Optical Semiconductor Module

Abstract

To provide an optical semiconductor module capable of efficiently performing temperature control of a semiconductor laser element.SOLUTION: An optical semiconductor module 1 according to one embodiment comprises: a thermo-electric cooler (TEC) 7 with a temperature control surface 7b; an AlN substrate 8 placed on the TEC 7 while being in contact with the temperature control surface 7b; a quartz substrate 9 placed on a first surface 8b opposite to the TEC 7 of the AlN substrate 8; a semiconductor laser element 10 placed on the first surface 8b; and a housing that accommodates the TEC 7, the AlN substrate 8, the quartz substrate 9, and the semiconductor laser element 10. The quartz substrate 9 has wiring 11 on a second surface 9b opposite to the AlN substrate 8. The wiring 11 is connected to the housing by wires W2, W3, and W4 respectively, and connected to the semiconductor laser element 10 with wires W6 and W7 respectively. A thermal conductivity of the quartz substrate 9 is smaller than that of the AlN substrate 8.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present disclosure relates to an optical semiconductor module. [Background technology]

[0002] Patent Document 1 describes an optical circuit of a module that is a box-type TOSA module. The module includes a thin plate called a subcarrier inside. A wiring pattern is formed on the subcarrier by metal plating or vapor deposition on a dielectric material. A laser diode, an optical modulator, a resistor, and a capacitor are mounted on the subcarrier. The module further includes a carrier that mounts the subcarrier, and a thermoelectric cooler (TEC: Thermo-Electric Cooler) is mounted below the carrier. The carrier and the TEC are housed in a housing of the module. Heat generated by the elements on the subcarrier is absorbed by the TEC, and this heat is discharged from the bottom of the housing. The module includes a wiring for feeding a modulated electric signal that penetrates from the outside to the inside of the housing. The wiring for feeding a modulated electric signal and the subcarrier are electrically connected to each other via a wire-shaped gold wire or a ribbon-shaped gold wire. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2016-180779 A Summary of the Invention [Problem to be solved by the invention]

[0004] As described above, when a TEC is mounted under the carrier, the laser temperature of the laser diode can be made to approximately match a predetermined set temperature by controlling the temperature of the upper surface of the TEC on which the carrier is mounted. Incidentally, in recent years, the transmission speed in optical communication has been increasing. A semiconductor laser element converts an input high-speed electrical signal into an optical signal and outputs it. To increase the transmission speed, for example, the bonding wire (wire) such as the wire-shaped gold wire described above may be shortened and the number of wires may be increased in order to reduce the parasitic inductance in the wiring of the high-speed electrical signal. However, when the wire is shortened or the number of wires is increased, the thermal resistance between the carrier and the housing may be reduced, and the flow of heat in and out of the housing in the carrier may increase. The TEC requires the supply of power to cool or heat the object of temperature control by the Peltier effect. For example, if heat flows in from the housing in addition to the amount of heat generated from the object, more power is required to absorb the amount of heat that flows in. As a result, the power consumption of the TEC may increase, and there is room for improvement in the efficiency of temperature control of the semiconductor laser element.

[0005] An object of the present disclosure is to provide an optical semiconductor module capable of efficiently controlling the temperature of a semiconductor laser element. [Means for solving the problem]

[0006] The optical semiconductor module according to the present disclosure comprises a temperature control element having a temperature control surface, a first substrate placed on the temperature control element in contact with the temperature control surface, a second substrate placed on the first substrate's first surface opposite the temperature control element, a semiconductor laser element placed on the first surface, and a housing that accommodates the temperature control element, the first substrate, the second substrate, and the semiconductor laser element, wherein the second substrate has wiring on its second surface opposite the first substrate, the wiring being connected to the housing by a first wire and to the semiconductor laser element by a second wire, and the thermal conductivity of the second substrate is smaller than that of the first substrate. Effect of the Invention

[0007] According to the present disclosure, it is possible to efficiently control the temperature of a semiconductor laser element. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a plan view illustrating a schematic internal structure of an optical semiconductor module according to an embodiment. [Diagram 2] FIG. 2 is a plan view illustrating a semiconductor laser element, a second substrate, and wires of the optical semiconductor module. [Diagram 3] FIG. 3 is a side view diagrammatically illustrating the temperature control element, the first substrate, the second substrate, the semiconductor laser element, and the wires of the optical semiconductor module. [Figure 4] FIG. 4 is a side view showing an example of a layer configuration between the first substrate and the second substrate. [Diagram 5] FIG. 5 is a side view showing another example of the layer configuration between the first substrate and the second substrate. [Figure 6] FIG. 6 is a side view diagrammatically illustrating a temperature control element, a substrate, and a semiconductor laser element of an optical semiconductor module according to a comparative example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] [Description of the embodiment of the present invention] First, the contents of the embodiments of the present disclosure will be listed and described. An optical semiconductor module according to an embodiment of the present disclosure includes a temperature control element having a temperature control surface, a first substrate placed on the temperature control element in contact with the temperature control surface, a second substrate placed on the first surface of the first substrate opposite to the temperature control element, a semiconductor laser element placed on the first surface, and a housing that houses the temperature control element, the first substrate, the second substrate, and the semiconductor laser element, the second substrate having wiring on the second surface opposite to the first substrate, the wiring being connected to the housing by a first wire and being connected to the semiconductor laser element by a second wire, and the thermal conductivity of the second substrate being smaller than that of the first substrate.

[0010] In this optical semiconductor module, the temperature control element has a temperature control surface, and the first substrate is placed on the temperature control element so as to contact the temperature control surface. The second substrate is placed on the first substrate, which is opposite to the temperature control element. The second substrate and the semiconductor laser element are placed on the first substrate. The temperature control element, the first substrate, the second substrate, and the semiconductor laser element are accommodated in the housing. The second substrate is formed on the second substrate, which is opposite to the first substrate. The first wire connects the wiring formed on the second substrate and the housing, and the second wire connects the wiring and the semiconductor laser element. The thermal conductivity of the second substrate is smaller than the thermal conductivity of the first substrate. That is, the thermal resistance of the second substrate is larger than the thermal resistance of the first substrate. Therefore, the thermal resistance of the second substrate connected to the housing via the first wire is larger than the thermal resistance of the first substrate, so that the thermal resistance between the second substrate and the housing can be increased. Therefore, the flow of heat between the inside and outside of the housing can be suppressed, so that an increase in power consumption of the temperature control element can be suppressed and the temperature of the semiconductor laser element can be efficiently controlled.

[0011] The second substrate may be juxtaposed with the semiconductor laser element on the first surface. In this case, the second substrate and the semiconductor laser element are juxtaposed on the first surface of the first substrate opposite the temperature control element. Thus, the semiconductor laser element is placed on the first surface of the first substrate, which has a higher thermal conductivity than the second substrate, and the temperature of the semiconductor laser element can be more efficiently controlled by the temperature control element via the first substrate.

[0012] The second substrate may be fixed to the first substrate by an adhesive. In this case, the second substrate, which has a lower thermal conductivity than the first substrate, can be fixed to the first substrate via the adhesive.

[0013] The distance between the connection point of the first wire on the second surface and the semiconductor laser element may be longer than the distance between the connection point of the second wire on the second surface and the semiconductor laser element. In this case, the distance between the connection point of the first wire connected to the housing and the semiconductor laser element is longer than the distance between the connection point of the second wire and the semiconductor laser element, so that the flow of heat in and out of the housing can be more reliably suppressed.

[0014] The thickness of the first substrate may be 600 μm or less, and the thickness of the second substrate may be 50 μm or more. In this case, since the thickness of the first substrate is 600 μm or less, the temperature of the semiconductor laser element can be more efficiently controlled by the temperature control element via the first substrate. Since the thickness of the second substrate is 50 μm or more, the flow of heat into and out of the housing via the second substrate can be suppressed, and the temperature of the semiconductor laser element can be more efficiently controlled.

[0015] [Details of the embodiment of the present disclosure] Specific examples of optical semiconductor modules according to embodiments of the present disclosure will be described with reference to the drawings. Note that the present invention is not limited to these examples, but is intended to include all modifications within the scope of the claims and equivalents thereto. In the description of the drawings, the same or corresponding elements are given the same reference numerals, and duplicated descriptions are omitted as appropriate. In addition, the drawings are partially simplified or exaggerated for ease of understanding, and the dimensional ratios and the like are not limited to those shown in the drawings.

[0016] FIG. 1 is a plan view showing a schematic internal structure of an optical semiconductor module 1 according to an embodiment. The optical semiconductor module 1 includes, for example, a rectangular housing 2 and an external terminal 3 provided at one end of the housing 2 in a direction D1, which is a longitudinal direction of the housing 2. The external terminals 3 are arranged along a direction D2, which is a width direction of the housing 2, at one end of the housing 2 in the direction D1. The external terminals 3 include, for example, a terminal for receiving a high-speed electric signal from the outside, a terminal for receiving a driving current of a laser diode, a terminal for receiving a driving current of a TEC, a monitor terminal for detecting the temperature of the laser diode, and a terminal for applying a ground potential (reference potential). The housing 2 has an inner wall 2b that defines an internal space S of the housing 2. An optical output unit 4 for outputting light L (optical signal) is provided at an end of the housing 2 opposite to the external terminal 3 in the direction D1.

[0017] The optical semiconductor module 1 includes, for example, a transmission line 5, a pad 6 which is a DC pad, and a TEC (Thermo Electric Cooler) 7 which is a temperature control element, in the internal space S of the housing 2. FIG. 2 is a schematic plan view in which the upper structure of the TEC 7 is enlarged. FIG. 3 is a schematic side view showing the upper structure of the TEC 7. As shown in FIGS. 2 and 3, the optical semiconductor module 1 includes the TEC 7, a first substrate 8 which is an AlN (Aluminum Nitride) substrate mounted on the TEC 7, a second substrate 9 which is a quartz substrate mounted on the first substrate 8, and a semiconductor laser element 10. The transmission line 5 and the pad 6 are formed on the inner surface of the housing 2. The transmission line 5 and the pad 6 are connected to the external terminal 3 by wiring which penetrates the inner wall 2b. The wiring which connects the transmission line 5 and the pad 6 to the external terminal 3 is formed by, for example, metal plating or deposition. The transmission line 5 includes a ground wiring 5g running in parallel with the signal wiring 5s extending in one direction at a certain distance.

[0018] The first substrate 8 is a high thermal conductive substrate having a thermal conductivity higher than that of the second substrate 9, and the second substrate 9 is a low thermal conductive substrate having a thermal conductivity lower than that of the first substrate 8. The thickness T1 of the first substrate 8 is, for example, 600 μm or less, and the thickness T2 of the second substrate 9 is 50 μm or more. As an example, when the first substrate 8 is an AlN substrate formed of AlN and the second substrate 9 is a quartz substrate formed of quartz, the thickness T1 of the AlN substrate 8 is 250 μm, and the thickness T2 of the quartz substrate 9 is 150 μm. In addition, for example, the thermal conductivity of the AlN substrate 8 is 170 W / m·k (when the thickness is 250 μm, the thermal resistance of the AlN substrate 8 is 1.47×10 -6 [m 2 ·K / W]), and the thermal conductivity of the quartz substrate 9 is 1.48 W / m·k (the thermal resistance of the quartz substrate 9 when it is 150 μm thick is 1.01×10 -4 [m 2 .K / W]. Thus, the thermal conductivity of the AlN substrate 8 is 100 times or more higher than the thermal conductivity of the quartz substrate 9, and as an example, the thermal resistance of the AlN substrate 8 is 1 / 50 or less of the thermal resistance of the quartz substrate 9.

[0019] For example, the AlN substrate 8 and the quartz substrate 9 are mounted on the TEC 7 in this order along the direction D3. The direction D3 is a direction intersecting the longitudinal direction D1 and the lateral direction D2 of the housing 2. The housing 2 accommodates the TEC 7, the AlN substrate 8, the quartz substrate 9, and the semiconductor laser element 10 in the internal space S. The TEC 7 has a temperature control surface 7b. The temperature control surface 7b is located opposite to the heat sink surface 7a on which the TEC 7 is mounted on the housing 2. For example, the heat sink surface 7a and the temperature control surface 7b are planes parallel to the direction D1 and the direction D2. The AlN substrate 8 is mounted on the temperature control surface 7b in contact with the temperature control surface 7b. The AlN substrate 8 has a first surface 8b on the opposite side to the TEC 7, and the quartz substrate 9 and the semiconductor laser element 10 are mounted on the first surface 8b. The quartz substrate 9 is juxtaposed with the semiconductor laser element 10 on the first surface 8b. The semiconductor laser element 10 is, for example, an electro-absorption modulator integrated laser (EML). For example, the semiconductor laser element 10 includes a laser diode 10b and a modulator 10c. For example, when a predetermined current is passed through the TEC 7, heat is absorbed at the temperature control surface 7b, and the absorbed heat is discharged at the heat sink surface. At this time, the semiconductor laser element 10 is cooled through the AlN substrate 8. Also, for example, when a current is passed through the TEC 7 in the opposite direction to the above-mentioned predetermined current, heat is absorbed at the heat sink surface 7a, and the absorbed heat is discharged at the temperature control surface 7b. At this time, the semiconductor laser element 10 is heated through the AlN substrate 8. By reducing the thermal resistance of the AlN substrate, the semiconductor laser element 10 can be efficiently heated and cooled by the TEC 7.

[0020] The quartz substrate 9 forms, for example, a coplanar waveguide. The quartz substrate 9 has the wiring 11 on a second surface 9b opposite to the AlN substrate 8. The second surface 9b is, for example, a plane parallel to the direction D1 and the direction D2. The quartz substrate 9 may be transparent, for example. The wiring 11 includes a high-frequency wiring 11b extending in one direction while maintaining a certain distance from the parallel ground wiring 11c. For example, the ground wiring 11c includes a first ground wiring section 11d on which the die 12, the chip 13, and the resistor 14 are mounted, and a second ground wiring section 11f located on the opposite side of the first ground wiring section 11d as viewed from the high-frequency wiring 11b. The high-frequency wiring 11b extends, for example, in the longitudinal direction D1 of the quartz substrate 9 from one end of the quartz substrate on the external terminal 3 side to the other end on the optical output section side. The high-frequency wiring 11b extends in the direction D1 while maintaining a certain distance from the ground wiring 11c. In this manner, a coplanar waveguide is formed by the high-frequency wiring 11b extending on the second surface 9b while maintaining a certain distance from the adjacent ground wiring 11c. The quartz substrate 9 may form a microstrip line instead of a coplanar waveguide. The microstrip line will be described later. The ground wiring 11c may not be a wiring extending in one direction like the high-frequency wiring 11b, and may be a wiring pattern with a wide width. The die 12 is, for example, a die capacitor. The die capacitor can accumulate electric charge between an electrode connected to the second surface 9b of the quartz substrate 9 and an electrode to which the wire W1 is connected.

[0021] Wires W1, W2, W3, and W4 extend from the die 12, the first ground wiring portion 11d, the high-frequency wiring 11b, and the second ground wiring portion 11f, respectively. For example, the optical semiconductor module 1 further includes a wire W5 that connects the die 12 and the laser diode 10b to each other, a wire W6 that connects one end of the resistor 14 to the modulator 10c to each other, and a wire W7 that connects the high-frequency wiring 11b to the modulator 10c to each other. The diameters of the wires W1, W2, W3, W4, W5, W6, and W7 are, for example, 18 μm, 25 μm, or 50 μm. The diameters of the wires W1, W2, W3, W4, W5, W6, and W7 may all be the same value, or may be different values ​​from each other. Note that the wires W1, W2, W3, W4, W5, W6, and W7 may be ribbon wires instead of bonding wires. Ribbon wire has a flat cross section, rather than a circular cross section like bonding wire, for example, and the width of the cross section is at least twice as large as the thickness of the cross section.

[0022] The wires W2, W3, and W4 correspond to the first wires connecting the wiring 11 and the case 2 to each other. The wire W7 corresponds to the second wire connecting the wiring 11 and the semiconductor laser element 10 to each other. For example, the distance between the connection point S1 on the second surface 9b of the first wires (wires W2, W3, and W4) and the semiconductor laser element 10 is longer than the distance between the connection point S2 on the second surface 9b of the second wire (wire W7) and the semiconductor laser element 10. The connection point S1 is provided on the high-frequency wiring 11b or the ground wiring 11c. The connection point S2 is provided on the high-frequency wiring 11b.

[0023] For example, the first surface 8b of the AlN substrate 8 and the second surface 9b of the quartz substrate 9 are both metallized, and the semiconductor laser element 10 is mounted on the metallized first surface 8b. The quartz substrate 9 has, for example, an exposed portion 9d that exposes a surface 10d of the semiconductor laser element 10 opposite to the AlN substrate 8. The exposed portion 9d is, for example, concave when viewed from a direction D3 that is the stacking direction of the AlN substrate 8 and the quartz substrate 9. Specifically, the exposed portion 9d is concave in the direction D1. The exposed portion 9d is, for example, formed by a side surface 9f facing the semiconductor laser element 10. The side surface 9f is, for example, metallized. This allows the ground wiring 11c of the quartz substrate 9 to be electrically connected to the ground wiring on the first surface 8b of the AlN substrate 8 to form a high-frequency return path. For example, the side surface 9f includes a first side surface 9g facing the semiconductor laser element 10 along the direction D1, and a pair of second side surfaces 9h facing the semiconductor laser element 10 along the direction D2. For example, by providing a ground wiring on the first surface 8b below the high-frequency wiring 11b in this manner, a microstrip line can be formed for the high-frequency wiring 11b.

[0024] FIG. 4 is a diagram showing an example of a layer structure of an AlN substrate 8 and a quartz substrate 9. As shown in FIG. 4, for example, the AlN substrate 8 may have a metallized portion 8c on the first surface 8b, and the quartz substrate 9 may have a metallized portion 9k on the surface 9j opposite to the second surface 9b. The quartz substrate 9 may be fixed to the AlN substrate 8 by an adhesive 15. The adhesive 15 may be made of, for example, gold-tin (AuSn). In this case, the adhesive 15 is interposed between the metallized portion 8c of the AlN substrate 8 and the metallized portion 9k of the quartz substrate 9. The metallized portion 8c and the metallized portion 9k are formed by, for example, metal plating or vapor deposition. As described above, the metallized portion 8c can be provided as a ground wiring (ground layer) for the high-frequency wiring 11b by connecting the metallized portion 8c to the ground wiring 11c via the metallized side surface 9f.

[0025] Fig. 5 is a diagram showing another example of the layer structure of the AlN substrate 8 and the quartz substrate 9. As shown in Fig. 5, at least one of the AlN substrate 8 and the quartz substrate 9 may not have a metallized portion. The quartz substrate 9 may be directly fixed to the AlN substrate 8 by an adhesive 16. For example, the adhesive 16 may be made of silver (Ag) paste or an ultraviolet (UV) curing resin.

[0026] Next, the effects obtained from the optical semiconductor module 1 according to this embodiment will be described. In the optical semiconductor module 1, as illustrated in FIG. 3, the TEC 7 has a temperature control surface 7b, and the AlN substrate 8 is placed on the TEC 7 so as to be in contact with the temperature control surface 7b. The quartz substrate 9 is placed on a first surface 8b of the AlN substrate 8 opposite the TEC 7. The TEC 7, the AlN substrate 8, the quartz substrate 9, and the semiconductor laser element 10 are accommodated in the internal space S of the housing 2. The wiring 11 is formed on a second surface 9b of the quartz substrate 9 opposite the AlN substrate 8. The TEC 7 is placed so that the heat sink surface 7a opposite the temperature control surface 7b is in contact with the inner surface of the housing 2. For example, the inner surface of the housing 2 to which the heat sink surface 7a of the TEC 7 is in contact is formed of a material with good thermal conductivity, such as a metal material.

[0027] The wires W2, W3, and W4 connect the wiring 11 formed on the second surface 9b of the quartz substrate 9 to the housing 2, and the wire W7 connects the wiring 11 to the semiconductor laser element 10. The thermal conductivity of the quartz substrate 9 is smaller than that of the AlN substrate 8. That is, the thermal resistance of the quartz substrate 9 is larger than that of the AlN substrate 8. Therefore, the thermal resistance between the second surface 9b of the quartz substrate 9 connected to the housing 2 via the wires W2, W3, and W4 and the first surface 8b of the AlN substrate 8 is larger than the thermal resistance of the AlN substrate 8, so that the thermal resistance between the AlN substrate 8 and the housing 2 can be increased. For example, the path of heat conduction from the housing 2 to the AlN substrate 8 passes through the wires W2, W3, and W4, passes through the wiring 11, passes through the wires W6 and W7, and passes through the semiconductor laser element 10 in the direction D3. Another path is through the wire W1, through the top surface of the die 12, through the wire W5, and through the semiconductor laser element 10 in the direction D3. However, the wire W1 is, for example, one bonding wire, whereas the wires W2, W3, and W4 are composed of five bonding wires. Therefore, the amount of heat flowing in and out through the wire W1 is less than 1 / 5 of the amount of heat flowing out through the wires W2, W3, and W4. In this way, the flow of heat in and out between the semiconductor laser element 10 and the case 2 is mainly carried out through the wires W6 and W7, so that the influence of the TEC7 on the heating and cooling of the semiconductor laser element 10 can be suppressed.

[0028] Fig. 6 shows an optical semiconductor module 101 according to a comparative example. Compared to the optical semiconductor module 1 according to the embodiment shown in Fig. 1, the optical semiconductor module 101 does not have a quartz substrate 9, and a semiconductor laser element 10, a die 12, and a chip 13 are mounted on a first surface 8b of an AlN substrate 8. In this case, since the wires W2 (W3, W4) extending from the housing 2 are thermally connected to the TEC 7 via the AlN substrate 8, it is not possible to suppress the flow of heat from the housing 2 to the temperature control surface 7b of the TEC 7 via the AlN substrate 8, which has a high thermal conductivity.

[0029] In contrast, as shown in Fig. 3, when the wires W2 (W3, W4) extending from the housing 2 are thermally connected to the temperature control surface 7b of the TEC 7 via the quartz substrate 9 and the AlN substrate 8, the thermal conductivity of the quartz substrate 9 is 1 / 100 or less smaller than that of the AlN substrate 8, so that the flow of heat between the housing 2 and the temperature control surface 7b of the TEC 7 can be suppressed. Therefore, the increase in power consumption of the TEC 7 can be suppressed, and the temperature control of the semiconductor laser element 10 can be efficiently performed. For example, in Fig. 6, when the heat generated by the semiconductor laser element 10 is absorbed by the temperature control surface 7b of the TEC 7 to cool the semiconductor laser element 10, if the thermal resistance between the housing 2 and the temperature control surface 7b is small, it is necessary to pass a current through the TEC 7 to absorb the heat flowing in from the housing 2 (when the temperature of the housing is higher than the set temperature of the semiconductor laser element). For example, in FIG. 3, when the heat generated by the semiconductor laser element 10 is absorbed by the temperature control surface 7b of the TEC 7 to cool the semiconductor laser element 10, the thermal resistance between the housing 2 and the temperature control surface 7b is larger than that in FIG. 6, so that the amount of heat flowing in from the housing 2 is reduced and the current required for temperature control of the TEC 7 can be reduced.

[0030] As described above, the quartz substrate 9 is juxtaposed with the semiconductor laser element 10 on the first surface 8b. That is, the quartz substrate 9 and the semiconductor laser element 10 are juxtaposed on the first surface 8b of the AlN substrate 8, which is opposite the TEC 7. As a result, the semiconductor laser element 10 is placed on the first surface 8b of the AlN substrate 8, which has a thermal conductivity 100 times higher than that of the quartz substrate 9, and therefore the TEC 7 can more efficiently control the temperature (cooling and heating) of the semiconductor laser element 10 via the AlN substrate 8.

[0031] The quartz substrate 9 may be fixed to the AlN substrate 8 via an adhesive 15 or an adhesive 16. In this case, the quartz substrate 9, which has a lower thermal conductivity than the AlN substrate 8, can be fixed to the AlN substrate 8 via the adhesive 15 or the adhesive 16.

[0032] The distance between the connection point S1 on the second surface 9b of each of the wires W2, W3, and W4 and the semiconductor laser element 10 is longer than the distance between the connection point S2 on the second surface 9b of the wire W7 and the semiconductor laser element 10. Therefore, since the distance between the connection point S1 of each of the wires W2, W3, and W4 connected to the housing 2 and the semiconductor laser element 10 is longer than the distance between the connection point S2 of the wire W7 and the semiconductor laser element 10, the thermal resistance between the housing 2 and the temperature control surface 7b can be made larger, and the inflow and outflow of heat between the housing 2 and the temperature control surface 7b of the TEC7 can be more reliably suppressed.

[0033] The thickness T1 of the AlN substrate 8 may be 600 μm or less, and the thickness T2 of the quartz substrate 9 may be 50 μm or more. In this case, by making the thickness T1 of the AlN substrate 8 600 μm or less, the thermal resistance of the AlN substrate 8 can be further reduced, and the temperature control of the semiconductor laser element 10 by the TEC 7 via the AlN substrate 8 can be performed more efficiently. By making the thickness T2 of the quartz substrate 9 50 μm or more, the thermal resistance of the quartz substrate 9 can be further increased, and the flow of heat into and out of the housing 2 via the quartz substrate 9 can be suppressed, and the temperature control of the semiconductor laser element 10 can be performed more efficiently. For example, by making the thickness T1 of the AlN substrate 8 600 μm or less and the thickness T2 of the quartz substrate 9 50 μm or more, the thermal resistance between the housing 2 and the semiconductor laser element 10 can be reliably made larger than the thermal resistance between the semiconductor laser element 10 and the temperature control surface 7b. Thereby, for example, the amount of heat flowing from the housing 2 to the temperature control surface 7b, other than the amount of heat generated by the semiconductor laser element 10, can be reduced.

[0034] The above describes the embodiment of the optical semiconductor module according to the present disclosure. However, the present invention is not limited to the above-described embodiment. In other words, it is easily recognized by those skilled in the art that the present invention can be modified and changed in various ways within the scope of the gist of the claims. For example, in the above-described embodiment, an example in which the die 12, the chip 13, and the resistor 14 are mounted on the wiring 11 has been described. However, the type and number of elements mounted on the wiring 11 are not limited to the above example and can be changed as appropriate.

[0035] In the above embodiment, the semiconductor laser element 10 is an EML. However, the semiconductor laser element may be a semiconductor laser element other than an EML. In the above embodiment, the first substrate 8 is an AlN substrate, and the second substrate 9 placed on the first substrate 8 is a quartz substrate. However, the material of the first substrate may be a material other than AlN. For example, the first substrate may be a metal plate made of a metal material. For example, the first substrate may be a copper plate. The thermal conductivity of copper is about 400 W / m·k, which is larger than the thermal conductivity of AlN. In addition, the first substrate may be a substrate (silicon nitride substrate) made of silicon nitride (Si3N4). The thermal conductivity of silicon nitride is, for example, 85 W / m·k. The second substrate may be made of alumina, glass epoxy, or polyimide. For example, the thermal conductivity of alumina is 32 W / m·k, which is smaller than the thermal conductivity of AlN by 1 / 5 or less. For example, the thermal conductivity of glass epoxy is about 0.5 W / m·k, which is even smaller than that of alumina. For example, in the case of polyimide, a material having a thermal conductivity smaller than that of glass epoxy can be selected. For example, when a silicon nitride substrate is used for the first substrate and alumina is used for the second substrate, the thermal conductivity of the first substrate is about 2.6 times that of the second substrate. That is, the first substrate and the second substrate may be substrates other than an AlN substrate or a quartz substrate, and the materials of the first substrate and the second substrate are not particularly limited. [Explanation of symbols]

[0036] 1...Opto-semiconductor module 2. Housing 2b…Inner wall 3...External terminal 4...Optical output section 5...Transmission line 5s…Signal wiring 5g…Ground wiring 6. Pad 7...TEC (temperature control element) 7b…Temperature control surface 8...First substrate (AlN substrate) 8b…Side 1 8c…Metallized section 9...Second substrate (quartz substrate) 9b…Second side 9d…Exposed part 9f...side 9g…1st side 9h…Second side 9j…side 9k…Metallized part 10...Semiconductor laser element 10b...Laser diode 10c…Modulator 10d…plane 11…Wiring 11b...High frequency wiring 11c…Ground wiring 11d…First ground wiring section 11f…Second ground wiring section 12…Die 13. Tip 14. Resistance 15,16…Adhesive D1,D2,D3…direction L…Light S…interior space S1, S2…Connection points W1, W2, W3, W4, W5, W6, W7…Wire

Claims

1. A temperature control element having a temperature control surface; Aluminum nitride (AlN) or silicon nitride (Si ３ N ４ a first substrate placed on the temperature control element in contact with the temperature control surface; a second substrate placed on a first surface of the first substrate opposite to the temperature control element; a semiconductor laser element mounted on the first surface; a housing that houses the temperature control element, the first substrate, the second substrate, and the semiconductor laser element; Equipped with the second substrate has wiring on a second surface opposite to the first substrate; the wiring is connected to the housing by a first wire and to the semiconductor laser element by a second wire; the second substrate is connected to the housing via the first wire, The thermal resistance of the second substrate is greater than the thermal resistance of the first substrate. Optical semiconductor module.

2. the second substrate has a concave exposed portion exposing the semiconductor laser element; 2. The optical semiconductor module according to claim 1.

3. The second substrate is fixed to the first substrate by an adhesive.

3. The optical semiconductor module according to claim 1.

4. a distance between a connection point of the first wire with the wiring and the semiconductor laser element is longer than a distance between a connection point of the second wire with the wiring and the semiconductor laser element; The optical semiconductor module according to claim 1 .

5. The thickness of the first substrate is 600 μm or less, The thickness of the second substrate is 50 μm or more, The thermal resistance of the first substrate is 1 / 50 or less of the thermal resistance of the second substrate. The optical semiconductor module according to claim 1 .

6. The second substrate is made of at least one of quartz, glass epoxy, and polyimide. The optical semiconductor module according to claim 1 .

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