Judgment system, judgment method, program, and method for assembling exposure apparatus

Abstract

This system provides a determination system that can determine whether or not there is any abnormality in the worker's work, even when the worker changes their work location or the content of their work. [Solution] A determination system for determining the work performed by a worker at each of multiple work locations, comprising: a receiving unit that receives location information, which is information about the worker's position when the work was performed, and video information, which is video information of the worker performing the work; and a determination unit that determines whether or not there is an abnormality in the work based on the location information and video information received by the receiving unit.

Description

Technical Field

[0001] The present invention relates to a determination system, a determination method, a program, and an assembly method for an exposure apparatus.

Background Art

[0002] When an operator assembles a device or the like, the operator may make a mistake in the work. Patent Document 1 discloses photographing the work of an operator, identifying the posture of the operator during work based on the acquired video, and determining the presence or absence of work abnormalities based on the identified posture of the operator during work.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the method of Patent Document 1, it is difficult to determine the presence or absence of work abnormalities of an operator when the operator changes the position where the work is performed and changes the work content.

[0005] Therefore, an object of the present invention is to provide a determination system capable of determining the presence or absence of work abnormalities of an operator even when the operator changes the position where the work is performed and changes the work content.

Means for Solving the Problems

[0006] To achieve the above objective, a determination system as one aspect of the present invention is a determination system that makes a determination about work performed by an operator at each of a plurality of work positions, and is characterized by comprising: a receiving unit that receives location information which is information about the operator's position when the work was performed and video information which is video information of the operator when the work was performed; and a determination unit that determines whether or not there is an abnormality in the work based on the location information and video information received by the receiving unit.

[0007] Further objects or other aspects of the present invention will be revealed by embodiments described below with reference to the drawings. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide a determination system that can determine whether or not there is an abnormality in the worker's work, even when the worker changes the position in which they are working and changes the content of their work. [Brief explanation of the drawing]

[0009] [Figure 1] This is a schematic diagram showing the configuration of the exposure apparatus. [Figure 2] This diagram shows the projection optical system viewed from the +Z direction. [Figure 3] This diagram shows the work standards for the assembly work in section E. [Figure 4] This diagram shows the work standards for the assembly of section F. [Figure 5] This diagram shows the work standards for the assembly work of section G. [Figure 6] This figure shows the items that a worker carries with them while working in the first embodiment. [Figure 7] This is a schematic diagram of the determination system in the first embodiment. [Figure 8] This diagram shows a flowchart for determining whether or not there is an abnormality in the work in the first embodiment. [Figure 9] This diagram shows an example of the workflow for workers in the first stage. [Figure 10]An example in which an operator moves and changes the work content is shown. [Figure 11] It is a diagram showing an example of the determination process of the determination unit with respect to the work of the operator in the first stage. [Figure 12] It is a schematic diagram when obtaining information regarding work based on the measured value of torque. [Figure 13] It is a diagram showing an example of the flow of work of the operator in the second stage. [Figure 14] It is a diagram showing an example of the determination process of the determination unit with respect to the work of the operator in the first stage and the second stage. [Figure 15] It is a schematic diagram for obtaining the position of the operator by the area camera. [Figure 16] It is a schematic diagram when obtaining information regarding work in work using a cable. [Figure 17] It is a diagram showing a flowchart of an assembling method of an exposure apparatus in the second embodiment.

Embodiments for Carrying Out the Invention

[0010] Hereinafter, embodiments of the present invention will be described based on the drawings. Note that the following embodiments do not limit the invention according to the claims. Although a plurality of features are described in the embodiments, not all of these plurality of features are essential to the invention, and each embodiment may be arbitrarily combined. Further, in the drawings, the same or similar configurations are denoted by the same reference numerals, and redundant explanations are omitted.

[0011] Also, in this specification and the drawings, basically, the vertical direction is the Z-axis direction, and the horizontal plane perpendicular to the vertical direction is the XY plane, and the directions are indicated by an XYZ coordinate system in which each axis is orthogonal to each other. However, when the XYZ coordinate system is described in each drawing, that coordinate system is prioritized.

[0012] Hereinafter, in each embodiment, a specific configuration will be described.

[0013] <First Embodiment> FIG. 1 is a schematic diagram showing the configuration of the exposure apparatus 1. The exposure apparatus 1 includes an illumination optical system 50 that irradiates light, a projection optical system 30, a reticle stage (not shown) that holds the reticle 40, and a stage 20 that can move while holding the substrate 21. Further, the exposure apparatus 1 includes a main body frame 10, a first member 34 placed on the main body frame 10, a vibration-proof portion 33 placed on the first member 34, and a lens barrel base plate 32 placed on the vibration-proof portion 33. The projection optical system 30 includes a lens barrel structure portion 31 on the outer peripheral portion of the lens barrel, and the position of the projection optical system 30 is fixed by fixing the lens barrel structure portion 31 to the lens barrel base plate 32.

[0014] In the exposure apparatus 1, exposure light from a light source (not shown) illuminates the reticle 40 held by the reticle stage via the illumination optical system 50. The light transmitted through the reticle 40 is irradiated onto the substrate 21 via the projection optical system 30. At this time, light from the pattern formed on the reticle 40 forms an image on the surface of the substrate 21, and the shot area of the substrate 21 (photosensitive material on the substrate 21) is exposed by the pattern image. The exposure apparatus 1 thus exposes the shot area on the substrate 21 and performs exposure similarly for each of the plurality of shot areas.

[0015] Next, the installation of the projection optical system 30 will be described. The assembly of the exposure apparatus 1 is performed by one or a plurality of workers according to a work standard document. When the exposure apparatus 1 is assembled by a plurality of workers, the plurality of workers proceed with the work simultaneously at their respective work positions. The position of the projection optical system 30 is fixed by fixing the lens barrel structure portion 31 to the lens barrel base plate 32. When fixing, it is necessary to correctly position the projection optical system 30 with respect to the stage 20. This positioning is performed, for example, by measuring the position of the optical axis LA of the projection optical system 30 with respect to the central position in the XY plane of the stage 20, and adjusting and determining the position so that the assembly error falls within the allowable range. After the positioning of the projection optical system 30 is performed, the worker fixes (fastens) the lens barrel structure portion 31 to the lens barrel base plate 32 using a plurality of bolts or the like. During a series of operations in this fixing operation, the worker may change the work position (working position) and change the work content (type of work).

[0016] Figure 2 shows the projection optical system 30 as viewed from the +Z direction. The lens barrel structure 31 is fixed to the lens barrel base plate 32 in three areas: E 210, F 220, and G 230. Area E 210 includes 5 fastening positions. Area F 220 includes 4 fastening positions. Area G includes 3 fastening positions. Note that the arrangement and number of fixing areas, and the arrangement and number of fastening positions are examples and are not particularly limited to the example in Figure 2.

[0017] In this embodiment, the reference point for work in section E 210 is set as reference point 36, the reference point for work in section F 220 is set as reference point 37, and the reference point for work in section G 230 is set as reference point 38. The coordinates of reference point 36 are (Xe,Ye,Ze), the coordinates of reference point 37 are (Xf,Yf,Zf), and the coordinates of reference point 38 are (Xg,Yg,Zg).

[0018] Figure 3 shows the work standards for the assembly of section E 210. Figure 3(a) shows the fastening positions in section E 210, and Figure 3(b) shows the work standard table 211 for section E 210. As shown in Figure 3(a), section E 210 includes five fastening positions: M1 (212), M2 (213), M3 (214), M4 (215), and M5 (216). As shown in Figure 3(b), the work standard table 211 includes information on each fastening position in section E 210, including the fastening position (fastening coordinates), the adjustment range of the fastening position, the torque to be fastened, the allowable torque range, and the standard time required for the work.

[0019] Figure 4 shows the work standards for the assembly of section F 220. Figure 4(a) shows the fastening positions in section F 220, and Figure 4(b) shows the work standard table 221 for section F 220. As shown in Figure 4(a), section F 220 includes four fastening positions: M1 (222), M2 (223), M4 (224), and M5 (225). As shown in Figure 4(b), the work standard table 221 includes information on each fastening position of section F 220, including the fastening position (fastening coordinates), the adjustment range of the fastening position, the torque to be fastened, the allowable torque range, and the standard time required for the work.

[0020] Figure 5 shows the work standards for the assembly of section G 230. Figure 5(a) shows the fastening positions in section G 230, and Figure 5(b) shows the work standard table 231 for section G 230. As shown in Figure 5(a), section G 230 includes three fastening positions: M1 (232), M3 (233), and M5 (234). As shown in Figure 5(b), the work standard table 231 includes information on the fastening position (fastening coordinates), the adjustment range of the fastening position, the torque to be fastened, the allowable torque range, and the standard time required for the work for each fastening position in section G 230. Here, the examples in Figures 3-5 show work standard tables that include information on the fastening position (fastening coordinates), the adjustment range of the fastening position, the torque to be fastened, the allowable torque range, and the standard time required for the work. However, the work standard table does not have to include all of these; it may include at least one of them.

[0021] In the manufacturing of goods, it is preferable that workers perform their tasks correctly in accordance with standards such as work standards. However, workers may make mistakes. Such errors can be detected, for example, by using a camera placed in a predetermined location to film the work performed by the worker at a specific location, and then determining whether or not there was an abnormality in the work (whether or not the work was performed correctly) based on the filmed video.

[0022] However, if workers move to perform different tasks, it is necessary to place a camera at a location corresponding to each work position, requiring a large number of cameras if there are a vast number of work positions. Furthermore, the system becomes complex due to the need to capture images with many cameras corresponding to a vast number of work positions.

[0023] Furthermore, when there are multiple workers, it is necessary to identify which worker performed each task. This requires installing a worker recognition system (such as a facial recognition system) at each work location, further complicating the system.

[0024] Therefore, this embodiment provides a determination system that determines whether the work performed by a worker at each of multiple work locations is abnormal. This determination system determines whether there is an abnormality in the work based on location information, which is information about the worker's position when the work was performed, and video information, which is video information of the worker performing the work. Specifically, the system associates the location information with the video information, identifies the work content in the video based on the location information, and compares the reference information of the identified work content with the video information to determine whether there is an abnormality in the worker's work. With this determination system, even if a worker moves and changes the work content, it is possible to determine whether the worker's work was performed correctly by associating the work content with the video using a simple configuration based on the worker's location information (work location information). Furthermore, the determination system in this embodiment is effective not only when a single worker moves and changes the work content, but is especially effective when multiple workers move and change the work content. With the determination system in this embodiment, even if multiple workers move and change the work content, it is not necessary to provide a worker recognition system such as a facial recognition system, and it is possible to determine whether each worker's work was performed correctly with a simple configuration.

[0025] In this embodiment, one worker performs work on each of sections E 210, F 220, and G 230, and a total of three workers work almost simultaneously. Although this embodiment shows an example with three workers, there may be one worker or multiple workers, and the number is not particularly limited. Furthermore, the work of multiple workers does not have to be performed simultaneously.

[0026] Figure 6 shows the items that workers carry while working in this embodiment. Figure 6(a) shows workers A 110, B 120, and C 130 performing assembly work. In the example in Figure 6(a), worker A 110 carries a camera 111 and a communication device 112, worker B 120 carries a camera 121 and a communication device 122, and worker C 130 carries a camera 131 and a communication device 132. In other words, each worker carries a camera and a communication device. It is preferable that the camera be fixed to the body so that it does not interfere with the work.

[0027] Each imaging device includes an imaging unit. Imaging device 111 captures video of worker A 110 during work, imaging device 121 captures video of worker B 120 during work, and imaging device 131 captures video of worker C 130 during work. Each imaging device also includes a position acquisition unit that acquires (generates) information about its own position. That is, imaging device 111 generates information about worker A 110's position during work, imaging device 121 generates information about worker B 120's position during work, and imaging device 131 generates information about worker C 130's position during work. Here, since the workers carry the imaging devices, the position of the imaging device is also the position of the worker. Therefore, imaging device 111 generates information about worker A 110's position during work. Imaging device 121 generates information about worker B 120's position during work. The imaging device 131 generates information regarding the position of worker C 130 during work. Each imaging device then transmits the captured video and position information to the receiving unit 102, which will be described later.

[0028] Communication device 112 transmits information regarding the work time of worker A 110 to the receiving unit 102, communication device 122 transmits information regarding the work time of worker B 120 to the receiving unit 102, and communication device 132 transmits information regarding the work time of worker C 130 to the receiving unit 102. The communication device may automatically detect the start and end of work from the worker's actions and transmit the start and end times of the work to the receiving unit 102. Alternatively, the communication device may include an input unit, and the worker inputs the start and end times of the work to the communication device, which then transmits the input start and end times of the work to the receiving unit 102. Alternatively, the communication device may determine whether or not work is in progress based on the worker's location information to determine the start and end times of the work. The start and end times of the work are transmitted as separate information for each work.

[0029] The communication device also includes a display unit, which can receive information transmitted from the transmission unit and display it to the worker for notification, as will be described later. In this embodiment, an example is shown where the imaging device and the communication device are separate, but the imaging device may also perform the role of the communication device. In this case, the imaging device can determine the start time and end time of the work based on the captured video data.

[0030] Figure 7 is a schematic diagram of the determination system 100 in this embodiment. The determination system 100 includes a receiving unit 102, a determination unit 103, a transmitting unit 104, and a storage unit 105. The determination unit 103 includes a processing unit, a bus, ROM, RAM, and a storage device, and each component functions (executes) according to a program. The processing unit is a processing unit that performs calculations for control according to a program and controls each component connected to the bus. This processing unit can be composed of a CPU, a PLD such as an FPGA, an ASIC, a computer with a program installed, or a combination of all or part of these. ROM is a memory dedicated to reading data and stores programs and data. RAM is a memory for reading and writing data and is used for saving programs and data. RAM is used for temporary storage of data such as the results of CPU calculations. The storage device is also used for saving programs and data. The storage device is also used as a temporary storage area for the operating system (OS) program and data of the determination unit 103. While storage devices have slower data input / output speeds compared to RAM, they can store large amounts of data. Ideally, storage devices should be non-volatile storage devices that can store data as persistent data, allowing it to be accessed over long periods. Storage devices primarily consist of magnetic storage devices (HDDs), but they can also be devices that accept external media such as CDs, DVDs, and memory cards for reading and writing data.

[0031] The receiving unit 102 receives video information, which is video information of the work from the camera, and location information, which is information about the worker's position. The receiving unit 102 also receives information about the work time from the communication device.

[0032] The determination unit 103 identifies the work content (type of work) in the video of the work based on information about the worker's position, and compares the reference information for the identified work content with the video of the work to determine whether or not there is an abnormality in the work (whether or not the work was performed correctly).

[0033] The transmission unit 104 transmits the result of the determination unit 103 to the communication device, notifying the worker of the determination result for the work. This notification is performed, for example, by displaying the determination result on a display unit provided by the communication device. The storage unit 105 stores information of the work content criteria that the determination unit 103 uses for determination. The work content criteria information includes, for example, at least one of the following: information included in the work standard, video information of the standard work, and image information of the standard work. In this embodiment, an example is shown in which the work content criteria information is the information of the work standard. The storage unit 105 may further store the result of the determination unit 103.

[0034] Furthermore, the example in Figure 7 shows a case where the judgment system 100 does not include a camera (111, 121, 131) for photographing the worker's work and a communication device (112, 122, 132) for transmitting information regarding work time. However, the judgment system 100 may include a camera (111, 121, 131) for photographing the worker's work and a communication device (112, 122, 132) for transmitting information regarding work time.

[0035] Figure 8 is a flowchart illustrating the determination of whether or not there is an abnormality in the work in this embodiment. First, each worker performs their work at their respective work position (S110). At this time, the work position in which each worker performs their work is acquired by the position acquisition unit of the camera, and the image of each worker performing their work is captured by the camera unit. Next, the receiving unit 102 receives the position information, which is information about the worker's position acquired by the position acquisition unit in step S110, and the image information, which is information about the work captured by the camera unit. The receiving unit 102 also acquires (receives) time information from the communication device (acquisition step, S120).

[0036] Next, the determination unit 103 determines whether or not there is an abnormality in the work based on the location information and video information received by the receiving unit 102 (determination step, S130). Specifically, the location information and video information are associated for each worker, the work content in the video of each worker's work is identified based on the location information, and the video information is compared with the reference information of the identified work content to determine whether or not there is an abnormality in the worker's work. Next, the determination result from step S130 is notified (notification step, S140). Note that the notification in step S140 may be, for example, by transmitting the determination result from the transmitting unit 104 to a communication device to notify the worker of the determination result. Alternatively, the determination result may be notified by collectively transmitting the work results of all workers to a specific communication device. Note that the notification step may be performed only when there is an abnormality in the work, and in this case, the determination result may be notified only to the communication device carried by the worker whose work is deemed to have had an abnormality. Alternatively, the notification step may not be performed, and the storage unit 105 may store the determination result and make it available for later reading. Furthermore, the determination result may be made available for reference by a supervisor who will later supervise the work. Furthermore, if an abnormality is detected during the work, the abnormal part will be repeated. During this repeated work, the steps in the flowchart shown in Figure 8 will be repeated once again.

[0037] Steps S120 to S140 are a determination method performed by the determination system 100 according to a program stored internally.

[0038] Figure 9 shows an example of the workflow of an operator in the first stage. In the example in Figure 9, the workflow is shown between predetermined time intervals from time T1 to time T15. In section E 210, first, operator A 110 performs fastening work at fastening position M1 (212) between time T1 and time T3. Next, operator A 110 performs fastening work at fastening position M2 (213) between time T3 and time T5. Next, operator B 120 performs fastening work at fastening position M3 (214) between time T9 and time T11. Then, operator B 120 performs fastening work at fastening position M4 (215) between time T11 and time T14.

[0039] In section F 220, first, worker B 120 performs fastening work at fastening position M1 (222) between time T1 and time T6. Next, worker A 110 performs fastening work at fastening position M2 (223) between time T8 and time T10. Next, worker A 110 performs fastening work at fastening position M4 (224) between time T10 and time T11. Finally, worker A 110 performs fastening work at fastening position M5 (225) between time T11 and time T12.

[0040] In section G 230, first, worker C 130 performs fastening work at fastening position M1 (232) between time T1 and time T4. Next, worker C 130 performs fastening work at fastening position M3 (233) between time T4 and time T7. Then, worker C 130 performs fastening work at fastening position M5 (234) between time T8 and time T11. This completes the work in the first stage. In the first stage of work, the fastening work at M5 (216) of section E 210 has not yet been performed.

[0041] Figure 10 shows an example where workers move and change their work. Figure 10(a) shows an example where worker A 110 works in section E 210, worker B 120 works in section F 220, and worker C 130 works in section G 230. Figure 10(b) shows an example where worker B 120 works in section E 210, worker A 110 works in section F 220, and worker C 130 works in section G 230. As shown in the example in Figure 10, in the first stage, worker A 110 and worker B 120 move (swap positions) to change their work in sections E 210 and F 220.

[0042] Figure 11 shows an example of the determination process of the determination unit 103 for the work of a worker in the first stage. First, based on the location information of each worker, the determination unit 103 identifies the location where each worker performed the work and identifies the content of the work. For example, if the location information of worker A 110 is location (Xe10, Ye10), the determination unit 103 identifies the work area that is closest to location (Xe10, Ye10) and within a predetermined distance from the reference points (36, 37, 38). If location (Xe10, Ye10) is closest to reference point 36 and the distance between location (Xe10, Ye10) and reference point 36 is within a predetermined distance, the content of worker A 110's work is identified as fastening work in the work area of ​​section E 210. In this way, the general content of each worker's work (work area, work location) at each time can be identified.

[0043] Furthermore, the determination unit 103 identifies the detailed work content of the worker at each time based on the video information. For example, if the work content can be roughly identified, such as that worker A 110 was working in the work area of ​​section E 210 from time T1 to time T3, the determination unit 103 identifies the detailed work content based on the video information corresponding to time T1 to time T3. Specifically, it identifies which fastening position in section E 210 worker A 110 worked on based on the video information corresponding to time T1 to time T3. In this way, the detailed work content of each worker at each time can be identified. The identification of detailed work content based on video information is performed, for example, by pre-calibrating the relationship between the physical position of each fastening position and the distance to the reference point, and the position of each fastening position in the video and the distance to the reference point.

[0044] Next, the determination unit 103 identifies the fastening position and fastening torque for the work content identified based on the video information. The fastening position and fastening torque are information related to the work. This is calculated, for example, based on the worker's movements and posture in the video. Alternatively, the fastening torque is identified based on the torque measurement value attached to the torque wrench when fastening using a torque wrench. The determination unit 103 also calculates the work time at each fastening position. The work time is the difference between the start time and the end time of the work. Information regarding the work time (the time taken for the work) is also included in the work information.

[0045] Figure 12 is a schematic diagram of how information about the work is obtained based on torque measurements. Figure 12 shows a video of the work, and is an example of analysis using a video coordinate system with the reference point of the barrel surface plate as the origin (x0, y0). The coordinates of the physical fastening position M5 and the coordinates of the digitized video position M5 are pre-calibrated and matched, and the physical coordinates can be calculated based on the video coordinate system. Figure 12(a) shows the video before the bolt is fastened to fastening position M5. Based on the video, the center coordinates of fastening position M5 can be calculated to be (600, 601). Figure 12(b) shows the video when the bolt is fastened to fastening position M5. Based on the video, the center coordinates of bolt M5 can be calculated to be (602, 603). The fastening torque can also be calculated from the torque wrench measurement value 604 shown in the video. In addition, the work time can be calculated from the time from Figure 12(a) to Figure 12(b).

[0046] Based on the above, for the work in the first stage, as shown in Figure 11, it is possible to associate the fastening position (the position where the work was performed), the fastening torque value (the torque value during the work), the work time, and the worker for each fastening position.

[0047] Next, the determination unit 103 compares the fastening position, the fastening torque value, and the work time with reference information for the work content (for example, information from the work standard table stored in the memory unit 105) for each fastening position.

[0048] For example, as shown in Figure 11(a), the actual fastening operation in M(212) is such that the fastening position is (Xe1,Ye1), the fastening torque value is Ne1, and the work time is Te1. Also, as shown in Figure 3(b), the standard criteria in the work standard table for M(212) are such that the fastening position is (x1,y3), the fastening position adjustment range is ±m1, the fastening torque value is N1, the allowable fastening torque range is ±n1, and the standard time is ST1. The judgment unit 103 compares these and determines that there is no abnormality (OK) if the actual fastening operation meets the criteria in the work standard table.

[0049] In the example shown in Figure 11, the fastening torque value at M3 (214) in section E 210 does not meet the standard, and is therefore judged as abnormal (NG). Similarly, the fastening torque value at M5 (234) in section G 230 does not meet the standard, and is therefore judged as abnormal (NG). Furthermore, no work was performed on M5 (216) in section E 210 during the first stage. Therefore, the judgment unit 103 judges M5 (216) in section E 210 as abnormal (NG).

[0050] Figure 13 shows an example of the workflow of workers in the second stage (from time T15 onwards). In the second stage, work is performed on the fastening positions that were determined to be abnormal (NG) in the first stage. In section E 210, first, worker A 110 performs fastening work at fastening position M5 (216) between time T15 and time T17. Next, worker A 110 performs fastening work at fastening position M3 (214) between time T17 and time T18. Also, in section G 230, worker C 130 performs fastening work at fastening position M5 (234) between time T15 and time T18.

[0051] Figure 14 shows examples of the determination processing of the determination unit 103 for the workers' work in the first and second stages. First, similar to the first stage, the determination unit 103 identifies the location where each worker performed their work, identifies the content of their work, and identifies the general content of each worker's work (work area, work location) at each time point, based on the location information of each worker. Furthermore, similar to the first stage, the determination unit 103 identifies the detailed content of each worker's work at each time point, based on the video information, and identifies the detailed content of each worker's work at each time point.

[0052] Next, similar to the first stage, the determination unit 103 calculates the fastening position and fastening torque for the work content identified based on the video information. This is calculated, for example, based on the worker's movements and posture in the video. The determination unit 103 also calculates the work time at each fastening position. The work time is the difference between the start time and the end time of the work. Then, the information from the first stage is updated with the fastening position, fastening torque value, work time, and worker information for each fastening position calculated in the second stage. As a result, for work completed up to the second stage, the fastening position, fastening torque value, work time, and worker can be associated for each fastening position, as shown in Figure 14.

[0053] Next, the determination unit 103 compares the fastening position, fastening torque value, and work time for each fastening position worked on in the second stage with the standard work information (for example, information from the work standard table stored in the storage unit 105). As shown in Figure 14, the standard work information is met for all fastening positions when the second stage is completed. Therefore, the series of operations is complete. The transmission unit 104 may transmit to the communication device that all operations have been completed without any problems.

[0054] According to the determination system of this embodiment, even if a worker moves and changes their work content, it is possible to determine whether the worker's work was performed correctly by associating the work content with the video based on the worker's location information using a simple configuration. Furthermore, the determination system of this embodiment is effective not only when a single worker moves and changes their work content, but is particularly effective when multiple workers move and change their work content. According to the determination system of this embodiment, even if multiple workers move and change their work content, there is no need to provide a worker recognition system such as a facial recognition system, and it is possible to determine whether each worker's work was performed correctly using a simple configuration.

[0055] Furthermore, although this embodiment shows an example in which the worker's position is acquired by a position acquisition unit included in the imaging device, the worker's position may also be acquired by a region camera 200. Figure 15 is a schematic diagram of acquiring the worker's position by a region camera 200. The region camera 200 photographs a wide work area (predetermined area) in which the worker moves and identifies the worker's position within the work area. This work area includes, for example, multiple work positions. This identification may be done, for example, by comparing the photographed worker's face with a pre-registered image of the worker's face to identify the worker's name. Note that multiple region cameras 200 may be provided.

[0056] Furthermore, in this embodiment, the determination system 100 made a determination for one series of operations, namely the fixing operation of the projection optical system 30. However, the determination system 100 may also make determinations for multiple series of operations. For example, the system may simultaneously determine whether there are any abnormalities in the assembly operation of the illumination optical system 50 and the fixing operation of the projection optical system 30. Alternatively, the determination system 100 may determine whether there are any abnormalities in the assembly operation of multiple devices, such as exposure equipment. The determination system 100 is connected to the location where the work is performed for each device via a network. In this case, the receiving unit 102 acquires the location information of the worker and video information of the work via the network for the work on multiple devices, and the determination unit 103 determines whether there are any abnormalities in the work for each of the multiple devices.

[0057] In this embodiment, the work content was identified broadly before being identified in detail. However, if there is only one task at a given work location, it may not be necessary to identify the work content in detail, and the work content may be identified based solely on the worker's location information.

[0058] In this embodiment, the determination unit 103 calculates the work time, but the transmission unit 104 may also calculate the work time. Also, in this embodiment, the receiving unit 102 receives video information, location information, and work time information, but it is not necessary for one receiving unit 102 to receive all the information, and information may be received by multiple receiving units 102. In this case, the determination unit 103 combines the information received by multiple receiving units 102 to determine whether or not there is an abnormality in the work. Furthermore, it is not essential to compare the work time with a standard when determining whether or not there is an abnormality in the work, and a communication device may not be necessary. Also, in this embodiment, the determination was made for the work of a worker, but the determination may also be made for work performed by a robot instead of a person.

[0059] In this embodiment, the fastening work for fixing the projection optical system 30 was described as an example, but the application of the determination system 100 of this embodiment is not limited to this example. Applicable work content (type of work) includes all manufacturing-related work, such as assembly work, measurement work, transportation work, and cable connection work. In cable connection work, it is necessary to correctly connect multiple cables to predetermined positions. Therefore, it is possible to confirm whether each of the multiple cables has been connected to the predetermined position based on video information. In this case, each of the multiple cables may be identified from the identification information (label, barcode, color, etc.) of the components (cables) provided on the cable, the position to which the identified cable is connected may be identified from the video information, and it may be determined whether the position to which the identified cable is connected is correct. Here, the identification information of the components is information related to the work. Note that this determination may be applied to things other than cables, and may be applied to other work that handles multiple components.

[0060] Figure 16 is a schematic diagram of how information about work is acquired during cable-based work. Figure 16 shows a video of the work, and is an example of analysis using a video coordinate system with the origin 800 (x0, y0) as the reference point. The coordinates of the physical cable connection position P3 and the coordinates of the digitized video position P3 are pre-calibrated and matched, and the physical coordinates can be calculated based on the video coordinate system. Figure 16(a) shows the video before the cable is connected to connection position P3. Based on the video, the center coordinates of connection position P3 can be calculated to be (801, 802). Figure 16(b) shows the video when the bolt is fastened to connection position P3. Based on the video, the center coordinates of the cable connector can be calculated to be (803, 804). In addition, the connected cable can be identified from the label 805 which contains the name of the cable shown in the video. Furthermore, the work time can also be calculated from the time from Figure 16(a) to Figure 16(b).

[0061] Furthermore, although this embodiment has been described using an exposure apparatus as an example, the application of the determination system 100 of this embodiment is not limited to this example. It may also be applied to other large-scale equipment where multiple workers move around and change the work content as they proceed with the work. For example, it may be applied to the manufacture of other equipment that processes substrates such as semiconductor wafers and glass plates, such as drawing equipment, imprinting equipment, planarizing equipment, ion implantation equipment, developing equipment, etching equipment, film deposition equipment, annealing equipment, sputtering equipment, and deposition equipment. Alternatively, it may be applied to the manufacture of medical equipment (such as X-ray CT diagnostic equipment).

[0062] <Second Embodiment> This embodiment relates to a method for assembling an exposure apparatus when an operator assembles the exposure apparatus at each of multiple work locations. Figure 17 is a flowchart of the method for assembling the exposure apparatus in this embodiment. First, location information, which is information about the operator's position when the operator performs the work, and video information, which is information about the video of the operator performing the work, are acquired (acquisition step, S210). Next, based on the location information and video information acquired in the acquisition step, it is determined whether or not there is an abnormality in the work (determination step, S220). Then, additional work is performed based on the determination result of the determination step (additional work step, S230).

[0063] The products manufactured using the assembled exposure equipment (lithography equipment) include, for example, semiconductor IC elements, liquid crystal display elements, color filters, MEMS, etc.

[0064] This exposure apparatus forms a pattern on a substrate (such as a silicon wafer or glass plate) by exposing it to a photosensitive material that has been coated on it.

[0065] This assembly method makes it possible to manufacture exposure equipment of higher quality than conventional methods.

[0066] The disclosures herein include the following determination systems, determination methods, programs, and methods for assembling an exposure apparatus.

[0067] (Item 1) A determination system that makes a determination about the work performed by a worker at each of multiple work locations, A receiving unit that receives location information, which is information about the worker's position when the aforementioned work was performed, and video information, which is video information of the worker performing the aforementioned work. A determination system characterized by having a determination unit that determines whether or not there is an abnormality in the work based on the position information and video information received by the receiving unit.

[0068] (Item 2) A position acquisition unit that acquires information about the location of the worker, The determination system according to item 1, characterized by having a camera unit that photographs the work performed by the worker.

[0069] (Item 3) The determination system according to item 1 or 2, characterized in that the determination unit associates the location information with the video information.

[0070] (Item 4) The determination system according to item 3, characterized in that the determination unit identifies the work content in the video information based on the location information.

[0071] (Item 5) The determination system according to item 4, characterized in that the determination unit identifies detailed work content based on the video information.

[0072] (Item 6) The determination system according to item 4 or 5, characterized in that the determination unit compares the video information with the specified criteria information for the work content to determine whether or not there is an abnormality in the work performed by the worker.

[0073] (Item 7) The determination system according to item 6, characterized in that the information of the standards for the work content includes at least one of the following: information included in the work standard, video information of the standard work, and image information of the standard work.

[0074] (Item 8) The determination system according to item 2, characterized in that the position acquisition unit is a region camera that photographs a predetermined area in which the worker moves.

[0075] (Item 9) A determination system according to any one of items 1 to 8, characterized in that it identifies information regarding the work performed by the worker based on the aforementioned video information.

[0076] (Item 10) The determination system according to item 9, characterized in that the information relating to the work includes at least one of the following: the location where the work was performed, the torque value during the work, the identification information of the part, and the time taken for the work.

[0077] (Item 11) The determination system according to any one of items 1 to 10, characterized in that the determination unit determines whether or not there is an abnormality in the work based on the time taken for the work.

[0078] (Item 12) The determination system according to any one of items 1 to 11, characterized in that it has a transmission unit for notifying the operator of the determination result of the determination unit.

[0079] (Item 13) The determination system according to any one of items 1 to 12, characterized by having a storage unit that stores the determination result of the determination unit and stores it so that it can be read later.

[0080] (Item 14) A determination system according to any one of items 1 to 13, characterized by determining whether or not there is an abnormality in the work for each of multiple workers.

[0081] (Item 15) The determination system according to any one of items 1 to 14, characterized in that the aforementioned work is for manufacturing an exposure apparatus.

[0082] (Item 16) The receiving unit acquires the location information and video information via the network for operations on multiple devices. The determination system according to any one of items 1 to 15, characterized in that the determination unit determines whether or not there is an abnormality in the work for each of the operations performed on the plurality of devices.

[0083] (Item 17) A determination method for determining the work performed by a worker at each of multiple work locations, An acquisition step of acquiring location information, which is information about the position of the worker when the aforementioned work was performed, and video information, which is information about the video of the worker when the aforementioned work was performed. A determination method characterized by including a determination step of determining whether or not there is an abnormality in the work based on the position information and video information acquired in the acquisition step.

[0084] (Item 18) A program to cause a computer to execute the judgment method described in item 17.

[0085] (Item 19) A method for assembling an exposure device when an operator assembles the exposure device at each of multiple work positions, An acquisition step of acquiring location information, which is information about the position of the worker when the aforementioned work was performed, and video information, which is information about the video of the worker when the aforementioned work was performed. A determination step, which determines whether or not there is an abnormality in the work based on the position information and video information acquired in the acquisition step, An additional work step is performed in which the above work is carried out in addition based on the determination result of the above determination step, A method for assembling an exposure apparatus, characterized by including the following:

[0086] The invention is not limited to the embodiments described above, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, claims are attached to disclose the scope of the invention.

Claims

1. A determination system that makes a determination about the work performed by a worker at each of multiple work locations, A receiving unit that receives location information, which is information about the worker's position when the aforementioned work was performed, and video information, which is video information of the worker performing the aforementioned work. A determination system characterized by having a determination unit that determines whether or not there is an abnormality in the work based on the position information and video information received by the receiving unit.

2. A position acquisition unit that acquires information about the location of the worker, The determination system according to claim 1, further comprising a camera unit for photographing the work performed by the worker.

3. The determination system according to claim 1, characterized in that the determination unit associates the position information with the video information.

4. The determination system according to claim 3, characterized in that the determination unit identifies the work content in the video information based on the position information.

5. The determination system according to claim 4, characterized in that the determination unit identifies detailed work content based on the video information.

6. The determination system according to claim 4 or 5, characterized in that the determination unit compares the video information with the specified reference information for the work content and determines whether or not there is an abnormality in the work performed by the worker.

7. The determination system according to claim 6, characterized in that the information for the standards of the work content includes at least one of the following: information included in the work standard, video information of the standard work, and image information of the standard work.

8. The determination system according to claim 2, characterized in that the position acquisition unit is a region camera that photographs a predetermined area in which the worker moves.

9. The determination system according to claim 1, characterized in that it identifies information regarding the work performed by the worker based on the video information.

10. The determination system according to claim 9, characterized in that the information relating to the work includes at least one of the following: the location where the work was performed, the torque value during the work, the identification information of the part, and the time taken for the work.

11. The determination system according to claim 1, characterized in that the determination unit determines whether or not there is an abnormality in the work based on the time taken for the work.

12. The determination system according to claim 1, further comprising a transmission unit for notifying the operator of the determination result of the determination unit.

13. The determination system according to claim 1, further comprising a storage unit that stores the determination result of the determination unit and stores it in a manner that allows it to be read later.

14. The determination system according to claim 1, characterized in that it determines whether or not there is an abnormality in the work for each of the multiple workers.

15. The determination system according to claim 1, characterized in that the aforementioned work is for manufacturing an exposure apparatus.

16. The receiving unit acquires the location information and video information via the network for operations on multiple devices. The determination system according to claim 1, characterized in that the determination unit determines whether or not there is an abnormality in the work performed on each of the plurality of devices.

17. A determination method for determining the work performed by a worker at each of multiple work locations, An acquisition step of acquiring location information, which is information about the position of the worker when the aforementioned work was performed, and video information, which is information about the video of the worker when the aforementioned work was performed. A determination method characterized by including a determination step of determining whether or not there is an abnormality in the work based on the position information and video information acquired in the acquisition step.

18. A program for causing a computer to execute the determination method described in claim 17.

19. A method for assembling an exposure device when an operator assembles the exposure device at each of multiple work positions, An acquisition step of acquiring location information, which is information about the position of the worker when the aforementioned work was performed, and video information, which is information about the video of the worker when the aforementioned work was performed. A determination step, which determines whether or not there is an abnormality in the work based on the position information and video information acquired in the acquisition step, An additional work step is performed in which the above work is carried out in addition based on the determination result of the above determination step, A method for assembling an exposure apparatus, characterized by including the following:

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