High-precision laser trigger system and high-precision laser trigger method using the same

Abstract

To provide a high-precision laser trigger system and a high-precision laser trigger method using the same that enable laser processing to be performed precisely and accurately.SOLUTION: A high-precision laser trigger system 1 according to one embodiment includes: a stage 20 on which an object 10 is mounted; a trigger generator 40 configured to generate a trigger signal according to a time-based mode and a position-based mode; a laser 50 configured to emit laser light when the trigger signal is input; a motion controller 30 configured to control the stage 20 and the trigger generator 40; and a control device 60 configured to identify coordinates of the stage 20, which places the object in a light-emitting position of the laser 50 in the position-based mode, and transmit coordinate information including the coordinates and a mode change signal for changing a mode between the time-based mode and the position-based mode to the motion controller 30.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a high-precision laser trigger system and a high-precision laser trigger method using the same. [Background technology]

[0002] Laser processing technology is expanding from traditional manufacturing fields such as steel and automobiles to fields such as semiconductors, displays, and medical equipment, which require ultra-high speed and ultra-precision processing technology.

[0003] In order to perform laser processing more precisely, the laser trigger system is equipped with a trigger generator that triggers the laser. The main task is to accurately match the period required by the laser system, generate a trigger signal at the correct irradiation position, and input it to the laser.

[0004] In particular, in the case of a pumped laser, a trigger signal must be continuously generated / inputted in addition to the section in which processing is being performed in order to irradiate a target object such as a wafer with laser light having a certain energy.

[0005] At this time, an error may occur when moving from a non-machining section to a machining section, or an error may occur in the trigger period or position due to a communication delay that occurs in the process of generating / inputting a trigger signal.

[0006] Therefore, a method is required to perform laser processing precisely according to the period and position required by the laser system. Summary of the Invention [Problem to be solved by the invention]

[0007] SUMMARY OF THE PRESENT EMBODIMENT An object of the present invention is to provide a high-precision laser trigger system and a high-precision laser trigger method using the same, which perform laser processing more precisely and accurately. [Means for solving the problem]

[0008] a control device for identifying coordinates of the stage for placing the object at a position irradiated by the laser in the position-based mode, and transmitting to the motion controller coordinate information including the coordinates and a mode change signal for changing between the time-based mode and the position-based mode, wherein the motion controller controls the trigger generating device to generate the trigger signal at every period in the time-based mode, and controls the stage to accelerate a moving speed of the stage to reach a target speed and to position at a start coordinate among the coordinates upon receiving the mode change signal, and when the stage is positioned at the start coordinate, changes to the position-based mode and controls the trigger generating device to generate the trigger signal every time the stage is positioned at each of the coordinates while moving at the target speed, and controls the stage to decelerate in response to receiving the mode change signal when the stage reaches an end coordinate among the coordinates.

[0009] The motion controller can calculate a position error due to a communication delay using the target speed and a communication delay time, and correct the coordinates.

[0010] The controller can identify a target velocity for the stage based on the period of the trigger signal and the interval between irradiation of the laser.

[0011] The motion controller can identify a position of the stage based on an encoder signal received from the stage.

[0012] The control device can set an acceleration time for accelerating the stage and a deceleration time for decelerating the stage to a multiple of the period of the trigger signal.

[0013] The motion controller can control the stage to decelerate and then move to a next starting coordinate.

[0014] The motion controller may perform synchronization in the position-based mode while the stage moves to the start coordinates.

[0015] A high-precision laser trigger method performed by a high-precision laser trigger system according to an embodiment of the present invention includes the steps of controlling a trigger generating device to generate a trigger signal at every period in a time-based mode; controlling a moving speed of a stage on which an object is mounted to accelerate to reach a target speed and to position the stage at a start coordinate among stage coordinates when a mode change signal for changing from the time-based mode to a position-based mode is received; changing to the position-based mode when the stage is positioned at the start coordinates, and controlling the trigger generating device to generate the trigger signal every time the stage is positioned at each of the coordinates while moving at the target speed; and controlling the stage to decelerate in response to receiving a mode change signal for changing from the position-based mode to the time-based mode when the stage reaches an end coordinate among the coordinates.

[0016] Prior to the step of controlling the target object to be located at the starting coordinates, the step of identifying coordinates of the stage for placing the target object at an irradiation position of the laser in the position-based mode may be included.

[0017] The step of identifying the coordinates of the stage may include the step of calculating a position error due to a communication delay using the target velocity and a communication delay time, and correcting the coordinates.

[0018] Prior to the step of controlling the stage to be located at the start coordinates, the step of identifying a target speed of the stage based on a period of the trigger signal and an irradiation interval of the laser may be included.

[0019] The method may further include identifying a position of the stage based on an encoder signal received from the stage.

[0020] The method may further include setting an acceleration time for accelerating the stage and a deceleration time for decelerating the stage to a multiple of a period of the trigger signal.

[0021] After controlling the stage to decelerate, the method may further include moving the stage to a next starting coordinate.

[0022] The step of controlling to position at the starting coordinates may include performing synchronization in the position-based mode while the stage is moving to the starting coordinates. Effect of the Invention

[0023] According to an embodiment of the present invention, a laser beam with the same energy can be irradiated onto an object at a precise position by switching between a processing / non-processing section mode, thereby improving processing quality.

[0024] According to an embodiment of the present invention, a synchronization period is provided when switching between modes, and preparations for control to the changed mode can be performed, thereby eliminating errors between signals.

[0025] According to an embodiment of the present invention, the processing quality can be further improved by correcting errors due to communication delays. [Brief description of the drawings]

[0026] [Figure 1] FIG. 1 is a schematic diagram illustrating a high-precision laser trigger system according to one embodiment of the present invention. [Diagram 2] 1 is a diagram illustrating an operation flowchart of a high-precision laser trigger system according to an embodiment of the present invention. [Diagram 3] 1 is a diagram illustrating a signal chart of a high-precision laser trigger system in accordance with an embodiment of the present invention. [Figure 4] 1 is a diagram illustrating an operation of a high-precision laser trigger system according to an embodiment of the present invention when applied to a wafer. [Diagram 5] 1 is a diagram illustrating an error correction process of a high-precision laser trigger system according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0027] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. The detailed description disclosed below together with the attached drawings is intended to describe exemplary embodiments of the present invention, and is not intended to represent the only embodiment in which the present invention can be implemented. In order to clearly describe the present invention in the drawings, parts that are not relevant to the description may be omitted, and the same reference numerals may be used for the same or similar components throughout the specification.

[0028] FIG. 1 is a schematic diagram illustrating a high-precision laser trigger system according to one embodiment of the present invention.

[0029] Referring to FIG. 1, a high-precision laser trigger system 1 (hereinafter referred to as system 1 ) according to an embodiment of the present invention includes an object 10 , a stage 20 , a motion controller 30 , a trigger generator 40 , a laser 50 and a controller 60 .

[0030] The target object 10 is a structure to be processed by laser, and may be variously applied to a semiconductor wafer, a display, etc.

[0031] The stage 20 is configured to mount and transport the object 10 and may be a multi-axis stage (XY stage or XYZ stage), and the moving method of the stage 20 is not limited to one and may be variously applied. The stage 20 includes an encoder and can continuously provide position information of the stage 20 to the motion controller 30.

[0032] The motion controller 30 is a device that controls the stage 20 and the trigger generator 40. Specifically, the motion controller 30 moves the stage 20 so that the target object 10 is positioned at the irradiation position of the laser 50, monitors the position of the stage 20, and controls the trigger generator 40 so that the laser 50 irradiates the laser light at a determined position.

[0033] The motion controller 30 includes a processor (hereinafter referred to as the motion processor 31), and the motion processor 31 can execute software such as a program to control at least one other component (e.g., a hardware or software component) of the motion controller 30 and perform various data processing or calculations.

[0034] The motion processor 31 can receive or transmit necessary information by communicating with the stage 20, the trigger generating device 40, and the control device 60 via wired or wireless communication. For this purpose, although not shown, the motion controller 30 can include a separate communication unit. Hereinafter, the operation of the motion controller 30 will be considered to be performed by the motion processor 31.

[0035] The trigger generating device 40 is a device that generates a trigger signal. The system 1 according to an embodiment of the present invention operates by switching between a time-based mode and a position-based mode. The time-based mode is a mode in which the system 1 generates a trigger signal based on a time (period) in a preparation section before the system 1 performs processing, and the position-based mode is a mode in which the system 1 generates a trigger signal based on the position of the stage 20 in a section in which the system 1 performs processing. Therefore, the trigger generating device 40 can generate a trigger signal according to the time-based mode and the position-based mode.

[0036] The laser 50 is fixedly positioned within the system 1, and irradiates the target 10 with a laser beam upon receiving a trigger signal from the trigger generator 40. In this case, the laser 50 may be a pump laser, but is not limited thereto, and any laser may be used as long as it is embodied to irradiate a laser beam upon receiving a trigger signal.

[0037] The control device 60 is a device that controls the overall operation of the components in the system 1, and may be embodied as a computer, a server, or the like.

[0038] The control device 60 includes a processor (hereinafter referred to as the control processor 61), and the control processor 61 can execute software such as a program to control at least one other component (e.g., a hardware or software component) of the control device 60 and perform various data processing or calculations.

[0039] The control processor 61 can receive or transmit necessary information by communicating with the stage 20, the motion controller 30, and the trigger generator 40 via wired or wireless communication. For this purpose, the control device 60 can include a separate communication unit (not shown). Hereinafter, the operation of the control device 60 will be considered to be performed by the control processor 61.

[0040] The control device 60 identifies the coordinates to which the stage 20 moves. The control device 60 transmits coordinate information including the identified coordinates and a mode change signal for changing between a time-based mode and a position-based mode to the motion controller 30. Meanwhile, the motion controller 30 can move the stage 20 based on the coordinate information and control the trigger generator 40 based on the position of the stage 20.

[0041] According to one embodiment of the present invention, the system 1 must continuously generate / input a trigger signal in addition to the section in which processing is performed (in this embodiment, the section in which the system operates in a position-based mode) in order to irradiate the target object 10 with laser light having a certain energy.

[0042] At this time, errors may occur in the trigger period or irradiation position during the process of switching between the time-based mode and the position-based mode or during the process of generating / inputting the trigger signal due to communication delays.

[0043] The present invention proposes a high-precision laser trigger system 1 that can reduce errors that occur when switching modes by introducing a synchronization section between modes and reduce errors through coordinate correction taking into account communication delays, and a high-precision laser trigger method using the same.

[0044] The operation of the system 1 according to an embodiment of the present invention will be specifically described below with reference to the drawings.

[0045] 2 is a flowchart illustrating an operation of the high-precision laser trigger system according to an embodiment of the present invention. The operation will be described below with reference to the motion controller 30.

[0046] According to an embodiment of the present invention, the motion controller 30 controls the trigger generator 40 to generate a trigger signal every period in a time-based mode (S10).

[0047] As described above, the time-based mode is a mode in which the system 1 generates a trigger signal based on a time (period) in a preparation section before performing processing. At this time, the period may be determined according to the performance of the laser 50. Hereinafter, the period will be considered as the period of the trigger signal.

[0048] In the time-based mode, the laser 50 does not actually process the target object 10, but rather outputs laser light at regular intervals to maintain constant energy of the laser light and improve processing quality. However, a shutter is provided inside or outside the laser 50 to block the laser light from being irradiated to unnecessary areas in the time-based mode.

[0049] According to an embodiment of the present invention, when the motion controller 30 receives a mode change signal, it accelerates the moving speed of the stage 20 to reach a target speed and positions the stage 20 at a start coordinate among the coordinates of the stage (S20).

[0050] Generally, when the object 10 is loaded onto the stage 20, its position may be slightly distorted. The control device 60 performs vision alignment on the object 10 and identifies the coordinates of the stage 20 for positioning the object 10 at the irradiation position of the laser 50. The control device 60 can identify the coordinates of the stage 20 taking into consideration the size of the laser 50 (or the irradiation interval of the laser 50). For example, if the size of the laser 50 is a regular square shape of 20 mm x 20 mm, the laser irradiation interval is 20 mm. In addition, the control device 60 can set the overall irradiation path taking into consideration the shape of the object 10. The coordinates of the stage 20 are determined by the irradiation path.

[0051] The motion controller 30 receives coordinate information including the coordinates of the stage 20 and a mode change signal from the control device 60. The mode change signal is a signal for changing from the time-based mode to the position-based mode or from the position-based mode to the time-based mode.

[0052] The start coordinate is the position where the laser 50 first irradiates the target object 10 with the laser beam in each section when the processing process is divided into several sections. For example, if the target object 10 is a wafer and the wafer is processed from left to right in the lateral direction, the leftmost coordinate of the area where the laser is irradiated on the wafer is the start coordinate. This will be described in detail with reference to FIG. 4.

[0053] At this time, the machining direction is not limited to one, and the control device 60 or the motion controller 30 can actively select the path. It goes without saying that the worker can also operate the control device 60 or the motion controller 30 to manually select the path.

[0054] In addition, when a mode change signal to change from the time-based mode to the position-based mode is received, the stage 20 must be located at the previous coordinate of the start coordinate. The previous coordinate means a position where the stage 20 can reach the start coordinate when accelerating in the processing direction to reach the target speed (at a constant acceleration). Generally, the previous coordinate is placed with a margin of the laser irradiation interval from the start coordinate. The control device 60 can also identify the previous coordinate and transmit it to the motion controller 30.

[0055] According to one embodiment of the present invention, motion controller 30 can monitor the position of stage 20 and move it to a previous coordinate.

[0056] The control device 60 can identify the target speed of the stage 20 based on the period of the trigger signal and the laser irradiation interval. For example, if the laser irradiation interval is 20 mm and the period of the trigger signal is 5 Hz (0.2 s), the target speed of the stage 20 is 100 mm / s.

[0057] The motion controller 30 accelerates the stage 20 in the processing direction to reach the target speed. At this time, the motion controller 30 can accelerate the stage 20 at a constant acceleration. The control device 60 can set the acceleration time for accelerating the stage 20 to a multiple of the period of the trigger signal in order to maintain the period of the trigger signal even in the synchronization section.

[0058] Meanwhile, the acceleration section is a section until the mode is completely changed from the time-based mode to the position-based mode, and is also called a synchronization section. During the synchronization section, the motion controller 30 performs a synchronization operation, such as removing errors between signals and executing a process for controlling to the position-based mode.

[0059] According to one embodiment of the present invention, the motion controller 30 switches to a position-based mode when the stage 20 is located at a start coordinate, and controls the trigger generator 40 to generate a trigger signal each time the stage 20 moves at a target speed and reaches each of the coordinates (S30).

[0060] When the stage 20 reaches the target speed, the motion controller 30 controls the stage 20 to move at a constant speed in the position-based mode.

[0061] When the trigger generator 40 generates a trigger signal at each coordinate of the stage 20, the laser 50 will receive the trigger signal and irradiate the target 10 with laser light at the corresponding coordinate.

[0062] According to an embodiment of the present invention, when the stage 20 reaches an end coordinate among the coordinates, the motion controller 30 receives a mode change signal and thereby decelerates the stage 20 (S40).

[0063] Similarly, when the processing step is divided into several sections, the end coordinate is the position where the laser 50 irradiates the target object 10 with the laser light last in each section. For example, when the target object 10 is a wafer and the wafer is processed from left to right in the horizontal direction, the rightmost coordinate of the wafer area irradiated with the laser is the end coordinate. This will be described in detail with reference to FIG. 4.

[0064] The control device 60 can transmit a mode change signal to the motion controller 30 when the stage 20 reaches the end coordinates. Alternatively, the motion controller 30 can generate a mode change signal at the falling edge of the trigger signal when the stage 20 reaches the end coordinates.

[0065] At this time, the mode change signal is a signal for changing from the position-based mode back to the time-based mode.

[0066] Meanwhile, like the acceleration section, the deceleration section is also called a synchronization section, which is a section until the mode is completely changed from the position-based mode to the time-based mode. During the synchronization section, the motion controller 30 performs a synchronization operation, such as removing errors between signals and executing a process for controlling to the time-based mode.

[0067] In the unlikely event that the processing is completed, the motion controller 30 decelerates the moving speed of the stage 20 to 0 (stage stops).

[0068] If the processing is not completed, the motion controller 30 decelerates the moving speed to a constant speed because the stage 20 must be moved to a position for the next processing. The motion controller 30 decelerates the stage 20 at a constant deceleration.

[0069] 2 is one sequence of processing steps for the target object 10. Depending on the size and shape of the target object 10, multiple sequences may be performed to complete the processing steps.

[0070] The control device 60 can transmit position information (coordinate information) for the next processing to the motion controller 30. Meanwhile, the control device 60 can identify and transmit coordinate information of the stage 20 for processing the entire target object 10, but is not limited thereto, and can transmit the information by sequence or in real time.

[0071] According to an embodiment of the present invention, a laser beam with the same energy can be irradiated onto an object at a precise position by switching between a processing / non-processing section mode, thereby improving processing quality.

[0072] According to an embodiment of the present invention, a synchronization period is provided when switching between modes, and preparations for control to the changed mode can be performed, thereby eliminating errors between signals.

[0073] FIG. 3 is a diagram illustrating a signal chart of a high-precision laser trigger system according to an embodiment of the present invention.

[0074] The contents described above in relation to FIG. 2 are illustrated in a signal chart, and reference should be made to FIG. 2 for overlapping contents.

[0075] Referring to FIG. 3, the trigger signal in the time-based mode (including the synchronization section) and the trigger signal in the position-based mode are all generated with the same period as the reference trigger signal.

[0076] First, when the stage 20 is stopped or simply moving to a different position (idle state), a trigger signal is generated at a period of 5 Hz (0.2 seconds) in the time-based mode.

[0077] The controller 60 transmits a mode change signal and the position-based stage coordinates to the motion controller 30. A mode change signal may be generated when the stage 20 is at a coordinate prior to the start coordinate.

[0078] After the control device 60 inputs a mode change signal, the motion controller 30 generates a mode change start trigger signal to control the acceleration of the stage 20 .

[0079] The acceleration time of the stage 20 can be set to a multiple of the trigger signal period, and in Fig. 3, it is set to twice the trigger signal period, resulting in an acceleration time of 0.4 seconds. While the stage 20 is accelerating, the trigger generator 40 is continuously triggered by the time-based mode trigger signal. The acceleration section is a synchronization section as described above, and the motion controller 30 switches from the time-based mode to the position-based mode to perform synchronization. The motion controller 30 can input coordinates received from the control device 60.

[0080] After completing acceleration and synchronization of the stage 20, the motion controller 30 switches to a position-based mode, moves the stage 20 at a constant speed, and controls the trigger generator 40 to generate a trigger signal when the input coordinates are reached.

[0081] When the stage 20 reaches the last coordinate among the input coordinates, the motion controller 30 again receives the mode change signal at the falling edge of the trigger signal.

[0082] When the motion controller 30 receives the mode change signal, it decelerates the stage 20. Similarly, the deceleration time is set to twice the period of the trigger signal, so that the deceleration time is 0.4 seconds. The motion controller 30 changes from the position-based mode to the time-based mode and performs synchronization.

[0083] Once deceleration is complete, the mode changes to time-based mode and a trigger signal is generated at a period of 5 Hz (0.2 seconds).

[0084] FIG. 4 is a diagram illustrating an operation of the high-precision laser trigger system according to an embodiment of the present invention when applied to a wafer.

[0085] 4 illustrates a specific operation process of the system 1 when the target object 10 is a wafer 11. Similarly, the same contents as those in FIGS. 2 and 3 are applied to the same operations as those in FIGS.

[0086] As described above, the processing direction / processing path of the wafer 11 can be set in various ways, and in the case of Fig. 4, the processing path is set in a zigzag direction from left to right / right to left in the horizontal direction of the wafer 11. In this case, processing is performed row by row, and one row is considered to be one sequence.

[0087] The control device 60 identifies the coordinates at which the stage should be positioned, taking into consideration the shape of the wafer 11, the laser irradiation interval, the laser position, and the like.

[0088] The motion controller 30 uses the coordinate information to move the stage 20 to the previous coordinates 410. The previous coordinates 410 are the previous coordinates of the stage 20 from the start coordinates 420, as described above in relation to S20 in FIG.

[0089] When the stage 20 is located at the previous coordinate 410, the motion controller 30 accelerates the stage 20 in response to a mode change signal and positions the stage 20 at the start coordinate 420 (1: acceleration section=synchronization section).

[0090] The motion controller 30 moves the stage 20 at a constant speed from the start coordinate 420 to the end coordinate 430, and controls the trigger generator 40 to irradiate the laser light for each set coordinate (2: constant speed section, position-based mode).

[0091] When the motion controller 30 receives the mode change signal again from the end coordinate 430, it controls the stage 20 to decelerate (3: deceleration section=synchronization section).

[0092] As a result, the stage 20 can be positioned at coordinate 440 and moved to the previous coordinate 450 in the next sequence (4: stop or simple movement section, time-based mode).

[0093] FIG. 5 is a diagram illustrating an error correction process of a high-precision laser trigger system according to an embodiment of the present invention.

[0094] According to one embodiment of the present invention, a communication delay may occur in the process in which the encoder signal of the stage 20 is input to the motion controller 30 and the trigger generator 40 outputs a trigger signal in the position-based mode and inputs the trigger signal to the laser 50. That is, an error may occur because the period of the trigger signal and the period of the encoder do not exactly match.

[0095] The communication delay is an inherent value of the system, and does not change even if the speed changes. Therefore, the motion controller 30 can calculate the position error due to the communication delay and correct the coordinates. Specifically, the motion controller 30 can calculate the position error due to the communication delay using the target speed and the communication delay time.

[0096] For example, if the trigger signal period is 5 Hz and the laser irradiation interval is 20 mm, the target speed is 100 mm / s. If the communication delay time is 1 ms, a position error of 0.1 mm occurs due to the communication delay.

[0097] In this case, even if the laser 50 is irradiated at the same X-axis position, a position error of up to 0.2 mm up or down may occur depending on the moving direction of the target object 10.

[0098] The motion controller 30 can calculate an error time based on the moving speed (target speed) of the target object 10 and the communication delay time, and apply a correction value depending on the moving direction.

[0099] Alternatively, as shown in FIG. 5, the trigger generator 40 can multiply the period with a resolution of 10 nsec to precisely correct the trigger position.

[0100] According to an embodiment of the present invention, the processing quality can be further improved by correcting errors due to communication delays. [Explanation of symbols]

[0101] 1: Laser trigger system 10: Target 20: Stage 30: Motion controller 40: Trigger generator 50: Laser 60: Control device

Claims

1. In high-precision laser trigger systems, a stage on which the object is mounted; and a trigger generating device for generating a trigger signal in accordance with a time-based mode and a position-based mode; a laser that emits a laser beam when the trigger signal is input; a motion controller for controlling the stage and the trigger generating device; a control device that identifies coordinates of the stage for placing the target object at an irradiation position of the laser in the position-based mode, and transmits coordinate information including the coordinates and a mode change signal for changing between the time-based mode and the position-based mode to the motion controller, The motion controller includes: In the time-based mode, the trigger generator is controlled to generate the trigger signal every period; When the mode change signal is received, the moving speed of the stage is accelerated to reach a target speed, and the stage is controlled to be positioned at a start coordinate among the coordinates; When the stage is located at the start coordinates, the mode is changed to the position-based mode, and the trigger generating device is controlled to generate the trigger signal every time the stage is located at each of the coordinates while moving at the target speed, a high precision laser trigger system that receives the mode change signal and controls the stage to decelerate when the stage reaches an end coordinate among the coordinates;

2. The motion controller includes:

2. The high-precision laser trigger system according to claim 1, wherein the position error caused by the communication delay is calculated using the target speed and the communication delay time, and the coordinates are corrected.

3. The control device includes: The high precision laser trigger system of claim 1 , further comprising: a trigger signal period and a laser firing interval to identify a target velocity of the stage.

4. The motion controller includes: The high precision laser trigger system of claim 1 , further comprising: a stage position determining unit configured to determine a position of the stage based on an encoder signal received from the stage.

5. The control device includes:

2. The high-precision laser trigger system of claim 1, wherein an acceleration time for accelerating the stage and a deceleration time for decelerating the stage are set to a multiple of a period of the trigger signal.

6. The motion controller includes: The high precision laser trigger system of claim 1 , further comprising: controlling said stage to move to a next start coordinate after decelerating said stage.

7. The motion controller includes:

2. The high-precision laser trigger system of claim 1, wherein synchronization is performed in the position-based mode while the stage moves to the start coordinates.

8. 1. A high-precision laser triggering method performed by a high-precision laser triggering system, comprising: controlling the trigger generator to generate a trigger signal every period in a time-based mode; receiving a mode change signal for changing from the time-based mode to the position-based mode, accelerating a moving speed of the stage on which the object is mounted to reach a target speed and controlling the object to be positioned at a start coordinate among the coordinates of the stage; when the stage is located at the start coordinates, changing to the position-based mode and controlling the trigger generating device to generate the trigger signal every time the stage is located at each of the coordinates while moving at the target speed; and controlling the stage to decelerate by receiving a mode change signal for changing the mode from the position-based mode to the time-based mode when the stage reaches an end coordinate among the coordinates.

9. Prior to the step of controlling the position of the starting coordinates, The method of claim 8 , further comprising identifying coordinates of the stage for placing the target object at a laser irradiation position in the position-based mode.

10. The step of identifying coordinates of the stage comprises:

10. The high-precision laser trigger method according to claim 9, further comprising the step of: calculating a position error caused by a communication delay using the target speed and a communication delay time, and correcting the coordinates.

11. Prior to the step of controlling the position of the starting coordinates, 9. The method of claim 8, further comprising identifying a target velocity of the stage based on a period of the trigger signal and an interval between laser firings.

12. 9. The method of claim 8, further comprising identifying a position of the stage based on an encoder signal received from the stage.

13. 9. The method of claim 8, further comprising setting an acceleration time for accelerating the stage and a deceleration time for decelerating the stage to a multiple of a period of the trigger signal.

14. After the step of controlling the stage to decelerate, 9. The high precision laser triggering method of claim 8, further comprising the step of moving the stage to a next starting coordinate.

15. The step of controlling to position the starting coordinates includes:

9. The method of claim 8, further comprising: performing synchronization in the position-based mode while the stage is moving to the start coordinates.

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