Probe and method for manufacturing a probe

Abstract

The present invention provides a probe that can suppress the occurrence of buckling and a method for manufacturing the probe. [Solution] The probe 10 comprises a main body 100 having a spring structure that expands and contracts in the axial direction, and a first tip 11 connected to one end of the main body 100. The first tip 11 includes a first part 11A and a second part 11B that are arranged sequentially in the axial direction, not fixed to each other but electrically connected. The first part 11A and the second part 11B are combined in such a way that they can be changed between a state where the central axis of the first part 11A and the central axis of the second part 11B coincide and a state where they intersect at an angle.

Description

Technical Field

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[0001] The present invention relates to a probe used for inspecting electrical characteristics of an inspection object and a method for manufacturing the probe.

Background Art

[0002] In order to inspect the electrical characteristics of an inspection object such as a semiconductor integrated circuit in a wafer state, an electrical connection device including a probe is used. In an inspection using a probe, one end of the probe contacts an electrode of the inspection object, and the other end of the probe contacts a terminal (hereinafter also referred to as a "land") disposed on a substrate of the electrical connection device. The land is electrically connected to an inspection device such as a tester.

[0003] In order to accurately inspect the electrical characteristics of the inspection object, it is necessary to stably electrically connect the inspection object and the land via the probe. For this purpose, a probe having elasticity in the axial direction is used. By pressing the probe connected to the land against the inspection object and contracting the probe in the axial direction, an overdrive is generated that further pushes the probe toward the inspection object by the elastic force of the probe. By the overdrive, the inspection object and the probe can be stably contacted. As a probe having elasticity in the axial direction, a probe including a spring portion in which beams are connected in a spiral shape is used.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Overdrive occurs when axial stress is applied to the probe. In this case, the probe is prone to buckling if it does not have a symmetrical structure when viewed from the axial direction. The present invention aims to provide a probe and a method for manufacturing the probe that can suppress the occurrence of buckling. [Means for solving the problem]

[0006] A probe according to one aspect of the present invention comprises a main body having a spring structure that expands and contracts in the axial direction, and a first tip connected to one end of the main body. The first tip includes a first part and a second part that are arranged sequentially in the axial direction, not fixed to each other but electrically connected. The first part and the second part are combined in such a way that they can be changed between a state where the central axes of the first part and the central axes of the second part coincide and a state where they intersect at an angle. [Effects of the Invention]

[0007] According to the present invention, it is possible to provide a probe that can suppress the occurrence of buckling and a method for manufacturing the probe. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is a schematic diagram showing the configuration of a probe according to an embodiment. [Figure 2] Figure 2 is a schematic cross-sectional view parallel to the XZ plane showing the configuration of the contact area of ​​the probe according to the embodiment. [Figure 3] Figure 3 is a schematic cross-sectional view parallel to the YZ plane showing the configuration of the contact area of ​​the probe according to the embodiment. [Figure 4] Figure 4 is a schematic top view of the contact area of ​​the probe according to the embodiment, as seen from the Z direction. [Figure 5] Figure 5 is a schematic diagram showing the probe according to the embodiment in a curved state in the Y direction. [Figure 6] Figure 6 is a schematic diagram showing the state of the contact area when the probe according to the embodiment is curved in the Y direction. [Figure 7]Figure 7 is a schematic top view taken from the axial direction, showing the state of the contact area when the probe according to the embodiment is curved in the Y direction. [Figure 8] Figure 8 is a schematic diagram showing the probe according to the embodiment in a curved state in the X direction. [Figure 9] Figure 9 is a schematic diagram showing the state of the contact area when the probe according to the embodiment is curved in the X direction. [Figure 10] Figure 10 is a schematic diagram showing an example of a probe according to an embodiment that is not symmetrical when viewed from the axial direction. [Figure 11] Figure 11 is a schematic perspective view showing the configuration of the spring unit of the probe shown in Figure 10. [Figure 12] Figure 12 is a schematic top view showing the configuration of the spring unit of the probe shown in Figure 10. [Figure 13] Figure 13 is a schematic diagram showing the substrate that makes up the probe shown in Figure 10. [Figure 14] Figure 14 is an enlarged view including the contact area of ​​the substrate that constitutes the probe shown in Figure 10. [Figure 15] Figure 15 is a schematic diagram illustrating the method for manufacturing a probe according to an embodiment (Part 1). [Figure 16] Figure 16 is a schematic diagram illustrating the method for manufacturing a probe according to the embodiment (part 2). [Figure 17] Figure 17 is a schematic diagram illustrating the method for manufacturing a probe according to the embodiment (part 3). [Figure 18] Figure 18 is a schematic diagram illustrating the method for manufacturing a probe according to the embodiment (part 4). [Figure 19] Figure 19 is a schematic diagram showing the configuration of an electrical connection device including a probe according to an embodiment. [Modes for carrying out the invention]

[0009] Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the ratios of the thicknesses of each part are different from the actual ones. Also, it is a matter of course that there are parts where the dimensional relationships and ratios are different between the drawings. The embodiments shown below illustrate devices and methods for embodying the technical idea of this invention, and the embodiments of this invention do not specify the materials, shapes, structures, arrangements, etc. of the components as follows.

[0010] The probe 10 according to the embodiment shown in FIG. 1 has conductivity and is used for inspecting the electrical characteristics of an inspection object. The probe 10 has a columnar shape having a main body portion 100, a first tip portion 11 disposed at one end of the main body portion 100, and a second tip portion 12 disposed at the other end of the main body portion 100. The main body portion 100 is a spring portion having a spring structure that expands and contracts in the axial direction. In the following, when not limiting each of the first tip portion 11 and the second tip portion 12, it is referred to as a tip portion. In the inspection of an inspection object, one tip portion of the probe 10 is connected to the inspection object, and the other tip portion is connected to a land of an electrical connection device.

[0011] As shown in FIG. 1, the axial direction of the probe 10 is defined as the Z direction, the left-right direction in FIG. 1 is defined as the X direction, and the depth direction in FIG. 1 is defined as the Y direction. FIG. 1 is a side view of the probe 10 in the XZ plane. Also, the direction in which the first tip portion 11 is located when viewed from the second tip portion 12 along the Z direction is defined as upward, and the direction in which the second tip portion 12 is located when viewed from the first tip portion 11 is defined as downward.

[0012] The first tip portion 11 of the probe 10 includes a first portion 11A and a second portion 11B that are arranged axially in order without being fixed to each other and in an electrically connected state. The second portion 11B is connected to the main body portion 100. As will be described later, the first portion 11A and the second portion 11B are combined such that they can change between a state where the central axes of the first portion 11A and the second portion 11B coincide and a state where they intersect obliquely. In other words, the first portion 11A and the second portion 11B are configured such that the angle at which the second portion 11B is connected to the first portion 11A can freely change. In the state shown in FIG. 1, the central axes of the first portion 11A and the second portion 11B coincide. Hereinafter, a state where the central axes of the first portion 11A and the second portion 11B coincide is referred to as a "coincident state". A state where the central axes of the first portion 11A and the second portion 11B intersect obliquely is referred to as an "intersecting state".

[0013] A concave portion 101 is formed on the surface of the first portion 11A facing the second portion 11B. A convex portion 102 that is inserted into the inside of the concave portion 101 is formed on the surface of the second portion 11B facing the first portion 11A. In the probe 10, the concave portion 101 and the convex portion 102 extend in the Y direction. Hereinafter, the region where the concave portion 101 and the convex portion 102 face each other is referred to as a "contact region". The position of the contact region is set around the central axis of the probe 10 so as not to reach the outer edge portion of the probe 10.

[0014] FIG. 2 shows a cross section parallel to the XZ plane of the contact region. FIG. 3 shows a cross section parallel to the YZ plane of the contact region. FIG. 2 is a cross-sectional view taken along the II-II direction of FIG. 3. FIG. 3 is a cross-sectional view taken along the III-III direction of FIG. 2. The convex portion 102 shown in FIGS. 2 and 3 is semi-cylindrical and extends in the Y direction, and a cut surface parallel to the axial direction in the XZ plane is defined by a curved surface and a plane. The curved surface of the convex portion 102 is slidable along the inner wall surface of the concave portion 101. The inner wall surface of the concave portion 101 may be, for example, a curved surface.

[0015] Figure 4 shows a top view of the contact area of ​​the probe 10 as seen from the axial direction. As shown in Figure 4, the end face of the recess 101, shown by the dashed line, does not reach the side surface of the probe 10, shown by the solid line, and neither the recess 101 nor the protrusion 102 is exposed to the side surface of the probe 10.

[0016] As described above, in the probe 10, the surface of the convex portion 102 is slidably mounted along the inner wall surface of the recess 101, and the first portion 11A and the second portion 11B are combined. As shown in Figure 1, in the coincident state, the apex of the convex portion 102 is in contact with the bottom of the recess 101. As a result, the first portion 11A and the second portion 11B are electrically connected.

[0017] On the other hand, in the coincident state, the first part 11A and the second part 11B are not in contact in the area excluding the contact region. In other words, a space is provided between the first part 11A and the second part 11B around the contact region. Since the first part 11A and the second part 11B are not fixed to each other, the surface of the convex part 102 is slidable along the inner wall surface of the recess 101 while a part of the surface of the convex part 102 is in contact with the inner wall surface of the recess 101. For this reason, the second part 11B can be positioned obliquely to the axial direction with respect to the first part 11A. In other words, the first part 11A and the second part 11B are configured such that an intersection state is possible in which the central axis of the first part 11A and the central axis of the second part 11B intersect at an oblique angle.

[0018] When viewed from the direction of the normal to the XZ plane, the surface of the first part 11A facing the second part 11B does not have to be parallel to the surface of the second part 11B facing the first part 11A. For example, as shown in Figure 2, the surface of the second part 11B facing the first part 11A is parallel to the XY plane, whereas the surface of the first part 11A facing the second part 11B does not have to be parallel to the XY plane. In the example shown in Figure 2, the first part 11A gradually moves away from the second part 11B from the outer edge toward the contact region.

[0019] The behavior of the probe 10 when axial stress is applied is shown below. In inspecting an object, it is necessary to push the probe 10 toward the object in order to generate overdrive. At this time, axial stress is applied to the probe 10, and the main body 100, which has a spring structure, is prone to buckling, especially if the probe 10 does not have a symmetrical structure when viewed from the axial direction.

[0020] Figure 5 shows the main body 100 of the probe 10 curved in the Y direction. When the main body 100 curves in the Y direction, the second portion 11B, which is closer to the main body 100, moves in the curved direction relative to the first portion 11A. At this time, as shown in Figure 6, around the contact area, the first portion 11A and the second portion 11B come into contact on the curved side of the main body 100, while the gap between the first portion 11A and the second portion 11B widens on the opposite side. As a result, a load is applied in the direction of the curve of the main body 100. This corrects the curvature of the probe 10.

[0021] Figure 7 shows a top view of the contact area as seen from the axial direction when the probe 10 is curved in the Y direction. The convex portion 102 of the second portion 11B, which has moved in the Y direction, contacts the inner wall surface of the recess 101 of the first portion 11A, and the movement of the convex portion 102 in the Y direction is restricted by the recess 101. Since the end face of the recess 101, shown by the dashed line, does not reach the side surface of the probe 10, shown by the solid line, the end face of the recess 101 acts as a stopper for the movement of the convex portion 102 in the Y direction, preventing the second portion 11B from coming off the first portion 11A.

[0022] Figure 8 shows the main body 100 of the probe 10 curved in the X direction. When the main body 100 curves in the X direction, the second portion 11B tilts relative to the first portion 11A. That is, as shown in Figure 9 which shows a cross-section of the contact area, the first portion 11A and the second portion 11B come into contact on the curved side of the main body 100 around the contact area, while the distance between the first portion 11A and the second portion 11B widens on the opposite side. As a result, a load is applied in the direction of the curve of the main body 100. This corrects the curvature of the probe 10.

[0023] As described above, in the probe 10 according to this embodiment, the first portion 11A and the second portion 11B of the first tip portion 11 are combined in a way that allows them to change between a coincident state and an intersecting state. Therefore, when the main body portion 100 of the probe 10 is bent, the second portion 11B tilts relative to the first portion 11A, thereby correcting the curvature of the probe 10. The structure in which the second portion 11B, and the main body portion 100 and the second tip portion 12 connected to the second portion 11B, tilt relative to the first portion 11A will also be referred to as the "swivel structure" below. Correcting curvature by this swivel structure is particularly effective for the probe 10, whose spring portion is prone to buckling because it is not a symmetrical structure when viewed from the axial direction.

[0024] The following describes an embodiment in which a swivel structure is applied to a probe 10 that is not symmetrical when viewed from the axial direction. The probe 10 shown in Figure 10 has a configuration in which a main body 100 having a spring structure that expands and contracts in the axial direction is positioned between a first tip portion 11 and a second tip portion 12. The first tip portion 11 of the probe 10 shown in Figure 10 is provided with a contact area in which a recess 101 and a convex portion 102 face each other.

[0025] The main body 100 of the probe 10 shown in Figure 10 includes a spring unit 110, as shown in Figure 11, which includes a first spring component 111, a second spring component 112, a third spring component 113, a fourth spring component 114, and a connecting spring component 115. The spring unit 110 is configured by sequentially connecting the beam-shaped first spring component 111, second spring component 112, third spring component 113, fourth spring component 114, and connecting spring component 115. In the following, unless limited, the first spring component 111, second spring component 112, third spring component 113, fourth spring component 114, and connecting spring component 115 will be referred to as "spring component". The spring component is electrically conductive. Metal materials may be used for the spring component. For example, nickel (Ni), nickel alloys, palladium (Pd), palladium alloys, rhodium (Rh), rhodium alloys, tungsten (W), etc., may be used for spring components.

[0026] The configuration of the spring unit 110 is described below in detail. In the following description, the first direction and the second direction are directions that intersect the X direction obliquely in the XZ plane and extend obliquely with respect to the axial direction from top to bottom. For example, the first direction is the direction from the upper right to the lower left when projected onto the XZ plane. The second direction is the direction from the upper left to the lower right when projected onto the XZ plane. The third direction is the direction parallel to the Y direction. In each of the first spring component 111, the second spring component 112, the third spring component 113, and the fourth spring component 114, the first end is the upper end of the beam and the end closest to the first tip 11. The second end is the lower end of the beam and the end closest to the second tip 12.

[0027] The first spring component 111 extends in a first direction that intersects the axial direction at an angle. The second spring component 112 has its first end connected to the second end of the first spring component 111 and extends in a second direction that intersects both the axial direction and the first direction at an angle. The third spring component 113 has its first end connected to the second end of the second spring component 112 and extends in a first direction. The fourth spring component 114 has its first end connected to the second end of the third spring component 113 and extends in a second direction. The first spring component 111, the second spring component 112, the third spring component 113, and the fourth spring component 114 are stacked in a third direction. In this way, the first spring component 111, the second spring component 112, the third spring component 113, and the fourth spring component 114 are connected in a zigzag pattern along the axial direction.

[0028] The connecting spring component 115 has its first end connected to the second end of the fourth spring component 114 and extends in a third direction. Multiple spring units 110 are arranged sequentially along the axial direction, and the connecting spring component 115 connects two adjacent spring units 110 to each other. That is, the second end of the connecting spring component 115 of one adjacent spring unit 110 connects to the first end of the first spring component 111 of the other spring unit 110.

[0029] The second end of the connecting spring component 115 and the first end of the first spring component 111 are connected by a first joining member 131. The first end of the connecting spring component 115 and the second end of the fourth spring component 114 are connected by a second joining member 132. The first joining member 131 and the second joining member 132 are films for diffusion bonding by vapor deposition, such as gold (Au).

[0030] In the spring unit 110, the path from the first end of the first spring component 111 to the second end of the connecting spring component 115 functions as a continuous current path. By connecting the second end of the connecting spring component 115 of one adjacent spring unit 110 to the first end of the first spring component 111 of the other spring unit 110, the current paths of the multiple spring units 110 constituting the main body 100 become continuous. The spring unit 110 closest to the first tip portion 11 is electrically connected to the first tip portion 11. The spring unit 110 closest to the second tip portion 12 is electrically connected to the second tip portion 12. This constitutes a current path from the first tip portion 11 to the second tip portion 12.

[0031] In the probe 10, the ends of each beam-shaped spring component are connected in sequence, so the spring unit 110 has elasticity in the axial direction. The probe 10 has elasticity in the axial direction because the main body 100 is constructed by connecting a plurality of spring units 110 in the axial direction.

[0032] As shown in Figure 12, the probe 10 is rectangular in shape and has four sides when viewed from the axial direction. Any method can be used for connecting the first spring component 111 to the second spring component 112, the second spring component 112 to the third spring component 113, and the third spring component 113 to the fourth spring component 114.

[0033] For example, the probe 10 may include a first connecting component 121 connecting a first spring component 111 and a second spring component 112, a second connecting component 122 connecting a second spring component 112 and a third spring component 113, and a third connecting component 123 connecting a third spring component 113 and a fourth spring component 114. The first connecting component 121 connects the second end of the first spring component 111 to the first end of the second spring component 112. The second connecting component 122 connects the second end of the second spring component 112 to the first end of the third spring component 113. The third connecting component 123 connects the second end of the third spring component 113 to the first end of the fourth spring component 114. In the following, unless limited, the first connecting component 121, the second connecting component 122, and the third connecting component 123 will be referred to as "connecting component". The connecting components are electrically conductive.

[0034] As will be described later, the probe 10 may be constructed by stacking multiple substrates, each containing a spring component and a connecting component. In this case, each of the spring component and the connecting component may have a flat, axially extending portion that constitutes a first tip 11 and a second tip 12. In other words, the flat portions at both ends of the spring component and the connecting component may be stacked to form the first tip 11 and the second tip 12.

[0035] In the probe 10 shown in Figure 10, the second spring component 112 and the third spring component 113 are housed in the region sandwiched between the first spring component 111 and the fourth spring component 114. The first spring component 111 and the fourth spring component 114 are connected to the connecting spring component 115 in the portions that extend outward from the second spring component 112 and the third spring component 113. Therefore, in the XZ plane, the lengths of the first spring component 111 and the fourth spring component 114 are set to be longer than the lengths of the second spring component 112 and the third spring component 113.

[0036] As shown in Figure 10, the probe 10 is not symmetrical when viewed from the axial direction. Therefore, the main body 100 is prone to buckling when axial stress is applied to the probe 10. However, the swivel structure, in which the second part 11B is tilted relative to the first part 11A, can correct the curvature of the probe 10.

[0037] The probe 10 may be constructed by laminating multiple substrates, each containing, for example, a first spring component 111, a second spring component 112, a third spring component 113, and a fourth spring component 114. The thickness of the connecting component may be, for example, about 1 μm. The connecting component may be a thin film for diffusion bonding or a conductive adhesive. Alternatively, a substrate may be used for the connecting component, similar to the spring component. That is, the spring component and the connecting component may be plate-shaped components, and the spring component and the connecting component may be laminated alternately.

[0038] The following describes an example of a manufacturing method for constructing the probe 10 by stacking multiple substrates, each containing a spring component and a connecting component.

[0039] First, prepare the multiple substrates shown in Figure 13. Specifically, prepare the first spring substrate 1110, the connecting substrate 1150, the first connection substrate 1210, the second spring substrate 1120, the second connection substrate 1220, the third spring substrate 1130, the third connection substrate 1230, and the fourth spring substrate 1140.

[0040] The first spring substrate 1110 includes a configuration in which a plurality of first spring components 111 are arranged along the axial direction. The connecting substrate 1150 includes a configuration in which a plurality of connecting spring components 115 are arranged along the axial direction. The first connecting substrate 1210 includes a configuration in which a plurality of first connecting components 121 are arranged along the axial direction. The second spring substrate 1120 includes a configuration in which a plurality of second spring components 112 are arranged along the axial direction. The second connecting substrate 1220 includes a configuration in which a plurality of second connecting components 122 are arranged along the axial direction. The third spring substrate 1130 includes a configuration in which a plurality of third spring components 113 are arranged along the axial direction. The third connecting substrate 1230 includes a configuration in which a plurality of third connecting components 123 are arranged along the axial direction. The fourth spring substrate 1140 includes a configuration in which a plurality of fourth spring components 114 are arranged along the axial direction. The first spring substrate 1110, the first connecting substrate 1210, the second spring substrate 1120, the second connecting substrate 1220, the third spring substrate 1130, the third connecting substrate 1230, and the fourth spring substrate 1140 include flat plate-shaped portions that constitute the first tip portion 11 and the second tip portion 12.

[0041] Figure 14 shows an enlarged view including the contact areas of the first spring substrate 1110, the first connecting substrate 1210, the second spring substrate 1120, the second connecting substrate 1220, the third spring substrate 1130, the third connecting substrate 1230, and the fourth spring substrate 1140. Figure 14 includes the mutually opposing surfaces of the first portion 11A and the second portion 11B.

[0042] As shown in Figure 14, the surfaces of the first spring substrate 1110 and the fourth spring substrate 1140 are flat on the mutually opposing surfaces of the first portion 11A and the second portion 11B. A portion of the recess 101 extending in the third direction is formed on the surface of the first portion 11A of the second spring substrate 1120 and the third spring substrate 1130. A portion of the convex portion 102 extending in the third direction is formed on the surface of the second portion 11B of the second spring substrate 1120 and the third spring substrate 1130. A portion of the recess 101 is formed on the surface of the first portion 11A of the first connecting substrate 1210, the second connecting substrate 1220, and the third connecting substrate 1230, respectively. A portion of the convex portion 102 is formed on the surface of the second portion 11B of the second connecting substrate 1220.

[0043] In the manufacturing of the probe 10, first, as shown in Figure 15, the connecting substrate 1150 is laminated onto the first spring substrate 1110, and the second end of the connecting spring component 115 and the first end of the first spring component 111 are connected by the first joining member 131.

[0044] Next, as shown in Figure 16, the first connecting board 1210 and the second spring board 1120 are stacked sequentially on the first spring board 1110, and the second end of the first spring component 111 and the first end of the second spring component 112 are connected by the first connecting component 121. Furthermore, as shown in Figure 17, the second connecting board 1220 and the third spring board 1130 are stacked sequentially on the second spring board 1120, and the second end of the second spring component 112 and the first end of the third spring component 113 are connected by the second connecting component 122.

[0045] Subsequently, as shown in Figure 18, the third connecting substrate 1230 and the fourth spring substrate 1140 are stacked sequentially on the third spring substrate 1130, and the second end of the third spring component 113 and the first end of the fourth spring component 114 are connected by the third connecting component 123. In addition, the first end of the connecting spring component 115 and the second end of the fourth spring component 114 are connected by the second joining member 132.

[0046] As a result, the probe 10 shown in Figure 10 is completed. The completed probe 10 has a configuration in which the first spring component 111, the first connecting component 121, the second spring component 112, the second connecting component 122, the third spring component 113, the third connecting component 123, and the fourth spring component 114 are stacked in the third direction when viewed from the axial direction.

[0047] In probe 10, the surfaces of the first spring substrate 1110 and the fourth spring substrate 1140 are flat on the mutually opposing surfaces of the first portion 11A and the second portion 11B, and neither recesses 101 nor protrusions 102 are formed. On the other hand, on the surface of the first portion 11A facing the second portion, recesses 101 extending in a third direction are formed on the surfaces of the first connecting substrate 1210, the second spring substrate 1120, the second connecting substrate 1220, the third spring substrate 1130, and the third connecting substrate 1230. In other words, on the surface of the first portion 11A facing the second portion 11B, recesses 101 extending in a third direction are formed from the surface of the first connecting substrate 1210 to the surface of the third connecting substrate 1230. Furthermore, on the surface of the second portion 11B facing the first portion 11A, a protrusion 102 extending in a third direction is formed on the surfaces of the second spring substrate 1120, the second connecting substrate 1220, and the third spring substrate 1130. In other words, on the surface of the second portion 11B facing the first portion 11A, a protrusion 102 extending in a third direction is formed from the surface of the second spring substrate 1120 to the surface of the third spring substrate 1130.

[0048] As described above, the first connecting substrate 1210 and the third connecting substrate 1230 have recesses 101, but no protrusions 102. Therefore, the second portion 11B can slide relative to the first portion 11A in the Y direction by the thickness of the first connecting substrate 1210 and the third connecting substrate 1230. Since the first spring substrate 1110 and the fourth spring substrate 1140 do not have recesses 101, the first spring substrate 1110 and the fourth spring substrate 1140 function as stoppers against sliding in the Y direction.

[0049] According to the method for manufacturing the probe 10 described above, a probe 10 can be manufactured in which the first part 11A and the second part 11B of the first tip 11 are combined in a way that allows them to change between a coincident state and an intersecting state. With the probe 10, if the main body 100 is bent, the curvature of the probe 10 can be corrected by a swivel structure in which the second part 11B tilts relative to the first part 11A.

[0050] Furthermore, if a thin film or conductive adhesive for diffusion bonding is used as a connecting component, the probe 10 may be manufactured as follows.

[0051] A connecting board 1150 is laminated onto the first spring board 1110, and the second end of the connecting spring component 115 and the first end of the first spring component 111 are connected by the first joining member 131. Next, a second spring board 1120 is laminated onto the first spring board 1110, and the second end of the first spring component 111 and the first end of the second spring component 112 are connected by the first connecting component 121. Furthermore, a third spring board 1130 is laminated onto the second spring board 1120, and the second end of the second spring component 112 and the first end of the third spring component 113 are connected by the second connecting component 122. Then, a fourth spring board 1140 is laminated onto the third spring board 1130, and the second end of the third spring component 113 and the first end of the fourth spring component 114 are connected by the third connecting component 123. In addition, the second end of the fourth spring component 114 and the first end of the connecting spring component 115 are connected by the second joining member 132. The second portion 11B is slidable relative to the first portion 11A in the Y direction by the thickness of the first connecting component 121 and the third connecting component 123.

[0052] The probe 10 is used in an electrical connection device 1, for example, as shown in Figure 19. The probe 10 is held in a holding part 20, which has an insertion hole into which the probe 10 is inserted. The probe 10 is inserted into the insertion hole of the holding part 20 from either the first tip 11 or the second tip 12. For example, the first tip 11 is inserted into the insertion hole of the holding part 20. A conductive terminal land 21 is located at the bottom of the insertion hole of the holding part 20, and the end face of the tip of the probe 10 is electrically connected to the land 21. The holding part 20 includes an external terminal 22 that is electrically connected to the land 21 via an internal circuit (not shown). The external terminal 22 is electrically connected to a testing device such as an IC tester (not shown).

[0053] The tip of the probe 10 may be joined to the land 21 to constitute the electrical connection device 1. The method and material for joining the probe 10 to the land 21 can be arbitrarily selected. For example, the end face of the tip of the probe 10 may be joined to the land 21 by soldering.

[0054] The holding portion 20 may be, for example, an integrally molded space transformer. Because the holding portion 20 is a space transformer, the spacing between the external terminals 22 can be increased beyond the arrangement pitch of the probes 10. This facilitates the connection between the electrical connection device 1 and the inspection device.

[0055] In the inspection of the object to be inspected 2 using the electrical connection device 1, when the first tip 11 is inserted into the insertion hole of the holding part 20, the second tip 12 of the probe 10 comes into contact with the electrode pad (not shown) of the object to be inspected 2. The inspection of the object to be inspected 2 is performed by the propagation of electrical signals between the object to be inspected 2 and the inspection device via the probe 10 and the holding part 20.

[0056] Because the main body 100 of the probe 10 has a spring structure, when the other end of the probe 10, with one end connected to the land 21, is brought into contact with the object to be inspected 2, the probe 10 can undergo elastic deformation along its axial direction. Therefore, after the probe 10 is brought into contact with the object to be inspected 2, an overdrive can be generated to press the probe 10 against the object to be inspected 2. This overdrive ensures an electrical connection between the probe 10 and the object to be inspected 2.

[0057] As described above, the probe 10 has a swivel structure in which the first part 11A and the second part 11B of the first tip 11 can change between a coincident state and a crossed state, thereby correcting the curvature of the probe 10. For this reason, the electrical connection device 1 including the probe 10 can inspect the electrical characteristics of the object to be inspected 2 while suppressing buckling of the main body 100 of the probe 10.

[0058] After the inspection of object 2 is complete, the probe 10 is removed from object 2. The probe 10, whose main body 100 has a spring structure, returns to its original shape after being removed from object 2.

[0059] In Figure 19, the probes 10 are shown being held in a single row in the holding section 20, but the arrangement of the probes 10 in the holding section 20 is arbitrary. For example, multiple probes 10 may be arranged in a matrix when viewed from the axial direction. Since the probes 10 are held linearly along the axial direction, the arrangement density of the probes 10 can be increased.

[0060] Furthermore, the depth of the insertion hole in the holding part 20 into which the probe 10 is inserted can be set arbitrarily. For example, by making the insertion hole deeper, it is possible to prevent the probe 10 from being held at an angle in the holding part 20. This prevents misalignment of the first tip portion 11 relative to the electrode pad of the object to be inspected 2.

[0061] In the above example, the case in which the first tip 11 of the probe 10 is connected to the land 21 and the second tip 12 is brought into contact with the object to be inspected 2 was described. However, the second tip 12 may be connected to the land 21 and the first tip 11 may be brought into contact with the object to be inspected 2.

[0062] (Other embodiments) Although the present invention has been described above by embodiments, the descriptions and drawings that constitute part of this disclosure should not be understood as limiting the invention. Various alternative embodiments, examples, and operational techniques will become apparent to those skilled in the art from this disclosure.

[0063] For example, the above description explains a case where a recess 101 is formed in the first portion 11A near the end of the probe 10 and a protrusion 102 is formed in the second portion 11B near the main body 100. However, it is also possible to form a protrusion 102 in the first portion 11A and a recess 101 in the second portion 11B.

[0064] Furthermore, when viewed from a direction perpendicular to the axial direction, the beam of the spring component may not be straight but may include curved sections. For example, the direction of travel of the beam of the spring component may change along its course. By including curved sections rather than being a simple straight line, the load applied to the probe 10 is more easily transmitted in the axial direction, and buckling of the probe 10 by bending from its central axis when an axial compressive force is applied to the probe 10 can be suppressed.

[0065] Furthermore, the electrical connection device 1 may be configured such that the second tip portion 12 of the probe 10 and the land 21 can be freely separated or brought into contact. Because the second tip portion 12 is not joined to the land 21, the probe 10 can be easily replaced, for example, if a malfunction occurs in the probe 10.

[0066] Thus, the present invention naturally includes various embodiments not described above. [Explanation of Symbols]

[0067] 10 probes 11 First tip 11A Part 1 11B 2nd part 12 Second tip 100 Main body 101 Recess 102 Convex part 110 Spring Unit 111 First spring component 112 Second spring part 113 Third spring component 114. Fourth spring component 115 Connecting spring parts 121 First connecting part 122 Second connecting part 123 Third connecting part 131 First Joining Member 132 Second Joining Member 1110 First spring substrate 1120 Second spring substrate 1130 Third spring substrate 1140 Fourth spring substrate 1150 Linked substrate 1210 First connection board 1220 Second connection board 1230 Third connection board

Claims

1. A columnar probe extending in the axial direction, used for testing the electrical properties of an object under inspection, The main body has a spring structure that expands and contracts in the axial direction, The tip portion connected to one end of the main body, Equipped with, The tip portion includes a first portion and a second portion that are arranged sequentially in the axial direction without being fixed to each other and electrically connected, The first and second parts are combined in such a way that they can be changed between a state where the central axis of the first part and the central axis of the second part coincide and a state where they intersect at an angle. probe.

2. A recess is formed on the surface of the first portion facing the second portion. A protrusion is formed on the surface of the second portion facing the first portion, which is inserted into the interior of the recess. The surface of the protrusion is slidably positioned along the inner wall surface of the recess, and the first and second portions are combined in such a manner. When the central axis of the first part and the central axis of the second part coincide, the first part and the second part do not come into contact in the region excluding the convex and concave portions. The probe according to claim 1.

3. The aforementioned protrusion is semi-cylindrical in shape, with a cross-section parallel to the axial direction defined by a curved surface and a flat surface. The curved surface of the protrusion is slidable along the inner wall surface of the recess. The probe according to claim 2.

4. The main body portion is A beam-shaped first spring component extending in a first direction that intersects the axial direction at an angle, A beam-shaped second spring component, the first end of which is connected to the second end of the first spring component, and the beam-shaped second spring component extending in a second direction that intersects obliquely with both the axial direction and the first direction, A beam-shaped third spring component, the first end of which is connected to the second end of the second spring component and extending in the first direction, A beam-shaped fourth spring component, the first end of which is connected to the second end of the third spring component and extending in the second direction, A beam-shaped connecting spring component extending in a third direction, in which the first end is connected to the second end of the fourth spring component, and the first spring component, the second spring component, the third spring component, and the fourth spring component are stacked in this order, A spring unit including Multiple spring units are arranged sequentially along the axial direction. The connecting spring component connects two adjacent spring units, such that the second end of the connecting spring component of one adjacent spring unit connects to the first end of the first spring component of the other spring unit. The probe according to claim 2 or 3.

5. The aforementioned tip portion A first spring substrate in which a plurality of the first spring components are arranged in the axial direction, A second spring substrate on which a plurality of the second spring components are arranged in the axial direction, A third spring substrate on which a plurality of the third spring components are arranged in the axial direction, A fourth spring substrate on which a plurality of the fourth spring components are arranged in the axial direction, The configuration has the elements arranged along the third direction, On the mutually opposing surfaces of the first portion and the second portion, the surfaces of the first spring substrate and the fourth spring substrate are flat. On the surface of the first portion facing the second portion, the recess extending in the third direction is formed on the surfaces of the second spring substrate and the third spring substrate. On the surface of the second portion facing the first portion, the protrusions extending in the third direction are formed on the surfaces of the second spring substrate and the third spring substrate. The probe according to claim 4.

6. A first connecting substrate having a plurality of first connecting components arranged along the axial direction, which connect the second end of the first spring component to the first end of the second spring component, A second connecting substrate having a plurality of second connecting components arranged along the axial direction, which connect the second end of the second spring component and the first end of the third spring component, A third connecting substrate having multiple third connecting components arranged along the axial direction, each connecting the second end of the third spring component to the first end of the fourth spring component, Furthermore, The first spring substrate, the first connecting substrate, the second spring substrate, the second connecting substrate, the third spring substrate, the third connecting substrate, and the fourth spring substrate are stacked in the third direction. On the surface of the first portion facing the second portion, the recess is formed that extends in the third direction from the surface of the first connecting substrate to the surface of the third connecting substrate. On the surface of the second portion facing the first portion, the protrusion is formed that extends in the third direction from the surface of the second spring substrate to the surface of the third spring substrate. The probe according to claim 5.

7. The probe according to claim 4, wherein the lengths of the first spring component and the fourth spring component are longer than the lengths of the second spring component and the third spring component.

8. The probe according to claim 1, wherein it is rectangular in shape and has four sides when viewed from the axial direction.

9. A method for manufacturing a probe according to claim 4, Prepare a first spring substrate on which a plurality of the first spring components are arranged along the axial direction, a second spring substrate on which a plurality of the second spring components are arranged along the axial direction, a third spring substrate on which a plurality of the third spring components are arranged along the axial direction, a fourth spring substrate on which a plurality of the fourth spring components are arranged along the axial direction, and a connecting substrate on which a plurality of the connecting spring components are arranged along the axial direction. The connecting substrate is laminated onto the first spring substrate to connect the second end of the connecting spring component to the first end of the first spring component. The second spring substrate is laminated onto the first spring substrate, and the second end of the first spring component is connected to the first end of the second spring component. The third spring substrate is laminated onto the second spring substrate, and the second end of the second spring component and the first end of the third spring component are connected. The fourth spring substrate is laminated onto the third spring substrate, the second end of the third spring component is connected to the first end of the fourth spring component, and the second end of the fourth spring component is connected to the first end of the connecting spring component. Includes, On the mutually opposing surfaces of the first portion and the second portion, the surfaces of the first spring substrate and the fourth spring substrate are flat. On the surface of the first portion facing the second portion, the recess extending in the third direction is formed on the surfaces of the second spring substrate and the third spring substrate. On the surface of the second portion facing the first portion, the protrusions extending in the third direction are formed on the surfaces of the second spring substrate and the third spring substrate. A method for manufacturing probes.

10. A first connecting substrate, on which a plurality of first connecting components connecting the second end of the first spring component and the first end of the second spring component are arranged along the axial direction, is placed between the first spring substrate and the second spring substrate. A second connecting substrate, on which a plurality of second connecting components connecting the second end of the second spring component and the first end of the third spring component are arranged along the axial direction, is placed between the second spring substrate and the third spring substrate. A third connecting substrate, on which a plurality of third connecting components connecting the second end of the third spring component and the first end of the fourth spring component are arranged along the axial direction, is placed between the third spring substrate and the fourth spring substrate. It further includes, On the surface of the first portion facing the second portion, the recess is formed on the surface of the first connecting substrate, the second connecting substrate, and the third connecting substrate. On the surface of the second portion facing the first portion, the protrusion is formed on the surface of the second connecting substrate. A method for manufacturing a probe according to claim 9.

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