Processing machine and method for manufacturing workpiece

Abstract

To provide a processor capable of improving processing accuracy.SOLUTION: In a processor 1, a machine body 3 drives at least one of a workpiece 103 and a tool 101 to process the workpiece 103 by the tool 101. A processing chamber 5 separates the workpiece 103, the tool 101 and a nozzle 7 from at least a part of the machine body 3 and stores the workpiece 103, the tool 101, and the nozzle 7. An internal temperature sensor 13 measures the temperature of atmosphere in the processing chamber 5. An external temperature sensor 15 measures the temperature of atmosphere around the processor 1. A temperature adjustment unit 19 increases the temperature of a processing liquid fed to the nozzle 7 when the measured temperature of the internal temperature sensor 13 is lower than that of the external temperature sensor 15, and / or the temperature adjustment unit 19 decreases the temperature of the processing liquid fed to the nozzle 7 when the measured temperature of the internal temperature sensor 13 is higher than that of the external temperature sensor 15.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a processing machine and a method for manufacturing a workpiece. [Background technology]

[0002] There is known a processing machine that uses a tool to process (e.g., cut) a workpiece (see, for example, Patent Document 1 below). Patent Document 1 discloses a cutting device (processing machine) that divides a wafer (workpiece) using a cutting blade (tool) that has a cutting edge on its outer periphery. The cutting depth of the cutting blade into the workpiece is determined based on the amount of movement of the cutting blade from a predetermined reference position toward the workpiece. Cutting water is supplied to the area where cutting is being performed.

[0003] Patent Document 1 describes the following problems with the above-mentioned cutting machine. When the temperature of the room where the cutting machine is installed changes or when the temperature of the cutting water changes, thermal distortion occurs in the members constituting the cutting machine, and the above-mentioned reference position shifts from the position when the reference position was measured. In a situation where the cutting machine is installed in a clean room and the room temperature and cutting water temperatures are controlled to constant temperatures, the above-mentioned problem of thermal distortion hardly occurs. However, in some countries, the cutting machine is installed in a normal factory and cutting work is performed there.

[0004] In order to solve the above problems, Patent Document 1 proposes controlling the temperature of cutting water according to the room temperature so as to offset the effects of thermal strain. Specifically, when a room temperature different from the room temperature when the reference position is measured is detected, the temperature of cutting water is controlled based on a map that has a preset relationship between the room temperature and the water temperature.

[0005] Patent Document 1 further mentions the following: Generally, a cutting area is surrounded by a partition. Since the temperature inside the partition may differ from the temperature inside the room where the cutting device is installed, it is desirable to detect the temperature inside the partition independently of the temperature inside the room. The temperature of the cutting water may be adjusted according to the temperature inside the partition and the temperature inside the room where the cutting device is installed. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2010-167504 A Summary of the Invention [Problem to be solved by the invention]

[0007] As mentioned above, Patent Document 1 states that the problem of thermal distortion hardly occurs when the cutting device is installed in a clean room and the room temperature and cutting water temperature are controlled to a constant temperature. However, even in the above-mentioned situation, there are cases where the expected machining accuracy is not obtained.

[0008] There is a need for a processing machine and a method for manufacturing a workpiece that can improve processing accuracy. [Means for solving the problem]

[0009] A processing machine according to one aspect of the present disclosure is a processing machine in which a nozzle is disposed to supply processing fluid to an area where processing of a workpiece is performed with a tool, and includes a machine body that drives at least one of the workpiece and the tool to process the workpiece with the tool, a processing chamber that accommodates the workpiece, the tool and the nozzle while isolating the workpiece, the tool and the nozzle from at least a portion of the machine body, an internal temperature sensor that measures the temperature of the atmosphere within the processing chamber, an external temperature sensor that measures the temperature of the atmosphere surrounding the processing machine, and a temperature adjustment unit that performs at least one of an operation to increase the temperature of the processing fluid supplied to the nozzle when the temperature measured by the internal temperature sensor is lower than the temperature measured by the external temperature sensor, and an operation to decrease the temperature of the processing fluid supplied to the nozzle when the temperature measured by the internal temperature sensor is higher than the temperature measured by the external temperature sensor.

[0010] A method for manufacturing a workpiece according to one aspect of the present disclosure includes a processing step of processing the workpiece into a workpiece with a tool using a processing machine having a machine body that drives at least one of a workpiece and a tool, and a processing chamber that accommodates the workpiece, the tool, and the nozzle while isolating the workpiece, the tool, and the nozzle from at least a portion of the machine body, a supply step of supplying the processing liquid from the nozzle to an area where the workpiece is processed by the tool, in parallel with the processing step, an internal measurement step of measuring the temperature of the atmosphere in the processing chamber, an external measurement step of measuring the temperature of the atmosphere surrounding the processing machine, and a temperature adjustment step of performing at least one of an operation of increasing the temperature of the processing liquid supplied to the nozzle when the temperature measured in the internal measurement step is lower than the temperature measured in the external measurement step, and an operation of decreasing the temperature of the processing liquid supplied to the nozzle when the temperature measured by the internal temperature sensor is higher than the temperature measured by the external temperature sensor. Effect of the Invention

[0011] According to the above configuration or procedure, the processing accuracy can be improved. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a schematic perspective view showing an appearance of a processing machine according to an embodiment of the present disclosure. [Diagram 2] FIG. 2 is a schematic perspective view showing a partial internal configuration of the processing machine of FIG. 1. [Diagram 3] 2 is an enlarged schematic perspective view showing the inside of a processing chamber of the processing machine of FIG. 1; [Figure 4] 2 is a block diagram showing a schematic configuration relating to the supply of cutting fluid in the processing machine shown in FIG. 1; [Diagram 5] 1 is a flowchart showing an example of a procedure of a manufacturing method according to an embodiment of the present disclosure. [Figure 6] 2 is a schematic perspective view showing an example of a workpiece manufactured by the processing machine of FIG. 1; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] First, an overview of a processing machine according to an embodiment of the present disclosure will be described, and then the details of the processing machine will be described.

[0014] (Overview of the processing machine) Fig. 1 is a schematic perspective view showing the appearance of a processing machine 1 according to an embodiment of the present disclosure. Fig. 2 is a schematic perspective view showing a partial internal configuration of the processing machine 1. Fig. 2 is a see-through view of some of the components in Fig. 1. Fig. 3 is a schematic perspective view showing an enlarged view of a part of the processing machine 1 in Fig. 1 (the interior of a processing chamber 5 described later).

[0015] For convenience, the drawings are given an orthogonal coordinate system XYZ. The Z direction is, for example, a direction parallel to the vertical direction, and the +Z side is, for example, upward. As will be understood from the description below, the relationship between the orientations of the various components shown in the drawings and the vertical direction is arbitrary. However, for convenience, the following description may be expressed on the assumption that the relationship between the orientations of the various components and the vertical direction is the relationship exemplified in the drawings.

[0016] The processing machine 1 processes (e.g., cuts) a workpiece 103 using a tool 101. As shown in FIG. 3, a processing fluid (not shown, e.g., cutting fluid) is supplied from a nozzle 7 to an area where processing is performed. The tool 101 and the workpiece 103 are supported and driven by a machine body 3 shown in FIG. 2. As can be understood from a comparison of FIG. 1 and FIG. 2, a part of the machine body 3 is accommodated in a processing chamber 5. Thus, the tool 101, the workpiece 103, and the nozzle 7 (at least a part of each) are accommodated in the processing chamber 5.

[0017] The inventors of the present application have made the following findings as a result of intensive research. The temperature in the machining chamber 5 changes in response to the operation of the machining chamber 1, even if the temperature of the atmosphere around the machining machine 1 (the temperature in the room in which the machining machine 1 is installed; hereinafter, for convenience, this may be referred to as the "ambient temperature") is constant. From another perspective, the temperature in the machining chamber 5 does not follow the ambient temperature. Specifically, for example, when machining fluid is supplied from the nozzle 7, the temperature in the machining chamber 5 drops below the ambient temperature. In particular, in an embodiment in which the tool 101 (or the workpiece 103) rotates, the machining fluid has a large effect on the temperature drop in the machining chamber 5. This is presumably because the machining fluid is scattered by the rotation of the tool 101, filling the machining chamber 5 in a mist, and the heat in the machining chamber 5 is taken away when the mist of machining fluid that has filled the machining chamber 5 evaporates.

[0018] The inventor of the present application speculated that the above-mentioned temperature change in the machining chamber 5 (or, from another point of view, the difference from the environmental temperature) is the reason why the expected machining accuracy cannot be obtained even if the environmental temperature and the temperature of the cutting fluid (and further the temperature at an appropriate position of the machine body 3) are controlled to be constant. Therefore, an experiment was conducted in which the temperature of the machining fluid was raised according to the difference (amount of decrease) between the temperature in the machining chamber 5 and the environmental temperature, thereby controlling the temperature in the machining chamber 5 to follow the environmental temperature. As a result, the machining accuracy was improved compared to a mode in which such temperature control of the machining fluid was not performed.

[0019] In the above explanation, a situation where the temperature inside the processing chamber 5 becomes lower than the environmental temperature has been taken as an example. However, depending on the configuration of the processing machine 1 and the contents of processing, for example, the temperature inside the processing chamber 5 may become higher than the environmental temperature due to heat generated during processing. In this case, the opposite to the above, the temperature of the processing liquid may be lowered according to the difference between the temperature inside the processing chamber 5 and the environmental temperature. This can improve the processing accuracy.

[0020] Taking the above-mentioned actions into consideration, the processing machine 1 is configured to control the temperature of the processing fluid supplied from the nozzle 7 in accordance with the difference between the temperature in the processing chamber 5 and the environmental temperature. Specifically, the processing machine 1 performs at least one of the following operations: An operation to increase the temperature of the processing fluid supplied to the nozzle 7 when the temperature in the processing chamber 5 is lower than the environmental temperature. An operation to decrease the temperature of the processing fluid supplied to the nozzle 7 when the temperature in the processing chamber 5 is higher than the environmental temperature. Note that, for the sake of convenience, in the explanation of this embodiment, expressions may be used assuming that both operations are performed.

[0021] (Details of the processing machine) As described above, the processing machine 1 has, for example, a machine body 3, a processing chamber 5, and a nozzle 7. In addition to the above components, the processing machine 1 has, for example, the following components: A housing 9 (FIGS. 1 and 2) that houses the machine body 3; Partitions 11A and 11B (FIGS. 1 and 3; hereinafter, the partitions 11A and 11B may be simply referred to as partition 11 without distinguishing between them) that divide the inside of the housing 9 and form the processing chamber 5 together with the housing 9; An internal temperature sensor 13 (FIGS. 1 and 3) that detects the temperature inside the processing chamber 5; An external temperature sensor 15 (FIG. 1) that detects the environmental temperature; A supply device 17 (FIG. 4, described later) that supplies processing liquid to the nozzle 7; and A temperature adjustment unit 19 (FIG. 4, described later) that controls the temperature of the processing liquid supplied from the supply device 17 to the nozzle 7 based on the temperatures detected by the temperature sensors (13 and 15).

[0022] In the following, first, the components of the processing machine 1 will be roughly described in the following enumerated order: tool 101, workpiece 103, processing fluid, machine body 3, housing 9, partition 11, processing chamber 5, nozzle 7, internal temperature sensor 13, external temperature sensor 15, supply device 17, and temperature adjustment unit 19. Then, a method for manufacturing a workpiece according to an embodiment, a summary of the embodiment, and an example of a processed workpiece 103 (workpiece) will be described.

[0023] (tool) The tool 101 may be various tools used for various processes. For example, the tool 101 may be a cutting tool for cutting, a grinding tool for grinding, or a polishing tool for polishing. The cutting tool may be, for example, a turning tool (rotating tool) that rotates to cut the workpiece 103, or a turning tool that cuts the rotating workpiece 103. Examples of turning tools include milling cutters, drills, and reamers. The grinding tool or polishing tool may use fixed abrasive grains fixed to the tool, or may use free abrasive grains contained in a slurry.

[0024] In Figs. 1 to 3, a milling tool is illustrated as the tool 101. More specifically, the tool 101 in the illustrated example is a cutting blade having a cutting edge on its outer periphery. The cutting blade is generally plate-shaped (disk-shaped or ring-shaped) with a circular outer edge. The cutting blade is used to form a groove in the workpiece 103 and / or cut (divide) the workpiece 103 by rotating around its axis (around a rotation axis parallel to the Y direction in the illustrated example). The processing machine 1 may be equipped with one cutting blade (illustrated example), or may be equipped with multiple cutting blades spaced apart from each other in a direction parallel to the rotation axis. In the following description, as in the illustrated example, some expressions are used on the premise that one cutting blade is attached.

[0025] (Work) As can be understood from the above description that the type of machining performed by the tool 101 may be various, the workpiece 103 may also be various. For example, the material of the workpiece 103 may be various, and may be metal, ceramic, resin, wood, chemical wood, or a composite material (e.g., carbon fiber reinforced plastic). The shape and dimensions of the workpiece 103 before and / or after machining are arbitrary. The dimensional accuracy required for the workpiece 103 after machining is also arbitrary. For example, in a case where a relatively high accuracy is required, the accuracy (tolerance) may be 10 μm or less, 1 μm or less, or 100 nm or less.

[0026] 1 to 3, a plate-shaped workpiece 103 (substrate) is illustrated as an example. The shape of the plate-shaped workpiece 103 before processing is arbitrary, for example, rectangular (as shown in the example) or circular. In an embodiment in which the tool 101 is a disk-shaped cutting blade having a cutting edge on the outer periphery as described above, the cutting blade contributes to, for example, forming a groove extending in a direction perpendicular to the rotation axis of the tool 101 (X direction) on the upper surface (+Z side surface) of the plate-shaped workpiece 103, or dividing the workpiece 103 in the Y direction.

[0027] (processing fluid) As can be understood from the above description of the tool 101, the machining fluid (not shown) may be various fluids used for various processes. For example, in an embodiment in which the process is cutting, the machining fluid may be a cutting fluid (or cutting oil). The main component of the cutting fluid may be oil or water. The cutting fluid contributes to, for example, lubrication, cooling, and rust prevention. The machining fluid may be, for example, a grinding fluid for grinding, or a polishing fluid for polishing. The grinding fluid or polishing fluid (slurry) may contain free abrasive grains. In either process, the machining fluid may simply be water.

[0028] (machine body) The machine body 3 supports and drives the tool 101 and the workpiece 103. That is, the machine body 3 is responsible for the main part of the processing. The machine body 3 may have a variety of configurations, for example, a known configuration.

[0029] For example, regarding machines that perform processing, a distinction is sometimes made between machine tools and industrial robots (although the boundary between them is not always clear). When such a distinction is made, the machine body 3 may be classified into either category. In the explanation of this embodiment, an aspect that is generally classified as a machine tool is taken as an example.

[0030] Also, for example, as can be understood from the above description of the tool 101, the processing performed by the processing machine 1 may be various types of processing, such as cutting, grinding, and / or polishing. Also, the machine body 3 that performs cutting, etc. may be one that rotates the tool 101, or one that rotates the workpiece 103. The machine body 3 that rotates the tool 101 (processing machine 1) may be, for example, a milling machine, a drilling machine, a boring machine, or a machining center. The machine body 3 may or may not be a numerically controlled (NC) machine tool, and may or may not be a composite machine tool. The machine body 3 may be one that drives one tool 101 (example shown in the figure), or may be a multi-axis or multi-head one that drives multiple tools 101 simultaneously.

[0031] The machine body 3 moves the tool 101 and the workpiece 103 relatively on, for example, each of the X-axis, Y-axis, and Z-axis that are perpendicular to each other. The machine body 3 may be capable of moving the tool 101 and the workpiece 103 relatively on other axes in addition to the above three axes. For example, the machine body 3 may be capable of rotating around at least one axis parallel to any of the above three axes (e.g., a five-axis machining center). The relationship between the orientation of the main axis (described later) and the vertical direction is also arbitrary. The relative movement between the tool 101 and the workpiece 103 on each axis may be realized by the movement of the tool 101 or the movement of the workpiece 103, as can be understood from known machine tools.

[0032] In FIG. 2, the machine body 3 is exemplified by a slicer capable of performing cutting by rotating a disk-shaped tool 101 having a cutting edge on its outer periphery.

[0033] Specifically, for example, the machine body 3 illustrated in Fig. 2 has the following components as components supporting the workpiece 103. A base 21 placed on the floor surface of a factory or the like. An X-axis bed 23 fixed onto the base 21. A table 25 supported by the X-axis bed 23 and movable in the X direction (horizontal direction). A chuck 27 fixed onto the table 25 and detachably holding the workpiece 103. Although not particularly shown, the machine body 3 may be configured to allow the table 25 to rotate around an axis parallel to the Z axis.

[0034] Also, for example, the machine body 3 illustrated in Fig. 2 has the following components as components for supporting and driving the tool 101: the base 21. A Y-axis bed 29 fixed onto the base 21. A Y-axis moving section 31 supported by the Y-axis bed 29 and movable in the Y direction (horizontal direction). A Z-axis moving section 33 supported by the Y-axis moving section 31 and movable in the Z direction (vertical direction). A spindle head 35 (for convenience, not including a spindle 37, which will be described later) fixed to the Z-axis moving section 33. A spindle 37 (reference number shown in Fig. 3) supported by the spindle head 35 to be rotatable about a rotation axis parallel to the Y direction, and which detachably holds the tool 101.

[0035] A driving force from a driving source (e.g., an electric motor) not shown is transmitted to the table 25 to move the table 25 in the X direction, whereby the workpiece 103 supported by the table 25 moves in the X direction relative to the tool 101. A driving force from a driving source (e.g., an electric motor) not shown is transmitted to the Y-axis moving section 31 to move the Y-axis moving section 31 in the Y direction, whereby the tool 101 supported by the Y-axis moving section 31 moves in the Y direction relative to the workpiece 103. A driving force from a driving source (e.g., an electric motor) not shown is transmitted to the Z-axis moving section 33 to move the Z-axis moving section 33 in the Z direction, whereby the tool 101 supported by the Z-axis moving section 33 moves in the Z direction relative to the workpiece 103. A driving force from a driving source (e.g., an electric motor) not shown is transmitted to the spindle 37 to rotate the spindle 37 about its axis, whereby the tool 101 held by the spindle 37 rotates about its axis.

[0036] 1 to 3 are schematic diagrams, and the shapes of the members (21, 23, 25, 27, 29, 31, 33, 35, and 37) shown in each diagram are merely schematic. The actual shapes of the members may differ greatly from the shapes shown in the drawings. In addition, the materials of the members may be arbitrary. Furthermore, the guides (reference numbers omitted) that guide the moving parts (25, 31, or 33) that move in parallel with the support parts (23, 29, or 31) are also shown merely schematic, and may differ from the shapes shown in the drawings.

[0037] The guide that guides the moving part (25, 31 or 33) that moves parallel to the support part (23, 29 or 31) may be any appropriate one. For example, the guide may be a sliding guide in which the support part and the moving part slide, a rolling guide in which a rolling body rolls between the support part and the moving part, a hydrostatic guide in which air or oil is interposed between the support part and the moving part, or a combination of two or more of these. Similarly, the bearing of the main shaft 37 may be a sliding bearing, a rolling bearing, a hydrostatic bearing, or a combination of two or more of these.

[0038] The driving source for the parallel movement is, for example, an electric motor. This electric motor may be a rotary type or a linear motor. The rotational motion of the rotary type electric motor may be converted into linear motion by an appropriate mechanism such as a screw mechanism (for example, a ball screw mechanism). The driving source for the parallel movement may be a hydraulic (hydraulic) or pneumatic type. Similarly, the driving source for the rotation of the main shaft 37 is, for example, a rotary type electric motor. However, the driving source for the rotation of the main shaft 37 may be a hydraulic (hydraulic) or pneumatic type.

[0039] The chuck 27 is, for example, a vacuum chuck or an electrostatic chuck, and is attached to the table 25 by an appropriate tool such as a machine vice (not shown). Unlike the above description, the chuck 27 may be configured as an inseparable unit with the table 25. Also, the chuck 27 may not be provided, and the workpiece 103 may be fixed to the table 25 by an appropriate tool (for example, a machine vice) separate from the chuck 27.

[0040] The spindle 37 may hold the tool 101 by its own mechanism (e.g., a clamp mechanism), or the tool 101 may be attached by a device including a screw or the like. The cutting blade (tool 101) may be fixed to the spindle 37 by, for example, a member having a shaft portion inserted into a hole formed in the center of the cutting blade, a member overlapping the cutting blade in the axial direction of the spindle 37, and a screw inserted into these members and screwed into the spindle 37, although not shown in the figure. In such an embodiment, the cutting blade may be regarded as the tool 101, or the cutting blade and a device for attaching the cutting blade to the spindle 37 may be regarded as the tool 101 as a whole.

[0041] As described above, the processing machine 1 may rotate the workpiece 103. In this case, for example, a spindle rotating around an axis holds the workpiece 103, and a tool rest holds a bit as the tool 101. When considering aspects other than the illustrated example, a portion of the machine body 3 that holds the workpiece 103 (table 25 in the illustrated example) may be conceptualized as a higher-level workpiece holding section. Also, a portion of the machine body 3 that holds the tool 101 (spindle 37 in the illustrated example) may be conceptualized as a higher-level tool holding section. In the description of this embodiment, the terms workpiece holding section and tool holding section may be used.

[0042] The machine body 3 operates, for example, according to commands from a control device 39 (see FIG. 4 described later). More specifically, for example, the processing machine 1 is an NC machine tool, and the control device 39 controls the rotation of the spindle 37 and the relative movement between the table 25 and the spindle 37 according to a pre-stored NC program.

[0043] (Housing, partitions and processing rooms) The configurations of the housing 9, partition 11 (11A and 11B), and processing chamber 5 may be various, for example, similar to known configurations. For example, the material of the housing 9 and partition 11 is arbitrary, and some or all of them may be metal, resin, ceramic, or glass. The shape and dimensions of the housing 9, partition 11, and processing chamber 5 are also arbitrary. The housing 9 and partition 11 are merely examples of components that constitute the processing chamber 5, and these components do not necessarily have to be provided. For example, although not specifically shown, the processing chamber 5 may be formed by providing a cover that partially covers the machine body 3 instead of the housing 9.

[0044] Whether the processing machine 1 has the machining chamber 5 may be determined rationally. For example, when the space in which the tool 101 and the workpiece 103 exist is separated from the outside by appropriate members (9, 11, 23, etc.) on both sides of each of three mutually orthogonal axial directions (X-axis, Y-axis, or Z-axis), the machining chamber 5 may be considered to be formed. Furthermore, when 60% or more, 80% or more, or the entire area of ​​the machining chamber 5 projected onto each axis on both sides of each axis is separated from the outside (the cross-sectional area opening the space to the outside is less than 40%, less than 20%, or 0), the machining chamber 5 may be considered to be formed. Furthermore, when the total cross-sectional area of ​​gaps opening in various directions that communicate the space with the outside of the space is 40% or less, 20% or less, or 10% or less of the surface area of ​​the space, the machining chamber 5 may be considered to be formed.

[0045] As can be understood from the above description, the degree of sealing of the processing chamber 5 is arbitrary. The processing chamber 5 may be filled with air or with a gas other than air (for example, an inert gas such as nitrogen). The pressure in the processing chamber 5 may be equal to atmospheric pressure, lower than atmospheric pressure, or higher than atmospheric pressure.

[0046] In the illustrated example, as shown in FIG. 1, the housing 9 has a housing body 41 and a light-transmitting panel 43 arranged in a window of the housing body 41. The housing body 41 is configured, for example, by combining a metal frame and a metal plate, and surrounds the machine body 3 and the control device 39 from above and from the sides (four sides in a plan view) to accommodate them. Although not particularly illustrated, an operation unit (e.g., a touch panel and / or a mechanical switch) that accepts user operations and a display (e.g., a display that also serves as a touch panel) that displays images may be exposed from the housing body 41. The light-transmitting panel 43 is configured, for example, by a transparent resin or glass. Although not particularly illustrated, the light-transmitting panel 43 may be provided so as to be openable and closable. The partition 11 is configured, for example, by a metal plate, and is fixed to the machine body 3 and / or the housing body 41.

[0047] The housing 9 roughly separates the space above the X-axis bed 23 from the outside of the housing 9 on the -Y side, +X side, and +Z side of the space above the X-axis bed 23. The partition 11A separates the space above the X-axis bed 23 from other parts of the machine body 3 (other spaces within the housing 9) on the +Y side of the space above the X-axis bed 23. The partition 11B separates the space above the X-axis bed 23 from other parts of the machine body 3 (other spaces within the housing 9) on the -X side of the space above the X-axis bed 23. In this way, a machining chamber 5 is formed that is surrounded by the upper surface of the X-axis bed 23, the housing 9, and the partitions 11A and 11B.

[0048] Of the machine body 3, for example, at least an upper portion of the table 25 (and the chuck 27) is housed in the machining chamber 5. Although not particularly shown, the upper surface of the X-axis bed 23 may be covered by a telescopic cover connected to the table 25, and in this case, the upper surface of the telescopic cover may be regarded as the bottom surface of the machining chamber 5. Also, at least a tip portion of the spindle 37 is housed in the machining chamber 5 through an opening 11d (reference number shown in FIG. 3) formed in the partition 11A. Although not particularly shown, a cover covering the spindle head 35 may be provided, or a configuration similar to a telescopic cover that closes the opening 11d may be provided.

[0049] As described above, at least a part of the workpiece holding portion (table 25 or chuck 27 in the illustrated example) and at least a part of the tool holding portion (spindle 37 in the illustrated example) are housed in the machining chamber 5. In turn, the workpiece 103 and the tool 101 are housed in the machining chamber 5. From another perspective, a part of the machine body 3 other than the workpiece holding portion and the tool holding portion is not housed in the machining chamber 5 and is isolated from the tool 101 and the workpiece 103.

[0050] (nozzle) The nozzle 7 supplies the machining fluid to an area where the workpiece 103 is machined by the tool 101 (hereinafter, sometimes referred to as the "machining area"). In other words, the machining area is the area of ​​the workpiece 103 where the tool 101 is machining. For example, in an embodiment where the tool 101 performs cutting, the machining area is the position where the cutting edge contacts the workpiece 103 and the adjacent area. In an embodiment where the tool 101 performs grinding and polishing, the machining area is, for example, the contact position between the tool 101 and the workpiece 103 and the adjacent area, or the contact area, and the contact may be indirect via free abrasive grains.

[0051] The supply of the machining fluid to the machining area may be performed in various ways. For example, the nozzle 7 may discharge the working fluid toward the machining area, or may discharge the working fluid toward the tool 101 or the workpiece 103 and allow the working fluid that has reached the tool 101 or the workpiece 103 to flow into the machining area. The nozzle 7 may squirt the machining fluid, or may discharge the machining fluid at a flow rate that cannot be considered a squirt. The nozzle 7 may discharge (e.g., squirt) the machining fluid as a stream having an appropriate cross section, may discharge (e.g., squirt) the machining fluid in a shower-like manner, or may squirt the machining fluid in a mist-like manner.

[0052] The nozzle 7 may have various configurations, for example, may be the same as a known configuration. For example, the nozzle 7 may be detachable from the machine body 3, in which case the nozzle 7 may be regarded as an element separate from the processing machine 1, similar to the tool 101 and the workpiece 103. The nozzle 7 may be movable during processing, or may be disposed at a fixed position. The nozzle 7 may be positioned with respect to a predetermined element (for example, the spindle 37) manually or by a robot.

[0053] In the example shown in Fig. 3, the nozzle 7 is located at the tip of a bellows (reference number omitted) that can maintain its shape. The end of the bellows opposite to the nozzle 7 is connected to a block (reference number omitted) having a flow path. The block is fixed to the spindle head 35 by an appropriate device. Therefore, the nozzle 7 can move together with the tool 101 relative to the workpiece 103 (except for rotation around the axis of the tool 101), and the specific position and orientation of the nozzle 7 are determined by manually deforming the bellows.

[0054] (Internal and external temperature sensors) The internal temperature sensor 13 is, for example, partially (the part that detects the temperature) or entirely exposed to the machining chamber 5 (for example, partially or entirely housed in the machining chamber 5) and detects the temperature of the atmosphere in the machining chamber 5. The specific position of the internal temperature sensor 13 may be set as appropriate. For example, when the machining chamber 5 is divided into three equal parts in the X direction, the Y direction, or the Z direction, the internal temperature sensor 13 may be located in the central region or in another region. The internal temperature sensor 13 may be fixed to a stationary element or a moving element. In the illustrated example, the internal temperature sensor 13 is fixed to the partition 11A. Unlike the illustrated example, the internal temperature sensor 13 may be fixed to, for example, the housing 9, the partition 11B, the spindle head 35, or the table 25.

[0055] The external temperature sensor 15 detects the temperature of the atmosphere around the processing machine 1. The position of the external temperature sensor 15 is arbitrary as long as it can substantially detect the temperature of the atmosphere around the processing machine 1. For example, as in the illustrated example, in an embodiment in which the processing machine 1 has a housing 9, the external temperature sensor 15 may be provided so that a part (a part for detecting temperature) or the whole is exposed to the outside of the housing 9. In a case in which the temperature of the atmosphere in a predetermined space in the housing 9 excluding the processing chamber 5 is equivalent to the temperature of the atmosphere outside the housing 9, the external temperature sensor 15 may be provided so as to measure the temperature of the atmosphere in the above-mentioned predetermined space. In an embodiment in which the housing 9 is not provided, the external temperature sensor 15 may be located, for example, partly or entirely outside the machine body 3. In an embodiment in which the processing machine 1 is arranged in a predetermined room (for example, a constant temperature room and / or a clean room), the external temperature sensor 15 may be arranged at a position away from the machine body 3 and the housing 9, etc., so as to measure the temperature of the atmosphere in the above-mentioned room.

[0056] The temperature sensors (13 and 15) may have various configurations, for example, similar to various known temperature sensors. For example, the temperature sensor may be a thermistor, a resistance temperature detector, a thermocouple, or a radiation thermometer. The sensor here may be only a transducer, or may include a transducer and a circuit for processing such as amplification. The explanation in this paragraph may be applied to the liquid temperature sensor 47 (FIG. 4) described later.

[0057] In the illustrated example, one internal temperature sensor 13 and one external temperature sensor 15 are shown. Unlike the illustrated example, multiple internal temperature sensors 13 may be provided, and a representative value (e.g., average value) of the measured temperatures may be used. The same applies to the external temperature sensor 15. The measured temperature of the temperature sensor (13 or 15) may be used as is, or may be used after a predetermined correction. For example, in a mode in which the internal temperature sensor 13 is provided in the end region of the processing chamber 5 so as not to allow cutting chips to adhere, if the temperature of the end region is not necessarily appropriate as a temperature representative of the temperature inside the processing chamber 5, a correction coefficient may be multiplied or a correction constant may be added or subtracted. In the description of the present disclosure, the raw measured temperature and the corrected measured temperature are referred to as the measured temperature without distinction.

[0058] (Machining fluid supply device) FIG. 4 is a block diagram that illustrates a schematic configuration of the processing machine 1 that is related to the supply of cutting fluid.

[0059] Supply device 17 for supplying the machining fluid may be configured appropriately depending on the type of machining fluid, etc. For example, in an embodiment in which the machining fluid is a cutting fluid, grinding fluid, or polishing fluid, supply device 17 may have a configuration similar to or an application of the configuration of a device for supplying these machining fluids in a normal machine tool. In an embodiment in which the machining fluid is water, supply device 17 may be configured to receive water from a factory facility and have a valve that allows and prohibits the supply of the water to nozzle 7.

[0060] Supply device 17, which supplies cutting fluid, grinding fluid, polishing fluid, or similar machining fluid, may have, for example, a tank for storing the machining fluid and a pump for sending the machining fluid from the tank, although not shown in the figure. Supply device 17 may also have a valve for controlling the flow of the machining fluid at an appropriate position (for example, a position between the pump and the outlet of supply device 17). Supply device 17 may control the supply of the machining fluid, the flow rate of the machining fluid, and / or the pressure of the machining fluid by the pump and / or the valve.

[0061] The supply device 17 may or may not further include a tank for storing the undiluted machining fluid and a mixer for diluting the undiluted machining fluid. The supply device 17 may or may not include a configuration for recovering and filtering the machining fluid supplied to the machining area. From another perspective, the machining fluid may be reused or may be disposable.

[0062] Supply device 17 does not, for example, perform an operation to adjust the temperature of the machining liquid. Therefore, the machining liquid flows out from supply device 17 at a temperature influenced by the temperature of the atmosphere around supply device 17 and heat generated by the operation of supply device 17. However, supply device 17 may have a configuration for adjusting the temperature of the machining liquid. For example, supply device 17 may have a cooling device that cools the recovered high-temperature machining liquid to a predetermined target temperature or a predetermined upper limit temperature or lower (for example, 40° or lower), or conversely, may have a heater that heats the low-temperature machining liquid to a predetermined target temperature or above a predetermined lower limit temperature.

[0063] In the description of this embodiment, the supply device 17 is regarded as a part of the processing machine 1. In this case, the supply device 17 may be provided in such a manner that it can be regarded as a part of the processing machine 1 from the outside, or it may be provided in such a manner that it cannot be regarded as such. For example, a part or all of the supply device 17 may be housed in the housing 9, or may be located outside the housing 9. A part or all of the supply device 17 may be disposed in or on the base 21 of the machine body 3.

[0064] (Temperature adjustment part) Temperature adjustment unit 19 adjusts the temperature of the machining liquid supplied to nozzle 7. In the example of Fig. 4, temperature adjustment unit 19 is interposed between supply device 17 and nozzle 7, adjusts the temperature of the machining liquid supplied from supply device 17, and supplies the machining liquid after the temperature adjustment to nozzle 7. Unlike the example shown in the figure, for example, temperature adjustment unit 19 may adjust the temperature in a tank that stores the machining liquid of supply device 17, or adjust the temperature of the machining liquid in a flow path that supply device 17 has.

[0065] As can be understood from the above description, in an actual structure, the temperature adjustment unit 19 may be provided as an element completely separate from the supply device 17, or at least a part of it may be configured as an integral, inseparable part with the supply device 17. The latter includes a mode in which a temperature adjustment unit provided in the supply device 17 is used as the temperature adjustment unit 19 here. Note that in the description of the present disclosure, regardless of the configuration, the temperature adjustment unit 19 and the supply device 17 are regarded as separate elements, and for convenience, expressions may be used assuming the illustrated configuration (a configuration in which the temperature adjustment unit 19 is interposed between the supply device 17 and the nozzle 7).

[0066] The temperature adjustment unit 19 has, for example, a heat exchange unit 45 that exchanges heat with the machining liquid, and a control device 39 that controls the heat exchange unit 45. The temperature adjustment unit 19 may further have a liquid temperature sensor 47 for the machining liquid after the temperature has been adjusted by the temperature adjustment unit 19. Although not particularly shown, the temperature adjustment unit 19 may also have a liquid temperature sensor that adjusts the temperature of the machining liquid before the temperature adjustment.

[0067] The control device 39 is a conceptualized control device for the entire processing machine 1, and as described above, also controls the rotation of the tool 101 and the relative movement of the tool 101 with respect to the workpiece 103. In FIG. 4, such a control device 39 is shown as a part of the temperature adjustment unit 19. The control device 39 may be integrated in one location in terms of hardware, or may be provided in multiple locations. As an example of the latter, a control device that controls the machine body 3, a control device that controls the temperature adjustment unit 19, and a control device that synchronizes them may be provided separately in terms of hardware.

[0068] The control device 39 may be configured, for example, by a computer. The computer includes, for example, a central processing unit (CPU), a read only memory (ROM), a random access memory (RAM), and an external storage device, not shown. The CPU executes programs stored in the ROM and / or the external storage device to configure various functional units that perform control, etc. The control device 39 may include a logic circuit that performs only certain processes.

[0069] The heat exchanger 45 is capable of at least one of heating and cooling the machining liquid. The temperature of the machining liquid is increased by heating by the heat exchanger 45, and / or decreased by cooling by the heat exchanger 45. However, unlike the above description, the temperature adjustment unit 19 may increase the temperature of the machining liquid by reducing the degree of cooling already being performed, or decrease the temperature by reducing the degree of heating already being performed. For example, as described above, the supply device 17 may have a cooling device that cools the recovered high-temperature machining liquid to a predetermined temperature. This cooling device may be used as the heat exchanger 45 to increase the temperature of the machining liquid by reducing the degree of cooling.

[0070] Examples of the heat exchanger 45 capable of only heating include a heater having an electric heating wire and a heat pump configured exclusively for heating. Examples of the heat exchanger 45 capable of only cooling include an air-cooling fan and a heat pump configured exclusively for cooling. Examples of the heat exchanger 45 capable of both heating and cooling include a heat pump configured to be capable of both heating and cooling. A typical example of a heat pump is a vapor compression type that compresses, releases heat, expands, and absorbs heat in sequence for a heat medium. Two or more types of means may be combined, such as a combination of a heater and a heat pump.

[0071] The control device 39 controls the heat exchanger 45 based on the difference between the temperature measured by the internal temperature sensor 13 and the temperature measured by the external temperature sensor 15 so that the former temperature approaches the latter temperature. Various control modes may be used at this time. For example, the control method may be an appropriate one such as proportional (P) control, proportional differential (PD) control, proportional integral (PI) control, PID control, or fuzzy control. In addition, the value of the proportional gain, etc. may also be set appropriately.

[0072] As an example, when the temperature measured by the internal temperature sensor 13 is lower than the temperature measured by the external temperature sensor 15, the control device 39 may control the heat exchanger 45 so that the temperature of the machining liquid is increased from the current temperature by the difference between the two temperatures. This control may be performed so that the temperature measured by the liquid temperature sensor 47 is increased by the difference, or may be performed based on a relationship between the increased temperature and the operation amount of the heat exchanger 45 that is stored in advance. The cycle for setting the target value of the increased temperature (in other words, the amount of temperature change) as described above may be appropriately set depending on the magnitude of the temperature difference that may occur and the performance of the heat exchanger 45, etc., so that the target value is achieved within the cycle, or may be shorter (or longer) than such a length.

[0073] Similar control may be performed when the temperature measured by the internal temperature sensor 13 is higher than the temperature measured by the external temperature sensor 15. Also, unlike the above, the heat exchanger 45 may be simply controlled by a manipulated variable obtained by multiplying the difference between the two temperatures by a gain (without taking into account the temperature of the machining liquid).

[0074] (Manufacturing method) The above explanation has focused on the configuration and operation of the processing machine 1. From the above explanation, it is possible to extract the concept of a manufacturing method for manufacturing a workpiece by processing the workpiece 103.

[0075] 5 is a flowchart showing an example of the procedure of the manufacturing method according to the embodiment of the present disclosure. This flowchart may be regarded as a flowchart showing an example of the procedure of the process executed by the control device 39. However, this flowchart is merely intended to conceptually show the steps included in the manufacturing method, and does not accurately show the procedure of the process executed by the control device 39.

[0076] The manufacturing method according to the embodiment includes a machining step (step ST1) of machining a workpiece 103 with a tool 101, and a supply step (step ST2) of supplying machining liquid to a machining region from a nozzle 7. These two steps are performed, for example, in parallel.

[0077] The manufacturing method according to the embodiment also includes an internal measurement step (step ST3) for detecting the temperature inside the processing chamber 5, and an external measurement step (step ST4) for detecting the environmental temperature. These two steps may be performed, for example, in parallel with the processing step (step ST1) and the supply step (step ST2). In Fig. 5, the internal measurement step is performed before the external measurement step for convenience, but the two steps may be performed in the reverse order to that shown in the figure, or may be performed in parallel.

[0078] Furthermore, in the manufacturing method according to the embodiment, if there is a difference between the measured temperature in the internal measurement step and the measured temperature in the external measurement step (positive determination in step ST5), a temperature adjustment step (step ST6) is performed to raise or lower the temperature of the machining liquid. Note that, as in the illustrated example, the control device 39 may execute a determination as to whether or not temperature adjustment is necessary (step ST6), or may not execute such a determination and instead continuously perform control for temperature adjustment based on the temperature difference, with the heat exchanger 45 performing an operation of raising or lowering the temperature only when there is a temperature difference.

[0079] Thereafter, when the condition for terminating the machining is satisfied (positive determination in step ST7), the above-mentioned various steps are terminated. In other words, the above-mentioned various steps are continued or repeatedly executed until the condition for terminating the machining is satisfied.

[0080] In the manufacturing method according to this embodiment, some steps may be performed manually. For example, an operator may operate the heat exchanger 45 based on the temperature in the processing chamber 5 and the environmental temperature. In this case, instead of the internal temperature sensor 13 and the external temperature sensor 15, a thermometer that changes the position of a needle or the position of a liquid relative to a scale according to the temperature (in other words, one that does not output an electrical signal according to the temperature) may be used.

[0081] (Summary of the embodiment) As described above, the processing machine 1 according to this embodiment is provided with a nozzle 7 for supplying machining liquid to an area where the workpiece 103 is machined by the tool 101. The processing machine 1 may have a machine body 3, a processing chamber 5, an internal temperature sensor 13, an external temperature sensor 15, and a temperature adjustment unit 19. The machine body 3 drives at least one of the workpiece 103 and the tool 101 to process the workpiece 103 by the tool 101. The processing chamber 5 accommodates the workpiece 103, the tool 101, and the nozzle 7 while isolating the workpiece 103, the tool 101, and the nozzle 7 from at least a part of the machine body 3 (e.g., the base 21, the Y-axis bed 29, the Y-axis moving unit 31, and the Z-axis moving unit 33). The internal temperature sensor 13 measures the temperature of the atmosphere in the processing chamber 5. The external temperature sensor 15 measures the temperature of the atmosphere around the processing machine 1. The temperature adjustment unit 19 increases the temperature of the machining fluid supplied to the nozzle 7 when the temperature measured by the internal temperature sensor 13 is lower than the temperature measured by the external temperature sensor 15. And / or, the temperature adjustment unit 19 decreases the temperature of the machining fluid supplied to the nozzle 7 when the temperature measured by the internal temperature sensor 13 is higher than the temperature measured by the external temperature sensor 15.

[0082] From another point of view, the manufacturing method of the workpiece according to the present embodiment includes a processing step (ST1), a supply step (ST2), an internal measurement step (ST3), an external measurement step (ST4), and a temperature adjustment step (ST6). In the processing step, the workpiece 103 is processed into the workpiece by the tool 101 using the processing machine 1. The processing machine 1 includes a machine body 3 and a processing chamber 5. The machine body 3 drives at least one of the workpiece 103 and the tool 101. The processing chamber 5 accommodates the workpiece 103, the tool 101, and the nozzle 7 while isolating the workpiece 103, the tool 101, and the nozzle 7 from at least a part of the machine body 3. In the supply step, in parallel with the processing step, the processing liquid is supplied from the nozzle 7 to an area where the workpiece 103 is processed by the tool 101. In the internal measurement step, the temperature of the atmosphere in the processing chamber 5 is measured. In the external measurement step, the temperature of the atmosphere around the processing machine 1 is measured. The temperature adjustment step increases the temperature of the machining liquid supplied to the nozzle 7 when the temperature measured in the internal measurement step is lower than the temperature measured in the external measurement step. And / or, the temperature adjustment step decreases the temperature of the machining liquid supplied to the nozzle when the temperature measured by the internal temperature sensor is higher than the temperature measured by the external temperature sensor.

[0083] With the above-mentioned configuration or procedure, as described above, the temperature in the processing chamber 5 can be made to follow the environmental temperature, thereby improving the processing accuracy. An example of the effect of improving the processing accuracy will be mentioned in the explanation of an example of the workpiece (FIG. 6) described later.

[0084] The temperature adjustment unit 19 may increase the temperature of the machining fluid supplied to the nozzle 7 by the difference between the temperature measured by the external temperature sensor 15 and the temperature measured by the internal temperature sensor 13 , which is lower than the temperature measured by the external temperature sensor 15 .

[0085] In this case, for example, the difference between the temperature in the machining chamber 5 and the environmental temperature is used as the amount of temperature rise of the machining fluid, so that initial setting of the control, etc. is simple. For example, there is no need to search for a gain to be multiplied by the difference between the temperature in the machining chamber 5 and the environmental temperature.

[0086] In the supplying step, the machining fluid may be brought into contact with the rotating tool 101, and the atomized machining fluid scattered from the tool 101 may fill the machining chamber 5. From another point of view, the temperature adjustment step of this embodiment may be applied to a manufacturing method in which machining and machining fluid are supplied in such a manner.

[0087] In this case, for example, since the temperature of the machining liquid has a large effect on the temperature of the atmosphere in the machining chamber 5, the effect of improving accuracy by the temperature adjustment step is effective.

[0088] The tool 101 may be a cutting blade having a cutting edge on its outer periphery (or may alternatively include a cutting blade).

[0089] Since the cutting blade has a relatively large diameter from the rotation axis to the cutting edge (cutting area from another point of view), the machining fluid that comes into contact with the cutting blade easily splashes and fills the machining chamber 5 in the form of a mist. Therefore, for example, the effect of improving accuracy by the temperature adjustment step is more effective.

[0090] (Example of work) FIG. 6 is a perspective view showing an example of a workpiece 105 manufactured by the processing machine 1. As shown in FIG.

[0091] The workpiece 105 is, for example, a substrate made of glass. A plurality of V-grooves 105a in which a plurality of optical fibers 107 (only one optical fiber is illustrated in FIG. 6) are arranged are formed on the upper surface of the substrate. The V-grooves 105a are formed by, for example, a cutting blade serving as the tool 101.

[0092] The optical fibers 107 held in the workpiece 105 are arranged such that their end faces face a plurality of optical components (lenses or optical fibers) (not shown) and are optically connected to the optical components. In order to improve the positioning accuracy between the optical fibers 107 and the optical components, the shape and dimensions of the V-grooves 105a and the pitch of the V-grooves 105a require high processing accuracy. Therefore, the manufacturing method of this embodiment is effective for manufacturing such a workpiece 105.

[0093] The inventors of the present application confirmed the effect of improving accuracy by making the temperature in the processing chamber 5 follow the environmental temperature through experiments. Specifically, the workpiece 105 was manufactured by a known ultra-precision slicer. In addition, the workpiece 105 was also manufactured by a processing machine according to an embodiment in which the temperature of the processing fluid in the known ultra-precision slicer is increased by the difference between the temperature in the processing chamber 5 and the environmental temperature. Then, the cumulative value of the pitch error of the multiple V-grooves 105a was measured for each workpiece 105. As a result, the cumulative value of the error when processed by the known ultra-precision slicer was about 1 μm at maximum. In contrast, the cumulative value of the error when processed by the processing machine 1 according to the embodiment was about 0.2 μm at maximum. That is, the processing accuracy was improved by about 5 times.

[0094] The technology according to the present disclosure is not limited to the above-described embodiments and may be implemented in various forms.

[0095] For example, in the embodiment, an extremely high machining accuracy is exemplified, and a relatively small workpiece is exemplified, but the technology according to the present disclosure may be applied to a relatively large workpiece having a relatively large tolerance. [Explanation of symbols]

[0096] 1...machine, 3...machine body, 5...machining chamber, 7...nozzle, 13...internal temperature sensor, 15...external temperature sensor, 19...temperature adjustment unit, 101...tool, 103...workpiece.

Claims

1. A processing machine in which a nozzle is disposed to supply a processing liquid to an area where a workpiece is processed by a tool, a machine body that drives at least one of the workpiece and the tool to machine the workpiece with the tool; a processing chamber that accommodates the workpiece, the tool, and the nozzle while isolating the workpiece, the tool, and the nozzle from at least a portion of the machine body; a housing that houses the machine body and in which the processing chamber is located in a part of its interior; An internal temperature sensor that measures the temperature of an atmosphere in the processing chamber; an external temperature sensor that measures the temperature of an atmosphere around the housing; a temperature adjustment unit that performs at least one of an operation of increasing the temperature of the machining liquid supplied to the nozzle when the temperature measured by the internal temperature sensor is lower than the temperature measured by the external temperature sensor, and an operation of decreasing the temperature of the machining liquid supplied to the nozzle when the temperature measured by the internal temperature sensor is higher than the temperature measured by the external temperature sensor; A processing machine having the above structure.

2. A processing machine in which a nozzle is disposed to supply a processing fluid to an area where a workpiece is processed by a tool, a machine body that drives at least one of the workpiece and the tool to machine the workpiece with the tool; a processing chamber that accommodates the workpiece, the tool, and the nozzle while isolating the workpiece, the tool, and the nozzle from at least a portion of the machine body; An internal temperature sensor that measures the temperature of an atmosphere in the processing chamber; an external temperature sensor for measuring the temperature of an atmosphere around the processing machine; a temperature adjustment unit that performs at least one of an operation of increasing the temperature of the machining liquid supplied to the nozzle when the temperature measured by the internal temperature sensor is lower than the temperature measured by the external temperature sensor, and an operation of decreasing the temperature of the machining liquid supplied to the nozzle when the temperature measured by the internal temperature sensor is higher than the temperature measured by the external temperature sensor; It has The temperature adjustment unit performs control to raise the temperature of the machining liquid supplied to the nozzle by a difference between a temperature measured by the external temperature sensor and a temperature measured by the internal temperature sensor, the temperature being lower than the temperature measured by the external temperature sensor, at a predetermined cycle. processing machine.

3. A machine body that drives at least one of a workpiece and a tool; a processing chamber that accommodates the workpiece, the tool, and the nozzle while isolating the workpiece, the tool, and the nozzle from at least a portion of the machine body; a housing that houses the machine body and in which the processing chamber is located in a part of its interior; A processing step of processing the workpiece into a workpiece by the tool using a processing machine having A supply step of supplying a machining liquid from the nozzle to an area where the workpiece is machined by the tool in parallel with the machining step; an internal measurement step of measuring a temperature of an atmosphere in the processing chamber; an external measurement step of measuring a temperature of an atmosphere surrounding the housing; a temperature adjustment step of performing at least one of an operation of increasing the temperature of the machining liquid supplied to the nozzle when the measured temperature in the internal measurement step is lower than the measured temperature in the external measurement step, and an operation of decreasing the temperature of the machining liquid supplied to the nozzle when the measured temperature in the internal measurement step is higher than the measured temperature in the external measurement step; A method for manufacturing a workpiece having the above structure.

4. In the supplying step, the machining fluid is brought into contact with the rotating tool, and the machining fluid in the form of a mist scattered from the tool is filled in the machining chamber. The method for manufacturing a workpiece according to claim 3 .

5. The tool includes a cutting blade having a cutting edge on its periphery. The method for manufacturing a workpiece according to claim 4.

6. The workpiece is a substrate made of glass, In the processing step, a plurality of V-grooves in which a plurality of optical fibers are individually arranged are formed on the surface of the substrate. The method for manufacturing a workpiece according to claim 5 .

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