Measuring Equipment

Abstract

The present invention is a refinement of a measuring device and enables stable measurement of electrical properties even when, for example, a component is small.　In this measuring device, adjustment is made possible for at least one of among relative positional relationship between a loading table holding the component and a main body and the relative positional relationship between at least one of a pair of probes and the main body. As a result, it is possible to properly grip component held on the loading table with the pair of probes, and stable measurement of the electrical characteristics is possible even if the component is small.

Description

[Technical field]

[0001] The present disclosure relates to a measuring device that measures electrical characteristics of components mounted on a circuit board. [Background technology]

[0002] Patent Document 1 describes a measuring device that is mounted on a mounting machine that mounts components supplied by a component supplying device onto a circuit board and measures the electrical characteristics of the components, the measuring device including a mounting table on which the components are placed and a pair of probes that are arranged so as to be able to move toward and away from each other. In the measuring device described in Patent Document 1, the electrical characteristics of the components are measured by clamping the components placed on the mounting table between the pair of probes. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2017-9987 Brochure Overview

[0004] assignment

[0005] An object of the present disclosure is to improve a measuring device, for example, to enable stable measurement of electrical characteristics of a component.

[0006] In the measuring device according to the present disclosure, at least one of the relative positional relationship of at least one of the pair of probes to the main body and the relative positional relationship of the mounting base to the main body is adjustable. It is possible to adjust the relative positional relationship of the pair of probes, adjust the relative positional relationship between at least one of the pair of probes and the mounting base, etc. As a result, the component can be satisfactorily held by the pair of probes, and the electrical characteristics of the component can be stably measured even if the component is small. [Brief description of the drawings]

[0007] [Figure 1] 1 is a perspective view of a mounting machine including a measuring device according to an embodiment of the present disclosure. [Diagram 2] FIG. 2 is a perspective view of a main part of the measuring device. [Diagram 3] FIG. 2 is a side view of a main part of the measuring device. [Figure 4] FIG. 2 is a perspective view of a main part of the measuring device. [Diagram 5] FIG. 2 is a rear view of the main part of the measuring device. [Figure 6] 6A is a cross-sectional view of a groove portion of a mounting base of the measuring device, FIG. 6B is a front view of a mover of the measuring device, and FIG. 6C is a view showing a state in which the mover has entered the groove portion of the mounting base of the measuring device. [Figure 7] FIG. 2 is an air circuit diagram included in the measuring device. [Figure 8] FIG. 2 is a block diagram conceptually illustrating the periphery of a control device of the measuring device. [Figure 9] 9A is a diagram showing an operation of the measuring device when acquiring electrical characteristics of a part, (9A) is a diagram showing an initial state, (9B) is a diagram showing a clamped state, (9C) is a diagram showing a measuring state, and (9D) is a diagram showing a discarded state. [Figure 10] FIG. 1 is a diagram illustrating a main part of a conventional measuring device. [Figure 11] FIG. 11 is a perspective view showing a main part of a measurement device according to a second embodiment of the present disclosure. [Figure 12] FIG. 2 is another perspective view showing a main part of the measuring device. [Figure 13] FIG. 2 is a rear view of the main part of the measuring device. Embodiment

[0008] Hereinafter, a placement machine including a measuring device according to an embodiment of the present disclosure will be described in detail with reference to the drawings. Example 1

[0009] The mounting machine shown in FIG. 1 mounts components onto a circuit board, and includes a main body 2, a circuit board conveying and holding device 4, a component supplying device 6, a head moving device 8, and the like. The circuit board transport and holding device 4 transports and holds the circuit board P (hereinafter referred to as board P) in a horizontal position, and in FIG. 1, the transport direction of the board P is the x direction, the width direction of the board P is the y direction, and the thickness direction of the board P is the z direction. The y direction is the front-to-back direction of the mounting machine, and the z direction is the up-down direction. The x, y, and z directions are perpendicular to each other. The component supply device 6 supplies electronic components (hereinafter referred to as components) s to be mounted on the board P, and includes a plurality of tape feeders 14 and the like. The head moving device 8 holds a mounting head 16 and moves it in the x, y, and z directions, and the mounting head 16 has a suction nozzle 18 that suctions and holds the components s.

[0010] Reference numeral 22 denotes a measuring device. The measuring device 22 measures the electrical characteristics of the component s. The electrical characteristics of the component s include L (inductance), C (capacitance), R (resistance), Z' (impedance), etc., and the measuring device 22 measures one or more of these.

[0011] The measuring device 22 is provided on the main body of the circuit board conveying and holding device 4 via a collection box 26. A collection passage 28 is provided between the collection box 26 and the measuring device 22, and the components s whose electrical characteristics have been measured are received in the collection box 26 via the collection passage 28.

[0012] As shown in Fig. 2-6, the measuring device 22 includes (i) a main body 30, (ii) a mounting table 32 on which the component s is mounted, (iii) a pair of probes 37 consisting of a stator 34 and a mover 36, (iv) a mounting table moving device 40 for moving the mounting table 32, (v) a mover moving device 41 for moving the mover 36 toward and away from the stator 34, and (vi) an electrical characteristic measuring unit 42 (see Fig. 8) as an electrical characteristic acquiring unit. In this embodiment, the component s has electrodes at both ends and can be held by the pair of probes 37, and can be, for example, a square tip. The main body 30 is provided with a through hole 31 (see Fig. 9) that can communicate with the recovery passage 28. The main body 30 is also grounded.

[0013] The measuring device 22 can be attached to the main body of the circuit board conveying and holding device 4 so that, for example, the approaching / separating direction of the mover 36 with respect to the stator 34 is the y direction, and the direction perpendicular to the approaching / separating direction is the x direction. The y direction is generally horizontal, and the mover 36 is moved toward / separated from the stator 34 by moving in the horizontal direction. Hereinafter, the y direction may be referred to as the approaching / separating direction, or the longitudinal direction of the groove 46 formed in the mover 36 or the mounting table 32 described later. Furthermore, the movement of the mover 36 in the direction approaching the stator 34 may be referred to as forward movement, and the movement of the mover 36 in the direction separating from the stator 34 may be referred to as backward movement. The same applies to the movement of the mounting table 32. Furthermore, the x direction may be referred to as the width direction of the mover 36 or the groove 46.

[0014] The mounting table 32 includes a component mounting portion 44 and a mounting portion holder 45 that holds the component mounting portion 44. The component mounting portion 44 is held by the mounting portion holder 45 so as to be movable integrally therewith, and the mounting portion holder 45 is provided on the main body 30 so as to be movable in the y direction (approaching / moving away direction).

[0015] A groove 46 extending in the approaching and separating directions is formed in the component placement portion 44. The groove 46 is generally V-shaped and includes an upper groove 46a having a pair of inclined side surfaces and a lower groove 46b provided below the upper groove 46a and having a generally rectangular cross section, as shown in Fig. 6A. The upper groove 46a includes a pair of inclined surfaces 48a, 48b, and the lower groove 46b includes a bottom surface 50 which is a flat surface and a pair of wall surfaces 51a, 51b on both sides of the bottom surface 50.

[0016] The component s placed on the component placement portion 44 may be placed on the bottom surface 50 of the lower groove portion 46b, or may be held and placed on the pair of inclined surfaces 48a, 48b of the upper groove portion 46a.

[0017] A cover portion 52 extending in the approaching / separating direction is attached to the mounting table 32. The cover portion 52 includes a pair of side plates 52a, 52b located on both sides of the groove portion 46 of the mounting table 32. The pair of side plates 52a, 52b are moved integrally with the mounting table 32.

[0018] The stator 34 and the mover 36 have opposing surfaces 34f and 36f, respectively, which face each other, and the part s is gripped by the pair of opposing surfaces 34f and 36f. The stator 34 is fixed to the main body 30 via a stator holder 55. The mover 36 is held integrally and movably by the mover holder 56, which is provided on the main body 30 so as to be movable in the y direction (approaching / separating direction). The stator holder 55 and the mover holder 56 are located on both sides of the placement section holder 45 in the approaching / separating direction. The stator 34 and the mover 36 are each connected to the electrical characteristic measuring section 42 via a copper wire.

[0019] 3 and 4, the mover 36 includes a body portion 36a having a generally rectangular parallelepiped shape and a protruding portion 36b protruding downward from the front portion of the body portion 36a. The mover 36 is held by a mover holder 56 at the rear portion of the body portion 36a, and the protruding portion 36b and the body portion 36a constituting the front portion enter the groove portion 46 of the component placement portion 44. In this embodiment, the front end surface of the protruding portion 36b of the mover 36, or the front end surface of the protruding portion 36b and (a part of) the front end surface of the body portion 36a, are set as the facing surface 36f.

[0020] The main body portion 36a is provided in a position in which the longitudinal direction of the rectangular parallelepiped extends in the approaching / separating direction. As shown in Figs. 6B and 6C, the protrusion 36b has a size and shape that allows it to engage with the groove 46. The protrusion 36b includes a lower groove engagement portion 57 that engages with the lower groove 46b and an upper groove engagement portion 58 that engages with a portion of the upper groove 46a. The upper groove engagement portion 58 has a pair of inclined surfaces 58a, 58b that face a portion of the pair of inclined surfaces 48a, 48b of the groove 46. The lower groove engagement portion 57 has a bottom surface 50 of the lower groove 46b, a lower end surface 57d that faces the pair of wall surfaces 51a, 51b, and a pair of side surfaces 57a, 57b. The main body 36a is spaced apart from the pair of inclined surfaces 48a, 48b of the groove 46.

[0021] As shown in FIG. 3, the mounting table moving device 40 and the movable member moving device 41 each include air cylinders 60, 62 as a driving source, a pair of guide rails 64, 66 provided on the main body 30, a pair of mounting table sliders 68, 69 and a pair of movable member sliders 70, 71 movably engaged with the guide rails 64, 66, solenoid valve devices 74, 76 (see FIGS. 7 and 8), an air source 77, etc.

[0022] A pair of guide rails 64, 66 are fixed to the main body 30, spaced apart in the x direction (width direction of the mover 36) and extending in the y direction (approaching / separating direction). Furthermore, a mounting section holder 45 is fixed to the mounting table sliders 68, 69. A mover holder 56 is fixed to the mover sliders 70, 71. Furthermore, a piston rod 60r (see FIG. 7) of an air cylinder 60 is attached to the mounting section holder 45, and a piston rod 62r of an air cylinder 62 is attached to the mover holder 56. The air cylinders 60, 62 are provided with the piston rods 60r, 62r extending in the approaching / separating direction.

[0023] On the other hand, an air passage 92 is provided in a member on the stator side {for example, an upper portion of the stator 34, the stator holder 55, etc.}. The air passage 92 has an opening 93 that opens into a portion of the member on the stator side facing the facing surface 36f of the mover 36. An ionizer 94 is connected to the air passage 92. The ionizer 94 ionizes the air by generating a corona discharge.

[0024] An electromagnetic valve device 74 is provided between the two air chambers 60a, 60b of the air cylinder 60, the air source 77, the air passage 92, and the filter (atmosphere). The electromagnetic valve device 74 is controlled to control the movement of the mounting table 32, etc.

[0025] An air source 77, an air passage 92, and a filter (atmosphere) are selectively connected to the air chambers 62a, 62b of the air cylinder 62 via an electromagnetic valve device 76. The movement of the mover holder 56 (the mover 36) and the like are controlled by controlling the electromagnetic valve device 76. When the mounting table 32 moves forward and when the mover 36 moves backward, air is supplied from the air cylinders 60, 62 to the air passage 92 and is made to flow out from an opening 93.

[0026] In this embodiment, the air passage 92, the air source 77, the air cylinders 60, 62, etc. constitute an air supply device 96. The air supply device 96 has components common to the mover moving device 41 and the mounting table moving device 40.

[0027] In this embodiment, the mover 36 is held by the mover holder 56 so that its height, which is its vertical relative position with respect to the main body 30, its widthwise relative position, and its relative inclination about the axis Y extending in the approaching / separating direction can be adjusted. The vertical direction and the widthwise direction of the mover 36 are orthogonal directions that intersect the approaching / separating direction, but the widthwise direction of the mover 36 is generally horizontal.

[0028] In this embodiment, the front part of the mover 36 has a shape and size that allows it to engage with the groove 46. The mover 36 is assembled to the mover holder 56 in a state where the gap between the mover 36 and the groove 46 is extremely small. Therefore, even if the part s is placed on the bottom surface 50 of the groove 46, it is held by the opposing surface 36f of the mover 36 and the opposing surface 34f of the stator 34, and the electrical characteristics can be measured.

[0029] 10, when the mover 36 enters the groove 46, a gap may be generated between the mover 36 and the groove 46, for example, between the lower end surface 57d of the mover 36 and the bottom surface 50 of the groove 46. As a result, the pair of opposing surfaces 34f, 36f may not be able to grip the component s placed on the bottom surface 50, making it impossible to measure the electrical characteristics, or the component s may not be gripped well, making it impossible to measure the electrical characteristics with high accuracy.

[0030] Therefore, in this embodiment, the vertical position of the mover 36 relative to the main body 30, the widthwise position of the mover 36, and the inclination around the axis Y are made adjustable, thereby making it possible to adjust the relative positional relationship between the mover 36 and the groove portion 46 of the component mounting portion 44.

[0031] The movable member holder 56 includes a holder main body 78 fixed to a pair of movable member sliders 70, 71, a bracket 80 fixed to the holder main body 78, a vertically movable member 82 attached to the bracket 80 by two bolts A1, A2, a rotating member 84 attached to the vertically movable member 82 by bolts B1, B2, and a width-direction movable member 86 attached to the rotating member 84 by bolts C1, C2.

[0032] The bolts A1, A2 extend in the width direction of the movable element 36, pass through the bracket 80, and are screwed into the vertically movable member 82. The bolts B1, B2 extend in the approaching / separating direction, pass through the vertically movable member 82, and are screwed into the rotating member 84. The bolts C1, C2 extend in the vertical direction, pass through the widthwise movable member 86, and are screwed into the rotating member 84. In addition, the movable element 36 is attached to the widthwise movable member 86 by a bolt M so as to be movable integrally therewith.

[0033] When the bolt is loosened, the two members are able to move relative to each other, but when the bolt is tightened, the two members are unable to move relative to each other. Hereinafter, this state in which the two members are unable to move relative to each other will be referred to simply as the fixed state.

[0034] With the width-direction movable member 86 fixed to the rotating member 84 by the bolts C1 and C2 and the rotating member 84 fixed to the vertically movable member 82 by the bolts B1 and B2, the bolts A1 and A2 are loosened. Due to the vertical gap R1 between the vertically movable member 82 and the bracket 80, the vertical movement of the vertically movable member 82 relative to the bracket 80 is permitted, but since the outer surface 82a of the vertically movable member 82 and the inner surface 80a of the bracket 80 are in contact with each other, the movement of the mover 36 of the vertically movable member 82 relative to the bracket 80 in the width direction is restricted.

[0035] By relatively moving the vertically movable member 82 in the vertical direction along the inner surface 80a of the bracket 80, the turning member 84, the widthwise movable member 86, and the movable element 36 are moved vertically together, the vertical position of the movable element 36 is adjusted, and the bolts A1, A2 are tightened. As a result, the vertical position of the movable element 36 is adjusted within the range of the gap between the bolts A1, A2 and the through-hole of the bracket 80.

[0036] With the vertically movable member 82 fixed to the bracket 80 by the bolts A1, A2 and the rotating member 84 fixed to the vertically movable member 82 by the bolts B1, B2, the bolts C1, C2 are loosened. This allows the widthwise movable member 86 to move in the width direction of the mover 36 relative to the rotating member 84. The widthwise movable member 86 is moved in the width direction along the upper surface of the rotating member 84 to adjust the widthwise position of the mover 36, and the bolts C1, C2 are tightened. This allows the widthwise position of the mover 36 to be adjusted within the range of the gap between the bolts C1, C2 and the through-hole of the widthwise movable member 86.

[0037] Furthermore, with the vertically movable member 82 fixed to the bracket 80 by the bolts A1, A2 and the widthwise movable member 86 fixed to the rotating member 84 by the bolts C1, C2, the bolts B1, B2 are loosened. Due to the vertical gap R2 between the widthwise movable member 86 and the vertically movable member 82, the fact that the rotating member 84 is not held below, and the vertical gap R3 between the mover 36 and the vertically movable member 82, among other things, the rotating member 84, the widthwise movable member 86 and the mover 36 are permitted to rotate about the axis Y relative to the vertically movable member 82.

[0038] The rotating member 84 is rotated to adjust the inclination of the movable element 36 about the axis Y, and the bolts B1 and B2 are tightened. This adjusts the inclination of the movable element 36 about the axis Y within the range of the gap between the bolts B1 and B2 and the through-hole of the vertically movable member 82.

[0039] The mover 36 is fixed to the width-direction movable member 86 by the bolt M, and as shown in Figs. 2, 5, etc., a vertically extending recess 86r provided on the width-direction movable member 86 is fitted with a vertically extending protrusion 36s provided on the side of the mover 36. Therefore, when the bolt M is loosened, the mover 36 is vertically movable relative to the width-direction movable member 86. The vertical position of the mover 36 can also be adjusted by this vertical movement of the mover 36 relative to the width-direction movable member 86.

[0040] These operations can be performed by an operator, for example, by inserting the movable member 36 into the groove portion 46 of the mounting table 32, measuring the gap between the movable member 36 and the groove portion 46 using a jig such as a dial gauge or a strain gauge, and making these measurements as small as possible.

[0041] The placement machine includes a control device 200. As shown in Fig. 8, the control device 200 includes a controller 202 mainly composed of a computer, and a plurality of drive circuits 204. The circuit board conveying and holding device 4, the component supplying device 6, and the head moving device 8 are connected to the controller 202 via the drive circuits 204, and the solenoid valve devices 74, 76 of the mounting table moving device 40 and the movable element moving device 41 are also connected to the controller 202. The camera 20, the electrical characteristic measuring unit 42, the display 216, the mounting table position sensor 218, the movable element position sensor 220, and the like are also connected to the controller 202. The solenoid valve devices 74, 76 are controlled based on the output signals of the mounting table position sensor 218 and the movable element position sensor 220, and the like. The measurement results of the electrical characteristics of the component s can be displayed on the display 216.

[0042] The operation of the measuring device 22 of the mounting machine configured as above when measuring the electrical characteristics of the component s will be described below. The measuring device 22 is always in the initial state shown in Fig. 9A. The mover 36 is at the retracted end position, and the mounting table 32 is at the advanced end position. When a command to measure the electrical characteristics of the component s is issued, the mounting head 16 is moved. The component s is held by the suction nozzle 18, moved, and placed in the groove 46.

[0043] The solenoid valve device 76 is controlled to move the mover 36 forward, and the part s is clamped between the mover 36 and the stator 34, as shown in Fig. 9B. Next, the mounting table 32 is moved backward, as shown in Fig. 9C, by controlling the solenoid valve device 74. The mounting table 32 is moved backward to a position separated from the part s and the pair of probes 37, in other words, to a position where the protruding portion 36b of the mover 36 is separated from the groove portion 46.

[0044] On the other hand, the electrical characteristics of the part s are measured after a set charge removal time has elapsed since the part s was placed in the groove 46. The charge removal time is the time during which the static electricity charged on the part s is removed, and is determined in advance. After the measurement of the electrical characteristics of the part s is completed, the mover 36 is moved backward, and the part s that was held between the mover 36 and the stator 34 is released. As the mover 36 moves backward, air is supplied from the opening 93 obliquely upward to the facing surface 36f of the mover 36.

[0045] Next, as shown in FIG. 9D, the mover 36 is further moved back, and the mounting table 32 is also moved back. The space between the mover 36 and the stator 34 is connected to the recovery passage 28, so that the component s can be recovered into the recovery box 26. Thereafter, the mounting table 32 is moved forward and positioned between the pair of opposing surfaces 34f, 36f. A space is created above the groove 46, so that the component s can be placed thereon, and the measuring device 22 is returned to the initial state shown in FIG. 9A. In addition, as the mounting table 32 moves forward, air containing ions is supplied to the opposing surface 36f of the mover 36, so that the opposing surface 36f can also be de-electrified.

[0046] As described above, in this embodiment, the relative positional relationship of the mover 36 with respect to the component placement portion 44 is adjustable, so that the gap between the protrusion 36b of the mover 36 and the groove portion 46 can be made small or close to zero. As a result, even if the component s is small, the component s can be satisfactorily held by the pair of opposing surfaces 34f, 36f of the mover 36 and the stator 34. As a result, the electrical characteristics of the component s can be stably measured, and a decrease in measurement accuracy can be suppressed.

[0047] Furthermore, the component mounting portion 44 is electrically connected to the main body 30 via the mounting portion holder 45 and the guide rails 64, 66, and the mover 36 is electrically connected to the main body 30 via the mover holder 56 and the guide rails 64, 66. This allows for good static elimination of the component s, the mounting table 32, the mover 36, etc. This allows for stable measurement of the electrical characteristics of the component s. Even for a component s with a small impedance, the impedance of the component s can be measured with high accuracy.

[0048] Furthermore, since two bolts are used to fix the position and attitude of the mover 36, the position and attitude can be fixed more satisfactorily than when one bolt is used.

[0049] As described above, in this embodiment, the adjustment mechanism 100 is configured by the bracket 80, the vertically movable member 82, the rotating member 84, the widthwise movable member 86, the bolts A1, A2, B1, B2, C1, C2, the recess 86r provided in the widthwise movable member 86, the protrusion 36s provided in the mover 36, etc. When the first direction is the vertical direction, the vertically movable member 82 etc. corresponds to the first movable member, the bracket 80 etc. corresponds to the first holding member, and the bolts A1, A2 etc. correspond to the first fixing device, and the vertically movable member 82, bracket 80, bolts A1, A2 etc., and a structure in which the vertically movable member 82 is relatively movable in the vertical direction configure the vertically adjusting mechanism 102, which is the first adjustment mechanism. When the first direction is the width direction of the movable element 36, the width direction movable members 86 etc. correspond to the first movable members, the rotating members 84 etc. correspond to the first holding members, and the bolts C1, C2 etc. correspond to the first fixing device, and the width direction movable member 86, the rotating member 84, the bolts C1, C2 etc., and a structure in which the width direction movable member 86 is relatively movable in the width direction constitute a width direction adjustment mechanism 104 as a first adjustment mechanism. When the second direction is a direction parallel to the approaching / separating direction, the rotating members 84 etc. correspond to the second movable members, the vertical direction movable members 82 etc. correspond to the second holding members, and the bolts B1, B2 etc. correspond to the second fixing device, and the second adjustment mechanism 106 is constituted by the rotating member 84, the vertical direction movable member 82, the bolts B1, B2 etc., and a structure in which the rotating member 84 is rotatable about the axis Y. The movable element 36 etc. constitute the first movable member, the widthwise movable member 86 etc. constitute the first retaining member, the bolt M etc. constitute the first fixing device, and the movable element 36, the widthwise movable member 86, the bolt M, the recess 86r, the protrusion 36s etc. constitute a vertical adjustment mechanism as a first adjustment mechanism. Example 2

[0050] In the measuring device of Example 1, the relative inclination of the mover around axis Y extending in a direction parallel to the approaching / separating direction as the second direction is adjustable, whereas in the present example, the relative inclination of the mover 36 around axis X extending in the width direction of the mover 36, which is a direction perpendicular to the approaching / separating direction as the second direction, is adjustable.

[0051] In the measuring device according to the second embodiment, the basic structure is the same as that of the measuring device according to the first embodiment, so the corresponding components are denoted by the same reference numerals and the description thereof is omitted. In the second embodiment, a mover holder having an adjustment mechanism will be described.

[0052] 11-13, the mover holder 156 includes a holder body 178 fixed to a pair of mover sliders 70, 71, a widthwise movable member 180 attached to the holder body 178 with two bolts D1, D2, a rotating member 182 attached to the widthwise movable member 180 with bolts E1, E2, and a vertically movable member 184 attached to the rotating member 182 with bolts F1, F2. The mover 36 is attached to the vertically movable member 184 with a bolt N so as to be movable integrally therewith.

[0053] With the rotating member 182 fixed to the width-direction movable member 180 by the bolts E1 and E2 and the vertically movable member 184 fixed to the rotating member 182 by the bolts F1 and F2, the bolts D1 and D2 are loosened. The width-direction movable member 180, the rotating member 182, the vertically movable member 184 and the mover 36 become movable integrally in the width direction of the mover 36. The width-direction movable member 180 and the holder main body 178 are provided with a gap R11 between them in the x direction, so that the width-direction movable member 180 is permitted to move in the x direction relative to the holder main body 178.

[0054] The widthwise movable member 180 and the like are moved in the x direction along the upper surface of the mover holding body 178, thereby adjusting the widthwise position of the mover 36 and tightening the bolts D1 and D2. The widthwise position of the mover 36 can be adjusted within the range of the gap between the bolts D1 and D2 and the through-hole of the widthwise movable member 180. The bolt D2 is operated by utilizing a vertical through-hole 186 provided in the vertically movable member 184. A jig is passed through the through-hole 186 to engage with the head of the bolt D2, and the bolt D2 is loosened or tightened.

[0055] With the width-direction movable member 180 fixed to the holder body 178 by the bolts D1 and D2 and the rotational member 182 fixed to the width-direction movable member 180 by the bolts E1 and E2, the bolts F1 and F2 are loosened. This allows the vertically movable member 184 and the mover 36 to move in the vertical direction relative to the rotational member 182 and the width-direction movable member 180. The vertical gap R12 between the vertically movable member 184 and the width-direction movable member 180 and the rotational member 182 allows the vertical movement of the vertically movable member 184. In addition, since the step surface 184a of the vertically movable member 184 and the inner surface 180a of the width-direction movable member 180 are in contact with each other, the movement of the vertically movable member 184 in the x direction is restricted.

[0056] The vertically movable member 184 and the like are moved vertically along the widthwise movable member 180 to adjust the height, which is the vertical position of the mover 36, and then the bolts F1, F2 are tightened. The vertical position of the mover 36 can be adjusted within the range of the gap between the bolts F1, F2 and the through-hole of the rotating member 182.

[0057] With the width-direction movable member 180 fixed to the holder body 178 by the bolts D1 and D2 and the vertically movable member 184 fixed to the rotating member 182 by the bolts F1 and F2, the bolts E1 and E2 are loosened. This allows the rotating member 182, the vertically movable member 184, and the mover 36 to rotate about the axis X relative to the width-direction movable member 180. Rotation of the rotating member 182 about the axis X is permitted by a gap R13 between the rotating member 182 and the holder body 178, a gap R12 between the rotating member 182 and the width-direction movable member 180, and the like. In addition, since the inner surface 182a of the rotating member 182 and the outer surface 180b of the width-direction movable member 180 are in contact with each other, movement of the rotating member 182 in the x direction is restricted.

[0058] The bolts E1 and E2 are tightened by adjusting the inclination of the movable element 36 relative to the main body 30 about the axis X by rotating the rotating member 182 (and the vertically movable member 184 and the movable element 36) about the axis X. This makes it possible to adjust the inclination of the movable element 36 about the axis X.

[0059] The mover 36 is fixed to the vertically movable member 184 by a bolt N, and a convex portion 36s extending in the vertical direction provided on the side of the mover 36 is fitted into a concave portion 184r extending in the vertical direction provided on the vertically movable member 184. Therefore, when the bolt N is loosened, the mover 36 is movable in the vertical direction relative to the vertically movable member 184. The vertical position of the mover 36 can also be adjusted by the vertical movement of the mover 36 relative to the vertically movable member 184.

[0060] In this embodiment, an adjustment mechanism 188 is configured by the widthwise movable member 180, the rotating member 182, the vertically movable member 184, the bolt N, the bolts D1, D2, the bolts E1, E2, the bolts F1, F2, the convex portion 36s provided on the movable member 36, the concave portion 184r provided on the vertically movable member 184, etc. When the first direction is the width direction of the movable member 36 as a direction intersecting the approaching / separating direction, the widthwise movable member 180 etc. correspond to the first movable member, the holding body main body 178 corresponds to the first holding member, the bolts D1, D2 etc. correspond to the first fixing device, and the widthwise movable member 180, the holding body main body 178, the bolts D1, D2 etc. configure a widthwise adjustment mechanism 190 as a first adjustment mechanism. When the first direction is the vertical direction as an orthogonal direction intersecting the approaching / separating direction, the vertically movable member 184 etc. corresponds to the first movable member, the rotating member 182 etc. corresponds to the first holding member, the bolts F1, F2 etc. correspond to the first fixing device, and the vertically movable member 184, the rotating member 182, the bolts F1, F2 etc. constitute a vertically adjusting mechanism 192 as a first adjusting mechanism. When the second direction is the width direction of the mover 36 as an orthogonal direction intersecting the approaching / separating direction, the rotating member 182 etc. corresponds to the second movable member, the widthwise movable member 180 etc. corresponds to the second holding member, the bolts E1, E2 etc. correspond to the second fixing device, and the rotating member 182, the widthwise movable member 180, the bolts E1, E2 etc. constitute a second adjusting mechanism 194. The movable element 36 etc. constitute the first movable member, the vertical movable member 184 etc. constitute the first retaining member, the bolt N etc. constitute the first fixing device, and the movable element 36, the vertical movable member 184, the bolt N, the recess 184r, the protrusion 36s etc. constitute a vertical adjustment mechanism as a first adjustment mechanism.

[0061] Furthermore, in the above embodiment, the relative positional relationship between the mover 36 and the component mounting portion 44 was adjusted by adjusting the relative positional relationship of the mover 36 with respect to the main body 30, but the relative positional relationship between the mover 36 and the groove portion 46 of the component mounting portion 44 can be adjusted by adjusting the relative positional relationship between the component mounting portion 44 and the main body 30.

[0062] Furthermore, the second adjustment mechanism may include a mechanism for adjusting the relative inclination of the mover around an axis extending in the up-down direction as a direction perpendicular to the approaching / separating direction.

[0063] Furthermore, the first fixing device and the second fixing device, which are components of the adjustment mechanism, are not limited to those including two bolts, but can include three or more bolts, and the structure of the measuring device is not limited to the structure of the measuring device in the above embodiment.

[0064] In addition to the above-described embodiments, the present disclosure can be implemented in various forms with various modifications and improvements based on the knowledge of those skilled in the art. [Explanation of symbols]

[0065] 22: Measuring device 30: Main body 32: Mounting table 34: Stator 36: Movable piece 40: Mounting table moving device 41: Movable piece moving device 42: Electrical characteristic measuring section 44: Part mounting section 46: Groove section 56,156: Movable piece holder 82,184: Vertically movable member 86,180: Widthwise movable member 84,182: Rotating member A1,A2,B1,B2,C1,C2,D1,D2,E1,E2,F1,F2: Bolts 100,188: Adjustment mechanism 102,192: Vertical adjustment mechanism 104,190: Widthwise adjustment mechanism 106,194: Second adjustment mechanism supplementary explanation

[0066] In the first adjustment mechanism, when the first direction is an orthogonal vertical direction intersecting the approaching / separating direction, the first movable member is a vertical direction movable member movable in the vertical direction, and the second holding member is a vertical direction holding member that holds the vertical direction movable member relatively movably in the vertical direction, the first adjustment mechanism can be called a vertical direction position adjustment mechanism. Also, when the first direction is a width direction of a movable element that intersects the approaching / separating direction at a right angle and is orthogonal to the vertical direction, the first movable member is a width direction movable member movable in the width direction, and the second holding member is a width direction holding member that holds the width direction movable member relatively movably in the width direction, the first adjustment mechanism can be called a width direction position adjustment mechanism.

[0067] The second adjustment mechanism may be configured such that the second direction is the horizontal direction and adjusts the relative inclination about an axis extending in the horizontal direction, or adjusts the relative inclination about an axis extending in the vertical direction. The axis extending in the horizontal direction corresponds to an axis extending in a direction parallel to the approaching / separating direction, or an axis extending in the width direction of the mover or groove portion perpendicular to the approaching / separating direction.

Claims

1. A measuring device that is mounted on a mounting machine that mounts components supplied by a component supplying device onto a circuit board and measures electrical characteristics of the components, comprising: The main body, a mounting table provided on the main body and on which the component is placed; a pair of probes provided on the main body so as to be movable toward and away from each other, for gripping the component placed on the mounting table and measuring electrical characteristics of the component; an adjustment mechanism capable of adjusting a relative positional relationship between the mounting table and at least one of the pair of measuring probes; A measuring device comprising:

2. 2. The measuring device according to claim 1, wherein the adjustment mechanism adjusts at least one of a relative positional relationship between at least one of the pair of measuring elements and the main body and a relative positional relationship between the mounting table and the main body.

3. The mounting table is provided with a groove portion extending in the approaching / separating direction, in which the component is to be mounted, 3. The measuring device according to claim 1, wherein the adjustment mechanism adjusts a relative positional relationship between at least one of the pair of measuring elements and the groove of the mounting table.

4. the pair of probes includes a stator and a movable element that is movable toward and away from the stator, 4. The measuring apparatus according to claim 1, wherein the adjustment mechanism is capable of adjusting a relative positional relationship between the mounting table and the movable element.

5. The measuring device of claim 4, wherein the adjustment mechanism is capable of adjusting one or more of the relative position between the movable element and the mounting table in a direction intersecting the approaching / separating direction, which is the direction in which the movable element approaches and moves away, the relative inclination about an axis parallel to the approaching / separating direction, and the relative inclination about an axis intersecting the approaching / separating direction.

6. the movable member is provided on the main body via a movable member holder so as to be movable in an approaching / separating direction, which is the direction in which the movable member approaches and separates, 6. The measuring device according to claim 5, wherein the adjustment mechanism is provided on the mover holder and is capable of adjusting a relative positional relationship of the mover with respect to the main body.

7. The pair of probes includes a stator and a movable element that is movable toward and away from the stator, the adjustment mechanism includes a first adjustment mechanism that adjusts a relative position of the mover with respect to the main body in a first direction that is a direction intersecting the approaching / separating direction that is the direction in which the mover approaches / separates, The first adjustment mechanism is a first movable member movable in the first direction together with the movable element; a first holding member that holds the first movable member so as to be relatively movable in the first direction; 7. The measuring apparatus according to claim 1, further comprising a first fixing device for fixing the first movable member to the first holding member.

8. The pair of probes includes a stator and a movable element that is movable toward and away from the stator, the adjustment mechanism includes a second adjustment mechanism capable of adjusting a relative inclination of the mover with respect to the main body about an axis line extending in a direction parallel to the approaching / separating direction or an axis line extending in a direction intersecting the approaching / separating direction, The second adjustment mechanism is a second rotating member that is rotatable around the axis line integrally with the movable element; a second holding member that holds the second rotating member so as to be relatively rotatable about the axis; 8. The measuring apparatus according to claim 1, further comprising a second fixing device that fixes the second rotating member to the second holding member.

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