Automatic sample transfer device in a vacuum environment

Abstract

This invention provides an automated sample transfer device for vacuum environments that can automatically transport and transfer a sample introduced into a vacuum system to a designated sample stage, and vice versa, while also making it easy to maintain the vacuum level and requiring a relatively low-cost construction. [Solution] The vacuum chamber 2 includes a port 12, a bellows duct 17 with one end airtightly connected to the port directly or indirectly via another chamber 3, an operating member 34 with its end sealed and airtightly connected to the other end of the bellows duct, a shaft 19 with its base airtightly fixed to the operating member and its tip extending through the port into the vacuum chamber, a transfer jig 20 provided at the tip of the shaft, a linear actuator 21 installed outside the vacuum chamber that displaces the operating member in at least a first direction which is the expansion and contraction direction of the bellows duct, and a control device that controls the linear actuator.

Description

Technical Field

[0001] The present invention relates to an automatic sample transfer device in a vacuum environment, and more particularly to a device capable of automatically transferring a sample while maintaining a vacuum inside a vacuum device.

Background Art

[0002] Conventionally, as shown in Patent Document 1, a load lock chamber is connected to a port of a vacuum chamber via an on-off valve, and a sample insertion port is provided in this load lock chamber. Further, inside the load lock chamber, a transfer member having a transfer table at its tip is arranged, and a sample placed on this transfer table is transferred to the vicinity of the sample table of the vacuum chamber. Furthermore, a mechanism for manually operating a manipulator while visually observing from outside the vacuum chamber through a viewing window and transferring the sample to the sample table is disclosed. Specifically, the transfer member is provided with a rack portion, and a pinion meshing with this is arranged. By rotationally driving this pinion, the transfer member moves forward and backward. Therefore, the pinion rotation shaft is provided to penetrate the load lock chamber in an airtight state, and the pinion rotates by manually rotating a knob provided at the shaft end. However, the structure for maintaining the airtightness of the bearing portion of the pinion rotation shaft is complicated, and it is difficult to maintain a high vacuum degree. In addition, the manual operation of transferring the sample not only depends on the proficiency of the user but also has the problem of being time-consuming.

[0003] As a solution to this problem, a device for automating sample transport and transfer, disclosed in Patent Document 2, is provided. Specifically, an operating shaft introduced from outside the vacuum chamber rotatably passes through one end of a fixed arm, and a movable block connected to the operating shaft rolls along the fixed arm. The movable block supports one end of the movable arm so as to be vertically rotatable, and the movable arm moves back and forth relative to the fixed arm as the operating shaft moves forward and backward, and a cam provided at the end rotates the movable arm up and down as the operating shaft rotates. A sample transport device is provided at the tip of the fixed arm, and a scraper is installed at the tip of the movable arm. This operating shaft is connected to a scraper operating mechanism located outside the vacuum chamber and is capable of forward, backward, and rotation. In this case as well, since the operating shaft passes through the vacuum chamber, there is a challenge in maintaining the vacuum level, which is addressed by providing three vacuum chambers. The first chamber is an analytical chamber equipped with a sample stage and a mass spectrometer, the second chamber is a load lock chamber, and the third chamber is a chamber equipped with an opening and closing lid for sample loading. However, the fundamental problem remains unresolved because the operating shaft penetrates the vacuum chamber and slides against the vacuum seal, and the increased complexity of the vacuum system leads to higher costs. Furthermore, the increased number of moving parts also increases the risk of contamination.

[0004] Patent Document 3 discloses the use of bellows in the movable part of a manipulator driven within a vacuum chamber. Specifically, an airlock chamber is connected to the other end of a bellows that is connected to the vacuum chamber, and a probe holder is positioned at the end of the airlock chamber, passing through it via a vacuum seal. A one-axis movement mechanism is provided to move the probe holder back and forth in the X-axis direction relative to the airlock chamber, and a three-axis movement mechanism is provided to drive the airlock chamber in the XYZ directions relative to the vacuum chamber, thereby driving the probe attached to the tip of the probe holder within the vacuum chamber. However, because the probe holder passes through the airlock chamber and the space between them is sealed with a vacuum seal, it slides against the vacuum seal when the probe holder moves forward and backward, making it difficult to maintain a high vacuum level. Furthermore, this structure also leads to high costs. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 05-203625 [Patent Document 2] Japanese Patent Publication No. 2000-260750 [Patent Document 3] Japanese Patent Publication No. 2000-251820 [Overview of the project] [Problems that the invention aims to solve]

[0006] Therefore, in view of the above circumstances, the present invention aims to provide an automatic sample transfer device for a vacuum environment that can automatically transport and transfer a sample introduced into a vacuum system to a predetermined sample stage and the reverse operation, and that can easily maintain the vacuum level and be constructed at a relatively low cost. [Means for solving the problem]

[0007] To solve the aforementioned problems, the present invention provides an automatic sample transfer device in a vacuum environment, configured as described below.

[0008] [Configuration 1] An automatic sample transfer device in a vacuum environment for automatically transferring a sample to a sample stage installed in a vacuum chamber without breaking the vacuum, A port provided in the vacuum chamber, A bellows duct, with one end airtightly connected to the port, either directly or indirectly via another chamber, An operating member, whose end is sealed and airtight, is connected to the other end of the bellows duct. The base end is fixed to the aforementioned working member in an airtight manner, and the tip of the shaft extends through the port into the vacuum chamber, A transfer jig provided at the tip of the aforementioned shaft, A linear actuator is installed outside the vacuum chamber and displaces the working member in at least a first direction which is the expansion and contraction direction of the bellows duct, A control device for controlling the linear actuator, An automated sample transfer device for use in a vacuum environment, equipped with the following features.

[0009] [Configuration 2] The ports are a first port and a second port provided on the side of the vacuum chamber, facing the sample stage and on opposite sides, facing a first direction. An automatic sample transfer device in a vacuum environment as described in Configuration 1.

[0010] [Configuration 3] The first port is connected to a load-lock chamber, which has an opening and closing lid for inserting and removing the sample, via a gate valve. An automatic sample transfer device in a vacuum environment as described in Configuration 2.

[0011] [Structure 4] The shaft provided on the working member on the first port side is a transport shaft, and a transport table is provided at the tip of the transport shaft as the transfer jig. The shaft provided on the working member on the second port side is a transfer shaft, and a hook is provided at the tip of the transfer shaft as the transfer jig. An automatic sample transfer device in a vacuum environment as described in configuration 2 or 3.

[0012] [Composition 5] The device includes a linear actuator that displaces the working member to which the transfer shaft is fixed in a second direction perpendicular to the first direction. An automatic sample transfer device in a vacuum environment as described in Configuration 4.

[0013] [Composition 6] The mounting surfaces of the sample stage and the transport stage are both horizontal and at the same height, the first direction is horizontal, and the second direction is vertical. The automatic sample transfer device in a vacuum environment described in Configuration 5.

[0014] [Configuration 7] It has a downward claw piece for pushing and pulling the sample on the hook. The automatic sample transfer device in a vacuum environment described in Configuration 6.

[0015] [Configuration 8] On the pedestal where the vacuum chamber is arranged, a linear actuator for horizontally displacing the working member of the transfer shaft is installed, and a vertical linear actuator for vertically displacing the working member of the transfer shaft is installed. Further, a horizontal linear actuator for horizontally displacing the working member of the transfer shaft is attached to the moving part of the vertical linear actuator. The automatic sample transfer device in a vacuum environment described in Configuration 7.

[0016] [Configuration 9] The bellows duct connected to the working member fixing the transfer shaft is configured by tandem connecting a plurality of unit bellows ducts via connecting flanges to ensure the necessary transfer stroke, and both sides of the connecting flange are slidably supported by guide shafts. The automatic sample transfer device in a vacuum environment described in Configuration 4.

Advantages of the Invention

[0017] The automatic sample transfer device in a vacuum environment of the present invention thus constituted has the following effects. The sample introduced into the vacuum system can be automatically transported and transferred to the sample stage in the vacuum chamber while maintaining the degree of vacuum, and the reverse operation can also be automatically performed. Thereby, reliable work is possible regardless of the proficiency of the user. Further, since there is no sliding part in the vacuum system, the occurrence of contamination during the sample transfer operation can be suppressed, and a clean vacuum environment can be maintained.

Brief Description of the Drawings

[0018] [Figure 1] This is a partial longitudinal cross-sectional view of the entire temperature-controlled gas desorption analyzer equipped with the automatic transfer device of the present invention. [Figure 2] This shows the transport mechanism in the automatic transfer device of the present invention, and is a partial longitudinal cross-sectional view of the transport platform in its home position. [Figure 3] This is a partial longitudinal cross-sectional view showing the transport mechanism in the automatic transfer device of the present invention, with the transport platform in its closest position to the sample platform. [Figure 4] This is a partial longitudinal cross-sectional view showing the transfer mechanism in the automatic transfer device of the present invention, with the hook raised from the home position. [Figure 5] This is a partial longitudinal cross-sectional view of the state in which the hook has moved forward from the state in Figure 4. [Figure 6] This is a partial longitudinal cross-sectional view showing the state in which the hook has descended and made contact with the transport table, similar to the state in Figure 5. [Figure 7] This is a partial longitudinal cross-sectional view showing the state after the hook has retracted from the state in Figure 6 and the sample has been moved to the sample stage. [Figure 8] This is a partial longitudinal cross-sectional view of the state in which the hook has been raised from the state in Figure 7. [Figure 9] This is a partial longitudinal cross-sectional view of the state in which the hook has been retracted from the state in Figure 8. [Figure 10] This is a partial longitudinal cross-section showing the hook descending and returning to the home position from the same state as in Figure 9. [Figure 11] This is a partial longitudinal cross-sectional view showing the transport mechanism in the automatic transfer device of the present invention, after the sample has been transferred to the sample stage and the transport stage has been retracted to return to the home position. [Figure 12] This is an enlarged partial longitudinal cross-sectional view showing the relationship between the sample stage, the transport stage, and the hook. [Figure 13] This is an enlarged partial plan view showing the relationship between the sample stand, the transport stand, and the hook. [Figure 14] Figures (a) to (h) are explanatory diagrams showing the process of transporting the sample from the time it is placed into the load lock chamber until it is placed on the top surface of the sample stage. [Figure 15](a) to (h) are explanatory diagrams showing the process of removing the analyzed sample from the sample stage to the loading position in the load lock chamber. [Modes for carrying out the invention]

[0019] This invention relates to an automatic sample transfer device in a vacuum environment, and more particularly to a device capable of automatically transferring a sample while maintaining a vacuum inside a vacuum apparatus. The vacuum apparatus is not particularly limited, but in this embodiment, its application to a temperature-controlled gas desorption analyzer (TDS) that requires an ultra-high vacuum will be described.

[0020] Next, the present invention will be described in more detail based on the embodiments shown in the attached drawings. Figure 1 is a partial longitudinal cross-sectional view showing the overall configuration of a temperature-controlled gas desorption analyzer. In the temperature-controlled gas desorption analyzer, an analysis chamber 2 and a load lock chamber 3 are arranged on a stand 1 connected via a gate valve 4. Furthermore, a transport mechanism 5 for transporting a sample W between the load lock chamber 3 and the analysis chamber 2 is connected to the extension of the load lock chamber 3. In addition, a transfer mechanism 7 for transferring the sample W between a sample stage 6, which has a horizontal mounting surface installed inside the analysis chamber 2, and the transport mechanism 5 is connected to the analysis chamber 2. The automatic sample transfer device of the present invention mainly consists of the transport mechanism 5, the sample stage 6, and the transfer mechanism 7. The sample W is assumed to be a flat, chip-shaped sample of about 10 mm × 10 mm × 1 mm.

[0021] The analysis chamber 2 is connected to a turbomolecular pump (not shown) for evacuation to an ultra-high vacuum, and an infrared heating source (not shown) for heating the sample W placed on the sample stage 6 is arranged in conjunction with it. Furthermore, various sensors such as a mass spectrometer 8 for analyzing the desorbed gas from the sample W and a vacuum gauge are connected to it.

[0022] The load lock chamber 3 is essential for high-efficiency (high-throughput) and high-sensitivity measurements, and the automatic transfer device allows for the rapid introduction of only the sample W into the ultra-high vacuum analysis chamber 2. Without the load lock chamber 3, the analysis chamber 2 would need to be opened to the atmosphere each time the sample was changed. Once opened to the atmosphere, a large amount of atmospheric components (especially moisture) would be adsorbed into the analysis chamber 2, requiring a long time for complete exhaust. The automatic transfer device of the present invention allows for the transfer of the sample W from the load lock chamber 3 to the sample stage 6 of the analysis chamber 2 under vacuum conditions, and the transfer of the sample W from the sample stage 6 to the load lock chamber 3 after analysis is complete. These operations can be performed reliably and quickly, regardless of the user's skill level.

[0023] More specifically, as shown in Figure 1, the analysis chamber 2 is a vacuum vessel having a cylindrical surface 9 of a cylindrical body oriented in the vertical direction, and a bottom surface 10 and a top surface 11 that close the upper and lower ends. A first port 12 and a second port 13 are provided on the cylindrical surface 9. The first port 12 is positioned so that its center is at approximately the same height as the sample stage 6, and the second port 13 is positioned so that its center is slightly higher than the sample stage 6, in the opposite direction from the first port 12. The sample stage 6 is located at the upper end of a quartz glass rod 14 that penetrates vertically through the bottom surface 10 of the analysis chamber 2 and guides infrared rays from an infrared heating source. The mass spectrometer 8 is positioned on the top surface 11 of the analysis chamber 2 so as to view the sample stage 6 from diagonally above.

[0024] As shown in Figure 1, the load lock chamber 3 is connected to the first port 12 via the gate valve 4, has an opening / closing lid 15 at the top for inserting and removing the sample W, and is connected to a vacuum pump 16 for evacuating the inside of the load lock chamber 3.

[0025] Next, the automatic transfer device of the present invention will be described in detail. First, the transport mechanism 5 will be described with reference to Figures 1 to 3. The transport mechanism 5 transports the sample W horizontally from directly below the opening / closing lid 15 to near the side surface of the sample stage 6. Specifically, one end of a bellows duct 17 is airtightly connected to the end of the load lock chamber 3, and an operating member 18 is airtightly connected to the other end of the bellows duct 17. The load lock chamber 3 and the bellows duct 17 are connected concentrically in tandem, and the operating member 18 and the gate valve 4 constitute a vacuum vessel. A transport shaft 19 is positioned in the center of the load lock chamber 3 and the bellows duct 17, and the base end of the transport shaft 19 is cantilevered and airtightly supported by the operating member 18. A transport stage 20 with a horizontal surface for placing the sample W is provided at the tip of the transport shaft 19. Then, the conveying shaft 19 is driven horizontally by the linear actuator 21 installed on the frame 1, which drives the operating member 18 horizontally. When the conveying shaft 19 is driven horizontally, the bellows duct 17 expands and contracts while maintaining a vacuum state.

[0026] In this embodiment, the linear actuator 21 includes a ball screw feed mechanism 22 and a stepping motor 23 in its drive mechanism. The ball screw feed mechanism 22 is a mechanism in which a ball screw shaft 26 is rotatably supported on the upper surface of the frame 1 by bearings 24 and 25 at both ends, and a nut 27 screwed onto the ball screw shaft 26 at an intermediate position in the longitudinal direction moves forward and backward in accordance with the rotation of the ball screw shaft 26. The stepping motor 23 is connected to the end of the ball screw shaft 26 via a coupling 28 and precisely moves the nut 27 forward and backward through accurate rotational control. The linear actuator 21 is controlled by a control device (not shown), such as a personal computer, via a motor driver.

[0027] To drive the operating member 18 horizontally with the linear actuator 21, the operating member 18 is fixed to a movable body 30 supported by a linear guide 29 so as to be horizontally movable, and the nut 27 is linked to the movable body 30. The linear guide 29 has a structure in which sliders 32, 32 are movably meshed with a pair of guide rails 31 which are arranged parallel to each other on the frame 1 with the ball screw shaft 26 in between. The sliders 32 are attached to the lower surface of the movable body 30, a support rib 33 is erected on the upper surface of the movable body 30, and the operating member 18 is attached to a support plate 34 fixed to the support rib 33. Since the operating member 18 supports the long transport shaft 19 in a cantilevered state, a large rotational moment acts on the support plate 34, but because the movable body 30 is reliably supported on the linear guide 29 by the sliders 32 and reinforced by the support rib 33, the transport shaft 19 can be driven horizontally stably.

[0028] The horizontal drive distance (transport stroke) of the transport shaft 19 is inevitably increased due to the presence of the load lock chamber 3, the gate valve 4, and the first port 12, and in this embodiment it is set to 245 mm. Therefore, in order to ensure a sufficient transport stroke, the bellows duct 17 is constructed by connecting three unit bellows ducts in tandem via connecting lunges 35. As a result the bellows duct 17 is heavy, and in order to bear the load, the ends of a pair of guide shafts 36, which are positioned on both sides of the bellows duct 17, are supported by stands 37 erected on the frame 1, and the guide shafts 36 are slidably passed through the support plate 34 and the connecting lunge 35 via bushes 38 provided on both sides. When the transport mechanism 5 is driven by the linear actuator 21, the support plate 34 and the connecting lunge 35 move along the guide shafts 36. Furthermore, the intermediate portion of the bellows duct 17, together with the connecting lunge 35, is supported by the guide shaft 36 to prevent it from bending under load. The end of the load lock chamber 3 is also supported by a stand 39 erected on the frame 1.

[0029] First, the linear actuator 21 is driven to retract the transport shaft 19 together with the support plate 34 (moving it away from the sample stage 6), and as shown in Figure 2, the transport stage 20 is positioned directly below the opening / closing lid 15 of the load lock chamber 3 to prepare for sample loading and unloading. At this time, the bellows duct 17 is extended, but the vacuum state is maintained. Then, the loading or unloading of the sample W is performed by closing the gate valve 4, releasing the load lock chamber 3 into the atmosphere, and then opening the opening / closing lid 15. Here, the analysis chamber 2 is always maintained at a high vacuum. Then, the sample w before analysis is picked up with tweezers and placed on the transport stage 20, or the sample W after analysis is picked up with tweezers and removed from the transport stage 20. After loading or unloading the sample W, the opening / closing lid 15 is closed and the load lock chamber 3 is evacuated.

[0030] Then, the sample W is placed on the transport table 20, and after the load lock chamber 3 is sufficiently evacuated, the gate valve 4 is opened, and the linear actuator 21 is driven to advance the transport shaft 19 together with the support plate 34 (moving in the direction approaching the sample table 6). As shown in Figure 3, the transport table 20 passes through the gate valve 4 and enters the analysis chamber 2, stopping in contact with the sample table 6 or in the vicinity of the sample table 6. This state is the sample transfer state. In the sample transfer state, the sample W is transferred between the transport table 20 and the sample table 6 using the transfer mechanism 7.

[0031] Next, the transfer mechanism 7 will be described with reference to Figure 1 and the figure. The transfer mechanism 7 transfers the sample W from the transport table 20 to the sample table 6, or from the sample table 6 to the transport table 20. Specifically, one end of a bellows duct 40 is airtightly connected to the end of the second port 13, and an operating member 41 is airtightly connected to the other end of the bellows duct 40. A transfer shaft 42 is positioned in the center of the second port 13 and the bellows duct 40, and the base end of the transfer shaft 42 is cantilevered and airtightly supported by the operating member 41. In addition, a hook 43 is provided at the tip of the transfer shaft 42 for pushing and pulling the sample W when transferring the sample W. The inner dimensions of the second port 13 and the bellows duct 40 are set to be sufficiently larger than the diameter of the transfer shaft 42, allowing for vertical movement of the transfer shaft 42.

[0032] Then, the transfer shaft 42, together with the operating member 41, is driven vertically and horizontally by a vertical linear actuator 44 and a horizontal linear actuator 45 installed on the frame 1, thereby causing the hook 43 to move along a predetermined trajectory. The vertical linear actuator 44 and the horizontal linear actuator 45 are units of the same structure. The vertical linear actuator 44 is formed by attaching this unit to the frame 1 so that the driving direction is vertical, and the horizontal linear actuator 45 is formed by attaching the moving part of the vertical linear actuator 44 so that the driving direction is horizontal. The vertical linear actuator 44 and the horizontal linear actuator 45 are controlled by a control device (not shown), such as a personal computer, via a motor driver.

[0033] In this embodiment, the vertical linear actuator 44 is equipped with a ball screw feed mechanism 46 and a stepping motor 47 in its drive mechanism, similar to the previous embodiment. The ball screw feed mechanism 46 is a mechanism in which a ball screw shaft 51 is rotatably supported on one surface of the base plate 48 by bearings 49 and 50 at both ends, and a nut 52 screwed onto the ball screw shaft 51 at an intermediate position in the longitudinal direction moves forward and backward in accordance with the rotation of the ball screw shaft 51. The stepping motor 47 is connected to the end of the ball screw shaft 51 via a coupling 53 and precisely moves the nut 52 forward and backward by precise rotation control. The moving plate 55, which is guided by a linear guide 54 provided on one surface of the base plate 48, is directly connected to the nut 52 or via a component. The linear guide 54 has a structure in which sliders 57, 57 are movably meshed with a pair of guide rails 56 arranged parallel to the base plate 48 with the ball screw shaft 51 in between, and each slider 57 is attached to the moving plate 55. The vertical linear actuator 44 is a unit comprising the base plate 48, ball screw feed mechanism 46, stepping motor 47, linear guide 54, and moving plate 55.

[0034] The horizontal linear actuator 45 has the exact same drive unit structure as the vertical linear actuator 44, so the same components are denoted by the same reference numerals and their descriptions are omitted. In other words, by arranging the drive direction of this drive unit vertically, it becomes a vertical linear actuator 44, and by arranging the drive direction horizontally, it functions as a horizontal linear actuator 45. Specifically, as shown in Figures 1 and 4, the base plate 48 of the vertical linear actuator 44 is attached vertically to the frame of the mounting base 1. As a result, the movable plate 55 of the vertical linear actuator 44 is displaced vertically by the drive of the stepping motor 47. Then, a fixed plate 59 is horizontally attached to the upper end position of the movable plate 55 of the vertical linear actuator 44 via a support rib 58 attached to the movable plate 55. Then, the base plate 48 of the horizontal linear actuator 45 is horizontally connected to the upper surface of the fixing plate 59, the support plate 61 is fixed to the support rib 60 erected on the upper surface of the movable plate 55 of the horizontal linear actuator 45, and the operating member 41 is attached to the support plate 61.

[0035] Therefore, when the vertical linear actuator 44 is driven, the transfer shaft 42 moves up and down within the second port 13 while the bellows duct 40 is deformed vertically, and when the horizontal linear actuator 45 is driven, the transfer shaft 42 moves horizontally back and forth while the bellows duct 40 is extended and retracted.

[0036] As shown in Figure 12, the hook 43 has a downward-facing claw 62 at its tip and is made of spring material so that the entire thing can be elastically deformed in the vertical direction. Furthermore, as shown in Figure 13, the plan view shape of the transport table 20 has an arc-shaped recess 63 at its tip with a radius of curvature larger than the radius of the sample stage 6, so that when the transport table 20 is closest to the sample stage 6, a part of the sample stage 2 can be received in the arc-shaped recess 63. When the transport table 20 is closest to the sample stage 6, the tip of the transport shaft 19 is stopped against a stopper 64 erected on the bottom surface 10 of the analysis chamber 2 so that the upper surface of the transport table 20 and the sample stage 6 are flush.

[0037] The operation of the automatic sample transfer device in a vacuum environment according to the present invention will be explained. First, the transfer process from opening the opening / closing lid 15 and placing the sample W into the load lock chamber 3 to placing it on the upper surface of the sample stage 6 will be explained based on Figures 1 to 11 and 14. The home position of the transport stage 20 of the transport mechanism 5 is directly below the opening / closing lid 15, as shown in Figure 2, and the home position of the hook 43 of the transfer mechanism 7 is set to a position slightly away from the sample stage 6, as shown in Figure 1.

[0038] In this home position, the gate valve 4 is closed, maintaining an ultra-high vacuum inside the analysis chamber 2, and the load lock chamber 3 is evacuated after the sample W is placed on the transport stage 20 and the opening / closing lid 15 is closed (see Figures 2 and 14(a)). After the load lock chamber 3 has reached a sufficient vacuum, the gate valve 4 is opened, driving the linear actuator 21 to advance the transport shaft 19, and stopping the transport stage 20 when it is closest to the sample stage 6 (see Figures 3 and 14(b)).

[0039] Next, the vertical linear actuator 44 of the transfer mechanism 7 is driven to slightly raise the transfer shaft 42 and hook 43 together with the horizontal linear actuator 45 (see Figures 4 and 14(b)). Here, the amount of raising should be just enough for the hook 43 to pass over the sample W. Then, the horizontal linear actuator 45 is driven to advance the transfer shaft 42 and stop it when the hook 43 has passed over the sample W placed on the transport table 20 (see Figures 5 and 14(c)). After that, the vertical linear actuator 44 is driven to lower the transfer shaft 42 and stop it when the tip of the hook 43 is in contact with the transport table 20 (see Figures 6 and 14(d)). Then, the horizontal linear actuator 45 is driven to retract the transfer shaft 42, and the claws 62 of the hook 43 scrape out the sample W, moving the sample W to a predetermined position on the sample table 6 and stopping it (see Figures 7 and 14(e)). Next, the vertical linear actuator 44 is driven to raise the transfer shaft 42 and hook 43 (see Figures 8 and 14(f)). Then, the horizontal linear actuator 45 is driven to retract the transfer shaft 42, causing the hook 43 to move above the sample W and away from the sample stage 6 (see Figures 9 and 14(g)). Finally, the vertical linear actuator 44 is driven to lower the transfer shaft 42, returning the hook 43 to its home position (see Figures 10 and 14(h)). Lastly, the linear actuator 21 of the transport mechanism 5 is driven to retract the transport shaft 19, returning the transport stage 20 to the home position of the load lock chamber 3 (see Figures 11 and 14(h)). With the transport stage 20 and hook 43 back in their home positions, the gate valve 4 is closed. In this state, once the inside of the analysis chamber 2 reaches a predetermined vacuum level, analysis can be performed as usual.

[0040] Next, the process of removing the analyzed sample W from the sample stage 6 will be explained based on Figure 15. Here, the operation of the linear actuator will be omitted, and only the operation of the transport shaft 19 and the transfer shaft 42 will be explained. First, the gate valve 4 is opened and the transport shaft 19 is advanced (see Figure 15(a)). Then, when the transport stage 20 is closest to the sample stage 6, the transport shaft 19 is stopped and the transfer shaft 43 is advanced (see Figure 15(b)). Here, the transport shaft 19 and the transfer shaft 43 may be advanced simultaneously or separately. Then, when the claw piece 62 of the hook 43 is above the sample stage 6 and near the sample W, the transfer shaft 43 is stopped (see Figure 15(c)). After that, the transfer shaft 43 is lowered and stopped when the claw piece 62 of the hook 43 is in contact with the upper surface of the sample stage 6 (see Figure 15(d)). Next, the transfer shaft 43 is advanced, and the claws 62 of the hook 43 push the sample W off the top surface of the sample stage 6, stopping it at a predetermined position on the transport stage 20 (see Figure 15(e)). Then, the transfer shaft 43 is raised, stopping it when the claws 62 of the hook 43 are away from the transport stage 20 (see Figure 15(f)). After that, the transfer shaft 43 is retracted to return the hook 43 to its home position (see Figure 15(g)). Finally, the transport shaft 19 is retracted to return the transport stage 20 to its home position in the load lock chamber 3 (see Figure 15(h)). Here, the transport shaft 19 and the transfer shaft 43 may be retracted simultaneously or separately. With the transport stage 20 and the hook 43 back in their home positions, the gate valve 4 is closed. Then, the vacuum in the load lock chamber 3 is broken, and after the inside becomes atmospheric pressure, the opening / closing lid 15 is released, and the sample W on the top surface of the transport stage 20 is picked up with tweezers and removed.

[0041] Throughout the loading and unloading processes of the sample W, the inside of the analysis chamber 2 is maintained at a high vacuum, suppressing the adsorption of atmospheric components into the analysis chamber 2. This improves the analytical efficiency of the sample W within the analysis chamber 2. Furthermore, the bellows ducts 19 and 40 expand and contract during the loading and unloading processes, and the bellows duct 40 also moves vertically, resulting in particularly heavy loads. Therefore, the durability of the bellows ducts was evaluated by repeating the series of transport and retrieval operations 12,000 times using an actual sample W. The sample W was 10 mm square and 0.5 mm thick. Even after 12,000 durability tests, the bellows ducts did not lose their function, and the transport and retrieval of the sample W could be performed without problems. [Explanation of Symbols]

[0042] W sample, 1. Stand, 2. Analysis chamber (vacuum chamber), 3. Load lock chamber (other vacuum chambers), 4 gate valves, 5. Conveying mechanism, 6 Sample stage, 7 Transfer mechanism, 8 mass spectrometer, 9 Cylindrical surface, 10 Bottom, 11 Top surface; 12. Port 1, 13. Port 2, 14 quartz glass rods, 15. Opening and closing lid, 16 Vacuum pump, 17 Bellows duct, 18 Operating members, 19. Conveyor shaft (shaft), 20. Transport platform (transfer jig), 21 Linear actuators, 22 Ball screw feed mechanism, 23 stepping motors, 24 bearings, 25 bearings, 26 Ball screw shaft, 27 nuts, 28 couplings, 29 Linear guides, 30 Mobile units, 31 Guide rails, 32 sliders, 33 support ribs, 34 support plate; 35 connecting flanges, 36 guide shafts, 37 stands, 38 Busch, 39 stands, 40 bellows duct, 41 Working members, 42 Transfer shaft (shaft), 43 Hooks (transfer jigs), 44 Vertical linear actuators, 45 horizontal linear actuators, 46 Ball screw feed mechanism, 47 Stepping motors, 48 base plate, 49 bearings, 50 bearings, 51 Ball screw shaft, 52 nuts, 53 couplings, 54 linear guides, 55 Movable plate (movable part), 56 guide rails, 57 Slider, 58 support ribs, 59 Fixed plate, 60 support ribs, 61 Support plate; 62 nail fragments, 63 Arc-shaped recess, 64 Stopper.

Claims

1. An automatic sample transfer device in a vacuum environment for automatically transferring a sample to a sample stage installed in a vacuum chamber without breaking the vacuum, A port provided in the vacuum chamber, A bellows duct, with one end airtightly connected to the port, either directly or indirectly via another chamber, An operating member, whose end is sealed and airtight, is connected to the other end of the bellows duct. The base end is fixed to the aforementioned working member in an airtight manner, and the tip of the shaft extends through the port into the vacuum chamber, A transfer jig provided at the tip of the aforementioned shaft, A linear actuator is installed outside the vacuum chamber and displaces the working member in at least a first direction which is the expansion and contraction direction of the bellows duct, A control device for controlling the linear actuator, An automated sample transfer device for use in a vacuum environment, equipped with the following features.

2. The ports are a first port and a second port provided on the side of the vacuum chamber, facing the sample stage and on opposite sides, facing a first direction. An automatic sample transfer device in a vacuum environment according to claim 1.

3. A load lock chamber, equipped with an opening and closing lid for inserting and removing the sample, is connected to the first port via a gate valve. The automatic sample transfer device in a vacuum environment according to claim 2.

4. The shaft provided on the working member on the first port side is a transport shaft, and a transport table is provided at the tip of the transport shaft as the transfer jig. The shaft provided on the working member on the second port side is a transfer shaft, and a hook is provided at the tip of the transfer shaft as the transfer jig. An automatic sample transfer device in a vacuum environment according to claim 2 or 3.

5. The device includes a linear actuator that displaces the working member to which the transfer shaft is fixed in a second direction perpendicular to the first direction. The automatic sample transfer device in a vacuum environment according to claim 4.

6. The mounting surfaces of the sample stage and the transport stage are both horizontal and at the same height, the first direction is horizontal, and the second direction is vertical. The automatic sample transfer device in a vacuum environment according to claim 5.

7. The hook is provided with a downward-facing claw piece for pushing and pulling the sample. The automatic sample transfer device in a vacuum environment according to claim 6.

8. A linear actuator for displacing the working member of the transport shaft in the horizontal direction is installed on the frame on which the vacuum chamber is placed, and a vertical linear actuator for displacing the working member of the transfer shaft in the vertical direction is also installed, and a horizontal linear actuator for displacing the working member of the transfer shaft in the horizontal direction is attached to the moving part of the vertical linear actuator. The automatic sample transfer device in a vacuum environment according to claim 7.

9. The bellows duct connected to the working member that fixes the conveying shaft is constructed by connecting multiple unit bellows ducts in tandem via connecting flanges to secure the required conveying stroke, and both sides of the connecting flanges are slidably supported by guide shafts. The automatic sample transfer device in a vacuum environment according to claim 4.

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