Marangoni drying method and apparatus

Abstract

A method and apparatus for Marangoni drying of substrates is disclosed, including an adjustable spray bar assembly having a mounting bracket coupled to a support structure of a drying system, a base assembly coupled to the mounting bracket and positioned parallel to a surface of the support structure, and a mounting assembly coupled to and parallel to the base assembly. The mounting assembly is vertically adjustable at two distal ends. The mounting assembly includes an arm on which one or more spray bars may be positioned. While secured to the mounting assembly, the one or more spray bars may rotate about a vertical axis.

Description

[Technical field]

[0001]

[0001] Embodiments described herein generally relate to methods and apparatus for cleaning a substrate. More specifically, embodiments described herein relate to methods and apparatus for drying a wet substrate in a post chemical mechanical polishing system. [Background technology]

[0002]

[0002] As semiconductor device geometries continue to shrink, the use of processes to enable ultra-clean processing of substrates has increased significantly. Post-chemical mechanical polishing (CMP) cleaning is traditionally a wet process performed to clean and dry the substrate without leaving particles or residues on the substrate that can adversely affect yield and cause subsequent device failure. In the process of drying a wet substrate, particles in the solution may adhere to the substrate or particles present on the substrate may not be properly removed before drying and remain on the substrate after drying. Therefore, improved methods for drying substrates after CMP processing have received great attention.

[0003]

[0003] Marangoni drying induces bath liquid to flow away from a substrate in a manner that creates a surface tension gradient, leaving the substrate substantially free of bath liquid. Thus, by employing Marangoni drying, streaks, spots, and residual marks on the substrate can be avoided. The Marangoni drying technique utilizes a solvent with a lower surface tension than the bath liquid (i.e., isopropyl alcohol (IPA) vapor) that is introduced into the fluid meniscus formed when the substrate is lifted from the bath. The solvent vapor dissolves in the fluid meniscus, creating a surface tension gradient. The presence of the surface tension gradient causes bath liquid to flow away from the region of low surface tension at the leading edge of the drying meniscus, leaving the substrate, which dries substantially free of streaks, spots, and residual marks.

[0004]

[0004] Current Marangoni drying systems utilize static spray bars to deliver solvent vapor to the front and backside of a substrate after a water rinse in a fluid bath. However, this approach has limitations, such as variability between chamber conditions, which can lead to inconsistent drying results between batches of processed substrates. For example, variations in bath fluid levels and chamber mechanical properties can result in inconsistent amounts of streaks, spots, and residual marks remaining on the dried substrate from chamber to chamber.

[0005] Therefore, what is needed in the art is an improved apparatus for obtaining more consistent substrate drying results from chamber to chamber. Summary of the Invention

[0006] In one embodiment, an apparatus is provided. The apparatus includes a base and a mounting assembly. The mounting assembly further includes a crossbar having a plurality of orifices extending from a top surface of the crossbar to a bottom surface of the crossbar, a guide pin disposed within the plurality of orifices of the crossbar and in contact with the base, a leveller disposed within the plurality of orifices and in contact with the base, and two arms coupled to the crossbar. The guide pin is configured to align the base and the mounting assembly, and the leveller is configured to position the crossbar perpendicular to the base. Each arm is disposed orthogonally on an opposing distal end of the crossbar and configured to support one or more spray bars.

[0007] In one embodiment, an apparatus is provided. The apparatus includes a base and a mounting assembly. The mounting assembly further includes a crossbar having a plurality of first orifices extending from a top surface of the crossbar to a bottom surface of the crossbar, two or more guide pins disposed within the plurality of first orifices of the crossbar and in contact with the base, two or more levellers disposed within the plurality of first orifices and in contact with the base, and two arms coupled to the crossbar. At least one of the two or more guide pins and the two or more levellers is respectively located at each distal end of the crossbar. The two arms are disposed orthogonally at opposite distal ends of the crossbar and further include one or more second orifices. One or more spray bars are disposed at the one or more second orifices of the two arms.

[0008] In one embodiment, a method of Marangoni drying is provided. The method includes positioning a spray bar assembly including a mounting bracket, a base coupled to the mounting bracket, a mounting assembly coupled to the base, and one or more spray bars disposed on the mounting assembly. The one or more spray bars are adapted to direct vapor toward the substrate. The method further includes adjusting the spray bar to a desired position and rotation about x, y, and z axes, lifting the substrate from a rinse pool through the spray bar assembly, and directing vapor onto a surface of the substrate.

[0009]

[0009] In order that the above-mentioned features of the present disclosure may be understood in detail, the present disclosure summarized above will now be more particularly described with reference to embodiments, some of which are illustrated in the accompanying drawings, with the understanding that the accompanying drawings merely illustrate exemplary embodiments of the present disclosure and therefore should not be considered as limiting the scope of the embodiments, which may admit of other equally effective embodiments. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view of a substrate drying system according to an embodiment of the present disclosure. [Diagram 2] FIG. 1 is a perspective view of an adjustable spray bar assembly according to an embodiment of the present disclosure. [Figure 3A] FIG. 2 is a side view of an adjustable spray bar assembly in a raised position according to an embodiment of the present disclosure. [Figure 3B] FIG. 2 is a side view of an adjustable spray bar assembly in a lowered position according to an embodiment of the present disclosure. [Figure 3C] FIG. 2 is a side view of an adjustable spray bar assembly in an angled orientation according to one embodiment of the present disclosure. [Figure 4] FIG. 1 is a flow diagram illustrating a method for drying a substrate according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011]

[0016] For ease of understanding, the same reference numbers have been used, where possible, to designate identical elements common to the figures. It is believed that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.

[0012]

[0017] A method and apparatus for Marangoni drying of a substrate is disclosed that includes an adjustable spray bar assembly having a mounting bracket coupled to a support structure of a drying system, a base assembly coupled to the mounting bracket and disposed parallel to a surface of the support structure, and a mounting assembly coupled to the base assembly and parallel to the base assembly. The mounting assembly is vertically adjustable at two distal ends. The mounting assembly includes an arm on which one or more spray bars may be positioned. While secured to the mounting assembly, the one or more spray bars may rotate about a vertical axis.

[0013]

[0018] 1 is a perspective view of a substrate drying system 100 including a spray assembly 104 according to one embodiment. The drying system 100 includes a rinse tank 102 and a spray assembly 104. The rinse tank 102 is configured to be filled with a rinse fluid 108, such as deionized water or other suitable fluid adapted to remove particles from a substrate 106. In one embodiment, the substrate 106 is a semiconductor substrate. In one embodiment, the substrate 106 is a 300 mm substrate. In other embodiments, the substrate 106 is a 200 mm substrate or a 450 mm substrate.

[0014]

[0019] The rinse tank 102 is made of a material suitable for containing the rinsing fluid 108, such as aluminum, stainless steel, and alloys thereof, or various polymeric materials. The rinse tank 102 has a number of side walls 110A, 110B, 110C that define a volume sized to contain the substrate 106. The spray assembly 104 is disposed above the rinse tank 102 within the drying system 100. The spray assembly 104 includes two or more spray bars 120a, 120b (collectively 120) that are disposed above the rinsing fluid 108 through openings (not shown) in the spray assembly 104. The spray bars 120 are positioned within the drying system 100 and may form a channel 123 through which the substrate 106 is transported along the substrate travel path 112.

[0015]

[0020] The drying system 100 also includes a lift mechanism (not shown) adapted to vertically lift the substrate 106 from the rinsing fluid 108 along a path 112 through the spray assembly 104. In one embodiment, the lift mechanism is coupled to the rinsing tank 102. In another embodiment, the lift mechanism is coupled to a support surface 114, which may function as a sidewall of the drying system 100.

[0016]

[0021] As the substrate 106 is lifted through the spray assembly 104, volatile organic compound (VOC) vapors are directed by one or more spray bars 120 toward the air / liquid interface on either side of the substrate 106 to dry the substrate. In one embodiment, the VOC vapor is isopropyl alcohol (IPA) or other suitable compound and is supplied to the spray assembly 104 via a flexible vapor supply fitting 116 and a vapor line 118. In one embodiment, the spray assembly 104 is coupled to the support surface 114. In other embodiments, the spray assembly 104 is coupled to other surfaces within the drying system 100, including sidewalls 110A, 110B, and 110C of the rinse tank 102.

[0017]

[0022] 2 is a perspective view of the spray assembly 104 according to one embodiment. The spray assembly 104 includes a mounting bracket 202, a base assembly 204, and a mounting assembly 206. The mounting bracket 202 couples to a support structure within the drying system 100, such as the support surface 114, as shown in FIG. 1. In some embodiments, the mounting bracket 202 couples to the side walls 110A, 110B, and 110C of the rinse tank 102. The mounting bracket 202 may couple to the support structure via one or more screws, pins, clasps, clamps, toggles, or the like. Thus, the mounting bracket 202 provides an attachment point for the spray assembly 104 within the drying system 100.

[0018]

[0023] The base assembly 204 is coupled to the mounting bracket 202. Together with the mounting bracket 202, the base assembly 204 provides static mechanical support for the spray assembly 104. In one embodiment, the base assembly 204 is an elongated rectangular rail coupled to the mounting bracket 202 at the two distal ends of the base assembly, as shown in FIG. 2. However, in other embodiments, the base assembly 204 may vary in size, shape, and point of attachment to the mounting bracket 202. For example, the base assembly may be a short circular rod coupled to the mounting bracket 202 at the rod's midpoint. In some embodiments, the base assembly 204 is permanently attached to the mounting bracket 202 to form a single fixture. The base assembly 204 and mounting bracket 202 are positioned along the support surface 114 or other support structure such that the base assembly 204 is positioned perpendicular to the path of travel 112, and the substrate 106 moves through the drying system 100.

[0019]

[0024] The mounting assembly 206 is coupled to the base assembly 204. The mounting assembly 206 may be located above, below, or adjacent to the base assembly 204. The mounting assembly 206 includes one or more arms 208 extending from a crossbar 205. In one embodiment, the arms 208 are oriented perpendicular to the longitudinal length of the crossbar 205 and the base assembly 204. In one embodiment, the two arms 208 are positioned at opposing distal ends 219a and 219b (collectively 219) of the crossbar 205 to approximate a "C" shape when viewed from above or below, as shown in FIG. 2. In another embodiment, the one or more arms 208 extend from the mounting assembly 206 at a non-orthogonal angle to the crossbar 205. In yet another embodiment, the one or more arms 208 extend from a midpoint of the crossbar 205.

[0020]

[0025] The arm 208 provides a mounting point for one or more spray bars 120. The spray bars 120 are removably mounted to the arm 208. In one embodiment, two spray bars 120 (shown in FIG. 1) are positioned in parallel at a distance that allows the substrate 106 to be lifted between the two spray bars 120 on the path of travel 112 so that steam can be sprayed toward two opposing sides of the substrate 106 simultaneously. The spray bars 120 are secured to the arm 208 via clamps 210 or other suitable devices. In one embodiment, the spray bars 120 can be positioned through horizontally drilled holes 209 in the arm 208. Once secured to the arm 208, the spray bars 120 can rotate about their longitudinal axes to facilitate steam spray toward the substrate 106 on the path of travel 112 at any desired angle.

[0021]

[0026] The crossbar 205 has a plurality of holes disposed therethrough. The plurality of holes extend vertically through the crossbar 205 from the top surface 207 to a bottom surface (not shown) that faces the base assembly 204. The plurality of holes includes pilot holes 213, locking holes 215, and leveling holes 217. In one embodiment, the plurality of holes 211 of the crossbar 205 includes a pair of pilot holes 213, a pair of locking holes 215, and a pair of leveling holes 217. In one embodiment, one of each pair of pilot holes 213, locking holes 215, and leveling holes 217 is disposed at each distal end 219 of the crossbar 205, as shown in FIG. 2.

[0022]

[0027] One pilot hole 213, one locking hole 215, and one leveling hole 217 are disposed laterally adjacent to one another at each distal end 219 of the crossbar 205. Each pilot hole 213 may be disposed inwardly of the crossbar 205 relative to the locking holes 215 and the leveling holes 217. Each leveling hole 217 may be disposed distally on the crossbar 205 relative to the pilot holes 213 and the locking holes 215. As shown in FIG. 2, each locking hole 215 may be disposed midway between the pilot holes 213 and the leveling holes 217 at each distal end 219 of the crossbar 205. However, it is contemplated that the spatial arrangement and order of the pilot holes 213, locking holes 215, and leveling holes 217 are interchangeable.

[0023]

[0028] The guide pins 212, levellers 214, and locking screws 216 extend through pilot holes 213, levelling holes 217, and locking holes 215, respectively. In one embodiment, each pair of guide pins 212, levellers 214, and locking screws 216 extends through pilot holes 213, levelling holes 217, and locking holes 215 at each distal end 219 of the crossbar 205. The guide pins 212, levellers 214, and locking screws couple the mounting assembly 206 to the base assembly 204.

[0024]

[0029] The guide pins 212 extend through the pilot holes 213 and couple to (e.g., contact) the base assembly 204 to stabilize the mounting assembly 206 relative to the base assembly 204. The pilot holes 213 are wider in diameter than the guide pins 212 and are smoothly drilled to provide alignment between the mounting assembly 206 and the base assembly 204 while facilitating tilting of the spray assembly 104. That is, the pilot holes 213 allow the guide pins 212 some leeway so that the mounting assembly 206 can tilt in a horizontal plane about an axis perpendicular to the crossbar 205 while remaining aligned with the base assembly 204 along a vertical plane (vertical direction).

[0025]

[0030] The leveller 214 extends through the levelling holes 217 and couples to (e.g., contacts) the base assembly 204 to allow for vertical adjustment and tilting of the spray assembly 104. The levelling holes 217 and the leveller 214 are threaded to allow for torque to be applied to the leveller 214 through the levelling holes 217. Application of torque to the leveller 214 in the levelling holes 217 causes the mounting assembly 206 to raise and lower vertically relative to the base assembly 204.

[0026]

[0031] 2, the mounting assembly 206 can be raised or lowered uniformly at each distal end 219 by equally torquing the levellers 214 so that the mounting assembly 206 is substantially parallel to a horizontal plane. Alternatively, the mounting assembly 206 can be tilted vertically towards either distal end 219 by variably torquing each leveller 214. That is, torquing only one of the pair of levellers 214, or torquing both levellers 214 in the same direction but in unequal amounts, or torquing each leveller 214 in a different direction, as shown in FIG. 3C, will cause the mounting assembly 206 to tilt relative to the base assembly 204.

[0027]

[0032] The locking screws 216 extend through the locking holes 215 and couple (e.g., contact) to the base assembly 204 to secure the mounting assembly 206 in place. The locking screws 216 and the locking holes 215 are threaded to allow torque to be applied to the locking screws 216 through the locking holes 215. Once the mounting assembly 206 is adjusted to a desired height and tilt by applying torque to the leveller 214, torque is applied to the locking screws 216 through the locking holes 215 to secure the mounting assembly 206 in the desired position. To accommodate tilting of the mounting assembly 206 without jamming the locking screws 216 within the locking holes 215, each locking screw 216 is coupled with a pair of annular washers 225. The pair of annular washers 225 are each disposed in one opening of each locking hole 215 located on the top surface 207 and bottom surface (not shown) of the crossbar 205. The annular washer 225 automatically adjusts the orientation of the locking screw 216 within the locking hole 215 so that the locking screw 216 extends substantially straight through the locking hole 215, thus compensating for any angular deviation caused by tilting of the mounting assembly 206.

[0028]

[0033] The combination of tilting, raising, and lowering the mounting assembly 206 via the leveller 214, along with rotation of the spray bar 120 disposed on the arm 208, allows the spray bar 120 to be adjusted to a desired position about the x, y, and z axes so that vapor is directed toward a passing substrate. More specifically, the spray bar 120 may rotate about the x and z axes and move linearly on the y axis. As shown in FIG. 2, the x axis is a horizontal line parallel to the longitudinal axis of the mounting assembly 206 and the spray bar 120. The y axis is a line perpendicular to the longitudinal axis of the mounting assembly 206 and the spray bar 120. The z axis is a line horizontally perpendicular to the longitudinal axis of the mounting assembly 206 and the spray bar 120.

[0029]

[0034] 3A-3C illustrate the adjustable nature of the spray assembly 104 according to some embodiments. FIG. 3A is a side view of the spray assembly 104 in a raised position according to one embodiment. In FIG. 3A, equal torques are applied in one direction, e.g., clockwise, to a pair of leveling screws 214, each located at opposite distal ends 219 of the crossbar 205. Equal torques are applied to the threaded leveling screws 214 through the threaded leveling holes 217, causing the mounting assembly 206, and therefore the spray bar 120, to uniformly raise a distance 302 from the baseline B at both distal ends 219 of the mounting assembly 206. The base assembly 204 remains stationary while the leveling screws 214 are torqued, and serves as a mechanical support and attachment point for the leveling screws 214. Thus, all gaps between the base assembly 204 and the mounting assembly 206 prior to adjustment are enlarged. Once the mounting assembly 206 is raised to the desired position, a torque is applied to the threaded locking screw 216 through the threaded locking hole 215 to lock the mounting assembly 206 in place.

[0030]

[0035] FIG. 3B is a side view showing the spray assembly 104 in a lowered position, according to one embodiment. In FIG. 3B, a pair of leveling screws 214, each located at an opposing distal end 219 of the crossbar 205, are equally torqued in the opposite direction to FIG. 3A, e.g., counterclockwise. Equal torques applied to the threaded leveling screws 214 through the threaded leveling holes 217 uniformly lower the mounting assembly 206, and therefore the spray bar 120, at both distal ends 219 of the mounting assembly 206 by a distance 306 from the baseline B. The base assembly 204 remains stationary while the leveling screws 214 are torqued, and serves as a mechanical support and attachment point for the leveling screws 214. Thus, any gaps between the base assembly 204 and the mounting assembly 206 prior to adjustment are reduced. Once the mounting assembly 206 is lowered into the desired position, a torque is applied to the threaded locking screw 216 through the threaded locking hole 215 to lock the mounting assembly 206 in place.

[0031]

[0036] 3A and 3B, the maximum vertical adjustment tolerance of the spray assembly 104 is believed to be 10 mm or 5 mm in either the upward or downward direction. However, the maximum adjustment tolerance may vary depending on the horizontal length of the spray assembly 104.

[0032]

[0037] FIG. 3C is a side view showing the spray assembly 104 in a tilted or angled position according to one embodiment. In FIG. 3C, the leveling screws 214 are torqued in opposite directions, e.g., clockwise and counterclockwise, resulting in one distal end 219b of the mounting assembly 206 rising and the opposing distal end 219a falling. Variable adjustment of each distal end 219 causes the mounting assembly 206 to seat at an angle 304 relative to the base assembly 204. Although only one tilted orientation is shown, the mounting assembly 206 can be tilted in either direction. Additionally, in the embodiment shown in FIG. 3C, it is believed that the maximum tilt adjustment tolerance of the mounting assembly 206 is 0.5 or 0.25° in either direction. However, it is also believed that the maximum tilt adjustment tolerance can vary depending on the horizontal length of the mounting assembly 206.

[0033]

[0038] FIG. 4 is a flow diagram showing an exemplary method 400 of Marangoni drying of a substrate using the above-described apparatus provided. In step 402, a spray assembly is provided. The spray assembly includes a base assembly coupled to one or more mounting brackets. The mounting assembly is further coupled to the base assembly. Two spray bars are positioned and secured via clamps on the mounting assembly at a distance sufficient for the substrate to pass through. In step 404, a torque is applied to a leveler extending through the mounting assembly and coupled to the base assembly to raise, lower, or tilt the mounting assembly and thus the spray bars. In step 406, the spray bars are rotated to a desired angle about their longitudinal axes to direct vapor toward the substrate. As a result of steps 404 and 406, the combination of rotation, tilt, and elevation or lowering of the spray bars can adjust the spray bars to a desired position and orientation about the x, y, and z axes to direct vapor toward the passing substrate. More specifically, the spray bars can rotate about the x and z axes and move linearly on the y axis.

[0034]

[0039] In step 408, the substrate is removed from the rinse tank and passed between the spray bars located in the spray assembly via a lift mechanism located in the drying system. Vapor is emitted from the spray bars and directed at both sides of the substrate as it passes through the spray bar assembly. In step 410, the dried substrate is inspected for any defects remaining after the drying process, such as streaks, spots, and residue. Finally, in step 412, a user adjusts the height and orientation of the spray bars to correct any defects found on the substrate surface. Adjustments can be made manually by applying torque to the leveling screws and rotating the spray bars in the spray assembly.

[0035]

[0040] Alternatively, the defect analysis and subsequent adjustments can be automated. For example, the substrate can be analyzed for defects using an automated defect inspection tool. The user can then transmit the desired position and orientation of the spray bar using a graphical user interface located either on the drying system itself or on a separate computer terminal. Once entered, the drying system can automatically adjust the spray bar before the next drying cycle to correct any defects detected by the inspection tool. Furthermore, it is contemplated that the entire process of defect inspection and spray bar assembly adjustments can be fully automated, eliminating the need for any user input or intervention.

[0036]

[0041] Embodiments herein advantageously minimize substrate surface defects resulting from the Marangoni drying process. In conventional Marangoni drying systems, static spray bars deliver solvent vapor to the front and backside of a substrate after water rinsing. Variations in chamber conditions between substrate batches, such as differences in rinse pool liquid levels and configurations, cause inconsistent drying results with variations in streaks, spots, and other residual marks on the substrate surface. By using spray bar assemblies that are adjustable about the x, y, and z axes, embodiments herein provide an apparatus and method for minimizing the variation in drying results between drying systems.

[0037]

[0042] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the present disclosure may be devised without departing from the basic scope thereof, as determined by the following claims.

Claims

1. 1. An apparatus comprising: With the base, a mounting assembly disposed on the base, a crossbar having a plurality of openings extending from a top surface of the crossbar to a bottom surface of the crossbar; a guide pin disposed in one of the openings in the crossbar and in contact with the base, the guide pin configured to align the base with the mounting assembly; a leveller disposed within one of the openings in the crossbar and in contact with the base, the leveller configured to position the crossbar relative to the base; two arms coupled to the crossbar, each arm disposed perpendicular to the crossbar at either end of the crossbar and configured to support one or more spray bars; a mounting assembly including: An apparatus comprising:

2. The device of claim 1 , wherein at least one of the plurality of openings is a smooth bore adapted to fit over the guide pin.

3. The apparatus of claim 2 , wherein the guide pin is configured to vertically align the base and the mounting assembly.

4. The apparatus of claim 3 , wherein the smooth bore is conical to facilitate tilting of the mounting assembly.

5. The apparatus of claim 1 , wherein at least one of the plurality of openings is a threaded hole adapted to fit into the leveller.

6. The apparatus of claim 5 , wherein the mounting assembly is raised or lowered by applying a torque to the leveller in the threaded hole.

7. 10. The apparatus of claim 1, further comprising a locking screw disposed in one of the plurality of openings, at least one of the plurality of openings being a threaded hole adapted to receive the locking screw.

8. The apparatus of claim 7 , wherein the locking screw is configured to secure the mounting assembly in a desired position relative to the base.

9. The apparatus of claim 8 , wherein the locking screw is coupled to a spherical washer to facilitate tilting of the mounting assembly.

10. 1. An apparatus comprising: With the base, a mounting assembly disposed on the base, a crossbar having a plurality of first openings extending from a top surface of the crossbar to a bottom surface of the crossbar and having two ends; two or more guide pins disposed within the first plurality of openings of the crossbar and in contact with the base, at least one guide pin located at each end of the crossbar; two or more levellers disposed within the plurality of first openings and in contact with the base, at least one leveller at each end of the crossbar; two arms coupled to the crossbar, each arm disposed perpendicular to the crossbar at either end of the crossbar and including one or more second openings; a mounting assembly including: one or more spray bars disposed at the one or more second openings of the two arms; An apparatus comprising:

11. The apparatus of claim 10 , wherein two of the spray bars are positioned in the one or more second openings, the spray bars being positioned to form a channel through which a substrate can be transported.

12. The apparatus of claim 10 , wherein the one or more spray bars are rotatable about their longitudinal axes while disposed within the mounting assembly.

13. The apparatus of claim 10 , wherein each of the two or more levellers can be individually torqued to apply different amounts to tilt the mounting assembly.

14. The apparatus of claim 10 , wherein the one or more spray bars are adjustable about the x, y, and z axes.

15. A method of drying a substrate using the apparatus of claim 10, comprising the steps of: placing the apparatus within a drying system, wherein the one or more spray bars coupled to the mounting assembly are adapted to direct vapor toward a substrate; Adjusting the one or more spray bars to a desired position and rotation about x, y, and z axes; Lifting the substrate out of the rinse pool and passing it past the one or more spray bars; directing vapor from the one or more spray bars onto a surface of the substrate; A method comprising:

16. 16. The method of claim 15, further comprising: analyzing a surface of the substrate for defects; and adjusting a position and rotation of the one or more spray bars to correct the defects.

17. The method of claim 16, wherein the defect analysis and spray bar adjustment are automated.

18. 20. The method of claim 17, wherein a user may adjust position and rotation parameters of the one or more spray bars through a graphical user interface.

19. The apparatus of claim 11 , wherein each spray bar is configured to direct vapor toward opposite ends of the substrate while the substrate is transported through the channel.

20. 11. The apparatus of claim 10, wherein each of the two or more levellers can be individually torqued an equal amount to raise or lower the mounting assembly uniformly across a horizontal surface.

Images