Workpiece support device and workpiece suction fixing method

Abstract

In order to achieve a workpiece support apparatus that performs suction and rigid body support at the same position, that attains compactness, and that can prevent chatter vibrations, the workpiece support apparatus has: a case member 3 that has an axial center 4 and that is provided to a workpiece support part 1 for supporting a workpiece 2; a support member 5 that is provided to the case member 3 so as to be movable in the axial center direction and that has one end part projecting outwardly from the case member 3 and supporting the workpiece 2 so as to serve as a projection end part 6; a suction pad 7 that is provided concentrically to the projection end part 6 and that suctions the workpiece 2; an adjustment device 8 that is provided between the support member 5 and the case member 3 in order to adjust contact pressure of the support member 5 with respect to the workpiece 2; an air intake path 9 that sets, to a negative pressure, the inside of the suction pad 7 contacting the workpiece 2 and that provides connection between a sucking port 11 provided to the case member 3 and an air intake port 10 provided to suction and fix the projection end part 6 to the workpiece 2; and a fixing device 13 that fixes the support member 5 to the case member 3 in a suction fixing state.

Description

[Technical field]

[0001] The present invention relates to a work support device that has a suction function in the work support and can compactly suction-lock and hold a work, and a work suction-fixing method. [Background technology]

[0002] When machining thin workpieces, they are prone to deformation, so they need to be supported by a work support. In addition, vibrations during machining can cause the workpiece to float, so they also need to be held down by a suction clamp.

[0003] For example, the device described in Patent Document 1 (JP Patent Publication 2002-283161) supports the lower surface of the workpiece from below, and therefore cannot prevent chatter vibrations.

[0004] The device described in Patent Document 2 (JP 2008-87125 A) uses a suction pad to suction and hold the underside of the workpiece, but it is not possible to prevent chatter vibrations due to the elastic deformation of the suction pad, which is made of an elastic material.

[0005] The device described in Patent Document 3 (JP Patent Publication 1-109042) attempts to prevent vibration of the workpiece by providing the suction cup and the support body in separate positions and distributing the support functions of suction and rigid support to support the workpiece, but because the functions are distributed, it is not possible to sufficiently prevent chatter vibration.

[0006] The above-mentioned conventional system has the following problems in addition to the problem of being unable to prevent chatter vibration. Because the suction clamp and work support are installed separately, it was not possible to make the system compact, and the work support could not be placed at multiple points.

[0007] If the head cap of the work support is a vacuum pad (suction pad), the weight becomes heavy because of the need for piping, etc., and the lifting spring becomes strong. This causes the workpiece to be significantly deformed.

[0008] Even if the workpiece is supported at multiple points using only a suction clamp device, deformation due to the load cannot be suppressed because there is no seat. If the workpiece is held by a suction clamp and multiple seating surfaces, distortion of the workpiece material will occur, so it is not possible to support the workpiece at multiple points.

[0009] A flat suction clamp device can clamp and hold a flat surface, but a flat suction clamp device cannot be used on a workpiece that has curved ends or a workpiece that has steps. [Prior art documents] [Patent documents]

[0010] [Patent Document 1] JP 2002-283161 A [Patent Document 2] JP 2008-87125 A [Patent Document 3] Japanese Patent Application Publication No. 01-109042 Summary of the Invention [Problem to be solved by the invention]

[0011] The present invention seeks to solve the problems associated with the prior art, and has an object to provide a work support device which can perform suction and rigid support at the same position, thereby making the device more compact and preventing chatter vibrations. [Means for solving the problem]

[0012] In order to achieve the above object, the present invention provides the following means. That is, the work support device of the present invention includes a cylindrical case member having an axis and provided at a work support section that supports a work, a support member provided on the case member so as to be movable in the axial direction and having one end that protrudes outward from the case member to support the work, a suction pad provided concentrically on the protruding end and adsorbs the work, an adjustment device provided between the support member and the case member to adjust the contact pressure of the support member on the work, an intake passage that creates a negative pressure inside the suction pad that is in contact with the work and communicates between an intake port provided to adsorb and fix the protruding end to the work and a suction port provided in the case member, and a fixing device that fixes the support member to the case member in the adsorbed and fixed state, and the fixing device includes a pressure contact member that is disposed on the outer circumferential surface side of the support member to allow axial movement of the support member, and that restrains axial movement of the support member by being pressure-contacted with the outer circumferential surface of the support member, The pressurizing member is pressed against the outer peripheral surface of the support member, and a pressurizing passage is provided in the case member so that a pressurized fluid acts on the pressurizing member from a fluid pressure supply port provided in the case member. The work support member has a pressurized fluid passage communicating with the fluid pressure supply port, and Suction port a pressure generating device is connected to the pressurized fluid passage, a negative pressure generating device is connected to the suction passage, the work is fixed to the work support portion, the suction pad is brought into contact with the underside of the work by the adjustment device, and then negative pressure is created within the suction pad by the negative pressure generating device, the protruding end is abutted against the work to adsorb and fix it, and after the suction and fixation, the support member is fixed to the case member by the fixing device.

[0013] The adjustment device preferably has a damper member that biases the support member in the protruding direction.

[0014] The adjustment device preferably includes a cylinder device for moving the damper member in the protruding direction.

[0015] It is preferable that the support member has a rod portion located within the case member, a central hole is provided in the center of the rod portion opening to the end face opposite the protruding end portion, and the damper member is housed in the central hole.

[0017] It is preferable that an opening / closing valve is provided in the intake passage of the protruding end, and a valve spring is provided which urges the opening / closing valve in the protruding direction to close it, and in the suction-fixed state, the opening / closing valve is abutted and fixed to the protruding end while maintaining an open state against the valve spring.

[0018] It is preferable that the relative axial position between the tip surface of the protruding end portion and the tip surface of the suction pad is adjustable.

[0019] It is preferable that the tip surface of the protruding end portion is located lower than the tip surface of the suction pad.

[0020] The workpiece suction and fixing method of the present invention comprises the steps of: The work support is provided A work support device is used in which a suction pad is provided on a protruding end of a support member that is movably provided on a case member, and the suction pad is The workpiece is fixed to the workpiece support. Work Underside of By bringing the suction pad into contact with the workpiece and creating a negative pressure inside the suction pad, the tip surface of the protruding end portion is brought into contact with the workpiece. Bottom surface abutting against The sample was fixed by adsorption. Then, the pressure is generated by a pressure generator. With a moving fixing device The support member is fixed to the case member. Effect of the Invention

[0021] According to the present invention, since the suction and fixation are performed at the same position, the device is compact and chatter vibrations can be prevented. [Brief description of the drawings]

[0022] [Figure 1] 1 is an explanatory diagram of a state in which a work support device according to an embodiment of the present invention is used; [Diagram 2]FIG. 13 is a cross-sectional view showing an embodiment of the present invention in which a fluid pressure lift is used as an adjustment device, and in which the support member is in a lowered position and in a free state. [Diagram 3] 3A shows the state in which the support member is raised and the suction pad is in contact with the workpiece, and FIG. 3B shows the suction-fixed state. FIG. [Figure 4] FIG. 13 is a cross-sectional view showing another embodiment of the present invention, in which a spring lift is used as an adjustment device and the support member is in a raised position and in a free state. [Diagram 5] 5A and 5B are diagrams illustrating the device in use in FIG. 4, in which (a) shows the state in which the workpiece has been lowered and the suction pad has come into contact with the workpiece, and (b) shows the suction-fixed state. [Figure 6] FIG. 13 is a cross-sectional view showing another embodiment of the present invention, in which a fluid pressure lift is used as the adjustment device and an on-off valve is used as the negative pressure device, in a free state in which the support member is in a lowered position. [Figure 7] 7A and 7B are diagrams showing the state in which the device in FIG. 6 is used, in which (a) shows the state in which the support member has risen and the suction pad and the on-off valve have come into contact with the workpiece, and (b) shows the suction-fixed state. [Figure 8] FIG. 11 shows another embodiment of the present invention, in which a fluid pressure lift is used as the adjustment device, and the protruding end portion is freely adjustable in height by adjusting a screw, and is a cross-sectional view of a free state in which the support member is in a lowered position. [Figure 9] 9A and 9B are diagrams illustrating the device in use in FIG. 8, in which (a) shows the state in which the support member has risen and the suction pad has come into contact with the workpiece, and (b) shows the suction-fixed state. [Figure 10] FIG. 11 shows another embodiment of the present invention, in which a fluid pressure lift is used as the adjustment device, and the protruding end portion is freely adjustable in height by adjusting a screw, and is a cross-sectional view of a free state in which the support member is in a lowered position. [Figure 11] FIG. 11 is an explanatory diagram showing a state in which the work support device shown in FIG. 10 is used. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. 1, the work support device of this embodiment is provided on a work support part 1. A work 2 is attached to the work support part 1. The work support device adheres and fixes the lower surface of the work 2 at the same position to prevent vibration during machining such as cutting.

[0024] The work support device has a case member 3. The case member 3 is provided on the work support portion 1. The case member 3 has a shaft center 4.

[0025] There is no particular limitation on the structure for mounting the case member 3 on the work support portion 1. For example, the case member 3 is formed into a cylindrical body, threads are formed on the outer peripheral surface of the cylindrical body, and the case member 3 is screwed to the work support portion 1 with the threads. Alternatively, a flange is provided on the case member 3, and the flange is fixed to the work support portion 1 (see the embodiment shown by the imaginary line). By using screw connection, the axial mounting position of the work support device can be adjusted.

[0026] The work support device has a support member 5. The support member 5 is provided in the case member 3 so as to be movable in the axial direction. One end of the support member 5 in the axial direction forms a protruding end portion 6 that protrudes outward from the case member 3.

[0027] The work support device has a suction pad 7. The suction pad 7 is provided concentrically on the protruding end 6 of the support member 5. The suction pad 7 is adapted to adhere to the work 2 and is made of an elastic material such as rubber. The shape of the suction pad 7 is not particularly limited, but for example, it has a base that is fixed to the protruding end 6 and has an opening periphery that opens upward from the base in a trumpet shape, and this periphery forms an adsorption surface.

[0028] The work support device has an adjustment device 8. The adjustment device 8 is provided between the support member 5 and the case member 3 in order to adjust the contact pressure of the support member 5 against the work 2. This adjustment device 8 prevents the support member 5 from pushing up the work 2 with too much force, which would cause the work 2 to be deformed.

[0029] A specific example of the adjustment device 8 is a weak spring elastic member or the like interposed between the support member 5 and the case member 3 .

[0030] The work support device has an intake passage 9. The intake passage 9 can be configured to communicate between an intake port 10 provided at the protruding end 6 in the suction pad 7 and a suction port 11 provided in the case member 3. A negative pressure generating device 12 such as a vacuum pump is connected to the suction port 11.

[0031] By creating a negative pressure inside the suction pad 7 through this suction passage 9, the tip face of the protruding end 6 is brought into contact with the outer surface of the workpiece 2, thereby maintaining the suction-fixed state.

[0032] The work support device has a fixing device 13. The fixing device 13 fixes the support member 5 to the case member 3 in the above-mentioned suction-fixed state.

[0033] The operation of the work support device having the above configuration will now be described. The suction pad 7 of the work support device and the work 2 approach each other, and the suction surface at the upper end of the suction pad 7 abuts against the underside of the work 2. This abutment pressure is adjusted by an adjustment device 8, so that the support member 5 does not push up the work 2 with a large force and deform the work 2.

[0034] By creating a negative pressure inside the intake passage 9 using the negative pressure generator 12 and creating a negative pressure inside the suction pad 7, the suction pad 7 deforms and pulls the support member 5 toward the workpiece 2, and the tip surface of the protruding end 6 is firmly adsorbed and fixed to the underside of the workpiece 2.

[0035] The support member 5 is fixed to the case member 3 by the fixing device 13. As a result, the lower surface of the workpiece 2 is fixed to the case member 3, and vertical vibration (chatter vibration) of the workpiece 2 fixed to the work support portion 1 is prevented at one point of the suction pad 7.

[0036] As is clear from the above explanation, the "suction fixation" of the present invention is a fixation of the support member 5 to the workpiece 2 while it is lightly pressed against it by the adjustment device 8, and is different from the "press fixation" in which the support member 5 is strongly pressed against it. That is, in "suction fixation", the pushing force acting on the workpiece from the case member is a pushing force by the adjustment device, whereas in "press fixation", the pushing force is a direct pushing force from the case member.

[0037] The method for suction and fixing the workpiece will be described with reference to FIG. This method is performed using a work support device in which a suction pad 7 is provided on a protruding end 6 of a support member 5 movably provided on a case member 3. The suction pad 7 is brought into contact with the work 2, and a negative pressure is created inside the suction pad 7, causing the tip face of the protruding end 6 to come into contact with the outer surface of the work 2, and then the support member 5 is fixed to the case member 3.

[0038] This method allows for "suction fixation" rather than "press fixation," preventing deformation of the workpiece by the work support device and preventing vertical vibration.

[0039] Fig. 2 shows an embodiment with a more specific configuration, and is a cross-sectional view of the work support device of this embodiment in a free state before supporting the workpiece 2. Note that the same components as those shown in Fig. 1 will be described using the same reference numerals.

[0040] The case member 3 is formed in a cylindrical shape, and has a screw 14 formed on its outer circumferential surface. The case member 3 is fastened to the work support portion 1 by the screw 14.

[0041] A support member insertion hole 15 is provided vertically penetrating the center of the case member 3. The axis of this insertion hole 15 corresponds to the axis 4 of the case member 3.

[0042] The diameter of the insertion hole 15 changes from its upper end to its lower end, becoming a small diameter section 16, a medium diameter section 17, and a large diameter section 18. A lid 19 is screwed onto the lower end of the large diameter section 18 to close the insertion hole 15.

[0043] The support member 5 has a rod portion 20 whose other axial end is located inside the case member 3. A central hole 21 that opens to the other axial end face is provided in the center of the rod portion 20. The protruding end portion 6 is connected and fixed to one end of the rod portion 20.

[0044] The rod portion 20 is slidably inserted into the small diameter portion 16 of the support member insertion hole 15 of the case member 3. A seal member 22 is provided in the small diameter portion 16. This seal member 22 prevents foreign matter from entering through a gap between the small diameter portion 16 and the rod portion 20. In particular, it is preferable that the seal member 22 be a scraper seal that prevents foreign matter from entering when the inside of the case member 3 becomes negative pressure.

[0045] The protruding end 6 is connected to the end of the rod portion 20 by a screw. A through hole 23 is formed in the center of the protruding end 6, penetrating in the vertical direction. A filter 24 is provided in the middle of the through hole 23. The filter 24 is detachably fixed to the through hole 23 by a filter fixing member 25. An intake port 10 is provided above the filter 24, opening into the side surface of the protruding end 6, and the intake port 10 and the through hole 23 communicate with each other. The through hole 23 communicates with a center hole 21 of the rod portion 20. The intake port 10, the through hole 23, and the center hole 21 form an intake passage 9.

[0046] A suction pad 7 is fixed to the protruding end 6. The suction pad 7 has an opening periphery 27 that opens upward from a base 26 in a trumpet shape, and this periphery 27 forms an adsorption surface. The tip surface of the protruding end 6 is located at the center of the adsorption surface. The tip surface of the protruding end 6 is located below the adsorption surface. An air intake 10 that opens on the side surface of the protruding end 6 opens within the suction pad 7.

[0047] The base 26 of the suction pad 7 is airtightly fitted into the small diameter portion provided at the lower part of the protruding end 6, and is prevented from moving upward by a small diameter step 28. The lower end of the base 26 of the suction pad 7 is supported by a dish-shaped receiving member 29 provided at the protruding end, and is prevented from moving downward.

[0048] The adjustment device 8 has a damper member 30 that biases the support member 5 in the protruding direction, and a cylinder device 31 that moves the damper member 30 in the protruding direction.

[0049] The damper member 30 is configured with a rising spring made of a compression coil spring. The rising spring 30 is a weak spring. The rising spring, which is the damper member 30, is housed in the central hole 21 of the rod portion 20.

[0050] The cylinder device 31 has a cylinder chamber 32 formed in the case member 3, a piston 33 slidably housed in the cylinder chamber 32, and a piston rod 34 attached to the piston 33 and protruding upward from the cylinder chamber 32.

[0051] The cylinder chamber 32 is formed in the lid body 19. The lid body 19 has a protrusion 35 that protrudes upward. This protrusion 35 fits into the central hole 21 of the rod portion 20 to guide the movement of the support member 5 in the vertical direction.

[0052] A compression spring 36 abuts against the upper surface of a piston 33 housed in the cylinder chamber 31, and the piston 33 is constantly biased downward.

[0053] The cylinder chamber 32 below the piston 33 is formed as a fluid pressure supply port 37 that opens downward. This fluid pressure supply port 37 is connected to a pressurized fluid passage 38 formed in the work support portion 1. This pressurized fluid passage 38 is connected to a pressure generating device such as a pump or compressor (not shown). The pressurized fluid may be either a liquid or a gas.

[0054] The lifting spring 30 housed in the central hole 21 of the rod portion 20 has its lower end abutted against the upper end of the piston rod 34 and its upper end abutted against the lower end of the protruding end portion 6 .

[0055] Therefore, the support member 5 moves upward due to the upward movement of the piston 33 and the biasing force of the upward movement spring 30 .

[0056] The cover 19 is provided with a suction port 11 and an air intake passage 9 that communicates from the suction port 11 to the central hole 21 of the rod portion 20. The suction port 11 communicates with a suction passage 39 provided in the work support portion 1, and this suction passage 39 communicates with a negative pressure generator 12 (see FIG. 1).

[0057] The fixing device 13 has a pressing member 40 arranged on the outer circumferential surface side of the support member 5 to allow axial movement of the support member 5. The pressing member 40 restrains the axial movement of the support member 5 by pressing against the outer circumferential surface of the support member 5.

[0058] The fixing device 13 has a pressure section 41 that presses the pressure contact member 40 against the outer circumferential surface of the support member 5. The support member 5 is fixed to the case member 3 by the pressure contact member 40 being pressed by the pressure section 41.

[0059] The pressure contact member 40 is a cylindrical member that is fitted onto the rod portion 20 and can freely reduce or contract its diameter. The cylindrical member is formed into a tapered sleeve 42. The outer peripheral surface of the tapered sleeve 42 is formed into a tapered surface that increases in diameter downward. The lower end of the tapered sleeve 42 abuts against the upper surface of the lid 19 to prevent downward movement.

[0060] The pressurizing portion 41 is formed into a tapered piston 43 that is fitted onto the tapered sleeve 42 and is movable in the axial direction. The tapered piston 43 is fitted into the insertion hole 15 of the case member 3 across the medium diameter portion 17 and the large diameter portion 18. A seal material 44 is provided on the medium diameter portion 17 to maintain airtightness. The lower end of the tapered piston 43 is fitted onto the cover 19. A seal material 45 is provided on the cover 19 to maintain airtightness between the tapered piston 43 and the cover 19.

[0061] A gap 46 is formed between the tapered piston 43 and the inner surface of the large diameter portion 18. A pressurizing passage 47 communicating with this gap 46 is formed in the cover body 19. This pressurizing passage 47 communicates with the lower end of the cylinder chamber 32.

[0062] The tapered piston 43 is biased upward by a compression spring 48 that abuts against the upper surface of the lid 19. A shoulder of the tapered piston 43 located at the step at the boundary between the medium diameter portion 17 and the large diameter portion 18 serves as a pressure surface 49. The pressure surface 49 is pushed downward by the pressurized medium supplied from the gap 46, and the tapered piston 43 moves downward against the compression spring 48.

[0063] The inner surface of the tapered piston 43 is formed into a tapered surface with the same taper angle as the tapered sleeve 42. A large number of steel balls 50 are interposed between the tapered surface of the tapered piston 43 and the tapered surface of the tapered sleeve 42.

[0064] As the tapered piston 43 descends, the tapered sleeve 42 is tightened via the steel balls 50 , reducing its diameter and locking the rod portion 20 to the case member 3 .

[0065] Figure 3(a) shows the state in the device of Figure 2 where the piston 33 has risen and the opening edge 27 at the tip of the suction pad 7 is in contact with the underside of the workpiece 2, and Figure 3(b) shows the state in which the workpiece 2 is adsorbed and fixed at the same position by the suction pad 7 and support member 5.

[0066] 3(a), the workpiece 2 is fixed to the workpiece support portion 1. A pressurized medium is supplied to the fluid pressure supply port 37, the piston 33 rises, and the support member 5 rises via the rising spring 30, so that the opening periphery 27 of the suction pad 7 abuts against the bottom surface of the workpiece 2. In this abutting state, the tip surface of the protruding end portion 6 does not abut against the bottom surface of the workpiece 2.

[0067] The piston 33 rises further, but the rising spring 30 contracts and the support member 5 does not rise very much. In other words, the rising spring, which is the damper member 30, is made very weak and prevents the workpiece from being pushed up and deformed.

[0068] In this state, the pressurized medium supplied to the fluid pressure supply port 37 passes through the pressurized passage 47 and the gap 46 and also acts on the pressurized surface 49 of the shoulder of the tapered piston 43, but the tapered piston 43 does not yet move downward due to the biasing force of the compression spring 48, etc.

[0069] In this state, negative pressure is created inside the suction pad 7. That is, negative pressure is created inside the suction pad 7 by the negative pressure generator 12 (see FIG. 1). The negative pressure created by the negative pressure generator 12 creates negative pressure in the suction passage 39 of the work support portion 1, the suction port 11 of the case member 3, the intake passage 9 formed in the lid 19, the central hole 21 of the support member 5, the through hole 23 of the protruding end portion 6, and the intake port 10, and the inside of the suction pad 7 becomes negative pressure.

[0070] 3(b), negative pressure inside the suction pad 7 causes the suction pad 7 to elastically deform and pull up the support member 5, so that the tip surface of the protruding end 6 is "adsorbed and fixed" to the underside of the workpiece 2. This suction fixation differs from the "pressure fixation" in which the support member 5 is raised in the state of (a) to press against the underside of the workpiece 2 and bring the tip surface of the protruding end 6 into contact, and since no upward pressing force is generated on the workpiece 2, there is no risk of deforming the workpiece 2. In other words, "pressure fixation" and "suction fixation" are different things.

[0071] When the tip surface of the protruding end portion 6 is fixed to the underside of the workpiece 2 by suction fixation of the suction pad 7, the pressure of the pressurized medium acting on the tapered piston 43 increases, and the tapered piston 43 moves downward against the compression spring 48. This downward movement of the tapered piston 43 causes the tapered sleeve 42 to contract in diameter via the steel balls 50, tightening the rod portion 20 and fixing the support member 5 to the case member 3.

[0072] Thus, the workpiece 2 is fixed by suction to the workpiece support device, preventing it from vibrating up and down. The negative pressure generator 12 may be operated before the state of Fig. 3(a) is reached. In this case, since the filter 24 is provided in the intake passage 9, the intake of foreign matter is prevented.

[0073] FIG. 4 shows another embodiment of the present invention, in which the adjustment device 8 does not include a cylinder device and is composed of only a damper member 30. In this embodiment, no cylinder device is provided on the cover 19. A rising spring support 51 is provided upright on the cover 19. The lower end of the rising spring, which is the damper member 30 of the adjustment device 8, is supported on this rising spring support 51.

[0074] A pressurized passage 47 communicating with a gap 46 formed between the tapered piston 43 of the fixing device 13 and the inner surface of the large diameter portion 18 is formed in the lid body 19. A fluid pressure supply port 37 communicating with the pressurized passage 47 is provided on the underside of the lid body 19. The other configuration is the same as that shown in FIG.

[0075] Figure 5(a) shows the state in which the workpiece 2 in the device of Figure 4 has been lowered and the suction surface at the tip of the suction pad 7 has come into contact with the underside of the workpiece 2, and Figure 5(b) shows the state in which the workpiece is suction-fixed at the same position by the suction pad 7 and support member 5.

[0076] In (a), when the workpiece 2 is lowered and fixed to the workpiece support portion 1, the lower surface of the workpiece 2 comes into contact with the opening periphery 27 of the suction pad 7. At this time, the rising spring which is the damper member 30 of the adjustment device 8 is compressed, and the support member 5 descends with the descent of the workpiece 2 until the contact pressure reaches a predetermined pressure. The rising spring 30 is set to a strength that does not deform the workpiece due to the contact pressure.

[0077] As shown in (b), a negative pressure is created inside the suction pad 7, and the tip surface of the protruding end portion 6 is attracted to and contacts the lower surface of the workpiece 2, and is fixed to the workpiece 2 by suction.

[0078] The fixing device 13 is actuated to fix the support member 5 to the case member 3. As a result, the lower surface of the workpiece 2 is sucked and fixed by the suction pad 7 and the support member 5, and is fixed to the case member 3 via the fixing device 13.

[0079] 6 shows another embodiment of the present invention, in which an intake port 10 is provided on the tip surface of the protruding end portion 6. An opening / closing valve 52 is provided to freely open and close this intake port 10. The opening / closing valve 52 is biased in the protruding direction by a valve spring 53 so that it protrudes outward from the intake port 10 and closes the valve.

[0080] The lower surface of the intake port 10 is formed as a valve seat 54. The on-off valve 52 has a flange 55 that comes into close contact with the valve seat 54. The valve spring 53 brings the flange 55 into close contact with the valve seat 54 to close the intake passage 9.

[0081] When the on-off valve 52 moves downward against the valve spring 53 to open the valve seat 54, the lower end surface 56 of the on-off valve 52 abuts against the protruding end portion 6 to close the intake passage 9. Therefore, the on-off valve 52 is provided with an intake passage 9 that communicates the intake passage 9 with the intake port 10 when the lower end surface 56 closes the intake passage 9.

[0082] The other configuration is the same as that shown in FIG.

[0083] Figure 7(a) shows the state in the device of Figure 6 where the support member 5 has risen and the suction surface at the tip of the suction pad 7 is in contact with the underside of the workpiece 2, and Figure 7(b) shows the state in which the workpiece 2 has been suction-fixed at the same position by the suction pad 7 and support member 5.

[0084] In (a), when negative pressure is created within the intake passage 9 with the suction surface at the tip of the suction pad 7 in contact with the underside of the workpiece 2, the opening / closing valve 52 moves downward against the valve spring 53, opens, and negative pressure is created within the suction pad 7.

[0085] As shown in (b), the support member 5 is pulled up, and the tip surface of the on-off valve 52 abuts against the workpiece 2, and the lower end surface 56 abuts against the protruding end portion 6. In this state, the support member 5 is fixed to the case member 3 by the fixing device 13. The on-off valve 52 may be one that opens when pressed by the workpiece 2 .

[0086] FIG. 8 shows another embodiment of the present invention, in which the relative axial position between the tip face of the protruding end portion 6 and the opening periphery 27 of the suction pad 7 is adjustable.

[0087] That is, a tip portion 57 is screwed to the protruding end portion 6 so that its axial position can be adjusted to form a tip surface. An intake passage 9 is formed at the joint between the protruding end portion 6 and the tip portion 57. A cylindrical filter 58 is provided in this intake passage 9, and the cylindrical filter 58 is fixed at the tip portion 57. The tip surface of tip portion 57 is formed in an arc or curved shape. The other configuration is the same as that shown in FIG.

[0088] Figure 9(a) shows the state in the device of Figure 8 where the support member 5 has risen and the suction surface at the tip of the suction pad 7 is in contact with the underside of the workpiece 2, and Figure 9(b) shows the state in which the workpiece is adsorbed and fixed at the same position by the suction pad 7 and support member 5.

[0089] In this embodiment, the relative axial position between the tip surface of the tip portion 57 and the opening periphery 27 of the suction pad 7 is adjustable, so that adjustment can be easily performed even if the workpiece 2 is changed.

[0090] Since the tip surface of the tip portion 57 is formed in an arc or curved shape, the workpiece 2 can be fixed by suction even on a curved or inclined surface.

[0091] FIG. 10 shows another embodiment of the present invention, in which the tip surface of the protruding end portion 6 that comes into contact with the workpiece 2 is formed into a curved surface 59 .

[0092] The tip surface of the protruding end portion 6 is rounded, the air intake port 10 of the protruding end portion 6 opens to the side surface, and the air intake passage 9 is not provided with a filter. The other configuration is the same as that shown in FIG.

[0093] FIG. 11 is an explanatory diagram of a mode of use of the work support device shown in FIG. Even if the periphery of the workpiece 2 is not flat but is curved or inclined, the tip surface of the protruding end portion 6 is curved 59, so that the workpiece can be fixed by suction.

[0094] In this case, if the relative axial position between the tip surface of the protruding end portion 6 and the opening periphery 27 of the suction pad 7 is adjustable as shown in FIG. 8, the range of usage patterns will increase.

[0095] The embodiments disclosed herein are illustrative in all respects and are not restrictive. For example, the support member 5 is not limited to one in which the rod portion 20 and the protruding end portion 6 are separate members, and may be one piece. The fixing device 13 is not limited to a tapered sleeve type, and may be an elastically deformable sleeve type as described in JP-A-2002-283161. The damper member 30 is not limited to an elastic member such as a spring, and may be a damper cylinder or the like, so long as it can abut the suction pad 7 with a predetermined abutment pressure. The shape of the suction pad 7 is also not limited to one that opens upward like a trumpet, and may be a bellows-like shape.

[0096] The scope of the present invention is defined by the claims, not by the above description, and includes all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0097] 1 Work support part 2 Work 3 Case parts 4 axis center 5 Support material 6 Protruding end 7 Suction Pad 8 Adjustment device 9 Intake passage 10 Air Intake 11 Suction port 12 Negative pressure generator 13 Fixation device 14 Screws 15 Support member insertion hole 16 Small diameter section 17 Medium diameter part 18 Large diameter section 19 Lid 20 Rod section 21 Center hole 22 Sealing material 23 Through hole 24 Filters 25 Filter fixing member 26 base 27 Opening Edge 28 Small diameter stepped section 29 Dish-shaped support member 30 Damper material (rising spring) 31 Cylinder device 32 Cylinder chamber 33 Piston 34 Piston rod 35 Convex 36 Compression spring 37 Fluid pressure supply port 38 Pressurized fluid passage 39 Suction passage 40 Pressure welding member 41 Pressure member 42 Tapered sleeve 43 Tapered piston 44 Sealing material 45 Sealing material 46 Gap 47 Pressurized passage 48 Compression Spring 49 Pressurized Surface 50 steel balls 51 Rising spring support 52 On-off valve 53 Valve spring 54 Valve seat 55 Flange 56 Lower end surface 57 Tip 58 Cylindrical Filter 59 Curved surface

Claims

1. A cylindrical case member having an axis and provided on a work support portion that supports a work; a support member provided on the case member so as to be movable in the axial direction, the support member having one end portion that projects outward from the case member and supports the workpiece; A suction pad is provided concentrically on the protruding end portion and is adapted to suction the workpiece; an adjustment device provided between the support member and the case member to adjust a contact pressure of the support member against the workpiece; an intake passage that communicates between an intake port provided to create a negative pressure inside the suction pad that is in contact with the workpiece and to suction-fix the protruding end portion to the workpiece and a suction port provided in the case member; a fixing device that fixes the support member to the case member in the suction-fixed state, the fixing device includes a pressure contact member that is disposed on an outer peripheral surface side of the support member to allow axial movement of the support member and that restrains the axial movement of the support member by being in pressure contact with the outer peripheral surface of the support member; a pressure unit that presses the pressure contact member against an outer circumferential surface of the support member; a pressure passage for applying a pressurized fluid to the pressurizing portion from a fluid pressure supply port provided in the case member, The workpiece support portion is formed with a pressurized fluid passage communicating with the fluid pressure supply port and a suction passage communicating with the suction port, a pressure generator connected to the pressurized fluid passage; A negative pressure generating device is connected to the suction passage, The workpiece is fixed to the workpiece support portion, After the suction pad contacts the underside of the workpiece by the adjustment device, the negative pressure generator creates a negative pressure inside the suction pad, and the protruding end portion abuts against the workpiece to suction and fix it; After the suction and fixation, the support member is fixed to the case member by the fixing device.

2. 2. The workpiece support device according to claim 1, wherein the adjustment device has a damper member for biasing the support member in a protruding direction.

3. 3. The work support device according to claim 2, wherein the adjustment device has a cylinder device for moving the damper member in a protruding direction.

4. the support member has a rod portion located within the case member, 4. The work support device according to claim 2, wherein a center hole is provided in the center of the rod portion, the center hole opening to an end face opposite to the protruding end, and the damper member is housed in the center hole.

5. an opening / closing valve is provided in the intake passage of the protruding end portion, and a valve spring is provided to bias the opening / closing valve in the protruding direction to close the valve; 5. The work support device according to claim 1, wherein in the attracted and fixed state, the on-off valve is maintained in an open state against the valve spring and is fixed in contact with the protruding end portion.

6. 6. The work support device according to claim 1, wherein the relative axial position between the tip surface of the protruding end portion and the tip surface of the suction pad is adjustable.

7. 7. The work support device according to claim 1, wherein a tip surface of the protruding end portion is positioned lower than a tip surface of the suction pad.

8. A method for suction fixing a workpiece, comprising: using a work support device having a suction pad attached to a protruding end of a support member which is freely movable and is provided on a case member provided on a work support section; abutting the suction pad against the underside of a workpiece fixed to the work support section; creating negative pressure within the suction pad so that the tip face of the protruding end comes into contact with the underside of the workpiece to suction-fix it; and then fixing the support member to the case member by a fixing device operated by pressurized fluid from a pressure generating device.

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