Semiconductor Device

Abstract

A semiconductor device comprising a first conductive pattern and a second conductive pattern which are provided on a main surface of an insulating substrate, and a first semiconductor element and a second semiconductor element which are each disposed on the first conductive pattern. The first conductive pattern includes a first input region overlapping the first semiconductor element, and a second input region overlapping the second semiconductor element. An output electrode of the first semiconductor element and an output electrode of the second semiconductor element are interconnected by means of a first wiring member. An output electrode of the second semiconductor element and the second conductive pattern are interconnected by means of a second wiring member. The ratio of a current that flows from the second input region to the second conductive pattern via the second semiconductor element, with respect to a current that flows from the first input region to the second conductive pattern via the first semiconductor element, is 0.90 to 1.10 inclusive.

Description

[Technical field]

[0001] The present disclosure relates to a semiconductor device. [Background technology]

[0002] Conventionally, in order to miniaturize semiconductor devices and increase current, techniques have been developed for arranging multiple semiconductor elements on a conductive pattern with efficient area utilization. For example, the following Patent Document 1 discloses an arrangement in which a conductive pattern on an insulating substrate and multiple semiconductor elements are aligned in one direction. The semiconductor elements have a first main electrode formed on the back surface facing the insulating substrate and a second main electrode formed on the front surface. The second main electrodes of the multiple semiconductor elements are connected by stitch bonding a wire. The second main electrodes of the multiple semiconductor elements and the conductive pattern are connected by further stitch bonding a wire connecting the second main electrodes of the multiple semiconductor elements to the conductive pattern. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2019 / 044748 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned conventional technology, since it is not necessary to provide wires connecting the second main electrodes and the conductive pattern for each of the semiconductor elements, the mountable area of ​​the semiconductor elements is increased, and a large capacity semiconductor device is realized. On the other hand, the resistance values ​​in the paths from the second main electrodes of the semiconductor elements to the conductive patterns become unbalanced, and the currents flowing through the respective semiconductor elements become unbalanced. As a result, the temperature of the wire bonding portion becomes relatively high in the semiconductor elements with a relatively large current, and the power cycle resistance (the number of destruction cycles caused by repeated on / off of a predetermined current), short circuit resistance and I 2The t-resistance and other characteristics may decrease, and the long-term reliability of the semiconductor device may not be maintained. [Means for solving the problem]

[0005] In order to solve the above problems, a semiconductor device disclosed herein includes a conductive pattern having a first conductive pattern and a second conductive pattern, and a first semiconductor element and a second semiconductor element each arranged on the first conductive pattern, the first conductive pattern including a first input region overlapping with the first semiconductor element and a second input region overlapping with the second semiconductor element, each of the first semiconductor element and the second semiconductor element being provided on a first main surface facing the first conductive pattern and including a first main electrode electrically connected to the first conductive pattern, and a second main electrode provided on a second main surface opposite the first main surface, the second main electrode of the first semiconductor element and the second main electrode of the second semiconductor element are connected to each other by a first wiring member which is a wire or a ribbon, the second main electrode of the second semiconductor element and the second conductive pattern are connected to each other by a second wiring member which is the wire or the ribbon, and a ratio (i2 / i1) of a current (i2) flowing from the second input region to the second conductive pattern via the second semiconductor element to a current (i1) flowing from the first input region to the second conductive pattern via the first semiconductor element is 0.90 or more and 1.10 or less.

[0006] Also, a semiconductor device according to the present disclosure includes a conductive pattern having a first conductive pattern and a second conductive pattern, and a first semiconductor element and a second semiconductor element each arranged on the first conductive pattern, the first conductive pattern including a first input region overlapping the first semiconductor element and a second input region overlapping the second semiconductor element, each of the first semiconductor element and the second semiconductor element including a first main electrode provided on a first main surface facing the first conductive pattern and electrically connected to the first conductive pattern, and a second main electrode provided on a second main surface opposite to the first main surface, The second main electrode of the second semiconductor element is connected to the second conductive pattern by a first wiring member which is a wire or ribbon, the second main electrode of the second semiconductor element and the second conductive pattern are connected to each other by the second wiring member which is the wire or the ribbon, and a ratio (R1 / R2) of a resistance (R1) in a first path from the first input region to the connection point via the first semiconductor element and the first wiring member to a resistance (R2) in a second path from the second input region to the connection point between the second main electrode of the second semiconductor element and the second wiring member is 0.90 or more and 1.10 or less. [Brief description of the drawings]

[0007] [Figure 1] 1 is a plan view of a semiconductor device 10 according to an embodiment. [Diagram 2] FIG. 2 is a plan view of a semiconductor unit 20 according to the embodiment. [Diagram 3] 1 is a cross-sectional view of a semiconductor unit 20 according to an embodiment. [Figure 4] 1 is a diagram showing a circuit configuration formed by a semiconductor unit 20 according to an embodiment. [Diagram 5] 4 is an enlarged cross-sectional view of a region Z in the cross-sectional view of the semiconductor unit shown in FIG. [Figure 6] 4 is an enlarged cross-sectional view of a region Z in the cross-sectional view of the semiconductor unit shown in FIG. [Figure 7] 4 is an enlarged cross-sectional view of a region Z in the cross-sectional view of the semiconductor unit shown in FIG. [Figure 8] FIG. 6 is an equivalent circuit diagram of the configuration shown in FIG. [Figure 9] 1 is a plan view of a semiconductor device 10 in which a trench T is provided. [Figure 10] 1 is a graph showing an example of an IV curve of a semiconductor element at room temperature. [Figure 11] 1 is a graph showing an example of an IV curve of a semiconductor element at 175° C. [Figure 12] 1 is a graph showing the ranges of resistances Rw2 and Rp3. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. Note that the dimensions and scale of each part in the drawings may differ from the actual ones. The embodiments described below are preferred specific examples of the present disclosure. For this reason, various technically preferable limitations are attached to the following embodiments. However, the scope of the present disclosure is not limited to these forms unless otherwise specified in the following description to limit the present disclosure.

[0009] FIG. 1 is a plan view of a semiconductor device 10 according to an embodiment. The semiconductor device 10 has a heat dissipation substrate 11 and semiconductor units 20a to 20f electrically connected by bonding wires 12a to 12e. The heat dissipation substrate 11 is made of, for example, aluminum, iron, silver, copper, or an alloy containing at least one of these, which has excellent thermal conductivity. In addition, the surface of the heat dissipation substrate 11 may be plated with a material such as nickel to improve corrosion resistance. In addition to nickel, nickel-phosphorus alloy, nickel-boron alloy, etc. may be used as a material for plating. The heat dissipation substrate 11 is appropriately provided with mounting holes used for mounting to an external device, contact regions for inputting and outputting current to and from the semiconductor units 20a to 20f, etc.

[0010] The semiconductor units 20a-20f are arranged in a row on the front surface of the heat dissipation substrate 11 via, for example, solder or silver solder. The semiconductor units 20a-20f have semiconductor elements (for example, semiconductor elements 25-28 described later) arranged therein to realize required functions. The number of semiconductor units 20a-20f shown in FIG. 1 is an example, and any number of semiconductor units can be installed as required. In the following, the semiconductor units 20a-20f are collectively referred to as semiconductor unit 20, and details thereof will be described later. The bonding wires 12a-12e are formed of a metal such as aluminum or copper having excellent conductivity, or an alloy containing at least one of these metals.

[0011] Next, the configuration of the semiconductor unit 20 will be described with reference to Figs. 2 to 4. Fig. 2 is a plan view of the semiconductor unit 20 according to the embodiment, and Fig. 3 is a cross-sectional view of the semiconductor unit 20 according to the embodiment. Fig. 3 shows a cross section taken along dashed line CC in Fig. 2. However, the bonding wires 29 are omitted from Fig. 3. Fig. 4 is a circuit diagram of the semiconductor unit 20 according to the embodiment.

[0012] In this embodiment, the semiconductor unit 20 has a rectangular shape in a plan view. More specifically, the insulating substrate 22 constituting the semiconductor unit 20 has a rectangular shape having a pair of long sides facing each other and a pair of short sides facing each other in a plan view, and other components of the semiconductor unit 20 are disposed on its main surfaces (front and back surfaces). In this embodiment, the X-axis is taken along the short sides of the semiconductor unit 20 in the plan view, and the Y-axis is taken along the long sides. The Y-axis is an example of the first axis. In this embodiment, the plan view is synonymous with viewing an object from a direction perpendicular to the front surface of the insulating substrate 22.

[0013] The semiconductor unit 20 includes a first arm portion (upper arm portion) A and a second arm portion (lower arm portion) B, forming upper and lower arm portions. As shown in FIG. 4, the first arm portion A is connected to an external connection terminal P (input P) that is connected to the positive pole of an external power supply (not shown), and constitutes a circuit that supplies current from the positive pole (high potential terminal) of the external power supply to a load. The load is connected to an external connection terminal U (output U). The second arm portion B is connected to an external connection terminal N (input N) that is connected to the negative pole of the external power supply, and constitutes a circuit that draws current from the load to the negative pole (low potential terminal) of the external power supply. As shown in FIG. 2 and FIG. 3, the semiconductor unit 20 includes a circuit board 21 and semiconductor elements 25 to 28 provided on the front surface of the circuit board 21. The semiconductor elements 26 and 27 are examples of a "first semiconductor element", and the semiconductor elements 25 and 28 are examples of a "second semiconductor element". The semiconductor unit 20 is disposed on the heat dissipation board 11 by bonding the rear surface of the circuit board 21 to the heat dissipation board 11 via solder, silver solder or the like (not shown) (see FIG. 1).

[0014] In this embodiment, the semiconductor elements 25 to 28 are configured to include silicon or silicon carbide, and are RC-IGBT (Reverse Conducting Insulated Gate Bipolar Transistor) switching elements in which an IGBT (Insulated Gate Bipolar Transistor) and an FWD (Free Wheeling Diode) are configured in one chip. The RC-IGBT has a circuit in which an IGBT and an FWD are connected in reverse parallel.

[0015] In this embodiment, the semiconductor elements 25-28 are rectangular in plan view. More specifically, the front and back surfaces of the semiconductor elements 25-28 are rectangular in plan view having a pair of opposing long sides and a pair of opposing short sides. Each of the semiconductor elements 25-28 is disposed such that its long sides extend along the X-axis and its short sides extend along the Y-axis.

[0016] The semiconductor elements 25 to 28 have, for example, an input electrode (collector electrode, for example, in FIG. 1) as a first main electrode on the back surface which is the first main surface. 3 The semiconductor elements 25-28 are provided with control electrodes (gate electrodes 25a-28a) and output electrodes (emitter electrodes) 25b-28b, which are second main electrodes, on their front surfaces, which are second main surfaces. The gate electrodes 25a-28a are located near one long side of the front surfaces of the semiconductor elements 25-28 and near the center of the long side. The output electrodes 25b-28b are formed on the front surfaces of the semiconductor elements 25-28 in a portion other than the gate electrodes 25a-28a. The front surfaces of the semiconductor elements 25-28 are provided with gate runners 25c-28c electrically connected to the gate electrodes 25a-28a. The gate runners 25c-28c are provided to transmit gate control signals supplied to the gate electrodes 25a-28a to the entire semiconductor elements 25-28 without delay. In this embodiment, the gate runners 25c-28c are arranged near the centers of the short sides of the semiconductor elements 25-28 and parallel to the long sides of the semiconductor elements 25-28.

[0017] The circuit board 21 has an insulating substrate 22 and a metal plate 23 bonded to the back surface of the insulating substrate 22. The insulating substrate 22 is made of a highly thermally conductive ceramic such as aluminum oxide, aluminum nitride, or silicon nitride. The metal plate 23 is made of a metal such as aluminum, iron, silver, copper, or an alloy containing at least one of these, which has excellent thermal conductivity. Furthermore, the circuit board 21 has conductive patterns 24a-24e formed on the front surface of the insulating substrate 22. The conductive patterns 24a-24e are made of a metal such as copper or a copper alloy, which has excellent conductivity. The surfaces of the conductive patterns 24a-24e may be plated with a material such as nickel to improve corrosion resistance. In addition to nickel, a nickel-phosphorus alloy or a nickel-boron alloy may be used as a material for plating. The conductive patterns 24a-24e have a thickness of, for example, 0.1 mm or more and 1 mm or less. For example, a DCB (Direct Copper Bonding) substrate or an AMB (Active Metal Brazed) substrate can be used as the circuit board 21 having such a configuration. The circuit board 21 can conduct heat generated by the semiconductor elements 25-28 to the heat dissipation substrate 11 via the conductive patterns 24a, 24c, the insulating substrate 22, and the metal plate 23. The circuit board 21 may be, for example, a metal base substrate or a lead frame on which a die pad is formed.

[0018] The conductive pattern 24a constitutes a collector pattern of the first arm portion A. The conductive pattern 24a is an example of a "first conductive pattern" in the first arm portion A. The collector pattern is a conductive pattern to which an input electrode (collector electrode) of a semiconductor element (semiconductor elements 25, 26 in the first arm portion A) is connected. The conductive pattern 24a has a substantially rectangular shape, and a portion including a contact region 24a1 protrudes downward in FIG. 2. As shown in FIG. 4 and other figures, an external connection terminal P that connects to a positive electrode of an external power supply is connected to the contact region 24a1. On the conductive pattern 24a, the semiconductor elements 25, 26 are arranged at intervals along the Y axis. More specifically, the semiconductor elements 25, 26 have a first long side and a second long side. The first long side is arranged adjacent to the gate electrodes 25a, 26a and adjacent to a connection region 24b1 of the conductive pattern 24b described later. The second long side is disposed at a position away from the gate electrodes 25a, 26a and adjacent to a connection region 24c3 of the conductive pattern 24c described later. Therefore, the gate electrodes 25a, 26a face the short side (lower side in FIG. 2) of the insulating substrate 22. The conductive pattern 24a and the semiconductor elements 25, 26 are joined via the solder layers 30 (30A, 30B), and the collector electrodes formed on the rear surfaces of the semiconductor elements 25, 26 are electrically connected to the conductive pattern 24a.

[0019] The number of semiconductor elements arranged on the first arm portion A may be three or more. In that case, the semiconductor elements are also arranged such that the gate electrodes are arranged in a row facing the connection region 24b1 of the conductive pattern 24b to which the gate electrodes are connected.

[0020] The conductive pattern 24b constitutes the control pattern of the first arm portion A. The control pattern is a conductive pattern to which the control electrodes (gate electrodes) of the semiconductor elements (semiconductor elements 25, 26 in the first arm portion A) are connected. The conductive pattern 24b has a connection region 24b1 located on an extension line of the gate electrodes 25a, 26a of the semiconductor elements 25, 26 aligned along the Y axis. A bonding wire 29a connected to the gate electrodes 25a, 26a of the semiconductor elements 25, 26 is connected to the connection region 24b1. The conductive pattern 24b also has a contact region 24b2 to which an external connection terminal G1 for a gate is connected. In FIG. 2, the conductive pattern 24b extends perpendicularly to the arrangement of the semiconductor elements 25, 26 from a portion including the connection region 24b1 along the lower short side (X axis) of the insulating substrate 22.

[0021] The conductive pattern 24c constitutes an emitter pattern of the first arm portion A and a collector pattern of the second arm portion B. The conductive pattern 24c is an example of a "second conductive pattern" in the first arm portion A. The conductive pattern 24c is also an example of a "first conductive pattern" in the second arm portion B. The emitter pattern is a conductive pattern to which an output electrode (emitter electrode) of a semiconductor element (semiconductor elements 25, 26 in the first arm portion A) is connected. The conductive pattern 24c has a substantially rectangular first region 24c1 extending along the right long side of the insulating substrate 22 and a substantially rectangular second region 24c2 extending along the upper short side of the insulating substrate 22, and has a substantially L-shape overall.

[0022] The second region 24c2 constitutes the emitter pattern of the first arm portion A. In the second region 24c2, a connection region 24c3 is provided on an extension line along the Y axis from the semiconductor elements 25, 26 to which the bonding wire 29c extending from the output electrodes 25b, 26b of the semiconductor elements 25, 26 and the single bonding wire 29cx extending from the output electrode 25b of the semiconductor element 25 are connected. The second region 24c2 is provided with a contact region 24c4 to which an external connection terminal U for connecting to a load is connected.

[0023] The first region 24c1 constitutes the collector pattern of the second arm portion B. The semiconductor elements 27 and 28 are arranged in the first region 24c1 at an interval along the Y axis. More specifically, the semiconductor elements 27 and 28 have a third long side and a fourth long side. The third long side is arranged close to the gate electrodes 27a and 28a. The fourth long side is arranged close to a connection region 24d1 of the conductive pattern 24d described later and at a position away from the gate electrodes 27a and 28a. Therefore, the gate electrodes 27a and 28a face the short side (upper side in FIG. 2) of the insulating substrate 22. The first region 24c1 of the conductive pattern 24c and the semiconductor elements 27 and 28 are joined via a solder layer (not shown), and the collector electrodes formed on the back surfaces of the semiconductor elements 27 and 28 are electrically connected to the conductive pattern 24c.

[0024] The number of semiconductor elements arranged on the second arm portion B may be three or more. In that case, too, the semiconductor elements are arranged such that the gate electrodes are arranged in a row facing the connection region 24e1 of the conductive pattern 24e to which the gate electrodes are connected.

[0025] The conductive pattern 24d constitutes the control pattern of the second arm portion B. The conductive pattern 24d has a connection region 24d1 located on an extension line of the gate electrodes 27a, 28a of the semiconductor elements 27, 28 aligned along the Y-axis. A bonding wire 29b connected to the gate electrodes 27a, 28a of the semiconductor elements 27, 28 is connected to the connection region 24d1. The conductive pattern 24d also has a contact region 24d2 to which an external connection terminal G2 for a gate is connected. In FIG. 2, the conductive pattern 24d extends from a portion including the connection region 24d1 along the upper short side (X-axis) of the insulating substrate 22 perpendicular to the arrangement of the semiconductor elements 27, 28.

[0026] The conductive pattern 24e constitutes an emitter pattern of the second arm portion B. The conductive pattern 24e is an example of a "second conductive pattern" in the second arm portion B. In the conductive pattern 24e, a connection region 24e1 is provided on an extension line along the Y axis from the semiconductor elements 27 and 28 to which a bonding wire 29d extending from the output electrodes 27b and 28b of the semiconductor elements 27 and 28 and a single bonding wire 29dx extending from the output electrode 28b of the semiconductor element 28 are connected. The conductive pattern 24e is provided with a contact region 24e2 to which an external connection terminal (not shown) is connected. As shown in FIG. 4 and other figures, an external connection terminal N that connects to the negative pole of an external power supply is connected to the contact region 24e2.

[0027] The bonding wires 29a to 29d (including the single bonding wires 29cx and 29dx) are an example of wiring members that connect the semiconductor elements 25 to 28 and the conductive pattern 24. The bonding wires 29a to 29d are made of a metal with excellent conductivity, such as aluminum or copper, or an alloy containing at least one of these metals. The diameter of the bonding wires 29a to 29d is preferably 100 μm or more and 1 mm or less.

[0028] In this embodiment, a wire is used as the wiring member, but a ribbon wire may also be used as the wiring member. A wire is a linear member, and current flows one-dimensionally in the wire. In contrast, a ribbon is a band-shaped member having a certain width, and current flows two-dimensionally in the ribbon. In addition, a lead frame is known as a wiring member in a semiconductor device. A lead frame is a plate-shaped member, and current flows three-dimensionally in the lead frame. Although a lead frame has an advantage such as a smaller resistance than a wire or ribbon, it is difficult to apply to this embodiment because the process becomes complicated when connecting to the semiconductor elements 25 to 28 and the conductive pattern 24. Therefore, the wiring member in this embodiment is a wire or a ribbon.

[0029] The bonding wire 29a is a single wire stitch-bonded to the gate electrode 25a of the semiconductor element 25, the gate electrode 26a of the semiconductor element 26, and the connection region 24b1. Stitch bonding is a bonding in which three or more bonding points are continuously connected with a single wire from the first bonding through one or more intermediate bonding points to the last bonding. The bonding wire 29a is continuously bonded to the gate electrode 25a, the gate electrode 26a, and the connection region 24b1, and electrically connects them. The bonding wire 29a functions as a gate wire through which a control current flows to the gate electrodes 25a and 26a. As shown in FIG. 2, the gate electrode 25a, the gate electrode 26a, and the connection region 24b1 are arranged in a row along the Y-axis. Therefore, the bonding wire 29a also extends along the Y-axis.

[0030] The bonding wire 29b is a single wire stitch-bonded to the gate electrode 28a of the semiconductor element 28, the gate electrode 27a of the semiconductor element 27, and the connection region 24d1. The bonding wire 29b is continuously bonded to the gate electrode 28a, the gate electrode 27a, and the connection region 24d1, and electrically connects them. The bonding wire 29b functions as a gate wire through which a control current flows to the gate electrodes 27a and 28a. As shown in FIG. 2, the gate electrode 28a, the gate electrode 27a, and the connection region 24d1 are arranged in a line along the Y axis. Therefore, the bonding wire 29b also extends along the Y axis.

[0031] The bonding wire 29c electrically connects the output electrode 25b of the semiconductor element 25, the output electrode 26b of the semiconductor element 26, and the conductive pattern 24c. The bonding wire 29c functions as an emitter wire through which an output current flows from the output electrodes (emitter electrodes) 25b, 26b. More specifically, the bonding wire 29c is formed by stitch bonding one wire at five locations in total: two locations on the output electrode 26b, two locations on the output electrode 25b, and one location on the connection region 24c3. The locations where stitches are formed by stitch bonding (hereinafter referred to as "stitch locations") are aligned along the short sides of the semiconductor elements 25, 26, i.e., along the Y axis, and therefore the bonding wire 29c extends along the Y axis in the same manner as the bonding wire 29a. The stitch locations on the output electrodes 25b, 26b are located on opposite sides across the gate runners 25c, 26c.

[0032] FIG. 5 is an enlarged cross-sectional view of a region Z in the cross-sectional view of the semiconductor unit shown in FIG. 3. For example, as shown in FIG. 5, one bonding wire 29c has five bonding points, and is divided into four partial wires 29c1 to 29c4 with three stitch points as boundaries. The partial wire 29c1 is a portion of the bonding wire 29c between the bonding point P1 on the output electrode 26b of the semiconductor element 26 and the stitch point P2 on the output electrode 26b separated from the bonding point P1 along the Y axis. The partial wire 29c2 is a portion of the bonding wire 29c between the stitch point P2 on the output electrode 26b of the semiconductor element 26 and the stitch point P3 on the output electrode 25b of the semiconductor element 25. The partial wire 29c2 is an example of a "first wiring member." The partial wire 29c3 is a portion of the bonding wire 29c between a stitch point P3 on the output electrode 25b of the semiconductor element 25 and a stitch point P4 on the output electrode 25b that is separated from the stitch point P3 along the Y-axis. The partial wire 29c4 is a portion of the bonding wire 29c between a stitch point P4 on the output electrode 25b of the semiconductor element 25 and a bonding point P5 on the connection region 24c3 of the conductive pattern 24c. The partial wire 29c4 is an example of a "second wiring member." Although FIG. 2 shows a case where the bonding wires 29c are four, the number of bonding wires 29c is arbitrary.

[0033] 2 and 5, two locations on the output electrode 26b, two locations on the output electrode 25b, and one location on the connection region 24c3 are stitch-bonded by one wire (bonding wire 29c), but this is not limited thereto. At least one location on the output electrode 26b, one location on the output electrode 25b, and one location on the connection region 24c3 may be stitch-bonded. Even in this case, the "first wiring member" may be a partial wire between the bonding location on the output electrode 26b closest to the output electrode 25b and the bonding location on the output electrode 25b closest to the output electrode 26b. Also, the "second wiring member" may be a partial wire between the bonding location on the output electrode 25b closest to the conductive pattern 24c (connection region 24c3) and the bonding location on the connection region 24c3 closest to the output electrode 25b.

[0034] The bonding wire 29d electrically connects the output electrode 27b, the output electrode 28b, and the conductive pattern 24e of the semiconductor element 27. The bonding wire 29d functions as an emitter wire through which the output current flows from the output electrodes (emitter electrodes) 27b, 28b. More specifically, the bonding wire 29d is formed by stitch bonding one wire at five locations in total: two locations on the output electrode 27b, two locations on the output electrode 28b, and one location on the connection region 24e1. The stitch locations are aligned along the short sides of the semiconductor elements 27, 28, i.e., along the Y axis, and therefore the bonding wire 29d extends along the Y axis in the same manner as the bonding wire 29b. The stitch locations on the output electrodes 27b, 28b are located on opposite sides across the gate runners 27c, 28c.

[0035] The single bonding wire 29cx is bonded to one location on the output electrode 25b of the semiconductor element 25 and one location on the connection region 24c3 of the conductive pattern 24c, and electrically connects the output electrode 25b and the conductive pattern 24c. The single bonding wire 29cx is an example of a "third wiring member". The single bonding wire 29cx functions as an emitter wire through which an output current flows from the output electrode (emitter electrode) 25b. The single bonding wire 29cx is bonded to a position on the opposite side of the output electrode 25b across the gate electrode 25a and the gate runner 25c, and to the connection region 24c3. The bonding location is disposed along the short side of the semiconductor element 25, i.e., the Y axis, and therefore the single bonding wire 29cx extends along the Y axis like the bonding wire 29c. Although FIG. 2 shows a case where there is one single bonding wire 29cx, two or more single bonding wires 29cx may be provided.

[0036] The single bonding wire 29dx is bonded to one location on the output electrode 28b of the semiconductor element 28 and one location on the connection region 24e1 of the conductive pattern 24e, electrically connecting the output electrode 28b and the conductive pattern 24e. The single bonding wire 29dx functions as an emitter wire through which an output current flows from the output electrode (emitter electrode) 28b. The single bonding wire 29dx is bonded to the gate electrode 24e1 of the output electrode 28b. 28 A and Gate Runner 28 The bonding points are arranged along the short side of the semiconductor element 28, i.e., along the Y axis, and thus the single bonding wire 29 d Like the bonding wire 29d, x extends along the Y-axis. Although the case where there is one single bonding wire 29dx is shown in Fig. 2, two or more single bonding wires 29dx may be provided.

[0037] The inverter circuit shown in Fig. 4 is configured by the semiconductor elements 25-28, the conductive patterns 24a-24e, the bonding wires 29a, 29b, 29c, 29d, and the single bonding wires 29cx, 29dx. The first arm portion (upper arm portion) A is configured by the semiconductor elements 25, 26, the conductive patterns 24a, 24b, 24c, and the bonding wires 29a, 29c (including the single bonding wire 29cx). The second arm portion (lower arm portion) B is configured by the semiconductor elements 27, 28, the conductive patterns 24c, 24d, 24e, and the bonding wires 29b, 29d (including the single bonding wire 29dx). In the semiconductor unit 20, an external connection terminal P connected to the positive electrode of an external power supply is connected to the contact region 24a1, and an external connection terminal N connected to the negative electrode of an external power supply is connected to the contact region 24e2. In addition, the semiconductor unit 20 has an external connection terminal U connected to a load external to the semiconductor device 10, which is connected to the contact region 24c4. This allows the semiconductor unit 20 to function as an inverter. For example, the semiconductor unit 20 may have external connection terminals (not shown) bonded to the contact regions 24a1, 24c4, and 24e2, and the semiconductor elements 25-28 and bonding wires 29a-29d on the circuit board 21 sealed with a sealing member. In this case, the sealing member may be, for example, a thermosetting resin such as maleimide-modified epoxy resin, maleimide-modified phenolic resin, or maleimide resin.

[0038] In this manner, in the semiconductor unit 20 according to the present embodiment, the output electrodes 25b, 26b of the semiconductor elements 25, 26 constituting the first arm portion A and the connection region 24c3 of the conductive pattern 24c are arranged in a line. These are connected by the bonding wire 29c stitch-bonded between the output electrode 26b, the output electrode 25b, and the connection region 24c3 of the conductive pattern 24c. That is, in the semiconductor device 10, the semiconductor element 25 is arranged at a distance along the Y axis from the conductive pattern 24c, the semiconductor element 26 is arranged at a distance along the Y axis from the semiconductor element 25, and the partial wire 29c2 and the partial wire 29c4 extend along the Y axis. Thus, the bonding wire 29c serves as both the emitter wire of the semiconductor element 25 and the emitter wire of the semiconductor element 26. This makes it possible to reduce the connection area 24c3 compared to connecting the output electrode 25b of the semiconductor element 25 to the conductive pattern 24c, and the output electrode 26b of the semiconductor element 26 to the conductive pattern 24c with separate wires, thereby enabling the mounting area of ​​the semiconductor elements 25 and 26 to be increased accordingly.

[0039] In this embodiment, the output electrodes 25b, 26b of the semiconductor elements 25, 26 and the connection region 24c3 of the conductive pattern 24c are connected by stitch bonding one bonding wire 29c. That is, in the semiconductor device 10, the partial wire 29c2 and the partial wire 29c4 are a single wire (bonding wire 29c) stitch bonded to the output electrode 26b of the semiconductor element 26, the output electrode 25b of the semiconductor element 25, and the conductive pattern 24c. This allows the multiple semiconductor elements 25, 26 to be easily connected, and the manufacturing efficiency of the semiconductor device 10 can be improved.

[0040] In this embodiment, in addition to the bonding wire 29c, a single bonding wire 29cx is provided that connects only the output electrode 25b of the semiconductor element 25 and the conductive pattern 24c. That is, in addition to the bonding wire 29c including the partial wire 29c2 and the partial wire 29c4, the semiconductor device 10 further includes a single bonding wire 29cx that connects the output electrode 25b of the semiconductor element 25 and the conductive pattern 24c. This allows a part of the current flowing through the conductive pattern 24c via the semiconductor element 25 to flow through the single bonding wire 29cx, thereby suppressing a temperature rise at the joint between the partial wire 29c4 and the semiconductor element 25.

[0041] In this embodiment, each of the semiconductor elements 25 and 26 is rectangular in plan view, and the semiconductor elements 25 and 26 are arranged along the short sides of the rectangle. That is, in the semiconductor device 10, each of the semiconductor elements 26 and 25 is rectangular in plan view having a pair of long sides facing each other and a pair of short sides facing each other, and is arranged on the conductive pattern 24a so that the short sides are along the Y axis. As described above, the output electrodes 25b and 26b of the semiconductor elements 25 and 26 and the connection region 24c3 of the conductive pattern 24c are arranged in a line, and the bonding wire 29c is also arranged along this line. Therefore, the bonding wire 29c extends parallel to the short sides of the semiconductor elements 25 and 26. Therefore, it is possible to arrange a plurality of bonding wires 29c along the long sides of the semiconductor elements 25 and 26, and it is possible to increase the number of wirings of the bonding wires 29c compared to the case where they are arranged along the short sides.

[0042] In this embodiment, the gate runners 25c, 26c are provided on the front surface of each of the semiconductor elements 25, 26, and the gate runners 25c, 26c are arranged parallel to the long sides of the semiconductor elements 25, 26. That is, in the semiconductor device 10, the output electrode 26b of the semiconductor element 26 and the output electrode 25b of the semiconductor element 25 are provided with the gate electrodes 26a, 25a and the gate runners 26c, 25c electrically connected to the gate electrodes 26a, 25a, and the gate runners 26c, 25c are arranged parallel to the long sides of the front surface. Since the gate runners 25c, 26c are arranged parallel to the long sides of the semiconductor elements 25, 26, it is possible to suppress a delay in the transmission of the control current to each part of the semiconductor elements 25, 26. Furthermore, since the gate runners 25c, 26c are arranged parallel to the long sides of the semiconductor elements 25, 26, it is possible to efficiently arrange the wires when arranging a plurality of bonding wires 29c along the long sides of the semiconductor elements 25, 26. Although the above description has been given taking the first arm portion A as an example, the same applies to the second arm portion B.

[0043] Next, the flow of current in the semiconductor unit 20 will be described with reference to Figures 6 to 8. In the following description, the flow of current in the first arm portion A will be described as an example, but the flow of current in the second arm portion B is similar.

[0044] Fig. 6 is a diagram showing a schematic diagram of a current flow in the cross-sectional view of Fig. 5. Fig. 5 and Fig. 6 show an insulating substrate 22, conductive patterns 24a and 24c formed on the insulating substrate 22, semiconductor elements 25 and 26 arranged on the conductive pattern 24a, a solder layer 30A that joins the semiconductor element 25 and the conductive pattern 24a, a solder layer 30B that joins the semiconductor element 26 and the conductive pattern 24a, and a bonding wire 29c. The solder layers 30A and 30B are examples of "connection layers".

[0045] A current I input from the external connection terminal P to the contact region 24a1 of the conductive pattern 24a flows through the conductive pattern 24a and first reaches the input region 24a2. The input region 24a2 is a region of the conductive pattern 24a that overlaps with the semiconductor element 26 located relatively close to the contact region 24a1 (relatively far from the conductive pattern 24c). The input region 24a2 is an example of a "first input region." A current i1, which is a part of the current I that reaches the input region 24a2, flows through the solder layer 30B to the input electrode 26d of the semiconductor element 26 and then to the output electrode 26b of the semiconductor element 26. The current i1 further flows to the partial wire 29c2 that connects the output electrode 26b and the output electrode 25b of the semiconductor element 25. Note that the current i1 may flow through the partial wire 29c1 that connects the inside of the output electrode 26b from the semiconductor element 26 to the connection point (stitch point P2, point ζ described later) of the partial wire 29c2. Then, the current i1 passes through a partial wire 29c3 that connects a plurality of points of the output electrode 25b, and reaches a connection point (stitch point P4, point θ described later) that is closest to the conductive pattern 24c (connection area 24c3) on the output electrode 25b. Note that a part of the current i1 may flow through the output electrode 25b instead of the partial wire 29c3. Then, the current i1 merges with a current i2 described later in the output electrode 25b, and the merged current I flows through a partial wire 29c4 that connects the output electrode 25b and the connection area 24c3 of the conductive pattern 24c, and reaches a contact area 24c4 that connects with the external connection terminal U. Here, the flow path of the divided current i1 is referred to as a path L1. That is, the path L1 may be from the input area 24a2, via the semiconductor element 26, to the output electrode 25b of the semiconductor element 25. More specifically, the path L1 may extend from the input region 24a2, through the solder layer 30B, between the electrodes of the semiconductor element 26 (between the input electrode 26d and the output electrode 26b), through the partial wire 29c2 connecting the output electrode 26b of the semiconductor element 26 and the output electrode 25b of the semiconductor element 25, to the stitch point P4, which is the connection point with the partial wire 29c4 on the output electrode 25b.

[0046] On the other hand, among the current I that has reached the input region 24a2, the current i2 other than the current i1 supplied to the semiconductor element 26 reaches the input region 24a4 via the intermediate region 24a3. The input region 24a4 is an example of a "second input region." The input region 24a4 is a region of the conductive pattern 24a that overlaps with the semiconductor element 25 located relatively far from the contact region 24a1 (relatively close to the conductive pattern 24c). The intermediate region 24a3 is a region of the conductive pattern 24a between the input region 24a2 and the input region 24a4. The current i2 that has reached the input region 24a4 flows through the solder layer 30A to the input electrode 25d of the semiconductor element 25, flows to the output electrode 25b of the semiconductor element 25, and reaches the connection point (stitch point P4, point θ described later) closest to the conductive pattern 24c (connection region 24c3) on the output electrode 25b. In addition, from the semiconductor element 25 to the stitch point P4 (point θ described later), the current i2 may flow through the partial wire 29c3 that connects within the output electrode 25b. Then, the current i2 merges with the current i1 at the output electrode 25b. The merged current I flows through the conductive pattern 24c via the partial wire 29c4 that connects the output electrode 25b and the connection region 24c3 of the conductive pattern 24c, and reaches the contact region 24c4 that connects with the external connection terminal U. Here, the flow path of the branched current i2 is referred to as a path L2. In other words, the path L2 may be from the input region 24a2 to the output electrode 25b of the semiconductor element 25 via the semiconductor element 25. More specifically, path L2 may extend from input region 24a2, through intermediate region 24a3, input region 24a4, solder layer 30A, between the electrodes of semiconductor element 25 (between input electrode 25d and output electrode 25b), and to stitch point P4, which is the connection point with partial wire 29c4 on output electrode 25b.

[0047] 6, point α is a location close to the contact region 24a1 in the input region 24a2 and may be approximately directly below the bonding location P1. Point β is a location close to the intermediate region 24a3 in the input region 24a2 and may be approximately directly below the stitch location P2. Point γ is a location close to the intermediate region 24a3 in the input region 24a4 and may be approximately directly below the stitch location P3. Point δ is a location close to the conductive pattern 24c in the input region 24a4 and may be approximately directly below the stitch location P4.

[0048] 6, point ε is the start point of the partial wire 29c1, which is the bonding point P1 in this embodiment. Point ζ is the end point of the partial wire 29c1 and the start point of the partial wire 29c2 which is the first wiring member, which is the stitch point P2 in this embodiment. Point η is the end point of the partial wire 29c2 and the start point of the partial wire 29c3, which is the stitch point P3 in this embodiment. Point θ is the end point of the partial wire 29c3 and the start point of the partial wire 29c4 which is the second wiring member, which is the stitch point P4 in this embodiment.

[0049] The points α to θ are conceptual points obtained by ignoring the resistances in the input electrodes 25d, 26d and the output electrodes 25b, 26b of the semiconductor elements 25, 26, respectively.

[0050] The resistance between the contact region 24a1 and the point α is defined as resistance Rp1. The resistance between the point α and the point β is defined as resistance Rp2. The resistance between the point β and the point γ is defined as resistance Rp3. The resistance between the point γ and the point δ is defined as resistance Rp4. Therefore, the resistances Rp1 to Rp4 may be resistances in the conductive pattern 24a. The resistance between the point α and the point ε is defined as resistance Rc1a. The resistance between the point β and the point ζ is defined as resistance Rc1b. Therefore, the resistances Rc1a and Rc1b may be the inter-electrode resistance of the semiconductor element 26 (the resistance between the input electrode 26d and the output electrode 26b) and the resistance of the solder layer 30B between the semiconductor element 26 and the conductive pattern 24a. The resistance between the point γ and the point η is defined as resistance Rc2a. The resistance between the point δ and the point θ is defined as resistance Rc2b. Therefore, the resistances Rc2a and Rc2b may be the inter-electrode resistance of the semiconductor element 25 (the resistance between the input electrode 25d and the output electrode 25b) and the resistance of the solder layer 30A between the semiconductor element 25 and the conductive pattern 24a. The resistance between the point ε and the point ζ is resistance Rw1. The resistance between the point ζ and the point η is resistance Rw2. The resistance between the point η and the point θ is resistance Rw3. The resistance between the point θ and the point P5 is resistance Rw4. Therefore, the resistances Rw1 to Rw4 may be resistances in the partial wires 29c1 to 29c4.

[0051] Here, when considering the imbalance of the currents flowing through the semiconductor elements 25 and 26, the resistances related to the wiring in the same semiconductor element, specifically, the resistances Rw1, Rp2, Rw3, and Rp4, can be ignored. This is because the resistances related to the wiring in the same semiconductor element hardly contribute to the imbalance of the currents between the semiconductor elements. Also, the resistances Rc1a and Rc1b, which are the inter-electrode resistance of the same semiconductor element 25 and the resistance of the solder layer 30A, can be considered to be the same. Therefore, the resistances Rc1a and Rc1b are referred to as resistance Rc1. Also, the resistances Rc2a and Rc2b, which are the inter-electrode resistance of the same semiconductor element 26 and the resistance of the solder layer 30B, can be considered to be the same. Therefore, the resistances Rc2a and Rc2b are referred to as resistance Rc2.

[0052] FIG. 7 is a diagram in which the resistance related to the wiring in the same semiconductor element is removed from FIG. 6. FIG. 8 is an equivalent circuit diagram of FIG. 7. As described above, in the first arm portion A, a current i1 flows through a path L1 from the input area 24a2 to the stitch point P4 via the semiconductor element 26, and a current i2 flows through a path L2 from the input area 24a4 to the stitch point P4 via the semiconductor element 25. Referring to FIG. 7 and FIG. 8, on the path L1, there are resistors Rc1 and Rw2 as resistors that contribute to the imbalance of the currents of the semiconductor elements 25 and 26. On the path L2, there are resistors Rp3 and Rc2 as resistors that contribute to the imbalance of the currents of the semiconductor elements 25 and 26. Therefore, according to Ohm's law, the ratio i2 / i1 of the current i2 flowing through the path L2 to the current i1 flowing through the path L1 can be expressed by the following formula (1).

[0053]

number

[0054] In the above formula (1), the resistance Rc1 includes the inter-electrode resistance of the semiconductor element 26 (resistance between the input electrode 26d and the output electrode 26b) and the resistance of the solder layer 30B. The resistance Rw2 includes the resistance of the partial wire 29c2, which is the first wiring member. The resistance Rc2 includes the inter-electrode resistance of the semiconductor element 25 (resistance between the input electrode 25d and the output electrode 25b) and the resistance of the solder layer 30A. The resistance Rp3 includes the resistance of the intermediate region 24a3.

[0055] In general, the resistivity of the bonding wire 29c is greater than that of the conductive pattern 24a. If the semiconductor elements 25 and 26 are of the same type and have common characteristics such as material or structure, the resistances Rc1 and Rc2 are equal. Therefore, in a typical design, the current i2 flowing through the path L2 is greater than the current i1 flowing through the path L1 (current i1<current i2). When such a current imbalance occurs, the temperature of the portion where the semiconductor element and the wire are bonded (hereinafter referred to as the "wire bonded portion") becomes relatively high in the semiconductor element through which the current flows (semiconductor element 25 in this embodiment), and the power cycle withstand capability, short circuit withstand capability, and I 2 The t tolerance and the like may decrease, and as a result, the long-term reliability of the semiconductor device 10 may not be maintained.

[0056] Here, the range of current that can suppress the decrease in various resistances of the semiconductor elements 25, 26 will be considered. As described above, the decrease in various resistances of the semiconductor elements 25, 26 is caused by the temperature rise of the wire bonding portion. The temperature difference of the wire bonding portion of the semiconductor elements 25, 26 is preferably within 20°C. In other words, if the temperature rise of the wire bonding portion of the semiconductor element with the larger current flowing among the semiconductor elements 25, 26 connected in parallel is T2 and the temperature rise of the semiconductor element with the smaller current is T1, it is preferable that T2-T1=ΔT≦20°C. In this case, for example, if T1=100°C, T2 needs to be suppressed within 120°C (that is, T2≦T1×1.20). The temperature rise of the wire is proportional to the square of the current. The square root of the above 1.20 is approximately 1.10. Therefore, the current i2 in the semiconductor element with the larger current needs to be kept within 110% (i2≦i1×1.10) of the current i1 in the semiconductor element with the smaller current. For this reason, in this embodiment, the ratio i2 / i1 of the current i2 flowing through the path L2 to the current i1 flowing through the path L1 is set to be 0.90 or more and 1.10 or less. For example, in the first arm portion A, the ratio i2 / i1 of the current i2 flowing from the input region 24a4 to the conductive pattern 24c via the semiconductor element 25 to the current i1 flowing from the input region 24a2 to the conductive pattern 24c via the semiconductor element 26 is 0.90 or more and 1.10 or less.

[0057] More preferably, the temperature difference between the wire bonding portions of the semiconductor elements 25 and 26 is preferably within 15°C. That is, it is preferable that T2-T1=ΔT≦15°C. In this case, for example, if T1=100°C, T2 needs to be suppressed within 115°C (that is, T2≦T1×1.15). The square root of the above 1.15 is approximately 1.07. Therefore, in this case, the current i2 in the semiconductor element with the larger current needs to be suppressed within 107% (i2≦i1×1.07) of the current i1 in the semiconductor element with the smaller current. That is, more preferably, the ratio i2 / i1 of the current i2 flowing through the path L2 to the current i1 flowing through the path L1 is set to 0.93 or more and 1.07 or less.

[0058] More preferably, the temperature difference between the wire bonding portions of the semiconductor elements 25 and 26 is within 10°C. That is, it is preferable that T2-T1=ΔT≦10°C. In this case, for example, if T1=100°C, T2 needs to be suppressed within 110°C (that is, T2≦T1×1.10). The square root of the above 1.10 is approximately 1.05. Therefore, in this case, the current i2 in the semiconductor element with the larger current needs to be suppressed within 105% (i2≦i1×1.05) of the current i1 in the semiconductor element with the smaller current. That is, more preferably, the ratio i2 / i1 of the current i2 flowing through the path L2 to the current i1 flowing through the path L1 is set to 0.95 or more and 1.05 or less.

[0059] As described above, if the resistance in path L1 is R1, then R1=Rc1+Rw2. If the resistance in path L2 is R2, then R2=Rc2+Rp3. Therefore, it can be said that the above formula (1) indicates the ratio R1 / R2 of the resistance R1 in path L1 to the resistance R2 in path L2. That is, in this embodiment, even if the ratio R1 / R2 of the resistance R1 in path L1 to the resistance R2 in path L2 is 0.90 or more and 1.10 or less, the same effect can be obtained.

[0060] In this case, more preferably, the ratio of resistance R1 to resistance R2 is R1 / R2 It is preferable that the ratio R1 / R2 of the resistance R1 to the resistance R2 is 0.95 or more and 1.05 or less.

[0061] In this embodiment, the parameter values ​​included in the above formula (1) are adjusted so that the current flows approximately evenly through the paths L2 and L1. Specifically, the parameter values ​​included in the above formula (1) are set so that the ratio i2 / i1 of the current i2 flowing through the path L2 to the current i1 flowing through the path L1 is 0.90 or more and 1.10 or less. As described above, the ratio i2 / i1 is more preferably 0.93 or more and 1.07 or less, and even more preferably 0.95 or more and 1.05 or less.

[0062] A method for adjusting the parameter values ​​included in the above formula (1) will be specifically described below. As described above, the resistivity of the bonding wire 29c is larger than that of the conductive pattern 24a, so in a typical design, the current i2 flowing through the path L2 is larger than the current i1 flowing through the path L1 (current i1<current i2). Therefore, to eliminate the current imbalance, at least one of [Method A] increasing the current i1 and [Method B] decreasing the current i2 may be performed. Note that Method A and Method B may be employed simultaneously. In other words, the current i1 may be increased and the current i2 may be decreased.

[0063] [Method A] Increase current i1 To increase the current i1, the resistance on the path L1 should be reduced. Specifically, at least one of [Method A-1] reducing the resistance Rc1 and [Method A-2] reducing the resistance Rw2 should be performed.

[0064] [Method A-1] Reduce resistance Rc1 Resistance Rc1 includes the sum of the resistance of solder layer 30B and the resistance of semiconductor element 26 (more specifically, the inter-electrode resistance of semiconductor element 26). Therefore, in order to reduce resistance Rc1, for example, a configuration in which the resistance of semiconductor element 26 is made smaller than the resistance of semiconductor element 25, or a configuration in which the resistance of solder layer 30B is made smaller than the resistance of solder layer 30A can be considered.

[0065] An example of a method for reducing the resistance Rc1 is as follows. (Example 1) As the semiconductor element 26, a low-speed RC-IGBT having a smaller conduction loss than the semiconductor element 25 is used. (Example 2) As the semiconductor element 26, an RC-IGBT having a larger saturation current density than the semiconductor element 25 is used. (Example 3) As the semiconductor element 26, an RC-IGBT having a lower threshold voltage Vth than the semiconductor element 25 is used. (Example 4) The thickness of the solder layer 30B is made thinner than the thickness of the solder layer 30A.

[0066] [Method A-2] Reduce resistance Rw2 The resistance Rw2 includes the resistance of the partial wire 29c2, which is the first wiring member. To reduce the resistance Rw2, for example, the total cross-sectional area, which is the sum of the cross-sectional areas of the bonding wires 29c, may be increased. At this time, if the resistance Rw2 is the same as the resistance Rp3 including the resistance of the intermediate region 24a3, the ratio i2 / i1 becomes 1, and the current i2 and the current i1 become equal. Note that the value of the resistance changes due to factors such as temperature. Therefore, in this case, "same" includes not only the case where the resistances are completely the same, but also the case where the resistances are substantially the same. The case where the resistances are substantially the same is, for example, the case where the resistances are predicted to be the same under a specified condition.

[0067] An example of a method for reducing the resistance Rw2 is as follows. (Example 1) The number of bonding wires 29c is increased. (Example 2) The diameter of the bonding wire 29c is increased. (Example 3) Instead of wire, a ribbon made of copper or the like is used as the wiring member.

[0068] [Method B] Decrease current i2 In order to reduce the current i2, the resistance on the path L2 may be increased. Specifically, at least one of the following may be performed: [Method B-1] increasing the resistance Rp3; or [Method B-2] increasing the resistance Rc2.

[0069] [Method B-1] Increase resistance Rp3 The resistance Rp3 includes the resistance of the intermediate region 24a3. To increase the resistance Rp3, for example, the cross-sectional area of ​​the intermediate region 24a3 may be reduced compared to the input region 24a2 upstream of the intermediate region 24a3.

[0070] Specifically, for example, as shown in FIG. 9, a trench T may be provided by removing a part of the conductive pattern 24c in the intermediate region 24a3. That is, in the method B-1, a trench may be provided in the intermediate region by removing a part of the first conductive pattern. The trench T shown in FIG. 9 is formed between the long sides of the adjacent semiconductor elements 25, 26 and along the long sides. Since the central parts of the semiconductor elements 25, 26 tend to generate heat, it is preferable that the trench T is formed near the central parts of the long sides of the semiconductor elements 25, 26. The trench T may be formed, for example, at the same time as the conductive patterns 24a to 24e are formed. That is, the conductive patterns 24a to 24e are formed by selectively removing (for example, etching) a metal layer formed on the insulating substrate 22. Specifically, for example, etching is performed in a state where the parts of the metal layer that will become the conductive patterns 24a to 24e are masked. In this process, the trench T can be formed by removing the metal layer by etching without masking the areas corresponding to the trench T. In trench T, the metal layer may be completely removed to expose the insulating substrate 22, or the metal layer may be removed to the extent that the thickness is thinner than other regions of the conductive pattern 24c (e.g., input region 24a2).

[0071] [Method B-2] Increase resistance Rc2 Resistance Rc2 includes the resistance of solder layer 30A and the resistance of semiconductor element 25. To increase resistance Rc2, for example, a configuration in which the resistance of semiconductor element 25 is made larger than the resistance of semiconductor element 26, or a configuration in which the resistance of solder layer 30A is made larger than the resistance of solder layer 30B, may be considered.

[0072] An example of a method for increasing the resistance Rc2 is as follows. (Example 1) As the semiconductor element 25, a high-speed RC-IGBT that has a larger conduction loss than the semiconductor element 26 is used. (Example 2) As the semiconductor element 25, an RC-IGBT having a smaller saturation current density than the semiconductor element 26 is used. (Example 3) As the semiconductor element 25, an RC-IGBT having a higher threshold voltage Vth than the semiconductor element 26 is used. (Example 4) The thickness of the solder layer 30A is made thicker than the thickness of the solder layer 30B.

[0073] Next, the range of each parameter in the above formula (1) will be considered. First, the resistances Rc1 and Rc2 will be considered. The resistance Rc1 includes the inter-electrode resistance Re1 of the semiconductor element 26 and the resistance Rs1 of the solder layer 30B. The resistance Rc2 includes the inter-electrode resistance Re2 of the semiconductor element 25 and the resistance Rs2 of the solder layer 30A.

[0074] 10 and 11 are graphs showing examples of IV curves of a semiconductor element. Fig. 10 is an IV curve when the element temperature is room temperature (25°C), and Fig. 11 is an IV curve when the element temperature is 175°C. In each graph, the horizontal axis represents the applied voltage, verticalThe axis represents the current flowing through the semiconductor element. The semiconductor element used to measure the IV curve is an RC-IGBT used in a semiconductor device with a rated voltage of 1700V and a rated current of 2200A, with a rated current of 183A and a chip size of 13.9mm x 13.5mm. From the IV curve at an applied voltage of 1V or more, the resistance of this semiconductor element at room temperature is 3.9mΩ, and the resistance at 175°C is 7.5mΩ. Therefore, the resistance per square centimeter of this semiconductor element is 2mΩ / cm at room temperature. 2 , 4mΩ / cm at 175℃ 2 It becomes.

[0075] The current density of the semiconductor device in which this semiconductor element is used is approximately 150 A / cm 2 Generally, the current density of IGBTs and FWDs with rated voltages of 650V to 3.3kV is 75A / cm 2 to 450A / cm 2 Therefore, the resistance per square centimeter of the semiconductor elements 25 to 28 used in the semiconductor device 10 is 1 mΩ / cm at room temperature. 2 ~6mΩ / cm 2 , 2mΩ / cm at 175℃ 2 ~12mΩ / cm 2 It is preferable that the temperature is within the range of 100° C. to 200° C.

[0076] Next, the resistance Rw2 and the resistance Rp3 will be considered. Applying the above range of the ratio i2 / i1 (0.90 or more and 1.10 or less) to the above formula (1), the following formula (2) is obtained.

[0077]

number

[0078] In the above formula (2), if the semiconductor elements 25 and 26 are the same type and the solder layers 30A and 30B have the same thickness, then Rc1 = Rc2 = R. If Rw2 = y and Rp3 = x, the above formula (2) becomes the following formula (3).

[0079] 0.90x-0.10R≦y≦1.10x+0.10R···(3)

[0080] Fig. 12 is a graph of the above formula (3). Since the resistance takes a positive value, if Rw2 and Rp3 are within the shaded range in Fig. 12, the ratio i2 / i1 of current i2 to current i1 will be 0.90 or more and 1.10 or less.

[0081] As described above, the more preferable ratio i2 / i1 is 0.93 or more and 1.07 or less. Therefore, Rc1=Rc2=R, Rw2=y, Rp 3= If x is used, a more preferable range is given by the following formula (4).

[0082] 0.93x-0.07R≦y≦1.07x+0.07R···(4)

[0083] Furthermore, the ratio i2 / i1 is more preferably equal to or greater than 0.95 and equal to or less than 1.05. Therefore, when Rc1=Rc2=R, Rw2=y, and Rp3=x, a more preferable range is given by the following formula (5).

[0084] 0.95x-0.05R≦y≦1.05x+0.05R···(5)

[0085] As described above, the semiconductor device 10 according to the embodiment is configured so that the ratio of the currents flowing through the multiple semiconductor elements 25, 26, 27, 28 connected in parallel falls within a certain range. That is, taking the first arm portion A as an example, the semiconductor device 10 includes an insulating substrate 22, a conductive pattern provided on the main surface of the insulating substrate 22 and having a conductive pattern 24a and a conductive pattern 24c, and a semiconductor element 26 and a semiconductor element 25 each arranged on the conductive pattern 24a. The conductive pattern 24a includes an input region 24a2 overlapping with the semiconductor element 26 and an input region 24a4 overlapping with the semiconductor element 25. Each of the semiconductor element 26 and the semiconductor element 25 includes input electrodes 26d and 25d provided on a back surface facing the conductive pattern 24a and electrically connected to the conductive pattern 24a, and output electrodes 26b and 25b provided on a front surface opposite the back surface. The output electrode 26b of the semiconductor element 26 and the output electrode 25b of the semiconductor element 25 are connected to each other by a partial wire 29c2. The output electrode 25b of the semiconductor element 25 and the conductive pattern 24c are connected to each other by a partial wire 29c4. The ratio i2 / i1 of the current i2 flowing from the input region 24a4 to the conductive pattern 24c via the semiconductor element 25 to the current i1 flowing from the input region 24a2 to the conductive pattern 24c via the semiconductor element 26 is 0.90 or more and 1.10 or less. As a result, the semiconductor device 10 can suppress deterioration of the wire bonding portion caused by an imbalance in the currents flowing through the semiconductor elements 25 and 26, and can improve the power cycle resistance, short circuit resistance and I 2 It is possible to improve the t tolerance, etc. Also, the semiconductor device 10 can maintain long-term reliability.

[0086] More preferably, the ratio i2 / i1 of the current i2 to the current i1 is 0.93 or more and 1.07 or less, and even more preferably, the ratio 2 / i1 of the current i2 to the current i1 is 0.95 or more and 1.05 or less. This allows the semiconductor device 10 to make the currents flowing through the semiconductor elements 25 and 26 more uniform, and more reliably prevents deterioration caused by current imbalance.

[0087] In the semiconductor device according to the embodiment, the ratio R1 / R2 of the resistance R1 in the path L1 from the input region 24a2 to the stitch point P4 via the semiconductor element 26 and the partial wire 29c2 to the resistance R2 in the path L2 from the input region 24a4 to the stitch point P4, which is the connection point between the output electrode 25b of the semiconductor element 25 and the partial wire 29c4, via the semiconductor element 25, may be 0.90 or more and 1.10 or less. As a result, the semiconductor device 10 can suppress deterioration of the wire bonding portion caused by an imbalance in currents flowing through the semiconductor elements 25 and 26, and can improve the power cycle resistance, short circuit resistance and I 2 It is possible to improve the t tolerance, etc. Also, the semiconductor device 10 can maintain long-term reliability.

[0088] The ratio R1 / R2 of the resistance R1 to the resistance R2 is more preferably 0.93 or more and 1.07 or less, and further preferably 0.95 or more and 1.05 or less. This allows the semiconductor device 10 to make the currents flowing through the semiconductor elements 25 and 26 more uniform, and more reliably prevents deterioration caused by current imbalance.

[0089] In order to set the ratio i2 / i1 or the ratio R1 / R2 within the above range, for example, the resistance Rc1, which is the sum of the resistance of the solder layer 30B and the resistance of the semiconductor element 26, may be reduced. That is, in the semiconductor device 10, the sum of the resistance between the input electrode 26d and the output electrode 26b of the semiconductor element 26 and the resistance of the solder layer 30B connecting the semiconductor element 26 and the conductive pattern 24a may be smaller than the sum of the resistance between the input electrode 25d and the output electrode 25b of the semiconductor element 25 and the resistance of the solder layer 30A connecting the semiconductor element 25 and the conductive pattern 24a. This reduces the resistance of the path L1 where the resistance Rc1 is located, and the current i1 flowing through the path L1 can be increased.

[0090] In order to set the ratio i2 / i1 or the ratio R1 / R2 in the above range, for example, the output electrode 26b of the semiconductor element 26 and the output electrode 26c of the semiconductor element 25 are 25Resistance Rw2 including the resistance of partial wire 29c2, which is the first wiring member connecting .child In this case, it is preferable that the resistance R2 is equal to the resistance Rp3 including the resistance of the intermediate region 24a3. That is, in the semiconductor device 10, the resistance Rw2 of the partial wire 29c2 may be equal to the resistance Rp3 of the intermediate region 24a3, which is the region between the input region 24a2 and the input region 24a4 of the conductive pattern 24a. This reduces the resistance of the path L1 where the resistance Rw2 is located, and increases the current i1 flowing through the path L1.

[0091] In order to set the ratio i2 / i1 or the ratio R1 / R2 in the above range, for example, the resistance Rp3 of the intermediate region 24a3 may be increased. a In other words, in the semiconductor device 10, the cross-sectional area of ​​the intermediate region 24a3, which is a region between the input region 24a2 and the input region 24a4 of the conductive pattern 24a, may be smaller than the cross-sectional area of ​​the input region 24a2. .child This increases the resistance of the path L2 in which the resistor Rp3 is located, making it possible to reduce the current i2 flowing through the path L2.

[0092] Also, in order to set the ratio i2 / i1 or the ratio R1 / R2 within the above range, for example, the resistance Rc2, which is the sum of the resistance of the solder layer 30A and the resistance of the semiconductor element 25, may be increased. That is, in the semiconductor device 10, the sum of the resistance between the input electrode 25d and the output electrode 25b in the semiconductor element 25 and the resistance of the solder layer 30A connecting the semiconductor element 25 and the conductive pattern 24a may be greater than the sum of the resistance between the input electrode 26d and the output electrode 26b in the semiconductor element 26 and the resistance of the solder layer 30B connecting the semiconductor element 26 and the conductive pattern 24a. This increases the resistance of the path L2 in which the resistance Rc2 is located, and the current i2 flowing through the path L2 can be reduced.

[0093] Furthermore, in this embodiment, since the semiconductor elements 25 to 28 are RC-IGBTs, there is no need to use FWDs, and the area of ​​semiconductor elements that can be mounted on the semiconductor device 10 can be increased, thereby enabling the semiconductor device 10 to have a larger capacity.

[0094] In the present embodiment, the semiconductor elements 25 to 28 are RC-IGBTs, but the present invention is not limited to this, and the semiconductor elements 25 to 28 may be other switching elements such as IGBTs, power MOSFETs, etc. Furthermore, the semiconductor elements 25 to 28 may include diodes such as SBDs (Schottky Barrier Diodes) and FWDs, as necessary.

[0095] The number of the semiconductor elements 25 to 28 of the semiconductor unit 20 is an example, and is not limited to the case where two semiconductor elements are arranged on each arm portion and the semiconductor unit 20 is configured with two arms. For example, three or more semiconductor elements may be arranged on each arm portion. In this case, the ratio of the currents flowing through each semiconductor element is 0.90 or more and 1.10 or less. For example, an IGBT chip and an FWD chip may be arranged simultaneously as semiconductor elements on each arm portion. In this case, the multiple IGBT chips are arranged so that the gate electrodes are arranged in a row with the gate electrodes facing one side parallel to the arrangement of the IGBT chips. The multiple FWD chips may be arranged in a separate row parallel to the row of the IGBT chips, or may be arranged in the same row as the IGBT chips. For example, the semiconductor unit 20 may be configured with three or more arms. In this case, the three or more arms are arranged in a row perpendicular to the arrangement of the semiconductor elements. [Explanation of symbols]

[0096] 10...semiconductor device, 20 (20a to 20f)...semiconductor unit, 22...insulating substrate, 24 (24a to 24e)...conductive pattern, 24a1...contact region, 24a2...input region, 24a3...middle region, 24a4...input region, 24b1...connection region, 24c1...first region, 24c2...second region, 24c3...connection region, 24c4...contact region, 24d1...connection region, 24e1...connection region, 24 e2...contact region, 25-28...semiconductor element, 25a-28a...gate electrodes, 25b-28b...output electrodes (emitter electrodes), 25c-28c gate runners, 26d, 25d...input electrodes (collector electrodes), 29 (29a-29d)...bonding wires, 29cx, 29dx...single bonding wires, 30 (30A, 30B)...solder layer, A...first arm portion, B...second arm portion.

Claims

1. a conductive pattern having a first conductive pattern and a second conductive pattern; a first semiconductor element and a second semiconductor element each disposed on the first conductive pattern; the first conductive pattern includes a first input region overlapping the first semiconductor element and a second input region overlapping the second semiconductor element; Each of the first semiconductor element and the second semiconductor element is a first main electrode provided on a first main surface facing the first conductive pattern and electrically connected to the first conductive pattern; a second main electrode provided on a second main surface opposite to the first main surface, the second main electrode of the first semiconductor element and the second main electrode of the second semiconductor element are connected to each other by a first wiring member which is a wire or a ribbon; the second main electrode of the second semiconductor element and the second conductive pattern are connected to each other by a second wiring member which is the wire or the ribbon; a ratio (i2 / i1) of a current (i2) flowing from the second input region to the second conductive pattern via the second semiconductor element to a current (i1) flowing from the first input region to the second conductive pattern via the first semiconductor element is 0.90 or more and 1.10 or less; a sum of a resistance between the first main electrode and the second main electrode in the first semiconductor element and a resistance of a connection layer between the first semiconductor element and the first conductive pattern is smaller than a sum of a resistance between the first main electrode and the second main electrode in the second semiconductor element and a resistance of a connection layer between the second semiconductor element and the first conductive pattern. Semiconductor device.

2. The ratio (i2 / i1) of the current (i2) to the current (i1) is 0.93 or more and 1.07 or less. The semiconductor device according to claim 1.

3. The ratio (i2 / i1) of the current (i2) to the current (i1) is 0.95 or more and 1.05 or less.

3. The semiconductor device according to claim 1.

4. a conductive pattern having a first conductive pattern and a second conductive pattern; a first semiconductor element and a second semiconductor element each disposed on the first conductive pattern; the first conductive pattern includes a first input region overlapping the first semiconductor element and a second input region overlapping the second semiconductor element; Each of the first semiconductor element and the second semiconductor element is a first main electrode provided on a first main surface facing the first conductive pattern and electrically connected to the first conductive pattern; a second main electrode provided on a second main surface opposite to the first main surface, the second main electrode of the first semiconductor element and the second main electrode of the second semiconductor element are connected to each other by a first wiring member which is a wire or a ribbon; the second main electrode of the second semiconductor element and the second conductive pattern are connected to each other by a second wiring member which is the wire or the ribbon; a ratio (R1 / R2) of a resistance (R1) in a first path from the first input region to the connection point via the first semiconductor element and the first wiring member to a resistance (R2) in a second path from the second input region to the connection point between the second main electrode of the second semiconductor element and the second wiring member is 0.90 or more and 1.10 or less, a sum of a resistance between the first main electrode and the second main electrode in the first semiconductor element and a resistance of a connection layer between the first semiconductor element and the first conductive pattern is smaller than a sum of a resistance between the first main electrode and the second main electrode in the second semiconductor element and a resistance of a connection layer between the second semiconductor element and the first conductive pattern. Semiconductor device.

5. The ratio (R1 / R2) of the resistance (R1) to the resistance (R2) is 0.93 or more and 1.07 or less.

5. The semiconductor device according to claim 4.

6. The ratio (R1 / R2) of the resistance (R1) to the resistance (R2) is 0.95 or more and 1.05 or less.

6. The semiconductor device according to claim 4.

7. the first conductive pattern includes an intermediate region between the first input region and the second input region; The resistance of the first wiring member is the same as the resistance of the intermediate region.

7. The semiconductor device according to claim 1.

8. the first conductive pattern includes an intermediate region between the first input region and the second input region; The cross-sectional area of ​​the intermediate region is smaller than the cross-sectional area of ​​the first input region. Sai, The semiconductor device according to claim 1 .

9. a trench formed in the intermediate region by removing a portion of the first conductive pattern; 9. The semiconductor device according to claim 8.

10. the first wiring member and the second wiring member are a single wire or ribbon stitch-bonded to the second main electrode of the first semiconductor element, the second main electrode of the second semiconductor element, and the second conductive pattern; The semiconductor device according to claim 1 .

11. In addition to the single wire or ribbon which is the first wiring member and the second wiring member, a third wiring member which is the wire or ribbon which connects the second main electrode of the second semiconductor element and the second conductive pattern is further provided. The semiconductor device according to claim 10.

12. the second semiconductor element is spaced apart from the second conductive pattern along a first axis; the first semiconductor element is spaced apart from the second semiconductor element along the first axis; The first wiring member and the second wiring member extend along the first axis. The semiconductor device according to claim 1 .

13. Each of the first semiconductor element and the second semiconductor element is When viewed in a plane, the device has a rectangular shape having a pair of opposing long sides and a pair of opposing short sides; The short side is disposed on the first conductive pattern so as to be aligned with the first axis. The semiconductor device according to claim 12.

14. The second main surface of the first semiconductor element and the second main surface of the second semiconductor element include A gate electrode; a gate runner electrically connected to the gate electrode; The gate runner is disposed parallel to the long side of the second main surface. The semiconductor device according to claim 13.

15. The first semiconductor element and the second semiconductor element are reverse conducting insulated gate bipolar transistors (RC-IGBTs), The semiconductor device according to claim 1 .

Images