Isolator

Abstract

To provide an isolator and a manufacturing method of the isolator, that reduce a YIG's influence in a semiconductor process, an optical switch, an optical transceiver, and a data center.SOLUTION: An isolator 10 comprises a substrate 50, waveguides 20, an insulating layer 54, and non-reciprocal members 40. The insulating layer 54 includes recesses 30. The recesses 30 are positioned so as to overlap at least parts of the waveguides 20. The non-reciprocal members 40 are positioned in the recesses 30. The waveguides 20 include a first waveguide 21 and a second waveguide 22. The recesses 30 include a first recess 31 and a second recess 32. The non-reciprocal members 40 include a first non-reciprocal member positioned in the first recess 31 and a second non-reciprocal member positioned in the second recess 32. A propagation direction of electromagnetic waves in a portion of the first waveguide 21 overlapping the first non-reciprocal member is different from a propagation direction of electromagnetic waves in a portion of the second waveguide 22 overlapping the second non-reciprocal member.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to an isolator, an optical switch, an optical transceiver, a data center, and a method for manufacturing an isolator. [Background technology]

[0002] An optical isolator that uses a magneto-optical material Ce:YIG as a waveguide layer is known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2007 / 083419 Summary of the Invention [Problem to be solved by the invention]

[0004] When an isolator using YIG as a waveguide layer is formed on a semiconductor substrate, it is necessary to reduce the influence of YIG in the semiconductor process.

[0005] An object of the present disclosure is to provide an isolator that reduces the influence of YIG in a semiconductor process, a manufacturing method thereof, an optical switch, an optical transceiver, and a data center. [Means for solving the problem]

[0006] An isolator according to an embodiment of the present disclosure includes a substrate having a substrate surface, a first waveguide, a second waveguide, an insulating layer, and a first nonreciprocal member and a second nonreciprocal member. The first waveguide and the second waveguide extend above the substrate surface and propagate electromagnetic waves in a TM mode along the extending direction. The insulating layer is located above the substrate surface and is located surrounding at least a portion of the first waveguide and the second waveguide. The insulating layer has a surface located above the upper surfaces of the first waveguide and the second waveguide, and a first recess and a second recess. The first recess is defined by a bottom surface located below the surface of the insulating layer and a side surface located between the bottom surface and the surface of the insulating layer, and is located overlapping at least a portion of the first waveguide in a plan view of the substrate surface. The second recess is defined by a bottom surface located below the surface of the insulating layer and a side surface located between the bottom surface and the surface of the insulating layer, and is positioned to overlap at least a portion of the second waveguide in a planar view of the substrate surface. The first nonreciprocal member is positioned on the bottom surface of the first recess so as to overlap at least a portion of the first waveguide in a planar view of the substrate surface. The second nonreciprocal member is positioned on the bottom surface of the second recess so as to overlap at least a portion of the second waveguide in a planar view of the substrate surface. A propagation direction of an electromagnetic wave in a portion of the first waveguide that overlaps with the first nonreciprocal member in a planar view of the substrate surface is different from a propagation direction of an electromagnetic wave in a portion of the second waveguide that overlaps with the second nonreciprocal member in a planar view of the substrate surface.

[0007] An optical switch according to an embodiment of the present disclosure includes the isolator.

[0008] An optical transceiver according to an embodiment of the present disclosure includes the isolator and a light source optically connected to the isolator.

[0009] A data center according to an embodiment of the present disclosure communicates through devices including the isolator.

[0010] A method for manufacturing an isolator according to an embodiment of the present disclosure includes forming a first waveguide and a second waveguide on a substrate, the first waveguide and the second waveguide propagating an electromagnetic wave in a TM mode. The method for manufacturing the isolator includes forming an insulating layer on the first waveguide and the second waveguide. The method for manufacturing the isolator includes forming a first recess overlapping at least a part of the first waveguide and a second recess overlapping at least a part of the second waveguide by etching the insulating layer. The first recess and the second recess are formed such that a propagation direction of an electromagnetic wave in a part of the first waveguide overlapping the first recess is different from a propagation direction of an electromagnetic wave in a part of the second waveguide overlapping the second recess. The method for manufacturing the isolator includes forming a first nonreciprocal member on a bottom surface of the first recess and forming a second nonreciprocal member on a bottom surface of the second recess. The method for manufacturing the isolator includes irradiating the first nonreciprocal member and the second nonreciprocal member with laser light. Effect of the Invention

[0011] According to an isolator and a manufacturing method thereof according to an embodiment of the present disclosure, the influence of YIG in a semiconductor process can be reduced. [Brief description of the drawings]

[0012] [Figure 1] FIG. 2 is a plan view illustrating a configuration example of an isolator according to an embodiment. [Diagram 2] FIG. 11 is a plan view showing an example of the positional relationship between a waveguide and a recess. [Diagram 3] 3 is a cross-sectional view taken along line AA in FIG. 2. [Figure 4] 11 is a cross-sectional view showing a configuration example in which a non-reciprocal member is in contact with the entire side surface of a recess. FIG. [Diagram 5] 11 is a cross-sectional view showing an example of a configuration in which an insulating layer remains between the top surface of the waveguide and the bottom surface of the recess. FIG. [Figure 6] 11 is a cross-sectional view showing an example of a configuration in which the bottom surface of a recess is lower than the top surface of a waveguide. FIG. [Figure 7] 11A and 11B are plan views showing other examples of the planar shape of the recessed portion. [Figure 8] 11A and 11B are plan views showing other examples of the cross-sectional shape of the recessed portion. [Figure 9] 10 is a plan view showing a configuration example in which the extending direction of the first recess and the second recess is perpendicular to the direction from the first branch portion to the second branch portion. FIG. [Figure 10] FIG. 11 is a plan view showing a configuration example in which the extending direction of a first recess and the extending direction of a second recess intersect. [Figure 11] 13 is a plan view showing a configuration example in which a waveguide is arranged in a spiral shape when a magnetic field is applied in a direction perpendicular to the direction connecting the first branch portion and the second branch portion. FIG. [Figure 12] 13 is a plan view showing a configuration example in which a waveguide is arranged in a spiral shape when a magnetic field is applied in a direction connecting a first branch portion and a second branch portion. FIG. [Figure 13] FIG. 13 is a plan view showing a configuration example in which a waveguide is arranged so as to fit within a substantially circular laser irradiation area. [Figure 14] FIG. 2 is a side view showing a configuration example for irradiating a laser. [Figure 15] 1 is an example of an observation of the surface of a non-reciprocal member crystallized by laser irradiation. [Figure 16] 10 is a cross-sectional view showing an example of the relationship between the size of the crystal of the non-reciprocal member and the width of the recess. FIG. [Figure 17] FIG. 13 is a plan view showing a configuration example of an isolator further including a heater. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] (Example of isolator 10 configuration) 1, an isolator 10 according to an embodiment includes a first waveguide 21, a second waveguide 22, a first recess 31, a second recess 32, a first branch portion 81, and a second branch portion 82. The isolator 10 is formed on a substrate surface 50A (see FIG. 3) of a substrate 50. The first waveguide 21 and the second waveguide 22 extend on the substrate 50 from the first branch portion 81 toward the second branch portion 82 so as to propagate an electromagnetic wave in the TM mode.

[0014] The extending directions of the first waveguide 21 and the second waveguide 22 are changed at at least one location. In Fig. 1, the extending direction of the first waveguide 21 is changed at two locations, namely, the turn-back portions 211 and 212. The extending direction of the second waveguide 22 is changed at two locations, namely, the turn-back portions 221 and 222. The extending direction of the waveguide is changed to the opposite direction at each of the turn-back portions 211, 212, 221, and 222. That is, the extending direction of the waveguide is changed by 180 degrees. The angle by which the extending direction of the waveguide is changed is not limited to 180 degrees, but may be 90 degrees or various other angles.

[0015] The first recess 31 is positioned so as to overlap at least a portion of the first waveguide 21 in a plan view of the substrate surface 50A. The first recess 31 may extend along the extension direction of the first waveguide 21. A first non-reciprocal member is positioned in the first recess 31.

[0016] The second recess 32 is positioned so as to overlap at least a portion of the second waveguide 22 in a plan view of the substrate surface 50A. The second recess 32 may extend along the extension direction of the second waveguide 22. A second nonreciprocal member is positioned in the second recess 32.

[0017] <Operation principle of Isolator 10> The isolator 10 is configured to transmit the TM mode electromagnetic wave input to the first branch 81 to the second branch 82, and to attenuate the TM mode electromagnetic wave input to the second branch 82 in the first branch 81 so as not to transmit the electromagnetic wave to the first branch 81. The direction in which the electromagnetic wave propagates from the first branch 81 to the second branch 82 is also referred to as the first direction. The direction in which the electromagnetic wave propagates from the second branch 82 to the first branch 81 is also referred to as the second direction. In other words, the isolator 10 transmits the TM mode electromagnetic wave in the first direction, but does not transmit it in the second direction.

[0018] An electromagnetic wave in the TM mode is an electromagnetic wave whose electric field amplitude direction coincides with the normal direction of the substrate surface 50A (see FIG. 3) of the substrate 50. Conversely, an electromagnetic wave in the TE mode is an electromagnetic wave whose electric field amplitude direction is perpendicular to the electromagnetic wave propagation direction and coincides with the direction along the substrate surface 50A when the electromagnetic wave propagates along the substrate 50.

[0019] The isolator 10 realizes asymmetric electromagnetic wave propagation characteristics using the principle of an asymmetric Mach-Zehnder interferometer. The isolator 10 is configured such that, among the electromagnetic waves branched from the first branching section 81 to the first waveguide 21 and the second waveguide 22 and propagating in a first direction, the phase of the electromagnetic wave that has passed through the first waveguide 21 and reached the second branching section 82 coincides with the phase of the electromagnetic wave that has passed through the second waveguide 22 and reached the second branching section 82. The isolator 10 is also configured such that, among the electromagnetic waves branched from the second branching section 82 to the first waveguide 21 and the second waveguide 22 and propagating in a second direction, the phase of the electromagnetic wave that has passed through the first waveguide 21 and reached the first branching section 81 is shifted by 180 degrees from the phase of the electromagnetic wave that has passed through the second waveguide 22 and reached the first branching section 81. In this way, the isolator 10 operates to pass electromagnetic waves in the first direction and not pass electromagnetic waves in the second direction.

[0020] The phase shift can be adjusted by the line length of the waveguide, and can also be adjusted by the effective refractive index of the waveguide. In the absence of the first nonreciprocal member and the second nonreciprocal member, the isolator 10 is configured such that the phase of the electromagnetic wave propagating through the first waveguide 21 lags behind the phase of the electromagnetic wave propagating through the second waveguide 22 by 90 degrees, regardless of whether the electromagnetic wave propagates through the isolator 10 in the first direction or the second direction. Therefore, simply setting the line length or the effective refractive index of the waveguide results in the same phase shift of the electromagnetic wave propagating in the first direction and the electromagnetic wave propagating in the second direction.

[0021] Therefore, isolator 10 includes a first nonreciprocal member located along at least a part of first waveguide 21 and a second nonreciprocal member located along at least a part of second waveguide 22 so as to make the phase shift of the electromagnetic wave propagating in the waveguide in a first direction different from the phase shift of the electromagnetic wave propagating in the second direction. First waveguide 21 including the first nonreciprocal member and second waveguide 22 including the second nonreciprocal member function as nonreciprocal waveguides when a magnetic field is applied.

[0022] A nonreciprocal waveguide advances or delays the phase of a propagating electromagnetic wave. In the isolator 10 according to this embodiment, the nonreciprocal waveguide is configured so that the relationship between the phase advance and delay in the waveguide in which the magnetic field is applied from the opposite directions toward the propagation direction of the electromagnetic wave is reversed. It is assumed that the phase of the electromagnetic wave advances by 45 degrees when the magnetic field is applied from the right side of the propagation direction of the electromagnetic wave, and delays by 45 degrees when the magnetic field is applied from the left side of the propagation direction of the electromagnetic wave. In the isolator 10 illustrated in FIG. 1, it is assumed that the magnetic field (B) is applied in the vertical direction of the paper on which the isolator 10 is arranged, as indicated by the arrow.

[0023] When the electromagnetic wave propagates in the first direction, the propagation direction of the electromagnetic wave in the first waveguide 21 located overlapping the first nonreciprocal member in the first recess 31 is from left to right. On the other hand, the propagation direction of the electromagnetic wave in the second waveguide 22 located overlapping the second nonreciprocal member in the second recess 32 is from right to left. Here, when the direction of the magnetic field is from bottom to top, the magnetic field is applied from the right side of the propagation direction of the electromagnetic wave in the first waveguide 21 located overlapping the first nonreciprocal member in the first recess 31, and is applied from the left side of the propagation direction of the electromagnetic wave in the second waveguide 22 located overlapping the second nonreciprocal member in the second recess 32. Then, the phase of the electromagnetic wave in the first waveguide 21 advances by 45 degrees. Conversely, the phase of the electromagnetic wave in the second waveguide 22 lags by 45 degrees. In this case, the phase of the electromagnetic wave propagating in the first direction through the first waveguide 21 leads the phase of the electromagnetic wave propagating in the first direction through the second waveguide 22 by 90 degrees.

[0024] Conversely, when the electromagnetic wave propagates in the second direction, the propagation direction of the electromagnetic wave in the first waveguide 21 located overlapping the first nonreciprocal member in the first recess 31 is from right to left. On the other hand, the propagation direction of the electromagnetic wave in the second waveguide 22 located overlapping the second nonreciprocal member in the second recess 32 is from left to right. Here, when the direction of the magnetic field is from bottom to top, the magnetic field is applied from the left side of the propagation direction of the electromagnetic wave in the first waveguide 21 located overlapping the first nonreciprocal member in the first recess 31, and is applied from the right side of the propagation direction of the electromagnetic wave in the second waveguide 22 located overlapping the second nonreciprocal member in the second recess 32. Then, the phase of the electromagnetic wave in the first waveguide 21 is delayed by 45 degrees. Conversely, the phase of the electromagnetic wave in the second waveguide 22 is advanced by 45 degrees. In this case, the phase of the electromagnetic wave propagating in the first direction through the first waveguide 21 lags behind the phase of the electromagnetic wave propagating in the second waveguide 22 in the first direction by 90 degrees.

[0025] As described above, isolator 10 is configured such that, in the absence of the first nonreciprocal member and the second nonreciprocal member, the phase of the electromagnetic wave propagating in the first direction through first waveguide 21 lags behind the phase of the electromagnetic wave propagating in the first direction through second waveguide 22 by 90 degrees.

[0026] When an electromagnetic wave propagates in the first direction, the phase of the electromagnetic wave propagating through first waveguide 21 advances by 90 degrees, so that the difference in phase between the electromagnetic wave propagating through first waveguide 21 and the electromagnetic wave propagating through second waveguide 22 becomes 0 degree at second branching section 82. As a result, when the electromagnetic wave propagating through first waveguide 21 and the electromagnetic wave propagating through second waveguide 22 are multiplexed at second branching section 82, they reinforce each other, causing the electromagnetic wave to be transmitted in the first direction.

[0027] Conversely, when the electromagnetic wave propagates in the second direction, the phase of the electromagnetic wave propagating through first waveguide 21 is delayed by 90 degrees, so that the difference in phase between the electromagnetic wave propagating through first waveguide 21 and the electromagnetic wave propagating through second waveguide 22 becomes 180 degrees at second branch 82. As a result, when the electromagnetic wave propagating through first waveguide 21 and the electromagnetic wave propagating through second waveguide 22 are combined at second branch 82, they weaken each other, and the electromagnetic wave does not transmit in the second direction.

[0028] In other words, the isolator 10 is configured so that the propagation direction of the electromagnetic wave in the portion of the first waveguide 21 that overlaps with the first nonreciprocal member in a plan view of the substrate surface 50A differs from the propagation direction of the electromagnetic wave in the portion of the second waveguide 22 that overlaps with the second nonreciprocal member in a plan view of the substrate surface 50A. By configuring the isolator 10 in this way, it is possible to make the phase lead or delay of the electromagnetic wave different between when the electromagnetic wave propagates in the first direction and when the electromagnetic wave propagates in the second direction. As a result, the isolator 10 is configured to transmit the electromagnetic wave propagating in the first direction and not transmit the electromagnetic wave propagating in the second direction.

[0029] <effective length> As illustrated in FIG. 1, the first recess 31 and the second recess 32 may be arranged to overlap portions of the first waveguide 21 and the second waveguide 22 extending in a direction from the first branch 81 to the second branch 82. The length of the first recess 31 in the extending direction of the first waveguide 21 is represented by D1. When the first nonreciprocal member is located in the entire first recess 31, the length of the first nonreciprocal member overlapping the first waveguide 21 is D1. The length of the second recess 32 in the extending direction of the second waveguide 22 is represented by D2. When the second nonreciprocal member is located in the entire second recess 32, the length of the second nonreciprocal member overlapping the second waveguide 22 is D2.

[0030] When the nonreciprocal member 40 overlaps the waveguide 20 in a direction perpendicular to the magnetic field B, the magnitude of the nonreciprocity that is expressed is determined according to the overlapping distance. Specifically, the longer the overlapping distance of the nonreciprocal member 40 with the waveguide 20 along the direction perpendicular to the magnetic field B, the greater the nonreciprocity that is expressed by the nonreciprocal member 40. On the other hand, when the nonreciprocal member 40 overlaps the waveguide 20 in a direction inclined from the direction perpendicular to the magnetic field B, the magnitude of the nonreciprocity that is expressed is determined according to the distance of the component of the overlapping distance perpendicular to the magnetic field B. In other words, the distance at which the nonreciprocal member 40 actually overlaps the waveguide 20 may differ from the distance that determines the magnitude of the nonreciprocity that is expressed. The distance that determines the magnitude of the nonreciprocity that is expressed is also called the effective length. In FIG. 1, the nonreciprocal member 40 overlaps the waveguide 20 along the direction perpendicular to the magnetic field B. Therefore, D1 is the effective length of the nonreciprocal waveguide formed by combining the first waveguide 21 and the first nonreciprocal member, and D2 is the effective length of the nonreciprocal waveguide formed by combining the second waveguide 22 and the second nonreciprocal member.

[0031] The isolator 10 may be configured so that the effective length of the nonreciprocal waveguide formed by combining the first waveguide 21 and the first nonreciprocal member is equal to the effective length of the nonreciprocal waveguide formed by combining the second waveguide 22 and the second nonreciprocal member. When the recess 30 is divided into a plurality of portions, the isolator 10 may be configured so that the sum of the effective lengths in the portions of the first recess 31 is equal to the sum of the effective lengths in the portions of the second recess 32. Making the effective lengths equal makes it easier to adjust the phase. As a result, the performance of the isolator 10 may be improved.

[0032] <Example of nonreciprocal waveguide configuration> 2 and 3, configuration examples of the first waveguide 21, the first recess 31, and the first nonreciprocal member, and configuration examples of the second waveguide 22, the second recess 32, and the second nonreciprocal member included in the isolator 10 will be described below. The first waveguide 21 and the second waveguide 22 are also simply referred to as waveguides 20 (see FIG. 2) if there is no need to distinguish them from each other. The first recess 31 and the second recess 32 are also simply referred to as recesses 30 (see FIG. 2) if there is no need to distinguish them from each other. The first nonreciprocal member and the second nonreciprocal member are also simply referred to as nonreciprocal members 40 (see FIG. 2) if there is no need to distinguish them from each other.

[0033] The isolator 10 is formed on a substrate 50 having a substrate surface 50A. The substrate 50 may be made of a conductor such as a metal, a semiconductor such as silicon, glass, or a resin. In this embodiment, the substrate 50 is made of silicon (Si), but is not limited to this and may be made of various other materials.

[0034] The substrate 50 has a box layer 52 on a substrate surface 50A. The box layer 52 is made of an insulator such as a silicon oxide film. The waveguide 20 is located on the box layer 52. The waveguide 20 has a top surface 201. The top surface 201 is located on the side opposite to the surface in contact with the box layer 52.

[0035] The substrate 50 further includes an insulating layer 54. The insulating layer 54 is located to surround at least a portion of the waveguide 20. The insulating layer 54 is made of an insulator such as a silicon oxide film.

[0036] The insulating layer 54 has a surface and a recess 30 recessed from the surface. The recess 30 may be formed by etching the insulating layer 54. The recess 30 is defined by side surfaces 301, 302, 303, and 304 and a bottom surface 305. The bottom surface 305 is located closer to the substrate surface 50A than the surface of the insulating layer 54, i.e., lower than the surface of the insulating layer 54. The side surfaces 301, 302, 303, and 304 are located between the bottom surface 305 and the surface of the insulating layer 54.

[0037] The first recess 31 is positioned so as to overlap at least a part of the first waveguide 21. The first recess 31 may extend along the extension direction of the first waveguide 21. The second recess 32 is positioned so as to overlap at least a part of the second waveguide 22. The second recess 32 may extend along the extension direction of the second waveguide 22. That is, the recess 30 is positioned so as to overlap at least a part of the waveguide 20. The recess 30 may extend along the extension direction of the waveguide 20. In FIG. 2, the waveguide 20 and the recess 30 extend in the X-axis direction. The side surface 301 and the side surface 302 are positioned along the X-axis direction in which the waveguide 20 extends. The side surface 303 and the side surface 304 are positioned along the Y-axis direction that intersects with the direction in which the waveguide 20 extends.

[0038] The bottom surface 305 of the recess 30 and the top surface 201 of the waveguide 20 are flush with each other. In other words, the top surface 201 of the waveguide 20 is exposed at the bottom surface 305 of the recess 30 without being covered by the insulating layer 54.

[0039] The nonreciprocal member 40 is located in contact with at least a part of the bottom surface 305 of the recess 30. The nonreciprocal member 40 may be located in contact with the entire bottom surface 305, or may be located in contact with a part of the bottom surface 305. The nonreciprocal member 40 may also be in contact with at least a part of each of the side surfaces 301, 302, 303, and 304 connected to the bottom surface 305 of the recess 30. In other words, the nonreciprocal member 40 may be in contact with the bottom surface 305 of the recess 30, and may be in contact with at least a part of the side surface 301, at least a part of the side surface 302, at least a part of the side surface 303, and at least a part of the side surface 304. The nonreciprocal member 40 may be located in contact with some of the side surfaces 301, 302, 303, or 304. In other words, the nonreciprocal member 40 may not be in contact with some of the side surfaces 301, 302, 303, or 304. The nonreciprocal member 40 may be located on the surface of the insulating layer 54 outside the recess 30. As shown in FIG. 4, the nonreciprocal member 40 may be located so as to contact the entire side surface 301, the entire side surface 302, the entire side surface 303, and the entire side surface 304 of the recess 30 and to be entirely connected from the bottom surface 305 to the surface of the insulating layer 54. When the top surface 201 of the waveguide 20 is flush with the bottom surface 305 of the recess 30, the nonreciprocal member 40 contacts at least a part of the top surface 201 of the waveguide 20. The nonreciprocal member 40 may be formed by deposition into the recess 30.

[0040] The recess 30 may be positioned so as to overlap at least a portion of the waveguide 20 in a width direction intersecting the extension direction in a plan view of the substrate surface 50A. The recess 30 may be positioned so as to overlap a portion of the waveguide 20 in a width direction in a plan view of the substrate surface 50A. The recess 30 may be positioned so as to overlap the entire waveguide 20 in a width direction in a plan view of the substrate surface 50A.

[0041] The nonreciprocal member 40 may be positioned within the range of the bottom surface 305 of the recess 30 so as to overlap at least a portion of the waveguide 20 in the width direction. The nonreciprocal member 40 may be positioned within the range of the bottom surface 305 of the recess 30 so as to overlap a portion of the waveguide 20 in the width direction. The nonreciprocal member 40 may be positioned within the range of the bottom surface 305 of the recess 30 so as to overlap the entirety of the waveguide 20 in the width direction.

[0042] The nonreciprocal member 40 may be positioned within the range of the bottom surface 305 of the recess 30 so as to overlap at least a portion of the extension direction of the waveguide 20. The nonreciprocal member 40 may be positioned within the range of the bottom surface 305 of the recess 30 so as to overlap a portion of the extension direction of the waveguide 20. The nonreciprocal member 40 may be positioned within the range of the bottom surface 305 of the recess 30 so as to overlap the entire extension direction of the waveguide 20.

[0043] The waveguide 20 is surrounded by a box layer 52, an insulating layer 54, and a nonreciprocal member 40. The waveguide 20 is also called a core. The box layer 52 and the insulating layer 54 are also called a clad. The core and the clad may be configured to include a dielectric. The waveguide 20 is also called a dielectric line. The materials of the core and the clad are determined so that the relative dielectric constant of the core is greater than the relative dielectric constant of the clad. In other words, the materials of the core and the clad are determined so that the refractive index of the clad is greater than the refractive index of the core. In this way, the electromagnetic wave propagating through the core can be totally reflected at the boundary with the clad. As a result, the loss of the electromagnetic wave propagating through the core can be reduced.

[0044] The dielectric constant of the core and the clad may be greater than that of air. By making the dielectric constant of the core and the clad greater than that of air, leakage of electromagnetic waves from the isolator 10 can be suppressed. As a result, loss due to radiation of electromagnetic waves from the isolator 10 to the outside can be reduced.

[0045] In this embodiment, the material of the waveguide 20 as the core is silicon (Si), but is not limited to this and may be various other materials. The material of the box layer 52 and the insulating layer 54 as the clad is quartz glass or silicon oxide film (SiO2), but is not limited to this and may be various other materials. The relative dielectric constants of silicon and quartz glass are about 12 and about 2, respectively. Silicon can propagate electromagnetic waves having a near-infrared wavelength of about 1.2 μm to about 6 μm with low loss. When the waveguide 20 is made of silicon, it can propagate electromagnetic waves having a wavelength of 1.3 μm band or 1.55 μm band used in optical communication with low loss.

[0046] In this embodiment, Ce:YIG (cerium-substituted yttrium iron garnet) is used as the material of the nonreciprocal member 40. A transparent magnetic material such as a partially substituted YIG material such as Bi:YIG (bismuth-substituted YIG) may be used as the material of the nonreciprocal member 40. A ferromagnetic material such as FeCo, FeNi, or CoPt, or a material containing a ferromagnetic material may be used as the material of the nonreciprocal member 40. A dielectric material composited with magnetic nanoparticles, such as a nanogranular material, may be used as the material of the nonreciprocal member 40. The nonreciprocal member 40 may be made of various magnetic materials, including but not limited to these.

[0047] The YIG-based nonreciprocal member 40 exhibits sufficient nonreciprocity by sufficiently progressing its crystallization. The crystallization of the nonreciprocal member 40 progresses by heating the nonreciprocal member 40 to a predetermined temperature or higher. However, considering the influence on other components such as the waveguide or wiring formed on the substrate 50, it is difficult to heat the entire substrate 50 to a predetermined temperature or higher during deposition of the nonreciprocal member 40. Therefore, the nonreciprocal member 40 formed in the recess 30 by deposition without heating the substrate 50 is not sufficiently crystallized and does not exhibit sufficient nonreciprocity as it is.

[0048] Therefore, in the isolator 10 according to this embodiment, in order to crystallize the nonreciprocal member 40, the nonreciprocal member 40 is heated by irradiation with laser light. As the laser light, light having a wavelength at which the nonreciprocal member 40 has a high light absorption efficiency is used. When the nonreciprocal member 40 is made of Ce:YIG, it has a high absorption efficiency of visible light. Therefore, a visible light laser may be used for heating.

[0049] The laser light spreads to a finite range at the irradiation point due to optical limitations. The irradiation range of the laser light is wider than the width of the recess 30. When the laser light is irradiated to areas other than the nonreciprocal member 40 in the recess 30, the contribution of the laser light to crystallization is small. Therefore, the isolator 10 according to this embodiment may further include a mask that reduces the transmittance of the laser light outside the recess 30. The mask is configured so that the transmittance of the laser light is less than the transmission threshold, or so that the reflectance of the laser light is equal to or greater than the reflection threshold. For example, a metal such as aluminum may be used as the material of the mask. The material of the mask is not limited to these, and various materials may be used.

[0050] A laser light absorbing member may be further formed on the nonreciprocal member 40 located in the recess 30. A material having a high absorption efficiency of laser light is used as the absorbing member. Also, a material having absorption characteristics different from those of the nonreciprocal member 40 may be used. Carbon or the like having a high absorption efficiency of infrared light may be used as the absorbing member.

[0051] As described above, in the isolator 10 according to this embodiment, the nonreciprocal member 40 is heated so as to have little effect on other components of the substrate 50. In this way, even if a material that requires heat treatment is used as the nonreciprocal member 40, the effect on the semiconductor process can be reduced. Furthermore, the performance of the isolator 10 can be improved.

[0052] (Another configuration example of the isolator 10) The isolator 10 is not limited to the above-described configuration, but may be configured in various other configurations. Other configuration examples of the isolator 10 will be described below.

[0053] <Height of the waveguide 20> In the isolator 10 described above, the waveguide 20 may be configured so that the upper surface 201 of the waveguide 20 is flush with the bottom surface 305 of the recess 30, as illustrated in FIG.

[0054] As another configuration example, the waveguide 20 may be configured such that the upper surface 201 of the waveguide 20 is located below the bottom surface 305 of the recess 30, as illustrated in FIG. 5. In this case, the upper surface 201 of the waveguide 20 is covered with the insulating layer 54. Therefore, the nonreciprocal member 40 is not in contact with the waveguide 20. In other words, the insulating layer 54 is located between the upper surface 201 of the waveguide 20 and the nonreciprocal member 40. The thickness of the insulating layer 54 located between the upper surface 201 of the waveguide 20 and the nonreciprocal member 40 is represented by T.

[0055] The nonreciprocal waveguide in the isolator 10 according to this embodiment exhibits nonreciprocity for electromagnetic waves in the TM mode. As described above, electromagnetic waves in the TM mode are electromagnetic waves in which the amplitude direction of the electric field coincides with the normal direction of the substrate surface 50A of the substrate 50 when the electromagnetic waves propagate along the substrate 50. Nonreciprocity is exhibited when the electric field component is affected by the nonreciprocal member 40. Therefore, in a cross section in the extension direction of the waveguide 20, when the nonreciprocal member 40 is present within a predetermined range even if it is away from the waveguide 20, due to the spread of the energy distribution of the electric field in the normal direction of the substrate surface 50A, i.e., the Z-axis direction, the nonreciprocal waveguide exhibits nonreciprocity.

[0056] In this embodiment, the waveguide 20 has a rectangular cross-sectional shape. In this case, a mode field diameter is defined in the Z-axis direction, which is the amplitude direction of the electric field of the electromagnetic wave in TM mode. The energy of the electric field component of the electromagnetic wave in TM mode propagating through the waveguide 20 decreases outside the waveguide 20 as it moves away from the waveguide 20. The magnitude of the energy of the electric field component of the electromagnetic wave in TM mode outside the waveguide 20 follows a Gaussian distribution. The mode field diameter in the Z-axis direction is such that the magnitude of the energy of the electric field component on the upper surface 201 of the waveguide 20 is 1 / e 2 In other words, the magnitude of the energy is reduced to 1 / e 2 In the above range, the energy is effectively distributed.

[0057] The mode field diameter in the Z-axis direction of the waveguide 20 is determined based on the width direction length of the waveguide 20 in a cross section perpendicular to the extension direction of the waveguide 20, the length of the waveguide 20 in the Z-axis direction, i.e., the height of the waveguide 20, the refractive index of the waveguide 20, the refractive index of the insulating layer 54, and the wavelength of the electromagnetic wave propagating through the waveguide 20.

[0058] The longer the mode field diameter in the Z-axis direction, the wider the energy distribution in the Z-axis direction of the electromagnetic wave propagating through the waveguide 20. Specifically, when the thickness (T) of the insulating layer 54 located between the upper surface 201 of the waveguide 20 and the nonreciprocal member 40 is less than half the value obtained by subtracting the height of the waveguide 20 at the cross section from the mode field diameter in the Z-axis direction, the effective distribution of the energy of the electromagnetic wave propagating through the waveguide 20 reaches the nonreciprocal member 40. The value of half the value obtained by subtracting the height of the waveguide 20 at the cross section from the mode field diameter in the Z-axis direction is also called the thickness threshold. In other words, the thickness threshold is a value determined based on the mode field diameter of the waveguide 20 and the height of the waveguide 20 at the cross section. Even when an insulating layer 54 is located between the upper surface 201 of the waveguide 20 and the nonreciprocal member 40, the nonreciprocal waveguide exhibits nonreciprocity if the thickness (T) of the insulating layer 54 is equal to or less than the thickness threshold.

[0059] As an example, the following conditions are set: Width of waveguide 20: 400nm Height of waveguide 20: 220 nm Refractive index of waveguide 20 (core): 3.45 Refractive index of insulating layer 54 (cladding): 1.53 Wavelength of TM mode electromagnetic wave propagating through the waveguide 20: 1550 nm

[0060] Under the above conditions, the mode field diameter is 800 nm. The thickness threshold under the above conditions is 290 nm, calculated by dividing the value (800 nm-220 nm) obtained by subtracting the height of the waveguide 20 from the mode field diameter. Therefore, the nonreciprocity of the nonreciprocal waveguide is exhibited by setting the thickness (T) of the insulating layer located between the upper surface 201 of the waveguide 20 and the nonreciprocal member 40 to 290 nm or less. In other words, the nonreciprocal waveguide exhibits nonreciprocity by the nonreciprocal member 40 being within the range of the mode field diameter of the waveguide 20 or by the nonreciprocal member 40 being in contact with the range of the mode field diameter of the waveguide 20.

[0061] As another example, suppose the following conditions are set: Width of waveguide 20: 500nm Height of waveguide 20: 220 nm Refractive index of waveguide 20 (core): 3.45 Refractive index of insulating layer 54 (cladding): 1.53 Wavelength of TM mode electromagnetic wave propagating through the waveguide 20: 1550 nm

[0062] Under the above conditions, the mode field diameter is 520 nm. The thickness threshold under the above conditions is 150 nm, calculated by dividing the value (520 nm-220 nm) obtained by subtracting the height of the waveguide 20 from the mode field diameter. Therefore, the thickness (T) of the insulating layer located between the upper surface 201 of the waveguide 20 and the nonreciprocal member 40 is set to 150 nm or less, whereby the nonreciprocal waveguide exhibits nonreciprocity.

[0063] When the width and height in the cross section of the first waveguide 21 and the width and height in the cross section of the second waveguide 22 are the same, the mode field diameter in the Z-axis direction of the first waveguide 21 and the mode field diameter in the Z-axis direction of the second waveguide 22 have the same value. In this case, the thickness threshold for the first waveguide 21 and the thickness threshold for the second waveguide 22 are set to the same value.

[0064] When the width in the cross section of the first waveguide 21 is different from the width in the cross section of the second waveguide 22, or when the height in the cross section of the first waveguide 21 is different from the height in the cross section of the second waveguide 22, the mode field diameter in the Z-axis direction of the first waveguide 21 may have a different value from the mode field diameter in the Z-axis direction of the second waveguide 22. In this case, the thickness threshold for the first waveguide 21 and the thickness threshold for the second waveguide 22 may be set to different values.

[0065] As described above, the nonreciprocal waveguide can exhibit nonreciprocity even when the nonreciprocal member 40 is not in contact with the waveguide 20. In other words, the nonreciprocal waveguide can exhibit nonreciprocity even when the upper surface 201 of the waveguide 20 is not exposed from the insulating layer 54 at the bottom surface 305 of the recess 30. Since the upper surface 201 of the waveguide 20 does not need to be exposed from the insulating layer 54, the upper surface 201 of the waveguide 20 is not directly exposed to the dry etching gas for forming the recess 30. As a result, the upper surface 201 of the waveguide 20 is not roughened by dry etching.

[0066] If damage occurs to the upper surface 201 of the waveguide 20, even if the damage is extremely small, it will cause a loss of the electromagnetic wave propagating through the waveguide 20. In particular, the amplitude direction of the electric field in the electromagnetic wave in the TM mode intersects with the upper surface 201 of the waveguide 20, so that the damage to the upper surface 201 of the waveguide 20 is likely to cause a loss of the electromagnetic wave in the TM mode. Therefore, since it is not necessary to expose the upper surface 201 of the waveguide 20 from the insulating layer 54, no damage is caused to the upper surface 201 of the waveguide 20 by dry etching, and as a result, the loss of the electromagnetic wave propagating through the waveguide 20 is reduced.

[0067] 6, the waveguide 20 may be configured such that the upper surface 201 of the waveguide 20 is located above the bottom surface 305 of the recess 30. The state in which the upper surface 201 of the waveguide 20 is located above the bottom surface 305 of the recess 30 may occur when the insulating layer 54 is over-etched under conditions in which the etching rate of the insulating layer 54 is greater than the etching rate of the waveguide 20 in order to form the recess 30. In this case, the upper surface 201 of the waveguide 20 is not covered by the insulating layer 54 and is exposed. Therefore, the nonreciprocal member 40 contacts the waveguide 20.

[0068] In other words, the first recess 31 may be configured such that the position of the bottom surface 305 of the first recess 31 in the direction perpendicular to the substrate surface 50A is lower than the position of the top surface 201 of the first waveguide 21. The second recess 32 may be configured such that the position of the bottom surface 305 of the second recess 32 in the direction perpendicular to the substrate surface 50A is lower than the position of the top surface 201 of the second waveguide 22.

[0069] 6, when the bottom surface 305 of the recess 30 has a step due to the protrusion of the upper surface 201 of the waveguide 20, the step may affect the crystallization of the nonreciprocal member 40. When Ce:YIG is used as the nonreciprocal member 40, for example, discontinuity of the Ce:YIG film at the step may inhibit crystallization when the Ce:YIG is crystallized by annealing. When Ce:YIG is used as the nonreciprocal member 40, the recess 30 may be formed so that the step at the bottom surface 305 is 100 nm or less.

[0070] <Shape of the recess 30> The recess 30 may be configured such that the side surfaces 301 and 302 are orthogonal to the extension direction of the waveguide 20 in the plan view of the substrate surface 50A, as illustrated in FIG. 2. As another configuration example, the side surfaces 301 and 302 may be inclined at an angle greater than 0 degrees and smaller than 90 degrees with respect to the direction orthogonal to the extension direction of the waveguide 20 in the plan view of the substrate surface 50A, as illustrated in FIG. 7. In other words, the first recess 31 may be configured such that the side surfaces 301 and 302 located at the end of the extension direction of the first waveguide 21 among the side surfaces 301 to 304 defining the first recess 31 are inclined with respect to a plane perpendicular to the extension direction of the first waveguide 21. The second recess 32 may be configured such that the side surfaces 301 and 302 located at the end of the extension direction of the second waveguide 22 among the side surfaces 301 to 304 defining the second recess 32 are inclined with respect to a plane perpendicular to the extension direction of the second waveguide 22.

[0071] Since the side surfaces 301 and 302 are inclined with respect to the extension direction of the waveguide 20 in the plan view of the substrate surface 50A, the area of ​​the nonreciprocal member 40 overlapping the waveguide 20 gradually decreases from the range overlapping with the recess 30 toward the outside of the range of the recess 30. As a result, the effective refractive index of the waveguide 20 changes more gradually from the range overlapping with the recess 30 toward the outside of the range of the recess 30 than in the case where the side surfaces 301 and 302 are perpendicular to the extension direction of the waveguide 20.

[0072] The gradual change in the effective refractive index of the waveguide 20 reduces the reflection of electromagnetic waves at the boundary between the area of ​​the waveguide 20 that overlaps with the recess 30 and the area outside the recess 30. As a result, the loss of electromagnetic waves in the isolator 10 is reduced.

[0073] The recess 30 may be configured such that the side surfaces 301 and 302 are perpendicular to the substrate surface 50A in a cross section perpendicular to the substrate surface 50A. As another example, the side surfaces 301 and 302 may be inclined so as to spread outward from the recess 30 as they move upward from the bottom surface 305 in a cross section perpendicular to the substrate surface 50A and along the extension direction of the waveguide 20, as illustrated in FIG. 8. In other words, the first recess 31 may be configured such that the side surfaces 301 and 302 located at the end of the extension direction of the first waveguide 21 among the side surfaces 301 to 304 defining the first recess 31 are inclined toward the outside of the first recess 31 with respect to the direction perpendicular to the substrate surface 50A. The second recess 32 may be configured such that the side surfaces 301 and 302 located at the end of the extension direction of the second waveguide 22 among the side surfaces 301 to 304 defining the second recess 32 are inclined toward the outside of the second recess 32 with respect to the direction perpendicular to the substrate surface 50A.

[0074] The non-reciprocal member 40 is located at the bottom surface 305 and extends over the side surfaces 301 and 302 .

[0075] In a cross section of the recess 30 along the extending direction of the waveguide 20, the side surfaces 301 and 302 are inclined so as to spread outward from the recess 30, so that the distance from the upper surface 201 of the waveguide 20 to the nonreciprocal member 40 gradually increases. As a result, the effective refractive index of the waveguide 20 changes more gradually from the range overlapping the recess 30 to the outside of the range of the recess 30 than in the case where the side surfaces 301 and 302 are perpendicular to the substrate surface 50A.

[0076] The gradual change in the effective refractive index of the waveguide 20 reduces the reflection of electromagnetic waves at the boundary between the area of ​​the waveguide 20 that overlaps with the recess 30 and the area outside the recess 30. As a result, the loss of electromagnetic waves in the isolator 10 is reduced.

[0077] <Example of arrangement of the waveguide 20 and the recess 30> The arrangement of the waveguide 20 and the recess 30 is not limited to the arrangement exemplified in Fig. 1. Other examples of the arrangement of the waveguide 20 and the recess 30 will be described below.

[0078] 9, when a magnetic field (B) is applied along a line connecting the first branch 81 and the second branch 82, the isolator 10 may be configured such that the first recess 31 is positioned so as to overlap a portion of the first waveguide 21 extending in a vertical direction perpendicular to the magnetic field, and the second recess 32 is positioned so as to overlap a portion of the second waveguide 22 extending in a vertical direction perpendicular to the magnetic field. The first nonreciprocal member is positioned over the entire bottom surface 305 of the first recess 31. The second nonreciprocal member is positioned over the entire bottom surface 305 of the second recess 32.

[0079] Furthermore, when the electromagnetic wave propagates in the first direction from the first branch portion 81 to the second branch portion 82, the propagation direction of the electromagnetic wave in the first waveguide 21 at the overlapping portion of the first recess 31 is upward, and the propagation direction of the electromagnetic wave in the second waveguide 22 at the overlapping portion of the second recess 32 is downward.

[0080] 9 is configured such that the propagation direction of the electromagnetic wave in the first waveguide 21 at the overlapping position of the first recess 31 is different from the propagation direction of the electromagnetic wave in the second waveguide 22 at the overlapping position of the second recess 32. As a result, the isolator 10 illustrated in FIG. 9 can cause the phase lead or delay to differ between the electromagnetic wave propagating in the first direction and the electromagnetic wave propagating in the second direction. Also, the isolator 10 is configured such that D1 and D2 are equal. As a result, the isolator 10 is configured to transmit the electromagnetic wave propagating in the first direction and not transmit the electromagnetic wave propagating in the second direction.

[0081] 10, when a magnetic field (B) is applied along a direction connecting the first branch 81 and the second branch 82, the isolator 10 may be configured such that the first recess 31 is positioned so as to overlap a portion of the first waveguide 21 extending in a direction inclined with respect to the magnetic field, and the second recess 32 is positioned so as to overlap a portion of the second waveguide 22 extending in a direction inclined with respect to the magnetic field. The first nonreciprocal member is positioned over the entire bottom surface 305 of the first recess 31. The second nonreciprocal member is positioned over the entire bottom surface 305 of the second recess 32.

[0082] In this case, the effective length of the nonreciprocal waveguide formed by combining the first nonreciprocal member and the first waveguide 21 is the component in the direction perpendicular to the magnetic field of the distance over which the first recess 31 overlaps the first waveguide 21, and is represented by D1. The effective length of the nonreciprocal waveguide formed by combining the second nonreciprocal member and the second waveguide 22 is the component in the direction perpendicular to the magnetic field of the distance over which the second recess 32 overlaps the second waveguide 22, and is represented by D2. The isolator 10 is configured so that D1 and D2 are equal. As a result, the isolator 10 is configured to transmit the electromagnetic wave propagating in the first direction and not transmit the electromagnetic wave propagating in the second direction.

[0083] 11 and 12, the first waveguide 21 and the second waveguide 22 may be arranged in a spiral shape. The length of the first waveguide 21 between the first branching portion 81 and the second waveguide 22 is assumed to be the same.

[0084] As shown in FIG. 11, when a magnetic field (B) is applied along a direction perpendicular to the direction connecting the first branch portion 81 and the second branch portion 82, the isolator 10 may be configured so that the first recess 31 is positioned overlapping a portion of the first waveguide 21 extending in the left-right direction perpendicular to the magnetic field, and the second recess 32 is positioned overlapping a portion of the second waveguide 22 extending in the left-right direction perpendicular to the magnetic field.

[0085] As shown in FIG. 12, when a magnetic field (B) is applied along a direction connecting the first branch portion 81 and the second branch portion 82, the isolator 10 may be configured so that the first recess 31 is positioned so as to overlap a portion of the first waveguide 21 extending in an up-down direction perpendicular to the magnetic field, and the second recess 32 is positioned so as to overlap a portion of the second waveguide 22 extending in an up-down direction perpendicular to the magnetic field.

[0086] 11 and 12, the isolator 10 is configured so that D1 is equal to D2. As a result, the isolator 10 is configured to transmit an electromagnetic wave propagating in a first direction and not transmit an electromagnetic wave propagating in a second direction.

[0087] 11 and 12, the recess 30 may be located in a plurality of separate portions. The isolator 10 is configured so that the sum of the effective lengths in the portions of the first recess 31 is equal to the sum of the effective lengths in the portions of the second recess 32. As a result, the isolator 10 is configured to transmit an electromagnetic wave propagating in a first direction and not transmit an electromagnetic wave propagating in a second direction.

[0088] <Laser light irradiation device 70> As shown in FIG. 13, the first waveguide 21 and the second waveguide 22 may be arranged so as to be contained within a substantially circular laser irradiation area LS. In this way, the laser light can be effectively used to heat the nonreciprocal member 40. The first waveguide 21 and the second waveguide 22 may be arranged in a zigzag shape including a plurality of bent portions so as to be contained within the laser irradiation area LS. In other words, the waveguide 20 may be arranged so that the extending direction changes at a plurality of portions. In addition, other elements such as electronic circuits mounted on the substrate 50 may be arranged outside the laser irradiation area LS. In this way, the laser light irradiation is less likely to affect other elements.

[0089] 13, the isolator 10 includes a plurality of first recesses 31 and a plurality of second recesses 32. The effective lengths of the plurality of first recesses 31 are represented as D11 and D12. The effective lengths of the plurality of second recesses 32 are represented as D21 and D22. The first recesses 31 and the second recesses 32 are configured such that the sum of D11 and D12 is equal to the sum of D21 and D22. As a result, the isolator 10 is configured to transmit an electromagnetic wave propagating in a first direction and not transmit an electromagnetic wave propagating in a second direction.

[0090] As shown in FIG. 14, in the isolator 10 according to this embodiment, an irradiation device 70 may be used to irradiate the nonreciprocal member 40 with laser light. The irradiation device 70 includes a laser light source 72, a lens 74, and a stage 78. The stage 78 is configured to be able to place the substrate 50 thereon. The laser light source 72 emits a laser light 76. The laser light 76 is converged by the lens 74. The converged laser light 76 is incident on the nonreciprocal member 40 on the substrate 50 placed on the stage 78 to heat the nonreciprocal member 40. The range on the substrate 50 irradiated with the laser light 76 is represented as LS. The stage 78 is configured to be able to control the position of the substrate 50 along the XY plane. The irradiation device 70 controls the position of the substrate 50 on the stage 78, and also controls the emission of the laser light 76 from the laser light source 72, thereby controlling the range on the substrate 50 irradiated with the laser light 76.

[0091] The laser light 76 may be a pulsed laser or a continuous wave laser (CW oscillation laser). When the laser light 76 is a pulsed laser, a large amount of energy is applied to the nonreciprocal member 40 in a short period of time. In this way, the temperature of the nonreciprocal member 40 increases before the heat escapes to the substrate 50. As a result, the nonreciprocal member 40 is efficiently heated. The conditions of the pulsed laser may be set, for example, as follows: Wavelength: 532 nanometers (nm) Scanning speed: 100 micrometers per second (μm / s) to 10 millimeters per second (mm / s) Laser irradiation range (LS) diameter: 1-1000 micrometers (μm) Output Average Power: 0.1-10 Watts (W)

[0092] If the substrate 50 is heated in the atmosphere, elements such as the waveguide 20 or other electronic circuits included in the substrate 50 may be oxidized. In order to prevent the elements included in the substrate 50 from being oxidized, the irradiation device 70 may further include a vacuum chamber that houses a stage 78 on which the substrate 50 is placed. The laser light source 72 or the lens 74 may be housed in the vacuum chamber or may be installed outside the vacuum chamber. When the laser light source 72 or the lens 74 is installed outside the vacuum chamber, the vacuum chamber may have a window that transmits the laser light 76.

[0093] <Crystal size of non-reciprocity member 40> As shown in Fig. 15, crystals of Ce:YIG used as the nonreciprocal member 40 can be observed. The range irradiated with laser light 76 to crystallize Ce:YIG is a substantially circular range represented as LS. Within the range represented by LS, a crystallized portion 401 in which Ce:YIG is crystallized is observed. On the other hand, outside the range represented by LS, an amorphous portion 402 in which Ce:YIG is not crystallized is observed.

[0094] The size of each crystal in the crystallization section 401 is measured, for example, as represented as G. In FIG. 15, the size of the crystal in the portion represented as G is about 10 μm. The size of the crystal may be measured as the maximum or minimum dimension of the crystal. The size of the crystal may also be measured as the diameter of a circle that approximates the shape of the crystal.

[0095] The size of each crystal in the crystallization portion 401 has a distribution. The size of most of the Ce:YIG crystals crystallized by irradiation with the laser light 76 by the above-mentioned irradiation device 70 is distributed between about 5 μm and about 20 μm. The size of the crystals in the crystallization portion 401 as a whole may be calculated as a statistical value such as the average, median, or maximum value of the sizes of the crystals contained in the crystallization portion 401.

[0096] As shown in FIG. 16, the distance between the side surface 303 and the side surface 304 that define the width direction of the recess 30 is represented as W. The size of the crystal when the nonreciprocal member 40 located in the recess 30 is crystallized is represented as G. The recess 30 may be configured so that the width (W) of the recess 30 is longer than the size (G) of the crystal. In other words, the first recess 31 may be configured so that the length of the first recess 31 in the width direction of the first waveguide 21 is longer than the crystal size of the first nonreciprocal member. The second recess 32 may be configured so that the length of the second recess 32 in the width direction of the second waveguide 22 is longer than the crystal size of the second nonreciprocal member.

[0097] If the width of the recess 30 is shorter than the size of the crystal, the nonreciprocal member 40 is easily influenced by the side surface 303 or 304 of the recess 30 when it crystallizes. The influence of the side surface 303 or 304 may inhibit the crystallization of the nonreciprocal member 40. Conversely, if the width of the recess 30 is longer than the size of the crystal, the nonreciprocal member 40 is less influenced by the side surface 303 or 304 of the recess 30 when it crystallizes. As a result, the crystallization of the nonreciprocal member 40 is promoted. By promoting the crystallization of the nonreciprocal member 40, the performance of the isolator 10 is improved.

[0098] When forming a film of Ce:YIG in the recess 30, the recess 30 may be configured so that the ratio of the opening width of the recess 30 at the same height as the surface of the insulating layer 54 to the depth of the recess 30 is 1 or more, so that the Ce:YIG can be uniformly formed on the bottom surface 305 of the recess 30. Considering that the crystal sizes of Ce:YIG vary from about 5 μm to more, the recess 30 may be configured so that the opening width of the recess 30 is 5 μm or more.

[0099] <Adjustment by heaters 61 and 62> The phase of the electromagnetic wave propagating through the waveguide also changes depending on the temperature of the waveguide. The isolator 10 may control the temperature of the waveguide to adjust the phase of the electromagnetic wave. As shown in FIG. 17, the isolator 10 may further include heaters 61 and 62 for controlling the temperature of a portion of the first waveguide 21 and the second waveguide 22, respectively. The heater 61 can control the temperature of a portion of the first waveguide 21. The heater 62 can control the temperature of a portion of the first waveguide 21. In this manner, the isolator 10 can compensate for the phase by temperature control even if an error occurs in the line length of the waveguide formed on the substrate 50. As a result, the performance of the isolator 10 can be improved.

[0100] 17, the first waveguide 21 and the second waveguide 22 are bent by 180 degrees in the portion where the heaters 61 and 62 are arranged. The radii of curvature of the first waveguide 21 and the second waveguide 22 may be set so that the electromagnetic waves in the TM mode passing through this portion are not radiated.

[0101] <filter> In the isolator 10 according to this embodiment, the nonreciprocal waveguide, which is a combination of the waveguide 20 and the nonreciprocal member 40, exhibits nonreciprocity for TM mode electromagnetic waves. Therefore, by having a portion that removes TE mode electromagnetic waves, it is possible to prevent the TE mode electromagnetic waves from propagating from the second branch portion 82 to the first branch portion 81. The portion that removes TE mode electromagnetic waves is also collectively referred to as a filter portion. A directional coupler that does not couple TE mode electromagnetic waves may be used as the filter portion.

[0102] (Manufacturing method of isolator 10) An example of the procedure for manufacturing the isolator 10 according to this embodiment will be described below.

[0103] The waveguide 20 is formed on the box layer 52 of the substrate 50. The waveguide 20 may be formed by a combination of a film formation process and an etching process. As the film formation process, plasma CVD (Chemical Vapor Deposition) or sputtering, etc. may be performed. As the etching process, dry etching such as RIE (Reactive Ion Etching) or wet etching may be performed.

[0104] An insulating layer 54 is formed on the waveguide 20. The insulating layer 54 may be formed by plasma CVD or the like. Furthermore, a recess 30 is formed in the insulating layer 54. The recess 30 may be formed by dry etching.

[0105] The nonreciprocal member 40 is formed on the bottom surface 305 of the recess 30. The nonreciprocal member 40 may be formed as a film by sputtering or the like. Furthermore, the nonreciprocal member 40 is irradiated with a laser beam. The nonreciprocal member 40 is heated by the irradiation of the laser beam. The degree of crystallization of the nonreciprocal member 40 can be controlled by controlling the temperature and heating time of the nonreciprocal member 40.

[0106] By carrying out the manufacturing method including the example procedures described above, the isolator 10 can be manufactured. By additionally irradiating the isolator 10 with laser light after completion of the isolator 10, the characteristics of the isolator 10 can be adjusted even after completion.

[0107] (Application example of Isolator 10) The isolator 10 may be used in combination with a configuration for transmitting electromagnetic waves. The isolator 10 may be applied to an optical switch, an optical transceiver, or a data center. The isolator 10 may be applied to, for example, an electromagnetic wave transmitter. The electromagnetic wave transmitter includes the isolator 10 and a light source. The electromagnetic wave transmitter inputs an electromagnetic wave from the light source to the isolator 10 and outputs the electromagnetic wave from the isolator 10 to a receiver. The isolator 10 is configured so that the transmittance of the electromagnetic wave propagating from the light source to the receiver is greater than the transmittance of the electromagnetic wave propagating from the receiver to the light source. In this way, the electromagnetic wave is less likely to be incident on the light source. As a result, the light source can be protected.

[0108] The light source may be, for example, a semiconductor laser such as a laser diode (LD) or a vertical cavity surface emitting laser (VCSEL). The light source may include a device that emits electromagnetic waves of various wavelengths, not limited to visible light. The light source may be formed on the substrate 50 together with the isolator 10. The light source may input an electromagnetic wave in the TM mode to the isolator 10.

[0109] The electromagnetic wave transmitter may further include a modulator and a signal input unit. The modulator modulates the electromagnetic wave by changing the intensity of the electromagnetic wave. The modulator may be located between the isolator 10 and the receiver, not between the light source and the isolator 10. The modulator may pulse-modulate the electromagnetic wave, for example. The signal input unit accepts input of a signal from an external device or the like. The signal input unit may include, for example, a D / A converter. The signal input unit outputs a signal to the modulator. The modulator modulates the electromagnetic wave based on the signal acquired by the signal input unit.

[0110] The light source may include a modulator and a signal input section. In this case, the light source may output a modulated electromagnetic wave and input it to the isolator 10.

[0111] The electromagnetic wave transmitter may be mounted on the substrate 50. The light source may be mounted to connect to the first branch 81 via a modulator. The light source may be mounted to connect to the first branch 81 without a modulator. The receiver may be mounted to connect to the second branch 82 without a modulator. The receiver may be mounted to connect to the second branch 82 via a modulator. In this case, the modulator may be mounted to connect to the second branch 82.

[0112] Although the embodiments of the present disclosure have been described based on the drawings and examples, it should be noted that those skilled in the art can make various modifications or alterations based on the present disclosure. Therefore, it should be noted that these modifications or alterations are included in the scope of the present disclosure. For example, the functions included in each component can be rearranged so as not to be logically inconsistent, and multiple components can be combined into one or divided.

[0113] In this disclosure, descriptions such as "first" and "second" are identifiers for distinguishing the configuration. In the configurations distinguished by descriptions such as "first" and "second" in this disclosure, the numbers in the configurations can be exchanged. For example, the first waveguide 21 can exchange the identifiers "first" and "second" with the second waveguide 22. The exchange of identifiers is performed simultaneously. The configurations remain distinguished even after the exchange of identifiers. The identifiers may be deleted. A configuration from which an identifier has been deleted is distinguished by a symbol. The descriptions of identifiers such as "first" and "second" in this disclosure should not be used solely to interpret the order of the configurations or to justify the existence of an identifier with a smaller number.

[0114] In the present disclosure, the X-axis, Y-axis, and Z-axis are provided for convenience of explanation and may be interchanged. The configuration according to the present disclosure has been described using an orthogonal coordinate system formed by the X-axis, Y-axis, and Z-axis. The positional relationship of each configuration according to the present disclosure is not limited to an orthogonal relationship.

[0115] In one embodiment, (1) an isolator includes a substrate having a substrate surface, a first waveguide and a second waveguide extending on the substrate surface and propagating an electromagnetic wave in a TM mode along the extending direction, an insulating layer located on the substrate surface and surrounding at least a portion of the first waveguide and the second waveguide, and a first nonreciprocal member and a second nonreciprocal member. The insulating layer has a surface located above upper surfaces of the first waveguide and the second waveguide, and a first recess and a second recess. The first recess is defined by a bottom surface located below the surface of the insulating layer and a side surface located between the bottom surface and the surface of the insulating layer, and is positioned so as to overlap at least a portion of the first waveguide in a planar view of the substrate surface. The second recess is defined by a bottom surface located below the surface of the insulating layer and a side surface located between the bottom surface and the surface of the insulating layer, and is positioned so as to overlap at least a portion of the second waveguide in a planar view of the substrate surface. The first nonreciprocal member is located on a bottom surface of the first recess so as to overlap at least a portion of the first waveguide in a planar view of the substrate surface. The second nonreciprocal member is located on a bottom surface of the second recess so as to overlap at least a portion of the second waveguide in a planar view of the substrate surface. A propagation direction of an electromagnetic wave in a portion of the first waveguide that overlaps with the first nonreciprocal member in a planar view of the substrate surface differs from a propagation direction of an electromagnetic wave in a portion of the second waveguide that overlaps with the second nonreciprocal member in a planar view of the substrate surface.

[0116] (2) In the isolator described above in (1), at least a portion of an upper surface of the first waveguide may be in contact with the first nonreciprocity member, and at least a portion of an upper surface of the second waveguide may be in contact with the second nonreciprocity member.

[0117] (3) In the isolator described in (1) or (2) above, a position of a bottom surface of the first recess in a direction perpendicular to the substrate surface may be lower than a position of an upper surface of the first waveguide. A position of a bottom surface of the second recess in a direction perpendicular to the substrate surface may be lower than a position of an upper surface of the second waveguide.

[0118] (4) In the isolator described above in (1), the insulating layer may be located between an upper surface of the first waveguide and the first nonreciprocal member, and the insulating layer may be located between an upper surface of the second waveguide and the second nonreciprocal member.

[0119] (5) In the isolator described above in (4), a thickness of the insulating layer located between an upper surface of the first waveguide and the first nonreciprocal member, and a thickness of the insulating layer located between an upper surface of the second waveguide and the second nonreciprocal member may be equal to or less than a value determined based on a mode field diameter of the first waveguide and the second waveguide in a direction perpendicular to the substrate surface and a height of the first waveguide and the second waveguide at a cross section.

[0120] (6) In the isolator according to any one of (1) to (5) above, a length of the first recess in a width direction of the first waveguide may be longer than a crystal size of the first nonreciprocal member, and a length of the second recess in a width direction of the second waveguide may be longer than a crystal size of the second nonreciprocal member.

[0121] (7) In the isolator according to any one of (1) to (6) above, the first nonreciprocity member and the second nonreciprocity member may contain YIG (yttrium iron garnet).

[0122] (8) In the isolator according to any one of (1) to (7) above, among the side surfaces defining the first recess, a side surface located at an end in the extension direction of the first waveguide may be inclined with respect to a plane perpendicular to the extension direction of the first waveguide. Among the side surfaces defining the second recess, a side surface located at an end in the extension direction of the second waveguide may be inclined with respect to a plane perpendicular to the extension direction of the second waveguide.

[0123] (9) In the isolator according to any one of (1) to (8) above, among the side surfaces defining the first recess, a side surface located at an end in an extension direction of the first waveguide may be inclined toward an outside of the first recess with respect to a direction perpendicular to the substrate surface. Among the side surfaces defining the second recess, a side surface located at an end in an extension direction of the second waveguide may be inclined toward an outside of the second recess with respect to a direction perpendicular to the substrate surface.

[0124] (10) In the isolator according to any one of (1) to (9) above, the first waveguide and the second waveguide may be positioned in a substantially circular area in a plan view of the substrate surface.

[0125] (11) In the isolator described in any one of (1) to (10) above, a distance over which the first waveguide overlaps the first nonreciprocal member may be equal to a distance over which the second waveguide overlaps the second nonreciprocal member.

[0126] (12) The isolator according to any one of (1) to (11) above may further include a heater that controls a temperature of each of the first waveguide and the second waveguide.

[0127] In one embodiment, (13) an optical switch includes the isolator according to any one of (1) to (12) above.

[0128] In one embodiment, (14) an optical transceiver includes the isolator according to any one of (1) to (12) above, and a light source optically connected to the isolator.

[0129] In one embodiment, (15) a data center, in which the data center communicates by a device having an isolator according to any one of (1) to (12) above.

[0130] In one embodiment, (16) a method for manufacturing an isolator includes forming a first waveguide and a second waveguide on a substrate, the first waveguide and the second waveguide propagating an electromagnetic wave in a TM mode, forming an insulating layer on the first waveguide and the second waveguide, and etching the insulating layer to form a first recess overlapping at least a portion of the first waveguide and a second recess overlapping at least a portion of the second waveguide such that a propagation direction of an electromagnetic wave in a portion of the first waveguide overlapping with the first recess differs from a propagation direction of an electromagnetic wave in a portion of the second waveguide overlapping with the second recess, forming a first nonreciprocal member on a bottom surface of the first recess, forming a second nonreciprocal member on a bottom surface of the second recess, and irradiating a laser beam to the first nonreciprocal member and the second nonreciprocal member. [Explanation of symbols]

[0131] 10. Isolator 20 waveguide (201: top surface, 21: first waveguide, 22: second waveguide, 211, 212, 221, 222: folded part) 30 recess (301, 302, 303, 304: side surface, 305: bottom surface, 31: first recess, 32: second recess) 40 Non-reciprocal Members 50 substrate (50A: substrate surface, 52: box layer, 54: insulating layer) 61, 62 Heater 70 irradiation device (72: light source, 74: lens, 76: laser light, 78: stage) 81 First Branch 82 Second Branch LS Laser irradiation range

Claims

1. a substrate having a substrate surface; a first waveguide and a second waveguide extending on the substrate surface and propagating a TM mode electromagnetic wave along the extending direction; A first non-reciprocal member and a second non-reciprocal member; Equipped with the first nonreciprocity member is positioned such that a bottom surface thereof that is closest to a top surface of the first waveguide overlaps at least a portion of the first waveguide in a plan view of the substrate surface; a side surface of the first nonreciprocal member extending away from an upper surface of the first waveguide at an end of the bottom surface in the extension direction of the first waveguide, the end being located more inward than the end of the extension direction of the first waveguide, is inclined so as to widen outward in the extension direction of the first waveguide as it moves away from the upper surface of the first waveguide with respect to a plane perpendicular to the extension direction of the first waveguide in a cross section perpendicular to the substrate surface and along the extension direction of the first waveguide; the second nonreciprocity member is positioned such that a bottom surface thereof that is closest to a top surface of the second waveguide overlaps at least a portion of the second waveguide in a plan view of the substrate surface; a side surface of the second nonreciprocal member extending away from an upper surface of the second waveguide at an end of the bottom surface in the extension direction of the second waveguide, the end being located more inward than the end of the extension direction of the second waveguide, is inclined so as to widen outward in the extension direction of the second waveguide as it moves away from the upper surface of the second waveguide with respect to a plane perpendicular to the substrate surface and along the extension direction of the second waveguide, A magnetic field is applied from mutually opposite directions toward a propagation direction of an electromagnetic wave in a portion overlapping the first nonreciprocal member and a propagation direction of an electromagnetic wave in a portion overlapping the second nonreciprocal member. Isolator.

2. a substrate having a substrate surface; a first waveguide and a second waveguide extending on the substrate surface and propagating a TM mode electromagnetic wave along the extending direction; A first non-reciprocal member and a second non-reciprocal member; Equipped with the first nonreciprocity member is positioned such that a bottom surface thereof that is closest to a top surface of the first waveguide overlaps at least a portion of the first waveguide in a plan view of the substrate surface; a side surface of the first nonreciprocal member extending away from an upper surface of the first waveguide at an end of the bottom surface in the extension direction of the first waveguide, the end being located more inward than the end of the extension direction of the first waveguide, is inclined with respect to a plane perpendicular to the extension direction of the first waveguide and is inclined with respect to a direction perpendicular to the extension direction of the first waveguide in a plan view of the substrate surface, the second nonreciprocity member is positioned such that a bottom surface thereof that is closest to a top surface of the second waveguide overlaps at least a portion of the second waveguide in a plan view of the substrate surface; a side surface of the second nonreciprocal member extending away from an upper surface of the second waveguide at an end of the bottom surface in the extension direction of the second waveguide, the end being located more inward than the end of the extension direction of the second waveguide, is inclined with respect to a plane perpendicular to the extension direction of the second waveguide and is inclined with respect to a direction perpendicular to the extension direction of the second waveguide in a plan view of the substrate surface, A magnetic field is applied from mutually opposite directions toward a propagation direction of an electromagnetic wave in a portion overlapping the first nonreciprocal member and a propagation direction of an electromagnetic wave in a portion overlapping the second nonreciprocal member. Isolator.

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