Device for determining the position of the end effector in the hoop

Abstract

To provide a position determination device of a robot sensing laser sensor system in a FOUP, capable of determining whether the presence / absence of deviation in horizontal and vertical directions of the FOUP mounted to a load port is sensed, and is mounted to a home position.SOLUTION: A FOUP 500 that can be moved in an OHT (Over-Head Transport) in a position determination device of a laser sensor system, includes: a sensor support plate 595 that is installed to the least significant of a substrate stationary rail 520, and is provided with a plurality of height sensors 590a and 590b for sensing the height of a load port to an upper surface; a horizontal sensor 580 that is provided to a plate surface of a load port mounting plate 560, and determines whether a housing 510 is horizontal; and a radio communication part 570 that is provided to an inner part of the housing 510, and transmits, to a control part, an angle value sensed by T-shaft sensors 540 and 540a, a sensing value of a Z-shaft sensor 550, and the horizontal sensor 580, and a height value sensed by the plurality of height sensors.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to a position determination device for a robot sensing laser sensor system in a FOUP movable by an OHT (Over-Head Transport). [Background technology]

[0002] In the semiconductor manufacturing process, wafers are processed in clean rooms to improve yield and quality. However, as the integration of elements becomes higher, circuits become finer, and wafers become larger, it has become technically and financially difficult to maintain the entire clean room in a clean state.

[0003] To solve this problem, recently, the cleanliness of only the space around the wafer is controlled. Specifically, the wafers are stored inside a sealed storage pod called a Front-Opening Unified Pod (FOUP). A device called an Equipment Front End Module (EFEM) is used to transfer the wafers between the processing equipment that processes the wafers and the FOUP.

[0004] The moved FOUP is placed on the Equipment Front End Module (EFEM) of each process equipment, and the EFEM opens the FOUP cover to expose the substrate to the outside. Then, the end effector of the EFEM's atmospheric pressure transfer robot gets one of the substrates loaded inside the HOUP and transfers it to a processing chamber inside the process equipment, and puts the processed substrate into the HOUP.

[0005] However, when the hoop is mounted on the EFEM, it may not be mounted horizontally in a fixed position, but may be mounted so as to be misaligned from the fixed position, i.e., it may be mounted at an angle to the horizontal or vertical direction.

[0006] If the FOUP is misaligned when mounted on the EFEM, when the end effector enters the FOUP to perform a get or put operation, the substrate may rub against the substrate placement rails and be damaged. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Korean Patent No. 10-1613135 Summary of the Invention [Problem to be solved by the invention]

[0008] The object of the present invention is to solve the above-mentioned problems and to provide a position determination device for a robot sensing laser sensor system in a FOUP that can detect the presence or absence of horizontal and vertical deviations of a FOUP loaded on a load port and determine whether it is loaded in the correct position.

[0009] Another object of the present invention is to provide a position determination device for a robot sensing laser sensor system in a hoop that can determine whether get and put operations are being performed accurately through a sensed movement path of an end effector. [Means for solving the problem]

[0010] The above-mentioned object of the present invention can be achieved by a position determination apparatus for an in-FOOP robot sensing laser sensor system. The position determination apparatus for an in-FOOP robot sensing laser sensor system of the present invention includes an external server 20; and a substrate processing apparatus 10 in which substrate processing is performed and which transmits integrated management data to the external server 20.

[0011] Here, the substrate processing apparatus 10 includes: FOUPs 500, 500a, 500b in which a plurality of substrates are accommodated; load ports 100, 100a, 100b to which the FOUPs 500, 500a, 500b are detachably coupled; a process chamber 400 in which processes on the substrates are performed; and an EFEM 200 provided between the process chamber 400 and the load ports 100, 100a, 100b and equipped with an end effector 213 for getting substrates accommodated in the FOUPs 500, 500a, 500b to the process chamber 400 or putting substrates for which processes have been completed in the process chamber 400 into the FOUPs 500, 500a, 500b.

[0012] In addition, when the FOUPs 500, 500a, and 500b are seated on the load ports 100, 100a, and 100b, a control unit 600 may be included which transmits movement path data of the end effector 213 to the external server 20 when the end effector 213 enters or retreats into the FOUPs 500, 500a, and 500b.

[0013] In addition, the hoops 500, 500a, 500b may include a housing 510 having an entrance 530 through which the end effector 213 enters and retreats; substrate mounting rails 520 formed at regular intervals in the height direction on both sides of the housing 510, on which a plurality of substrates are sequentially loaded; T-axis sensors 540, 540a provided on the top and bottom of the entrance 530 and detecting the horizontal movement path of the end effector 213; a Z-axis sensor 550 provided on the inner bottom of the entrance 530 and detecting the vertical movement height of the end effector 213 moved through the entrance 530; and a load port mounting plate 560 provided on the bottom of the housing 510 and electrically connected to the load ports 100, 100a, 100b.

[0014] a sensor support plate 595 which is mounted on the lowest part of the substrate mounting rail 520 and has a plurality of height sensors 590, 590a, 590b on its upper surface for detecting the height of the load ports 100, 100a, 100b; a horizontal sensor 580 which is mounted on the surface of the load port mounting plate 560 and determines whether the housing 510 is horizontal; and a horizontal sensor 580 which is mounted inside the housing 510 and detects the detected values ​​of the T-axis sensors 540, 540a and the Z-axis sensor 550. 、 The angle value detected by the horizontal sensor 580; 、 and a wireless communication unit 570 for transmitting height values ​​sensed by the height sensors 590, 590a, 590b to the control unit 600. Effect of the Invention

[0015] The position determination device of the laser sensor system for detecting robots in a FOUP according to the present invention includes a plurality of height sensors and a horizontal sensor inside the FOUP for detecting the height of the FOUP relative to the adapter of the load port, and is capable of determining whether the FOUP is mounted in the EFEM without misalignment. This has the advantage that the power supply to the FOUP where a misalignment is detected is cut off and the transfer of the substrate by the end effector is cut off to prevent damage to the substrate.

[0016] In addition, the data integrated management system according to the present invention has an advantage that the installation and maintenance are more convenient since a sensing means for sensing the movement path of the end effector is provided inside the FOUP, and the substrate processing process does not need to be stopped during the installation and maintenance of the sensing means.

[0017] In addition, the device can detect whether the end effector moves normally, shifts, warping, movement height, etc. to determine whether the end effector normally performs a get operation or a put operation.

[0018] In addition, the control unit communicates with the sensing means in the FOUP to receive end effector movement path data, communicates with various sensors in the equipment to receive current equipment operation data, and transmits integrated management data, which is an integration of the received movement path data and equipment operation data, to an external server in a batch so that the external server can quickly and accurately determine the current status of the substrate processing apparatus.

[0019] In addition, if there is a difference between the normal state and the get operation or the put operation, the control unit transmits an abnormality signal to an external server, so that an administrator can quickly deal with the abnormal movement of the end effector. [Brief description of the drawings]

[0020] [Figure 1] 1 is a schematic diagram showing the configuration of a position determination device of a robot sensing laser sensor system in a hoop according to the present invention; [Diagram 2] 1 is a block diagram showing the configuration of a position determination device of a robot sensing laser sensor system in a hoop according to the present invention; [Diagram 3] 1 is a perspective view showing a configuration of a substrate processing apparatus of a position determination device of a robot sensing laser sensor system in a FOUP according to the present invention; [Figure 4] 1 is a plan view showing a planar configuration of a substrate processing apparatus according to the present invention; [Diagram 5] FIG. 2 is a perspective view showing a configuration of a hoop according to the present invention. [Figure 6] FIG. 2 is an exploded perspective view showing the configuration of a hoop and an adapter according to the present invention. [Figure 7] 4 is an exemplary view showing a hoop movement path sensing means according to the present invention; FIG. [Figure 8] 11 is an exemplary view showing a process of detecting an end effector movement path by a T-axis sensor of a hoop according to the present invention; FIG. [Figure 9] 11 is an exemplary view showing a process of detecting an end effector movement path by a T-axis sensor of a hoop according to the present invention; FIG. [Figure 10] 4 is a cross-sectional view illustrating a height sensing process of the height sensor according to the present invention; [Figure 11] 4 is an exemplary diagram showing an example of detection results of a horizontal sensor and a height sensor according to the present invention; FIG. [Figure 12] 11A to 11C are exemplary diagrams showing a get operation of the end effector according to the present invention; [Figure 13] 11A to 11C are exemplary diagrams showing a putting operation of the end effector according to the present invention; [Figure 14] 11A and 11B are exemplary diagrams showing sensing values ​​during get and put operations of the Z-axis sensor of the FOUP according to the present invention; [Figure 15] FIG. 11 is an exemplary diagram showing an example of integrated management data to be transmitted to an external server according to the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to preferred embodiments of the present invention and the accompanying drawings, in which like reference numerals refer to like elements.

[0022] When any element in the detailed description of the invention or the claims is said to "comprise" other elements, this should not be construed as being limited to the element in question, unless specifically stated to the contrary, but should be understood to include other elements.

[0023] Figure 1 is a schematic diagram showing the configuration of a position determination device 1 of a robot sensing laser sensor system in a FOUP according to the present invention, Figure 2 is a block diagram showing the internal configuration of the position determination device 1 of a robot sensing laser sensor system in a FOUP, Figure 3 is an oblique view showing the configuration of a substrate processing apparatus 10, and Figure 4 is a plan view showing the planar configuration of the substrate processing apparatus 10.

[0024] As shown in Figures 1 and 2, a position determination device 1 of a robot sensing laser sensor system in a FOUP transmits integrated management data between a substrate processing apparatus 10, in which a process for a substrate is being performed, and an external server 20, so that the current operating status inside the substrate processing apparatus 10 is accurately and quickly transmitted to the external server 20.

[0025] Although Figures 1 and 2 only show one substrate processing apparatus 10 connected to an external server 20, multiple substrate processing apparatus 10 performing different processes on substrates may be connected to the external server 20 via a communication network and each may transmit integrated management data to enable the external server 20 to quickly grasp the current status of the substrate processing process.

[0026] The substrate processing apparatus 10 performs various processes on a substrate. The substrate processing apparatus 10 includes a process chamber 400 in which a process is performed on a substrate (W), a stage 300 supporting the process chamber 400, an EFEM 200 coupled to the front end of the stage 300 and having an end effector 213 therein for getting or putting the substrate (W) to the stage 300, load ports 100, 100a, 100b coupled to the EFEM 200, FOUPs 500, 500a, 500b on which the substrate (W) is loaded and which are detachably seated on the load ports 100, 100a, 100b, and a controller 600 for controlling these components, integrating data received from each component to generate integrated management data, and transmitting the integrated management data to the external server 20.

[0027] The process chamber 400 and the stage 300 operate under vacuum pressure, and the load ports 100, 100a, 100b and the EFEM 200 operate under atmospheric pressure. The buffering chamber 310 of the stage 300 is alternately exposed to vacuum pressure and atmospheric pressure.

[0028] The substrate processing apparatus 10 according to the present invention determines whether the FOUPs 500, 500a, 500b are horizontally installed in a fixed position without deviation when the FOUPs 500, 500a, 500b are installed on the load ports 100, 100a, 100b, thereby preventing damage to substrates that may occur when the FOUPs 500, 500a, 500b are installed in a misaligned manner.

[0029] In addition, the substrate processing apparatus 10 is provided with a sensing means for sensing the movement path of the end effector 213 inside the detachably connected FOUPs 500, 500a, 500b, so that erroneous movement of the end effector 213 can be quickly detected during the process of getting or putting the substrate (W) to prevent damage to the substrate (W).

[0030] Also, the control unit 600 can determine whether the get or put operation of the end effector 213 is performed properly by using the sensing means provided in the hoops 500, 500a, and 500b.

[0031] In addition, equipment operation data received from various equipment detection sensors installed inside the substrate processing apparatus 10 is transmitted to the external server 20 in the form of integrated management data together with movement path data of the end effector 213 detected by the detection means, thereby allowing the external server 20 to collectively and quickly manage the substrate processing apparatus 10.

[0032] 3 and 4, the load ports 100, 100a, 100b are coupled to the tip of the EFEM 200 and support the FOUPs 500, 500a, 500b. A plurality of the load ports 100, 100a, 100b are provided, and the FOUPs 500, 500a, 500b are mounted on the upper surface of each of the load ports. An adapter 110 that is electrically coupled to the FOUPs 500, 500a, 500b is provided on the upper surface of each of the load ports 100, 100a, 100b.

[0033] On the upper surface of the adapter 110, the load port mounting plates 560 provided at the lower portions of the respective FOUPs 500, 500a, 500b are placed.

[0034] Although not shown in the drawings, an RFID (not shown) is provided on the adapter 110. The RFID (not shown) recognizes the FOUPs 500, 500a, and 500b attached to the adapter 110 and transmits information of the corresponding FOUP to the external server 20.

[0035] 6, a plurality of position fixing pins 111 for determining the mounting position of the load port mounting plate 560 under the FOUPs 500, 500a, and 500b are provided to protrude from the upper surface of the adapter 110. The position fixing pins 111 are provided to protrude at a certain height from the upper surface of the adapter 110.

[0036] The position fixing pins 111 may be provided in a number of three in a triangular shape or in a number of four in a rectangular shape on the surface of the adapter 110. In some cases, five or more position fixing pins may be provided.

[0037] The position fixing pins 111 are all provided at the same height and contact and support the lower part of the load port mounting plate 560 as shown in Fig. 10. The load port mounting plate 560 is placed on the upper ends of the position fixing pins 111 and is fixed in position while being spaced apart from the adapter 110 by a certain distance.

[0038] Although not shown in the drawing, a contact sensor is provided on the position fixing pin 111 to detect whether or not the load port mounting plate 560 is in contact with the position fixing pin 111 and transmit the result to the control unit 600 .

[0039] The EFEM 200 transfers a substrate (W) between the FOUPs 500, 500a, 500b installed on the load ports 100, 100a, 100b and the buffering chamber 310 of the stage 300. The EFEM 200 is equipped with an atmospheric pressure transfer robot 210 that transfers the substrate (W), and a transfer robot driving unit 220 that drives the atmospheric pressure transfer robot 210.

[0040] The atmospheric pressure transfer robot 210 picks up unprocessed substrates inside the FOUPs 500, 500a, and 500b and loads them into the buffering chamber 310, and unloads processed substrates that have been processed in the process chamber 400 and puts them into the FOUPs 500, 500a, and 500b. The atmospheric pressure transfer robot 210 includes a rotating arm 211 and an end effector 213 provided at the end of the rotating arm 211 to transfer the substrate (W).

[0041] The transfer robot driver 220 drives the atmospheric pressure transfer robot 210 so that the end effector 213 sequentially gets or puts the substrates according to teaching values ​​set when the equipment is installed.

[0042] The transfer robot drive 220 includes multiple spindles 221 , 223 that rotate the rotating arm 211 and the end effector 213 .

[0043] As shown in FIG. 4, depending on the direction of rotation of the spindles 221, 223, the end effector 213 can be folded or unfolded from the rotating arm 211 and inserted into the hoops 500, 500a, 500b through the hoop entrance 240, or inserted into the buffering chamber 310 through the buffering chamber entrance 230.

[0044] The end effector 213 has a substrate W mounted on its upper surface. The end effector 213 may be formed in various shapes, and has a substrate W mounted on its upper surface. A bar-shaped end effector arm 213a having a certain length is provided at the rear of the end effector 213.

[0045] The stage 300 supports a plurality of process chambers 400, and is provided with a buffering chamber 310 connected to the EFEM 200 and a transfer robot 320. The stage 300 is formed in a polygonal shape, and a plurality of process chambers 400 and a pair of buffering chambers 310 are provided on each side of the polygon.

[0046] The pair of buffering chambers 310 are respectively loaded with unprocessed substrates and processed substrates transferred by the end effector 213. The transfer robot 320 loads the unprocessed substrates loaded in the buffering chambers 310 into the process chambers 400, or unloads the processed substrates that have been processed in the process chambers 400 into the buffering chambers 310.

[0047] The process chamber 400 performs a processing process on a substrate. The process chamber 400 includes a susceptor 420 on which a substrate is loaded. The process chamber 400 may be configured to perform various substrate processing operations. For example, the process chamber 400 may be an ashing chamber configured to remove photoresist, a chemical vapor deposition (CVD) chamber configured to deposit an insulating film, or an etch chamber configured to etch an aperture or opening in an insulating film to form an interconnect structure. Alternatively, the process chamber 400 may be a PVD chamber configured to deposit a barrier film, or a PVD chamber configured to deposit a metal film.

[0048] 4, the buffering chamber 310, the stage 300, and the process chamber 400 are provided with a sensor unit 620 capable of detecting the current operating status of the equipment. The sensor unit 620 may be a plurality of pressure sensors 621, 623, 625, a temperature sensor 627, a concentration sensor 629, etc., which detect the pressure, temperature, plasma gas concentration, number of substrates processed, etc., inside the buffering chamber 310, the stage 300, and the process chamber 400. In addition, various other sensors may be provided to detect the current operating status of the equipment. The sensor unit 620 transmits the detected equipment status to the control unit 600 in real time.

[0049] The FOUPs 500, 500a, and 500b accommodate a plurality of substrates therein and are detachably coupled between different substrate processing apparatuses so that the substrates are sequentially subjected to different processes. Each of the FOUPs 500, 500a, and 500b is mounted on the upper surface of the load ports 100, 100a, and 100b, as shown in FIG.

[0050] The FOUPs 500, 500a, 500b of the present invention incorporate a sensing means for sensing the movement path of the end effector 213 when it advances or retreats. The FOUPs 500, 500a, 500b transmit movement path data of the end effector 213 sensed by the control unit 600 using the power source of a battery (not shown) built in the FOUPs 500, 500a, 500b.

[0051] Here, in the substrate processing apparatus 10 of the present invention, the sensing means for sensing the movement path of the end effector 213 is built into the FOUPs 500, 500a, 500b, which has the advantage of being easier to install and maintain than a conventional system that is provided at the FOUP entrance of a stage. Also, since the FOUPs 500, 500a, 500b can be separated, there is the advantage that the substrate processing apparatus does not need to be shut down during installation or maintenance of the sensing means.

[0052] FIG. 5 is a perspective view showing the configuration of HOOPs 500, 500a, and 500b, FIG. 6 is an exploded perspective view showing the configuration of HOOPs 500, 500a, and 500b, and FIG. 7 is an illustrative view showing the sensing process of sensing the movement path of the end effector 213 in HOOPs 500, 500a, and 500b.

[0053] The FOUPs 500, 500a, 500b each include a housing 510 in the form of a box; board placement rails 520 formed at regular intervals along the height direction on the inner wall surfaces on both sides of the housing 510 for placing a board (W); an entrance 530 arranged corresponding to the FOUP entrance 240 of the EFEM 200; T-axis sensors 540, 540a provided at the entrance 530 for detecting the horizontal (T-axis) movement path of the end effector 213; The housing 510 includes a Z-axis sensor 550 that detects the vertical (Z-axis) movement height of the end effector 213, a load port mounting plate 560 that is provided at the bottom of the housing 510 and is electrically connected to the adapter 110 of the load port 100, 100a, 100b, and a wireless communication unit 570 that is provided inside the FOUP 500, 500a, 500b and transmits movement data of the end effector 213 detected by the T-axis sensor 540, 540a and the Z-axis sensor 550 to the control unit 600.

[0054] In addition, the hoops 500, 500a, 500b include a horizontal sensor 580 that detects whether the hoops 500, 500a, 500b are horizontal, and a plurality of height sensors 590, 590a, 590b provided on the bottom surface 511 of the housing 510 that detect the height between the housing 510 and the adapter 110.

[0055] When the FOUPs 500, 500a, 500b are installed on the respective load ports 100, 100a, 100b, the load port mounting plate 560 on the bottom of the housing 510 comes into contact with the position fixing pins 111 of the adapters 110 of the load ports 100, 100a, 100b. Each load port 100, 100a, 100b has a load port number assigned by the external server 20.

[0056] In response, when the wireless communication unit 570 transmits movement data to the control unit 600, the corresponding load port number is also transmitted, so that the control unit 600 and the external server 20 can identify the location of the load port 100, 100a, 100b to which the data was transmitted.

[0057] A plurality of board placement rails 520 are provided on both wall surfaces in the height direction, and a plurality of boards are placed therein at a distance from each other.

[0058] Although not shown in the drawings, a cap (not shown) is coupled to the inlet 530. When the hoops 500, 500a, 500b are connected to the load ports 100, 100a, 100b, the cap (not shown) is opened and the inlet 530 is connected to the hoop inlet 240, allowing the end effector 213 to enter or retract.

[0059] The end effector 213 is moved according to teaching information inputted through the external server 20. The T-axis sensors 540, 540a and the Z-axis sensor 550 detect the movement path of the end effector 213 to determine whether the end effector 213 is moving the substrate to a fixed position according to the teaching information, and transmit the detected path to the control unit 600.

[0060] The T-axis sensors 540, 540a are provided at the entrance 530 and sense the horizontal movement path of the end effector 213 as it enters the hoop 500, 500a, 500b or retreats to the outside of the hoop 500, 500a, 500b. The T-axis sensors 540, 540a sense whether the end effector 213 is moved horizontally to a fixed position. More specifically, the T-axis sensors 540, 540a sense whether the end effector 213 is shifted or displaced from the fixed position.

[0061] The T-axis sensors 540 and 540a are implemented as optical sensors that obtain information by emitting light from a light source. The T-axis sensors 540 and 540a include a light-emitting sensor 540 that is provided at the bottom of the inlet 530 and emits light, and a light-receiving sensor 540a that is provided at the top of the inlet 530 at a position corresponding to the light-emitting sensor 540 and receives light.

[0062] The light emitting sensor 540 is provided at the bottom of the entrance 530 so that the light source irradiates the rear surface of the substrate W, since the output light source may damage the pattern formed on the upper surface of the substrate W. The light receiving sensor 540a receives the light output from the light emitting sensor 540, outputs an output value that is varied according to the amount of the received light as an electrical signal, and transmits the output to the control unit 600. The light receiving sensor 540a is provided with a photodiode, a PDS, or the like.

[0063] The reason for using optical sensors as the T-axis sensors 540, 540a is that they are relatively free from ambient noise and have less measurement error than other types of sensors, making it possible to obtain accurate results. Also, because they are smaller than other types of sensors, they are easy to install inside the inspection FOUPs 500, 500a, 500b, which have a narrow internal space.

[0064] The information acquired by the T-axis sensors 540, 540a can be at least any one of the presence or absence, movement position, degree of deviation, and shift of the end effector 213. "Presence or absence" means that if the light receiving sensor 540a receives 100% of the light source without interference from the board or end effector 213, it can determine that the board or end effector 213 is not present on the path taken by the light source, and if the light receiving sensor 540a cannot receive at least a part of the light source due to interference from the board or end effector 213, it can determine that the board or end effector 213 is present on the path taken by the light source.

[0065] The "movement position" and "degree of deviation and shift" can be confirmed by checking the movement position of the end effector 213 based on the time when the light source is irradiated from the light emitting sensor 540 and the area where the light source is received by the light receiving sensor 540a.

[0066] 7, the T-axis sensors 540, 540a transmit position information of the end effector 213 entering the entrance 530 and the entire end effector arm 213a to the control unit 600. The control unit 600 filters only the area corresponding to the length (d) of the end effector arm 213a from the T-axis position information received from the light receiving sensor 540a, and generates it as movement path data.

[0067] This is because when a substrate (W) is loaded on the end effector 213, diffuse reflection occurs when the light source is shone on it, so only the data values ​​of the area corresponding to the end effector arm 213a where no diffuse reflection occurs are extracted as movement path data.

[0068] FIG. 8 is an exemplary diagram showing various examples of the path of the end effector arm 213a sensed by the T-axis sensors 540, 540a, and FIG. 9 is an exemplary diagram showing an example of an electrical signal transmitted from the light receiving sensor 540a to the control unit 600.

[0069] 8A is an example diagram showing the end effector arm 213a moving along the normal movement path according to the teaching information. The end effector arm 213a moves in a direction perpendicular to the light receiving sensor 540a, and at this time, moves so that a certain area of ​​the light receiving sensor 540a, i.e., 50% of the area of ​​the light receiving sensor 540a, is hidden.

[0070] The state in which 50% of the light receiving sensor 540a is hidden makes it possible to check in which direction the end effector arm 213a has shifted or tilted, which can be used as a criterion for determining whether the end effector arm 213a is moving along the correct path.

[0071] That is, when end effector arm 213a passes through entrance 530 of FOUP 500, 500a, 500b and covers 50% of the area of ​​light receiving sensor 540a, the output value (voltage) of light receiving sensor 540a is outputted at a constant reference value (S) in FIG.

[0072] FIG. 8(b) is an exemplary diagram showing a state where the end effector arm 213a has shifted from its fixed position to the left side of the light receiving sensor 540a and is moved, and FIG. 8(c) is an exemplary diagram showing a state where the end effector arm 213a has shifted from its fixed position to the right side of the light receiving sensor 540a and is moved on the drawing.

[0073] As shown in FIG. 8(b), when the end effector arm 213a is shifted to the left side of the light receiving sensor 540a, the light receiving sensor 540a becomes more hidden (l1>l2) than when the end effector arm 213a shown in FIG. 8(a) moves to the fixed position, and the voltage output from the light receiving sensor 540a is S1 in FIG. 9, which is lower than the reference value (S).

[0074] Also, as shown in FIG. 8(c), when the end effector arm 213a is shifted to the right side of the light receiving sensor 540a, the light receiving sensor 540a becomes less hidden (l1<l3) than when the end effector arm 213a moves to the fixed position, and the voltage output from the light receiving sensor 540a becomes higher than the reference value (S) as shown in S2 in FIG. 9.

[0075] It can be understood that such fluctuations in the voltage value (or output value) of the light receiving sensor 540a move in the linear direction of the end effector arm 213a but are shifted to the left or right side from the normal position.

[0076] On the other hand, FIGS. 8(d) and 8(e) are an example of the end effector arm 213a tilting and moving in the normal position. FIG. 8(d) shows that the end effector arm 213a tilts in the right direction and moves inside the hoops 500, 500a, 500b on the drawing, and FIG. 8(e) shows that the end effector arm 213a tilts to the left and moves on the drawing.

[0077] As shown in Fig. 8(d), when the end effector arm 213a tilts and moves to the right, as time passes, the area where the light-receiving sensor 540a is hidden increases as the end effector arm 213a enters the hoops 500, 500a, 500b (l4 < l5). As a result, the voltage output from the light-receiving sensor 540a forms a graph in which the voltage value moves from a high value to a low value according to the passage of time, as shown in S3 of Fig. 9.

[0078] As shown in Fig. 8(e), when the end effector arm 213a tilts and moves to the left from the normal position, as time passes, more of the light-receiving sensor 540a is hidden as the end effector arm 213a enters the hoops 500, 500a, 500b (l6 > l7). As a result, when the voltage value is set higher as the hidden area increases, the voltage output from the light-receiving sensor 540a forms a graph that moves from a low value to a high value, as shown in S4 of Fig. 9.

[0079] The Z-axis sensor 550 senses the moving height of the end effector arm 213a in the Z-axis direction as it enters the hoops 500, 500a, 500b. The Z-axis sensor 550 is provided on the inner bottom of the inlet 530 and irradiates light toward the end effector 213 as shown in Fig. 7, and is a laser sensor that senses the height of the end effector arm 213a through the reception time of the light reflected and received from the end effector 213.

[0080] When the end effector arm 213a enters, if the time for the light to be reflected and received is constant, the Z-axis sensor 550 determines that the end effector arm 213a is moving horizontally. When the end effector arm 213a enters and there is a change in the time for the light to be reflected and received over time, it can be determined that the end effector arm 213a is misaligned or has entered an inaccurate position.

[0081] The load port mounting plate 560 is placed on the adapter 110 of the load ports 100, 100a, 100b.

[0082] 6, a plurality of lower through-holes 561 are formed through the plate surface of the load port mounting plate 560. The plurality of lower through-holes 561 are provided at positions spaced a predetermined distance from a plurality of position fixing pins 111 provided on the adapter 110.

[0083] When the FOUP 500, 500a, 500b is attached to the EFEM 200, the wireless communication unit 570 wirelessly communicates with the internal communication unit 610 of the control unit 600 and transmits real-time movement path data of the end effector 213 detected by the Z-axis sensor 550 and the T-axis sensors 540, 540a.

[0084] 6, the horizontal sensor 580 is provided on the upper surface of the sensor support plate 595, and detects the X-axis, Y-axis, and Z-axis angles of the hoops 500, 500a, and 500b when the hoops 500, 500a, and 500b are attached to the adapter 110, and transmits the detected angles to the controller 600. The controller 600 can detect the deviation of the horizontal sensor 580 based on the X-axis, Y-axis, and Z-axis angle values ​​detected by the horizontal sensor 580.

[0085] A plurality of height sensors 590, 590a, 590b are provided on the upper surface of a sensor support plate 595 housed inside the hoops 500, 500a, 500b to detect the height relative to the adapter 110 and transmit the detected height to the controller 600. The controller 600 can detect the misalignment of the hoops 500, 500a, 500b based on the presence or absence of a deviation in the height (h) detected by the plurality of height sensors 590, 590a, 590b.

[0086] The sensor support plate 595 is removably coupled to the lowest rail of the board mounting rails 520 provided on the housing 510 .

[0087] As shown in FIG. 6, a plurality of position fixing pins 111 are provided on the upper surface of the adapter 110 to protrude in a triangular shape, and a plurality of lower through holes 561 are formed in the load port mounting plate 560 to be spaced apart from the position fixing pins 111.

[0088] An upper through-hole 511a is also formed in the bottom surface 511 of the housing 510, coaxially with the lower through-hole 561. A plurality of height detection holes 596 are also formed through the sensor support plate 595, coaxially with the upper through-hole 511a.

[0089] Each of the height sensors 590, 590a, 590b is positioned above a corresponding one of the height sensing holes 596 in a floating manner with a certain distance therebetween. To this end, a sensor fixing bracket 597 is provided on the sensor support plate 595, and supports each of the height sensors 590, 590a, 590b so that they are positioned above the corresponding one of the height sensing holes 596.

[0090] 10 is a cross-sectional view showing a process in which the height sensors 590, 590a, and 590b detect the height of the adaptor 110. The height sensors 590, 590a, and 590b are laser sensors and emit laser light to a height detection hole 596.

[0091] When the load port mounting plate 560 is mounted on the adaptor 110, the load port mounting plate 560 is placed on the position fixing pins 111. The height sensors 590, 590a, 590b detect the height (h) between the height sensors 590, 590a, 590b and the adaptor 110 while the laser light emitted from the height sensors 590, 590a, 590b is reflected and received from the surface of the adaptor 110 via the height detection hole 596, the upper through-hole 511a, and the lower through-hole 561. The heights detected by the height sensors 590, 590a, 590b are transmitted to the control unit 600.

[0092] If the heights detected by the multiple height sensors 590, 590a, 590b are all the same, it can be determined that the hoops 500, 500a, 500b are installed horizontally, and if the heights detected by the multiple height sensors 590, 590a, 590b are different, it can be determined that the hoops 500, 500a, 500b are installed misaligned.

[0093] 11 is an example diagram showing the results of the horizontal sensor 580 and the height sensors 590, 590a, 590b detecting the states of the hoops 500, 500a, 500b. As shown in the figure, when the hoops 500, 500a, 500b are attached to the adapter 110, the horizontal sensor 580 detects whether the hoops 500, 500a, 500b are horizontal.

[0094] As shown, a horizontal sensor 580 detects angles in the X-axis, Y-axis and Z-axis directions, and a plurality of height sensors 590, 590a, 590b detect the height of the adaptor 110 at each position.

[0095] If horizontal sensor 580 detects angles of 0° in the X-axis direction, 3° in the Y-axis direction, and 4° in the Z-axis direction, and if the height detected by first height sensor 590 is 1.45 mm, the height detected by second height sensor 590a is 5.45 mm, and the height detected by third height sensor 590b is 3.44 mm, control unit 600 will determine that FOUP 500, 500a, 500b is misaligned when attached to adapter 110.

[0096] If the horizontal sensor 580 and the height sensors 590, 590a, and 590b detect a deviation, an alarm protocol is transmitted to the external server 20 to stop the get or put command to the corresponding loop 500, 500a, and 500b.

[0097] The control unit 600 controls each component so that when the FOUPs 500, 500a, 500b are attached to the load ports 100, 100a, 100b, unprocessed substrates are transferred to the process chamber 400 for processing, and processed substrates are transferred to the FOUPs 500, 500a, 500b.

[0098] When the FOUPs 500, 500a, 500b are attached to the load ports 100, 100a, 100b, the control unit 600 receives angle and height values ​​from the horizontal sensor 580 and a plurality of height sensors 590, 590a, 590b to determine whether the FOUPs 500, 500a, 500b are attached in their designated positions without shifting.

[0099] If the FOUPs 500, 500a, and 500b are properly attached to the load ports 100, 100a, and 100b, the control unit 600 transmits a protocol to the external server 20 to instruct the external server 20 to execute a get or put command to the corresponding FOUP 500, 500a, and 500b.

[0100] On the other hand, if the FOUPs 500, 500a, and 500b are misaligned when attached to the load ports 100, 100a, and 100b, an alarm protocol is transmitted to the external server 20 to stop the get or put command to the corresponding FOUP 500, 500a, and 500b.

[0101] Specifically, the control unit 600 determines whether the hoops 500, 500a, 500b are properly attached to the adapter 110 without misalignment based on the three-direction angle values ​​transmitted from the horizontal sensor 580 of the hoops 500, 500a, 500b and the height values ​​of the adapter 110 detected by multiple height sensors 590, 590a, 590b.

[0102] If the control unit 600 determines that a deviation has occurred based on the angle and height values, it transmits an alarm protocol to the external server 20 to stop the get or put command to the corresponding FOUP 500, 500a, 500b. In addition, the control unit 600 transmits to the external server 20 the product information of the FOUP 500, 500a, 500b whose height deviation exceeds the reference range, together with the occurrence of the deviation, and blocks the transfer of substrates to the corresponding FOUP 500, 500a, 500b.

[0103] By the operation of the horizontal sensor 580, the height sensors 590, 590a, 590b and the control unit 600, it is possible to prevent the end effector 213 from damaging the substrate or generating foreign matter in the process of getting or putting the substrate in the misaligned FOUP 500, 500a, 500b, thereby enabling a stable substrate processing process to be performed.

[0104] Meanwhile, an RFID tag (not shown) provided on the adapter 110 transmits product information of the placed FOUPs 500, 500a, 500b to the external server 20. The external server 20 executes teaching information matching the transmitted product information of the FOUPs 500, 500a, 500b in the transfer robot driver 220, thereby causing the transfer robot driver 220 to operate.

[0105] In response, the end effector 213 moves to the FOUPs 500, 500a, and 500b to transfer the substrate (W) to the buffering chamber 310. During this process, the T-axis sensors 540, 540a and the Z-axis sensor 550 transmit the movement path detection values ​​of the end effector 213 and the end effector arm 213a to the control unit 600 via the wireless communication unit 570 in real time.

[0106] The control unit 600 extracts only the data of the area corresponding to the length (d) of the end effector arm 213a from the entire movement path data of the end effector 213 transmitted from the T-axis sensors 540, 540a and Z-axis sensor 550 of the FOUPs 500, 500a, 500b via the internal communication unit 610, and generates movement path data.

[0107] Then, the generated movement path data is compared with the taught normal path to determine whether the end effector 213 puts or gets the substrate (W) along the normal path.

[0108] 12 is an exemplary view showing a process in which the end effector 213 retrieves an unprocessed substrate (W) from the FOUP 500, 500a, 500b. As shown in FIG. 12(a), the end effector 213 is inserted into the FOUP 500, 500a, 500b through the entrance 530.

[0109] The end effector 213 moves along a teaching path received from the external server 20 and sequentially picks up the substrates from the upper to the lower of the plurality of substrate placement rails 520 and transports them to the buffering chamber 310 .

[0110] At this time, the light emitting sensor 540 emits light, and the light receiving sensor 540a receives the light, and transmits the movement path data of the end effector 213 to the control unit 600 in real time.

[0111] The end effector 213 enters between the substrate placement rails 520 on which the top substrate (W1) is placed and the substrate placement rails 520 on which the next top substrate (W2) is placed, and as shown in Fig. 12(b), rises a certain height (h) in the upward direction and places the substrate (W1) on the upper surface. The end effector 213 on which the substrate (W1) is placed retreats to the outside of the FOUPs 500, 500a, 500b.

[0112] 13 is an exemplary view showing a process in which the end effector 213 puts a processed substrate into the FOUP 500, 500a, 500b. After unloading the processing substrate (W6') from the buffering chamber 310, the end effector 213 advances into the FOUP 500, 500a, 500b as shown in FIG 13(a). The processing substrate (W6') is placed below the loaded processed substrate (W5').

[0113] For this purpose, the end effector 213 is inserted into the lower part of the substrate support rail 520 on which the processed substrate (W5') is placed, and lowered a certain height (h) to the lower part as shown in (b) of Figure 13, and places the processed substrate (W6') on the substrate support rail 520.

[0114] Then, as shown in FIG. 13(c), the hoops 500, 500a, and 500b are retracted to the outside.

[0115] During such get and put operations of the end effector 213, the Z-axis sensor 550 and the T-axis sensors 540 and 540a transmit overall movement path data of the end effector arm 213a to the control unit 600 via the wireless communication unit 570.

[0116] 14(a) is an example diagram showing Z-axis values ​​transmitted from Z-axis sensor 550 to control unit 600 during a put operation. If Z-axis sensor 550 is set so that the voltage value is high when the height is high, as shown in the figure, when a substrate (W) to be processed loaded on end effector 213 enters FOUP 500, 500a, 500b, Z-axis sensor 550 receives a height value (Z2) irregularly as light is diffusely reflected by the substrate (W). Then, when substrate (W) is placed on substrate placement rail 520, the Z-axis sensor receives a height value (Z1) that is a certain height (h) lower than the entry height (Z2).

[0117] 14(b) is an example diagram showing height values ​​transmitted from the Z-axis sensor 550 to the control unit 600 during a get operation. As shown in the figure, since the end effector 213 enters without a substrate (W), a constant height value is received at an initial third height (Z3), and when the substrate (W) is got, irregular height values ​​are received that are diffusely reflected at a fourth height (Z4) that is higher than the constant height (h).

[0118] The control unit 600 can determine whether the put operation and the get operation are performed normally based on the movement path data of the end effector arm 213a received from the T-axis sensors 540 and 540a and the Z-axis sensor 550.

[0119] Meanwhile, the control unit 600 transmits to the external server 20 integrated management data including the movement path data of the end effector arm 213a transmitted from the T-axis sensors 540, 540a and the Z-axis sensor 550, and the current operation data of the equipment transmitted from the sensor unit 620.

[0120] 15 is a diagram showing an example of integrated management data. The integrated management data includes a header, an equipment number, a load port number, a hoop type, whether or not a get operation and a put operation are performed, movement path data (T-axis value and Z-axis value), operation data (pressure, temperature, concentration, etc.), pressure, temperature, concentration detected by each sensor, height values ​​detected by a plurality of height sensors 590, 590a, 590b, an angle value detected by a horizontal sensor 580, etc.

[0121] The equipment number and the load port number are unique numbers assigned to each substrate processing apparatus 10 .

[0122] The external server 20 is connected to various types of substrate processing apparatuses 10 via the Internet, etc., and can receive integrated management data from the control units 600 of each substrate processing apparatus to receive a report on the current substrate processing process of each substrate processing apparatus 10 at once.

[0123] As a result, the data is not reported separately, but is received collectively from the control unit 600 to the external server 20 as integrated management data, thereby reducing the time required to manage a plurality of substrate processing apparatuses 10.

[0124] During this process, if there is a difference between the current movement path of the end effector arm 213a received by the T-axis sensors 540, 540a and the Z-axis sensor 550 and the normal movement path, the control unit 600 also transmits an abnormality signal to the external server 20 so that an administrator managing the external server 20 can immediately know whether or not there is an abnormality.

[0125] This makes it possible to prevent or minimize damage to the substrate caused by abnormal movement of the end effector 213.

[0126] As described above, the position determination device of the laser sensor system for detecting a robot in a FOUP according to the present invention includes a plurality of height sensors and a horizontal sensor inside the FOUP for detecting the height of the FOUP relative to the adapter of the load port, and can detect misalignment of the FOUP when the FOUP is installed. This has the advantage that the transfer of substrates by the end effector to a FOUP where a misalignment is detected can be blocked to prevent damage to the substrates.

[0127] In addition, the position determination device of the in-FOUP robot sensing laser sensor system according to the present invention has an advantage that the installation and maintenance are more convenient since it includes a sensing means for sensing the movement path of the end effector inside the FOUP, and the substrate processing process does not need to be stopped during the installation and maintenance of the sensing means.

[0128] In addition, the device can detect whether the end effector moves normally, shifts, warping, movement height, etc. to determine whether the end effector normally performs a get operation or a put operation.

[0129] In addition, the control unit communicates with the sensing means in the FOUP to receive end effector movement path data, communicates with various sensors provided in the equipment to receive current equipment operation data, and transmits integrated management data, which is an integration of the movement path data and the equipment operation data thus received, to an external server so that the external server can quickly and accurately determine the current status of the substrate processing apparatus.

[0130] In addition, if there is a difference between the get operation and the put operation and the normal state, the control unit transmits an abnormality signal to an external server, so that an administrator can quickly deal with the abnormal movement of the end effector.

[0131] The technical concept of the present invention has been described above through several embodiments.

[0132] It is obvious that a person having ordinary skill in the art to which the present invention pertains can make various modifications or changes to the above-described embodiments from the description of the present invention. In addition, even if not explicitly shown or described, it is obvious that a person having ordinary skill in the art to which the present invention pertains can make various modifications including the technical idea of ​​the present invention from the description of the present invention, and these still fall within the scope of the present invention. The above-described embodiments described with reference to the accompanying drawings are described for the purpose of explaining the present invention, and the scope of the present invention is not limited to such embodiments. [Explanation of symbols]

[0133] 1: Position determination device for laser sensor system 10: Substrate processing equipment 20: External server 100, 100a, 100b: Loading port 110: Adapter 111: Position fixing pin 200:EFEM 210: Atmospheric pressure transfer robot 211: Rotating arm 213: End effector 213a: End effector arm 220: Transport robot drive unit 221, 223: Spindle 230: Buffering chamber entrance 240: Hoop entrance 300: Stage 310: Buffering chamber 320:Transport robot 400: Processing chamber 410: Chamber entrance 420: Susceptor 500, 500a, 500b: Hoop 510: Housing 511: Bottom 511a: Upper through hole 520: Circuit board mounting rail 530: Hoop entrance 540, 540a: T-axis sensor 550: Z-axis sensor 560: Load port mounting plate 561: Lower through hole 570: Local communication department 580: Horizontal sensor 590, 590a, 590b: first height sensor, second height sensor, third height sensor 595: Sensor support plate 596: Height sensing hole 597: Sensor fixing bracket 600: Control unit 610: Internal Communications Department 620: Sensor section 621, 623, 625: Pressure sensors 627: Temperature sensor 629: Concentration sensor W: Substrate W´: Processing substrate

Claims

1. An external server (20); A substrate processing apparatus (10) in which substrate processing is performed and which transmits integrated management data to the external server (20), The external server (20) receives the integrated management data from the substrate processing apparatus (10), grasps the substrate processing process status, and manages the substrate processing apparatus (10); The substrate processing apparatus (10) comprises: A FOUP (500, 500a, 500b) in which a plurality of substrates are accommodated; a load port (100, 100a, 100b) to which the hoop (500, 500a, 500b) is detachably coupled; a process chamber (400) in which processing of the substrate is performed; an EFEM (200) provided between the process chamber (400) and the load port (100, 100a, 100b) and including an end effector (213) for getting the substrate accommodated in the FOUP (500, 500a, 500b) to the process chamber (400) or putting the substrate that has been processed in the process chamber (400) into the FOUP (500, 500a, 500b); a control unit (600) for transmitting movement path data of the end effector (213) to the external server (20) when the end effector (213) enters or retreats from the FOUP (500, 500a, 500b) after the FOUP (500, 500a, 500b) is seated on the load port (100, 100a, 100b), The hoops (500, 500a, 500b) are a housing (510) having an entrance (530) through which the end effector (213) enters and retreats; A substrate mounting rail (520) is formed at regular intervals in the height direction on both sides of the housing (510), and the substrates are sequentially loaded on the substrate mounting rail (520); T-axis sensors (540, 540a) are provided above and below the entrance (530) and detect the horizontal movement path of the end effector (213); a Z-axis sensor (550) provided on the inner bottom of the entrance (530) for sensing the vertical travel height of the end effector (213) moved through the entrance (530); a load port mounting plate (560) provided at a lower portion of the housing (510) and electrically connected to the load port (100, 100a, 100b); a sensor support plate (595) that is placed at the lowest position of the substrate placement rail (520) and has a plurality of height sensors (590, 590a, 590b) on its upper surface for detecting the height of the load port (100, 100a, 100b); A horizontal sensor (580) provided on a plate surface of the sensor support plate (595) for determining whether the housing (510) is horizontal; a wireless communication unit (570) provided inside the housing (510) for transmitting the detected values ​​of the T-axis sensor (540, 540a) and the Z-axis sensor (550), the angle value detected by the horizontal sensor (580), and the height value detected by the plurality of height sensors (590, 590a, 590b) to the control unit (600); The control unit (600) generates the movement path data based on the sensed values ​​of the T-axis sensor (540, 540a) and the Z-axis sensor (550), compares the generated movement path data with a normal path, and determines whether the end effector (213) gets or puts the substrate along the normal path; The control unit (600) detects horizontal and vertical deviations of the hoop (500, 500a, 500b) based on the angle value of the horizontal sensor (580) and the height values ​​of the multiple height sensors (590, 590a, 590b).

2. The load port (100, 100a, 100b) includes an adapter (110) on which the load port mounting plate (560) is mounted; a plurality of position fixing pins (111) protruding upward from the adapter (110) for fixing a mounting position of the load port mounting plate (560) when the hoop (500, 500a, 500b) is coupled thereto; The load port mounting plate 560 has a plurality of lower through holes 561 formed through one side of the plurality of position fixing pins 111, The housing (510) has a bottom surface provided with a plurality of upper through holes (511a) formed at positions corresponding to the lower through holes (561), A plurality of height detection holes 596 are formed through the plate surface of the sensor support plate 595 at positions corresponding to the upper through holes 511a.

2. The device for determining the position of an end effector within a hoop as claimed in claim 1, wherein the plurality of height sensors (590, 590a, 590b) are positioned at a fixed height apart from each other on the upper part of the height sensing hole (596) by a sensor fixing bracket (597) and sense a height value with respect to the adapter (110) through the height sensing hole (596), the upper through hole (511a) and the lower through hole (561).

3. The apparatus of claim 2, wherein said horizontal sensor (580) senses said angle values ​​in X, Y and Z directions.

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