Excimer lamp

Abstract

The present invention provides an excimer lamp that suppresses problems in the electrical conductivity between electrodes arranged on the tube wall of the discharge tube and a power supply member that applies voltage to said electrodes. [Solution] The excimer lamp comprises a discharge tube made of a dielectric material and extending in a first direction; a light-emitting gas sealed in the discharge tube; a base made of a conductive material having a socket that is recessed in the first direction and into which one end of the discharge tube relating to the first direction is inserted; a first electrode disposed on the tube wall of the discharge tube, with at least a portion of it located within the socket; a second electrode disposed on the tube wall of the discharge tube, spaced apart from the first electrode; and an elastic member made of a conductive material disposed on the inner wall surface of the socket, in contact with the first electrode, and elastically deformable in a second direction parallel to a plane perpendicular to the first direction, wherein the elastic member is disposed in an area of ​​more than half of the inner wall surface of the socket with respect to the outer circumference of the discharge tube.

Description

Technical Field

[0001] The present invention relates to an excimer lamp.

Background Art

[0002] Conventionally, a discharge lamp that obtains ultraviolet light by excimer emission is known. In such a discharge lamp, a luminescent gas that forms excimer molecules by discharge is enclosed in a light-emitting tube made of a dielectric. Then, for example, a high-frequency voltage is applied to a pair of electrodes arranged on the inner wall of the light-emitting tube, and discharge occurs in the light-emitting tube, so that the atoms of the luminescent gas are excited to an excimer state. Ultraviolet light is obtained when this atom transitions to the ground state.

[0003] For example, Patent Document 1 below discloses a lamp that obtains visible light by irradiating phosphor coated on the inner surface of a light-emitting tube with ultraviolet light generated in the light-emitting tube. Such a lamp is used, for example, for original illumination of OA equipment or backlighting of liquid crystal displays.

[0004] In addition, a lamp that does not have a phosphor and emits ultraviolet light from a light-emitting tube is used in the manufacturing process of semiconductors and liquid crystal panels, or for generating ozone for air purification.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] Note: The patent number in the original text is incomplete. I have left it as "特許第3509551号公報" in the translation. If you can provide the complete patent number, I can make the translation more accurate. Also, the 7-digit tags - are preserved as they are.As shown in Patent Document 1 above, a method is known in which electrodes placed on the wall of a discharge tube are electrically connected to a power supply member using a conductive paste in order to apply a voltage to the electrodes. However, the present inventors have noticed that in the conventional method of electrical connection via a conductive paste, problems tend to occur in the electrical connection between the electrodes placed on the wall of the discharge tube and the power supply member that applies voltage to the electrodes.

[0007] In view of the above circumstances, the present invention aims to provide an excimer lamp that suppresses problems in the conductivity between an electrode arranged on the wall of a discharge tube and a power supply member that applies voltage to the electrode. [Means for solving the problem]

[0008] The excimer lamp according to the present invention is A light-emitting tube made of a dielectric material and extending in the first direction, The light-emitting gas sealed in the aforementioned light-emitting tube, A base made of a conductive material, having a recess in the first direction and an insertion opening into which one end of the light-emitting tube relating to the first direction is inserted, A first electrode is positioned on the wall of the light-emitting tube, and at least a portion of it is located inside the insertion opening, A second electrode is positioned on the tube wall of the light-emitting tube, spaced apart from the first electrode, The outlet comprises an elastic member made of a conductive material, which is positioned on the inner wall surface of the outlet, contacts the first electrode, and is elastically deformable in a second direction parallel to a plane perpendicular to the first direction, The elastic member is characterized in that it is arranged in an area of ​​more than half of the inner wall surface of the insertion opening with respect to the outer circumference of the light-emitting tube.

[0009] First, the inventors considered a so-called double-tube structure excimer lamp having a discharge tube including an outer tube and an inner tube, in which the discharge tube is inserted into a base made of a conductive material, and the base and the first electrode placed on the outer wall surface of the outer tube are electrically connected by a conductive paste. In other words, the base corresponds to a power supply member for the first electrode, and the conductive paste is placed between the base and the discharge tube inserted into the base.

[0010] However, since the conductive paste is placed between the discharge tube and the base in a fluid state, it is difficult to uniformly distribute the conductive paste around the discharge tube. The inventors noticed that in the conductive paste method, air gaps tend to form between the discharge tube and the base, leading to the following problems.

[0011] Even if there is an air gap between the discharge tube and the base, the excimer lamp will not immediately fail to light up as long as there is electrical conductivity between the first electrode and the base. However, if there is an air gap between the discharge tube and the base, the conductive paste will expand due to the heat generated by the ignition of the excimer lamp, making it easier for the electrical connection between the first electrode and the base to become localized.

[0012] More specifically, if a gap exists between the discharge tube and the base, the conductive paste, when heated to a high temperature, deforms in a direction that separates the discharge tube and the base, i.e., in a direction different from the thickness direction of the discharge tube. As a result, the conductive paste becomes thinner in the thickness direction of the discharge tube, reducing the area in contact between the conductive paste and the first electrode, or between the conductive paste and the base, and causing the conductive path between the first electrode and the base to become localized.

[0013] When the conductive path between the first electrode and the base is localized, a high voltage is locally applied to the conductive paste and the first electrode when the excimer lamp is lit, causing the conductive paste and the first electrode to wear out easily. In other words, using a conductive paste as a conductive method makes it easier for problems to occur in the conductivity between the base and the first electrode. If problems occur in the conductivity between the base and the first electrode, maintenance or replacement of the excimer lamp becomes necessary. Although the above example describes an excimer lamp with a double-tube structure, the above problem is not limited to cases where the excimer lamp has a double-tube structure.

[0014] Furthermore, because the above problems depend on the condition of the conductive paste placed between the discharge tube and the base, it is difficult to predict when maintenance will be needed, which can lead to the management of excimer lamps becoming complicated.

[0015] To address the above problems, the excimer lamp according to the present invention uses an elastically deformable elastic member to connect the first electrode and the base. As a result, even when the elastic member becomes hot when the excimer lamp is lit, the electrical path between the first electrode and the base does not change. Furthermore, since the elastic member is positioned over more than half of the circumferential area of ​​the inner wall surface of the base, the electrical path between the first electrode and the base is not localized, making it difficult for a high voltage to be applied locally to the first electrode. In other words, the above configuration suppresses the occurrence of problems in the electrical connection between the base and the first electrode.

[0016] Furthermore, regarding the outer circumference of the discharge tube, having the elastic member positioned over more than half of the inner wall surface of the base makes it easier to stabilize the tube axis of the discharge tube within the base when the discharge tube is inserted into the base, which is preferable.

[0017] Furthermore, the above configuration is less likely to cause the problem of different conductive paths between the base and the first electrode for each excimer lamp, compared to conductive paste-based conductivity methods. In other words, the above configuration also has the effect of simplifying the management of equipment equipped with excimer lamps.

[0018] The above excimer lamp is, The inner wall surface of the insertion opening may have a plurality of the elastic members arranged spaced apart in the first direction.

[0019] With the above configuration, the contact area between the elastic member and the first electrode can be easily increased. This more effectively suppresses the application of a high voltage locally to the first electrode. Furthermore, with respect to the first direction, the increased contact area between the elastic member and the first electrode makes it easier to stabilize the light-emitting tube inserted into the base, which is preferable.

[0020] In the above excimer lamp, The elastic member may be arranged substantially around the entire inner wall surface of the insertion port in the outer peripheral direction of the arc tube.

[0021] Details will be described in the section "Mode for Carrying Out the Invention", but "the elastic member is arranged substantially around the entire inner wall surface" may mean that the elastic member is arranged over 90% or more of the inner wall surface in the outer peripheral direction of the arc tube 3.

[0022] The above excimer lamp may have a plurality of the elastic members arranged at intervals in the outer peripheral direction on the inner wall surface of the insertion port.

[0023] Also, the above excimer lamp may have a belt-like member connecting the plurality of the elastic members in the outer peripheral direction.

[0024] According to the above configuration, it becomes easy to arrange a plurality of elastic members in the base.

[0025] In the above excimer lamp, The first electrode is composed of a plurality of wire members, and the elastic member may contact the plurality of wire members constituting the first electrode.

[0026] Also, in the above excimer lamp, an interval in the outer peripheral direction of the plurality of the elastic members may be smaller than an interval in the outer peripheral direction of the plurality of wire members constituting the first electrode.

[0027] According to the above configuration, the area where the first electrode and the elastic member contact can be increased, and it is more strongly suppressed that a high voltage is locally applied to the first electrode.

[0028] In the above excimer lamp, The discharge tube has an outer tube extending in the first direction and an inner tube extending inside the outer tube, and the outer tube and the inner tube are sealed at the ends relating to the first direction. The light-emitting gas is sealed in the light-emitting space sandwiched between the outer tube and the inner tube. The first electrode is an outer electrode that is positioned on the outer wall surface of the outer tube and is composed of a wire member. The second electrode may also be an inner electrode positioned on the inner wall surface of the inner tube.

[0029] As an example, the outer electrode may be mesh-like or striped, and ultraviolet light generated in the light-emitting space is emitted to the outside through the gaps in the wire members that make up the outer electrode. Comparing the case where the outer electrode is made of wire members with the case where the outer electrode is in the shape of a film, it is considered that gaps are more likely to occur between the light-emitting tube and the base when the outer electrode is made of wire members. This is because when the outer electrode is made of wire members, irregularities are formed around the light-emitting tube by the wire members, making it more difficult for the conductive paste to penetrate uniformly around the light-emitting tube. However, with the above configuration, since the first electrode and the base are connected by an elastically deformable elastic member, even when the outer electrode is made of wire members, the occurrence of problems in the conductivity between the base and the first electrode can be effectively suppressed.

[0030] In the excimer lamp described above, The base has a through hole that connects the inner bottom surface of the insertion opening and the outer bottom surface located outward with respect to the first direction, A power supply member that passes through the through hole and contacts the inner electrode may also be provided. [Effects of the Invention]

[0031] According to the present invention, an excimer lamp is provided in which problems in the conductivity between an electrode arranged on the tube wall of a discharge tube and a power supply member that applies voltage to the electrode are suppressed. [Brief explanation of the drawing]

[0032] [Figure 1A] This is a cross-sectional view showing an example of the configuration of an excimer lamp according to the present invention. [Figure 1B] Figure 1A is a cross-sectional view of BB. [Figure 2] This is an enlarged view showing in detail the configuration near the base in Figure 1A. [Figure 3] This is a diagram showing the discharge tube and base in a disassembled state. [Figure 4] This is a diagram showing the view in the +X direction with the base removed from the discharge tube. [Figure 5] This is a perspective view of an elastic member. [Figure 6] This is a plan view showing the elastic member removed from the base. [Figure 7] This diagram schematically illustrates the contact configuration between the outer electrode and the elastic member. [Figure 8] This is a cross-sectional view showing another embodiment of the excimer lamp, following Figure 1A. [Figure 9] This drawing, following Figure 4, shows another embodiment of the excimer lamp. [Figure 10] This drawing, following Figure 4, shows another embodiment of the excimer lamp. [Figure 11A] This drawing, following Figure 2, shows another embodiment of the excimer lamp. [Figure 11B] This is a view of the base shown in Figure 11A, as seen in the X direction. [Figure 12] This is a cross-sectional view showing yet another embodiment of an excimer lamp. [Modes for carrying out the invention]

[0033] Embodiments of the excimer lamp according to the present invention will be described below with reference to the drawings. Note that the following drawings are schematic illustrations, and the dimensional ratios and numbers shown in the drawings do not necessarily correspond to the actual dimensional ratios and numbers.

[0034] [First Embodiment] Figure 1A is a cross-sectional view showing an example of the configuration of an excimer lamp according to the present invention. Figure 1B is a cross-sectional view of BB in Figure 1A. As shown in Figures 1A and 1B, the excimer lamp 1 comprises a discharge tube 3, an inner electrode 5, an outer electrode 7, and bases (9a, 9b) located at both ends of the discharge tube 3 in the axial direction.

[0035] In the following explanation, an XYZ coordinate system is used, where the direction of the tube axis of the discharge tube 3 is defined as the X direction, and the plane perpendicular to the X direction is the YZ plane. Using this definition, Figure 1A corresponds to a cross-sectional view of the excimer lamp 1 cut along the XY plane, and Figure 1B corresponds to a cross-sectional view of the excimer lamp 1 cut along the YZ plane. The X direction corresponds to the "first direction".

[0036] In the following descriptions, for example, when expressing direction and distinguishing between positive and negative directions, the signs will be added, such as "+X direction" and "-X direction". When expressing direction without distinguishing between positive and negative directions, it will simply be written as "X direction". In other words, in this specification, when simply written as "X direction", both "+X direction" and "-X direction" are included. The same applies to the Y direction and Z direction.

[0037] As shown in Figures 1A and 1B, the discharge tube 3 includes an outer tube 11 and an inner tube 12, exhibiting a double-tube structure. The outer tube 11 and inner tube 12 are cylindrical, and the inner tube 12 has an outer diameter smaller than the inner diameter of the outer tube 11. The inner tube 12 is positioned inside the outer tube 11, with the outer tube 11 surrounding the inner tube 12. Typically, the outer tube 11 and inner tube 12 are arranged coaxially. In Figure 1B, the center C1 of the outer tube 11 and inner tube 12 is schematically illustrated.

[0038] Both the outer tube 11 and the inner tube 12 are sealed at their end positions in the X direction, and bases (9a, 9b) are placed at these end positions. A predetermined light-emitting gas is sealed in the space between the outer tube 11 and the inner tube 12 (hereinafter referred to as the "light-emitting space S1") at a pressure of, for example, 10 kPa to 100 kPa.

[0039] The outer tube 11 and the inner tube 12 are, for example, made of a dielectric material such as quartz glass.

[0040] For example, the outer diameter of the outer tube 11 is 15 mm to 45 mm, and the outer diameter of the inner tube 12 is 3 mm to 30 mm. Also, the length of both in the X direction is 70 mm to 3200 mm. As an example, the outer diameter of the outer tube 11 is 40 mm, the outer diameter of the inner tube 12 is 16 mm, and the length of both in the X direction is 1200 mm. Also, as an example, the thickness of the outer tube 11 is 2 mm, and the thickness of the inner tube 12 is 1 mm. In this case, the radial width of the ring-shaped light-emitting space S1 when viewed in the X direction is 11 mm.

[0041] As shown in Figure 1A, the inner electrode 5 is positioned on the inner wall surface of the inner tube 12 on the tube wall of the discharge tube 3. For example, the inner electrode 5 has a film shape and is made of a conductive material such as aluminum, titanium, or stainless steel. The inner electrode 5 may also be made of a plate-shaped member made of a conductive material.

[0042] As shown in Figures 1A and 1B, the outer electrode 7 is positioned on the outer wall surface of the outer tube 11, on the tube wall of the discharge tube 3. The outer electrode 7 is composed of wire members 7a made of a conductive material such as stainless steel, copper, or nickel, and has a mesh shape (see Figure 7, described later).

[0043] The inner electrode 5 and the outer electrode 7 are spaced apart from each other and face each other across the light-emitting space S1. In this embodiment, the outer electrode 7 corresponds to the "first electrode" and the inner electrode 5 corresponds to the "second electrode".

[0044] Figure 2 is an enlarged view showing in detail the configuration near the base 9a as shown in Figure 1A, and Figure 3 is a diagram showing the discharge tube 3 and base 9a in a disassembled state. Figure 4 is a diagram showing the base 9a removed from the discharge tube 3, viewed in the +X direction.

[0045] As shown in Figure 3, the base 9a includes an inner wall surface 31, an outer wall surface 32, an inner bottom surface 33, and an outer bottom surface 34, and has a closed-bottom cylindrical shape with an opening on the side opposite to the bottom surfaces (33, 34). That is, the base 9a has an insertion opening 20 formed by the inner wall surface 31 and the inner bottom surface 33, which is recessed in the X direction. For example, the base 9a is made of a conductive material such as stainless steel, aluminum, or an aluminum alloy. Also, as shown in Figures 2 and 4, the base 9a has a through hole 21 that connects the inner bottom surface 33 and the outer bottom surface 34 in the X direction. A power supply member 52, which will be described later, is placed inside the through hole 21.

[0046] As shown in Figures 3 and 4, a plurality of elastic members 10, 10… are arranged on the inner wall surface 31 of the base 9a. Figures 5 and 6 are schematic diagrams showing the configuration of the elastic members 10. Figure 5 is a perspective view of the elastic member 10, and Figure 6 is a plan view of the elastic member 10 removed from the base 9a. For example, the elastic member 10 is made of a conductive material such as stainless steel, copper, or a copper alloy.

[0047] As shown in Figure 4, the elastic members 10 are arranged continuously along the inner wall surface 31 of the base 9a, that is, with respect to the outer circumference of the light-emitting tube 3. Here, "the elastic members are arranged continuously" may mean that the spacing D1 between adjacent elastic members 10 in the outer circumference is no more than four times the width W1 of the elastic member 10 in the outer circumference (see Figures 5 and 6).

[0048] For example, the spacing D1 of the elastic members 10 is 0.3 mm to 10 mm, and the width W1 is 1.0 mm to 3.0 mm. Also, the length of the elastic members 10 in the X direction is, for example, 3.0 mm to 15 mm.

[0049] Furthermore, as shown in Figures 3 and 5, the elastic member 10 has a base portion 41, a bent portion 42 that is bent to stand upright relative to the base portion 41, and a tip portion 43 that extends from the bent portion 42.

[0050] The base 41 of the elastic member 10 is positioned in contact with the inner wall surface 31 of the base 9a. In other words, the tip 43 of the elastic member 10 is positioned on the light-emitting tube 3 side relative to the base 41. The tip 43 is connected to the base 41 by a bendable portion 42, making it elastically deformable in a direction parallel to the YZ plane, or more specifically, in the radial direction of the light-emitting tube 3. In other words, in this embodiment, this radial direction corresponds to the "second direction".

[0051] When the discharge tube 3 is inserted into the insertion opening 20 of the base 9a, the tip 43 of the elastic member 10 comes into contact with the outer electrode 7 on the discharge tube 3, generating an elastic force directed toward the discharge tube 3 (see also Figure 2). As a result, the outer electrode 7 and the base 9a become electrically connected via the elastic member 10.

[0052] If a conductive paste were used to connect the outer electrode 7 and the base 9a, the heat generated by the excimer lamp would deform the conductive paste, making the electrical connection between the outer electrode 7 and the base 9a more localized. In contrast, by using an elastic member 10 that contacts the outer electrode 7 due to its elastic force to connect the outer electrode 7 and the base 9a, a more stable electrical connection can be achieved between the outer electrode 7 and the base 9a compared to using a conductive paste.

[0053] Furthermore, as shown in Figure 4, the multiple elastic members 10 are arranged in an area of ​​more than half of the inner wall surface 31 of the base 9a with respect to the outer circumference of the discharge tube 3. Therefore, according to this embodiment, the conductive path between the outer electrode 7 and the base 9a is not localized, and the application of a high voltage locally to the outer electrode 7 is suppressed. As a result, even if the excimer lamp 1 is lit for a long time, for example, malfunctions such as the wire member 7a constituting the outer electrode 7 burning out are less likely to occur, and the number of maintenance cycles for the excimer lamp 1, such as replacement of the outer electrode 7, is reduced.

[0054] Here, "the elastic member 10 is positioned in an area of ​​more than half of the inner wall surface 31 with respect to the outer circumference of the discharge tube 3" can be interpreted as meaning that, when viewed in the X direction, the angle θ1 formed by virtually connecting the region A1 in which the elastic member 10 is continuously positioned with the center C1 of the outer tube 11 (see Figure 4) is 180° or more.

[0055] In this embodiment, as shown in Figure 4, the elastic member 10 is arranged around substantially the entire circumference of the inner wall surface 31. That is, the elastic member 10 is arranged over 90% or more of the inner wall surface 31. Specifically, the angle θ1 formed by region A1 is at least 320°.

[0056] From the viewpoint of suppressing the application of a high voltage locally to the outer electrode 7, it is preferable to increase the contact area between the elastic member 10 and the outer electrode 7. In view of this, the region A1 in which the elastic member 10 is arranged is preferably 60% or more of the inner wall surface 31, more preferably 80% or more, and particularly preferably 90% or more. Specifically, the angle θ1 is preferably 210° or more, more preferably 280° or more, and particularly preferably 320° or more.

[0057] Furthermore, in this embodiment, the multiple elastic members 10 are connected by a strip-shaped member 45, as shown in Figures 5 and 6. That is, the bases 41 of the multiple elastic members 10 are each connected to the strip-shaped member 45. When multiple elastic members 10 arranged in a continuous manner are connected by a strip-shaped member 45, the region on the inner wall surface 31 of the base 9a where the strip-shaped member 45 is arranged may also be considered as region A1 where the elastic members 10 are arranged.

[0058] It is optional whether the elastic members 10 are connected by the strip-shaped members 45. The elastic members 10 may also be configured individually.

[0059] From the viewpoint of facilitating the positioning of the elastic member 10, the base 9a may have a groove 36 extending in the outer circumferential direction of the light-emitting tube 3 on its inner wall surface 31, as shown in Figure 3. In Figure 3, an example is shown in which the groove 36 is composed of a plurality of protrusions 38 projecting from the inner wall surface 31. However, the groove 36 may also be recessed from the inner wall surface 31 toward the outer wall surface 32.

[0060] Figure 7 is a schematic diagram illustrating the contact between the outer electrode 7 and the elastic member 10. For ease of illustration, the base 9a is not shown in Figure 7. As shown in Figure 7, in this embodiment, the outer electrode 7 has a mesh-like structure. As an example, the gap L1 in the outer circumference direction of the wire members 7a constituting the outer electrode 7 is 0.5 mm to 5.0 mm.

[0061] When the outer electrode 7 has a mesh-like structure, it is preferable that the elastic member 10 contacts the multiple wire members 7a that constitute the outer electrode 7. This increases the area in contact between the outer electrode 7 and the elastic member 10, thereby suppressing the application of a high voltage locally to the outer electrode 7.

[0062] In view of this, it is preferable that the spacing D1 of the elastic members 10 in the outer circumferential direction is smaller than the gap L1 of the wire members 7a. When the spacing D1 of the elastic members 10 is smaller than the gap L1 of the wire members 7a, it becomes easier to bring the elastic members 10 into contact with multiple wire members 7a, which is preferable.

[0063] In the above explanation, we referred to base 9a located on the +X side, but the same discussion can be applied to the configuration of base 9b located on the -X side. Note that base 9b may be made of a conductive material, similar to base 9a, or it may be made of an insulating material such as ceramic.

[0064] Next, the manner in which the excimer lamp 1 is lit will be described. As shown in Figure 1, the inner electrode 5 and the outer electrode 7 are each connected to a power supply 50. More specifically, the power supply 50 and the base 9a are connected by a power supply member 51, and the outer electrode 7 is connected to the power supply 50 via the base 9a and the elastic member 10. If the base 9b is made of a conductive material similar to the base 9a, the base 9a and the base 9b may be connected by a conductive member (not shown) and be at the same potential.

[0065] The inner electrode 5 is connected to the power supply 50 by a power supply member 52 that passes through a through hole 21 in the base 9a. When a high-frequency AC voltage of, for example, about 10kHz to 100kHz is applied from the power supply 50 between the inner electrode 5 and the outer electrode 7, ultraviolet light is generated in the light-emitting space S1. This ultraviolet light is extracted from the excimer lamp 1 through the gaps between the wire members 7a that constitute the mesh-like outer electrode 7. As an example, the input power is 20W to 2000W, and the input voltage is about 5kV to 15kV.

[0066] However, the method of connecting the inner electrode 5 and the power supply 50 is not limited to this, and it is optional whether or not the base 9a has a through hole 21.

[0067] The wavelength of ultraviolet light emitted by the excimer lamp 1 is determined by the type of luminescent gas sealed in the discharge tube 3. For example, if a luminescent gas containing Xe is sealed in the emission space S1, ultraviolet light with a peak wavelength around 172 nm is obtained. However, the present invention is not limited to the type of luminescent gas sealed in the emission space S1. For example, the excimer lamp 1 may contain Kr and Cl2 as luminescent gases, with a peak wavelength around 222 nm.

[0068] Furthermore, considering that the above-mentioned high voltage is applied between the inner electrode 5 and the outer electrode 7, it is preferable that the outer electrode 7 is connected to the ground side of the power supply 50, and that the inner electrode 5 is at a higher potential in absolute value than the outer electrode 7. This makes it possible to suppress electric shock to operators or other objects outside the excimer lamp 1.

[0069] [Alternative Embodiment] The following describes another embodiment of the excimer lamp 1, focusing on the differences from the first embodiment.

[0070] <1> Figure 8 is a cross-sectional view showing another embodiment of the excimer lamp 1, following Figure 1A. As shown in Figure 8, the excimer lamp 1 according to this embodiment has a plurality of elastic members 10 arranged spaced apart in the X direction on the inner wall surface 31 of the base 9a.

[0071] By arranging multiple elastic members 10 in the X direction, the contact area between the elastic members 10 and the outer electrode 7 increases. This makes it less likely for a high voltage to be applied locally to the outer electrode 7. In addition, the increased contact area between the elastic members 10 and the outer electrode 7 in the X direction makes it easier to stabilize the light-emitting tube 3 inserted into the base 9a.

[0072] From the viewpoint of increasing the contact area between the elastic member 10 and the outer electrode 7, it is preferable that, in Figure 8, both the elastic member 10 located on the +X side and the elastic member 10 located on the -X side are positioned in an area of ​​more than half of the inner wall surface 31 of the base 9a with respect to the outer circumference of the discharge tube 3.

[0073] Figure 8 shows an example in which the elastic members 10 are arranged in two rows in the X direction within the base 9a, but the example is not limited to this. For example, the elastic members 10 may be arranged in three rows in the X direction.

[0074] <2> Figures 9 and 10 are drawings showing another embodiment of the excimer lamp 1, following Figure 4. In the above description, it was explained that a plurality of elastic members 10 are arranged around substantially the entire circumference of the inner wall surface 31 of the base 9a, but the present invention is not limited to this. For example, as shown in Figures 9 and 10, the region A1 on the inner wall surface 31 in which the elastic members 10 are arranged continuously may be divided into multiple regions.

[0075] By dividing region A1 into multiple regions, the elastic force of the elastic member 10 acts on the light-emitting tube 3 from multiple directions. This makes it easier to stabilize the light-emitting tube 3 inserted into multiple bases 9a. In view of this, it is preferable that region A1 be divided into two or more regions, and more preferable that it be divided into three or more regions.

[0076] If region A1 is divided into multiple regions, the angle θ1 formed by virtually connecting region A1 and the center C1 of the outer tube 11 may be the sum of the angles θ1 formed by each region A1. In other words, in the examples of Figures 9 and 10, the sum of the angles θ1 formed by each region A1 in the outer circumferential direction is 180° or more. In other words, in the examples of Figures 9 and 10, the elastic member 10 is positioned in a region of more than half of the inner wall surface 31 of the base 9a with respect to the outer circumferential direction of the light-emitting tube 3, which is the same as in the first embodiment.

[0077] Furthermore, it is preferable to increase the contact area between the elastic member 10 and the outer electrode 7. Specifically, in the examples of Figures 9 and 10, the sum of the angles θ1 in the outer circumference direction is preferably 210° or more, and more preferably 280° or more.

[0078] <3> Figure 11A is a diagram showing a modified example of the excimer lamp 1, following Figure 2. Figure 11B is a diagram of the base 9a in Figure 11A as viewed in the X direction. As shown in Figure 11A, the positions of the multiple elastic members 10 in the X direction may be different. In other words, this embodiment has multiple elastic members 10a arranged at position P1 in the X direction and multiple elastic members 10b arranged at position P2 in the X direction.

[0079] As shown in Figure 11B, the sum of the angle θ1 formed by region A1 where the elastic member 10a is located and the angle θ2 formed by region A2 where the elastic member 10b is located may be 180° or more. In other words, the present invention is not limited to the position of the elastic members (10a, 10b) in the X direction when the elastic member 10 is located in a region of more than half of the inner wall surface 31 with respect to the outer circumference of the discharge tube 3.

[0080] <4> In the above description, the outer electrode 7 was described as having a mesh-like structure, but the present invention is not limited thereto. For example, the outer electrode 7 may be composed of a wire member wound spirally on the outer wall surface of the outer tube 11 and may have a striped structure.

[0081] <5> Figure 12 is a cross-sectional view showing yet another embodiment of the excimer lamp 1. In the present invention, the configuration of the elastic member 10 is arbitrary as long as it is elastically deformable in the radial direction of the discharge tube 3. For example, as shown in Figure 12, the elastic member 10 may be made of a spring. As an example, the elastic member 10 can be made of stainless steel.

[0082] <6> In the above description, it was assumed that bases (9a, 9b) are arranged at both ends of the discharge tube 3 in the X direction. However, the present invention is not limited to this, and base 9a may be arranged only at the end of the discharge tube 3 on the +X side. This can be appropriately designed, for example, depending on the total length of the discharge tube 3.

[0083] <7> In the above description, it was explained that a plurality of elastic members 10 are arranged on the inner wall surface 31 of the base 9a. However, the present invention is not limited thereto. For example, the elastic members 10 may be composed of annular leaf springs or the like, and the leaf springs may be arranged to cover more than half of the area of ​​the inner wall surface 31.

[0084] <8> In the above description, the excimer lamp 1 was described as having a double-tube structure, but in the present invention, the shape of the excimer lamp 1 is not limited.

[0085] <9> The configuration of the excimer lamp 1 according to the present invention is not limited to the illustrated configuration. Furthermore, the above embodiments can be realized by combining them as appropriate. [Explanation of Symbols]

[0086] 1: Excimer lamp 3: Discharge tube 5: Inner electrode 7: Outer electrode 9a, 9b: Bass 11: Outer tube 12: Inner tube 20: Outlet 21: Through hole 31: Interior wall surface 32: Exterior wall surface 33: Inner bottom surface 34: Outer bottom surface 36: Groove 38: Recess 41 : Base 42 : Bend part 43: Tip 45: Strip-shaped member 50 : Power supply 51, 52: Power supply components

Claims

1. A light-emitting tube made of a dielectric material and extending in the first direction, The light-emitting gas sealed in the aforementioned light-emitting tube, A base made of a conductive material, having a recess in the first direction and an insertion opening into which one end of the light-emitting tube relating to the first direction is inserted, A first electrode is positioned on the wall of the light-emitting tube, and at least a portion of it is located inside the insertion opening, A second electrode is positioned on the tube wall of the light-emitting tube, spaced apart from the first electrode, The outlet comprises an elastic member made of a conductive material, which is positioned on the inner wall surface of the outlet, contacts the first electrode, and is elastically deformable in a second direction parallel to a plane perpendicular to the first direction, An excimer lamp characterized in that the elastic member is arranged in an area of ​​more than half of the inner wall surface of the insertion opening with respect to the outer circumference of the discharge tube.

2. The excimer lamp according to claim 1, characterized in that the inner wall surface of the insertion opening has a plurality of elastic members arranged spaced apart in the first direction.

3. The excimer lamp according to claim 1 or 2, characterized in that the elastic member is arranged substantially around the entire circumference of the inner wall surface of the insertion opening with respect to the outer circumference direction of the discharge tube.

4. The excimer lamp according to claim 1 or 2, characterized in that the inner wall surface of the insertion opening has a plurality of elastic members arranged spaced apart in the outer peripheral direction.

5. The excimer lamp according to claim 4, characterized in that it has a strip-shaped member connecting a plurality of the elastic members in the outer peripheral direction.

6. The first electrode is composed of multiple wire members, The excimer lamp according to claim 4, characterized in that the elastic member is in contact with the plurality of wire members constituting the first electrode.

7. The excimer lamp according to claim 6, characterized in that the spacing of the plurality of elastic members in the outer peripheral direction is smaller than the spacing of the plurality of wire members constituting the first electrode in the outer peripheral direction.

8. The discharge tube has an outer tube extending in the first direction and an inner tube extending inside the outer tube, and the outer tube and the inner tube are sealed at the ends relating to the first direction. The light-emitting gas is sealed in the light-emitting space sandwiched between the outer tube and the inner tube. The first electrode is an outer electrode that is positioned on the outer wall surface of the outer tube and is composed of a wire member. The excimer lamp according to claim 1 or 2, characterized in that the second electrode is an inner electrode disposed on the inner wall surface of the inner tube.

9. The base has a through hole that connects the inner bottom surface of the insertion opening and the outer bottom surface located outward with respect to the first direction, The excimer lamp according to claim 8, further comprising a power supply member that contacts the inner electrode through the through hole.

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