Teaching method for marking device, and marking device with teaching tool

The method and device address the inefficiency in marking defective positions on flat-shaped works by using a camera to identify defects and teaching jigs to set precise coordinates, enhancing marking accuracy and efficiency.

JP7624845B2Active Publication Date: 2025-01-31NIDEC INSTR CORP
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Patent Information

Application Number
JP2021030736
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2021-02-26
Publication Date
2025-01-31
Estimated Expiration
2041-02-26

AI Technical Summary

Technical Problem

Existing marking technologies for defective positions on flat-shaped works, such as print wiring plates, are inefficient as they lack a proper teaching process for setting coordinates in marking devices.

Method used

A method and device that uses a camera to identify defective positions on flat-shaped works, employing a drive mechanism to move a marking head, and utilizes teaching jigs with convex and concave portions to set appropriate second coordinates based on first coordinates, allowing precise marking.

Benefits of technology

Enables accurate and efficient marking of defective positions on flat-shaped works by setting appropriate second coordinates, improving the marking process efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

To provide a teaching method in a marking device for properly marking a defect position on a flat plate-shaped workpiece, and provide a teaching jig.SOLUTION: The marking device is configured so as to when an inspection unit finds a defect position in a flat plate-shaped workpiece W from an image picked up by a camera, identify the position as a position on a first coordinate on the image, drive a marking head 50 using a driving mechanism and mark on the defective portion of the workpiece W. In a step of teaching the drive mechanism a second coordinate corresponding to the first coordinate, the marking head 50 is provided with a first positioning part 510 consisting of one of a convex portion and a concave portion while a teaching jig 300 is provided with multiple second positioning parts 380 each consisting of the other of the convex portion and the concave portion, and the second coordinate is taught based on the position where the second positioning part 380 is fitted in the first positioning part 510 by relatively moving the teaching jig 300 and the marking head 50.SELECTED DRAWING: Figure 9
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Description

[Technical field]

[0001] The present invention relates to a teaching method and a teaching tool for a marking device. [Background technology]

[0002] For flat workpieces such as printed wiring boards, if a product is determined to be defective in the inspection process, the location of the defect may be marked, and the cause of the defect may be analyzed. Marking such workpieces manually is very inefficient. Therefore, a technology has been proposed in which a marking device automatically marks the location of the defect with a marking pen such as a felt-tip pen in a product determined to be defective in the inspection process (see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2000-15170 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the technology described in Patent Document 1, in the inspection process, the defect position of the workpiece is identified as a position on a first coordinate, and then the marking device applies a mark to the defect position on the first coordinate, so in order to perform this operation properly, a teaching operation is required to set the second coordinate corresponding to the first coordinate in the marking device. However, Patent Document 1 does not propose any teaching process.

[0005] In view of the above problems, an object of the present invention is to provide a teaching method and a teaching tool for a marking device for properly marking a defective position on a flat workpiece. [Means for solving the problem]

[0006] In order to solve the above problem, in the present invention, a method for teaching a marking device having an inspection unit that identifies a defect position found in an image captured by a camera of a flat workpiece placed on an inspection workpiece mounting surface as a position on a first coordinate on the image, and a marking unit that has a drive mechanism that moves a marking head relative to the workpiece transported from the inspection unit to a workpiece mounting surface for marking, and that applies marking to a defective portion of the workpiece determined to be defective by the inspection unit, is characterized in that in a second coordinate teaching step of teaching the drive mechanism a second coordinate on the workpiece placed on the workpiece mounting surface as a coordinate corresponding to the first coordinate, the marking head is provided with a first positioning portion consisting of one of a convex portion and a concave portion, while a teaching jig having a plurality of second positioning portions consisting of the other of the convex portions and the concave portions arranged in two intersecting directions is placed on the marking workpiece mounting surface, and the teaching jig and the marking head are moved relative to each other to teach the second coordinate based on the position where the second positioning portion fits into the first positioning portion.

[0007] In the present invention, the second coordinates are taught based on the position where the first positioning part of the marking head fits into the second positioning part of the teaching jig, so the second coordinates can be set appropriately, and therefore the defective position of the flat workpiece can be appropriately marked.

[0008] In the present invention, the first positioning portion is a recess, and a hole is provided in the teaching jig, and when the second coordinate teaching step is performed, a hole is provided in the hole to form the first positioning portion. A mode in which a pin for fixing the pin can be adopted.

[0009] In the present invention, the marking head includes a pen holder that holds the marking pen, the pen holder including a disk-shaped inner member that holds the marking pen at an eccentric position radially shifted from the center, and an outer member that rotatably supports the inner member via a radial bearing around a rotation center axis that extends in an upward and downward direction through the center of the inner member, and the marking unit includes a rotation drive mechanism that rotates the inner member around the rotation center axis, and the first positioning portion is provided on the rotation center axis.

[0010] In the present invention, when the second coordinate teaching process is performed, an embodiment can be adopted in which at least the marking pen is removed from the marking head, while a part having the first positioning portion consisting of a recess is attached to the marking head.

[0011] In the present invention, in the first coordinate teaching process for teaching the first coordinate to the inspection unit, a mode can be adopted in which the teaching jig with the pin removed from the hole is placed on the inspection workpiece mounting surface, and the first coordinate is taught based on the position of the hole when the teaching jig is imaged by the camera.

[0012] In the present invention, the hole is a stepped hole in which the inner diameter changes midway in the depth direction so as to form an annular surface at the midway position in the depth direction, and a mode can be adopted in which the first coordinate is taught based on the position of the annular surface of the hole when the teaching jig is imaged by the camera.

[0013] In the present invention, the camera may be a line scan camera, and the teaching jig may include a plurality of holes in an area overlapping with one line of the imaging range of the line scan camera, in both the main scanning direction in which the imaging range extends and in a sub-scanning direction that intersects with the main scanning direction.

[0014] In the present invention, the height position of the annular surface of the teaching jig can be set to be equal to the height position of the upper surface of the work when the work is placed on the inspection work placement surface.

[0015] Another aspect of the present invention is a marking device having an inspection unit that identifies a defect position found in an image captured by a camera of a flat workpiece placed on an inspection workpiece mounting surface as a position on a first coordinate on the image, and a marking unit that is equipped with a drive mechanism that moves a marking head relative to a workpiece transported from the inspection unit to a workpiece mounting surface for marking, and that applies marking to a defective portion of a workpiece determined to be defective by the inspection unit, wherein a teaching jig used to teach the drive mechanism a second coordinate on the workpiece placed on the workpiece mounting surface as a coordinate corresponding to the first coordinate is characterized in that a plurality of second positioning portions consisting of the other of the convex portions and concave portions into which a first positioning portion consisting of one of the convex portions and concave portions provided on the marking head fits are arranged in two intersecting directions.

[0016] In the present invention, the second coordinates are taught based on the position where the first positioning part of the marking head fits into the second positioning part of the teaching jig, so the second coordinates can be set appropriately, and therefore the defective position of the flat workpiece can be appropriately marked. Effect of the Invention

[0017] In the present invention, the second coordinates are taught based on the position where the first positioning portion provided on the marking head is fitted into the second positioning portion provided on the teaching jig, so that the second coordinates can be set appropriately. Therefore, the defective position of the flat workpiece can be properly marked. [Brief description of the drawings]

[0018] [Figure 1] 1 is an explanatory diagram of a mark made by a marking device to which the present invention is applied. [Diagram 2]1 is a side view of a marking device according to an embodiment of the present invention. [Diagram 3] FIG. 3 is a side view showing a vertical drive mechanism and the like of the marking unit shown in FIG. 2. [Figure 4] FIG. 3 is a front view showing a rotation drive mechanism and the like of the marking unit shown in FIG. 2. [Diagram 5] FIG. 3 is an explanatory diagram showing an enlarged view of the marking head shown in FIG. 2. [Figure 6] FIG. 3 is a plan view of a work holder used in the marking device shown in FIG. 2 . [Figure 7] 3 is a plan view of a teaching tool used in a teaching process of the marking device shown in FIG. 2. [Figure 8] 8 is a cross-sectional view of a hole in the teaching jig shown in FIG. 7. [Figure 9] 8 is an explanatory diagram showing a state where the teaching jig shown in FIG. 7 is used in a second coordinate teaching step. [Figure 10] 8 is an explanatory diagram of a second coordinate teaching process using the teaching jig shown in FIG. 7. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] An embodiment of the present invention will be described with reference to the drawings. In the following description, three mutually orthogonal directions will be referred to as X-axis, Y-axis, and Z-axis directions. The X-axis direction is the front-rear direction, the Y-axis direction is the width direction, and the Z-axis direction is the up-down direction. (Overall composition) Fig. 1 is an explanatory diagram of a mark M made by a marking device 1 to which the present invention is applied. Fig. 2 is a side view of the marking device 1 according to the embodiment of the present invention.

[0020] In FIG. 1, in a flat workpiece W such as a display panel or a printed wiring board, if a product is determined to be defective in an inspection process, the location of the defect may be marked to analyze the cause of the defect. A mark M is formed to surround the location of the defect. In this embodiment, the mark M is arc-shaped or circular. In this embodiment, the mark M is arc-shaped with a portion M0 missing in the circumferential direction. In this embodiment, the workpiece W is a display panel.

[0021] As shown in Figure 2, the marking device 1 has an inspection section 100 located above the machine base 3, which identifies defective locations discovered from an image captured by a camera 150 of a workpiece W placed on an inspection workpiece placement surface 110, and a marking unit 10 which applies marking to defective locations of the workpiece W determined to be defective by the inspection section 100.

[0022] The camera 150 is a line scan camera 151 whose main scanning direction is oriented in the Y-axis direction perpendicular to the X-axis direction which is the transport direction of the work W, and the work W is transported in the X-axis direction which is the sub-scanning direction by the panel transport mechanism 13 indicated by the arrow X1. Therefore, the camera 150 can capture an image of the entire display area of ​​the work W when performing a lighting inspection of the work W. The panel transport mechanism 13 is composed of a linear actuator such as a feed screw mechanism.

[0023] The inspection workpiece placing surface 110 is composed of a plurality of rollers that support the workpiece W from below. Like the inspection workpiece placing surface 110, the marking workpiece placing surface 2 is also composed of a plurality of rollers that support the workpiece W from below. Therefore, the workpiece W is transported from the inspection workpiece placing surface 110 to the marking workpiece placing surface 2 by the panel transport mechanism 13. However, when marking is performed on the workpiece W by the marking head 50, the panel transport mechanism 13 is in a stopped state.

[0024] The marking unit 10 includes a drive mechanism for moving the marking head 50 relative to the workpiece W transferred from the inspection section 100 to the marking workpiece mounting surface 2. The drive mechanism moves the marking unit 10 in the X-axis direction, for example, as shown by arrows X0 and Y0 in FIG. The marking unit 10 includes an X-axis driving mechanism 11 that drives the marking unit 10 in the X-axis direction, and a Y-axis driving mechanism 12 that drives the marking unit 10 in the Y-axis direction.

[0025] In this embodiment, the workpiece placing surface 2 for marking and the workpiece placing surface 110 for inspection are continuous, but the workpiece W is inspected, for example, while placed on the workpiece placing surface 110 for inspection, which is separate from the workpiece placing surface 2 for marking, and only the workpiece W with a defect may be transported to the workpiece placing surface 2 for marking by a robot or the like.

[0026] The workpiece W may be transported alone or may be transported while being held by a work holder. In this embodiment, the workpiece W is transported while being held by a work holder 200, which will be described later with reference to Fig. 6, but the work holder 200 is not shown in Fig. 1.

[0027] (Configuration of marking unit 10) Fig. 3 is a side view showing the vertical drive mechanism 30 etc. of the marking unit 10 shown in Fig. 2. Fig. 4 is a front view showing the rotation drive mechanism 70 etc. of the marking unit 10 shown in Fig. 2. Fig. 5 is an explanatory view showing an enlarged view of the marking head 50 shown in Fig. 2.

[0028] As shown in Figs. 3 and 4, the marking unit 10 includes a base 20 that supports each member described below, a vertical drive mechanism 30 fixed to a vertical plate 201 of the base 20, a movable block 40 that is driven vertically relative to the base 20 by the vertical drive mechanism 30, and a marking head 50 that is supported by the movable block 40 so as to be movable in the vertical direction. The base 20 includes a vertical plate 201, and horizontal plates 202, 203 that are horizontally bent at the end of the vertical plate 201. The vertical drive mechanism 30 is a fluid pressure cylinder device 31 to which the movable block 40 is connected below, and is fixed to the vertical plate 201 of the base 20. The marking head 50 includes a marking pen 5 made of felt, synthetic fiber, or synthetic resin and having a pen tip 5a facing downward. The marking pen 5 is a type of pen that can be appropriately refilled with oil-based ink.

[0029] The marking head 50 includes a pen holder 51 that holds a marking pen 5. The pen holder 51 includes a disk-shaped inner member 52 that holds the marking pen 5 at an eccentric position radially displaced from the center, and an outer member 54 that supports the inner member 52 via a cylindrical radial bearing 53 so as to be rotatable about a rotation center axis L that passes through the center of the inner member 52 and extends in the vertical direction.

[0030] 5, the inner member 52 includes a first member 521 made of a cylindrical collar that holds the pen holder 51 inside, a second member 522 to which the first member 521 is fixed inside by a bolt 592, and a stopper 523 fixed to the lower end of the first member 521 by a bolt 593, and the stopper 523 engages with the tip side of the marking pen 5. Therefore, the marking pen 5 can be inserted inside the first member 521 from above, but the stopper 523 prevents the marking pen 5 from falling out downward from the first member 521. A support plate 590 that supports the radial bearing 53 is fixed to the second member 522 by a bolt 591.

[0031] 3 and 4, in the marking head 50, a vertical shaft 56 extends upward from the outer member 54, and a cylindrical member 41 that supports the vertical shaft 56 of the pen holder 51 so as to be vertically movable is fixed to the movable block 40. Thus, the marking head 50 is supported by the movable block 40 via the vertical shaft 56 so as to be vertically movable. In the pen holder 51, the outer member 54 cannot rotate due to the vertical shaft 56 and the cylindrical member 41.

[0032] A stopper 57 that abuts against the cylindrical member 41 from above abuts against the upper end of the vertical shaft 56. Therefore, when the fluid pressure cylinder device 31 lowers the movable block 40, the marking head 50 including the pen holder 51 lowers by its own weight while the vertical shaft 56 is guided by the cylindrical member 41. Also, when the fluid pressure cylinder device 31 raises the movable block 40, the marking head 50 rises. In this embodiment, two sets of the vertical shaft 56, the cylindrical member 41, and the stopper 57 are provided around the marking pen 5 between the outer member 54 and the movable block 40.

[0033] A shock absorber 26 is provided between the base 20 and the movable block 40. The shock absorber 26 damps the descent speed at the lowering end when the movable block 40 descends. A vertical plate 42 is connected to the movable block 40 so as to be adjacent to the fluid pressure cylinder device 31, and a shock absorber 27 is provided between the vertical plate 42 and the base 20. The shock absorber 27 damps the descent speed at the upper end when the movable block 40 ascends, and also acts as a stopper that determines the ascending position of the movable block 40.

[0034] The marking unit 10 has a rotation drive mechanism 70 mounted on the horizontal plate 202 of the base 20. The rotation drive mechanism 70 rotates the inner member 52 of the pen holder 51 around the rotation center axis L. More specifically, a vertical shaft 55 extends upward from the inner member 52, while the rotation drive mechanism 70 includes a rotary actuator 71, a horizontal plate 73 connected to an output shaft 72 of the rotary actuator 71, and a vertical plate 74 extending downward from an end of the horizontal plate 73. Two rollers 75 are attached to the side of the vertical plate 74, which abut against the vertical shaft 55 from both sides. Therefore, when the output shaft 72 of the rotary actuator 71 rotates and the horizontal plate 73 and the vertical plate 74 rotate around the rotation center axis L, the inner member 52 rotates together with the vertical shaft 55. A pressing member 58, which the upper end of the marking pen 5 abuts against, is fixed to the vertical shaft 55.

[0035] In the marking unit 10 configured in this manner, the outer member 54 of the pen holder 51 is fixed, while the inner member 52 is connected to the rotation drive mechanism 70. The central axis L0 of the marking pen 5 is spaced apart from the central axis L of rotation. The rotation drive mechanism 70 rotates the inner member 52 within an angular range of less than 360°. Therefore, the pen tip 5a of the marking pen 5 can apply an arc-shaped mark M with a portion M0 missing in the circumferential direction to the workpiece W, as shown in FIG. 1.

[0036] (Configuration of pen pressure adjustment mechanism 90) 3, in the marking unit 10, the weight G of the marking head 50 is utilized to bring the pen tip 5a of the marking pen 5 into contact with the workpiece W to perform marking. In this embodiment, a coil spring 94 is disposed between the movable block 40 and the marking head 50, which applies an upward biasing force S to the marking head 50 against the weight G of the marking head 50. Therefore, the pen pressure, which is the force with which the pen tip 5a contacts the workpiece W when marking the workpiece W, is a value obtained by subtracting the biasing force S of the coil spring 94 from the weight G of the marking head 50.

[0037] The marking unit 10 is provided with a pen pressure adjustment mechanism 90 that utilizes a coil spring 94 to adjust the pen pressure when marking the workpiece W with the marking pen 5. In the pen pressure adjustment mechanism 90, the length of the coil spring 94 is adjusted to adjust the biasing force S, thereby adjusting the pen pressure.

[0038] In this embodiment, the coil spring 94 is disposed between the movable block 40 and the marking head 50. The compression coil spring 95 is disposed in a vertically compressed state by the pen pressure adjustment mechanism 90. The pen pressure adjustment mechanism 90 includes the compression coil spring 95, a first spring support member 91 fixed to the marking head 50, and a second spring support member 92 fixed to the movable block 40 by a position adjustment fixture 93, and the compression coil spring 95 is disposed between the portions where the first spring support member 91 and the second spring support member 92 face each other in the vertical direction. Therefore, the vertical length of the compression coil spring 95 is adjusted depending on the vertical position of the second spring support member 92 when fixed to the movable block 40 by the fixture 93.

[0039] More specifically, the first spring receiving member 91 includes a shaft portion 911 around which the compression coil spring 95 is disposed, and a receiving portion 912 that protrudes from the upper end side of the shaft portion 911 and against which the upper end of the compression coil spring 95 abuts. The second spring receiving member 92 includes a first plate portion 921 whose middle position in the vertical direction is fixed to the movable block 40 by a fixing device 93, and a second plate portion 922 that is bent from the lower end of the first plate portion 921 and against which the lower end of the compression coil spring 95 abuts, and the compression coil spring 95 is disposed in a compressed state between the receiving portion 912 of the first spring receiving member 91 and the second plate portion 922 of the second spring receiving member 92. The fixing device 93 is a bolt. The second plate portion 922 is provided with an elongated hole 923 extending in the vertical direction, and a screw hole for fastening the fixing device 93 is formed on the side surface of the movable block 40. Therefore, the vertical position when the second spring support member 92 is fixed to the movable block 40 by the fixing device 93 can be adjusted within the vertical range of the elongated hole 923. In this pen pressure adjustment mechanism 90, the height h of the upper end portion of the second spring support member 92 from the upper surface of the movable block 40 is adjusted.

[0040] In the pen pressure adjustment mechanism 90 of this embodiment, two sets of a compression coil spring 95, a first spring receiving member 91, a second spring receiving member 92, and a fixing device 93 are provided.

[0041] (Configuration of monitoring device 60) In the marking unit 10, a monitoring device 60 that monitors the mark M marked on the workpiece W by the marking pen 5 is held on the base 20. The monitoring device 60 monitors the degree of smearing of the mark M, etc., and detects the timing to refill the marking pen 5 with ink.

[0042] In this embodiment, the monitoring device 60 is held at the lower end of a support shaft 65 fixed to the horizontal plate 202 of the base 20, and is located to the side of the marking head 50. The monitoring device 60 is an imaging device that images the mark M, and is tilted at an angle of about 5° so that the surface of the workpiece W can be properly monitored.

[0043] (Cap 80 composition) In Fig. 4, the marking device 1 has a cap 80 that covers the pen tip 5a from below while the marking head 50 is waiting above. The cap 80 is fixed to the support 4 extending upward from the machine base 3 shown in Fig. 2 via connecting members 86, 87, 88, and 89 shown in Fig. 4, and is located below the marking head 50. Note that a Y-axis drive mechanism 12 that drives the marking unit 10 in the Y-axis direction is provided between the connecting member 86 and the horizontal plate 203 of the base 20.

[0044] The cap 80 is provided with an annular seal member 82 that abuts against the outer peripheral surface of the marking pen 5 at the opening edge of the recess 81 in which the pen tip 5a is housed. The seal member 82 is made of rubber or the like. The seal member 82 may be arranged so as to abut against the pen holder 51 around the pen tip 5a. Here, the cap 80 is located below the marking head 50, and the marking device 1 is provided with a vertical drive mechanism 30 that drives the marking head 50 in the vertical direction, and a Y-axis drive mechanism 12 that drives the marking unit 10 in the Y-axis direction. Therefore, the marking head 50 can be moved in the vertical direction to a position that avoids the cap 80 when marking the workpiece W, and overlaps with the cap 80 in the vertical direction in the standby position. At the position, the marking head 50 is moved vertically to attach to and detach from the cap 80.

[0045] (operation) In the marking device 1 of this embodiment, the vertical drive mechanism 30 switches the height position of the marking head 50 between three levels: the uppermost position, the lowermost position, and an intermediate position. Fig. 4 shows the state in which the marking head 50 is located at the uppermost position, and the pen tip 5a is not attached to the cap 80.

[0046] When the vertical drive mechanism 30 lowers the movable block 40 from this state, the marking head 50 lowers. As a result, the pen tip 5a fits inside the recess 81 of the cap 80, and the seal member 82 abuts against the outer circumferential surface of the marking pen 5, resulting in a standby state. Therefore, in the standby state, the ink is less likely to evaporate from the pen tip 5a or solidify.

[0047] In this state, when the vertical drive mechanism 30 raises the movable block 40, the marking head 50 rises to the uppermost end, resulting in the state shown in FIG. 4. Next, when the Y-axis drive mechanism 12 drives the marking head 50 in the Y-axis direction, the marking head 50 moves to a position where it does not overlap with the cap 80 in the vertical direction. Next, when the vertical drive mechanism 30 lowers the movable block 40, the marking head 50 descends to the lowermost end, and the pen tip 5a abuts against the workpiece W. At that time, the pen tip 5a abuts against the workpiece W with the optimal pen pressure set by the pen pressure adjustment mechanism 90. Therefore, when the rotation drive mechanism 70 rotates the inner member 52 of the pen holder 51 around the rotation center axis L, a mark M is applied to the workpiece W.

[0048] After the marking is completed in this manner, the vertical drive mechanism 30 raises the marking head 50 to the uppermost position, and then the Y-axis drive mechanism 12 moves the marking head 50 to a position directly above the cap 80. Thereafter, the vertical drive mechanism 30 lowers the marking head 50 to the intermediate position. As a result, the marking head 50 is again in a standby state.

[0049] (Configuration of work holder 200) Fig. 6 is a plan view of the work holder 200 used in the marking device 1 shown in Fig. 2. In the marking device 1 shown in Fig. 2, the work holder 200 shown in Fig. 6 is a rectangular frame-shaped member, and includes plate parts 210 and 220 facing each other in the X-axis direction and plate parts 230 and 240 facing each other in the Y-axis direction. The plate part 220 is provided with a connecting part 250 with the panel conveying mechanism 13. The end part of the plate part 230 located on the plate part 240 side and the end part of the plate part 240 located on the plate part 230 side both serve as support surfaces 231 and 241 that support the work W from below, and a plurality of suction ports 233 and 243 of a vacuum suction mechanism that holds the work W are opened on the support surfaces 231 and 241.

[0050] Further, the plate portion 210 is provided with a positioning roller 214 that comes into contact with an end portion of the workpiece W. Further, the plate portions 230 and 240 are provided with clamp mechanisms 232 and 242 that press the end portion of the workpiece W from above. The plate portion 230 is provided with a positioning roller 234 that comes into contact with an end of the workpiece W, and an inclination adjustment portion 235 that adjusts the position of the positioning roller 234 in the Y-axis direction. Therefore, the inclination of the workpiece W in the work holder 200 can be adjusted.

[0051] (First coordinate teaching process) Fig. 7 is a plan view of the teaching jig 300 used in the teaching step of the marking device 1 shown in Fig. 2. Fig. 8 is a cross-sectional view of the hole 3315a of the teaching jig 300 shown in Fig. 7.

[0052] In the inspection section 100 of the marking device 1 shown in FIG. The position of a defect found in an image of the workpiece W captured by the camera 150 is specified as a position on the first coordinate on the image. Therefore, in the inspection unit 100, a first coordinate teaching process is performed to teach the inspection unit 100 the first coordinate before the actual inspection process. Specifically, the workpiece W is placed on the inspection workpiece placement surface 110 with the teaching jig 300 shown in FIG. 8 fixed to the workpiece holder 200. Here, the teaching jig 300 is a metal plate of the same size as the workpiece W, and the teaching jig 300 has sides 301 and 302 facing each other in the X-axis direction and sides 303 and 304 facing each other in the Y-axis direction. A recess 330 used for aligning the teaching jig 300 is provided at the end of the teaching jig 300. In this embodiment, the teaching jig 300 is an aluminum plate thicker than the workpiece W.

[0053] In the teaching jig 300, a hole 316a is formed in a first corner 306 formed by sides 301 and 303, a hole 317a is formed in a second corner 307 formed by sides 302 and 303, a hole 318a is formed in a third corner 308 formed by sides 302 and 304, and a hole 319a is formed in a fourth corner 309 formed by sides 301 and 304. In addition, a hole 315a is formed midway between holes 316a and 319a.

[0054] Here, the holes 316a and 317a are located at the same position in the Y-axis direction, and the holes 318a and 319a are located at the same position in the Y-axis direction. The holes 317a and 318a are located at the same position in the X-axis direction, and the holes 315a, 316a, and 319a are located at the same position in the X-axis direction. Therefore, in the teaching jig 300, a plurality of holes are arranged in the X-axis direction and the Y-axis direction, which are two directions that intersect with each other. Therefore, if the entire surface of the teaching jig 300 is imaged by the camera 150, the first coordinates on the image can be set with the holes 315a, 316a, 317a, 318a, and 319a as the reference points. Here, if at least three of the holes 315a, 316a, 317a, 318a, and 319a, 316a, 317a, 318a, and 319a, are located at the reference points, the first coordinates on the image can be set. Therefore, in the inspection process, when the entire surface of the workpiece W is imaged by the camera 150, if a defect is found, the position of the defect on the first coordinate system can be identified.

[0055] In this embodiment, as shown in Fig. 8, holes 315a, 316a, 317a, 318a, and 319a are all stepped holes whose inner diameters change at a midpoint in the depth direction so as to form an annular surface 310 at a midpoint in the depth direction. More specifically, holes 315a, 316a, 317a, 318a, and 319a all have a first hole 311 that opens at the bottom surface of teaching jig 300 and a second hole 312 that has a larger diameter than first hole 311 and opens at the top surface of teaching jig 300, and first hole 311 and second hole 312 are in communication with each other. Therefore, the first coordinates can be set with the center derived from the image of annular surface 310 when teaching jig 300 is imaged by camera 150 as a reference point. Therefore, holes 315a, 316a, 317a, 318a, and 319a can be reliably detected when the image is captured by camera 150. Furthermore, the height position of annular surface 310 of teaching jig 300 is equal to the height position of the upper surface of workpiece W when workpiece W is placed on inspection workpiece placement surface 110. Therefore, the teaching process can be performed under the same conditions as when the workpiece W is actually imaged.

[0056] In this embodiment, as shown in FIG. 7, a plurality of holes 315b, 316b, 319b are formed around the holes 315a, 316a, 319a. Therefore, when the first coordinate teaching process is performed, the teaching jig 300 includes a plurality of holes 315a, 315b, 316a, 316b, 319a, 319b in both the main scanning direction in which the imaging range extends and the sub-scanning direction intersecting with the main scanning direction when the imaging range of the line scan camera 151 for one line overlaps the holes 315a, 316a, 319a as shown by the dashed line P in FIG. 7. Therefore, in the first stage of the first coordinate teaching process, the inclination of the imaging range of the line scan camera 151 with respect to the teaching jig 300 can be detected. Therefore, when the imaging range of the line scan camera 151 for one line overlaps the holes 315a, 316a, 319a, as shown by the dashed line P in FIG. 7, the holes 315a, 315b, 316a, 316b, 319a, 319b are included in both the main scanning direction in which the imaging range extends and the sub-scanning direction intersecting with the main scanning direction. Therefore, in the first stage of the first coordinate teaching process, the inclination of the imaging range of the line scan camera 151 with respect to the teaching jig 300 can be detected. 6, the tilt of the imaging range of line scan camera 151 relative to teaching jig 300 can be corrected in the first stage of the first coordinate teaching process. Therefore, the first coordinate can be properly taught to the inspection unit.

[0057] (Second coordinate teaching process) Fig. 9 is an explanatory diagram showing a state where the teaching jig 300 shown in Fig. 7 is used in the second coordinate teaching process. Fig. 10 is an explanatory diagram of the second coordinate teaching process using the teaching jig 300 shown in Fig. 7.

[0058] In a second coordinate teaching process in which the X-axis drive mechanism 11 and the Y-axis drive mechanism 12 are taught to make the second coordinate on the workpiece W placed on the marking workpiece placement surface 2 correspond to the first coordinate, the marking head 50 is provided with a first positioning portion 510 consisting of one of a convex portion and a concave portion, the teaching jig 300 is provided with a plurality of second positioning portions 380 consisting of the other of a convex portion and a concave portion, and the second coordinate is taught based on the position where the second positioning portions 380 fit into the first positioning portions 510. Therefore, the teaching jig 300 is arranged in a plurality of directions in the X-axis and Y-axis directions that intersect with each other.

[0059] In this embodiment, as shown in Figures 9 and 10, when performing the second coordinate teaching process, the first positioning portion 510 consists of a recess, and a pin 385 for constituting the second positioning portion 380 consisting of a protrusion is fixed in holes 315a, 316a, 317a, 318a, 319a of the teaching jig 300 via a cylindrical member 386.

[0060] In addition, when the second coordinate teaching process is performed in the marking head 50, at least the marking pen 5 is removed from the marking head 50, and a part 515 provided with a first positioning portion 510 consisting of a recess is attached to the marking head 50. More specifically, the first member 521 and the stopper 523 shown in FIG. 5 are removed, and the part B 515 is fixed to the second member 522 by a bolt 592. In this state, the first positioning portion 510 is located on the central axis L of rotation.

[0061] In this embodiment, a pin 385 is fixed to at least holes 316a, 317a, 318a, 319a of the teaching jig 300 to form a second positioning portion 380, and the marking head 50 is manually moved to teach a second coordinate based on the position where the second positioning portion 380 fits into the first positioning portion 510.

[0062] In this manner, in this embodiment, the second coordinates are taught based on the position where the first positioning unit 510 provided on the marking head 50 is fitted into the second positioning unit 380 provided on the teaching jig 300, so that the second coordinates can be set appropriately. Therefore, marking can be performed appropriately at the defective position of the flat workpiece W. In addition, since a common teaching jig 300 is used in the first coordinate teaching process and the second coordinate teaching process, the first coordinate and the second coordinate correspond appropriately. Therefore, if the control unit (not shown) of the marking device 1 converts the first coordinates into the second coordinates and controls the X-axis driving mechanism 11 and the Y-axis driving mechanism 12, marking can be performed appropriately at the defective position found by the inspection unit 100.

[0063] [Other embodiments] In the above embodiment, the first positioning portion 510 is a recess and the second positioning portion 380 is a protrusion, but the first positioning portion 510 may be a protrusion and the second positioning portion 380 may be a recess.

[0064] In the above embodiment, the mark M is an arc shape with a part M0 missing in the circumferential direction. However, a configuration may be adopted in which a circular mark M is applied. In the above embodiment, the marking pen 5 is rotated when applying the mark M, but the present invention may be applied to a marking device of a type in which the pen tip 5a is brought into contact with the workpiece W without rotating the marking pen 5, in which the pen pressure is adjusted. [Explanation of symbols]

[0065] 1...marking device, 2...marking work placement surface, 5...marking pen, 5a...pen tip, 10...marking unit, 11...X-axis drive mechanism, 12...Y-axis drive mechanism, 13...panel transport mechanism, 20...base, 30...vertical drive mechanism, 31...fluid pressure cylinder device, 40...movable block, 41...cylindrical member, 50...marking head, 51...pen holder, 52...inner member, 53...radial bearing, 54...outer member, 60...monitoring device, 70...rotation drive mechanism, 71...rotary actuator, 80...cap, 90...pen pressure adjustment mechanism, 94...coil spring, 95...compression coil Le spring, 100... inspection part, 110... inspection workpiece placement surface, 150... camera, 151... line scan camera, 200... workpiece holder, 300... teaching jig, 306... first corner, 307... second corner, 308... third corner, 309... fourth corner, 315a, 315b, 316a, 316b, 317a, 318a, 319a, 319b... holes, 310... annular surface, 380... second positioning part, 385... pin, 510... first positioning part, 515... part, 521... first member, 522... second member, G... weight, L... rotation center axis, L0... center axis, M... mark, S... biasing force, W... workpiece

Claims

1. A teaching method for a marking device having an inspection section that identifies a defect position found in an image captured by a camera of a flat workpiece placed on an inspection workpiece placement surface as a position on a first coordinate on the image, and a marking unit that includes a drive mechanism that moves a marking head relative to a workpiece transported from the inspection section to a marking workpiece placement surface, and that applies a mark to a defective portion of the workpiece determined to be defective by the inspection section, In a second coordinate teaching step of teaching a second coordinate on a workpiece placed on the workpiece placement surface to the driving mechanism as a coordinate corresponding to the first coordinate, A teaching method for a marking device, characterized in that the marking head is provided with a first positioning portion consisting of one of a convex portion and a concave portion, while a teaching jig having a plurality of second positioning portions consisting of the other of the convex portions and the concave portions arranged in two intersecting directions is placed on the marking workpiece mounting surface, and the teaching jig and the marking head are moved relative to each other to teach the second coordinates based on the position where the second positioning portion fits into the first positioning portion.

2. The teaching method for a marking device according to claim 1, The first positioning portion is a recess, The teaching tool has a hole, A teaching method for a marking device, characterized in that, when the second coordinate teaching step is performed, a pin for constituting the first positioning portion is fixed in the hole.

3. The teaching method for the marking device according to claim 2, The marking head includes a pen holder for holding a marking pen, The pen holder includes a disk-shaped inner member that holds the marking pen at an eccentric position radially displaced from a center, and an outer member that rotatably supports the inner member via a radial bearing around a rotation central axis that passes through a center of the inner member and extends in a vertical direction, The marking unit includes a rotation drive mechanism that rotates the inner member around the rotation center axis, A teaching method for a marking device, characterized in that the first positioning portion is provided on the central axis of rotation.

4. The teaching method for a marking device according to claim 3, A teaching method for a marking device, characterized in that when performing the second coordinate teaching process, at least the marking pen is removed from the marking head, while a part having the first positioning portion consisting of a recess is attached to the marking head.

5. The teaching method for the marking device according to any one of claims 2 to 4, In a first coordinate teaching step of teaching the first coordinate to the inspection unit, A teaching method for a marking device, characterized in that, with the teaching jig having the pin removed from the hole placed on the inspection workpiece mounting surface, the first coordinate is taught based on the position of the hole when the teaching jig is imaged by the camera.

6. The teaching method for a marking device according to claim 5, the hole is a stepped hole whose inner diameter changes midway in the depth direction so as to form an annular surface at the midway position in the depth direction, A teaching method for a marking device, comprising the steps of: teaching the first coordinates based on the position of the annular surface of the hole when the teaching jig is imaged by the camera.

7. The teaching method for the marking device according to claim 5 or 6, the camera is a line scan camera; A teaching method for a marking device, characterized in that the teaching jig includes a plurality of holes in an area overlapping with one line of the imaging range of the line scan camera, in both the main scanning direction in which the imaging range extends and the sub-scanning direction intersecting the main scanning direction.

8. The teaching method for a marking device according to claim 6, A teaching method for a marking device, characterized in that the height position of the annular surface of the teaching jig is equal to the height position of the upper surface of the work when the work is placed on the inspection work placement surface.

9. a marking device including: an inspection section that identifies a defect position found in an image captured by a camera of a flat workpiece placed on an inspection workpiece placement surface as a position on a first coordinate on the image; and a marking unit that includes a drive mechanism that moves a marking head relative to a workpiece transported from the inspection section to a marking workpiece placement surface, and that applies a mark to a defective portion of the workpiece determined to be defective by the inspection section; a teaching tool used to teach the driving mechanism a second coordinate on a workpiece placed on the workpiece placement surface as a coordinate corresponding to the first coordinate, A marking device with a teaching jig, characterized in that a first positioning portion consisting of one of a convex portion and a concave portion provided on the marking head fits into the other of the convex portion and the concave portion, and a plurality of second positioning portions consisting of the other of the convex portion and the concave portion are arranged in two directions that intersect with each other.

10. 10. The marking device with a teaching jig according to claim 9, The marking head includes a pen holder for holding a marking pen, The pen holder includes a disk-shaped inner member that holds the marking pen at an eccentric position radially displaced from a center, and an outer member that rotatably supports the inner member via a radial bearing around a rotation central axis that passes through a center of the inner member and extends in a vertical direction, The marking unit includes a rotation drive mechanism that rotates the inner member around the rotation center axis, The marking device with a teaching jig, wherein the first positioning portion is provided on the central axis of rotation.

11. The marking device with a teaching jig according to claim 10, The first positioning portion is a recess, The teaching tool has a hole, A marking device with a teaching jig, characterized in that when teaching the second coordinates to the drive mechanism, a pin for constituting the second positioning portion consisting of a convex portion is fixed into the hole.

12. The marking device with a teaching jig according to claim 11, the hole is a stepped hole whose inner diameter changes midway in the depth direction so as to form an annular surface at the midway position in the depth direction, A marking device with a teaching jig, characterized in that when teaching the first coordinates to the inspection unit, coordinates that identify the defect position are taught based on the position of the annular surface of the hole when the teaching jig is imaged by the camera.

13. The marking device with a teaching jig according to claim 12, the camera is a line scan camera; The marking device with teaching jig is characterized in that the teaching jig includes a plurality of holes in an area overlapping with one line of the imaging range of the line scan camera, in both the main scanning direction in which the imaging range extends and the sub-scanning direction that intersects with the main scanning direction.

14. The marking device with a teaching jig according to claim 12 or 13, A marking device with a teaching jig, characterized in that the height position of the annular surface of the teaching jig is equal to the height position of the upper surface of the work when the work is placed on the inspection work placement surface.

Citation Information

Patent Citations

  • Marking position method for semiconductor chip marking device

    JP1993343275A

  • Method and apparatus of selectively marking semiconductor wafer

    JP1999074163A

  • Coating applicator

    JP2000015170A

  • Backup pin positioning tool

    JP2003174295A

  • Device for inspecting defect

    JP2003269929A