Substrate container for automated handling

Abstract

To provide a substrate container for automatic handling that prevents a situation in which the weight of the substrate container is too heavy and the container body is deformed or burst when a claw part grips a joint part. [Solution] The substrate container for automated handling is used for gripping and transporting with a claw portion and comprises a container body (10), a conversion joint (20), and a joint (30). The container body includes a top plate (11), a bottom plate (12), a pair of side plates (13), and a back plate. The top plate and bottom plate are arranged opposite each other, and each side plate is arranged opposite each other. The back plate is connected to the top plate, and a cavity (15) is jointly formed between the bottom plate and each side plate. The conversion joint is fixed to one side of each side plate facing away from the bottom plate and to the top plate, and the joint is fixed to one side of the conversion joint facing away from the container body and used for gripping with the claw portion. In this way, the conversion joint strengthens the structural strength of the upper part of the substrate container.

Description

[Technical Field]

[0001] The present invention relates to a substrate container in the semiconductor field, and more particularly to a substrate container for automated handling. [Background technology]

[0002] With the rise and development of industry, many manufacturers are gradually introducing semi-automated and automated equipment and facilities to reduce labor costs, shorten assembly processes, and reduce manufacturing costs while effectively increasing manufacturing efficiency and yield. Common semi-automated and automated equipment in transport systems include conveyors, automated guided vehicles (AGVs), autonomous mobile robots (AMRs), and overhead hoist transfer (OHT). OHTs use rails installed in the air (ceiling) and a lifting device to drive a belt or steel wire that moves up and down. A gripping device then grasps or places an item on the rail, which then moves it along the rail to the required location. This enables stable and high-speed transport and effectively utilizes indoor space by avoiding floor space occupancy. Summary of the Invention [Problem to be solved by the invention]

[0003] In the semiconductor industry, substrate containers are often used to carry multiple substrates, such as wafers, glass substrates, or printed circuit boards. They allow multiple substrates to be loaded and transported simultaneously to their required locations or to different processing sections, protecting each substrate from contamination and damage caused by the external environment during the loading and transport process. A typical substrate container can weigh more than 10 kg after loading multiple substrates, so most substrate containers are made of plastic to effectively reduce weight and ease the burden of transportation. However, when substrate containers are used in OHT, the plastic material can easily deform or burst the top and sides of the substrate container if the substrate container is too heavy when the gripping device grasps the top of the substrate container.

[0004] Therefore, the inventors of the present invention believed that the above drawbacks could be improved, and after extensive research, they came up with the present invention, which effectively improves the above issues through rational design.

[0005] The present invention has been made in view of the above circumstances, and aims to solve the above problems. That is, the present invention provides a base container for automatic handling. The present invention uses a conversion joint member to strengthen the structural strength of the upper part of the base container, thereby preventing the base container from being deformed or bursting when the claws grip the joint due to excessive weight. [Means for solving the problem]

[0006] To achieve the above object, one embodiment of the present invention provides a substrate container for automatic handling, which is used for gripping and transporting with a claw portion. The substrate container for automatic handling comprises a container body, a conversion joint member, and a joint member. The container body includes a top plate, a bottom plate, a pair of side plates, and a back plate. The top plate and the bottom plate are arranged opposite each other, and each side plate is also arranged opposite each other. The back plate is connected to the top plate, and a cavity is jointly formed between the bottom plate and each side plate. The conversion joint member is fixed to one side of the bottom plate remote from each side plate and to the top plate, and the joint member is fixed to one side of the conversion joint member remote from the container body, which is used for gripping with the claw portion.

[0007] According to one embodiment of the present invention, the top plate further comprises a plurality of first bolts, each of which is fitted through a corresponding one of the conversion joint members and locked to the corresponding one of the first studs.

[0008] According to one embodiment of the present invention, the device further includes a plurality of second bolts, each side plate having a plurality of second studs, each second bolt passing through the conversion joint member and locked to each second stud.

[0009] According to one embodiment of the present invention, each second stud is located on one side of the corresponding side panel away from the bottom panel.

[0010] According to one embodiment of the present invention, each side panel further includes a plurality of ribs, each extending from each second stud toward the bottom panel.

[0011] According to one embodiment of the present invention, the joint includes a load plate and a plurality of extension posts, each extending from the load plate and abutting against a conversion joint member.

[0012] According to one embodiment of the present invention, the conversion joint member further includes a plurality of third bolts, each of which penetrates the load plate and each of the extension posts and is locked into a corresponding one of the screw holes.

[0013] According to one embodiment of the present invention, a gap is formed between the load plate and the conversion joint member for the claw portion to grip the load plate.

[0014] According to one embodiment of the present invention, the container further comprises a pair of handles, each of which is located at either end of the conversion joint member and sandwiched between the container body and the conversion joint member.

[0015] According to one embodiment of the present invention, the conversion joint has a plurality of position limiting grooves, and each handle has a pair of stepped portions, each of which is formed on one side of the conversion joint facing the container body and covers each of the stepped portions to limit the position of the corresponding one of the position limiting grooves.

[0016] According to one embodiment of the present invention, the conversion joint member has a plurality of positioning pins, each of the stepped portions has a positioning hole, and each of the positioning pins is respectively positioned in each of the position limiting engagement grooves and inserted into each of the corresponding positioning holes.

[0017] According to one embodiment of the present invention, the conversion joint member has a plurality of through slots.

[0018] According to one embodiment of the present invention, the conversion joint has a plurality of convex walls, each of which is located on a side of the conversion joint away from the container body and surrounds each of the through slots and the periphery of the conversion joint.

[0019] According to one embodiment of the present invention, the conversion joint has a convex wall disposed on one side of the conversion joint away from the container body and surrounding the periphery of the conversion joint.

[0020] According to one embodiment of the present invention, the conversion joint member is made of plastic, fiber reinforced plastic, metal, or metal alloy. [Effects of the Invention]

[0021] The present invention is configured as described above and therefore has the following advantages. In the base container for automatic handling according to the present invention, the conversion joint members are fixed simultaneously to the side of each side panel that is away from the bottom panel and to the top panel, thereby strengthening the structural strength of the upper part of the base container and preventing the container body from being deformed or bursting due to the weight of the base container being too heavy when the claw portion grasps the joint.

[0022] At least the following points will become clear from the description and drawings to be described later. [Brief explanation of the drawings]

[0023] [Figure 1] 1 is a perspective view showing an external appearance of a substrate container for automatic handling according to an embodiment of the present invention; [Figure 2] FIG. 2 is a side view showing the application of the present invention to automatic handling. [Figure 3] 1 is an exploded view of a substrate container for automatic handling according to an embodiment of the present invention; [Figure 4] 1 is an exploded view showing a container body and a conversion joint member according to an embodiment of the present invention; [Figure 5] 1 is an exploded view showing a container body, a conversion joint member, and a joint portion according to an embodiment of the present invention; [Figure 6] FIG. 2 is a perspective view showing the exterior of the device without the handle attached. [Figure 7] 1 is an exploded view of a conversion joint and handles according to the present invention; FIG. [Figure 8] 1 is a cross-sectional view of a conversion joint and handles according to the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0024] The present invention will be described below through embodiments of the invention, but the following embodiments do not limit the invention according to the claims, and not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention.

[0025] In this specification, terms indicating orientations or indicating positional relationships, such as "front side," "rear side," "left side," "right side," "front end," "rear end," "end," "longitudinal direction," "lateral direction," "vertical direction," "top," and "bottom," are based on the orientations or positional relationships shown in the accompanying drawings, and are intended merely to conveniently explain and simplify the description of the present invention. It should be noted that they do not indicate or imply that the specified devices or components have a specific orientation or a specific structure or operation, and should not be understood as limiting conditions on the present invention.

[0026] As used herein, terms such as "first," "second," "third," "fourth," and "fifth" are used to describe various elements, kits, regions, layers, and / or sections, and these elements, kits, regions, layers, and / or sections are not limited by these terms. These terms are used merely to distinguish one element, kit, region, layer, or section from another. Unless clearly indicated by the context, the terms "first," "second," "third," "fourth," and "fifth" as used herein do not imply any order or sequence.

[0027] As used herein, terms such as "substantially" and "about" are used to describe and account for small variations unless otherwise defined. When linked to an event or circumstance, the term may include the exact time at which the event or circumstance occurred, as well as a close approximation to the time at which the event or circumstance occurred. For example, when linked to a numerical value, the term may include a variation range of ±10% or less of the numerical value, such as ±5% or less, ±4% or less, ±3% or less, ±2% or less, ±1% or less, ±0.5% or less, ±0.1% or less, or ±0.05% or less.

[0028] The detailed description and technical contents of the present invention are combined with the description of the drawings below, which are for illustrative purposes only and are not intended to limit the present invention.

[0029] The substrate container for automatic handling according to the present invention (see FIGS. 1 and 2) is used to be gripped and transported by the claws A of an overhead hoist transfer (OHT), thereby loading and moving the substrate container to different processing positions. The OHT transports substrates on rails (not shown) installed on the ceiling, and the claws A are connected by a hanging system (steel wire B, belt, etc.). The substrate container for automatic handling according to the present invention mainly comprises a container body 10, a conversion joint member 20, and a joint member 30 (see FIGS. 3 to 6).

[0030] In this embodiment, the container body 10 is made of plastic to effectively reduce weight, but the present invention is not limited thereto. The container body 10 includes a top panel 11, a bottom panel 12, a pair of side panels 13, and a back panel 14. The top panel 11 and the bottom panel 12 are arranged opposite each other, and the side panels 13 are arranged opposite each other. The back panel 14 is connected between the top panel 11, the bottom panel 12, and the side panels 13, and defines a cavity 15 (not shown) therein for accommodating multiple substrates. Specifically, the substrates may be wafers, glass substrates, printed circuit boards, or the like; the present invention does not impose any limitations on this. In this embodiment, an opening 16 is formed in the front side of the container body 10 to allow the substrates to be accommodated in the cavity 15. The substrates are wafers; that is, the container body 10 in this embodiment is a front-opening unified pod (FOUP). However, the present invention is not limited to the above. For example, the container body 10 may be a side-opening, top-opening, or bottom-opening type. In addition, a removable door panel (not shown) may be attached to the opening 16 of the container body 10. Since this is well known to those skilled in the art, a description thereof will not be repeated here.

[0031] The conversion joint member 20 is made of plastic, fiber-reinforced plastic, metal, or metal alloy and has good structural strength. For example, the plastic may be a high-strength plastic material such as polyoxymethylene (POM), polyetheretherketone (PEEK), or polyphenylene sulfide (PPS). The metal alloy may be a lightweight, high-strength alloy such as an aluminum alloy or titanium alloy, thereby providing the conversion joint member 20 with the advantages of high strength and light weight. The conversion joint member 20 is fixed to one side of each side panel 13 away from the bottom panel 12 and to one side of the top panel 11 away from the bottom panel 12. In other words, the center of the conversion joint member 20 is fixed to the top panel 11, and both ends of the conversion joint member 20 are fixed to each side panel 13. That is, the conversion joint member 20 of the present invention is not fixed only to the top plate 11, but is fixed simultaneously to the top plate 11 and each side plate 13, so that when force is applied to the conversion joint member 20, the force can be distributed to the top plate 11 and each side plate 13, thereby increasing the tensile strength. The specific fixing method and detailed structure of the conversion joint member 20 will be described later, so a description thereof will not be repeated here.

[0032] The joint 30 is fixed to one side of the conversion joint member 20 away from the container body 10 and is used to be gripped by the claw A. In other words, the joint 30 is connected so as to be fixed only to the conversion joint member 20, and is not connected so as to be directly fixed to the container body 10. The joint 30 may be a commercially available genuine part or a homemade part that is compatible with the claw A of the OHT system, as long as it can be gripped by the claw A of the OHT system, and the present invention does not impose any particular restrictions on this. Therefore, the conversion joint members 20 are simultaneously fixed to one side of each side panel 13 away from the bottom panel 12 and one side of the top panel 11 away from the bottom panel 12, and the joints 30 are connected so as to be fixed only to the conversion joint members 20 rather than directly to the container body 10, thereby effectively strengthening the structural strength of the upper part of the base container and preventing a situation in which the top panel 11 or each side panel 13 of the container body 10 is deformed or ruptured due to the weight of the base container being too heavy even when the claws A grip the joints 30. More specifically, because the conversion joint members 20 are simultaneously fixed to one side of each side panel 13 away from the bottom panel 12 and one side of the top panel 11 away from the bottom panel 12, the tensile force exerted by the claws A on the joints 30 can be distributed to the top panel 11 and each side panel 13 by the conversion joint members 20, rather than being concentrated on the top panel 11, thereby preventing deformation or rupture of the container body 10. In addition, both ends of the conversion joint member 20 are fixed to each side plate 13, and each side plate 13 is parallel to the tensile force exerted by the claw portion A on the joint portion 30, so that each side plate 13 provides good tensile strength to the conversion joint member 20 and can withstand even greater tensile force.

[0033] More specifically, the conversion joint member 20 is fixed to the container body 10 in a locking or engaging manner. In this embodiment, the conversion joint member 20 is fixed to the container body 10 in a locking manner. Specifically, the base container for automated handling according to the present invention further includes a plurality of first bolts 91 and a plurality of second bolts 92. The top plate 11 of the container body 10 has a plurality of first studs 111, and each side plate 13 has a plurality of second studs 131. In this embodiment, the number of first studs 111 is two, and they are located approximately in the center of the conversion joint member 20. The number of second studs 131 on each side plate 13 is also two, but the present invention is not limited thereto. It is understood that the number and positions of the first studs 111 and the second studs 131 can be adjusted as needed. Each first bolt 91 is inserted through the conversion connecting member 20 and locked to each first stud 111, and each second bolt 92 is inserted through the conversion connecting member 20 and locked to each second stud 131, thereby simultaneously locking the conversion connecting member 20 to the top plate 11 and each side plate 13 of the container body 10. More specifically, each first stud 111 is located on one side of the top plate 11 away from the bottom plate 12, and each second stud 131 is located on one side of the corresponding side plate 13 away from the bottom plate 12.

[0034] In this embodiment, the bottom of the conversion joint member 20 is formed with a plurality of grooves 21 at locations corresponding to the first studs 111 of the top plate 11 (see FIG. 7 ), and each of the first studs 111 is accommodated in each groove 21. This not only positions the conversion joint member 20 relative to the container body 10, but also allows the bottom of the conversion joint member 20 to be attached flatly to the top plate 11 of the container body 10, eliminating any gaps. Furthermore, in this embodiment, each side plate 13 is formed with a step 132 on one side away from the bottom plate 12 (i.e., the connection between each side plate 13 and the top plate 11). The second studs 131 of each side plate 13 are positioned in the corresponding step 132, approximately aligned with the top plate 11. This allows both ends of the conversion joint member 20 to be attached flatly to the second studs 131, further reducing the weight of the container body 10, but the present invention is not limited to this. As an example, the conversion joint member 20 has grooves formed at locations corresponding to each second stud 131 of each side panel 13, so that each second stud 131 is accommodated within each groove, and there is no need to form a step at the location where each side panel 13 connects to the top panel 11.

[0035] More specifically, each side panel 13 further has a plurality of ribs 133 corresponding to each second stud 131. Each rib 133 extends from each second stud 131 toward the bottom panel 12 and can strengthen the structural strength of each side panel 13 to prevent deformation. Specifically, each rib 133 of each side panel 13 is formed on one side away from the other side panel 13. In this embodiment, each rib 133 is substantially an elongated rectangular body extending perpendicularly from the corresponding second stud 131 toward the bottom panel 12, but the present invention is not limited thereto. For example, each rib 133 may extend from the corresponding second stud 131 at an angle or gradually contract toward the bottom panel 12, as long as it can strengthen the structural strength of the corresponding side panel 13 and prevent deformation.

[0036] More specifically, the connection part 30 of this embodiment includes a load plate 31 and a plurality of extension posts 32. Each extension post 32 extends from the bottom of the load plate 31 and abuts against the conversion connection part 20, forming a gap G between the load plate 31 and the conversion connection part 20. This allows the claws A to grip the load plate 31 without interference. The connection part 30 is fixed to the conversion connection part 20 in a locking or engagement manner. In this embodiment, the connection part 30 is fixed to the conversion connection part 20 in a locking manner. Specifically, the substrate container for automated handling according to the present invention further includes a plurality of third bolts 93. The conversion connection part 20 has a plurality of screw holes 22. The screw holes 22 are formed on one side of the conversion joint member 20 facing the joint portion 30 (i.e., one side of the conversion joint member 20 away from the container body 10), and correspond to the outer peripheries surrounding the first studs 111 and the first bolts 91, and are offset from one another. The third bolts 93 are sequentially inserted through the load plate 31 and the extension posts 32 of the joint portion 30 and locked into the screw holes 22, thereby firmly locking the joint portion 30 to the conversion joint member 20.

[0037] 1, 3, 7, and 8, the substrate container for automated handling according to the present invention further includes a pair of handles 40 to facilitate manual removal of the substrate container by an operator. Each handle 40 is located on both ends of the conversion joint member 20, and both handles 40 are sandwiched between the container body 10 and the conversion joint member 20. Specifically, the conversion joint member 20 according to this embodiment has a plurality of position limiting engagement grooves 23, and each handle 40 has a pair of stepped portions 41. Each position limiting engagement groove 23 is formed on one side of the conversion joint member 20 facing the container body 10, and each position limiting engagement groove 23 is located at each of the four corners of the conversion joint member 20. However, the number and location of the position limiting engagement grooves 23 are not limited to this, and those skilled in the art will understand that adjustments can be made according to different needs. Each handle 40 is generally arch-shaped, and each stepped portion 41 of each handle 40 is formed at each end of the handle 40. The position limiting engagement grooves 23 of the conversion joint member 20 are arranged to cover and limit the stepped portions 41 of the handles 40, so that the handles 40 are limited between the conversion joint member 20 and the container body 10. In a more specific example, the handles 40 are arranged at both ends of the conversion joint member 20 so as to be substantially perpendicular to the conversion joint member 20, and the stepped portions 41 of the handles 40 are limited within the position limiting engagement grooves 23.

[0038] More specifically, each handle 40 is fixed to the conversion joint 20 by a method such as engagement, fitting, or locking. In this embodiment, each handle 40 is fixed to the conversion joint 20 by a fitting method. Specifically, the conversion joint 20 has a plurality of positioning pins 24, and each step portion 41 has a positioning hole 411. Each positioning pin 24 is located in a position-limiting engagement groove 23 at the bottom of the conversion joint 20, and each positioning pin 24 is inserted into a corresponding positioning hole 411 to generate a positioning engagement effect. However, the fitting method between each handle 40 and the conversion joint 20 is not limited thereto and can be determined, for example, according to design and usage needs.

[0039] Referring again to FIGS. 3 to 5, 7, and 8, in order to effectively reduce the weight of the conversion connection member 20, the conversion connection member 20 of this embodiment has a plurality of through-slots 25. Each through-slot 25 is generally rectangular and is located between the first bolts 91, the second bolts 92, and the third bolts 93. That is, each through-slot 25 is offset from the first bolts 91, the second bolts 92, and the third bolts 93, but the present invention is not limited thereto. It should be noted that the position and shape of each through-slot 25 can be adjusted according to different needs. In addition, in order to enhance the structural strength of the conversion connection member 20, the conversion connection member 20 of this embodiment has a plurality of convex walls 26. Each convex wall 26 is located on one side of the conversion connection member 20 away from the container body 10 (i.e., the side facing the joint 30), and each convex wall 26 surrounds the periphery of each through-slot 25 and the conversion connection member 20, respectively. In this way, the structural strength of the conversion joint member 20 itself is strengthened without excessively increasing its weight, thereby preventing the tensile force exerted when the claw portion A grips the joint portion 30 from deforming or destroying the conversion joint member 20.

[0040] The base material container for automatic handling according to the present invention can strengthen the structural strength of the upper part of the base material container by simultaneously fixing the conversion joint member 20 to one side of each side panel 13 away from the bottom panel 12 and to the top panel 11, thereby preventing the container body 10 from being deformed or bursting due to the weight of the base material container being too heavy when the claw portion A grasps the joint portion 30.

[0041] The above-described embodiments are intended to facilitate understanding of the present invention, and are not intended to limit the present invention. The present invention may be modified or improved without departing from the spirit thereof, and the present invention includes equivalents thereof. [Explanation of symbols]

[0042] 10 Container body 11 Top plate 111 First Stud 12 Bottom plate 13 Side panel 131 Second Stud 132 Step 133 Ribs 14 Back plate 15 Cavity 16 Opening 20 Conversion joint member 21 Groove 22 screw holes 23 Position limiting engagement groove 24 Locating pin 25 penetration slots 26 Convex Wall 30 Joint 31 Load Plate 32 Extension column 40 Handle 41 Stairs 411 Positioning hole 91 First Bolt 92 Second Bolt 93 Third Bolt A Claw B Steel wire G Gap

Claims

1. A substrate container for automatic handling to be picked up and transported by a claw portion, a container body including a top plate, a bottom plate, a pair of side plates, and a back plate, the top plate and the bottom plate being arranged to face each other, the side plates being arranged to face each other, the back plate being connected to the top plate, and a cavity being jointly formed between the bottom plate and each of the side plates; A conversion joint member fixed to one side of each of the side panels away from the bottom panel and to the top panel; and a joint portion fixed to one side of the conversion joint member away from the container body and adapted to be gripped by the claw portion.

2. 2. The substrate container for automated handling according to claim 1, further comprising a plurality of first bolts, the top plate having a plurality of first studs, each of the first bolts extending through the conversion joint member and locked to each of the first studs.

3. 2. The substrate container for automated handling according to claim 1, further comprising a plurality of second bolts, each of said side panels having a plurality of second studs, each of said second bolts extending through said conversion joint member and locked to each of said second studs.

4. 4. The substrate container for automated handling according to claim 3, wherein each of the second studs is located on one side of the corresponding side panel away from the bottom panel.

5. 4. The substrate container for automated handling according to claim 3, wherein each of the side panels further includes a plurality of ribs, each of the ribs extending from each of the second studs toward the bottom panel.

6. 2. The substrate container for automated handling of claim 1, wherein the joint comprises a load plate and a plurality of extension posts, each of the extension posts extending from the load plate and abutting against the conversion joint member.

7. 7. The substrate container for automated handling according to claim 6, further comprising a plurality of third bolts, wherein the conversion joint member has a plurality of screw holes, each of the third bolts being threaded through the load plate and each of the extension posts and locked into each of the screw holes.

8. 7. The substrate container for automatic handling according to claim 6, wherein a gap is formed between the load plate and the conversion joint member to allow the claw portion to grip the load plate.

9. 2. The substrate container for automated handling according to claim 1, further comprising a pair of handles, each of which is located at either end of the conversion joint member and is sandwiched between the container body and the conversion joint member.

10. 10. The substrate container for automatic handling according to claim 9, wherein the conversion joint member has a plurality of position limiting engagement grooves, each of the handles has a pair of step portions, each of the position limiting engagement grooves is formed on one side of the conversion joint member facing the container body, and each of the position limiting engagement grooves covers each of the step portions to limit them respectively.

11. The substrate container for automatic handling according to claim 10, characterized in that the conversion joint member has a plurality of positioning pins, each of the stepped portions has a positioning hole, and each of the positioning pins is positioned within each of the position limiting engagement grooves and inserted into each of the corresponding positioning holes.

12. 10. The substrate container for automated handling of claim 1, wherein the conversion joint member has a plurality of through slots.

13. 13. The substrate container for automatic handling according to claim 12, wherein the conversion joint member has a plurality of convex walls, each of which is installed on one side of the conversion joint member away from the container body and surrounds each of the through slots and the peripheral portion of the conversion joint member.

14. 2. The substrate container for automatic handling according to claim 1, wherein the conversion joint member has a convex wall, the convex wall being installed on one side of the conversion joint member away from the container body and surrounding the periphery of the conversion joint member.

15. 10. The substrate container for automated handling of claim 1, wherein the conversion joint member is made of plastic, fiber reinforced plastic, metal, or metal alloy.

Images