Laser device and control method

Abstract

To provide a technology capable of changing a beam profile.SOLUTION: A laser device 10 is equipped with six first laser devices 101 to 106 that respectively output blue laser beams for preheating an object 400, and a second laser device 201 which outputs an infrared laser beam for actually heating the object 400. At least one of a relative positional relationship between a first irradiation position of each of the six first laser beams in the object 400 and a second irradiating position of the infrared laser beam in the object 400, and the respective positions of the plurality of first irradiating positions can be changed.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a laser device and a control method. [Background technology]

[0002] Patent Document 1 discloses a technique in which a first laser beam output from a fiber laser and a second laser beam output from a semiconductor laser and having a different wavelength from the first laser beam are superimposed using a mirror that transmits the first laser beam and reflects the second laser beam, and then irradiated onto an object to be processed. The first laser beam and the second laser beam are superimposed coaxially through this mirror. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2018-202478 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned techniques, the beam profile created by two-color laser light is not fully considered.

[0005] The present disclosure has been made to solve such problems, and has an object to provide a technique capable of adjusting the beam profile of two or more types of laser light. [Means for solving the problem]

[0006] A laser device according to the present disclosure includes a plurality of first light sources and a second light source. Each of the plurality of first light sources outputs a first laser light for preheating an object. The second light source outputs a second laser light for main heating the object. In addition, at least one of a relative positional relationship between a first irradiation position of each of the plurality of first laser lights on the object and a second irradiation position of the second laser on the object, and a position of each of the plurality of first irradiation positions is changeable.

[0007] A laser device according to the present disclosure includes a first light source and a second light source. The first light source outputs a first laser light for preheating an object. The second light source outputs a second laser light for main heating the object. In addition, a relative positional relationship between a first irradiation position of the first laser light on the object and a second irradiation position of the second laser light on the object is changeable.

[0008] A laser device according to the present disclosure includes a first light source and a plurality of second light sources. The first light source outputs a first laser light for preheating an object. Each of the plurality of second light sources outputs a second laser light for main heating the object. In addition, at least one of a relative positional relationship between a first irradiation position of the first laser light on the object and a second irradiation position of each of the plurality of second lasers on the object, and a position of each of the plurality of second irradiation positions is changeable.

[0009] A laser device according to the present disclosure includes a plurality of first light sources, a second light source, a first optical system, and a second optical system. Each of the plurality of first light sources outputs a first laser light for preheating an object. The second light source outputs a second laser light for main heating of the object. The first optical system focuses the first laser light. The second optical system focuses the second laser light. The first optical system and the second optical system are arranged to be shifted from each other in the optical axis direction.

[0010] A control method of a laser device according to the present disclosure includes outputting a first laser light for pre-heating an object, outputting a second laser light for main heating of the object, and changing at least one of a relative positional relationship between a first irradiation position of each of a plurality of first laser lights on the object and a second irradiation position of the second laser light on the object, and a position of each of the plurality of first irradiation positions. Effect of the Invention

[0011] According to the present disclosure, it is possible to adjust the beam profile of two or more types of laser light. [Brief description of the drawings]

[0012] [Figure 1] 1 is a diagram showing a configuration example of a laser device according to an embodiment of the present invention; [Diagram 2] 2 is a block diagram showing a hardware configuration of a control device according to the present embodiment. FIG. [Diagram 3] FIG. 1 is a perspective view of main components of a laser device 10 according to the present embodiment. [Figure 4] FIG. 2 is a diagram illustrating an example of a condenser lens. [Diagram 5] FIG. 13 is a diagram showing a change in the relative positional relationship. [Figure 6] FIG. 13 is a diagram showing a change in individual positions. [Figure 7] FIG. 4 is a diagram showing an example of a first pattern. [Figure 8] FIG. 11 is a diagram showing an example of a second pattern. [Figure 9] FIG. 11 is a diagram showing an example of a third pattern. [Figure 10] FIG. 13 is a diagram showing an example of a fourth pattern. [Figure 11] 4 is a flowchart showing an example of a processing procedure executed by the control device 500. [Figure 12] FIG. 13 is a diagram showing a modified example of the condenser lens. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference characters and their description will not be repeated.

[0014] [Laser processing] The laser device according to this embodiment irradiates a laser beam onto an object to be processed, heats the object, and melts and evaporates the material that constitutes the object to process it (for example, welding or cutting). Depending on the material of the object, the absorptivity of the wavelength of the actual heating laser beam may be low, and sufficient processing may not be possible. Therefore, the laser device according to this embodiment uses a preheating laser beam to increase the absorptivity, and then processes the area where the absorptivity has increased with the heating laser beam.

[0015] For example, the laser light for preheating is blue laser light, and the laser light for main heating is infrared laser light. In this case, if the object is a specific object, the absorption rate of the infrared laser light is low and the infrared laser light is reflected by the surface of the specific object. If the infrared laser light is reflected, the specific object cannot be processed appropriately. The specific object is, for example, a highly reflective material made of gold, copper, aluminum, or the like. Such highly reflective materials have the characteristic that the absorption rate of infrared light increases as the temperature increases. If the absorption rate of infrared light increases, the infrared laser light is appropriately absorbed in the highly reflective material, so that even the highly reflective material can be appropriately processed.

[0016] Therefore, in this embodiment, the temperature of the processing location (the location irradiated with the infrared laser light) of the highly reflective material is locally increased by irradiating the blue laser light to the processing location. Then, the infrared laser light is irradiated to the location where the temperature has increased (i.e., the location where the absorptance of the infrared laser light has increased). Therefore, even if the object is a highly reflective material, it can be appropriately processed by irradiating the infrared laser light. Thus, in this embodiment, the blue laser light is used as the laser light for preheating, and the infrared laser light is used as the laser light for main heating. Note that a configuration in which both the laser light for preheating and the laser light for main heating are blue laser light is conceivable. However, in general, semiconductor laser light such as blue laser light has poor BPP (Beam Parameter Products), and a minute spot diameter cannot be obtained like a single mode fiber laser. Therefore, in this embodiment, a configuration in which the blue laser light is used as the laser light for main heating is not adopted.

[0017] [Overall configuration of the laser device] 1 is a diagram showing a configuration example of a laser device 10 according to the present embodiment. An object 400 is placed on a placement stage (not shown). The laser device 10 irradiates the object 400 with laser light (blue laser light and infrared laser light). The laser device 10 includes a first laser device group, an actuator group, a collimator lens group, a second laser device 201, an optical element 211, a condenser lens 300, a control device 500, and an input device 502. The condenser lens 300 corresponds to the "first optical system" of the present disclosure.

[0018] The first laser group is composed of N (N is an integer of 1 or more) first laser devices. In this embodiment, N=6. That is, the first laser device group is composed of six first laser devices. In this embodiment, the six first laser devices are first laser device 101, first laser device 102, first laser device 103, first laser device 104, first laser device 105, and first laser device 106. Each of the first laser devices 101 to 106 is composed of, for example, a semiconductor laser device. Note that the first laser device 101 to the first laser device 106 may be composed of another laser device. The other laser device is, for example, a solid-state laser device. Also, the first laser device corresponds to the "first light source" of the present disclosure.

[0019] Each of the first laser devices 101 to 106 outputs a first laser light. The first laser light is typically a laser light having a wavelength of 400 or more and 550 nm or less. For example, the first laser light is a so-called blue laser light or green laser light. In the present embodiment, the first laser light is a blue laser light. As described above, the blue laser light is a laser light for preheating the object 400.

[0020] The actuator group is composed of N actuators corresponding to the N first laser devices. The actuator is also called a "driving mechanism." Since N=6 as described above, the actuator group is composed of six actuators 151-156. The six actuators 151-156 are arranged corresponding to the six first laser devices 101-106. The actuators can displace the output ends of the first laser devices (for example, the output end 101S of the output fiber shown in FIG. 3 described later) in the XY plane described later. As a result, the actuators can drive the first laser devices corresponding to the actuators so as to change the irradiation position of the blue laser light from the first laser devices on the object 400. The actuators are composed of, for example, a piezoelectric element or a motor. In this embodiment, the irradiation position indicates the position on the object 400 where the laser light is irradiated. The irradiation position includes the concept of a point-like position where the laser light is irradiated on the object 400 and the concept of an irradiation area having a certain area.

[0021] More specifically, actuator 151 drives first laser device 101. Actuator 152 drives first laser device 102. Actuator 153 drives first laser device 103. Actuator 154 drives first laser device 104. Actuator 155 drives first laser device 105. Actuator 156 drives first laser device 106.

[0022] The collimating lens group is composed of N collimating lenses corresponding to the N first laser devices, respectively. Since N=6 as described above, the collimating lens group is composed of six collimating lenses 161-166. The six collimating lenses 161-166 are disposed corresponding to the six first laser devices 101-106, respectively. The collimating lenses collimate the blue laser light from the first laser device corresponding to the collimating lens.

[0023] More specifically, collimating lens 161 collimates the blue laser light from first laser device 101. Collimating lens 162 collimates the blue laser light from first laser device 102. Collimating lens 163 collimates the blue laser light from first laser device 103. Collimating lens 164 collimates the blue laser light from first laser device 104. Collimating lens 165 collimates the blue laser light from first laser device 105. Collimating lens 166 collimates the blue laser light from first laser device 106.

[0024] The second laser device 201 outputs a second laser light. The second laser light is typically a laser light having a wavelength of 900 nm or more and 1100 nm or less. For example, the second laser light is an infrared laser light. The infrared laser light is a laser light for main heating of the object 400. The second laser device 201 is, for example, a single-mode fiber laser device. The second laser device 201 may be another device. The other device may be, for example, a solid-state laser device or a CO2 laser device. The infrared laser light is a single mode. The second laser device corresponds to the "second light source" of the present disclosure.

[0025] The optical element 211 changes the irradiation pattern of the infrared laser light on the object 400. The optical element 211 is, for example, a DOE (Diffractive Optical Element). The optical element 211 splits the infrared laser light into M pieces (M is an integer of 2 or more), for example. The control device 500 can move the optical element 211 in and out of the path of the infrared laser light. In this way, the control device 500 can prevent the infrared laser light from being split or split the infrared laser light by moving the optical element 211 in and out. The focus lens 212 focuses the infrared laser light and adjusts the focus of the infrared laser light. The focus lens 212 corresponds to the "second optical system" of the present disclosure.

[0026] As described above, the output ends of the first laser devices 101 to 106 are movable. In the example of FIG. 3, only the output end 101S of the output ends of the first laser devices 101 to 106 is shown for the sake of simplicity. In this embodiment, an actuator is not provided in the second laser device 201. Therefore, the output end 201S of the second laser device 201 is not movable.

[0027] The control device 500 controls the first laser devices 101-106, the actuators 151-156, the second laser device 201, and the optical element 211. The control device 500 controls switching between output and non-output of blue laser light from the first laser devices 101-106, the output power of the blue laser light, etc. The control device 500 controls switching between output and non-output of infrared laser light from the second laser device 201, the output power of the infrared laser light, etc.

[0028] The control device 500 controls any one of the actuators 151-156 to displace the output end of the first laser device corresponding to that actuator. The displacement of the output end of the first laser device changes the incident angle of the blue laser light output from the first laser device with respect to the focusing lens 300. With this change, the control device 500 can change (adjust) the irradiation position of the blue laser light on the object 400.

[0029] Information (commands) from a user are input to the input device 502. The input device 502 is composed of, for example, a mouse, a keyboard, a touch panel, etc. A command signal from the input device 502 is input to the control device 500. The control device 500 executes control based on the command signal.

[0030] The input information input by the user may include, for example, an irradiation pattern, which will be described later. For example, the irradiation patterns, which will be described later, are displayed on the display device, and the user selects the displayed irradiation pattern. This selection allows the user to input the irradiation pattern, etc. The input information may also include actuator drive information. The drive information is, for example, information indicating an amount by which an output end of a first laser device corresponding to an actuator is to be displaced. The user can fine-tune the position of the output end of the first laser device using the input device.

[0031] The input information may also include information indicating switching between output and non-output of blue laser light from the first laser devices 101 to 106. The input information may also include information indicating switching between output and non-output of infrared laser light from the second laser device 201. The input information may also include information indicating the rotation angle of the optical element 211.

[0032] The blue laser light (six blue laser light beams) collimated by each of collimator lenses 161-166 and the infrared laser light whose focus is adjusted by focus lens 212 are incident on condenser lens 300. In condenser lens 300, the six blue laser light beams are condensed and one infrared laser light is passed through, and is irradiated onto object 400.

[0033] Moreover, the laser device 10 can irradiate the object 400 with the infrared laser light and the blue laser light in a dot-like and linear (for example, linear or curved) manner by scanning the infrared laser light and the blue laser light. When the laser device 10 scans the infrared laser light and the blue laser light, the laser device 10 and the object 400 are moved relatively. For example, the infrared laser light and the blue laser light may be irradiated linearly onto the object 400 by moving an output section (not shown) of the laser device 10 (a section that outputs the infrared laser light and the blue laser light). Moreover, the laser device 10 may irradiate the infrared laser light and the blue laser light linearly onto the object 400 by moving a placement table (not shown) on which the object 400 is placed.

[0034] 2 is a block diagram showing a hardware configuration of the control device 500. The control device 500 has, as main components, a CPU (Central Processing Unit) 560, a ROM (Read Only Memory) 562, a RAM (Random Access Memory) 564, a HDD (Hard Disk Drive) 566, a hardware I / F 170, and an input I / F 572. The components are connected to each other via a data bus.

[0035] The hardware I / F 170 is an interface for controlling the hardware group 190. The hardware group 190 includes first laser devices 101-106, actuators 151-156, a second laser device 201, and an optical element 211. The input I / F 572 is an interface for communicating with an input device 502.

[0036] The ROM 562 stores programs executed by the CPU 560. The RAM 564 temporarily stores data generated by the execution of the programs in the CPU 560. The RAM 564 can function as a temporary data memory used as a working area. The HDD 562 is a non-volatile storage device. Instead of the HDD 566, a semiconductor storage device such as a flash memory may be used.

[0037] The program stored in ROM 562 may be stored in a recording medium and distributed as a program product. Alternatively, the program may be provided by an information provider as a so-called downloadable program product via the Internet or the like. The control device 500 reads the program provided from the recording medium or via the Internet or the like. The control device 500 stores the read program in a predetermined storage area (for example, ROM 562). The CPU 560 executes the stored program to perform the above-mentioned display process.

[0038] The recording medium is not limited to DVD-ROM (Digital Versatile Disk Read Only Memory), CD-ROM (compact disc read-only memory), FD (Flexible Disk), and hard disk, but may also be a medium that carries a program in a fixed manner, such as a magnetic tape, a cassette tape, an optical disk (MO (Magnetic Optical Disc) / MD (Mini Disc) / DVD (Digital Versatile Disc), an optical card, a mask ROM, an EPROM (Electronically Programmable Read-Only Memory), an EEPROM (Electronically Erasable Programmable Read-Only Memory), or a semiconductor memory such as a flash ROM. The recording medium is also a non-transitory medium from which a program or the like can be read by a computer.

[0039] FIG. 3 is a perspective view of the main components of the laser device 10 and the target 400. In FIG. 3, the first laser devices 101-106 and the second laser device 201 are each shown in the shape of a fiber. As shown in FIG. 3, the output direction of the blue laser light from the first laser devices 101-106 (the output direction of the infrared laser light from the second laser device 201) is also called the Z-axis direction. Thus, in this embodiment, the output direction of the blue laser light from the first laser devices 101-106 and the output direction of the infrared laser light from the second laser device 201 are both along the Z-axis direction. That is, preferably, the optical axis of the infrared laser light and the optical axes of the six blue laser lights are parallel to each other along the Z-axis direction. In addition, the height direction of the target 400 installed at a predetermined location is defined as the Y-axis direction, and the width direction of the target is defined as the X-axis direction. The above-mentioned XY plane is a plane perpendicular to the Z-axis direction. In addition, the condenser lens 300 and the focus lens 212 are arranged to be shifted from each other in the Z-axis direction.

[0040] 3, the condenser lens 300 has a circular cross section. Also, a hole 306 is provided in the center of the condenser lens 300. The hole 306 in this embodiment has a circular cross section. The infrared beam transmitted through the focus lens 212 passes through the hole 306 and is irradiated onto the target object 400. In this manner, the hole 306 is a transmitting portion that transmits the infrared laser light.

[0041] 3, the incidence positions of the six blue laser beams and the incidence position of the infrared laser beam are different in the focusing lens 300. In the example of FIG. 3, the incidence position of the infrared laser beam is the center position of the focusing lens 300, but it may be another position (for example, an end of the focusing lens 300).

[0042] In addition, the incident position of the blue laser from first laser device 101 on collecting lens 300 and the incident position of the blue laser from first laser device 102 on collecting lens 300 have a symmetrical positional relationship. In addition, the incident position of the blue laser from first laser device 103 on collecting lens 300 and the incident position of the blue laser from first laser device 104 on collecting lens 300 have a symmetrical positional relationship. In addition, the incident position of the blue laser from first laser device 105 on collecting lens 300 and the incident position of the blue laser from first laser device 106 on collecting lens 300 have a symmetrical positional relationship.

[0043] FIG. 4 is a diagram showing an example of the condenser lens 300. The condenser lens 300 includes a lens body 302 and a first layer 304 formed on the surface of the lens body 302. In FIG. 4, the first layer 304 is formed on one side of the condenser lens 300, but may be formed on both sides of the condenser lens 300. The first layer 304 is a layer having a low reflectance of blue laser light. The first layer 304 is, for example, a dielectric multilayer film. The first layer 304 is, for example, a laminate of titanium dioxide (TiO2) and silicon dioxide (SiO2). The number of laminated layers may be 1 or 2 or more. In addition, if the first layer 304 is formed on the entire surface of the lens body 302, the infrared laser light will not be appropriately incident on the condenser lens 300. Therefore, in this embodiment, a transmission portion (hole portion 306 in this embodiment) for transmitting the infrared laser light is formed in a predetermined region (central region in this embodiment) of the condenser lens 300. This allows both the blue laser light and the infrared laser light to be incident on the condenser lens 300.

[0044] As described above, the infrared laser light can be split by the optical element 211. The diameter of the hole 306 is set so that all the infrared laser light passes through the hole 306, regardless of whether the infrared laser light is split or not.

[0045] [Change the irradiation position] Laser device 10 of the present embodiment can change the relative positional relationship between the first irradiation position of each of the six blue laser beams and the second irradiation position of the infrared laser beam on object 400. In the present embodiment, control device 500 changes the relative positional relationship by controlling actuators 151-156.

[0046] Fig. 5 is a diagram for explaining a change in the relative positional relationship. Fig. 5 shows first irradiation positions 101A-106A of blue laser light on the object 400 and second irradiation position 102A of infrared laser light on the object 400. The first irradiation positions 101A-106A are irradiation positions of blue laser light output from the first laser device 101-first laser device 106, respectively. The second irradiation position 201A is an irradiation position of infrared laser light output from the second laser device 201.

[0047] The laser device 10 can change the relative positional relationship between the first irradiation positions 101A to 106A and the second irradiation position 201A. As described above, the output end 201S of the second laser device 201 is configured not to be displaced. Therefore, the laser device 10 can change (move) the first irradiation positions 101A to 106A with respect to the second irradiation position 201A.

[0048] Furthermore, in the laser device 10, each of the six first irradiation positions 101A to 106A can be changed separately. Each of the first irradiation positions 101A to 106A is also called an "individual position". By changing the individual position, the area formed by the first irradiation positions 101A to 106A can be changed. FIG. 6 is a diagram showing that each of the six first irradiation positions 101A to 106A (individual position) can be displaced. In the example of FIG. 6, an elliptical area is shown as the area formed by the first irradiation positions 101A to 106A. In the example of FIG. 5, an area formed by each of the first irradiation positions 101A to 106A overlapping each other is shown. By changing the individual position, the area shown in FIG. 5 can be changed to an area of ​​another shape (an elliptical area in the example of FIG. 6). In this way, the user can change the area formed by the first irradiation positions 101A to 106A. Also, for example, the user can change the area to a rectangular area or the like.

[0049] In this embodiment, the laser device 10 is configured to be changeable (adjustable) in both the relative positional relationship and the individual positions. As a modified example, the laser device 10 may be configured to be changeable (adjustable) in either one of the relative positional relationship and the individual positions.

[0050] In this embodiment, the control device 500 can change the change target position by driving the actuators 151 to 156. Specifically, the control device 500 can change (move) the first irradiation positions 101A to 106A by driving the actuators 151 to 156.

[0051] The laser device 10 may be configured to be able to change the first irradiation positions 101A to 106A and the second irradiation position 201A individually. The laser device 10 may be configured to be able to change the second irradiation position 201A based on the first irradiation positions 101A to 106A.

[0052] Moreover, the control device 500 can change the relative positional relationship based on a predetermined irradiation pattern. Here, the irradiation pattern includes a first pattern to a fourth pattern. Moreover, data on the irradiation pattern is stored in advance in, for example, the above-mentioned ROM 562 or the like.

[0053] Fig. 7 is a diagram showing an example of the first pattern. As shown in Fig. 7, the first pattern is a pattern in which the first irradiation positions 101A to 106A and the second irradiation position 201A overlap each other. The first pattern is a pattern in which the irradiation timing of the blue laser light to the object 400 (arrival timing of the blue laser light) and the irradiation timing of the infrared laser light to the object 400 (arrival timing of the infrared laser light) are the same.

[0054] Fig. 8 is a diagram showing an example of the second pattern. In the second pattern, as shown in Fig. 8(A), first, at least one of the six blue laser beams is irradiated. In the example of Fig. 8(A), six first irradiation positions 101A to 106A are shown, which indicates that all six laser beams are irradiated. Then, after a predetermined time has elapsed while maintaining the irradiation of the blue laser beam, the first irradiation positions 101A to 106A are irradiated with infrared laser beams as shown in Fig. 8(B).

[0055] In this way, the second pattern is a pattern in which the first irradiation positions 101A-106A are irradiated with infrared laser light following irradiation of the object 400 with one or more of the six blue laser lights. Therefore, as shown in FIG. 8(A), the first irradiation positions 101A-106A of the object 400 are locally heated by irradiation with the blue laser light. The temperature of the locally heated positions (i.e., the first irradiation positions 101A-106A) increases, and the absorptance of the infrared laser light at the positions increases. Therefore, by irradiating the positions with infrared laser light as shown in FIG. 8(B), the infrared laser light can be absorbed at the positions, and main heating at the positions can be achieved.

[0056] Fig. 9 is a diagram showing an example of the third pattern. In the above description, a configuration in which blue laser light and infrared laser light are irradiated onto one object 400 has been described. The third pattern is a pattern in which blue laser light and infrared laser light are irradiated onto each of a plurality of objects. In the example of Fig. 9, two objects, object 4001 and object 4002, are shown as the plurality of objects.

[0057] In the third pattern in the example of FIG. 9, the second irradiation position 201A1 of the object 4001 is irradiated with infrared laser light. In addition, a part of the six blue laser lights is irradiated to a position corresponding to the second irradiation position 201A1. Here, the position corresponding to the second irradiation position may be a position overlapping the second irradiation position, or may be a position separated by a certain distance from the second irradiation position. In the example of FIG. 9, the position corresponding to the second irradiation position 201A1 is a position overlapping the second irradiation position 201A1. In the example of FIG. 9, a part of the six blue laser lights is blue laser light output from each of the first laser devices 101 to 103. Therefore, in the example of FIG. 9, the first irradiation positions 101A to 103A are shown on the object 4001.

[0058] 9, the second irradiation position 201A2 of the object 4002 is irradiated with infrared laser light. A portion of the six blue laser lights is irradiated to a position overlapping with the second irradiation position 201A2. The portion of the blue laser lights is the blue laser light output from each of the first laser devices 104 to 106. Therefore, in the example of FIG. 9, the first irradiation positions 104A to 106A are shown on the object 4002.

[0059] Fig. 10 is a diagram showing an example of the fourth pattern. The fourth pattern is a pattern used, for example, when scanning the infrared laser light and the blue laser light linearly (for example, straight or curved) on the object 400. In the example of Fig. 10, the infrared laser light and the blue laser light are scanned along the line L. In the fourth pattern, the first irradiation positions (first irradiation positions 101A to 106A in the example of Fig. 10) are set on the scanning direction side (the direction of the line L in the example of Fig. 10) on the object 400 with respect to the second irradiation position 201A.

[0060] By setting in this way, the blue laser light and the infrared laser light are scanned in the shape of a line L on the object 400. Moreover, the blue laser light is irradiated before the infrared laser light on the line L. Therefore, the line L can be locally heated by the blue laser light and then irradiated with the infrared laser light.

[0061] The idea of ​​the fourth pattern may be reflected in the third pattern. In this case, the above-mentioned "position corresponding to the second irradiation position" is a position that is a certain distance away from the second irradiation position. In other words, the second irradiation position 201A1 is a certain distance away from the first irradiation positions 101A to 103A, and the second irradiation position 201A2 is a certain distance away from the first irradiation positions 103A to 106A.

[0062] The laser device 10 is configured so that the user can select an irradiation pattern from a plurality of irradiation patterns including, for example, patterns 1 to 4. For example, the user can select any one of the first to fourth patterns by operating the input device 502.

[0063] In the conventional laser device, there is a problem that the beam profile is not considered. In contrast, in the laser device 10 of the present embodiment, the relative positional relationship between the first irradiation positions 101A-106A of the blue laser light on the object 400 and the second irradiation position 201A of the infrared laser light on the object 400, and the positions (positions to be changed) of the six first irradiation positions 101A-106A can be changed. Therefore, the beam profiles of the infrared laser light and the blue laser light can be diversified.

[0064] Furthermore, the change target position can be changed by the control device 500. Therefore, the relative positional relationship can be changed more easily than in a configuration in which the user changes the relative positional relationship.

[0065] The laser device 10 also includes an input device 502 that accepts input of an irradiation pattern from a user. The control device 500 changes the change target position based on the input irradiation pattern. Therefore, for example, the user can change the change target position in a frequently used irradiation pattern. This reduces the burden on the user.

[0066] 9, the third pattern of the irradiation patterns is a pattern in which some of the six blue laser beams are irradiated to positions corresponding to second irradiation positions 201A1 and 201A2 of the infrared laser beams split by optical element 211. Therefore, for example, laser device 10 can process a plurality of objects in parallel.

[0067] In addition, the second and fourth patterns of the irradiation patterns are patterns in which, following irradiation of the object 400 with one or more of the six blue laser beams, infrared laser beam is irradiated at the first irradiation position of the blue laser beam, as shown in Fig. 8 and Fig. 10. Therefore, the infrared laser beam is irradiated after locally preheating with the blue laser beam. Therefore, even if the object 400 has a high reflectance of the infrared laser beam, it can be processed with the infrared laser beam.

[0068] Laser device 10 further includes a condenser lens 300 that condenses a plurality of blue laser beams and irradiates the object 400. Collector lens 300 is formed with a transmission portion that transmits infrared laser beams, and the infrared laser beams that have transmitted through the transmission portion are irradiated onto object 400. Therefore, laser device 10 can condense a plurality of blue laser beams and infrared laser beams by condenser lens 300 and irradiate object 400 with the collected beams.

[0069] 4 and other figures, the transmitting portion formed in the condenser lens 300 is a hole 306. Therefore, it is possible to transmit the infrared laser light through the condenser lens 300 with a relatively simple configuration.

[0070] Moreover, the first laser devices 101 to 106 are semiconductor laser devices. Therefore, the blue laser light can be irradiated onto the object 400 by using existing semiconductor laser devices.

[0071] Moreover, the second laser device 201 is a single mode fiber laser device. Therefore, the target object 400 can be irradiated with infrared laser light by an existing single mode fiber laser device.

[0072] The first laser light, which is an example of blue laser light, is a laser light having a wavelength of 400 nm or more and 550 nm or less, and the second laser light, which is an example of infrared laser light, is a laser light having a wavelength of 900 nm or more and 1100 nm or less. The object 400 is made of copper, gold, or aluminum. Therefore, even if the object 400 is a highly reflective material that reflects the second laser light, such as copper, gold, or aluminum, the first laser light preheats the highly reflective material, so that the absorptivity of the highly reflective material for the second laser light can be increased. Therefore, the highly reflective material can be processed by the first laser light.

[0073] Moreover, in the laser device 10, a configuration is adopted in which the condenser lens 300 and the focus lens 212 are arranged to be shifted from each other in the Z-axis direction. Therefore, the designer of the laser device 10 can design (manufacture) the laser device 10 while adjusting the beam profile of the infrared laser light and the blue laser. In other words, the designer can adjust the beam profile of the infrared laser light and the blue laser when manufacturing the laser device 10.

[0074] [Control device processing] 11 is a flowchart showing an example of a processing procedure executed by the control device 500. First, in step S1, the control device 500 changes the above-mentioned relative positional relationship and individual positions based on an input operation by a user to the input device 502. This step S1 includes the following steps S2 and S4.

[0075] In step S2, the control device 500 determines the second irradiation position based on a command from the user to the input device 502. Next, in step S4, the control device 500 determines the first irradiation position based on, for example, the above-mentioned irradiation pattern and the second irradiation position determined in step S2.

[0076] Next, in step S6, the control device 500 causes the first laser device to irradiate the determined first irradiation position with blue laser light. Also, in step S6, the control device 500 causes the second laser device 201 to irradiate the determined second irradiation position with infrared laser light. Note that, in step S6, when the second pattern is selected, the control device 500 causes the blue laser device 201 to irradiate first, and then irradiates the first irradiation position irradiated with the blue laser light with infrared laser light. Through such processing, the laser device 10 can irradiate the position preheated by the blue laser light with infrared laser light for main heating.

[0077] 11, the control device 500 executes the process of step S6 after the process of step S1. However, the control device 500 may execute the process of step S1 during the execution of step S6 (i.e., during the output of the infrared laser light and the blue laser light).

[0078] [Variations] (1) In the example of FIG. 4, the condenser lens 300 has a hole 306 formed as a transmission part that transmits infrared laser light. However, the transmission part may have any configuration as long as it transmits infrared laser light. FIG. 12 is a diagram showing a modified condenser lens 300A. The condenser lens 300A has a lens body 302, a first layer 304 formed on the surface of the lens body 302, and a second layer 308 formed on the surface of the lens body 302. The second layer 308 corresponds to the "transmission coating" of the present disclosure. The second layer 308 is a layer with low reflectance of infrared laser light. The second layer 308 is formed by laminating tantalum pentoxide (TaO2) and silicon dioxide (SiO2). The number of layers may be one or more.

[0079] Even with the configuration of the condenser lens 300A as shown in FIG. 12, the infrared laser light can be transmitted appropriately.

[0080] (2) In the above embodiment, the laser device 10 includes an actuator. However, the laser device 10 may have a configuration that does not include an actuator. In this case, the user may hold the first laser device and manually change the irradiation position of the blue laser light on the target object 400. In other words, the user may manually change the relative positional relationship.

[0081] In the above embodiment, the configuration has been described in which program data for executing the first to fourth patterns as irradiation patterns is stored in advance. However, a configuration in which such program data is not stored may be adopted. In such a case, for example, the user may finely adjust the irradiation directions of the first laser device and the second laser device to realize at least one of the first to fourth patterns.

[0082] (3) In the above embodiment, the laser device 10 is described as having the condenser lens 300. However, the laser device 10 does not have to have the condenser lens 300. For example, a configuration may be adopted in which the blue laser light from each of the first laser devices 101 to 106 and the infrared laser light from the second laser device 201 are directly irradiated onto the target object 400.

[0083] (4) In the above embodiment, a configuration has been described in which the number of the first laser devices is multiple (six) and the number of the second laser devices is one. However, the number of the first laser devices and the number of the second laser devices may both be one. In such a configuration, the relative positional relationship between the first irradiation position of the blue laser light on the object 400 and the second irradiation position of the infrared laser light on the object 400 can be changed. Therefore, the beam profile can be adjusted.

[0084] Also, the number of the first laser devices may be one, and the number of the second laser devices may be multiple. In such a configuration, at least one of the relative positional relationship between the first irradiation position of the blue laser light on the object 400 and the second irradiation positions of each of the multiple second lasers on the object 400, and the positions of each of the multiple second irradiation positions can be changed. Therefore, the beam profile can be adjusted.

[0085] [Aspects] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0086] (Item 1) A laser device according to one embodiment includes a plurality of first laser devices, each of which outputs a first laser light for pre-heating an object, and a second laser device that outputs a second laser light for main heating of the object, and at least one of a relative positional relationship between a first irradiation position of each of the plurality of first laser lights on the object and a second irradiation position of the second laser light on the object, and a position of each of the plurality of first irradiation positions is changeable.

[0087] According to the laser device described in paragraph 1, at least one of the relative positional relationship between the first irradiation position of each of the plurality of first laser beams on the object and the second irradiation position of the second laser beam on the object and the position of each of the plurality of first irradiation positions is changeable, thereby making it possible to adjust the beam profile.

[0088] (Item 2) The laser device according to item 1 further includes a control device that changes the relative positional relationship.

[0089] According to the laser device described in paragraph 2, the control device changes the relative positional relationship, which reduces the burden on the user.

[0090] (Item 3) The laser device according to item 2 further includes an input device that accepts an input of an irradiation pattern from a user, and the control device changes the relative positional relationship based on the irradiation pattern.

[0091] Since the relative positional relationship is changed based on the irradiation pattern selected by the user, it is possible to improve convenience for the user.

[0092] (4) The laser device according to the third aspect further includes an optical element for splitting the second laser beam, and the irradiation pattern is a pattern in which a plurality of first laser beams are irradiated at positions corresponding to the second irradiation positions of each of the split second laser beams. of The pattern includes a part of the first laser light.

[0093] According to the laser device described in the third aspect, a plurality of objects can be processed in parallel. (Clause 5) In the laser device described in clause 3 or 4, the irradiation pattern includes a pattern in which, following irradiation of the object with one or more first laser lights among the plurality of first laser lights, a second laser light is irradiated to the first irradiation position irradiated with the first laser light.

[0094] According to the laser device described in paragraph 5, an object can be pre-heated with a first laser light and then fully heated with a second laser light. Therefore, even if an object has a high reflectance of the second laser light, it can be fully heated with the second laser light.

[0095] (Item 6) The laser device described in any one of items 1 to 5 further includes a focusing lens that focuses a plurality of first laser beams and irradiates the beams onto an object, and a transparent portion that transmits the second laser beams is formed in the focusing lens, and the second laser beams that have transmitted through the transparent portion are irradiated onto the object.

[0096] According to the laser device described in the sixth aspect, a plurality of first laser beams and a plurality of second laser beams can be focused by the focusing lens and irradiated onto an object.

[0097] (Item 7) In the laser device according to item 6, the transmitting portion is a hole. According to the laser device described in the seventh aspect, the second laser light can be transmitted through a condenser lens.

[0098] (Item 8) In the laser device according to item 6, the transmitting portion is a transmitting coating for transmitting the second laser light.

[0099] According to the laser device described in item 8, the second laser light can be transmitted through a condenser lens.

[0100] (Item 9) In the laser device according to any one of items 1 to 8, the first light source is constituted by a semiconductor laser device.

[0101] According to the laser device described in paragraph 9, the first laser light can be irradiated onto the object by using an existing semiconductor laser device.

[0102] (Item 10) In the laser device according to any one of items 1 to 9, the second laser light source is constituted by a single mode fiber laser device.

[0103] According to the laser device described in the tenth aspect, the second laser light can be irradiated onto an object by using an existing single mode fiber laser device.

[0104] (Clause 11) In the laser device described in any one of clauses 1 to 10, the first laser light is laser light having a wavelength of 400 nm or more and 550 nm or less, the second laser light is laser light having a wavelength of 900 nm or more and 1100 nm or less, and the target object is made of copper, gold, or aluminum.

[0105] According to the laser device described in paragraph 11, even if the target object is a highly reflective material that reflects the second laser beam, such as copper, gold, or aluminum, the highly reflective material is preheated by the first laser beam, so that the absorptivity of the highly reflective material to the second laser beam can be increased. Therefore, the highly reflective material can be processed by the first laser beam.

[0106] (Clause 12) A laser device according to another aspect includes a first light source that outputs a first laser light for pre-heating an object, and a second light source that outputs a second laser light for main heating of the object, and the relative positional relationship between a first irradiation position on the object of the first laser light and a second irradiation position on the object of the second laser light is changeable.

[0107] According to the laser device described in the paragraph 12, the relative positional relationship between the first irradiation position of the first laser light on the object and the second irradiation position of the second laser light on the object can be changed, and therefore the beam profile can be adjusted.

[0108] (Clause 13) A laser device according to another aspect includes a first light source that outputs a first laser light for pre-heating an object, and a plurality of second light sources that each output a second laser light for main heating of the object, and at least one of the relative positional relationship between a first irradiation position of the first laser light on the object and a second irradiation position of each of the plurality of second lasers on the object, and the position of each of the plurality of second irradiation positions is changeable.

[0109] According to the laser device described in paragraph 13, at least one of the relative positional relationship between the first irradiation position of the first laser light on the object and each of the second irradiation positions of the second lasers on the object and the position of each of the second irradiation positions is changeable, so that the beam profile can be adjusted.

[0110] (Clause 14) A laser device according to another aspect includes a plurality of first light sources, each of which outputs a first laser light for pre-heating an object, a second light source that outputs a second laser light for main heating of the object, a first optical system that focuses the first laser light, and a second optical system that focuses the second laser light, the first optical system and the second optical system being positioned offset from each other in the optical axis direction.

[0111] According to the laser device described in the fourteenth aspect, the beam profile can be adjusted during the manufacture of the laser device.

[0112] (Item 15) A control method according to another aspect is a control method for a laser device that processes an object. The control method includes outputting a plurality of first laser beams for preheating the object, outputting a second laser beam for main heating the object, and changing at least one of a relative positional relationship between a first irradiation position of each of the plurality of first laser beams on the object and a second irradiation position of the second laser beam on the object, and a position of each of the plurality of first irradiation positions.

[0113] According to the control method described in paragraph 15, at least one of the relative positional relationship between the first irradiation position of each of the plurality of first laser beams on the object and the second irradiation position of the second laser beam on the object and the position of each of the plurality of first irradiation positions can be changed, thereby changing the beam profile.

[0114] (Clause 16) In the control method described in Clause 12, changing the relative positional relationship includes determining a second projection position and determining a first projection position based on the determined second projection position.

[0115] According to the control method described in item 16, the second laser light for main heating can be irradiated onto the position preliminarily heated by the first laser light.

[0116] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the description of the embodiments described above, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0117] 10 laser device, 101, 102, 103, 104, 105, 106 first laser device, 151, 152, 153, 154, 155, 156 actuator, 201 second laser device, 211 optical element, 300, 300A focusing lens, 302 lens body, 304 first layer, 306 hole portion, 308 second layer, 400, 4001, 4002 object, 500 control device, 502 input device, 562 ROM, 564 RAM.

Claims

1. a plurality of first light sources each outputting a first laser light for preheating an object; A second light source that outputs a second laser light for main heating of the object; a drive unit capable of independently moving a first irradiation position on the object of each of the first laser light beams output from the plurality of first light sources and a second irradiation position on the object of the second laser light beams output from the second light source; At least one of a relative positional relationship between each of the first irradiation positions and the second irradiation positions and each of the positions of each of the first irradiation positions is changeable by the drive unit.

2. the laser device further includes a lens that collects the first laser light output from each of the plurality of first light sources; The laser device according to claim 1 , wherein the drive unit changes an incident angle of the first laser light output from each of the plurality of first light sources with respect to the lens.

3. the driving unit includes a plurality of actuators provided corresponding to the plurality of first light sources, The laser device according to claim 1 , wherein the actuators displace output ends of the first light sources corresponding to the actuators.

4. The laser device according to any one of claims 1 to 3, further comprising a control device that controls the drive unit.

5. further comprising an input device for receiving an input of an irradiation pattern from a user; The laser device according to claim 4 , wherein the control device changes at least one of the relative positional relationship and each of the positions based on the irradiation pattern.

6. the laser device further includes an optical element that splits the second laser light, 6. The laser device according to claim 5, wherein the irradiation pattern includes a pattern in which a portion of the first laser light output from each of the plurality of first light sources is irradiated to a position corresponding to the second irradiation position of each of the divided second laser lights.

7. 7. The laser device according to claim 5, wherein the irradiation pattern includes a pattern in which the target object is irradiated with one or more first laser lights among the first laser lights output from each of the plurality of first light sources, followed by irradiating the first irradiation position irradiated with the first laser light with the second laser light.

8. Further, a condenser lens is provided to condense the first laser light output from each of the plurality of first light sources and irradiate the first laser light onto the object. a transmission portion that transmits the second laser light is formed in the condenser lens, The laser device according to claim 1, wherein the second laser light transmitted through the transmission portion is irradiated onto the object.

9. The laser device according to claim 8 , wherein the transmission portion is a hole.

10. The laser device of claim 8 , wherein the transmission portion is a transmission coating for transmitting the second laser light.

11. The laser device according to any one of claims 1 to 10, wherein the first light source is constituted by a semiconductor laser device.

12. The laser device according to any one of claims 1 to 11, wherein the second light source is constituted by a single mode fiber laser device.

13. the first laser light is a laser light having a wavelength of 400 nm or more and 550 nm or less, the second laser light is a laser light having a wavelength of 900 nm or more and 1100 nm or less, The laser device according to any one of claims 1 to 12, wherein the target object is made of copper, gold, or aluminum.

14. a first light source that outputs a first laser light for preheating an object; A second light source that outputs a second laser light for main heating of the object; a drive unit capable of independently moving a first irradiation position on the object of the first laser light output from the first light source and a second irradiation position on the object of the second laser light output from the second light source, A laser device, wherein the relative positional relationship between the first irradiation position and the second irradiation position is changeable by the drive unit.

15. a first light source that outputs a first laser light for preheating an object; a plurality of second light sources each outputting a second laser light for main heating of the object; a drive unit capable of independently moving a first irradiation position on the object of the first laser light output from the first light source and each of second irradiation positions on the object of the second laser light output from each of the plurality of second light sources, At least one of a relative positional relationship between the first irradiation position and each of the second irradiation positions and a position of each of the second irradiation positions is changeable by the drive unit.

16. a plurality of first light sources each outputting a first laser light for preheating an object; A second light source that outputs a second laser light for main heating of the object; a first optical system that focuses the first laser light; a second optical system that focuses the second laser light; a drive unit capable of independently moving a first irradiation position on the object of the laser light from the first optical system and a second irradiation position on the object of the laser light from the second optical system, A laser device, wherein the first optical system and the second optical system are arranged to be shifted from each other in an optical axis direction.

17. 1. A method for controlling a laser apparatus for processing an object, comprising: a first output step of outputting a plurality of first laser beams from a plurality of first light sources for preheating the object; a second output step of outputting a second laser beam from a second light source for main heating of the object; a moving step of independently moving a first irradiation position on the object of each of the first laser light beams output from the plurality of first light sources and a second irradiation position on the object of the second laser light beam output from the second light source; a changing step of changing at least one of a relative positional relationship between each of the first irradiation positions and the second irradiation positions and a position of each of the first irradiation positions by the moving step.

18. Changing the relative positional relationship includes: determining the second irradiation position; and determining the first projection position based on the determined second projection position.

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