Apparatus and method for sputtering process

Abstract

To restrict an incident angle of a target particle made incident on a substrate and control a directivity of the target particle.SOLUTION: In an apparatus for performing sputtering treatment in which a target particle is ejected from a target by a plasma formed in a treatment container to deposit on a substrate mounted on a mounting table, a magnet arranged in a back side of the target is moved by a magnet movement mechanism. Two regulation plates facing each other are arranged between the mounting table and the target, and positions where these regulation plates are arranged are adjusted by an arrangement position adjustment mechanism according to the movement of the magnet. These regulation plates restrict an incident angle of a target particle ejected from the target with respect to the substrate mounted on the mounting table and a directivity of the target particle is controlled.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an apparatus and method for performing a sputtering process. [Background technology]

[0002] In the manufacturing process of semiconductor devices, for example, a magnetron sputtering device is used for depositing a metal film. This device is configured to place a target made of a film-forming material in a vacuum processing chamber, generate a magnetic field and an electric field to generate plasma, and sputter the target with ions from the plasma.

[0003] Patent Document 1 describes a sputtering apparatus in which a first shielding section and a second shielding section are disposed between a target facing a substrate at an angle, and the size of an opening above the substrate can be adjusted by moving the first and second shielding sections, and a third shielding section can be used to cover a part of the target. Patent Document 2 describes a sputtering apparatus in which a target is disposed to face the substrate, and a collimator with multiple through holes is provided between the target and the substrate so as to cover the entire surface of the substrate. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2016-33266 A [Patent Document 2] JP 2017-166056 A Summary of the Invention [Problem to be solved by the invention]

[0005] The present disclosure provides a technique that can limit the angle at which target particles are incident on a substrate and control the directionality of the target particles. [Means for solving the problem]

[0006] The present disclosure relates to In an apparatus for performing a sputtering process on a substrate, a processing vessel configured to accommodate a substrate and including a mounting stage on which the substrate is placed; The substrate placed on the mounting table On the board, Its surface side Towards a target disposed in the processing chamber so as to be exposed to the plasma and emitting target particles to be attached to the substrate by plasma formed in the processing chamber; a magnet provided on a rear side of the target as viewed from the mounting table, for adjusting a state of the plasma on a surface of the target; a magnet moving mechanism for repeatedly moving the magnet between a position on one side and a position on the other side that are set with a central portion of the back side of the target in between; before The target particles are disposed between the stage and the target, and are opposed to each other at a distance in order to limit the angle at which the target particles emitted from the target are incident on the substrate placed on the stage. To do so a collimator including two restricting plates arranged on the magnet and provided with a position adjustment mechanism that adjusts the positions at which the two restricting plates are arranged in accordance with the movement of the magnet; 、 When a moving range of the magnet is divided into three or more divided sections, the collimator includes three or more restricting plates that are arranged in correspondence with each divided section and are configured to be freely movable between a restricting position between the mounting table and the target and a retracted position retracted from the restricting position; the arrangement position adjustment mechanism is configured to move two of the regulating plates corresponding to one of the divided sections to the regulating positions and move the remaining regulating plates to the retracted positions during a period in which the moving magnet is moving through one of the divided sections. It is characterized by: Effect of the Invention

[0007] According to the present disclosure, the angle at which the target particles are incident on the substrate can be limited, and the directivity of the target particles can be controlled. [Brief description of the drawings]

[0008] [Figure 1] 1 is a vertical sectional side view showing a sputtering apparatus according to a first embodiment. [Diagram 2] FIG. 2 is an enlarged plan view showing a part of the sputtering apparatus according to the first embodiment. [Diagram 3]1 is a schematic perspective view showing a part of a sputtering apparatus according to a first embodiment. [Figure 4] FIG. 4 is a vertical sectional side view illustrating the operation of the sputtering device. [Diagram 5] FIG. 11 is a plan view for explaining the operation of a sputtering apparatus according to a comparative example. [Figure 6] FIG. 11 is a plan view for explaining the operation of a sputtering apparatus according to a comparative example. [Figure 7] FIG. 2 is a plan view illustrating the operation of the sputtering apparatus according to the first embodiment. [Figure 8] FIG. 11 is a schematic perspective view showing a part of a sputtering apparatus according to a second embodiment. [Figure 9] FIG. 11 is a plan view illustrating the operation of the sputtering apparatus according to the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] (First embodiment) Hereinafter, a first embodiment of an apparatus for performing a sputtering process according to the present disclosure (hereinafter referred to as a "sputtering apparatus") will be described with reference to the drawings. Fig. 1 is a schematic cross-sectional view showing an example of the configuration of the sputtering apparatus, and Fig. 2 is a plan view showing a part of the sputtering apparatus. Note that in the attached drawings, the dimensions and arrangement intervals of the same members are appropriately changed.

[0010] The sputtering device 1 of this example is configured as a device for performing sputtering processing to form, for example, a metal film on the surface of a semiconductor wafer (hereinafter referred to as a "wafer") 10, which is a substrate. In FIG. 1, reference numeral 11 indicates a processing container made of, for example, aluminum (Al) and grounded. The processing container 11 includes a main body 12, which is a roughly cylindrical container with an open top, and a lid 13 that covers the opening of the main body 12. The processing container 11 is connected to a vacuum pump 15, which is a vacuum exhaust mechanism, via an exhaust path 14, and is also connected to a supply source (not shown) of an inert gas, for example, Ar gas, via a supply port 16. Reference numeral 17 in FIG. 1 indicates a transfer port for the wafer 10, which is formed on a side wall 121 of the main body 12 and is configured to be freely opened and closed by a gate valve 18.

[0011] A mounting table 2 on which the wafer 10 is placed in a horizontal state is provided inside the processing vessel 11, and the mounting table 2 is configured to be freely moved laterally while holding the wafer 10 by a mounting table moving mechanism 21. The mounting table moving mechanism 21 in this example is configured to move the mounting table 2 laterally (X direction in FIG. 1) along a base 22, and to move the base 22 vertically (Z direction in FIG. 1) by a lifting mechanism 23. A sealing mechanism (not shown) for keeping the internal space of the processing vessel 11 airtight is provided at a position where the lifting mechanism 23 penetrates the bottom surface 122 of the main body 12. Although not shown, the mounting table 2 is provided with a heating mechanism for heating the wafer 10 and a push-up pin for transferring the wafer 10 between the mounting table 2 and an external transfer arm (not shown).

[0012] In this example, the wafer 10 on the mounting table 2 moves laterally from a first position to a second position during film formation. For example, the first position is a position where the left end of the wafer 10 is aligned with the lower left end of a slit 44 described later, as shown by a solid line in FIG. 1. The second position is a position where the wafer 10 moves left from the first position and the right end of the wafer 10 is aligned with the lower right end of the slit 44, as shown by a dashed line in FIG. 1. Furthermore, the wafer 10 on the mounting table 2 moves up and down between a height position when the wafer 10 is transferred between the mounting table 2 and the mounting table 2 by, for example, inserting an external transfer arm (not shown) and a height position during film formation, by the action of the lifting mechanism 23 described above.

[0013] The configuration of the mounting table moving mechanism 21 is not limited to the one illustrated in FIG. 1, and may be any configuration including a horizontal movement mechanism that moves the mounting table 2 holding the wafer 10 in the lateral direction. The horizontal movement mechanism may be configured, for example, by screwing the mounting table to a ball screw and rotating the ball screw with a drive motor. Alternatively, the mounting table may be fixed to a moving body that slides on a rail and includes a drive mechanism that slides the moving body. In addition, various configurations may be adopted, such as a configuration in which the mounting table is connected to a timing belt of a pulley belt mechanism and the timing belt is rotated by a drive motor to horizontally move the connection part of the mounting table. Alternatively, the lifting mechanism 23 may be configured to move the mounting table in the up-down direction by rotating a vertical lifting shaft with a drive motor.

[0014] 1, the lid 13 of this example faces the bottom surface 122 of the processing vessel 11 and has a disk-shaped ceiling 131. The diameter of the ceiling 131 is set to be smaller than the diameter of the bottom surface 122 of the circular tray-shaped main body 12. In a plan view, for example, the center of the ceiling 131 and the center of the bottom surface 122 are aligned, and the outer edge of the ceiling 131 and the upper edge of the side wall 121 of the main body 12 are connected via the tapered side wall 132 on the lid 13 side.

[0015] The side wall 132 of the lid 13 has openings 133 and 134 formed at two positions facing each other when viewed in a plan view, and target electrodes 3 (3A, 3B) are provided to close these openings 133 and 134. The target electrode 3 is formed by joining a conductive base plate 32 made of, for example, copper (Cu) or aluminum (Al) to the upper surface of the target 31. The target 31 emits target particles to be attached to the wafer 10 by plasma in the processing vessel 11. For example, the target 31 is made of Ti (titanium), Si (silicon), Zr (zirconium), Hf (hafnium), tungsten (W), cobalt-iron-boron alloy, cobalt-iron alloy, iron (Fe), tantalum (Ta), ruthenium (Ru), magnesium (Mg), iridium manganese (IrMn), platinum manganese (PtMn), or the like. Moreover, as the target 31, a target made of an insulator such as SiO2, other than a metal, can also be used.

[0016] The target 31 and the base plate 32 are each configured to have a rectangular shape in a plan view. For example, the target 31 is oriented such that the long side 311 of the rectangle faces horizontally. Wall 1 2, when viewed in a plane, the target electrodes 3A and 3B are arranged so that the center O1 of the wafer 10 held on the mounting table 2 and the center O2 of the long side 311 of the target 31 are aligned in the front-to-rear direction (Y direction in FIG. 2). With the above configuration, when viewed from the wafer 10 held on the mounting table 2, the target electrodes 3A and 3B are arranged so that the front side of each target 31 faces the wafer 10 and are inclined diagonally upward in the lateral direction (X direction in FIG. 1) of the wafer 10. In the following description, the lateral direction is referred to as the X direction and the front-to-rear direction is referred to as the Y direction.

[0017] For example, the length of the long side 311 of the target 31 is set to be larger than the diameter of the wafer 10, as shown in Fig. 2. The base plate 32 is formed to be the same size as the target 31 or larger than the target 31, and is attached to the lid 12 via, for example, an annular insulating member 33 (see Fig. 1). In this way, the target electrodes 3A and 3B are fixed to the processing vessel 11 in a state of being electrically insulated from the processing vessel 11, and a DC voltage is applied to the target electrodes 3A and 3B by a power supply unit 34. Note that an AC voltage may be applied instead of a DC voltage.

[0018] A shield member 4 is provided inside the processing vessel 11. The shield member 4 is provided to suppress adhesion of sputtered particles to the inner wall of the processing vessel 1, and is made of a conductor such as aluminum or an alloy having aluminum as a base material. In this example, the shield member 4 includes first, second and third shield members 41, 42 and 43.

[0019] The first shield member 41 is provided to cover the inside of the lid 13, and openings 411, 412 are formed in an area corresponding to the target 31, with the lower surface of the target 31 exposed inside the processing vessel 11. The second shield member 42 serves as a shielding plate, and is provided between the mounting table 2 and regulating plates 61, 62 described below so as to face the bottom surface 122 of the main body 12. A slit 44, which is an opening that exposes a part of the wafer 10 mounted on the mounting table 2, is formed in the center of the second shield member 42.

[0020] 2, the slit 44 is formed in a generally rectangular shape in plan view with a long side 441 extending in the Y direction and a short side 442 extending in the X direction. That is, the slit 44 is configured in a rectangular shape extending long along the moving direction of magnets 51 and 52 described later. In this example, the slit 44 is disposed such that a center O3 of the slit 44 is aligned with the center of the bottom surface 122 of the main body 121 in plan view. The slit 44 is formed such that the length of the long side 441 is greater than the diameter of the wafer 10 and the length of the short side 442 is less than the diameter of the wafer 10.

[0021] During film formation, the wafer 10 held on the mounting table 2 moves below the slit 44, and the positional relationship between the two is set so that, for example, the center O1 of the wafer 10 passes below the center O3 of the slit 44. Furthermore, the first and second positions are determined according to the shape of the slit 44 so that the entire surface of the wafer 10 passes through the slit 44 as the wafer 10 on the mounting table 2 moves from the first position to the second position.

[0022] Furthermore, the third shield member 43 is disposed below the mounting table 2, facing the second shield member 42, and not interfering with the transfer of the wafer 10 between the mounting table 2 and an external transfer arm. These first to third shield members 41 to 43 are each connected to, for example, the inner wall of the processing vessel 11, and are grounded via the processing vessel 11. Note that the configurations shown in Figures 1 and 2 are merely examples, and the configuration of the shield member 4 can be set as appropriate.

[0023] Magnet units 5 (5A, 5B) are provided above the respective target electrodes 3A, 3B so as to be in close proximity to these target electrodes 3A, 3B. Fig. 2 shows a schematic arrangement of the magnet unit 5A provided on the right side of the sputtering apparatus 10 as viewed in Fig. 1, the slit 44, and the wafer 10 on the mounting table 2. For convenience of illustration, the first and second shield members 41, 42 are depicted collectively in Fig. 2, and the base plate 32 is omitted.

[0024] Since the magnet units 5A and 5B are configured in the same way, the magnet unit 5A will be described here as an example. The magnet unit 5A includes magnets 51 and 52, which are, for example, two permanent magnets, and a magnet moving mechanism 53 that moves the magnets 51 and 52 in the Y direction. The magnets 51 and 52 have a function of adjusting the state of plasma on the surface of the target 31. As shown in Fig. 2, the two magnets 51 and 52 are formed in the same way, and their outer shape is, for example, a substantially rectangular parallelepiped shape when viewed from above.

[0025] Each of the magnets 51, 52 is configured by combining a plurality of magnet elements that form a magnetic circuit. For example, the magnets 51, 52 are configured by combining four magnet elements provided along the four sides of the outer shape and one magnet element provided at a distance from the four magnet elements in the center of the magnets 51, 52. The magnet elements provided along the four sides have polarities on the target 31 side different from the polarities on the target 31 side of the magnet element provided at the center. However, this example is one configuration example of the magnets 51, 52, and the configuration is not limited to this.

[0026] The magnets 51 and 52 have their long sides 511 and 521 extending in the X direction and their short sides 512 and 522 extending in the Y direction, and are spaced apart from each other in the Y direction. In addition, the area of ​​the region in which the magnets 51 and 52 are arranged as viewed from the mounting table 2 is set to be smaller than the area of ​​the target 31.

[0027] The magnet moving mechanism 53 is configured to repeatedly move the magnets 51, 52 between one side position and the other side position set across the center of the back side of the target 31. In this example, the one side position will be described as one end side of the target 31 in the Y direction, and the other side position will be described as the other end side of the target 31 in the Y direction.

[0028] For example, the magnet moving mechanism 53 is made of a ball screw mechanism, and a ball screw 54 is disposed so as to extend along the Y direction above the target 31, and this ball screw 54 is screwed into a screw hole penetrating each of the magnets 51, 52. The length of the ball screw 54 is set so as to cover the movement area of ​​the magnets 51, 52, and one end side and the other end side of the ball screw 54 are rotatably supported by bearings 551, 552, respectively. In addition, a drive motor 56 constituting a drive mechanism is connected to the other end side of the ball screw 54 via the bearing 552.

[0029] 2, reference numeral 57 denotes a rod-shaped guide member that is provided to extend in the Y direction above the target 31 in parallel with the ball screw 54, and one end side and the other end side of the guide member are supported by bearings 581 and 582, respectively. For example, when the magnets 51 and 52 are viewed from the front, the ball screw 54 is attached at a position closer to the mounting table 2 than the center of the magnets 51 and 52, and the guide member 57 is provided at a position closer to the side wall 121 than the center.

[0030] The two magnets 51, 52 are attached to a ball screw 54 and a guide member 57 with a preset separation distance in the Y direction. The ball screw 54 is rotated forward and backward by a drive motor 56, so that the magnets 51, 52 reciprocate along the Y direction, for example, between one end side and the other end side in the Y direction of the target 31, while maintaining the separation distance between them. In this example, the bearings 551, 552, 581, 582 and the drive motor 56 are attached to, for example, the cover 13.

[0031] In the processing vessel 11, collimators 6 (6A, 6B) are provided between the respective targets 31 and the slits 44. These collimators 6A, 6B have the same configuration, and here, with reference to Figures 1, 2, and 3, the collimator 6A provided on the right side of the sputtering apparatus as viewed in Figure 1 will be described as an example. The collimator 6A includes two regulating plates 61, 62 arranged to face each other with a gap therebetween, and is provided with a position adjustment mechanism that adjusts the positions at which these regulating plates 61, 62 are arranged in accordance with the movement of the magnets 51, 52.

[0032] The restricting plates 61, 62 are formed in the same shape as shown in Figures 1, 2 and 3, and are configured as elongated rectangular plates when viewed from the front, for example. As shown in Figure 3, the restricting plates 61, 62 are provided such that their plate surfaces 610, 620 are perpendicular to the Y direction, which is the movement direction, and their long sides 611, 621 extend in the Z direction and their short sides 612, 622 extend in the X direction. The restricting plates 61, 62 are arranged such that their plate surfaces 610, 620 face each other with a gap therebetween in the Y direction.

[0033] 2, in a plan view, the X-direction and Y-direction dimensions of the regulating plates 61, 62 are set to be smaller than the X-direction and Y-direction dimensions of the magnets 51, 52, respectively. In addition, in a plan view, the regulating plates 61, 62 are arranged such that, for example, a central position O4 between the magnets 51, 52 and a central position O5 between the magnets 51, 52 are aligned in the Y direction.

[0034] The arrangement position adjustment mechanism in this example is configured as a restriction plate moving mechanism 63 that moves the restriction plates 61, 62 in response to the movement of the magnets 51, 52. As shown in Figures 2 and 3, the restriction plate moving mechanism 63 is, for example, a ball screw mechanism, and a ball screw 64 is arranged along the Y direction, which is the movement direction, and this ball screw 64 is screwed into a screw hole formed on the upper end side of each of the restriction plates 61, 62. One end side and the other end side of the ball screw 64 are rotatably supported by bearing portions 651, 652, respectively, and a drive motor 66 constituting a drive mechanism is connected to the other end side of the ball screw 64 via the bearing portion 652.

[0035] In this manner, the collimators 61, 62 are configured to move back and forth between one end side and the other end side of the target 31 in the Y direction while maintaining the separation distance between them by rotating the ball screw 64 forward and backward using the drive motor 66. The ball screw 64 is provided with a length sufficient to cover the movement range of the regulating plates 61, 62, and the bearings 651, 652 and the drive motor 66 are attached to, for example, the first shield member 41.

[0036] As described later, the magnets 51, 52 move in the Y direction, and the positions at which the regulating plates 61, 62 are arranged are adjusted in response to this movement. Therefore, even if the magnets 51, 52 move in the Y direction, the positional relationship between the magnets 51, 52 and the collimators 61, 62 is maintained such that the Y direction positions of their respective center positions O4, O5 are aligned when viewed in a plan view. The shapes, sizes, and mutual arrangement intervals of the magnets 51, 52 and the collimators 61, 62 are appropriately set according to the membrane to be formed and the film formation conditions. The members constituting the collimators 61, 62 are made of, for example, ceramics or resin.

[0037] The film forming apparatus 1 having the above-described configuration includes a control unit 100 that controls the operation of the moving mechanisms 53 and 63, the power supply operation from the power supply unit 34, the Ar gas supply operation, and the like. The control unit 100 is, for example, a computer having a CPU and a storage unit (not shown). The storage unit stores a program in which steps (commands) for control required for film formation on the wafer 10 by the sputtering apparatus 1 are organized. For example, the program includes a configuration for controlling the driving of the magnet moving mechanism 53 and the regulating plate moving mechanism 63 so as to move the regulating plates 61 and 62 in accordance with the movement of the magnets 51 and 52. The program is stored in a storage medium such as a hard disk, a compact disk, a magnet optical disk, or a memory card, and is installed in the computer from there.

[0038] Next, the operation of the above-mentioned film forming apparatus 1 will be described. First, the transfer port 17 of the processing vessel 11 is opened, and the wafer 10 is placed on the mounting table 2 by the cooperation of an external transfer arm and a thrust pin (not shown). Next, the transfer port 17 is closed, and the mounting table 2 is moved to a first position at a height position during film formation. In addition, Ar gas is introduced into the processing vessel 11, and the inside of the processing vessel 11 is evacuated by the vacuum pump 15 to maintain a predetermined vacuum level.

[0039] Meanwhile, a DC voltage is applied from the power supply unit 34 to each of the target electrodes 3A and 3B to generate plasma in the processing vessel 11. When a DC voltage is applied to the target electrodes 3A and 3B, an electric field is generated around the target electrodes 3A and 3B. Electrons accelerated by this electric field collide with the Ar gas, ionizing the Ar gas and generating new electrons. Meanwhile, a magnetic field is generated by the magnets 51 and 52 along the surface of the target 31 where the magnets 51 and 52 are located, and the electrons are accelerated by the electric field near the target 31 and the magnetic field.

[0040] The electrons, which have sufficient energy due to this acceleration, further collide with the Ar gas, causing ionization to form plasma, and the Ar ions in the plasma sputter the target 31. Then, target particles are emitted radially (semispherically) from the surface of the target 31 where the magnets 51 and 52 are located toward the wafer 10 on the mounting table 2. Restriction plates 61 and 62 are present between the wafer 10 on the mounting table 2 and the target 3, and these restriction plates 61 and 62 guide the incidence of the target particles. Then, the target particles that have passed through the restriction plates 61 and 62 reach the wafer 10 through the slits 44 and adhere to it.

[0041] In this way, the restricting plates 61 and 62 are provided to prevent the incidence of target particles radially emitted from the target 31 from directions outside a preset angle range with respect to the wafer 10. Fig. 4 shows a schematic diagram of target particles emitted from the target 31 of the target electrode 3A being incident on a device pattern 101 formed on the wafer 10 and being deposited on the pattern 101.

[0042] During this sputtering process, the magnets 51, 52 of the magnet units 5A, 5B are repeatedly moved back and forth, for example, between one end and the other end of the target 31 in the Y direction at a speed of one reciprocation per several seconds. As described above, plasma is generated on the surface of the target 31 at the positions where the magnets 51, 52 are present. Therefore, the movement of the magnets 51, 52 moves the plasma generation position on the surface of the target 31, and the plasma state is adjusted so that the entire surface of the target 31 can be used to emit target particles.

[0043] Then, the restricting plates 61, 62 are repeatedly moved back and forth in the Y direction following the movement of the magnets 51, 52 so as to maintain the above-mentioned positional relationship with the magnets 51, 52. As a result, as will be described later, the restricting plates 61, 62 limit the angle at which the target particles emitted from the target 31 are incident on the wafer 10 on the mounting table 2, thereby controlling the directivity of the target particles. Controlling the directivity of the target particles in this example means controlling the incident angle of the target particles on the wafer 10 when viewed from a plane.

[0044] Meanwhile, the wafer 10 is moved back and forth in the X direction between the first position and the second position by the mounting table moving mechanism 21 at a speed of, for example, one round trip per several tens of seconds to several minutes. By moving between the first position and the second position, the entire surface of the wafer 10 passes under the slit 44, so that the target particles with a limited incidence angle are deposited on the entire surface of the wafer 10. In this way, a sputtering process for forming a metal film is performed on the entire surface of the wafer 10 while controlling the directivity of the target particles. By controlling the directivity of the target particles in this way, for example, a sputtering process can be performed in which the target particles are incident on the pattern 101 on the wafer 10 within a predetermined incidence angle range to form a film on a part of the pattern 101.

[0045] Next, the action of the regulating plates 61, 62 will be described with reference to Figs. 5 to 7. Figs. 5 and 7 show a schematic diagram of the positional relationship between the magnets 51, 52 and the regulating plates 61, 62 when viewed in a plan view, and the relationship with the incident angle of the target particles. Also shown is a plan view showing a schematic diagram of the deposition state of the metal film on the wafer 10. In this figure, the pattern 101 at a position corresponding to the center O3 of the slit 44 is shown among the device patterns 101 formed on the wafer 10. In this example, the pattern 101 has a rectangular upper end when viewed from the top side. In reality, the target particles are emitted from the surface of the target 31 where the magnets 51, 52 are located, but the target 31 is not shown in Figs. 5 and 7.

[0046] 5 shows an example of a comparative embodiment in which the positions of the regulating plates 61, 62 are fixed, and when the magnets 51, 52 move in the Y direction, the positional relationship between the magnets 51, 52 and the regulating plates 61, 62 changes. In FIG. 5(b), the magnets 51, 52 and the regulating plates 61, 62 are in the same positional relationship as in the above-described embodiment, that is, in a positional relationship in which the positions of the central positions O4, O5 in the Y direction are aligned. In this positional relationship, among the target particles radially emitted from the target 31 on which the magnets 51, 52 are positioned, only target particles having a small incidence angle pass between the regulating plates 61, 62 and are incident on the wafer 10.

[0047] The angles of incidence in the example shown in this figure are angles θ1 and θ2 between a straight line L1 extending in the X direction from the center O3 of the slit 44 in a plan view and straight lines L2 and L3 respectively connecting the center O3 and the magnets 51 and 52. In this case, only target particles with a narrow angle of incidence are incident on the wafer 10, so that for the pattern 101 arranged at the position of the center O3, a metal film is attached to one end 102 of a rectangular tip portion that faces the target 31 and extends along the Y direction. Here, when directivity control is performed using the collimator 6, the angles θ1 and θ2 shown in FIG. 5(b) are adjusted to within the range of 20 degrees or more and 25 degrees or less.

[0048] On the other hand, FIG. 5(a) shows a case where the positions of the regulating plates 61 and 62 are fixed and only the magnets 51 and 52 are positioned on one side in the Y direction. In this positional relationship, among the target particles emitted from the surface of the target 31 where the magnet 52 is located, only the target particles with a low incidence angle θ2 that pass between the regulating plates 61 and 62 are incident on the wafer 10. On the other hand, among the target particles emitted from the surface of the target 31 where the magnet 51 is located, the target particles with a high incidence angle θ1' that pass outside the regulating plate 61 and are incident on the wafer 10 from an oblique direction. In this case, the target particles with the low incidence angle θ2 adhere to one end 102 of the tip of the pattern 101 described above. On the other hand, the target particles with the high incidence angle θ1' adhere to one side 103 of the tip of the pattern 101, and a metal film is deposited in a shape as shown in FIG. 5(a).

[0049] 5(c) shows a case where the positions of the regulating plates 61 and 62 are fixed, and only the magnets 51 and 52 are positioned on the other side in the Y direction. In this positional relationship, of the target particles emitted from the magnet 51, only the target particles having a low incident angle θ1 that pass between the regulating plates 61 and 62 are incident on the wafer 10. On the other hand, of the target particles emitted from the magnet 52, only the target particles having a high incident angle θ2' that pass outside the regulating plate 62 are incident on the wafer 10. Therefore, as shown in FIG. 5(c), a metal film is formed on one end 102 of the pattern 101 and on a side 104 on the other side of the pattern 101. Although it depends on the size and shape of the pattern 101, if the angles θ1' and θ2' shown in Figures 5(a) and (b) are 40 degrees or more, the metal film may be deposited in an unintended position, and sufficient directivity control effect may not be obtained.

[0050] FIG. 6 is a plan view showing a metal film formed on a pattern 101 by performing a sputtering process in a positional relationship in which the magnets 51 and 52 are moved while the positions of the regulating plates 61 and 62 are fixed, as described with reference to FIGS. 5(a) to 5(c). When the magnets 51 and 52 are moved back and forth in the Y direction to perform a sputtering process, the positional relationship between the magnets 51 and 52 and the regulating plates 61 and 62 repeats the states of FIG. 5(a)→FIG. 5(b)→FIG. 5(c). Therefore, depending on the positions of the magnets 51 and 52, the incidence angle of the target particles varies, making it difficult to control the directivity of the target particles. As a result, as shown in FIG. 6, the metal film is formed in a shape in which the metal film is deposited on the one end side 102 and both side surfaces 103 and 104 of the pattern 101.

[0051] In contrast to the comparative embodiment described above, Fig. 7 shows an embodiment in which the regulating plates 61, 62 move following the movement of the magnets 51, 52, and a positional relationship is maintained between the two in which the central positions O4, O5 are aligned in the Y direction as viewed in a plane. Fig. 7(a) shows a case in which the magnets 51, 52 and the regulating plates 61, 62 are located on one side in the Y direction. Of the target particles radially emitted from the surface of the target 31 originating from the magnet 52, only target particles having a low incidence angle θ2 are incident on the wafer 10 due to the presence of the regulating plate 62.

[0052] On the other hand, the incidence of target particles emitted from magnet 51 at a high incidence angle θ1' is hindered by the presence of restricting plate 62. In this manner, since only target particles at a low incidence angle are incident on wafer 10, if one end 102 of pattern 101 is present at the incidence position, a metal film is formed only on that end 102. Target particles are incident at low angles of incidence θ1 and θ2 on the intersection O31 between the slit center line (dotted line in Figures 7(a) to (c)) that passes through the center O3 of the slit 44 and extends along the longitudinal direction of the slit 44 and the midline L11 of the regulating plates 61 and 62.

[0053] 7(b) shows a case where the magnets 51, 52 and the regulating plates 61, 62 are at the center in the Y direction within their movement ranges. In this case, as in FIG. 5(b), the presence of the regulating plates 61, 62 allows only target particles with low incidence angles θ1, θ2 to be incident on the wafer 10, so that a metal film is formed only on one end 102 of the pattern 101.

[0054] 7(c) shows a case where the magnets 51, 52 and the regulating plates 61, 62 are located at the other side in the Y direction. Due to the presence of the regulating plate 61, only the target particles emitted from the magnet 51 at a low incident angle θ1 are incident on the wafer 10. On the other hand, due to the presence of the regulating plate 61, the incidence of the target particles emitted from the magnet 52 at a high incident angle θ2' is hindered. Therefore, only the target particles at a low incident angle are incident on the wafer 10, and a metal film is formed only on one end 102 of the pattern 101. Furthermore, the target particles are incident on an intersection O32 between the slit center line and the midline L12 of the restriction plates 61 and 62 at low incident angles θ1 and θ2.

[0055] In this example, the restricting plates 61 and 62 are moved following the movement of the magnets 51 and 52, so that the incidence angle of the target particles at a high incidence angle onto the wafer 10 is hindered. As a result, the directivity of the target particles incident onto the wafer 10 through a space other than the space between the opposing restricting plates 61 and 62 can also be controlled.

[0056] According to this embodiment, the positions at which the restricting plates 61, 62 are arranged are adjusted in accordance with the movement of the magnets 51, 52, thereby limiting the angle of incidence of the target particles and controlling the directivity of the target particles. In addition, the adjustment of the positions at which the restricting plates 61, 62 are arranged is performed by moving the two restricting plates 61, 62 by the restricting plate moving mechanism 63 in accordance with the movement of the magnets 51, 52. Therefore, the control of the directivity of the target particles can be realized with a simple configuration that prevents the device from becoming larger and more complicated.

[0057] Generally, control of the directionality of target particles in a magnetron sputtering apparatus can be realized by increasing the number of regulating plates, for example by providing a regulating member with a honeycomb structure, or by increasing the distance between the target and the wafer 10. However, these configurations are not advisable because they lead to a complex structure and an increase in the size of the apparatus, and a configuration that can realize control of the directionality of target particles with a simple configuration while maintaining the footprint of the apparatus, as in the present disclosure, is useful.

[0058] Furthermore, by moving the magnets 51, 52, the discharge portion on the surface of the target 31 moves in conjunction with the movement of the magnets 51, 52, thereby improving the utilization efficiency of the target 31. In this example, by moving the magnets 51, 52, which have a smaller area than the target 31, it is possible to discharge from the entire surface of the target 31, which is effective in improving the utilization efficiency of the target 31 with an inexpensive configuration. Furthermore, by moving the discharge portion of the target 31, the desired metal film can be formed uniformly over the entire surface of the wafer 10.

[0059] Second Embodiment Next, a second embodiment of the sputtering apparatus of the present disclosure will be described with reference to Figs. 8 and 9. In this example, collimators 8A and 8B (8B is not shown) are provided with, for example, four regulating plates 81 to 84, and two of the four regulating plates are configured to move to regulating positions in response to the movement of magnets 51 and 52. The locations of collimators 8A and 8B and components other than collimators 8A and 8B are configured in the same manner as in the first embodiment described with reference to Figs. 1 and 2. In Figs. 8 and 9, components similar to those in the first embodiment are denoted by the same reference numerals, and duplicated explanations will be omitted.

[0060] The four regulating plates 81 to 84 are formed in the same shape and size as the regulating plates 61 and 62 of the first embodiment, for example. These regulating plates 81 to 84 are arranged apart from each other, and are configured to be freely movable between a regulating position between the mounting table 2 and the target 31 and a retracted position retracted from this regulating position by a placement position adjustment mechanism 85. Fig. 8 shows the state where the regulating plates 82 and 83 are in the regulating position and the regulating plates 81 and 84 are in the retracted position. Fig. 9 is a plan view showing a schematic positional relationship between the magnets 51 and 52 and the regulating plates 81 to 84, in which the regulating plates in the regulating position are shown by solid lines and the regulating plates in the retracted position are shown by dashed lines.

[0061] The position adjustment mechanism 85 includes horizontal rotation shafts 851, 852, 853, and 854 fixed to the respective regulating plates 81, 82, 83, and 84, and drive motors (not shown) provided on the respective rotation shafts 851, 852, 853, and 854. The position adjustment mechanism 85 rotates each drive motor in response to the movement of the magnets 51 and 52 based on a command from the control unit 100. This operation moves two adjacent regulating plates out of the four regulating plates 81 to 84 to the regulating positions, and moves the remaining regulating plates to the retracted positions. In this example, the regulating positions are between the slit 44 and the target 31, and are positions where, for example, the long sides of the regulating plates 81 to 84 are substantially perpendicular to the wafer 10 on the mounting table 2. The retreat position is a position where the restricting plates 81 to 84 rotate from the restricting position toward the slit 44 side, which is the opposite direction to the target 31, and are out of between the mounting table 2 and the target 31.

[0062] Next, the movement range of the magnets 51, 52 of each magnet unit 5A, 5B and the arrangement of the regulating plates 81-84 at the regulating positions will be described with reference to FIG. 9. The movement range in which the magnets 51, 52 move is divided into, for example, three divided sections 91-93. As described above, the magnets 51, 52 move back and forth between, for example, one end side (position shown in FIG. 9(a)) and the other end side (position shown in FIG. 9(c)) of the target 31. When viewed from above, as shown in FIG. 9(a), the regulating plates 81, 82 at the regulating positions are respectively arranged at positions corresponding to the magnets 51, 52 at the one end side. When viewed from above, as shown in FIG. 9(c), the regulating plates 83, 84 at the regulating positions are respectively arranged at positions corresponding to the magnets 51, 52 at the other end side.

[0063] 9, in this example, magnets 51, 52 move between position P1 on one end side in the Y direction and position P2 on the other end side in a plan view, so the range of movement of magnets 51, 52 is between positions P1 and P2. Also, the center position of the range of movement, which in this example is a position in the Y direction corresponding to center O3 of slit 44, is set as position P3. In this configuration, first divided section 91 is set to the section from position P1 to position P3, and third divided section 93 is set to the section from position P2 to position P3.

[0064] Also, for example, the central position in the Y direction between restricting plates 81 and 82 in the restricting position is defined as position P4, and the central position in the Y direction between restricting plates 83 and 44 in the restricting position is defined as position P5. Second divided section 92 is set as the section from position P4 to position P5. In this manner, first divided section 91 and second divided section 92 overlap with each other, and second divided section 92 and third divided section 93 overlap with each other.

[0065] In this way, the regulating plates 81 to 84 are arranged corresponding to each of the divided sections 91 to 93. For example, the regulating plates 81, 82 are arranged corresponding to the first divided section 91, the regulating plates 82, 83 are arranged corresponding to the second divided section 92, and the regulating plates 83, 84 are arranged corresponding to the third divided section 93. The arrangement position adjustment mechanism 85 is configured to move the two regulating plates associated with one of the divided sections to the regulating positions and move the other regulating plates to the retracted positions during a period when the moving magnets 51, 52 are moving through one of the divided sections.

[0066] 9(b) shows an example in which the magnets 51 and 52 move through the second divided section 92, and correspondingly, the regulating plates 82 and 83 are moved to the regulating position and the remaining regulating plates 81 and 84 are moved to the retracted position. When the magnets 51 and 52 are moved from this position toward the first divided section 91, for example, at the timing when the magnet 51 leaves the second divided section 92, the regulating plate 81 is moved to the regulating position and the regulating plate 83 is moved to the retracted position. In this way, as shown in FIG. 9(a), when the magnets 51 and 52 move through the first divided section 91, the regulating plates 81 and 82 are moved to the regulating position and the regulating plates 83 and 84 are moved to the retracted position.

[0067] 9(b), the magnets 51 and 52 are moved toward the third divided section 93. In this case, for example, at the timing when the magnet 52 leaves the second divided section 92, the restricting plate 84 is moved to the restricting position and the restricting plate 82 is moved to the retracted position. In this way, when the magnets 51 and 52 move through the third divided section 93, the restricting plates 83 and 84 are in the restricted position.

[0068] In this example, while the magnets 51 and 52 are moving in the first divided section 91, the incidence angle of the target particles is limited by the regulating plates 81 and 82, and the target particles are incident on the wafer 10 at a low incidence angle θ2 as shown in Fig. 9(a). Meanwhile, while the magnets 51 and 52 are moving in the second divided section 92, the incidence angle of the target particles is limited by the regulating plates 82 and 83, and the target particles are incident on the wafer 10 at low incidence angles θ1 and θ2 as shown in Fig. 9(b). Furthermore, while the magnets 51 and 52 are moving in the third divided section 93, the incidence angle of the target particles is limited by the regulating plates 83 and 84, and the target particles are incident on the wafer 10 at a low incidence angle θ1 as shown in Fig. 9(c).

[0069] Therefore, in this embodiment, similarly to the first embodiment, the restricting plates 61, 62 are arranged in accordance with the movement of the magnets 51, 52. Therefore, with a simple configuration that suppresses an increase in the footprint and complexity of the device, it is possible to limit the incident angle of the target particles and control the directivity of the target particles. Note that this embodiment also includes a case where, depending on the intended film formation process, a period is provided during the sputtering process in which all the restricting plates 81-84 are arranged at the retracted positions.

[0070] Further, a modified example (not shown) of the second embodiment will be described. In this example, two regulating plates are prepared for each of the first to third divided sections, and the arrangement position adjustment mechanism is configured to arrange two regulating plates at the regulating position and the remaining regulating plate at the retreat position in response to the movement of the magnet. For example, the arrangement position adjustment mechanism is configured with a rotating shaft common to six regulating plates and a drive motor for rotating the rotating shaft. The six regulating plates are fixed at corresponding positions in the length direction (Y direction) of the rotating shaft for each of the first to third divided sections, and at different positions in the circumferential direction of the rotating shaft. For example, the circumferential positions of the rotating shaft are set to positions shifted by 120 degrees in the circumferential direction.

[0071] During the period when the magnet is moving to the first divided section, the two regulating plates provided corresponding to the first divided section are placed in the regulating position. As a result, the two regulating plates provided corresponding to the second divided section are retracted to a retract position, for example, 240 degrees clockwise from the regulating position. The two plates provided corresponding to the third divided section are retracted to a retract position, for example, 120 degrees clockwise from the regulating position. The sizes and arrangement positions of the regulating plates and the target are set so that the two regulating plates retracted to the retract positions are out of the position between the mounting table and the target.

[0072] Next, during the period when the magnet is moving from the first divided section to the second divided section, the rotation shaft is rotated 120 degrees clockwise, and the two regulating plates provided corresponding to the second divided section are placed in the regulating position. As a result, the regulating plate corresponding to the third divided section is retracted to a retracted position 240 degrees clockwise from the regulating position, and the regulating plate corresponding to the first divided section is retracted to a retracted position 120 degrees clockwise from the regulating position.

[0073] Furthermore, during the period when the magnet is moving from the second divided section to the third divided section, the rotation axis is rotated 120 degrees clockwise, and the two restriction plates provided corresponding to the third divided section are arranged in the restriction position. As a result, the restriction plate corresponding to the first divided section is retracted to a retracted position 240 degrees clockwise from the restriction position, and the restriction plate corresponding to the second divided section is retracted to a retracted position 120 degrees clockwise from the restriction position. Even with this configuration, since the restriction plates are arranged according to the movement of the magnet, it is possible to limit the incidence angle of the target particles and control the directivity of the target particles.

[0074] In the above, the number of magnets provided in the magnet unit is not limited to two, but may be one, or three or more. Also, the number of regulating plates is not limited to two, but may be three or more. For example, when three magnets are provided, three regulating plates may be arranged according to the movement of the magnets.

[0075] Furthermore, in the above embodiment, the magnet is moved between one side and the other side in the front-rear direction (Y direction in FIG. 2) on the back side of the target, but the direction of movement of the magnet is not limited to this direction. The magnet may be moved between one side and the other side in the horizontal direction (X direction in FIG. 2) in a plan view along the target provided at an angle to the mounting table.

[0076] Even in this case, the slit, which is the opening, extends in the X direction along the magnet movement direction, and the wafer W is moved in the Y direction. The regulating plate is disposed between the magnet and the slit in accordance with the movement of the magnet. Therefore, in the configuration of the first embodiment, the regulating plate is configured to move along the magnet movement direction. In addition, in the second embodiment, the regulating plates are arranged along the magnet movement direction, and two regulating plates are configured to move to the regulating positions in accordance with the magnet movement. In addition, the magnet may be moved between a position on one side and a position on the other side set with the center of the back side of the target in between. For example, these positions may be positions closer to the center from one end and the other end of the back side of the target in the movement direction.

[0077] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0078] 10 Semiconductor wafer (substrate) 11 Processing vessel 2. Placement table 31 Target 51, 52 Magnet 53 Magnet movement mechanism 6A, 6B Collimator 61, 62 Regulatory plate

Claims

1. In an apparatus for performing a sputtering process on a substrate, a processing vessel configured to accommodate a substrate and including a mounting stage on which the substrate is placed; a target that is disposed so as to face a front surface side of the substrate placed on the placement table and that emits target particles to be attached to the substrate by plasma generated in the processing chamber; a magnet provided on a rear side of the target as viewed from the mounting table, for adjusting a state of the plasma on a surface of the target; a magnet moving mechanism for repeatedly moving the magnet between a position on one side and a position on the other side that are set with a central portion of the back side of the target in between; a collimator provided between the mounting table and the target, the collimator including two restriction plates arranged to face each other with a space therebetween in order to restrict an incident angle of the target particles emitted from the target onto a substrate mounted on the mounting table, the collimator including an arrangement position adjustment mechanism that adjusts positions at which the two restriction plates are arranged in accordance with movement of the magnet, when a moving range of the magnet is divided into three or more divided sections, the collimator is provided with three or more restricting plates arranged in correspondence with each divided section and configured to be movable between a restricting position between the mounting table and the target and a retracted position retracted from the restricting position; the placement position adjustment mechanism is configured to move two of the regulating plates corresponding to one of the divided sections to the regulating position while the moving magnet is moving through that divided section, and to move the remaining regulating plates to the retracted position.

2. a shielding plate provided between the mounting table and the regulating plate, the shielding plate having an opening through which a portion of the substrate placed on the mounting table is exposed; The apparatus according to claim 1 , further comprising: a mounting table moving mechanism that moves the mounting table laterally below the shielding plate so that the entire surface of the substrate placed on the mounting table passes through the opening when viewed from the target side.

3. 3. The apparatus according to claim 1, wherein two magnets are provided on the back side of the target, and two restricting plates provided on the collimator use these two magnets in parallel to restrict the incident angle of the target particles emitted from the target.

4. 1. A method for sputtering a substrate, comprising: placing a substrate on a stage provided in a processing chamber; generating plasma in the processing chamber, and emitting target particles from a surface side of a target toward the substrate placed on the stage to cause the target particles to adhere to the substrate; a step of repeatedly moving a magnet provided on the back side of the target as viewed from the mounting table between a position on one side and a position on the other side across a central portion of the back side of the target in order to adjust a state of the plasma on the surface of the target; a step of using a collimator including two restricting plates disposed between the mounting table and the target and arranged to face each other with a gap therebetween, and restricting an angle at which the target particles emitted from the target are incident on the substrate mounted on the mounting table while adjusting positions at which the two restricting plates are disposed in accordance with movement of the magnet, when a moving range of the magnet is divided into three or more divided sections, the collimator is provided with three or more restricting plates arranged in correspondence with each divided section and configured to be movable between a restricting position between the mounting table and the target and a retracted position retracted from the restricting position; The method includes adjusting the positions at which the two regulating plates are positioned by moving the two regulating plates corresponding to one of the divided sections to the regulating positions while the moving magnet is moving through that section, and moving the remaining regulating plates to the retracted positions.

5. 5. The method according to claim 4, further comprising a step of providing a shielding plate between the mounting table and the regulating plate, the shielding plate having an opening formed therein to expose a portion of the substrate mounted on the mounting table, and moving the mounting table laterally below the shielding plate so that, as viewed from the target side, the entire surface of the substrate mounted on the mounting table passes through the opening.

6. The method according to claim 4 or 5, wherein two magnets are provided on the back side of the target, and in the process of restricting the angle of incidence of the target particles, two restricting plates provided on the collimator use these two magnets in parallel to restrict the angle of incidence of the target particles released from the target.

Images