Pressure Sensors

JP7629866B2Active Publication Date: 2025-02-14NEDERLANDSE ORG VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
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Patent Information

Application Number
JP2021561864
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2019-04-17
Filing Date
2020-04-17
Publication Date
2025-02-14
Estimated Expiration
2040-04-17

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Abstract

The present disclosure relates to a pressure sensor comprising at least two adjacent conductive leads arranged in a pattern on a surface of a first elastic carrier, and an electrically resistive layer formed of an electrically resistive composite material for shunting the at least two adjacent conductive leads, the electrically resistive layer being arranged on a surface of a second elastic carrier. The first and second carriers are stacked with a spacer in between so that the at least two adjacent conductive leads face the electrically resistive layer across a gap defined by the spacer. The gap is formed by a pocket between the carriers. The first carrier including the at least two adjacent conductive leads and / or the second carrier including the electrically resistive layer are expandable and contractible to reduce the gap between the electrically resistive layer and the at least two adjacent conductive leads when subjected to a force acting in a direction across the gap. Closing the gap causes the adjacent conductive leads to shunt with a contact area and contact resistance that depend on the force. Gas within a gas containment structure between the carriers at least partially counteracts the applied force.
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Description

[Technical field]

[0001] The present disclosure relates to a force-sensitive resistor-based force sensor, and more particularly to an elastic article having a membrane resistor-based pressure sensor and a method for manufacturing the same. [Background technology]

[0002] Force-sensing resistor (FSR) sensors generally comprise a layer of force-dependent resistive material, usually in direct contact with an electrode. Various FSR inks are known that can form such layers. Typically, these materials comprise an elastic matrix material (e.g. rubber like PDMS) mixed with conductive filler particles (carbon nanotubes, graphite) below or around the percolation threshold. Compressing the material lowers the percolation threshold and can therefore form new conductive paths throughout the matrix via the conductive filler particles. US Pat. No. 5,399,433 discloses FSR materials formed from (semi)conductive particles dispersed within a compressible (elastomeric) material. In other cases, voids in a film are used to increase the sensitivity of a material in direct contact to pressure, as disclosed in US Pat. No. 5,499,433. Here, the flexible sensing material comprises carbon nanotubes.

[0003] Instead, as described in US Pat. No. 5,999,136, FSRs are constructed using an electrically resistive material applied to a force sensor formed from parallel membrane structures separated by a gap. In this type of device, two different operation modes can be distinguished. First, in the so-called "through mode", the applied force correlates to a current flowing from a circuit on the first membrane to another circuit on the second membrane through the electrically resistive material. When pressure is applied, the layers come into contact, which can be recorded by a resistance change between the circuits. The disadvantage of "through" type sensors is that they require complex wiring methods and / or more precise alignment during assembly. Furthermore, "through" type sensors are more difficult to interact with, since circuits are required on both layers across the gap. US Pat. No. 5,999,136 discloses a "shunt" type force sensor in which an electrically resistive layer membrane is suspended above a comb-shaped finger circuit. When the sensor is pressed, the comb circuit is circumvented by the electrically resistive layer. A drawback of the shunt mode is that it generally suffers from a non-ideal sensitivity curve due to a non-uniform relationship between force and resistance, e.g., a large change in resistance may be observed with a small change in applied force, and vice versa. This is generally solved by forming the finger electrodes using high-precision manufacturing techniques. The problems include that such techniques are not favorable for mass production. US Pat. No. 5,399,433 discloses a sensor that may be employed to detect the force distribution on a seating surface. The sensor includes at least one substrate layer, a plurality of sensor elements operatively disposed relative to the substrate layer, and conductive traces disposed on the substrate layer. By employing slits or cutouts, the sensor can move independently of adjacent sensors, allowing the sensor to conform to irregularly shaped surfaces. Disadvantages include that providing slits or cutouts is not favorable for mass production, and that stiff sensor foils can feel unnatural. Furthermore, there remains a need to provide a pressure sensor with improved long-term repeatability. The present invention solves at least one of these or further drawbacks by providing a pressure sensor as described herein that can be incorporated into textile products. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] U.S. Pat. No. 3,806,471 [Patent Document 2] U.S. Patent No. 9,278,856 [Patent Document 3] U.S. Pat. No. 5,033,291 [Patent Document 4] U.S. Patent No. 6,909,354 [Patent Document 5] U.S. Patent No. 6,964,205 Summary of the Invention [Means for solving the problem]

[0005] A first aspect of the present disclosure relates to a pressure sensor laminated on a textile sheet. The pressure sensor comprises at least two adjacent conductive leads arranged in a pattern on a surface of a first carrier, and an electrically resistive layer formed of a composite material for shunting the at least two adjacent conductive leads, the electrically resistive layer being arranged on a surface of a second carrier. The first and second elastic carriers are laminated across a spacer such that the at least two adjacent conductive leads face the electrically resistive layer through a gap defined by the spacer, forming a pocket structure defining a gas-filled gas containment structure that at least partially resists a force (F) applied to the pressure sensor. The first carrier includes at least two adjacent conductive leads, and the second carrier includes an electrically resistive layer. The carrier is stretchable such that, when subjected to a force (F) applied in a direction across the gap, a gap between the electrically resistive layer and the at least two adjacent conductive leads is reduced, and the carrier shunts the at least two adjacent electrically conductive leads using a resistive composite material (E) on a contact area (A) depending on the force applied. This creates a pressure-dependent electrical resistance between the conductive leads. The pocket structure includes a relief structure of microbumps and an opening for reducing the resistive force of the gas, the opening being dimensioned to prevent the gas from exiting the pocket. The first stretchable carrier and the second stretchable carrier include respective conductive leads and resistive layers that can bend toward each other when subjected to in-plane and / or out-of-plane forces and can shunt at least two adjacent conductive leads when in contact. By forming the adjacent conductive leads and / or the electrical resistive layer from a stretchable material, the contacted conductive leads and layers deform to create a pressure-dependent electrical conductivity toward the electrode. As a result, the electrical resistance between the at least two adjacent conductive leads is also pressure-dependent.

[0006] As mentioned above, the sensor comprises a pocket between the carriers. The initial separation distance, i.e. the initial first dimension (thickness) of the pocket, i.e. the initial distance across the gap, may be defined by the distance between the carriers in a resting state, i.e. in an initial position, e.g. without the application of an external force. The thickness of the spacer may thus define the vertical offset of the gap. The width of the pocket, i.e. the dimension of the pocket along the carrier, may be defined by the opposing sidewall portions of the separator. Alternatively, the width of the pocket may be defined between the sidewall portions of adjacent spacers. Furthermore, the width of the pocket may define the distance over which the carrier is unsupported. The elastic modulus of the carrier contributes to restoring the gap upon removal of the force. As mentioned above, the pocket including the opening defines a gas containment structure between the carriers, which is filled with a gas that at least partially counteracts the applied force. The gas containment structure may be understood to at least restrict the flow of gas, and preferably fix the total amount of gas within the sensor structure, e.g. restrict the flow of gas from within the structure to a volume outside the structure. The restricted gas flow may be understood to include restricted gas flow within the time frame of a pressure sensing event of the sensor. The gas may be understood to include air, e.g., ambient air. The inventors have found that a reduction in the separation distance between the carriers and a concomitant reduction in the volume of the pockets may result in compression of the gas trapped within the pockets and / or migration of the gas from the pockets. Without being bound by theory, the inventors believe that such compression and / or migration of the gas from the pockets at least partially counteracts the force exerted, e.g., through the gas restricting holes, and dampens the membrane displacement. Furthermore, the inventors have found that the inclusion of microstructured bumps on one or both of the sensor layers allows for pressure distribution and partial shunting within the tops of the bumps. The gas may reside in the recesses between the microstructured bumps.

[0007] The inventors have found that the separation distance between the carriers decreases, for example, when the carriers are subjected to an external force, resulting in compression of the gas. Providing the pressure sensor with stretchable first and second carriers and a stretchable spacer makes the entire sensor stretchable and / or flexible. Particularly for textile applications, the sensor preferably has a low Young's modulus and thickness to ensure conformability under tension. Matching the stretchability of the sensor to that of the textile can improve comfort for the user, for example for a person wearing a textile product including the pressure sensor. Many textiles have a stretchability of at least 5% in the length direction, and even at least 10% or more. Preferably, the thickness of the sensor does not exceed 5 mm. For textile applications, the thickness is preferably thin, for example less than 2 mm, or even for example less than about 1 mm, or less than about 0.5 mm, for example in the range of 0.5-0.1 mm. The minimum thickness of the pressure sensor is limited by the combined thickness of the carrier, the leads, the shunt layer, and the distance across the gap, i.e., the pocket height and / or the spacer thickness. It will be understood that the term textile should not be construed as being limited to woven fabrics, but rather textiles may also include other types of fabrics, such as leather, and / or rubbers, such as latex.

[0008] A second aspect of the present disclosure relates to a method for manufacturing a pressure sensor, preferably a pressure sensor according to the first aspect of the present invention and any embodiment described herein. The method includes providing a first carrier, a second carrier, and a spacer. The method further includes providing at least two adjacent conductive leads in a pattern on a surface of the carrier, e.g., the surface of the first carrier. On the other surface of the carrier, e.g., the surface of the second carrier, a composite material is deposited to form a conductive layer, the conductive layer having a suitable conductivity to shunt the at least two adjacent conductive leads. After providing the conductive leads and depositing the electrically resistive layer, the method includes stacking the first and second carriers with the spacer in between such that the at least two adjacent conductive leads face the electrically resistive layer across a gap defined by the spacer, the gap being a pocket defining a gas containment structure between the carriers filled with a gas that at least partially counteracts the applied force. [Brief description of the drawings]

[0009] These and other features, aspects, and advantages of the presently disclosed devices, systems, and methods will become better understood from the following description, appended claims, and accompanying drawings.

[0010] [Figure 1A] FIG. 1A illustrates a perspective view of one embodiment of a pressure sensor. [Figure 1B] FIG. 1B illustrates a schematic side cross-sectional view of an embodiment of a pressure sensor at rest and under compression. [Figure 2A] FIG. 2A illustrates a schematic of gas redistribution in a cross-sectional side view of one embodiment of a pressure sensor under compression. [Figure 2B] FIG. 2B illustrates a schematic of gas redistribution in a cross-sectional side view of one embodiment of a pressure sensor under compression. [Figure 3A] FIG. 3A shows a schematic cross-sectional side view of an electrical conduction pathway through a composite material at rest and in tension. [Figure 3B] FIG. 3B shows a schematic representation of the percolation threshold of the composite material. [Figure 4A] FIG. 4A illustrates a schematic representation of an embodiment of a parallel and helical interdigitated electrode design. [Figure 4B] FIG. 4B illustrates a schematic representation of an embodiment of a parallel and helical interdigitated electrode design. [Figure 4C] FIG. 4C shows a schematic of the force-dependent change in contact area for parallel and spiral electrode design embodiments. [Figure 5A] FIG. 5A shows force-power traces recorded for pressure sensor embodiments with parallel and spiral electrode designs. [Figure 5B] FIG. 5B shows force-power traces recorded for pressure sensor embodiments with parallel and spiral electrode designs. [Figure 6A] FIG. 6A shows a schematic of the embossing of the electrical resistance layer. [Figure 6B] FIG. 6B shows a micrograph of the embossed electrical resistance layer. [Figure 6C] FIG. 6C illustrates a schematic side cross-sectional view of an embodiment of a pressure sensor comprising an embossed electrically resistive layer. [Figure 6D] FIG. 6D shows the force-dependent measured resistance between the leads for an embodiment of a pressure sensor with an embossed electrically resistive layer. [Figure 7A] FIG. 7A illustrates a schematic side cross-sectional view of an embodiment of a pressure sensing element. [Figure 7B] FIG. 7B illustrates a perspective view of an embodiment of a pressure-sensing textile sheet. [Figure 7C] FIG. 7C depicts a photograph of a pressure-sensing textile sheet comprising an array of pressure sensors. [Figure 8A] FIG. 8A illustrates a perspective view of an embodiment of a mattress comprising an array of pressure sensors. [Figure 8B] FIG. 8B illustrates a schematic diagram of an embodiment of a method for manufacturing a pressure sensor. [Figure 9A] FIG. 9A shows the resistance measured between the leads of an embodiment of a pressure sensor. [Figure 9B]FIG. 9B illustrates a schematic electrical scheme for an array of pressure sensors in a passive matrix configuration. [Figure 10] FIG. 10 shows a photograph of a pressure distribution sensing product comprising an array of pressure sensors in a passive matrix configuration. [Figure 11A] FIG. 11A is a schematic embodiment of a pressure sensor with and without a microstructured relief pattern under an applied external force. [Figure 11B] FIG. 11B is a schematic embodiment of a pressure sensor with and without a microstructured relief pattern under an applied external force. [Figure 12A] FIG. 12A compares the pressure sensor response of a number of pressure sensor embodiments. [Figure 12B] FIG. 12B compares the pressure sensor response of a number of embodiment pressure sensors. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The terms used to describe particular embodiments are not intended to limit the invention. As used herein, the singular forms "a," "an," and "the" are intended to include the plural, unless the context clearly indicates otherwise. The term "and / or" includes any and all combinations of one or more of the associated listed items. It will be understood that the terms "comprises" and / or "comprising" specify the presence of the stated features, but do not exclude the presence or addition of one or more other features. Furthermore, when a particular step of a method is referred to as following another step, it will be understood that the other step may directly follow, or one or more intermediate steps may be performed before performing the particular step, unless otherwise specified. Similarly, when a connection between structures or components is described, it will be understood that the connection may be direct or through an intermediate structure or component, unless otherwise specified.

[0012] As used herein, the percolation threshold can be interpreted as a mathematical concept related to percolation theory, which is the formation of long-range connectivity in random systems. Above the threshold, large connected components generally exist, on the order of the system size. Providing a volume ratio of microparticles to dielectric matrix that is just above the percolation threshold can ensure that the microparticles form connected components throughout the dielectric matrix, on the order of the size of the electrode gap. This can generally be achieved by providing the microparticles with a relatively high packing density, for example, greater than 0.3 (30%) vol%, preferably greater than 0.5 vol%. The desired minimum ratio can also be experimentally determined from the conductive or resistive behavior of the sensor material. For example, the ratio of microparticles to dielectric matrix is ​​preferably high enough so that the conductivity of the sensor material approaches that of the pure volume resistivity of the material. For typical materials, this corresponds to a volume ratio of microparticles to dielectric matrix of greater than 30%.

[0013] Elastomeric materials and stretchable layers and / or stretchable materials for use in pressure sensors can be understood to be stretchable at least a specified amount along at least a first direction without essentially irreversibly losing function. In other words, a stretchable or elastic material (layer) can be understood to be a material (layer) that can stretch from an initial dimension along a direction to a dimension that is a multiple of the initial dimension. For example, a carrier defined as having at least 20% stretchability can be stretched to an extended dimension that is 1.2 times its original dimension. As used herein, "stretchable without essentially losing function" can be understood to include being stretchable without tearing. Additionally, a material (layer) that is stretchable in a first direction can be understood to be compressible in an orthogonal second direction.

[0014] As used herein, an electrically resistive layer and / or material, such as a shunt layer, may be understood to include materials and / or layers that provide electrical conductivity between that of an electrical insulator and a good electrical conductor, such as a metal, including copper. An electrically resistive layer may have a moderate resistivity, e.g., greater than 1 kΩ / cm 2 ~500kΩ / cm 2 Sheet resistivity in the range of, e.g., 5 kΩ / cm 2 or 200kΩ / cm 2 sheet resistivity of 10 kΩ / cm 2 ~100kΩ / cm 2 30 kΩ / cm 2 Or about 50kΩ / cm 2 With respect to the electrically resistive layer (shunt layer), "essentially stretchable without loss of function" includes being capable of accommodating in-plane deformations of up to 20% without irreversibly losing electrical conductivity when subjected to a force applied across a gap, for example.

[0015] The present invention will now be described in more detail with reference to the accompanying drawings, which illustrate embodiments of the invention. In the drawings, absolute and relative sizes of systems, components, layers, and regions may be exaggerated for clarity. The embodiments may be described with reference to schematic and / or cross-sectional illustrations of possibly idealized embodiments and intermediate structures of the invention. In this specification and the drawings, like numbers refer to like elements throughout. Relative terms and derivatives thereof should be interpreted to refer to an orientation as described at the time or as shown in the drawings under discussion. These relative terms are for convenience of description and do not require that the system be constructed or operated in a particular orientation unless specifically indicated otherwise.

[0016] It should be noted that the defined pocket structure is not limited to a single pair of opposing conductive leads and electrically resistive layers (shunt layers). The pocket structure may extend between multiple sensors, i.e., multiple leads and shunt layers may share the pocket structure. Furthermore, the pocket structure may be composed of multiple interconnected compartments such that gas under pressure in a first compartment can be redistributed to the other compartments.

[0017] 1A shows a schematic exploded perspective view of an embodiment of a pressure sensor 1. The embodiment comprises a first elastic carrier 3 including two adjacent conductive leads 2 in an interdigitated finger pattern P, for example as shown, and a second elastic carrier 5 including an FSR electrically resistive layer 4, the first and second carriers being separated by a spacer 7. For clarity, the second carrier 5 is depicted as transparent so that the electrically resistive layer 4 is visible.

[0018] FIG. 1B is a schematic side cross-sectional view of the pressure sensor 1 in an initial state, for example, when no external force F is present, and the pressure sensor 1′ when the external force F is present.

[0019] In accordance with a first aspect of the present invention, the illustrated pressure sensor 1 comprises two adjacent conductive leads 2 arranged in a pattern P on a face of a first carrier 3, and an electrically resistive layer 4 formed from a composite material E for shunting at least two adjacent conductive leads 2. The electrically resistive layer 4 is arranged on a face of a second carrier 5. The first and second carriers 3, 5 are stacked with a spacer 7 in between, such that the adjacent conductive leads face the electrically resistive layer 4 across a gap 6 defined by the spacer 7.

[0020] It should be understood that the sensor is not to be construed as limited to the orientation and arrangement of the conductive elements shown. For example, the pressure sensor 1 may be configured with an electrically resistive layer 4 disposed on a first carrier 3 and at least two adjacent conductive leads 2 disposed on a second carrier 5.

[0021] In the illustrated embodiment, the second carrier 5 including the electrically resistive layer is expandable such that under a force F exerted across the gap 6, the gap 6 between the electrically resistive layer 4 and at least two adjacent electrically conductive leads 2 is reduced and the at least two adjacent electrically conductive leads 2 are shunted to close an electrical circuit, labeled "Z", between the leads. The total resistivity of the circuit can be understood to be the sum of the bulk resistivity of the leads, the bulk resistivity of the electrically resistive layer 4 (shunt layer) and the contact resistance between the leads and the shunt layer. It should be noted that the total resistivity varies as a function of the area A over which contact is made between the electrically resistive layer 4 and the leads. The gap 6 is formed by a pocket 8 between the carriers. The height "h" of the pocket defines the distance across the gap. The width "w" of the pocket 8 is defined by the distance between the opposing sidewall portions of the spacer 7. The pocket is filled with a gas "G" which, in use, at least partially counteracts the applied force F. The width of the pocket defines the distance between the supports where the carrier is not supported by the spacer. Under quiescent conditions, ie, without any external forces, the gas helps to keep the carriers separated across the gap.

[0022] In some preferred embodiments, the gas contributes to separating one or more layers (carriers) contained in the pressure sensor 1 when the applied force is released.

[0023] At least two adjacent conductive leads are provided on one of the stretchable carriers. These leads can be formed from a pair of adjacent conductive leads spaced apart over their length and can be formed into a shape defined by a pattern "P". The pattern includes at least two adjacent leads in parallel spaced apart. The pattern can also include an interdigitated finger electrode design. Alternatively, the pattern may define a plurality of adjacent conductive leads, for example three, four or more leads spaced apart. Still alternatively, the at least two adjacent conductive leads 2 can be formed by a single conductive track, the adjacent portions of which meander at a distance from each other.

[0024] It will be appreciated that the conductive leads are formed from a composition that includes a conductive material. The composition may be formed from a mixture of an electrically insulating material and a conductive material, such as conductive particles. In a preferred embodiment, the mixture is formed from a polymeric stretchable binder forming a matrix and a conductive network of conductive particles. Preferably, the conductive particles are selected from the group consisting of metal particles and metal nanoparticles, metal-containing particles and nanoparticles, graphite particles and nanoparticles, carbon particles and nanoparticles, carbon nanowires, conductive polymer particles and nanoparticles, and mixtures thereof, more preferably from the group consisting of silver-containing particles, silver particles, copper particles, copper-containing particles, silver nanowires, copper nanowires, graphite particles, carbon particles, and mixtures thereof, and even more preferably from graphite particles, carbon particles, and mixtures thereof. It will be understood that the mixture may optionally contain other conductive materials, such as conductive polymers, or other additives, such as stabilizers.

[0025] In some embodiments, the conductive leads include tabs 11 (see FIG. 4B) for connection to an instrument for measuring the resistivity between at least two adjacent conductive leads. In some preferred embodiments, the tabs are at least partially covered with a dielectric material to prevent shorting of the tabs and / or the leads.

[0026] As mentioned above, at least one, preferably both, of the first carrier 3 including at least two adjacent conductive leads 2 and the second carrier 5 including the electrical resistance layer 4 (shunt layer) are stretchable. Providing the pressure sensor 1 with at least one stretchable carrier including conductive leads and a respective resistive layer can improve the long-term reliability of the sensor. Providing the sensor with stretchable components can further improve the reproducibility of the pressure measurement. Providing the stretchable first carrier 3 including at least two adjacent conductive leads 2, the stretchable second carrier 5 including the electrical resistance layer 4, and a stretchable spacer can further improve these advantages.

[0027] As mentioned above, the height "h" of the pocket defines the distance across the gap. The width "w" of the pocket 8 is defined by the distance between the opposing sidewall portions of the spacer 7. In a preferred embodiment, the height "h" of the pocket is preferably in the range of 0.5-200 microns, more preferably in the range of 5-50 microns, and the width is greater than 0.5 cm, preferably 1-2 cm. By trapping gas within the pocket (providing a gas flow restriction) and / or optimizing the dimensions of the pocket, e.g. optimizing the thickness, shape, and / or dimensions of the spacer, sagging of the elastic carrier can be reduced and / or recovery after application of force can be improved.

[0028] Furthermore, the inventors have discovered that for a given carrier stiffness, the gap height and / or pocket width can be used to tailor the response conditions. Compared to a short gap, a long gap is more sensitive to relatively large forces because the electrical resistive layer 4 must first overcome a relatively large distance before shunting the leads 2 when a force is applied. Furthermore, the more gas trapped, the higher the back pressure may be for an applied force. A sensor with the leads 2 located relatively close to the resistive layer is more sensitive in the low force region. Similarly, a sensor with a wide pocket width is relatively more sensitive in low force conditions compared to a sensor with a narrower pocket width. In other words, the force F required to bring opposing carriers into contact at a long distance is smaller than that required for a short distance where the carriers need to stretch per unit length to close the gap.

[0029] In some preferred embodiments, the spacer is an annular spacer that defines an opening with a height "h" and a width "w". The annular spacer can be understood to have an inner circumference, e.g., a ring / square shape. Optionally, as shown in FIG. 2A, the pocket may be dimensioned to be larger than the width where the resistive layer 4 and the conductive lead contact each other. Optionally or additionally, the pocket may comprise multiple interconnected compartments, e.g., as shown in FIG. 2B. In this way, the volume provided in the pocket allows the gas G to be redistributed to reduce reaction forces.

[0030] The spacer 7 shown in FIG. 1A has an opening 7' in the side wall that forms a flow restriction. The flow restriction may comprise, for example, a small opening, e.g., porosity, including the natural porosity of the material, e.g., the carrier, such that the flow restriction impedes gas flow as long as the gas remains in the pocket to at least resist the applied pressure on the timescale over which the pressure is applied in use (e.g., up to tens of seconds, e.g., 30 seconds). In other words, when an external force is applied, the pressure in the gas containment structure moves away from the equilibrium pressure, even if a small opening is provided. Without wishing to be bound by theory, the inventors believe that the ability of the gas in the pocket to resist the applied force and / or to separate the carrier over the gap is related to the increase in pressure of the gas in the pocket as the carrier flexes inwards. In other words, when the volume of the pocket is reduced, the increase in pressure in the pocket at least partially counters the reduction in volume.

[0031] In some preferred embodiments, one or more of the conductive lead 2, the electrically resistive layer 4, and the first and second carriers 3, 5 are elastically stretchable. The use of an elastically stretchable carrier, an elastically stretchable conductive lead, and / or an elastically stretchable layer 4 can contribute to counteracting the applied force and / or redistributing the gas within the pocket structure, in use. The use of an elastically stretchable carrier can contribute to restoring the shape of the carrier upon release of the force F, in use, for example, to help separate the carrier over the gap. Preferably, one or more of the conductive lead 2, the electrically resistive layer 4, and the first and second carriers 3, 5 have a Young's modulus in the range of 0.001 to 1 GPa, more preferably a Young's modulus in the range of 0.01 to 0.2 GPa, for example about 10 2 (10^2)MPa or 10 1 It has a Young's modulus of (10^1)MPa.

[0032] In other or further preferred embodiments, one or more of the first carrier, the second carrier, and the spacer are formed from a composition comprising a thermoplastic polymer. Advantageously, the thermoplastic polymer materials may be fused together. For example, thermoplastic polymer sheets may be laminated together by applying pressure and heat. Also, by using a composition comprising a thermoplastic polymer, the carrier and / or the spacer may be fixed to each other in a simple processing step under the influence of heat. As will be described in more detail below, the use of a composition comprising a thermoplastic polymer simplifies the manufacture of the pressure sensor 1. The use of a composition comprising a thermoplastic polymer may reduce the complexity of further manufacturing steps, including bonding or integrating the sensor to further carriers, layers and articles, such as textile sheets and textile products. In some preferred embodiments, the one or more carriers may have similar flexibility and stretchability as textiles. The pressure sensor may be applied to textiles, for example, glued to textiles. It has been found that a carrier having a composition comprising a thermoplastic polyurethane (TPU) is suitable. In some embodiments, the one or more carriers are TPU layers, such as TPU sheets. In some embodiments, a TPU substrate is used that has a residual strain of less than 1% under normal use. Suitable TPU substrates include, but are not limited to, DuPont's TE-11C and Delstar's EU095. Contrary to prejudice, the inventors have surprisingly found that TPU-based materials, such as TPU materials with low residual strain, can be successfully used as carriers for pressure sensors. Furthermore, products, such as textiles, that include TPU can be comfortable, such as soft to the touch, for the user, such as the wearer. Pressure sensors 1 formed from carriers, such as TPU carriers, that include thermoplastic polymers, can also be water-resistant. Furthermore, pressure sensors with carriers that include thermoplastic polymers, or textile products that include such sensors, can be washable without compromising pressure sensing functionality.For example, the inventors have discovered that a pressure sensor of the present invention formed with the TPU carrier described above can be machine washed up to 20 times at 30° C. without compromising its pressure sensing functionality.

[0033] 3A shows a schematic cross-sectional view of an electrically conductive path, indicated by dashed lines and arrows, through an initial composite material E and a composite material E′ in an expanded state over a length ΔL. Composite material E comprises an interconnected network of conductive microparticles M in a polymer matrix U.

[0034] In a preferred embodiment of the pressure sensor 1, the composite material E of the electrical resistance layer 4 comprises an interconnected network of conductive microparticles M in a polymer matrix U, preferably a thermoplastic polymer matrix, as shown for example in FIG. 3A. The conductive microparticles M may be understood to include carbonaceous microparticles as well as other types of conductive particles previously listed in the section describing suitable compositions for the conductive leads. Similarly, the composite material E for the electrical resistance layer 4 may include further additives including, but not limited to, conductive polymers and stabilizers. The volume ratio of the conductive particles M to the polymer matrix U exceeds the percolation threshold of the conductive particles M. In this way, conductive paths can be formed throughout the thermoplastic polymer matrix U with a length on the order of the size of the electrical resistance layer 4. In other words, the size and amount of the conductive particles are selected such that the composite material E is conductive.

[0035] FIG. 3B shows a schematic representation of the percolation threshold PT of a composite formed by dispersing conductive particles M in a polymer matrix U. In the figure, the electrical resistance R of the composite is plotted as a function of the volumetric content of conductive particles M of a given size. At low loads, i.e., below the percolation threshold, the resistance is high. At this condition, the conductive particles are considered to exist in isolated clusters. The resistance is considered to be governed by the properties of the matrix. As the load increases, the resistance decreases as the particles within the matrix start to form larger clusters. At high loads, the resistance stabilizes at a lower value as the interconnected clusters of particles form pathways throughout the matrix.

[0036] In some preferred embodiments, for example those in which the carrier including the resistive layer is defined as being stretchable up to 10%, preferably 20%, the volume ratio of the conductive microparticles M to the thermoplastic polymer matrix U remains above the percolation threshold even when the composite material E is stretched. The advantages of using compositions that remain above the percolation threshold even when stretched include that the electrical conductivity, e.g. the electrical resistance layer, is not strongly dependent on strain (force / pressure) and is uniform over the entire surface. The resistivity of the pressure sensor depends mainly on the contact area and the contact resistance, which is force-dependent. The resistivity can advantageously be decoupled from the intrinsic resistivity of the material contained in the sensor (i.e. preferably a material with a force-independent conductivity is used. Preferably the resistive layer 4 has a resistivity of 1 kΩ / cm 2 ~2kΩ / cm 2 Sheet resistivity in the range, e.g. 5 kΩ / cm 2 or 200kΩ / cm 2 , preferably 10 kΩ / cm 2 ~100kΩ / cm 2 Sheet resistivity in the range of, e.g., 20 kΩ / cm 2 or 50kΩ / cm 2 In a preferred embodiment, a pressure sensor is provided, the electrical resistance layer having a sheet resistivity of 1 to 500 kΩ / cm 2 in the range of 10 kΩ / cm 2 ~100kΩ / cm 2in the range of about 30 kΩ / cm 2 The sheet resistivity is shown.

[0037] The inventors have found that having the resistivity of the sheet in use within the stated ranges facilitates efficient readout and / or improves the accuracy of determining the force-dependent resistance of the contact area A. Suitable composites for forming the stretchable electrically resistive layer 4 include stretchable carbon pastes in which the matrix comprises a urethane-based polymer and the conductive component comprises carbonaceous, e.g., graphite-based particles. Examples of such materials include EMS CI-2051, Dupont PE671. The resistivity can be adjusted to a value within the specified ranges, for example, by adding additional stretchable dielectric or encapsulants (e.g., Dupont PE773, EMS DI-7540). The inventors have found that exemplary embodiments including a stretchable shunt layer (electrically resistive layer) can reliably and reproducibly measure repeated applied forces over 2000 cycles in 14 days. See FIG. 9A for experimental evidence. Surprisingly, hysteresis (difference in contact area when an external force is applied and released) does not appear to be exacerbated.

[0038] FIG. 4A represents a schematic representation of an embodiment of the pattern P for two adjacent conductive leads 2. On the left side, the pattern is laid out in a parallel interdigitated electrode geometry. On the right side, in a spiral electrode geometry. FIG. 4B represents an exemplary embodiment of the pattern P for parallel interdigitated and spiral electrode geometries with various dimensions, electrode widths and spacings, including wires and tabs 11 for connecting to readout means. FIG. 4C shows a schematic representation of the variation of the contact area A in dependence on the force F for an embodiment of the pattern P of similar dimensions for parallel and spiral electrode designs. FIGS. 5A and B represent the force-power traces recorded for an embodiment of a pressure sensor with parallel and spiral electrode designs for different number of dimensions.

[0039] WO 2018 / 189516 discloses a shunt-type pressure sensor that uses a parallel interdigitated finger electrode design. In such electrodes (e.g., FIG. 4A, left), multiple conductive strips extend from a common electrode to form a first electrode with an array of parallel fingers. The fingers of a second electrode extend between the fingers of the first electrode.

[0040] Preferably, the pattern P of the pressure sensor according to the invention is arranged to form a gradually increasing force-dependent contact area between at least two adjacent conductive leads and the electrical resistance layer 4 upon closure of the gap. A drawback of using parallel interdigitated finger electrode designs for shunt type pressure sensors is that they generally suffer from a non-uniform force-resistance relationship, including, for example, a stepwise increase in the contact area. The inventors believe that this is due to a non-uniform change in the contact area A between adjacent electrodes and the shunt layer. For clarity, see FIG. 4C (left), which shows a schematic diagram of the change in contact area as a function of applied force for an embodiment of a pressure sensor with a parallel interdigitated finger electrode design and a flexible electrical resistance layer shunting the parallel electrodes. Upon application of an appropriate force, the electrical resistance layer (not shown) bends towards the electrodes, forming an initial contact (point) area marked by the dashed circle marked A1. For example, application of an increasingly larger force stretches the electrical resistance layer further, increasing the contact area. A gradual increase in the contact area, for example from A1 to A2 to A3, does not result in a smooth increase in the actual electrical contact area between the layers. Adding an additional finger to the contact area results in an abrupt change in the contact area. Since the resistance between at least two adjacent conductive leads 2 varies with the contact area with the electrical resistive layer 4, this effect is reflected in a non-uniform force-resistance signal of the sensor. Figure 5A shows the force-current traces recorded for an embodiment of a pressure sensor with interdigitated parallel electrodes of various dimensions. As can be seen from the curves, the sensor with interdigitated parallel electrodes shows a step-like response at a certain force.

[0041] Such motion can be mitigated by designing at least two adjacent conductive leads with a gradually increasing contact area with the shunt layer, thus reducing the number and magnitude of such abrupt changes. This effect can also be mitigated by reducing the finger width, i.e., by using many finer, more closely spaced fingers. However, this approach requires precision that cannot be achieved by mass production methods. For example, a design for an electrode that is 5 mm wide would have 50 fingers and a gap of the same width, requiring precision that cannot be met by common printing techniques such as screen printing.

[0042] The inventors have found that an electrode design in which at least two adjacent conductive leads are arranged in a helical pattern can provide a gradually increasing contact area while remaining compatible with printing technology. The inventors have also found that the helical design is less susceptible to abrupt changes in contact area with increasing applied pressure. In a helical design, two or more electrodes spiral around a central point at a fixed distance from each other. FIG. 4C (right) shows two electrodes each making one revolution around a central point before connecting to a wire (not shown). As the contact area increases from A1 to A3, the area of ​​contact between the shunt layer and the electrodes increases smoothly, e.g., the number of electrodes in the contact area remains constant even with increasing force. The number of turns of the electrodes can be large for a given area, e.g., 5 mm. For example, the number of turns can be 0.5 to 50, or even more, up to 100. However, such high precision is not necessary and the inventors have found that a pattern P with a small number of turns works well and is compatible with mass production methods such as screen printing. Thus, the number of turns of the spiral pattern is preferably in the range of 0.5 to 10, e.g. 8, more preferably in the range of 0.5 to 7, e.g. 5, and most preferably in the range of 0.5 to 4, e.g. 1 or 2. Figure 5B shows force-current traces recorded for an embodiment of a pressure sensor with spiral parallel electrodes of various dimensions. As can be seen from the curves, the sensor with spiral electrodes shows a smoother and more continuous response as a function of pressure, in contrast to the structure with parallel comb-like fingers of Figure 5A.

[0043] As is evident from FIG. 5B, the size and shape of at least two adjacent conductive leads (e.g., helical) can be used to adjust the sensitivity range of the sensor. For example, the top curve labeled "α" shows high sensitivity, or slope, in a first region of relatively low force, followed by low sensitivity in a second region of relatively high force, and the curve labeled "β" shows a more uniform sensitivity over the range of forces shown. By varying the pattern in this way, sensors with different sensitivities and / or maximal sensitivity at different force conditions can be created. The pattern can be varied to include one or more of the following: varying the number of leads, varying the width of the leads, varying the spacing between the leads, varying the length of the leads, and varying the shape of the leads. For example, a helical pattern can have leads with a tapering width on the outside. In this way, the maximum force-dependent increase in contact area can be adjusted for larger forces.

[0044] In some embodiments, the present invention further relates to a pressure sensor in which one or more of at least two adjacent conductive leads 2 and the electrically resistive layer 4 have a surface roughness comprising bumps and depressions. FIG. 6A shows a schematic representation of an embossing step of the electrically resistive layer. In this step, a carrier, for example a second carrier 5, comprising an electrically resistive layer 4 is embossed using a die 12. After embossing, a raised relief is embossed in the electrically resistive layer 4. Optionally, a pattern may also be embossed in the carrier 5. Alternatively, the electrically resistive layer may be provided on a previously embossed carrier. FIG. 6B shows a micrograph of the embossed electrically resistive layer 4. FIG. 6C shows a schematic representation of a side cross-sectional view of an embodiment of a pressure sensor 1. This embodiment comprises a first elastic carrier 3 including two adjacent conductive leads 2 in an interdigitated finger pattern P, as shown, for example, and a second elastic carrier 5 including an FSR electrical resistive layer 4, the first and second carriers being separated by a spacer 7 and defining a gap 6 and a pocket structure 8 containing a gas G. In another or further preferred embodiment of the pressure sensor 1, the conductive layer 4 and / or at least two adjacent conductive leads 2 are provided with a relief pattern, as shown, for example, in FIG. 6C. Preferably, the relief has a height in the range of 1-50 μm, for example about 20 μm. The advantage of providing a high relief is that a sensor can be formed with improved accuracy and / or linearity at low force conditions. The inventors believe that the additional surface area of ​​the conductive layer 4 and / or conductive leads 2 due to the protrusions contributes to the improved linearity of the pressure sensor. Also, not only the contact area but also the contact resistance will be more strongly affected by the contact. In use, when at least two adjacent conductive leads 2 and surface portions of the electrically resistive layer 4 come into close contact under the influence of an externally applied force, gas may become trapped between the layers. This gas may prevent effective contact formation between the layers. The relief allows gas to reside and flow within the recesses of the structure. See Figures 6D, 11 and 12. Figure 6D represents the resistance measured between the leads of a pressure sensor 1 having an embossed electrically resistive layer 4.At low forces the recorded resistance between the leads is high. At higher forces above 20 kPa the electrically resistive layer 4 shunts the leads and the resistance drops to a stable low value. The relief may be provided by embossing as explained in relation to FIG. 6A, or by other methods suitable for providing such relief, including 3D deposition and ablation methods.

[0045] 11A-B show two types of pressure sensors in a schematic way. In the sensor of FIG. 11A, the electrical resistance layer 4 is provided with a relief structure of bumps 4'. In the sensor of FIG. 11B, the sensor does not include a relief but is otherwise identical. When the external force is zero, the carriers 3 and 5 are separated by a gap 6 in a pocket structure 8 defined between the carrier and the side wall of the spacer 7. This pocket is filled with a gas G. The spacer does not include any large gaps or openings in its side wall but comprises a flow restriction 7' ​​in the form of a micropore. As before, the pocket defined between the carrier and the side wall of the spacer defines a gas containment structure filled with a gas that at least partially counteracts the external force on the pressure sensor, within which the gas is initially free to redistribute. The flow out of the pocket is restricted. Thus, this pocket, and the pockets of all embodiments according to the invention, can be understood to comprise a gas flow restriction. The gas flow restriction prevents the gas from leaving the pocket structure, for example when an external force is applied. In the embodiment as shown, the conductive layer 4 comprises a micropatterned relief structure, e.g. bumps 4'. It will be understood that a relief pattern may alternatively or additionally be provided on the leads with the same effect. It will be understood that a relief pattern may also be provided suitably after depositing the respective material, e.g. by embossing. Alternatively or additionally, the relief pattern can be provided, e.g. overprinted, on a pre-patterned carrier.

[0046] With increasing force, the separation (gap) between the carriers becomes smaller and smaller. In this case, the approach of the carriers is shown in a simplified manner related only to the compression of the spacer 7. It will be understood that, as in other embodiments disclosed herein, bending of the carriers can also contribute to the reduction of the gap. When the carriers come into contact, the at least two adjacent conductive leads are shunted by the resistive layer. In this illustrated embodiment, a current can flow between the leads via the tops of the relief pattern provided in the resistive layer 4. With increasing force, the contact area between the at least two adjacent conductive leads 2 and the microstructures provided in the resistive layer increases gradually, for example with compression of the bumps 4' and / or the resistive layer 4. Thus, the contact area (which, as explained, is directly related to the response of the sensor) depends both on the number of bumps contacting the leads and on the contact area between such bumps and the leads. As both depend on the pressure, it has been found that pressure sensors of the claimed kind exhibit improved performance, for example with advantages due to improved linearity and a wider response window.

[0047] It has been found that inhibiting (preventing) the gas from exiting the pocket contributes to returning the sensor carrier to its initial isolated starting position when the external pressure is reduced or completely removed. Providing a gas flow restriction mitigates gas redistribution from the pocket of the first sensor towards the environment and / or towards the pocket of the adjacent second pressure sensor, thus mitigating cross-coupling between adjacent sensors. Providing a gas flow restriction has further been found to mitigate hysteresis within a given sensor, for example hysteresis as a result of the sensor's incomplete recovery from a previous pressure measurement (see also FIG. 9A and its discussion in this regard).

[0048] It was found that the provision of the microstructured relief improves the gas distribution within the pocket. The redistribution of the gas flow within the pocket is believed to improve the linearity of the sensor response, especially in low force conditions. The provided gas flow restriction can be understood as an overpressure valve that allows a controlled release of excess pressure, e.g. via micropores. For sensors without the microstructured relief pattern, the gradual increase in contact area between the bumps and the leads has essentially no beneficial effect (see FIG. 11B).

[0049] The inventors have experimentally confirmed that the linearity of the sensor response is improved, as shown in FIG. 12A. For this experiment, two types of sensors were manufactured. In the first type, the electrical resistance layer 4 is not provided with a microstructured relief pattern (dashed line). The second type of sensor (continuous line) is identical to the first type, except that the electrical resistance layer is provided with a relief pattern of bumps. It was found that the sensor with bumps has improved linearity, as can be seen from the current between the leads recorded as a function of applied pressure. It is believed that the pressure distribution in the pocket structure (by providing a relief pattern) further contributes to improving the response and / or linearity of the sensor. Gas can be trapped in the space between adjacent electrical resistance layers. It is believed that pressure build-up in such a space prevents further access to the opposing carrier, which limits the performance of the sensor, for example limiting the effective response window and / or limiting the linearity of the sensor. Furthermore, excess pressure of the gas trapped in such spaces cannot be released, e.g., via gas flow restrictions, resulting in a pressure build-up that may lead to hysteresis effects and / or even permanent damage to the sensor. Providing a relief pattern is believed to improve the redistribution of gas in the pockets when the opposing carriers approach, allowing the gas to flow and stay in the depressions between the microstructured bumps and partial diversion of adjacent leads within the tops of the bumps. It will be understood that the shape, size, and / or spacing of the bumps depends on the shape, size, and / or spacing of the adjacent conductive leads. Preferably, the relief pattern is provided in a pattern that does not match the pattern P of the leads. Preferably, the bumps are dimensioned such that, upon contact with the leads, at least two bumps (one depression) are present on the leads, allowing gas to flow (redistribute) over the leads.

[0050] FIG. 12B shows experimentally recorded sensor response curves (current as a function of applied pressure) for the three types of sensors. All sensors are identical except for the placement and dimensions of the relief pattern. In the first type of sensor (marked "without bumps"), the electrical resistance layer is provided with only a naturally occurring surface roughness, i.e., no explicit relief structure is provided. The sensor response was found to level off after an initial relatively small response at low pressure. The relatively low absolute response may be due to an uneven pressure distribution of the gas in the pocket structure, e.g., gas pressure trapped between adjacent leads preventing contact between the leads and the electrical resistance layer, preventing a gradual increase in the contact area between the electrical resistance layer and the leads. A linear response was obtained over a wider pressure range for sensors provided with bumps with a dimension (width) of 50 μm. Sensors with wider bumps of 100 μm width were found to show an intermediate behavior that may be related to the relative dimensions and spacing of the leads and the bumps. That is, a relatively large bump would be less effective at redistributing the gas throughout the pocket and would not be able to prevent the gas from becoming partially trapped between adjacent leads in this particular sensor, for example.

[0051] According to a further aspect, the present invention relates to a pressure sensing element. Figure 7A shows a schematic side cross-sectional view of an embodiment of a pressure sensing element 10. In some embodiments, for example as shown, an adhesive layer 9, for example a hot melt adhesive, is provided on the face of the pressure sensor 1. The adhesive layer may be suitable for adhering the pressure sensor 1 to a further product, for example a flooring part or a textile product. Alternatively, the pressure sensing element 10 may be suitable for application to an area of ​​human and / or animal skin. It will be appreciated that in such applications the adhesive layer 9 is preferably a skin-compatible pressure sensitive adhesive.

[0052] According to yet another aspect, the present invention relates to a pressure-sensing sheet laminated onto a textile 100. FIG. 6B shows a schematic perspective view of an embodiment of a pressure-sensing sheet laminated onto a textile 100. In some embodiments, the pressure sensor may be adhered, e.g. glued, to the textile sheet. Preferably, adhesion to the textile is achieved using a thermoplastic polymer. A thermoplastic adhesive can be used to fuse, e.g. laminate, the sensor to the textile sheet. Such an adhesive is pre-applied to a TPU film such as DuPont's TE-11C film or Bemis's ST604. FIG. 7C represents a photograph of a pressure-sensing sheet laminated onto a textile comprising an array of pressure sensors 1 (pressure-sensing textile sheet). In the illustrated embodiment, the textile forms a carrier onto which the pressure-sensing sheet comprising an electrically resistive layer 4 is laminated. Tabs 11 for connection to a readout device are provided at peripheral locations. In a preferred embodiment, the pressure-sensing textile sheet 100 comprises a plurality of pressure sensors, preferably an array of pressure sensors, as shown, for example, in FIG. 7C. Using a plurality, e.g., an array, allows a user to measure the pressure distribution on the sheet, e.g., resulting from an item placed on the surface of the textile sheet. Providing a 2D array of spaced apart sensors allows for correlation of forces or pressures to spatial positions on the textile sheet. In some embodiments, the sensors 1 are arranged in a passive matrix configuration, as shown, for example, with reference to FIGS. 9B and 10. The pressure-sensing textile sheet 100, comprising an array of spaced apart pressure sensors, e.g., in a passive matrix configuration, can be used to identify the shape and / or size of an item placed on the textile sheet. In some embodiments, the sensors in the 2D array are spaced apart at a distance in the range of 0.1-10 cm, preferably in the range of 0.5-5 cm, e.g., 1 or 2 cm.

[0053] In another or further embodiment, the pressure sensors 1 of the pressure-sensing textile sheet 100 are of different dimensions. An array with sensors of different dimensions can sense forces over a larger force sensing condition than a single pressure sensor. A pressure-sensing textile sheet 100 with pressure sensors 1 of different dimensions can make it possible to measure forces over a wide pressure range. Thus, the pressure-sensing textile sheet 100 can be used to identify the weight of an object, for example an article, or the weight of a human body part, advanced on the textile sheet. Sensors of different dimensions may have different sensing ranges, as described herein. Sensors of different dimensions can be understood to include one or more of the following: pocket dimensions, for example different widths, different relief heights, different designs of at least two adjacent conductive leads, including electrode widths, spacing, spacing between adjacent electrodes. Advantageously, the listed variants can be easily incorporated into the manufacturing method described herein below. Optionally, the array may comprise sensors with different pocket heights, i.e. different distances across the gap.

[0054] FIG. 8A shows a schematic perspective view of an embodiment of a mattress (matrass) 1000 comprising an array of pressure sensors. According to yet another aspect, the invention relates to a product comprising a pressure sensor 1 and / or a product comprising a pressure-sensing textile sheet 100. In one embodiment, a pressure distribution sensing product 1000 comprises a pressure-sensing textile sheet 100. Preferably, the product 1000 comprises a pressure-sensing textile sheet comprising sensors of different dimensions. For example, the product may be a mattress covered with a pressure-sensing sheet (100) having an array of pressure sensors (1). Such a mattress can be used to detect the presence of a person on the mattress. Furthermore, such a mattress can be used to detect the position and / or orientation of a person on the mattress, for example sitting or lying, and / or orientation, for example while lying. For example, a mattress may be provided with an array having a first set of sensors for detecting the presence of an object on the mattress, e.g., detecting a person lying on the mattress, and a second set of sensors for sensing small changes, e.g., fluctuations, in the force exerted by the person on the mattress, e.g., detecting the heartbeat or breathing movement of the person on the product. It will be appreciated that the present invention also relates to other products that would benefit from integration with the pressure sensors described herein. These products include, but are not limited to, bedding sheets and blankets, apparel such as sportswear, jewelry such as watch straps, furniture and upholstery such as seats, car seats and cushions, and flooring such as carpets.

[0055] According to yet another aspect, the invention relates to a method for manufacturing a pressure sensor, preferably as described herein above. In one embodiment, as shown for example in FIG. 8B, the method comprises the steps of providing 21 a first carrier 3, providing 22 a second carrier, providing 23 at least two adjacent conductive leads 2 in a pattern P on a face of the first carrier 3, depositing 24 a composite material E on a face of the second carrier 5 to form an electrical resistance layer 4 for shunting the at least two adjacent conductive leads 2, providing 25 a spacer 7, and stacking the first and second carriers 3, 5 with the spacer 7 in between, such that the at least two adjacent conductive leads 2 face the electrical resistance layer 4 with a gap 6 defined by the spacer 7 in between. The stacking step can include gluing. As described above in relation to the sensor, the first carrier 3 including at least two adjacent conductive leads 2 and / or the second carrier 5 including the electrically resistive layer 4 are stretchable to reduce the gap 6 between the electrically resistive layer 4 and the at least two adjacent conductive leads 2 and shunt the at least two adjacent conductive leads 2 over a force-dependent contact area A when subjected to a force F acting across the gap 6. The gap 6 is formed by a pocket 8 between the carriers and is filled with a gas. The pocket defines a gas containment structure between the carriers, which is filled with a gas that at least partially counteracts the applied force F. It will be understood that the method is not limited to the order of steps described. For example, a spacer 7 may be provided on one of the carriers before providing the conductive leads 2, the electrically resistive layer 4, respectively.

[0056] The conductive material comprising the leads and layer 5 can be provided by any method suitable for providing layers according to the above mentioned specifications. In one embodiment, the leads and / or the electrical resistance layer 4 may be provided by known microfabrication means, including but not limited to lithographic methods. Preferably, the leads and / or the electrical resistance layer as well as the spacers are provided by local deposition methods. Optionally, the spacers may be provided as separate preformed items, for example washers. Preferably, the spacers may be provided using the same local deposition means as the leads and / or the electrical resistance layer. Alternatively, the spacers 7 may be provided by embossing a pattern into the first and / or second carrier.

[0057] It will be appreciated that the conductive leads are formed from a composition including a conductive material, as described above in connection with the sensor. It will further be appreciated that the conductive leads 2 and / or the electrically resistive layer 4 may be formed from a mixture of such material and a solvent, for example ink "I" which is a stretchable conductive ink such as dupont PE873, EMS CI-1036, which may be selected to form a conductive composition as described upon removal of the solvent.

[0058] In a preferred embodiment, the step of providing at least two adjacent conductive leads (2) and / or the step of providing the composite material (E) and / or the step of providing the spacer comprises printing, preferably screen printing, rotary screen printing, gravure printing, offset printing, LIFT printing or inkjet printing. Advantageously, the printing method improves the scalability of the method allowing mass production at low cost. For example, multiple adjacent conductive leads, differing from each other in size or design and / or over a large area of ​​the carrier, can be provided in one printing step. Here, multiple sensors or textile sheets constituting an array of sensors, for example sensors, can be manufactured in one process. In addition, the printing of the layers can be done in a roll-to-roll manner, further reducing costs.

[0059] In another or further preferred embodiment, where one or more, preferably all, of the first and second carriers 3, 5 and the spacer 7 are formed of a composition comprising a thermoplastic polymer, stacking includes laminating. Laminating includes arranging the components and layers in a stack as described herein and then heating the stack to the melting temperature of the thermoplastic polymer. Typically, a force is applied during heating to ensure contact between the parts in the stack. Fusing the carrier and / or spacer can eliminate the need for a separate gluing step, for example to attach the spacer. Fusing the layers can further reduce the number of alignment steps, for example alignment between successive gluing steps. Advantageously, the lamination setup is arranged to fill the pockets with gas. Lamination methods to form gas-filled pockets include, but are not limited to, using a stiff pressure plate to prevent the flexible carrier from bending into the space enclosed by the spacer, or using a stiff liner foil on which the elastomer rests. Alternatively, a pressure plate can be used that has openings sized and positioned such that the pressure plate does not apply pressure to the laminate at locations corresponding to the spaces enclosed by the spacers (pockets) during lamination. Lamination can be performed using a heated membrane press type laminator, a hot press laminator, or a roll laminator. Advantageously, the pocket structure with gas flow restriction maintains the separation distance between opposing carriers during the manufacturing process, allowing the use of high throughput and / or low cost manufacturing methods such as lamination.

[0060] In another or further embodiment, the method for manufacturing the pressure sensor further comprises providing a conductive layer 4 with a relief pattern, e.g. embossing, or overprinting the conductive layer onto a carrier having a relief pattern, e.g. a pre-printed or pre-embossed relief pattern.

[0061] In some embodiments, the method of manufacturing the pressure sensor further comprises applying, preferably printing, a pressure sensitive adhesive (PSA) composition to an exterior surface of the sensor.

[0062] According to yet another aspect, the present invention relates to a method for manufacturing a pressure-sensing textile sheet 100. In particular, the pressure-sensing textile sheet 100 includes a pressure sensor 1 as described herein. The method includes the steps for manufacturing a pressure sensor 1 as described herein above and providing a fabric (textile) sheet. Optionally, the pressure sensor 1 may be adhered to the fabric (textile) sheet. Preferably, the fabric sheet is formed from a composition including a thermoplastic polymer, for example the thermoplastic polyurethane polymer described above. The textile (textile) sheet formed from a composition including a thermoplastic polymer may be used in the described lamination process. Thus, the pressure sensor 1 may be laminated to the textile sheet.

[0063] Although features are described herein as part of the same or separate embodiments for clarity and conciseness, it will be understood that the scope of the present invention includes embodiments combining all or some of the described features. For example, while an embodiment is shown for an annular spacer, one skilled in the art may envision alternative methods with the benefit of the present disclosure to achieve similar functions and results. Various elements of the embodiments discussed and shown provide certain advantages, such as reliability, compatibility with textiles, and compatibility with mass production methods. Of course, it is understood that any one of the above embodiments or processes can be combined with one or more other embodiments or processes to provide further improvements in finding and matching designs and advantages. It is understood that the present disclosure provides particular advantages for pressure-sensing textiles and can be generally applied to any application having a pressure sensor integrated into a flexible substrate.

[0064] In interpreting the appended claims, it should be understood that the word "comprising" does not exclude the presence of elements or acts other than those recited in a given claim, and the word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements, and that reference signs in the claims do not limit their scope, and that several "means" may be represented by the same or different items or implemented structures or functions, and that the disclosed apparatus or parts thereof may be combined together or separated into further parts, unless otherwise specified. When a claim refers to other claims, this may indicate synergistic advantages achieved by the combination of the respective features. However, the mere fact that certain means are recited in mutually different claims does not indicate that a combination of these means cannot also be used advantageously. Thus, the present embodiments may include all combinations of the actions of the claims, such that each claim may in principle refer to the preceding claim, unless otherwise clearly excluded from the context.

[0065] [Note] [Appendix 1] A pressure sensor (1) laminated to a textile sheet to form a pressure-sensitive textile sheet (100), at least two adjacent conductive leads (2) arranged in a pattern (P) on a surface of a first elastic carrier (3); an electrically resistive layer (4) formed of a resistive composite material (E) for shunting the at least two adjacent conductive leads (2), the electrically resistive layer (4) being disposed on a surface of a second elastic carrier (5); Equipped with The first and second elastic carriers (3, 5) are stacked with a spacer (7) sandwiched therebetween, and the at least two adjacent conductive leads (2) face the electrical resistance layer (4) across a gap (6) defined by the spacer (7), thereby forming a pocket structure (8) defining a gas-filled gas containment structure that at least partially resists a force (F) applied to the pressure sensor. When the force (F) is applied in a direction across the gap (6), the gap (6) between the electrical resistance layer (4) and the at least two adjacent conductive leads (2) is reduced to contact the electrical resistance layer (4) depending on the force applied. A pressure sensor characterized in that the first carrier (3) including the at least two adjacent conductive leads (2) and the second carrier (5) including the electrically resistive layer (4) are stretchable so as to contact the resistive composite material (E) on the region (A) and shunt the at least two adjacent conductive leads (2), thereby providing a pressure-dependent electrical resistance between the conductive leads, and the pocket structure (8) is provided with a relief structure of microbumps and an opening for reducing the opposing force of the gas, the opening being dimensioned to prevent the gas from escaping the pocket.

[0066] [Appendix 2] 2. The pressure sensor of claim 1, wherein the opening is formed in the spacer.

[0067] [Appendix 3] 3. The pressure sensor according to claim 1 or 2, wherein the pocket structure has a height between the carriers in the range of 0.5 to 500 micrometers and a width in the range of 0.5 to 2 cm.

[0068] [Appendix 4] The pressure sensor (1) according to any one of claims 1 to 3, characterized in that the first carrier (3), the second carrier (5) and the spacer (7) are formed from an elastic material having an elastic modulus of less than about 100 MPa, in particular a composition including a polyurethane polymer.

[0069] [Appendix 5] A pressure sensor (1) according to any one of claims 1 to 4, characterized in that the electrically resistive composite material (E) comprises an interconnected network of conductive microparticles (M) in an elastic polymer matrix (U).

[0070] [Appendix 6] A pressure sensor (1) according to any one of appendices 1 to 5, characterized in that the pattern (P) is arranged to form a contact area (A) between the electrical resistance layer (4) and the at least two adjacent conductive leads (2) that gradually and radially increases upon closure of the gap (6).

[0071] [Appendix 7] 7. The pressure sensor (1) of any one of claims 1 to 6, wherein the pocket comprises a plurality of connected compartments for redistributing the gas (G) when the force is applied.

[0072] [Appendix 8] The electrical resistance layer has a resistance of 1 kilohm / cm 2 ~500 kilohms / cm 2 in the range of about 30 kOhm / cm 2 8. The pressure sensor (1) according to any one of claims 1 to 7, characterized in that it exhibits a sheet resistance of

[0073] [Appendix 9] A pressure sensor (1) according to any one of appendices 1 to 8, comprising a spatially separated plurality of the at least two adjacent conductive leads (2) arranged in a pattern (P) on the surface of the first elastic carrier (3) and a corresponding spatially separated plurality of the electrically resistive layers (4) on the surface of the second elastic carrier (5), forming a plurality of pocket structures (8) each defining a gas-filled gas containment structure, preferably wherein the pressure sensor is configured in a passive matrix configuration.

[0074] [Appendix 10] The pressure sensor (1) of claim 9, characterized in that at least a first portion of the plurality of pockets are sized and / or shaped according to a first sensitivity range, and a second portion of the plurality of pressure sensors are sized and / or shaped according to a second sensitivity range different from the first sensitivity range so as to extend the overall sensitivity range of the pressure sensor.

[0075] [Appendix 11] A pressure distribution sensing product (1000) comprising the pressure sensor according to appendix 9 or 10.

[0076] [Appendix 12] A method for manufacturing a pressure sensor (1) on a pressure-sensitive textile sheet, comprising the steps of: Providing (21) a first elastic carrier (3); Providing (22) a second elastic carrier (5); laminating a fabric sheet onto the first carrier (3) and / or the second carrier (5); and providing (23) at least two adjacent conductive leads (2) in a pattern (P) on a surface of the first carrier (3); depositing (24) an electrically resistive composite material (E) on a face of the second carrier (5) to form an electrically resistive layer (4) for shunting the at least two adjacent electrically conductive leads (2); providing (25) a spacer (7); Providing a microbump relief structure; stacking (26) the first and second elastic carriers (3, 5) with the spacer (7) in between such that the at least two adjacent conductive leads (2) face the electrically resistive layer (4) across a gap (6) defined by the spacer (7), thereby forming a pocket structure (8) including a gas flow restrictor defining a gas-filled gas containment structure that at least partially counteracts a force (F) applied to the pressure sensor; Including, the first carrier (3) including the at least two adjacent conductive leads (2) and the second carrier (5) including the electrically resistive layer (4) are stretchable so as to reduce the gap (6) between the electrically resistive layer (4) and the at least two adjacent conductive leads (2) when subjected to a force (F) applied in a direction across the gap (6) and to shunt the at least two adjacent conductive leads (2) in contact with the resistive composite material (E) on a contact area (A) depending on the force applied, resulting in a pressure-dependent electrical resistance between the conductive leads; and the pocket structure (8) comprises a relief structure of microbumps and an opening for reducing the opposing force of the gas, the opening being dimensioned to prevent the gas from exiting the pocket.

[0077] [Appendix 13] 13. The method of claim 12, wherein the spacer has a height (h) in the range of 0.5 to 500 micrometers and a width in the range of 0.5 to 2 cm.

[0078] [Appendix 14] 14. The method according to claim 12 or 13, characterized in that the step of depositing at least two adjacent conductive leads (2) and / or the step of depositing the composite material (E) and / or the step of depositing the spacer comprises a printing step.

Claims

1. A pressure sensor (1) laminated to a textile sheet to form a pressure-sensitive textile sheet (100), At least two adjacent conductive leads (2) arranged in a pattern (P) on the surface of a first elastic carrier (3); an electrically resistive layer (4) formed from an electrically resistive composite material (E) for shunting the at least two adjacent electrically conductive leads (2), the electrically resistive layer (4) being disposed on a surface of a second elastic carrier (5); Equipped with The first and second elastic carriers (3, 5) are stacked with a spacer (7) sandwiched therebetween, and the at least two adjacent conductive leads (2) face the electrically resistive layer (4) across a gap (6) defined by the spacer (7), thereby forming a pocket structure (8) defining a gas-filled gas containment structure that at least partially resists a force (F) applied to the pressure sensor. When the force (F) applied in a direction across the gap (6) is received, the gap (6) between the electrically resistive layer (4) and the at least two adjacent conductive leads (2) is reduced, and the at least two adjacent conductive leads (2) are in contact with the electrically resistive composite material (E) on a contact area (A) depending on the received force, thereby shunting the at least two adjacent conductive leads (2), and as a result, pressure is generated between the conductive leads. the first elastic carrier (3) including the at least two adjacent conductive leads (2) and the second elastic carrier (5) including the electrical resistance layer (4) are stretchable to provide an electrical resistance that depends on a force of the at least two adjacent conductive leads (2), the pocket structure (8) is provided with a relief structure of microbumps and openings for reducing the opposing force of the gas, the openings being dimensioned to prevent the gas from escaping the pocket structure, the microbumps are elastically compressible, the relief structure of the microbumps is arranged to form a pattern with peaks and valleys, the valleys between adjacent microbumps are formed on the conductive leads, and the peaks of the microbumps are formed in the areas between the adjacent conductive leads.

2. The pressure sensor according to claim 1 , wherein the opening is formed in the spacer.

3. 3. The pressure sensor according to claim 1, wherein the pocket structure has a height between the carriers in the range of 0.5 to 500 micrometers and a width in the range of 0.5 to 2 cm.

4. 4. The pressure sensor (1) according to claim 1, wherein the first elastic carrier (3), the second elastic carrier (5) and the spacer (7) are made of an elastic material having an elastic modulus of less than 100 MPa, and the elastic material is a polyurethane polymer.

5. 5. The pressure sensor (1) according to any one of claims 1 to 4, characterized in that the electrically resistive composite material (E) comprises an interconnected network of conductive microparticles (M) in an elastic polymer matrix (U).

6. 6. The pressure sensor (1) according to claim 1, wherein the pattern (P) is arranged to form a contact area (A) between the electrical resistance layer (4) and the at least two adjacent conductive leads (2) that gradually and radially increases upon closing of the gap (6).

7. 7. The pressure sensor (1) according to any one of claims 1 to 6, characterized in that the pocket structure comprises a plurality of connected compartments for redistributing the gas (G) when the force is applied.

8. The electrical resistance layer has a resistance of 1 kilohm / cm 2 ~500 kOhm / cm 2 8. The pressure sensor (1) according to any one of the preceding claims, characterized in that it exhibits a sheet resistance in the range of .gtoreq. .gtoreq.

9. The electrical resistance layer has a resistance of 30 kOhm / cm 2 9. The pressure sensor (1) according to claim 8, characterized in that it exhibits a sheet resistance of

10. 10. The pressure sensor (1) of claim 1, comprising a plurality of spatially separated ones of the at least two adjacent conductive leads (2) arranged in a pattern (P) on the surface of the first elastic carrier (3) and a corresponding plurality of spatially separated ones of the electrical resistance layer (4) on the surface of the second elastic carrier (5), forming a plurality of pocket structures (8) each defining a gas-filled gas containment structure, and the pressure sensor is configured in a passive matrix configuration.

11. 11. The pressure sensor (1) of claim 10, wherein at least a first portion of the plurality of pocket structures are sized according to a first sensitivity range, and a second portion of the plurality of pressure sensors are sized according to a second sensitivity range different from the first sensitivity range so as to extend the overall sensitivity range of the pressure sensor.

12. A pressure distribution sensing product (1000) comprising a pressure sensor (1) according to any one of claims 1 to 11.

13. A method for manufacturing a pressure sensor (1) on a pressure-sensitive textile sheet, comprising: providing (21) a first elastic carrier (3); providing (22) a second elastic carrier (5); laminating a fabric sheet to one or more of the first elastic carrier (3) and the second elastic carrier (5); and providing (23) at least two adjacent conductive leads (2) in a pattern (P) on the surface of said first elastic carrier (3); depositing (24) an electrically resistive composite material (E) on a surface of the second elastic carrier (5) to form an electrically resistive layer (4) for shunting the at least two adjacent conductive leads (2); providing a spacer (7) (25); providing a microbump relief structure; a step (26) of stacking the first and second elastic carriers (3, 5) with the spacer (7) in between such that the at least two adjacent conductive leads (2) face the electrically resistive layer (4) across a gap (6) defined by the spacer (7), thereby forming a pocket structure (8) including a gas flow restrictor that defines a gas-filled gas containment structure that at least partially counteracts a force (F) applied to the pressure sensor; Including, the first elastic carrier (3) including the at least two adjacent conductive leads (2) and the second elastic carrier (5) including the electrical resistance layer (4) are stretchable so as to reduce the gap (6) between the electrical resistance layer (4) and the at least two adjacent conductive leads (2) when subjected to a force (F) applied in a direction across the gap (6) and to shunt the at least two adjacent conductive leads (2) in contact with the electrical resistance composite material (E) on a contact area (A) depending on the force applied, resulting in a pressure-dependent electrical resistance between the conductive leads; the pocket structure (8) comprises a relief structure of microbumps and openings for reducing the opposing force of the gas, the openings being dimensioned to prevent the gas from escaping the pocket structure, and the microbumps are elastically compressible; The method, characterized in that the step of forming the pocket structure includes arranging the relief structure of the microbumps to form a pattern with peaks and valleys, forming valleys between adjacent microbumps on the conductive lead wires, and forming peaks of the microbumps in the areas between adjacent conductive lead wires.

14. 14. The method of claim 13, wherein the spacers have a height (h) in the range of 0.5 to 500 micrometers and a width in the range of 0.5 to 2 cm.

15. 15. The method of claim 13 or 14, wherein one or more of the steps of depositing at least two adjacent conductive leads, depositing the electrically resistive composite material (E), and depositing the spacer comprises a printing step.

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