Manufacturing system and method for controlling the manufacturing system

Abstract

The present invention provides a manufacturing system that includes a manufacturing device into which a specific gas is supplied and which shuts down during the demand response period, and which can shorten the period from the end of the demand response period until work using the manufacturing device can be started. [Solution] The manufacturing system includes a manufacturing apparatus into which a specific gas is supplied and which shuts down during the demand response period; a gas generating apparatus that generates the specific gas and which shuts down during the demand response period; a gas storage apparatus that stores the specific gas; and a control device that initiates advance supply at an advance supply start time prior to the end of the demand response period, supplying the specific gas stored in the gas storage apparatus to the manufacturing apparatus.

Description

Technical Field

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[0001] The present disclosure relates to a manufacturing system and a method for controlling the manufacturing system.

Background Art

[0002] Patent Document 1 below discloses a reflow furnace for heating a printed circuit board in the process of soldering electronic components to the printed circuit board. By supplying an inert gas such as nitrogen gas to the reflow furnace to reduce the oxygen concentration in the reflow furnace, oxidation of the solder and components is suppressed, and the quality of the product is improved.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] The present disclosure aims to provide a manufacturing system and a control method for said manufacturing system, which includes a manufacturing apparatus that is supplied with a specific gas internally and shuts down during a demand response period, and which can shorten the period from the end of the demand response period until work using the manufacturing apparatus can be started. [Means for solving the problem]

[0007] To solve the above problems, a manufacturing system according to one aspect of the present disclosure includes: a manufacturing apparatus to which a specific gas is supplied internally and which shuts down during a demand response period; a gas generating apparatus that generates the specific gas and shuts down during the demand response period; a gas storage apparatus for storing the specific gas; and a control device that initiates advance supply to supply the specific gas stored in the gas storage apparatus to the manufacturing apparatus at an advance supply start time prior to the end of the demand response period.

[0008] Furthermore, a control method according to one aspect of the present disclosure is a control method for a manufacturing system comprising: a manufacturing apparatus to which a specific gas is supplied internally and which shuts down during a demand response period; a gas generating apparatus that generates the specific gas and shuts down during the demand response period; and a gas storage apparatus that stores the specific gas, wherein a pre-supply is started at a pre-supply start time prior to the end time of the demand response period, supplying the specific gas stored in the gas storage apparatus to the manufacturing apparatus. [Effects of the Invention]

[0009] A manufacturing system and control method according to one aspect of this disclosure has the effect of shortening the period from the end of the demand response period until work using the manufacturing equipment can be started. [Brief explanation of the drawing]

[0010] [Figure 1] Figure 1 is a diagram of the manufacturing system. [Figure 2] Figure 2 is a block diagram of the control system of the manufacturing system. [Figure 3] Figure 3 is a flowchart of the advance supply program. [Modes for carrying out the invention]

[0011] If a power company or aggregator issues a demand response order to a factory to reduce its electricity demand, the factory can comply with the request by shutting down equipment with high power consumption during the demand response period. Manufacturing equipment such as reflow ovens and gas generators that produce specific gases such as nitrogen gas supplied to manufacturing equipment consume a lot of power, so shutting down these devices during the demand response period can significantly contribute to reducing the factory's electricity demand.

[0012] However, for manufacturing equipment that is supplied with a specific gas, the preparation period from the start of gas supply to the start of work using the manufacturing equipment is very long. Therefore, if the operation of the above-mentioned manufacturing equipment or gas generator is stopped during the demand response period, it will not be possible to resume work using the manufacturing equipment immediately after the demand response period ends, resulting in a significant decrease in work efficiency. Conversely, if the period from the end of the demand response period to the start of work using the manufacturing equipment can be shortened, work efficiency can be improved.

[0013] Therefore, the manufacturing system according to the first aspect of the present disclosure comprises: a manufacturing apparatus to which a specific gas is supplied internally and which shuts down during a demand response period; a gas generating apparatus that generates the specific gas and shuts down during the demand response period; a gas storage apparatus for storing the specific gas; and a control device that initiates advance supply to supply the specific gas stored in the gas storage apparatus to the manufacturing apparatus at an advance supply start time prior to the end of the demand response period.

[0014] In this manufacturing system, advance supply of a specific gas stored in a gas storage device to the manufacturing equipment begins before the demand response period ends. In other words, preparations for using the manufacturing equipment are carried out ahead of schedule using the specific gas stored in the gas storage device. Therefore, this manufacturing system can shorten the period from the end of the demand response period to the start of operations using the manufacturing equipment.

[0015] The manufacturing system of the second embodiment of this disclosure is capable of supplying the specific gas stored in the gas storage device to the manufacturing device even when the power supply to the manufacturing device and the gas generator is stopped, as in the manufacturing system of the first embodiment.

[0016] In this manufacturing system, even if the power supply to the manufacturing equipment and gas generator is interrupted, a specific gas stored in the gas storage device can be supplied to the manufacturing equipment, allowing for the commencement of advance supply before the end of the demand response period.

[0017] In the manufacturing system according to the third aspect of the present disclosure, in the manufacturing system according to the first aspect, the internal pressure of the gas storage device before the start of the preliminary supply is less than 1.0 MPaG.

[0018] In this manufacturing system, since the internal pressure of the gas storage device is less than 1.0 MPaG, it is easy to handle the manufacturing system.

[0019] In the manufacturing system according to the fourth aspect of the present disclosure, in the manufacturing system according to the first aspect, the control device calculates a supply continuation period during which the preliminary supply can be continued, and sets the preliminary supply start time based on the supply continuation period.

[0020] In this manufacturing system, since the preliminary supply start time is set based on the supply continuation period during which the preliminary supply can be continued, an appropriate preliminary supply start time can be set.

[0021] In the manufacturing system according to the fifth aspect of the present disclosure, in the manufacturing system according to the fourth aspect, the control device acquires the internal pressure of the gas storage device, and calculates the supply continuation period based on the internal pressure of the gas storage device.

[0022] Since the gas supply continuation period can be accurately calculated based on the internal pressure of the storage device, according to this manufacturing system, an appropriate preliminary supply start time can be set.

[0023] In the manufacturing system according to the sixth aspect of the present disclosure, in the manufacturing system according to the fourth aspect, when the supply continuation period is longer than the demand response period, the control device sets the preliminary supply start time to the start time of the demand response period.

[0024] In this manufacturing system, when the supply duration is longer than the demand response period, the advance supply start time is set to the start time of the demand response period. In other words, when the supply duration is longer than the demand response period, the specific gas continues to be supplied to the manufacturing equipment without interruption even during the demand response period. In this case, after the end of the demand response period, operations using the manufacturing equipment can be resumed immediately.

[0025] A manufacturing system according to a seventh aspect of the present disclosure, in a manufacturing system according to a first aspect, the control device performs a normal supply of the specific gas from the gas generator to the manufacturing apparatus without going through the gas storage device during normal times when there is no demand response period, and adjusts the pressure of the specific gas supplied to the manufacturing apparatus so that the internal pressure of the manufacturing apparatus during the normal supply is the same as the internal pressure of the manufacturing apparatus during the advance supply.

[0026] In this manufacturing system, the internal pressure of the manufacturing equipment during normal supply is the same as the internal pressure of the manufacturing equipment during advance supply. Therefore, the internal pressure of the manufacturing equipment does not fluctuate significantly before and after the end of the demand response period. Consequently, preparation work for the manufacturing equipment can be carried out stably.

[0027] The eighth aspect of the manufacturing system of the present disclosure is the manufacturing system of the first aspect, wherein the manufacturing apparatus is a reflow furnace and the specific gas is nitrogen gas.

[0028] This manufacturing system allows for a reduction in the time between the end of the demand response period and the start of operations using the reflow oven.

[0029] A manufacturing system according to a ninth aspect of the present disclosure, in a manufacturing system according to a first aspect, wherein the control device performs pre-storage of the specific gas in the gas storage device before the demand response period.

[0030] According to this manufacturing system, pre-storage is performed by storing specific gases in a gas storage device before the demand response period, allowing for a rapid commencement of pre-supply at the pre-supply commencement time.

[0031] The control method of the present disclosure is a control method for a manufacturing system comprising: a manufacturing apparatus to which a specific gas is supplied internally and which shuts down during a demand response period; a gas generating apparatus that generates the specific gas and shuts down during the demand response period; and a gas storage apparatus that stores the specific gas, wherein a pre-supply is started at a pre-supply start time prior to the end time of the demand response period, supplying the specific gas stored in the gas storage apparatus to the manufacturing apparatus.

[0032] In this control method, advance supply of a specific gas stored in the gas storage device to the manufacturing device is initiated before the demand response period ends. In other words, preparations for using the manufacturing device are brought forward by utilizing the specific gas stored in the gas storage device. Therefore, this control method can shorten the period from the end of the demand response period to the start of operations using the manufacturing device.

[0033] The following describes specific examples of the above embodiments of this disclosure with reference to the attached drawings. The specific examples described below are all examples of the above embodiments of this disclosure. Therefore, the shapes, numerical values, components, arrangement positions of components, and connection configurations shown below do not limit the scope of the claims unless they are described in the claims.

[0034] Furthermore, among the components described below, those not described in the independent claim representing the highest-level concept of this disclosure will be described as optional components. Also, in the drawings, components with the same reference numeral may not be described. The drawings are schematic representations of each component for ease of understanding, and the shape and dimensional ratios may not be accurately represented.

[0035] Furthermore, in the operation of the apparatus, the order of the processes may be changed or known processes may be added as needed.

[0036] (Overall system configuration) First, the overall configuration of the manufacturing system 100 according to this embodiment will be described. The manufacturing system 100 according to this embodiment is a system for manufacturing unit boards in which electronic components are soldered to printed circuit boards. However, the manufacturing system 100 is not limited to a system for manufacturing unit boards, but may be a system for manufacturing products other than unit boards. Figure 1 is a system diagram of the manufacturing system 100. However, in Figure 1, some equipment such as check valves are omitted from the illustration. Figure 2 is a block diagram of the control system of the manufacturing system 100.

[0037] As shown in Figure 1, the manufacturing system 100 according to this embodiment includes a manufacturing apparatus 10, a gas generator 20, a gas storage apparatus 30, a main flow path 40, and a sub-flow path 50. Furthermore, as shown in Figure 2, the manufacturing system 100 according to this embodiment includes a control device 60. These components will be described in detail below.

[0038] <Manufacturing equipment> The manufacturing apparatus 10 is a device used in the process of manufacturing a product. In this embodiment, the manufacturing apparatus 10 is a reflow oven that heats a printed circuit board in the process of soldering electronic components to the printed circuit board. A specific gas is supplied inside the manufacturing apparatus 10. In this embodiment, the specific gas is nitrogen gas. By supplying nitrogen gas inside the reflow oven that heats the printed circuit board and keeping the oxygen concentration inside the reflow oven below a certain value, oxidation of solder and electronic components can be suppressed, and the quality of the unit board can be improved.

[0039] The manufacturing apparatus 10 in this embodiment is not sufficiently sealed inside, and the specific gas supplied to the inside of the manufacturing apparatus 10 leaks out to the outside. In order to perform work using the manufacturing apparatus 10, it is necessary to supply a large amount of the specific gas inside the manufacturing apparatus 10 to reduce the oxygen concentration inside the manufacturing apparatus 10 to below a certain value. It may take, for example, several hours from the start of supplying the specific gas to the manufacturing apparatus 10 until the manufacturing apparatus 10 is ready to be used for work.

[0040] The manufacturing equipment 10 will shut down for the specified demand response period if a demand response is issued for the factory, including the manufacturing system 100. The internal pressure of the manufacturing equipment 10 when it is in operation is very high, for example, about 0.5 MPaG (gauge pressure). Therefore, if the supply of a specific gas to the manufacturing equipment 10 is stopped, the specific gas will leak out from inside the manufacturing equipment 10 to the outside. After the supply of the specific gas to the manufacturing equipment 10 is stopped, the internal pressure of the manufacturing equipment 10 will drop to atmospheric pressure (0 MPaG). The manufacturing equipment 10 is equipped with a manufacturing equipment pressure gauge 11 to measure the internal pressure of the manufacturing equipment 10.

[0041] <Gas Generator> The gas generator 20 is a device that generates a specific gas. In this embodiment, the gas generator 20 is a nitrogen gas generator that generates nitrogen gas. Similar to the manufacturing device 10, the gas generator 20 will shut down for a specified demand response period if a demand response is issued to the factory including the manufacturing system 100. In other words, during the demand response period, the gas generator 20 cannot directly supply the specific gas to the manufacturing device 10.

[0042] <Gas storage device> The gas storage device 30 is a device for storing a specific gas. In this embodiment, the gas storage device 30 is installed in a sub-flow channel 50, which will be described later. The gas storage device 30 can store a specific gas at a pressure higher than the internal pressure (0 MPaG in this embodiment) when the manufacturing device 10 is stopped. The gas storage device 30 is also equipped with a storage pressure gauge 31 for measuring the internal pressure of the gas storage device 30.

[0043] <Main channel> The main flow path 40 is a flow path connecting the manufacturing device 10 and the gas generator 20. The main flow path 40 is formed by piping, etc. The specific gas produced in the gas generator 20 can be supplied to the manufacturing device 10 via the main flow path 40. The main flow path 40 is equipped with a main flow path valve 41 and a control valve 42. The control valve 42 is located downstream of the main flow path valve 41 in the main flow path 40. A branch section 43 is located upstream of the main flow path valve 41 in the main flow path 40. Furthermore, a confluence section 44 is located downstream of the main flow path valve 41 and upstream of the control valve 42 in the main flow path 40.

[0044] <Subchannel> The sub-channel 50 is a bypass channel for the main channel 40. The sub-channel 50 is formed by piping or the like. In this embodiment, the upstream end of the sub-channel 50 is connected to the branch section 43 of the main channel 40 described above, and the downstream end of the sub-channel 50 is connected to the confluence section 44 of the main channel 40 described above. The specific gas that flows into the sub-channel 50 from the branch section 43 of the main channel 40 passes through the sub-channel 50 and flows into the main channel 40 via the confluence section 44 of the main channel 40.

[0045] In addition to the gas storage device 30 mentioned above, the sub-channel 50 is equipped with an upstream valve 51, a downstream valve 52, an upstream booster 53, and a downstream booster 54. The upstream valve 51 is located in the sub-channel 50 upstream of the gas storage device 30. The downstream valve 52 is located in the sub-channel 50 downstream of the gas storage device 30.

[0046] The upstream booster 53 is a device that boosts the pressure of a specific gas supplied to the gas storage device 30. The upstream booster 53 is located in the sub-flow channel 50 upstream of the gas storage device 30. In this embodiment, the upstream booster 53 is located in the sub-flow channel 50 downstream of the sub-flow channel upstream valve 51. However, the upstream booster 53 may also be located in the sub-flow channel 50 upstream of the sub-flow channel upstream valve 51.

[0047] The downstream booster 54 is a device that boosts the pressure of a specific gas discharged from the gas storage device 30. The downstream booster 54 is located in the sub-flow channel 50 downstream of the gas storage device 30. In this embodiment, the downstream booster 54 is located in the sub-flow channel 50 downstream of the sub-flow channel downstream valve 52. However, the downstream booster 54 may also be located in the sub-flow channel 50 upstream of the sub-flow channel downstream valve 52.

[0048] <Control device> The control device 60 includes a processor, volatile memory, non-volatile memory, and an I / O interface. The non-volatile memory of the control device 60 stores various programs, including the "advance supply program" described later, and the processor performs calculations using the volatile memory based on each program. The control device 60 may consist of one device or multiple devices. For example, the control device 60 may consist of multiple devices connected by a network.

[0049] As shown in Figure 2, the control device 60 is communicatively connected to the manufacturing equipment pressure gauge 11 and the storage pressure gauge 31. The control device 60 can obtain the internal pressure of the manufacturing equipment 10 by receiving a measurement signal from the manufacturing equipment pressure gauge 11. Similarly, the control device 60 can obtain the internal pressure of the gas storage device 30 by receiving a measurement signal from the storage pressure gauge 31.

[0050] Furthermore, the control device 60 is connected to the main flow valve 41, the control valve 42, the sub-flow upstream valve 51, and the sub-flow downstream valve 52 in a communication manner. The control device 60 can adjust the opening degree of each of these valves 41, 42, 51, and 52 by transmitting control signals to each of these valves 41, 42, 51, and 52.

[0051] Furthermore, the control device 60 is communicatively connected to the upstream booster 53 and the downstream booster 54. The control device 60 can control the pressure of a specific gas supplied to the gas storage device 30 by transmitting a control signal to the upstream booster 53. Similarly, the control device 60 can control the pressure of a specific gas discharged from the gas storage device 30 by transmitting a control signal to the downstream booster 54.

[0052] <Supply routes for specific gases> During normal operation, outside of the demand response period, a normal supply is performed in which the specific gas is supplied from the gas generator 20 to the manufacturing device 10 without going through the gas storage device 30. In other words, in a normal supply, the specific gas produced in the gas generator 20 is supplied from the gas generator 20 to the manufacturing device 10 via the main flow path 40. In a normal supply, the main flow path valve 41 is opened, and the pressure of the specific gas supplied to the manufacturing device 10 is adjusted using the control valve 42.

[0053] On the other hand, prior to the end of the demand response period, a pre-supply is performed in which a specific gas stored in the gas storage device 30 is supplied to the manufacturing device 10. In other words, during the pre-supply, the specific gas is supplied to the manufacturing device 10 via the gas storage device 30 (i.e., via the sub-flow channel 50). During the demand response period, the main flow channel valve 41 is closed. Details of the pre-supply will be explained below.

[0054] (Early supply program) Next, the advance supply program executed by the control device 60 will be described. Figure 3 is a flowchart of the advance supply program. The advance supply program is a program that performs pre-storage by storing a specific gas in the gas storage device 30 in advance, and then starts advance supply by supplying the specific gas stored in the gas storage device 30 to the manufacturing device 10 before the end of the demand response period.

[0055] As shown in Figure 3, once the advance supply program is started, the control device 60 determines whether or not a demand response has been issued (step S1). When a demand response is issued by a power company or aggregator to a factory including the manufacturing system 100, demand response information is provided to the control device 60 from, for example, the factory's management system. Based on this demand response information, the control device 60 can determine whether or not a demand response has been issued. Naturally, the period before a demand response is issued is before the demand response period.

[0056] When a demand response order is issued, the manufacturing equipment 10 and the gas generator 20 will shut down for the specified demand response period. The shutdown of the manufacturing equipment 10 and the gas generator 20 may be performed manually by an operator or automatically by the control device 60. However, the control system equipment (control device 60, valves 41, 42, 51, 52, and boosters 53, 54) can remain operational even during the demand response period.

[0057] If the control device 60 determines in step S1 that no demand response has been issued (NO in step S1), it determines whether the current time is within the storage period (step S2). The storage period is the period during which the storage of a specific gas in the gas storage device 30 (pre-storage) is carried out. In this embodiment, the storage period is a time such as nighttime when electricity rates are lower than the average daily rate. However, the storage period is not limited to the above-mentioned time period.

[0058] If the control device 60 determines in step S2 that it is not a storage time period (NO in step S2), it returns to step S1. On the other hand, if the control device 60 determines in step S2 that the current time is a storage time period (YES in step S2), it obtains the internal pressure of the gas storage device 30 (step S3). The control device 60 can obtain the internal pressure of the gas storage device 30 from the storage pressure gauge 31.

[0059] After performing step S3, the control device 60 determines whether the internal pressure of the gas storage device 30 obtained in step S3 is lower than the target storage pressure (step S4). In this embodiment, the target storage pressure is higher than the internal pressure when the manufacturing device 10 is stopped (atmospheric pressure in this embodiment; 0 MPaG) and less than 1.0 MPaG. For example, the target storage pressure may be 0.9 MPaG.

[0060] If the volume of the gas storage device 30 is V (L), then when the internal pressure of the gas storage device 30 is 0 MPaG, 0.1 MPaG, 0.2 MPaG, ..., 0.9 MPaG, the amount of the specific gas stored by the gas storage device 30 will be 1 V (NL; normal liters), 2 V (NL), 3 V (NL), ..., 10 V (NL), respectively. In other words, when the internal pressure of the gas storage device 30 is 0.9 MPaG, it stores 10 times its volume in the amount of the specific gas.

[0061] If the control device 60 determines in step S4 that the internal pressure of the gas storage device 30 is not lower than the target storage pressure (NO in step S4), that is, if the internal pressure of the gas storage device 30 has reached the target storage pressure, it returns to step S1. On the other hand, if the control device 60 determines in step S4 that the internal pressure of the gas storage device 30 is lower than the target storage pressure (YES in step S4), it performs pre-storage by storing a specific gas in the gas storage device 30 (step S5).

[0062] Specifically, the control device 60 opens the upstream valve 51 of the sub-channel shown in Figure 1 and activates the upstream booster 53. As a result, the specific gas generated in the gas generator 20 flows into the sub-channel 50, and the specific gas that flows into the sub-channel 50 is pressurized by the upstream booster 53 and stored in the gas storage device 30. At this time, the downstream valve 52 of the sub-channel is closed and the downstream booster 54 is stopped. In addition, the main channel valve 41 and the control valve 42 are open when the manufacturing device 10 is operating and closed when the manufacturing device 10 is stopped.

[0063] After performing step S5, the control device 60 returns to step S1 and repeats the steps from step S1 onward. Therefore, if no demand response has been issued (NO in step S1) and the current time is within the storage period (YES in step S2), pre-storage is performed until the internal pressure of the gas storage device 30 reaches the target storage pressure. As a result, after pre-storage is completed (before the start of advance supply), the internal pressure of the gas storage device 30 becomes the target storage pressure. As mentioned above, in this embodiment, the target storage pressure is less than 1.0 MPaG. Therefore, according to this embodiment, the manufacturing system 100 can be operated even by someone who is not a certified high-pressure gas handling supervisor, making the handling of the manufacturing system 100 easier.

[0064] On the other hand, if a demand response is issued during pre-storage (YES in step S1), or if the current time falls outside the storage time zone (NO in step S2), the internal pressure of the gas storage device 30 will be lower than the target storage pressure, and pre-storage will be interrupted. When pre-storage is completed or interrupted, the control device 60 closes the sub-flow channel upstream valve 51 and stops the upstream booster 53.

[0065] In this embodiment, the series of steps related to pre-storage are performed by the control device 60, but they may also be performed by an operator. In other words, pre-storage may be performed manually. In this case, steps S2 to S5 can be omitted from the advance supply program.

[0066] If the control device 60 determines in step S1 that a demand response has been issued (YES in step S1), it obtains the internal pressure of the gas storage device 30 (step S6).

[0067] After performing step S6, the control device 60 calculates the supply continuation period during which advance supply can be continued (step S7). As mentioned above, advance supply refers to supplying the specific gas stored in the gas storage device 30 to the manufacturing device 10 before the completion of the demand response period. The supply continuation period can be calculated by dividing the amount of specific gas stored in the gas storage device 30 by the amount of specific gas supplied to the manufacturing device 10 per unit time. In this embodiment, the amount of specific gas supplied to the manufacturing device 10 per unit time is predetermined, and the amount of specific gas stored in the gas storage device 30 can be calculated based on the internal pressure of the gas storage device 30. Therefore, the supply continuation period can be calculated based on the internal pressure of the gas storage device 30.

[0068] After performing step S7, the control device 60 sets the advance supply start time (step S8). The advance supply start time is the time when advance supply begins. In this embodiment, the advance supply start time is after the start time of the demand response period and before the end time of the demand response period. In this embodiment, the control device 60 sets the advance supply start time to a time before the supply continuation period ends and before the end time of the demand response period. For example, if the end time of the demand response period is 3:00 p.m. and the supply continuation period is 30 minutes, the control device 60 sets the advance supply start time to 2:30 p.m.

[0069] Furthermore, the control device 60 may set the advance supply start time to a time that is delayed by a predetermined buffer period before the end time of the demand response period and before the supply continuation period. For example, if the end time of the demand response period is 3:00 p.m., the supply continuation period is 30 minutes, and the buffer period is 5 minutes, the control device 60 may set the advance supply start time to 2:35 p.m.

[0070] Furthermore, if the supply continuation period is longer than the demand response period, the control device 60 may set the advance supply start time to the start time of the demand response period. For example, if the demand response period starts at 2:00 p.m. and ends at 3:00 p.m. (i.e., the demand response period is 1 hour), and the supply continuation period is 70 minutes, the control device 60 may set the advance supply start time to 2:00 p.m., which is the start time of the demand response period.

[0071] After performing step S8, the control device 60 determines whether the current time is the start time for the advance supply (step S9). If the control device 60 determines in step S9 that the current time is not the start time for the advance supply (NO in step S9), it repeats step S9. On the other hand, if the control device 60 determines in step S9 that the current time is the start time for the advance supply (YES in step S9), it performs the advance supply (step S10). In other words, the control device 60 supplies the specific gas from the gas storage device 30 to the manufacturing device 10.

[0072] Specifically, the control device 60 opens the sub-flow channel downstream valve 52. Before the start of pre-supply, the internal pressure of the gas storage device 30 (in the above example, the internal pressure of the gas storage device 30 when pre-storage is complete is 0.9 MPaG) is higher than the internal pressure of the manufacturing device 10 when it is stopped (in the above example, 0 MPaG). Therefore, when the sub-flow channel downstream valve 52 is opened, the specific gas stored in the gas storage device 30 flows toward the manufacturing device 10 due to the pressure difference between the two internal pressures. However, if the internal pressure of the gas storage device 30 decreases, the control device 60 activates the downstream booster 54.

[0073] As described above, in addition to the pressure difference between the gas storage device 30 and the manufacturing device 10, the control system equipment (control device 60, valves 41, 42, 51, 52, and boosters 53, 54) can operate even if the power supply to the manufacturing device 10 and the gas generator 20 is stopped. Therefore, the manufacturing system 100 according to this embodiment can supply the specific gas stored in the gas storage device 30 to the manufacturing device 10 even if the power supply to the manufacturing device 10 and the gas generator 20 is stopped.

[0074] The control device 60 may also adjust the pressure of the specific gas supplied to the manufacturing apparatus 10 so that the internal pressure of the manufacturing apparatus 10 during pre-supply is the same as the internal pressure of the manufacturing apparatus 10 during normal supply. Specifically, the control device 60 may obtain the internal pressure of the manufacturing apparatus 10 from the manufacturing apparatus pressure gauge 11, regardless of whether it is during pre-supply or normal supply, and feedback control the opening degree of the control valve 42 so that the internal pressure of the manufacturing apparatus 10 becomes a specified pressure.

[0075] After performing step S10, the control device 60 determines whether the current time is the end time of the demand response period (step S11). If the control device 60 determines in step S11 that the current time is not the end time of the demand response period (NO in step S11), it returns to step S10 and performs advance supply. In other words, it continues to perform advance supply until the demand response period ends.

[0076] On the other hand, if the control device 60 determines in step S11 that the current time is the end time of the demand response period (YES in step S11), it terminates the advance supply (step S12). Specifically, the control device 60 closes the sub-flow channel downstream valve 52 and, if the downstream booster 54 is operating, stops the downstream booster 54. This is the flow of the advance supply program. After the advance supply program ends, that is, after the demand response period ends, the control device 60 performs normal supply.

[0077] As explained above, the manufacturing system 100 according to this embodiment starts supplying the specific gas to the manufacturing apparatus 10 before the end of the demand response period, rather than after the end of the demand response period. In other words, preparations for using the manufacturing apparatus 10 are carried out in advance. Therefore, the manufacturing system 100 according to this embodiment can shorten the period from the end of the demand response period to the start of work using the manufacturing apparatus 10. [Industrial applicability]

[0078] One aspect of this disclosure is a manufacturing system comprising a manufacturing apparatus that is supplied with a specific gas internally and shuts down during a demand response period, which can be used to shorten the period from the end of the demand response period until work using the manufacturing apparatus can be started, and a control method for said manufacturing system. [Explanation of symbols]

[0079] 10: Manufacturing equipment 11:Manufacturing equipment pressure gauge 20: Gas generator 30: Gas storage device 31: Storage pressure gauge 40: Main channel 41: Main flow valve 42: Regulating valve 43: Branching point 44: Confluence 50: Subchannel 51: Sub-flow channel upstream valve 52: Sub-flow channel downstream valve 53: Upstream step-up converter 54: Downstream step-up transformer 60: Control device 100: Manufacturing System

Claims

1. A manufacturing device that is supplied with a specific gas internally and shuts down during the demand response period, A gas generator that produces the aforementioned specific gas and shuts down during the demand response period, A gas storage device for storing the aforementioned specific gas, A manufacturing system comprising: a control device that initiates a pre-supply to supply the specific gas stored in the gas storage device to the manufacturing device at a pre-supply start time prior to the end time of the demand response period.

2. The manufacturing system according to claim 1, wherein even if the power supply to the manufacturing apparatus and the gas generator is stopped, the specific gas stored in the gas storage device can be supplied to the manufacturing apparatus.

3. The manufacturing system according to claim 1, wherein the internal pressure of the gas storage device before the commencement of the aforementioned advance supply is less than 1.0 MPaG.

4. The manufacturing system according to claim 1, wherein the control device calculates a supply continuation period during which the advance supply can be continued, and sets the advance supply start time based on the supply continuation period.

5. The manufacturing system according to claim 4, wherein the control device acquires the internal pressure of the gas storage device and calculates the supply continuation period based on the internal pressure of the gas storage device.

6. The manufacturing system according to claim 4, wherein the control device sets the advance supply start time to the start time of the demand response period when the supply continuation period is longer than the demand response period.

7. The manufacturing system according to claim 1, wherein the control device performs a normal supply of the specific gas from the gas generator to the manufacturing apparatus without going through the gas storage device during normal times when it is not the demand response period, and adjusts the pressure of the specific gas supplied to the manufacturing apparatus so that the internal pressure of the manufacturing apparatus during the normal supply is the same as the internal pressure of the manufacturing apparatus during the advance supply.

8. The manufacturing apparatus is a reflow furnace, The manufacturing system according to claim 1, wherein the specified gas is nitrogen gas.

9. The manufacturing system according to claim 1, wherein the control device performs pre-storage of the specific gas in the gas storage device before the demand response period.

10. A manufacturing device that is supplied with a specific gas internally and shuts down during the demand response period, A gas generator that produces the aforementioned specific gas and shuts down during the demand response period, A control method for a manufacturing system comprising a gas storage device for storing the specified gas, A control method for initiating a pre-supply to supply the specific gas stored in the gas storage device to the manufacturing device at a pre-supply start time prior to the end time of the demand response period.

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