Phase locked loop circuit and sensing device

Abstract

To change an oscillation frequency with good followability to a change in resonance frequency caused by a change in environment condition.SOLUTION: A phase synchronization circuit comprises: an oscillator that changes a frequency depending on a control signal; a resonance element that resonates at a predetermined resonance frequency and outputs a signal obtained by shifting a phase of an output signal of the oscillator by 90 degrees at the resonance frequency; a phase detector that detects a phase error between an output signal of the resonance element and the output signal of the oscillator; a feedback control unit that controls a frequency of the output signal of the oscillator by proportional control and integration control depending on the phase error; an environment information acquisition unit that acquires environment information; and a control signal correction unit that adds a correction item depending on the environment information to an output signal of the feedback control unit to correct the control signal.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] An embodiment of the present invention relates to a phase locked loop circuit and a sensing device. [Background technology]

[0002] 2. Description of the Related Art A phase locked loop circuit is known that performs feedback control so that the oscillation frequency of a variable frequency oscillator does not change even if the resonance frequency of a resonance element changes due to environmental conditions such as temperature.

[0003] However, it is difficult to accurately change the oscillation frequency to follow the change in the resonance frequency due to environmental conditions such as temperature, and a frequency error occurs between the oscillation frequency and the resonance frequency. Therefore, in a physical quantity detection sensor using this type of phase-locked loop, the frequency error between the oscillation frequency and the resonance frequency reduces the detection accuracy of the physical quantity. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2019-193052 A [Patent Document 2] U.S. Patent 4,951,508 Summary of the Invention [Problem to be solved by the invention]

[0005] Therefore, one embodiment of the present invention provides a phase locked loop circuit and a sensing device that can change the oscillation frequency with good tracking even if the resonant frequency changes due to changes in environmental conditions such as temperature. [Means for solving the problem]

[0006] In order to solve the above problems, according to one embodiment of the present invention, there is provided an oscillator that varies a frequency in response to a control signal; a resonant element that resonates at a predetermined resonant frequency and outputs a signal that is 90 degrees out of phase with an output signal of the oscillator at the resonant frequency; a phase detector for detecting a phase error between the output signal of the resonator element and the output signal of the oscillator; a feedback control unit that controls a frequency of an output signal of the oscillator by proportional control and integral control according to the phase error; an environmental information acquisition unit that acquires environmental information; There is provided a phase locked loop circuit including: a control signal correction section that corrects the control signal by adding a correction term according to the environmental information to an output signal of the feedback control section. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a block diagram of a phase locked loop according to a first embodiment. [Diagram 2] FIG. 1 is a block diagram of a phase locked loop circuit according to a comparative example. [Diagram 3] FIG. 2 is a block diagram of a phase locked loop according to a first modified example of FIG. 1; [Figure 4] FIG. 2 is a block diagram of a phase locked loop according to a second modification of FIG. 1; [Diagram 5] FIG. 2 is a block diagram of a phase locked loop according to a third modification of FIG. 1; [Figure 6] FIG. 13 is a block diagram of a phase locked loop according to a fourth modification of FIG. [Figure 7] FIG. 13 is a block diagram of a phase locked loop according to a fifth modification of FIG. [Figure 8] FIG. 11 is a block diagram of a sensing device including a phase locked loop according to a second embodiment. [Figure 9] FIG. 9 is a block diagram of an angle sensor having a phase locked loop according to one embodiment of FIG. 8; [Figure 10] FIG. 2 is a block diagram of an acceleration sensor. [Figure 11] FIG. 11 is a block diagram of an acceleration sensor according to a modified example of FIG. 10. [Figure 12] FIG. 9 is a block diagram of a sensing device according to a modified example of FIG. 8. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment of a phase locked loop circuit and a sensing device will be described with reference to the drawings. The following description will focus on the main components of the phase locked loop circuit and the sensing device, but the phase locked loop circuit and the sensing device may include components and functions that are not shown or described. The following description does not exclude components and functions that are not shown or described.

[0009] (First embodiment) Fig. 1 is a block diagram of a phase locked loop 1 according to a first embodiment, and Fig. 2 is a block diagram of a phase locked loop 100 according to a comparative example. First, the operating principle of the phase locked loop 1 will be described using the phase locked loop 100 according to the comparative example of Fig. 2.

[0010] The phase locked loop 100 in FIG. 2 includes a variable frequency oscillator 2, a resonant element 3, a phase detector 4, and a feedback control section 5.

[0011] The variable frequency oscillator 2 generates an oscillation signal whose frequency can be varied. More specifically, the variable frequency oscillator 2 controls the frequency of the oscillation signal based on a control signal output from the feedback control unit 5. The variable frequency oscillator 2 generates an oscillation signal whose frequency is obtained by multiplying the control signal by a frequency conversion coefficient K.

[0012] 2, the phase signal obtained by Laplace transforming the phase of the output signal (oscillation signal) of the variable frequency oscillator 2 is denoted as θ(s). The output signal of the variable frequency oscillator 2 is input to the resonant element 3. The resonant element 3 has a steep Q at the resonant frequency, and the phase lags by 90 degrees at the resonant frequency. More specifically, the resonant element 3 resonates at a predetermined resonant frequency, and outputs a signal at the resonant frequency that is shifted in phase by 90 degrees from the output signal of the variable frequency oscillator.

[0013] If the frequency of the output signal of the variable frequency oscillator 2 deviates from the resonant frequency of the resonant element 3, the phase delay in the resonant element 3 deviates from 90 degrees. If the phase error signal obtained by Laplace transforming the phase error, which is this deviation component, is denoted as θe(s) and the signal obtained by Laplace transforming the phase of the output signal of the variable frequency oscillator 2 is denoted as θ(s), then the phase signal obtained by Laplace transforming the phase of the output signal of the resonant element 3 is θ(s)-90° / s-θe(s).

[0014] Phase detector 4 detects the phase error between the phase of the output signal of frequency variable oscillator 2 and the phase of the output signal of resonant element 3. When the difference between the phase signal θ(s) obtained by Laplace transforming the phase of the output signal of frequency variable oscillator 2 and the phase signal θ(s)-90° / s-θe(s) obtained by Laplace transforming the phase of the output signal of resonant element 3 is taken, the phase error becomes 90° / s+θe(s). When an oscillation signal with a phase shift of 90 degrees is generated in advance from frequency variable oscillator 2 and input to phase detector 4, the phase error detected by phase detector 4 becomes θe(s).

[0015] The feedback control unit 5 generates a control signal by performing proportional control (also called P control) and integral control (also called I control) according to the phase error detected by the phase detector 4. The feedback control unit 5 can be configured with a filter having a proportional term P and an integral term I.

[0016] The variable frequency oscillator 2 generates an oscillation signal having a frequency obtained by multiplying the control signal output from the feedback control unit 5 by a frequency conversion coefficient K. The frequency conversion coefficient K is a coefficient specific to the variable frequency oscillator 2. In Fig. 2 and other figures, the output signal of the variable frequency oscillator 2 is expressed as a phase, and therefore the variable frequency oscillator 2 is expressed as K / s in order to obtain the phase by integrating the frequency.

[0017] When the oscillation frequency of the frequency-variable oscillator 2 is close to the resonant frequency of the resonant element 3, the phase characteristics near the resonant frequency of the resonant element 3 can be linearly approximated, and the phase error θe(s) can be expressed as the difference between the oscillation frequency of the frequency-variable oscillator 2 and the resonant frequency of the resonant element 3 multiplied by the coefficient a, as shown in equation (1). θe(s)=-a(sθ(s)-ωr(s)) …(1)

[0018] Here, the output frequency of the variable frequency oscillator 2 can be obtained by differentiating the phase θ(s), and can be expressed as sθ(s) by multiplying it by s in Laplace notation. ω r (s) is the resonant frequency ω of the resonant element 3 that changes over time in response to changes in the environment. r Therefore, when the frequency error between the oscillation frequency of the variable frequency oscillator 2 and the resonance frequency of the resonance element 3 is Laplace transformed, it is sθ(s)-ω r 2, the output signal θ(s) of the variable frequency oscillator 2 is expressed by the following equation (2).

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[0019] From equations (1) and (2), the output signal θ(s) of the variable frequency oscillator 2 is expressed by the following equation (3).

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[0020] From equation (3), the frequency error between the oscillation frequency of the variable frequency oscillator 2 and the resonant frequency of the resonant element 3 is sθ(s)-ω r (s) is expressed by the following equation (4).

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[0021] The resonant frequency of the resonant element 3 changes according to the environmental information E(t), and ω r (t)=ω r For example, if the environmental information E(t) is temperature T(t), the resonant frequency ω r (t) is ω r (t)=ω r (T(t)). The resonant frequency at a given temperature T0 is expressed as ω r0 , the temperature coefficient of the resonant frequency is K TThen, the resonant frequency ω r (t) is expressed by the following equation (5). ω r (t)=ω r (T(t))=ω r0 +K T (T(t)-T0) …(5)

[0022] When equation (5) is subjected to Laplace transformation, it becomes equation (6). ω r (s)=ω r (T(s))=ω r0 / s+K T (T(s)-T0 / s) …(6)

[0023] K T T0=ω r0 So, substituting this into equation (6), we get ω r (s)=K T T(s). Substituting this into equation (4), we obtain equation (7).

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[0024] It can be seen from equation (7) that when the temperature changes with time, the oscillation frequency of variable frequency oscillator 2 cannot follow the change in the resonant frequency, and a phase error occurs according to the temperature.

[0025] Therefore, the phase locked loop 1 in Fig. 1 is characterized in that the phase error shown in equation (7) is set to zero. The phase locked loop 1 in Fig. 1 includes an environmental information acquisition unit 6 and a control signal correction unit 7 in addition to the configuration of the phase locked loop 100 in Fig. 2.

[0026] The environmental information acquisition unit 6 acquires environmental information E(t). As described above, the environmental information E(t) is temperature, power supply voltage, etc. that change with time, and can be detected by a temperature sensor, a voltage sensor, etc. A sensor or the like that detects the environmental information E(t) may be built into the phase locked loop 1. In this case, the environmental information acquisition unit 6 may also function as the environmental information detection unit. Alternatively, the environmental information acquisition unit 6 may acquire environmental information detected by a sensor or the like that is provided separately from the phase locked loop 1.

[0027] 1 corrects the control signal by adding a correction term according to environmental information such as temperature to the control signal output from the feedback control unit 5. The control signal corrected by the control signal corrector 7 is input to the variable frequency oscillator 2.

[0028] The correction term input to the control signal correction unit 7 is obtained by multiplying E(s), which is the Laplace transform of the environmental information E(t), by a predetermined coefficient (referred to as the environmental dependent coefficient in this specification) C E The value C multiplied by E ·E(s). The environmental dependence coefficient C E has a fixed value according to the environmental information E(t). The control signal correction unit 7 applies a correction term C to the control signal output from the feedback control unit 5. E · The control signal is corrected by multiplying it by E(s). Correction term C E The calculation of E(s) may be performed by the environmental information acquisition unit 6 or by the control signal correction unit 7.

[0029] The variable frequency oscillator 2 controls the frequency of the output signal of the variable frequency oscillator 2 by multiplying the control signal output from the control signal correction unit 7 by a frequency conversion coefficient K / s.

[0030] The environmental information coefficient of the resonant frequency of the resonant element 3 in Figure 1 is K E Then, the frequency error between the oscillation frequency of the variable frequency oscillator 2 and the resonance frequency of the resonance element 3 is sθ(s)-ω r (s) is expressed by the following equation (8).

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[0031] If the numerator on the right-hand side of equation (8) becomes zero, the phase error detected by phase detector 4 in Fig. 1 becomes zero and becomes independent of environmental information E(t). The numerator on the right-hand side of equation (8) becomes zero when the following equation (9) is satisfied.

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[0032] As shown in equation (9), the environmental dependence coefficient C E is the environmental information coefficient K E and the frequency conversion coefficient K of the variable frequency oscillator 2, the numerator of equation (8) becomes zero, and even if there is a time change in the environmental information E(t), the frequency of the variable frequency oscillator 2 of the phase locked loop 1 of this embodiment can be made to follow the resonant frequency of the resonant element 3.

[0033] In addition, the environmental dependence coefficient C E Even if the value deviates slightly from the value defined by equation (9), the effect of reducing the frequency error between the oscillation frequency of variable frequency oscillator 2 and the resonant frequency of resonant element 3 can be obtained.

[0034] The environmental information may be temperature information. Fig. 3 is a block diagram of a phase locked loop 1a according to a first modified example of Fig. 1, and shows an example in which a correction term based on temperature information is input to a control signal correction unit 7. The phase locked loop 1a of Fig. 3 has the same block configuration as the phase locked loop 1 of Fig. 1, except that the correction term input to the control signal correction unit 7 is different.

[0035] The correction term input to the control signal correction unit 7 in FIG. 3 is a Laplace transform of the temperature information T(t) multiplied by a predetermined environment-dependent coefficient C T The value C multiplied by T ·T(s). This correction term C T The control signal is corrected by adding ·T(s) to the control signal output from the feedback control unit 5. The temperature information coefficient of the resonant frequency of the resonant element 3 in FIG. TThen, the frequency error sθ(s)−ωr(s) between the oscillation frequency of the variable frequency oscillator 2 and the resonant frequency of the resonant element 3 is expressed by the following equation (10).

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[0036] If the numerator on the right-hand side of equation (10) becomes zero, the phase error detected by phase detector 4 in Fig. 3 becomes zero and becomes independent of temperature information. The numerator on the right-hand side of equation (10) becomes zero when the following equation (11) is satisfied.

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[0037] On the other hand, when the resonant element 3 is a MEMS (Micro Electro Mechanical Systems) resonant element, the resonant frequency of the resonant element 3 changes with acceleration, so the environmental information may be acceleration. Fig. 4 is a block diagram of a phase locked loop 1b according to a second modification of Fig. 1, and shows an example in which a correction term based on acceleration is input to the control signal correction unit 7. The phase locked loop 1b in Fig. 4 has a block configuration in common with the phase locked loop 1 in Fig. 1, except that the correction term input to the control signal correction unit 7 is different.

[0038] The correction term input to the control signal correction unit 7 in FIG. 4 is a Laplace transform of the acceleration A(t) multiplied by a predetermined environment-dependent coefficient C A The value C multiplied by A The control signal is corrected by multiplying it by K. The acceleration coefficient of the resonant frequency of the resonant element 3 in FIG. A Then, the frequency error between the oscillation frequency of the variable frequency oscillator 2 and the resonance frequency of the resonance element 3 is sθ(s)-ω r (s) is expressed by the following equation (12).

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[0039] If the numerator on the right-hand side of equation (12) becomes zero, the phase error detected by phase detector 4 in Fig. 3 becomes zero and becomes independent of acceleration. The numerator on the right-hand side of equation (12) becomes zero when the following equation (13) is satisfied.

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[0040] 1, 3 and 4 show an example in which the phase detector 4 in the phase locked loop 1, 1a, 1b detects the frequency error between the oscillation frequency of the variable frequency oscillator 2 and the resonant frequency of the resonant element 3 by using the control signal correction unit 7. The phase detector 4 can also be configured using a multiplier and a low-pass filter.

[0041] Fig. 5 is a block diagram of a phase locked loop 1c according to a third modification of Fig. 1. The phase locked loop 1c of Fig. 5 has a phase detector 4 with an internal configuration different from that of the phase locked loop 1 of Fig. 1. The phase detector 4 of Fig. 5 has a multiplier 11 and a low-pass filter 12.

[0042] When the output signal of the variable frequency oscillator 2 is cos θ(t), the output signal of the resonant element 3 is expressed by the following equation (14).

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[0043] When the output signal of the variable frequency oscillator 2 and the output signal of the resonant element 3 are multiplied by the multiplier 11, a signal expressed by the following equation (15) is generated.

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[0044] When the output signal of the multiplier 11 is input to the low-pass filter 12, the phase error θe(t) shown in the following equation (16) is obtained.

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[0045] The variable frequency oscillator 2 may supply two oscillation signals, which are 90 degrees out of phase with each other, to the phase detector 4 separately from the oscillation signal supplied to the resonant element 3, and multiply each of these two oscillation signals by the output signal of the resonant element 3 to generate an I signal and a Q signal.

[0046] Fig. 6 is a block diagram of a phase locked loop 1d according to a fourth modification of Fig. 1. A phase detector 4 in the phase locked loop 1d of Fig. 6 has a multiplier 11, a low-pass filter 12, and a phase difference calculation unit 13.

[0047] 6 supplies cos θ(t) of a plurality of oscillation signals each having a phase difference of 90 degrees to a resonance element 3. An output signal x of the resonance element 3 is expressed by the following equation (17).

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[0048] Moreover, multiplier 11 in phase detector 4 multiplies signal x in equation (17) by two oscillation signals (2sinθ(t), −2cosθ(t)) that are out of phase with each other by 90 degrees to generate I and Q signals shown in equation (18) below. I=x(2sinθ(t)), Q=x(-2cosθ(t)) …(18)

[0049] The low-pass filter 12 in the phase detector 4 filters the low-frequency component I L , Q L Extract. I L =cosθ e (t), Q L =sinθ e (t) …(19)

[0050] The phase difference calculation unit 13 calculates the I L and Q L The phase error θ e Calculate the following.

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[0051] The phase locked loop 1 according to the above-mentioned Fig. 1 to Fig. 6 performs feedback control by an analog signal. The analog signal is easily affected by the environment such as temperature. Therefore, feedback control may be performed by a digital signal. Fig. 7 is a block diagram of a phase locked loop 1e according to a fifth modification of Fig. 1.

[0052] The variable frequency oscillator 2a, phase detector 4a, feedback control unit 5a, environmental information acquisition unit 6a, and control signal correction unit 7a in Fig. 7 are all configured as digital circuits. Only the resonant element 3 in Fig. 7 is an analog circuit. The output signal of the variable frequency oscillator 2a, the output signal of the feedback control unit 5a, the correction term input to the control signal correction unit 7a, and the control signal generated by the control signal correction unit 7a are all digital signals.

[0053] A phase locked loop 1e in Fig. 7 includes a DA converter 14 and an AD converter 15 in addition to the configuration in Fig. 1. Hereinafter, the output signal of the variable frequency oscillator 2a will be referred to as a digital oscillation signal.

[0054] The DA converter 14 converts the digital oscillation signal output from the variable frequency oscillator 2a into an analog oscillation signal. The resonator element 3 performs analog resonance operation in the same manner as in FIG. 1, and outputs an analog signal. The AD converter 15 converts the output signal of the resonator element 3 into a digital signal. Hereinafter, the output of the AD converter 15 will be referred to as a digital resonance signal.

[0055] The phase detector 4a detects the phase error between the digital oscillation signal output from the variable frequency oscillator 2a and the digital resonance signal output from the AD converter 15, and outputs a digital signal indicative of the phase error.

[0056] The feedback control unit 5a performs proportional control and integral control in response to the digital signal output from the phase detector 4a to generate a control signal made up of a digital signal.

[0057] The control signal correction unit 7a multiplies the environmental information, which is a digital signal, by an environmental dependent coefficient, which is also a digital signal, to generate a correction term, which is also a digital signal. The control signal correction unit 7a also adds the correction term, which is also a digital signal, to the control signal, which is a digital signal output from the feedback control, to correct the control signal, which is also a digital signal. The variable frequency oscillator 2a controls the frequency of the digital oscillation signal by multiplying the control signal, which is a digital signal generated by the control signal correction unit 7a, by a frequency conversion coefficient, which is also a digital signal.

[0058] 7, the variable frequency oscillator 2a is configured with a digital circuit, so that the frequency conversion coefficient K does not vary with environmental information such as temperature and power supply voltage. Therefore, even if the resonant frequency of the resonant element 3 changes over time due to a change in the environment, the oscillation frequency of the variable frequency oscillator 2a can be changed with good tracking to the resonant frequency.

[0059] In this way, the phase locked loop circuits 1 to 1e according to the first embodiment keep in mind that the resonant frequency of the resonant element 3 varies depending on the environment such as temperature, correct the control signal output from the feedback control unit 5 by adding a correction term according to the environment information to the control signal, and use the corrected control signal to control the oscillation frequency of the variable frequency oscillator 2. As a result, even if the resonant frequency of the resonant element 3 varies depending on the environment such as temperature, the oscillation frequency of the variable frequency oscillator 2 can be changed with good tracking ability to follow the variation.

[0060] Second embodiment 1 to 7 can be built into a sensing device that detects a physical quantity, such as an angle, acceleration, speed, or other detection target signal of various sensors.

[0061] FIG. 8 is a block diagram of a sensing device 10 including a phase locked loop 1 according to the second embodiment. The sensing device 10 in FIG. 8 includes, for example, the phase locked loop 1 in FIG. 1 and a physical quantity calculation unit 16. The sensing device 10 in FIG. 8 may include any of the phase locked loops 1a to 1e shown in FIGS. 3 to 7. That is, the sensing device 10 in FIG. 8 includes any of the phase locked loops 1 to 1e described in the first embodiment. Hereinafter, this will be referred to as a phase locked loop 1.

[0062] The resonant element 3 in the sensing device 10 in Fig. 8 is, for example, a MEMS resonant element 3a. The physical quantity calculation unit 16 detects the physical quantity based on the output signal of the resonant element 3. Note that the physical quantity calculation unit 16 may detect the physical quantity based on the output signal of the variable frequency oscillator 2 as indicated by the dashed line in Fig. 8, or may detect the physical quantity based on the control signal output from the control signal correction unit 7.

[0063] The phase-locked loop circuit 1 in the sensing device 10 of Figure 8 can change the oscillation frequency of the variable frequency oscillator 2 with good tracking to the resonant frequency of the resonant element 3 even if the resonant frequency changes due to environmental information such as temperature, so that the physical quantity can be detected more accurately without depending on the environmental information.

[0064] The sensing device 10 may be, for example, an angle sensor. For example, when the resonant element 3 in the phase locked loop 1 is a MEMS resonant element 3a, the sensing device 10 can be applied to an angle sensor. Fig. 9 is a block diagram of an angle sensor 17 having the phase locked loop 1 according to the specific example of Fig. 8. The angle sensor 17 of Fig. 9 includes an angle calculation unit 18 as a physical quantity calculation unit 16 in addition to the phase locked loop 1. The phase locked loop 1 of Fig. 9 has a configuration similar to that of the phase locked loop 1 of Fig. 6, and the resonant element 3 is a MEMS resonant element 3a.

[0065] The MEMS resonant element 3a vibrates a mass in an elliptical shape, with the major axis of the ellipse being d and the minor axis being q. The displacement signal in the x direction of the MEMS resonant element 3a is expressed by equation (21), and the displacement signal in the y direction is expressed by equation (22).

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[0066] The multiplier 11 in the phase detector 4 multiplies the x-direction displacement signal and the y-direction displacement signal output from the MEMS resonant element 3a by the oscillation signal (2sinθ(t), −2cosθ(t)) input from the variable frequency oscillator 2 to the phase detector 4, to obtain I x Signal and Q x signal and I shown in Eq. (24) y Signal and Q y A signal and a signal are generated. I x =x(2sinθ(t)), Q x =x(-2cos(θ(t)) …(23) I y = y(2sinθ(t)), Q y =y(-2cos(θ(t)) …(24)

[0067] The low-pass filter 12 in the phase detector 4 is x Signal, Q x Signal, I y Signal, Q y Low frequency component of the signal I xL , Q xL , I yL , Q yL Extract.

[0068] The phase difference calculation unit 13 in the phase detector 4 calculates the phase error θ based on the following equation (25). e Calculate (t).

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[0069] 9 shares the multiplier 11 and the low-pass filter 12 in the phase detector 4, and has a calculation unit 21. The output signal I xL , Q xL , I yL , Q yLis also input to the calculation unit 21. The calculation unit 21 calculates the angle θ based on the following equation (26): A Find (t).

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[0070] In the angle sensor 17 of FIG. 9, even if the resonant frequency of the MEMS resonant element 3a changes over time due to a change in environmental information over time, the oscillation frequency of the variable frequency oscillator 2 accurately tracks the resonant frequency, so that the angle can be detected more accurately.

[0071] The sensing device 10 in Fig. 8 may be an acceleration sensor. That is, when the resonant element 3 in the phase locked loop 1 is a MEMS resonant element 3a, it is applicable to an acceleration sensor. Fig. 10 is a block diagram of an acceleration sensor 22. The acceleration sensor 22 in Fig. 10 includes a phase locked loop 1 and an acceleration calculation unit 23. The phase locked loop 1 in Fig. 10 has a configuration similar to that of the phase locked loop 1 in Fig. 9, but the control signal correction unit 7 applies a predetermined environment-dependent coefficient C to T(s), which is a Laplace transform of temperature information T(t) of the resonant frequency of the resonant element 3. T The value C multiplied by T The control signal is corrected by adding ·T(s) to the control signal output from the feedback control unit 5. In this way, the phase locked loop 1 according to this embodiment reduces phase errors caused by environmental information different from the physical quantity to be determined, and in an acceleration sensor incorporating the phase locked loop 1, it reduces phase errors caused by environmental information other than acceleration (for example, temperature information).

[0072] 10 includes a frequency detector 24, a frequency error detector 25, and a calculation unit 26. The frequency detector 24 detects the oscillation frequency of the output signal of the variable frequency oscillator 2. The frequency error detector 25 calculates the frequency error between the oscillation frequency detected by the frequency detector 24 and a reference frequency. The reference frequency is the oscillation frequency of the variable frequency oscillator 2 when the acceleration of the resonant element 3 is set to zero. The calculation unit 26 calculates the frequency error calculated by the frequency error detector 25 as an acceleration coefficient KA Divide by this to find the acceleration A. Acceleration coefficient K A is a value specific to the MEMS resonating element 3a.

[0073] In the acceleration sensor 22 of FIG. 10, even if the resonant frequency of the resonant element 3 changes over time due to a change in the environment over time, the oscillation frequency of the variable frequency oscillator 2 changes to precisely track the resonant frequency, so that the frequency error calculated by the frequency error detector 25 is no longer affected by the environment, and acceleration can be detected with high accuracy.

[0074] In the acceleration sensor 22 of FIG. 10, the output signal of the frequency variable oscillator 2 is input to the acceleration calculation unit 23 to calculate the frequency error between the oscillation frequency and the resonance frequency, but the control signal output from the control signal correction unit 7 may be input to the acceleration calculation unit 23 to calculate the frequency error.

[0075] Fig. 11 is a block diagram of an acceleration sensor 22a according to a modified example of Fig. 10. The acceleration sensor 22a of Fig. 11 includes a phase locked loop 1 and an acceleration calculation unit 23. The internal configuration of the phase locked loop 1 of Fig. 11 is the same as that of the phase locked loop 1 of Fig. 10.

[0076] 11 includes a frequency multiplier 27, a frequency error detector 25, and a calculation unit 26. The frequency multiplier 27 multiplies the control signal output from the control signal correction unit 7 by a frequency conversion coefficient K. This allows the frequency multiplier 27 to generate an oscillation signal with the same frequency as that of the variable frequency oscillator 2. The frequency multiplier 27 has the function of the frequency detector 24 in FIG. 10, and outputs the frequency of the oscillation signal obtained by multiplying the control signal by the frequency conversion coefficient K.

[0077] The processing operations of the frequency error detector 25 and the calculation unit 26 in the acceleration calculation unit 23 in FIG. 11 are similar to the processing operations of the frequency error detector 25 and the calculation unit 26 in FIG.

[0078] In this way, even in the sensing device 10 of Figure 11, even if the resonant frequency of the resonant element 3 changes over time due to the environment, the oscillation frequency of the variable frequency oscillator 2 can be changed to match the resonant frequency, so that acceleration can be detected regardless of the environment.

[0079] The sensing device 10 shown in FIGS. 8 to 11 described above performs feedback control and physical quantity detection using analog signals, but may also perform feedback control and physical quantity detection using digital signals.

[0080] Fig. 12 is a block diagram of a sensing device 10a according to a modified example of Fig. 8. The sensing device 10a in Fig. 12 includes a DA converter 14 and an AD converter 15 in addition to the configuration in Fig. 8. Furthermore, the variable frequency oscillator 2a, phase detector 4a, feedback control unit 5a, control signal correction unit 7a, and physical quantity calculation unit 16a in Fig. 12 are each digital circuits. Therefore, the variable frequency oscillator 2a, phase detector 4a, feedback control unit 5a, and control signal correction unit 7a can perform processing operations without depending on the environment, such as temperature.

[0081] The DA converter 14 converts the digital oscillation signal output from the variable frequency oscillator 2a into an analog oscillation signal. The resonant element 3 is an analog circuit similar to the resonant element 3 in Fig. 8, and performs a resonant operation when the oscillation frequency of the oscillation signal is a resonant frequency. The resonant element 3 is, for example, a MEMS resonant element 3a.

[0082] The AD converter 15 converts the output signal of the resonator element 3 into a digital signal. The output signal of the AD converter 15 is supplied to the phase detector 4a and the physical quantity calculation unit 16a.

[0083] In this way, by configuring the sensing device 10, 10a with digital circuits other than the resonant element 3, it is possible to suppress fluctuations in the frequency conversion coefficient K of the variable frequency oscillator 2 due to temperature, power supply voltage, etc. Therefore, even if the resonant frequency of the resonant element 3 changes over time due to environmental changes such as temperature and power supply voltage, the oscillation frequency of the variable frequency oscillator 2 can be varied to accurately track the resonant frequency.

[0084] Furthermore, since the physical quantity calculation unit 16 can be configured as a digital circuit, it is less susceptible to environmental influences such as temperature and power supply voltage, and the physical quantity can be detected more accurately, compared to a configuration using an analog circuit.

[0085] The aspects of the present disclosure are not limited to the above-mentioned individual embodiments, but include various modifications that may be conceived by a person skilled in the art, and the effects of the present disclosure are not limited to the above-mentioned contents. In other words, various additions, modifications, and partial deletions are possible within the scope of the conceptual idea and intent of the present disclosure derived from the contents defined in the claims and their equivalents. [Explanation of symbols]

[0086] 1, 1a, 1b, 1c, 1d, 1e, 100 phase locked loop, 2, 2a frequency variable oscillator, 3 resonant element, 3a MEMS resonant element, 4, 4a phase detector, 5, 5a feedback control section, 6, 6a environmental information acquisition section, 7, 7a control signal correction section, 10, 10a sensing device, 11 multiplier, 12 low-pass filter, 13 phase difference calculation section, 14 DA converter, 15 AD converter, 16, 16a physical quantity calculation section, 17 angle sensor, 18 angle calculation section, 21 calculation section, 22, 22a acceleration sensor, 23 acceleration calculation section, 24 frequency detector, 25 frequency error detector, 26 calculation section, 27 frequency multiplier

Claims

1. an oscillator that varies the frequency in response to a control signal; a resonant element that resonates at a predetermined resonant frequency and outputs a signal having a phase shift of 90 degrees from an output signal of the oscillator at the resonant frequency; a phase detector for detecting a phase error between the output signal of the resonator element and the output signal of the oscillator; a feedback control unit that controls a frequency of an output signal of the oscillator by proportional control and integral control according to the phase error; an environmental information acquisition unit that acquires environmental information; a control signal correction unit that corrects the control signal by adding a correction term corresponding to the environmental information to an output signal of the feedback control unit, the resonant frequency of the resonant element is changed according to an environmental information coefficient corresponding to the environmental information; the oscillator sets a frequency of an output signal by multiplying the control signal by a frequency conversion factor specific to the oscillator; the control signal correction unit corrects the control signal by adding the correction term based on a value obtained by multiplying the environmental information, which changes over time, by the environmental information coefficient and dividing the product by the frequency conversion coefficient to the output signal of the feedback control unit. Phase synchronized circuit.

2. An oscillator that varies the frequency in response to a control signal; a resonant element that resonates at a predetermined resonant frequency and outputs a signal having a phase shift of 90 degrees from an output signal of the oscillator at the resonant frequency; a phase detector for detecting a phase error between the output signal of the resonator element and the output signal of the oscillator; a feedback control unit that controls a frequency of an output signal of the oscillator by proportional control and integral control according to the phase error; an environmental information acquisition unit that acquires environmental information; a control signal correction unit that corrects the control signal by adding a correction term corresponding to the environmental information to an output signal of the feedback control unit, the oscillator outputs a first oscillation signal, a second oscillation signal obtained by shifting a phase of the first oscillation signal by 90 degrees, and a third oscillation signal obtained by shifting a phase of the second oscillation signal by 90 degrees; The resonator element outputs a signal having a phase shift of 90 degrees from the first oscillation signal, The phase detector comprises: a multiplier that multiplies the second oscillation signal by the output signal of the resonator element and multiplies the third oscillation signal by the output signal of the resonator element; a filter that extracts a first signal having a low frequency component contained in a signal obtained by multiplying the second oscillation signal by the output signal of the resonator element, and a second signal having a low frequency component contained in a signal obtained by multiplying the third oscillation signal by the output signal of the resonator element; a phase difference calculation unit that calculates the phase error based on the first signal and the second signal, Phase synchronized circuit.

3. the resonant frequency of the resonant element is changed by an environmental information coefficient corresponding to the environmental information, and the control signal correction unit corrects the control signal by adding the correction term based on a value obtained by multiplying the environmental information, which changes with time, by the environmental information coefficient to an output signal of the feedback control unit.

3. The phase locked loop circuit according to claim 2.

4. the environmental information includes temperature information that changes over time; The environmental information coefficient includes a temperature coefficient specific to the resonant element, the resonant element changes the resonant frequency in accordance with the temperature information and the temperature coefficient; the control signal correction unit corrects the control signal by adding the correction term based on a value obtained by multiplying the temperature information by the environmental information coefficient specific to the temperature information to an output signal of the feedback control unit.

4. The phase locked loop circuit according to claim 1.

5. An oscillator that varies the frequency in response to a control signal; a resonant element that resonates at a predetermined resonant frequency and outputs a signal having a phase shift of 90 degrees from an output signal of the oscillator at the resonant frequency; a phase detector for detecting a phase error between the output signal of the resonator element and the output signal of the oscillator; a feedback control unit that controls a frequency of an output signal of the oscillator by proportional control and integral control according to the phase error; an environmental information acquisition unit that acquires environmental information; a control signal correction unit that corrects the control signal by adding a correction term corresponding to the environmental information to an output signal of the feedback control unit, the resonant element changes the resonant frequency according to an environmental information coefficient corresponding to the environmental information, the control signal correction unit corrects the control signal by adding the correction term based on a value obtained by multiplying the environmental information, which changes with time, by the environmental information coefficient to an output signal of the feedback control unit, The environmental information includes acceleration information, The environmental information coefficient includes an acceleration coefficient specific to the resonant element, The resonance frequency of the resonance element varies depending on the acceleration coefficient, the control signal correction unit corrects the control signal by adding the correction term based on a value obtained by multiplying the acceleration information by the environmental information coefficient specific to the acceleration information to an output signal of the feedback control unit. Phase synchronized circuit.

6. the oscillator sets a frequency of an output signal by multiplying the control signal by a frequency conversion factor specific to the oscillator; the control signal correction unit corrects the control signal by adding the correction term based on a value obtained by multiplying the environmental information, which changes over time, by the environmental information coefficient and dividing the product by the frequency conversion coefficient to the output signal of the feedback control unit.

6. A phase locked loop circuit according to claim 3.

7. the oscillator outputs a first oscillation signal and a second oscillation signal having the same frequency as the first oscillation signal and shifted in phase by 90 degrees from the first oscillation signal; The resonator element outputs a signal having a phase shift of 90 degrees from the first oscillation signal, The phase detector detects the phase error between the output signal of the resonator element and the second oscillation signal.

7. A phase locked loop circuit according to claim 1.

8. The oscillator outputs an oscillation signal having a frequency corresponding to the control signal, The resonator element outputs a signal having a phase shift of 90 degrees from the oscillation signal, The phase detector comprises: a multiplier that multiplies the oscillation signal by an output signal of the resonator element; a filter for extracting a low-frequency component signal included in the multiplication result signal of the multiplier as the phase error.

7. A phase locked loop circuit according to claim 1.

9. the resonant element is a MEMS (Micro Electro Mechanical Systems) resonant element, The MEMS resonant element vibrates in two dimensions at the resonant frequency.

9. A phase locked loop circuit according to claim 1.

10. The MEMS resonant element outputs a displacement signal in a first direction and a displacement signal in a second direction; the phase detector detects, as the phase error, a low-frequency component of a signal obtained by multiplying the output signal of the oscillator by the displacement signal in the first direction, and detects, as the phase error, a low-frequency component of a signal obtained by multiplying the output signal of the oscillator by the displacement signal in the second direction.

10. The phase locked loop circuit according to claim 9.

11. the oscillator, the phase detector, the feedback control unit, and the control signal correction unit are digital circuits; the resonant element is an analog circuit, The output signal of the oscillator, the output signal of the feedback control unit, the environmental information acquired by the environmental information acquisition unit, and the control signal generated by the control signal correction unit are digital signals.

11. A phase locked loop circuit according to claim 1.

12. a digital-to-analog converter that converts the first digital signal output from the oscillator into an analog oscillation signal to be input to the resonator element; an AD converter that converts the output signal of the resonator element into a second digital signal, wherein the phase detector generates a third digital signal representing the phase error based on the first digital signal and the second digital signal, the feedback control unit performs proportional control and integral control in response to the third digital signal to generate a fourth digital signal; the control signal correction unit adds a fifth digital signal corresponding to the correction term and the fourth digital signal to generate a sixth digital signal corresponding to the control signal; The oscillator varies a frequency of the first digital signal in response to the sixth digital signal.

12. The phase locked loop circuit according to claim 11.

13. The oscillator varies a frequency of the first digital signal in response to the sixth digital signal without depending on environmental information.

13. The phase locked loop circuit according to claim 12.

14. A phase locked loop circuit according to any one of claims 1 to 8, a physical quantity calculation unit that calculates a physical quantity based on at least one of the output signal of the resonator element, the output signal of the oscillator, and the control signal, Sensing device.

15. the resonant element is a MEMS (Micro Electro Mechanical Systems) resonant element, the MEMS resonant element vibrates in two-dimensional directions at the resonant frequency to output a displacement signal in a first direction and a displacement signal in a second direction; the phase detector detects, as the phase error, a low-frequency component of a signal obtained by multiplying the output signal of the oscillator by the displacement signal in the first direction, and detects, as the phase error, a low-frequency component of a signal obtained by multiplying the output signal of the oscillator by the displacement signal in the second direction; The physical quantity calculation unit calculates the physical quantity based on the phase error detected by the phase detector. The sensing device according to claim 14.

16. An oscillator that varies the frequency in response to a control signal; a resonant element that resonates at a predetermined resonant frequency and outputs a signal having a phase shift of 90 degrees from an output signal of the oscillator at the resonant frequency; a phase detector for detecting a phase error between the output signal of the resonator element and the output signal of the oscillator; a feedback control unit that controls a frequency of an output signal of the oscillator by proportional control and integral control according to the phase error; an environmental information acquisition unit that acquires environmental information; a control signal correction unit that corrects the control signal by adding a correction term corresponding to the environmental information to an output signal of the feedback control unit; a physical quantity calculation unit that calculates a physical quantity based on at least one of the output signal of the resonator element, the output signal of the oscillator, and the control signal; a frequency detector for detecting a frequency of an output signal of the oscillator; a frequency error detector that detects a frequency error between the frequency detected by the frequency detector and a reference frequency when the acceleration is zero, The physical quantity calculation unit detects the physical quantity including the acceleration based on the frequency error detected by the frequency error detector. Sensing device.

17. An oscillator that varies the frequency in response to a control signal; a resonant element that resonates at a predetermined resonant frequency and outputs a signal having a phase shift of 90 degrees from an output signal of the oscillator at the resonant frequency; a phase detector for detecting a phase error between the output signal of the resonator element and the output signal of the oscillator; a feedback control unit that controls a frequency of an output signal of the oscillator by proportional control and integral control according to the phase error; an environmental information acquisition unit that acquires environmental information; a control signal correction unit that corrects the control signal by adding a correction term corresponding to the environmental information to an output signal of the feedback control unit; a physical quantity calculation unit that calculates a physical quantity based on at least one of the output signal of the resonator element, the output signal of the oscillator, and the control signal; a multiplier that multiplies the control signal by a frequency conversion coefficient specific to the oscillator; a frequency error detector for detecting a frequency error between a frequency of an output signal of the multiplier and a reference frequency when acceleration is zero; The physical quantity calculation unit detects the physical quantity including the acceleration based on the frequency error detected by the frequency error detector. Sensing device.

18. the physical quantity calculation unit calculates the acceleration by dividing the frequency error detected by the frequency error detector by an acceleration coefficient specific to the resonator element.

18. The sensing device according to claim 16 or 17.

19. the oscillator, the phase detector, the feedback control unit, the control signal correction unit, and the physical quantity calculation unit are digital circuits, the resonant element is an analog circuit, the output signal of the oscillator, the output signal of the feedback control unit, the environmental information acquired by the environmental information acquisition unit, the control signal generated by the control signal correction unit, and the physical quantity calculated by the physical quantity calculation unit are digital signals.

19. The sensing device according to any one of claims 14 to 18.

20. a digital-to-analog converter that converts the first digital signal output from the oscillator into an analog oscillation signal to be input to the resonator element; an AD converter that converts the output signal of the resonator element into a second digital signal, wherein the phase detector generates a third digital signal representing the phase error based on the first digital signal and the second digital signal, the feedback control unit performs proportional control and integral control in response to the third digital signal to generate a fourth digital signal; the control signal correction unit adds a fifth digital signal corresponding to the correction term and the fourth digital signal to generate a sixth digital signal corresponding to the control signal; the oscillator varies a frequency of the first digital signal in response to the sixth digital signal; the physical quantity calculation unit calculates the physical quantity based on at least one of the first digital signal, the second digital signal, and the sixth digital signal.

20. The sensing device of claim 19.

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