Pressurization System

Abstract

To provide a pressurizing system capable of selecting from a plurality of different pressurizing methods. [Solution] A pressurizing system S according to the present invention comprises a plurality of pressurizing units 1-4, one pressurizing area A1 where pressurizing treatment is performed, a plurality of waiting areas A2-A5 arranged on the sides of the pressurizing area when viewed in the vertical direction, and unit support members R1-R12 that support each of the pressurizing units so that they can be transported between the waiting area and the pressurizing area corresponding to each pressurizing unit. When a workpiece W is pressurized, one of the plurality of pressurizing units is arranged above or below the workpiece in the pressurizing area and is movable relative to the workpiece. The remaining pressurizing units are arranged in the corresponding waiting areas, and each of the pressurizing units is configured to be able to perform pressurizing treatment on the workpiece using a different pressurizing method.

Description

[Technical field]

[0001] The present invention relates to a pressurization system. [Background technology]

[0002] 2. Description of the Related Art Pressurizing devices are used, for example, in the manufacturing process of electronic components to pressurize (bond or sinter) stacked workpieces (substrates, elements, sheets, etc.) (see, for example, Patent Documents 1 to 3).

[0003] The pressure device disclosed in Patent Document 1 applies pressure to a workpiece using a pressure pad made of a special elastic body that deforms to follow the shape of each workpiece. That is, the pressure device applies pressure to the workpiece evenly from multiple directions (hereinafter referred to as the "quasi-isotropic pressure method"). As a result, the pressure device can apply pressure evenly from multiple directions to a workpiece that has irregularities and multiple workpieces with different heights.

[0004] Here, in the pressurizing device disclosed in Patent Document 1, pressure is also applied to areas that do not require pressure (e.g., areas other than the chips on the substrate). Some workpieces have areas with low strength (e.g., eaves-shaped areas). When such workpieces are pressurized using the pressurizing device, defects such as cracks and chips may occur in the areas with low strength. For this reason, there is also a demand for a pressurizing device that can apply pressure using a pressurizing method that applies pressure collectively to only the areas that require pressure.

[0005] The pressing device disclosed in Patent Document 2 presses a workpiece with a rigid body (e.g., a steel plate) having a flat press surface. That is, the pressing device presses the workpiece from above and below (one direction) (hereinafter referred to as "uniaxial pressing method"). As a result, the pressing device can pressurize a workpiece that requires a flat surface (e.g., a thin, easily deformed workpiece such as a ceramic green sheet) so that the surface of the workpiece becomes flat. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2004-296746 A [Patent Document 2] JP 2001-145911 A [Patent Document 3] JP 2024-036929 A Summary of the Invention [Problem to be solved by the invention]

[0007] In recent years, electronic components have become more diverse. Accordingly, the form of the workpiece (e.g., the presence or absence of a heat sink, the presence or absence of a clip for temporarily fixing the laminate, etc.), the shape required of the workpiece after pressing (e.g., the degree of flatness of the surface, the presence or absence of roundness, etc.), and the processing conditions of the workpiece (e.g., the pressing force, the temperature conditions, etc.) have also become more diverse. As mentioned above, the optimal pressing method differs depending on the workpiece. In addition, pressing devices are generally designed to enable pressing using a single pressing method. Therefore, in order to appropriately pressurize each of the diversifying workpieces, multiple pressing devices corresponding to different pressing methods are required.

[0008] Here, Patent Document 3 discloses a pressurizing system capable of pressurizing by two pressurizing methods (both of which are uniaxial pressurizing methods) with different pressurizing conditions. In this pressurizing system, two pressurizing devices are arranged in parallel on a process line. After the workpiece is pressurized by the first pressurizing device, additional pressure is applied by the second pressurizing device. In this manner, this pressurizing system can pressurize the workpiece W by a plurality of pressurizing methods. However, since a plurality of pressurizing devices are arranged in parallel, this pressurizing system becomes large. Furthermore, changing the pressurizing method requires redesigning the pressurizing system. In other words, this pressurizing system cannot select a plurality of different pressurizing methods to suit the workpiece.

[0009] An object of the present invention is to provide a pressurizing system capable of selecting from a plurality of different pressurizing methods. [Means for solving the problem]

[0010] A pressurizing system in one embodiment of the present invention is a pressurizing system that performs a pressurizing treatment on at least one workpiece, and includes a plurality of pressurizing units, one pressurizing area where the pressurizing treatment is performed, a plurality of waiting areas arranged on the sides of the pressurizing area when viewed in the vertical direction, and a unit support member that supports each of the pressurizing units so that they can be transported between the waiting area corresponding to each of the pressurizing units and the pressurizing area, and when the workpiece is pressurized, one of the plurality of pressurizing units is arranged above or below the workpiece in the pressurizing area and is movable relative to the workpiece, and the remaining pressurizing units are arranged in the corresponding waiting area, and each of the pressurizing units is configured to be able to perform the pressurizing treatment on the workpiece using a different pressurizing method. hand , The pressurizing method includes at least two of the four methods that combine either one of a pseudo-isotropic pressurizing method in which the workpiece is pressurized from multiple directions and a uniaxial pressurizing method in which the workpiece is pressurized only from the top and bottom directions, a collective pressurizing method in which multiple workpieces can be pressurized collectively with one press surface, and an individual pressurizing method in which multiple workpieces can be pressurized individually with multiple partitioned individual press surfaces, and the press surface is arranged so as to be directed toward the workpiece in an upward or downward direction when the pressurizing unit having the press surface is arranged in the pressurizing area, and the multiple individual press surfaces are arranged so as to be directed toward the corresponding workpiece in an upward or downward direction when the pressurizing unit having the individual press surfaces is arranged in the pressurizing area, and when the workpiece is not pressurized, the press surface is planar, and each of the individual press surfaces is planar. It is a pressurized system. Effect of the Invention

[0011] The present invention provides a pressurizing system capable of selecting from a number of different pressurizing methods. [Brief description of the drawings]

[0012] [Figure 1] 1 is a schematic perspective view of a pressurizing system showing an embodiment of the pressurizing system according to the present invention. [Diagram 2] FIG. 2 is a schematic plan view of the pressurizing system. [Diagram 3] FIG. 3 is a schematic cross-sectional view of the pressurizing system taken along line AA in FIG. 2. [Figure 4] FIG. 4 is a schematic cross-sectional view of an upper pressurizing unit of the pressurizing system. [Diagram 5] FIG. 4 is a schematic cross-sectional view of another upper pressurizing unit of the pressurizing system. [Figure 6] FIG. 6 is a schematic bottom view of the upper pressurizing unit of FIG. 5. [Figure 7] 6 is a partially enlarged schematic cross-sectional view of the upper pressurizing unit of FIG. 5. [Figure 8] FIG. 11 is a schematic cross-sectional view of yet another upper pressurizing unit of the pressurizing system. [Figure 9] FIG. 11 is a schematic cross-sectional view of yet another upper pressurizing unit of the pressurizing system. [Figure 10] 5 is a schematic plan view of the pressurizing system, illustrating a state in which the upper pressurizing unit of FIG. 4 is transported to a pressurizing area of ​​the pressurizing system in a first operation of the pressurizing system. FIG. [Figure 11] FIG. 11 is a schematic cross-sectional view of the pressurizing system, showing the state shown in FIG. 10. [Figure 12] 4 is a schematic cross-sectional view of a portion of the pressurizing system before the upper pressurizing unit of FIG. 4 is attached to the upper heat unit of the pressurizing system, and FIG. 5 is a schematic cross-sectional view of a portion of the pressurizing system after the upper pressurizing unit of FIG. 4 is attached to the upper heat unit. [Figure 13] FIG. 2 is a schematic cross-sectional view of the pressurizing system, showing a state in which the chamber unit is assembled. [Figure 14] FIG. 2 is a schematic cross-sectional view of the pressurizing system, showing a state in which a workpiece is pressed. [Figure 15] FIG. 4 is a schematic cross-sectional view of the pressurizing system, showing a state in which the workpiece has been cooled. [Figure 16] 1 is a graph showing an example of a temperature profile for rapid heating and rapid cooling of a workpiece. [Figure 17] 6 is a schematic plan view of the pressurizing system, illustrating a state in which the upper pressurizing unit of FIG. 5 is transported to a pressurizing area in a second operation of the pressurizing system. FIG. [Figure 18] FIG. 18 is a schematic cross-sectional view of the pressurizing system shown in FIG. 17. [Figure 19] 6 is a schematic cross-sectional view of the pressurizing system, illustrating a state in which a first movement restricting member of an upper pressurizing unit in FIG. 5 is in contact with a mounting plate of the pressurizing system. FIG. [Figure 20] FIG. 2 is a schematic cross-sectional view of the pressurizing system, showing a state in which a workpiece is pressed. [Figure 21]1 is a graph showing an example of a temperature profile of constant temperature heating of a workpiece. [Figure 22] 9 is a schematic plan view of the pressurizing system, illustrating a state in which the upper pressurizing unit of FIG. 8 is transported to the pressurizing area in a third operation of the pressurizing system. FIG. [Diagram 23] FIG. 23 is a schematic cross-sectional view of the pressurizing system shown in FIG. 22. [Figure 24] FIG. 2 is a schematic cross-sectional view of the pressurizing system, showing a state in which the chamber unit is assembled. [Diagram 25] FIG. 4 is a schematic cross-sectional view of the pressurizing system, showing a state in which the workpiece has been cooled. [Figure 26] 1 is a graph showing an example of a temperature profile for slow heating and slow cooling of a workpiece. [Figure 27] 10 is a schematic plan view of the pressurizing system, illustrating a state in which the upper pressurizing unit of FIG. 9 is transported to the pressurizing area in a fourth operation of the pressurizing system. FIG. [Figure 28] FIG. 28 is a schematic cross-sectional view of the pressurizing system shown in FIG. 27. [Figure 29] 10 is a schematic cross-sectional view of the pressurizing system, illustrating a state in which a movement restricting member of an upper pressurizing unit in FIG. 9 is in contact with the placement plate. FIG. [Diagram 30] FIG. 2 is a schematic cross-sectional view of the pressurizing system, showing a state in which a workpiece is pressed. [Diagram 31] FIG. 11 is a schematic cross-sectional view of an upper pressurizing unit in a first modified example of the pressurizing system. [Diagram 32] 32 is a schematic cross-sectional view of the pressurizing system, showing a state in which the workpiece is pressed by the upper pressurizing unit of FIG. 31. [Diagram 33] FIG. 11 is a schematic cross-sectional view of a pressurizing system, showing a second modified example of the pressurizing system. [Diagram 34] 13 shows a third modified example of the pressurizing system. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] An embodiment of a pressurizing system according to the present invention will be described below. In the following description, the drawings will be referred to as appropriate. In each drawing, the same members and elements are given the same reference numerals, and duplicated descriptions will be omitted. In addition, the dimensional ratios of each element may be exaggerated for convenience of explanation, and are not limited to the ratios shown in each drawing.

[0014] In the following description and drawings, when the three mutually orthogonal axes in space are the X-axis, Y-axis, and Z-axis, the X-axis and Y-axis are parallel to the horizontal direction, and the Z-axis is parallel to the up-down direction. The "X-axis direction" is the direction along the X-axis, the "+X direction" is one direction along the X-axis, and the "-X direction" is the other direction along the X-axis. The "Y-axis direction" is the direction along the Y-axis, the "+Y direction" is one direction along the Y-axis, and the "-Y direction" is the other direction along the Y-axis. The "Z-axis direction" is the direction along the Z-axis, and is the up-down direction. The "+Z direction" is the upward direction, and the "-Z direction" is the downward direction. The "XY direction" is the direction along the X-axis and Y-axis directions, and the "XY plane" is a virtual plane parallel to the XY direction (horizontal direction). The "XZ direction" is the direction along the X-axis and Z-axis directions, and the "XZ plane" is a virtual plane parallel to the XZ direction (vertical direction). The "YZ direction" is the direction along the Y-axis direction and the Z-axis direction, and the "YZ plane" is an imaginary plane parallel to the YZ direction (vertical direction).

[0015] In the following description, the lower surface is a surface that faces downward and is parallel to the XY direction. The upper surface is a surface that faces upward and is parallel to the XY direction. That is, the lower surface and the upper surface are flat. The thickness (height) of each member is the length of each member in the vertical direction.

[0016] ●Pressurization system● Composition of the pressurizing system FIG. 1 is a schematic perspective view of a pressurizing system showing an embodiment of the pressurizing system according to the present invention. FIG. 2 is a schematic plan view of the pressurizing system. In Fig. 1, the boundaries of each area described below are indicated by thick two-dot chain lines. In Fig. 2, for the sake of convenience, illustration of some components of the pressurizing system S is omitted. In the following description, Fig. 1 and Fig. 2 will be referred to as appropriate.

[0017] The pressurizing system S applies pressure to the workpiece W by a pressurizing method suitable for the workpiece W. The pressurizing system S includes a housing (not shown; same below), multiple (four in this embodiment) upper pressurizing units 1, 2, 3, 4, a pressurizing device 5, a lower heat unit 6, a transport mechanism 7, a control device 8, a mounting plate 9, a pump P (see FIG. 3), and multiple mounting bolts Bo (see FIG. 12; same below). The upper pressurizing units 1 to 4 are examples of pressurizing units in the present invention.

[0018] The "workpiece W" is the object (i.e., the object to be pressurized) on which pressure treatment is performed in the pressure system S, and is, for example, a sheet-like substrate (such as a ceramic green sheet), a substrate on which electronic components, circuits, etc. are mounted, etc.

[0019] The "pressure method" refers to the way pressure is applied to the workpiece W (method of applying pressure). Pressurization methods are distinguished by, for example, the direction of pressure applied to the workpiece W (e.g., multi-axial direction, uniaxial direction), the number of press surfaces for multiple workpieces W (whether the press surface is divided into multiple areas that can move up and down individually), the flatness of the upper surface Wa (surface) of the workpiece W after pressure is applied, etc.

[0020] Specifically, the pressurizing method includes a pseudo-isotropic pressure method and a uniaxial pressurizing method. The "pseudo-isotropic pressure method" is a method of applying pressure to the workpiece W from multiple directions (i.e., multiple axial directions). As described later, in the pseudo-isotropic pressure method, the workpiece W is applied by a member that deforms to follow the shape of the surface of the workpiece W (e.g., a pressure pad 15 (described later)) and a member that does not deform (e.g., a mounting plate 9 (described later)). At this time, pressure is applied to the workpiece W not from all directions, but from multiple directions that are feasible due to the configuration of the pressurizing system S. In other words, the pseudo-isotropic pressure method is a method of realizing a pseudo-isotropic pressure. The "uniaxial pressurizing method" is a method of applying pressure to the workpiece W from one axial direction (up and down). Here, the upper surface Wa of the workpiece W pressurized by the uniaxial pressurizing method becomes flatter (has a higher flatness) than the upper surface Wa of the workpiece W pressurized by the pseudo-isotropic pressure method. In addition, the pressurizing method includes a batch pressurizing method and an individual pressurizing method. The "lump pressurizing method" is a method in which multiple workpieces W are pressed collectively with one press surface. The "individual pressurizing method" is a method in which multiple workpieces W are pressed (collectively) with each of multiple partitioned press surfaces (hereinafter referred to as "individual press surfaces") corresponding to each of the multiple workpieces W. Here, in the individual pressurizing method, one workpiece W out of the multiple workpieces W is pressed with one individual press surface out of the multiple individual press surfaces. In this embodiment, the pressurizing method is any one of four methods that combine either one of the pseudo-isotropic pressurizing method and the uniaxial pressurizing method, and either one of the bulk pressurizing method and the individual pressurizing method.

[0021] Furthermore, the "pressurizing method" is determined based on the operation for pressing the press surfaces of the upper pressurizing units 1-4 against the workpiece W and the form of the press surfaces (e.g., material, number of pressurizing surfaces). That is, for example, between two pressurizing methods, when either the operation or the form of the press surfaces is different, the two pressurizing methods are different. On the other hand, between two pressurizing methods, when the operation and the form of the press surfaces are the same, the two pressurizing methods are the same. Therefore, two pressurizing methods that differ only in the magnitude of the pressure applied to the workpiece W (pressurizing force only) are the same. Also, two pressurizing methods that differ only in the size of the mold that provides the press surfaces (so-called only the mold) are the same.

[0022] The housing accommodates upper pressurizing units 1 to 4, a pressurizing device 5, a lower heating unit 6, a transport mechanism 7, a control device 8, a mounting plate 9, a pump P, and mounting bolts Bo. The shape of the housing is, for example, a rectangular parallelepiped along the XY direction when viewed from above and below.

[0023] When viewed from the top and bottom, the space inside the housing of the pressurizing system S is roughly divided into one pressurizing area A1 and multiple (four in this embodiment) waiting areas A2, A3, A4, and A5. In other words, the pressurizing system S has one pressurizing area A1 and multiple waiting areas A2 to A5.

[0024] The "pressure area A1" is an area where the workpiece W is pressurized (where the pressurization process is carried out).

[0025] The "standby area A2" is an area where the upper pressurizing unit 1 waits (is stored) when the upper pressurizing unit 1 is not in use. When viewed in the up-down direction, the standby area A2 is disposed adjacent to the pressurizing area A1 in the +X direction of the pressurizing area A1.

[0026] The "standby area A3" is an area where the upper pressurizing unit 2 waits (is stored) when the upper pressurizing unit 2 is not in use. When viewed in the up-down direction, the standby area A3 is disposed adjacent to the pressurizing area A1 in the -Y direction of the pressurizing area A1.

[0027] The "standby area A4" is an area where the upper pressurizing unit 3 waits (is stored) when the upper pressurizing unit 3 is not in use. When viewed in the up-down direction, the standby area A4 is disposed adjacent to the pressurizing area A1 in the -X direction of the pressurizing area A1.

[0028] The "standby area A5" is an area where the upper pressurizing unit 4 waits (is stored) when the upper pressurizing unit 4 is not in use. When viewed in the up-down direction, the standby area A5 is disposed adjacent to the pressurizing area A1 in the +Y direction of the pressurizing area A1.

[0029] Each of the upper pressurizing units 1 to 4 performs pressurizing treatment on the workpiece W using a different pressurizing method. The upper pressurizing units 1 to 4 can be transported back and forth between the corresponding waiting areas A2 to A5 and the pressurizing area A1 via the transport mechanism 7. In this embodiment, the transport of the upper pressurizing units 1 to 4 is performed manually by a user of the pressurizing system S. The specific configuration of the upper pressurizing units 1 to 4 will be described later.

[0030] FIG. 3 is a schematic cross-sectional view of the pressurizing system S taken along line AA in FIG. In the following description, FIGS. 1 and 2 will be referred to together with FIG. 3 as appropriate.

[0031] The pressurizing device 5 uses the upper pressurizing units 1 to 4 transported to the pressurizing area A1 to pressurize the workpiece W. The pressurizing device 5 includes an upper base 50, an upper heating unit 51, and a lifting device 52. The pressurizing device 5 is disposed in the pressurizing area A1.

[0032] The upper base 50 supports the upper heating unit 51, the upper pressurizing units 1 to 4, and the rails R9 to R12. The upper base 50 is made of, for example, a metal having high rigidity (for example, carbon steel). The shape of the upper base 50 is, for example, a rectangular parallelepiped along the XY axis direction when viewed in the up-down direction.

[0033] The upper heat unit 51 is attached to the lower surface of the upper base 50. The upper heat unit 51 includes a main body 51a, a heat insulating member 51b, a plurality of female screw holes 51c, a plurality of heating sources H1, and a plurality of cooling sources C1. The main body 51a is made of, for example, a metal having high rigidity (for example, carbon steel). The shape of the main body 51a is a rectangular parallelepiped along the XY axis direction when viewed in the up-down direction. The heat insulating member 51b is arranged so as to cover the upper side of the main body 51a. The female screw holes 51c are arranged at equal intervals on the outer edge of the lower surface of the main body 51a. The heating source H1 heats the main body 51a. The heating source H1 is, for example, a known straight tube heater. The heating source H1 is contained (arranged) in the lower half of the main body 51a. The cooling source C1 cools the main body 50a. The cooling source C1 is, for example, a straight pipe-shaped flow path through which a refrigerant (not shown, same below) flows. The refrigerant is cooled by a cooling device (not shown, same below) and circulated between the cooling source C1 and the cooling device. The cooling source C1 is contained within the upper half of the main body 51a. The upper heating unit 51 is an example of a heating unit in the present invention. The main body 51a is an example of a heating mold in the present invention.

[0034] The lifting device 52 lifts and lowers the upper base 50, the upper heating unit 51, and the upper pressurizing units 1 to 4. The lifting device 52 is, for example, a known hydraulic cylinder.

[0035] The lower heating unit 6 heats and cools the workpiece W. The lower heating unit 6 includes a lower heating unit 60, a lower cooling unit 61, and a lower heating unit transport device 62.

[0036] The lower heating unit 60 heats and cools the workpiece W. The lower heating unit 60 can be transported between a heat treatment position (pressurizing area A1) below the upper heating unit 51 and a standby position (standby area A4) spaced apart from the heat treatment position in the horizontal direction (in this embodiment, the -X direction). The lower heating unit 60 includes a main body 60a, multiple heating sources H2, and multiple cooling sources C2. The lower heating unit 60 is an example of a heat unit in the present invention. The standby position (standby area A4) is an example of a heat unit standby area in the present invention.

[0037] The configuration of the main body 60a is the same as the configuration of the main body 51a. The heating source H2 heats the main body 60a. The configuration of the heating source H2 is the same as the configuration of the heating source H1. The heating source H2 is contained in the upper half of the main body 60a. The cooling source C2 cools the main body 60a. The configuration of the cooling source C2 is the same as the configuration of the cooling source C1. The cooling source C2 is contained in the lower half of the main body 60a. The main body 60a is an example of a heating mold of the present invention.

[0038] The lower cooling unit 61 cools the workpiece W. The lower cooling unit 61 can be transported between a heat treatment position and a standby position (standby area A2) spaced apart from the heat treatment position in the horizontal direction (in this embodiment, the +X direction). The lower cooling unit 61 includes a main body 61a and multiple cooling sources C3. The lower cooling unit 61 is an example of a heat unit in the present invention. The standby area A2 is an example of a heat unit standby area in the present invention.

[0039] The configuration of the main body 61a is the same as that of the main body 51a. The configuration of the cooling source C3 is the same as that of the cooling source C1. The cooling source C3 is contained in the main body 61a. The main body 61a is an example of a thermal mold of the present invention.

[0040] The lower heating unit transport device 62 transports the lower heating unit 60 and the lower cooling unit 61 between the heat treatment position and their respective standby positions. The lower heating unit transport device 62 includes, for example, a known power source (e.g., a motor: not shown), a power transmission mechanism (e.g., a gear, a ball screw, etc.: not shown), and a rail (not shown).

[0041] The transport mechanism 7 supports (movably) the upper pressurizing units 1 to 4. The transport mechanism 7 includes a plurality of (12 in this embodiment) rails R1, R2, R3, R4, R5, R6, R7, R8, R9, R10, R11, and R12, a plurality of (4 in this embodiment) bases B1, B2, B3, and B4 (see FIGS. 4, 5, 8, and 9; the same applies below), and a plurality of rollers Ro.

[0042] The rails R1 to R12 support the upper pressurizing units 1 to 4 so that the upper pressurizing units 1 to 4 can be transported in the horizontal direction (X-axis direction or Y-axis direction). The rails R1 to R12 are, for example, long in shape along the X-axis direction or Y-axis direction. When viewed in the longitudinal direction of the rails R1 to R12, the rails R1 to R12 are "L" shaped (see Figs. 4, 5, 8, and 9). The rails R1 to R12 have a strength capable of supporting the upper pressurizing units 1 to 4, which are heavy objects. The rails R1 to R12 are an example of a unit support member in the present invention.

[0043] The bases B1 to B4 are shaped like a rectangular parallelepiped along the XY axis direction when viewed from above. The base B1 is disposed in the waiting area A2. The base B2 is disposed in the upper space. The base B3 is disposed in the waiting area A4. The base B4 is disposed in the waiting area A5. The bases B1 to B4 are attached to the ceiling of the housing.

[0044] The rails R1 to R8 are attached to the lower surfaces of the corresponding bases B1 to B4 with their protruding portions facing each other. The rails R1 and R2 correspond to the base B1, the rails R3 and R4 correspond to the base B2, the rails R5 and R6 correspond to the base B3, and the rails R7 and R8 correspond to the base B4.

[0045] The rails R9 to R12 are attached to the lower surface of the upper base 50 with their protruding portions facing each other. That is, the rails R9 to R12 are (indirectly) attached to the lifting device 52 via the upper base 50. The rails R9 to R12 are an example of an individual unit support member in the present invention. In this embodiment, the rails R9 to R12 are detachable from the upper base 50.

[0046] In the present invention, the rails R9 to R12 may be directly attached to the lifting device 52.

[0047] The rails R1, R2, R5, R6, R9, and R10 are arranged so that their longitudinal direction is along the X-axis direction. The rails R3, R4, R7, R8, R11, and R12 are arranged so that their longitudinal direction is along the Y-axis direction.

[0048] The roller Ro is rotatably attached to the side surface on the X-axis direction side of the upper pressure units 1 and 3 and to the side surface on the Y-axis direction side of the upper pressure units 2 and 4. As the roller Ro placed on the rails R1 to R12 rotates, the upper pressure units 1 to 4 are transported along the rails R1 to R12.

[0049] The control device 8 controls the operation of the entire pressurization system S. The control device 8 includes, for example, a processor such as a CPU (Central Processing Unit), a volatile memory such as a RAM (Random Access Memory) that functions as a working area for the CPU, and a non-volatile memory such as a ROM (Read Only Memory) that stores various information such as a control program. The control device 8 is realized, for example, by a PC (Personal Computer) or a PLC (Programmable Logic Controller).

[0050] The mounting plate 9 is a member on which the workpiece W is placed. The mounting plate 9 is made of, for example, graphite or a metal having high thermal conductivity (for example, a copper alloy). The mounting plate 9 has a rectangular plate shape along the XY direction when viewed from the top-bottom direction. The mounting plate 9 is transported onto the lower heating unit 60 or the lower cooling unit 61.

[0051] The pump P reduces the pressure inside the accommodation chambers Ra1 to Ra4 (described later). The pump P is a known vacuum pump. The pump P is connected via piping to exhaust holes 12a, 22a, 32a, and 42a (described later) of the upper pressurizing units 1 to 4 after transport to the pressurizing area A1.

[0052] Upper pressure unit configuration Next, the configuration of the upper pressurizing units 1 to 4 will be described below. In the following description, FIGS. 1 to 3 will be referred to as appropriate.

[0053] ●Configuration of upper pressure unit (1) FIG. 4 is a schematic cross-sectional view of the upper pressurizing unit 1. As shown in FIG. The figure shows a cross section of the upper pressure applying unit 1 along the YZ plane, in which the upper pressure applying unit 1 is cut at its center in the X-axis direction.

[0054] The upper pressurizing unit 1 includes a base 10, a mold 11, a side unit 12, a support unit 13, a frame member 14, and a pressurizing pad 15. The upper pressurizing unit 1 is configured to be transportable between the waiting area A2 and the pressurizing area A1.

[0055] The base 10 supports the mold 11, the side unit 12, and the support unit 13. The base 10 has a plurality of bolt insertion holes 10a. The base 10 has a rectangular parallelepiped shape along the XY direction when viewed in the up-down direction. The bolt insertion holes 10a are through holes that penetrate the base 10 in the up-down direction. The bolt insertion holes 10a are arranged at equal intervals on the outer edge of the base 10.

[0056] The die 11 applies pressure to the workpiece W via the pressure pad 15 by applying pressure downward with the pressure pad 15. The die 11 is made of, for example, a metal having high rigidity (for example, carbon steel). The shape of the die 11 is a rectangular parallelepiped along the XY direction when viewed from the top and bottom. The die 11 is attached to the bottom surface of the base 10.

[0057] In the present invention, the mold 11 may be molded integrally with the base 10.

[0058] When the workpiece W is pressurized, the side unit 12, together with the mounting plate 9 and the base 10, forms a space in which the workpiece W is accommodated (hereinafter referred to as "accommodation chamber Ra1"; see FIG. 13; the same applies below). The side unit 12 is disposed below the base 10. The side unit 12 includes a first side member 121, a second side member 122, three seal members 123, 124, 125, a cylinder 126, and an exhaust hole 12a.

[0059] The first side member 121 and the second side member 122 are shaped like a rectangular cylinder along the XY direction when viewed in the up-down direction. The first side member 121 is attached to the lower surface of the base 10. In the horizontal direction, the first side member 121 is disposed so as to surround the mold 11 and the support unit 13. The second side member 122 is supported by the base 10 via a cylinder 126. In the horizontal direction, the second side member 122 is disposed so as to surround the first side member 121. The exhaust hole 12a is a through hole penetrating the second side member 122.

[0060] The seal members 123 to 125 are, for example, known O-rings. The seal member 123 is disposed between the base 10 and the first side member 121. The seal member 124 is disposed between the first side member 121 and the second side member 122. The seal member 125 is attached to the lower surface of the second side member 122.

[0061] The cylinder 126 is attached to the base 10 and the second side member 122, and supports the second side member 122 so that it can rise and fall. The cylinder 126 is, for example, a known air cylinder.

[0062] The support unit 13 is disposed below the base 10. The support unit 13 includes a support member 131 and a plurality of spring members 132.

[0063] The support member 131 supports the frame member 14. The support member 131 has a rectangular frame shape along the XY direction when viewed in the up-down direction. In the horizontal direction, the support member 131 is disposed on the side of the mold 11 so as to surround the mold 11.

[0064] The spring member 132 is attached to the base 10 and the support member 131, and supports the support member 131 so as to be movable in the vertical direction relative to the die 11. The spring member 132 is, for example, a known coil spring.

[0065] The frame member 14 holds the pressure pad 15. The frame member 14 is made of, for example, a metal (e.g., stainless steel) having high rigidity. When viewed in the up-down direction, the frame member 14 has a rectangular frame shape along the XY axis direction. In the up-down direction, the frame member 14 is located lower than the mold 11. The frame member 14 is supported by the base 10 via the support unit 13 so as to be movable relative to the mold 11 in the up-down direction.

[0066] When pressure is applied to the workpiece W, the pressure pad 15 deforms to conform to the shape of the surface of the workpiece W and applies even pressure to the workpiece W. The pressure pad 15 is held by a frame member 14 and disposed below the die 11. The pressure pad 15 includes an elastic body 15a and two film members 15b and 15c.

[0067] When the workpiece W is pressurized, the elastic body 15a transmits the pressure from the die 11 evenly to the workpiece W. The elastic body 15a is made of, for example, a known elastic material having high fluidity and low resilience (for example, high damping thermal conductive gel sheet "αGEL (registered trademark)" manufactured by Geltec Co., Ltd.). The outer edges of the film members 15b and 15c are held so as to be sandwiched between the frame member 14 over the entire circumference. The elastic body 15a is filled between the film members 15b and 15c arranged above and below the elastic body 15a. As a result, the elastic body 15a is surrounded by the frame member 14 in the horizontal direction.

[0068] When viewed from below, the portion (center portion) of the pressure pad 15 that is not held by the frame member 14 is partitioned into one rectangular region by the frame member 14. The lower surface 15p of that region faces all of the workpieces W when the workpieces W are pressed, and functions as one press surface that presses all of the workpieces W collectively. That is, the lower surface 15p functions as the press surface in the present invention.

[0069] In the present invention, the upper pressure unit 1 may be provided below the pressure pad 15 with a heat insulator that has high heat insulation properties and is deformable to follow the shape of the surface of the workpiece W.

[0070] ●Configuration of upper pressure unit (2) FIG. 5 is a schematic cross-sectional view of the upper pressurizing unit 2. As shown in FIG. FIG. 6 is a schematic bottom view of the upper pressurizing unit 2. As shown in FIG. FIG. 5 shows a cross section of the upper pressure unit 2 along the XZ plane, in which the upper pressure unit 2 is cut at the center in the Y-axis direction.

[0071] The upper pressurizing unit 2 includes a base 20, a mold 21, a side unit 22, a support unit 23, a plurality (nine in this embodiment) of individual protective plates 24, a plurality (nine in this embodiment) of individual pressurizing pads 25, a support mold 26, a plurality (nine in this embodiment) of individual pressurizing members 27, a plurality (nine in this embodiment) of biasing units 28, and a movement restricting member 29. The upper pressurizing unit 2 is configured to be transportable between the waiting area A3 and the pressurizing area A1.

[0072] The base 20 has a plurality of bolt insertion holes 20a. The configuration of the base 20 is the same as the configuration of the base 10, so a detailed description thereof will be omitted.

[0073] The die 21 applies pressure to the individual pressure members 27 in a downward direction, thereby applying pressure to the workpiece W via the individual pressure members 27. The die 21 is made of, for example, a metal having high rigidity (for example, carbon steel). The die 21 is attached to the lower surface of the base 20. The die 21 includes a base portion 21a and a plurality of (nine in this embodiment) individual dies 21b.

[0074] The shape of the base portion 21a is a rectangular parallelepiped along the XY direction when viewed in the up-down direction. A part of the lower surface of the base portion 21a protrudes downward in a rectangular parallelepiped shape to form the individual mold 21b. In other words, the base portion 21a is molded integrally with the individual mold 21b.

[0075] The individual molds 21b apply pressure to the corresponding individual pressing members 27 downward to pressurize the corresponding workpieces W. The shape of the individual molds 21b is a rectangular parallelepiped along the XY direction when viewed in the vertical direction. When viewed in the vertical direction, the individual molds 21b are evenly arranged (3 rows x 3 columns) along the XY direction.

[0076] In the present invention, the mold 21 may be molded integrally with the base 20 .

[0077] In the present invention, the mold 21 does not necessarily have to include the base portion 21a. In this case, for example, the individual molds 21b may be attached to the lower surface of the base 20.

[0078] Side unit 22 includes a first side member 221, a second side member 222, three seal members 223, 224, 225, a cylinder 226, and an exhaust hole 22a. The configuration of side unit 22 is the same as the function and configuration of side unit 12, and therefore a detailed description thereof will be omitted.

[0079] The support unit 23 supports the support mold 26. The support unit 23 includes a support member 231 and a plurality of spring members 232. The configuration of the support unit 23 is common to the configuration of the support unit 13, and therefore a detailed description thereof will be omitted.

[0080] FIG. 7 is a partially enlarged schematic cross-sectional view of the upper pressurizing unit 2. As shown in FIG. 5 shows the portion C of the upper pressurizing unit 2. In the following description, FIGS. 5 and 6 will be referred to together with FIG.

[0081] The individual protective plate 24 protects the individual pressure pad 25. The individual protective plate 24 is made of, for example, a metal (for example, carbon steel) having high rigidity. The shape of the individual protective plate 24 is a rectangular plate along the XY direction when viewed in the up-down direction. In the XY direction, the length of the individual protective plate 24 is slightly smaller than the length of the corresponding accommodating hole 26a (described later; the same applies below). The individual protective plate 24 is disposed below the corresponding individual mold 21b, accommodated in the corresponding accommodating hole 26a, and placed on the corresponding individual pressure pad 25.

[0082] When the workpiece W is pressed, the individual pressure pad 25 deforms according to the relative movement of the corresponding individual pressure member 27 with respect to the support die 26. The individual pressure pad 25 includes an elastic body 25a and two membranes 25b, 25c. The individual pressure pad 25 is accommodated in the corresponding accommodation hole 26a, and is disposed above the corresponding individual pressure member 27 and adjacent to the individual pressure member 27. That is, the individual pressure pad 25 is disposed between the corresponding individual pressure member 27 and the corresponding individual die 21b (die 21). The individual pressure pad 25 is an example of a pressure pad in the present invention.

[0083] When the workpiece W is pressed, the elastic body 25a uniformly transmits the pressure from the corresponding individual mold 21b to the corresponding individual pressing member 27. The material of the elastic body 25a is the same as the material of the elastic body 15a. The elastic body 25a is filled, for example, between the films 25b and 25c arranged above and below the elastic body 25a.

[0084] The films 25b and 25c prevent the corresponding individual pressure members 27 and the individual protective plates 24 from adhering to the elastic body 25a. The films 25b and 25c also prevent the elastic body 25a from entering the gap between the corresponding accommodating hole 26a and the individual pressure members 27 and the gap between the corresponding accommodating hole 26a and the individual protective plates 24. The films 25b and 25c are shaped like a rectangular film along the XY direction when viewed from the top-bottom direction. In the XY direction, the length of the films 25b and 25c is the same as or slightly longer than the length of the corresponding accommodating hole 26a.

[0085] The support mold 26 supports the individual pressurizing members 27 so as to be movable relative to the support mold 26 in the up-down direction. The support mold 26 is made of, for example, a metal having high rigidity (for example, carbon steel). The shape of the support mold 26 is a rectangular parallelepiped along the XY direction when viewed in the up-down direction. The support mold 26 is disposed below the mold 21 and the support unit 23. The support mold 26 has a plurality of accommodation holes 26a (nine in this embodiment). The support mold 26 is supported by a support member 231.

[0086] The accommodation hole 26a is a through hole that penetrates the support mold 26 in the up-down direction. The accommodation hole 26a has a two-stage rectangular column shape along the XY direction when viewed in the up-down direction. The accommodation hole 26a has an inner flange portion 26b. The lower end of the inner peripheral surface of the accommodation hole 26a protrudes inward around the entire circumference to form the inner flange portion 26b. The shape of the inner flange portion 26b is a rectangular frame shape along the XY direction when viewed in the up-down direction.

[0087] The individual pressure members 27 individually pressurize the corresponding workpieces W from above. The individual pressure members 27 are made of, for example, a metal having high rigidity (for example, carbon steel). The individual pressure members 27 include a main body portion 27a, an outer flange portion 27b, and a lower surface 27p. Each of the individual pressure members 27 is accommodated in a corresponding accommodation hole 26a, and can move (slide) in the up-down direction within the accommodation hole 26a. That is, the individual pressure members 27 can move relative to the support die 26 in the up-down direction.

[0088] The shape of the main body 27a is a rectangular parallelepiped along the XY direction when viewed in the vertical direction. In the XY direction, the length of the main body 27a is smaller than the length of the accommodation hole 26a in the inner flange portion 26b. In the vertical direction, the length of the main body 27a is smaller than the length of the accommodation hole 26a. The upper end of the outer peripheral surface of the main body 27a protrudes outward over the entire circumference to form the outer flange portion 27b. The shape of the outer flange portion 27b is a rectangular frame along the XY direction when viewed in the vertical direction. In the XY direction, the length of the outer flange portion 27b is slightly smaller than the length of the accommodation hole 26a. In the vertical direction, the outer flange portion 27b is disposed so as to face the corresponding inner flange portion 26b.

[0089] When viewed from below, the lower surface 27p of each individual pressure member 27 is partitioned into a plurality of (nine in this embodiment) rectangular regions by the support die 26. When a plurality of workpieces W are pressed, each lower surface 27p faces a corresponding one of the workpieces W and functions as one individual press surface that presses the workpiece W. That is, the lower surface 27p functions as an individual press surface in the present invention.

[0090] The biasing unit 28 biases the individual pressure applying member 27 upward. The biasing unit 28 includes, for example, a plurality of biasing members (for example, coil springs). The biasing unit 28 is accommodated in the corresponding accommodation hole 26a and is disposed between the corresponding inner flange portion 26b and outer flange portion 27b.

[0091] The movement restricting member 29 includes a first movement restricting member 291 and a second movement restricting member 292 .

[0092] The first movement restricting member 291 restricts the downward movement of the support mold 26, and determines the position (height) of the support mold 26 relative to the mounting plate 9 in the vertical direction when the workpiece W is pressed. The first movement restricting member 291 is made of, for example, a known hard insulating material (for example, an insulating material having a compressive strength of several tens of MPa to 100 MPa or more). The shape of the first movement restricting member 291 is a rectangular frame along the XY direction when viewed in the vertical direction. The first movement restricting member 291 is attached to the outer edge of the lower surface of the support mold 26. As a result, the first movement restricting member 291 faces the mounting plate 9. In the vertical direction, the length L29 of the first movement restricting member 291 is greater than the length Lw of the workpiece W.

[0093] The second movement restricting member 292 restricts the upward movement of the individual pressure members 27, the individual pressure pads 25, and the individual protection plates 24 by the biasing units 28. The second movement restricting member 292 has a rectangular plate shape along the XY direction when viewed in the up-down direction. The second movement restricting member 292 is attached to the upper surface of the supporting mold 26. The second movement restricting member 292 has a plurality of (nine in this embodiment) insertion holes 29a.

[0094] The insertion hole 29a is a through hole that penetrates the second movement restricting member 292 in the up-down direction. The shape of the insertion hole 29a is a rectangle along the XY direction when viewed in the up-down direction. When viewed in the up-down direction, the insertion hole 29a is disposed at the same position as the corresponding individual mold 21b and the storage hole 26a. When viewed in the up-down direction, the portion of the second movement restricting member 292 surrounding the insertion hole 29a covers the outer edge of the corresponding storage hole 26a in a rectangular frame shape. In the XY direction, the length of the insertion hole 29a is greater than the length of the corresponding individual mold 21b and less than the length of the corresponding storage hole 26a and the individual protection plate 24.

[0095] When the workpiece W is not pressurized, the biasing unit 28 biases the corresponding individual pressure member 27, individual pressure pad 25, and individual protection plate 24 upward in the accommodation hole 26a. As a result, the individual pressure member 27 is accommodated in the corresponding accommodation hole 26a and does not protrude downward from the support mold 26. In addition, the individual protection plate 24 abuts against the second movement restricting member 292, and the individual pressure member 27, individual pressure pad 25, and individual protection plate 24 do not protrude upward from the accommodation hole 26a. The individual mold 21b is located above the corresponding accommodation hole 26a and insertion hole 29a.

[0096] In the present invention, the upper pressure unit 2 does not necessarily have to include the individual protective plates 24.

[0097] In the present invention, the upper pressurizing unit 2 does not necessarily have to include the second movement restricting member 292.

[0098] Furthermore, in the present invention, the first movement restricting member 291 may be attached to the mounting plate 9.

[0099] Furthermore, in the present invention, the first movement restricting member 291 may be molded integrally with the supporting mold .

[0100] ●Configuration of upper pressure unit (3) FIG. 8 is a schematic cross-sectional view of the upper pressurizing unit 3. As shown in FIG. The figure shows a cross section of the upper pressure unit 3 along the YZ plane, in which the upper pressure unit 3 is cut at the center in the X direction.

[0101] The upper pressurizing unit 3 includes a base 30, a mold 31, and a side unit 32. The upper pressurizing unit 3 is configured to be transportable between the waiting area A4 and the pressurizing area A1.

[0102] The base 30 has a plurality of bolt insertion holes 30a. The configuration of the base 30 is the same as the configuration of the base 10, so a detailed description thereof will be omitted.

[0103] The die 31 has a lower surface 31p. Since the configuration of the die 31 is common to the configuration of the die 11, a detailed description thereof will be omitted. Here, the lower surface 31p faces the workpiece W when the workpiece W is pressed, and functions as a pressing surface that presses the workpiece W. That is, the lower surface 31p functions as a pressing surface in the present invention.

[0104] Side unit 32 includes a first side member 321, a second side member 322, three seal members 323, 324, 325, a cylinder 326, and an exhaust hole 32a. Since the configuration of side unit 32 is the same as the configuration of side unit 12, a detailed description thereof will be omitted.

[0105] In the present invention, the upper pressurizing unit 3 may include a member between the base 30 and the die 31 for controlling the distribution of pressure applied to the workpiece W from the lower surface 31p. Here, the member for controlling the pressure distribution is, for example, an elastic body or a plate-like member having a constricted structure in which the area of ​​a cross section along the XY plane when viewed in the vertical direction is smaller than the surface to be pressed of the workpiece W.

[0106] ●Configuration of upper pressure unit (4) FIG. 9 is a schematic cross-sectional view of the upper pressurizing unit 4. As shown in FIG. The figure shows a cross section of the upper pressurizing unit 4 along the XZ plane, in which the upper pressurizing unit 4 is cut at the center in the Y-axis direction.

[0107] The upper pressurizing unit 4 includes a base 40, a mold 41, a side unit 42, a support unit 43, a frame member 44, a pressurizing pad 45, a support mold 46, a plurality of (nine in this embodiment) individual pressurizing members 47, a plurality of (nine in this embodiment) biasing units 48, and a movement restricting member 49. The upper pressurizing unit 4 is configured to be transportable between the waiting area A5 and the pressurizing area A1.

[0108] The base 40 has a plurality of bolt insertion holes 40a. The configuration of the base 40 is the same as the configuration of the base 10, and therefore a detailed description thereof will be omitted.

[0109] Since the configuration of the mold 41 is common to that of the mold 11, a detailed description thereof will be omitted.

[0110] The side unit 42 includes a first side member 421, a second side member 422, three seal members 423, 424, and 425, a cylinder 426, and an exhaust hole 42a. The configuration of the side unit 42 is the same as that of the side unit 12, and therefore a detailed description thereof will be omitted.

[0111] The support unit 43 includes a support member 431 and a plurality of spring members 432. The configuration of the support unit 43 is common to the configuration of the support unit 13, and therefore a detailed description thereof will be omitted.

[0112] The configuration of frame member 44 is common to that of frame member 14, and therefore a detailed description thereof will be omitted.

[0113] When the workpiece W is pressed, the pressure pad 45 deforms according to the amount of relative movement of the individual pressure members 47 with respect to the support die 46. The pressure pad 45 is disposed above the support die 46 so as to cover the entire surface of a recess 46c (described later) of the support die 46 when viewed from above, and is disposed below the die 41 so as to cover the entire surface of the die 41 when viewed from below. That is, the pressure pad 45 is disposed between the die 41 and the individual pressure members 47. The pressure pad 45 includes an elastic body 45a and two film members 45b, 45c. The configuration of the pressure pad 45 is the same as that of the pressure pad 15, and therefore a detailed description thereof will be omitted.

[0114] The support mold 46 supports the individual pressure members 47 so as to be movable relative to the support mold 46 in the up-down direction. The support mold 46 has a plurality of (nine in this embodiment) accommodation holes 46a, an inner flange portion 46b, and a recess 46c. The configuration of the support mold 46 is the same as that of the support mold 26, except for the recess 46c. Therefore, a detailed description thereof will be omitted. The support mold 46 is disposed below the frame member 44 and the pressure pad 45. The support mold 26 is supported by the frame member 44. In other words, the support mold 26 is (indirectly) supported by the support member 431 via the frame member 44.

[0115] The upper surface of the support mold 46, except for the outer edge, is recessed downward in a rectangular plate shape to form a recess 46c. In the XY direction, the length (width) of the recess 46c is the same as the length (width) of the mold 41 or slightly smaller than the length of the mold 41.

[0116] The individual pressure applying members 47 include a main body portion 47a, an outer flange portion 47b, and a lower surface 47p. Each individual pressure applying member 47 is accommodated in a corresponding accommodation hole 46a. The configuration of the individual pressure applying members 47 is the same as that of the individual pressure applying members 27, and therefore a detailed description thereof will be omitted. Here, when a plurality of workpieces W are pressed, the lower surface 47p faces the corresponding one workpiece W and functions as one individual pressing surface that presses the workpiece W. That is, the lower surface 47p functions as an individual pressing surface in the present invention.

[0117] The urging units 48 are housed in the corresponding housing holes 46a. The configuration of the urging units 48 is the same as the configuration of the urging units 28, and therefore a detailed description thereof will be omitted.

[0118] The movement restricting member 49 restricts the downward movement of the support mold 46, and determines the position (height) of the support mold 46 relative to the mounting plate 9 in the vertical direction when the workpiece W is pressed. The shape of the movement restricting member 49 is a rectangular lattice along the XY direction when viewed in the vertical direction. The movement restricting member 49 is attached to a portion of the lower surface of the support mold 46 where the accommodation holes 46a are not located. In the vertical direction, the length of the movement restricting member 49 is greater than the length of the workpiece W.

[0119] When the workpiece W is not being pressurized, the individual pressing members 47, like the individual pressing members 27, are accommodated in the corresponding accommodation holes 46a and do not protrude downward from the support die 46.

[0120] ●Operation of the pressurization system● Next, the operation of the pressurizing system S will be described below by taking as examples first to fourth operations using the upper pressurizing units 1 to 4. In the following description, Figs. 1 to 3 will be referred to as appropriate.

[0121] ●First action The "first operation" is an operation in which the workpiece W is pressurized by the upper pressurizing unit 1. In the following description, the first operation will be described using as an example a case in which the workpiece W is rapidly heated and rapidly cooled. In the following description of the first operation, FIG. 4 will be referred to as appropriate. In the first operation, one or more workpieces W are placed on the mounting plate 9. The mounting plate 9 is placed on the lower cooling unit 61. The temperature of the lower cooling unit 61 is maintained at a predetermined temperature (e.g., about 20°C) by the cooling source C3. Meanwhile, in the upper heating unit 51, the heating source H1 and the cooling source C1 are not operating, and the temperature of the upper heating unit 51 is at room temperature.

[0122] In the present invention, when the workpiece W is rapidly heated and rapidly cooled, the cooling source C3 is not operating in the lower cooling unit 61 in the initial state, and the temperature of the lower cooling unit 61 may be room temperature.

[0123] FIG. 10 is a schematic plan view of the pressurizing system S, showing a state in which the upper pressurizing unit 1 is transported to the pressurizing area A1 in the first operation. FIG. 11 is a schematic cross-sectional view of the pressurizing system S, showing the state of FIG. For convenience of explanation, Fig. 10 shows only a part of the configuration of the pressurizing system S (the same applies to Figs. 17, 22, and 27). Fig. 11 shows a cross section of the pressurizing system S taken along line AA in Fig. 2 (the same applies to Figs. 13 to 15 and 23 to 25).

[0124] First, the upper pressurizing unit 1 is attached to the upper heat unit 51. Specifically, the upper pressurizing unit 1 is transported from the waiting area A2 to the pressurizing area A1. At this time, the upper pressurizing units 2 to 4 are arranged in the corresponding waiting areas A3 to A5. The upper pressurizing unit 1 is positioned at a predetermined position in the pressurizing area A1, for example, by a stopper (not shown) that abuts against the upper pressurizing unit 1. Next, the upper pressurizing unit 1 is attached to the upper heat unit 51 by the mounting bolts Bo. Next, the pump P is connected to the exhaust hole 12a.

[0125] In the present invention, when the rail R12 interferes with the upper pressurizing unit 1 being transported, the rail R12 may be removed.

[0126] Figure 12(a) is a partially enlarged schematic cross-sectional view of the pressurization system S, showing the state before the upper pressurization unit 1 is attached to the upper heat unit 51, and (b) is a partially enlarged schematic cross-sectional view of the pressurization system S, showing the state after the upper pressurization unit 1 is attached to the upper heat unit 51.

[0127] As shown in FIG. 1(a), when the upper pressurizing unit 1 is transported to the pressurizing area A1, the upper pressurizing unit 1 is disposed below the upper heat unit 51 and spaced apart from the upper heat unit 51. Next, as shown in FIG. 1(b), when the upper pressurizing unit 1 is attached to the upper heat unit 51 by the attachment bolt Bo, the roller Ro (upper pressurizing unit 1) is spaced upward from the rails R9, R10. Here, the attachment bolt Bo is inserted into the bolt insertion hole 10a and fitted into the female screw hole 51c. At this time, the base 10 (upper pressurizing unit 1) is (indirectly) fixed to the lifting device 52 via the upper heat unit 51.

[0128] Next, the upper pressurizing unit 1 and the mounting plate 9 form the chamber unit CU1.

[0129] FIG. 13 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the chamber unit CU1 is assembled.

[0130] First, the lower heating unit transport device 62 transports the lower heating unit 60 from the heat treatment position (pressurizing area A1) to the standby position (standby area A4), and transports the lower cooling unit 61 from the standby position (standby area A2) to the heat treatment position. At this time, the upper pressurizing unit 1 is disposed above the workpiece W. Here, the temperature of the lower heating unit 60 is maintained in advance at a predetermined temperature (for example, about 300°C) by the heat source H2.

[0131] Next, the lifting device 52 lowers the upper base 50 until the seal member 125 abuts against the mounting plate 9. At this time, a storage chamber Ra1 is formed between the upper pressurizing unit 1 and the mounting plate 9, and the workpiece W is stored in the storage chamber Ra1.

[0132] Next, the control device 8 operates the pump P to reduce the pressure inside the accommodation chamber Ra1. As a result, the mounting plate 9 is attached to the second side member 122 by the vacuum pressure. At this time, the pressure pad 15 deforms according to the shape of the surface of the workpiece W, and the workpiece W is held by the mounting plate 9 and the pressure pad 15. In this way, by attaching the mounting plate 9 to the upper pressure unit 1, the chamber unit CU1 is assembled, and the workpiece W is accommodated in the chamber unit CU1.

[0133] Next, the workpiece W is rapidly heated and pressurized.

[0134] FIG. 14 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the workpiece W is pressed.

[0135] First, the lifting device 52 lifts the upper base 50 until the chamber unit CU1 is separated from the lower cooling unit 61. Next, the lower heating unit transport device 62 transports the lower heating unit 60 from the standby position to the heat treatment position, and transports the lower cooling unit 61 from the heat treatment position to the standby position. Next, the lifting device 52 lowers the upper base 50 until the mounting plate 9 abuts against the lower heating unit 60. At this time, the workpiece W is rapidly heated by the lower heating unit 60 to a predetermined temperature (for example, about 300°C).

[0136] Next, the lifting device 52 lowers the upper base 50 until a specified pressure (for example, 10 MPa to 20 MPa, hereinafter referred to as "specified pressure") is applied to the workpiece W. At this time, the mold 11 descends relative to the frame member 14. As a result, the mold 11 presses the pressure pad 15 downward, and the pressure pad 15 deforms to follow the shape of the surface of the workpiece W, uniformly pressurizing the workpiece W. As a result, the workpiece W is uniformly pressurized from all directions (multiple directions). Pressurization of the workpiece W can be performed during or after the temperature of the workpiece W is raised.

[0137] Here, when the upper base 50 descends, the rails R9, R10 descend together with the upper base 50. As described above, the roller Ro is separated from the rails R9, R10. Therefore, when the workpiece W is pressurized, the roller Ro does not pressurize the rails R9, R10, and no mechanical load is applied to the roller Ro and the rails R9, R10.

[0138] Next, after a predetermined time has elapsed, the lifting device 52 raises the upper base 50 to finish applying pressure to the workpiece W. Next, the workpiece W is cooled.

[0139] FIG. 15 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the workpiece W has been cooled.

[0140] First, the lifting device 52 lifts the upper base 50 until the chamber unit CU1 is separated from the lower heating unit 60. Next, the lower heating unit transport device 62 transports the lower heating unit 60 from the heat treatment position to the standby position, and transports the lower cooling unit 61 from the standby position to the heat treatment position. Next, the lifting device 52 lowers the upper base 50 until the mounting plate 9 abuts against the lower cooling unit 61. At this time, the workpiece W is rapidly cooled to a predetermined temperature (for example, about 50°C) by the lower cooling unit 61.

[0141] Next, the control device 8 stops the pump P and purges the accommodation chamber Ra1 with inert gas. Next, the lifting device 52 lifts the upper base 50. At this time, the workpiece W is removed from the chamber unit CU1. Next, the mounting bolts Bo are removed, and the upper pressurizing unit 1 is removed from the upper heating unit 51. Next, the upper pressurizing unit 1 is transported from the pressurizing area A1 to the waiting area A2.

[0142] FIG. 16 is a graph showing an example of a temperature profile for rapid heating and rapid cooling of the workpiece W.

[0143] As described above, the lower heating unit 60 and the lower cooling unit 61 are transported between the standby position and the heat treatment position, and the chamber unit CU1 is raised and lowered. As a result, as shown in the figure, the workpiece W is rapidly heated from room temperature to about 300°C in about 3 minutes, and rapidly cooled from about 300°C to about 100°C or less in about 1 minute. That is, in the pressurizing system S, the lower heating unit 60 and the lower cooling unit 61 are used, and the chamber unit CU1 is formed, so that the workpiece W can be rapidly heated and rapidly cooled.

[0144] Thus, in the pressurizing process using the upper pressurizing unit 1, the upper pressurizing unit 1 moves relative to the workpiece W in the pressurizing area A1 to perform the pressurizing process on the workpiece W. As a result, the workpiece W is evenly pressed from all directions (multi-directions) by the pressurizing pad 15 which deforms to follow the shape of the surface of the workpiece W. Also, in this pressurizing process, multiple workpieces W are pressed collectively by one press surface (lower surface 15p). That is, the pressurizing method in this pressurizing process is a combination of the pseudo-isotropic pressure method and the collective pressurizing method.

[0145] ●Second operation The "second operation" is an operation in which the workpiece W is pressurized by the upper pressurizing unit 2. In the following explanation, the second operation will be explained mainly with reference to the difference from the first operation, taking as an example the case where the workpiece W is heated at a constant temperature. In the following explanation of the second operation, Figs. 4 to 7 will be referred to as appropriate. In the second operation, multiple workpieces W (in this embodiment, nine workpieces) are placed on the placement plate 9.

[0146] In the present invention, the number of workpieces W pressed in the second operation may be equal to or less than the number of individual press surfaces of the upper press unit 2, and is not limited to nine (the same number as the number of individual press surfaces).

[0147] FIG. 17 is a schematic plan view of the pressurizing system S, showing a state in which the upper pressurizing unit 2 is transported to the pressurizing area A1 in the second operation. FIG. 18 is a schematic cross-sectional view of the pressurizing system S, showing the state of FIG. FIG. 18 shows a cross section of the pressurizing system S taken along line BB in FIG. 2 (the same applies to FIGS. 19, 20, 28 to 30).

[0148] First, as in the first operation, the upper pressurizing unit 2 is transported to the pressurizing area A1 and attached to the upper heating unit 51. At this time, the upper pressurizing units 1, 3, and 4 are arranged in the corresponding waiting areas A2, A4, and A5. The mounting bolts Bo are inserted into the bolt insertion holes 20a and fitted into the female thread holes 51c. At this time, the upper heating unit 51 is maintained at a predetermined temperature (for example, about 180°C) in advance by the heat source H1. Next, the mounting plate 9 on which the workpiece W is placed is placed on the lower heating unit 60. At this time, the temperature of the lower heating unit 60 is maintained at a predetermined temperature (for example, about 180°C) in advance by the heat source H2. Therefore, the workpiece W is rapidly heated to the predetermined temperature.

[0149] In the present invention, from the viewpoint of user safety, the upper heating unit 51 may be heated to a predetermined temperature after the upper pressurizing unit 2 is attached.

[0150] Next, in the same manner as in the first operation, the upper pressurizing unit 2 and the mounting plate 9 are assembled into the chamber unit CU2.

[0151] Next, the lifting device 52 lowers the upper base 50 until the first movement restricting member 291 abuts against the mounting plate 9.

[0152] FIG. 19 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the first movement restricting member 291 is in contact with the mounting plate 9. As shown in FIG.

[0153] When the first movement restricting member 291 abuts against the mounting plate 9, the first movement restricting member 291 is sandwiched between the support mold 26 and the mounting plate 9. At this time, a downward pressure is applied from the support mold 26 to the first movement restricting member 291. In addition, a frictional force that prevents the horizontal movement of the support mold 26 relative to the mounting plate 9 due to the pressure is generated between the first movement restricting member 291 and the mounting plate 9. As a result, the support mold 26 does not slide horizontally relative to the mounting plate 9. Furthermore, the position of the support mold 26 relative to the mounting plate 9 (workpiece W) is fixed in the vertical direction. In this state, the support mold 26 and the individual pressure applying member 27 (lower surface 27p) do not come into contact with the workpiece W. Therefore, malfunctions caused by these contacts with the workpiece W (such as movement of the workpiece W or unintended pressure on the workpiece W) do not occur.

[0154] Next, the workpiece W is pressurized.

[0155] FIG. 20 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the workpiece W is pressed.

[0156] Next, the lifting device 52 lowers the upper base 50 until each of the individual pressure members 27 abuts against the corresponding workpiece W. At this time, the individual mold 21b is inserted into the corresponding insertion hole 29a and abuts against the corresponding individual protective plate 24. In addition, the support member 231 and the support mold 26 move upward relative to the mold 21. Next, the individual mold 21b presses the corresponding individual protective plate 24 downward. At this time, the individual mold 21b, the individual pressure member 27, the individual pressure pad 25, and the individual protective plate 24 move downward (slide) in the accommodation hole 26a against the biasing force of the biasing unit 28. That is, the individual mold 21b, the individual pressure member 27, the individual pressure pad 25, and the individual protective plate 24 move downward relative to the support mold 26. As a result, the individual pressure member 27 protrudes from the accommodation hole 26a toward the corresponding workpiece W and abuts against the portion (upper end) of the corresponding workpiece W that needs to be pressed.

[0157] Next, the lifting device 52 lowers the upper base 50 until a specified pressure (for example, 10 MPa to 30 MPa) is applied to the workpiece W.

[0158] In this state, the individual pressure pad 25 is deformed according to the relative movement amount of the corresponding individual pressure member 27. As a result, the specified pressure from the corresponding individual mold 21b is evenly transmitted to the corresponding individual pressure member 27. As described above, the elastic body 25a is sandwiched between the two films 25b and 25c. Therefore, the elastic body 25a does not penetrate into the gap between the accommodation hole 26a and the individual pressure member 27 and the individual protective plate 24. In addition, the elastic body 25a absorbs the difference in the relative movement amount of the corresponding individual pressure member 27. As described above, the elastic body 25a is made of a gel sheet, so it can absorb a difference on the order of several hundred μ. Therefore, the specified pressure from the individual mold 21b is evenly transmitted to all the workpieces W.

[0159] As described above, the individual pressure members 27 contact only the upper ends of the corresponding workpieces W, and apply pressure to only the upper ends downward (in one axial direction). Therefore, even if a part of the workpiece W protrudes horizontally, the part is not pressurized, and defects such as cracking or chipping do not occur in the part. In this way, the pressure system S can use the upper pressure unit 2 to collectively apply pressure to only the parts of each of the multiple workpieces W that require pressure.

[0160] When the workpiece W is pressurized, each coil spring constituting the biasing unit 28 is not completely compressed. Therefore, the specified pressure transmitted to the individual pressurizing members 27 is transmitted to the workpiece W, and is not transmitted to the supporting die 26. Also, as described above, when the workpiece W is pressurized, the supporting member 231 and the supporting die 26 move upward relative to the die 31. Therefore, the specified pressure from the die 31 is transmitted intensively to the individual pressurizing members 27, and is not transmitted to the supporting die 26. Therefore, in the upper pressurizing unit 2, the pressure from the lifting device 52 required to pressurize the workpiece W is reduced (for example, about 1 / 4) compared to the upper pressurizing unit 4 described later. Also, the pressure resistance required of the supporting die 26 is smaller compared to the case where the upper surface of the supporting die 26 is pressurized. Therefore, the thickness of the supporting die 26 can be reduced, and the weight of the supporting die 26 can be reduced.

[0161] Next, after a predetermined time has elapsed, the lifting device 52 lifts the upper base 50 to finish pressurizing the workpiece W. Next, the control device 8 purges the accommodation chamber Ra2 with inert gas. Next, the lifting device 52 lifts the upper base 50. Next, the mounting bolts Bo are removed, and the upper pressurizing unit 2 is removed from the upper heating unit 51. Next, the upper pressurizing unit 2 is transported from the pressurizing area A1 to the waiting area A3.

[0162] FIG. 21 is a graph showing an example of a temperature profile of the constant temperature heating of the workpiece W.

[0163] As described above, before the workpiece W is pressurized, the workpiece W is heated by the upper heating unit 51 and the lower heating unit 60, which have been heated to a predetermined temperature in advance. As a result, the temperature of the workpiece W is maintained at a predetermined temperature before pressurization. In addition, forced cooling of the workpiece W using the cooling sources C1, C2 is not performed. Therefore, the temperature of the workpiece W after pressurization is less likely to decrease, and the time required for pressurization of the workpiece W is shortened. In other words, in the pressurization system S, the upper heating unit 51 and the lower heating unit 60, which have been heated in advance, are used, and forced cooling of the workpiece W is not performed, so that constant temperature pressurization of the workpiece W can be performed.

[0164] Thus, in the pressurizing process using the upper pressurizing unit 2, the upper pressurizing unit 2 moves relative to the workpiece W in the pressurizing area A1 to perform the pressurizing process on the workpiece W. As a result, the workpiece W is pressurized from above and below (in one axial direction) by the metallic individual pressurizing members 27. In addition, in this pressurizing process, each of the multiple workpieces W is (collectively) pressed by its corresponding individual press surface (lower surface 27p). In other words, the pressurizing method in this pressurizing process is a combination of the one-axis pressurizing method and the individual pressurizing method.

[0165] In the present invention, when the workpiece W is heated at a constant temperature, the upper heating unit 51 does not have to be heated.

[0166] In addition, in the present invention, when the workpiece W is heated to a constant temperature, the lower heating unit 60 may support the mounting plate 9 in a floating manner, for example, by a plurality of springs. In this case, the main body 60a may have, for example, a plurality of holes in which the springs are disposed. In this configuration, when the chamber unit CU2 is assembled, the mounting plate 9 is pressed downward by the upper pressurizing unit 2 and abuts against the lower heating unit 60, whereby the workpiece W is rapidly heated.

[0167] ●Third action The "third operation" is an operation in which the workpiece W is pressurized by the upper pressurizing unit 3. In the following explanation, the third operation will be explained mainly with respect to the differences from the first and second operations, taking as an example the case in which the workpiece W is slowly heated and slowly cooled. In the following explanation of the third operation, FIG. 8 will be referred to as appropriate. In the third operation, one workpiece W is placed on the placement plate 9. When the workpiece W is slowly heated and slowly cooled, the placement plate 9 is placed on the lower heating unit 60. In the upper heating unit 51 and the lower heating unit 60, the heating sources H1, H2 and the cooling sources C1, C2 are not operating, and the temperatures of the upper heating unit 51 and the lower heating unit 60 are room temperature.

[0168] In the present invention, the number of workpieces W to be pressed in the third action may be more than one, so long as the workpieces W have the same thickness.

[0169] FIG. 22 is a schematic plan view of the pressurizing system S, showing a state in which the upper pressurizing unit 3 is transported to the pressurizing area A1 in the third operation. FIG. 23 is a schematic cross-sectional view of the pressurizing system S, showing the state of FIG.

[0170] First, as in the first operation, the upper pressurizing unit 3 is transported to the pressurizing area A1 and attached to the upper heating unit 51. At this time, the upper pressurizing units 1, 2, and 4 are arranged in the corresponding waiting areas A2, A3, and A5. The mounting bolts Bo are inserted into the bolt insertion holes 30a and fitted into the female thread holes 51c. Next, the mounting plate 9 on which the workpiece W is placed is placed on the lower heating unit 60. At this time, the temperature of the workpiece W is room temperature.

[0171] Next, in the same manner as in the first operation, the upper pressurizing unit 3 and the mounting plate 9 are assembled into the chamber unit CU3 (see FIG. 24).

[0172] FIG. 24 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the chamber unit CU3 is assembled.

[0173] When the chamber unit CU3 is assembled, the workpiece W is accommodated in the chamber unit CU3 (accommodation room Ra3). At this time, the mold 31 is in contact with the workpiece W to the extent that it does not apply pressure to the workpiece W (pressure that is sufficiently smaller than the specified pressure).

[0174] Next, the control device 8 controls the operation of the heat sources H1, H2 to heat the upper heating unit 51 and the lower heating unit 60 to a preheating temperature (e.g., about 150°C). As a result, the workpiece W is slowly heated to the preheating temperature together with the upper heating unit 51 and the lower heating unit 60. Next, after a predetermined time has elapsed, the control device 8 controls the operation of the heat sources H1, H2 to heat the upper heating unit 51 and the lower heating unit 60 to a main heating temperature (e.g., about 300°C). As a result, the workpiece W is slowly heated to the main heating temperature together with the upper heating unit 51 and the lower heating unit 60.

[0175] Next, the lifting device 52 lowers the upper base 50 until a specified pressure (for example, 20 MPa to 30 MPa) is applied to the workpiece W. At this time, the die 31 presses the workpiece W downward evenly.

[0176] Next, after a predetermined time has elapsed, the lifting device 52 raises the upper base 50 to finish applying pressure to the workpiece W. Next, the control device 8 stops the operation of the heating sources H1, H2 and starts the operation of the cooling sources C1, C2 to cool the upper heating unit 51 and the lower heating unit 60.

[0177] FIG. 25 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the workpiece W has been cooled.

[0178] The heat capacity of the main bodies 51a and 61a is large. Therefore, the upper heating unit 51 and the lower heating unit 60 are cooled slowly. As a result, the workpiece W, together with the upper heating unit 51 and the lower heating unit 60, is cooled slowly to a temperature at which the workpiece W can be removed.

[0179] Next, the control device 8 purges the inside of the accommodation chamber Ra3 with an inert gas. Next, the lifting device 52 lifts the upper pressurizing unit 3. Next, the mounting bolts Bo are removed, and the upper pressurizing unit 3 is removed from the upper heating unit 51. Next, the upper pressurizing unit 3 is transported from the pressurizing area A1 to the waiting area A4.

[0180] FIG. 26 is a graph showing an example of a temperature profile for slow heating and slow cooling of the workpiece W.

[0181] As described above, the workpiece W is slowly heated together with the upper heating unit 51 and the lower heating unit 60, and slowly cooled together with the upper heating unit 51 and the lower heating unit 60. That is, in the pressurizing system S, the workpiece W is heated and cooled together with the upper heating unit 51 and the lower heating unit 60, so that slow heating and slow cooling of the workpiece W can be performed.

[0182] Thus, in the pressurizing process using the upper pressurizing unit 3, the upper pressurizing unit 3 moves relative to the workpiece W in the pressurizing area A1 to perform the pressurizing process on the workpiece W. As a result, the workpiece W is evenly pressed from above and below (in one axial direction) by the metal press surface (lower surface 31p). In addition, in this pressurizing process, multiple workpieces W can be pressed collectively by one press surface (lower surface 31p). In other words, the pressurizing method in this pressurizing process is a combination of the uniaxial pressurizing method and the batch pressurizing method.

[0183] ●Fourth action The "fourth operation" is an operation in which the workpiece W is pressurized by the upper pressurizing unit 4. In the following explanation, the fourth operation will be explained mainly with respect to the differences from the first to third operations, taking as an example a case in which the workpiece W is neither heated nor cooled. In the fourth operation explained below, FIG. 9 will be referred to as appropriate. In the fourth operation, multiple (nine in this embodiment) workpieces W are placed on the placement plate 9. In the upper heating unit 51 and the lower heating unit 60, the heating sources H1, H2 and the cooling sources C1, C2 are not operating, and the temperatures of the upper heating unit 51 and the lower heating unit 60 are room temperature.

[0184] FIG. 27 is a schematic plan view of the pressurizing system S, showing a state in which the upper pressurizing unit 4 has been transported to the pressurizing area A1 in the fourth operation. FIG. 28 is a schematic cross-sectional view of the pressurizing system S, showing the state of FIG.

[0185] First, as in the first operation, the upper pressurizing unit 4 is transported to the pressurizing area A1 and attached to the upper heating unit 51. At this time, the upper pressurizing units 1 to 3 are arranged in the corresponding waiting areas A2 to A4. The mounting bolts Bo are inserted into the bolt insertion holes 40a and fitted into the female thread holes 51c. Next, the mounting plate 9 on which the workpiece W is placed is placed on the lower heating unit 60. At this time, the temperature of the workpiece W is room temperature.

[0186] Next, similar to the first operation, the chamber unit CU4 (see FIG. 29) is assembled by the upper pressurizing unit 4 and the mounting plate 9. Next, similar to the second operation, the upper base 50 is lowered until the movement restricting member 49 abuts against the mounting plate 9.

[0187] FIG. 29 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the movement restricting member 49 is in contact with the mounting plate 9. As shown in FIG.

[0188] When the movement restricting member 49 abuts against the mounting plate 9, similar to the second operation, the supporting die 46 does not slide horizontally relative to the mounting plate 9. Furthermore, the position of the supporting die 46 relative to the mounting plate 9 (workpiece W) in the vertical direction is fixed. In this state, the supporting die 46 and the individual pressure members 47 (lower surfaces 47p) do not come into contact with the workpiece W. Therefore, no defects resulting from these contacts with the workpiece W occur.

[0189] Next, the workpiece W is pressurized.

[0190] FIG. 30 is a schematic cross-sectional view of the pressurizing system S, showing a state in which the workpiece W is pressed.

[0191] The lifting device 52 lowers the upper base 50 until each of the individual pressure members 47 abuts against the corresponding workpiece W. At this time, the mold 41 enters the internal space of the frame member 44 while pressing the pressure pad 45 downward. In addition, the support member 431 and the frame member 44 move upward relative to the mold 41 in response to the descent of the mold 41. As a result, the pressure pad 45 enters the recess 46c and the accommodation hole 46a while deforming in accordance with the shapes of the recess 46c and the accommodation hole 46a, and pushes the individual pressure member 47 downward. At this time, the individual pressure member 47 moves downward relative to the support mold 46, similar to the second operation. As a result, the individual pressure member 47 protrudes from the accommodation hole 46a toward the corresponding workpiece W and abuts against the portion (upper end) of the corresponding workpiece W that needs to be pressed.

[0192] Next, the lifting device 52 lowers the upper base 50 until a specified pressure (for example, 10 MPa to 30 MPa) is applied to the corresponding workpiece W by each individual pressure member 47.

[0193] In this state, the pressure pad 45 is deformed according to the relative movement amount of the corresponding individual pressure member 47. As a result, the specified pressure from the die 41 is evenly transmitted to each individual pressure member 47. Also, similar to the second operation, the elastic body 45a absorbs the difference in the relative movement amount of each individual pressure member 47. Therefore, the specified pressure from the die 41 is evenly transmitted to all the workpieces W.

[0194] As described above, the individual pressure members 47 contact only the upper ends of the corresponding workpieces W and press only the upper ends downward (in one axial direction). Therefore, the pressurizing system S can collectively pressurize only the portions of each of the multiple workpieces W that require pressurization, using the individual pressure members 47 that move relatively to the support die 46.

[0195] As described above, the pressure pad 45 is disposed above the supporting die 46. Therefore, the supporting die 46 is pressed with a specified pressure from the die 41 via the elastic body 45a. The movement restricting member 49 is disposed in a lattice shape between the lower surface of the supporting die 46 and the mounting plate 9, and supports the supporting die 46 which is pressed with a specified pressure. Therefore, the supporting die 46 does not deform even when the specified pressure is applied.

[0196] Next, after a predetermined time has elapsed, the lifting device 52 lifts the upper base 50 to finish pressurizing the workpiece W. Next, the control device 8 purges the inside of the accommodation chamber Ra4 with inert gas. Next, the lifting device 52 lifts the upper pressurizing unit 4. Next, the mounting bolts Bo are removed, and the upper pressurizing unit 4 is removed from the upper heating unit 51. Next, the upper pressurizing unit 4 is transported from the pressurizing area A1 to the waiting area A5.

[0197] Thus, in the pressurizing process using the upper pressurizing unit 4, the upper pressurizing unit 4 moves relative to the workpiece W in the pressurizing area A1 to perform the pressurizing process on the workpiece W. As a result, the workpiece W is evenly pressed from above and below (in one axial direction) by the metal press surface (lower surface 47p). In addition, in this pressurizing process, each of the multiple workpieces W can be pressed (collectively) by its corresponding individual press surface (lower surface 47p). In other words, the pressurizing method in this pressurizing process is a combination of the uniaxial pressurizing method and the individual pressurizing method.

[0198] Summary According to the embodiment described above, the pressurizing system S includes the upper pressurizing units 1-4, the pressurizing area A1, the waiting areas A2-A5, and the rails R1-R12. When viewed in the vertical direction, the waiting areas A2-A5 are arranged adjacent to the pressurizing area A1 on the side of the pressurizing area A1. When the workpiece W is pressurized, one upper pressurizing unit 1 among the upper pressurizing units 1-4 is arranged in the pressurizing area A1 and can move relative to the workpiece W in the vertical direction. The remaining upper pressurizing units 2-4 are arranged in the corresponding waiting areas A3-A5. Each of the upper pressurizing units 1-4 is configured to be able to perform a pressurizing process on the workpiece W using a different pressurizing method. According to this configuration, the user can select an appropriate pressurizing method according to the workpiece W by selecting the upper pressurizing units 1-4 to be transported to the pressurizing area A1. Also, only the selected upper pressurizing units 1-4 are transported to one pressurizing area A1, and the workpiece W is pressurized only by the pressurizing device 5 arranged in the pressurizing area A1. That is, the pressurizing system S can pressurize the workpiece W by a plurality of pressurizing methods using only a single pressurizing device 5. Therefore, the pressurizing system S is smaller and lighter than a pressurizing system equipped with a plurality of pressurizing devices, even though the pressurizing system S can select from a plurality of pressurizing methods.

[0199] Furthermore, according to the embodiment described above, the pressurizing method includes a quasi-isotropic pressure method in which pressure is applied from multiple directions to the workpiece W, and a uniaxial pressure method in which pressure is applied only from above and below the workpiece W. With this configuration, the user can select either the quasi-isotropic pressure method or the uniaxial pressure method depending on the workpiece W.

[0200] Furthermore, according to the embodiment described above, the pressurizing method includes a batch pressurizing method in which multiple workpieces W are collectively pressurized with one lower surface 15p, 31p, and an individual pressurizing method in which multiple partitioned lower surfaces 27p, 47p are individually pressurized with respect to each of the multiple workpieces W. According to this configuration, the user can select either the batch pressurizing method or the individual pressurizing method according to the workpiece W.

[0201] Furthermore, according to the embodiment described above, the upper pressurizing unit 1 that pressurizes the workpiece W by the pseudo-isotropic pressure method includes a mold 11, a frame member 14, and a pressurizing pad 15. When the workpiece W is pressed, the mold 11 presses the pressurizing pad 15 toward the workpiece W. The frame member 14 holds the pressurizing pad 15. The pressurizing pad 15 includes an elastic body 15a that deforms to follow the shape of the surface of the workpiece W when the workpiece W is pressed. According to this configuration, the upper pressurizing unit 1 includes a configuration necessary for performing pressurizing processing by the pseudo-isotropic pressure method. Therefore, the user can easily select the pseudo-isotropic pressure method by selecting the upper pressurizing unit 1 and transporting the upper pressurizing unit 1 to the pressurizing area A1.

[0202] Furthermore, according to the embodiment described above, the upper pressurizing units 2-4 that pressurize the workpiece W by the uniaxial pressurizing method are made of metal and have planar lower surfaces 27p, 31p, 47p. The lower surfaces 27p, 31p, 47p are directed toward the workpiece W when the workpiece W is pressed. With this configuration, the user can easily select the uniaxial pressurizing method by selecting the upper pressurizing units 2-4 and transporting them to the pressurizing area A1. Furthermore, the user can collectively pressurize multiple workpieces W of the same thickness or multiple workpieces W of different thicknesses while ensuring the flatness of the upper surface Wa of the workpiece W after pressing.

[0203] Furthermore, according to the embodiment described above, the upper pressurizing unit 4, which pressurizes the workpiece W by the individual pressurizing method, includes a mold 41, a frame member 44, a pressurizing pad 45, a support mold 46, and an individual pressurizing member 47. The mold 41 presses the individual pressurizing member 47 toward the workpiece W. The frame member 44 holds the pressurizing pad 45. The frame member 44 is disposed on the side of the mold 41 when viewed in the vertical direction, and is relatively movable in the vertical direction with respect to the mold 41. The pressurizing pad 45 is disposed between the mold 41 and the individual pressurizing member 47, and covers the entire surface of the mold 41 when viewed in the downward direction. The pressurizing pad 45 deforms according to the relative movement amount of each of the individual pressurizing members 47 with respect to the support mold 46. The support mold 46 supports the individual pressurizing member 47, is disposed below the frame member 44 and the pressurizing pad 45, and is supported by the frame member 44. The individual pressurizing member 47 is capable of individually pressing each of the multiple workpieces W, and has a lower surface 47p. The individual pressurizing members 47 are movable in the vertical direction relative to the support die 46. When the workpiece W is pressed, the individual pressurizing members 47 protrude from the support die 46 toward the corresponding workpiece W. With this configuration, the upper pressurizing unit 4 has a configuration necessary for performing a pressurizing process using a method that combines the uniaxial pressurizing method and the individual pressurizing method. Therefore, the user can easily select the method that combines the uniaxial pressurizing method and the individual pressurizing method by selecting the upper pressurizing unit 4 and transporting the upper pressurizing unit 4 to the pressurizing area A1.

[0204] Furthermore, according to the embodiment described above, the upper pressurizing unit 2, which pressurizes the workpiece W by the individual pressurizing method, includes the mold 21, the support member 231, the support mold 26, the individual pressurizing member 27, and the individual pressurizing pad 25. The mold 21 presses the individual pressurizing member 27 toward the workpiece W. The support member 231 is disposed on the side of the mold 21 when viewed in the vertical direction, and supports the support mold 26. The support mold 26 supports the individual pressurizing member 27. The individual pressurizing member 27 can pressurize each of the multiple works W individually, and has a lower surface 27p. The individual pressurizing member 27 can move relatively in the vertical direction with respect to the support mold 26. When the workpiece W is pressed, the individual pressurizing member 27 protrudes from the support mold 26 toward the corresponding workpiece W. The individual pressurizing pad 25 is disposed between the mold 21 and the individual pressurizing member 27, and deforms according to the relative movement amount of each individual pressurizing member 27 with respect to the support mold 26. According to this configuration, the upper pressurizing unit 2 has a necessary configuration for performing a pressurizing process by a method in which the uniaxial pressurizing method and the individual pressurizing method are combined. Therefore, a user can easily select the method in which the uniaxial pressurizing method and the individual pressurizing method are combined by selecting the upper pressurizing unit 2 and transporting the upper pressurizing unit 2 to the pressurizing area A1.

[0205] Furthermore, according to the embodiment described above, the pressurizing system S includes the upper heat unit 51, the lower heating unit 60, and the lower cooling unit 61. The upper heat unit 51 and the lower heating unit 60 can heat and cool the workpiece W. The lower cooling unit 61 can cool the workpiece W. The upper heat unit 51, the lower heating unit 60, and the lower cooling unit 61 include main body parts 51a, 60a, 61a, heating sources H1, H2, and cooling sources C1 to C3. The heating sources H1, H2 are included in the main body parts 51a, 60a, and heat the main body parts 51a, 60a. The cooling sources C1 to C3 are included in the main body parts 51a, 60a, and 61a, and cool the main body parts 51a, 60a, and 61a. According to this configuration, the user can combine different heating and cooling methods into a pressurizing method by combining these heat units and their operations.

[0206] Furthermore, according to the embodiment described above, the pressurizing system S includes the waiting areas A2, A4, the lifting device 52, the lower heating unit transport device 62, and the mounting plate 9. When viewed in the vertical direction, the waiting areas A2, A4 are disposed on the sides of the pressurizing area A1. The lifting device 52 lifts and lowers the upper pressurizing units 1-4 transported to the pressurizing area A1. The lower heating unit transport device 62 transports the lower heating unit 60 and the lower cooling unit 61 back and forth between the waiting areas A2, A4 and the pressurizing area A1. The upper pressurizing units 1-4 form the chamber units CU1-CU4 together with the mounting plate 9 in the pressurizing area A1. The lifting device 52 lifts the chamber units CU1-CU4 when the lower heating unit 60 and the lower cooling unit 61 are transported. When the lower heating unit 60 or the lower cooling unit 61 is transported to the pressurizing area A1, the lifting device 52 lowers the chamber units CU1-CU4 to bring the chamber units CU1-CU4 into contact with the lower heating unit 60 or the lower cooling unit 61 transported to the pressurizing area A1. According to this configuration, the user can combine the rapid heating and / or rapid cooling of the workpiece W with the pressurizing method.

[0207] Furthermore, according to the embodiment described above, the pressurizing system S includes a lifting device 52. The lifting device 52 is disposed in the pressurizing area A1 and lifts and lowers the upper pressurizing units 1 to 4 transported to the pressurizing area A1. The rails R1 to R12 include rails R9 to R12. The rails R9 to R12 are disposed in the pressurizing area A1 and are (indirectly) attached to the lifting device 52 via the upper base 50. Each of the upper pressurizing units 1 to 4 includes a base 10, 20, 30, 40, a mold 11, 21, 31, 41, and a lower surface 15p, 27p, 31p, 47p. The base 10, 20, 30, 40 supports the mold 11, 21, 31, 41. The mold 11, 21, 31, 41 presses the lower surface 15p, 27p, 31p, 47p toward the workpiece W. The lower surfaces 15p, 27p, 31p, 47p face the workpiece W. When the upper pressurizing units 1-4 are located in the pressurizing area A1, the upper pressurizing units 1-4 are disposed above the workpiece W. The bases 10, 20, 30, 40 are fixed to the lifting device 52 via the upper base 50 and the upper heating unit 51. The upper pressurizing units 1-4 are spaced upward from the rails R9-R12. With this configuration, when the workpiece W is being pressed, the rollers Ro do not pressurize the rails R9-R12 even if the bases 10, 20, 30, 40 are lowered, and no mechanical load is applied to the rollers Ro and the rails R9-R12.

[0208] ●Variations● Next, modified examples of the pressurizing system will be described below, focusing on the differences from the embodiment described above (hereinafter referred to as the "first embodiment"). In the following description of the modified examples, the same elements as in the first embodiment and elements having common functions are given the same reference numerals as in the first embodiment for the sake of convenience, and the description thereof will be omitted. In the following description, reference will be made to Figures 1 to 9 as appropriate.

[0209] First modified example FIG. 31 is a schematic cross-sectional view of an upper pressurizing unit in a first modified example of the pressurizing system. The figure shows a cross section of the upper pressure applying unit 1A along the YZ plane, in which the upper pressure applying unit 1A is cut at its center in the X-axis direction.

[0210] The upper pressurizing unit 1A in the first modified example differs from the upper pressurizing unit 1 in that the upper pressurizing unit 1A includes a mold 16, a frame member 17, and a pressurizing pad 18 instead of the mold 11, the frame member 14, and the pressurizing pad 15. The upper pressurizing unit 1A includes a base 10, a side unit 12, a support unit 13, the mold 16, the frame member 17, and the pressurizing pad 18. The upper pressurizing unit 1 can be transported, for example, between the waiting area A2 and the pressurizing area A1.

[0211] The die 16 presses the pressure pad 18 downward, thereby pressing the workpiece W via the pressure pad 18. The die 16 includes a main body 16a and a plurality of individual dies 16b. The configuration of the die 16 is common to the configuration of the die 21. Therefore, a detailed description of the die 16 will be omitted.

[0212] The frame member 17 holds the pressure pad 18. The frame member 17 is made of, for example, a metal (e.g., stainless steel) having high rigidity. When viewed in the up-down direction, the frame member 17 has a rectangular lattice shape along the XY axis direction. When viewed in the down-down direction, the frame member 17 has multiple window portions 17a (nine in this embodiment). The window portions 17a are rectangular through-holes that penetrate the frame member 17 in the up-down direction. In the up-down direction, the frame member 17 is located lower than the mold 16. The frame member 17 is supported by the base 10 via the support unit 13 so as to be movable relative to the mold 16 in the up-down direction.

[0213] When pressure is applied to the workpiece W, the pressure pad 18 deforms to conform to the shape of the surface of the workpiece W and applies even pressure to the workpiece W. The pressure pad 18 is held by a frame member 17 and disposed below the die 16. The pressure pad 18 includes an elastic body 18a and film members 18b and 18c.

[0214] When the workpiece W is pressurized, the elastic body 18a transmits the pressure from the die 16 evenly to the workpiece W. The material of the elastic body 18a is the same as that of the elastic body 15a. The membrane members 18b and 18c are held so as to be sandwiched between the frame member 17. The elastic body 18a is filled between the two membrane members 18b and 18c arranged above and below the elastic body 18a in each window portion 17a.

[0215] When viewed from below, the pressure pad 18 is partitioned by the frame member 17 into a plurality of (nine in this embodiment) rectangular regions 18d. The regions 18d are an example of individual pressure pads in the present invention. A lower surface 18p of each region 18d faces a corresponding workpiece W and functions as an individual press surface that presses the workpiece W. In other words, the lower surface 18p functions as an individual press surface in the present invention.

[0216] FIG. 32 is a schematic cross-sectional view of the pressurizing system SA, showing a state in which the workpiece W is pressed by the upper pressurizing unit 1A.

[0217] When the workpiece W is pressed, the die 16 presses the press pad 18 downward. At this time, each of the individual dies 16b presses the corresponding portion (the portion arranged in the corresponding window portion 17a) of the press pad 18 downward. As a result, the press pad 18 deforms to follow the shape of the surface of the workpiece W, and presses the workpiece W evenly. Here, when viewed in the up-down direction, the size of the individual press surface (lower surface 18p) for the workpiece W is slightly larger than the size of the surface of the workpiece W. Therefore, the press pad 18 does not reach the mounting plate 9, and a part of the workpiece W (the part on the side of the mounting plate 9) is not pressed from the side. That is, the direction of the pressure applied to the workpiece W by the individual press surface (18p) is slightly different from the direction of the pressure applied to the workpiece W by the press surface (lower surface 15p). In this way, in the upper press unit 1A, the workpiece W is pressed evenly from almost all directions (multiple directions).

[0218] Thus, in the pressurizing process using the upper pressurizing unit 1A, the workpiece W is pressurized uniformly from almost all directions (multi-directions) by the pressurizing pad 18 that deforms to follow the shape of the surface of the workpiece W. In addition, in this pressurizing process, each of the multiple workpieces W can be pressed (collectively) by its corresponding individual press surface (lower surface 18p). In other words, the pressurizing method in this pressurizing process is a combination of the pseudo-isotropic pressurizing method and the individual pressurizing method.

[0219] In the first modified example, the size of the individual press surface (lower surface 18p) for the workpiece W may be the same as the size of the surface of the workpiece W or slightly smaller than the size of the surface of the workpiece W.

[0220] Second modified example FIG. 33 is a schematic cross-sectional view of a pressurizing system, showing a second modified example of the pressurizing system.

[0221] In the pressurizing system SB in the second modified example, the up-down direction is reversed with respect to the pressurizing system S. The pressurizing system SB includes a housing, four lower pressurizing units 1B, 3B (two of which are not shown; the same applies below), a pressurizing device 5B, an upper heating unit 6B, a conveying mechanism (not shown; the same applies below), a control device 8, a film mount 9B, a pump P, and a plurality of mounting bolts Bo. The lower pressurizing units 1B, 3B are examples of the pressurizing units of the present invention.

[0222] Except for the fact that the upper and lower pressurizing units 1B and 3B are inverted in vertical direction, the configuration of the lower pressurizing units 1B and 3B is the same as the configuration of the upper pressurizing units 1 and 3. Therefore, detailed description of the lower pressurizing units 1B and 3B will be omitted.

[0223] The pressurizing device 5B pressurizes the workpiece W using the lower pressurizing units 1B and 3B that have moved to the pressurizing area A1. The pressurizing device 5B includes a lower base 50B, a lower heat unit 51B, and a lifting device 52B. The pressurizing device 5B is disposed in the pressurizing area A1. The configuration of the pressurizing device 5B is the same as that of the pressurizing device 5, except that the up-down direction is reversed. Therefore, a detailed description of the pressurizing device 5B will be omitted.

[0224] The upper heating unit 6B heats and cools the workpiece W. The upper heating unit 6B includes an upper heating unit 60B. The configuration of the upper heating unit 60B is the same as the configuration of the lower heating unit 60, except that the upper heating unit 60B is vertically reversed and that the upper heating unit 60B is fixed. Therefore, a detailed description of the upper heating unit 60B will be omitted.

[0225] The conveying mechanism movably supports the lower pressure units 1B and 3B. The conveying mechanism includes, for example, a plurality of rails (not shown), a plurality of bases (not shown), and a plurality of rollers (not shown). The configuration of the conveying mechanism is the same as that of the conveying mechanism 7, except that the top and bottom directions are reversed. Therefore, a detailed description of the conveying mechanism will be omitted.

[0226] The mounting film 9B is a film on which the workpiece W is placed. The mounting film 9B is disposed in a position between the lower heating unit 51B and the upper heating unit 60B and close to the upper heating unit 60B with a predetermined tension applied thereto.

[0227] When the workpiece W is pressed by the lower pressurizing unit 1B, the lower pressurizing unit 1B is transported from the waiting area A2 to the pressurizing area A1 and attached to the lower heating unit 51B. Next, the lifting device 52B lifts the lower pressurizing unit 1B. At this time, the mounted film 9B is sandwiched between the upper heating unit 60B and the lower pressurizing unit 1B and is pressed together with the workpiece W.

[0228] Third modified example FIG. 34 is a schematic cross-sectional view of a pressurizing system, showing a third modified example of the pressurizing system.

[0229] In the third modified example, the pressurizing system SC includes one waiting area A6 corresponding to the five upper pressurizing units 1-4, 1A instead of the waiting areas A2-A5, and a lifting device (not shown, same below) for lifting the upper pressurizing units 1-4, 1A. In the vertical direction, the length of the waiting area A6 is greater than the length of the waiting areas A2-A5. The inside of the waiting area A6 is divided into individual waiting areas A61-A65 in which the upper pressurizing units 1-4, 1A are accommodated. The individual waiting areas A61-A65 are arranged along the vertical direction. The individual waiting areas A61-A65 are an example of a waiting area in the present invention. In the vertical direction view, the waiting area A6 is disposed adjacent to the pressurizing area A1 in the +X direction of the pressurizing area A1. The upper pressurizing units 1-4, 1A can be lifted and lowered in the waiting area A6 by the lifting device. The upper pressurizing units 1 to 4 and 1A to be used are raised and lowered to an appropriate height, whereby the upper pressurizing units 1 to 4 and 1A to be used are transported to the pressurizing area A1.

[0230] ●Other embodiments● ●Waiting area In the present invention, the number of waiting areas A2 to A5 may be any number greater than one, and is not limited to "4." That is, for example, the pressurizing system S may include only waiting areas A2 and A4, or only waiting areas A3 and A5, or only waiting areas A2 and A3, among the waiting areas A2 to A5.

[0231] In the present invention, the waiting areas A2 to A5 only need to be arranged on the sides of the pressurizing area A1 when viewed in the up-down direction, and do not have to be adjacent to the pressurizing area A1.

[0232] Furthermore, in the present invention, the waiting areas A2 to A5 may be arranged in the vertical direction like the individual waiting areas A61 to A65.

[0233] Upper pressure unit Furthermore, in the present invention, the arrangement of the upper pressurizing units 1-4 relative to the waiting areas A2-A5 is not limited to the arrangement in the first embodiment. That is, for example, the upper pressurizing unit 1 may be arranged in the waiting areas A3-A5, and the upper pressurizing unit 2 may be arranged in the waiting areas A2, A4, and A5.

[0234] Furthermore, in the present invention, the pressurizing system S may include a plurality of upper pressurizing units 1 to 4 of different pressurizing methods, and may not include any two of the upper pressurizing units 1 to 4. Also, for example, the pressurizing system S may include an upper pressurizing unit 1A instead of any one of the upper pressurizing units 1 to 4.

[0235] Furthermore, in the present invention, the upper pressurizing units 1 to 4 are examples for realizing each pressurizing method, and the configuration of each of the upper pressurizing units 1 to 4 for realizing each pressurizing method is not limited to the configuration in the first embodiment.

[0236] Furthermore, the upper pressurizing units 1 to 4 may not include the side units 12, 22, 32, and 42. In this case, the upper pressurizing units 1 to 4 do not form the chamber units CU1 to CU4. Furthermore, the lower heating unit 60 and the lower cooling unit 61 are not interchanged (rapid heating and rapid cooling of the workpiece W are not performed).

[0237] Furthermore, in the present invention, the shape of the molds 11, 21, 31, 41 does not have to be a rectangular parallelepiped. That is, for example, the shape of the molds 11, 21, 31, 41 may be a cylinder when viewed from the top and bottom. In this case, the shape of each member arranged below the molds 11, 21, 31, 41 is designed according to the shape of the molds 11, 21, 31, 41.

[0238] Furthermore, in the present invention, the number of the individual pressure members 27, 47 may be more than one and is not limited to 9. In this case, the numbers and arrangements of the individual molds 21b, 31b, individual protective plates 24, accommodating holes 26a, 46a, individual pressure pads 25, and biasing units 28, 48 are appropriately set according to the numbers and arrangements of the individual pressure members 27, 47.

[0239] Furthermore, in the present invention, the shape of the main body portions 27a, 47a of the individual pressure members 27, 47 is not limited to a rectangular parallelepiped shape. That is, for example, the shape of the main body portions 27a, 47a may be a columnar shape when viewed in the up-down direction.

[0240] Furthermore, in the present invention, the individual pressure members 27, 47 may be formed of a plurality of separable members. In this case, the members may include an elastic body or a heat insulator.

[0241] Furthermore, in the present invention, the pressurizing system S may include an upper pressurizing unit including an elastic body made of a material (such as silicone rubber) that has a lower conformability to the surface of the workpiece W than the gel sheet.

[0242] Heat unit Furthermore, in the present invention, the pressurizing system S does not necessarily have to include the upper heat unit 51 and / or the lower heat unit 6.

[0243] Furthermore, in the present invention, the pressurizing system S does not necessarily have to include the lower heating unit 60 or the lower cooling unit 61.

[0244] Furthermore, in the present invention, the lower heating unit 60 may be designed for heating only.

[0245] Furthermore, in the present invention, the pressurizing system S may include, instead of the lower heat unit 6, one heat unit fixed to the pressurizing area A1.

[0246] Furthermore, in the present invention, the methods of heating and cooling the workpiece W performed in the first to fourth operations may be interchanged. That is, for example, in the first operation, the workpiece W may be slowly heated and slowly cooled. In this way, the pressurizing system S can appropriately select and combine a heating method in addition to a pressurizing method.

[0247] ●Transportation Furthermore, in the present invention, the transport mechanism 7 may include a mechanism capable of transporting the upper pressure units 1 to 4 automatically.

[0248] Furthermore, in the present invention, the rails R9 to R12 may be designed to be retractable to positions where they do not interfere with the transfer of the upper pressure units 1 to 4.

[0249] Furthermore, in the present invention, the transport mechanism 7 does not necessarily have to include the rails R11, R12 (rails R9, R10). In this case, for example, the rails R9, R10 (rails R11, R12) may be designed to be rotatable by 90° in the clockwise or counterclockwise direction when viewed from above.

[0250] Furthermore, in the present invention, the connection between the pump P and the exhaust holes 12a, 22a, 32a, 42a after the transport of the upper pressurizing units 1 to 4 may be automatically performed by an easily attachable and detachable member (for example, a coupler).

[0251] Furthermore, in the present invention, the configuration of the transport mechanism 7 is not limited to that of the first embodiment. That is, for example, the transport mechanism 7 may have a configuration capable of transporting the upper pressurizing units 1 to 4 placed on a transport table.

[0252] Furthermore, in the present invention, when the upper pressurizing units 1 to 4 are attached to the upper heating unit 51, the rollers Ro do not have to be separated from the rails R9 to R12. In this case, the rails R9 to R12 may be removed.

[0253] Furthermore, in the present invention, the upper pressurizing units 1 to 4 may be transported in a state where they are placed on a transport table.

[0254] ●Embodiments of the present invention● Next, the embodiments of the present invention that can be understood from the above-described embodiments will be described below, using the terms and symbols described in the respective embodiments.

[0255] The first embodiment of the present invention is a pressurizing system (e.g., pressurizing system S, SA, SB) that performs pressurizing treatment on at least one work (e.g., work W), and includes a plurality of pressurizing units (e.g., upper pressurizing units 1 to 4, 1A, lower pressurizing units 1B to 4B), one pressurizing area (e.g., pressurizing area A1) in which the pressurizing treatment is performed, and a plurality of waiting areas (e.g., waiting areas A2 to A6, individual waiting areas A61 to A65) arranged on the sides of the pressurizing area in a vertical direction view, and a pressurizing unit that transports each of the pressurizing units between the waiting areas corresponding to each of the pressurizing units and the pressurizing areas. and a unit support member (e.g., rails R1 to R12) that supports the workpiece in a movable manner, and when the workpiece is pressurized, one of the multiple pressurizing units (e.g., upper pressurizing unit 1) is arranged above or below the workpiece in the pressurizing area and is movable relative to the workpiece, and the remaining pressurizing units (e.g., upper pressurizing units 2 to 4) are arranged in the corresponding waiting area (e.g., waiting areas A3 to A6), and each of the pressurizing units is configured to be able to perform the pressurization process on the workpiece using a different pressurizing method. According to this configuration, the user can select an appropriate pressurizing method according to the workpiece by selecting the upper pressurizing unit to be transported to the pressurizing area.

[0256] A second embodiment of the present invention is a pressurizing system in which, in the first embodiment, the pressurizing method includes either a quasi-isotropic pressurizing method in which the workpiece is pressurized from multiple directions, or a uniaxial pressurizing method in which the workpiece is pressurized only from above and below. According to this configuration, the user can select either the quasi-isotropic pressure method or the uniaxial pressure method depending on the workpiece.

[0257] A third embodiment of the present invention is a pressurizing system in which, in the first or second embodiment, the pressurizing method includes either a batch pressurizing method in which multiple workpieces are pressed collectively with one press surface (e.g., lower surfaces 15p, 31p), or an individual pressurizing method in which each of the multiple workpieces is pressed individually with multiple partitioned individual press surfaces (e.g., lower surfaces 17p, 27p, 47p). According to this configuration, the user can select either the collective pressurization method or the individual pressurization method depending on the workpiece.

[0258] A fourth embodiment of the present invention is a pressure system in which, in the second embodiment, the pressure unit (e.g., upper pressure unit 1, 1A, lower pressure unit 1B) that pressurizes the workpiece using the pseudo-isotropic pressure method includes a pressure pad (e.g., pressure pad 15, 18) having an elastic body (e.g., elastic body 15a, 18a) that deforms to follow the shape of the surface of the workpiece when the workpiece is pressed, a frame member (e.g., frame member 14, 17) that holds the pressure pad, and a die (e.g., die 11, 21) that presses the pressure pad toward the workpiece when the workpiece is pressed. According to this configuration, the user can easily select the quasi-isotropic pressure method by selecting the upper pressurizing unit.

[0259] A fifth embodiment of the present invention is a pressurizing system in which, in the second embodiment, the pressurizing units (e.g., upper pressurizing units 2 to 4, lower pressurizing unit 3B) that pressurize the workpiece by the uniaxial pressurizing method have press surfaces (27p, 31p, 47p) that are directed toward the workpiece when the workpiece is pressed, and the press surfaces are made of metal and are planar. According to this configuration, the user can easily select the uniaxial pressurizing method by selecting the upper pressurizing unit.

[0260] A sixth embodiment of the present invention is the third embodiment, in which the pressurizing unit (e.g., upper pressurizing unit 4) that pressurizes the workpiece by the individual pressurizing method can pressurize each of the works individually, and includes a plurality of individual pressurizing members (e.g., individual pressurizing members 47) having the individual press surfaces, a support die (e.g., support die 46) that supports the individual pressurizing members, a die (e.g., die 41) that can pressurize the individual pressurizing members toward the workpiece, a pressurizing pad (e.g., pressurizing pad 45) that is arranged between the individual pressurizing members and the die, and a pressurizing pad that is arranged on the side of the die in a vertical direction view and that presses the pressurizing pad. and a frame member (e.g., frame member 44) that holds a pressurized pad, wherein the frame member is movable in the vertical direction relative to the pressurized pad, the individual pressurizing members are movable in the vertical direction relative to the support pressurized pad, the pressurized pad covers the entire surface of the pressurized pad when viewed from below and is deformable according to the amount of relative movement of each of the individual pressurizing members with respect to the support pressurized pad, the support pressurized pad is disposed below the pressurized pad and the frame member and is supported by the frame member, and when the workpiece is pressed, the individual pressurizing members protrude from the support pressurized pad toward the corresponding workpiece. According to this configuration, the user can easily select a system in which the uniaxial pressurizing system and the individual pressurizing system are combined by selecting the upper pressurizing unit.

[0261] A seventh embodiment of the present invention is a pressurizing system in which, in the third embodiment, the pressurizing unit (e.g., upper pressurizing unit 2) that pressurizes the workpiece by the individual pressurizing method can pressurize each of the workpieces individually, and includes a plurality of individual pressurizing members (e.g., individual pressurizing members 27) having the individual press surfaces, a support die (e.g., support die 26) that supports the individual pressurizing members, a die (e.g., die 21) that can pressurize the individual pressurizing members toward the workpiece, a pressurizing pad (e.g., individual pressurizing pad 25) that is arranged between the individual pressurizing members and the die, and a support member (e.g., support member 231) that is arranged to the side of the die in a vertical direction and supports the support die, the support member is movable relative to the die in the vertical direction, the individual pressurizing members are movable relative to the support die in the vertical direction, and the pressurizing pad is deformable according to the relative movement amount of each of the individual pressurizing members relative to the support die, and when the workpiece is pressed, the individual pressurizing members protrude from the support die toward the corresponding workpiece. According to this configuration, the user can easily select a system in which the uniaxial pressurizing system and the individual pressurizing system are combined by selecting the upper pressurizing unit.

[0262] An eighth embodiment of the present invention is a pressurizing system in which, in the third embodiment, the pressurizing unit (e.g., upper pressurizing unit 1A) that pressurizes the workpiece by the individual pressurizing method includes a pressurizing pad (e.g., pressurizing pad 18) having an elastic body that deforms in accordance with the shape of the surface of the workpiece when the workpiece is pressed, a frame member (e.g., frame member 17) that holds the pressurizing pad, and a die (e.g., die 16) that presses the pressurizing pad toward the workpiece when the workpiece is pressed, the frame member divides the pressurizing pad into a plurality of individual pressurizing pads (e.g., region 18d), the die includes a plurality of individual dies (e.g., individual dies 16b) corresponding to each of the individual pressurizing pads, and the individual pressurizing pads include the individual press surfaces (e.g., lower surface 18p). According to this configuration, the user can easily select a method in which the quasi-isotropic pressure method and the individual pressure method are combined by selecting the upper pressure unit.

[0263] A ninth embodiment of the present invention is a pressurization system in the first embodiment, comprising a heat unit (e.g., upper heat unit 51, lower heating unit 60, lower cooling unit 61, lower heat unit 51B, upper heating unit 60B, upper cooling unit 61B) capable of heating or cooling the work, the heat unit comprising an upper heat unit (e.g., upper heat unit 51, upper heating unit 60B, upper cooling unit 61B) arranged above the pressurization unit moved to the pressurization area, and a lower heat unit (e.g., lower heat unit 51B, lower heating unit 60, lower cooling unit 61) arranged below the work, each of the upper heat unit and the lower heat unit comprising a heat mold (e.g., main body 51a, 60a, 61a), a heat source (e.g., heating source H1, H2) contained in the heat mold for heating the heat mold, and a cooling source (e.g., cooling source C1 to C3) contained in the heat mold for cooling the heat mold. This configuration allows the user to combine different heating and cooling methods into a pressurizing method by combining thermal units and their operations.

[0264] A tenth embodiment of the present invention is the ninth embodiment, and includes a placement plate (e.g., placement plate 9) on which the work is placed, a heat unit waiting area (e.g., waiting areas A2, A4) arranged on the side of the pressurizing area in a vertical direction view, a heat unit transport device (e.g., lower heat unit transport device 62) that transports the lower heat unit (e.g., lower heating unit 60, lower cooling unit 61) back and forth between the heat unit waiting area and the pressurizing area, and a lifting device (e.g., lifting device 52) that lifts and lowers the pressurizing unit transported to the pressurizing area, and the lower heat unit includes a lower heating unit (e.g., lower heating unit 60) that is equipped with the heat source (e.g., heat source H2) and can heat the work, and a cooling source (e.g., , C3) and a lower cooling unit (e.g., lower cooling unit 61) capable of cooling the workpiece, and when the pressurizing unit is located in the pressurizing area, the pressurizing unit, together with the loading plate, forms a chamber unit (e.g., chamber units CU1 to CU4) in which the workpiece is accommodated, and the lifting device lifts the chamber unit when the lower heating unit and the lower cooling unit are transported, and lowers the chamber unit when the lower heating unit or the lower cooling unit is transported to the pressurizing area, so that the chamber unit abuts against the lower heating unit or the lower cooling unit transported to the pressurizing area. This configuration allows the user to combine rapid heating and / or rapid cooling of the workpiece with the pressurization method.

[0265] An eleventh embodiment of the present invention is a pressurizing system in which, in the first embodiment, the pressurizing unit is provided with a lifting device (e.g., lifting device 52, 52B) that lifts and lowers the pressurizing unit transported to the pressurizing area, the lifting device is arranged in the pressurizing area, the unit support member is arranged in the pressurizing area and has an individual unit support member (e.g., rails R9 to R12) attached to the lifting device, each of the pressurizing units has a press surface (e.g., lower surface 15p, 17p, 27p, 31p, 47p) facing the work, a die (die 11, 21, 31, 41) capable of pressing the press surface toward the work, and a base (e.g., base 10, 20, 30, 40) that supports the die, and when the pressurizing unit is located in the pressurizing area, the pressurizing unit is arranged above the work, the base is fixed to the lifting device, and the pressurizing unit is separated from the individual unit support member. With this configuration, when the workpiece is under pressure, no mechanical load is applied to the rollers and rails. [Explanation of symbols]

[0266] S Pressurized System 1 Upper pressure unit (pressure unit) 10 Base 11 Mold 14 Frame members 15 Pressure Pad 15p bottom (pressed surface) 2 Upper pressure unit 20 Base 21 Mold 21b Individual mold 231 Support member 25 Individual pressure pad (pressure pad) 26 Supporting Mold 27 Individual pressure members 27p bottom surface (individual press surface) 3 Upper pressurizing unit 30 Base 31 Mold 31p Bottom surface (press surface) 4 Upper pressurizing unit 40 Base 41 Mold 44 Frame members 45 Pressure Pad 46 Supporting Mold 47 Individual pressure members 47p bottom (individual press surface) 51 Upper Heat Unit (Heat Unit) 51a Main body (thermal mold) 52 Lifting device 60 Lower heating unit (heat unit) 60a Main body (heat mold) 61 Lower cooling unit (heat unit) 61a Main body (thermal mold) 62 Lower heat unit transport device A1 Pressurized area A2 Waiting area (Heat unit waiting area) A3 Waiting Area A4 Waiting area (Heat unit waiting area) A5 Waiting Area C1~C3 Cooling source H1,H3 heating source SA Pressurization System 1A Upper pressure unit (pressure unit) 16 Mold 17 Frame members 18 Pressure Pad 18d area (individual pressure pad) 18p bottom (individually pressed surface) SB Pressurized System 1B Lower pressure unit (pressure unit) 3B Lower pressure unit (pressure unit) 51B Lower Heat Unit (Heat Unit) 60B Upper heating unit (heat unit) A6 Waiting Area A61~A65 Individual waiting areas (waiting areas)

Claims

1. A pressurizing system for performing a pressurizing process on at least one workpiece, comprising: A plurality of pressurizing units; One pressurizing area in which the pressurizing process is performed; A plurality of waiting areas are arranged on the sides of the pressurizing area when viewed in the up-down direction; a unit support member that supports each of the pressurizing units so as to be transportable between the waiting area corresponding to each of the pressurizing units and the pressurizing area; and When the workpiece is pressurized, among the plurality of pressurizing units, One of the pressurizing units is disposed above or below the workpiece in the pressurizing area and is movable relative to the workpiece; The remaining pressurizing units are disposed in the corresponding waiting areas, Each of the pressurizing units is configured to be able to perform the pressurizing treatment on the workpiece using a different pressurizing method, The pressurizing method is Either one of a pseudo-isotropic pressure method in which pressure is applied to the workpiece from multiple directions and a uniaxial pressure method in which pressure is applied to the workpiece only from the top and bottom directions; Either one of a collective pressurizing method capable of collectively pressurizing a plurality of the workpieces with one press surface, and an individual pressurizing method capable of individually pressurizing each of the plurality of the workpieces with a plurality of partitioned individual press surfaces; At least two of the four methods that combine Including, The press surface is When the pressurizing unit having the press surface is disposed in the pressurizing area, the pressurizing unit is disposed so as to be directed toward the workpiece in an upward or downward direction, The plurality of individual press surfaces include When the pressurizing unit having the individual press surface is arranged in the pressurizing area, the pressurizing unit is arranged so as to be directed toward the corresponding workpiece in an upward or downward direction of the corresponding workpiece, When the workpiece is not pressurized, The press surface is planar, Each of the individual press surfaces is planar; Pressurized system.

2. The pressurizing unit that pressurizes the workpiece by the quasi-isotropic pressure method includes: A pressure pad having an elastic body that deforms in accordance with the shape of the surface of the workpiece when pressure is applied to the workpiece; A frame member for holding the pressure pad; A die that presses the pressure pad toward the workpiece when the workpiece is pressed; Equipped with The pressurization system of claim 1 .

3. The pressurizing unit that pressurizes the workpiece by the uniaxial pressurizing method includes: the press surface or the individual press surfaces directed towards the workpiece when the workpiece is pressed; With The press surface or the individual press surfaces are made of metal and are planar; The pressurization system of claim 1 .

4. The pressurizing unit that pressurizes the workpiece by the individual pressurizing method includes: A plurality of individual pressing members each capable of individually pressing the workpieces and each having the individual pressing surfaces; A support mold for supporting the individual pressing members; A die capable of pressing the individual pressing members toward the workpiece; a pressure pad disposed between the individual pressure members and the mold; a frame member that is disposed on a side of the mold when viewed in the up-down direction and that holds the pressure pad; With The frame member is movable relative to the mold in a vertical direction, the individual pressing members are movable relative to the support mold in a vertical direction, the pressure pad covers an entire surface of the mold when viewed from below, and is deformable in accordance with an amount of relative movement of each of the individual pressure members with respect to the support mold; The support mold is disposed below the pressure pad and the frame member and is supported by the frame member, When the workpiece is pressed, the individual pressing members protrude from the supporting die toward the corresponding workpiece. The pressurization system of claim 1 .

5. The pressurizing unit that pressurizes the workpiece by the individual pressurizing method includes: A plurality of individual pressing members each capable of individually pressing the workpieces and each having the individual pressing surfaces; A support mold for supporting the individual pressing members; A die capable of pressing the individual pressing members toward the workpiece; a pressure pad disposed between the individual pressure members and the mold; A support member that is disposed to the side of the mold when viewed in the up-down direction and supports the support mold; With The support member is movable relative to the mold in a vertical direction, the individual pressing members are movable relative to the support mold in a vertical direction, the pressure pad is deformable in accordance with a relative movement amount of each of the individual pressure members with respect to the support die; When the workpiece is pressed, the individual pressing members protrude from the supporting die toward the corresponding workpiece. The pressurization system of claim 1 .

6. The pressurizing unit that pressurizes the workpiece by the individual pressurizing method includes: A pressure pad having an elastic body that deforms in accordance with the shape of the surface of the workpiece when pressure is applied to the workpiece; A frame member for holding the pressure pad; A die that presses the pressure pad toward the workpiece when the workpiece is pressed; With The frame member divides the pressure pad into a plurality of individual pressure pads, The mold is a plurality of individual molds corresponding to the individual pressure pads, With The individual pressure pads are The individual press surfaces, Equipped with The pressurization system of claim 1 .

7. A thermal unit capable of heating or cooling the workpiece; and The thermal unit comprises: an upper heating unit disposed above the pressurizing unit that has moved to the pressurizing area; A lower heat unit disposed below the workpiece; With Each of the upper heat unit and the lower heat unit is With hot mold, A heat source that is contained in the thermal mold and heats the thermal mold; A cooling source that is contained within the thermal mold and cools the thermal mold; Equipped with The pressurization system of claim 1 .

8. A mounting plate on which the workpiece is placed; a heat unit standby area disposed to the side of the pressurizing area when viewed in the vertical direction; a heat unit transport device that transports the lower heat unit back and forth between the heat unit standby area and the pressurizing area; a lifting device that lifts and lowers the pressurizing unit transported to the pressurizing area; and The heat sink unit includes: A lower heating unit including the heat source and capable of heating the workpiece; a lower cooling unit including the cooling source and capable of cooling the workpiece; With When the pressurizing unit is located in the pressurizing area, the pressurizing unit forms a chamber unit in which the workpiece is accommodated together with the placement plate, The lifting device is When the lower heating unit and the lower cooling unit are transported, the chamber unit is raised, when the lower heating unit or the lower cooling unit is transported to the pressurizing area, the chamber unit is lowered to bring the chamber unit into contact with the lower heating unit or the lower cooling unit transported to the pressurizing area. The pressurization system of claim 7.

9. a lifting device that lifts and lowers the pressurizing unit transported to the pressurizing area; and The lifting device is disposed in the pressurizing area, The unit support member is an individual unit support member disposed in the pressure area and attached to the lifting device; With Each of the pressurizing units comprises: The press surface or the individual press surface directed toward the workpiece; A die capable of pressing the press surface or the individual press surfaces toward the workpiece; A base for supporting the mold; With When the pressurizing unit is located in the pressurizing area, The pressurizing unit is disposed above the workpiece, The base is fixed to the lifting device, The pressurizing unit is spaced apart from the individual unit support member. The pressurization system of claim 1 .

10. The press surface or the individual press surfaces of the pressurizing unit that pressurizes the workpiece by the pseudo-isotropic pressure method are provided with a portion that pressurizes the workpiece, and when the workpiece is being pressurized, the portion is deformed to follow the shape of the surface of the workpiece, The press surface or the individual press surface of the pressurizing unit that pressurizes the workpiece by the uniaxial pressurizing method does not deform when the workpiece is being pressed. The pressurization system of claim 1 .

Images