with a b-th vertical through-hole penetrating the upper surface and the lower surface, an internal groove separated from the b-th vertical through-hole by a partition and formed inside the b-th vertical through-hole, and a lower open space having a predetermined depth from the lower surface to the upper surface and connecting the b-th vertical through-hole and the internal groove, and an internal wiring hole connecting the b-th vertical through-hole and the internal groove formed therein; a b-th drive motor installed in the internal groove of the travel arm; and a b-th drive motor installed in the b-th vertical through-hole of the travel arm and connected to the b-th vertical through-hole of the travel arm. a bth reducer that rotates in conjunction with a motor and has a rotary drive shaft formed with a bth hollow exposed from the upper surface, wherein the lifting shaft is sealingly coupled to a first specific lower surface region of the lower surface corresponding to the b1 vertical through-hole in the b-first tip region so that the a-hole of the lifting shaft corresponds to the b1 vertical through-hole, a b1 cover is sealingly coupled to a first specific upper surface region of the upper surface corresponding to the b1 vertical through-hole in the b-first tip region, and a b2 cover is sealingly coupled to a second specific lower surface region of the lower surface corresponding to the lower open space in the b-other tip region; and The c1 upper space and the c1 lower space are divided by a c1 stop member formed in a c-th central region, which is a specific region on a central line corresponding to a linear movement direction of the substrate for transportation, and having a c1 vertical through-hole formed therein corresponding to the b-th hollow of the rotation drive shaft of the b-th reducer of the traveling robot, and the c1 upper space is divided into a c2 upper space and a c2 lower space by a c1 coupling hole sealed by a c1 cover and a c2 stop member formed in a c-th end region of one side region based on the central line and having a c2 vertical through-hole formed therein. a c2 coupling hole in which the c2 lower space is sealed by a c2 cover; a c3 other end region formed in a c2 other end region corresponding to the c1 end region in an other side region based on the center line, the c3 upper space and the c3 lower space being divided by a c3 stop member having a c3 vertical through hole; a c3 coupling hole in which the c3 lower space is sealed by a c3 cover; a 1_1 blade and a 1_2 blade formed respectively in front and rear of the c2 coupling hole; and a 2_1 blade formed respectively in front and rear of the c3 coupling hole. and a 2_2 blade, and the rotation drive shaft of the b reducer of the traveling robot retracted into the c1 lower space is fixedly coupled to the c1 stop member. A c1 drive motor and a c1 reducer that is interlocked with the c1 drive motor and reduces the rotation speed to 1 / 2 are installed in the sealed internal space, and a c1_1 drive shaft with a c1_1 hollow formed and interlocked with the c1 reducer and a c1_1 output shaft that is interlocked with the c1_1 drive shaft are installed so as to be sealed in a c1_1 tip region, and the c1 a c1_2 driving shaft having a c1_2 hollow formed therein and interlocked with a driving motor, and a c1_2 output shaft interlocked with the c1_2 driving shaft, are installed to be sealed in a c1_1 other end region; a 1_1 conveying link arm in which the c1_1 output shaft is fixedly connected to a 2_1 connecting member that is drawn into the c2 upper space of the conveying arm platform and fixedly connected to the c2 stop member; and a 1_2 conveying link arm in which a c1_2 one end region is fixedly connected to the c1_2 output shaft of the 1_1 conveying link arm through a first fixed connecting shaft;a first common link arm having a c1 central region rotatably coupled to the first fixed coupling shaft; a first auxiliary link arm parallel to the first_1 transport link arm and having a c1_4 first end region rotatably coupled to the first_1 blade of the transport arm platform, and a c1_4 second end region rotatably coupled to the c1_3 first end region of the first common link arm; a first auxiliary link arm parallel to the first_1 transport link arm and having a c1_5 first end region rotatably coupled to the first_2 blade of the transport arm platform, and a c1 a first auxiliary link arm having a c1_5 other end region rotatably connected to the c1_3 other end region of the first common link arm; a first auxiliary link arm which is parallel to the first common link arm and has a c1_6 first end region rotatably connected to the c1_3 other end region of the first common link arm; a first auxiliary link arm which is parallel to the first common link arm and has a c1_7 first end region rotatably connected to the c1_6 other end region of the first auxiliary link arm and has a c1_7 other end region rotatably connected to the c1_2 other end region of the first common link arm; a first transfer arm unit including a first end effector fixed to the c1_7 other end region of the first-4 auxiliary link arm to support the substrate; and a c2 drive motor and a c2 reducer interlocked with the c2 drive motor to reduce the rotation speed to 1 / 2 are installed in the sealed internal space, and a c2_1 hollow-formed c2_1 drive shaft interlocked with the c2 reducer and a c2_1 output shaft interlocked with the c2_1 drive shaft are installed to be sealed at the c2_1 one end region, a c2_2 driving shaft having a c2_2 hollow formed therein and interlocked with the c2 driving motor, and a c2_2 output shaft interlocked with the c2_2 driving shaft, are installed to be sealed in the c2_1 other end region; a 2_1 conveying link arm in which the c2_1 output shaft is fixedly connected to a 2_2 connecting member drawn into the c3 upper space of the conveying arm platform and fixedly connected to the c3 stop member; and a 2_2 conveying link arm in which a c2_2 one end region is fixedly connected to the c2_2 output shaft of the 2_1 conveying link arm through a second fixed connecting shaft;a second common link arm having a c2 central region rotatably coupled to the second fixed coupling shaft; a second auxiliary link arm parallel to the second_1 transport link arm, having a c2_4 first end region rotatably coupled to the second_1 blade of the transport arm platform and a c2_4 other end region rotatably coupled to the c2_3 first end region of the second common link arm; a second auxiliary link arm parallel to the second_1 transport link arm, having a c2_5 first end region rotatably coupled to the second_2 blade of the transport arm platform and a c2_5 other end region rotatably coupled to the c2_3 other end region of the second common link arm; a second common link arm portion including a second end effector fixed to the second common link arm; a second common link arm portion including a second common link arm, a second auxiliary link arm parallel to the second common link arm and having a c2_6-first end region rotatably connected to the c2_3-second end region of the second common link arm; a second common link arm portion including a second end effector fixed to the c2_7-second end region of the second auxiliary link arm and having a c2_7-first end region rotatably connected to the c2_6-second end region of the second auxiliary link arm and a c2_7-second end region rotatably connected to the c2_2-second end region of the second common link arm; A substrate transport apparatus comprising:

2. When a certain direction on a plane when the vacuum chamber is viewed from above is defined as a first direction and a direction perpendicular to the first direction is defined as a second direction, a central axis of the lifting shaft of the lifting robot is located at a predetermined distance from a first direction center line, which is a center line in the first direction, and is located on a second direction center line, which is a center line in the second direction, or on a second direction parallel line parallel to the second direction center line; 2. The substrate transport device of claim 1, wherein the traveling robot has a traveling trajectory that is an arc between a first contact point and a second contact point that meet the first direction center line on the rotation radius of the rotation drive shaft, which moves by rotation of the first other tip region of the traveling arm around the lifting shaft.

3. 3. The substrate transport device of claim 2, wherein the traveling robot moves the transport robot coupled to the rotation drive shaft between the first contact point and the second contact point such that the front of the transport robot faces either one of the two ends in the first direction.

4. 3. The substrate transport device of claim 2, wherein the traveling robot causes the b drive motor to rotate in the same direction as or opposite to the lifting shaft of the lifting robot when the transport robot travels between the first contact point and the second contact point.

5. 3. The substrate transport device of claim 2, wherein when the traveling robot moves the transport robot between the first contact point and the second contact point, the b drive motor operates at the first contact point or the second contact point to move the front of the transport robot toward one of the two ends in the first direction, and the operation of the b drive motor is interrupted while the transport robot is moving between the first contact point and the second contact point.

6. The substrate transfer apparatus according to claim 2 , wherein the vacuum chamber has a rectangular shape in which the length in the first direction is greater than the length in the second direction.

7. 2. The substrate transport device of claim 1, wherein the internal wiring hole of the traveling arm of the traveling robot is formed by creating a horizontal through hole that penetrates from a side of the first b-end region of the traveling arm to the internal groove, and a third b-end cover that seals the horizontal through hole is attached to a side of the first b-end region corresponding to the horizontal through hole.

8. In the transport robot, 2. The substrate transport device of claim 1, wherein the height of the second fixed coupling shaft is higher than the height of the first fixed coupling shaft, so that the first end effector and the second end effector are positioned at different heights on the same path.

9. In the transport robot, 2. The substrate transport device of claim 1, wherein the transport arm platform further includes a c1 wiring hole connecting the c1 upper space and the c2 lower space, and a c2 wiring hole connecting the c1 upper space and the c3 lower space.

10. In the transport robot, the transport arm platform includes an upper plate including the first blade, the first second blade, the second first blade, and the second second blade, and a lower plate coupled to the upper plate; a c1 upper coupling hole, which is a part of the c1 coupling hole, is formed in the c central region of the upper plate; a c2 upper coupling hole, which is a part of the c2 coupling hole, is formed in the c1 end region of the upper plate; a c2 stop member, having the c2 vertical through-hole formed therein, is formed inside the c2 upper coupling hole to separate an internal space of the c2 upper coupling hole; a c3 upper coupling hole, which is a part of the c3 coupling hole, is formed in the c2 other end region of the upper plate; and a c3 stop member, having the c3 vertical through-hole formed therein, is formed inside the c3 upper coupling hole to separate an internal space of the c3 upper coupling hole; 2. The substrate transport device of claim 1, wherein a c1 lower coupling hole, which is another part of the c1 coupling hole, is formed in the c central region of the lower plate, a c1 stop member having the c1 vertical through hole formed therein is formed inside the c1 lower coupling hole to separate the internal space of the c1 lower coupling hole, a c2 lower coupling hole, which is another part of the c2 coupling hole, is formed in the c1 end region of the lower plate, and a c3 lower coupling hole, which is another part of the c3 coupling hole, is formed in the c other end region of the lower plate.

11. a c1 upper interconnection groove connecting an inner space of the c1 upper coupling hole and a lower space of the c2 upper coupling hole, and a c2 upper interconnection groove connecting an inner space of the c1 upper coupling hole and a lower space of the c3 upper coupling hole are formed on a lower surface of the upper plate; 11. The substrate transport device of claim 10, wherein a c1 lower wiring groove connecting an upper space of the c1 lower coupling hole and an internal space of the c2 lower coupling hole, and a c2 lower wiring groove connecting an upper space of the c1 lower coupling hole and an internal space of the c3 lower coupling hole are formed on the upper surface of the lower plate.

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