Inspection Equipment

Abstract

This inspection device (10) comprises a plurality of first plungers (110), and a connection part that electrically interconnects at least some first plungers (110) among the plurality of first plungers (110). The inspection device (10) further comprises: a first pin plate (130) that has a plurality of first through holes (132) into which the plurality of first plungers (110) are inserted; and a first conductive pattern (134) that is provided on the first pin plate (130) and electrically interconnects at least some of the first plungers (110).

Description

[Technical field]

[0001] The present invention relates to an inspection device. [Background technology]

[0002] Various inspection devices have been developed for inspecting the characteristics of electronic devices such as integrated circuits (ICs). As described in Patent Document 1, the inspection device includes a plurality of plungers. In Patent Document 1, each plunger includes a tip contact and a columnar portion connected to the tip contact. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2014-25737 A Summary of the Invention [Problem to be solved by the invention]

[0004] As described in Patent Document 1, the inspection device may include a plurality of plungers. In this case, the potential of the plurality of plungers may be commonized by supplying a potential to each plunger via a separate electrical path. However, when such an electrical path is used, the structure of the inspection device may become complicated.

[0005] One object of the present invention is to make the potential of a plurality of plungers common with a simple structure. Other objects of the present invention will become apparent from the description of this specification. [Means for solving the problem]

[0006] One aspect of the present invention is A plurality of plungers; and a connection portion that electrically connects at least some of the plungers to each other. Effect of the Invention

[0007] According to the above-described aspect of the present invention, it is possible to commonize the potential of a plurality of plungers with a simple structure. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a plan view of an inspection device according to an embodiment. [Diagram 2] 2 is a cross-sectional view along the line AA′ of FIG. 1. [Diagram 3] FIG. 2 is a perspective cross-sectional view showing details of the inspection device according to the embodiment. [Figure 4] FIG. 4 is a cross-sectional view for explaining details of a first plunger and a first pin plate. [Diagram 5] 5A to 5C are cross-sectional views for explaining a manufacturing method of the first plunger according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same components are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

[0010] In this specification, ordinal numbers such as "first," "second," and "third" are used merely to distinguish between similarly named configurations, unless otherwise specified, and do not refer to any particular characteristics of the configurations, such as order or importance.

[0011] (Embodiment 1) Fig. 1 is a plan view of the inspection device 10 according to the embodiment 1. Fig. 2 is a cross-sectional view taken along line AA' in Fig. 1. Fig. 3 is a perspective cross-sectional view showing details of the inspection device 10 according to the embodiment 1.

[0012] In Fig. 1, the white circle with a black dot indicating the vertical direction Z indicates that the direction from the back of the paper to the front is the upward direction of the vertical direction Z, and the direction from the front of the paper to the back is the downward direction of the vertical direction Z. In Fig. 2 and Fig. 3, the direction indicated by the arrow indicating the vertical direction Z is the upward direction of the vertical direction Z. Moreover, the opposite direction to the direction indicated by the arrow indicating the vertical direction Z is the downward direction of the vertical direction Z.

[0013] As shown in FIG. 1 and FIG. 2, the inspection device 10 includes a plurality of first elastomers 100 and a frame 150. As shown in FIG. 3, the inspection device 10 further includes a plurality of first plungers 110, a plurality of second plungers 120, a first pin plate 130, and a second pin plate 140. Each of the first plungers 110 includes a first tip contactor 112, a first columnar portion 114, and a first receiving portion 116. Each of the second plungers 120 includes a second tip contactor 122, a second columnar portion 124, and a second receiving portion 126. At least a portion of the first elastomer 100, such as the periphery of a hole 102 described later, a conductive film 104 described later, each of the first plungers 110, and each of the second plungers 120 function as a probe. Each of the first plungers 110 and each of the second plungers 120 is biased in the vertical direction Z by at least a portion of the first elastomer 100, such as the periphery of the hole 102. Note that in Figs. 1 and 2, the hole 102, the conductive film 104, the first plunger 110, the second plunger 120, the first pin plate 130, and the second pin plate 140 shown in Fig. 3 are not shown.

[0014] First, the plurality of first elastomers 100 and the frame 150 will be described with reference to FIGS.

[0015] The frame 150 is made of, for example, metal. The frame 150 defines a plurality of openings 152 arranged in a lattice pattern. A plurality of first elastomers 100 are provided in each of the plurality of openings 152. As a result, each of the first elastomers 100 is supported by the inner edge of the opening 152. The first plunger 110 is supported by the first elastomer 100The frame 150 is located below the first plunger 110 in the vertical direction Z and can be biased downward in the vertical direction Z. In this case, even if a force is applied to the first plunger 110 in the depth direction of the opening 152, i.e., in the vertical direction Z, when the inspection device 10 performs an inspection, the spread of each first elastomer 100 in the planar direction, i.e., in the direction perpendicular to the vertical direction Z, can be suppressed compared to a case in which each first elastomer 100 is not supported by the inner edge of the opening 152. However, the inspection device 10 does not have to be equipped with the frame 150.

[0016] Each of the first elastomers 100 has a sheet shape. In one example, the first elastomers 100 are made of a polymeric material having elasticity, for example, a resin such as silicone or polyimide, or a rubber such as styrene-butadiene rubber (SBR).

[0017] As shown in FIG. 2, the first elastomer 100 has a portion embedded in the opening 152 of the frame 150 (a portion located within the opening 152), a portion exposed from the upper open end of the opening 152 of the frame 150, and a portion exposed from the lower open end of the opening 152 of the frame 150. The width in the left-right direction of the portion of the first elastomer 100 exposed from the upper open end of the opening 152 in the figure is wider than the width in the left-right direction of the upper open end of the opening 152 in the figure. Therefore, it is possible to prevent the portion of the first elastomer 100 exposed from the upper open end of the opening 152 from slipping through the opening 152 to the bottom of the frame 150. The width in the left-right direction of the portion of the first elastomer 100 exposed from the lower open end of the opening 152 in the figure is wider than the width in the left-right direction of the lower open end of the opening 152 in the figure. Therefore, it is possible to prevent the portion of the first elastomer 100 exposed from the lower opening end of the opening 152 from slipping through the opening 152 to the upper side of the frame 150. The first elastomer 100 may not have a portion exposed from the upper opening end of the opening 152 of the frame 150 and a portion exposed from the lower opening end of the opening 152 of the frame 150. Alternatively, the first elastomer 100 may have only one of a portion exposed from the upper opening end of the opening 152 of the frame 150 and a portion exposed from the lower opening end of the opening 152 of the frame 150. Furthermore, the width in the left-right direction in the figure of the portion of the first elastomer 100 exposed from the opening end of the opening 152 may be equal to or smaller than the width in the left-right direction of the opening end of the opening 152 in the figure.

[0018] Next, the first elastomers 100 will be described in detail with reference to FIG.

[0019] The first elastomer 100 defines a plurality of holes 102 extending through the first elastomer 100 along the vertical direction Z.

[0020] A conductive film 104 is formed on the inner wall of each hole 102. In one example, the conductive film 104 includes at least one metal selected from the group consisting of nickel, copper, and gold. For example, the conductive film 104 is a multi-layer film of these metals.

[0021] Each hole 102 is hollow. In this case, compared to a case where the conductive film 104 is formed on the inner wall of the hole 102 and the hole 102 is solid (the hole 102 is filled), the material and process for making the hole 102 solid are not required, and the manufacturing cost of the inspection device 10 can be reduced.

[0022] The first plunger 110 is located below the first elastomer 100. The first plunger 110 overlaps the first elastomer 100 in the vertical direction Z. Specifically, the first plunger 110 overlaps the hole 102 in the vertical direction Z. Therefore, the first plunger 110 can be biased by the first elastomer 100 in a direction away from the second plunger 120, that is, downward. The first plunger 110 is also electrically connected to the conductive film 104. Therefore, the first plunger 110 can be electrically connected to the second plunger 120 via the conductive film 104. If the first plunger 110 does not overlap the hole 102 in the vertical direction Z, it is necessary to provide an electrical path, such as a conductive material embedded in the first elastomer 100 as a separate entity from the conductive film 104, for the first plunger 110 to be electrically connected to the conductive film 104. However, when the first plunger 110 overlaps with the hole 102 in the vertical direction Z, the first plunger 110 can be directly connected to the conductive film 104 without going through an electrical path such as a conductive material embedded in the first elastomer 100. Therefore, compared to the case where the electrical path is provided, materials and processes for manufacturing the electrical path itself are not required, and the manufacturing cost of the inspection device 10 can be reduced. Note that the first plunger 110 may be offset from the hole 102 in a direction perpendicular to the vertical direction Z. Even in this case, the first plunger 110 can be connected to the conductive film 104 through an electrical path such as a conductive material embedded in the first elastomer 100.

[0023] The first tip contact 112 includes a metal, such as at least one selected from the group consisting of rhodium, ruthenium, iridium, tungsten, and tantalum.

[0024] The width of the first tip contactor 112 narrows from the base end to the tip end of the first tip contactor 112. The first tip contactor 112 is a pyramid such as a circular cone or a pyramid, and has a tapered shape from the base end to the tip end of the first tip contactor 112. The tip of the first tip contactor 112 has a flat surface of, for example, 1 μm or more and 20 μm or less. However, the shape of the tip of the first tip contactor 112 is not limited to this example.

[0025] The first columnar section 114 includes a metal, for example, at least one selected from the group consisting of copper and nickel.

[0026] The first columnar portion 114 is connected to the base end of the first tip contact 112. The first tip contact 112 and the first columnar portion 114 may be integral or separate. The height of the first columnar portion 114 is, for example, 5 μm or more and 300 μm or less. The first columnar portion 114 is a columnar body such as a circular cylinder or a rectangular pillar. When the first columnar portion 114 is a cylinder, the diameter of the first columnar portion 114 is, for example, 20 μm or more and 500 μm or less. However, the shape of the first columnar portion 114 is not limited to this example.

[0027] The first receiving portion 116 includes a metal, for example, at least one selected from the group consisting of copper and nickel.

[0028] The first receiving portion 116 is connected to the end of the first columnar portion 114 opposite to the first tip contact 112. The first columnar portion 114 and the first receiving portion 116 may be integral with each other or may be separate bodies. The first receiving portion 116 has a width greater than that of the first columnar portion 114. The thickness of the first receiving portion 116 is, for example, not less than 5 μm and not more than 200 μm. The upper surface of the first receiving portion 116 is flat. However, at least one protrusion may be formed on the upper surface of the first receiving portion 116.

[0029] The first pin plate 130 is made of, for example, polyimide, liquid crystal polymer, a glass substrate, or the like.

[0030] The first pin plate 130 defines a plurality of first through holes 132. A plurality of first plungers 110 are inserted into each of the plurality of first through holes 132. The plurality of first plungers 110 can be arranged at a minute pitch (narrow pitch), for example, not less than 10 μm and not more than 500 μm.

[0031] At least a portion of the first tip contactor 112 is exposed from the lower end of the first through hole 132 of the first pin plate 130. At least a portion of the first columnar portion 114 penetrates the first through hole 132. The first receiving portion 116 is located between the upper surface of the first pin plate 130 and the lower surface of the first elastomer 100. The width of the first receiving portion 116 in the left-right direction in the figure is wider than the width of the first through hole 132 in the left-right direction in the figure. Therefore, the first receiving portion 116 is caught on the peripheral portion of the opening end of the first through hole 132 on the upper surface of the first pin plate 130. In this case, even if the first plunger 110 is urged downward by the first elastomer 100, it is possible to prevent the first receiving portion 116 from slipping out of the first pin plate 130 below through the first through hole 132. Therefore, compared to a case where there is no first receiving portion 116, even if the length of the first plunger 110 (the length of the first columnar portion 114) is shortened, the first plunger 110 is less likely to slip out below the first pin plate 130. The length of the first plunger 110 can be shortened, and the first plunger 110 can be applied to inspections in the high frequency band of 1 GHz or more and 100 GHz or less.

[0032] The second plunger 120 is located above the first elastomer 100. The second plunger 120 overlaps with the first elastomer 100 in the vertical direction Z. Specifically, the second plunger 120 overlaps with the hole 102 in the vertical direction Z. Therefore, the second plunger 120 can be biased by the first elastomer 100 in a direction away from the first plunger 110, that is, upward. The second plunger 120 is electrically connected to the conductive film 104. Therefore, the second plunger 120 can be electrically connected to the first plunger 110 via the conductive film 104. If the second plunger 120 does not overlap with the hole 102 in the vertical direction Z, the second plunger 120 is electrically connected to the conductive film 104, and therefore, an electrical path such as a conductive material embedded in the first elastomer 100 as a separate entity from the conductive film 104 must be provided. However, when the second plunger 120 overlaps with the hole 102 in the vertical direction Z, the second plunger 120 can be directly connected to the conductive film 104 without passing through an electrical path such as a conductive material embedded in the first elastomer 100. Therefore, compared to the case where the electrical path is provided, materials and processes for manufacturing the electrical path itself are not required, and the manufacturing cost of the inspection device 10 can be reduced. Note that the second plunger 120 may be offset from the hole 102 in a direction perpendicular to the vertical direction Z. Even in this case, the second plunger 120 can be connected to the conductive film 104 via an electrical path such as a conductive material embedded in the first elastomer 100.

[0033] The second pin plate 140 defines a plurality of second through holes 142. Similarly to the plurality of first plungers 110 and the first pin plate 130, a plurality of second plungers 120 are inserted into each of the plurality of second through holes 142.

[0034] According to this embodiment, compared to the case where the plunger is biased by a spring, the first elastomer 100 plays the role of the spring's expansion and contraction, and the conductive film 104 plays the role of the spring's conduction. ShortIn order to achieve this, it is necessary to shorten the free length of the spring. However, in this case, it is difficult to obtain a sufficient stroke. In contrast, in this embodiment, there is no need to use a spring. Therefore, compared to the case where the plunger is biased by a spring, it is possible to shorten the natural length of the probe while obtaining a sufficient stroke.

[0035] In this embodiment, the first plunger 110 and the second plunger 120 overlap with the first elastomer 100 in the vertical direction Z. However, the first elastomer 100 and the second plunger 120 may overlap with the first elastomer 100 in a direction different from the vertical direction Z.

[0036] FIG. 4 is a cross-sectional view for explaining the details of the first plunger 110 and the first pin plate 130. As shown in FIG.

[0037] A first conductive pattern 134 is provided on the upper surface of the first pin plate 130. The first conductive pattern 134 is, for example, a metal pattern.

[0038] At least some of the first plungers 110 among the plurality of first plungers 110 are electrically connected to each other via the first conductive pattern 134. The first conductive pattern 134 functions as a connection part. In the example shown in FIG. 4, the two first plungers 110 on the left side in the figure are electrically connected to each other via the first conductive pattern 134 on the left side in the figure. Also, the two first plungers 110 on the right side in the figure are electrically connected to each other via the first conductive pattern 134 on the right side in the figure. On the other hand, the first conductive pattern 134 is not provided on the two first plungers 110 in the center in the figure. This makes it possible to make the potential of the plurality of first plungers 110 electrically connected via the first conductive pattern 134 common. In this case, it is possible to make the potential of the plurality of first plungers 110 common with a simpler structure than when a potential is supplied to each plunger via a separate electrical path.

[0039] For example, a ground potential or a power supply potential is applied to the first conductive pattern 134. As an example, a common ground potential is applied to some of the first plungers 110 among the multiple first plungers 110 via the first conductive pattern 134. On the other hand, a common power supply potential is applied to at least some of the remaining first plungers 110 among the multiple first plungers 110 via other first conductive patterns 134.

[0040] When the first plungers 110 are electrically connected to each other through the first conductive pattern 134 provided on the first pin plate 130, the first plungers 110 to be shared in potential can be arbitrarily selected according to the shape of the first conductive pattern 134. Therefore, for example, it is easier to select the first plungers 110 to be shared in potential compared to the case where the first plungers 110 are electrically connected to each other through a conductive pattern provided on the lower surface of the first elastomer 100. However, the first plungers 110 may be electrically connected to each other through a conductive pattern provided on the first elastomer 100.

[0041] At least a portion of the first receiving portion 116 overlaps with the first conductive pattern 134 on the open end of the first through hole 132 of the first pin plate 130. By inserting the first plunger 110 into the first through hole 132 from the side of the first pin plate 130 where the first conductive pattern 134 is located, the first receiving portion 116 comes into contact with the first conductive pattern 134, and the first plunger 110 can be electrically connected to the first conductive pattern 134.

[0042] In this embodiment, the conductive pattern may be provided only on the first pin plate 130 of the first pin plate 130 and the second pin plate 140. In this case, the cost of the inspection device 10 can be reduced compared to the case where the conductive pattern is provided on both the first pin plate 130 and the second pin plate 140. In addition, when an inspection target of the inspection device 10, such as an electronic device, is placed on the side where the first pin plate 130 is located, it is necessary to prepare various types of conductive patterns on the first pin plate 130 side. In contrast, in the above case, the board of the inspection device 10 is placed on the side where the second pin plate 140 is located, and it is not necessary to form various types of conductive patterns. However, the conductive pattern may be provided on both the first pin plate 130 and the second pin plate 140.

[0043] FIG. 5 is a cross-sectional view for explaining a manufacturing method of the first plunger 110 according to the embodiment.

[0044] A method for manufacturing the first plunger 110 will be described with reference to Fig. 5. The second plunger 120 can be manufactured in the same manner as described below. Fig. 5 shows a normal direction Z1 of the surface of the metal base material 600A on which the recess 602A is formed.

[0045] First, a recess 602A is formed in the metal base 600A. Next, a portion of a first resist film 610 is formed on the metal base 600A. A first opening 612 is provided in the first resist film 610. Next, a first conductive material that will become the first tip contact 112 is formed by plating, thereby filling the recess 602A with the first conductive material. As a result, the first tip contact 112 is formed in the recess 602A.

[0046] Next, the thickness of the first resist film 610 is further increased. Next, a second conductive material that will become the first columnar section 114 is formed by plating, thereby filling the first opening 612 with the second conductive material. As a result, the first columnar section 114 is formed in the first opening 612.

[0047] Next, a first seed layer 116a is formed on the first columnar section 114 and the first resist film 610.

[0048] Next, a second resist film 620 is formed on the first resist film 610. A second opening 622 is provided in the second resist film 620. Next, a third conductive material that becomes the first plating layer 116b is formed by plating, thereby filling the second opening 622 with the third conductive material. As a result, the first receiving portion 116 is formed in the second opening 622.

[0049] Next, the first resist film 610 and the second resist film 620 are removed by, for example, a chemical solution process. Next, the first plunger 110 is removed from the metal base material 600A.

[0050] According to this embodiment, the first tip contactor 112 can be formed using the recess 602A of the metal base material 600A as a mold. The first columnar section 114 can be formed using the first opening 612 of the first resist film 610 as a mold. The first receiving section 116 can be formed using the second opening 622 of the second resist film 620 as a mold. Therefore, the first plunger 110 can be made finer than when the first tip contactor 112 is formed by polishing.

[0051] Although the embodiments of the present invention have been described above with reference to the drawings, these are merely examples of the present invention, and various configurations other than those described above can also be adopted.

[0052] According to the present specification, the following aspects are provided. (Aspect 1) Aspect 1 is A plurality of plungers; and a connection portion that electrically connects at least some of the plungers to each other. According to the first aspect, the plungers are electrically connected to each other to commonize the potential of the plungers. In this case, the potential of the plungers can be commonized with a simpler structure than when potentials are supplied to the individual plungers via separate electrical paths. (Aspect 2) Aspect 2 is a pin plate having a plurality of through holes into which the plurality of plungers are inserted; The inspection device of aspect 1 further includes a conductive pattern provided on the pin plate and electrically connecting at least some of the plungers to each other. According to the second aspect, the plungers to which the potential is to be shared can be arbitrarily selected according to the shape of the conductive pattern. Therefore, for example, it is easier to select the plungers to which the potential is to be shared compared to the case where multiple plungers are electrically connected to each other via the conductive pattern provided on the elastomer. (Aspect 3) Aspect 3 is Each of the plungers has a columnar portion and a receiving portion connected to the columnar portion and having a width greater than a width of the columnar portion, the columnar portion passes through the through hole of the pin plate, 3. The inspection device of claim 2, wherein at least a portion of the receiving portion overlaps the conductive pattern on the open end of the through hole. According to the third aspect, by inserting the plunger into the through hole from the side of the pin plate where the conductive pattern is located, the receiving portion comes into contact with the conductive pattern, and the plunger can be electrically connected to the conductive pattern.

[0053] This application claims priority based on Japanese Patent Application No. 2020-106767, filed on June 22, 2020, the disclosure of which is incorporated herein in its entirety. [Explanation of symbols]

[0054] 10 Inspection equipment 100 First elastomer 102 holes 104 Conductive film 110 First plunger 112 1st tip contact 114 1st columnar part 116 First receiving part 116a First seed layer 116b First plating layer 120 Second plunger 122 2nd tip contact 124 Second columnar part 126 Second receiving part 130 First pin plate 132 First through hole 134 First conductive pattern 140 2nd pin plate 142 Second Through Hole 150 frames 152 Aperture 600A Metallic Substrate 602A Recess 610 First resist film 612 First Opening 620 Second resist film 622 Second Opening Z vertical direction Z1 normal direction

Claims

1. A plurality of plungers; a pin plate having a plurality of through holes into which the plurality of plungers are inserted; a plurality of conductive patterns provided on the pin plate and not electrically connected to each other; Equipped with Each of the plungers has a receiving portion having a width greater than a width of the through hole, At least one of the plurality of conductive patterns electrically connects some of the plungers to each other by contacting the receiving portion and the conductive pattern with each other, An inspection device in which at least one other conductive pattern among the plurality of conductive patterns electrically connects other portions of the plurality of plungers to each other by contacting the receiving portion and the conductive pattern with each other.

2. further comprising a resilient material defining an aperture; A conductive film is formed on the inner wall of the hole, the plunger is electrically connected to the conductive film; The inspection device of claim 1 , wherein the receiving portion is located between the elastic material and the pin plate.

3. The inspection device of claim 2 , wherein the width of the receiving portion is greater than the width of the hole in the elastic material.

4. The plunger further includes a columnar portion connected to one side of the receiving portion, The width of the receiving portion is wider than the width of the columnar portion, the columnar portion passes through the through hole of the pin plate, 4. The inspection device according to claim 1, wherein at least a portion of the receiving portion overlaps with the conductive pattern on an open end of the through hole.

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